JP6530536B2 - Three-dimensional shape measuring apparatus, measurement data processing unit, measurement data processing method, and computer program - Google Patents

Description

  The present invention relates to a three-dimensional shape measurement apparatus capable of specifying the type of parameter for quantitatively evaluating a difference in surface state when analyzing differences in the surface of a plurality of samples, a measurement data processing unit , Measurement data processing method, and computer program.

  Conventionally, three-dimensional shape measurement devices including optical microscopes such as confocal microscopes and digital microscopes use various measurement processing using measurement data having height information obtained by measuring the three-dimensional shape of a sample. Run. The analysis processing means, for example, displaying a profile graph along a profile line set on a two-dimensional sample image, or performing line roughness analysis along the profile line.

  When analyzing differences in the surface of a plurality of samples, roughness analysis as shown in Patent Document 1 is performed. When the roughness analysis is performed, the analysis result is evaluated using thirty or more roughness parameters such as Ra, Rz, Sa, Std and the like.

JP, 2013-201399, A

  However, when analyzing differences in the surface of a plurality of samples, for example, when comparing the state of surface finish of a master product and a sample product, sensory differences such as touch, brightness, friction, electromagnetic characteristics, etc. Although it can be understood that there is a qualitative difference, there has been a problem that it is difficult to specify the type of parameter for quantitatively evaluating the difference in the state of the surface.

  The present invention has been made in view of such circumstances, and when analyzing differences in the surface of a plurality of samples, it is possible to quantitatively identify the type of parameter for evaluating the difference in the state of the surface. It is an object of the present invention to provide a three-dimensional shape measurement apparatus, a measurement data processing unit, a measurement data processing method, and a computer program.

Three-dimensional shape measuring apparatus according to the first invention to achieve the above object, by measuring the three-dimensional shape of the sample, the three-dimensional shape measuring unit for acquiring measurement data including the three-dimensional shape information, the three-dimensional A three-dimensional shape measurement apparatus comprising: a measurement data processing unit that executes analysis processing on a three-dimensional shape of a sample using measurement data acquired by the shape measurement unit, and displays an analysis result on a display unit; The data processing unit includes, in the display unit, measurement data input receiving means for receiving classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups, and the three-dimensional shape measurement unit on the acquired plurality of measurement data, parameters for each said parameter for each of a plurality of different parameters relating to the surface condition of the sample And parameter calculating means for calculating a data value, calculated by the parameter calculating means, and a plurality of parameter values obtained from the measured data belonging to one of the two groups, from the measurement data belonging to the other of the two groups A means for calculating, for each of the parameters, the degree of separation indicating the degree of separation from the plurality of parameter values obtained using statistical processing; and a display means for displaying the degree of separation calculated for each of the parameters on the display unit And the like.
Next, in order to achieve the above object, a three-dimensional shape measurement apparatus according to a second invention measures a three-dimensional shape of a sample to obtain measurement data including three-dimensional shape information; A three-dimensional shape measuring apparatus comprising: a measurement data processing unit that executes analysis processing on a three-dimensional shape of a sample using measurement data acquired by the three-dimensional shape measurement unit, and displays an analysis result on a display unit; The measurement data processing unit is configured to receive, in the display unit, a plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups, measurement data input acceptance means, and the three-dimensional shape Area division means for dividing the unit area on the two-dimensional image corresponding to the measurement data acquired by the measurement unit into a plurality of areas; Parameter value calculation means for calculating parameter values for each of a plurality of different parameters related to the surface state of a sample, for each measurement data of a portion corresponding to each region; A degree of separation indicating the degree of separation between a plurality of parameter values determined from measurement data belonging to one of two groups and a plurality of parameter values determined from measurement data belonging to the other of the two groups It is characterized by comprising means for calculating using processing and display means for displaying the degree of separation calculated for each of the parameters on the display unit.

A three-dimensional shape measuring apparatus according to a third invention is characterized in that, in the first or second invention, the degree of separation is calculated by the following equation .

Degree of separation = | average value of group 1−average value of group 2 |
/ (Standard deviation of group 1-standard deviation of group 2)

In the three-dimensional shape measuring apparatus according to the fourth invention, in any one of the first to third inventions, the display means specifies the degree of separation calculated for each of the plurality of different parameters. An indicator based on the result of comparison with the numerical value of is displayed on the display unit .

In the three-dimensional shape measuring apparatus according to the fifth invention, in any one of the first to fourth inventions , the display means is associated with each of the plurality of different parameters, and one of the two groups is associated. A first graph according to the distribution of the plurality of parameter values obtained from the measurement data belonging to the second group, and a second graph according to the distribution of the plurality of parameter values obtained from the measurement data belonging to the other of the two groups It is characterized by displaying on the said display part .

A three-dimensional shape measuring apparatus according to the sixth invention is characterized in that, in any one of the first to fifth inventions, the display means displays a list of the plurality of different parameters in descending order of the degree of separation. I assume.

