JP6492844B2 - Head unit and liquid ejection device - Google Patents

Description

  The present invention relates to a head unit and a liquid ejection device.

  2. Description of the Related Art A liquid ejecting apparatus that prints an image, a document, or the like by ejecting a liquid such as ink is known. The discharge unit that discharges the liquid typically includes a plurality of piezoelectric elements such as piezo elements, and each is driven according to a drive signal, so that a predetermined amount of liquid such as ink is discharged from the nozzle at a predetermined timing. Discharge.

In order to obtain a high-quality and high-definition product in such a liquid ejecting apparatus, it is necessary to increase the resolution of the product. In order to increase the resolution, it is necessary to highly integrate the discharge unit. By realizing high integration of the discharge unit, it is possible to increase the resolution depending on the distance of the discharge unit.
As such a highly integrated technique, a technique is known in which a drive IC for driving the piezoelectric element is directly mounted and integrated on an actuator substrate (structure) including a flow path of the discharge unit and the piezoelectric element. (See Patent Document 1).

JP 2014-51008 A

By the way, it is pointed out that when the driving IC is mounted on the actuator substrate, a malfunction of the ejection unit (such as erroneous ink ejection) is caused due to the mutual interference between the actuator substrate and the driving IC, and the quality of the product is deteriorated. Has been.
Accordingly, one of the objects of some aspects of the present invention is to provide a technique for preventing malfunction even when a drive IC is mounted on an actuator substrate.

  In order to achieve one of the above objects, a head unit according to an aspect of the present invention includes a cavity that is filled with a liquid and in which the pressure inside the cavity is increased, and communicates with the cavity. A structure in which a nozzle for discharging the liquid by increasing or decreasing pressure is formed; a piezoelectric element formed on the structure for increasing or decreasing the pressure inside the cavity; and sealing the piezoelectric element And a drive signal wiring unit in which a wiring for transmitting a drive signal for driving the piezoelectric element to one end of the piezoelectric element is formed. A holding signal wiring portion formed with wiring for transmitting a holding signal for holding the other end different from one end of the piezoelectric element in a fixed state to the other end, and the driving IC with the structure When viewed in plan from the mounting surface, characterized in that it comprises said holding signal wiring portion, and a guard wire portion located between the drive signal line part.

  According to the head unit according to this aspect, since the guard wiring portion is located between the holding signal wiring portion and the driving signal wiring portion, the other end of the piezoelectric element is interposed via the holding signal wiring portion. Even if the flowing current increases, the influence of noise caused by the current on the internal elements of the driving IC, for example, the transistor can be suppressed to a low level. Thereby, the quality degradation of a product can be prevented.

In the head unit according to the above aspect, it is preferable that the holding signal wiring portion is electrically connected to a plurality of piezoelectric elements. According to this configuration, the influence on the plurality of piezoelectric elements in the actuator substrate is reduced.
In this configuration, it is preferable that a current for holding the piezoelectric element constantly flows in the holding signal wiring portion, and the guard wiring portion is a metal wiring layer. The resistance of the guard wiring portion can be reduced by the metal wiring layer.
From the viewpoint of reducing resistance, the guard wiring portion and the holding signal wiring portion may have a parallel connection structure using a plurality of wiring layers in the driving IC.

Further, in the head unit according to the above aspect, when the driving IC is viewed in plan from the mounting surface with the structure, the guard wiring portion is disposed between the holding signal wiring portion and the driving signal wiring portion. The structure surrounded by is preferable. With this configuration, it is possible to further reduce the influence of noise caused by the current flowing through the other end of the piezoelectric element on the internal elements of the drive IC.
The guard wiring portion may be configured to shield the holding signal wiring portion from an internal element when viewed in cross section.
The present invention is not limited to a single head unit, and can be implemented in various forms. For example, the present invention can be conceptualized as a liquid ejection apparatus including the head unit. The liquid ejecting apparatus here may be any apparatus that ejects liquid, and includes a three-dimensional modeling apparatus (so-called 3D printer), a textile printing apparatus and the like in addition to the printing apparatus, as will be described later.

