JP6569069B1 - Inspection device - Google Patents

Abstract

An inspection apparatus capable of realizing the same effect as that of a TDI system with a simple and small configuration is provided. A conveying means for conveying an inspection object placed on a conveying surface in a predetermined conveying direction, an electromagnetic wave irradiating means for irradiating the inspection object with an electromagnetic wave, and substantially orthogonal to the predetermined conveying direction. M line sensors in the predetermined transport direction and each of the M line sensor sequentially detect the electromagnetic waves transmitted through substantially the same region of the inspection object being transported by the transport means. And detection means for outputting detection data corresponding to each of the M-line line sensors, and electromagnetic waves transmitted through substantially the same region of the inspection object included in the plurality of detection data output by the detection means Adding means for performing control for adding the detected data. [Selection] Figure 1

Description

  The present invention relates to an inspection apparatus for inspecting a foreign object or the like non-destructively by irradiating an inspection object with an electromagnetic wave such as an X-ray.

  In general, in each process from product manufacture to packaging and shipment, foreign matter etc. in the product or packaging by the inspection method suitable for the product to be inspected and the type (material, size, etc.) of foreign matter that can be mixed A check is made to see if there is any contamination.

  For example, in nondestructive inspection using electromagnetic waves, an inspection object is irradiated with electromagnetic waves such as X-rays, and the transmitted electromagnetic waves are detected. At this time, the degree of transmission of electromagnetic waves varies depending on the presence or absence of foreign matter in the inspection object and the material of the foreign matter. Therefore, by generating a two-dimensional image in which the detected intensity distribution of transmitted electromagnetic waves is expressed by shading or the like, it is possible to inspect the situation inside the inspection object that cannot be known from the appearance.

  Specifically, for example, the line sensor arranged to extend in a direction substantially orthogonal to the conveyance direction of the inspection object scans the electromagnetic wave transmitted through the inspection object while moving the inspection object, The electromagnetic wave transmission image is generated one after another. These are sequentially arranged in the scanning direction to generate a two-dimensional image of the inspection object.

  However, simply scanning the inspection object with one line sensor does not provide sufficient exposure time, and the two-dimensional image becomes dark.

  One of detection methods that contribute to solving this problem is a TDI (Time Delay Integration) method disclosed in Patent Document 1. The TDI method is a detection method in which the same image is integratedly exposed to specific pixels of the CCD by originally using the charge transfer principle of the CCD and synchronizing the conveyance speed of the inspection object and the charge transfer timing of the CCD. . By adopting the TDI method, it is possible to generate a two-dimensional image that is brighter and has a higher S / N (higher resolution) than when it is not employed.

  However, the CCD needs to be manufactured by a dedicated process and has a complicated structure. In addition, power consumption is large. Furthermore, the size of the pixel, the amount of charge that can be accumulated, the charge transfer speed, and the like are limited, and it is difficult to detect minute foreign matter from an inspection object that is conveyed at high speed. For these reasons, CMOS sensors are often used in nondestructive inspection apparatuses.

  In order to realize TDI using a CMOS sensor, for example, the conveyance speed of the inspection object is synchronized with the timing at which the detection elements arranged in a plurality of stages linearly in the conveyance direction of the inspection object sequentially detect, By sequentially adding the magnitudes of the signals detected by the respective detection elements, it is possible to perform integral exposure on specific pixels as in the case of the CCD. The addition of the signal magnitude is difficult because the addition process using an analog method is difficult with a CMOS sensor. For example, each signal is digitized and then added using an adder.

  In Patent Document 2, as an example of an implementation of the digital TDI method, a plurality of sensor units for detecting radiation, an analog pulse signal is generated from the detected radiation, converted to a digital pulse, and a pulse during integration time There is disclosed a digital TDI type detector having a plurality of blocks each including a reading circuit unit that counts the number of the above and adds to the count value up to the previous stage.

JP 2011-242374 A JP 2014-93616 A

  In a conventional detector that realizes the TDI method, a circuit for transferring detection data to adjacent pixels is required. Therefore, the detector becomes complicated and large in size, and the cost and failure risk of an inspection apparatus configured using the detector are increased. Increases the size of the device.

  An object of the present invention is to provide an inspection apparatus capable of realizing the same effect as that of the TDI method with a simple and small configuration.

  The inspection apparatus of the present invention includes a conveying means for conveying an inspection object placed on a conveying surface in a predetermined conveying direction, an electromagnetic wave irradiating means for irradiating the inspection object with an electromagnetic wave, and substantially orthogonal to the predetermined conveying direction. M lines (M is an integer greater than or equal to 2) in a predetermined conveyance direction, and electromagnetic waves transmitted through substantially the same region of the inspection object being conveyed by the conveyance means Detection means for detecting each of the sensors sequentially and outputting detection data corresponding to each of the M-line line sensors based on the detected electromagnetic wave, and an inspection included in the plurality of detection data output by the detection means Adding means for performing control to add together the detection data of the electromagnetic waves transmitted through substantially the same region of the object. The detection means detects each of the M row line sensors periodically detecting the electromagnetic waves at a detection timing at which the electromagnetic waves transmitted through substantially the same region of the inspection object are sequentially detected by the M row line sensors. Detection data corresponding to each of the M rows of line sensors based on the electromagnetic waves may be output. Further, the detection data may be a discretized numerical value.

The detection data corresponding to each of the line sensors in the M columns is provided with a storage means that is stored for each detection timing by a predetermined storage method, and the addition means is an inspection target from the detection data stored in the storage means. You may make it perform control which extracts and adds the detection data of the electromagnetic waves which permeate | transmitted the substantially the same area | region of the thing with the extraction method according to a predetermined | prescribed storage method.
The adding means outputs detection data corresponding to each of the M-line line sensors of the electromagnetic waves that have passed through substantially the same region of the inspection object from the detection data stored in the storage means in accordance with a predetermined storage method. Alternatively, the extraction may be performed by the extraction method and added together.

  Each of the M-line line sensors of the electromagnetic waves transmitted through substantially the same region of the inspection object is provided with storage means, and the adding means transmits detection data corresponding to each of the M-line line sensors for each detection timing. Control may be performed such that the storage means sequentially stores the detection data corresponding to the above so that the detection data are sequentially added.

  The conveying means conveys the inspection object in the direction in which the electromagnetic waves transmitted through substantially the same area of the inspection object are sequentially detected by the respective line sensors from the first row to the M-th row, and adds them in the adding means. The detection data corresponding to the line sensor of the n-th column (n = 1, 2,..., M) of the electromagnetic wave transmitted through substantially the same region of the inspection object is the n period of the region. Of the detection data corresponding to each of the M-line line sensors at the eye detection timing, the detection data may be the n-th column detection data.

  In the present invention, an area sensor is configured with M rows of CMOS line sensors, and electromagnetic waves transmitted through the inspection object are sequentially detected while moving the area sensor relative to the inspection object one row at a time. Then, by adding together the detection data of electromagnetic waves transmitted through substantially the same region of the inspection object included in each of the M area detection data thus obtained, a conventional TDI detector Integral exposure effect similar to that can be obtained. Further, in the inspection apparatus according to the present invention, it is not necessary to sequentially transfer data required by a conventional TDI detector to adjacent pixels, and therefore it is not necessary to provide a transfer circuit. Therefore, an inspection apparatus that can obtain the same effect as that of the TDI system can be realized in a simple and small size as compared with the case where the apparatus is configured using a conventional TDI system detector.

  Employs transport means that can reverse the transport direction so that the electromagnetic waves that have passed through substantially the same region of the inspection object are sequentially detected by the respective line sensors from the Mth row to the first row. When the direction is reversed, the (M + 1−n) -th row (n = 1, 2,...) The detection data corresponding to the M) line sensor may be detected data of the (M + 1−n) th column among the detection data corresponding to each of the Mth line sensor at the detection timing of the nth cycle of the region. Good.

  In the TDI method, the transfer direction of detection data is one direction except when an expensive special sensor is used. Therefore, when the transport direction of the inspection object is reversed, a special function such as reversing the detection means is used. Unless T is added, TDI cannot be performed properly. On the other hand, according to the present invention, even if the conveyance direction of the inspection object to the line sensor is reversed, the TDI method can be easily and at low cost by changing the adding method by the adding means as described above. It is possible to realize an inspection apparatus that exhibits the same effect as the above.

  The addition of the detection data may be performed after a predetermined correction is applied to the detection data.

  Thereby, when abnormality is recognized in the value of detection data by an element failure etc., for example, since it can add with the corrected value, the fall of a test | inspection precision can be suppressed. Such a correction process cannot be performed by a conventional inspection apparatus that realizes the TDI system.

It is a functional block diagram of the inspection apparatus 100 of this invention. It is a figure explaining the process in which the electromagnetic waves which permeate | transmitted from the four linear area | regions of the test target object W are detected sequentially with a four-row line sensor. FIG. 5B is a diagram (1/2) illustrating a first specific example of a method for writing transmitted electromagnetic wave detection data to a storage unit 140 and an addition processing method by an addition unit 150 in the first embodiment. FIG. 3B is a diagram (2/2) illustrating a first specific example of a method for writing transmitted electromagnetic wave detection data to a storage unit 140 and an addition processing method by an addition unit 150 in the first embodiment. FIG. 6B is a diagram (1/2) illustrating a modification of the first specific example of the method for writing transmitted electromagnetic wave detection data to the storage unit 140 and the addition processing method by the addition unit 150 in the first embodiment. FIG. 10B is a diagram (2/2) illustrating a modification of the first specific example of the method for writing transmitted electromagnetic wave detection data to the storage unit 140 and the addition processing method by the addition unit 150 in the first embodiment. FIG. 5B is a diagram (1/2) illustrating a second specific example of a method for writing transmission electromagnetic wave detection data to a storage unit 140 and an addition processing method by an addition unit 150 in the first embodiment. FIG. 6B is a diagram (2/2) illustrating a second specific example of a method for writing transmission electromagnetic wave detection data to the storage unit 140 and an addition processing method by the addition unit 150 in the first embodiment. It is a figure explaining the process of detecting sequentially the electromagnetic waves which permeate | transmitted from the four linear to-be-detected area | regions of the test target object W with 4 lines of line sensors, when the conveyance direction of the test target object W is reversed. FIG. 10B is a diagram (1/2) illustrating a first specific example of a method for writing transmission electromagnetic wave detection data to a storage unit 240 and an addition processing method by an addition unit 250 in the second embodiment. FIG. 6B is a diagram (2/2) illustrating a first specific example of a method for writing transmitted electromagnetic wave detection data to a storage unit 240 and an addition processing method by an addition unit 250 in the second embodiment. FIG. 16 is a diagram (1/2) illustrating a modification of the first specific example of the method for writing transmitted electromagnetic wave detection data to the storage unit 240 and the addition processing method by the addition unit 250 in the second embodiment. FIG. 10B is a diagram (2/2) illustrating a modification of the first specific example of the method of writing transmitted electromagnetic wave detection data to the storage unit 240 and the addition processing method by the addition unit 250 in the second embodiment. FIG. 10B is a diagram (1/2) illustrating a second specific example of a method for writing transmitted electromagnetic wave detection data to a storage unit 240 and an addition processing method by an addition unit 250 in the second embodiment. FIG. 12B is a diagram (2/2) illustrating a second specific example of a method for writing transmitted electromagnetic wave detection data to a storage unit 240 and an addition processing method by an addition unit 250 in the second embodiment.

[First Embodiment]
FIG. 1 shows a functional block diagram of the inspection apparatus 100 of the present invention.

  The inspection apparatus 100 includes an electromagnetic wave irradiation unit 110, a transport unit 120, a detection unit 130, a storage unit 140, an addition unit 150, a display control unit 160, and a display unit 170.

  The electromagnetic wave irradiation means 110 irradiates the inspection object W conveyed by the conveyance means 120 in a predetermined direction (Y-axis direction in FIG. 1) with electromagnetic waves such as X-rays, ultraviolet rays, visible rays, and infrared rays.

  The transport unit 120 transports the inspection object W placed on the transport surface in a predetermined transport direction at a predetermined transport speed. It is desirable that the transport unit 120 has a high electromagnetic wave transmission property so that the transmitted electromagnetic wave from the inspection object W reaches the detection unit 130 without being attenuated as much as possible.

  The detection unit 130 is configured by arranging M line (M is an integer of 2 or more) CMOS line sensors arranged substantially orthogonal to the conveyance direction of the inspection target W by the conveyance unit 120 in the conveyance direction. The CMOS line sensor is configured by arranging a plurality of detection elements in a line. Each detection element may be of any type as long as it detects an electromagnetic wave to be irradiated and generates an output corresponding to the detection intensity. Taking the case where the electromagnetic wave applied to the inspection object W is an X-ray as an example, an indirect conversion type detection element that generates an output by converting the X-ray into a visible light once with a scintillator and then receiving it with a photodiode. Alternatively, a direct conversion type detection element using a semiconductor such as CdTe that generates an output by directly converting an X-ray into an electric signal can be employed.