Next, in order to achieve the above object, a measurement data processing method according to a seventh invention measures a three-dimensional shape of a sample to obtain measurement data including three-dimensional shape information; Performing analysis processing on the three-dimensional shape of the sample using the measurement data acquired by the three-dimensional shape measurement unit, and executing the three-dimensional shape measurement apparatus having a measurement data processing unit for displaying the analysis result on the display unit; The measurement data processing unit receives, in the display unit, the classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups, respectively. A plurality of different parameters relating to the surface state of the sample respectively for one process and a plurality of measurement data acquired by the three-dimensional shape measurement unit A second step of calculating parameter values for each of the parameters, and a plurality of parameter values calculated in the second step and obtained from measurement data belonging to one of the two groups, and the other of the two groups A third step of calculating the degree of separation from the plurality of parameter values obtained from the measurement data belonging to the group using statistical processing for each of the parameters, and the degree of separation calculated for each of the parameters And a fourth step of displaying on the display unit.
Next, in order to achieve the above object, a measurement data processing method according to the eighth invention measures a three-dimensional shape of a sample to obtain measurement data including three-dimensional shape information; Performing analysis processing on the three-dimensional shape of the sample using the measurement data acquired by the three-dimensional shape measurement unit, and executing the three-dimensional shape measurement apparatus having a measurement data processing unit for displaying the analysis result on the display unit; The measurement data processing unit receives, in the display unit, the classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups, respectively. And 5, a fifth step of dividing a unit area on a two-dimensional image corresponding to measurement data acquired by the three-dimensional shape measurement unit into a plurality of areas. A second step of calculating parameter values for each of a plurality of different parameters related to the surface state of the sample, with respect to measurement data of a portion corresponding to each of the regions divided in the fifth step; Indicates the degree of separation between a plurality of parameter values calculated from measurement data belonging to one of the two groups and a plurality of parameter values calculated from measurement data belonging to the other of the two groups, calculated in the second step The method may include a third step of calculating the degree of separation for each of the parameters using statistical processing, and a fourth step of displaying the degree of separation calculated for each of the parameters on the display unit. .

Next, in order to achieve the above object, a computer program according to a ninth aspect of the present invention measures a three-dimensional shape of a sample to obtain measurement data including three-dimensional shape information, and the three-dimensional shape measurement unit It is possible to execute analysis processing on the three-dimensional shape of the sample using the measurement data acquired by the shape measurement unit, and to execute the three-dimensional shape measurement apparatus having a measurement data processing unit that displays the analysis result on the display unit Means for receiving the classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups in the display unit. A plurality of measurement data acquired by the three-dimensional shape measurement unit, Parameter value calculating means for calculating parameter values for each of the different parameters, and a plurality of parameter values calculated by the parameter value calculating means and obtained from measurement data belonging to one of the two groups; Means for calculating the degree of separation from the plurality of parameter values determined from the measurement data belonging to the other of the plurality of parameters using statistical processing for each of the parameters, and displaying the degree of separation calculated for each of the parameters It is characterized in that it functions as display means for displaying on a unit .
Next, in order to achieve the above object, a computer program according to the tenth invention measures a three-dimensional shape of a sample to obtain measurement data including three-dimensional shape information, and the three-dimensional shape measurement unit It is possible to execute analysis processing on the three-dimensional shape of the sample using the measurement data acquired by the shape measurement unit, and to execute the three-dimensional shape measurement apparatus having a measurement data processing unit that displays the analysis result on the display unit Means for receiving the classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups in the display unit. A plurality of unit areas on a two-dimensional image corresponding to measurement data acquired by the three-dimensional shape measurement unit; Parameter values for calculating parameter values for each of a plurality of different parameters relating to the surface state of the sample, with respect to each of the measurement data of the portions corresponding to the respective regions divided by the region dividing means and the region dividing means Calculation means, a plurality of parameter values calculated by the parameter value calculation means and obtained from measurement data belonging to one of the two groups, and a plurality of parameter values obtained from measurement data belonging to the other of the two groups It is characterized in that it functions as a means for calculating the degree of separation indicating the degree of separation for each of the parameters using statistical processing, and a display means for displaying the degree of separation calculated for each of the parameters on the display unit.

In the first invention, the seventh invention, and the ninth invention, analysis processing on the three-dimensional shape of the sample is executed using measurement data including three-dimensional shape information acquired by measuring the three-dimensional shape of the sample, and analysis results Is displayed on the display unit. The measurement data processing unit receives, in the display unit, the classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups. For a plurality of measurement data acquired by the three-dimensional shape measurement unit, parameter values are calculated for each of a plurality of different parameters related to the surface state of the sample. A degree of separation indicating the degree of separation between a plurality of parameter values determined from measurement data belonging to one of the two calculated groups and a plurality of parameter values determined from measurement data belonging to the other of the two groups The separation degree calculated for each parameter is displayed on the display unit using statistical processing . As a result, when analyzing differences in the surface of the sample, it is possible to specify classification parameters that clearly show differences as differences in parameter values, and it is difficult for the user to select, quantitatively. It is possible to select classification parameters that can assess differences in surface conditions.
In the second invention, the eighth invention and the tenth invention, analysis processing on the three-dimensional shape of the sample is executed using measurement data including three-dimensional shape information acquired by measuring the three-dimensional shape of the sample, and analysis results Is displayed on the display unit. The measurement data processing unit receives, in the display unit, the classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups. The unit area on the two-dimensional image corresponding to the measurement data acquired by the three-dimensional shape measurement unit is divided into a plurality of areas, and the surface of the sample is compared with each measurement data of the part corresponding to each divided area. Parameter values are calculated for each of a plurality of different parameters related to the state. A degree of separation indicating the degree of separation between a plurality of parameter values determined from measurement data belonging to one of the two calculated groups and a plurality of parameter values determined from measurement data belonging to the other of the two groups The separation degree calculated for each parameter is displayed on the display unit using statistical processing. As a result, when analyzing differences in the surface of the sample, it is possible to specify classification parameters that clearly show differences as differences in parameter values, and it is difficult for the user to select, quantitatively. It is possible to select classification parameters that can assess differences in surface conditions.

