JP6503278B2 - Shape measuring apparatus and shape measuring method - Google Patents

Description

  The present invention relates to a shape measuring device and a shape measuring method for measuring the shape of a measurement object, and more particularly to a shape measuring device and a shape measurement method for measuring a three-dimensional shape of a measurement object based on a plurality of images.

  For example, when measuring the three-dimensional shape of the object to be measured, such as the cross-sectional shape, in a relatively wide range at one time, for example, using a plurality of measuring devices having a predetermined measuring range, as disclosed in The three-dimensional shape of the object to be measured can be measured in the relatively wide range by joining together the results of the respective measurement ranges measured by the measuring device. Also, even in the case where the object to be measured has a complicated complex shape, for example, a part of which makes a shadow on the surface of the other part, the three-dimensional shape of the object to be measured can be measured by performing the same as described above. Become.

  More specifically, the three-dimensional shape measuring apparatus disclosed in Patent Document 1 irradiates the object to be measured with a slit light source, detects the reflected light with a video camera, performs arithmetic processing of the detection signal, and The coordinates of the line of intersection between the light beam emitted from the slit light source and the object to be measured are determined by determining the distance from the video camera, and the line of intersection is measured by sequentially moving or rotating the object to be measured. In a three-dimensional shape measuring apparatus for detecting a three-dimensional shape of the object to be measured as viewed from the video camera side as a so-called wire frame model by sequentially moving the object, the surroundings of the object to be measured along a predetermined plane And a plurality of slit light sources for irradiating each of the slit light sources, and the reflected light from the object to be measured is detected on the same axis as the slit light sources. A plurality of video cameras, driving means for sequentially moving or rotating the object to be measured, and images of the respective video cameras, detecting a reflection point of the laser light from each image, and generating a distance image A distance image generation means, a coordinate conversion means for converting the distance image into coordinates and converting them into common actual coordinates, and a wireframe forming means for the object to be measured from the signals obtained by the coordinate conversion; The framing means inputs the coordinate data obtained by the coordinate conversion means, and the start point of the data 1 by one camera from the coordinate data of the intersection line between the plane irradiated with the slit light sources and the surface of the object to be measured Overlap interval detection means for detecting an overlap interval of data by respectively determining the minimum distance between the coordinates of the coordinates and the end point and all the coordinates of the data 2 of another camera And replacing the data obtained by the overlapping section detecting means with the data of the overlapping section of the data 1 and the data 2 by generating a single data by obtaining a weighted average of the data 1 and the data 2 And means.

Unexamined-Japanese-Patent No. 3-209112

  By the way, it is generally desired that the measuring apparatus have high accuracy. As described above, when connecting each result of each measurement range measured by each of a plurality of measurement devices having a predetermined measurement range, it is necessary to make the seams coincide with each other in order to realize high accuracy. There is. The three-dimensional shape measuring apparatus disclosed in Patent Document 1 determines the weighted average of data 1 and data 2 of the overlapping section to generate data of the overlapping section, so the data 1 and data 2 are connected. The eyes do not coincide with each other, and in the three-dimensional shape measurement device disclosed in Patent Document 1, it is difficult to achieve high accuracy.

  The present invention is an invention made in view of the above-mentioned circumstances, and its object is to measure each three-dimensional shape of the object to be measured with high accuracy even when each result of each measurement range is connected to each other. It is providing a shape measuring device and a shape measuring method.

  As a result of various studies, the present inventor has found that the above object can be achieved by the present invention described below. That is, the shape measurement apparatus according to an aspect of the present invention generates a plurality of images in a predetermined measurement range, and measures a three-dimensional shape in the predetermined measurement range of the measurement target based on the generated image. And a rigid body, the rigid support member supporting the plurality of measurement units such that at least a part of each measurement range in each of the plurality of measurement units do not overlap with each other, and the measurement is performed by each of the plurality of measurement units The correction unit corrects each measurement result, and the correction unit measures the measurement result at the measurement point with a correction value based on the displacement amount at the measurement point and the inclination angle for each of the plurality of measurement points. The position shift amount is a shift amount in which the measurement point is shifted from a reference line extending along a predetermined first direction along a second direction orthogonal to the predetermined first direction. The tilt angle, characterized in that an angle formed between the tangent plane of the measurement target surface at the measurement point, the reference plane formed by the first and second directions. Preferably, the rigid body means that the relative positional relationship among the plurality of measurement units is maintained while obtaining one measurement result in each of the plurality of measurement units. Preferably, in the shape measuring apparatus described above, the displacement amount at the measurement point P is B (P), the inclination angle at the measurement point P is θ (P), and the measurement result at the measurement point P is When X (P), Y (P), and Z (P), the correction value C (P) is B (P) × tan θ (P), and the correction unit measures the measurement result after correction. Is calculated as (X (P), Y (P), Z (P) -B (P) .times.tan .theta. (P)). Preferably, the shape measuring apparatus described above further includes a connection processing unit that connects together the respective measurement results after correction measured by each of the plurality of measurement units and corrected by the correction unit.

  Such a shape measuring apparatus includes a correction unit that corrects each measurement result measured by each of the plurality of measurement units. Therefore, the measurement results of each measurement range are connected to each other to form a three-dimensional shape of the measurement target. Even in the case of measurement, it can be measured with higher accuracy.

