JP6489952B2 - How to change the wire of multi-wire saw - Google Patents

Description

  The present invention relates to a method for replacing a wire of a multi-wire saw.

  A multi-wire saw using abrasive grains is known as a cutting means when cutting a wafer from a cylindrical ingot (Patent Document 1). There is also a multi-wire electric discharge machining apparatus that performs electric discharge machining using a wire saw (Patent Document 2).

Japanese Patent Laid-Open No. 9-94755 JP 2011-140088 A

  The multi-wire saw moves the wire saw facing the workpiece by winding the wire of the feeding bobbin with the winding bobbin and processes the workpiece. For this reason, since the wire of a feeding bobbin decreases by processing a multi-wire saw, it is necessary to replace the feeding bobbin. In the multi-wire saw, since the wires are faced to a plurality of positions of the workpiece, the path of the wires is complicated. For this reason, it takes time to move the wire to a predetermined path when installing the feeding bobbin.

  Then, this invention is made | formed in view of the above, Comprising: It aims at providing the replacement | exchange method of the wire of a multi wire saw which can replace | exchange the wire of a multi wire saw easily.

  In order to solve the above-described problems and achieve the object, the present invention comprises a feeding bobbin for supplying a wire, and a plurality of guide rollers having a parallel rotation shaft and formed with a guide groove for wire stretching. A guide roller group in which the wire supplied from the feeding bobbin is wound a plurality of times; a winding bobbin that winds the wire from the guide roller group; and a fixed base that fixes a workpiece to be cut by the wire; A wire replacement method for a multi-wire saw that replaces a wire, and is a flexible wire that can be stretched along the guide groove with the end of the wire inserted therein. A connecting member preparing step for preparing a tube-shaped connecting member; and a rear end of a first wire wound around the guide roller group is inserted into one end of the connecting member and fixed, A connecting step of inserting and fixing the tip of a second wire to be exchanged with the wire to the other end of the connecting member, and connecting the first wire and the second wire via the connecting member; After performing the connection step, the first wire is wound up by the winding bobbin, the guide roller group is passed through the first wire and the connection member, and the second wire connected to the first wire. A winding step in which the wire is wound around the guide roller group.

  In the connecting step, it is preferable that the wire is fixed to the connecting member with an adhesive injected into the connecting member.

  The multi-wire saw preferably includes a high-frequency pulse power supply unit that supplies high-frequency pulse power to the wire and the workpiece, and discharges the workpiece.

  In the method of exchanging wires of the multi-wire saw of the present invention, it is possible to connect a used wire and a new wire without affecting the wire path. Thereby, a new wire can be arrange | positioned to a predetermined path | route by winding up the wire connected with the winding bobbin, and a wire can be replaced | exchanged easily in a short time.

FIG. 1 is a schematic diagram illustrating a configuration example of a multi-wire electric discharge machining apparatus. FIG. 2 is a schematic perspective view showing an enlarged periphery of the workpiece of the multi-wire electric discharge machining apparatus. FIG. 3 is a flowchart showing an example of a wire replacement method of the multi-wire electric discharge machining apparatus. FIG. 4 is an explanatory diagram for explaining an example of the exchange method. FIG. 5 is an explanatory diagram for explaining an example of the exchange method. FIG. 6 is an explanatory diagram for explaining an example of the exchange method. FIG. 7 is an explanatory diagram for explaining an example of the exchange method.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
A configuration example of the multi-wire electric discharge machining apparatus according to the embodiment will be described. FIG. 1 is a schematic diagram illustrating a configuration example of a multi-wire electric discharge machining apparatus. FIG. 2 is a schematic perspective view showing an enlarged periphery of the workpiece of the multi-wire electric discharge machining apparatus. As shown in FIG. 1, the multi-wire electric discharge machining apparatus 1 performs electric discharge machining of the ingot I with a wire R, and includes a feeding bobbin 20, a take-up bobbin 21, and a guide roller unit (guide roller group) 30. .

