JP6594468B2 - Photosensitive resin composition, dry film, cured product, and printed wiring board - Google Patents
Photosensitive resin composition, dry film, cured product, and printed wiring board Download PDFInfo
- Publication number
- JP6594468B2 JP6594468B2 JP2018034777A JP2018034777A JP6594468B2 JP 6594468 B2 JP6594468 B2 JP 6594468B2 JP 2018034777 A JP2018034777 A JP 2018034777A JP 2018034777 A JP2018034777 A JP 2018034777A JP 6594468 B2 JP6594468 B2 JP 6594468B2
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- JP
- Japan
- Prior art keywords
- photosensitive resin
- resin composition
- film
- epoxy
- carboxyl group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011342 resin composition Substances 0.000 title claims description 63
- 229920005989 resin Polymers 0.000 claims description 55
- 239000011347 resin Substances 0.000 claims description 55
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims description 42
- 229920000647 polyepoxide Polymers 0.000 claims description 39
- 239000003822 epoxy resin Substances 0.000 claims description 38
- 239000003086 colorant Substances 0.000 claims description 32
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 claims description 26
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 claims description 19
- 125000003700 epoxy group Chemical group 0.000 claims description 17
- 239000000178 monomer Substances 0.000 claims description 13
- 239000003999 initiator Substances 0.000 claims description 6
- 239000006229 carbon black Substances 0.000 claims description 5
- 239000010408 film Substances 0.000 description 51
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 29
- -1 3,4-epoxycyclohexyl Chemical group 0.000 description 20
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 20
- 239000003795 chemical substances by application Substances 0.000 description 19
- 239000000049 pigment Substances 0.000 description 18
- 150000001875 compounds Chemical class 0.000 description 17
- 238000000576 coating method Methods 0.000 description 16
- 239000000203 mixture Substances 0.000 description 16
- 239000010410 layer Substances 0.000 description 15
- 238000000034 method Methods 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 13
- 238000001723 curing Methods 0.000 description 13
- 238000001035 drying Methods 0.000 description 13
- 238000003860 storage Methods 0.000 description 11
- 239000000463 material Substances 0.000 description 9
- 239000000047 product Substances 0.000 description 9
- 239000004593 Epoxy Substances 0.000 description 8
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 8
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 8
- 150000008065 acid anhydrides Chemical class 0.000 description 7
- 239000007864 aqueous solution Substances 0.000 description 7
- 239000003960 organic solvent Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 7
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 239000000945 filler Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 5
- 239000003513 alkali Substances 0.000 description 5
- 150000004056 anthraquinones Chemical class 0.000 description 5
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 5
- 239000003208 petroleum Substances 0.000 description 5
- 150000007519 polyprotic acids Polymers 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 4
- 238000013329 compounding Methods 0.000 description 4
- 229920001577 copolymer Polymers 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000013039 cover film Substances 0.000 description 4
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 4
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- 239000004744 fabric Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 150000002762 monocarboxylic acid derivatives Chemical class 0.000 description 4
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 4
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 229920006395 saturated elastomer Polymers 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 235000000126 Styrax benzoin Nutrition 0.000 description 3
- 244000028419 Styrax benzoin Species 0.000 description 3
- 235000008411 Sumatra benzointree Nutrition 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001298 alcohols Chemical class 0.000 description 3
- 125000000751 azo group Chemical group [*]N=N[*] 0.000 description 3
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 3
- 239000000460 chlorine Substances 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 235000019382 gum benzoic Nutrition 0.000 description 3
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- BOCJQSFSGAZAPQ-UHFFFAOYSA-N 1-chloroanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2Cl BOCJQSFSGAZAPQ-UHFFFAOYSA-N 0.000 description 2
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 2
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 2
- FDSUVTROAWLVJA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol;prop-2-enoic acid Chemical compound OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OC(=O)C=C.OCC(CO)(CO)COCC(CO)(CO)CO FDSUVTROAWLVJA-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- QIGBRXMKCJKVMJ-UHFFFAOYSA-N Hydroquinone Chemical compound OC1=CC=C(O)C=C1 QIGBRXMKCJKVMJ-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- MPIAGWXWVAHQBB-UHFFFAOYSA-N [3-prop-2-enoyloxy-2-[[3-prop-2-enoyloxy-2,2-bis(prop-2-enoyloxymethyl)propoxy]methyl]-2-(prop-2-enoyloxymethyl)propyl] prop-2-enoate Chemical compound C=CC(=O)OCC(COC(=O)C=C)(COC(=O)C=C)COCC(COC(=O)C=C)(COC(=O)C=C)COC(=O)C=C MPIAGWXWVAHQBB-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000001476 alcoholic effect Effects 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- UMLWXYJZDNNBTD-UHFFFAOYSA-N alpha-dimethylaminoacetophenone Natural products CN(C)CC(=O)C1=CC=CC=C1 UMLWXYJZDNNBTD-UHFFFAOYSA-N 0.000 description 2
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 229910000410 antimony oxide Inorganic materials 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- MYONAGGJKCJOBT-UHFFFAOYSA-N benzimidazol-2-one Chemical compound C1=CC=CC2=NC(=O)N=C21 MYONAGGJKCJOBT-UHFFFAOYSA-N 0.000 description 2
- 229960002130 benzoin Drugs 0.000 description 2
- 239000012965 benzophenone Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004305 biphenyl Substances 0.000 description 2
- 235000010290 biphenyl Nutrition 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229920006026 co-polymeric resin Polymers 0.000 description 2
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 2
- DIOQZVSQGTUSAI-UHFFFAOYSA-N decane Chemical compound CCCCCCCCCC DIOQZVSQGTUSAI-UHFFFAOYSA-N 0.000 description 2
- GDVKFRBCXAPAQJ-UHFFFAOYSA-A dialuminum;hexamagnesium;carbonate;hexadecahydroxide Chemical compound [OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[OH-].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Mg+2].[Al+3].[Al+3].[O-]C([O-])=O GDVKFRBCXAPAQJ-UHFFFAOYSA-A 0.000 description 2
- 125000000664 diazo group Chemical group [N-]=[N+]=[*] 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 2
- 229910001701 hydrotalcite Inorganic materials 0.000 description 2
- 229960001545 hydrotalcite Drugs 0.000 description 2
- 239000012948 isocyanate Substances 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- PIJPYDMVFNTHIP-UHFFFAOYSA-L lead sulfate Chemical compound [PbH4+2].[O-]S([O-])(=O)=O PIJPYDMVFNTHIP-UHFFFAOYSA-L 0.000 description 2
- 230000000670 limiting effect Effects 0.000 description 2
- 229910001507 metal halide Inorganic materials 0.000 description 2
- 150000005309 metal halides Chemical class 0.000 description 2
- NYGZLYXAPMMJTE-UHFFFAOYSA-M metanil yellow Chemical group [Na+].[O-]S(=O)(=O)C1=CC=CC(N=NC=2C=CC(NC=3C=CC=CC=3)=CC=2)=C1 NYGZLYXAPMMJTE-UHFFFAOYSA-M 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
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- 150000002921 oxetanes Chemical class 0.000 description 2
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 2
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical class N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 229920000573 polyethylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- UOHMMEJUHBCKEE-UHFFFAOYSA-N prehnitene Chemical compound CC1=CC=C(C)C(C)=C1C UOHMMEJUHBCKEE-UHFFFAOYSA-N 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000000454 talc Substances 0.000 description 2
- 229910052623 talc Inorganic materials 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000012463 white pigment Substances 0.000 description 2
- 238000004383 yellowing Methods 0.000 description 2
- CKGKXGQVRVAKEA-UHFFFAOYSA-N (2-methylphenyl)-phenylmethanone Chemical compound CC1=CC=CC=C1C(=O)C1=CC=CC=C1 CKGKXGQVRVAKEA-UHFFFAOYSA-N 0.000 description 1
- WXPWZZHELZEVPO-UHFFFAOYSA-N (4-methylphenyl)-phenylmethanone Chemical compound C1=CC(C)=CC=C1C(=O)C1=CC=CC=C1 WXPWZZHELZEVPO-UHFFFAOYSA-N 0.000 description 1
- XKSUVRWJZCEYQQ-UHFFFAOYSA-N 1,1-dimethoxyethylbenzene Chemical compound COC(C)(OC)C1=CC=CC=C1 XKSUVRWJZCEYQQ-UHFFFAOYSA-N 0.000 description 1
- MSAHTMIQULFMRG-UHFFFAOYSA-N 1,2-diphenyl-2-propan-2-yloxyethanone Chemical compound C=1C=CC=CC=1C(OC(C)C)C(=O)C1=CC=CC=C1 MSAHTMIQULFMRG-UHFFFAOYSA-N 0.000 description 1
- QWQFVUQPHUKAMY-UHFFFAOYSA-N 1,2-diphenyl-2-propoxyethanone Chemical compound C=1C=CC=CC=1C(OCCC)C(=O)C1=CC=CC=C1 QWQFVUQPHUKAMY-UHFFFAOYSA-N 0.000 description 1
- LAVARTIQQDZFNT-UHFFFAOYSA-N 1-(1-methoxypropan-2-yloxy)propan-2-yl acetate Chemical compound COCC(C)OCC(C)OC(C)=O LAVARTIQQDZFNT-UHFFFAOYSA-N 0.000 description 1
- FUWDFGKRNIDKAE-UHFFFAOYSA-N 1-butoxypropan-2-yl acetate Chemical compound CCCCOCC(C)OC(C)=O FUWDFGKRNIDKAE-UHFFFAOYSA-N 0.000 description 1
- ZIKLJUUTSQYGQI-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxypropoxy)propane Chemical compound CCOCC(C)OCC(C)OCC ZIKLJUUTSQYGQI-UHFFFAOYSA-N 0.000 description 1
- LIPRQQHINVWJCH-UHFFFAOYSA-N 1-ethoxypropan-2-yl acetate Chemical compound CCOCC(C)OC(C)=O LIPRQQHINVWJCH-UHFFFAOYSA-N 0.000 description 1
- 239000012956 1-hydroxycyclohexylphenyl-ketone Substances 0.000 description 1
- BGJQNPIOBWKQAW-UHFFFAOYSA-N 1-tert-butylanthracene-9,10-dione Chemical compound O=C1C2=CC=CC=C2C(=O)C2=C1C=CC=C2C(C)(C)C BGJQNPIOBWKQAW-UHFFFAOYSA-N 0.000 description 1
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical group C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 1
- CERJZAHSUZVMCH-UHFFFAOYSA-N 2,2-dichloro-1-phenylethanone Chemical compound ClC(Cl)C(=O)C1=CC=CC=C1 CERJZAHSUZVMCH-UHFFFAOYSA-N 0.000 description 1
- GIMQKKFOOYOQGB-UHFFFAOYSA-N 2,2-diethoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OCC)(OCC)C(=O)C1=CC=CC=C1 GIMQKKFOOYOQGB-UHFFFAOYSA-N 0.000 description 1
- KWVGIHKZDCUPEU-UHFFFAOYSA-N 2,2-dimethoxy-2-phenylacetophenone Chemical compound C=1C=CC=CC=1C(OC)(OC)C(=O)C1=CC=CC=C1 KWVGIHKZDCUPEU-UHFFFAOYSA-N 0.000 description 1
- BRKORVYTKKLNKX-UHFFFAOYSA-N 2,4-di(propan-2-yl)thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C(C)C)=CC(C(C)C)=C3SC2=C1 BRKORVYTKKLNKX-UHFFFAOYSA-N 0.000 description 1
- LCHAFMWSFCONOO-UHFFFAOYSA-N 2,4-dimethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC(C)=C3SC2=C1 LCHAFMWSFCONOO-UHFFFAOYSA-N 0.000 description 1
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 1
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- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
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- 125000001624 naphthyl group Chemical group 0.000 description 1
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- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
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- 229920001296 polysiloxane Polymers 0.000 description 1
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- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
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- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- FYNROBRQIVCIQF-UHFFFAOYSA-N pyrrolo[3,2-b]pyrrole-5,6-dione Chemical compound C1=CN=C2C(=O)C(=O)N=C21 FYNROBRQIVCIQF-UHFFFAOYSA-N 0.000 description 1
- 239000001062 red colorant Substances 0.000 description 1
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- 239000010703 silicon Substances 0.000 description 1
- 239000002893 slag Substances 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- LJFWQNJLLOFIJK-UHFFFAOYSA-N solvent violet 13 Chemical compound C1=CC(C)=CC=C1NC1=CC=C(O)C2=C1C(=O)C1=CC=CC=C1C2=O LJFWQNJLLOFIJK-UHFFFAOYSA-N 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
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- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical group S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 150000003553 thiiranes Chemical class 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- KUAZQDVKQLNFPE-UHFFFAOYSA-N thiram Chemical compound CN(C)C(=S)SSC(=S)N(C)C KUAZQDVKQLNFPE-UHFFFAOYSA-N 0.000 description 1
- 229960002447 thiram Drugs 0.000 description 1
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- 125000003258 trimethylene group Chemical group [H]C([H])([*:2])C([H])([H])C([H])([H])[*:1] 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 239000006097 ultraviolet radiation absorber Substances 0.000 description 1
- 235000015112 vegetable and seed oil Nutrition 0.000 description 1
- 239000008158 vegetable oil Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
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- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
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Landscapes
- Materials For Photolithography (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Description
本発明は、感光性樹脂組成物、ドライフィルム、硬化物およびプリント配線板に関し、詳しくは、解像性、保存安定性に優れる感光性樹脂組成物、該組成物からなる樹脂層を有するドライフィルム、該組成物または該ドライフィルムの樹脂層の硬化物、および、該硬化物を有するプリント配線板に関する。 The present invention relates to a photosensitive resin composition, a dry film, a cured product, and a printed wiring board, and more specifically, a photosensitive resin composition excellent in resolution and storage stability, and a dry film having a resin layer made of the composition. The invention relates to a cured product of the resin layer of the composition or the dry film, and a printed wiring board having the cured product.
