JP6622493B2 - Support device, measuring device, and article manufacturing method - Google Patents

Description

  The present invention relates to a support device, a measuring device, and an article manufacturing method.

  There is a need to increase the size of an optical element such as a lens or a mirror or a splitting element constituting an optical device such as a lens or a mirror in an astronomical / space observation device such as a telescope at an astronomical observatory or an exposure device for a flat panel display. The element has a diameter or diagonal length ranging from 1 to several meters, for example. When a large optical element is thinned for weight reduction, when it is supported, deformation and stress caused by an external force such as gravity increase. As a result, the change in the optical characteristics (for example, wavefront aberration) of the optical element increases. For this reason, an apparatus for supporting a large optical element sets the number and arrangement of the support points so that the deformation and stress of the optical element satisfy an allowable condition. In addition, when measuring the characteristics of optical elements, the reproducibility of the support state, and therefore the reproducibility of deformation and stress generated in the optical elements is high in order to obtain the target characteristics when using the optical elements. Is required.

  Patent Document 1 discloses a support device that supports an optical element by a plurality of support portions, each of which has a variable attitude with respect to the optical element via a rotation mechanism. By initializing the posture of the support portion, reduction of deformation and high reproducibility of the support state are obtained.

Japanese Patent Application Laid-Open No. 2014-181986

  Since the support device of Patent Document 1 includes a rotation mechanism, the rigidity can be reduced as compared with the case of support by a fixed support point that does not include the rotation mechanism. For this reason, the measurement object such as an optical element and the support portion thereof can be significantly affected by vibrations from inside and outside the measurement apparatus. The (local) vibration of the measurement object due to the vibration generally causes a decrease in measurement accuracy. For example, when measuring the shape of an optical element, an error due to vibration can be prominent in a specific (relatively higher) spatial frequency component in the information representing the shape.

  An object of the present invention is to provide a support device that is advantageous in terms of vibration suppression.

One aspect of the present invention includes a plurality of support portions for supporting the object, and a first member rotatable about an axis at least one degree of freedom, the first member of the shaft A second member that supports each of the plurality of support mechanisms, and a plurality of support mechanisms that support the object; and the first member that is included in each of the plurality of support mechanisms. And a vibration damping device that performs vibration damping.

  According to the present invention, for example, a support device that is advantageous in terms of vibration suppression can be provided.

The figure which shows the structural example of the support apparatus which concerns on Embodiment 1. FIG. The figure which shows the structural example of a 2nd member. The figure which shows the specific example of a structure of a support apparatus A diagram showing an example of the arrangement of the damper Diagram showing a configuration example of a vibration damper A diagram illustrating the center of gravity of the rotating part The figure which shows the structural example of the support apparatus which concerns on Embodiment 2. FIG. The figure which shows the structural example of the support apparatus which concerns on Embodiment 3. The figure which shows the structural example of the support apparatus which concerns on Embodiment 4. The figure which shows the structural example of a 2nd member. The figure which shows the specific example of a structure of a support apparatus Diagram illustrating the center of gravity of the rotating part The figure which shows the structural example of the support apparatus which concerns on Embodiment 5. A diagram showing an example of the arrangement of the damper The figure which shows the structural example of the support apparatus which concerns on Embodiment 6. FIG. A diagram showing an example of the arrangement of the damper Diagram showing a configuration example of a measuring device

  Embodiments of the present invention will be described below with reference to the accompanying drawings. Note that, throughout the drawings for explaining the embodiments, in principle (unless otherwise noted), the same members and the like are denoted by the same reference numerals, and repeated description thereof is omitted.

Embodiment 1
FIG. 1 is a diagram illustrating a configuration example of a support device according to the first embodiment. FIG. 1A is a top view of the support device 1. (B) of the figure is a side view of the support device 1 and also shows the gravity direction DG. (C) of the same figure is a side view of the support apparatus 1 in the state which is supporting the target object W. FIG. Here, the support device 1 is mounted on the measurement stage MS of the measurement device M via the mounting substrate 101. Three second members 102 are provided on the mounting substrate 101. The second member 102 supports the first member 103. The second member 102 supports the first member 103 so as to be rotatable about an axis with respect to the mounting substrate 101 in at least one degree of freedom. Here, the first member 103 is rotatable around the axis AX1. Here, a plurality of (here, three) mechanisms each including the first member 103 and the second member 102 are also referred to as a plurality of support mechanisms.