1 is a diagram illustrating a schematic configuration of a printing apparatus according to an embodiment. It is a top view which shows the structure of a head unit. It is a figure which shows the electric constitution of a printing apparatus. It is a figure which shows arrangement | positioning of the electrode in an actuator board | substrate. It is an exploded view which shows the structure of a head unit. It is principal part sectional drawing which shows the structure of a head unit. It is a figure which shows the mounting surface of drive IC. It is a fragmentary sectional view which shows the structure of drive IC. It is a fragmentary sectional view which shows another structure of drive IC.

  Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings, taking a printing apparatus as a liquid ejection apparatus as an example.

FIG. 1 is a perspective view illustrating a schematic configuration of a printing apparatus.
The printing apparatus 1 is a kind of liquid ejection apparatus that forms an ink dot group on a medium P such as paper by ejecting ink as liquid, thereby printing an image (including characters, graphics, and the like). is there.

As shown in FIG. 1, the printing apparatus 1 includes a moving mechanism 6 (relative movement unit) that moves (reciprocates) the carriage 20 in the main scanning direction (X direction).
The moving mechanism 6 includes a carriage motor 61 that moves the carriage 20, a carriage guide shaft 62 that is fixed at both ends, a timing belt 63 that extends substantially parallel to the carriage guide shaft 62, and is driven by the carriage motor 61, have.
The carriage 20 is supported by the carriage guide shaft 62 so as to be reciprocally movable, and is fixed to a part of the timing belt 63. Therefore, when the timing belt 63 is moved forward and backward by the carriage motor 61, the carriage 20 is guided by the carriage guide shaft 62 and reciprocates.

A discharge unit 22 is mounted on the carriage 20. The ejection unit 22 includes a plurality of nozzles that eject ink in the Z direction individually at a portion facing the medium P. The discharge unit 22 is roughly divided into four blocks for color printing. Each block ejects black (Bk), cyan (C), magenta (M), and yellow (Y) ink.
The carriage 20 is configured to be supplied with various control signals and the like from a main board (not shown in the figure) via a flexible cable 190.

  The printing apparatus 1 includes a transport mechanism 8 that transports the medium P on the platen 80. The transport mechanism 8 includes a transport motor 81 that is a driving source, and a transport roller 82 that is rotated by the transport motor 81 and transports the medium P in the sub-scanning direction (Y direction).

In such a configuration, the surface of the medium P is repeatedly ejected from the nozzles of the ejection unit 22 according to the print data in accordance with the main scanning of the carriage 20 and the operation of transporting the medium P by the transport mechanism 8 is repeated. An image is formed.
In the present embodiment, the main scanning is performed by moving the carriage 20, but it may be performed by moving the medium P, or both the carriage 20 and the medium P may be moved. The point is that the medium P and the carriage 20 (ejection unit 22) may move relative to each other.

FIG. 2 is a diagram when the ink ejection surface of the ejection unit 22 is viewed from the medium P. FIG.
As shown in this figure, the ejection section 22 has four head units 3. Each of the four head units 3 corresponds to black (Bk), cyan (C), magenta (M), and yellow (Y), and is arranged in the X direction which is the main scanning direction. A plurality of nozzles N are arranged in two rows on the (actuator substrate).
As will be described in detail later, the head unit 3 has a structure in which a piezoelectric element on an actuator substrate is sealed with a drive IC.

  Here, for convenience of explanation, an electrical configuration of the printing apparatus 1 will be described.

FIG. 3 is a block diagram illustrating an electrical configuration of the printing apparatus 1.
As shown in this figure, the printing apparatus 1 has a configuration in which a head unit 3 is connected to a main board 100. The head unit 3 is roughly divided into an actuator substrate 40 and a drive IC 50.
The main substrate 100, and a control signal Ctr, the drive signal COM-A, COM-B, and supplies the held signal voltage _{V BS} to the drive IC50, driving IC50, respectively to one end of the plurality of piezoelectric elements Pzt in the actuator substrate 40 supplies driving signals, relays the voltage V _BS to the other end of the plurality of piezoelectric elements Pzt.
In the printing apparatus 1, four head units 3 are provided. However, the four head units 3 do not differ except for the color of the ink to be ejected, so here, the head corresponding to a certain color is used. The unit 3 will be described as an object. That is, in the main substrate 100, the four head units 3 are independently controlled. Here, for convenience, one head unit 3 will be described as a representative.

