JP6628185B2 - Inspection method for transparent objects - Google Patents

Inspection method for transparent objects Download PDF

Info

Publication number
JP6628185B2
JP6628185B2 JP2016047860A JP2016047860A JP6628185B2 JP 6628185 B2 JP6628185 B2 JP 6628185B2 JP 2016047860 A JP2016047860 A JP 2016047860A JP 2016047860 A JP2016047860 A JP 2016047860A JP 6628185 B2 JP6628185 B2 JP 6628185B2
Authority
JP
Japan
Prior art keywords
contaminant
transparent body
size
bubble
luminance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016047860A
Other languages
Japanese (ja)
Other versions
JP2017161435A (en
Inventor
悠吉 新田
悠吉 新田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Priority to JP2016047860A priority Critical patent/JP6628185B2/en
Publication of JP2017161435A publication Critical patent/JP2017161435A/en
Application granted granted Critical
Publication of JP6628185B2 publication Critical patent/JP6628185B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Description

本発明は、ガラス板や樹脂板のような透明体の検査方法に関するものである。   The present invention relates to a method for inspecting a transparent body such as a glass plate or a resin plate.

ガラス板や樹脂板のような透明体の製造工程においては、異物や気泡が透明体中に混入するおそれがある。そして混入した異物や気泡は、透明体が光学部品用途のものである場合、性能低下の要因となる。このために、透明体について、異物や気泡が混入していないかを検査することが求められている。   In the process of manufacturing a transparent body such as a glass plate or a resin plate, foreign substances and bubbles may be mixed into the transparent body. The contaminants and air bubbles cause performance degradation when the transparent body is used for optical components. For this reason, it is required to inspect the transparent body for foreign matter or air bubbles.

一方、混入したものが異物である場合と気泡である場合とでは、両者で光学的な影響が異なるために、検査方法としては両者を区別することができるものが望ましい。   On the other hand, since the optical effect differs between the case where the contaminant is a foreign substance and the case where the contaminant is a bubble, it is desirable that the method be able to distinguish between the two as the inspection method.

そして、このような点に対応した検査方法として、特許文献1に示されたものがある。これは透明体を撮影して得られた画像を2値化するにあたり、丸い気泡についてはリング状の低輝度部分が生じることに鑑み、2値化レベルをリング形状が得られるレベルに設定することで、気泡を識別することができるようにするものである。   As an inspection method corresponding to such a point, there is a method disclosed in Patent Document 1. This is because, when binarizing an image obtained by photographing a transparent body, in consideration of the occurrence of a ring-shaped low-luminance portion for a round bubble, the binarization level should be set to a level at which a ring shape can be obtained. This allows the bubbles to be identified.

特開平8-285789号公報JP-A-8-285789

しかしながら、気泡が常に丸い(球形)ものであるとは限らず、あらかじめ決定した2値化レベルで2値化した時、気泡であるにもかかわらず、異物の場合と区別がつかない2値化情報しか得られなくて、結果的に気泡と異物とを区別することができないことが多々生じる。   However, bubbles are not always round (spherical), and when binarized at a predetermined binarization level, binarization that is indistinguishable from foreign matter despite being bubbles In many cases, only information can be obtained, and as a result, bubbles cannot be distinguished from foreign matters.

本発明は上記問題に鑑みてなされたもので、透明体中に混入した気泡と異物とを区別して検査することを、より確実に行うことができる透明体の検査方法を提供することを課題とする。   The present invention has been made in view of the above problems, and an object of the present invention is to provide a transparent body inspection method that can more reliably perform an inspection while distinguishing bubbles and foreign matter mixed in a transparent body. I do.

本発明にかかる透明体の検査方法は、透明体を撮像した画像を画像処理して透明体中に含まれる混入物を検出する透明体の検査方法において、上記画像処理にあたり、透明体を撮像した画像から、1画素または複数画素からなるセグメント単位で輝度を求め、隣り合うセグメント間の輝度差が大であるときは前記混入物が異物であり、前記輝度差が小であるときは前記混入物が気泡であると判定することに特徴を有している。   In the method for inspecting a transparent body according to the present invention, in the method for inspecting a transparent body which detects an impurity contained in a transparent body by performing image processing on an image of the transparent body, the transparent body is imaged in the image processing. From the image, the luminance is obtained in segment units consisting of one pixel or a plurality of pixels. When the luminance difference between adjacent segments is large, the contaminant is a foreign substance, and when the luminance difference is small, the contaminant is Is characterized in that it is determined to be a bubble.

