JP6478105B2 - Two-fluid nozzle - Google Patents

Description

  The present invention relates to a two-fluid nozzle, and more specifically, a two-fluid nozzle that mixes and jets a liquid such as water and a gas including air or nitrogen gas, and in particular, for cleaning a substrate provided with a fine circuit pattern. Are preferably used.

  As a two-fluid nozzle of this type, the applicant has provided a two-fluid nozzle 100 shown in FIGS. 10 (A) and 10 (B) in Japanese Patent No. 4971708. The two-fluid nozzle 100 is a double cylinder provided with an inner cylinder 101 and an outer cylinder 102. The hollow portion of the inner cylinder 101 is used as the liquid flow path 103, and droplets are discharged from the circular liquid injection port 103a at the tip on the injection side. It is injecting. Further, an annular passage sandwiched between the inner cylinder 101 and the outer cylinder 102 is used as a gas flow path 104, and gas is injected from an annular gas injection port 104a at the tip on the injection side. The liquid and gas to be jetted are externally mixed or internally mixed.

  In the two-fluid nozzle, the cross-sectional area of the continuous gas flow path 104 is made equal to or less than the area of the gas injection port 104a, the injection pressure of the gas is reduced and soft injection is performed to stabilize the spray pattern.

Patent No. 4971708

  In the two-fluid nozzle of Patent Document 1, since the hollow portion of the inner cylinder is a liquid flow path and droplets are ejected from the circular liquid injection port, increasing the liquid amount by making the liquid injection port large diameter, There is a problem that the droplets become coarse and it becomes impossible to jet fine particles evenly in the spray range.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a two-fluid nozzle capable of achieving uniform atomization of droplets even as a configuration for increasing the amount of liquid to be jetted.

In order to solve the above problems, as a first invention, an inner cylinder, a flow straightening pin disposed in a hollow portion on the injection side of the inner cylinder, and an outer cylinder disposed on the outer periphery of the inner cylinder,
An annular liquid injection port is provided between the inner peripheral surface of the inner cylinder at the injection side end and the outer peripheral surface of the flow straightening pin, and the annular liquid injection is between the outer peripheral surface of the inner cylinder and the inner peripheral surface of the outer cylinder Provide an annular gas jet that surrounds the mouth,
The flow straightening pin has a small diameter portion on the liquid injection side and a large diameter portion on the opposite side, and an injection side annular liquid flow path is provided between the outer circumference of the small diameter portion and the inner circumferential surface of the inner cylinder. The outer peripheral surface of the diameter portion is brought into contact with the inner peripheral surface of the inner cylinder, and the outer peripheral surface is circumferentially spaced apart to provide an axial recessed portion to provide a plurality of rectifying liquid flow paths. The flow path is communicated with the liquid supply port through a liquid flow path formed of a hollow portion of the inner cylinder in which the flow straightening pin is not disposed.
A plurality of inclined grooves are provided at intervals in the circumferential direction on the outer peripheral surface of the inner cylinder and / or the inner peripheral surface of the outer cylinder in the middle of the gas flow path communicating the gas supply port to the annular gas injection port A swirling gas flow path is provided, and the outlet of the inclined groove is located in the outer peripheral direction from the annular gas injection port, and an inclined annular gas flow path is provided between the outlet of the inclined groove and the annular gas injection port.
The radial dimension between the inner periphery and the outer periphery of the annular liquid injection port is 0.1 mm to 0.5 mm, and the radial dimension between the inner periphery and the outer periphery of the annular gas injection port is 1.5 times the annular liquid injection port It provides a two-fluid nozzle characterized by being set to ~ 4 times.

In the two-fluid nozzle according to the first aspect of the invention, the liquid injection port is annular, and the dimension in the radial direction between the inner periphery and the outer periphery is reduced to 0.1 mm to 0.5 mm. Even if the diameter is increased to increase the opening area and the amount of liquid to be jetted, the droplets jetted from the thin liquid jet port can be uniformly atomized, and the coarsening of water droplets due to the increase of liquid can be prevented. . In addition, it is difficult for processing to make the said dimension less than 0.1 mm, and it is because atomization of a droplet will become difficult when it exceeds 0.5 mm.
In addition, since the liquid to be introduced into the annular liquid jet port passes through the straightening liquid flow path, the spray range of the liquid to be jetted can be stabilized.
Further, the outlet of the inclined groove is positioned outward with respect to the annular gas injection port, and the gas is injected from the annular gas injection port while being stabilized in a swirling state through the gas swirl flow path between the droplets. Uniform miniaturization and stabilization of the spray can be achieved.