In the third shot bright, because separation is calculated by the following equation, it can evaluate the separation degree correctly.

Degree of separation = | average value of group 1−average value of group 2 |
/ (Standard deviation of group 1-standard deviation of group 2)

In the fourth invention, since an indicator based on the result of comparing the degree of separation calculated for each of a plurality of different parameters with a predetermined numerical value is displayed on the display unit, a display showing an indicator instead of a numerical value, for example an icon or logo It is possible to compare sensibly with image data such as

In the fifth invention, a first graph corresponding to a distribution of a plurality of parameter values obtained from measurement data belonging to one of two groups in association with each of a plurality of different parameters belongs to the other of the two groups Since the second graph corresponding to the distribution of the plurality of parameter values obtained from the measurement data is displayed on the display unit, it is possible to intuitively compare with a graph instead of a numerical value .

In the sixth invention, since a plurality of different parameters are displayed as a list in descending order of the degree of separation, parameters according to the degree of separation can be easily visually checked .

  According to the present invention, when analyzing differences in the surface of a sample, it is possible to specify classification parameters that clearly show differences as differences in parameter values, making it difficult for the user to select, quantitative It is possible to select classification parameters capable of evaluating differences in the surface condition of the sample.

It is a block diagram showing typically the composition of the three-dimensional shape measuring device concerning an embodiment of the invention. It is a block diagram which shows the structure at the time of using control parts, such as CPU, of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is a functional block diagram of a measurement data processing unit of a three-dimensional shape measuring apparatus according to an embodiment of the present invention. It is an illustration figure of the measurement data input reception screen classified into two groups of a measurement data processing unit of a three-dimensional shape measuring device concerning an embodiment of the invention. It is an illustration figure of a measurement data input reception screen classified into three groups of a measurement data processing unit of a three-dimensional shape measuring device concerning an embodiment of the invention. It is an illustration figure for demonstrating the calculation method of the parameter value of parameter Ra. It is an illustration figure for demonstrating the calculation method of the parameter value of parameter Rz. It is an illustration figure of the parameter of line roughness. It is an illustration of an image for explaining an angle spectrum, and an illustration of an angle spectrum. It is an illustration figure of the parameter of surface roughness. It is an illustration figure of area division of a measurement data processing unit of a three-dimensional shape measuring device concerning an embodiment of the invention. It is an illustration figure of a display screen of a classification parameter of a measurement data processing unit of a three-dimensional shape measuring device concerning an embodiment of the invention. It is a schematic diagram in the case of displaying the analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention in a matrix form. It is a schematic diagram in the case of displaying additionally the analysis result of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention in a matrix form. It is a flowchart which shows the processing procedure of CPU of the measurement data processing unit of the three-dimensional shape measuring apparatus which concerns on embodiment of this invention. It is an illustration figure of the graph displayed on a distribution display area.

  Hereinafter, a three-dimensional shape measuring apparatus according to an embodiment of the present invention will be specifically described based on the drawings. FIG. 1 is a block diagram schematically showing a configuration of a three-dimensional shape measuring apparatus according to an embodiment of the present invention.

  As shown in FIG. 1, the three-dimensional shape measurement apparatus 10 according to the present embodiment is configured of a measurement data processing unit 1 and a three-dimensional shape measurement unit 2. The three-dimensional shape measurement unit 2 has a laser light source 52, and a single wavelength light is emitted from the laser light source 52. The emitted single wavelength light is reflected by the first half mirror 56 via the X-Y scan optical system 54, and is irradiated onto the sample M on the stage 58 through the objective lens 20.

 The reflected light of the sample M is reflected by the first half mirror 56, and subsequently reflected by the second half mirror 22, and then guided to the first imaging lens 24. Only light whose focal position of the first imaging lens 24 matches the pinhole 26 passes through the pinhole 26 as a confocal stop, and reflected light passing through the pinhole 26 is input to the light receiving element 28.

 The three-dimensional shape measurement unit 2 also includes a white light source 30. The white light emitted from the white light source 30 is reflected by the third half mirror 32 provided between the first half mirror 56 and the objective lens 20, and is irradiated onto the sample M.

  The three-dimensional shape measurement unit 2 includes a color CCD camera 34, and captures an image of the light passing through the first half mirror 56 with the second imaging lens 36. The captured image is a target of analysis processing in the measurement data processing unit 1.

 The light emitted from the laser light source 52, which is a point light source, is divided into scan position units in the observation field of view via the XY scan optical system 54 and subjected to XY scan, and the light receiving element 28 is reflected for each scan position Detect light. Further, the objective lens 20 is driven in the Z-axis direction (optical axis direction) as shown by the arrow, and changes the focal position in the Z-axis direction for each scanning position. Therefore, the light receiving element 28 detects the reflected light for each position of the objective lens 20 in the Z-axis direction. Further, the reflected light of the white light source 30 is detected by the color CCD camera 34, and the color information of the sample M at the focal position detected using the laser light source 52 is detected for each scanning position.