近年の半導体部品の急速な進歩により、電子機器は小型軽量化、高性能化、多機能化される傾向にある。この傾向に追従して、プリント配線板においても、高密度化、部品の表面実装化が進みつつある。高密度プリント配線板の製造においては、ソルダーレジスト層等の形成に用いる感光性樹脂組成物が開発されている。これらの中でも、環境問題への配慮から、現像液として希アルカリ水溶液を用いるアルカリ現像型の感光性樹脂組成物が主流になっており、従来、アルカリ現像性を付与するためにカルボキシル基含有樹脂を用いた組成系が種々提案されている(例えば、特許文献1)。また、さらにエポキシ樹脂を配合し、カルボキシル基とエポキシ基との熱反応を利用して、熱硬化させることによって、硬化物の耐熱性や耐薬品性等の特性の改良が行われている(例えば、特許文献2)。 Due to rapid progress of semiconductor components in recent years, electronic devices tend to be smaller, lighter, higher performance, and multifunctional. Following this trend, printed wiring boards are also becoming increasingly dense and surface-mounted. In the production of high-density printed wiring boards, photosensitive resin compositions used for forming solder resist layers and the like have been developed. Among these, in consideration of environmental problems, an alkali development type photosensitive resin composition using a dilute alkaline aqueous solution as a developing solution has become the mainstream, and conventionally, a carboxyl group-containing resin has been used to impart alkali developability. Various composition systems used have been proposed (for example, Patent Document 1). In addition, the epoxy resin is further blended, and the properties of the cured product, such as heat resistance and chemical resistance, are improved by using a thermal reaction between the carboxyl group and the epoxy group to be cured (for example, Patent Document 2).
感光性樹脂組成物には、用途や目的に応じて着色剤が配合される。しかしながら、着色剤(特に黒色の着色剤)は光吸収性を有することから、光が深部にまで透過することが阻害されてしまうため、また、例えば酸化チタン等の白色の着色剤のように屈折率が高い着色剤を多く含む場合は、露光しても光を反射してしまうため、解像性に改良の余地があった。 In the photosensitive resin composition, a colorant is blended depending on the application and purpose. However, since the colorant (especially black colorant) has light absorptivity, it prevents light from penetrating to the deep part, and is also refracted like a white colorant such as titanium oxide. When many colorants having a high rate are included, the light is reflected even after exposure, so there is room for improvement in resolution.
また、エポキシ樹脂を配合した場合、保存時に硬化反応が進行してしまうことを防ぐため、カルボキシル基含有樹脂を含有する主剤と、エポキシ樹脂を含有する硬化剤とに分けて保存し、使用時にそれらを混合する、いわゆる二液性の感光性樹脂組成物として用いることが多い。しかしながら、二液性の感光性樹脂組成物において、光硬化性を付与または促進するための成分である光硬化性モノマーを、エポキシ樹脂を含有する硬化剤に含めて保存した場合、保存安定性に改良の余地があった。 In addition, when an epoxy resin is blended, in order to prevent the curing reaction from proceeding at the time of storage, the main component containing a carboxyl group-containing resin and a curing agent containing an epoxy resin are stored separately, and they are used during use. Are often used as so-called two-component photosensitive resin compositions. However, in a two-part photosensitive resin composition, when a photocurable monomer that is a component for imparting or accelerating photocurability is contained in a curing agent containing an epoxy resin and stored, the storage stability is improved. There was room for improvement.
そこで本発明の目的は、解像性、保存安定性に優れる感光性樹脂組成物、該組成物からなる樹脂層を有するドライフィルム、該組成物または該ドライフィルムの樹脂層の硬化物、および、該硬化物を有するプリント配線板を提供することにある。 Accordingly, an object of the present invention is to provide a photosensitive resin composition excellent in resolution and storage stability, a dry film having a resin layer made of the composition, a cured product of the composition or the resin layer of the dry film, and It is providing the printed wiring board which has this hardened | cured material.
本発明者は、上記課題を解決すべく鋭意検討した結果、光硬化性モノマーとして、ジペンタエリスリトールヘキサ(メタ)アクリレート、および、ジペンタエリスリトールペンタ(メタ)アクリレートを含有し、ジペンタエリスリトールヘキサ(メタ)アクリレートの含有割合を一定以上とすることによって、上記課題を解決しうることを見出し、本発明を完成するに至った。 As a result of intensive studies to solve the above problems, the present inventor contains dipentaerythritol hexa (meth) acrylate and dipentaerythritol penta (meth) acrylate as photocurable monomers, and dipentaerythritol hexa ( The inventors have found that the above problem can be solved by setting the content ratio of the (meth) acrylate to a certain level or more, and have completed the present invention.
即ち、本発明の感光性樹脂組成物は、(A)カルボキシル基含有樹脂、(B)光重合開始剤、(C)光硬化性モノマー、(D)着色剤、および、(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂を含有する感光性樹脂組成物であって、前記(C)光硬化性モノマーとして、(C−1)ジペンタエリスリトールヘキサ(メタ)アクリレート、および、(C−2)ジペンタエリスリトールペンタ(メタ)アクリレートを含有し、前記(C−1)と(C−2)の総和当たり、前記(C−1)の割合が60質量%以上であることを特徴とするものである。 That is, the photosensitive resin composition of the present invention comprises (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) a photocurable monomer, (D) a colorant, and (E) in one molecule. A photosensitive resin composition containing an epoxy resin having two or more epoxy groups, wherein (C-1) dipentaerythritol hexa (meth) acrylate as the (C) photocurable monomer, and ( C-2) It contains dipentaerythritol penta (meth) acrylate, and the ratio of (C-1) is 60% by mass or more per the sum of (C-1) and (C-2). It is what.
本発明の感光性樹脂組成物は、前記(D)着色剤が、白色着色剤および黒色着色剤の少なくとも何れか一方であることが好ましい。 In the photosensitive resin composition of the present invention, the (D) colorant is preferably at least one of a white colorant and a black colorant.
本発明の感光性樹脂組成物は、少なくとも前記(A)カルボキシル基含有樹脂を含有する主剤と、少なくとも前記(C)光硬化性モノマーおよび前記(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂を含有する硬化剤からなる二液性であることが好ましい。 The photosensitive resin composition of the present invention comprises at least a main component containing (A) a carboxyl group-containing resin, at least (C) a photocurable monomer, and (E) two or more epoxy groups in one molecule. It is preferable that it is two-component which consists of a hardening | curing agent containing the epoxy resin which has.
本発明のドライフィルムは、前記感光性樹脂組成物からなる樹脂層を有することを特徴とするものである。 The dry film of the present invention is characterized by having a resin layer made of the photosensitive resin composition.
本発明の硬化物は、前記感光性樹脂組成物または前記ドライフィルムの樹脂層を熱硬化および光硬化の少なくとも何れか一方によって得られることを特徴とするものである。 The cured product of the present invention is characterized in that the photosensitive resin composition or the resin layer of the dry film is obtained by at least one of thermosetting and photocuring.
本発明のプリント配線板は、前記硬化物を有することを特徴とするものである。 The printed wiring board of this invention has the said hardened | cured material, It is characterized by the above-mentioned.
