JP6518507B2 - Adsorption mechanism - Google Patents

Description

  The present invention relates to an adsorption mechanism provided with an adsorbent for adsorbing an object.

  The adsorption mechanism includes an adsorption head for adsorbing an object, and the adsorption head includes an adsorption head for forming a primary decompression chamber to be decompressed by an exhaust pump and a communication hole for communicating the primary decompression chamber to the outside. The suction plate includes a suction plate that forms a primary decompression chamber together with the suction head portion, and a thin plate-like elastic member that is airtightly fixed to the outer surface of the suction surface of the suction plate. Therefore, by depressing the primary decompression chamber with the exhaust pump while the elastic member is in contact with the object, the portion of the elastic member corresponding to the communication hole of the suction plate is deformed to the primary decompression chamber side. As a result, a sealed space (secondary decompression chamber) decompressed from the outside is formed between the elastic member and the object, and the adsorption head adsorbs the object (for example, see Patent Document 1).

JP-A-8-112794 (refer to FIG. 4 and FIG. 5)

In general, many production sites are provided with a compressor that supplies pressurized air instead of an exhaust pump (a vacuum pump or the like).
However, in the configuration of Patent Document 1, equipment for the exhaust pump is required, so the equipment applicability is low and the cost is high. Moreover, in the above configuration, since the absolute vacuum is the limit of the pressure reduction in the primary pressure reduction chamber, the adsorption force is limited. In addition, if the elastic member is torn while adsorbing the object to which dust or oil is attached, the dust or oil attached to the object is sucked by the exhaust pump and the inside of the hose or piping is Problems such as contaminating the engine or damaging the exhaust pump have been required, and early improvement is required.

  SUMMARY OF THE INVENTION In view of the above-described situation, the present invention can improve the adsorptive power and avoid the occurrence of various troubles by suctioning dust or oil adhering to an object. It is an object of the present invention to provide a pressurized adsorption mechanism which is excellent in equipment applicability.

  The adsorption mechanism of the present invention comprises an adsorber for adsorbing an object, and the adsorber is capable of elastically deforming the adsorbing film in contact with the object, and the adsorbing film is deformed in order to solve the problems described above. A pressure fluid supply means for supplying a pressure fluid to be caused to flow, and an adsorption film deformation means for deforming the adsorption film by being supplied with the pressure fluid from the pressure fluid supply means; The pressurized fluid is supplied from the pressurized fluid supply means to the adsorption film deforming means in the state of contact with an object, whereby the adsorption film is deformed to the side separated from the object, and the adsorption film is deformed A closed space, which is decompressed lower than the outside, is formed in the above, and the adsorbent adsorbs the object.

  As described above, the side from which the adsorptive film is separated from the object by supplying the pressurized fluid from the pressurized fluid supply means in the contact state where the adsorbing film of the adsorbent is abutted against the object (adsorbent To the inner side of). Due to this deformation, a sealed space is formed between the adsorptive film and the object under reduced pressure than the outside. By forming the pressure-reduced sealed space, a pressure difference is generated between the sealed space and the outside, and the object can be adsorbed to the adsorbent by the pressure difference. In this case, as the amount of pressurized fluid supplied from the pressurized fluid supply means is increased, the deforming force acting on the adsorptive film is increased, so that a large adsorptive force can be obtained. Further, even if the adsorption film is broken while adsorbing an object to which dust or oil is attached, the pressurized fluid only scatters the dust or oil without suction.

  Further, in the adsorption mechanism of the present invention, the adsorption film deformation means has one end connected to the surface of the adsorption film opposite to the contact surface with the object, and the outer diameter is smaller than the outer diameter of the adsorption film. And an axially and radially elastically deformable cylindrical body, and when the pressurized fluid is supplied from the pressurized fluid supply means to the inside of the cylindrical body, the cylindrical body You may provide the cylindrical body deformation | transformation means which shortens the axial direction length of this cylindrical body by restrict | limiting the expansion-contraction to a direction and making it deform | transform to radial direction outer side.

  As described above, when the pressurized fluid is supplied from the pressurized fluid supply means to the inside of the cylindrical body, the cylindrical body is deformed radially outward by restricting expansion and contraction in the axial direction. By providing the cylindrical body deforming means for shortening the axial length of the cylindrical body, the axial length of the cylindrical body can be surely shortened by the pressurized fluid from the pressurized fluid supply means, and the adsorbing film can be obtained. Can be deformed to the side away from the object (inside of the adsorber).