 The light receiving element 28 and the color CCD camera 34 are connected to a measurement data processing unit 1 configured by a computer, and transmit the detected measurement data to the measurement data processing unit 1. The measurement data processing unit 1 that has received the measurement data executes analysis processing based on the received measurement data. The analysis result is displayed on the display device (display unit) 43 of the measurement data processing unit 1.

  FIG. 2 is a block diagram showing a configuration of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention when a control unit such as a CPU is used. As shown in FIG. 2, the measurement data processing unit 1 according to the present embodiment includes at least a CPU (control unit) 11, a memory 12, a storage device 13, an I / O interface 14, and a control program for controlling at least operation. A video interface 15, a portable disk drive 16, a communication interface 17 and an internal bus 18 are provided.

  The CPU 11 is connected to the above-described hardware components of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 via the internal bus 18, and controls the operation of the hardware components described above. Execute various software-like functions in accordance with the computer program 100 stored in FIG. The memory 12 is composed of volatile memory such as SRAM, SDRAM, etc. The load module is expanded when the computer program 100 is executed, and stores temporary data and the like generated when the computer program 100 is executed.

  The storage device 13 is configured by a built-in fixed storage device (hard disk), a ROM, and the like. The computer program 100 stored in the storage device 13 is downloaded by the portable disk drive 16 from a portable recording medium 90 such as a DVD or a CD-ROM in which information such as a program and data is recorded, and from the storage device 13 when executed. It is expanded to the memory 12 and executed. Of course, it may be a computer program downloaded from an external computer connected via the communication interface 17.

  The storage device 13 is configured of a hard disk or the like, and includes a measurement data storage unit 131 and a parameter information storage unit 132. The measurement data storage unit 131 stores measurement data including three-dimensional shape information obtained by measuring the three-dimensional shape of the sample in the three-dimensional shape measurement unit 2 in association with a plurality of groups.

  The parameter information storage unit 132 calculates and stores parameter values for a plurality of parameters related to the state of the surface of the sample for each of the plurality of groups for which the input has been received. The parameter values stored in the parameter information storage unit 132 are basic data that performs statistical processing of the parameter values for each parameter and determines the presence or absence of a significant difference or determines the presence of a difference greater than or equal to a predetermined threshold. .

  The communication interface 17 is connected to the internal bus 18, and is connected to an external network such as the Internet, LAN, or WAN, whereby the three-dimensional shape measurement unit 2 of the three-dimensional shape measurement apparatus 10, an external computer, etc. It is possible to send and receive data.

  The I / O interface 14 is connected to input devices such as a keyboard 41 and a mouse 42, and receives input of parameter information and the like necessary for analysis processing. The video interface 15 is connected to a display device 43 such as an LCD, and displays a list of analysis results.

  FIG. 3 is a functional block diagram of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. The measurement data input reception unit 301 of the measurement data processing unit 1 according to the present embodiment classifies the image data in the light receiving element 28 and the color CCD camera 34 of the three-dimensional shape measurement unit 2 into a plurality of units, for example, a plurality of groups. The input is accepted as a plurality of measured data. The measurement data having received the input is stored in the measurement data storage unit 131 of the storage device 13.

  Qualitative or quantitative items in the case of classification into a plurality of groups (units) include, for example, glossiness, touch, air tightness, frictional force, abrasion, seizure, lubricity, adhesiveness, adhesion, ease of peeling Appearance, image sharpness (brightness of coated surface), optical performance, corrosion resistance, insulation, fatigue fracture strength, electromagnetic properties, thermal conductivity of contact surface, electrical resistance, joint surface rigidity, dimensional measurement accuracy, touch, Print quality, noise, or vibration.

  FIG. 4 is an exemplary view of a measurement data input acceptance screen classified into two groups of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. As shown in FIG. 4, the measurement data displayed in the measurement data display area 45 displaying a list of measurement data classified into a plurality of groups is moved to the group classification areas 46 and 47 by a drag & drop operation with a mouse or the like. Do. For example, the “OK products” determined to be non-defective products by the quality determination may be classified into group 1 and the “NG products” determined to be defective products into group 2 may be classified. In the case of a tablet or the like, by selecting the operation button 48 and moving it, it is possible to classify into a plurality of groups and receive an input as a plurality of measurement data.

  Of course, it is not limited to classifying into two groups. FIG. 5 is an exemplary view of a measurement data input acceptance screen classified into three groups of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. As shown in FIG. 5, the measurement data displayed in the measurement data display area 45 displaying a list of measurement data to be classified into a plurality of groups is divided into group classification areas 46, 47, 49 by a drag & drop operation with a mouse or the like. Move to For example, data of condition 1 may be classified into group 1, data of condition 2 into group 2, and data of condition 3 into group 3. In the case of a tablet or the like, by selecting the operation button 48 and moving it, it is possible to classify into a plurality of groups and receive an input as a plurality of measurement data.

  Returning to FIG. 3, the parameter value calculation means 304 calculates parameter values for a plurality of parameters related to the state of the surface of the sample for each of the plurality of units for which the input has been received. The parameter value for each parameter calculated by the parameter value calculation means 304 is stored in the parameter information storage unit 132 of the storage device 13.