  It is preferable that four to eight inclined grooves formed in the gas flow channel be arranged at equal angles in the circumferential direction, and the inclination angle be 10 ° to 30 °.

The injection side end faces of the inner cylinder, the flow straightening pin and the outer cylinder are positioned on the same plane to make an external mixture, or the outer cylinder is made to protrude from the injection side end faces of the inner cylinder and the flow straightening pin to make an internal mixture .
In the case of the internal mixing, it is preferable to make the outer cylinder project with a dimension of 0.5 mm or less from the inner cylinder. If it exceeds 0.5 mm, there is a problem that coarse particles are generated at the center when spraying at a low air-water ratio.

  The injection side annular liquid flow passage connected to the annular liquid injection port has a cylindrical shape having the same shape as the annular liquid injection port, injects the liquid as a direct current parallel to the axial direction from the annular liquid injection port, and the annular gas It is preferable that the injection-side annular gas flow passage continuous with the injection port has a cylindrical shape having the same shape as the annular gas injection port, and the gas is injected from the annular gas injection port while swirling in parallel with the axial direction.

  Further, the inner circumferential surface continuing to the annular gas injection port of the outer cylinder may be a straight surface parallel to the central axis or an inclined surface spreading like a trumpet.

  The injection-side annular gas flow path is a cylindrical flow path parallel to the axial direction, and an inclined gas flow path is provided continuously inclined toward the outer diameter side on the inflow side of the injection-side annular gas flow path It is preferable that the swirling gas flow path consisting of the inclined grooves be continuous to the inflow side of the flow path.

  A swirling swirler is disposed between the outer periphery of the small diameter portion of the flow straightening pin and the inner circumferential surface of the inner cylinder, and the liquid flowing in the jet side annular liquid flow path is a swirling flow, and the liquid is swirled from the annular liquid jet port You may make it inject, making it do.

According to a second aspect of the present invention, an inner cylinder, a pivot pin disposed in a hollow portion on the injection side of the inner cylinder, and an outer cylinder disposed on the outer periphery of the inner cylinder,
An annular liquid jet port is provided between the inner peripheral surface of the inner cylinder at the jet end and the outer peripheral surface of the swirling pin, and the annular liquid is disposed between the outer peripheral surface of the inner cylinder and the inner peripheral surface of the outer cylinder Providing an annular gas injection port surrounding the injection port;
The turning pin has a small diameter rod portion on the jetting side and a large diameter rod portion on the opposite side, and a jetting side annular liquid flow path is provided between the outer circumference of the small diameter rod portion and the inner circumferential surface of the inner cylinder The outer peripheral surface of the large diameter rod portion is in close contact with the inner peripheral surface of the inner cylinder, and a plurality of inclined grooves inclined with respect to the axis are provided on the outer peripheral surface of the large diameter rod portion circumferentially. Swirling the liquid through the inclined groove, and
A plurality of inclined grooves are provided at intervals in the circumferential direction on the inner cylinder outer peripheral surface and / or the outer cylinder inner peripheral surface in the middle of the gas flow path communicating the gas supply port to the annular gas injection port, There is provided a two-fluid nozzle characterized in that a flow channel is provided.

In the two-fluid nozzle according to the first aspect of the invention, the liquid injection port is formed in an annular shape, and the dimension in the radial direction between the inner periphery and the outer periphery is reduced to 0.1 mm to 0.5 mm. Even if the outer diameter is increased to increase the opening area and the amount of liquid jetted, the droplets jetted from the thin liquid jet port can be uniformly atomized, preventing the water droplets from becoming coarse due to the increase of the liquid amount it can.
In addition, since the liquid to be introduced into the annular liquid injection port is passed through the liquid flow straightening passage, the liquid can be injected as a stable straight flow, so that the spray of the liquid can be stabilized and the flow velocity is not reduced. In addition, since the outlet of the inclined groove is positioned outward with respect to the annular gas injection port, and the gas is jetted from the annular gas injection port while being stabilized in a swirling state through the inclined annular gas flow path therebetween, And the stabilization of the spray range can be achieved. Furthermore, the spread dimension at the time of spraying can be changed by adjusting the inclination angle of the said inclined groove.