  Further, in another aspect, the above-described shape measuring apparatus further includes a positional deviation amount information storage unit that stores the positional deviation amount at each of the plurality of measurement points. Preferably, in the shape measuring apparatus described above, the positional deviation amount is obtained by measuring a predetermined reference sample, and the predetermined reference sample is orthogonal to the first direction and the first and second directions, respectively. The cross-sectional shape parallel to the plane formed in the third direction is substantially the same as the measurement target.

  Since such a shape measuring apparatus further includes a positional displacement amount information storage unit, it is possible to correct each measurement result more quickly using each positional displacement amount prepared in advance.

  Further, in another aspect, the above-described shape measuring apparatus further includes an inclination angle information storage unit that stores each inclination angle at each of the plurality of measurement points. Preferably, in the shape measurement apparatus described above, the tilt angle is obtained from design data of the measurement object. Preferably, in the shape measurement apparatus described above, the tilt angle is determined by measuring (measuring) the measurement object.

  Such a shape measurement apparatus further includes the tilt angle information storage unit, so that each measurement result can be corrected more quickly using each tilt angle prepared in advance.

  In another aspect, in the above-described shape measuring apparatus, each of the plurality of measuring units measures a three-dimensional shape by a light cutting method.

  According to this, it is possible to provide a shape measuring device provided with a plurality of measuring units that measure a three-dimensional shape by a light cutting method.

  In the shape measuring method according to another aspect of the present invention, a rigid support member formed of a rigid body with the plurality of measuring units so that at least a part of each measuring range in each of the plurality of measuring units do not overlap with each other. A shape measuring method for measuring a three-dimensional shape of an object to be measured by a shape measuring apparatus supported by the image forming step of generating each image in each of the measurement ranges by the plurality of measuring units; A shape calculation step for obtaining each measurement result in each measurement range in the measurement target based on each generated image, and a correction step for correcting each measurement result in each measurement range obtained in the shape calculation step And the correction step is performed for each of the plurality of measurement points using the correction value based on the positional displacement amount at the measurement point and the inclination angle, and the measurement result at the measurement point. The position shift amount is a shift amount in which the measurement point is shifted along a second direction orthogonal to the predetermined first direction from a reference line extending along the predetermined first direction, The inclination angle is an angle formed by a tangent plane of the surface to be measured at the measurement point and a reference plane formed in the first and second directions.

  Since such a shape measurement method includes a correction step of correcting each measurement result in each measurement range, even when the measurement results of each measurement range are connected to each other to measure the three-dimensional shape of the measurement object , Can be measured with higher accuracy.

  The shape measuring apparatus and the shape measuring method according to the present invention can measure with higher accuracy even when measuring results of each measuring range are connected to each other to measure a three-dimensional shape of an object to be measured.

It is a block diagram showing composition of a shape measuring device in an embodiment. It is a block diagram showing composition of a measurement part in a shape measuring device of an embodiment. The shape measurement apparatus of embodiment WHEREIN: It is a schematic front view which shows each measurement part supported by the rigid support member in the 1st aspect. The shape measurement apparatus of embodiment WHEREIN: It is a schematic front view which shows each measurement part supported by the rigid support member by the 2nd aspect. It is a figure for demonstrating the correction value in the shape measuring apparatus of embodiment. It is a figure for demonstrating the positional offset amount in the shape measuring apparatus of embodiment. It is a figure for demonstrating the calculation method of positional offset amount in the shape measuring apparatus of embodiment. It is a figure for demonstrating the calculation method of the inclination angle in the shape measuring apparatus of embodiment. It is a flowchart which shows operation | movement of the shape measuring apparatus in embodiment. It is a figure for demonstrating the connection method of each measurement result measured by each measurement part in the shape measurement apparatus of embodiment.

  Hereinafter, an embodiment according to the present invention will be described based on the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, and abbreviate | omits the description suitably. In the present specification, suffixes are generally indicated by reference numerals without suffixes, and individual configurations are indicated by subscripts.

  FIG. 1 is a block diagram showing the configuration of a shape measuring apparatus according to the embodiment. FIG. 2 is a block diagram showing the configuration of the measuring unit in the shape measuring device of the embodiment. FIG. 3 is a schematic front view showing each measurement unit supported by the rigid support member in the first mode in the shape measurement device of the embodiment. FIG. 4 is a schematic front view showing each measurement unit supported by the rigid support member in the second mode in the shape measurement device of the embodiment.

  The shape measuring apparatus according to the embodiment measures a three-dimensional shape of an object to be measured by connecting a plurality of measurement results of each measurement range measured by each measurement unit using a plurality of measurement units having a predetermined measurement range. In the present embodiment, when the measurement results are connected to each other, the measurement results are respectively corrected. The object to be measured may be any object, but preferably it has a relatively complex shape such as a spherical shape, a wedge shape and a spiral shape such as a screw, a propeller and a drill, etc., and is continuously smooth. It is an object of a shape having a measuring surface which changes into.

  Such a shape measuring device D is, for example, as shown in FIG. 1, a plurality of measuring units 1 (1-1, 1-2, 1-3), and a rigid support 2 (not shown in FIG. 1). 2 and FIG. 3), the control processing unit 3, and the storage unit 4. In the example shown in FIG. 1, the input unit 5, the output unit 6, and the interface unit (IF unit) 7 are further provided. .