  An unused wire R is wound around the feeding bobbin 20 by a certain amount. The wire R has a cut surface formed in a circular shape, and includes a core part and a covering part that covers the peripheral surface of the core part. A core part is high purity steel, for example, is a piano wire. The covering portion is formed of a material having a low electrical resistance that is easier to discharge than a core portion such as brass, tungsten, or molybdenum. The diameter of the wire R is, for example, about 100 μm to 140 μm. Of course, the diameter of the wire R is not limited to 100 μm to 140 μm, and may be, for example, 100 μm to 200 μm.

  The feeding bobbin 20 feeds the wire R toward the guide roller unit 30. The guide roller unit 30 is disposed in the vicinity of the feeding bobbin 20 and guides the wire R fed from the feeding bobbin 20. The guide roller unit 30 is composed of a plurality of guide rollers 30a to 30j. The guide rollers 30a to 30j are formed in a cylindrical shape, and are arranged at intervals in the direction in which the wire R travels.

  The guide rollers 30a and 30b are disposed in the vicinity of the feeding bobbin 20, wind the wire R fed by the feeding bobbin 20, and feed the wire R toward the guide rollers 30c to 30i.

  The guide rollers 30c to 30i constitute a parallel wire portion 310 and are disposed so as to support the wire R in an annular shape. For example, the guide rollers 30c, 30d, 30e, 30g, 30h, and 30i of the parallel wire portion 310 support the annular wire R from the inside, and the guide roller 30f is connected to the wire R of the parallel wire portion 310 configured in an annular shape. On the other hand, it arrange | positions so that it may support from an outer side. The parallel wire portion 310 winds the wire R sent out by the guide rollers 30a and 30b a plurality of times with a certain interval in the axial direction (Y-axis direction). For example, the wire R of the parallel wire portion 310 is wound eight times around the guide rollers 30c to 30i with an interval of about 0.5 mm to several mm in the axial direction.

  Here, the Y-axis direction is the axial direction of the guide rollers 30a to 30j. The X-axis direction is a direction orthogonal to the Y-axis direction on the horizontal plane. The Z-axis direction is a direction orthogonal to the X-axis direction and the Y-axis direction, which is the vertical direction in this embodiment.

  In the parallel wire section 310, the guide roller 30c winds the wire R sent out by the guide roller 30b and sends it out to the guide roller 30d. The guide roller 30d winds the wire R sent out by the guide roller 30c and sends it out to the guide roller 30e. The guide roller 30e winds the wire R sent out by the guide roller 30d and sends it out to the guide roller 30f. The guide roller 30f winds the wire R sent out by the guide roller 30e and sends it out to the guide roller 30g. The guide roller 30g winds the wire R sent out by the guide roller 30f and sends it out to the guide roller 30h. The guide roller 30h winds the wire R sent out by the guide roller 30g and sends it out to the guide roller 30i. The guide roller 30i winds the wire R sent out by the guide roller 30h and sends it out to the guide roller 30c. Now, the guide roller 30c-30i which comprises the parallel wire part 310 was wound around 1 round. The wire R is wound around the remaining seven turns on the guide rollers 30c to 30i of the parallel wire portion 310 with an interval of about 0.5 mm to several mm in the axial direction. The parallel wire portion 310 sends out the last wire R wound eight times to the guide roller 30j.

  The guide roller 30j is disposed in the vicinity of the take-up bobbin 21, winds the wire R sent from the parallel wire portion 310, and sends it to the take-up bobbin 21. The winding bobbin 21 winds up and collects the used wire R sent out from the guide roller 30j.

  The feeding bobbin 20, the take-up bobbin 21, and the guide rollers 30a to 30j are rotationally driven by a motor (not shown). It is not necessary to drive all the guide rollers 30a to 30j. For example, the guide rollers 30a, 30b, and 30j that do not constitute the parallel wire portion 310 may be driven rollers. The speed at which the wire R wound around the guide rollers 30a to 30j travels is about 0.5 m / sec to 1 m / sec.