本発明においては、気泡の大きさや気泡の形状にかかわらず、異物であるか気泡であるかを識別することができるために、透明体中に混入した気泡と異物とを区別して検査することを確実に行うことができる。   In the present invention, irrespective of the size and shape of bubbles, it is possible to identify whether the particles are foreign substances or bubbles. It can be done reliably.

本発明の検査方法を実施するための検査装置の概略を示すブロック図である。It is a block diagram showing the outline of the inspection device for carrying out the inspection method of the present invention. Aは撮像した画像についての説明図、Bはエッジ検出による大きさの検出の説明図、Cはセグメント走査の説明図である。A is an explanatory diagram of a captured image, B is an explanatory diagram of size detection by edge detection, and C is an explanatory diagram of segment scanning. t1,t2,t3,t4の順のセグメント走査の一例の説明図である。FIG. 7 is an explanatory diagram of an example of segment scanning in the order of t1, t2, t3, and t4. Aは輝度差の変化についての折れ線グラフ、Bは輝度差の変化の1次微分値の変化を示すグラフである。A is a line graph showing a change in the luminance difference, and B is a graph showing a change in the primary differential value of the change in the luminance difference. 欠陥か不欠陥であるかの判定結果を示した説明図である。FIG. 9 is an explanatory diagram showing a result of determining whether a defect or a defect is present. 本発明の一実施例についてのフローチャートである。5 is a flowchart for one embodiment of the present invention.

本発明は、透明体を撮像した画像を画像処理して透明体中に含まれる混入物を検出する透明体の検査方法において、上記画像処理にあたり、透明体を撮像した画像から、1画素または複数画素からなるセグメント単位で輝度を求め、隣り合うセグメント間の輝度差が大であるときは前記混入物が異物であり、前記輝度差が小であるときは前記混入物が気泡であると判定する。   The present invention relates to a method for inspecting a transparent body, which performs image processing on an image of a transparent body and detects contaminants contained in the transparent body. The luminance is obtained in segment units composed of pixels. When the luminance difference between adjacent segments is large, it is determined that the contaminant is a foreign substance, and when the luminance difference is small, it is determined that the contaminant is a bubble. .

そして、前記輝度を求める画像処理に加えて、透明体を撮像した画像のエッジ検出を行って混入物の大きさを判定し、この混入物の大小判定と、前記輝度差に基づく異物であるか気泡であるかとの判定とにより、上記混入物が欠陥であるか不欠陥であるかを判定することが好ましい。   Then, in addition to the image processing for obtaining the luminance, the size of the contaminant is determined by performing edge detection of an image of the transparent body, and the size of the contaminant is determined. It is preferable to determine whether the contaminant is defective or non-defective by determining whether the contaminant is a bubble.

また、透明体を撮像した画像のエッジ検出を行って混入物の大きさを判定し、得られた大きさに応じた大きさのセグメント単位で前記輝度を求めるようにしてもよい。   Alternatively, the size of the contaminant may be determined by detecting the edge of an image of the transparent body, and the luminance may be obtained in segment units having a size corresponding to the obtained size.

以下本発明を図示実施例に基づいて詳述すると、図1はいわゆるライトガイドとして形成された樹脂製の透明体1を検査するための検査装置を示しており、面照明によって透明体1を背後から照らす照明器2と、透明体1を透過した光を撮影するCCDカメラ等からなる撮像手段3と、撮像手段3で得られた画像を処理するとともに処理結果から判定処理を行う処理回路4とからなる。この処理回路4としてはコンピュータを好適に用いることができる。   DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the illustrated embodiment. FIG. 1 shows an inspection device for inspecting a resin transparent body 1 formed as a so-called light guide. An illuminator 2 for illuminating the light from above, an imaging unit 3 including a CCD camera or the like for photographing light transmitted through the transparent body 1, a processing circuit 4 for processing an image obtained by the imaging unit 3 and performing a determination process based on the processing result. Consists of As the processing circuit 4, a computer can be suitably used.

