JP6581401B2 - A device that generates wind of ions and ozone - Google Patents

Description

  The present invention relates to an apparatus for generating ions and ozone wind and a method for manufacturing the same.

  As an apparatus for generating ion / ozone wind, for example, there is a configuration disclosed in Patent Document 1 (FIG. 2). The counter electrode disclosed in Patent Document 1 is provided with a through hole in a planar (flat plate) and annular or spiral conductive member, and generates a potential difference (12) between the electrode 10 and the corona. It has a structure that generates ions, ozone, and ion wind by electric discharge. A main electrode pair (11A) as a counter electrode and a sub electrode pair (11B) are provided on the outer periphery on the same plane, and the distance (L2) between the needle electrode (10) and the sub electrode pair is defined as the needle electrode and the main electrode pair. Compared to the strong and small amount of ion wind (first ion wind) generated in the main electrode pair and the first ion wind generated in the sub electrode pair by the structure longer than the distance (L1) to the electrode pair. In combination with a weak and large amount of ion wind (second ion wind), the ion wind is generated from the needle electrode toward the counter electrode. That is, the counter electrode has a planar structure realized by a single flat plate.

  Next, the structure disclosed in Patent Document 2 (FIG. 1) differs from Patent Document 1 in that the target electrode forms a three-dimensional structure. A three-dimensional structure is provided in which a reflective electrode (not shown) is provided on the side opposite to the corona electrode 20 with the target electrodes 21A and 21B interposed therebetween, and a potential difference having a polarity opposite to that of the target electrode is applied to the corona electrode and the reflective electrode. Ions are generated by corona discharge between the corona electrode and the target electrode. The ions flow from the corona electrode to the target electrode. The reflective electrode diffuses the ion wind by changing the direction of the ion wind so as to be parallel to the space between the target electrode and the reflective electrode. The three-dimensional structure disclosed in Patent Document 2 is obtained by connecting a plurality of ring-shaped bellows having different radii obtained by punching a sheet to each other by tabs.

Japanese Patent No. 5461636 International Publication No. WO92 / 05875

For example, in order to reduce the size of the apparatus, at least one of the amount of ions and ozone wind per unit area (or unit capacity), the directionality of the ions and ozone wind, the ion and ozone wind pressure, and the production cost reduction One thing needs to be further enhanced.

  For example, in the configuration disclosed in Patent Document 1, since the counter electrode has a planar structure realized by a single flat plate, the number of sets of the needle electrode and the main electrode pair is the same in order to increase the ion air volume. It is necessary to increase on the plane or to increase the potential difference for corona discharge. Therefore, it is difficult to further reduce the size of the apparatus. Furthermore, when the potential difference between the needle-like electrode and the main electrode pair is increased, the risk of electric shock increases and the high-voltage generator is increased in size, making it difficult to further reduce the size of the apparatus. In other words, practical convenience is sacrificed. For this reason, the structure is unsuitable for applications that require a strong ion flow.

  For example, in the configuration disclosed in Patent Document 2, since it is a three-dimensional structure, the amount of ion wind per unit capacity may be higher than that in Patent Document 1, but a plurality of ring-shaped bellows are connected to each other by tabs. Due to the complicated structure obtained in this way, the manufacturing cost is high.

  An apparatus for generating wind of ions and ozone according to the present invention includes a first line having a first line segment and a second line segment intersecting the first line segment, the second surface being opposite to the first surface. And a polygonal first conductor having a second thickness and supplied with a first voltage, and a fourth line segment intersecting the third line segment and the third line segment. A third surface having a fourth surface opposite to the third surface, a polygonal second conductor having a third thickness and supplied with a second voltage; A fifth surface having a line segment and a sixth line segment intersecting the fifth line segment, a sixth surface opposite to the fifth surface, and a first thickness; A third polygonal conductor to which a third voltage different from the second voltage is supplied, and the first and second conductors have first and third surfaces of less than 180 degrees Arranged to face each other at a first angle, the first And the third conductor are arranged so that the first and fifth surfaces face each other at a second angle that is less than 90 degrees, and the second and third conductors have the third and sixth surfaces facing each other. They are arranged to face each other at a third angle that is less than 90 degrees, and generate a corona discharge between the first and third conductors and between the second and third conductors, respectively. It is characterized by generating wind.

  The apparatus for generating wind of ions and ozone according to the present invention has a first line segment parallel to a first direction intersecting with a radius as a curved surface, and a first conductivity of a cylinder to which a first voltage is supplied. And a second conductor that passes through the center of the cylinder in the first direction and is supplied with a second voltage different from the first voltage, and the curved surface is in the direction of the first line segment. A hollow region and first and second conductive regions in the direction of the first line segment so as to sandwich the hollow region, and the second conductor has curved surfaces different from each other corresponding to the first conductive region. First and second electrodes in the direction, and third and fourth electrodes in different curved directions corresponding to the second conductive region, and the first, second electrode, and first conductive region And a corona discharge between each of the third and fourth electrodes and each of the second conductive regions to generate ions and ozone. The occur.

  The apparatus for generating wind of ions and ozone according to the present invention has a first line segment parallel to a first direction intersecting a first radius as an inner diameter as a curved surface, and is supplied with a first voltage. A cylindrical first conductor and a second line segment parallel to the first direction intersecting the second radius, which is an inner diameter smaller than the first radius, are curved and supplied with the second voltage. And a third voltage that is disposed on the central axis of the first conductor and the second conductor of the cylinder stacked on the first conductor, and is different from the first and second voltages. And a corona discharge between the first conductor and the electrode, and between the second conductor and the electrode, respectively, to generate an ion and ozone wind.

  An apparatus for generating ion and ozone wind according to the present invention has a first cavity pattern with a first radius, a first metal layer to which a first voltage is supplied, and smaller than the first radius. A second metal layer having a second cavity pattern of a second radius and supplied with a second voltage and stacked on the first metal layer; and a third metal layer different from the first and second voltages And a corona discharge between the first metal layer and the electrode and between the second metal layer and the electrode, respectively, and an electrode disposed on the central axis of the first and second cavity patterns. To generate ions and ozone wind.

  An apparatus for generating wind of ions and ozone of the present invention is a polygonal first metal body, has a first cavity pattern, is supplied with a first metal layer to which a first voltage is supplied, A second metal layer that is a square second metal body, has a second cavity pattern different from the first cavity pattern, is supplied with a second voltage, and is laminated with the first metal layer; A third metal layer sandwiched between the first and second metal layers, and a third voltage different from the first and second voltages, and the first and second An electrode disposed on the central axis of the cavity pattern, wherein the first and second metal layers are stacked with an air gap by the third metal layer, and between the first metal layer and the electrode, and Corona discharge is generated between the second metal layer and the electrode to generate ions and ozone wind. The apparatus for generating ion and ozone wind according to the present invention is a polygonal first metal body having a first cavity pattern and a first metal layer to which a first voltage is supplied. A second metal layer that is a polygonal second metal body, has a second cavity pattern different from the first cavity pattern, is supplied with a second voltage, and is laminated with the first metal layer; And an insulating layer sandwiched between the first and second metal layers and a third voltage different from the first and second voltages is supplied, and the centers of the first and second cavity patterns An electrode disposed on the shaft, and generates a corona discharge between the first metal layer and the electrode and between the second metal layer and the electrode to generate an ion and ozone wind. Furthermore, the device for generating the ion and ozone wind according to the present invention is a polygonal first metal body having a first cavity pattern and being supplied with a first voltage. And a second metal body that is a polygonal second metal body, has a second cavity pattern different from the first cavity pattern, is supplied with a second voltage, and is laminated with the first metal layer A layer, and a third voltage different from the first and second voltages are provided, and the electrode is disposed on a central axis of the first and second cavity patterns. The first cavity pattern is based on the central axis. And the first metal layer includes a first metal region between the first and second cavity regions, and the second cavity pattern is based on the central axis. The second metal layer includes third and fourth cavity regions, the second metal layer includes a second metal region between the third and fourth cavity regions, and the first Between genus layer and the electrode, and between the second metal layer and the electrode, respectively generates corona discharge to generate wind ions and ozone.