本発明により、解像性、保存安定性に優れる感光性樹脂組成物、該組成物からなる樹脂層を有するドライフィルム、および、該組成物または該ドライフィルムの樹脂層の硬化物、該硬化物を有するプリント配線板を提供することが可能となる。 According to the present invention, a photosensitive resin composition excellent in resolution and storage stability, a dry film having a resin layer comprising the composition, a cured product of the composition or a resin layer of the dry film, and the cured product It is possible to provide a printed wiring board having
本発明の感光性樹脂組成物は、(A)カルボキシル基含有樹脂、(B)光重合開始剤、(C)光硬化性モノマー、(D)着色剤、および、(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂を含有する感光性樹脂組成物であって、前記(C)光硬化性モノマーとして、(C−1)ジペンタエリスリトールヘキサ(メタ)アクリレート(以下、単に「(C−1)」とも称する)、および、(C−2)ジペンタエリスリトールペンタ(メタ)アクリレート(以下、単に「(C−2)」とも称する)を含有し、前記(C−1)と(C−2)の総和当たり、前記(C−1)の割合が60質量%以上であることを特徴とするものである。このような割合で(C−1)および(C−2)を配合することによって、(D)着色剤を含有するにもかかわらず、解像性に優れる感光性樹脂組成物を得ることができる。さらに、二液性の感光性樹脂組成物とした場合に、少なくとも(C)光硬化性モノマーと(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂とを含有する硬化剤の保存安定性に優れる。ここで、「(メタ)アクリレート」とは、アクリレート、メタクリレートおよびそれらの混合物を総称する用語であり、本明細書における他の類似の表現についても同様である。以下、各成分について詳細に説明する。 The photosensitive resin composition of the present invention comprises (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) a photocurable monomer, (D) a colorant, and (E) 2 in one molecule. A photosensitive resin composition containing an epoxy resin having at least one epoxy group, wherein (C-1) dipentaerythritol hexa (meth) acrylate (hereinafter simply referred to as “( C-1) ”) and (C-2) dipentaerythritol penta (meth) acrylate (hereinafter also simply referred to as“ (C-2) ”), The ratio of (C-1) is 60% by mass or more per total sum of C-2). By blending (C-1) and (C-2) at such a ratio, a photosensitive resin composition having excellent resolution can be obtained in spite of containing the colorant (D). . Further, when a two-component photosensitive resin composition is used, storage of a curing agent containing at least (C) a photocurable monomer and (E) an epoxy resin having two or more epoxy groups in one molecule. Excellent stability. Here, “(meth) acrylate” is a generic term for acrylate, methacrylate, and mixtures thereof, and the same applies to other similar expressions in the present specification. Hereinafter, each component will be described in detail.
[(A)カルボキシル基含有樹脂]
本発明の感光性樹脂組成物は、(A)カルボキシル基含有樹脂を含有する。(A)カルボキシル基含有樹脂としては、公知のカルボキシル基を含む樹脂を用いることができる。カルボキシル基の存在により、樹脂組成物をアルカリ現像性とすることができる。また、本発明の感光性樹脂組成物を光硬化性にすることや耐現像性の観点から、カルボキシル基の他に、分子内にエチレン性不飽和結合を有することが好ましいが、エチレン性不飽和二重結合を有さないカルボキシル基含有樹脂を用いることもできる。エチレン性不飽和二重結合としては、アクリル酸もしくはメタアクリル酸またはそれらの誘導体由来のものが好ましい。
[(A) Carboxyl group-containing resin]
The photosensitive resin composition of the present invention contains (A) a carboxyl group-containing resin. (A) As a carboxyl group-containing resin, a resin containing a known carboxyl group can be used. Due to the presence of the carboxyl group, the resin composition can be rendered alkali developable. Further, from the viewpoint of making the photosensitive resin composition of the present invention photocurable and developing resistance, it is preferable to have an ethylenically unsaturated bond in the molecule in addition to the carboxyl group. A carboxyl group-containing resin having no double bond can also be used. As the ethylenically unsaturated double bond, those derived from acrylic acid, methacrylic acid or derivatives thereof are preferable.
本発明の感光性樹脂組成物に用いることができるカルボキシル基含有樹脂の具体例としては、以下に列挙するような化合物(オリゴマーおよびポリマーのいずれでもよい)が挙げられる。 Specific examples of the carboxyl group-containing resin that can be used in the photosensitive resin composition of the present invention include compounds listed below (any of oligomers and polymers).
(1)(メタ)アクリル酸などの不飽和カルボン酸と、それ以外の不飽和二重結合を有する化合物の1種類以上とを共重合することにより得られるカルボキシル基含有共重合樹脂、
(2)(メタ)アクリル酸などの不飽和カルボン酸と、それ以外の不飽和二重結合を有する化合物の1種類以上との共重合体に、グリシジル(メタ)アクリレートや3,4−エポキシシクロヘキシルメチル(メタ)アクリレートなどのエポキシ基と不飽和二重結合を有する化合物や(メタ)アクリル酸クロライドなどによって、エチレン性不飽和基をペンダントとして付加させることによって得られるカルボキシル基含有感光性樹脂、
(3)グリシジル(メタ)アクリレートや3,4−エポキシシクロヘキシルメチル(メタ)アクリレート等のエポキシ基と不飽和二重結合を有する化合物と、それ以外の不飽和二重結合を有する化合物との共重合体に、(メタ)アクリル酸などの不飽和カルボン酸を反応させ、生成した二級の水酸基に多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂、
(4)無水マレイン酸などの不飽和二重結合を有する酸無水物と、それ以外の不飽和二重結合を有する化合物との共重合体に、2−ヒドロキシエチル(メタ)アクリレートなどの水酸基と不飽和二重結合を有する化合物を反応させて得られるカルボキシル基含有感光性樹脂、
(5)多官能エポキシ化合物と不飽和モノカルボン酸を反応させ、生成した水酸基に飽和または不飽和多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂、
(6)ポリビニルアルコー誘導体などの水酸基含有ポリマーに、飽和または不飽和多塩基酸無水物を反応させた後、生成したカルボン酸に一分子中にエポキシ基と不飽和二重結合を有する化合物を反応させて得られる水酸基およびカルボキシル基含有感光性樹脂、
(7)多官能エポキシ化合物と、不飽和モノカルボン酸と、一分子中に少なくとも1個のアルコール性水酸基と、エポキシ基と反応するアルコール性水酸基以外の1個の反応性基を有する化合物との反応生成物に、飽和または不飽和多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂、
(8)一分子中に少なくとも2個のオキセタン環を有する多官能オキセタン化合物に不飽和モノカルボン酸を反応させ、得られた変性オキセタン樹脂中の第一級水酸基に対して飽和または不飽和多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂、および、
(9)多官能エポキシ樹脂に不飽和モノカルボン酸を反応させた後、多塩基酸無水物を反応させて得られるカルボン酸含有樹脂に、更に、分子中に1個のオキシラン環と1個以上のエチレン性不飽和基を有する化合物を反応させて得られるカルボキシル基含有感光性樹脂などが挙げられるが、これらに限定されるものでは無い。
(1) a carboxyl group-containing copolymer resin obtained by copolymerizing an unsaturated carboxylic acid such as (meth) acrylic acid and one or more other compounds having an unsaturated double bond;
(2) Glycidyl (meth) acrylate or 3,4-epoxycyclohexyl is a copolymer of an unsaturated carboxylic acid such as (meth) acrylic acid and one or more other compounds having an unsaturated double bond. A carboxyl group-containing photosensitive resin obtained by adding an ethylenically unsaturated group as a pendant by a compound having an epoxy group and an unsaturated double bond, such as methyl (meth) acrylate, or (meth) acrylic acid chloride,
(3) Copolymerization of a compound having an unsaturated double bond with an epoxy group such as glycidyl (meth) acrylate or 3,4-epoxycyclohexylmethyl (meth) acrylate, and a compound having an unsaturated double bond other than that A carboxyl group-containing photosensitive resin obtained by reacting an unsaturated carboxylic acid such as (meth) acrylic acid with the coalescence and reacting a polybasic acid anhydride with the generated secondary hydroxyl group,
(4) To a copolymer of an acid anhydride having an unsaturated double bond such as maleic anhydride and a compound having an unsaturated double bond other than that, a hydroxyl group such as 2-hydroxyethyl (meth) acrylate; A carboxyl group-containing photosensitive resin obtained by reacting a compound having an unsaturated double bond,
(5) a carboxyl group-containing photosensitive resin obtained by reacting a polyfunctional epoxy compound with an unsaturated monocarboxylic acid and reacting the generated hydroxyl group with a saturated or unsaturated polybasic acid anhydride,
(6) After reacting a hydroxyl-containing polymer such as a polyvinyl alcohol derivative with a saturated or unsaturated polybasic acid anhydride, the resulting carboxylic acid is reacted with an epoxy group and an unsaturated double bond in one molecule. Hydroxyl group- and carboxyl group-containing photosensitive resin obtained by
(7) a polyfunctional epoxy compound, an unsaturated monocarboxylic acid, at least one alcoholic hydroxyl group in one molecule, and a compound having one reactive group other than an alcoholic hydroxyl group that reacts with an epoxy group A carboxyl group-containing photosensitive resin obtained by reacting a reaction product with a saturated or unsaturated polybasic acid anhydride,
(8) Saturated or unsaturated polybasic with respect to the primary hydroxyl group in the modified oxetane resin obtained by reacting an unsaturated monocarboxylic acid with a polyfunctional oxetane compound having at least two oxetane rings in one molecule. A carboxyl group-containing photosensitive resin obtained by reacting an acid anhydride, and
(9) A carboxylic acid-containing resin obtained by reacting an unsaturated monocarboxylic acid with a polyfunctional epoxy resin and then reacting with a polybasic acid anhydride further contains one oxirane ring and one or more in the molecule. Examples thereof include, but are not limited to, a carboxyl group-containing photosensitive resin obtained by reacting a compound having an ethylenically unsaturated group.
これらの例示の中で好ましいものとしては、上記(2)、(5)および(9)のカルボキシル基含有樹脂であり、特に上記(2)のカルボキシル基含有感光性樹脂が、光硬化性、硬化塗膜特性の面から好ましい。 Among these examples, preferred are the carboxyl group-containing resins of (2), (5) and (9) above. Particularly, the carboxyl group-containing photosensitive resin of (2) is photocurable and cured. It is preferable from the viewpoint of coating film characteristics.
上記のようなカルボキシル基含有樹脂は、バックボーン・ポリマーの側鎖に多数のカルボキシル基を有するため、希アルカリ水溶液による現像が可能になる。
また、上記カルボキシル基含有樹脂の酸価は、20〜200mgKOH/gの範囲が望ましく、より好ましくは40〜150mgKOH/gの範囲である。20〜200mgKOH/gの範囲にあると、塗膜の密着性が得られ、アルカリ現像が容易となり、現像液による露光部の溶解が抑えられ、必要以上にラインが痩せたりせず、また、露光部と未露光部の区別なく現像液で溶解剥離することが抑えられ、正常なレジストパターンの描画が容易となるため好ましい。
Since the carboxyl group-containing resin as described above has many carboxyl groups in the side chain of the backbone polymer, development with a dilute alkaline aqueous solution becomes possible.
The acid value of the carboxyl group-containing resin is desirably in the range of 20 to 200 mgKOH / g, more preferably in the range of 40 to 150 mgKOH / g. When it is in the range of 20 to 200 mgKOH / g, adhesion of the coating film is obtained, alkali development is facilitated, dissolution of the exposed portion by the developer is suppressed, the line does not fade more than necessary, and exposure is performed. It is preferable because dissolution and peeling with a developer can be suppressed without distinction between a part and an unexposed part, and a normal resist pattern can be easily drawn.