  The configuration of the detection means 130 will be described in detail with reference to FIG. 1. A plurality of detection elements are arranged in a line in the X-axis direction (direction passing through the paper surface) substantially orthogonal to the Y-axis direction that is the transport direction. The configured line sensors are arranged in parallel in M columns in the Y-axis direction.

  In the detection means 130, the M row sensor detects the electromagnetic wave that has passed through substantially the same region of the inspection object W at the detection timing corresponding to the conveyance speed so that the M row line sensor sequentially detects the electromagnetic wave. Electromagnetic waves are periodically detected, and detection data corresponding to each of the M rows of line sensors based on the detected electromagnetic waves is output. Specifically, for example, electromagnetic waves that have passed through substantially the same region of the inspection object W conveyed at a predetermined speed are sequentially detected from the first line sensor to the M line sensor, for example. A detection cycle is set. The form of the detection data output by the detection unit 130 is arbitrary as long as the addition control by the addition unit 150 is not hindered. For example, in the case of an indirect conversion type detection element, a discrete value such as a voltage value based on the accumulated charge amount, and in the case of a direct conversion type detection element, the number of photons counted. If it outputs, addition control becomes easy. Here, the areas of the inspection object W through which the electromagnetic waves sequentially detected and added by the M-row line sensors are transmitted are allowed to be substantially the same. This is because the same effect as that of the TDI method can be obtained for at least the partial region by adding the transmitted electromagnetic waves from the partial region if the light passes through the partial region in common. In other words, the electromagnetic wave (s) transmitted through substantially the same region here includes not only the case where the transmission region is the same, but also the case where a part of the transmission region is common.

  A more specific description will be given with reference to FIG. FIG. 2 shows a process of sequentially detecting electromagnetic waves transmitted from four regions linear in the X-axis direction of the inspection object W that moves in the Y-axis direction facing the detection means 130 with four lines of line sensors. It is a figure explaining.

  The electromagnetic wave transmitted from the region A of the inspection object W conveyed in the Y-axis direction at a predetermined conveying speed while being irradiated with the electromagnetic wave is first detected by the first line sensor as shown in FIG. (First detection period of region A).

  The electromagnetic wave transmitted from the region A of the inspection object W further conveyed in the Y-axis direction at a predetermined conveying speed is subsequently detected by the second row line sensor as shown in FIG. A second detection period of A).

  The electromagnetic wave transmitted from the region A of the inspection object W further conveyed in the Y-axis direction at a predetermined conveyance speed is subsequently detected by the third line sensor (region) as shown in FIG. A third detection period of A).

  The electromagnetic wave transmitted from the region A of the inspection object W further conveyed in the Y-axis direction at a predetermined conveying speed is subsequently detected by the fourth line sensor (region) as shown in FIG. A fourth detection cycle of A).

  The conveyance speed of the inspection object W by the conveyance means 120 and the detection timing of the M-row line sensor are synchronized in this way, whereby one row of electromagnetic waves transmitted through the region A, which is substantially the same region of the inspection object W. Detection is sequentially performed from the line sensor of the eye to the line sensor of the Mth column.

  In the second detection cycle of region A, the electromagnetic wave transmitted from region B is detected by the line sensor in the first row (first detection cycle of region B).

  Further, in the third detection period of the area A, the electromagnetic wave transmitted from the area B is detected by the second line sensor, and the electromagnetic wave transmitted from the area C is detected by the first line sensor (area B). 2nd detection cycle, first detection cycle of region C).

  Further, in the fourth detection period of the region A, the electromagnetic wave transmitted from the region B is detected by the third row line sensor, and the electromagnetic wave transmitted from the region C is detected by the second row line sensor. The transmitted electromagnetic wave is detected by the line sensor in the first row (the third detection cycle of region B, the second detection cycle of region C, and the first detection cycle of region D).

  The electromagnetic wave transmitted from the region B of the inspection object W that is further conveyed in the Y-axis direction at a predetermined conveyance speed is subsequently detected by the fourth line sensor (region) as shown in FIG. B fourth detection cycle). At this time, the electromagnetic wave transmitted from the region C is detected by the third line sensor, and the electromagnetic wave transmitted from the region D is detected by the second line sensor (third detection period of the region C, region D). Second detection cycle).

  The electromagnetic wave transmitted from the region C of the inspection object W further conveyed in the Y-axis direction at a predetermined conveying speed is subsequently detected by the fourth line sensor (region) as shown in FIG. C fourth detection period). At this time, the electromagnetic wave transmitted from the region D is detected by the fourth line sensor (third detection period of the region D).

  The electromagnetic wave transmitted from the region D of the inspection object W further conveyed in the Y-axis direction at a predetermined conveyance speed is subsequently detected by the fourth line sensor (region) as shown in FIG. D fourth detection period).

  As described above, the four rows of line sensors detect the electromagnetic waves at seven periodic detection timings, so that any row of electromagnetic waves that have passed through the four regions of the inspection target W has four rows. It can be detected by a line sensor.

  Note that the detection timing necessary to repeatedly detect the electromagnetic waves transmitted through each of the T regions by the line sensor in each of the M columns is (M + T−1) times. That is, for each (M + T−1) detection timings, each column at each detection timing is based on the electromagnetic waves detected in each column from the first column to the M-th column of the M-line sensor of the detection unit 130. Detection data corresponding to each of the M-line line sensors of the electromagnetic waves that have passed through the region of each of the T regions of the inspection target W may be extracted from the detection data corresponding to each of the line sensors. it can.

  The storage unit 140 is an arbitrary storage medium and stores detection data such as a discretized numerical value output from the detection unit 130.

  The adding means 150 performs control for adding together the detection data of the electromagnetic waves transmitted through substantially the same region of the inspection object W. Note that the detection data of the electromagnetic waves transmitted through substantially the same region of the inspection object W do not necessarily have to be added together with the detection data of each of the M-row line sensors, but the detection data of a larger number of line sensors. The combined exposure effect is enhanced by adding them together. In the following, a case will be described as an example where all the detection data of each of the M-line line sensors of electromagnetic waves that have passed through substantially the same region of the inspection object W are added.

  Specifically, for example, as shown in FIG. 2, the electromagnetic wave transmitted through substantially the same region of the inspection object W is sequentially detected from the first line sensor to the M line sensor in the positive direction. When the object W is conveyed, the detection data corresponding to the line sensor in the n-th column at the detection timing of the n-th cycle (n = 1, 2,..., M) is n = 1, 2,. , M are controlled to be added together.

  Taking region A as an example, the detection data corresponding to the line sensor in the first column at the detection timing of the first cycle of region A and the line sensor of the second column at the detection timing of the second cycle in region A are taken. Detection data, detection data corresponding to the third row of line sensors at the detection timing of the third period of the region A, detection data corresponding to the fourth row of line sensors at the detection timing of the fourth cycle of the region A, Add together. For the regions B, C, and D, the detection data are added in the same manner.

  As a result, for each electromagnetic wave transmitted through the regions A, B, C, and D, addition of detection data for the number of lines of the line sensor is realized. The detection data W added in this way is used for automatic determination in, for example, foreign object inspection, or is used for visual inspection using a two-dimensional image generated based on inspection data.

  Note that the addition of the detection data may be performed after a predetermined correction process is performed on the detection data. Thereby, when abnormality is recognized in the value of detection data by an element failure etc., for example, since it can add with the corrected value, the fall of a test | inspection precision can be suppressed. Such correction processing cannot be performed by a conventional detector that realizes the TDI system.

<Realization Example of Addition Processing in First Embodiment>
The method of writing the detection data of each period detected and output in each column of the M-line sensor of the detection unit 130 to the storage unit 140 and the addition unit 150 of the detection data stored in the storage unit 140 With reference to the drawings, two specific examples of a method for performing control for adding the detection data corresponding to each of the M-line line sensors of electromagnetic waves that have passed through substantially the same region of the inspection object W from the inside are illustrated. explain.

A first specific example will be described with reference to FIGS. 3 and 4 show an inspection object facing a detection means 130 in which four lines of detection elements arranged in a row in the X-axis direction are arranged in parallel in four rows in the Y-axis direction. It is a figure explaining the case where W moves to a Y-axis direction. In this example, the electromagnetic wave transmitted from each region (region A, region B, region C, and region D) in which the surface of the inspection object W facing the detection unit 130 is divided into four lines in the X-axis direction. , Each of the four rows of line sensors is sequentially detected by the four rows of line sensors (line sensor L ₁ , line sensor L ₂ , line sensor L ₃ , and line sensor L ₄ ) of the detection means 130. The result of adding the respective detection data corresponding to is obtained. Here, the number of detection elements and the number of lines of the line sensor constituting the line sensor are merely examples, and can be similarly implemented in the case of an arbitrary number and number of lines.

  The storage unit 140 includes a first storage area 140a and a second storage area 140b. In the first storage area 140a, detection data corresponding to each of the line sensors in each column output by the detection unit 130 at each detection timing is written. In the second storage area 140b, the result obtained by the addition means 150 adding the respective detection data corresponding to the respective line sensors of the electromagnetic waves transmitted from substantially the same area of the inspection object W is written.

  The adding means 150 performs the control described below, and corresponds to each line sensor of the electromagnetic wave that has passed through substantially the same area of the inspection object W from the detection data stored in the first storage area 140a. The detection data to be extracted are extracted, added together, and written to the second storage area 140b.

  3 and 4, # 1 to # 8 are detection timings from the first period to the eighth period, respectively. Below the display of # 1 to # 8, the positional relationship between the detection means 130 and the inspection object W at each detection timing is shown. Below that, the state of data writing to the first storage area 140a at each detection timing is shown. Below that, the state of data writing to the second storage area 140b at each detection timing is shown.

  The first storage area 140a is logically arranged in a lattice-like small storage area of at least (M × P) rows (M + 1) columns, where M is the number of columns of the line sensor and P is the number of detection elements constituting the line sensor. Separated.

  The (M × P) rows correspond to the number of detection elements (rows) of the entire detection means 130, and the (M + 1) columns are added to the number of line sensor columns, that is, the number of detection timings of the data to be added. 1 timing is added.

In the example shown in FIGS. 3 and 4, M = P = 16 rows because M = 4 and P = 4. In the _first to fourth rows, the respective detection data corresponding to the detection elements in the _first to fourth rows of the line sensor L1 are written. The 5-8 line, each detection data corresponding to the fourth row of detecting elements of the line sensor L ₂ is written. The 9th to 12th rows, each detection data corresponding to the fourth row of detecting elements of the line sensor L ₃ is written. The 13 to 16 line, the detection data corresponding to the fourth row of detecting elements of the line sensor _{L 4} are written. In this way, each detection data corresponding to 16 detection elements is sequentially written in each column of the first storage area 140a at each detection timing.

Specifically First, in the inspected object W in the second row and first period exerted on the detection element in the third row region A of the test object W by moving the line sensor L ₁ in the Y-axis direction, the line The respective detection data based on the transmitted electromagnetic waves from the area A detected by the detection elements in the second and third rows of the sensor L ₁ are small in the second and third rows of the first column of the first storage area 140a. Each is written in a storage area. At this time, even for a detection element in which electromagnetic waves are directly detected without being obstructed by the inspection object W, detection data indicating that the inspection object W is not on the detection element has a small storage area corresponding to the detection element. Is remembered. For such small storage area, first the first row of the first column of the storage area 140a corresponding to the first row and the fourth row of the sensing element which conveniently is denoted by blank (the line sensor L ₁ in FIG. and fourth row, and each small storage area from the fifth row of the 16 row of the first column of the first storage area 140a corresponding line sensor L ₂ in the detecting elements of the line sensor L _4). Hereinafter, the same notation is used for the same small storage area at other detection timings.

The second storage area 140b, the detection data based on the transmitted electromagnetic radiation which is detected by the line sensor L ₁ before M period of the detection timing, the transmitted electromagnetic radiation which is detected by the line sensor L ₂ to M-1 previous cycle detection data, ..., extraction detection data based on the detected transmitted radiation into two periods before the line sensor L _M-1, and the detection data based on the detected transmitted radiation in the previous cycle by the line sensor L _M based And the result of the addition is written. In the example of FIGS. 3 and 4, the extraction target portion at each detection timing is a portion indicated by shading in the first storage area 140a.

In the example shown in FIG. 3 and FIG. 4 is a M = 4, the detection data based on the detected transmitted radiation to 4 cycles before the line sensor L ₁ of the detection timing, detected before 3 cycles by the line sensor L ₂ detection data based on the transmitted radiation, the sum of the detection data based on the detected transmitted radiation detected detected data based on the transmitted radiation into two periods before the line sensor L _3, and one period before the line sensor L ₄ The result is written.

  The addition of the detection data is performed on the detection data detected by the detection elements in the same row of each line sensor. Therefore, a small storage area of P rows, which is the number of detection element rows constituting the line sensor, is secured in the second storage area 140b for each column. Then, the columns of the P rows of small storage areas are sequentially arranged at each detection timing. Therefore, if the number of detection timings is T, the second storage area 140b is logically divided into, for example, P-shaped and T-column lattice-shaped small storage areas.