  According to the method of manufacturing an apparatus for generating ions and ozone wind of the present invention, the first metal layer is formed with the first cavity pattern, and the second metal layer is different from the first cavity pattern. The first metal layer formed with the first cavity pattern and the second metal layer formed with the second cavity pattern are stacked, and the electrodes are formed as the first and second layers. It is arranged on the central axis of the cavity pattern.

The figure for demonstrating patent document 1 (prior art). The figure for demonstrating patent document 2 (prior art). The figure for demonstrating a 1st Example. The figure for demonstrating the expansion example of a 1st Example. The figure for demonstrating a 2nd Example. The figure for demonstrating a 2nd Example. The figure for demonstrating the expansion example of a 2nd Example. The figure for demonstrating a 3rd Example. The figure for demonstrating a 3rd Example. The figure for demonstrating the expansion example of a 3rd Example. The figure for demonstrating a 4th Example. The figure for demonstrating a 4th Example. The figure for demonstrating a 5th Example. The figure for demonstrating a 6th Example. The figure for demonstrating a 7th Example. The figure for demonstrating the 8th Example. The flowchart for demonstrating the 1st manufacturing method which is a 9th Example. The flowchart for demonstrating the 2nd manufacturing method which is a 10th Example. The flowchart for demonstrating the 3rd manufacturing method which is an 11th Example. The figure for demonstrating a 12th Example. The figure for demonstrating a 12th Example. The figure for demonstrating a 13th Example. The figure for demonstrating a 13th Example. The flowchart for demonstrating the 4th manufacturing method which is a 14th Example.

FIG. 3 is a diagram for explaining the first embodiment. FIG. 3A is a perspective view showing a three-dimensional structure. FIG. 3B is a view as seen from the first direction (X direction), and is a front view as seen from the side from which the wind of ions and ozone is emitted. FIG. 3C is a structural diagram and a circuit diagram illustrating a voltage relationship as viewed from the second direction (Y direction).

In FIG. 3A, three polygonal (for example, rectangular) electrodes 30, 31A, 31B are disclosed, which are conductors. 31 A of 1st conductors have two surfaces (a 1st surface and a 2nd surface) with a large area. The first surface has a first line segment and a second line segment that intersects the first line segment. The second surface is opposite to the first surface. The second conductor 31B has two surfaces (third surface and fourth surface) having a large area. The third surface has a third line segment and a fourth line segment that intersects the third line segment. The fourth surface is opposite to the third surface. The third conductor 30 has two surfaces (fifth surface and sixth surface) having a large area. The fifth surface has a fifth line segment and a sixth line segment that intersects the fifth line segment. The sixth surface is opposite to the fifth surface. The third conductor 30 is a blade and has a horizontally long wedge shape (a shape in which one end is wide and gradually narrows as it reaches the other end). In other words, the wedge-shaped third conductor 30 has a first region having a first thickness and a second region that is thinner than the first thickness. The three conductors 30, 31A, 31B have corresponding thicknesses (first thickness, second thickness, and third thickness), respectively.

3B and 3C, the first conductor 31A and the second conductor 31B are connected to the first node of the power supply 32. The third conductor 30 is connected to the second node of the power source 32. The first node is a negative voltage and the second node is a positive voltage with respect to the first node. Corona discharge is generated between the first conductor 31A and the third conductor 30, and between the second conductor 31B and the third conductor 30, respectively, and ions and ozone wind are generated.

The first conductor 31A and the second conductor 31B are arranged such that the first and third surfaces face each other at a first angle that is less than 180 degrees. The first conductor 31A and the third conductor 30 are arranged so that the first and fifth surfaces face each other at a second angle that is less than 90 degrees. The second conductor 31B and the third conductor 30 are arranged so that the third and sixth surfaces face each other at a third angle that is less than 90 degrees. Therefore, in FIG. 3C, the distance from the first surface to the third conductor 30 and the first conductor 31A includes a plurality of distances (L1 to L3). The relationship between the distances L1, L2, and L3 is L3> L2> L1. Thus, a combination of strongly generated ions and ozone corresponding to the shortest distance (L1) and ions and ozone generated weakly compared to L1 corresponding to the longest distance (L3). Ozone wind is generated from the third conductor 30 between the first conductor 31A and the second conductor 31B. There are also a plurality of distances (L1 to L3) to the third surface to the third conductor 30 and the second conductor 31B. The operation is as described above.

The three electrodes (conductors) 30, 31A, 31B are polygonal (rectangular), and depending on their characteristic angles, the amount of ions and ozone wind per unit capacity, the directionality of ions and ozone wind, Ion and ozone wind pressure is increased.

The shape of each of the three electrodes (conductors) 30, 31A, 31B can be changed as appropriate. For example, the first electrode (conductor) 31 A may be wedge-shaped like the third conductor 30. The L1 and L3 sides of the first electrode (conductor) 31A may be wedge-shaped. Needless to say, a polygon is not limited to a rectangle.

The respective voltages of the two electrodes (conductors) 31 </ b> A and 31 </ b> B can be appropriately changed with respect to the electrode (conductor) 30. For example, the voltages applied to the two electrodes (conductors) 31A and 31B may be different negative voltages with respect to the electrode (conductor) 30 to which a positive voltage is applied.

The angle of the two electrodes (conductors) 31A and 31B with respect to the electrode (conductor) 30 can be changed as appropriate. For example, the distances L1, L2, and L3 may be the same (L1 = L2 = L3). For example, the distances L1, L2, and L3 may be L1> L2> L3.

These characteristic changes and combinations increase the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure.

  FIG. 4 is a development example of the first embodiment. One set (three electrodes (conductors) 30, 31 </ b> A, 31 </ b> B of the first embodiment) is arranged in the horizontal direction (first direction (X direction), the direction of a long rectangular segment (second line segment). This is an example in which a plurality of the first line segments are arranged in the direction of the longer first line segment)). In a plurality of sets, the directionality of the ion and ozone wind directions can be controlled by combining the directionality of the ion and ozone wind directions. Depending on the control purpose, an appropriate number of the plurality of installation positions may be arranged at arbitrary three-dimensional positions.

FIG. 5 is a diagram for explaining the second embodiment. Figure 5 -1 (A) is a perspective view showing the three-dimensional structure. Figure 5 -1 (B) is a view seen from the second direction (X direction), it is a front view seen from the side wind of ions and ozone is released. Figure 5 -2 (C) is a circuit diagram showing a structural view and a voltage relationship as viewed from the first direction (Y-direction).

In FIG. 5 -1 (A), 2 two electrodes 41,40A are disclosed, they are conductive. The electrode 41 is a cylindrical first conductor, and has a first line segment parallel to the first direction intersecting the radius as a curved surface. The curved surface has a hollow region in the direction of the first line segment. First and second conductive regions are provided in the direction of the first line segment so as to sandwich the hollow region. The cylindrical first conductor has both bottom surfaces open in the second direction (X direction) and indicates the direction of ions and ozone wind.

The electrode 40A is a second conductor that passes through the center of the cylinder in the first direction (Y direction). The electrode 40A includes a first electrode 40B and a second electrode 40B in different curved directions corresponding to the first conductive region. The electrode 40A further includes a third electrode 40B and a fourth electrode 40B in the directions of different curved surfaces corresponding to the second conductive region.

In FIG. 5 -1 (B) and FIG. 5 -2 (C), the first conductor 41 is connected to a first node of the power source 42. The second conductor 40A is connected to the second node of the power source 42. The first node is a negative voltage and the second node is a positive voltage with respect to the first node. Corona discharge is generated between the first conductor 41 and the second conductor 40A, and a wind of ions and ozone is generated. Specifically, a corona discharge is generated between the first conductor 41 and the corresponding first electrode 40B, second electrode 40B, third electrode 40B, and fourth electrode 40B, respectively, and ions and Ozone wind is generated. These ion and ozone winds show the same orientation as the ion and ozone wind directions. Each cavity region supplies wind to the corresponding electrode 40B. In a mere cylinder without a hollow region, the place where wind is supplied is only one bottom surface (second direction (X direction)), and the place where ions and ozone wind are discharged is the other bottom surface. The efficiency of ionization and ozonization of the electrode 40B on the side where ions and ozone wind are discharged is lower than the ion and ozonization of the electrode 40B on the side where ions and ozone wind are supplied. On the other hand, since each hollow region supplies wind to the corresponding electrode 40B, the efficiency of ionization and ozonization is improved.