透明体1中に混入した混入物5は、異物51の場合と、気泡52の場合とがあるが、これらは上記画像中に図2Aに示すように表れる。なお、気泡52の場合は、一部の光が通過するために、異物51の場合よりも輝度の低下が少ないことを、ここでは異物51を黒塗りとし、気泡52はハッチングとすることで示している。   The contaminant 5 mixed in the transparent body 1 may be a foreign substance 51 or a bubble 52, which appear in the image as shown in FIG. 2A. Note that, in the case of the bubble 52, since a part of light passes through, the decrease in luminance is less than that in the case of the foreign matter 51. Here, the foreign matter 51 is indicated by black coating and the bubble 52 is hatched. ing.

上記処理回路4は、撮像手段3から送られてきた画像の輝度信号をいったん記憶部41に記憶し、ついで記憶した各画素の輝度を図2Bに示すように、x,y方向でそれぞれエッジ検出して混入物5(異物51,気泡52)の大きさSを検出する。この処理に際し、処理回路4は、異物51はもちろん、気泡52も検出することができるエッジ感度(2値化レベル)で大きさの検出を行う。   The processing circuit 4 temporarily stores the luminance signal of the image sent from the imaging unit 3 in the storage unit 41, and then detects the stored luminance of each pixel in the x and y directions as shown in FIG. 2B. Then, the size S of the contaminant 5 (foreign matter 51, bubble 52) is detected. In this process, the processing circuit 4 detects the size with the edge sensitivity (binary level) that can detect not only the foreign matter 51 but also the bubble 52.

そして処理回路4は、上記の大きさ検出結果から、異物51及び気泡52の大きさSが極微小サイズSmin未満であれば、これらは欠陥とせず、極微小サイズSmin以上の場合は、仮欠陥と判定する。   If the size S of the foreign matter 51 and the bubble 52 is smaller than the minute size Smin, the processing circuit 4 does not determine that the foreign matter 51 and the bubble 52 are defective. Is determined.

次いで処理回路4は、この仮欠陥とした異物51及び気泡52について、記憶部41に記憶した各画素の輝度の再走査を行う。ただし、この再走査にあたり、処理回路4は、図2Cに示すように、複数画素の集合をセグメント6として、各セグメント6毎に各セグメント6内の平均輝度値の算出を行う。   Next, the processing circuit 4 performs re-scanning of the luminance of each pixel stored in the storage unit 41 with respect to the foreign matter 51 and the bubble 52 that have been the temporary defects. In this re-scanning, however, the processing circuit 4 calculates an average luminance value in each segment 6 for each segment 6, as shown in FIG.

今、仮欠陥とした混入物5がある領域を、図3に示すようにセグメント6単位でt1,t2,t3,t4で示す順に走査したときの各セグメント6の平均輝度の変化は、図4Aに示すものとなる。ここで線5aは混入物5が異物51であるとき、線5bは混入物5が気泡52であるときを示している。つまり、隣り合うセグメント6間の平均輝度差は、混入物5が異物51であるときは大きく、気泡52であるときは小さい。   Now, as shown in FIG. 3, a change in the average luminance of each segment 6 when the region having the contaminant 5 as a temporary defect is scanned in the order of t1, t2, t3, and t4 in units of segments as shown in FIG. It becomes what is shown in. Here, the line 5a indicates the case where the contaminant 5 is the foreign matter 51, and the line 5b indicates the case where the contaminant 5 is the bubble 52. That is, the average luminance difference between the adjacent segments 6 is large when the contaminant 5 is the foreign substance 51 and is small when the contaminant 5 is the bubble 52.

これは、混入物5の周辺部分の輝度を気泡52と異物51で比較した場合、気泡52と異物51で差は小さい。しかし、混入物5の中心部分は、気泡52の部分は光が通過しやすいため、異物51の部分より輝度が高くなる。そのため、主に混入物5の中心部分を抜き出したt4のときの部分と、主に混入物5の周辺部分を抜き出したt1,t2,t3のときの部分の差が、気泡52より異物51の部分のほうが大きくなることによる。   This is because the difference between the bubble 52 and the foreign matter 51 is small when the brightness of the peripheral portion of the contaminant 5 is compared between the bubble 52 and the foreign matter 51. However, the central portion of the contaminant 5 has a higher luminance than the portion of the foreign matter 51 because light easily passes through the bubble 52. Therefore, the difference between the portion at t4 when the central portion of the contaminant 5 is extracted and the portions at t1, t2 and t3 where the peripheral portion of the contaminant 5 is mainly extracted is due to the foreign matter 51 This is due to the larger part.