  Each of the plurality of measurement units 1 is connected to the control processing unit 3, generates an image in a predetermined measurement range according to the control of the control processing unit 3, and performs the predetermined measurement on the measurement object Ob based on the generated image. It is an apparatus which measures the three-dimensional shape in the range. Each of the plurality of measurement units 1 measures the three-dimensional shape of the measurement object Ob by, for example, a so-called light cutting method. The light cutting method is a known technique, and roughly (linearly) light (linear light) in a linear shape (stripe shape, slit shape) is irradiated (projected) on the measuring object Ob, and the irradiation direction and angle of the linear light are An image including the reflected light of the linear light is generated by imaging the area irradiated with the linear light in the measurement target Ob from the imaging direction of the image, and the shape of the linear light in the generated image is a triangle. This is a method of obtaining a three-dimensional shape for one linear light in the measurement object Ob based on the principle of surveying. And in this light cutting method, the three-dimensional shape of the whole said measurement object is obtained by scanning the said linear light with respect to the measurement object Ob in the direction orthogonal to the extension direction of the linear light.

  Each of the plurality of measurement units 1 using such a light cutting method includes, for example, as shown in FIG. 2, a linear light source unit 11, an imaging unit 12, and a three-dimensional shape calculation unit 13. The linear light source unit 11 is a device that is connected to the three-dimensional shape calculation unit 13 and emits linear light according to the control of the three-dimensional shape calculation unit 13. The linear light source unit 11 includes, for example, a laser light source for irradiating a laser beam, and a linear laser beam (linear laser beam) formed by linearly forming the laser beam emitted from the laser light source. And an optical system for irradiating the object to be measured Ob. The imaging unit 12 picks up an image from an imaging direction (optical axis AX2 of the imaging unit 12) which intersects the irradiation direction of the linear light source unit 11 (optical axis AX1 of the linear light source unit 11) at a predetermined angle φ. It is a device which is disposed and connected to the three-dimensional shape calculation unit 13 and picks up an area irradiated with the linear laser light on the measurement object Ob under the control of the three-dimensional shape calculation unit 13 to generate an image thereof. The imaging unit 12 is a so-called camera, and includes, for example, an imaging optical system, an image sensor, and an image processing circuit, and an optical image of the area on the measurement object Ob is formed on the light receiving surface of the image sensor by the imaging optical system. An image sensor receives the formed optical image, generates an optical reception signal of the optical image, and applies known image processing to the optical reception signal of the generated optical image to be measured Ob Generating an image (image data) of the area in The irradiation direction (optical axis AX1 of the linear light source unit 11) is, for example, the vertical direction (0 °), and the imaging direction (optical axis AX2 of the imaging unit 12) is the predetermined angle φ. The three-dimensional shape calculation unit 13 controls each of the linear light source unit 11 and the imaging unit 12 according to the function, and the measurement object is obtained by the light cutting method from the image of the area in the measurement object Ob obtained by the imaging unit 12 It is an apparatus for obtaining the three-dimensional shape of Ob. The three-dimensional shape calculation unit 13 is configured to include, for example, a digital signal processor (DSP) (or a central processor unit (CPU)), a memory, and peripheral circuits thereof. The three-dimensional shape calculation unit 13 outputs the obtained three-dimensional shape of the measurement object Ob to the control processing unit 3.

  In the above description, although the plurality of measurement units 1 individually include the three-dimensional shape calculation unit 13, they may be configured to include one three-dimensional shape calculation unit 13 in common, or one common The three-dimensional shape calculation unit 13 may be functionally included in the control processing unit 3.

  The plurality of measurement units 1 are fixedly supported by the rigid support member 2 formed of a rigid body so that at least a part of each measurement range in each of the plurality of measurement units 1 does not overlap with each other. The rigid body means that the mutual positional relationship in the plurality of measurement units 1 is maintained while each measurement result of the plurality of measurement units 1 is obtained. The rigid support member 2 is, for example, a rigid pedestal (rigid plate) made of steel, stainless steel or the like.

  More specifically, the plurality of measurement units 1 are provided with three first to third measurement units 1-1 to 1-3. Then, in the first mode, these first to third measurement units 1-1 to 1-3 are, for example, equidistant from a predetermined center point CP as shown in FIG. 3, and in the circumferential direction Are fixedly arranged on the rigid support member 2 at equal intervals. In more detail, the measurement ranges of the first to third measurement units 1-1 to 1-3 are sequentially and continuously arranged without overlapping each other, and the left and right sides of the second measurement unit 1-2 The first to third measurement units 1-1 to 1-3 are rigid support members 2 so that the first and third measurement units 1-1 and 1-3 are positioned at equal intervals in the circumferential direction in the back and forth direction. It is disposed on the upper side, and is fixed to the rigid support member 2 by a fastening member (for example, a screw, a bolt, a nut or the like). As shown in FIG. 3, the first to third measurement units 1-1 to 1-3 fixedly arranged on the rigid-body support member 2 in the first mode as described above once form the curved surface of the measurement object Ob. The configuration is suitable for measurement in

  Also, for example, in the second aspect, as shown in FIG. 4, these first to third measurement units 1-1 to 1-3 are equidistant from the measurement surface and along a predetermined direction. They are fixedly juxtaposed on the rigid support member 2 so as to have equal intervals. More specifically, the measurement ranges of the first to third measurement units 1-1 to 1-3 are sequentially and continuously arranged without overlapping each other, and at equal intervals along the predetermined direction. The first to third measurement units 1-1 to 1-3 are juxtaposed on the rigid support member 2 so that the first and third measurement units 1-1 and 1-3 are sequentially located, and a fastening member It is being fixed to the rigid support member 2 by (For example, a screw, a bolt, a nut, etc.). As shown in FIG. 4, the first to third measurement units 1-1 to 1-3, which are fixedly arranged on the rigid-body support member 2 in the second embodiment, compare the shapes of the planes of the measurement object Ob. This configuration is suitable for measuring at once in a wide area.