In the second conductor 40A, portions of the conductive lines are coated with an insulating film except for the first electrode 40B, the second electrode 40B, the third electrode 40B, and the fourth electrode 40B. It prevents corona discharge at the conductive wire portion.

The first electrode 40B, the second electrode 40B, the third electrode 40B, and the fourth electrode 40B have a shape including an acute angle with respect to the first direction (conductive line 40A). In order to improve the efficiency of ionization and ozonization, the first electrode 40B, the second electrode 40B, the third electrode 40B, and the fourth electrode 40B are respectively disposed in the corresponding cavity regions. Therefore, in FIG. 5 -2 (C), the first electrode 40B, the second electrode 40B, the distance from the third electrode 40B and the fourth electrode 40B to the first conductor 41 respectively corresponding a plurality Distance (L1 to L3). The relationship between the distances L1, L2, and L3 is L3>L2> L1. Thus, a combination of strongly generated ions and ozone corresponding to the shortest distance (L1) and ions and ozone generated weakly compared to L1 corresponding to the longest distance (L3). Ozone wind is generated toward the bottom of the cylinder.

Depending on the characteristic angle of the plurality of electrodes 40B, the amount of ions and ozone wind per unit capacity, the directionality of ions and ozone wind, and the ion and ozone wind pressure are increased.

The number of the plurality of electrodes 40B, the respective positions, and the respective shapes can be appropriately changed. For example, the number of electrodes 40B may be four corresponding to one conductive region (first conductive region), and the relationship may be 90 degrees. The amount of ions and ozone wind can be increased. For example, the plurality of electrodes 40B may be branched from different positions with respect to the conductive line 40A. For example, the acute angles of the plurality of electrodes 40B may be changed as appropriate. For example, the distances L1, L2, and L3 may be the same (L1 = L2 = L3). For example, the distances L1, L2, and L3 may be L1> L2> L3. These characteristic changes and combinations increase the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure. For example, conditions such as the number and angle of the plurality of electrodes 40B respectively corresponding to the plurality of conductive region regions (first and second conductive regions), the area or shape of the cavity region, and the like may be appropriately changed. By these, the efficiency of ionization and ozonization and the amount of ions and ozone wind to the bottom of the cylinder can be optimized.

  FIG. 6 is a development example of the second embodiment. This is an example in which one set (two electrodes 41, 40A of the second embodiment) is arranged in the lateral direction (second direction (X direction), radial direction of the cylinder). In a plurality of sets, the directionality of the ion and ozone wind directions can be controlled by combining the directionality of the ion and ozone wind directions. Depending on the control purpose, an appropriate number of the plurality of installation positions may be arranged at arbitrary three-dimensional positions.

FIG. 7 is a diagram for explaining the third embodiment. Figure 7 -1 (A) and FIG. 7 -2 (B) is a perspective view showing the three-dimensional structure. FIG. 7-2 (C) is a structural diagram and a circuit diagram showing a voltage relationship as seen from the first direction (X direction).

In FIG. 7 -1 (A), 2 two electrodes 51A, 51B are disclosed, they are conductive. The electrode 51A is a cylindrical first conductor and has a first radius that is an inner diameter. A first line segment parallel to the first direction intersecting the first radius is included as a curved surface. The electrode 51B is a cylindrical second conductor, and has a second radius that is an inner diameter smaller than the first radius. A second line segment parallel to the first direction intersecting the second radius is provided as a curved surface. Each of the cylindrical first conductor 51A and the second conductor 51B is open on both bottom surfaces of the cylinder, and indicates the direction of ions and ozone wind.

In FIG. 7 -2 (B), the first conductor 51A and second conductor 51B are stacked in a first direction centered axis of each other of the cylinder (X-direction).

In FIG. 7-2 (C), the electrode 50 which is a conductor is further disclosed. The electrode 50 has the shape of a needle electrode (Needle). The electrode 50 is disposed on the center axis of the cylinder of the first and second conductors 51A and 51B. Furthermore, the electrode 50 is disposed on the first conductor 51A side.

In FIG. 7 -2 (B) and FIG. 7 -2 (C), the first conductor 51A and second conductor 51B is connected to a first node of the power source 52. The electrode 50 is connected to the second node of the power source 52. The first node is a negative voltage and the second node is a positive voltage with respect to the first node. Corona discharge is generated between the first conductor 51A and the electrode 50, and between the second conductor 51B and the electrode 50, and ions and ozone wind are generated.

In FIG. 7 -2 (C), the distance from the electrode 50 to the first conductor 51A and second conductor 51B are (from L1 L3) plurality of distances exist. The relationship between the distances L1, L2, and L3 is L3>L2> L1. Therefore, the combination of ions and ozone generated strongly corresponding to the shortest distance (L1) and ions and ozone generated weakly compared to L1 corresponding to the longest distance (L3) Ozone wind is generated from the electrode 50 into the cylinders of the first conductor 51A and the second conductor 51B. The two first conductors 51A and the second conductor 51B are cylinders having different radii (inner diameters) from each other, and the amount of ions and ozone winds per unit capacity, ions and ozone winds due to their characteristic dimensional differences. Directionality, ion and ozone wind pressure are increased.

The shapes of the two electrodes (conductors), the first conductor 51A, the second conductor 51B, and the electrode 50 can be changed as appropriate. Further, an insulating layer (cylindrical insulator) may be disposed between the first conductor 51A and the second conductor 51B. Furthermore, the thickness of each of the first conductor 51A, the second conductor 51B, and the cylindrical insulator, and the size of each inner diameter may be appropriately changed. Furthermore, the angle of the curved surface (inner curved side surface) of the inner diameter can be changed as appropriate. By these changes, the relationship between the distances L1, L2, and L3 can be adjusted. For example, the distances L1, L2, and L3 may be the same (L1 = L2 = L3). For example, the distances L1, L2, and L3 may be L1> L2> L3. These characteristic changes and combinations increase the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure.

When an insulating layer is sandwiched between the first conductor 51A and the second conductor 51B, the voltages of the first conductor 51A and the second conductor 51B can be appropriately changed with respect to the electrode 50. . For example, the voltages applied to the two first conductors 51A and the second conductor 51B may be different negative voltages from the electrode 50 to which a positive voltage is applied. This characteristic change and combination with the foregoing also increase the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure.

  FIG. 8 is a development example of the third embodiment. One set (the first conductor 51A, the second conductor 51B, and the electrode 50, which are the three electrodes (conductors) of the third embodiment, is arranged in the lateral direction (second direction (Y direction)). This is an example in which a plurality of cylinders are arranged in the radial direction of the cylinder. In a plurality of sets, the directionality of the ion and ozone wind directions can be controlled by combining the directionality of the ion and ozone wind directions. Depending on the control purpose, an appropriate number of the plurality of installation positions may be arranged at arbitrary three-dimensional positions.

FIG. 9 is a diagram for explaining the fourth embodiment. Figure 9 -1 (A) and FIG. 9 -2 (B) is a perspective view showing the three-dimensional structure. Figure 9 -2 (C) is a circuit diagram showing a structural view and a voltage relationship as viewed from the first direction (X direction).

In FIG 9 -1 (A), 2 two electrodes 61A, 61B are disclosed, they are conductive. The electrode 61A is a first conductor of the first metal layer, and has a first cavity pattern 610A (through hole) having a first radius. The electrode 61B is a second conductor of the second metal layer, and has a second cavity pattern 610B (through hole) having a second radius smaller than the first radius.

In FIG 9 -2 (B), the first metal layer 61A and the second metal layer 61B is laminated in a first direction centered axis of mutual cavity pattern (X-direction).

In FIG. 9-2 (C), the electrode 60 which is a conductor is further disclosed. The electrode 60 has the shape of a needle electrode (Needle). The electrode 60 is disposed on the central axis of the cavity pattern of the first and second metal layers 61A and 61B. Furthermore, the electrode 60 is disposed on the first metal layer 61A side.