  In the two-fluid nozzle according to the second aspect of the invention, as in the first aspect of the invention, the liquid injection port is annular, so the outer diameter of the annular liquid injection port is increased to increase the opening area and the amount of liquid to be ejected Even if it increases, the droplet jetted from the thin liquid jet nozzle can be atomized uniformly, and the coarsening of water droplets due to the increase of the liquid amount can be prevented. In addition to swirling the liquid jetted from the annular liquid jet port and also swirling the gas jetted from the annular gas jet port on the outer periphery, mixing of the gas and liquid mixed between the swirling flows is efficiently performed, and the liquid is swirled. Atomization of droplets can be achieved.

The two-fluid nozzle of 1st Embodiment of this invention is shown, (A) is sectional drawing, (B) is an expanded sectional view by the side of injection. (A) is a drawing showing the positional relationship between the liquid injection port and the gas injection port of the first embodiment and the inclined groove, and (B) is a partial perspective view of the inner cylinder provided with the inclined groove. The rectification pin used for the said 1st Embodiment is shown, (A) is a perspective view, (B) is the BB sectional drawing of (A). It is the schematic at the time of using the said 2 fluid nozzle for board | substrate washing | cleaning. The two-fluid nozzle of the 1st modification of 1st Embodiment is shown, (A) is sectional drawing, (B) is an expanded sectional view by the side of injection. It is injection side sectional drawing of a 2nd modification. It is injection side sectional drawing of a 3rd modification. The two-fluid nozzle of 2nd Embodiment is shown, (A) is injection side sectional view, (B) is a principal part expanded sectional view, (C) is a CC sectional view of (B), (D) is rectification. It is a right side view of a pin. The two-fluid nozzle of 3rd Embodiment is shown, (A) is sectional drawing, (B) is a principal part expanded sectional view. (A) (B) is sectional drawing of a prior art example.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
The two-fluid nozzle of the first embodiment is shown in FIGS. 1 to 4.
The two-fluid nozzle 1 includes an inner cylinder 2, a flow straightening pin 4 disposed in the hollow portion 3 on the injection side of the inner cylinder 2, and an outer cylinder 5 disposed on the outer circumference of the inner cylinder 2. 4 and the outer cylinder 5 are concentric. The tips of the inner cylinder 2, the flow straightening pin 4 and the injection side (X) of the outer cylinder 5 are positioned on the same plane. The space between the inner peripheral surface of the inner cylinder 2 and the outer peripheral surface of the flow straightening pin 4 is an annular liquid flow path, and an annular liquid injection port 6 is provided at the end on the injection side. Further, a space between the outer peripheral surface of the inner cylinder 2 and the inner peripheral surface of the outer cylinder 5 is a gas flow path, and an annular gas injection port 7 is provided at the tip on the injection side.

  As shown in FIG. 4, a liquid Q consisting of water is injected from the annular liquid injection port 6 as substantially direct current that does not diffuse so much to increase the injection pressure, while a gas consisting of air or nitrogen gas from the annular gas injection port 7 on the outer periphery A is injected as a swirling flow, and the liquid and gas are injected toward the object while the liquid and the gas are externally mixed in a state where the outer circumference of the liquid to be direct-current jetted is surrounded by the swirling flow of gas.

The flow straightening pin 4 is inserted into the hollow portion 3 from the injection side end of the inner cylinder 2 to a position of about 1⁄4 of the total length of the nozzle. The flow straightening pin 4 has a small diameter portion 4a on the liquid injection side and a large diameter portion 4b on the fluid supply side (Y) on the opposite side. The injection side annular liquid flow path 8 is provided between the outer periphery of the small diameter portion 4 a and the inner peripheral surface of the inner cylinder 2. The cross-sectional shape of the injection side annular liquid flow channel 8 is an annular shape having the same shape as the annular liquid injection port 6 at the tip, and is extended along the central axis P by a required length in the axial direction.
The annular liquid jet port 6 and the continuous jet side annular liquid flow path 8 have a thin-width and large-diameter cross-sectional annular shape, and the radial dimension L1 between the inner circumference 6i and the outer circumference 6o is 0.1 mm to 0.5 mm. And the outer diameter is 1.5 mm to 3.5 mm.