また、本発明で用いるカルボキシル基含有樹脂の重量平均分子量は、樹脂骨格により異なるが、1,000〜100,000の範囲が好ましい。当該範囲にあると、タックフリー性能が良好であり、露光後の塗膜の耐湿性が良く、現像時に膜減りが生じにくく、解像度が向上し、現像性が良好であり、貯蔵安定性が良くなる。より好ましくは、2,000〜70,000である。重量平均分子量は、ゲルパーミエーションクロマトグラフィーにより測定することができる。 The weight average molecular weight of the carboxyl group-containing resin used in the present invention varies depending on the resin skeleton, but is preferably in the range of 1,000 to 100,000. When in this range, the tack-free performance is good, the moisture resistance of the coated film after exposure is good, the film is not easily reduced during development, the resolution is improved, the developability is good, and the storage stability is good. Become. More preferably, it is 2,000-70,000. The weight average molecular weight can be measured by gel permeation chromatography.
[(B)光重合開始剤]
本発明の感光性樹脂組成物に含まれる(B)光重合開始剤としては、特に限定されず、公知の光重合開始剤を用いることができる。例えば、ベンゾイン、ベンジル、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインn−プロピルエーテル、ベンゾインイソプロピルエーテル、ベンゾインn−ブチルエーテルなどのベンゾイン類;ベンゾインアルキルエーテル類;ベンゾフェノン、p−メチルベンゾフェノン、ミヒラーズケトン、メチルベンゾフェノン、4,4’−ジクロロベンゾフェノン、4,4’−ビスジエチルアミノベンゾフェノンなどのベンゾフェノン類;アセトフェノン、2,2−ジメトキシ−2−フェニルアセトフェノン、2,2−ジエトキシ−2−フェニルアセトフェノン、1,1−ジクロロアセトフェノン、1−ヒドロキシシクロヘキシルフェニルケトン、2−メチル−1−[4−(メチルチオ)フェニル]−2−モルフォリノ−1−プロパノン、2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)-ブタノン−1、N,N−ジメチルアミノアセトフェノン、2−ヒドロキシ−2−メチル−1−フェニルプロパン−1−オンなどのアセトフェノン類;2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2−クロロチオキサントン、2,4−ジイソプロピルチオキサントンなどのチオキサントン類;アントラキノン、クロロアントラキノン、2−メチルアントラキノン、2−エチルアントラキノン、2−tert−ブチルアントラキノン、1−クロロアントラキノン、2−アミルアントラキノン、2−アミノアントラキノンなどのアントラキノン類;アセトフェノンジメチルケタール、ベンジルジメチルケタールなどのケタール類;エチル−4−ジメチルアミノベンゾエート、2−(ジメチルアミノ)エチルベンゾエート、p−ジメチル安息香酸エチルエステルなどの安息香酸エステル類;1,2−オクタンジオン,1−[4−(フェニルチオ)−,2−(O−ベンゾイルオキシム)]、エタノン,1−[9−エチル−6−(2−メチルベンゾイル)−9H−カルバゾール−3−イル]−,1−(O−アセチルオキシム)などのオキシムエステル類;ビス(η5−2,4−シクロペンタジエン−1−イル)−ビス(2,6−ジフルオロ−3−(1H−ピロール−1−イル)フェニル)チタニウム、ビス(シクロペンタジエニル)−ビス[2,6−ジフルオロ−3−(2−(1−ピリル−1−イル)エチル)フェニル]チタニウムなどのチタノセン類;2,4,6−トリメチルベンゾイルジフェニルホスフィンオキサイド、ビス(2,4,6−トリメチルベンゾイル)−フェニルホスフィンオキサイドなどのアシルホスフィンオキサイド類;ブチロイン、アニソインエチルエーテル、アゾビスイソブチロニトリル、テトラメチルチウラムジスルフィド等を挙げることができる。(B)光重合開始剤は、1種を単独または2種以上を組み合わせて用いることができる。
[(B) Photopolymerization initiator]
It does not specifically limit as (B) photoinitiator contained in the photosensitive resin composition of this invention, A well-known photoinitiator can be used. For example, benzoins such as benzoin, benzyl, benzoin methyl ether, benzoin ethyl ether, benzoin n-propyl ether, benzoin isopropyl ether, benzoin n-butyl ether; benzoin alkyl ethers; benzophenone, p-methylbenzophenone, Michler's ketone, methylbenzophenone, Benzophenones such as 4,4′-dichlorobenzophenone and 4,4′-bisdiethylaminobenzophenone; acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy-2-phenylacetophenone, 1,1-dichloro Acetophenone, 1-hydroxycyclohexyl phenyl ketone, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-1-pro Non, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, N, N-dimethylaminoacetophenone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, etc. Acetophenones; 2,4-dimethylthioxanthone, 2,4-diethylthioxanthone, 2-chlorothioxanthone, thioxanthones such as 2,4-diisopropylthioxanthone; anthraquinone, chloroanthraquinone, 2-methylanthraquinone, 2-ethylanthraquinone, 2 -Anthraquinones such as tert-butylanthraquinone, 1-chloroanthraquinone, 2-amylanthraquinone, 2-aminoanthraquinone; ketals such as acetophenone dimethyl ketal and benzyldimethyl ketal; -Benzoic acid esters such as dimethylaminobenzoate, 2- (dimethylamino) ethylbenzoate, p-dimethylbenzoic acid ethyl ester; 1,2-octanedione, 1- [4- (phenylthio)-, 2- (O- Benzoyloxime)], ethanone, oxime esters such as 1- [9-ethyl-6- (2-methylbenzoyl) -9H-carbazol-3-yl]-, 1- (O-acetyloxime); bis (η5 -2,4-cyclopentadien-1-yl) -bis (2,6-difluoro-3- (1H-pyrrol-1-yl) phenyl) titanium, bis (cyclopentadienyl) -bis [2,6- Titanocenes such as difluoro-3- (2- (1-pyryl-1-yl) ethyl) phenyl] titanium; 2,4,6-trimethylbenzoyldiphe Acylphosphine oxides such as ruphosphine oxide and bis (2,4,6-trimethylbenzoyl) -phenylphosphine oxide; butyroin, anisoin ethyl ether, azobisisobutyronitrile, tetramethylthiuram disulfide, etc. . (B) A photoinitiator can be used individually by 1 type or in combination of 2 or more types.
(B)光重合開始剤の配合量は特に限定されないが、(A)カルボキシル基含有樹脂100質量部に対して、好ましくは0.1〜20質量部、より好ましくは0.3〜15質量部の割合で含まれる。また、本発明の感光性樹脂組成物には、光開始助剤および増感剤を配合することができる。光開始助剤としては、三級アミン類等が挙げられ、増感剤としては、クマリン類等が挙げられる。 (B) Although the compounding quantity of a photoinitiator is not specifically limited, Preferably it is 0.1-20 mass parts with respect to 100 mass parts of (A) carboxyl group-containing resin, More preferably, it is 0.3-15 mass parts. Included in the ratio. Moreover, the photoinitiator and a sensitizer can be mix | blended with the photosensitive resin composition of this invention. Examples of the photoinitiator aid include tertiary amines, and examples of the sensitizer include coumarins.
[(C)光硬化性モノマー]
本発明の感光性樹脂組成物は、前記(C)光硬化性モノマーとして、(C−1)ジペンタエリスリトールヘキサ(メタ)アクリレート、および、(C−2)ジペンタエリスリトールペンタ(メタ)アクリレートを含有し、前記(C−1)と(C−2)の総和当たり、前記(C−1)の割合が60質量%以上で含有する。また、前記(C−1)の割合は、前記(C−1)と(C−2)の総和当たり、99質量%以下であることが好ましい。60〜90質量%の場合、現像性、解像性が良好となるため、より好ましい。
[(C) Photocurable monomer]
The photosensitive resin composition of the present invention comprises (C-1) dipentaerythritol hexa (meth) acrylate and (C-2) dipentaerythritol penta (meth) acrylate as the (C) photocurable monomer. And the ratio of (C-1) per 60% by mass or more per total of (C-1) and (C-2). Further, the ratio of (C-1) is preferably 99% by mass or less per the sum of (C-1) and (C-2). In the case of 60-90 mass%, since developability and resolution become favorable, it is more preferable.
本発明において、前記(C−1)と(C−2)として、市販のジペンタエリスリトールヘキサ(メタ)アクリレートとジペンタエリスリトールペンタ(メタ)アクリレートの混合物を1種または2種以上を混合して用いてもよく、感光性樹脂組成物中に、化合物としてのジペンタエリスリトールヘキサ(メタ)アクリレートを、ジペンタエリスリトールヘキサ(メタ)アクリレートとジペンタエリスリトールペンタ(メタ)アクリレートの総和当たり60質量%以上で含有していればよい。 In the present invention, as (C-1) and (C-2), a mixture of commercially available dipentaerythritol hexa (meth) acrylate and dipentaerythritol penta (meth) acrylate is mixed in one kind or two or more kinds. In the photosensitive resin composition, dipentaerythritol hexa (meth) acrylate as a compound may be used in an amount of 60% by mass or more per sum of dipentaerythritol hexa (meth) acrylate and dipentaerythritol penta (meth) acrylate. As long as it is contained.
前記(C−1)としては、ジペンタエリスリトールヘキサアクリレートが好ましい。前記(C−2)としては、ジペンタエリスリトールペンタアクリレートが好ましい。 As (C-1), dipentaerythritol hexaacrylate is preferable. As (C-2), dipentaerythritol pentaacrylate is preferable.
前記(C−1)および(C−2)の合計量は、(A)カルボキシル基含有樹脂100質量部に対して、10〜70質量部が好ましく、20〜60質量部がより好ましい。また、本発明の感光性樹脂組成物は、本発明の効果を損なわない範囲内で、前記(C−1)および(C−2)以外の他の光硬化性モノマーとして、分子中に1個以上のエチレン性不飽和基を有する他の化合物を含有してもよい。 10-70 mass parts is preferable with respect to 100 mass parts of (A) carboxyl group-containing resin, and, as for the total amount of said (C-1) and (C-2), 20-60 mass parts is more preferable. Moreover, the photosensitive resin composition of this invention is within the range which does not impair the effect of this invention, As a photocurable monomer other than said (C-1) and (C-2), one piece in a molecule | numerator You may contain the other compound which has the above ethylenically unsaturated group.