In FIG 9 -2 (B) and FIG. 9 -2 (C), the first metal layer 61A and the second metal layer 61B is connected to a first node of the power source 62. The electrode 60 is connected to the second node of the power source 62. The first node is a negative voltage and the second node is a positive voltage with respect to the first node. Corona discharge is generated between the first metal layer 61A and the electrode 60, and between the second metal layer 61B and the electrode 60, and ions and ozone wind are generated.

In FIG 9 -2 (C), the distance from the electrode 60 to the first metal layer 61A and the second metal layer 61B are (from L1 L3) plurality of distances exist. The relationship between the distances L1, L2, and L3 is L3>L2> L1. Therefore, the combination of ions and ozone generated strongly corresponding to the shortest distance (L1) and ions and ozone generated weakly compared to L1 corresponding to the longest distance (L3) Ozone wind is generated from the electrode 60 into the cavity pattern of the first metal layer 61A and the second metal layer 61B. The two first metal layers 61A and the second metal layers 61B are cavity patterns having different radii from each other, and due to their characteristic dimensional differences, the amount of ions and ozone wind per unit volume, the amount of ions and ozone winds Directional orientation, ions and ozone wind pressure are increased.

The shapes of the first metal layer 61A and the second metal layer 61B, which are two electrodes (conductors), and the electrode 60 can be changed as appropriate. Further, an insulating layer (insulator having a cavity pattern) may be disposed between the first metal layer 61A and the second metal layer 61B. Furthermore, the thickness of each of the first metal layer 61A, the second metal layer 61B, and the insulator having the cavity pattern, and the size of each inner diameter may be appropriately changed. Furthermore, the angle of the curved surface of the inner diameter (the curved side surface of the cavity pattern) can be changed as appropriate. By these changes, the relationship between the distances L1, L2, and L3 can be adjusted. For example, the distances L1, L2, and L3 may be the same (L1 = L2 = L3). For example, the distances L1, L2, and L3 may be L1> L2> L3. These characteristic changes and combinations increase the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure.

When an insulating layer is sandwiched between the first metal layer 61A and the second metal layer 61B, the respective voltages of the first metal layer 61A and the second metal layer 61B can be appropriately changed with respect to the electrode 60. . For example, the voltages applied to the two first metal layers 61A and the second metal layer 61B may be different negative voltages from the electrode 60 to which a positive voltage is applied. This characteristic change and combination with the foregoing also increase the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure.

  Each of the first metal layer 61A and the second metal layer 61B has two cavity patterns and two electrodes 60 corresponding to them. Assuming one cavity pattern and the corresponding electrode 60 as one set, the first metal layer 61A and the second metal layer 61B have two sets. In other words, the first and second metal layers and the electrodes are used as a set, and a plurality of sets are provided. By means of the above-described appropriate changes, the orientation of the ion and ozone wind directions can be controlled in a plurality of sets.

  As a development example (not shown) of the fourth embodiment, two sets (the first metal layer 61A and the second metal layer 61B, which are the two electrodes (conductors) of the fourth embodiment), and two sets A plurality of electrodes 50) can be further arranged in the lateral direction (second direction (Y direction), surface direction of the metal layer). By arranging a plurality of two sets, it is possible to control the directionality of the ion and ozone wind directions by matching the directionality of the ion and ozone wind directions. Depending on the control purpose, an appropriate number of the plurality of installation positions may be arranged at arbitrary three-dimensional positions.

FIG. 10 is a diagram for explaining the fifth embodiment. 10A is a top view (plan view), FIG. 10B is a cross-sectional view from XA to XB (first direction (X direction)), and FIG. 10C is a cross-sectional view from YA to YB (first view). 2 direction (Y direction)).

10A, 10B, and 10C, two electrodes M1 and M2 and one electrode E1 are disclosed, which are conductors. The electrode M1 is a first metal layer (first conductive layer) having a first thickness Z1. The electrode M2 is a second metal layer (second conductive layer) having a second thickness Z2. The first metal layer M1 has a first cavity pattern (through hole). The first cavity pattern includes first and second cavity regions (X1, X2). The first metal layer M1 includes a first metal region between the first and second cavity regions. The second metal layer M2 has a second cavity pattern (through hole). The second cavity pattern includes third and fourth cavity regions (X4, X3). The second metal layer M2 includes a second metal region between the third and fourth cavity regions. The second cavity region overlaps a portion of the third cavity region and the fourth cavity region and the second metal region. The third cavity region overlaps the first cavity region, a portion of the fourth cavity region, and the first metal region. The first and second cavity patterns have a common central axis. Therefore, the first metal region is smaller than the second metal region as viewed from the electrode E1 side. The first metal layer M1 and the second metal layer M2 are laminated in the order of the second metal layer M2 and the first metal layer M1 as viewed from the electrode E1 side.

The electrode E1 is disposed on the central axis of the cavity pattern of the first and second metal layers M1 and M2. Furthermore, the electrode E1 is disposed on the second metal layer M2 side. The electrode E1 has a different shape from the needle electrode (Needle). The electrode E1 is a cylinder having an upper surface (first region) and a lower surface (second region). The electrode E1 corresponds to the second metal layer M2 side, and the first region (upper surface) of the first node of the electrode E1 is the second region (lower surface) of the second node opposite to the first node. Bigger than).

Similar to the third and fourth embodiments, the first and second metal layers M1, M2 are connected to the first node of the power supply. The electrode E1 is connected to the second node of the power supply. The first node is a negative voltage and the second node is a positive voltage with respect to the first node. Corona discharge is generated between the first metal layer M1 and the electrode E1, and between the second metal layer M2 and the electrode E1, respectively, and ions and ozone winds are generated.

In FIG. 10B, there are a plurality of distances (L1, L2) from the electrode E1 to the first metal layer M1 and the second metal layer M2. The relationship between the distances L1 and L2 is L1≈L2 (substantially the same). This is because the first and second metal regions are arranged concentrically with respect to the electrode E1. The distance L1≈L2 is equal to the first thickness Z1 of the first metal layer M1 and the second thickness Z2 of the second metal layer M2, and the first cavity region of the first metal layer M1 and the first metal layer M1. This can be realized by appropriately adjusting the third cavity region of the second metal layer M2 and the column of the electrode E1. Accordingly, the combination of the ions and ozone generated strongly corresponding to the distance (L1) and the ions and ozone generated strongly corresponding to the distance (L2) causes the ions and ozone wind to flow from the electrode E1 to the first. The metal layer M1 and the second metal layer M2 are generated toward the respective cavity patterns. Two first cavity patterns and a second cavity pattern overlap each other, and a first metal region overlaps a second cavity pattern (third cavity region), and a second metal region overlaps the first Their characteristic stacked structure of overlapping the cavity pattern (second cavity region) increases the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure. . Furthermore, since the first metal layer M1 and the second metal layer M2 are laminated, the strength is increased.

At 10 (C), first and second support metal regions are shown that support the respective conductors of the first and second metal regions. Since the first and second supporting metal regions are laminated, the strength is increased.

The shapes of the first metal layer M1 and the second metal layer M2, which are two electrodes (conductors), and the electrode E1 can be changed as appropriate. For example, the dimensions of the first cavity pattern (first and second cavity regions (X1, X2)) and the second cavity pattern (third and fourth cavity regions (X4, X3)) are appropriately changed. In other words, the respective dimensions of the first and second metal regions may be appropriately changed, and the respective dimensions (thicknesses) of the first metal layer M1 and the second metal layer M2. In addition, the shape (side surface) of each conductor in the first and second metal regions may be changed as appropriate, and the relationship between the distances L1 and L2 is adjusted by these changes. For example, the distances L1 and L2 may be set to L1 <L2. For example, the distances L1 and L2 may be set to L1> L2. By these characteristic changes and combinations, ions and ozone wind per unit capacity Quantity, ions and oz Direction of orientation of the wind, the ion and ozone wind pressure is increased.

  Similar to the respective development examples of the third and fourth embodiments, a plurality of sets can be obtained.

FIG. 11 is a diagram for explaining the sixth embodiment. 11A is a top view, FIG. 11B is a cross-sectional view from XA to XB (first direction (X direction)), and FIG. 11C is a cross-sectional view from YA to YB (second direction ( Y direction)).
In the description of the sixth embodiment, differences from the fifth embodiment will be mainly described.