  Further, in the suction mechanism according to the present invention, the cylindrical body deformation means is provided to face each other so as to sandwich the cylindrical body, and is made of a material having poor stretchability in the axial direction than the cylindrical body. A pair of plates may be provided.

  According to the above configuration, when the pressurized fluid is supplied to the inside of the cylindrical body by the pressurized fluid supply unit, the axial extension of the cylindrical body can be regulated, and the deformation to the radial outer side is promoted. Thus, axial shortening of the cylindrical body can be stably performed.

  In the suction mechanism of the present invention, the cylindrical body deformation means is provided on the outer surface of the cylindrical body at intervals in the circumferential direction, and extends along the axial direction of the cylindrical body A plurality of wires may be provided that are made of a material that is less stretchable in the axial direction than the wire.

  According to the above configuration, when the pressurized fluid is supplied to the inside of the cylindrical body by the pressurized fluid supply unit, the axial extension of the cylindrical body can be regulated, and the deformation to the radial outer side is promoted. Thus, axial shortening of the cylindrical body can be stably performed.

  Further, in the adsorption mechanism of the present invention, the cylindrical body deformation means is externally fitted to the cylindrical body, and a fibrous material having poor stretchability in the axial direction is woven into the cylindrical body than the cylindrical body. It may be provided with a sleeve member.

  According to the above configuration, when the pressurized fluid is supplied to the inside of the cylindrical body by the pressurized fluid supply unit, the axial extension of the cylindrical body can be regulated, and the deformation to the radial outer side is promoted. Thus, axial shortening of the cylindrical body can be stably performed.

  Further, in the suction mechanism according to the present invention, the cylindrical body deformation means is formed on the outer surface of the cylindrical body along the axial direction of the cylindrical body, and is aligned in the circumferential direction via the grooves. A plurality of thick parts may be provided.

  Since the extension in the axial direction of the cylindrical body is restricted by the plurality of thick parts and the deformation in the radial direction is promoted, the axial direction of the cylindrical body can be shortened stably.

  In the adsorption mechanism of the present invention, the outer edge of the adsorption film is provided with a side wall portion for covering the side opposite to the contact surface of the adsorption film, and the inner side surface of the side wall portion and the cylindrical shape An inner space is formed between the outer side surface of the body and an adsorption film returning pressurized fluid supply means for supplying pressurized fluid to the inner space so as to project and deform the adsorption film toward the object side. It is also good.

  With the above configuration, when releasing adsorption with the object, the pressurized fluid is supplied from the suction film return pressurized fluid supply means between the inner surface of the side wall and the outer surface of the cylindrical body, Since the adsorption film can be protruded and deformed toward the object side, the adsorption with the object can be reliably released.

  According to the present invention, the adsorption force can be improved by supplying the pressurized fluid from the pressurized fluid supply means to adsorb the object, and dust and dirt adhering to the object can be improved. It is possible to provide a pressure type adsorption mechanism excellent in equipment applicability that can avoid oil suction and occurrence of various troubles.

It is the schematic which shows the adsorption | suction mechanism of this invention. It is a longitudinal cross-sectional view which shows the principal part of the adsorption | suction mechanism. (A) is a perspective view of an adsorber, (b) is a cross-sectional view taken along the line AA in FIG. 3 (a), (c) is a cross section showing a state in which pressurized fluid is supplied to the adsorber of FIG. 3 (b) FIG. (A) is the bottom view which looked at an adsorber from the bottom, (b) is a graph which shows displacement of a film. (A) is a perspective view of another adsorbent, (b) is a cross-sectional view taken along the line B-B in FIG. 5 (a), (c) is a cross-sectional view taken along the line C-C in FIG. 5 (a), (d) is FIG. 5 (b) is a cross-sectional view showing a state in which the pressurized fluid is supplied, and FIG. 5 (e) is a cross-sectional view showing a state in which the pressurized fluid is supplied. (A) is a perspective view of another adsorbent, (b) is a cross-sectional view taken along the line DD in FIG. 6 (a), and (c) is a cross-sectional view showing a state in which pressurized fluid is supplied to FIG. It is. (A) is a perspective view of another adsorbent, (b) is a cross-sectional view taken along the line E-E in FIG. 7 (a), and (c) is a cross-sectional view showing a state in which pressurized fluid is supplied to FIG. It is. It is the schematic which shows another adsorption mechanism. It is a longitudinal cross-sectional view which shows the principal part of the adsorption | suction mechanism of FIG. It is the schematic which shows another adsorption mechanism. It is a longitudinal cross-sectional view which shows the principal part of the adsorption | suction mechanism of FIG. An explanatory view for setting up a size of an adsorption object is shown, (a) is a transverse top view of an adsorption object, (b) is a vertical side view of an adsorption object.