  The outer circumferential surface 4c of the large diameter portion 4b of the flow straightening pin 4 is brought into contact with the enlarged inner circumferential surface 2i of the inner cylinder 2, and as shown in FIG. The recessed part 4d of is provided, and the several liquid flow path 9 for rectification | straightening is provided. In the present embodiment, four recesses 4 d are provided at intervals of 90 degrees. The inlet 9a of the flow straightening fluid passage 9 is formed in the downstream hollow portion of the inner cylinder 2 where the flow straightening pin 4 is not disposed, and the hollow portion 3 of the inner cylinder 2 is formed via the liquid flow passage 11 having a circular cross section. It is in communication with a liquid supply port 12 consisting of an opening opposite to the injection side. As a result, the liquid Q (water) supplied from the liquid supply port 12 to the two-fluid nozzle 1 is branched from the liquid channel 11 and passes through the rectifying liquid channel 9, and then the narrow annular annular jet liquid flow The passage 8 is made to go straight and passes through, and the injection is carried out in a state where the striking force is maintained as a substantially straight flow, without being diffused more than the annular liquid injection port 6.

  On the other hand, the gas flow path between the annular gas injection port 7 and the gas supply port 15 provided in the peripheral wall on the downstream side of the outer cylinder 5 is an annular gas flow path 16 continuous with the gas supply port 15; A swirling gas flow passage 17 continuous to the outflow end of the flow passage 16, an inclined annular gas flow passage 18 in a conical cylinder shape continuous to the outflow end of the swirling gas flow passage 17, and a tip of the inclined annular gas flow passage 18 And an annular gas flow passage 19 between the annular gas injection holes 7 and the annular gas injection holes 7.

  The radial dimension L2 between the inner periphery 7i and the outer periphery 7o of the annular gas injection port 7 is 1.5 to 4 times the dimension L1 of the annular liquid injection port 6, and is twice in this embodiment. The injection side annular gas flow passage 19 connected to the annular gas injection port 7 has an annular shape of the same shape, and the swirling gas flowing from the injection side end of the inclined annular gas flow passage 18 is swirled around the central axis P It is led to the injection port. The inclined annular gas flow passage 18 has a conical cylindrical shape formed between the conical protrusion 2c whose diameter is increased in the direction of the (Y) direction of the outer periphery of the inner cylinder 2 and the inclined inner surface 5c parallel to the outer cylinder 5 , And the flow path inclined toward the injection side.

  The inlet of the inclined annular gas channel 18 is continuous with the outlet of the swirl gas channel 17. As shown in FIGS. 2 (A) and 2 (B), the swirling gas flow path 17 is circumferentially provided on the outer peripheral surface of the large diameter cylindrical portion 2d continuous with the large diameter end of the conical projection 2c of the inner cylinder 2. It comprises a plurality of (six in this embodiment) inclined grooves 20 formed at intervals. By bringing the outer peripheral surface 2 e of the large diameter cylindrical portion 2 d into contact with the inner peripheral surface 5 e of the outer cylinder 5, the inclined groove 20 recessed in the outer peripheral surface 2 e is used as a swirling gas flow path 17. Each inclined groove 20 is inclined at an angle θ in the axial direction on the outer peripheral surface 2 e. The angle θ is preferably 10 ° to 30 °.

  When the gas passes through the plurality of inclined grooves 20, the gas is swirled in a spiral around the central axis P, and the gas in the swirling state is the annular inclined annular gas flow passage 18 and the injection side annular gas flow passage While being swirled by 19, the gas is allowed to go straight toward the annular gas injection port 7 and injected as a swirling flow from the annular gas injection port 7.