  Hereinafter, a case where the first to third measurement units 1-1 to 1-3 are fixedly arranged on the rigid body support member 2 in the first mode will be described. However, the first to third measurement units 1 to 3 will be described. The same can be said for the case where the points -1 to 1-3 are fixedly arranged on the rigid body support member 2 in the second mode.

  Returning to FIG. 1, the input unit 5 is connected to the control processing unit 3 and, for example, various commands such as a command instructing start of measurement, and various data necessary for measuring, for example, the name of the measurement object It is an apparatus to be input to the shape measurement device D, and is, for example, a keyboard, a mouse, and the like. The output unit 6 is connected to the control processing unit 3, and according to the control of the control processing unit 3, the command and data input from the input unit 5 and the three-dimensional shape of the measurement object obtained by the shape measuring device D The output device is, for example, a display device such as a CRT display, an LCD (liquid crystal display) and an organic EL display, or a printing device such as a printer.

  A touch panel may be configured from the input unit 5 and the output unit 6. When the touch panel is configured, the input unit 5 is a position input device that detects and inputs an operation position of, for example, a resistance film method or a capacitance method, and the output unit 6 is a display device. In this touch panel, the position input device is provided on the display surface of the display device, and one or more input content candidates that can be input on the display device are displayed, and the user touches the display position where the input content is displayed. The position is detected by the position input device, and the display content displayed at the detected position is input to the shape measurement device D as the operation input content of the user. With such a touch panel, since the user can easily understand the input operation intuitively, the shape measuring device D that is easy for the user to handle is provided.

  The IF unit 7 is an interface circuit connected to the control processing unit 3 for inputting / outputting data to / from an external device according to the control of the control processing unit 3 and, for example, data using Bluetooth (registered trademark) standard A Bluetooth interface circuit that inputs / outputs data, an IrDA interface circuit that inputs / outputs data using IrDA (Infrared Data Association) standard, and a USB interface circuit that inputs / outputs data using USB (Universal Serial Bus) standard. Further, the IF unit 7 may be a communication circuit (communication card) connected to the control processing unit 3 and for performing wired or wireless communication under the control of the control processing unit 3. Such an IF unit 7 generates a communication signal containing data to be transferred, which is input from the control processing unit 3, according to a communication protocol used in the communication network, and generates the generated communication signal via the communication network. Send to an external device. The IF unit 7 receives a communication signal from the external device via the communication network, extracts data from the received communication signal, and converts the extracted data into data in a format that can be processed by the control processing unit 3. Output to the control processing unit 3.

  The storage unit 4 is a circuit that is connected to the control processing unit 3 and stores various predetermined programs and various predetermined data according to the control of the control processing unit 3. The various predetermined programs include, for example, a control program that controls each part of the shape measuring device D according to the function of each part, and a correction that corrects each measurement result measured by each of the plurality of measurement parts 1 The program includes a control processing program such as a connection processing program that links each measurement result corrected by the correction program. The various predetermined data include, for example, data necessary for measuring a three-dimensional shape of the object to be measured, such as a positional displacement amount B described later used in the correction program and an inclination angle θ. The storage unit 4 includes, for example, a ROM (Read Only Memory), which is a nonvolatile storage element, and an EEPROM (Electrically Erasable Programmable Read Only Memory), which is a rewritable nonvolatile storage element. The storage unit 4 includes a random access memory (RAM) as a working memory of the control processing unit 3 that stores data and the like generated during execution of the predetermined program. Further, the storage unit 4 may include a relatively large-capacity storage device such as a hard disk, for example.

  The storage unit 4 functionally includes a positional displacement amount information storage unit 41 and an inclination angle information storage unit 42 in order to store the positional displacement amount B and the inclination angle θ.

  The positional shift amount information storage unit 41 stores in advance each positional shift amount B (Pn) at each of the plurality of measurement points Pn before measuring the shape of the measurement object Ob. The positional shift amount B (P) is a shift amount in which the measurement point P is shifted from a reference line extending along a predetermined first direction along a second direction orthogonal to the predetermined first direction. Each of such positional deviation amounts B (Pn) is preferably determined by measuring a predetermined reference sample SP, as described later.

  The tilt angle information storage unit 42 stores in advance each tilt angle θ (Pn) at each of the plurality of measurement points Pn before measuring the shape of the measurement target Ob. The inclination angle θ (P) is an angle formed by the tangent plane of the surface of the measurement object Ob at the measurement point P and the reference plane SF-R formed in the first and second directions. Each such inclination angle θ (Pn) is preferably obtained from design data of the object to be measured Ob, as described later. Preferably, each inclination angle θ (Pn) is determined by measuring (measuring) the measurement object Ob.

  The positional displacement amounts B (Pn) and the inclination angles θ (Pn) will be described in detail later.