As shown in FIG. 3, the main board 100 includes a control unit 110, drive circuits 120 a and 120 b, and a voltage generation circuit 130.
Among these, the control unit 110 is a kind of microcomputer having a CPU, RAM, ROM, and the like, and when image data to be printed is supplied from a host computer or the like by executing a predetermined program, Various control signals for controlling each unit are output.

Specifically, first, the controller 110 repeatedly supplies digital data dA to the drive circuit 120a, and similarly supplies digital data dB to the drive circuit 120b. Here, the data dA defines the waveform of the drive signal COM-A supplied to the head unit 3, and the data dB defines the waveform of the drive signal COM-B.
The drive circuit 120a performs analog conversion on the data dA, and then, for example, performs class D amplification, and outputs the amplified signal as the drive signal COM-A. Similarly, the drive circuit 120b performs analog conversion of the data dB, amplifies the class D, and outputs the amplified signal as the drive signal COM-B.
The drive circuits 120a and 120b differ only in the waveform of the input data and the output drive signal, and the circuit configuration is the same.

Secondly, the control unit 110 supplies various control signals Ctr to the head unit 3 in synchronization with the control of the moving mechanism 6 and the transport mechanism 8. The control signal Ctr supplied to the head unit 3 includes print data that defines the amount of ink ejected from the nozzles N, a clock signal that is used to transfer the print data, a timing signal that defines a printing cycle, and the like. It is.
In addition, the control unit 110 controls the moving mechanism 6 and the transport mechanism 8, but the configuration for this is known and will be omitted.

Voltage generating circuit 130 in the main board 100 generates and outputs a hold signal temporally constant voltage V _BS. The voltage V _BS, the other ends of the plurality of piezoelectric elements in the actuator substrate 40, are for holding a constant state for each.

In this embodiment, four dots of large dots, medium dots, small dots, and non-recording are expressed by ejecting ink from one nozzle N at most twice in a printing cycle for one dot. In order to express these four gradations, in this embodiment, two types of drive signals COM-A and COM-B are prepared, and the printing cycle is divided into a first half period and a second half period, respectively. The driving signals COM-A and COM-B are selected (or not selected) according to the gradations to be expressed in the first half and the second half of the printing cycle, and supplied to one end of the piezoelectric element Pzt. It has become.
First, the drive signals COM-A and COM-B will be described.

  As shown in FIG. 3, the drive signal COM-A has a waveform in which the trapezoidal waveform Adp1 arranged in the first half period and the trapezoidal waveform Adp2 arranged in the second half period are continuous in the printing cycle. . The trapezoidal waveforms Adp1 and Adp2 are substantially identical to each other. If each of them is supplied to one end of the piezoelectric element Pzt, a predetermined amount from the nozzle N corresponding to the piezoelectric element Pzt, specifically, This is a waveform for ejecting a certain amount of ink.

  The drive signal COM-B has a waveform in which the trapezoidal waveform Bdp1 arranged in the first half period and the trapezoidal waveform Bdp2 arranged in the second half period are continuous. The trapezoidal waveforms Bdp1 and Bdp2 are different from each other. Of these, the trapezoidal waveform Bdp1 is a waveform for causing the ink in the vicinity of the nozzle N to slightly vibrate to prevent an increase in the viscosity of the ink. For this reason, even if the trapezoidal waveform Bdp1 is supplied to one end of the piezoelectric element Pzt, ink droplets are not ejected from the nozzle N corresponding to the piezoelectric element Pzt. Further, if the trapezoidal waveform Bdp2 is assumed to be supplied to one end of the piezoelectric element Pzt, the trapezoidal waveform Bdp2 is a waveform that causes a smaller amount of ink to be ejected from the nozzle N corresponding to the piezoelectric element Pzt.

Therefore, when a large dot is to be formed, the drive signal COM-A (Adp1, Adp2) is selected at one end of the piezoelectric element Pzt of the nozzle N that forms the large dot over the first half period and the second half period of the printing cycle. Medium amount of ink is ejected in two steps, so that the respective inks land on the medium P, and as a result, the target large dots are formed. become.
When medium dots are to be formed, the drive signal COM-A (Adp1) is selected at one end of the piezoelectric element Pzt of the nozzle N that forms the medium dots during the first half of the printing cycle and is driven during the second half. If the signal COM-B (Bdp2) is selected and supplied, medium and small inks are ejected in two portions, so that the respective inks land on the medium P, and as a result, As a result, medium dots are formed as intended.
On the other hand, when a small dot is to be formed, neither of the drive signals COM-A and COM-B is selected at one end of the piezoelectric element Pzt of the nozzle N that forms the small dot in the first half of the printing cycle. If the drive signal COM-B (Bdp2) is selected and supplied in the second half period, a small amount of ink is ejected only once, so that the target small dots are formed on the medium P.
For non-recording, the drive signal COM-B (Bdp1) is selected at one end of the piezoelectric element Pzt of the corresponding nozzle N in the first half period of the printing cycle, and the drive signal COM--A, If none of COM-B is selected, the ink in the vicinity of the nozzle N only slightly vibrates during the first half period, and the ink is not ejected.