  FIG. 1 shows an adsorption mechanism 2 for adsorbing an object 1 with an adsorption force. The adsorption mechanism 2 deforms a plurality of (four in FIG. 1) adsorbents 3 for adsorbing an object, and an adsorption film 22 (see FIG. 2) described later for generating adsorption force in the adsorbents 3. And a compressor 4 as pressurized fluid supply means for supplying pressurized fluid (here, pressurized air).

  The four adsorbers 3 are attached to a base 6 attached to the tip of the robot arm 5. The base 6 is composed of a first member 6A fixed to the end of the robot arm 5 and a second member 6B integrated with the first member 6A and to which the adsorbing member 3 is attached. A robot hand is configured of the first member 6A, the second member 6B, and the four adsorbers 3.

  Each adsorber 3 is connected to a flexible pipe 8 via a connecting member 7. These four pipes 8 are connected to one common pipe 9 through four joints 10, 11, 12, 13 and three pipes 14, 15, 16, and the common pipe 9 is connected to the compressor 4. Pressurized air is supplied. Further, between the compressor 4 and the common pipe 9, an electromagnetic three-way valve 17, a pressure gauge 18, a pressure reducing valve 19, and a filter 20 are provided from the common pipe side.

  The three-way valve 17 is connected to a first port (not shown) connected to the compressor 4 side, a second port (not shown) connected to the common pipe 9, and a discharge pipe 21 for discharging air to the outside. And a third port (not shown) to be connected. Therefore, when the object 1 is adsorbed, the first port and the second port are opened, the pressurized air of the compressor 4 is supplied to the adsorber 3, and the adsorption of the object 1 is released. The second port and the third port are opened to discharge the pressurized air supplied to the inside of the adsorbent 3 to the outside.

  As shown in FIG. 2 and FIGS. 3 (a), 3 (b) and 3 (c), the adsorbent 3 has an elastically deformable circular adsorption film 22 in contact with the object 1 and a side of the adsorption film 22. The compressed air is supplied from the side wall portion 23 extended from the outer peripheral edge of the adsorption film 22 to the base 6 side, the compressed air supplying pressurized air for deforming the adsorption film 22, and the compressor 4 to cover it. And an adsorbing film deforming means 25 for deforming the adsorbing film 22. The lower end portion (end portion on the suction film 22 side) of the side wall portion 23 is provided with an outer spread portion 23H which is positioned outward toward the lower end side. Further, the adsorption film 22 and the side wall portion 23 are integrally formed of a flexible and elastic rubber or synthetic resin material. As materials having flexibility and elasticity, for example, silicone rubber, nitrile rubber, urethane rubber, polyurethane rubber, natural rubber, fluororubber, butadiene rubber and the like can be used, but various synthetic resins having flexibility are used. It may be.

  As shown in FIG. 2, the upper end of the side wall portion 23 is press-fit into an annular groove 23M formed in an annular projecting portion 23T projecting downward from the lower surface of the second member 6B. Further, an elastically deformable bellows 23A is provided at an intermediate portion of the side wall portion 23 in the longitudinal direction (vertical direction in the drawing). Therefore, even in the object 1 having the step 1Z, the side wall 23 can expand and contract according to the height of the object 1 by the bellows 23A. It can touch.