従って、図4Bに示すように、走査によるところの平均輝度の変化の1次微分値が所定値Kより大きいときは、仮欠陥が異物51によるものであり、1次微分値が所定値K未満であるときは、仮欠陥が気泡52によるものであると判定することができる。   Therefore, as shown in FIG. 4B, when the primary differential value of the change in the average luminance due to the scanning is larger than the predetermined value K, the temporary defect is caused by the foreign matter 51, and the primary differential value is smaller than the predetermined value K. In the case of, it can be determined that the temporary defect is caused by the bubble 52.

このように、処理回路4は、混入物5が異物51であるか、気泡52であるかを判別することができるために、混入物5が異物51であるときと、混入物5が気泡52であるときとで、欠陥であると決定する際の基準を別に設定することができる。   As described above, since the processing circuit 4 can determine whether the contaminant 5 is the foreign substance 51 or the bubble 52, when the contaminant 5 is the foreign substance 51, The criteria for determining a defect can be set separately between and.

ちなみに図5は仮欠陥とされた混入物5について、左上の混入物5と右上の混入物5は上記判定の結果、共に異物51と判定されたことから欠陥Fとし、右下の混入物5は判定の結果、気泡52と判定されたが大きさSが所定の大きさSmax以上であるために欠陥Fとし、左下の混入物5は判定の結果、気泡52であると判定されるとともに大きさSが所定の大きさSmaxより小さいために非欠陥NFと判定した例を示している。図6に処理回路4で行われる上記の判定動作についてのフローチャートを示す。   Incidentally, FIG. 5 shows that the contaminant 5 which was determined to be a temporary defect is a defect F because the upper left contaminant 5 and the upper right contaminant 5 were both determined to be foreign matter 51 as a result of the above-mentioned determination, and the lower right contaminant 5 was determined. Is determined to be a bubble 52 as a result of the determination, but is determined to be a defect F because the size S is equal to or larger than the predetermined size Smax, and the contaminant 5 at the lower left is determined to be the bubble 52 as a result of the determination, and An example is shown in which the value S is smaller than the predetermined size Smax and thus is determined as a non-defective NF. FIG. 6 shows a flowchart of the above-described determination operation performed by the processing circuit 4.

なお、混入物5の大きさをエッジ検出で行う段階で、混入物5(異物51及び気泡52)の大きさSが所定の大きさSmax以上であれば、処理回路4がこれらをすべて欠陥として処理してしまい、大きさSmax以上の混入物5に対しては輝度差に基づく処理をスキップしてしまうようにしてもよい。   At the stage where the size of the contaminant 5 is determined by edge detection, if the size S of the contaminant 5 (the foreign matter 51 and the bubble 52) is equal to or larger than a predetermined size Smax, the processing circuit 4 regards all of them as defects. The processing based on the luminance difference may be skipped for the contaminant 5 having a size equal to or larger than Smax.

また、極微小サイズSmin未満の混入物5は、前述のエッジ検出の段階におけるエッジ感度の調整によって検出しないようにしてもよい。   In addition, the contaminant 5 having a size smaller than the extremely small size Smin may not be detected by adjusting the edge sensitivity in the above-described edge detection stage.

ここで、複数画素の集合としてのセグメント6の大きさは、前記サイズSminの大きさと、前記所定値Kとの関係から決定している。このほか、前記のエッジ検出によって得られた混入物5のサイズに応じて、セグメントの大きさを変化させてもよい。   Here, the size of the segment 6 as a set of a plurality of pixels is determined from the relationship between the size of the size Smin and the predetermined value K. In addition, the size of the segment may be changed according to the size of the contaminant 5 obtained by the edge detection.

ところで、図3に示すセグメント6の走査においては、セグメントサイズ>セグメント移動量とすることで、一部の画素を隣り合うセグメント6,6で重複させている。これは分解能を高めるためであるが、セグメントサイズ=セグメント移動量としてもよく、セグメントサイズ<セグメント移動量として計算速度の向上を図るようにしてもよい。   By the way, in the scanning of the segment 6 shown in FIG. 3, some pixels are overlapped by the adjacent segments 6 and 6 by setting segment size> segment moving amount. Although this is to increase the resolution, the segment size may be set equal to the segment moving amount, or the segment size may be set to be smaller than the segment moving amount to improve the calculation speed.