[(D)着色剤]
本発明の感光性樹脂組成物は、着色剤を含有する。(D)着色剤としては、白、黒、赤、青、緑、黄、紫、橙、茶色などの慣用公知の着色剤を使用することができ、顔料、染料、色素のいずれでもよい。具体例として、カラーインデックス(C.I.;ザ ソサイエティ オブ ダイヤーズ アンド カラリスツ(The Society of Dyers and Colourists)発行)番号が付されているものを挙げることができる。但し、環境負荷低減並びに人体への影響の観点からハロゲンを含有しないことが好ましい。本発明において、(D)着色剤が、白色または黒色の着色剤である場合、解像性を顕著に向上させることができる。
[(D) Colorant]
The photosensitive resin composition of the present invention contains a colorant. (D) As the colorant, conventionally known colorants such as white, black, red, blue, green, yellow, purple, orange, and brown can be used, and any of pigments, dyes, and pigments may be used. As a specific example, a color index (CI; issued by The Society of Dyers and Colorists) number is given. However, it is preferable not to contain a halogen from the viewpoint of reducing the environmental burden and affecting the human body. In the present invention, when the colorant (D) is a white or black colorant, the resolution can be remarkably improved.
白色着色剤:
白色着色剤としては、例えば酸化チタン、酸化亜鉛、塩基性炭酸鉛、塩基性硫酸鉛、硫酸鉛、硫化亜鉛、酸化アンチモン等が挙げられる。酸化チタンとしてはルチル型酸化チタンでもアナターゼ型酸化チタンでもよいが、ルチル型酸化チタンを用いることが好ましい。同じ酸化チタンであるアナターゼ型酸化チタンは、ルチル型酸化チタンと比較して白色度が高く、白色顔料としてよく使用されるが、アナターゼ型酸化チタンは、光触媒活性を有するために、特にLEDから照射される光により、絶縁性樹脂組成物中の樹脂の変色を引き起こすことがある。これに対し、ルチル型酸化チタンは、白色度はアナターゼ型と比較して若干劣るものの、光活性を殆ど有さないために、酸化チタンの光活性に起因する光による樹脂の劣化(黄変)が顕著に抑制され、また熱に対しても安定である。このため、LEDが実装されたプリント配線板の絶縁層において白色顔料として用いられた場合に、高反射率を長期にわたり維持することができる。
White colorant:
Examples of the white colorant include titanium oxide, zinc oxide, basic lead carbonate, basic lead sulfate, lead sulfate, zinc sulfide, and antimony oxide. Titanium oxide may be rutile titanium oxide or anatase titanium oxide, but rutile titanium oxide is preferably used. Anatase-type titanium oxide, which is the same titanium oxide, has a higher whiteness than rutile-type titanium oxide and is often used as a white pigment. The emitted light may cause discoloration of the resin in the insulating resin composition. In contrast, rutile-type titanium oxide is slightly inferior in whiteness to anatase-type, but has almost no photoactivity. Therefore, resin degradation due to light caused by photoactivity of titanium oxide (yellowing) Is remarkably suppressed and is stable against heat. For this reason, when it is used as a white pigment in the insulating layer of the printed wiring board on which the LED is mounted, a high reflectance can be maintained over a long period of time.
ルチル型酸化チタンとしては、公知のものを使用することができる。ルチル型酸化チタンの製造法には、硫酸法と塩素法の2種類あり、本発明では、いずれの製造法により製造されたものも好適に使用することができる。ここで、硫酸法は、イルメナイト鉱石やチタンスラグを原料とし、これを濃硫酸に溶解して鉄分を硫酸鉄として分離し、溶液を加水分解することにより水酸化物の沈殿物を得、これを高温で焼成してルチル型酸化チタンを取り出す製法をいう。一方、塩素法は、合成ルチルや天然ルチルを原料とし、これを約1000℃の高温で塩素ガスとカーボンに反応させて四塩化チタンを合成し、これを酸化してルチル型酸化チタンを取り出す製法をいう。その中で、塩素法により製造されたルチル型酸化チタンは、特に熱による樹脂の劣化(黄変)の抑制効果が顕著であり、本発明においてより好適に用いられる。 A well-known thing can be used as a rutile type titanium oxide. There are two types of production methods for rutile titanium oxide, a sulfuric acid method and a chlorine method. In the present invention, those produced by any of the production methods can be suitably used. Here, the sulfuric acid method uses ilmenite ore or titanium slag as a raw material, dissolves this in concentrated sulfuric acid, separates iron as iron sulfate, and hydrolyzes the solution to obtain a hydroxide precipitate. A production method in which rutile titanium oxide is taken out by baking at a high temperature. On the other hand, the chlorine method uses synthetic rutile or natural rutile as a raw material, reacts with chlorine gas and carbon at a high temperature of about 1000 ° C to synthesize titanium tetrachloride, and oxidizes this to extract rutile titanium oxide. Say. Among them, rutile-type titanium oxide produced by the chlorine method is particularly effective in suppressing the deterioration (yellowing) of the resin due to heat, and is more preferably used in the present invention.
これらの酸化チタンの中でも、表面が含水アルミナまたは水酸化アルミニウムで処理された酸化チタンを用いることが、組成物中での分散性、保存安定性、難燃性の観点から特に好ましい。
また、酸化チタンを含有する組成物により形成される硬化塗膜は、Y値が70以上であることが好ましく、75以上であることがより好ましい。
Among these titanium oxides, it is particularly preferable to use titanium oxide whose surface is treated with hydrous alumina or aluminum hydroxide from the viewpoints of dispersibility in the composition, storage stability, and flame retardancy.
Moreover, it is preferable that the Y value is 70 or more, and, as for the cured coating film formed with the composition containing a titanium oxide, it is more preferable that it is 75 or more.
黒色着色剤:
黒色着色剤としては、公知慣用の黒色着色剤を使用することができる。黒色着色剤としては、C.I.Pigmentblack 6、7、9および18等に示されるカーボンブラック系の顔料、C.I.Pigment black 8、10等に示される黒鉛系の顔料、C.I.Pigment black 11、12および27,Pigment Brown 35等で示される酸化鉄系の顔料:例えば戸田工業社製KN−370の酸化鉄、三菱マテリアル社製13Mのチタンブラック、C.I.Pigment black 20等で示されるアンスラキノン系の顔料、C.I.Pigment black 13、25および29等で示される酸化コバルト系の顔料、C.I.Pigment black 15および28等で示される酸化銅系の顔料、C.I.Pigment black 14および26等で示されるマンガン系の顔料、C.I.Pigment black 23等で示される酸化アンチモン系の顔料、C.I.Pigment black 30等で示される酸化ニッケル系の顔料、C.I.Pigment black 31、32で示されるペリレン系の顔料、Pigment Black 1で示されるアニリン系の顔料および硫化モリブデンや硫化ビスマスも好適な顔料として例示できる。これらの顔料は、単独で、または適宜組合せて使用することができる。より好ましいのは、カーボンブラックであり例えば、三菱化学社製のカーボンブラック、M−40、M−45、M−50、MA−8、MA−100、またペリレン系の顔料は有機顔料の中でも低ハロゲン化に有効である。カーボンブラックは、回路の隠蔽性に優れるため、さらに好ましい。
Black colorant:
As the black colorant, a known and commonly used black colorant can be used. Examples of black colorants include carbon black pigments such as CIPigmentblack 6, 7, 9 and 18; graphite pigments such as CIPigment black 8, 10; CIPigment black 11, 12 and 27; Pigment Brown 35, etc. Iron oxide pigments represented by: For example, KN-370 iron oxide manufactured by Toda Kogyo Co., Ltd., 13M titanium black manufactured by Mitsubishi Materials Corporation, anthraquinone pigments represented by CIPigment black 20, etc., CIPigment black 13, 25 and 29 Cobalt oxide pigments such as CIPigment black 15 and 28, copper oxide pigments such as CIPigment black 14 and 26, manganese pigments such as CIPigment black 14 and 26, and antimony oxide pigments such as CIPigment black 23 Pigments, nickel oxide pigments such as CIPigment black 30 etc., perylene pigments shown as CIPigment black 31 and 32, aniline pigments shown as Pigment Black 1, molybdenum sulfide and sulfur Bismuth can be exemplified as a preferable pigment. These pigments can be used alone or in appropriate combination. More preferable is carbon black. For example, carbon black manufactured by Mitsubishi Chemical Corporation, M-40, M-45, M-50, MA-8, MA-100, and perylene pigments are low among organic pigments. Effective for halogenation. Carbon black is more preferable because it is excellent in circuit concealment.
赤色着色剤としてはモノアゾ系、ジズアゾ系、アゾレーキ系、ベンズイミダゾロン系、ペリレン系、ジケトピロロピロール系、縮合アゾ系、アントラキノン系、キナクリドン系化合物などが挙げられる。
青色着色剤としては金属置換もしくは無置換のフタロシアニン系、アントラキノン系化合物などが挙げられる。
緑色着色剤としては、金属置換もしくは無置換のフタロシアニン系、アントラキノン系、ペリレン系化合物などが挙げられる。
黄色着色剤としてはモノアゾ系、ジスアゾ系、縮合アゾ系、ベンズイミダゾロン系、イソインドリノン系、アントラキノン系化合物などが挙げられる。
Examples of the red colorant include monoazo, diazo, azo lake, benzimidazolone, perylene, diketopyrrolopyrrole, condensed azo, anthraquinone, and quinacridone compounds.
Examples of blue colorants include metal-substituted or unsubstituted phthalocyanine-based and anthraquinone-based compounds.
Examples of the green colorant include metal-substituted or unsubstituted phthalocyanine-based, anthraquinone-based, and perylene-based compounds.
Examples of yellow colorants include monoazo, disazo, condensed azo, benzimidazolone, isoindolinone, and anthraquinone compounds.
紫色着色剤、橙色着色剤、茶色着色剤の具体例としては、Pigment Violet19、23、29、32、36、38、42、Solvent Violet13、36、C.I.Pigment Orange 1、5、13、14、16、17、 24、34、36、38、40、43、46、49、51、61、63、64、71、73、C.I.Pigment Brown 23、26等を挙げることができる。 Specific examples of purple colorant, orange colorant, and brown colorant include Pigment Violet 19, 23, 29, 32, 36, 38, 42, Solvent Violet 13, 36, CIPigment Orange 1, 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 61, 63, 64, 71, 73, CIPigment Brown 23, 26, and the like.
本発明の感光性樹脂組成物中の着色剤の配合量は、(A)カルボキシル基含有樹脂100質量部に対して、好ましくは0.01〜10質量部、より好ましくは0.1〜5質量部である。なお、着色剤が白色の場合、白色着色剤の配合量は、(A)カルボキシル基含有樹脂100質量部に対して、好ましくは50〜300質量部、より好ましくは70〜250質量部である。(D)着色剤は、1種を単独または2種以上を組み合わせて用いることができる。 The blending amount of the colorant in the photosensitive resin composition of the present invention is preferably 0.01 to 10 parts by mass, more preferably 0.1 to 5 parts by mass with respect to 100 parts by mass of the (A) carboxyl group-containing resin. Part. In addition, when a colorant is white, the compounding quantity of a white colorant becomes like this. Preferably it is 50-300 mass parts with respect to 100 mass parts of (A) carboxyl group-containing resin, More preferably, it is 70-250 mass parts. (D) A coloring agent can be used individually by 1 type or in combination of 2 or more types.