In FIGS. 11A, 11B, and 11C, the insulating layer I1 sandwiched between the first and second metal layers M1 and M2 is disclosed. The insulating layer I1 is an insulator having a third thickness Z3. The insulating layer I1 has the same shape as the second metal layer M2. The electrode E2 has a shape different from a needle-like electrode (Needle) and a cylinder. The electrode E2 has a conductive line and a spherical surface (first region) corresponding to the second metal layer M2 side. The distance L1≈L2 is the total thickness of the first thickness Z1 of the first metal layer M1, the second thickness Z2 + of the second metal layer M2, and the third thickness Z3 of the insulating layer I1, and the first thickness Z1. This can be realized by appropriately adjusting the first cavity region of the first metal layer M1, the third cavity region of the second metal layer M2, and the electrode E2 having a spherical surface (first region). That is, the total thickness of the second thickness Z2 of the second metal layer M2 and the third thickness Z3 of the insulating layer I1 is the second metal layer M2 of the fifth embodiment (FIG. 10B). This corresponds to the second thickness Z2.

The voltages of the first metal layer M1 and the second metal layer M2 can be appropriately changed to different voltages. For example, the voltages applied to the two first metal layers M1 and the second metal layer M2 may be different negative voltages from the electrode E2 to which a positive voltage is applied. These characteristic changes and combinations increase the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure.

FIG. 12 is a diagram for explaining the seventh embodiment. 12A is a top view and FIG. 12B is a cross-sectional view (first direction (X direction)) from XA to XB.

In the description of the seventh embodiment, differences from the fifth and sixth embodiments will be mainly described.

12A and 12B, the first metal layer M1 includes a first region that bumps up with respect to the central axis of the first cavity pattern (through hole). The second metal layer M2 includes a second region that protrudes with respect to the central axis of the second cavity pattern (through hole). The insulating layer I1 includes a third region that protrudes with respect to the central axis of the second cavity pattern. The degree of protrusion of the first metal layer M1 with respect to the electrode E1 is higher than the degree of protrusion of the second metal layer M2. The degree of protrusion of the insulating layer I1 is substantially the same as the degree of protrusion of the first metal layer M1. This is because the sixth embodiment (FIG. 11) is pressed with a mold having a semi-spherical (dome) depression (depth).

Due to this shape, in FIG. 12B, the relationship between the distances L1 and L2 from the electrode E1 to the first metal layer M1 and the second metal layer M2 is L1> L2. This is because if the first thickness Z1 of the first metal layer M1 and the second thickness Z2 of the second metal layer M2 are the same, the third thickness Z3 of the insulating layer I1 is related. . Accordingly, a combination of ions and ozone generated strongly corresponding to a short distance (L2) and ions and ozone generated weakly compared to L2 corresponding to a long distance (L1), and thus ions and ozone winds. From the electrode E1 into the cavity pattern of the first metal layer M1 and the second metal layer M2. Note that a gap is seen between the second metal layer M2 and the insulating layer I1 related to the distance L2, but this is a problem in drawing drawing.

The surface on the electrode E1 side of the first metal region (which is between the first and second cavity regions of the first metal layer M1) and the second metal region (which is the second metal layer M2 Since the surface on the electrode E1 side (between the third and fourth cavity regions) has a perpendicular to the electrode E1, the amount of ions and ozone wind per unit capacity, and the orientation of the ion and ozone wind directions , Ions and ozone wind pressure are increased.

The shapes and thicknesses of the first metal layer M1 and the second metal layer M2, which are two electrodes (conductors), and the insulating layer I1 can be changed as appropriate. By these changes, the relationship between the distances L1 and L2 can be adjusted. For example, the distances L1 and L2 may be the same (L1 = L2). This can be realized by making the first thickness Z1 of the first metal layer M1 larger than the total thickness of the second thickness Z2 of the second metal layer M2 and the third thickness Z3 of the insulating layer I1. For example, the distances L1 and L2 may be L2> L1. These characteristic changes and combinations increase the amount of ions and ozone wind per unit volume, the directionality of ions and ozone wind, and the ion and ozone wind pressure.

FIG. 13 is a diagram for explaining the eighth embodiment. 13A is a top view, FIG. 13B is a cross-sectional view from XA to XB (first direction (X direction)), and FIG. 13C is a cross-sectional view from YA to YB (second direction ( Y direction)).

In the description of the eighth embodiment, differences from the fifth to seventh embodiments will be mainly described.

13A, 13B, and 13C, the first metal layer M1 includes a first region that protrudes with respect to the central axis of the first cavity pattern (through hole). The second metal layer M2 includes a second region that protrudes with respect to the central axis of the second cavity pattern (through hole). The degree of protrusion of the first metal layer M1 with respect to the electrode E1 is higher than the degree of protrusion of the second metal layer M2. This is because the sixth embodiment (FIG. 11) is pressed with a mold having a stepped depression (depth).

FIG. 14 is a flowchart for explaining the first manufacturing method. It can be applied to the third (FIG. 7), fourth (FIG. 9) and fifth (FIG. 10) embodiments.

A first metal layer (conductor, metal body) is formed with a first pattern (step 10). A second metal layer (conductor, metal body) is formed with a second pattern (step 20). The first and second metal layers are bonded together (step 30). Techniques such as solid phase bonding, pressure welding (hot, normal temperature, cold), diffusion bonding (high temperature, normal temperature, liquid phase), friction welding, ultrasonic bonding, etc. are applied. A conductive material (adhesive) may be used. In step 30, the alignment of the first and second metal layers can use, for example, two alignment points P1 and P2 (P1 to P2 in the X direction) shown in FIG. 10B. . This is because the outermost shape of each of the first and second cavity patterns is advantageous in that the side walls of the respective metal layers are matched and the line segment length of P1 to P2 is relatively long and the error is small. It is desirable to install the Y direction in addition to the X direction. An electrode is disposed at the center of the first and second metal layers (on the center lines of the first and second patterns) (step 40). A power source is connected to at least one of the first and second metal layers and the electrode, respectively. In step 40, the alignment of the first and second metal layer arrangement electrodes is preferably based on the first metal region (between the first and second cavity regions) of the first metal layer. . A three-dimensional structure can be realized by a simple manufacturing process, and the manufacturing cost can be reduced. The first and second patterns mean first and second cavity patterns (through holes).

  FIG. 15 is a flowchart for explaining the second manufacturing method. The present invention can be applied to the sixth (FIG. 11) and seventh (FIG. 12) embodiments. In the description of the second manufacturing method, differences from the first manufacturing method will be mainly described.

The first metal layer (conductor, metal body) and the insulating layer (insulator) are bonded together (step 50). A first metal layer and an insulating layer are formed in a first pattern (step 60). The first and second metal layers are bonded together via an insulating layer (step 80). Techniques such as bonding, coating, and vapor deposition of insulating materials (insulating agents) are applied. A power source is connected to the first and second metal layers and the electrodes, respectively. A three-dimensional structure can be realized by a simple manufacturing process, and the manufacturing cost can be reduced.

  FIG. 16 is a flowchart for explaining the third manufacturing method. This can be applied to the seventh (FIG. 12) embodiment. In the description of the third manufacturing method, differences from the first and second manufacturing methods will be mainly described.

The first and second metal layers (conductor, metal body) and insulating layer (insulator) are bonded together (step 80). The first and second metal layers and the insulating layer (insulator) are pressed (step 100) with a mold having a semispherical (dome) depression (depth). A three-dimensional structure can be realized by a simple manufacturing process, and the manufacturing cost can be reduced.

The mold can be changed as appropriate. For example, the slope of the hemispherical dome (dome) is different from each other in the region where the fourth cavity region (X3) overlaps with the second cavity region (X2) and the third cavity region (X4). By doing so, the relationship between the distances L1 and L2 from the electrode E1 to the first metal layer M1 and the second metal layer M2 can be appropriately changed. For example, if the mold is a stepped depression (depth), the present invention can be applied to the eighth embodiment (FIG. 13). By making the inclination of the step-shaped depression different in the region where the fourth cavity region (X3) overlaps with the second cavity region (X2) and the third cavity region (X4), The relationship between the distances L1 and L2 from the electrode E1 to the first metal layer M1 and the second metal layer M2 can be appropriately changed.