  Since P = 4 in the examples shown in FIGS. 3 and 4, the addition result of the detection data is, for example, as follows in each small storage area in the first column to the fourth row of the second storage area 140 b. Is written to.

  Each of the first row of the second column of the first storage area 140a corresponding to the first row of each line sensor, the fifth row of the third column, the fourth row of the ninth row, and the fifth row of the 13th row. The result of adding the detection data stored in the small storage area is written in the first line. The second row of the second column of the first storage area 140a corresponding to the second row of each line sensor, the sixth row of the third column, the tenth row of the fourth column, the tenth row of the fourth column, and the 14th row of the fifth column. The result of adding the detection data stored in each small storage area is written in the second row. Also, the second row, the third row, the third row, the seventh row, the fourth row, the eleventh row, and the fifth row, the 15th row of the first storage area 140a corresponding to the third row of each line sensor. The result of adding the detection data stored in each small storage area is written in the third row. Further, the 4th row in the 2nd column of the first storage area 140a corresponding to the 4th row of each line sensor, the 8th row in the 3rd column, the 12th row in the 4th column, and the 16th row in the 5th column. The result of adding the detection data stored in each small storage area is written in the fourth row.

  However, at this time, since the data indicating that the inspection object W does not exist is stored in each of the small storage areas of the first storage area 140a, the first column of the second storage area 140b. Data indicating the presence of the inspection object W is not written in each of the rows. Such a writing state is indicated by a blank for convenience. Hereinafter, the same notation is used for the same small storage area at other detection timings.

Inspection object W is further moved in the Y-axis direction, on the detection element of the second row and third row region A of the line sensor L ₂ of the test object W, the region B is two rows of line sensors L ₁ the eyes and the third line on the detector elements, with each consuming second period, the detection data based on the transmitted radiation from the detection area a respectively the second and third rows of detecting elements of the line sensor L ₂ is Are written in the small storage areas of the sixth row and the seventh row of the second column of the first storage area 140a, respectively. Further, the detection data based on the transmitted electromagnetic waves from the region B detected by the detection elements in the second row and the third row of the line sensor L ₁ are the second row and the third row in the second column of the first storage region 140a. Each is written to the small storage area on the line.

Further, in the second column of each row in the second storage area 140b, the detection data based on the detected transmitted radiation to 4 cycles before the line sensor L ₁ of the detection timing, detected before 3 cycles by the line sensor L ₂ detection data based on the transmitted radiation, the sum of the detection data based on the detected transmitted radiation detected data based on the detected transmitted radiation into two periods before the line sensor L _3, and one period before the line sensor L ₄ The result is written. However, since data indicating that the inspection object W does not exist is still stored in each small storage area of the first storage area 140a at this time, each row in the second column of the second storage area 140b is stored. Also, data indicating the presence of the inspection object W is not written.

Then in the third period, further moves in the Y-axis direction inspection object W, the second and third rows on the detector element in the region A is the line sensor L ₃ of the test object W, a region B the second and third rows on the detector elements of the line sensor L _2, the second and third rows on the detector element in the region C is the line sensor L _1, consuming respectively. At this time, the detection data based on the transmitted radiation from the detection area A respectively the second and third rows of detecting elements of the line sensor L ₃ is, line 10 of the third column of the first storage area 140a and Each is written in the small storage area of the 11th row. In addition, each detection data based on the transmitted electromagnetic wave from the region B detected by the detection elements in the second and third rows of the line sensor L ₂ is the sixth row and the seventh row in the third column of the first storage region 140a. Each is written to the small storage area on the line. Further, the respective detection data based on the transmitted electromagnetic waves from the region C detected by the detection elements in the second row and the third row of the line sensor L ₁ are the second row and the third row in the third column of the first storage region 140a. Each is written to the small storage area on the line.

Further, each row of the third column of the second storage area 140b, the detection data based on the detected transmitted radiation to 4 cycles before the line sensor L ₁ of the detection timing, detected before 3 cycles by the line sensor L ₂ detection data based on the transmitted radiation, the sum of the detection data based on the detected transmitted radiation detected data based on the detected transmitted radiation into two periods before the line sensor L _3, and one period before the line sensor L ₄ The result is written. However, since data indicating that the inspection object W does not exist is still stored in each small storage area of the first storage area 140a at this time, each row in the third column of the second storage area 140b is stored. Also, data indicating the presence of the inspection object W is not written.

Then in the fourth period, to move further inspection object W in the Y-axis direction, the second and third rows on the detector elements of the test object W region A line sensor L ₄ of the area B the second and third rows on the detector elements of the line sensor L _3, the second line of the region C is the line sensor L ₂ and the third row on the detector element, the second row region D of the line sensor L ₁ And on the detection elements in the third row. At this time, the respective detection data based on the transmitted electromagnetic waves from the area A detected by the detection elements of the second and third rows of the line sensor L ₄ are respectively stored in the fourteenth row and fourth row of the first storage area 140a. Each is written in the small storage area of the 15th row. Further, each of the detection data based on the transmitted radiation from the detection area B, respectively second and third rows of detecting elements of the line sensor L ₃ is, line 10 of the fourth column of the first storage area 140a and 11 Each is written to the small storage area on the line. Further, the detection data based on the transmitted electromagnetic waves from the area C detected by the detection elements in the second and third rows of the line sensor L ₂ are the sixth and seventh rows in the fourth column of the first storage area 140a. Each is written to the small storage area on the line. Further, each of the detection data based on the transmitted radiation from the detection region D respectively second and third rows of detecting elements of the line sensor L ₁ is, the second row of the fourth column of the first memory area 140a and 3 Each is written to the small storage area on the line.

Further, each row in the fourth column of the second storage area 140b, the detection data based on the detected transmitted radiation to 4 cycles before the line sensor L ₁ of the detection timing, detected before 3 cycles by the line sensor L ₂ detection data based on the transmitted radiation, the sum of the detection data based on the detected transmitted radiation detected data based on the detected transmitted radiation into two periods before the line sensor L _3, and one period before the line sensor L ₄ The result is written. However, since data indicating that the inspection object W does not exist is still stored in each small storage area of the first storage area 140a at this time, each row in the fourth column of the second storage area 140b is stored. Also, data indicating the presence of the inspection object W is not written.

Then, in the fifth period, to move the inspection object W is further Y-axis direction, the second and third rows on the detector elements of the test object W region B line sensor L ₄ of region C the second and third rows on the detector elements of the line sensor L _3, on the detection element in the second row region D of the line sensor L ₂ and the third row, consuming respectively. At this time, the detection data based on the transmitted electromagnetic waves from the region B detected by the detection elements in the second row and the third row of the line sensor L ₄ are the 14th row and the 5th row in the first storage region 140a. Each is written in the small storage area of the 15th row. Further, each of the detection data based on the transmitted radiation from the region C which are respectively detected by the second and third rows of detecting elements of the line sensor L ₃ is, line 10 of the fifth column of the first storage area 140a and 11 Each is written to the small storage area on the line. The detection data based on the transmitted electromagnetic waves from the region D detected by the detection elements in the second row and the third row of the line sensor L ₂ are the sixth row and the seventh row in the fifth column of the first storage region 140a. Each is written to the small storage area on the line.

Further, each row of the fifth column of the second storage area 140b, the detection data based on the detected transmitted radiation in the first period is four cycles before the line sensor L ₁ of the detection timing, a 3 cycles ago 2 detection data to th cycle based on the transmitted electromagnetic radiation which is detected by the line sensor L _2, detection data based on the detected transmitted radiation in the third cycle is two periods before the line sensor L _3, and 4 period is one cycle before result of adding the detection data based on the detected transmitted radiation by the line sensor L ₄ eyes are written.

Thus, the transmitted radiation from the region A of the inspection object W, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₁ in the first cycle, two rows of line sensors L ₂ in the second period Detection data based on transmitted electromagnetic waves detected in the eyes, detection data based on transmitted electromagnetic waves detected in the second row of the line sensor L3 in the _third cycle, and detection in the second row of the line sensor L4 in the _fourth cycle The result of adding the detection data based on the transmitted electromagnetic waves is written in the second row of the fifth column (denoted as 4A). Also, detection data based on transmitted electromagnetic waves detected in the third row of the line sensor L1 in the _first cycle, detection data based on transmitted electromagnetic waves detected in the third row of the line sensor L2 in the _second cycle, and three cycles detecting data based on the detected transmitted radiation in the third line of the line sensor L ₃ to the eyes, and the fourth period a result of adding the detection data based on the detected transmitted radiation in the third line of the line sensor L ₄ in the It is written in the third row of the fifth column (denoted as 4A). In this way, for the transmitted electromagnetic waves from the region A, the addition of the respective detection data corresponding to each of the four lines of line sensors is realized.

  Note that the detection data in the first cycle stored in the first column of the first storage area 140a is no longer necessary after the addition processing in the fifth cycle. Therefore, the detection data in the sixth cycle is overwritten in the first column and reused as a storage area in the sixth cycle.

Then, in the 6 th cycle, the test object W is moved further in the Y-axis direction, the second and third rows on the detector elements of the test object W region C the line sensor L ₄ of region D the second and third rows on the detector elements of the line sensor L _3, consuming respectively. At this time, the respective detection data based on the transmitted electromagnetic waves from the region C detected by the detection elements in the second and third rows of the line sensor L ₄ are the 14th row and the first column in the first storage region 140a. Each is written in the small storage area of the 15th row. In addition, each detection data based on the transmitted electromagnetic wave from the region D detected by the detection elements in the second row and the third row of the line sensor L ₃ is the 10th row and 11th row in the first column of the first storage region 140a. Each is written to the small storage area on the line.

Further, in the sixth column of each row in the second storage area 140b, the detection data based on the detected transmitted radiation in the second period is four cycles before the line sensor L ₁ of the detection timing, a 3 cycles ago 3 th cycle on the detection data based on the detected transmitted radiation by the line sensor L _2, 5 cycles is two periods is before the fourth period to is based on the transmitted electromagnetic waves are detected by the line sensor L ₃ detection data, and one cycle before result of adding the detection data based on the detected transmitted radiation by the line sensor L ₄ eyes are written.

Thus, the transmitted radiation from the region B of the inspection object W, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₁ in the second period, the second line of the line sensor L ₂ in the third cycle detecting data based on the detected transmitted radiation at the eye, the fourth period in the detection data based on the detected transmitted radiation in the second line of the line sensor L _3, and 5-th cycle to the detection in the second line of the line sensor L ₄ The result of adding the detection data based on the transmitted electromagnetic waves is written in the second row of the sixth column (denoted as 4B). The detection data based on the detected transmitted radiation in the third line of the line sensor L ₁ in the second period, the detection data based on the detected transmitted radiation in the third line of the line sensor L ₂ in the third cycle, 4 cycle detecting data based on the detected transmitted radiation in the third line of the line sensor L ₃ to the eyes, and fifth period results the sum of the detection data based on the detected transmitted radiation in the third line of the line sensor L ₄ in the , Written in the third row of the sixth column (denoted as 4B). In this way, for the transmitted electromagnetic waves from the region B, the addition of the respective detection data corresponding to each of the four rows of line sensors is realized.

  Further, the addition data in the sixth cycle makes the detection data in the second cycle stored in the second column of the first storage area 140a unnecessary thereafter. Therefore, the detection data in the seventh cycle is overwritten in the second column and reused as a storage area in the seventh cycle.

Then the seven-th cycle, the inspection object W is further moved in the Y-axis direction, it applied to the second and third rows on the detector elements of the test object W region D line sensor L ₄ of. At this time, the detection data based on the transmitted radiation from the detection region D respectively second and third rows of detecting elements of the line sensor L ₄ is, line 14 of the second column of the first storage area 140a and Each is written in the small storage area of the 15th row.

Further, in the seventh column of each row in the second storage area 140b, the detection data based on the detected transmitted radiation in the third cycle is a four cycles before the line sensor L ₁ of the detection timing, a 3 cycles ago 4 detection data to th cycle based on the transmitted electromagnetic radiation which is detected by the line sensor L _2, 6 cycles the detection data based on the detected transmitted radiation in fifth period is two cycles before the line sensor L _3, and 1 cycle before result of adding the detection data based on the detected transmitted radiation by the line sensor L ₄ eyes are written.

Thus, the transmitted radiation from the region C of the test object W, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₁ in the third cycle, two rows of line sensors L ₂ in the fourth period detecting data based on the detected transmitted radiation at the eye, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₃ to 5 th cycle, and 6-th cycle to the detection in the second line of the line sensor L ₄ The result of adding the detection data based on the transmitted electromagnetic wave is written in the second row of the seventh column (denoted as 4C). The detection data based on the detected transmitted radiation in the third line of the line sensor L ₁ in the third cycle, the detection data based on the detected transmitted radiation in the third line of the line sensor L ₂ in the fourth period, 5 cycles detecting data based on the detected transmitted radiation in the third line of the line sensor L ₃ to the eyes, and 6 th cycle results the sum of the detection data based on the detected transmitted radiation in the third line of the line sensor L ₄ in the , Written in the third row of the seventh column (denoted as 4C). In this way, for the transmitted electromagnetic waves from the region C, the addition of the respective detection data corresponding to each of the four rows of line sensors is realized.