  As a method of calculating the parameter value, for example, a method using a typical roughness parameter is used, and the parameter Ra of line roughness indicating the arithmetic average height is an average value of actual values of the height R (x) at the reference length. Calculated as FIG. 6 is an exemplary view for explaining a method of calculating the parameter value of the parameter Ra.

  As shown in FIG. 6, for the contour curve within the reference length lr, the parameter value of the parameter Ra is calculated as an average value of heights (absolute values) inverted at a predetermined reference height. The formula can be expressed by (Equation 1), assuming that there are plot points for measuring N heights within the reference length lr.

  Of course, the line roughness parameter is not limited to the parameter Ra. FIG. 7 is an exemplary view for explaining a method of calculating the parameter value of the parameter Rz.

  As shown in FIG. 7, for the contour curve within the reference length lr, the height of the peak Rp which is the highest from the reference height and the depth Rv of the valley which is the deepest from the reference height. The parameter value of the parameter Rz is calculated as the sum of The calculation formula can be expressed by (Formula 2).

  Most users use the above-mentioned Ra and Rz as line roughness parameters, and at present, the other parameters are left without understanding their meanings. FIG. 8 is an illustration of a line roughness parameter. As shown in FIG. 8, the height Rp of the highest peak from the reference height described above, the depth Rv of the deepest deepest groove from the reference height, the sum Rz of Rp and Rv, arithmetic There are various parameters other than the average height Ra.

  Moreover, it is not necessary to limit to the parameter of line roughness as a parameter, For example, the parameter which shows surface roughness may be sufficient. A parameter Sa of arithmetic average height obtained by extending the parameter Ra of line roughness is a parameter of the representative surface roughness.

  The parameter value of the parameter Sa is calculated as an average value of the absolute values of the heights of the plot points (heights from the average surface of the surface) for measuring the height in the region. It can be expressed as (Equation 3) in terms of a calculation formula.

  Also, the parameter Std of the angular spectrum, which is the value of the angle at which the angular spectrum function becomes maximum, may be used. FIG. 9 is an exemplary view of an image for illustrating an angular spectrum and an exemplary view of the angular spectrum.

  In the image shown in FIG. 9 (a), a line pattern of different angles is displayed in the nodal pattern formed in the direction of the constant angle. FIG. 9 (b) is a distribution chart of angular spectra obtained from the image shown in FIG. 9 (a). As shown in FIG. 9B, it can be seen that the nodal pattern formed in the direction of a constant angle is in the direction of less than 70 degrees, and the pattern of one stripe is in the direction of more than 110 degrees.

  The function for obtaining the angular spectrum is defined in (Equation 4), and FIG. 9 (b) is calculated based on (Equation 4).

  Of course, the surface roughness parameters are not limited to the above-mentioned parameters. FIG. 10 is an exemplary view of surface roughness parameters. As shown in FIG. 10, various parameters exist besides the parameter Sa of the arithmetic mean height and the parameter Std of the angular spectrum described above.

  Returning to FIG. 3, the parameter value calculation means 304 calculates parameter values for the parameters related to the state of the surface of the sample for each of the plurality of groups (units) for which the input has been received. When only image data (measurement data) is received, statistical processing, in particular, T-test described later can not be performed (at least four data are required).

  Therefore, it is preferable to provide area dividing means 302 and divide a unit area on a two-dimensional plane (image plane) corresponding to one group (unit) into a plurality of areas. Thereby, the parameter value calculation means 304 can calculate parameter values for a plurality of parameters for each of the plurality of divided regions, and specify a classification parameter in a state where a plurality of parameter values exist in one group. can do.

  FIG. 11 is an exemplary view of area division of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. As shown in FIG. 11, first, specification of a unit area 110 for acquiring measurement data is accepted. Next, the unit area is divided into four areas 111, 112, 113, and 114 by the operation of a mouse or the like. Then, it is possible to obtain at least four parameter values for the same parameter in one unit area by calculating parameter values for the plurality of parameters for each of the plurality of divided areas 111, 112, 113, and 114. Since it is possible, the T test described later can be reliably performed.

  Note that the area specification receiving unit 303 may be provided to receive, from among the plurality of areas divided on the two-dimensional plane, the specification of the area for which the parameter value is to be calculated. Since it is possible to specify a region that the user recognizes as qualitatively different, it is possible to specify a classification parameter that can analyze the difference of the surface of the sample more reliably and quantitatively.

  The classification parameter specification unit 305 specifies classification parameters for classifying the measurement data into a plurality of units from among the plurality of parameters based on the plurality of parameter values calculated and stored. For example, statistical processing is performed for each parameter based on the calculated parameter value to specify a classification parameter that is easy to analyze differences in the surface of the sample. As statistical processing, for example, a known T test is performed. The type of statistical processing is not particularly limited.

  Specifically, the process is performed according to the following procedure. First, an S filter, an F operation, and an L filter are selected and applied to measurement data of two groups classified.

  The S filter is a filter (low pass filter) that removes small scale components, and is a filter corresponding to the cutoff value λs. Specifically, for example, the wavelength (reciprocal number of cut-off value) of the filter may be determined according to the NA of the lens, or the minimum cut-off value on the standard (cut-off wavelength) larger than the horizontal resolution of data. You may choose Also, a filter with the largest significant difference among all the S filters defined in the standard may be adopted.