FIG. 17 is a diagram for explaining the twelfth embodiment. Figure 17 -1 (A) is a top view, FIG. 17 -1 (B) is a sectional view of XB from XA (first direction (X direction)), FIG. 17 -1 (C) is a sectional view of YB from YA (Second direction (Y direction)), FIG. 17-1 (D) is a third metal layer, and FIG. 17-2 (E) is a bar. In the description of the twelfth embodiment, differences from the fifth (FIG. 10) and sixth (FIG. 11) embodiments will be mainly described.

17 -1 (A) -1 (D), a metal layer M3 sandwiched between the first and second metal layers M1, M2 is disclosed. The metal layer M3 is a conductor (metal body) having a third thickness Z3. The metal layer M3 is a circle having a diameter X5 and has a third cavity pattern H1 (through hole) having a diameter X6. The metal layer M3 and / or the third cavity pattern is preferably circular. This is because a force (moment) acts evenly when the first and second metal layers M1 and M2 are brought into close contact (for example, pressure welding (hot, normal temperature, cold), friction welding, etc.). For example, a metal washer may be assumed. The shape and size of the metal layer M3 are different from the shapes and sizes of the first and second metal layers M1 and M2, respectively. Therefore, the metal layer M3 is sandwiched between the first and second metal layers M1 and M2, and an air gap AG1 is formed between the first and second metal layers M1 and M2. In other words, an air gap AG1 is formed between the first and second metal layers M1 and M2 by the thickness Z3 of the metal layer M3. The first and second metal layers M1 and M2 each have a third cavity pattern H1 (through hole) having a circular shape with a diameter X6. A rod S1 (Stick, Rod, Pole) shown in FIG. 17-2 (E) is set in the third cavity pattern H1 included in each of the first, second, and third metal layers M1, M2, and M3. . In other words, the rod S1 passes through the third cavity pattern H1 of the corresponding first, second and third metal layers M1, M2, M3. Preferably, the rod S1 is a cylinder, and its diameter (cross-sectional viewpoint) is substantially the same as the diameter X6 (third cavity pattern H1 (through hole)) of the metal layer M3. The third cavity pattern H1 is finally sealed by the rod S1. That is, air does not pass through the front and back surfaces of the corresponding metal layer. Thus, the first and second metal layers M1 and M2 are supported (fixed) with an air gap AG1 corresponding to the thickness Z3 of the metal layer M3. The electrode E3 is a needle electrode (Needle). Therefore, the air gap AG1 corresponding to the thickness Z3 of the metal layer M3 is an important factor for setting the distances L1 and L2 from the electrode E3. In other words, the thickness Z3 of the metal layer M3 sets the distances L1 and L2 from the electrode E3, similarly to the third thickness Z3 of the insulating layer I1 shown in the sixth embodiment (FIG. 11). It is an important factor.

The metal body M3 is not limited to a circle. Furthermore, the metal body M3 can be replaced with an insulating layer of an insulator. In this case, the insulator has a circular shape having a diameter X5, and has a third cavity pattern H1 (through hole) having a diameter X6. Further, the rod S1 is not limited to a cylinder. For example, a cone (or a cylinder having a different bottom area and upper area) may be used. In that case, the air gap AG1 can be formed between the first and second metal layers M1 and M2 without using the metal body M3. That is, the manufacturing cost can be reduced. In this case, the diameter of the third cavity pattern H1 (through hole) included in the first metal layer M1 is different from the diameter of the third cavity pattern H1 (through hole) included in the second metal layer M2. Different. Furthermore, the bar S1 is not limited to a circular cross section, and may be, for example, a rectangular column (a polygonal column or a polygonal column having a different top area from a bottom area) or a polygonal pyramid. Furthermore, the rod S1 may be an insulator instead of a metal body. A rod S1 (metal body or insulator) is set in the first and second metal layers and the third cavity pattern H1 included in the metal layer M3 or the insulator replacing the metal layer M3. Furthermore, when the rod S1 is a metal body, the power source can supply a voltage to the first and second metal layers via the rod S1.

FIG. 18 is a diagram for explaining the thirteenth embodiment. Figure 18 -1 (A) is a top view of the first metal layer M1, FIG. 18 -2 (B) is a top view of the second metal layer M2.
In the description of the thirteenth embodiment, differences from the twelfth (FIG. 17) embodiment will be mainly described.

In FIG. 18 -1 (A), discloses a metal body (one metal layer M1) having a long side of the X and Y directions to X7, the segmented regions 9 respectively are square (3X3) Disclosed. Each partition region is disclosed with seven first cavity patterns. Each partition region is disclosed with one first cavity pattern in its center and six first cavity patterns in its circular peripheral region. The pitch (X direction and Y direction) of the centers of the partition areas adjacent to each other is the size of X8. Furthermore, four third cavity patterns H1 are disclosed at the four corners of each partition region. The pitch of the third cavity pattern H1 developed in the X direction and the Y direction in one partition region is the size of X9. Nine (3 × 3) partition regions are formed by one metal body (one metal layer M1). Nine (3X3) partition regions are partitioned by grooves G1 in the X direction and the Y direction, respectively. The groove G1 does not penetrate the first metal layer M1, and the first metal layer M1 is formed with a predetermined depth. In addition, a straight line indicated by a solid line in relation to the seven first cavity patterns and four third cavity patterns H1, and a circular line indicated by a broken line in relation to the six first cavity patterns are: It is information indicating the positional relationship between each center and each other, not information indicating the shape. The meaning can be easily understood by the operator.

The groove G1 developed in the X direction and the Y direction can cope with various shapes of devices that generate winds of ions and ozone by appropriately cutting the groove G1. That is, the manufacturing cost can be reduced.

In FIG 18 -2 (B), it will be described focusing on differences from the FIG. 18 -1 (A). One metal body (one metal layer M2) having X7 long sides in the X direction and the Y direction is disclosed, and nine (3X3) partition regions each having a square shape are disclosed. Each partition region is disclosed seven second cavity patterns. Each partition region is disclosed with one second cavity pattern in its center and six second cavity patterns in its circular peripheral region. Nine (3 × 3) partition regions are formed by one metal body (one metal layer M2).

FIG. 19 is a flowchart for explaining the fourth manufacturing method. The present invention can be applied to the twelfth (FIG. 17) and thirteenth (FIG. 18) embodiments.
A first metal layer (conductor, metal body) is formed with first and third patterns (step 110). It is desirable to form the first and third patterns simultaneously. A second metal layer (conductor, metal body) is formed with the second and third patterns (step 120). It is desirable to form the second and third patterns simultaneously. A third metal layer (conductor, metal body) is formed with a third pattern (step 130). The first, second and third metal layers are aligned (alignment) (step 140). In step 140, the alignment of the first and second metal layers, for example can be utilized to FIG 17 -1 (B) 2 one alignment point indicated by P1 (P1 to P2 in the X-direction). This is because the outermost shape of each of the first and second cavity patterns is advantageous in that the side walls of the respective metal layers are matched and the line segment length of P1 to P2 is relatively long and the error is small. It is desirable to install the Y direction in addition to the X direction. A bar is set in the third pattern of each of the first, second, and third metal layers to support the first, second, and third metal layers (step 150). Techniques such as solid phase bonding, pressure welding (hot, normal temperature, cold), diffusion bonding (high temperature, normal temperature, liquid phase), friction welding, ultrasonic bonding, etc. are applied. A conductive material (adhesive) may be used. Thus, the third cavity pattern H1 is finally sealed by the rod S1. That is, air does not pass through the front and back surfaces of the corresponding metal layer. An electrode is disposed at the center of the first and second metal layers (on the center lines of the first and second patterns) (step 160). In step 160, the alignment of the first and second metal layer alignment electrodes is preferably based on the first metal region (between the first and second cavity regions) of the first metal layer. . A power source is connected to at least the first and second metal layers and one of the bars and the electrodes, respectively. (Step 170) When at least one of the third metal layer and the bar is a conductor (metal body), a power source can be connected to the bar and the electrode, respectively. A three-dimensional structure can be realized by a simple manufacturing process, and manufacturing costs can be reduced. The first and second patterns mean first and second cavity patterns (through holes).