  Further, by the addition process in the seventh period, the detection data in the third period stored in the third column of the first storage area 140a is no longer necessary. Therefore, the detection data in the eighth cycle is overwritten in the third column and reused as a storage area in the eighth cycle.

Subsequently, in the eighth period, the inspection object W further moves in the Y-axis direction, and all the inspection object W passes over the detection means 130. At this time, the eighth column of each row in the second storage area 140b, the detection data based on the detected transmitted radiation to fourth period is four cycles before the line sensor L ₁ of the detection timing, a 3 cycles ago 5 detection data to th cycle based on the transmitted electromagnetic radiation which is detected by the line sensor L _2, 7 cycles are detected data based on the detected transmitted radiation to 6 th cycle is two periods before the line sensor L _3, and 1 cycle before result of adding the detection data based on the detected transmitted radiation by the line sensor L ₄ eyes are written.

Thus, the transmitted radiation from the region D of the inspection object W, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₁ in the fourth period, two rows of line sensors L ₂ in fifth period detecting data based on the detected transmitted radiation at the eye, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₃ to 6 th cycle, and 7-th cycle on the detection in the second line of the line sensor L ₄ The result of adding the detection data based on the transmitted electromagnetic waves is written in the second row of the eighth column (denoted as 4D). The detection data based on the detected transmitted radiation in the third line of the line sensor L ₁ in the fourth period, the detection data based on the detected transmitted radiation in the third line of the line sensor L ₂ to 5 th cycle, 6 cycles detecting data based on the detected transmitted radiation in the third line of the line sensor L ₃ in the eye, and 7 th cycle results the sum of the detection data based on the detected transmitted radiation in the third line of the line sensor L ₄ in the , Written in the third row of the eighth column (denoted as 4D). In this way, for the transmitted electromagnetic waves from the region D, the addition of the detection data corresponding to each of the four rows of line sensors is realized.

  As a result of the above processing, the result obtained by adding the detection data corresponding to the number of lines of the line sensor for each electromagnetic wave transmitted through the region A, the region B, the region C, and the region D is the second storage region 140b. Are stored in the 5th to 8th columns.

  In the above example, when the detection data corresponding to each of the M-line line sensors of the detection unit 130 is stored in the first storage area 140a at each detection timing, as shown in FIG. 3 and FIG. The detection data of the eye is stored in the first column, the detection data of the second cycle is stored in the second column,..., The detection data of the M cycle is stored in the M column, and then again in the M + 1 cycle. Although a storage method of sequentially storing data from the first column is adopted, the storage method is not limited to this.

  For example, as in the modification shown in FIGS. 5 and 6, the first cycle of detection data is stored in the Mth column, the second cycle of detection data in the M−1th column, and so on. A method of storing the eye detection data in the first column and then sequentially storing the data from the Mth column again in the M + 1 period may be employed.

  When such a storage method is employed, detection data corresponding to each of the M-line line sensors of the electromagnetic waves transmitted through substantially the same region of the inspection object is extracted by the same extraction method as in the above example. And add them together.

That is, in some detection timing based on the detection data, transmitted radiation that is detected by the line sensor L ₂ to M-1 cycle before is based on the transmitted electromagnetic waves are detected by the line sensor L ₁ before M period of the detection timing detection data, ..., and extracted two cycles before detection data based on the detected transmitted radiation by the line sensor L _M-1, and the detection data based on the detected transmitted radiation in the previous cycle by the line sensor L _M, The added result is written to the second storage area 140b. In the examples of FIGS. 5 and 6, the extraction target portion at each detection timing is a portion indicated by shading in the first storage area 140a.

  Depending on how the storage methods are made different, the extraction methods may need to be made different. That is, when the storage method is changed, the same extraction method may be employed as in the above example, or the same extraction method may not be employed. In other words, the extraction method is specified according to the storage method employed.

Next, a second specific example will be described with reference to FIGS. 7 and 8, as in FIGS. 3 and 4, detection is performed by arranging four line sensors arranged in a row in the Y-axis direction, in which four detection elements are arranged in a row in the X-axis direction. It is a figure explaining the case where the test object W moves to a Y-axis direction facing the means 130. FIG. In this example, the electromagnetic wave transmitted from each region (region A, region B, region C, and region D) in which the surface of the inspection object W facing the detection unit 130 is divided into four lines in the X-axis direction. , Each of the four rows of line sensors is sequentially detected by the four rows of line sensors (line sensor L ₁ , line sensor L ₂ , line sensor L ₃ , and line sensor L ₄ ) of the detection means 130. The result of adding the respective detection data corresponding to is obtained. In addition, the number of detection elements and the number of columns of the line sensor are only examples, and can be similarly realized in the case of an arbitrary number and number of columns.

  The sum of the detection data corresponding to each of the M-line line sensors of the electromagnetic waves transmitted through substantially the same region of the inspection object W is the first row of the M-line line sensors of the detection means 130 at each detection timing. Detection data corresponding to each of the M line sensor in each detection timing based on the electromagnetic waves detected in each of the columns from to M is written in the storage unit 140 according to the control described below by the adding unit 150. Is realized.

  In FIGS. 7 and 8, # 1 to # 7 are detection timings from the first cycle to the seventh cycle, respectively. Below the display of # 1 to # 7, the detection means 130 and the inspection at each detection timing are displayed. The positional relationship with the object W is described. Below that, the writing state of the addition result to the storage means 140 at each detection timing is described.

The storage unit 140 is logically divided into, for example, 4 × 10 grid-like small storage areas as shown in FIGS. 7 and 8. The reason for the 4 rows and 10 columns will be described later. Nothing is stored in each small storage area of the storage means 140 in the initial state. In each of the small storage areas of the storage means 140 partitioned in this way, detection is performed by the detection elements in each row of each line sensor (line sensor L ₄ , line sensor L ₃ , line sensor L ₂ , and line sensor L ₁ ). Detection data based on electromagnetic waves is sequentially written.

Specifically First, in the inspected object W in the second row and first period exerted on the detection element in the third row region A of the test object W by moving the line sensor L ₁ in the Y-axis direction, the line The respective detection data based on the transmitted electromagnetic waves from the area A detected by the detection elements of the second and third rows of the sensor L ₁ are stored in the second row and third row of the storage unit 140 as the small storage areas. Written to each. At this time, even for a detection element in which electromagnetic waves are directly detected without being obstructed by the inspection object W, data indicating that the inspection object W is not on the detection element is stored in a small storage area corresponding to the detection element. While it is stored, for such small storage area, in the fourth column of convenience denoted by blank (line sensor L ₁ of the first row and the fourth row corresponding to the detecting element storage unit 140 in FIG. first row and fourth row, and each small storage area of the first column from the third column of the storage means 140, respectively from the line sensor L ₂ in the line sensor L ₄ corresponding). Hereinafter, the same notation is used for other detection timings.

Then, in the second period, moving further inspection object W in the Y-axis direction, the inspection object W in the second row of the area A line sensor L ₂ and the third row on the detector element, a region B the second and third rows on the detector elements of the line sensor L _1, consuming respectively. At this time, the detection data based on the transmission electromagnetic wave from the region A detected by the line sensor L ₂ is added to the detection data from the region A already stored in the fourth column of the storage unit 140. The detection data based on the electromagnetic waves detected by the detection elements in the respective rows of the sensor L ₄ to the line sensor L ₁ are stored in the information stored in the small storage areas in the second to fifth rows of the storage unit 140. Each is added and memorized.

Thus, the second line of the fourth column of the storage unit 140, a result of adding the respective detection data based on the transmitted radiation from the region A by the second line of detection elements of the line sensor L ₁ and the line sensor L ₂ is Stored (denoted 2A). Further, in the third row in the fourth column, the result of the sum of the respective detection data based on the transmitted radiation from the region A by the third line of the detecting elements of the line sensor L ₁ and the line sensor L ₂ is stored (2A Notation). Further, the second and third rows of the fifth column, the detection data based on the transmitted radiation from the area B by the second and third rows of detecting elements of the line sensor L ₁ are stored.

Then in the third period, further moves in the Y-axis direction inspection object W, the second and third rows on the detector element in the region A is the line sensor L ₃ of the test object W, a region B the second and third rows on the detector elements of the line sensor L _2, the second and third rows on the detector element in the region C is the line sensor L _1, consuming respectively. At this time, the detection data based on the transmitted radiation from the detection area B at the detection data and the line sensor L ₂ based on the transmitted radiation from the detection area A in the line sensor L ₃ is already fourth column of the storage means 140 and the respective detection data in the fifth column is based on the transmitted electromagnetic waves from the regions a and B are respectively stored, as summed respectively, are detected from the line sensor L ₄ in the detection elements of each row of the line sensor L ₁ Each detection data based on the electromagnetic wave is added to the information already stored in the small storage area of each row in the third to sixth columns of the storage unit 140 and stored.

Thus, the second line of the fourth column of the storage unit 140, the second line of the detection result of the sum of the respective detection data based on the transmitted radiation from the region A by elements of the line sensor L ₃ from the line sensor L ₁ is Stored (denoted 3A). Further, in the third row in the fourth column, the result of the sum of the respective detection data based on the transmitted radiation from the region A by the third row of detecting elements of the line sensor L ₃ from the line sensor L ₁ is stored (3A Notation). Further, the second line of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the second line of detection elements of the line sensor L ₁ and the line sensor L ₂ is stored (2B Notation). Further, the third row of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the third line of the detecting elements of the line sensor L ₁ and the line sensor L ₂ is stored (2B Notation). Further, the second and third rows of the sixth column, the detection data based on the transmitted radiation from the region C by the second and third rows of detecting elements of the line sensor L ₁ are stored.

Then in the fourth period, to move further inspection object W in the Y-axis direction, the second and third rows on the detector elements of the test object W region A line sensor L ₄ of the area B the second and third rows on the detector elements of the line sensor L _3, the second line of the region C is the line sensor L ₂ and the third row on the detector element, the second row region D of the line sensor L ₁ And on the detection elements in the third row. At this time, detected by the detection data, detection data, and the line sensor L ₂ based on the transmitted radiation from the detected region B in the line sensor L ₃ which is based on the transmitted electromagnetic waves from the detection area A in the line sensor L ₄ Detection data based on transmitted electromagnetic waves from the area C are already stored in the fourth to sixth columns of the storage means 140, respectively, and each detection data based on the transmitted electromagnetic waves from the areas A, B, and C, As detected, the respective detection data based on the transmitted electromagnetic waves detected by the detection elements in the respective rows of the line sensors L ₄ to L ₁ are stored in the small storage areas of the respective rows in the fourth to seventh columns of the storage unit 140. Each of the stored information is added and stored.

Thus, the second line of the fourth column of the storage unit 140, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the region A by the line sensor L ₄ from the line sensor L ₁ is Stored (denoted 4A). Further, in the third row in the fourth column, the result of the sum of the respective detection data based on the transmitted radiation from the region A by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₁ is stored (4A Notation). Further, the second line of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the second line of detection elements of the line sensor L ₃ from the line sensor L ₁ is stored (3B Notation). Further, the third row of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the third line of the detecting elements of the line sensor L ₃ from the line sensor L ₁ is stored (3B Notation). Further, the second line of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the second line of detection elements of the line sensor L ₁ and the line sensor L ₂ is stored (2C Notation). Further, the third row of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the third line of the detecting elements of the line sensor L ₁ and the line sensor L ₂ is stored (2C Notation). Further, the second and third rows of seventh column, the detection data based on the transmitted radiation from the area D by the second and third rows of detecting elements of the line sensor L ₁ are stored.

Then, in the fifth period, to move the inspection object W is further Y-axis direction, the second and third rows on the detector elements of the test object W region B line sensor L ₄ of region C the second and third rows on the detector elements of the line sensor L _3, on the detection element in the second row region D of the line sensor L ₂ and the third row, consuming respectively. At this time, it detected by the detection data, detection data, and the line sensor L ₂ based on the transmitted radiation from the region C detected by the line sensor L ₃ which is based on the transmitted electromagnetic waves from the detection area B with the line sensor L ₄ The detection data based on the transmitted electromagnetic waves from the region D are already stored in the fifth column to the seventh column of the storage unit 140, respectively, and the respective detection data based on the transmitted electromagnetic waves from the region B, the region C, and the region D; The respective detection data based on the electromagnetic waves detected by the detection elements in the respective rows of the line sensors L ₄ to L ₁ are stored in the small storage areas in the respective rows from the fifth column to the eighth column of the storage unit 140 so as to be added together. The information is added together and stored.

Thus, the second line of the fifth column of the storage unit 140, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the area B by the line sensor L ₄ from the line sensor L ₁ is Stored (denoted 4B). Further, the third row of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₁ is stored (4B Notation). Further, the second line of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the second line of detection elements of the line sensor L ₃ from the line sensor L ₁ is stored (3C Notation). Further, the third row of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the third row of detecting elements of the line sensor L ₃ from the line sensor L ₁ is stored (3C Notation). Further, the second line of the seventh column, the second row of detector elements result the sum of the respective detection data based on the transmitted radiation from the region D by the line sensor L ₁ and the line sensor L ₂ is stored (2D Notation). Further, the third row of column 7, line sensors L ₁ and the third row of detecting elements result the sum of the respective detection data based on the transmitted radiation from the region D by the line sensor L ₂ is stored (2D Notation).