  The adsorption film deformation means 25 is smaller than the outer diameter of the adsorption film 22 connected in a state in which one end is closed (sealed) on the surface opposite to the contact surface with the object 1 of the adsorption film 22. The cylindrical body 24 having an outer diameter and capable of being elastically deformed in the axial direction and the radial direction, and the compressed air supplied from the compressor 4 to the inside of the cylindrical body 24 The cylindrical body deformation means 24A which shortens the axial direction length of the cylindrical body 24 is provided by restricting expansion and contraction to the outside and deforming (expanding) radially outward. Therefore, by reducing the axial length of the cylindrical body 24 by the cylindrical body deformation means 24A, the adsorption film 22 can be deformed to the side away from the object 1.

  The cylindrical body deformation means 24A is attached to the outer surface of the cylindrical body 24 at intervals in the circumferential direction, as shown in FIGS. 2 and 3 (a), (b) and (c). A plurality of (four in FIG. 3 (a)) wire members are used, which are elongated in the up-down direction and extend in the axial direction. Accordingly, the plurality of wires 24A are made of a material having poor axial stretchability (with a high Young's modulus), and the plurality of wires 24A can limit the axial elongation of the cylindrical body 24. Since the radial outward deformation (expansion) can be promoted, axial shortening of the cylindrical body 24 can be stably performed. Therefore, the entire bottom portion 24S of the cylindrical body 24 can be moved to the side of separating the object 1 from the object 1 favorably and surely. Examples of the material with poor shortening that constitute the wire 24A include rubber, alumina, zirconia, carbonized that includes at least one of fibers such as carbon fiber, glass fiber, and an aromatic polyamide resin, or at least one of them. Rubbers comprising at least one of ceramic powders of silicon, silicon nitride, barium titanate, boron nitride, lead zirconate titanate, steatite, zinc oxide, metals such as copper, aluminum, nickel, etc. It is composed of a resin such as acrylic and polyimide.

  The basic principle of adsorbing the object 1 will be described based on one adsorbent 3 shown in FIGS. 3 (a), (b) and (c). When pressurized air from the compressor 4 is supplied to the cylindrical body 24 from the state of FIGS. 3A and 3B, the cylindrical body 24 is deformed (expanded) radially outward. This deformation is restricted by the four wires 24A, and the cylindrical body 24 is shortened reliably (see FIG. 3 (d)). Due to the shortening of the cylindrical body 24, the adsorption film 22 is deformed to the side (the upper side in FIG. 3C) in which the adsorption film 22 is separated from the object 1. Due to this deformation, a sealed space H decompressed from the outside is formed between the contact surface (outer surface) 22A of the adsorption film 22 and the outer surface (upper surface in FIG. 3C) of the object 1. The object 1 can be adsorbed in the closed space H. By deforming the adsorption film 22 with pressurized air in this manner, the adsorption power can be improved, and dust and oil adhering to the object 1 are sucked to avoid various problems from occurring. can do.

  The timing at which the three-way valve 17 is switched to supply pressurized air from the compressor 4 to the adsorber 3 is considered to be based on a detection signal when it is detected that the adsorbing film 22 abuts on the object 1 However, the three-way valve 17 may be switched by artificially operating a changeover switch for switching the three-way valve 17. As a means for detecting that the adsorption film 22 abuts on the object 1, various sensors such as a magnetic sensor and a light reflection sensor can be used.

Here, a calculation method for setting the dimensions of each portion of the adsorbent 3 when designing the adsorbent 3 will be described. First, reference numerals shown in FIGS. 12 (a) and 12 (b) will be described.
a is an inner diameter of the side wall portion 23, and for example, any numerical value in the range of 1 mm to 50 mm can be selected. b is the outer diameter of the cylindrical body 24 and is obtained by b = a / 3. c is the amount of radial outward protrusion of the wire 24A, and is obtained by c = a / 12. d is the thickness of the cylindrical body 24 and is obtained by d = a / 60. h is the depth in the vertical direction of the cylindrical body 24 and can be obtained by h = 2a / 3. n is the number of wires 24A, and for example, any number of 3, 4, 6, 8, and 12 can be selected. θ _P is an angle between adjacent wires 24A and 24A, and is obtained by 360 / n. θ _W is a width (angle) in the circumferential direction of each wire 24A, and is obtained by 360 / 2n.
For example, when a is 6 mm, b can be calculated as 2 mm, c can be 0.5 mm, d can be 0.1 mm, and h can be 4 mm. If n is three, θ _P can be calculated at 120 degrees and θ _W can be calculated at 60 degrees.