いずれにしても、複数画素の集合としてのセグメント6内の平均輝度を基に気泡52であるか異物51であるかを検出するために、エッジ感度(2値化レベル)の調整で気泡52を区別するようにしていた従来例に比して、気泡52の大きさや気泡52の形状にかかわらず、異物51であるか気泡52であるかを識別することができる。   In any case, in order to detect whether the bubble 52 or the foreign matter 51 is based on the average luminance in the segment 6 as a set of a plurality of pixels, the bubble 52 is adjusted by adjusting the edge sensitivity (binary level). Compared to the conventional example in which the bubble 52 is distinguished, it is possible to distinguish the foreign matter 51 or the bubble 52 regardless of the size and the shape of the bubble 52.

なお、上記の極微小サイズSmin未満の混入物5についても、異物51であるか気泡52であるかを判定する必要がある場合、セグメント=1画素であってもよい。この場合は隣接する画素間の輝度差を基に異物51と気泡52とを識別することになる。   If it is necessary to determine whether the contaminant 5 having a size smaller than the extremely small size Smin is the foreign matter 51 or the bubble 52, the segment may be one pixel. In this case, the foreign matter 51 and the bubble 52 are identified based on the luminance difference between adjacent pixels.

1 透明体
2 照明器
3 撮像手段
4 処理回路
5 混入物
6 セグメント
51 異物
52 気泡
DESCRIPTION OF SYMBOLS 1 Transparent body 2 Illuminator 3 Imaging means 4 Processing circuit 5 Contaminant 6 Segment 51 Foreign material 52 Air bubble

Claims (2)

透明体を撮像した画像を画像処理して透明体中に含まれる混入物を検出する透明体の検査方法であって、
上記画像処理にあたり、透明体を撮像した画像から、1画素または複数画素からなるセグメント単位で輝度を求め、隣り合うセグメント間の輝度差が大であるときは前記混入物が異物であり、前記輝度差が小であるときは前記混入物が気泡であると判定する方法であり、
透明体を撮像した画像のエッジ検出を行って混入物の大きさを判定し、得られた大きさに応じた大きさのセグメント単位で前記輝度を求めることを特徴とする透明体の検査方法。
A method for inspecting a transparent body that detects contaminants contained in the transparent body by performing image processing on an image of the transparent body,
In the image processing, the luminance is obtained in segments each consisting of one pixel or a plurality of pixels from an image obtained by capturing the transparent body, and when the luminance difference between adjacent segments is large, the contaminant is a foreign substance, and when the difference is small is a method of determining the said contaminant is an air bubble,
A method of inspecting a transparent body , comprising detecting an edge of an image of a transparent body, determining the size of a contaminant, and obtaining the luminance in segment units having a size corresponding to the obtained size .
前記輝度を求める画像処理に加えて、透明体を撮像した画像のエッジ検出を行って混入物の大きさを判定し、この混入物の大小判定と、前記輝度差に基づく異物であるか気泡であるかとの判定とにより、上記混入物が欠陥であるか不欠陥であるかを判定することを特徴とする請求項1記載の透明体の検査方法 In addition to the image processing for obtaining the luminance, the size of the contaminant is determined by performing edge detection of an image of the transparent body, and the size of the contaminant is determined. 2. The method for inspecting a transparent body according to claim 1, wherein whether the contaminant is a defect or a non-defect is determined by determining whether the contaminant is present .
JP2016047860A 2016-03-11 2016-03-11 Inspection method for transparent objects Active JP6628185B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016047860A JP6628185B2 (en) 2016-03-11 2016-03-11 Inspection method for transparent objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016047860A JP6628185B2 (en) 2016-03-11 2016-03-11 Inspection method for transparent objects

Publications (2)

Publication Number Publication Date
JP2017161435A JP2017161435A (en) 2017-09-14
JP6628185B2 true JP6628185B2 (en) 2020-01-08

Family

ID=59856927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016047860A Active JP6628185B2 (en) 2016-03-11 2016-03-11 Inspection method for transparent objects

Country Status (1)