Of the head unit 3, the drive IC 50 includes a selection control unit 510 and a selection unit 520 corresponding to the piezoelectric element Pzt on a one-to-one basis. Among these, the selection control unit 510 controls selection in each selection unit 520. More specifically, the selection control unit 510 temporarily accumulates print data supplied from the control unit 110 in synchronization with the clock signal for several nozzles (piezoelectric elements Pzt) of the head unit 3, and each selection unit In response to the print data, 520 is instructed to select the drive signals COM-A and COM-B at the start timing of the print cycle (first half period, second half period) defined by the timing signal.
Each selection unit 520 selects one of the drive signals COM-A and COM-B according to an instruction from the selection control unit 510 (or neither is selected), and corresponds as a drive signal of the voltage Vout. Applied to one end of the piezoelectric element Pzt.

The actuator substrate 40 is provided with one piezoelectric element Pzt for each nozzle N. The other end of each of the piezoelectric elements Pzt are commonly connected, the voltage V _BS by the voltage generating circuit 130 is applied.
In particular, the voltage _{V BS} by the voltage generating circuit 130 through the wiring pattern 550 in the drive IC50, is applied to the driving electrode 72, which is the other end of the piezoelectric element Pzt. In practice, as will be described later, since the wiring pattern 550 and the drive electrode 72 are connected in parallel, there is no significance in electrically distinguishing the wiring pattern 550 and the drive electrode 72.
One end of the plurality of piezoelectric elements Pzt is that the voltage Vout varies according to the size of the dot to be formed, the other end of the plurality of piezoelectric elements Pzt (drive electrodes 72), a constant voltage V _BS since it is common there is the path (wiring pattern 550, the drive electrodes 72) of the voltage V _BS to would relatively large current flows.

FIG. 4 is a diagram showing the arrangement of the drive electrodes and nozzles N of the piezoelectric element Pzt in a single actuator substrate 40. FIG. 4 is a diagram in the case of being seen through from the opposite side of the medium P toward the ink ejection direction, unlike FIG. The single actuator substrate 40 means that the head unit 3 is in a state before the drive IC 50 is mounted.
As described above, in the actuator substrate 40 (head unit 3), the plurality of nozzles N are arranged in two rows. Here, for convenience of explanation, these two rows are referred to as nozzle rows Na and Nb, respectively.
In the nozzle rows Na and Nb, a plurality of nozzles N are arranged at a pitch P1 along the Y direction. The nozzle rows Na and Nb are separated from each other by a pitch P2 in the Y direction. The nozzles N belonging to the nozzle row Na and the nozzles N belonging to the nozzle row Nb have a relationship shifted in the Y direction by half the pitch P1.

  FIG. 5 is a cross-sectional view showing the structure of the actuator substrate 40. In detail, it is a figure which shows the cross section at the time of fracture | ruptured by the gg line in FIG. FIG. 5 also shows the drive IC 50 mounted on the actuator substrate 40. FIG. 6 is a view showing a state where the drive IC 50 is mounted on the actuator substrate 40.

First, as shown in FIG. 5, the actuator substrate 40 includes a pressure chamber substrate 44 and a diaphragm 46 on the negative side surface in the Z direction of the flow path substrate 42, while the positive side in the Z direction. This is a structure in which a nozzle plate 41 is installed on the surface.
Each element of the actuator substrate 40 is generally a substantially flat plate-like member that is long in the Y direction, and is fixed to each other using, for example, an adhesive. The flow path substrate 42 and the pressure chamber substrate 44 are formed of, for example, a silicon single crystal substrate.