  FIG. 2 is a diagram illustrating a configuration example of the second member. As shown in (a) (front view) and (b) (side view) of the figure, the second member 102 includes a shaft 1021 and a bearing 1022, and thereby the rotation of the first member 103 is performed. Can be made possible. Here, the bearing 1022 is coupled to the mounting substrate 101 via a bearing case 1023. On the other hand, the shaft 1021 is coupled to the first member 103 via the rotating arm 1024. Accordingly, the first member 103 can be rotated with respect to the mounting substrate 101 with extremely low frictional force due to rolling friction of the bearing. Alternatively, the second member 102 includes a uniaxial hinge 1025 as shown in (c) of FIG. 10, whereby the first member 103 is rotatable about the axis with one degree of freedom with respect to the mounting substrate 101. May be supported.

The first member 103 has two support portions 104a and 104b. The two support portions are arranged one by one in each of the two regions of the first member obtained by dividing the plane of the second member 102 along the gravitational direction including the axis AX1. Accordingly, when the object W is supported by a total of six support portions 104 as shown in FIG. 1C, the first member 103 rotates so that the moments about the axis AX1 are balanced (formula (1) )reference). Thus, the three degrees of freedom of the object W, that is, translation in the direction of gravity and rotation around each of the two directions orthogonal to each other and orthogonal to each other can be restrained without excess or deficiency. This is because the first member 103 can be rotated via the second member 102 so that the force (support reaction force) acting on each support portion is balanced. Here, the forces Fa and Fb acting on the two support portions can be determined by the distances La and Lb between the axis AX1 and each support portion. That is, the force (support reaction force) acting on each support portion depending on the distance between the support portion and the shaft is obtained from the following equation (1).
Fa · La = Fb · Lb (1)

  Here, the support part 104 may have a spherical surface as a surface in contact with the object W. Moreover, the support part 104 may be comprised with resin so that the target object W may not be damaged.

  FIG. 3 is a diagram illustrating a specific example of the configuration of the support device. As shown in FIG. 3, the center of gravity CG1 of the first member 103 (the rotated member) is preferably below the axis AX1 in the gravity direction DG. Accordingly, even when the object W is not supported by the first member 103, the posture of the first member 103 (the rotation angle about the axis AX1) can be stabilized. As a result, the reproducibility of the operation of the first member 103 that supports the object, that is, the reproducibility of the support state of the object, is advantageous in terms of the reproducibility of deformation and stress generated in the object (such as an optical element). . Therefore, the center of gravity of the portion of the second member 102 that rotates with respect to the axis AX1, that is, the portion including the first member 103, is disposed below the axis AX1 in the direction of gravity. Here, the first member 103 is suspended from the second member 102 by the suspension part 107. And the support part 104 is arrange | positioned upwards with sufficient distance from the support member 103 in the gravitational direction so that the target object W may not contact the suspension part 107. FIG. The center of gravity CG1 of the rotating part is disposed below the axis AX1 in the direction of gravity. As a result, even when the support device does not support the object, the posture of the rotating part is stabilized, so that the reproducibility of the deformation or stress of the object when the support device supports the object is improved. can do.

  Two mass dampers 105 (dynamic vibration absorbers) are connected to the first member 103 as vibration dampers. In FIG. 1, each mass damper includes a mass member (mass) 105 (105a, 105b) and a spring 106 (106a, 106b). This configuration relates to vibration suppression related to the rotation (rotation) of the entire first member 103 around the axis AX1, or translation in a direction parallel to the gravity direction of the local portion on both sides of the center of gravity of the first member 103. It is advantageous for vibration control. Alternatively, as shown in FIG. 4A, mass dampers (105 c and 106 c) may be connected above the first member 103. Alternatively, as shown in a front view (FIG. 4B) and a top view (FIG. 4C), an annular mass damper (105d, 106d) may be connected to the first member 103. Here, FIG. 4 is a diagram illustrating an arrangement example of the vibration dampers. The configuration in FIG. 4 is advantageous for damping the entire first member 103 in a direction parallel to the direction of gravity.