  The outlet 20 e of the inclined groove 20 provided to inject the gas as a swirling flow from the annular gas injection port 7 is located in the outer peripheral direction from the axis of the annular gas injection port 7. After the gas is made to flow from the swirling gas flow path 17 to the inclined annular gas flow path 18 as the vortex flow in the inclined groove 20 and the diameter is reduced toward the injection port to increase the flow velocity, the injection side annular gas flow path 19 is made to go straight, and it injects from the annular gas injection opening 7.

  For example, as shown in FIG. 4, the two-fluid nozzle 1 sprays a mixed solution of water, air, and nitrogen gas as a cleaning liquid toward the substrate 60 installed downward with the annular liquid jet port 6 facing downward. .

  The two-fluid nozzle having the above configuration has an annular liquid jet port, and the dimension L1 in the radial direction between the inner periphery and the outer periphery of the annular liquid jet nozzle 6 is as thin as 0.1 mm to 0.5 mm. Therefore, while maintaining the dimension L1, the outer diameter of the annular liquid injection port 6 is increased to increase the opening area, and even if the amount of liquid to be injected is increased, the droplets ejected from the thin annular liquid injection port are The mixture can be swirled, mixed with the mixed gas, and uniformly atomized, and the coarsening of water droplets due to the increase in liquid volume can be prevented. As a result, it becomes possible to clean the substrate with a narrower circuit width, and it is possible to increase the ejection amount and shorten the cleaning time.

  Furthermore, since the straightening pin 4 is provided, and it is made to flow straight through by being branched to the straightening liquid flow path 9, it is possible to stabilize the spray of the liquid to be jetted and to contribute to the equalization of the liquid water. Furthermore, in the gas flow channel, the outlet 20e of the inclined groove 20 forming the swirling gas flow channel 17 with respect to the annular gas injection port 7 is positioned on the outer peripheral side, and the gas pressure is increased through the inclined annular gas flow channel 18 therebetween. In this state, the gas is injected while being swirled from the annular gas injection port 7 having the same shape through the injection side annular gas flow path 19. As a result, it is possible to jet so as to surround the liquid while swirling the gas at the required pressure in a stable state, and it can be uniformly mixed with the liquid. And, the spread dimension can be changed by changing the angle of the inclined groove of the gas flow channel. It is possible to provide a nozzle that is within the circuit width of the substrate and the working distance L3.

The two-fluid nozzle 1 of the first embodiment may be configured as first to third modifications shown in FIGS. 5 to 7.
The two-fluid nozzle according to the modification of the first embodiment shown in FIGS. 5 to 7 has an annular liquid injection port 6 and an annular gas injection port 7 on the outer periphery thereof, and the width dimension L1 of the annular liquid injection port 6 As in the first embodiment, 0.1 mm to 0.5 mm is used, and the outer diameter is increased to 1.5 to 3.5 mm as compared with the conventional product to increase the amount of liquid. Further, the width dimension L2 of the annular gas injection port 7 is also 1.5 to 4 times L1 as in the first embodiment.

The two-fluid nozzle of the first modification shown in FIGS. 5A and 5B is a portion in which the inclined groove 20-1 serving as a swirling gas channel provided in the gas channel protrudes in a step-like manner on the outer peripheral surface of the inner cylinder 2. It is provided through 2h. The outlet on the injection side of the inclined groove 20-1 is in communication with the injection side annular gas flow passage 19 continuous with the annular gas injection port 7 via a flow passage 70 having a triangular cross section. Therefore, the outflow end of the inclined groove 20-1 is located on the outer peripheral side of the annular gas injection port 7.
In the above configuration, the gas swirling from the plurality of inclined grooves 20-1 flows into the flow passage 70 and is swirled in an annular shape, and the gas is swirled in the injection side annular gas flow passage 19 while maintaining the swirling state. It is circulating while.
The other effects and advantages are the same as in the first embodiment, and thus the description thereof is omitted.

The 2 fluid nozzle of a 2nd modification is shown in FIG.
In the second modification, the injection end face 2s of the inner cylinder 2 is 0.1 mm to 0.5 mm inside from the injection end face 5s of the outer cylinder 5, and a part of gas and liquid is internally mixed. Further, the annular gas injection port 7 on the outer periphery surrounding the annular liquid injection port 6 has an inner peripheral surface 5i protruding outward in the axial direction from the annular liquid injection port 6 outwardly spread at an angle θ1. The angle θ1 is in the range of 10 to 30 °.
As described above, if the gas injection ports are expanded outward, the gas pressure can be reduced and the spray range can be expanded slightly.
The other configuration is the same as that of the first modification, so the same reference numerals are given and the description is omitted.