  The nozzle N is formed on the nozzle plate 41. As schematically described in FIG. 4, in the actuator substrate 40, the structure corresponding to the nozzles belonging to the nozzle row Na and the structure corresponding to the nozzles belonging to the nozzle row Nb are shifted by half the pitch P1 in the Y direction. However, in other cases, they are formed substantially symmetrically, and therefore, the structure of the actuator substrate 40 will be described below with attention paid to the nozzle row Na.

  The flow path substrate 42 is a flat plate material that forms an ink flow path, and an opening 422, a supply flow path 424, and a communication flow path 426 are formed. The supply channel 424 and the communication channel 426 are formed for each nozzle, and the opening 422 is formed so as to be continuous over a plurality of nozzles, and has a structure in which ink of a corresponding color is supplied. The opening 422 functions as the liquid storage chamber Sr, and the bottom surface of the liquid storage chamber Sr is constituted by, for example, the nozzle plate 41. Specifically, the flow path substrate 42 is fixed to the bottom surface of the flow path substrate 42 so as to close the opening 422, each supply flow path 424, and the communication flow path 426.

A diaphragm 46 is installed on the surface of the pressure chamber substrate 44 opposite to the flow path substrate 42. The vibration plate 46 is a plate-like member that can elastically vibrate, and is configured by stacking an elastic film formed of an elastic material such as silicon oxide and an insulating film formed of an insulating material such as zirconium oxide. Is done. The diaphragm 46 and the flow path substrate 42 oppose each other with an interval inside each opening 422 of the pressure chamber substrate 44. A space sandwiched between the flow path substrate 42 and the diaphragm 46 inside each opening 422 functions as a cavity 442 that applies pressure to the ink. Each cavity 442 communicates with the nozzle N via the communication channel 426 of the channel substrate 42.
A piezoelectric element Pzt is formed for each nozzle N (cavity 442) on the surface of the vibration plate 46 opposite to the pressure chamber substrate 44.

  The piezoelectric element Pzt includes a common drive electrode 72 over a plurality of piezoelectric elements Pzt formed on the surface of the diaphragm 46, a piezoelectric body 74 formed on the surface of the drive electrode 72, and a surface of the piezoelectric body 74. It includes individual drive electrodes 76a formed on each piezoelectric element Pzt. In such a configuration, a region facing the piezoelectric body 74 with the drive electrodes 72 and 76a functions as the piezoelectric element Pzt.

  The piezoelectric body 74 is formed by a process including heat treatment (firing), for example. Specifically, the piezoelectric material applied on the surface of the diaphragm 46 on which the plurality of drive electrodes 72 are formed is fired by heat treatment in a firing furnace and then shaped for each piezoelectric element Pzt (for example, using plasma). The piezoelectric body 74 is formed by milling.

Similarly, the piezoelectric element Pzt corresponding to the nozzle row Nb includes the drive electrode 72, the piezoelectric body 74, and the drive electrode 76b. Here, in the nozzle arrays Na and Nb, reference numerals 76a and 76b are assigned to distinguish individual drive electrodes.
In this example, the common drive electrode 72 is the lower layer and the individual drive electrode 76a (76b) is the upper layer with respect to the piezoelectric body 74. Conversely, the drive electrode 72 is the upper layer and the drive electrode 76a (76b) is the upper layer. It is good also as a structure which uses as a lower layer.

As described above, the drive signal voltage Vout corresponding to the amount of ink to be ejected is applied to the drive electrode 76a (76b) that is one end of the piezoelectric element Pzt, while the drive electrode that is the other end of the piezoelectric element Pzt. A constant voltage _VBS is applied to 72 in time.
For this reason, the piezoelectric element Pzt is displaced upward or downward according to the voltage applied to the drive electrodes 72 and 76a (76b). Specifically, when the voltage Vout of the drive signal applied via the drive electrode 76a (76b) decreases, the central portion of the piezoelectric element Pzt bends upward with respect to both end portions, while the voltage Vout increases. It is configured to bend downward.
Here, if the ink is bent upward, the internal volume of the cavity 442 is expanded (the pressure is reduced), so that the ink is drawn from the liquid storage chamber Sr, while if the ink is bent downward, the internal volume of the pressure chamber Sc is increased. Since the ink is reduced (the pressure is increased), an ink droplet is ejected from the nozzle N depending on the degree of reduction. As described above, when an appropriate drive signal is applied to the piezoelectric element Pzt, ink is ejected from the nozzle N due to the displacement of the piezoelectric element Pzt.