Here, a non-damped dynamic vibration absorber without attenuation will be described. The mass of the first member 103 is m, the spring constant of the second member 102 is k1, the mass of the mass member 105 is m _d , and the spring constant of the spring 106 is k ₂ . Then, the natural angular frequency ω _n including the first member 103 and the spring that supports the first member 103 and the natural angular frequency ω _d of the dynamic vibration absorber are expressed by Expression (2) and Expression (3), respectively.

  Equations of motion when the external force (excitation force) Psinωt of the angular frequency ω is applied to the first member 103 from the measurement stage MS of the measurement apparatus M are expressed by Equations (4) and (5).

However, _{x 1} is the displacement of the first member 103, _{x 2} is the displacement of the mass member 105. When the static displacement of the first member 103 is denoted by x _st, the amplitude of the forced vibration caused by excitation force can be expressed by Equation (6) through (8).

From equation (6), when ω _d = ω, the displacement of the first member 103 is zero. Here, if the natural angular frequency ω _{n of the} system composed of the first member and its spring and the natural angular frequency ω _{d of the} dynamic vibration absorber are set to be ωn = ωd, the equations (2) and (3 ) To obtain equation (9). Furthermore, Expression (10) is obtained from Expression (6) and Expression (8).
k2 / k1 = m _d / m (9)

That is, when ω _d = ω, | x ₁ / x _st | = 0, and the first member is stationary. Therefore, the mass _{m d} and the spring constant _{k 2} of the mass member 105 (105a, 105b) is set to satisfy the equation (9). Further, the moment around the axis AX1 is expressed as shown in Expression (11).
Fa · La + m _d a · g · la = Fb · Lb + m _d b · g · lb (11)

Here, g is a gravity constant (gravity acceleration). In the simplest case, the two mass members have the same mass (m _d a = m _d b) and satisfy the condition of the expression (11) if the distance in the horizontal direction from the axis AX1 is equal to each other. This condition is that the arrangement of the mass damper is symmetric with respect to a plane including the axis AX1 and along the direction of gravity, and the moment generated by the mass damper does not change the balance of the moment when the object W is supported.

  Here, FIG. 5 is a diagram illustrating a configuration example of the vibration damper. The mass member 1051 may be connected to the first member by a leaf spring 1061 having a predetermined spring constant, as shown in FIG. Alternatively, as shown in (b) and (c) of the figure, they may be connected by a parallel leaf spring 1062 having a predetermined spring constant. Alternatively, the mass member 1053 may be connected by a coil spring 1063 as shown in FIG.

  Here, it is necessary to avoid reducing the stability of the support device 1 including the first member 103 by connecting the dynamic absorber because the measurement accuracy of the measurement device M may be impaired. Therefore, the center of gravity of the rotating part including the support member 103 does not have to move upward with respect to the axis AX1. Here, FIG. 6 is a diagram illustrating the center of gravity of the rotating portion. Referring to FIG. 6, the dynamic vibration absorbers 1054 and 1064 move the center of gravity of the rotating portion connected to the first member 103 to CG1 ′. Here, since the center of gravity CG1 'is below the original center of gravity CG1, it contributes to the stability of the support device (accuracy of the measuring device).

  In addition, the ratio of the reaction force to the target object W in each support part can be changed by varying the distance between each support part 104 and the axis AX1. For example, when the ratio of the distance between the support part 104a and AX1 and the distance between the support part 104b and AX1 is 2: 1, the ratio of the reaction force when the object does not rotate is 1: 2. Also in this case, the dynamic vibration absorber may be configured so as not to change the moment balance in the first member 103.

  As described above, according to the support device of this embodiment, the object can be damped and supported without reproducibility of the support state of the object.