Country Link
JP (1) JP6628185B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108665458B (en) * 2018-05-17 2022-02-01 杭州智谷精工有限公司 Method for extracting and identifying surface defects of transparent body
KR101932381B1 (en) * 2018-06-15 2018-12-24 신용일 Method for filling aerosol product container
KR101932382B1 (en) * 2018-06-15 2018-12-24 신용일 Method for filling aerosol product container

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5022688A (en) * 1973-06-28 1975-03-11
JPH073394B2 (en) * 1992-04-03 1995-01-18 日本アビオニクス株式会社 Foreign material measuring device for transparent members
JPH06235624A (en) * 1992-12-15 1994-08-23 Hitachi Ltd Inspecting method and apparatus for transparent sheet
JPH08285789A (en) * 1995-04-18 1996-11-01 Nippon Sheet Glass Co Ltd Method for determining binarization level in defect detection method
JP2001074666A (en) * 1999-08-31 2001-03-23 Sekisui Chem Co Ltd Foreign matter inspecting apparatus
JP4580122B2 (en) * 2001-05-21 2010-11-10 第一三共株式会社 Detecting foreign matter in liquid
JP4201532B2 (en) * 2001-06-14 2008-12-24 株式会社トーメー Transparent body inspection apparatus and inspection method
JP4254347B2 (en) * 2003-05-27 2009-04-15 パナソニック電工株式会社 Method and apparatus for detecting foreign matter in liquid in container
JP4517826B2 (en) * 2004-11-15 2010-08-04 パナソニック電工株式会社 Liquid level detection method
JP4529728B2 (en) * 2005-02-23 2010-08-25 パナソニック電工株式会社 Method and apparatus for inspecting foreign matter in container
JP4762061B2 (en) * 2006-06-21 2011-08-31 株式会社ミツカングループ本社 Method for inspecting contents of liquid in container, contents inspection device, and method for producing liquid food in container
JP4765890B2 (en) * 2006-10-19 2011-09-07 株式会社デンソー Foreign object detection device
JP5619348B2 (en) * 2008-11-21 2014-11-05 住友化学株式会社 Mold sheet inspection system
IT1402103B1 (en) * 2010-10-08 2013-08-28 Università Di Pisa METHOD AND DEVICE TO DETECT THE GEOMETRIC POSITION OF A DEFECT IN AN OBJECT

Also Published As

Publication number Publication date
JP2017161435A (en) 2017-09-14

Similar Documents

Publication Publication Date Title
US8472697B2 (en) Method and apparatus for visual inspection
KR101192053B1 (en) Apparatus and method for detecting semiconductor substrate anomalies
JP2004012325A (en) Method and apparatus for inspection of defect
US20140043467A1 (en) Defect inspection apparatus
JP2009293999A (en) Wood defect detector
JP6628185B2 (en) Inspection method for transparent objects
JP5088165B2 (en) Defect detection method and defect detection apparatus
JP4910128B2 (en) Defect inspection method for object surface
JP2005121546A (en) Defect inspection method
CN112666175B (en) Foreign matter inspection device and foreign matter inspection method
JP2008014842A (en) Method and apparatus for detecting stain defects
JP2005106725A (en) Method and apparatus for visual inspection of object to be inspected
JP5257063B2 (en) Defect detection method and defect detection apparatus
JP6623545B2 (en) Inspection system, inspection method, program, and storage medium
JP5239275B2 (en) Defect detection method and defect detection apparatus
JP2008171142A (en) Spot defect detection method and device
JP2011153874A (en) Apparatus, system and method for visual inspection
JP3870208B2 (en) Image processing method and inspection apparatus
WO2015159352A1 (en) Web inspection device, web inspection method, and web inspection program
JP4967132B2 (en) Defect inspection method for object surface
JP2021015035A (en) Image inspection method and image inspection device for image display device
JP2004286708A (en) Defect detection apparatus, method, and program
JP2005189167A (en) Bridge inspection device of cap
JP2011064614A (en) Device and method for inspecting circular lens
JP2019060836A (en) Float detector and float detection method of print, inspection device, and inspection method

Legal Events

Date Code Title Description
RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20170124

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20181121

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190814

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190820

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20191015

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20191029

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20191122

R151 Written notification of patent or utility model registration

Ref document number: 6628185

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151