  The F operation is a filter for removing the shape from the base surface, and is a filter for removing the shape corresponding to the inclination correction.

  The L filter is a filter (high pass filter) that removes large scale components and is a filter corresponding to the cutoff value λc. Specifically, for example, the wavelength (reciprocal number of cut-off value) of the filter may be determined according to the NA of the lens, or the filter with the largest significant difference among all the L filters defined in the standard may be adopted. Also good.

  After filtering, parameter values of surface texture parameters (line roughness parameter or surface roughness parameter) are calculated according to, for example, the standard of ISO 25178. For example, the parameter value of the parameter Std of the above-mentioned angular spectrum is calculated to specify the direction of the streaks of the pattern.

  Next, one or more lines are drawn in a direction perpendicular to the identified streak direction, and cutoff values λs and λc are applied to the height data of each line, as shown in FIG. Calculate the parameter value of the line roughness parameter. This is performed on measurement data of all groups, and a T test is performed on all parameters to determine the presence or absence of a significant difference for each parameter.

  The T-test is a test that determines whether the averages are equal or not on the assumption that the two populations both have a normal distribution. If the variances of the two groups can be assumed to be equal, Student's T-test is adopted, and if the variances can not be assumed equal, Welch's T-test is adopted.

  When the T test is not used, it is determined whether separation is possible depending on how many times the distance between the average values of the two groups corresponds to the sum of standard deviations between the two groups. The distributions of the two groups can be fitted to the normal distribution, and the determination can be made according to the degree of overlap of the two normal distributions.

  Even when it is determined that there is a significant difference, it may be regarded as having no significant difference if it is a meaningless significant difference. For example, even if it is determined that there is a significant difference in the parameter Ra, it can be determined that an error should be considered when it is determined that it is smaller than a predetermined value from measurement conditions such as lens and data size. At this time, it can be determined that there is no significant difference.

  Also, the present invention is not limited to performing statistical processing and determining the presence or absence of a significant difference for each parameter, and classification parameters may be specified without performing statistical processing. Specifically, the classification parameter is specified by the following procedure.

  First, a threshold is set in advance for each parameter. Next, parameter values of all roughness parameters are calculated for the measurement data of the two groups. And when the difference of the average value of the roughness parameter of two groups is more than the set threshold value, it can be judged that it is a parameter which can be specified as a classification parameter.

  Returning to FIG. 3, the classification parameter display means 306 displays at least the specified classification parameter on the display means (display unit) 43. The classification parameter display unit 306 is not limited to displaying only the classification parameter, and may additionally display the classification parameter in addition to the analysis result.

  FIG. 12 is an exemplary view of a display screen of classification parameters of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. In the example of FIG. 12, the distribution of the average value of the parameter values of each group is graphically displayed in the distribution display area 123 for each parameter 122.

  The threshold of each set parameter is displayed in the threshold display area 125. Classification parameters are displayed according to the degree of separation with respect to the threshold. That is, the priority is given in descending order of the degree of separation, and the graph is displayed in the distribution display area 123 in descending order of the priority.

  Further, the separation degree display area 121 displays the separation degree which is an index indicating the degree of whether or not to be adopted as a classification parameter for each parameter. In the example of FIG. 12, the degree of separation is expressed by “◎”, “○”, and “Δ”, and it is shown that “分離” as the degree of separation is more suitable as a classification parameter.

  Here, the degree of separation can be calculated by (Equation 5) with the two groups being group 1 and group 2.

  For example, if the degree of separation calculated in (Equation 5) is greater than '6', '◎' is greater than '3' and '6' or less, if 'O', greater than '1' When it is 3 'or less, "(triangle | delta)" is each displayed.

  A check box is provided in the selection area 124 as a classification parameter selection receiving unit. When the check box is selected by the operation of the mouse 42, the selected classification parameter is additionally displayed in the analysis result.

  First, when displaying the analysis results in a matrix, for example, three types of setting information, that is, setting information for each analysis method (hereinafter, analysis processing unit setting information), setting information for each measurement data (hereinafter, file unit setting information) , And three pieces of setting information (hereinafter, cell unit setting information) for setting different analysis methods for each of the measurement data.

  FIG. 13 is a schematic view in the case where analysis results of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention are displayed in a matrix form. In the example of FIG. 13, the analysis result for each measurement data (file) is represented in row units, and the analysis result for each analysis method (analysis process) is represented in column units.

  In this case, the analysis processing unit setting information indicates, as an analysis processing unit setting set 401 including a plurality of analysis processing unit setting information as a group, analysis processing results for each column. For example, in the case of profile measurement processing, “laser + color”, “laser”, “color”, “height” or the like as the type of image display is analysis processing unit setting information.

  The file unit setting information indicates, as a file unit setting set 402 including a plurality of file unit setting information as one unit, each row indicates an analysis result obtained by executing analysis processing with respect to which setting information with a plurality of analysis methods. There is. For example, in the case of profile measurement processing, measurement data such as height data and color data become file unit setting information.

  Cell unit setting information 403 indicates file-specific setting information for each analysis process. By combining these, analysis results can be displayed in a matrix.

  The classification parameters for which selection has been received in the selection area 124 of FIG. 12 are additionally displayed in the analysis results displayed in a matrix. FIG. 14 is a schematic view in the case where the analysis result of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention is additionally displayed in a matrix.