  The present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the present invention.

  For example, as shown in FIG. 1, the number of the adsorbents 3 is not limited to four, and may be one or any number of two or more. For example, FIG. 4A shows a bottom view in which a large number of adsorbers 3 are disposed. In FIG. 4A, the adsorbers 3 are arranged in a staggered manner in which adjacent adsorbers 3 are alternately positioned, but they may be arranged in a grid or may be arranged randomly. Moreover, although the case where the cylindrical body 24 was equipped with four wire rods 24A was shown in FIG. 3 (a), it is preferable to equip four or more wire conductors 24A of arbitrary numbers. This is apparent from the graph of FIG. 4 (b) showing the experimental results. In the graph of FIG. 4B, the vertical axis has a displacement (length) displaced to the side (positive side) where the adsorption film 22 separates from the object 1 or the side (minus side) protruding to the object side, The horizontal axis shows a graph in which the distance from the end of the adsorption film 22 is taken. In the graph, the distance from the end of the adsorption film 22 is 0 mm (no displacement) for all 0 to 2 mm, and when the distance from the end of the adsorption film 22 exceeds 2 mm, the case of three wires is It is a displacement which protrudes on the minus side, that is, the object side at the alternate long and short dash line L3, and can not be used. The broken line L4 corresponds to four wires, and the solid lines L6, L8, and L12 correspond to six, eight, and twelve wires. In the case of these four, six, eight, and twelve, the displacement of the adsorption film 22 exceeds 0.4 mm when the distance from the end is between 4 mm and 6 mm. Therefore, it is clear that four, six, eight, and twelve are enough to be used. In addition, since the graph of FIG.4 (b) is experimented by the wire 24A of the thickness shown in FIG. 3 (a), when using the wire which made thickness thicker than the thing of FIG. 3 (a) It is apparent that the results shown in FIG. 4 (b) are different from the graph of FIG. 4 (b), that is, three wires, and in some cases two wires may be used.

  Further, the adsorbent 3 shown in FIG. 3A may be configured as shown in FIGS.

  5 (a) to 5 (e), the lower end of the side wall portion 23 has a cylindrical shape without the outer spreading portion 23H shown in FIG. 3 (a). Further, the cylindrical body 24 shown in FIG. 3A has a rectangular bottom wall 26A which is long in the left-right direction, and a pair of front and rear long side walls 26B which are raised upward from four sides of the bottom wall 26A. Upper wall having a pair of left and right side walls 26C and 26C long in the vertical direction and an upper end 26d for closing the upper end of the four side walls 26B, 26B, 26C and 26C and supplying pressurized air to the central portion It is comprised from the cylindrical body 26 which consists of a rectangular parallelepiped which has space in the inside which consists of 26D, and which has space. The thickness D1 of the front and rear side walls 26B and 26B is smaller than the thickness D2 of the left and right side walls 26C and 26C. Further, a pair of plates provided so as to sandwich the cylindrical body 26 so as to restrict the radial expansion of the cylindrical body 26 by the cylindrical body deformation means 24A shown in FIG. 3A. It comprises a body (cylindrical body deforming means) 27, 27. These plates 27, 27 are provided on the thin front and rear side walls 26B, 26B, and have a size (outer shape) covering substantially the entire area of the front and rear side walls 26B, 26B. Therefore, when pressurized air is supplied to the cylindrical body 26 through the opening 26d from the state of FIGS. 5 (b) and 5 (c), as shown in FIGS. 5 (d) and 5 (e), the cylinder is pressurized by the pressurized air. The side walls 26B and 26B of the main body 26 can be deformed (expanded) radially outward by approximately the same amount, so that the cylindrical body 26 can be favorably shortened in the axial direction. Therefore, by shortening the cylindrical body 26 in the axial direction, the adsorptive film 22 can be deformed to the side (upper side in the figure) separated from the object. The pair of plates 27, 27 is made of the above-described material with poor stretchability. In FIGS. 5 (a) to 5 (e), the pair of plates 27 and 27 are provided on the side walls 26B and 26B of the cylindrical body 26 made of a rectangular solid, but the cylindrical shape shown in FIG. It may be provided on the body 24. The adsorbing film deforming means 25 is composed of a cylindrical body 26 and a pair of plates 27, 27.