Then, in the 6 th cycle, the test object W is moved further in the Y-axis direction, the second and third rows on the detector elements of the test object W region C the line sensor L ₄ of region D the second and third rows on the detector elements of the line sensor L _3, consuming respectively. At this time, the detection data based on the transmission electromagnetic wave from the region C detected by the line sensor L ₄ and the detection data based on the transmission electromagnetic wave from the region D detected by the line sensor L ₃ are already in the sixth column of the storage unit 140. and the respective detection data based on the transmitted radiation from the regions C and D stored in the seventh column, as summed respectively, from the line sensor L ₄ on the detected electromagnetic wave in the detection elements of each line L ₁ Each detection data based on this is added together with the information stored in the small storage area of each row of the sixth column to the ninth column of the storage unit 140 and stored.

Thus, in the second row of the sixth column of the storage unit 140, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the region C by the line sensor L ₄ from the line sensor L ₁ is Stored (denoted as 4C). Further, the third row of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₁ is stored (4C Notation). Further, the second line of the seventh column, the result of the sum of the respective detection data based on the transmitted radiation from the area D by the second line of detection elements of the line sensor L ₃ from the line sensor L ₁ is stored (3D Notation). Further, the third row of the seventh column, the result of the sum of the respective detection data based on the transmitted radiation from the region D by the third row of detecting elements of the line sensor L ₃ from the line sensor L ₁ is stored (3D Notation).

Then the seven-th cycle, the inspection object W is further moved in the Y-axis direction, it applied to the second and third rows on the detector elements of the test object W region D line sensor L ₄ of. At this time, the detection data based on the transmitted radiation from the detection region D by the line sensor L ₄ is already summed with the detection data based on the transmitted radiation from the region D which is stored in the seventh column of the storage means 140 as described above, since the line sensor L ₄ each detection data based on the detected electromagnetic wave in the detection elements of each row L ₁ is, the seventh column from 10 column of information stored in a small storage area of each row of the storage unit 140 Each is added and memorized.

Thus, the second line of the seventh column of the storage unit 140, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the region D by the line sensor L ₄ from the line sensor L ₁ is Stored (denoted 4D). Further, the third row of the seventh column, the result of the sum of the respective detection data based on the transmitted radiation from the region D by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₁ is stored (4D Notation).

  As a result of the above processing, the result of adding the detection data for the number of lines of the line sensor for each electromagnetic wave transmitted through the region A, the region B, the region C, and the region D is the storage unit 140. They are stored in the second and third small storage areas of the fourth to seventh columns, respectively.

  In the description of the second specific example described above, the number of detection elements constituting the line sensor is four, the number of line sensors is four, and the line of the inspection object W that is a detection target of transmitted electromagnetic waves by each line sensor. This is a case where the number of the shape regions is four. And in this case, each detection data based on the electromagnetic waves detected in each row of each line sensor at each detection timing from the first cycle to the seventh cycle is stored in the information already stored in each column of the storage unit 140. As shown in FIG. 7 and FIG. 8, the electromagnetic waves transmitted through substantially the same region of the inspection object W of each line sensor are added by shifting one row at a time from the first cycle to the seventh cycle. Addition of each detection data corresponding to each is realized. Therefore, in order to add the detection data for the number of columns of the line sensor (for four columns) for each of the four regions from the region A to the region D, the storage unit 140 has at least 4 rows and 10 columns grid pattern. Must be logically partitioned into small storage areas.

  When the number of detection elements constituting the line sensor is P, the number of lines of the line sensor is M, and the number of linear regions of the inspection object W that is a detection target of the transmitted electromagnetic wave by each line sensor is generalized as R. The storage means 140 needs to be logically divided into at least P rows (2M + R−2) columns of lattice-like small storage areas.

  The display control unit 160 stores each of the line sensors of each column of the electromagnetic waves that have been transmitted through the region D from the substantially same region A of the inspection target W, which is stored in the small storage region of each column of the storage unit 140. Are arranged in accordance with the arrangement order of the areas in the inspection object W (for example, area A, area B, area C, area D,...), And the addition of the detection data is performed. An electromagnetic wave transmission image in which the magnitude of the result value is expressed by shading is displayed on the display unit 170.

  As described above, in the inspection apparatus 100 according to the present invention, an area sensor is configured by M rows of CMOS line sensors, and the inspection target W is moved while moving the sensor relative to the inspection target W one row at a time. The transmitted electromagnetic waves are sequentially detected. And each detection data corresponding to each of the M line sensor of the electromagnetic wave which permeate | transmitted the substantially the same area | region of the test target object W contained in each of the detection data of M area obtained in this way. By adding together, it is possible to obtain an integrated exposure effect similar to that of a conventional TDI detector. Further, in the inspection apparatus 100 of the present invention, it is not necessary to sequentially transfer data required by the conventional TDI detector to adjacent pixels, and therefore it is not necessary to provide a transfer circuit. Therefore, an inspection apparatus that can obtain the same effect as that of the TDI system can be realized in a simple and small size as compared with the case where the apparatus is configured using a conventional TDI system detector.

[Second Embodiment]
The electromagnetic waves that have passed through substantially the same region of the inspection object W are sequentially detected from the first line sensor to the M line sensor. The conveyance direction of the inspection object W is the positive direction, and the M line. Assume that the conveyance direction of the inspection object W sequentially detected from the sensor to the line sensor in the first row is the reverse direction. The first embodiment is an embodiment in the case where the conveyance direction of the inspection object W is the positive direction, but the second embodiment described below is also applicable to the case where the conveyance direction of the inspection object W is reversed in the reverse direction. This is an embodiment that makes it possible to obtain the effects of the present invention.

  FIG. 1 shows a functional block diagram of an inspection apparatus 200 according to the second embodiment. In addition, about the function part common to the test | inspection apparatus 100 of 1st Embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted except the case where it is required.

  The inspection apparatus 200 according to the second embodiment includes an electromagnetic wave irradiation unit 110, a conveyance unit 220, a detection unit 130, a storage unit 240, an addition unit 250, a display control unit 160, a display unit 170, and a direction detection unit 280. That is, the functional configuration of the first embodiment is different in that the transport unit 120 is replaced with the transport unit 220, the storage unit 140 is replaced with the storage unit 240, and the addition unit 150 is replaced with the addition unit 250.

  The transport unit 220 transports the inspection object W placed on the transport surface at a predetermined transport speed in a forward direction that is a predetermined transport direction and a reverse direction that is the opposite direction. The transfer direction can be arbitrarily switched by, for example, a predetermined instruction input operation by the user.

  The inspection apparatus 200 may recognize the transfer direction switching information necessary for the addition process by an instruction input operation by the user, or a direction detection unit 280 capable of detecting the transfer direction of the transfer unit 220 is provided. You may make it recognize as the detection information.

  When the transport direction is the positive direction, both the storage unit 240 and the addition unit 250 function in the same manner as the storage unit 140 and the addition unit 150 of the first embodiment, and are inspected in the same manner as in the first embodiment. In addition, the detection data corresponding to each of the M-line line sensors of the electromagnetic waves transmitted through substantially the same region are added together.

  When the transport direction is the reverse direction, in the detection unit 130, the M row line sensors are transported so that the electromagnetic waves transmitted through substantially the same region of the inspection target W are sequentially detected by the M row line sensors. An electromagnetic wave is periodically detected at a detection timing corresponding to the speed, and detection data corresponding to each of the M rows of line sensors based on the detected electromagnetic wave is output. Specifically, the detection cycle is set so that the electromagnetic waves transmitted through substantially the same region of the inspection object conveyed at a predetermined speed are sequentially detected from the M-th line sensor to the first-line sensor. Is done. When the transport speed is the same as that in the positive direction, the detection cycle may be the same as that in the positive direction.

  The adding means 250 performs control to add the respective detection data corresponding to each of the M-line line sensors of the electromagnetic waves transmitted through substantially the same region of the inspection object W. Specifically, for example, the detection data by the line sensor in the (M + 1−n) th column at the detection timing of the nth cycle of substantially the same region of the inspection object W is n = 1, 2,. Control to add together.

  This control will be described taking the region A as an example with reference to FIG. The adding means 250 detects (4 + 1−1 =) detection data corresponding to the line sensor in the fourth column at the detection timing of the first cycle of the area A, and (4 + 1−2 =) 3 at the detection timing of the second cycle of the area A. Detection data corresponding to the line sensor in the column, (4 + 1−3 =) detection data corresponding to the line sensor in the second column at the detection timing of the third cycle of the region A, and detection timing of the fourth cycle of the region A (4 + 1-4 =) The detection data corresponding to the line sensors in the first column are added together. For the regions B, C, and D, the detection data are added in the same manner.

  As a result, for each electromagnetic wave transmitted through the regions A, B, C, and D, detection data for the number of lines of the line sensor is added. The detection data W added in this way is used for automatic determination in foreign object inspection or the like, or is used for visual inspection using a two-dimensional image based on the inspection data, to inspect the inspection object W. Also in the second embodiment, addition may be performed after a predetermined correction process is performed on each detection data.

<Example of Realization of Addition Control in Second Embodiment>
A method of writing the detection data of each period detected in each column of the M-line sensor of the detection unit 130 to the storage unit 240 and an addition unit 250 of the detection data stored in the storage unit 240 With reference to the drawings, two specific examples of a method for performing control for adding the detection data corresponding to each of the M-line line sensors of electromagnetic waves that have passed through substantially the same region of the inspection object W from the inside are illustrated. explain.

A first specific example will be described with reference to FIGS. FIGS. 10 and 11 show the inspection object opposite to the detection means 130 in which four line sensors arranged in a line in the X-axis direction are arranged in parallel in four lines in the Y-axis direction. It is a figure explaining the case where W moves to a Y-axis negative direction. In this example, the electromagnetic wave transmitted from each area (area D, area C, area B, and area A) in which the surface of the inspection object W facing the detection unit 130 is divided into four linearly in the X-axis direction. , Each of the four rows of line sensors is detected sequentially by each of the four rows of line sensors (line sensor L ₄ , line sensor L ₃ , line sensor L ₂ , and line sensor L ₁ ) of detection means 130. The result of adding the respective detection data corresponding to is obtained. Note that the number of detection elements and the number of lines of the line sensor that constitute the line sensor here are merely examples, and the same can be realized in the case of an arbitrary number and number of lines.

  Similar to the first specific example of the first embodiment, the storage unit 240 includes a first storage area 240a and a second storage area 240b. In the first storage area 240a, detection data corresponding to each of the line sensors in each column output by the detection unit 130 at each detection timing is written. In the second storage area 240b, a result obtained by adding the detection data corresponding to each line sensor of the electromagnetic wave transmitted from the substantially same area of the inspection target W by the adding unit 250 is written.

  The adding means 250 performs the control described below, and corresponds to each of the line sensors of electromagnetic waves that have passed through substantially the same area of the inspection object W from the detection data stored in the first storage area 240a. Detection data to be extracted is added and added together and written to the second storage area 240b.

  10 and 11, # 1 to # 8 are detection timings from the first period to the eighth period, respectively. Below the display of # 1 to # 8, the positional relationship between the detection means 130 and the inspection object W at each detection timing is shown. Below that, the state of data writing to the first storage area 240a at each detection timing is shown. Below that, the state of data writing to the second storage area 240b at each detection timing is shown.

  As in the first specific example of the first embodiment, the first storage area 240a is at least (M × P), where M is the number of columns of the line sensor and P is the number of detection elements constituting the line sensor. This is logically divided into grid-like small storage areas of row (M + 1) columns.

In the example shown in FIGS. 10 and 11, since M = 4 and P = 4, there are M × P = 16 rows. In the _first to fourth rows, the respective detection data corresponding to the detection elements in the _first to fourth rows of the line sensor L1 are written. The 5-8 line, each detection data corresponding to the fourth row of detecting elements of the line sensor L ₂ is written. The 9th to 12th rows, each detection data corresponding to the fourth row of detecting elements of the line sensor L ₃ is written. The 13 to 16 line, the detection data corresponding to the fourth row of detecting elements of the line sensor _{L 4} are written. In this way, each detection data corresponding to 16 detection elements is sequentially written in each column of the first storage area 240a at each detection timing.

Specifically, first, in the first cycle in which the region A of the inspection object W is placed on the detection elements in the second and third rows of the line sensor L ₄ due to the movement of the inspection object W in the negative Y-axis direction, the second and third lines of the line sensors L ₄ each detection data based on the transmitted radiation of the detection element from the detected region D respectively the first column of the 14th row and the 15th row of the first memory area 240a Each is written to a small storage area. At this time, even for a detection element in which electromagnetic waves are directly detected without being obstructed by the inspection object W, data indicating that the inspection object W is not on the detection element is stored in a small storage area corresponding to the detection element. While it is stored, for such small storage area, one row of the first memory area 240a corresponding to conveniently denoted with blank (1 row and fourth row of detecting elements of the line sensor L ₄ in FIG. line 13 and line 16 eyes, and the small memory area of 12 lines 1 in the first column of the first storage area 240a corresponding to each detector element of the line sensor L ₃ from the line sensor L ₁₎ . Hereinafter, the same notation is used for the same small storage area at other detection timings.