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and can be implemented in various other forms without departing from the gist of the present invention. For example, the first embodiment to the eighth embodiment and the eleventh embodiment to the thirteenth embodiment can be appropriately combined regardless of whether they are specified or not specified in this specification. The first manufacturing method to the fourth manufacturing method can be appropriately combined. The technical scope of the present invention is not limited to the above-described embodiments or combinations thereof, but extends to the matters described in the claims and equivalents or variations thereof.

  Hereinafter, a supplementary description of the present invention will be added.

(Appendix A1)
Forming a first metal layer in a first cavity pattern;
Forming a second metal layer in a second cavity pattern different from the first cavity pattern;
Laminating a first metal layer formed with the first cavity pattern and a second metal layer formed with the second cavity pattern;
An electrode is disposed on a central axis of the first and second cavity patterns;
A method of manufacturing an apparatus for generating corona discharge between the first and second metal layers and the electrodes to generate a wind of ions and ozone.
(Appendix A2)
Furthermore, an insulating layer is formed with the first cavity pattern,
An insulating layer formed with the first cavity pattern is interposed between a first metal layer formed with the first cavity pattern and a second metal layer formed with the second cavity pattern. A method for manufacturing the device according to appendix A1, wherein the device is sandwiched.
(Appendix A3)
Furthermore, an insulating layer and the first metal layer before being formed in the first cavity pattern are laminated,
The method of manufacturing an apparatus according to appendix A1, wherein the stacked insulating layer and the first metal layer are formed in the first cavity pattern.
(Appendix A4)
The insulating layer and the first metal layer formed with the first cavity pattern and the second metal layer formed with the second cavity pattern are stacked so as to sandwich the insulating layer. Method for manufacturing apparatus according to A3 (Appendix A5)
In any one of appendices A1 to A4, wherein the first metal layer and the second metal layer that are stacked are pressed so as to protrude with respect to a central axis of the first and second cavity patterns. Method of manufacturing the device described (Appendix A6)
Further, the first metal layer is formed in a third cavity pattern,
Forming the second metal layer with the third cavity pattern;
The first and second metal layers are stacked so as to sandwich the third metal layer, and a bar is set in the third cavity pattern of each of the first, second, and third metal layers. The manufacturing method of the apparatus as described in appendix A1.
(Appendix A7)
Furthermore, the first and third cavity patterns are formed simultaneously,
The device manufacturing method according to appendix A6, wherein the second and third cavity patterns are formed simultaneously.
(Appendix A8)
Furthermore, the manufacturing method of the apparatus of appendix A1 which aligns the said 1st and 2nd metal layer with the side wall which the said 1st and 2nd cavity pattern to respectively correspond has.
(Appendix A9)
Furthermore, the arrangement of the electrodes is the method for manufacturing an apparatus according to appendix A8, wherein the first cavity pattern is aligned.

(Appendix B1)
A first surface having a first line segment and a second line segment intersecting the first line segment; a second surface opposite to the first surface; and a second thickness. A polygonal first conductor supplied with a first voltage;
A third surface having a third line segment and a fourth line segment intersecting with the third line segment; a fourth surface opposite to the third surface; and a third thickness. A polygonal second conductor supplied with a second voltage;
A fifth surface having a fifth line segment and a sixth line segment intersecting with the fifth line segment; a sixth surface opposite to the fifth surface; and a first thickness. A polygonal third conductor supplied with a third voltage different from the first and second voltages,
The first and second conductors are arranged such that the first and third surfaces face each other at a first angle that is less than 180 degrees;
The first and third conductors are arranged so that the first and fifth surfaces face each other at a second angle that is less than 90 degrees;
The second and third conductors are arranged such that the third and sixth surfaces face each other at a third angle that is less than 90 degrees;
An apparatus for generating corona discharge between the first and third conductors and between the second and third conductors to generate ions and ozone winds, respectively.
(Appendix B2)
The third conductor includes a first region having the first thickness and a second region thinner than the first thickness,
Between the first surface of the first conductor and the second region of the third conductor, and the third surface of the second conductor and the second region of the third conductor. The apparatus according to appendix B1, wherein each generates a corona discharge between the two.
(Appendix B3)
The apparatus according to appendix B2, wherein the third conductor is in the form of a blade as the second region.
(Appendix B4)
The first conductor includes a third region having the second thickness and a fourth region thinner than the second thickness,
The apparatus according to any one of appendices B1 to B3, wherein the first conductor is in the shape of a blade as the fourth region.
(Appendix B5)
The second conductor includes a fifth region of the third thickness and a sixth region thinner than the third thickness,
The apparatus according to any one of appendices B1 to B4, wherein the second conductor is in the shape of a blade as the sixth region.
(Appendix B6)
The apparatus according to any one of appendices B1 to B5, wherein the ion and ozone winds flow from the third conductor in a direction between the first and second conductors.
(Appendix B7)
The apparatus according to any one of appendices B1 to B6, wherein the first to third conductors are used as a set, and the plurality of sets are included.
(Appendix B8)
The plurality of sets are arranged in the direction of the first line segment that is longer than the second line segment, and the ion and ozone wind flows from the third conductor to the first and second conductive lines. The device of appendix B7, which flows in a direction between the bodies.

(Appendix C1)
A cylindrical first conductor having a first line segment parallel to the first direction intersecting the radius as a curved surface, to which a first voltage is supplied;
A second conductor that passes through the center of the cylinder in the first direction and is supplied with a second voltage different from the first voltage;
The curved surface has a cavity region in the direction of the first line segment, and first and second conductive regions in the direction of the first line segment so as to sandwich the cavity region,
The second conductor has first and second electrodes in different directions of the curved surface corresponding to the first conductive region, and different directions of the curved surface in correspondence with the second conductive region. Have third and fourth electrodes,
A corona discharge is generated between each of the first and second electrodes and the first conductive region, and between each of the third and fourth electrodes and the second conductive region, and ions and An apparatus for generating ozone wind.
(Appendix C2)
The apparatus according to appendix C1, wherein the first to fourth electrodes have a shape including an acute angle with respect to the first direction.
(Appendix C3)
The apparatus according to appendix C1 or C2, wherein the first to fourth electrodes correspond to the cavity region.
(Appendix C4)
The device according to any one of appendices C1 to C3, wherein the second conductor is coated with an insulating film except for the first to fourth electrodes.
(Appendix C5)
The apparatus according to any one of appendices C1 to C4, wherein the first and second conductors are used as a set, and the plurality of sets are included.
(Appendix C6)
The apparatus according to appendix C5, wherein the plurality of sets are arranged in a direction intersecting the first direction, and the ion and ozone winds flow in the first direction.

(Appendix D1)
A cylindrical first conductor having, as a curved surface, a first line segment parallel to a first direction that intersects a first radius that is an inner diameter, and to which a first voltage is supplied;
A second line segment parallel to the first direction intersecting with a second radius having an inner diameter smaller than the first radius is formed as a curved surface, supplied with a second voltage, and supplied with the first conductive material. A cylindrical second conductor laminated to the body;
An electrode disposed on a central axis of a cylinder of the first and second conductors and supplied with a third voltage different from the first and second voltages;
An apparatus for generating corona discharge between the first conductor and the electrode and between the second conductor and the electrode, and generating ions and ozone winds, respectively.
(Appendix D2)
The apparatus according to appendix D1, wherein the order of stacking the first and second conductors is the order of the first conductor and the second conductor from the electrode side.
(Appendix D3)
The apparatus according to appendix D1 or D2, further comprising an insulating layer sandwiched between the first and second conductors.
(Appendix D4)
The distance from the electrode to the first conductor closest to the electrode is the same as or shorter than the distance from the electrode to the second conductor closest to the electrode, any one of appendices D1 to D3 The device according to item.
(Appendix D5)
The apparatus according to any one of appendices D1 to D4, which includes the first and second conductors and the electrode as a set, and includes a plurality of the sets.
(Appendix D6)
The plurality of sets are arranged in a direction intersecting the first direction, and the wind of ions and ozone flows from the electrode to the inner diameter of the second conductor in the supplementary note D6. The device described.