  6 (a) to 6 (c), the lower end of the side wall portion 23 has a cylindrical shape without the flared portion 23H shown in FIG. 3 (a). Further, the cylindrical body deforming means is constituted by a sleeve member 28 which is externally fitted to the cylindrical body 24 and which is made of a tubular material into which a fibrous material is woven. Therefore, when pressurized air is supplied to the cylindrical body 24 from the state of FIGS. 6 (a) and 6 (b), as shown in FIG. 6 (c), the cylindrical body 24 is circumferentially moved by the pressurized air. Since the deformation (expansion) can be made substantially uniformly, the cylindrical body 24 can be favorably shortened in the axial direction. Therefore, by contracting the cylindrical body 24 in the axial direction, the adsorption film 22 can be deformed to the side (upward in the figure) away from the object. The adsorption film deforming means 25 is composed of a cylindrical body 24 and a sleeve member 28.

  7 (a) to 7 (c) show cylindrical ones at the lower end portion of the side wall portion 23 without the outer spreading portion 23H shown in FIG. 3 (a). In addition, a plurality of the cylindrical body deformation means are formed on the outer surface of the cylindrical body 24 along the axial direction of the cylindrical body 24 and are arranged in a row via the grooves 24M in the circumferential direction (FIG. 7 In (a), it is comprised from eight thick parts 24E. Therefore, when pressurized air is supplied to the cylindrical body 24 from the state of FIGS. 7 (a) and 7 (b), the extension in the axial direction of the cylindrical body 24 is restricted by the plurality of thick portions 24E, Since the radial outward deformation is promoted, axial shortening of the cylindrical body 24 can be stably performed. Therefore, as shown in FIG. 7 (c), eight vertically long thick portions 24E having the same width and the same length (and the same thickness) between the grooves 24M and 24M adjacent to each other by the compressed air are substantially in the circumferential direction. It can be deformed (expanded) uniformly. Therefore, by shortening the cylindrical body 24 in the axial direction, the adsorptive film 22 can be deformed to the side (upward in the figure) away from the object. The adsorption film deforming means 25 is composed of a cylindrical body 24 and eight thick portions 24E.

  Moreover, in the said embodiment, although the bellows 23A was provided, as shown in FIG. 9, you may provide the coil spring 29. FIG. When the coil spring 29 is provided, a cylindrical portion 6b extending downward from the lower surface of the second member 6B is provided, and a slide member 30 which is slidably movable is externally fitted to the cylindrical portion 6b. The slide member 30 includes a cylindrical portion 30A located on the upper side, and a disc portion 30B integrated with the lower end of the cylindrical portion 30A and having an outer diameter larger than that of the cylindrical portion 30A. The coil spring 29 is interposed between the lower surface of the second member 6B and the upper surface 30b of the outer peripheral edge of the disc portion 30B. In addition, the outer peripheral edge of the lower surface of the disk portion 30B is provided with a first projecting portion 31 in which an annular locking groove 31M for locking and fixing to the upper end portion of the side wall portion 23 of the adsorbing body 3 is formed. . Further, an annular locking groove 32M for locking and fixing to the upper end portion of the cylindrical body 24 is formed on the outer peripheral edge of the lower surface of the disc portion 30B located inside the first projecting portion 31. A second protrusion 31 is provided. Further, a through hole 30K is formed at the center of the disc portion 30B, and the pipe 8 is connected to the upper surface of the disc portion 30B so as to communicate with the through hole 30K. Therefore, the slide member 30 is moved upward by shortening the coil spring 29 with respect to the object 1 having a different height, that is, the object 1 whose right side is high in FIG. 9. As a result, the adsorption film 22 can contact the upper surface of the object 1 with certainty. FIG. 8 shows the entire configuration of the suction mechanism described in FIG. 9 in which the coil spring 29 is omitted. Parts not described are the same as in FIGS. 1 and 2.