The second storage area 240b, is detected by the detection data, the line sensor to M-1 cycle before L _M-1 based on the transmitted electromagnetic radiation is detected before M periods by the line sensor L _M of the detection timing transmission Detection data based on electromagnetic waves, ... Detection data based on transmitted electromagnetic waves detected by line sensor L ₂ two cycles ago, and detection data based on transmitted electromagnetic waves detected by line sensor L ₁ one cycle ago And the result of the addition is written. In the example of FIGS. 10 and 11, the extraction target portion at each detection timing is a portion indicated by shading in the first storage area 240a.

In the example shown in FIGS. 10 and 11, since M = 4, the detection data based on the transmission electromagnetic wave detected by the line sensor L4 _four cycles before the detection timing is detected by the line sensor L3 _three cycles before. The detection data based on the transmitted electromagnetic wave, the detection data based on the transmitted electromagnetic wave detected by the line sensor L2 _two cycles ago, and the detection data based on the transmitted electromagnetic wave detected by the line sensor L1 _one cycle ago are added together. The result is written.

  Similar to the second storage area 140b of the first embodiment, the second storage area 240b is logically partitioned into a grid-like small storage area of P rows and T columns.

  Since P = 4 in the examples shown in FIGS. 10 and 11, the addition result of the detection data is, for example, as follows in each small storage area in the first column to the fourth row of the second storage area 240 b. Is written to.

  Each of the 13th row in the 2nd column of the first storage area 240a corresponding to the 1st row of each line sensor, the 9th row in the 3rd row, the 5th row in the 4th row, and the 1st row in the 5th row The result of adding the detection data stored in the small storage area is written in the first line. Also, the 14th row of the 2nd column of the first storage area 240a corresponding to the 2nd row of each line sensor, the 10th row of the 3rd column, the 6th row of the 4th column, and the 2nd row of the 5th column. The result of adding the detection data stored in each small storage area is written in the second row. In addition, the 15th row in the 2nd column of the first storage area 240a corresponding to the 3rd row of each line sensor, the 11th row in the 3rd column, the 7th row in the 4th column, and the 3rd row in the 5th column. The result of adding the detection data stored in each small storage area is written in the third row. Also, the 16th row in the 2nd column of the first storage area 240a corresponding to the 4th row of each line sensor, the 12th row in the 3rd column, the 8th row in the 4th column, and the 4th row in the 5th column. The result of adding the detection data stored in each small storage area is written in the fourth row.

  However, at this time, since the data indicating that the inspection object W does not exist is stored in each of the small storage areas of the first storage area 240a, the first column of the second storage area 140b. Data indicating the presence of the inspection object W is not written in each of the rows. Such a writing state is indicated by a blank for convenience. Hereinafter, the same notation is used for the same small storage area at other detection timings.

Inspection object W is further moved in the Y-axis negative direction, on the detection element region D of the second and third lines of the line sensors L ₃ of the test object W, area C of the line sensor L ₄ 2 th row and the third row on the detector elements, with each consuming second period, the detection data based on the transmitted radiation from the detection region D respectively second and third rows of detecting elements of the line sensor L ₃ Are written in the small storage areas of the 10th and 11th rows of the second column of the first storage area 240a, respectively. Further, each of the detection data based on the transmitted radiation from the detection area B, respectively second and third rows of detecting elements of the line sensor L ₄ is, line 14 of the second column of the first storage area 240a and 15 Each is written to the small storage area on the line.

Further, in each row of the second column of the second storage area 240b, detection data based on transmitted electromagnetic waves detected by the line sensor L4 _four cycles before the detection timing is detected by the line sensor L3 _three cycles before. The detection data based on the transmitted electromagnetic wave, the detection data based on the transmitted electromagnetic wave detected by the line sensor L2 _two cycles ago, and the detection data based on the transmitted electromagnetic wave detected by the line sensor L1 _one cycle ago are added together. The result is written. However, since the data indicating that the inspection object W does not exist is still stored in each of the small storage areas of the first storage area 240a even at this time, the second column of the second storage area 240b. Data indicating the presence of the inspection object W is not written in each of the rows.

Subsequently, in the third period, the inspection object W further moves in the negative Y-axis direction, and the region D of the inspection object W is located on the detection elements in the second and third rows of the line sensor L ₂ and the region C. There the second and third rows on the detector elements of the line sensor L _3, the second and third rows on the detector elements of the area B is the line sensor L _4, consuming respectively. At this time, the detection data based on the transmitted radiation from the region D respectively detected by the second and third rows of detecting elements of the line sensor L ₂ is 6 row in the third column of the first storage area 240a and Each is written in the small storage area of the seventh row. Further, each of the detection data based on the transmitted radiation from the region C which are respectively detected by the second and third rows of detecting elements of the line sensor L ₃ is, line 10 of the third column of the first storage area 240a and 11 Each is written to the small storage area on the line. Further, each of the detection data based on the transmitted radiation from the detection area B, respectively second and third rows of detecting elements of the line sensor L ₄ is, line 14 in the third column of the first storage area 240a and 15 Each is written to the small storage area on the line.

Further, in each row of the third column of the second storage area 240b, detection data based on transmitted electromagnetic waves detected by the line sensor L4 _four cycles before the detection timing is detected by the line sensor L3 _three cycles before. The detection data based on the transmitted electromagnetic wave, the detection data based on the transmitted electromagnetic wave detected by the line sensor L2 _two cycles ago, and the detection data based on the transmitted electromagnetic wave detected by the line sensor L1 _one cycle ago are added together. The result is written. However, since data indicating that the inspection object W does not exist is still stored in each small storage area of the first storage area 240a even at this time, each row in the third column of the second storage area 240b. Also, data indicating the presence of the inspection object W is not written.

The subsequently fourth period, further inspection object W by moving the Y-axis negative direction, on the detection element of the second row and third row region D of the line sensor L ₁ of the test object W, the region C to but the second line of the line sensor L ₂ and the third row on the detector element, the second and third rows on the detector elements of the area B is the line sensor L _3, two rows of area a line sensor L ₄ It hangs on the detection elements in the eyes and the third row, respectively. At this time, each detection data based on the transmitted electromagnetic waves from the region D detected by the detection elements in the second and third rows of the line sensor L _{1 is} the second row and the fourth row in the first storage region 240a. Each is written in the small storage area in the third row. Further, the detection data based on the transmitted electromagnetic waves from the area C detected by the detection elements in the second and third rows of the line sensor L ₂ are the sixth and seventh rows in the fourth column of the first storage area 240a. Each is written to the small storage area on the line. Further, each of the detection data based on the transmitted radiation from the detection area B, respectively second and third rows of detecting elements of the line sensor L ₃ is, line 10 of the fourth column of the first storage area 240a and 11 Each is written to the small storage area on the line. In addition, each detection data based on the transmitted electromagnetic waves from the area A detected by the detection elements in the second and third rows of the line sensor L ₄ is the 14th and 15th rows in the fourth column of the first storage area 240a. Each is written to the small storage area on the line.

Further, in each row of the fourth column of the second storage area 240b, detection data based on transmitted electromagnetic waves detected by the line sensor L4 _four cycles before the detection timing is detected by the line sensor L3 _three cycles before. The detection data based on the transmitted electromagnetic wave, the detection data based on the transmitted electromagnetic wave detected by the line sensor L2 _two cycles ago, and the detection data based on the transmitted electromagnetic wave detected by the line sensor L1 _one cycle ago are added together. The result is written. However, since data indicating that the inspection object W does not exist is still stored in each small storage area of the first storage area 240a even at this time, each row in the fourth column of the second storage area 240b. Also, data indicating the presence of the inspection object W is not written.

The subsequently fifth period, the test object W is further moved in the Y-axis negative direction, on the detection element of the second row and third row region C of the line sensor L ₁ of the inspection object W, region B There the second and third rows on the detector elements of the line sensor L _2, the second and third rows on the detector element in the region a is the line sensor L _3, consuming respectively. At this time, each detection data based on the transmitted electromagnetic waves from the region C detected by the detection elements in the second and third rows of the line sensor L _{1 is} the second row and the fifth row in the first storage region 240a. Each is written in the small storage area in the third row. In addition, the detection data based on the transmitted electromagnetic waves from the region B detected by the detection elements in the second and third rows of the line sensor L ₂ are the sixth and seventh rows in the fifth column of the first storage region 240a. Each is written to the small storage area on the line. The detection data based on the transmitted electromagnetic waves from the area A detected by the detection elements in the second row and the third row of the line sensor L ₃ are the 10th row and the 11th row in the fifth column of the first storage area 240a. Each is written to the small storage area on the line.

Further, each row of the fifth column of the second storage area 240b, the detection data based on the detected transmitted radiation in the first period is four cycles before the line sensor L ₄ of the detection timing, a 3 cycles ago 2 detection data to th cycle based on the transmitted electromagnetic radiation which is detected by the line sensor L _3, the detection data based on the detected transmitted radiation in the third cycle is two periods before the line sensor L _2, and 4 period is one cycle before result of adding the detection data based on the detected transmitted radiation by the line sensor L ₁ to the eye is written.

Thus, the transmitted radiation from the region D of the inspection object W, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₄ in the first cycle, two rows of line sensors L ₃ in the second cycle detecting data based on the detected transmitted radiation at the eye, the third period in the detection data based on the detected transmitted radiation in the second line of the line sensor L _2, and the fourth period to the detection in the second line of the line sensor L ₁ The result of adding the detection data based on the transmitted electromagnetic wave is written in the second row of the fifth column (denoted as 4D). The detection data based on the detected transmitted radiation in the third line of the line sensor L ₄ in the first cycle, the detection data based on the detected transmitted radiation in the third line of the line sensor L ₃ in the second cycle, 3 cycles detection data eye based on the detected transmitted radiation in the third line of the line sensor L _2, and the fourth period a result of adding the detection data based on the detected transmitted radiation in the third line of the line sensor L ₁ to the It is written in the third row of the fifth column (denoted as 4D). In this way, for the transmitted electromagnetic waves from the region D, the addition of the detection data corresponding to each of the four rows of line sensors is realized.

  Note that the detection data in the first cycle stored in the first column of the first storage area 240a is no longer necessary after the addition processing in the fifth cycle. Therefore, the detection data in the sixth cycle is overwritten in the first column and reused as a storage area in the sixth cycle.

Then, in the 6 th cycle, go to the test object W is further Y-axis negative direction, the second and third rows on the detector elements of the inspection object W in the area B line sensors L _1, area A to but the second and third rows on the detector elements of the line sensor L _2, consuming respectively. At this time, each detection data based on the transmitted electromagnetic waves from the region B detected by the detection elements in the second row and the third row of the line sensor L _{1 is} the second row and the first row in the first storage region 240a. Each is written in the small storage area in the third row. In addition, the detection data based on the transmitted electromagnetic waves from the area A detected by the detection elements in the second and third rows of the line sensor L ₂ are the sixth and seventh rows in the first column of the first storage area 240a. Each is written to the small storage area on the line.

Further, in the sixth column of each row in the second storage area 240b, the detection data based on the detected transmitted radiation in the second period is four cycles before the line sensor L ₄ of the detection timing, a 3 cycles ago 3 th cycle on the detection data based on the detected transmitted radiation by the line sensor L _3, 5 cycles is two periods is before the fourth period to is based on the transmitted electromagnetic waves are detected by the line sensor L ₂ detection data, and one cycle before result of adding the detection data based on the detected transmitted radiation by the line sensor L ₁ to the eye is written.

Thus, the transmitted radiation from the region C of the test object W, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₄ in the second period, the second line of the line sensor L ₃ in the third cycle detecting data based on the detected transmitted radiation at the eye, the fourth period in the detection data based on the detected transmitted radiation in the second line of the line sensor L _2, and 5-th cycle to the detection in the second line of the line sensor L ₁ The result of adding the detection data based on the transmitted electromagnetic waves is written in the second row of the sixth column (denoted as 4C). The detection data based on the detected transmitted radiation in the third line of the line sensor L ₄ in the second period, the detection data based on the detected transmitted radiation in the third line of the line sensor L ₃ in the third cycle, 4 cycle detection data eye based on the detected transmitted radiation in the third line of the line sensor L _2, and 5 th cycle results the sum of the detection data based on the detected transmitted radiation in the third line of the line sensor L ₁ to the , Written in the third row of the sixth column (denoted as 4C). In this way, for the transmitted electromagnetic waves from the region C, the addition of the respective detection data corresponding to each of the four rows of line sensors is realized.

  Further, the addition data in the sixth cycle makes the detection data in the second cycle stored in the second column of the first storage area 240a unnecessary thereafter. Therefore, the detection data in the seventh cycle is overwritten in the second column and reused as a storage area in the seventh cycle.