  The wire R of the parallel wire portion 310 is stretched with a certain tension along the Z-axis direction by a pair of guide rollers 30g and 30h. The wire R stretched by the guide rollers 30g and 30h constitutes a cutting wire portion 320 that slices the ingot I into a wafer. The wire R of the cutting wire portion 320 travels upward along the Z-axis direction.

  The ingot I has a cylindrical shape and is sliced into a disc shape at intervals of the wires R of the cutting wire portion 320. The ingot I is a conductive material and is made of SiC, single crystal diamond, silicon, GaN (gallium nitride), or the like.

  A support mechanism 40 for supporting the ingot I is provided in the vicinity of the cutting wire portion 320. The support mechanism 40 includes a base part 41, support pillars 42, and drive means 43. The base part 41 fixes the ingot I. The base part 41 includes a base 41a and a plate-like substrate 41b fixed to the base 41a. The peripheral surface Ia of the ingot I is bonded and fixed to the front surface 41c of the substrate 41b by the conductive adhesive B. The ingot I is fixed to the substrate 41b of the base portion 41 so that the end surface Ie thereof is substantially parallel to the Z-axis direction in which the wire R of the cutting wire portion 320 travels.

  The support column 42 is formed in a rod shape and is erected in the Z-axis direction. The support column 42 has a base portion 41 fixed to one end and a driving means 43 fixed to the other end. The drive means 43 moves the ingot I and the wire R relative to each other in the X-axis direction. For example, the drive means 43 includes a ball screw (not shown) that extends along the X-axis direction, and a drive source that includes a pulse motor or the like. The driving means 43 moves the support column 42 fixed to the nut of the ball screw along the X-axis direction, and cuts the ingot I of the base portion 41 fixed to the support column 42 into the wire R of the cutting wire portion 320. Let me.

  Multi-wire electric discharge machining is performed in a working fluid F such as water or oil which is a dielectric. The cutting wire part 320 is immersed in the processing tank 50 in which the processing liquid F is stored. In the processing tank 50, the wire R of the cutting wire portion 320 immersed in the processing liquid F processes the ingot I.

  The processing tank 50 has an opening 53 on the upper surface. The base portion 41 is inserted into the processed layer 50 from the opening 53. The base portion 41 can reciprocate in the X-axis direction with respect to the processing tank 50. The wire R sent out by the guide roller 30f enters the processing tank 50 through the opening 53. The wire R that has entered the inside of the processing tank 50 is fed out of the processing tank 50 from the opening 53 by a guide roller 30 g disposed in the processing tank 50.

  The multi-wire electric discharge machining apparatus 1 includes a power feeding mechanism 60 that feeds power to the wire R and the ingot I. The power feeding mechanism 60 includes a high frequency pulse power supply unit 61, a wire electrode 62, and a base electrode (not shown).

  The high frequency pulse power supply unit 61 supplies high frequency pulse power to the wire R and the ingot I fixed to the base portion 41. For example, the high-frequency pulse power supply unit 61 includes voltage adjusting means 61a that adjusts the voltage of the high-frequency pulse power, and pulse adjusting means 61b that adjusts the frequency of the high-frequency pulse power to a predetermined frequency. The high-frequency pulse power supply unit 61 is connected to the wire electrode 62 and supplies high-frequency pulse power to the wire R through the wire electrode 62. The wire electrode 62 is formed in a rod shape and is in contact with a wire R stretched between the guide roller 30h and the guide roller 30i. The high frequency pulse power supply unit 61 is connected to a base electrode fixed to the base portion 41 and supplies high frequency pulse power to the ingot I via the base portion 41.

  When high-frequency pulse power is supplied from the high-frequency pulse power supply unit 61 and a voltage is applied between the electrodes of the wire R and the ingot I, the wire R discharges the ingot I arranged on the front surface. For example, when the distance between the ingot I and the wire R, which are in an insulating state in the machining fluid F, approaches about several tens of μm, the insulation between the two is destroyed and discharge occurs. By this discharge, the ingot I is heated and melted, and the temperature of the liquid is rapidly increased, whereby the liquid is vaporized, and the melted portion is scattered by volume expansion. In this way, by applying a voltage between the wires R and the ingot I, the ingot I is melted and scattered, and the ingot I is subjected to electric discharge machining.