  The control processing unit 3 is a circuit for controlling the respective units of the shape measuring device D in accordance with the functions of the respective units and measuring a three-dimensional shape of an object to be measured. The control processing unit 3 includes, for example, a central processing unit (CPU) and peripheral circuits thereof. In the control processing unit 3, the control processing program, the control unit 31, the correction unit 32, and the connection processing unit 33 are functionally configured.

  The control unit 31 controls each part of the shape measuring device D in accordance with the function of each part.

  The correction unit 32 corrects each measurement result measured by each of the plurality of measurement units 1. More specifically, the correction unit 32 measures the correction value C (Pn) based on the positional displacement amount B (Pn) at the measurement point Pn and the inclination angle θ (Pn) for each of the plurality of measurement points Pn. The measurement results (X (Pn), Y (Pn), Z (Pn)) at the point Pn are corrected. More specifically, the correction value C (Pn) is B (Pn) × tan θ (Pn), and the correction unit 32 calculates the measurement result after correction as (X (Pn), Y (Pn), Z (Pn) Calculated as −B (Pn) × tan θ (Pn).

  The connection processing unit 33 executes connection processing to connect together the respective measurement results after correction measured by each of the plurality of measurement units 1 and corrected by the correction unit 32. In the present embodiment, the plurality of measurement units 1 respectively measure the three-dimensional shape of the measurement object Ob in the local orthogonal coordinate system XYZ, and the respective measurement results measured by each of the plurality of measurement units 1 are each local coordinates It is corrected on the system XYZ. Then, the shape measuring device D has a world orthogonal coordinate system xyz, and the connection processing unit 33 determines each local coordinate system based on the respective arrangement positions of the plurality of measuring units 1 in the world coordinate system xyz. The connection process is performed by coordinate conversion of each measurement result after each correction in XYZ to the world coordinate system xyz.

  Next, the operation of this embodiment will be described. FIG. 5 is a diagram for explaining correction values in the shape measuring device of the embodiment. FIG. 5 (A) is a perspective view, and FIG. 5 (B) is a cross-sectional view. FIG. 6 is a diagram for explaining the positional deviation amount in the shape measuring device of the embodiment. FIG. 6A is a perspective view, and FIG. 6B is a top view. FIG. 7 is a diagram for explaining a method of calculating the amount of positional deviation in the shape measuring device of the embodiment. FIG. 7 (A) is a main part overall view, and FIG. 7 (B) is an enlarged cross-sectional view. FIG. 8 is a diagram for explaining a method of calculating an inclination angle in the shape measuring device of the embodiment. FIG. 8A is a perspective view and FIG. 8B is a cross-sectional view. FIG. 9 is a flowchart showing the operation of the shape measuring device in the embodiment. FIG. 10 is a diagram for explaining a method of connecting measurement results measured by each measurement unit in the shape measuring device of the embodiment. FIG. 10A shows the measurement result of the first measurement unit 1-1 in the first local coordinate system for the first measurement unit 1-1, and FIG. 10B shows the measurement result of the second measurement unit 1-2. 10C shows a measurement result of the second measurement unit 1-2 in the second local coordinate system for the second embodiment, and FIG. 10C shows a third measurement unit 1 in the third local coordinate system for the third measurement unit 1-3. 10 (D) shows the measurement result of the first measurement unit 1-1 after coordinate conversion to the world coordinate system, and FIG. 10 (E) shows coordinate conversion to the world coordinate system. FIG. 10 (F) shows the measurement result of the second measurement unit 1-2, and FIG. 10 (G) shows the measurement result of the third measurement unit 1-3 after coordinate conversion to the world coordinate system. Fig. 10 shows measurement results after connection obtained by connecting the measurement results shown in Figs. 10 (D) to 10 (F).

  As described above, in the case where the plurality of measurement units 1, and in the present embodiment, the first to third measurement units 1-1 to 1-3 are accurately disposed on the rigid support member 2 at the design position, The usefulness of is less. However, in an actual product, it is difficult in terms of machine accuracy to arrange the first to third measurement units 1-1 to 1-3 exactly on the rigid support member 2 at the design position. Alternatively, there are also product variations of the measuring unit 1. Therefore, for example, as shown in FIG. 5A, each measurement range of each of the measurement units 1-1 to 1-3, in the present embodiment, linear light SS-1 to SS-3 has each joint It does not necessarily match and it will shift. Therefore, in the present embodiment, as shown in FIG. 5B, the positional shift amount B (P) and the inclination angle θ (P) at the measurement point P are obtained in advance from the reference sample, the design data, etc. The corrected value C (P) = B (P) × tan θ (P) is obtained for the measured value H1 of the above, and the height H2 = H1-B (P) × tan θ (P) after the correction is obtained. . Thus, the height (the distance from the shape measuring device D to the measurement surface SF-Ob of the measurement object Ob) obtained by the light cutting method is corrected. Hereinafter, the measurement operation of the positional displacement amount B, the inclination angle θ, and the measurement object Ob will be described in order. In these descriptions, the local orthogonal coordinate systems XYZ are set as shown in FIG. 5 in each of the first to third measurement units 1-1 to 1-3. More specifically, in the present embodiment, since the light cutting method is used, the X axis (X direction) is set along the design linear light extending direction, and the Y axis (X direction) is perpendicular to this. Y direction is set. The scanning direction of the light cutting method is set to this Y direction. Then, the Z axis (Z direction) is set along the direction orthogonal to each of the X axis and the Y axis. That is, the Z axis (Z direction) is set along the irradiation direction of linear light (optical axis AX1 of linear light source unit 11).