Then the seven-th cycle, the inspection object W is further moved in the Y axis negative direction, consuming region A of the test object W is on the detection element in the second row and third row of the line sensor L _1. At this time, the respective detection data based on the transmitted electromagnetic waves from the area A detected by the detection elements in the second and third rows of the line sensor L ₁ are the second row and second row in the first storage area 240a. Each is written in the small storage area in the third row.

Further, in the seventh column of each row in the second storage area 240b, the detection data based on the detected transmitted radiation in the third cycle is a four cycles before the line sensor L ₄ of the detection timing, a 3 cycles ago 4 detection data to th cycle based on the transmitted electromagnetic radiation which is detected by the line sensor L _3, 6 cycles the detection data based on the detected transmitted radiation in fifth period is two cycles before the line sensor L _2, and 1 cycle before result of adding the detection data based on the detected transmitted radiation by the line sensor L ₁ to the eye is written.

Thus, the transmitted radiation from the region B of the inspection object W, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₄ in the third cycle, two rows of line sensors L ₃ in the fourth period detecting data based on the detected transmitted radiation at the eye, fifth period on detection data based on the detected transmitted radiation in the second line of the line sensor L _2, and 6-th cycle to the detection in the second line of the line sensor L ₁ The result of adding the detection data based on the transmitted electromagnetic waves is written in the second row of the seventh column (denoted as 4B). The detection data based on the detected transmitted radiation in the third line of the line sensor L ₄ in the third cycle, the detection data based on the detected transmitted radiation in the third line of the line sensor L ₃ in the fourth period, 5 cycles detection data eye based on the detected transmitted radiation in the third line of the line sensor L _2, and 6 th cycle results the sum of the detection data based on the detected transmitted radiation in the third line of the line sensor L ₁ to the , Written in the third row of the seventh column (denoted as 4B). In this way, for the transmitted electromagnetic waves from the region B, the addition of the respective detection data corresponding to each of the four rows of line sensors is realized.

  Further, the addition data in the seventh cycle makes the detection data in the third cycle stored in the third column of the first storage area 240a unnecessary thereafter. Therefore, the detection data in the eighth cycle is overwritten in the third column and reused as a storage area in the eighth cycle.

Subsequently, in the eighth period, the inspection object W further moves in the negative Y-axis direction, and all the inspection object W passes over the detection means 130. At this time, the eighth column of each row in the second storage area 240b, the detection data based on the detected transmitted radiation to fourth period is four cycles before the line sensor L ₄ of the detection timing, a 3 cycles ago 5 detection data to th cycle based on the transmitted electromagnetic radiation which is detected by the line sensor L _3, 7 cycles are detected data based on the detected transmitted radiation to 6 th cycle is two periods before the line sensor L _2, and 1 cycle before result of adding the detection data based on the detected transmitted radiation by the line sensor L ₁ to the eye is written.

Thus, the transmitted radiation from the region A of the inspection object W, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₄ in the fourth period, two rows of line sensors L ₃ in fifth period detecting data based on the detected transmitted radiation at the eye, the detection data based on the detected transmitted radiation in the second line of the line sensor L ₂ to 6 th cycle, and 7-th cycle on the detection in the second line of the line sensor L ₁ The result of adding the detection data based on the transmitted electromagnetic waves is written in the second row of the eighth column (denoted as 4A). The detection data based on the detected transmitted radiation in the third line of the line sensor L ₄ in the fourth period, the detection data based on the detected transmitted radiation in the third line of the line sensor L ₃ to 5 th cycle, 6 cycles detection data eye based on the detected transmitted radiation in the third line of the line sensor L _2, and 7 th cycle results the sum of the detection data based on the detected transmitted radiation in the third line of the line sensor L ₁ to the , Written in the third row of the eighth column (denoted as 4A). In this way, for the transmitted electromagnetic waves from the region A, the addition of the respective detection data corresponding to each of the four lines of line sensors is realized.

  As a result of the above processing, the result obtained by adding the detection data for the number of columns of the line sensor for each electromagnetic wave transmitted through the region A, the region B, the region C, and the region D is the second storage region 240b. Are stored in the 8th to 5th columns.

  In the above example, when the detection data corresponding to each of the M-line line sensors of the detection unit 130 is stored in the first storage area 240a at each detection timing, as shown in FIGS. The detection data of the eye is stored in the first column, the detection data of the second cycle is stored in the second column,..., The detection data of the M cycle is stored in the M column, and then again in the M + 1 cycle. Although a storage method of sequentially storing data from the first column is adopted, the storage method is not limited to this.

  For example, as in the modification shown in FIGS. 12 and 13, the detection data in the first cycle is stored in the M column, the detection data in the second cycle is stored in the M−1 column, and so on. A method of storing the eye detection data in the first column and then sequentially storing the data from the Mth column again in the M + 1 period may be employed.

  Even when such a storage method is adopted, the detection data corresponding to each of the M-line line sensors of the electromagnetic waves transmitted through substantially the same region of the inspection object is extracted by the extraction method similar to the above example. And add them together.

That is, at a certain detection timing, the detection data based on the transmission electromagnetic wave detected by the line sensor L _M before M cycles of the detection timing, and the transmission electromagnetic wave detected by the line sensor L _M-1 before M-1 cycle. Based on the detection data based on the transmission electromagnetic wave detected by the line sensor L ₂ two cycles before and the detection data based on the transmission electromagnetic wave detected by the line sensor L ₁ one cycle before, The added result is written to the second storage area 240b. In the examples of FIGS. 12 and 13, the extraction target portion at each detection timing is a portion indicated by shading in the first storage area 240a.

  Depending on how the storage methods are made different, the extraction methods may need to be made different. That is, when the storage method is changed, the same extraction method may be employed as in the above example, or the same extraction method may not be employed. In other words, the extraction method is specified according to the storage method employed.

  A predetermined storage method for storing detection data corresponding to each of the M-line line sensors of the detection unit 130 in the first storage area at each detection timing when the transport direction can be reversed is shown in the first embodiment. The same storage method or different storage methods may be employed for the case where the transport direction is the forward direction and the case where the transport direction shown in the second embodiment is the reverse direction.

  For example, the storage method shown in the first specific example (FIGS. 3 and 4) of the addition control in the first embodiment and the first specific example (FIGS. 10 and 11) of the addition control in the second embodiment. The storage method shown is the same. In this case, when the detection data corresponding to each of the M-line line sensors of the electromagnetic waves transmitted through substantially the same region of the inspection object is extracted from the first storage region, the first addition control in the first embodiment is performed. By adopting different extraction methods shown in the specific example and the first specific example of the addition control in the second embodiment, the present invention can be applied both in the case where the transport direction is the forward direction and in the reverse direction. An effect can be obtained.

  In addition, when different storage methods are employed for the case where the transport direction is the forward direction and the reverse direction, an extraction method corresponding to the storage method employed for each may be employed.

Next, a second specific example will be described with reference to FIGS. 14 and 15, as in FIGS. 10 and 11, detection is made by arranging four line elements arranged in a row in the Y-axis direction, in which four detection elements are arranged in a row in the X-axis direction. It is a figure explaining the case where the test object W moves to a Y-axis negative direction facing the means 130. FIG. In this example, the electromagnetic wave transmitted from each area (area D, area C, area B, and area A) in which the surface of the inspection object W facing the detection unit 130 is divided into four linearly in the X-axis direction. , Each of the four rows of line sensors is detected sequentially by each of the four rows of line sensors (line sensor L ₄ , line sensor L ₃ , line sensor L ₂ , and line sensor L ₁ ) of detection means 130. The result of adding the respective detection data corresponding to is obtained. Note that the number of detection elements and the number of lines of the line sensor that constitute the line sensor here are merely examples, and the same can be realized in the case of an arbitrary number and number of lines.

  The sum of the detection data corresponding to each of the line sensors of each column of electromagnetic waves that have passed through substantially the same region of the inspection object W is the first column of the M column sensor of the detection means 130 at each detection timing. Detection data corresponding to each of the M line sensor at each detection timing based on the electromagnetic waves detected in each of the columns from to M is written in the storage unit 240 according to the control described below by the adding unit 250. Is realized.

  14 and 15, # 1 to # 7 are detection timings from the first cycle to the seventh cycle, respectively. Below the displays of # 1 to # 7, the detection means 130 and the inspection at each detection timing are displayed. The positional relationship with the object W is described. Below that, the writing state of the addition result to the storage means 240 at each detection timing is described.

As in the second specific example of the first embodiment, the storage unit 240 is logically partitioned into, for example, 4 × 10 grid-like small storage areas as shown in FIGS. 14 and 15. The reason for the 4 rows and 10 columns will be described later. Nothing is stored in each small storage area of the storage means 240 in the initial state. In each of the small storage areas of the storage unit 240 divided in this way, detection is performed by the detection elements of each line sensor (line sensor L ₄ , line sensor L ₃ , line sensor L ₂ , and line sensor L ₁ ). Detection data based on electromagnetic waves is sequentially written.

Specifically, first, in the first period in which the region D of the inspection object W is placed on the detection elements in the second and third rows of the line sensor L ₄ due to the movement of the inspection object W in the negative Y-axis direction, The respective detection data based on the transmitted electromagnetic waves from the region D detected by the detection elements of the second and third rows of the line sensor L ₄ are stored in the second row and third row of the fourth column of the storage unit 240. Each is written to an area. At this time, even for a detection element in which electromagnetic waves are directly detected without being obstructed by the inspection object W, data indicating that the inspection object W is not on the detection element is stored in a small storage area corresponding to the detection element. While being stored, for such small storage area is conveniently denoted by blank (fourth column of the storage means 240 corresponding to the first row and the fourth row of detecting elements of the line sensor L ₄ of the FIG. first row and fourth row, and each small storage areas of the third column from the first column of the storage means 240, respectively from the line sensor L ₁ to the line sensor L ₃ corresponding). Hereinafter, the same notation is used for other detection timings.

The subsequently the second cycle, the test object W is further moved in the Y-axis negative direction, on the detection element of the second row and third row of the region D of the test object W is the line sensor L _3, region C to but the second and third rows on the detector elements of the line sensor L _4, consuming respectively. At this time, the detection data based on the transmission electromagnetic wave from the region D detected by the line sensor L ₃ is added to the detection data from the region D that is already stored in the fourth column of the storage unit 240. The detection data based on the electromagnetic waves detected by the detection elements in each row of the sensor L ₁ to the line sensor L ₄ is stored in the information already stored in the small storage area in each row from the second column to the fifth column of the storage unit 240. Each is added and memorized.

Thus, the second line of the fourth column of the storage unit 240, a result of adding the respective detection data based on the transmitted radiation from the area D by the second line of detection elements of the line sensor L ₃ and the line sensor L ₄ is Stored (denoted 2D). Further, in the third row in the fourth column, the result of the sum of the respective detection data based on the transmitted radiation from the region D by the third row of detecting elements of the line sensor L ₃ and the line sensor L ₄ are stored (2D Notation). Further, the second and third rows of the fifth column, the detection data based on the transmitted radiation from the region C by the second and third rows of detecting elements of the line sensor L ₄ are stored respectively.

Subsequently, in the third period, the inspection object W further moves in the negative Y-axis direction, and the region D of the inspection object W is located on the detection elements in the second and third rows of the line sensor L ₂ and the region C. There the second and third rows on the detector elements of the line sensor L _3, the second and third rows on the detector elements of the area B is the line sensor L _4, consuming respectively. At this time, the detection data based on the transmission electromagnetic wave from the region D detected by the line sensor L ₂ and the detection data based on the transmission electromagnetic wave from the region C detected by the line sensor L ₃ are already in the fourth column of the storage unit 240. and the respective detection data in the fifth column is based on the transmitted electromagnetic waves from the region D and the region C are respectively stored, as summed respectively, are detected from the line sensor L ₁ in the detection element of each row of the line sensor L ₄ Each detection data based on the electromagnetic wave is added to the information already stored in the small storage area in each row of the third column to the sixth column of the storage unit 240 and stored.

Thus, the second line of the fourth column of the storage unit 240, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the region D by the line sensor L ₄ from the line sensor L ₂ is Stored (denoted 3D). Further, in the third row in the fourth column, the result of the sum of the respective detection data based on the transmitted radiation from the region D by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₂ is stored (3D Notation). Further, the second line of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the second line of detection elements of the line sensor L ₃ and the line sensor L ₄ are stored (2C Notation). In addition, the result obtained by adding the detection data based on the electromagnetic waves transmitted from the region C by the detection elements in the third row of the line sensor L ₃ and the line sensor L ₄ is stored in the third row of the fifth column (2C Notation). Further, the second and third rows of the sixth column, the detection data based on the transmitted radiation from the area B by the second and third rows of detecting elements of the line sensor L ₄ are stored respectively.