[Embodiment 2]
FIG. 7 is a diagram illustrating a configuration example of a support device according to the second embodiment. The second embodiment employs an attenuator as a vibration damper. FIG. 4A is a top view of the support device 2. (B) of the figure is a side view of the support device 2 and also shows the direction of gravity DG. (C) of the same figure is a side view of the support apparatus 2 in the state which is supporting the target object W. FIG.

  The support device 2 has two oil dampers (fluid dampers) 207a and 207b as attenuators, and both ends of each oil damper are connected to the first member 203 and the mounting substrate 201, respectively. Here, the oil damper is of a piston / cylinder type, and the difference in oil pressure before and after the piston due to the movement of the piston acts as a resistance force (fluid resistance) against the piston, and the damping of the vibration of the first member 203 against the vibration. It becomes power. This resistance force is generally proportional to the power (power) of the velocity v, although it depends on the configuration of the attenuator. Here, the oil dampers 207 all generate the same level of damping force, and are arranged so as to be symmetrical with respect to a plane including the axis AX1 and along the direction of gravity, as shown in FIG. . Therefore, since the moment balance in the first member 203 is not affected, even if the oil damper is connected, the influence on the reproducibility of the support state of the object can be within an allowable range. In addition, you may provide the attenuator in this embodiment in parallel with the dynamic vibration absorber in the support apparatus in Embodiment 1. FIG.

  As described above, according to the support device according to the present embodiment, the object can be damped and supported without impairing the reproducibility of the support state of the object.

[Embodiment 3]
FIG. 8 is a diagram illustrating a configuration example of a support device according to the third embodiment. Embodiment 3 is another example in which an attenuator is employed as a vibration damper. FIG. 3A is a top view of the support device 3. (B) of the figure is a side view of the support device 3 and also shows the direction of gravity DG. (C) of the same figure is a side view of the support apparatus 3 in the state which is supporting the target object W. FIG.

  The support device 3 has two magnetic dampers 308a and 308b as attenuators. The magnetic damper 308 includes a magnet portion 3081 and a conductor portion 3082. When the magnet portion and the conductor portion move relatively, an eddy current proportional to the relative speed is generated in the conductor portion. The Lorentz force acting on the conductor portion due to this eddy current and the reaction force acting on the magnet portion with respect to the Lorentz force become a resistance force and hinder the relative movement of the two. The magnet part 3081 and the conductor part 3082 may be disposed on the mounting substrate 101 and the first member 103, respectively.

  Here, all the magnetic dampers 308 generate the same level of damping force, and are arranged so as to be symmetric with respect to a plane including the axis AX1 and along the direction of gravity, as shown in FIG. Therefore, since the balance of moments in the first member 103 is not affected, even if the magnetic damper is disposed, the influence on the reproducibility of the support state of the object can be within an allowable range. In addition, you may provide the attenuator in this embodiment in parallel with the dynamic vibration absorber in the support apparatus in Embodiment 1. FIG.

  As described above, according to the support device according to the present embodiment, the object can be damped and supported without impairing the reproducibility of the support state of the object.

[Embodiment 4]
FIG. 9 is a diagram illustrating a configuration example of a support device according to the fourth embodiment. The difference from the first embodiment is that the number of support portions is changed from 6 to 9. FIG. 2A is a top view of the support device 4. (B) of the figure is a side view of the support device 4 and also shows the direction of gravity DG. (C) of the same figure is a side view of the support apparatus 4 in the state in which the target object W is supported. Here, the support device 4 is mounted on the measurement stage MS of the measurement device M via the mounting substrate 101. Three second members 402 are provided on the mounting substrate 101. The second member 402 supports the first member 403. The second member 402 supports the first member 403 with respect to the mounting substrate 101 so as to be rotatable around an axis in two degrees of freedom. Here, the first member 403 can rotate around the axis AX41 and the axis AX42.