  The multi-wire electric discharge machining apparatus 1 includes a feeding bobbin 20, a take-up bobbin 21, guide rollers 30 a to 30 j, a driving unit 43, and a control unit 70 that controls the high-frequency pulse power supply unit 61. The control means 70 outputs a motor drive signal to the feeding bobbin 20, the winding bobbin 21, and the guide rollers 30a to 30j, and performs control so that the wire R is fed and wound, and the wire R is guided. Further, the control means 70 outputs a motor drive signal to the drive means 43 to control the ingot I to be cut into the wire R of the cutting wire portion 320. The control means 70 outputs a control signal to the high frequency pulse power supply unit 61 to control the output time of the high frequency pulse power.

  Next, an operation example of the multi-wire electric discharge machine will be described. First, an operator fixes the ingot I to the base part 41, stores the machining fluid F in the machining tank 50, and registers machining information. The multi-wire electric discharge machining apparatus 1 starts the machining operation when there is an instruction to start the machining operation. In the processing operation, the control means 70 controls the high frequency pulse power supply unit 61 to supply the high frequency pulse power to the wire R and the ingot I. Further, the control means 70 feeds the wire R from the feed bobbin 20, guides the wire R by the guide roller unit 30, and causes the wire R to travel at a constant speed.

  The wire R is sent out to the parallel wire portion 310 by the guide roller 30b. The wire R sent out to the parallel wire portion 310 is subjected to electric discharge machining of the ingot I at the cutting wire portion 320. For example, the control unit 70 controls the driving unit 43 to move the ingot I toward the wire R of the cutting wire portion 320 and apply electric voltage between the wires R and the ingot I to perform electric discharge machining. Then, a processing groove is formed in the ingot I. For example, when the ingot I and the wire R come close to each other, a discharge is generated, and the process of melting and scattering the ingot I is performed intermittently, so that a machining groove is formed in the ingot I.

  Since the multi-wire electric discharge machining apparatus 1 winds the wire R with the winding bobbin 21, the wire R wound around the feeding bobbin 20 gradually decreases. When the wire R wound around the feeding bobbin 20 is reduced to a length that requires replacement, the multi-wire electric discharge machining apparatus 1 replaces the wire to be installed by replacing the feeding bobbin 20 and the take-up bobbin 21.

  Hereinafter, the wire exchange method of the multi-wire electric discharge machining apparatus 1 will be described with reference to FIGS. 3 to 7. FIG. 3 is a flowchart showing an example of a wire replacement method of the multi-wire electric discharge machining apparatus. 4 to 7 are explanatory diagrams for explaining an example of the exchange method. 7 is a cross-sectional view taken along line AA in FIG. Each process of the flowchart shown in FIG. 3 can be executed by the operator performing an operation on the multi-wire electric discharge machining apparatus.

  First, it is determined whether it is a wire replacement timing (step S12). Whether or not it is the wire replacement timing may be determined by the operator from the amount of the wire wound around the feeding bobbin 20, but the multi-wire electric discharge machining apparatus 1 is provided with a sensor for determining whether or not the wire replacement timing is reached. An operator may be notified of the detection result of the sensor. For example, the multi-wire electric discharge machining apparatus 1 detects the relationship between the amount of wire wound around the feeding bobbin 20 and the amount of movement of the wire, the remaining amount of the wire wound around the feeding bobbin 20, and changes the wire replacement timing. If it is determined that it is the wire replacement timing, the operator may be notified by voice, image, or light.

  If the operator determines that it is not the wire replacement timing (No in step S12), the operator returns to step S12. When the operator determines that it is the wire replacement timing (Yes in Step S12), the operator stops the multi-wire electric discharge machining apparatus 1 (Step S14).

  Next, the operator cuts the wire (first wire) R in the vicinity of the feeding bobbin 20 (step S16). Specifically, the wire R is cut between the feeding bobbin 20 and the guide roller 30a, for example, at a position P1 in FIG.