  First, the positional deviation amount B is obtained as follows, and is stored in the positional deviation amount information storage unit 41. In the setting of the positional deviation amount B, as shown in FIG. 6, a predetermined reference sample SP is prepared. As shown in FIG. 6, this reference sample SP is orthogonal to the x-axis (x-direction) in the same direction as the x-axis (x-direction) along the design linear light extending direction, and is optically cut. In the case of setting a world coordinate system xyz consisting of ay axis (y direction) in the same direction as the y axis (y direction) along the scanning direction of the method and z axis orthogonal to each of these x and y axes The cross-sectional shape parallel to the xz plane is substantially the same as the measurement target Ob. In this reference sample SP, an xz plane having substantially the same shape as that of the object to be measured continues in the y direction. On the measurement surface (surface irradiated with linear light and imaged) SF-SP in this reference sample SP, a reference line SS0 which is a straight line parallel to the X axis (the extending direction of the linear light in design, x axis) Is provided. And each linear light SS-1 to SS-3 is irradiated to reference sample SP by the 1st thru | or 3rd measurement part 1-1 to 1-3 in shape measuring device D, and each image is picturized. Next, the shapes of the reference lines SS0 (reference line profiles) and the shapes of the linear lights SS1 to SS3 (laser line profiles) are determined from the images. Next, the distance ΔY (Xn) between the reference line SS0 and each linear light SS1 to SS3 at each point Xn on the X-axis at predetermined first intervals set in advance is set as the positional deviation amount B (Xn) (B (Xn) =. DELTA.Y (Xn)) can be obtained. More specifically, as shown in FIG. 2 and FIG. 7A, the imaging unit 12 of the measurement unit 1 allows for the measurement surface SF-SP of the reference sample SP at the predetermined angle φ, so Above, as shown to FIG. 7 (B), apparent distance (apparent positional deviation amount) E is calculated | required. The apparent distance E is obtained by projecting the actual distance ΔY (the actual displacement amount B) on a plane having the optical axis AX2 of the imaging unit 12 as a normal. Therefore, the actual distance ΔY is E / cos φ. Therefore, in the calculation of the positional shift amount B (Xn), the actual length (converted length) g of the subject to be captured in one pixel is determined and stored in the storage unit 4 in advance, and linear with the reference line SS0 at the point Xn. The number of pixels en in the Y direction between the lights SS1 to SS3 is determined, the determined number of pixels en is multiplied by the conversion length g (en × g), the multiplication result is divided by cos φ, and the distance Δ Y (Xn) (= positional deviation B (Xn) = en × g / cosφ) is determined. As a result, the amount of positional deviation B (Pn (Xn)) at each point Pn (Xn) is determined with respect to the measurement surface SF-SP of the reference sample SP. Then, the calculated positional deviation amounts B (Pn) are stored in the positional deviation amount information storage unit 41 in association with the respective points Pn (Xn).

  Next, the inclination angle θ is determined as follows, and is stored in the inclination angle information storage unit 42. In this setting of the inclination angle θ, as shown in FIG. 8, the first to third measuring units 1-1 to 1-3 in the shape measuring device D are separated by a third interval k preset in the Y direction. Each of the linear light beams l1 and l2 is applied to the two places on the object to be measured Ob, their respective images are captured, and the three-dimensional shape at the two places is determined. Next, a height difference m (Xn) (= m1 (Xn) -m2 (Xn)) at each of the points Xn on the X-axis at predetermined first intervals from the three-dimensional shape at the two locations. Is calculated, and the calculated difference in height (Xn) is divided by the third interval k to obtain an inclination angle .theta. (Xn) (.theta. (Xn) = (m1 (Xn)-m2 (Xn) ) / K). In other words, the inclination angle θ (Xn) is the angle between the tangent of the linear light l1 at the point Xn and the reference plane SF-R. The third interval k is appropriately set within a range that can be approximated as tanθ = (m1 (Xn) −m2 (Xn)) / k) = θ. Then, such measurement of the inclination angle θ (Xn) is performed at each point Yn on the Y axis at each of the predetermined second intervals. As a result, the inclination angle θ (Pn (Xn, Yn)) at each point Pn (Xn, Yn) is determined with respect to the entire surface of the measurement surface SF-Ob of the measurement object Ob. Then, the tilt angles θ (Pn) thus obtained are stored in the tilt angle information storage unit 42 in association with the points Pn (Xn, Yn).

  In the above description, the inclination angle θ (Xn) is obtained at two places, but the inclination angle θ (Xn) may be obtained from the measurement results at three or more places by, for example, the least squares method. In the above description, the inclination angle θ (Pn) of each point Pn is determined using the measurement object Ob, but the inclination angle θ (Pn) of each point Pn may be determined using design data of the measurement object Ob good. For example, the heights m1 (Xn) and m2 (Xn + k) of two places separated by the third distance k are obtained from design data, and the difference m (Xn) between their heights is obtained, and the obtained heights The difference in height (Xn) is divided by the third interval k to determine the inclination angle θ (Xn).