  FIG. 10 is a diagram illustrating a configuration example of the second member. The second member 402 includes a shaft 4021 and a bearing 4022, as shown in (a) (front view) and (b) (side view) of the figure, thereby enabling the first member 403 to rotate. sell. Here, the bearings 4022a and 4022b are coupled to the mounting substrate 101 via bearing cases 4023a and 4023b, respectively. On the other hand, bearings 4022c and 4022d are coupled to first member 403 via bearing cases 4023c and 4023d, respectively. Further, the shaft 4021a coupled to the first member 403 is fitted to the bearings 4022a and 4022b, and the shaft 4021b coupled to the mounting substrate 101 is fitted to the bearings 4022c and 4022d, respectively. As a result, the first member 403 can rotate with respect to the mounting substrate 101 with a very low frictional force due to the rolling friction of the bearing. As shown in FIG. 10C, the shaft 4021a and the shaft 4021b may be integrally formed, or as shown in FIG. 10D, the shaft 4021a and the shaft 4021b are combined by a central member 4024. Also good.

  Alternatively, the second member 402 includes a biaxial hinge 4025 as shown in FIG. 10E which is a front view and FIG. 10F which is a side view. The first member 403 may be supported so as to be rotatable in a degree of freedom. Alternatively, as shown in FIG. 5G, the second member 402 includes a universal joint 4027, thereby supporting the first member 403 so as to be rotatable with respect to the mounting substrate 101 in two degrees of freedom. Good. Here, the axis of rotation may be either a physical axis or a virtual axis.

  Each first member 403 has three support portions 404a, 404b, and 404c. At least one of the support portions is disposed in each of two regions including the axis AX41 and obtained by being separated by a plane along the direction of gravity. In addition, at least one is disposed in each of two regions obtained by dividing by a plane including the other axis AX42 and along the direction of gravity. As a result, as shown in FIG. 9C, when the object W is supported by a total of nine support portions 404, the first member 403 is arranged so that the moments around the axes AX41 and AX42 are balanced. It rotates (see formula (12) and formula (13)). Thus, the three degrees of freedom of the object W, that is, translation in the direction of gravity, and rotation around the two directions orthogonal to each other and perpendicular to each other can be restrained without excess or deficiency. This is because the first member 403 can be rotated via the second member 402 so that the force (support reaction force) acting on each support portion is balanced.

At this time, the forces Fa, Fb, and Fc acting on the three support portions (404a, 404b, 404c) can be determined by the distance between each shaft and each support portion. That is, depending on the distance between the support portion and the shaft, the force acting on each support portion (support reaction force) can be obtained from Equation (12) and Equation (13).
Fb · Lb1 = Fc · Lc1 (12)
Fa · La2 = Fb · Lb2 + Fc · Lc2 (13)

  Here, the support portion 404 may have a spherical surface as a surface that contacts the object W. Moreover, the support part 404 may be comprised with resin so that the target object W may not be damaged. FIG. 11 is a diagram illustrating a specific example of the configuration of the support device. As shown in the figure, the center of gravity CG4 of the support member 403 is preferably below the axis AX41 and the axis AX42. This is because the posture of the support member 403 is stabilized with respect to the axis AX41 and the axis AX42 in a state where the object is not supported by the first member 403. If the posture is stabilized, it can be advantageous in terms of reproducibility of deformation or stress of the object in a state where the support device supports the object. Therefore, the center of gravity of the portion of the second member 402 that rotates with respect to the axes AX41 and AX42, that is, the portion including the first member 403, is disposed below the axes AX41 and AX42 in the direction of gravity. Here, the support member 403 is suspended from the second member 402 by the suspension portion 407. The support portion 404 is disposed upward with a sufficient distance from the support member 403 in the direction of gravity so that the object W does not come into contact with the suspension portion 407. The center of gravity CG4 of the rotating portion is disposed below the axes AX41 and AX42 in the direction of gravity. Thereby, even when the support device does not support the support object, the posture of the rotating part is stabilized, and thus the reproducibility of the deformation or stress of the object in a state where the support device supports the object is achieved. Can be improved.

  Three mass dampers (dynamic vibration absorbers) are connected to the first member 403 as a vibration damper. Each mass damper includes a mass member 405 (405a, 405b, 405c) and a spring 406 (406a, 406b, 406c). Each mass damper can be configured to satisfy the relational expressions shown in the equations (2) to (10). Further, the spring 406 constituting the mass damper can be constituted by a leaf spring or a coil spring as in the case of the first embodiment.