Now, the arrangement of the drive electrodes 72 and 76a (76b) in the piezoelectric element Pzt having such a structure will be described with reference to FIG. 4 again. In this figure, the piezoelectric body 74 is not shown.
As shown in this figure, the drive electrode 76a of the nozzle N belonging to the nozzle row Na protrudes to the right in the figure with respect to the drive electrode 72 patterned into a rectangular shape elongated in the Y direction in plan view. Of the drive electrode 76a, a point indicated by a black circle in this projecting region is a connection point with the bump (projection electrode) 54a in the drive IC 50.
Similarly, the drive electrode 76b of the nozzle N in the nozzle row Nb protrudes to the left side in the drawing. Of the drive electrode 76b, a point indicated by a black circle in the overhanging region is a connection point with the bump 54b of the drive IC 50.
Further, when viewed in plan, the drive electrode 72 includes a region where the drive electrodes 76a and 76b are not provided along the nozzle rows Na and Nb. This region is a connection point with the plurality of bumps 54c in the drive IC 50.

FIG. 7 is a plan view showing a mounting surface (connection surface) of the drive IC 50.
In this figure, bumps 54a are provided in the edge region 560 at the positive side end in the X direction in a line along the Y direction in one-to-one correspondence with the drive electrodes 76a. Similarly, in the edge region 570 at the negative side end in the X direction, the bumps 54b are provided in a line along the Y direction in a one-to-one correspondence with the drive electrodes 76b.
On the mounting surface of the drive IC 50, a wiring pattern 550 is provided in a longitudinal shape along the Y direction at a position facing the drive electrode 72 and not facing the drive electrodes 76a and 76b. The wiring pattern 552 (guard wiring portion) is provided so as to surround the wiring pattern 550 and electrically insulated from the wiring pattern 550 when the mounting surface is viewed in plan. The wiring pattern 552 is also isolated from the edge regions 560 and 570.

In the drive IC 50, for example, in the region 590 on one end side in the Y direction, the constituent elements of the selection control unit 510 are formed, and although not particularly illustrated, a part of the flexible cable 190 is connected to control from the main board 100. and signal Ctr, the drive signal COM-a, COM-B, along with receiving a supply of a retention signal of the voltage _{V BS,} are configured to be grounded to a ground potential.
In this configuration, the holding signal of the voltage V _BS is for example applied directly or indirectly to the wiring pattern 550 from the area 590. For this reason, a path from the region 590 to the wiring pattern 550 and the bump 54c becomes a holding signal wiring portion.
The wiring pattern 552 is grounded to the ground potential.

The mounting surface (see FIG. 7) of the drive IC 50 is mounted (face-down bonding) on the electrode forming surface (see FIG. 4) of the actuator substrate 40 as shown in FIG. Thereby, the bumps 54a provided on the mounting surface of the drive IC 50 are connected to the drive electrodes 76a, the bumps 54b are connected to the drive electrodes 76b, and the bumps 54c are connected to the drive electrodes 72, respectively.
Therefore, since the drive electrode 72 is connected in parallel with the wiring pattern 550 via the bump 54c, the resistance path of the head unit 3 to which the voltage _VBS is applied is reduced. This low resistance, even if a relatively large current flows through the path of the voltage V _BS, since stabilization of the voltage V _BS is achieved, is enhanced ejection accuracy of ink, it is possible to print a high quality. In addition, after the drive IC 50 is mounted on the actuator substrate 40, the periphery of the connection portion is sealed with a sealing material, and deterioration of the piezoelectric element Pzt (piezoelectric body 74) is prevented.

FIG. 8 is a cross-sectional view of the main part showing the structure of the drive IC 50, and more specifically, a cross-sectional view taken along the line hh in FIG. In this description, the above is a direction formed later in time in the semiconductor process, and is independent of the direction opposite to the direction of gravity.
As shown in this figure, in the driving IC 50, an oxide film 581 is locally formed on the Si substrate 51 by a LOCOS (local oxidation of silicon) method to constitute an element isolation region. In the portion where the oxide film 581 is not formed, a P-type doped region 563 and an N-type doped region 573 are formed by ion implantation (dopant implantation) using the oxide film 581 as a mask. A first interlayer insulating film 591 is formed so as to cover these oxide film 581, P-type doped region 563, and N-type doped region 573.
In the edge region 560, the constituent element (transistor) of the selection unit 520 corresponding to the nozzle row Na is formed. In the edge region 570, the constituent elements of the selection unit 520 corresponding to the nozzle row Nb are formed.