  Further, as shown in FIGS. 10 and 11, an annular inner space 33 capable of supplying pressurized air is formed between the inner side surface of the side wall portion 23 and the outer side surface of the cylindrical body 24, and the adsorption film 22 is formed. An adsorption film return pressurized fluid supply means for supplying pressurized air to the internal space 33 is provided so as to project and deform toward the object 1 side. Although the suction film return pressurized fluid supply means is shared by the compressor 4 for supplying the pressurized air, a compressor different from the compressor 4 may be provided. More specifically, the upper end openings of the side wall portion 23 and the cylindrical body 24 are closed by the disc portion 30B of the slide member 30 shown in FIG. 9, and pressurized air is applied to the lateral side of the disc portion 30B. A through hole 30C for connecting the supply pipe 34 is formed. The through hole 30C communicates with an annular through hole 30D formed on the outer periphery of the disc portion 30B. The through hole 30D does not communicate with the through hole 30K formed at the center of the disc portion 30B, and the lower end is opened to communicate with the internal space 33. Further, the same first part 10 constituting the air piping system (referred to as a first air piping system) shown in FIG. 1 in one of the forked joints 35 in the piping 36 of the pressurized air discharged from the compressor 4. To 20 are connected, and the same second component 10 to 20 constituting the air piping system (referred to as a second air piping system) shown in FIG. 1 is also connected to the other of the bifurcated joint 35. The four pipes 34 are respectively connected to the joints 10 to 13 of the second air piping system. The above-described discharge pipe 21 is connected to the three-way valve 17. Therefore, in the case where the object 1 is adsorbed by the adsorbent 3, pressurized air is supplied to the first common pipe 9 through the first three-way valve 17 on the upper side of FIG. Then, as described above, when the compressed air from the compressor 4 is supplied to the cylindrical body 24, the cylindrical body 24 is deformed (expanded) radially outward. This deformation is restricted by the four wires 24A, and the cylindrical body 24 is reliably shortened. Due to the shortening of the cylindrical body 24, the adsorptive film 22 is deformed to the side away from the object 1. The object 1 can be adsorbed by this deformation. The second three-way valve 17 on the lower side in FIG. 10 with respect to the first three-way valve 17 on the upper side in FIG. 10 shuts off so that pressurized air is not supplied to the second common pipe 9 on the lower side. It will be When the adsorption of the object 1 is released, the first three-way valve 17 on the upper side of FIG. 10 is switched to discharge the pressurized air in the cylindrical body 24 from the first discharge pipe 21 to the outside. At the same time, the lower second three-way valve 17 in FIG. 10 is opened to supply pressurized air from the compressor 4 to the internal space 33 of the adsorbent 3 through the lower second common pipe 9. By doing this, the adsorption film 22 can be forced to project and deform toward the object 1 side. Thereby, for example, even when the pressurized air in the cylindrical body 24 can not be discharged from the first discharge pipe 21 to the outside, the adsorptive film 22 does not maintain the state where the object 1 is adsorbed, and adsorption is performed. The object 1 can be reliably detached from the membrane 22. In FIG. 11, parts not described are the same as in FIG.

  In the embodiment described above, the side wall portion 23 is configured to be expandable and contractible by providing the bellows 23A in the side wall portion 23. However, when the surface of the object is a flat surface, the side wall portion 23 is used. It can be made of non-stretchable metal, hard plastic or the like.

  Further, although air (gas) is used as a pressurized fluid for deforming the adsorption film 22 in the embodiment, various liquids (water, oil, etc.) may be used.

  In the above embodiment, the object is adsorbed by the adsorbent 3 by expanding the cylindrical body radially outward by the pressurized fluid supplied from the pressurized fluid supply means and shortening it in the axial direction. However, the tip of the piston rod connected to the piston of the fluid pressure cylinder is connected to the adsorptive film 22, and the adsorptive film 22 is an object by expanding and contracting the piston rod by the pressurized fluid supplied from the pressurized fluid supply means. It may be configured such that the object is adsorbed or desorbed by approaching or separating the object.

  In the above embodiment, the closed end of the cylindrical body 24 on which the adsorption film 22 side end is closed is connected to the adsorption film 22. However, the adsorption film 22 side end is open and the open end of the cylindrical body is adsorbed. By connecting to the membrane 22, the open end (end on the adsorption film 22 side) of the cylindrical body may be closed.

  The adsorption mechanism according to the present invention can be applied to the case of handling an object by using a robot hand, a cleaning machine that cleans by moving it by adsorption on a window surface, a picking device for picking goods for boxing, The present invention can also be applied to a processing apparatus that fixes various objects by adsorption and performs various processes, and a transport apparatus that adsorbs and transports an object.