  Next, the operator replaces the feeding bobbin 20 (step S18). That is, the feeding bobbin 20 that needs to be replaced is replaced with a new feeding bobbin 20 around which a wire (second wire) is wound.

  Next, the operator prepares the connecting member 100 (step S20), and the connecting member 100 is a hollow cylindrical member as shown in FIG. The connecting member 100 has a cylindrical inner peripheral diameter larger than the diameter of the wire R. In addition, the connecting member 100 preferably has an outer diameter of the cylinder smaller than the maximum diameter of the wire that can be guided by the multi-wire electric discharge machining apparatus 1. For example, when the maximum diameter of the wire that can be guided by the multi-wire electric discharge machining apparatus 1 is 300 μm, the connecting member 100 preferably has a cylindrical outer diameter of 280 μm. Moreover, although the length of the connection member 100 is not specifically limited, For example, they are 50 mm-60 mm. When the connecting member is mounted on the wire and moves, the connecting member has flexibility that can be stretched around the guide roller group along the guide groove. The connecting member can be made of a material softer than the wire R, for example, polyimide. In this way, the operator prepares a flexible tubular connection member that can be stretched around the guide roller group with the end of the wire inserted therein.

  Next, the operator applies an adhesive to the wire (step S22). Of the cut wires, the end of the wire (first wire) R1 wound around the guide rollers 30a to 30j and the take-up roller 21 and the wire wound around the new feeding bobbin 20 (second wire) Wire) Apply adhesive to both ends of R2. As shown in FIG. 5, the adhesive is applied by dropping the adhesive 112 from the container 110 containing the adhesive onto the ends of the wires R1 and R2. The adhesive may be applied to the wires R1 and R2 by brushing or the like. As the adhesive, it is preferable to use a quick-drying adhesive. By using a quick-drying adhesive, the step of connecting a wire and a connecting member to be described later can be shortened.

  Next, the operator connects the two wires with a connecting member (step S24). Specifically, as shown in FIG. 4, the end of the connection member 100 on which the adhesive 102 of the wire R1 is applied is inserted into the inner periphery of the connection member 100, and the connection member 100 and the wire R1 are connected by the adhesive. . Further, the end of the other end of the connecting member 100 where the adhesive 104 of the wire R2 is applied is inserted, and the connecting member 100 and the wire R2 are connected by the adhesive. Thereby, the wire R1 and the wire R2 are connected by the connecting member 100 and the adhesives 102 and 104. Here, the adhesive strength of the adhesive is preferably 300 gf or more. Thereby, it can adhere | attach with the force of 100-300 gf or more which is the force applied to a wire at the time of stretching.

  In this way, the operator inserts the rear end of the wire (first wire) R1 wound around the guide roller portion 30 and the take-up bobbin 21 into one end of the connecting member, and turns the wire R1 wound around the new feeding bobbin 20 The tip of the wire (second wire) R2 to be exchanged is inserted into the other end of the connecting member, and the wire R1 and the wire R2 are connected.

  When the operator connects the two wires, the operator moves the wires to a position where the connecting member 100 moves to the vicinity of the take-up bobbin 21 (step S26). That is, the wire R1 is taken up by the take-up bobbin 21, the wire R1 and the connecting member 100 pass through the guide roller portion 30, and the wire R2 connected to the wire R1 is wound around the guide roller portion 30. As a result, the wire R <b> 2 wound around the new feeding bobbin 20 is wound around the guide roller unit 30, and the end is disposed in the vicinity of the winding bobbin 21.

  Here, the wires R1 and R2 connected by the connection member 100 are wound by the winding bobbin 21, so that the connection member 100 moves along the movement path of the wire. For this reason, the connecting member 100 moves in the groove of the guide roller portion 30. Since the connecting member 100 is flexible, as shown in FIGS. 6 and 7, when the groove of the guide roller unit 30 is moved, the connecting member 100 is deformed and moved along the groove. Thereby, even if the connection member 100 moves along the path of the wire R, the connection member 100 is deformed and conveyed in the same manner as the wire R, so that the influence on the groove of the guide roller portion 30 is small.