  In the example of FIG. 14, “laser + color” is selected as analysis processing unit setting information, and the analysis result regarding “laser + color information” is displayed together with the height image for each measurement data. Then, when the parameter Str is selected as the classification parameter, the parameter value for each measurement data is additionally displayed.

  FIG. 15 is a flowchart showing the processing procedure of the CPU 11 of the measurement data processing unit 1 of the three-dimensional shape measuring apparatus 10 according to the embodiment of the present invention. The CPU 11 of the measurement data processing unit 1 receives an input as plural measurement data obtained by classifying the image data in the light receiving element 28 and the color CCD camera 34 of the three-dimensional shape measurement unit 2 into plural units, for example plural groups (step In step S1501, the measurement data storage unit 131 of the storage device 13 is stored (step S1502).

  The CPU 11 determines whether the number of measurement data of one group is four or more (step S1503). If the CPU 11 determines that the number of measurement data is smaller than 4 (step S1503: NO), the CPU 11 divides the unit area on the two-dimensional plane from which the measurement data is acquired into a plurality of areas (step S1504) .

  If the CPU 11 determines that the number of measurement data is four or more (step S1503: YES), the CPU 11 skips step S1504, and calculates and stores parameter values for each parameter (step S1505). The CPU 11 executes a T test for each parameter based on the plurality of stored parameter values (step S1506), and is a classification parameter for classifying measurement data into a plurality of groups (units) out of the plurality of parameters. Are identified (step S1507). For example, a T-test is performed as a statistical process for each parameter based on the calculated parameter value to identify a classification parameter that is easy to analyze differences in the surface of the sample.

  The CPU 11 displays at least the identified classification parameter on the display means (display unit) 43 (step S1508). Of course, only the classification parameter may be displayed, or the classification parameter may be additionally displayed in addition to the analysis result.

  As described above, according to the present embodiment, when analyzing differences in the surface of a sample, it is possible to identify classification parameters that clearly show differences as differences in parameter values, and allow the user to select It is possible to select classification parameters that are difficult to quantitatively assess differences in surface conditions.

  The present invention is not limited to the above-described embodiment, and various changes, improvements, and the like can be made within the scope of the present invention. For example, in the example of FIG. 12, the distribution of the average value of the parameter values of each group is graphically displayed in the distribution display area 123 for each parameter 122. However, if the population is small, the histogram can not grasp the distribution. Therefore, the mean value and the indeterminate variance may be calculated from actual data and calculated as a normal distribution map.

  FIG. 16 is an illustration of a graph displayed in the distribution display area 123 shown in FIG. In the example of FIG. 16, when only four actual data 161 exist, the distribution can not be displayed. Therefore, the average value and the variance of the four actual data 161 are calculated, and the normal distribution curve 162 is obtained and displayed.

  Only the normal distribution curve may be displayed in the distribution display area 123 shown in FIG. 12, or only actual data or both may be displayed. Also, a so-called box and whisker plot may be used.

1 measurement data processing unit 2 three-dimensional shape measuring unit 10 three-dimensional shape measuring device 11 CPU
12 Memory 13 Storage Device 90 Portable Recording Medium 100 Computer Program 131 Measurement Data Storage Unit 132 Parameter Information Storage Unit

Claims (10)

A three-dimensional shape measurement unit that measures a three-dimensional shape of a sample and obtains measurement data including three-dimensional shape information;
A measurement data processing unit that executes analysis processing on a three-dimensional shape of a sample using measurement data acquired by the three-dimensional shape measurement unit, and displays an analysis result on a display unit; ,
The measurement data processing unit
Measurement data input reception means for receiving classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups in the display unit ;
Parameter value calculation means for calculating parameter values for each of a plurality of different parameters relating to the surface state of a sample with respect to the plurality of measurement data acquired by the three-dimensional shape measurement unit ;
Degree of separation between a plurality of parameter values calculated by the parameter value calculation means and obtained from measurement data belonging to one of the two groups and a plurality of parameter values obtained from measurement data belonging to the other of the two groups A means for calculating the degree of separation shown by statistical processing for each of the parameters;
Three-dimensional shape measuring apparatus comprising: a display unit that displays the separation degree calculated for each of the parameters on the display unit. A three-dimensional shape measurement unit that measures a three-dimensional shape of a sample and obtains measurement data including three-dimensional shape information;
A measurement data processing unit that executes analysis processing on a three-dimensional shape of a sample using the measurement data acquired by the three-dimensional shape measurement unit, and displays an analysis result on a display unit;
A three-dimensional shape measuring device having
The measurement data processing unit
Measurement data input reception means for receiving classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups in the display unit;
Area division means for dividing a unit area on a two-dimensional image corresponding to measurement data acquired by the three-dimensional shape measurement unit into a plurality of areas;
Parameter value calculation means for calculating parameter values for each of a plurality of different parameters related to the surface state of the sample, with respect to respective measurement data of a portion corresponding to each of the regions divided by the region division means;
Degree of separation between a plurality of parameter values calculated by the parameter value calculation means and obtained from measurement data belonging to one of the two groups and a plurality of parameter values obtained from measurement data belonging to the other of the two groups A means for calculating the degree of separation shown by statistical processing for each of the parameters;
And display means for displaying the degree of separation calculated for each of the parameters on the display unit.
Three-dimensional shape measuring apparatus you comprising: a. The three-dimensional shape measuring apparatus according to claim 1 or 2 separation is characterized in that it is calculated by the following equation.