  DESCRIPTION OF SYMBOLS 1 ... Object, 1Z ... Step part, 2 ... Adsorption mechanism, 3 ... Adsorption body, 4 ... Compressor (pressurized fluid supply means), 5 ... Robot arm, 6 ... Base, 6A ... 1st member, 6B ... 1st 2 members, 6b: cylindrical portion, 7: connection member, 8: piping, 9: common piping, 10, 11, 12, 13: fittings (parts), 14, 15, 16: piping (parts), 17: three directions Valve (part), 18 ... pressure gauge (part), 19 ... pressure reducing valve (part), 20 ... filter (part), 21 ... discharge piping, 22 ... adsorption film, 23 ... side wall, 23A ... bellows, 23H ... outside Expansion part, 23M: groove, 23T: projection part, 24: cylindrical body, 24: cylindrical body, 24A: wire material (tubular body deforming means), 24E: thick part (cylindrical body deforming means), 24M: Groove, 24S: bottom portion, 25: adsorption film deformation means, 26: cylindrical body, 26A: bottom wall, 26B: front and rear side walls, 26 ... left and right side walls, 26D ... top wall, 26d ... opening, 27 ... plate (tube deformation means), 28 ... sleeve member (tube deformation means), 29 ... coil spring, 30 ... slide member, 30A ... cylinder Part, 30B: Disc part, 30C: Through hole, 30D: Through hole, 30K: Through hole, 30b: Upper surface, 31: Protrusive part, 31M: Locking groove, 32M: Locking groove, 33: Internal space, 34 ... Piping, 35 ... Fittings, 36 ... Piping, H ... Sealed space

Claims (7)

Equipped with an adsorber for adsorbing an object,
The pressure-sensitive fluid is supplied from the pressure-fluid supplying means, and the pressure-fluid supplying means for supplying a pressure fluid that elastically deforms the adsorbing body, wherein the adsorbent is in contact with the object; And adsorption film deformation means for deforming the adsorption film by
The adsorption film is deformed to the side separated from the object by supplying the pressurized fluid from the pressurized fluid supply means to the adsorption film deformation means in the state of contact with the object, and the adsorption film is deformed An adsorption space formed between the object and an enclosed space formed between the object and an adsorbent, whereby the adsorbent adsorbs the object.   The adsorption film deformation means has one end connected to the surface of the adsorption film opposite to the contact surface with the object, and has an outer diameter smaller than the outer diameter of the adsorption film, and When the pressurized fluid is supplied to the inside of the tubular body from the radially fluidly deformable tubular body and the pressurized fluid supply means, the tubular body is restricted in expansion and contraction in the axial direction to have a diameter The adsorption mechanism according to claim 1, further comprising: a cylindrical body deformation unit configured to shorten an axial length of the cylindrical body by deforming the outer side in the direction.   The cylindrical body deforming means is provided with a pair of plate bodies provided opposite to each other so as to sandwich the cylindrical body, and made of a material which is less stretchable in the axial direction than the cylindrical body. The adsorption mechanism according to claim 2.   The cylindrical body deformation means is provided on the outer surface of the cylindrical body at intervals in the circumferential direction, extends along the axial direction of the cylindrical body, and has less stretchability in the axial direction than the cylindrical body. The adsorption mechanism according to claim 2, comprising a plurality of wire rods made of a material.   The tubular body deforming means includes a sleeve member which is externally fitted to the tubular body, and which is formed into a tubular shape by weaving a fibrous material having a poor stretchability in the axial direction than the tubular body. The adsorption mechanism according to claim 2.   The cylindrical body deformation means includes a plurality of thick portions formed on the outer surface of the cylindrical body along the axial direction of the cylindrical body and arranged in a circumferential direction via grooves. The adsorption mechanism according to claim 2, characterized in that:   The outer edge of the adsorption film is provided with a side wall for covering the side opposite to the contact surface of the adsorption film, and the inner side between the inner surface of the side wall and the outer surface of the cylindrical body 7. An adsorption film returning pressurized fluid supply means for supplying pressurized fluid to the internal space so as to form a space and cause the adsorption film to project and deform toward the object side. The adsorption mechanism according to any one of the above.