  After execution of such preparation (pre-processing), measurement of the measurement object Ob is performed. In the measurement of the measurement object Ob, when the measurement is started, the first to third measurement units 1-1 such that measurement of a predetermined scanning position Yn in the Y direction can be performed under the control of the control unit 31. .About.1-3 and the measuring object Ob are relatively moved by the moving mechanism (not shown) (S1). For example, the shape measuring device D includes an unillustrated drive unit for moving the rigid support 2 along the Y direction, and the process S1 is performed by moving the rigid support using the drive. Further, for example, the shape measuring device D includes a not-shown mounting stage (stage) that moves along the Y direction, and the processing S1 is performed by moving the mounting table on which the measurement target Ob is mounted. .

  Next, at the scanning position Yn, each of the three-dimensional shapes (Xn, Yn, Zn) for one linear light is performed by the first to third measurement units 1-1 to 1-3 according to the control of the control unit 31. The measurement results (Xn, Yn, Zn) are measured and stored in the storage unit 4 (S2).

  Next, it is determined by the control unit 31 whether or not measurement has been completed at all the scanning positions Yn (S3). As a result of the determination, if the measurement is not completed at all the scan positions Yn (No), the control unit 31 returns the process to the process S1 to perform the measurement at the next scan position Yn. As a result of the determination, when the measurement is completed at all the scanning positions Yn (Yes), the control unit 31 executes the next process S4.

  In the process S4, the correction unit 32 executes the correction process. More specifically, the correction unit 32 reads the measurement result (Xn, Yn, Zn) of the measurement point Pn from the storage unit 4, and the displacement amount B (Pn) corresponding to the measurement point Pn and the tilt angle θ ( Pn) is read out, B (Pn) × tan θ (Pn) is determined as a correction value C (Pn), and the measurement result (Xn, Yn, Zn) is corrected with the calculated correction value C (Pn) Measurement results (Xn, Yn, Zn-B (Pn) x tanθ (Pn)) are determined, and the corrected measurement results (Xn, Yn, Zn-B (Pn) x tanθ (Pn)) Store in 4. In the above description, the correction value C (Pn) is obtained in the correction process S4, but the correction value C (Pn) is obtained in advance and stored in the storage unit 4 in association with the measurement point Pn. May be read from the storage unit 4 and used. Also, in the above description, although the positional deviation amount B (Pn) and the inclination angle θ (Pn) for correcting the measurement result are prepared in advance as described above for each measurement point Pn, it corresponds to the measurement point Q If there is no positional deviation B (Q) and inclination angle θ (Q), from positional deviation B (Pn) and inclination angle θ (Pn) given to point Pn located around measurement point Q The position shift amount B (Q) and the inclination angle θ (Q) corresponding to the measurement point Q may be generated by interpolation.

  Next, a concatenation process is performed by the concatenation processing unit 33 to couple together the measurement results after correction measured by the first to third measurement units 1-1 to 1-3 and corrected by the correction unit 32 (S5) . More specifically, based on each arrangement position of each of the plurality of measurement units 1 in the world coordinate system xyz, the connection processing unit 33 measures each measurement result after each correction in each local coordinate system XYZ (X n, Coordinate conversion of Yn, Zn-B (Pn) × tan θ (Pn)) to the world coordinate system xyz.

  In one example, when the first to third measurement units 1-1 to 1-3 are assembled to the rigid-body support member 2 in the first mode shown in FIG. 3, each process of the process S to the process S4 described above is performed As a result, as shown in FIG. 10A, the first measurement unit 1-1 measures the measurement object Ob in the first local coordinate system X1Y1Z1, and obtains the measurement result PFa-1 after the correction. As shown in FIG. 10 (B), the second measurement unit 1-2 measures the measurement object Ob in the second local coordinate system X2Y2Z2 and obtains the measurement result PFa-2 after the correction, and the third measurement unit In 1-3, as shown in FIG. 10C, the measurement target Ob is measured in the third local coordinate system X3Y3Z3 and the measurement result PFa-3 after correction is obtained. As shown in FIG. 10D, in the first measurement unit 1-1 in the world coordinate system xyz, the coordinate origin of the first local coordinate system X1Y1Z1 is (x1, y1) in the world coordinate system, and the Z1 axis is It is arrange | positioned so that only angle (360- (phi) 1) may be rotated clockwise. Therefore, as shown in FIG. 10D, the connection processing unit 33 focuses on the measurement result PFa-1 after correction in the first local coordinate system X1Y1Z1 centering on the point (x1, y1) in the world coordinate system xyz. By rotating counterclockwise by the angle φ1, the corrected measurement result PFa-1 in the first local coordinate system X1Y1Z1 is subjected to coordinate conversion to the world coordinate system xyz. As a result, the measurement result PFa-1 after correction in the first local coordinate system X1Y1Z1 becomes the measurement result PFb-1 after correction in the world coordinate system xyz. As shown in FIG. 10E, the second measurement unit 1-2 in the world coordinate system xyz has the coordinate origin of the second local coordinate system X2Y2Z2 at (x2, y2) in the world coordinate system, and the Z2 axis is It is arrange | positioned so that only angle (360- (phi) 2) may be rotated clockwise. Therefore, as shown in FIG. 10E, the connection processing unit 33 focuses the measurement result PFa-2 after correction in the second local coordinate system X2Y2Z2 on the point (x2, y2) in the world coordinate system xyz. By rotating counterclockwise by angle φ2, coordinate conversion of the measurement result PFa-2 after correction in the second local coordinate system X2Y2Z2 is performed to the world coordinate system xyz. As a result, the measurement result PFa-2 after correction in the second local coordinate system X2Y2Z2 becomes the measurement result PFb-2 after correction in the world coordinate system xyz. The third measuring unit 1-3 in the world coordinate system xyz is, as shown in FIG. 10F, the coordinate origin of the third local coordinate system X3Y3Z3 at (x3, y3) in the world coordinate system, and is Z3. The axis is arranged to be rotated clockwise by an angle (360-φ3). Therefore, as shown in FIG. 10F, the connection processing unit 33 focuses on the measurement result PFa-3 after correction in the third local coordinate system X3Y3Z3 with the point (x3, y3) in the world coordinate system xyz as the center. By rotating counterclockwise by angle φ3, the coordinate measurement result PFa-3 after correction in the third local coordinate system X3Y3Z3 is subjected to coordinate conversion into the world coordinate system xyz. As a result, the measurement result PFa-3 after correction in the third local coordinate system X3Y3Z3 becomes the measurement result PFb-3 after correction in the world coordinate system xyz. As a result, as shown in FIG. 10 (G), the corrected measurement results PFa-1 to PFa-3 measured by each of the first to third measurement units 1-1 to 1-3 are linked, and the measurement object is measured. The three-dimensional shape PF of Ob is obtained.