On the first interlayer insulating film 591, wirings M1 and N1 are formed by patterning the first wiring layer. The second interlayer insulating film 592 is provided so as to cover the wirings M1, N1 and the first interlayer insulating film 591.
The second interlayer insulating film 592 is provided with a plurality of contact holes (vias), while the wiring M2 formed by patterning the second wiring layer is connected to the wiring M1 through the contact holes. A wiring N2 formed by patterning the second wiring layer is connected to the wiring N1 through a contact hole. The third interlayer insulating film 593 is provided so as to cover the wirings M2, N2 and the second interlayer insulating film 592.

The third interlayer insulating film 593 is provided with a plurality of contact holes, while the wiring M3 formed by patterning the third wiring layer is connected to the wiring M2 through the contact hole. Similarly, the third wiring A wiring N3 formed by patterning the layer is connected to the wiring N2 through a contact hole. The insulating film 594 is provided so as to cover the wirings M3 and N3 and the third interlayer insulating film 593.
Thus, the wiring pattern 550 has a parallel connection structure including three layers of wirings M1, M2, and M3. Similarly, the wiring pattern 552 also has a parallel connection structure including three layers of wirings N1, N2, and N3. . Therefore, the resistance of the wiring patterns 550 and 552 is reduced as compared with the case of a single layer.

In the drawing, only the P-type doped region 563 is shown in the edge region 560, but an N-type doped region may also be formed. Similarly, in the edge region 570, only the N-type doped region 573 is shown, but a P-type doped region may also be formed.
In the edge region 560, bumps 54a (not shown in FIG. 8) are formed on the insulating film 594. The output points of the constituent elements in the selection unit 520 of the nozzle row Na are electrically connected to the bumps 54a through contact holes that penetrate stepwise from the first interlayer insulating film 591 to the insulating film 594. Similarly, in the edge region 570, bumps 54b (not shown in FIG. 8) are formed on the insulating film 594. The output points of the constituent elements in the selection unit 520 of the nozzle array Nb are electrically connected to the bumps 54b through contact holes that penetrate stepwise from the first interlayer insulating film 591 to the insulating film 594.
For this reason, the path from the output point of the selection unit 520 to the bump 54a (54b) is the drive signal wiring unit.

On the other hand, the wiring patterns 550 and 520 are provided between the edge regions 560 and 570 and on the non-doped regions that are not the P-type doped region 563 and the N-type doped region 573. Specifically, the wiring patterns 550 and 552 are non-doped regions in which ions are not implanted in the Si substrate 51 (or, in actuality, a small amount of ions are implanted, but are regarded as being not implanted). In contrast, a metal wiring layer such as copper or aluminum is formed on the oxide film 581 and the first interlayer insulating film 591 as the first wiring layer, the second wiring layer, and the third wiring layer, respectively. It is formed by patterning.
A bump 54c (not shown in FIG. 8) is formed on the insulating film 594, and is electrically connected to the wiring M3 through a contact hole that penetrates the insulating film 594.

As described above, in the head unit 3, the path of the voltage V _BS by parallel connection of the drive electrodes 72 and the wiring pattern 550 is being low resistance, there is no change in a relatively large current flows in the route . For this reason, there is a concern that the drive IC 50 may malfunction due to noise caused by a large current flowing through the path.
On the other hand, in the present embodiment, the vicinity of the wiring pattern 550 is a non-doped region where an active element such as a transistor is not formed, and the wiring pattern 550 is grounded to the ground potential when the mounting surface of the driving IC 50 is viewed in plan. Since it is surrounded by the wiring pattern 552, the possibility of malfunction caused by such noise can be reduced.