The subsequently fourth period, further inspection object W by moving the Y-axis negative direction, on the detection element of the second row and third row region D of the line sensor L ₁ of the test object W, the region C to but the second line of the line sensor L ₂ and the third row on the detector element, the second and third rows on the detector elements of the area B is the line sensor L _3, two rows of area a line sensor L ₄ It hangs on the detection elements in the eyes and the third row, respectively. At this time, it detected by the detection data, detection data, and the line sensor L ₃ which is based on the transmitted electromagnetic waves from the area C detected by the line sensor L ₂ based on the transmitted radiation from the detection region D by the line sensor L ₁ The detection data based on the transmitted electromagnetic waves from the region B are already stored in the fourth to sixth columns of the storage means 240, respectively, and each detection data based on the transmitted electromagnetic waves from the regions D, C, and B, As detected, the respective detection data based on the transmitted electromagnetic waves detected by the detection elements in the respective rows of the line sensors L ₁ to L ₄ are stored in the small storage areas of the respective rows in the fourth to seventh columns of the storage means 240. Each of the stored information is added and stored.

Thus, the second line of the fourth column of the storage unit 240, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the region D by the line sensor L ₄ from the line sensor L ₁ is Stored (denoted 4D). Further, in the third row in the fourth column, the result of the sum of the respective detection data based on the transmitted radiation from the region D by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₁ is stored (4D Notation). Further, the second line of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the second line of detection elements of the line sensor L ₄ from the line sensor L ₂ is stored (3C Notation). Further, the third row of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₂ is stored (3C Notation). Further, the second line of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the second line of detection elements of the line sensor L ₃ and the line sensor L ₄ are stored (2B Notation). Further, the third row of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the third line of the detecting elements of the line sensor L ₃ and the line sensor L ₄ are stored (2B Notation). Further, the second and third rows of seventh column, the detection data based on the transmitted radiation from the region A by the second and third rows of detecting elements of the line sensor L ₄ are stored respectively.

The subsequently fifth period, the test object W is further moved in the Y-axis negative direction, on the detection element of the second row and third row region C of the line sensor L ₁ of the inspection object W, region B There the second and third rows on the detector elements of the line sensor L _2, the second and third rows on the detector element in the region a is the line sensor L _3, consuming respectively. At this time, detected by the detection data, detection data, and the line sensor L ₃ which is based on the transmitted electromagnetic waves from the detection area B with the line sensor L ₂ based on the transmitted radiation from the detection areas C in the line sensor L ₁ The detection data based on the transmitted electromagnetic waves from the area A are already stored in the fifth column to the seventh column of the storage unit 240, respectively, and the respective detection data based on the transmitted electromagnetic waves from the region C, the region B, and the region A; The respective detection data based on the electromagnetic waves detected by the detection elements in the respective rows of the line sensors L ₁ to L ₄ are stored in the small storage areas in the respective rows from the fifth column to the eighth column of the storage unit 240 so as to be added together. The information is added together and stored.

Thus, the second line of the fifth column of the storage unit 240, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the region C by the line sensor L ₄ from the line sensor L ₁ is Stored (denoted as 4C). Further, the third row of the fifth column, the result of the sum of the respective detection data based on the transmitted radiation from the region C by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₁ is stored (4C Notation). Further, the second line of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the second line of detection elements of the line sensor L ₄ from the line sensor L ₂ is stored (3B Notation). Further, the third row of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₂ is stored (3B Notation). Further, the second line of the seventh column, the result of the sum of the respective detection data based on the transmitted radiation from the region A by the second line of detection elements of the line sensor L ₃ and the line sensor L ₄ are stored (2A Notation). Further, the third row of the seventh column, the result of the sum of the respective detection data based on the transmitted radiation from the region A by the third row of detecting elements of the line sensor L ₃ and the line sensor L ₄ are stored (2A Notation).

Then, in the 6 th cycle, go to the test object W is further Y-axis negative direction, the second and third rows on the detector elements of the inspection object W in the area B line sensors L _1, area A to but the second and third rows on the detector elements of the line sensor L _2, consuming respectively. At this time, the detection data based on the transmission electromagnetic wave from the region B detected by the line sensor L ₁ and the detection data based on the transmission electromagnetic wave from the region A detected by the line sensor L ₂ are already in the sixth column of the storage unit 240. And the detection data based on the transmission electromagnetic waves from the regions B and A stored in the seventh column and the electromagnetic waves detected by the detection elements in the respective rows of the line sensors L ₁ to L ₄ so as to be added together. Each detection data based on this is added and stored in the information stored in the small storage area of each row in the sixth column to the ninth column of the storage unit 240.

Thus, in the second row of the sixth column of the storage unit 240, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the area B by the line sensor L ₄ from the line sensor L ₁ is Stored (denoted 4B). Further, the third row of the sixth column, the result of the sum of the respective detection data based on the transmitted radiation from the area B by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₁ is stored (4B Notation). Further, the second line of the seventh column, the result of the sum of the respective detection data based on the transmitted radiation from the region A by the second line of detection elements of the line sensor L ₄ from the line sensor L ₂ is stored (3A Notation). Further, the third row of the seventh column, the result of the sum of the respective detection data based on the transmitted radiation from the region A by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₂ is stored (3A Notation).

Then the seven-th cycle, the inspection object W is further moved in the Y axis negative direction, consuming region A of the test object W is on the detection element in the second row and third row of the line sensor L _1. At this time, the detection data based on the transmission electromagnetic wave from the area A detected by the line sensor L ₁ is added to the detection data based on the transmission electromagnetic wave from the area A already stored in the seventh column of the storage unit 240. As described above, the detection data based on the electromagnetic waves detected by the detection elements in the respective rows of the line sensors L ₁ to L ₄ are stored in the information stored in the small storage areas in the respective rows from the seventh column to the tenth column of the storage unit 240. Each is added and memorized.

Thus, the second line of the seventh column of the storage unit 240, the second line of detection elements result the sum of the respective detection data based on the transmitted radiation from the region A by the line sensor L ₄ from the line sensor L ₁ is Stored (denoted 4A). Further, the third row of the seventh column, the result of the sum of the respective detection data based on the transmitted radiation from the region A by the third line of the detecting elements of the line sensor L ₄ from the line sensor L ₁ is stored (4A Notation).

  As a result of the above processing, the result of adding the detection data corresponding to the number of columns of the line sensor for each electromagnetic wave transmitted through the region A, the region B, the region C, and the region D is the storage unit 240. They are stored in the second and third small storage areas of the seventh to fourth columns, respectively.

  In the description of the second specific example described above, the number of detection elements constituting the line sensor is four, the number of line sensors is four, and the line of the inspection object W that is a detection target of transmitted electromagnetic waves by each line sensor. This is a case where the number of the shape regions is four. And in this case, each detection data based on the electromagnetic waves detected in each row of each line sensor at each detection timing from the first cycle to the seventh cycle is stored in the information already stored in each column of the storage unit 240. As shown in FIG. 14 and FIG. 15, the electromagnetic waves transmitted through substantially the same region of the inspection object W of each line sensor are added by shifting one row at a time from the first cycle to the seventh cycle. Addition of each detection data corresponding to each is realized. Therefore, in order to add the detection data corresponding to the number of columns of the line sensor (four columns) for each of the four regions from the region A to the region D, the storage unit 240 has at least 4 rows and 10 columns in a lattice shape. Must be logically partitioned into small storage areas.

  When the number of detection elements constituting the line sensor is P, the number of lines of the line sensor is M, and the number of linear regions of the inspection object W that is a detection target of the transmitted electromagnetic wave by each line sensor is generalized as R. The storage means 240 needs to be logically divided into at least P rows (2M + R−2) columns of lattice-like small storage areas.

  In the TDI method, the transfer direction of the detection data is one direction except when an expensive special sensor is used. Therefore, when the conveyance direction of the inspection object W is reversed, the detection means is reversed. Unless a function is added, TDI cannot be performed properly. On the other hand, according to the inspection apparatus 200 of the second embodiment, even if the conveyance direction of the inspection object W to the line sensor is reversed, only the addition process by the adding means is changed as described above. The same effect as the TDI method can be realized easily and at low cost.

  The present invention is not limited to the above embodiments. Each embodiment is an exemplification, and the present invention has any configuration substantially the same as the technical idea described in the claims of the present invention and exhibits the same function and effect. Are included in the technical scope. In other words, modifications can be made as appropriate within the scope of the technical idea expressed in the present invention, and such modified and improved embodiments are also included in the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 100, 200 ... Inspection apparatus 110 ... Electromagnetic wave irradiation means 120, 220 ... Conveyance means 130 ... Detection means 140, 240 ... Storage means 140a ... First storage area 140b ... Second storage area 150, 250 ... Addition means 160 ... Display control means 170 ... display means 280 ... direction detection means W ... inspection object

Claims (11)

A transport means for transporting the inspection object placed on the transport surface in a predetermined transport direction;
Electromagnetic wave irradiation means for irradiating the inspection object with electromagnetic waves;
The line sensor arranged substantially orthogonal to the predetermined conveying direction has M rows (M is an integer of 2 or more) in the predetermined conveying direction, and is an abbreviation of the inspection object being conveyed by the conveying means. Detecting means for sequentially detecting the electromagnetic waves transmitted through the same region, respectively, and outputting detection data corresponding to each of the M row line sensors based on the detected electromagnetic waves;
The inspection object included in the plurality of detection data output by the detection means at each detection timing at which the electromagnetic waves transmitted through substantially the same region of the inspection object are sequentially detected by the M-row line sensors. An adding means for performing control to add the detection data of the electromagnetic waves transmitted through substantially the same region of the object;
An inspection apparatus comprising:   The detection means detects each electromagnetic wave periodically at the detection timing at which the electromagnetic waves transmitted through substantially the same region of the inspection object are sequentially detected by the M line sensor. The inspection apparatus according to claim 1, wherein detection data corresponding to each of the M-line line sensors is output based on the detected electromagnetic wave.   The inspection apparatus according to claim 1, wherein the detection data is a discretized numerical value. The storage device further includes storage means for storing detection data corresponding to each of the M line sensor in a predetermined storage method at each detection timing,
The adding means is configured to detect the electromagnetic wave transmitted through substantially the same region of the inspection object at each detection timing sequentially detected by the M-row line sensors from the detection data stored in the storage means. 4. The control of extracting and adding together detection data of electromagnetic waves transmitted through substantially the same region of the inspection object by an extraction method according to the predetermined storage method is performed. 5. The inspection apparatus according to item 1. The adding means outputs detection data corresponding to each of the M-line line sensors of electromagnetic waves transmitted through substantially the same region of the inspection object from the detection data stored in the storage means. 5. The inspection apparatus according to claim 4, wherein control is performed by extracting and adding together by an extraction method according to the storage method. The storage means includes a first storage area and a second storage area,
The first storage area is an area logically divided into M rows (M + 1) columns storing the detection data for (M + 1) detection cycles by the M column sensor.
The detection means sequentially stores detection data output at each detection timing from the first column to the (M + 1) th column of the first storage area, and thereafter from the first column to the (M + 1) th column in the (M + 1) detection cycle. Overwrite your eyes,
The adding means detects the next detection after the M detection data corresponding to each of the M-line line sensors of the electromagnetic waves transmitted through substantially the same area of the inspection object have been written in the first storage area. Control is performed to add the M detection data to the second storage area in a cycle.
The inspection apparatus according to claim 5. A storage means;
The adding means corresponds to the detection data corresponding to each of the M-line line sensors at each detection timing, corresponding to each of the M-line line sensors of electromagnetic waves transmitted through substantially the same region of the inspection object. 4. The inspection apparatus according to claim 1, wherein control is performed to sequentially store the detection data to be stored in the storage unit so that the detection data to be added are sequentially added. 5. Each time the electromagnetic wave that has passed through the inspection object is detected by the M row line sensor, the detection means stores detection data corresponding to each of the M row line sensors in the storage means,
The adding means is configured such that when the detecting means stores the detection data in the storage means, the M number of line sensors corresponding to the M columns of electromagnetic waves that have passed through substantially the same region of the inspection object. Control is performed so that the detection data are added together sequentially.
The inspection apparatus according to claim 7. The transport means transports the inspection object in a positive direction in which electromagnetic waves transmitted through substantially the same region of the inspection object are sequentially detected by the respective line sensors from the first row to the M row,
Detection data corresponding to the line sensor of the nth column (n = 1, 2,..., M) of the electromagnetic wave transmitted through substantially the same region of the inspection object, which is the object of addition in the adding means. 9. The detection data of the nth column among the detection data corresponding to each of the M-line line sensors at the detection timing of the nth cycle of the region . The inspection apparatus according to item 1 . The transport means can reverse the transport direction in the reverse direction in which the electromagnetic waves transmitted through substantially the same region of the inspection object are sequentially detected by the respective line sensors from the M-th row to the first row. Yes,
When the transport direction by the transport means is reversed, the (M + 1−n) -th row (n = n) of the electromagnetic waves that have passed through substantially the same region of the inspection object to be added by the adding means. The detection data corresponding to the line sensors 1, 2,..., M) is (M + 1−) among the detection data corresponding to each of the M columns of line sensors at the detection timing of the nth cycle of the region. The inspection apparatus according to any one of claims 5 to 8, wherein the inspection data is n) -th detection data. The inspection apparatus according to any one of claims 1 to 10 , wherein addition is performed after predetermined correction is performed on the detection data.

Images