(Appendix E1)
A first metal layer having a first cavity pattern of a first radius and supplied with a first voltage;
A second metal layer having a second cavity pattern with a second radius smaller than the first radius, supplied with a second voltage, and stacked on the first metal layer;
A third voltage different from the first and second voltages is supplied, and an electrode is arranged on a central axis of the first and second cavity patterns, and
An apparatus for generating a corona discharge between the first metal layer and the electrode and between the second metal layer and the electrode to generate ions and ozone winds, respectively.
(Appendix E2)
The apparatus according to appendix E1, wherein the stacking order of the first and second conductive layers is the order of the first conductive layer and the second conductive layer from the electrode side.
(Appendix E3)
The apparatus according to appendix E1 or E2, further comprising an insulating layer sandwiched between the first and second conductive layers.
(Appendix E4)
The distance from the electrode to the first conductive layer closest to the electrode is the same as or shorter than the distance from the electrode to the second conductive layer closest to the electrode, any one of appendices E1 to E3 The device according to item.
(Appendix E5)
The apparatus according to any one of appendices E1 to E4, wherein the first and second conductive layers and the electrodes are used as a set, and the plurality of sets are included.
(Appendix E6)
The apparatus according to appendix E5, wherein the first and second metal layers included in each of the plurality of sets are formed as one metal layer.
(Appendix E7)
Furthermore, the plurality of sets each include an insulating layer sandwiched between the first and second metal layers, and the insulating layers included in each of the plurality of sets are formed as one insulating layer, respectively. The device described in 1.
(Appendix E8)
The ion and ozone winds respectively correspond to the direction of the central axis and correspond to the second conductive layers respectively corresponding to the electrodes from the corresponding electrodes via the first cavity patterns corresponding to the first conductive layers. The apparatus according to any one of appendices E5 to E7, wherein the apparatus flows into the second cavity pattern.
(Appendix F1)
Forming a first metal layer in a first cavity pattern;
Forming a second metal layer in a second cavity pattern different from the first cavity pattern;
Laminating a first metal layer formed with the first cavity pattern and a second metal layer formed with the second cavity pattern;
An electrode is disposed on a central axis of the first and second cavity patterns;
A method of manufacturing an apparatus for generating corona discharge between the first and second metal layers and the electrodes to generate a wind of ions and ozone.
(Appendix F2)
In addition, prepare a stick,
The method for manufacturing an apparatus according to appendix F1, wherein the bar is installed so as to support the first and second metal layers.
(Appendix F3)
In addition, a third metal layer is prepared,
The method of manufacturing an apparatus according to appendix F2, wherein the third metal layer is installed so as to be sandwiched between the first and second metal layers.
(Appendix F4)
The method of manufacturing an apparatus according to appendix F3, wherein the third metal layer is installed so as to give an air gap to the first and second metal layers.
(Appendix F5)
The method for manufacturing an apparatus according to appendix F4, wherein the rod is passed through a third cavity pattern included in the third metal layer.
(Appendix F6)
Forming the first metal layer with the third cavity pattern;
Forming the second metal layer with the third cavity pattern;
The method of manufacturing an apparatus according to appendix F5, wherein the bar is set in the third cavity pattern of each of the first, second, and third metal layers.
(Appendix F7)
The first and third cavity patterns are formed simultaneously;
The device manufacturing method according to attachment F6, wherein the second and third cavity patterns are formed simultaneously.
(Appendix F8)
In addition, a third metal layer is prepared,
The method for manufacturing an apparatus according to appendix F1, wherein the third metal layer is installed so as to be sandwiched between the first and second metal layers.
(Appendix F9)
The method for manufacturing an apparatus according to appendix F8, wherein the third metal layer is installed so as to give an air gap to the first and second metal layers.
(Appendix F10)
In addition, prepare a stick,
10. The method for manufacturing an apparatus according to appendix F8 or 9, wherein the rod is penetrated through a third cavity pattern of the third metal layer.
(Appendix F11)
Forming the first metal layer with the third cavity pattern;
Forming the second metal layer with the third cavity pattern;
The method of manufacturing an apparatus according to appendix F10, wherein the rod is set in the third cavity pattern of each of the first, second, and third metal layers.
(Appendix F12)
The method of manufacturing an apparatus according to attachment F11, wherein the first and third cavity patterns are formed simultaneously, and the second and third cavity patterns are formed simultaneously.
(Appendix F13)
In addition, an insulating layer is prepared,
The method of manufacturing an apparatus according to appendix F1, wherein the insulating layer is installed so as to be sandwiched between the first and second metal layers.
(Appendix F14)
The method of manufacturing an apparatus according to appendix F13, wherein the insulating layer is installed so as to give an air gap to the first and second metal layers.
(Appendix F15)
The method for manufacturing a device according to appendix F13 or 14, wherein the insulating layer is formed with the second cavity pattern.
(Appendix F16)
Furthermore, the manufacturing method of the device according to appendix F15, wherein the second cavity pattern included in each of the insulating layer and the second metal layer is formed simultaneously.
(Appendix F17)
The apparatus according to any one of appendices F1 to 16, wherein the first metal layer and the second metal layer are pressed so as to be raised with respect to a central axis of the first and second cavity patterns. Manufacturing method
(Appendix F18)
The first cavity pattern includes first and second cavity regions with respect to the central axis,
The first metal layer includes a first metal region between the first and second cavity regions;
The second cavity pattern includes third and fourth cavity regions with respect to the central axis,
The apparatus according to any one of appendices F1 to 17, wherein the second metal layer includes a second metal region between the third and fourth cavity regions.
(Appendix F19)
The order of lamination of the first and second metal layers is the order of the second metal layer and the first metal layer from the electrode side,
The apparatus of appendix F18, wherein the first metal region is smaller than the second metal region.
(Appendix F20)
The order of lamination of the first and second metal layers is the order of the second metal layer and the first metal layer from the electrode side,
The apparatus according to appendix F18 or 19, wherein the diameter of the first metal region is smaller than the diameter of the second metal region.
(Appendix F21)
The apparatus according to any one of appendices F18 to 20, wherein a portion of the second cavity region overlaps a portion of the third cavity region and the second metal region.
(Appendix F22)
A portion of the second cavity region overlaps the fourth cavity region;
The apparatus of appendix F21, wherein the third cavity region overlaps the first cavity region and the first metal region.
(Appendix F23)
The order of lamination of the first and second metal layers is the order of the second metal layer and the first metal layer from the electrode side,
The distance from the electrode to the first metal region closest to the electrode is the same as or longer than the distance from the electrode to the second metal region closest to the electrode, or any one of supplementary notes F18 to F22 The device described in 1.

1, 2, 3, 4, 5, 6 Electrode pairs 10, 11A, 11B, 20, 21A, 21B, 30, 31A, 31B, 40A, 40B, 41, 50, 51A, 51B, 60, 61A, 61B, M1, M2, E1, E2, E3 Electrode 12 22, 32, 42, 52, 62 Power supply 610A, 610B Cavity (through hole, cavity pattern)
I1 Insulator H1 Third cavity pattern (through hole)
G1 Groove
M1, M2, M3 First, second and third metal layers AG1 Air gap S1 bar (Stick, Rod, Pole)

Claims (3)

Forming a first metal layer in a first cavity pattern;
Forming a second metal layer in a second cavity pattern different from the first cavity pattern;
The first metal layer formed with the first cavity pattern and the second metal layer formed with the second cavity pattern are overlaid ,
An electrode is disposed on a central axis of the first and second cavity patterns, and a shortest distance from the electrode to the first metal layer is larger than a shortest distance from the electrode to the second metal layer;
An apparatus for generating corona discharge between the first and second metal layers and the electrodes to generate a wind of ions and ozone.   Disposing an insulating layer between the first metal layer and the second metal layer;
  The apparatus of claim 1. The first cavity pattern includes first and second cavity regions with respect to the central axis,
The first metal layer includes a first metal region between the first and second cavity regions;
The second cavity pattern includes third and fourth cavity regions with respect to the central axis,
The second metal layer includes a second metal region between the third and fourth cavity regions;
The apparatus according to claim 1 or 2 .