  Then, the control unit 31 outputs the three-dimensional shape of the measurement target after connection processing stored in the storage unit 4 to the output unit 6 (S6), and ends the processing. Note that, as necessary, the control unit 31 outputs the three-dimensional shape of the measurement target after connection processing stored in the storage unit 4 from the IF unit 7 to the outside.

  As described above, the shape measuring device D in the present embodiment and the shape measuring method implemented in this correct each measurement result measured by each of the plurality of measuring units 1, and therefore each measurement result of each measurement range Even in the case where the three-dimensional shape of the measuring object Ob is measured by joining together, it is possible to measure with higher accuracy.

  Further, since the shape measuring device D and the shape measuring method further include the positional displacement amount information storage unit 41, each measurement result can be corrected more quickly using the respective positional displacement amounts B (Pn) prepared in advance. .

  Further, since the shape measuring device D and the shape measuring method further include the tilt angle information storage unit 42, each measurement result can be corrected more quickly using each tilt angle θ (Pn) prepared in advance.

  While the present invention has been properly and sufficiently described above through the embodiments with reference to the drawings in order to express the present invention, those skilled in the art can easily change and / or improve the above embodiments. It should be recognized that it is possible. Therefore, unless a change or improvement implemented by a person skilled in the art is at a level that deviates from the scope of the claims set forth in the claims, the change or the improvement is the scope of the rights of the claim It is interpreted as being included in

D shape measurement apparatus SP reference sample 1 measurement unit 1-1 first measurement unit 1-2 second measurement unit 1-3 third measurement unit 3 control processing unit 4 storage unit 32 correction unit 41 positional deviation amount information storage unit 42 inclination Corner information storage unit

Claims (5)

A plurality of measurement units that generate an image in a predetermined measurement range and measure a three-dimensional shape in the predetermined measurement range of the measurement target based on the generated image;
A rigid support member formed of a rigid body and supporting the plurality of measurement units such that at least a part of each measurement range in each of the plurality of measurement units do not overlap with each other;
And a correction unit that corrects each measurement result measured by each of the plurality of measurement units,
The correction unit corrects the measurement result at the measurement point with a correction value based on the displacement amount at the measurement point and the inclination angle for each of the plurality of measurement points.
The positional displacement amount is a displacement amount in which the measurement point is displaced from a reference line extending along a predetermined first direction along a second direction orthogonal to the predetermined first direction,
The shape measuring apparatus according to claim 1, wherein the inclination angle is an angle between a tangent plane of the surface to be measured at the measurement point and a reference plane formed in the first and second directions. The shape measurement device according to claim 1, further comprising: a positional displacement amount information storage unit that stores positional displacement amounts at each of the plurality of measurement points. The shape measuring device according to claim 1 or 2, further comprising an inclination angle information storage unit that stores each inclination angle at each of the plurality of measurement points. The shape measuring device according to any one of claims 1 to 3, wherein each of the plurality of measuring units measures a three-dimensional shape by a light cutting method. The three-dimensional shape of the object to be measured is measured by a shape measuring apparatus in which the plurality of measurement units are supported by a rigid support member formed of a rigid body so that at least a part of each measurement range in each of the plurality of measurement units do not overlap each other. It is a shape measurement method, and
An image generation step of generating each image in each of the measurement ranges by the plurality of measurement units;
A shape calculation step of obtaining each measurement result in each measurement range in the measurement target based on each image generated in the image generation step;
And a correction step of correcting each measurement result in each measurement range obtained in the shape calculation step,
The correction step corrects the measurement result at the measurement point for each of the plurality of measurement points with a correction value based on the positional displacement amount at the measurement point and the inclination angle.
The positional displacement amount is a displacement amount in which the measurement point is displaced from a reference line extending along a predetermined first direction along a second direction orthogonal to the predetermined first direction,
The shape measuring method, wherein the inclination angle is an angle formed by a tangent plane of the surface to be measured at the measurement point and a reference plane formed in the first and second directions.

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