[(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂]
本発明の感光性樹脂組成物は、(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂を含有する。(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂としては、エポキシ化植物油;ビスフェノールA型エポキシ樹脂;ハイドロキノン型エポキシ樹脂;ビスフェノール型エポキシ樹脂;ビフェニル型エポキシ樹脂;チオエーテル型エポキシ樹脂;ブロム化エポキシ樹脂;ノボラック型エポキシ樹脂;ビフェノールノボラック型エポキシ樹脂;ビスフェノールF型エポキシ樹脂;水添ビスフェノールA型エポキシ樹脂;グリシジルアミン型エポキシ樹脂;ヒダントイン型エポキシ樹脂;脂環式エポキシ樹脂;トリヒドロキシフェニルメタン型エポキシ樹脂;ビキシレノール型もしくはビフェノール型エポキシ樹脂またはそれらの混合物;ビスフェノールS型エポキシ樹脂;ビスフェノールAノボラック型エポキシ樹脂;テトラフェニロールエタン型エポキシ樹脂;複素環式エポキシ樹脂;ジグリシジルフタレート樹脂;テトラグリシジルキシレノイルエタン樹脂;ナフタレン基含有エポキシ樹脂;ジシクロペンタジエン骨格を有するエポキシ樹脂;グリシジルメタアクリレート共重合系エポキシ樹脂;シクロヘキシルマレイミドとグリシジルメタアクリレートの共重合エポキシ樹脂;エポキシ変性のポリブタジエンゴム誘導体、CTBN変性エポキシ樹脂等が挙げられるが、これらに限られるものではない。これらのエポキシ樹脂は、1種を単独または2種以上を組み合わせて用いることができる。
[(E) Epoxy resin having two or more epoxy groups in one molecule]
The photosensitive resin composition of the present invention contains (E) an epoxy resin having two or more epoxy groups in one molecule. (E) As an epoxy resin having two or more epoxy groups in one molecule, epoxidized vegetable oil; bisphenol A type epoxy resin; hydroquinone type epoxy resin; bisphenol type epoxy resin; biphenyl type epoxy resin; thioether type epoxy resin; Brominated epoxy resin; novolac epoxy resin; biphenol novolac epoxy resin; bisphenol F epoxy resin; hydrogenated bisphenol A epoxy resin; glycidylamine epoxy resin; hydantoin epoxy resin; alicyclic epoxy resin; Methane type epoxy resin; bixylenol type or biphenol type epoxy resin or a mixture thereof; bisphenol S type epoxy resin; bisphenol A novolac type epoxy resin; Heteroethane epoxy resin; heterocyclic epoxy resin; diglycidyl phthalate resin; tetraglycidyl xylenoyl ethane resin; naphthalene group-containing epoxy resin; epoxy resin having dicyclopentadiene skeleton; glycidyl methacrylate copolymer epoxy resin; And glycidyl methacrylate copolymer epoxy resins; epoxy-modified polybutadiene rubber derivatives, CTBN-modified epoxy resins, and the like, but are not limited thereto. These epoxy resins can be used alone or in combination of two or more.
(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂の配合量は、(A)カルボキシル基含有樹脂のカルボキシル基1当量に対して、好ましくは0.6〜2.5当量となる範囲にある。0.6当量以上である場合、硬化物にカルボキシル基が残りにくく、耐熱性、耐アルカリ性、電気絶縁性等が良好である。一方、2.5当量以下の場合、低分子量の環状(チオ)エーテル基が乾燥塗膜に残存しにくく、塗膜の強度等が良好である。より好ましくは、0.8〜2.2当量である。また、本発明の感光性樹脂組成物は、本発明の効果を損なわない範囲内で、(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂以外の他の熱硬化性成分を含有してもよい。他の熱硬化性成分としては、アミノ樹脂、イソシアネート化合物、ブロックイソシアネート化合物、マレイミド化合物、ベンゾオキサジン化合物、オキサゾリン化合物、カルボジイミド化合物、シクロカーボネート化合物、多官能オキセタン化合物、エピスルフィド樹脂等が挙げられる。 (E) The compounding quantity of the epoxy resin which has 2 or more epoxy groups in 1 molecule becomes like this. Preferably it is 0.6-2.5 equivalent with respect to 1 equivalent of carboxyl groups of (A) carboxyl group-containing resin. Is in range. When it is 0.6 equivalent or more, the carboxyl group hardly remains in the cured product, and the heat resistance, alkali resistance, electrical insulation and the like are good. On the other hand, when the amount is 2.5 equivalents or less, the low molecular weight cyclic (thio) ether group hardly remains in the dry coating film, and the strength of the coating film is good. More preferably, it is 0.8-2.2 equivalent. Moreover, the photosensitive resin composition of this invention contains the thermosetting component other than the epoxy resin which has the 2 or more epoxy group in 1 molecule within the range which does not impair the effect of this invention. May be. Examples of other thermosetting components include amino resins, isocyanate compounds, blocked isocyanate compounds, maleimide compounds, benzoxazine compounds, oxazoline compounds, carbodiimide compounds, cyclocarbonate compounds, polyfunctional oxetane compounds, episulfide resins, and the like.
(フィラー)
本発明の感光性樹脂組成物は、その塗膜の物理的強度等を上げるために、必要に応じて、フィラーを配合することができる。このようなフィラーとしては、公知慣用の無機または有機フィラーを使用でき、具体的には、シリカ、タルク、硫酸バリウム、ハイドロタルサイト、水酸化アルミニウム、水酸化マグネシウム、ベーマイト、アルミナ、ノイブルグ珪土等が挙げられる。フィラーは、1種を単独または2種以上を組み合わせて用いることができる。
(Filler)
The photosensitive resin composition of the present invention can contain a filler as necessary in order to increase the physical strength of the coating film. As such a filler, a publicly known inorganic or organic filler can be used, and specifically, silica, talc, barium sulfate, hydrotalcite, aluminum hydroxide, magnesium hydroxide, boehmite, alumina, Neuburg silica, etc. Is mentioned. A filler can be used individually by 1 type or in combination of 2 or more types.
フィラーの配合量は、前記カルボキシル基含有樹脂(A)100質量部に対して、好ましくは300質量部以下、より好ましくは、0.1〜250質量部である。フィラーの配合量が、300質量部以下の場合、感光性樹脂組成物の粘度が高くなりすぎず、印刷性が良好であり、また、硬化物が脆くなりにくくなる。 The blending amount of the filler is preferably 300 parts by mass or less, more preferably 0.1 to 250 parts by mass with respect to 100 parts by mass of the carboxyl group-containing resin (A). When the compounding quantity of a filler is 300 mass parts or less, the viscosity of a photosensitive resin composition does not become high too much, printability is favorable, and hardened | cured material becomes difficult to become weak.
(有機溶剤)
本発明の感光性樹脂組成物は、(A)カルボキシル基含有樹脂の合成や組成物の調整のため、または基板やキャリアフィルムに塗布するための粘度調整のため、有機溶剤を使用することができる。このような有機溶剤としては、ケトン類、芳香族炭化水素類、グリコールエーテル類、グリコールエーテルアセテート類、エステル類、アルコール類、脂肪族炭化水素、石油系溶剤などが挙げることができる。より具体的には、メチルエチルケトン、シクロヘキサノン等のケトン類;トルエン、キシレン、テトラメチルベンゼン等の芳香族炭化水素類;セロソルブ、メチルセロソルブ、ブチルセロソルブ、カルビトール、メチルカルビトール、ブチルカルビトール、プロピレングリコールモノメチルエーテル、ジプロピレングリコールモノメチルエーテル、ジプロピレングリコールジエチルエーテル、トリエチレングリコールモノエチルエーテル等のグリコールエーテル類;酢酸エチル、酢酸ブチル、ジプロピレングリコールメチルエーテルアセテート、プロピレングリコールメチルエーテルアセテート、プロピレングリコールエチルエーテルアセテート、プロピレングリコールブチルエーテルアセテートなどのエステル類;エタノール、プロパノール、エチレングリコール、プロピレングリコール等のアルコール類;オクタン、デカン等の脂肪族炭化水素;石油エーテル、石油ナフサ、水添石油ナフサ、ソルベントナフサ等の石油系溶剤等である。このような有機溶剤は、1種を単独または2種以上を組み合わせて用いることができる。
(Organic solvent)
In the photosensitive resin composition of the present invention, an organic solvent can be used for (A) synthesis of a carboxyl group-containing resin, adjustment of the composition, or adjustment of viscosity for application to a substrate or carrier film. . Examples of such organic solvents include ketones, aromatic hydrocarbons, glycol ethers, glycol ether acetates, esters, alcohols, aliphatic hydrocarbons, petroleum solvents, and the like. More specifically, ketones such as methyl ethyl ketone and cyclohexanone; aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; cellosolve, methyl cellosolve, butyl cellosolve, carbitol, methyl carbitol, butyl carbitol, propylene glycol monomethyl Glycol ethers such as ether, dipropylene glycol monomethyl ether, dipropylene glycol diethyl ether, triethylene glycol monoethyl ether; ethyl acetate, butyl acetate, dipropylene glycol methyl ether acetate, propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate , Esters such as propylene glycol butyl ether acetate; ethanol, propano , Ethylene glycol, alcohols such as propylene glycol; octane, aliphatic hydrocarbons decane; petroleum ether, petroleum naphtha, hydrogenated petroleum naphtha, petroleum solvents such as solvent naphtha or the like. Such an organic solvent can be used individually by 1 type or in combination of 2 or more types.
(その他の任意成分)
本発明の感光性樹脂組成物には、必要に応じてさらに、熱硬化触媒、ウレタン化触媒、熱可塑性樹脂、ブロック共重合体、エラストマー、密着促進剤、酸化防止剤、紫外線吸収剤等の成分を配合することができる。これらは、電子材料の分野において公知の物を使用することができる。また、本発明の感光性樹脂組成物には、微粉シリカ、ハイドロタルサイト、有機ベントナイト、モンモリロナイトなどの公知慣用の増粘剤、シリコーン系、フッ素系、高分子系などの消泡剤および/またはレベリング剤、イミダゾール系、チアゾール系、トリアゾール系等のシランカップリング剤、防錆剤等のような公知慣用の添加剤類を配合することができる。
(Other optional ingredients)
If necessary, the photosensitive resin composition of the present invention further includes components such as a thermosetting catalyst, a urethanization catalyst, a thermoplastic resin, a block copolymer, an elastomer, an adhesion promoter, an antioxidant, and an ultraviolet absorber. Can be blended. As these, those known in the field of electronic materials can be used. Further, the photosensitive resin composition of the present invention includes known and commonly used thickeners such as finely divided silica, hydrotalcite, organic bentonite and montmorillonite, antifoaming agents such as silicone-based, fluorine-based and polymer-based and / or Known and commonly used additives such as leveling agents, imidazole-based, thiazole-based, triazole-based silane coupling agents, rust preventives and the like can be blended.