  Here, it is necessary to avoid reducing the stability of the support device 4 including the first member 403 by connecting the dynamic vibration absorber because the measurement accuracy of the measurement device M may be impaired. Therefore, the center of gravity of the rotating part including the first member 403 does not have to move upward with respect to the axis AX41 and the axis AX42. Here, FIG. 12 is a diagram illustrating the center of gravity of the rotating portion. Referring to FIG. 12, the dynamic vibration absorber 1054 is connected to the first member 403 and moves the center of gravity of the rotating portion to CG 4 ′. Here, since the center of gravity CG4 'is below the original center of gravity CG4, it contributes to improvement of the stability of the support device (accuracy of the measuring device). In the above description of the present embodiment, an example in which a mass damper (dynamic vibration absorber) is used as a vibration damper has been shown. However, instead of a mass damper, an oil damper as illustrated in the second embodiment or a third embodiment is illustrated. Other vibration dampers such as a magnetic damper may be employed.

  As described above, according to the support device according to the present embodiment, the object can be damped and supported without impairing the reproducibility of the support state of the object.

[Embodiment 5]
FIG. 13 is a diagram illustrating a configuration example of a support device according to the fifth embodiment. The difference from the first embodiment is that the number of support portions is changed from 6 to 12. FIG. 4A is a top view of the support device 5. (B) of the figure is a side view of the support device 5 and also shows the direction of gravity DG. (C) of the same figure is a side view of the support apparatus 5 in the state which is supporting the target object W. FIG. Here, the support device 5 is mounted on the measurement stage MS of the measurement device M via the mounting substrate 101. The mounting substrate 101 is provided with three second members 512 (also referred to as fourth members). The second member 512 includes a member 513 (also referred to as a third member). The member 513 can rotate around the axis AX5 in one degree of freedom with respect to the mounting substrate 501. Similar to the first embodiment, the second member 512 may be configured to include a bearing, or may be configured to be a hinge mechanism including a leaf spring. Or you may be comprised by the fitting part which can be slid.

  The member 513 includes two members 502a and 502b (also referred to as a second member (in a narrow sense)). The two members are arranged one by one in each of two regions obtained by dividing by a plane along the direction of gravity including the axis AX5 of the second member 512. The members 502a and 502b support the first members 503a and 503b so as to be rotatable with respect to the member 513 in one degree of freedom. That is, the first member 503a and the first member 503b can rotate around the axis AX5a of the member 502a and the axis AX5b of the member 502b. The first member 503 has two support portions 504. Thereby, the target object W is supported by 12 support parts. As the configurations of the support portion, the first member, and the second member, the configurations of the support portion, the first member, and the second member shown in the first to fourth embodiments can be appropriately employed. Here, the member 513 (third member) supports a plurality of units each including a first member 503 and a second member 502 (in a narrow sense). Further, the fourth member 512 (in the second member in a broad sense) supports the third member 513 so as to be rotatable around an axis in at least one degree of freedom.

  Each first member 503 is coupled with two mass dampers (mass member 505, spring 506). Each mass damper can be configured to satisfy the relational expressions shown in the equations (2) to (10). The spring 506 may employ a leaf spring or a coil spring as shown in the first embodiment.

  Here, it is necessary to avoid reducing the stability of the support device 5 including the first member 503 by connecting the dynamic vibration absorber because the measurement accuracy of the measurement device M may be impaired. For this reason, the center of gravity of the rotating portion including the first member 503 does not have to move upward with respect to the axis AX5a and the axis AX5b. Since the dynamic vibration absorber is connected to the first member 503 and moves the center of gravity of the rotating portion downward, it contributes to improvement of the stability of the support device (accuracy of the measurement device). Alternatively, as shown in FIG. 14, the mass damper may be alternatively or additionally connected to the member 513. Here, FIG. 14 is a diagram illustrating an arrangement example of the vibration dampers. Also in this case, a mass damper (vibrator) may be connected so that the center of gravity of the rotating portion does not exist above the axis AX5 of the second member 512 so as not to lower the stability of the support device.