Further, here, the noise generated by a large current flows through a path of the voltage V _BS is, has been described it affects the other part, on the contrary, the other part is the effect on the path of the voltage V _BS It can also be considered. For example, a change in the voltage Vout to a given piezoelectric element Pzt is believed to influence the path of the voltage V _BS. In particular, the path of the voltage V _BS, since over a plurality of piezoelectric elements Pzt, its effect will be to cover all of the piezoelectric elements Pzt. In the present embodiment, since the low resistance and the like of the path of the voltage V _BS is achieved, the other portions influence on the path of the voltage V _BS is suppressed.
Note that a change in the voltage Vout to one piezoelectric element Pzt may affect the voltage Vout to another piezoelectric element Pzt.

In the embodiment, the wiring layer has three layers, but is not limited thereto. Further, as shown in FIG. 9, the wiring pattern 550 may be shielded by the wiring pattern 552 not only in a plan view but also in a sectional view.
In embodiments, a hold signal voltage V _BS from the main substrate 100, but by way of the driving IC50 was configured to be applied to the actuator substrate 40 may be directly supplied configuration to the actuator substrate 40. In either configuration, the drive electrode 72 and the wiring pattern 550 is so connected in parallel via a bump 54c, the path of the voltage V _BS is not changed to be low resistance.

  In the embodiments, the liquid ejection device has been described as a printing device. However, a three-dimensional modeling device that ejects liquid to form a solid, a textile printing device that ejects liquid to dye a fabric, and the like may be used.

DESCRIPTION OF SYMBOLS 1 ... Printing apparatus (liquid discharge apparatus), 3 ... Head unit, 50 ... Drive IC, 54a, 54b, 54c ... Bump, 40 ... Actuator board | substrate (structure), 442 ... Cavity, 100 ... Main board, 550 ... Wiring pattern (Holding signal wiring portion), 552... Wiring pattern (guard wiring portion), Pzt... Piezoelectric element, N.

Claims (8)

A structure in which a cavity filled with liquid and the pressure inside the cavity is increased and decreased, a nozzle communicating with the cavity and discharging the liquid by increasing and decreasing the pressure in the cavity; and
A piezoelectric element formed on the structure and increasing or decreasing the pressure inside the cavity;
A drive IC mounted on the structure so as to seal the piezoelectric element;
Comprising
The drive IC is
A first wiring section wiring for applying a driving voltage that varies in accordance with the discharge amount of the liquid to one end of the piezoelectric element is formed,
A second wiring portion formed with a wiring connected to the other end of the piezoelectric element ;
A guard wiring portion located between the first wiring portion and the second wiring portion when the driving IC is viewed in plan from the mounting surface with the structure;
A head unit comprising: A plurality of the first wiring portions are provided and individually connected to the plurality of piezoelectric elements,
The second wiring portion, the head unit according to claim 1, characterized in that it is connected in common to the plurality of piezoelectric elements. The head unit according to claim 1, wherein the guard wiring portion is a metal wiring layer. The said guard wiring part surrounds the said 2nd wiring part between the said 1st wiring part when the said driving IC is planarly viewed from the mounting surface with the said structure, The 1st thru | or 1 characterized by the above-mentioned . 4. The head unit according to any one of 3. A constant holding voltage is applied to the wiring formed in the second wiring portion over time.
The head unit according to claim 1, wherein the head unit is provided. The driving IC is provided with a plurality of stacked insulating films,
The wiring formed in the second wiring portion is provided across the plurality of insulating films.
6. The head unit according to claim 1, wherein the head unit is characterized in that: The drive IC is provided with a doped region and a non-doped region,
  When the driving IC is viewed in plan from the mounting surface, the second wiring portion is provided on the non-doped region.
The head unit according to claim 1, wherein the head unit is a head unit. A head unit;
A relative movement unit for moving the head unit relative to the medium;
Comprising
The head unit is
A structure in which a cavity filled with liquid and the pressure inside the cavity is increased and decreased, a nozzle communicating with the cavity and discharging the liquid by increasing and decreasing the pressure in the cavity; and
A piezoelectric element formed on the structure and increasing or decreasing the pressure inside the cavity;
A drive IC mounted on the structure so as to seal the piezoelectric element;
Comprising
The drive IC is
A first wiring section wiring for applying a driving voltage that varies in accordance with the discharge amount of the liquid to one end of the piezoelectric element is formed,
A second wiring portion formed with a wiring connected to the other end of the piezoelectric element ;
A guard wiring portion located between the first wiring portion and the second wiring portion when the driving IC is viewed in plan from the mounting surface with the structure;
A liquid ejecting apparatus comprising:

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