  Next, the operator cuts the wire near the winding bobbin 21 (step S28). Specifically, the wire R is cut between the winding bobbin 21 and the guide roller unit 30 at a position on the feeding bobbin side with respect to the connecting member, for example, a position P2 in FIG. Since the position where the wire is cut is upstream of the connecting member, it becomes a new wire.

  Next, the operator replaces the winding bobbin 21 (step S30). The winding bobbin 21 that has wound the wire is removed, and a new winding bobbin is mounted. Next, an operator fixes a wire to the winding bobbin 21 (step S32). That is, the end of the wire R2 around which the guide roller 30 is wound is fixed to the new winding bobbin 21.

As described above, according to the wire replacement method of the multi-wire electric discharge machining apparatus 1 according to the embodiment, the used wire and the wire to be replaced are connected by the flexible tubular connection member, and the used wire is wound. Since the wire to be exchanged is automatically wound around the guide roller portion in the process of winding with the take-up bobbin, the wire can be easily exchanged in a short time. Further, by using a flexible connecting member, it is possible to move the wire R1 and the wire R2 connected by the connecting member without affecting the wire path, for example, the groove of the guide roller.
For example, when a new wire is wound around a guide roller along the path of the wire, it takes 30 minutes to 2 hours because the operator needs to wind the guide roller part a plurality of times. Processing takes 4 minutes to connect, and 1 minute to move the connected wires.

  In the present embodiment, the wire and the connection member are bonded with an adhesive, but the wire and the connection member may be connected with a strength that does not come off due to the movement of the wire, and the connection method is not limited. For example, you may connect a wire and a connection member using a double-sided tape.

  Moreover, the wire R may be comprised from the core part which is high purity steel, and coating | coated parts, such as brass, tungsten, and molybdenum, or may be formed only from brass. Moreover, although the wire R demonstrated the example whose cut surface is circular, other than circular may be sufficient. For example, the wire R may have an oval or polygonal cut surface.

  In the present embodiment, the multi-wire saw is a multi-wire electric discharge machine that performs electric discharge machining, but is not limited thereto. The multi-wire saw may be a multi-wire processing apparatus that processes a workpiece by attaching a grindstone to the wire and bringing the wire and the workpiece into contact with each other.

DESCRIPTION OF SYMBOLS 1 Multi-wire electrical discharge machining apparatus 30a-30j Guide roller 320 Cutting wire part 40 Support mechanism 50 Processing tank 60 Power supply mechanism F Processing liquid I Ingot R, R1, R2 Wire

Claims (3)

A feeding bobbin for supplying a wire, and a guide roller group including a plurality of guide rollers having parallel rotation shafts and formed with a guide groove for extending a wire, and the wire supplied from the feeding bobbin being wound a plurality of times In a multi-wire saw comprising: a winding bobbin that winds up the wire from the guide roller group; and a fixed base that fixes a workpiece to be cut with the wire, the wire of the multi-wire saw is replaced A method,
A connecting member preparation step of preparing a flexible tubular connecting member that can be stretched around the guide roller group along the guide groove with the end of the wire inserted therein;
The rear end of the first wire wound around the guide roller group is inserted and fixed to one end of the connecting member, and the tip of the second wire exchanged with the first wire is connected to the other end of the connecting member. A connecting step of inserting and fixing, and connecting the first wire and the second wire via the connecting member;
After performing the connecting step, the first wire is wound up by the winding bobbin, the guide roller group is passed through the first wire and the connecting member, and the first wire connected to the first wire. A winding step in which two wires are wound around the guide roller group;
A method for exchanging wires of a multi-wire saw.   2. The method of replacing wires in a multi-wire saw according to claim 1, wherein in the connecting step, the wire is fixed to the connecting member with an adhesive injected into the connecting member.   3. The multi-wire saw according to claim 1, wherein the multi-wire saw includes a high-frequency pulse power supply unit that supplies high-frequency pulse power to the wire and the workpiece, and discharges the workpiece. method of exchange.

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