本発明の感光性樹脂組成物は、少なくとも前記(A)カルボキシル基含有樹脂を含有する主剤と、少なくとも前記(C)光硬化性モノマーおよび前記(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂を含有する硬化剤からなる二液性の感光性樹脂組成物であることが好ましい。尚、(B)光重合開始剤および(D)着色剤は、主剤および硬化剤のどちらに含まれていてもよい。また、他の成分を含有する場合も、主剤および硬化剤のどちらに含まれていてもよい。 The photosensitive resin composition of the present invention comprises at least a main component containing (A) a carboxyl group-containing resin, at least (C) a photocurable monomer, and (E) two or more epoxy groups in one molecule. It is preferably a two-component photosensitive resin composition comprising a curing agent containing an epoxy resin. The (B) photopolymerization initiator and the (D) colorant may be contained in either the main agent or the curing agent. Moreover, when it contains another component, it may be contained in either the main agent or the curing agent.
本発明の感光性樹脂組成物は、プリント配線板のパターン層の形成に有用であり、中でもソルダーレジストや層間絶縁層の材料として有用である。 The photosensitive resin composition of the present invention is useful for forming a pattern layer of a printed wiring board, and is particularly useful as a material for a solder resist or an interlayer insulating layer.
本発明のドライフィルムは、本発明の感光性樹脂組成物からなる樹脂層を有する。本発明のドライフィルムは、キャリアフィルム(支持体)上に、本発明の感光性樹脂組成物を塗布、乾燥、必要に応じて保護フィルムをラミネートして、乾燥塗膜を形成することにより、製造することができる。ドライフィルム化に際しては、本発明の感光性樹脂組成物を上記有機溶剤で希釈して適切な粘度に調整し、コンマコーター、ブレードコーター、リップコーター、ロッドコーター、スクイズコーター、リバースコーター、トランスファロールコーター、グラビアコーター、スプレーコーター等でキャリアフィルム上に均一な厚さに塗布し、通常、50〜130℃の温度で1〜30分間乾燥して膜を得ることができる。塗布膜厚については特に制限はないが、一般に、乾燥後の膜厚で、1〜150μm、好ましくは10〜60μmの範囲で適宜選択される。 The dry film of the present invention has a resin layer made of the photosensitive resin composition of the present invention. The dry film of the present invention is manufactured by coating the photosensitive resin composition of the present invention on a carrier film (support), drying, laminating a protective film as necessary, and forming a dry coating film. can do. When forming a dry film, the photosensitive resin composition of the present invention is diluted with the above organic solvent to adjust to an appropriate viscosity, and is applied to a comma coater, blade coater, lip coater, rod coater, squeeze coater, reverse coater, transfer roll coater. A film can be obtained by applying a uniform thickness on a carrier film with a gravure coater, spray coater or the like, and drying usually at a temperature of 50 to 130 ° C. for 1 to 30 minutes. Although there is no restriction | limiting in particular about a coating film thickness, Generally, it is 1-150 micrometers in the film thickness after drying, Preferably it selects suitably in the range of 10-60 micrometers.
キャリアフィルムとしては、プラスチックフィルムが用いられ、ポリエチレンテレフタレート等のポリエステルフィルム、ポリイミドフィルム、ポリアミドイミドフィルム、ポリプロピレンフィルム、ポリスチレンフィルム等のプラスチックフィルムを用いることが好ましい。キャリアフィルムの厚さについては特に制限はないが、一般に、10〜150μmの範囲で適宜選択される。 As the carrier film, a plastic film is used, and a plastic film such as a polyester film such as polyethylene terephthalate, a polyimide film, a polyamideimide film, a polypropylene film, or a polystyrene film is preferably used. Although there is no restriction | limiting in particular about the thickness of a carrier film, Generally, it selects suitably in the range of 10-150 micrometers.
キャリアフィルム上に本発明の感光性樹脂組成物を成膜した後、さらに、膜の表面に塵が付着するのを防ぐなどの目的で、膜の表面に剥離可能なカバーフィルムを積層することが好ましい。剥離可能なカバーフィルムとしては、例えば、ポリエチレンフィルム、ポリテトラフルオロエチレンフィルム、ポリプロピレンフィルム、表面処理した紙等を用いることができ、カバーフィルムを剥離するときに膜とキャリアフィルムとの接着力よりも膜とカバーフィルムとの接着力がより小さいものであればよい。 After the photosensitive resin composition of the present invention is formed on the carrier film, a peelable cover film may be laminated on the film surface for the purpose of preventing dust from adhering to the film surface. preferable. As the peelable cover film, for example, a polyethylene film, a polytetrafluoroethylene film, a polypropylene film, a surface-treated paper or the like can be used, and when the cover film is peeled off, the adhesive strength between the film and the carrier film is exceeded. What is necessary is just to have a smaller adhesive force between the membrane and the cover film.
本発明の感光性樹脂組成物は、例えば上記有機溶剤で塗布方法に適した粘度に調整し、基材上に、ディップコート法、フローコート法、ロールコート法、バーコーター法、スクリーン印刷法、カーテンコート法等の方法により塗布し、約60〜100℃の温度で組成物中に含まれる有機溶剤を揮発乾燥(仮乾燥)させることにより、タックフリーの塗膜を形成できる。また、上記組成物をキャリアフィルム上に塗布し、乾燥させてフィルムとして巻き取ったドライフィルムの場合、ラミネーター等により感光性樹脂組成物層が基材と接触するように基材上に張り合わせた後、キャリアフィルムを剥がすことにより、樹脂層を形成できる。 The photosensitive resin composition of the present invention is adjusted to a viscosity suitable for the coating method with, for example, the organic solvent, and on the substrate, a dip coating method, a flow coating method, a roll coating method, a bar coater method, a screen printing method, A tack-free coating film can be formed by applying the organic solvent contained in the composition at a temperature of about 60 to 100 ° C. by volatile drying (preliminary drying) at a temperature of about 60 to 100 ° C. In the case of a dry film obtained by applying the above composition on a carrier film and drying and winding it as a film, after laminating the photosensitive resin composition layer on the base material so as to come into contact with the base material The resin layer can be formed by peeling off the carrier film.
上記基材としては、予め回路形成されたプリント配線板やフレキシブルプリント配線板の他、紙フェノール、紙エポキシ、ガラス布エポキシ、ガラスポリイミド、ガラス布/不繊布エポキシ、ガラス布/紙エポキシ、合成繊維エポキシ、フッ素・ポリエチレン・ポリフェニレンエーテル,ポリフェニレンオキシド・シアネートエステル等を用いた高周波回路用銅張積層版等の材質を用いたもので全てのグレード(FR−4等)の銅張積層版、その他ポリイミドフィルム、PETフィルム、ガラス基板、セラミック基板、ウエハ板等を挙げることができる。 Examples of the base material include printed circuit boards and flexible printed circuit boards in which circuits are formed in advance, paper phenol, paper epoxy, glass cloth epoxy, glass polyimide, glass cloth / non-woven cloth epoxy, glass cloth / paper epoxy, synthetic fiber. Copper graded laminates of all grades (FR-4 etc.) and other polyimides using materials such as epoxy, fluorine, polyethylene, polyphenylene ether, polyphenylene oxide, cyanate ester, etc. A film, a PET film, a glass substrate, a ceramic substrate, a wafer plate, etc. can be mentioned.
本発明の感光性樹脂組成物を塗布した後に行う揮発乾燥は、熱風循環式乾燥炉、IR炉、ホットプレート、コンベクションオーブンなど(蒸気による空気加熱方式の熱源を備えたものを用い乾燥機内の熱風を向流接触せしめる方法およびノズルより支持体に吹き付ける方式)を用いて行うことができる。 Volatile drying performed after the photosensitive resin composition of the present invention is applied may be performed by using a hot air circulation drying furnace, an IR furnace, a hot plate, a convection oven or the like (using a steam-heated heat source in the dryer. Can be carried out by using a counter current contact method and a method of spraying a nozzle on a support.
本発明の感光性樹脂組成物は、例えば約140〜180℃の温度に加熱して熱硬化させることにより、上記(A)カルボキシル基含有樹脂と、(E)1分子中に2個以上のエポキシ基を有するエポキシ樹脂が反応し、耐熱性、耐薬品性、耐吸湿性、密着性、電気特性などの諸特性に優れた硬化塗膜を形成することができる。 For example, the photosensitive resin composition of the present invention is heated to a temperature of about 140 to 180 ° C. to be thermally cured, whereby (A) the carboxyl group-containing resin and (E) two or more epoxies per molecule. The epoxy resin having a group reacts to form a cured coating film excellent in various properties such as heat resistance, chemical resistance, moisture absorption resistance, adhesion, and electrical characteristics.
本発明の感光性樹脂組成物を塗布し、溶剤を揮発乾燥した後に得られた塗膜に対し、露光(活性エネルギー線の照射)を行うことにより、露光部(活性エネルギー線により照射された部分)が硬化する。また、接触式(または非接触方式)により、パターンを形成したフォトマスクを通して選択的に活性エネルギー線により露光もしくはレーザーダイレクト露光機により直接パターン露光し、未露光部を希アルカリ水溶液(例えば0.3〜3wt%炭酸ソーダ水溶液)により現像してレジストパターンが形成される。 The exposed part (part irradiated with active energy rays) is applied to the coating film obtained after applying the photosensitive resin composition of the present invention and evaporating and drying the solvent (irradiation with active energy rays). ) Is cured. Further, by a contact method (or a non-contact method), exposure is selectively performed with an active energy ray through a photomask having a pattern formed thereon or direct pattern exposure is performed by a laser direct exposure machine, and an unexposed portion is diluted with a dilute alkaline aqueous solution (for example, 0.3 The resist pattern is formed by development with a 3 wt% sodium carbonate aqueous solution.
上記活性エネルギー線照射に用いられる露光機としては、高圧水銀灯ランプ、超高圧水銀灯ランプ、メタルハライドランプ、水銀ショートアークランプ等を搭載し、350〜450nmの範囲で紫外線を照射する装置であればよく、さらに、直接描画装置(例えばコンピューターからのCADデータにより直接レーザーで画像を描くレーザーダイレクトイメージング装置)も用いることができる。画像形成のための露光量は膜厚等によって異なるが、一般には100〜1000mJ/cm2、好ましくは200〜800mJ/cm2の範囲内とすることができる。 As an exposure machine used for the active energy ray irradiation, a high-pressure mercury lamp lamp, an ultra-high pressure mercury lamp lamp, a metal halide lamp, a mercury short arc lamp, and the like may be used as long as the apparatus irradiates ultraviolet rays in a range of 350 to 450 nm. Furthermore, a direct drawing apparatus (for example, a laser direct imaging apparatus that directly draws an image with a laser using CAD data from a computer) can also be used. The amount of exposure for image formation varies depending on the film thickness and the like, but is generally 100 to 1000 mJ / cm 2 , preferably 200 to 800 mJ / cm 2 .