The 2 fluid nozzle of the 3rd modification is shown in FIG.
In the third modified example, the injection side end of the small diameter portion 4a of the flow straightening pin 4 is inclined toward the outer periphery to enlarge the diameter, and the inner peripheral surface 2k of the inner cylinder 2 along the outer periphery side along the inclined portion 4k is also inclined in parallel. ing. As a result, the injection side annular liquid flow channel 8-1 which has been made straight is an inclined flow channel which is inclined outward with the same width toward the injection side. As described above, when the diameter of the injection side annular liquid flow passage 8-1 is expanded toward the injection end, the diameter of the annular liquid injection port 6 can be increased, and the amount of liquid can be increased.
The other configurations and effects are the same as those of the first modification, so the same reference numerals are given and the description is omitted.

FIGS. 8A to 8D show a two-fluid nozzle according to a second embodiment of the present invention.
The second embodiment has the same configuration as the third modification shown in FIG. 7, but as shown in FIGS. 8B and 8C, the outer periphery of the small diameter portion 4a of the rectifying pin 4 and the inner periphery of the inner cylinder 2 are shown. An annular waller 80 is attached between the surfaces, and the straight flow passing through the injection side annular liquid flow channel 8 is swirled. As a result, the liquid is swirled and flowed into the inclined injection side annular liquid flow passage 8-1 continuous to the annular liquid jet port 6, and the liquid is jetted while being swirled from the annular liquid jet port 6.
As in the first embodiment and the first to third modifications, the gas is swirled and jetted from the annular gas injection port 7 on the outer circumference, and the liquid to be jetted while swirling is externally mixed with the gas on the outer circumference .
The other configuration and operational effects are the same as those of the third modification, and the same reference numerals are given and the description is omitted.

The two-fluid nozzle of 3rd Embodiment is shown to FIG. 9 (A) (B).
The two-fluid nozzle is different from the second embodiment in which the liquid is swirled using a warer in that the liquid is swirled using a swirl pin 40 instead of the flow straightening pin.
The turning pin 40 is composed of a small diameter rod portion 40a and a large diameter rod portion 40b, and instead of providing a recess for rectification on the outer peripheral surface of the large diameter rod portion 40b in the axial direction, as shown in FIG. An inclined groove 45 inclined in the direction is provided. By bringing the outer peripheral surface of the large diameter rod portion 40b into contact with the inner peripheral surface of the inner cylinder 2, the outer surfaces of the plurality of inclined grooves 45 provided at equal intervals in the circumferential direction are closed by the inner cylinder 2 It will be 46.
The other configuration is the same as that of the first modification, so the same reference numerals are given and the description is omitted.

The two-fluid nozzle of the present invention is not limited to the above embodiment and modifications, and can be modified within the scope of the present invention.
In addition, the two-fluid nozzle of the present invention is not limited to substrate cleaning, and can be suitably used in applications where two fluids are mixed and jetted.

1 Two-fluid nozzle 2 Inner cylinder 3 Hollow part
DESCRIPTION OF SYMBOLS 4 rectification | straightening pin 4d recessed part 5 outer cylinder 6 cyclic | annular liquid jet nozzle 7 annular gas jet nozzle 8 injection side annular liquid flow path 9 liquid flow path for rectification 17 swirling gas flow path 19 injection side annular gas flow path 20-1 inclined groove

Claims (7)