Degree of separation = | average value of group 1−average value of group 2 |
/ (Standard deviation of group 1-standard deviation of group 2)
4. The display unit according to claim 1 , wherein the display unit displays an index based on a result of comparing the degree of separation calculated for each of the plurality of different parameters with a predetermined numerical value on the display unit . The three-dimensional shape measurement device according to any one of the preceding claims. The display means is associated with each of the plurality of different parameters, and a first graph corresponding to a distribution of a plurality of parameter values obtained from measurement data belonging to one of the two groups; The three-dimensional shape according to any one of claims 1 to 4, wherein a second graph corresponding to a distribution of a plurality of parameter values obtained from measurement data belonging to the other is displayed on the display unit. measuring device. The three-dimensional shape measuring apparatus according to any one of claims 1 to 5, wherein the display means displays the plurality of different parameters in descending order of the degree of separation . A three-dimensional shape measurement unit that measures a three-dimensional shape of a sample and obtains measurement data including three-dimensional shape information;
A measurement data processing unit that executes analysis processing on a three-dimensional shape of a sample using the measurement data acquired by the three-dimensional shape measurement unit, and displays an analysis result on a display unit;
A measurement data processing method that can be executed by a three-dimensional shape measurement apparatus having
The measurement data processing unit
A first step of receiving classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups in the display unit;
A second step of calculating parameter values for each of a plurality of different parameters relating to the surface state of the sample with respect to the plurality of measurement data acquired by the three-dimensional shape measurement unit;
Degree of separation between a plurality of parameter values calculated in the second step and determined from measurement data belonging to one of the two groups and a plurality of parameter values determined from measurement data belonging to the other of the two groups A third step of calculating the degree of separation shown by statistical processing for each of the parameters;
A fourth step of displaying the degree of separation calculated for each of the parameters on the display unit;
Measurement data processing method you comprising a. A three-dimensional shape measurement unit that measures a three-dimensional shape of a sample and obtains measurement data including three-dimensional shape information;
A measurement data processing unit that executes analysis processing on a three-dimensional shape of a sample using the measurement data acquired by the three-dimensional shape measurement unit, and displays an analysis result on a display unit;
A measurement data processing method that can be executed by a three-dimensional shape measurement apparatus having
The measurement data processing unit
A first step of receiving classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups in the display unit;
A fifth step of dividing a unit area on a two-dimensional image corresponding to measurement data acquired by the three-dimensional shape measurement unit into a plurality of areas;
A second step of calculating parameter values for each of a plurality of different parameters related to the surface state of the sample, with respect to measurement data of a portion corresponding to each of the regions divided in the fifth step;
Degree of separation between a plurality of parameter values calculated in the second step and determined from measurement data belonging to one of the two groups and a plurality of parameter values determined from measurement data belonging to the other of the two groups A third step of calculating the degree of separation shown by statistical processing for each of the parameters;
A fourth step of displaying the degree of separation calculated for each of the parameters on the display unit;
Measurement data processing method you comprising a. A three-dimensional shape measurement unit that measures a three-dimensional shape of a sample and obtains measurement data including three-dimensional shape information;
A measurement data processing unit that executes analysis processing on a three-dimensional shape of a sample using the measurement data acquired by the three-dimensional shape measurement unit, and displays an analysis result on a display unit;
A computer program that can be executed by a three-dimensional shape measuring device having
The measurement data processing unit
Measurement data input accepting means for accepting classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups in the display unit;
Parameter value calculation means for calculating parameter values for each of a plurality of different parameters related to the surface state of a sample, with respect to the plurality of measurement data acquired by the three-dimensional shape measurement unit,
Degree of separation between a plurality of parameter values calculated by the parameter value calculation means and obtained from measurement data belonging to one of the two groups and a plurality of parameter values obtained from measurement data belonging to the other of the two groups A means for calculating the degree of separation shown by statistical processing for each of the parameters;
Display means for displaying the degree of separation calculated for each of the parameters on the display unit
A computer program characterized in that it functions as: A three-dimensional shape measurement unit that measures a three-dimensional shape of a sample and obtains measurement data including three-dimensional shape information;
A measurement data processing unit that executes analysis processing on a three-dimensional shape of a sample using the measurement data acquired by the three-dimensional shape measurement unit, and displays an analysis result on a display unit;
A computer program that can be executed by a three-dimensional shape measuring device having
The measurement data processing unit
Measurement data input accepting means for accepting classification of the plurality of measurement data acquired by the three-dimensional shape measurement unit into two groups in the display unit;
Area division means for dividing a unit area on a two-dimensional image corresponding to measurement data acquired by the three-dimensional shape measurement unit into a plurality of areas;
Parameter value calculation means for calculating parameter values for each of a plurality of different parameters related to the surface state of the sample, with respect to respective measurement data of a portion corresponding to each of the regions divided by the region division means;
Degree of separation between a plurality of parameter values calculated by the parameter value calculation means and obtained from measurement data belonging to one of the two groups and a plurality of parameter values obtained from measurement data belonging to the other of the two groups A means for calculating the degree of separation shown by statistical processing for each of the parameters;
Display means for displaying the degree of separation calculated for each of the parameters on the display unit
Computer program that is characterized in that to function as a.