上記現像方法としては、ディッピング法、シャワー法、スプレー法、ブラシ法等によることができ、現像液としては、水酸化カリウム、水酸化ナトリウム、炭酸ナトリウム、炭酸カリウム、リン酸ナトリウム、ケイ酸ナトリウム、アンモニア、アミン類などのアルカリ水溶液が使用できる。 The developing method can be a dipping method, a shower method, a spray method, a brush method, etc., and as a developing solution, potassium hydroxide, sodium hydroxide, sodium carbonate, potassium carbonate, sodium phosphate, sodium silicate, Alkaline aqueous solutions such as ammonia and amines can be used.
以下に実施例、参考例および比較例を示して本発明について具体的に説明するが、本発明は下記実施例に限定されるものではない。尚、以下において「部」および「%」とあるのは、特に断りのない限り質量基準である。 Hereinafter, the present invention will be specifically described with reference to Examples, Reference Examples and Comparative Examples, but the present invention is not limited to the following Examples. In the following, “part” and “%” are based on mass unless otherwise specified.
(感光性樹脂組成物の調製)
下記表1に示す成分を、主剤と硬化剤に分けて、表中に示す割合(質量部)にて配合し、攪拌機にて予備混合した後、3本ロールミルで混練し、主剤と硬化剤を得た。得られた主剤と硬化剤を混合し、感光性樹脂組成物を調整した。ここで得られた各感光性樹脂組成物の分散度をエリクセン社製グラインドメーターによる粒度測定にて評価したところ、15μm以下であった。
(Preparation of photosensitive resin composition)
The components shown in Table 1 below are divided into a main agent and a curing agent, blended in the proportions (parts by mass) shown in the table, premixed with a stirrer, and then kneaded with a three roll mill. Obtained. The obtained main agent and curing agent were mixed to prepare a photosensitive resin composition. It was 15 micrometers or less when the dispersion degree of each photosensitive resin composition obtained here was evaluated by the particle size measurement by the grind meter by an Erichsen company.
*2:タイペークCR−58(ルチル型酸化チタン、石原産業社製)
*3:カーボンMA−100(三菱化学社製)
*4:硫酸バリウムB−30(堺化学社製)
*5:LMP−100(富士タルク工業社製)
*6:ルシリンTPO(アシルフォスフィンオキサイド系光重合開始剤、BASFジャパン社製)
*7:2,4−ジエチルチオキサントン(日本化薬社製)
*8:シリコンKS66(信越化学工業社製)
*9:YX8034(ビスフェノールA型の水添エポキシ樹脂、三菱化学社製)
*10:YX−4000(ビフェニル型エポキシ樹脂、三菱化学社製)
*11:ジペンタエリスリトールペンタアクリレート
*12:ジペンタエリスリトールヘキサアクリレート
*13:ジプロピレングリコールモノメチルエーテル
* 2: Taipei CR-58 (rutile titanium oxide, manufactured by Ishihara Sangyo Co., Ltd.)
* 3: Carbon MA-100 (Mitsubishi Chemical Corporation)
* 4: Barium sulfate B-30 (manufactured by Sakai Chemical Co., Ltd.)
* 5: LMP-100 (manufactured by Fuji Talc Industrial Co., Ltd.)
* 6: Lucillin TPO (acylphosphine oxide photopolymerization initiator, manufactured by BASF Japan)
* 7: 2,4-diethylthioxanthone (manufactured by Nippon Kayaku Co., Ltd.)
* 8: Silicon KS66 (manufactured by Shin-Etsu Chemical Co., Ltd.)
* 9: YX8034 (Bisphenol A type hydrogenated epoxy resin, manufactured by Mitsubishi Chemical Corporation)
* 10: YX-4000 (biphenyl type epoxy resin, manufactured by Mitsubishi Chemical Corporation)
* 11: Dipentaerythritol pentaacrylate * 12: Dipentaerythritol hexaacrylate * 13: Dipropylene glycol monomethyl ether
得られた主剤、硬化剤および感光性樹脂組成物を用いて、以下のように評価を行った。 Using the obtained main agent, curing agent and photosensitive resin composition, evaluation was performed as follows.
レジスト性能評価:
<感度>
銅厚35μmの銅張積層基板をバフロール研磨後、水洗、乾燥し、実施例5、6、参考例1〜4および比較例1〜3の感光性樹脂組成物をスクリーン印刷法により塗布し、80℃の熱風循環式乾燥炉で30分乾燥させた。乾燥後、フォトマスク(ステップタブレット21段)を介して、オーク製作所社製のメタルハライドランプ搭載露光機を用いて600mJ/cm2の露光量で露光した。照射したものをテストピースとし、30℃の1%Na2CO3水溶液をスプレー圧0.2MPaの条件で90秒間現像を行った後、残存塗膜の段数を目視判定した。その評価結果を表2に示す。
Resist performance evaluation:
<Sensitivity>
A copper-clad laminate with a copper thickness of 35 μm was polished with buffalo, washed with water and dried, and the photosensitive resin compositions of Examples 5 and 6, Reference Examples 1 to 4 and Comparative Examples 1 to 3 were applied by screen printing, and 80 It was dried for 30 minutes in a hot air circulation drying oven at 0 ° C. After drying, it was exposed at an exposure amount of 600 mJ / cm 2 through a photomask (21 steps of step tablet) using an exposure machine equipped with a metal halide lamp manufactured by Oak Manufacturing Co., Ltd. The irradiated one was used as a test piece, and a 1% Na 2 CO 3 aqueous solution at 30 ° C. was developed for 90 seconds under the condition of a spray pressure of 0.2 MPa, and then the number of steps of the remaining coating film was visually determined. The evaluation results are shown in Table 2.
<解像性>
銅厚50μmの銅張積層板にライン/スペースが30/30〜100/100μmの回路パターンが形成された基板を、バフロール研磨後、水洗し、乾燥した。実施例5、6、参考例1〜4および比較例1〜3の感光性樹脂組成物を、前処理が施された上記基板上にスクリーン印刷法により塗布し、80℃の熱風循環式乾燥炉で30分間乾燥させた。乾燥後、高圧水銀灯露光装置を用いて600mJ/cm2の露光量で露光した。露光パターンは、スペース部に30/40/50/60/70/80/90/100μmのラインを描画させるパターンを使用した。露光後、30℃の1%Na2CO3水溶液をスプレー圧0.2MPaの条件で90秒間現像を行ってパターンを形成し、残存した最小ラインの幅を解像性とした。評価結果を表2に示す。
<Resolution>
A substrate on which a circuit pattern having a line / space of 30/30 to 100/100 μm was formed on a copper clad laminate having a copper thickness of 50 μm was washed with water after buffing and dried. The photosensitive resin compositions of Examples 5 and 6, Reference Examples 1 to 4 and Comparative Examples 1 to 3 were applied by screen printing on the pretreated substrate, and a hot air circulation drying oven at 80 ° C. For 30 minutes. After drying, exposure was performed at an exposure amount of 600 mJ / cm 2 using a high-pressure mercury lamp exposure apparatus. As the exposure pattern, a pattern for drawing a 30/40/50/60/70/80/90/100 μm line in the space portion was used. After exposure, a 1% Na 2 CO 3 aqueous solution at 30 ° C. was developed for 90 seconds under the condition of a spray pressure of 0.2 MPa to form a pattern, and the width of the remaining minimum line was defined as resolution. The evaluation results are shown in Table 2.
安定性評価:
<保存安定性>
実施例5、6、参考例1〜4および比較例1〜3の感光性樹脂組成物の調製に用いた上記主剤を粘度260〜300dPa・s、TI値1.1±0.1に調整し、また、上記硬化剤を粘度80〜90dPa・s、TI値1.6±0.2に調整した。その後20℃90日間保管し、粘度およびTI値を測定した。粘度およびTI値の測定には東京計器社製E型粘度計を用い、25℃で、回転速度を5rpm、50rpmとして、粘度(η5、η50)を測定し、η5/η50をTI値とした。評価結果を表2に示す。
Stability evaluation:
<Storage stability>
The main agent used in the preparation of the photosensitive resin compositions of Examples 5 and 6, Reference Examples 1 to 4 and Comparative Examples 1 to 3 was adjusted to a viscosity of 260 to 300 dPa · s and a TI value of 1.1 ± 0.1. The viscosity of the curing agent was adjusted to 80 to 90 dPa · s and a TI value of 1.6 ± 0.2. Thereafter, it was stored at 20 ° C. for 90 days, and the viscosity and TI value were measured. Viscosity and TI value were measured using an E-type viscometer manufactured by Tokyo Keiki Co., Ltd., and the viscosity (η 5 , η 50 ) was measured at 25 ° C. with a rotation speed of 5 rpm and 50 rpm, and η 5 / η 50 was determined as TI. Value. The evaluation results are shown in Table 2.
実施例の感光性樹脂組成物は、解像性、保存安定性に優れることがわかる。それに対して、ジペンタエリスリトールヘキサ(メタ)アクリレートとジペンタエリスリトールペンタ(メタ)アクリレートの総和当たり、ジペンタエリスリトールヘキサ(メタ)アクリレートの割合が60質量%未満の比較例1〜3は、解像性、硬化剤の保存安定性に劣るものであった。
It turns out that the photosensitive resin composition of an Example is excellent in resolution and storage stability. On the other hand, Comparative Examples 1 to 3 in which the ratio of dipentaerythritol hexa (meth) acrylate is less than 60% by mass per total sum of dipentaerythritol hexa (meth) acrylate and dipentaerythritol penta (meth) acrylate are resolved. The storage stability of the curing agent was inferior.
Claims (4)
前記(C)光硬化性モノマーとして、(C−1)ジペンタエリスリトールヘキサ(メタ)アクリレート、および、(C−2)ジペンタエリスリトールペンタ(メタ)アクリレートを含有し、前記(C−1)と(C−2)の総和当たり、前記(C−1)の割合が60質量%以上であり、
前記(D)着色剤が、カーボンブラックであることを特徴とするプリント配線板用の感光性樹脂組成物。 (A) a carboxyl group-containing resin, (B) a photopolymerization initiator, (C) a photocurable monomer, (D) a colorant, and (E) an epoxy resin having two or more epoxy groups in one molecule. A photosensitive resin composition containing,
The (C) photocurable monomer contains (C-1) dipentaerythritol hexa (meth) acrylate and (C-2) dipentaerythritol penta (meth) acrylate, and (C-1) The ratio of (C-1) per sum of (C-2) is 60% by mass or more,
The photosensitive resin composition for printed wiring boards, wherein the colorant (D) is carbon black.
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