  In the above description of the present embodiment, an example in which a mass damper (dynamic vibration absorber) is used as a vibration damper has been shown. However, instead of a mass damper, an oil damper as illustrated in the second embodiment or a third embodiment is illustrated. Other vibration dampers such as a magnetic damper may be employed.

  As described above, according to the support device according to the present embodiment, the object can be damped and supported without impairing the reproducibility of the support state of the object.

[Embodiment 6]
FIG. 15 is a diagram illustrating a configuration example of a support device according to the sixth embodiment. The difference from the fifth embodiment is that the number of support portions is changed from 12 to 27. FIG. 2A is a top view of the support device 6. (B) of the figure is a side view of the support device 6 and also shows the direction of gravity DG. (C) of the same figure is a side view of the support apparatus 6 in the state which is supporting the target object W. FIG.

  Here, the support device 6 is mounted on the measurement stage MS of the measurement device M via the mounting substrate 101. The mounting substrate 101 is provided with three second members 612. The second member 612 is configured to include three members 613. The member 613 can rotate with respect to the mounting substrate 601 in two degrees of freedom. That is, the member 613 can rotate around the axis AX61 and the axis AX62 that pass through the rotation center CR6. Similar to the first embodiment, the second member 612 may include a bearing, or may include a hinge mechanism including a leaf spring. Or you may be comprised by the fitting part which can be slid. Here, in the present embodiment, for the sake of simplicity, the rotation center CR6 is illustrated, but this is to show an example of the second member that supports the first member so that it can be rotated in at least two degrees of freedom. However, the configuration of the second member is not limited.

  The member 613 includes three members 602a, 602b, and 602c. At least one of the three members is disposed in each of two regions obtained by dividing by a plane including the axis AX61 of the second member 612 and along the direction of gravity. In addition, at least one is disposed in each of two regions obtained by dividing by a plane along the direction of gravity including the other axis AX62. Each member 602 supports a corresponding first member 603 with respect to the member 613 so as to be rotatable in two degrees of freedom. Each first member 603 has three support portions 604. The three support portions are arranged in each of two regions obtained by dividing the member 602 by one plane including the axis AX6 of the member 602 and along the direction of gravity. In addition, at least one is arranged in each of two regions obtained by dividing the plane with the other axis AX6 and along the direction of gravity. As a result, as shown in FIG. 15C, the object W is supported by a total of 27 support portions 604. In this case, the first member 603 rotates so that the moments around the axes AX61 and AX62 of the second member 612 and the two axes (for example, AX6a1 and AX6a2) of the member 602 are balanced. Accordingly, the three degrees of freedom of the object W, that is, translation in the direction of gravity, and rotation around the two directions orthogonal to each other and orthogonal to each other can be restrained without excess or deficiency. This is because the first member 603 can be rotated via the second member 612 so that the force (support reaction force) acting on each support portion is balanced. In addition, the structure of a support part, a 1st member, and a 2nd member shown in Embodiment 1 thru | or 5 can be employ | adopted suitably for the structure of a support part, a 1st member, and a 2nd member.

  Each first member 603 is coupled with three mass dampers (mass member 605, spring 606). Each mass damper can be configured to satisfy the relational expressions shown in the equations (2) to (10). Further, the spring 606 may employ a leaf spring or a coil spring as shown in the first embodiment.

  Here, it is necessary to avoid reducing the stability of the support device 6 including the first member 603 by connecting the dynamic vibration absorber because the measurement accuracy of the measurement device M may be impaired. Therefore, the center of gravity of the rotating portion including the first member 603 does not have to move upward with respect to the shaft (for example, AX6a1 and shaft AX6a2). Since the dynamic vibration absorber is connected to the first member 603 and moves the center of gravity of the rotating part downward, it contributes to the improvement of the stability of the support device (accuracy of the measurement device). Alternatively, as shown in FIG. 16, the mass damper may be alternatively or additionally connected to the member 613. Here, FIG. 16 is a diagram illustrating an arrangement example of the vibration dampers. Also in this case, a mass damper (vibrator) may be connected so that the center of gravity of the rotating portion does not exist above the axis AX61 and the axis AX62 of the second member 612 so as not to lower the stability of the support device. .