An inner cylinder, a straightening pin disposed in a hollow portion on the injection side of the inner cylinder, and an outer cylinder disposed on the outer periphery of the inner cylinder,
An annular liquid injection port is provided between the inner peripheral surface of the inner cylinder at the injection side end and the outer peripheral surface of the flow straightening pin, and the annular liquid injection is between the outer peripheral surface of the inner cylinder and the inner peripheral surface of the outer cylinder Provide an annular gas jet that surrounds the mouth,
The flow straightening pin has a small diameter portion on the liquid injection side and a large diameter portion on the opposite side, and an injection side annular liquid flow path is provided between the outer circumference of the small diameter portion and the inner circumferential surface of the inner cylinder. The outer peripheral surface of the diameter portion is brought into contact with the inner peripheral surface of the inner cylinder, and the outer peripheral surface is circumferentially spaced apart to provide an axial recessed portion to provide a plurality of rectifying liquid flow paths. The flow path is communicated with the liquid supply port through a liquid flow path formed of a hollow portion of the inner cylinder in which the flow straightening pin is not disposed.
A plurality of inclined grooves are provided at intervals in the circumferential direction on the outer peripheral surface of the inner cylinder and / or the inner peripheral surface of the outer cylinder in the middle of the gas flow path communicating the gas supply port to the annular gas injection port A swirling gas flow path is provided, and the outlet of the inclined groove is located in the outer peripheral direction from the annular gas injection port, and an inclined annular gas flow path is provided between the outlet of the inclined groove and the annular gas injection port.
The radial dimension between the inner periphery and the outer periphery of the annular liquid injection port is 0.1 mm to 0.5 mm, and the radial dimension between the inner periphery and the outer periphery of the annular gas injection port is 1.5 times the annular liquid injection port A two-fluid nozzle characterized by being set to ~ 4 times.   The injection side end faces of the inner cylinder, the flow straightening pin and the outer cylinder are positioned on the same plane to make an external mixture, or the outer cylinder is made to protrude from the injection side end faces of the inner cylinder and the flow straightening pin to make an internal mixture The two-fluid nozzle according to claim 1.   The injection side annular liquid flow passage connected to the annular liquid injection port has a cylindrical shape having the same shape as the annular liquid injection port, injects the liquid as a direct current parallel to the axial direction from the annular liquid injection port, and the annular gas The injection side annular gas flow path which follows the injection port is made into the same cylindrical shape as the annular gas injection port, and the gas is injected from the annular gas injection port while being swirled in parallel with the axial direction. Two-fluid nozzle.   The two-fluid nozzle according to claim 1 or 2, wherein an inner circumferential surface continuous with the annular gas injection port of the outer cylinder is a straight surface parallel to a central axis, or an inclined surface spreading like a trumpet. The injection side annular gas flow path is a cylindrical flow path parallel to the axial direction, and the injection side annular gas flow path is provided with an inclined gas flow path which is inclined to the outer diameter side, and the inclined gas flow path is provided with the inclined groove. The two-fluid nozzle according to claim 3 , wherein the swirling gas flow path consisting of is continued. A swirling swirler is disposed between the outer periphery of the small diameter portion of the flow straightening pin and the inner circumferential surface of the inner cylinder, and the liquid flowing in the jet side annular liquid flow path is a swirling flow, and the liquid is swirled from the annular liquid jet port two-fluid nozzle according to any one of claims 1 to 5 is injected while. An inner cylinder, a pivot pin disposed in a hollow portion on the injection side of the inner cylinder, and an outer cylinder disposed on an outer periphery of the inner cylinder,
An annular liquid jet port is provided between the inner peripheral surface of the inner cylinder at the jet end and the outer peripheral surface of the swirling pin, and the annular liquid is disposed between the outer peripheral surface of the inner cylinder and the inner peripheral surface of the outer cylinder Providing an annular gas injection port surrounding the injection port;
The turning pin has a small diameter rod portion on the jetting side and a large diameter rod portion on the opposite side, and a jetting side annular liquid flow path is provided between the outer circumference of the small diameter rod portion and the inner circumferential surface of the inner cylinder The outer peripheral surface of the large diameter rod portion is in close contact with the inner peripheral surface of the inner cylinder, and a plurality of inclined grooves inclined with respect to the axis are provided on the outer peripheral surface of the large diameter rod portion circumferentially. Swirling the liquid through the inclined groove, and
A plurality of inclined grooves are provided at intervals in the circumferential direction on the inner cylinder outer peripheral surface and / or the outer cylinder inner peripheral surface in the middle of the gas flow path communicating the gas supply port to the annular gas injection port, A two-fluid nozzle characterized in that a flow channel is provided.

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