  In the above description of the present embodiment, an example in which a mass damper (dynamic vibration absorber) is used as a vibration damper has been shown. However, instead of a mass damper, an oil damper as illustrated in the second embodiment or a third embodiment is illustrated. Other vibration dampers such as a magnetic damper may be employed.

  As described above, according to the support device according to the present embodiment, the object can be damped and supported without impairing the reproducibility of the support state of the object.

[Embodiment related to measuring device]
FIG. 17 is a diagram illustrating a configuration of a measurement device including the above-described support device. For example, the measuring device M holds the support device 1 according to the first embodiment on the measurement stage MS, and can support the object W on the support device 1. Further, any of the support devices 2 to 6 according to the second to sixth embodiments may be held on the measurement stage MS. In this measuring device M, the object W supported by the supporting device is measured by the measuring head MH (measuring unit), so that the object is damped without impairing the reproducibility of the supporting state of the object W. It can be measured. Therefore, it is possible to provide a measurement device that is advantageous in terms of measurement accuracy. Various measuring instruments can be used for the measuring head MH regardless of the interferometer method, the contact type or non-contact type of the probe, and the like.

[Embodiment related to article manufacturing method]
The method for manufacturing an article in the present embodiment can be used for manufacturing articles such as various elements such as optical elements or parts. The method for manufacturing an article according to the present embodiment includes a step of measuring the shape or characteristics (such as optical characteristics) of the target object W using the above-described measuring device, and processes the target object based on the measurement (result) in the step. Including the step of. For example, the shape of the object is measured using a measuring device, and the object is processed (processed or manufactured) so that the shape of the object becomes a design value (within an allowable range) based on the measurement result. The method for manufacturing an article according to the present embodiment can measure an object with high accuracy by a measuring device, and therefore is advantageous in at least one of the performance, quality, productivity, and production cost of the article as compared to the conventional method. is there.

  As mentioned above, although preferred embodiment of this invention was described, it cannot be overemphasized that this invention is not limited to these embodiment, A various deformation | transformation and change are possible within the range of the summary.

DESCRIPTION OF SYMBOLS 1 Support apparatus 103 1st member 104 (plural) support part 105 (composing a damper) Mass member 106 (composing a damper) Spring

Claims (10)

A first member having a plurality of support portions for supporting an object and capable of rotating around an axis in at least one degree of freedom , and supporting the first member so as to be rotatable around the axis. A plurality of support mechanisms each including a second member and supporting the object;
A vibration damper coupled to the first member included in each of the plurality of support mechanisms and performing vibration suppression of the first member;
A support device comprising: Support apparatus of claim 1, wherein the rotating the first member about said axis so that a plurality of forces are balanced in the plurality of support portion by the support of the front Symbol object. The at least one vibration damper is coupled to each of the two regions of the support mechanism obtained by being divided by a plane including the axis and along the direction of gravity. or supporting device according to 2.   The support device according to claim 3, wherein the plurality of vibration dampers coupled to at least one of the two regions are arranged symmetrically with respect to the plane.   The plurality of vibration dampers coupled to at least one of each of the two regions are configured to balance a plurality of moments generated around the shaft. 4. The support device according to 3. A third member that supports a plurality of units each including the first member and the second member;
Supporting device according to any one of claims 1 to 5, characterized in that it has a fourth member rotatably supported around an axis at least one degree of freedom of the third member. The damper may support device according to any one of claims 1, characterized in that it comprises a dynamic vibration absorber 6. The damper may support device according to any one of claims 1 to 6, characterized in that it comprises an attenuator. A support device according to any one of claims 1 to 8 ,
A measurement unit for measuring an object supported by the support device;
A measuring device comprising: A step of measuring an object using the measuring device according to claim 9 ;
Processing the object based on the measurement performed in the step;
An article manufacturing method comprising: