JP6474955B2 - Manipulator movement control device and movement control method - Google Patents

Description

  The present invention relates to a movement control device and a movement control method for controlling the movement of a manipulator of an industrial robot (in particular, movement of a work tool attached to the tip of an arm) by a teaching / playback method.

Conventionally, as shown in FIG. 13, Industrial and first movement locus L1 which moves linearly the robot work tool at a position P ₁ from the position P _0, the position P ₁ in the direction of movement is changed in position P ₂ When the second movement locus L2 for moving the work tool linearly is taught, the work tool is moved from the position P _s before the position P ₁ of the first movement locus L1 to the second movement locus L2. technology that moves is known in the third movement trajectory L3 curved to the position P _e in inward turning (Patent Document 1).

In this technique, the first speed control characteristic K of the first movement locus L1 (characteristic indicating the relationship between the movement speed of the work tool and the elapsed time when the work tool is moved along the first movement locus L1) and the first movement locus L1. FIG. 13 shows the second speed control characteristic H of the second movement locus L2 (characteristic showing the relationship between the movement speed of the work tool and the elapsed time when the work tool is moved along the second movement locus L2). When set, for example, as shown in FIG. 14, the deceleration period T _{dec of} the first speed control characteristic K (the period from the deceleration start time t _k2 to the stop time t _k3 ) and the second speed control characteristic H By controlling the movement of the arm of the industrial robot by overlapping the acceleration period T _acc (the period from the movement start time t _h0 to the constant velocity start time t _h1 ), the work tool is moved to the position P _s (hereinafter referred to as “inward rotation”). The third movement from the start position P _s ") After moving inward along the locus L3 and moving to a position P _e on the second movement locus L2 (hereinafter referred to as “inner turning end position _Pe ”), it moves to the position P ₂ along the second movement locus L2. It is something to be made.

When the movement of the arm of the industrial robot is controlled based on the teaching point of the first movement locus L1 and the first speed control characteristic K in a state where the work tool is stopped at the position P ₀ , From the t _k0 to the deceleration start time t _k2, it moves on the first movement locus L1. From the deceleration start time t _k2 to the stop time t _{k3, the} control based on the teaching point of the second movement locus L2 and the second speed control characteristic H is the teaching point of the first movement locus L1 and the first speed control characteristic K. Therefore, the movement position of the work tool is calculated based on the movement position in the movement direction of the first movement locus L1 calculated for each elapsed time from the deceleration start time t _k2 and the second movement locus L2. The movement position in the movement direction is a vector synthesized position, and the movement locus of the work tool is a curved third movement locus L3 (hereinafter referred to as “inner locus L3”) as shown in FIG. Since the control based on the teaching point of the second movement locus L2 and the second speed control characteristic H is performed from the stop time t _k3 (movement start time t _h0 ) to the stop time t _h3 , It moves from the end position _Pe to the position P ₂ on the second movement locus L2.

  In the control shown in FIG. 14, the speed at which the work tool moves along the inward trajectory L3 changes as indicated by the dotted line in FIG. 14, so the deceleration at the inward direction is greater than the deceleration of the first speed control characteristic K. Therefore, the acceleration is also larger than the acceleration of the second speed control characteristic H. For this reason, when the angle at which the work tool changes its direction (the angle between the first movement locus L1 and the second movement locus L2) becomes an acute angle, there is a problem that the load applied to the work tool becomes excessive during the inward rotation.

  In order to solve this problem, as shown in FIG. 15, the slopes of the deceleration curve of the first speed control characteristic K and the acceleration curve of the second speed control characteristic H are changed so as to loosen in the middle, and the inward period There has also been proposed a method of controlling so that the deceleration and acceleration are not excessively increased (Patent Document 2).

JP-A 64-26911 Japanese Patent Laid-Open No. 8-123531

In the conventional control for turning the work tool inward, the movement of the work tool is controlled based on the teaching information (teaching point information and moving speed information) of the first movement locus L1 (first speed control characteristic). By starting the control of the movement of the work tool based on the teaching information of the second movement locus L2 at a predetermined timing within the deceleration period T _{dec of} K), the work tool draws the inner locus L3 and the second movement locus. It moves to L2. Inward turning end position P _e at the inward turning start position P _s and the second moving path L2 in the first movement locus L1, the acceleration start of the second speed control characteristic H in the deceleration period T _dec of the first speed control characteristic K Since it is determined by the setting of the deceleration stop time t _k2 of the first speed control characteristic K in the acceleration period T _acc of the time t _h0 and the second speed control characteristic H, depending on the conditions of the movable range of the work tool, If set inward turning start position P _s and inward turning end position P _e becomes inadequate results.

  For example, in a substrate transfer robot used in a manufacturing process of a semiconductor substrate, a liquid crystal substrate, etc., as shown in FIG. 16, a hand (not shown) attached to the tip of the arm of the substrate transfer robot is The substrate 200 is moved in the depth direction of 200 to place a substrate in the slot 201 in the cassette 200, and an operation of taking out the substrate placed in the slot 201 is performed.

Regarding the substrate storing / extracting operation, the movement locus L of the hand is taught in advance to the substrate transport robot. Movement track L is a movement locus L _a horizontal direction through the center of the entrance of the lower cassette 200, a moving locus L _c in the horizontal direction passing through the center of the entrance of the upper cassette 200, in the depth direction of the cassette 200 And a vertical movement trajectory L _b passing through the approximate center.

Movement track L _a is horizontally linearly moving the hand from the lower entrance center than a predetermined distance short of the set take-out start position RB to the position of the cassette 200 to the bottom position EB, which is set in the cassette 200 (horizontal movement ). The movement trajectory L _c is a horizontal linear movement (horizontal movement) from the storage start position RT set at a position a short distance from the center of the upper entrance of the cassette 200 to the top position ET set in the cassette 200. ). The top position ET is set on a vertical line passing through the bottom position EB. The movement locus _Lb is a locus for linearly moving the hand vertically (vertically) from the bottom position EB to the top position ET or from the top position ET to the bottom position EB.

When taking out the substrate stored in the slot 201 in the cassette 200, the substrate transfer robot moves the hand to the take-out start position RB, and then moves the hand in the order of the movement locus L _a , the movement locus L _b , and the movement locus L _c. To remove the substrate (not shown). When the hand moves vertically upward from the bottom position EB, the substrate is placed on the hand, and in this state, the hand moves from the top position ET to the storage start position RT, whereby the substrate is moved from the cassette 200 to the storage start position RT. To be taken out.

When the substrate transfer robot stores the substrate in the slot 201 in the cassette 200, the substrate transfer robot moves the hand that has taken out the substrate from the other cassette 200 to the storage start position RT, and then moves the movement locus L _c , the movement locus L _b , in the order of the locus L _a by moving the hand accommodating the substrate in the slot 201. When the hand moves vertically downward from the top position ET, the board rests on the slot 201 and leaves the hand, and the hand moves from the bottom position EB to the take-out start position RB in an empty state, so that the board moves. It is stored in the cassette 200.

For example, as shown in FIG. 17, the moving position of the hand is taught at a position RA on the vertical line passing through the storage start position RT and a predetermined distance away from the storage start position RT. as the movement locus of the time to be stored in 201, consider the inward turning locus L3 when the movement trajectory L _d to vertically move upward a hand from a position RA to the retracted starting position RT is taught.

In this case, as shown in FIG. 17, the portion of the storage start position RT that connects the movement locus L _d and the movement locus L _c , the portion of the top position ET that connects the movement locus L _c and the movement locus L _b , connecting the moving locus L _b and movement track L _a can be provided with inward turning locus L3 in part of the bottom position EB.

For example, in the case where the inner track L3 is provided at the storage start position RT, in the conventional method, the inner track start position P _s on the movement track L _d is a distance D _s from the take-out start position RB (hereinafter referred to as “inner track start distance D”). since it is determined by the called.) _s ", this inward turning start distance D _s is too long, the moving locus L distance from the retracted start position RT of inward turning end position P _e which is set on the _c D _e (hereinafter," The inward turning end distance D _e ”) also becomes longer, and the inward turning locus L3 becomes a locus that moves inside far away from the storage start position RT, as shown by the dotted line in FIG. This inward trajectory L3 is effective in terms of time tact shortening, but when the substrate placed on the hand protrudes from the slot 201 to the front end side, the hand moves to the height position of the slot 201. In some cases, the substrate W may interfere with the slot 201.

On the other hand, if the inward turning start distance D _s is made too short in order to avoid the collision of the board with the slot 201, the inner turning locus L3 becomes closer to the storage start position RT as shown by the thin line in FIG. Therefore, the time tact shortening effect cannot be expected.

In the case of providing the inward turning locus L3 in part or portion of the bottom position EB top position ET, movement track L _b of length movement track L _a, since very short with respect to L _c, set on a moving locus L _b The inner end distance D _e to be made becomes very short. Therefore, when as much as possible to try to enable the effect of time tact shorter, it is necessary to increase the inward turning start distance D _s is set to the moving locus L _a and the moving locus L _c as much as possible. In the conventional setting method of the inner loop locus L3, the inner loop start distance D _s and the inner loop end distance _De are set to approximately the same distance by the two speed control characteristics K and H, so the inner loop start distance D _s and the inner loop end distance D are set. If varied greatly _e, as shown in FIG. 18, it is impossible to set the inner loop start position P _s or inward turning end position P _e in place. Although FIG. 18 shows an example of a case of taking out the substrate W from the cassette 200, in this example, is disposed above the inward turning end position P _e is the substrate W, the hand is to receive the substrate W during inward turning movement, The receiving position of the substrate W in the hand varies.

  The example of FIGS. 17 and 18 is an example of a movement trajectory that moves the hand in the vertical direction, but the same applies to the case of the movement trajectory that moves the hand in the horizontal direction as shown in FIG.

FIG. 19 shows a position RA ′ on a horizontal line passing through the take-out start position RB and separated from the take-out start position RB by a predetermined distance, and when a substrate (not shown) is stored in the slot 201 in the cassette 200. This is an example in which a movement locus L _d ′ in which a hand (not shown) is horizontally moved from the position RA ′ to the storage start position RT in the horizontal direction is taught.

In the case of FIG. 19, since the distance from the opening surface of the cassette 200 at the position RA ′ is relatively long, there is little possibility that the substrate placed on the hand collides with the side wall of the cassette 200. For this reason, the inward start distance D _s set on the movement locus L _d ′ can be made relatively long. However, when the inward start distance D _s is set short, the time tact can be effectively shortened. The problem that cannot be done.

As described above, based on the first speed control characteristic K set on the first movement locus L1 and the second speed control characteristic H set on the second movement locus L2, the inner rotation start position P _s ( In the method of setting the inward turning start distance D _s ) and the inward turning end position _Pe (inner turning end distance D _e ), when the movement range of the work tool is limited by an obstacle, the inward turning start position P _s and the inward turning end when the position P _e a can not be set properly there is a problem that arises.

  The present invention has been made in view of the above-described problems, and even when the movement range of the work tool is limited by an obstacle, the interference with the obstacle is surely prevented, and the optimum An object of the present invention is to provide a manipulator movement control device and a movement control method capable of moving a work tool inwardly in a time tact.

  The manipulator movement control device provided in the first aspect of the present invention is characterized in that the first, second, and third position information different from each other, and the work tool attached to the tip of the manipulator arm are the first. Information on the first speed control characteristic for controlling the speed of the work tool when the work tool is moved from the second position to the second position, and a straight line from the second position to the third position. The second speed control characteristic information for controlling the speed of the work tool when the work tool is moved is previously taught, and the work tool is connected to the first position and the second position. When the first movement locus and the second movement locus connecting the second position and the third position are moved to move from the first position to the third position, the first movement Set inward start position on the track In addition, an inward end position is set on the second movement trajectory, and the work tool is moved inwardly from the inward start position to the inward end position along a curved inward trajectory passing inward from the second position. A movement control device for a manipulator, wherein an inner circle range information storage means for storing information of an inner circle range including the preset second position, and a first intersection between the inner circle range and the first movement locus And the work tool moves from the first intersection to the second position based on the first intersection, the second position, and the first speed control characteristic. A first movement time calculating means for calculating a required first movement time; a second intersection where the inner radius range and the second movement locus intersect; and the second intersection and the second Position and said A second movement time calculation means for calculating a second movement time required for the work tool to move from the second position to the second intersection based on the speed control characteristic of the second; and An inner time setting means for setting an inner time when the work tool is moved along the inner track using the first movement time and the second movement time; and the inner time and the first and second times. And an inward start / end position setting means for setting the inward start position and the inward turn end position using the speed control characteristic (claim 1).

  According to a preferred embodiment of the manipulator movement control device, the inner-circumference range may be a range having a predetermined three-dimensional shape. Further, the inward rotation range may be a range having a predetermined two-dimensional shape set in a plane including the first position, the second position, and the third position (Claim 3). The two-dimensional shape may be a rectangle (claim 4).

  Further, according to a preferred embodiment of the movement control device for the manipulator, the first movement time calculation means calculates a first distance from the first intersection to the second position, and The first movement time is calculated based on a first distance and the first speed control characteristic, and the second movement time calculating means is configured to calculate the first movement time from the second position to the second intersection. 2 is calculated, and the second travel time is calculated based on the second distance and the second speed control characteristic. The inner time setting means compares the first movement time and the second movement time, and sets the shorter movement time as the inner time (Claim 6).

  According to a second aspect of the present invention, there is provided a manipulator movement control method comprising: position information of first, second, and third positions different from each other; and a work tool attached to a tip of a manipulator arm. Information on the first speed control characteristic for controlling the speed of the work tool when the work tool is moved from the second position to the second position, and a straight line from the second position to the third position. The second speed control characteristic information for controlling the speed of the work tool when the work tool is moved is previously taught, and the work tool is connected to the first position and the second position. When the first movement locus and the second movement locus connecting the second position and the third position are moved to move from the first position to the third position, the first movement Set inward start position on the track In addition, an inward end position is set on the second movement trajectory, and the work tool is moved inwardly from the inward start position to the inward end position along a curved inward trajectory passing inward from the second position. A manipulator movement control method, comprising: calculating a first intersection point where an inward rotation range including the second position set in advance and the first movement locus intersect, and the first intersection point and the second A first calculation step of calculating a first movement time required for the work tool to move from the first intersection point to the second position based on the first position and the first speed control characteristic; , Calculating a second intersection point where the inner radius range and the second movement locus intersect, and based on the second intersection point, the second position, and the second speed control characteristic, the work tool Is the second position A second calculation step for calculating a second movement time required to move to the second intersection, a first movement time calculated in the first calculation step, and a calculation in the first calculation step. A first setting step for setting an inward time when the work tool is moved along the inward trajectory using the second movement time that has been set, and the inward rotation set in the first setting step And a second setting step of setting the inner loop start position and the inner loop end position using time and the first and second speed control characteristics.

  According to the present invention, when the work tool is moved from the first position to the third position by moving the first movement locus and the second movement locus, the first movement locus and the second movement locus are An inward rotation range including the second position is set in advance at the second position to be connected, and the work tool is moved from the first intersection where the inner rotation range and the first movement locus intersect to the second position. The first movement time required for the movement and the second movement time required for moving the work tool from the second position to the second intersection where the inner movement range and the second movement locus intersect are obtained. , After setting the inward time when the work tool moves along the inward trajectory based on the second travel time, the inward start position on the first travel trajectory and the second travel trajectory are set based on the inward time. Set the position to end inward of the Was reliably prevented, and the work in an optimum inner loop trajectory can shorten the tact time as possible tool can be moved inward turning.

It is a figure which shows an example of a board | substrate conveyance robot. It is a figure which shows an example of the movement locus | trajectory of the hand taught to a board | substrate conveyance robot, in order to accommodate a board | substrate in a cassette or to take out from a cassette. It is a figure which shows the opening surface of a cassette. It is a figure for demonstrating the method of setting an inward track | orbit in the part of the bottom position in the case of moving a hand inside a cassette. Two movement trajectory L _a which are connected to each other, inner loop by using the L _b to the speed control characteristic K _a are set respectively, inward turning start distance and the inward turning ends distance set using K _b and inward turning range AR ₁ It is a figure for demonstrating the method of setting an orbit. It is a figure which shows an example of the inner periphery track | orbit set using an inner periphery range. It is a figure which shows the example of a setting of the inner periphery range in the case of making it approach into a cassette along a movement locus | trajectory after moving a hand from the arbitrary positions outside the cassette on a vertical plane to a take-out start position. Two movement trajectory L _d which are connected to each other, inner loop with a speed control characteristic k _d, inward turning start distance and the inward turning ends distance set by using K _a and inward turning range AR ₂ to be set for L _a It is a figure for demonstrating the method of setting an orbit. It is a figure which shows an example of the inner periphery range set in order to move a hand inwardly in and out of a cassette along a movement trace within a horizontal plane. It is a block block diagram regarding the movement control of the hand of the movement control apparatus of a board | substrate conveyance robot. It is a figure which shows an example in the case of setting the inner periphery range of a three-dimensional shape. It is a flowchart which shows the control procedure of the inward movement of the hand which a movement control apparatus performs. It is a figure which shows an example of the 1st speed control characteristic set to the 1st movement locus, and the 2nd speed control characteristic set to the 2nd movement locus. It is a figure which shows an example of how to combine the 1st speed control characteristic and the 2nd speed control characteristic when moving a work tool with an internal movement locus | trajectory. It is a figure which shows the other example of how to combine the 1st speed control characteristic and the 2nd speed control characteristic when moving a work tool with an internal movement locus | trajectory. It is a figure which shows an example of the movement locus | trajectory of the hand for accommodating a board | substrate in a cassette or taking out from a cassette. It is a figure which shows the 1st example from which the inner periphery locus | trajectory of a hand becomes inappropriate. It is a figure which shows the 2nd example from which the inner periphery locus | trajectory of a hand becomes inappropriate. It is a figure which shows the 3rd example from which the inner periphery locus | trajectory of a hand becomes inappropriate.

  A preferred embodiment of the present invention will be specifically described with reference to the accompanying drawings. In the following description, an industrial robot used for transporting a substrate in a manufacturing process of a semiconductor substrate or a liquid crystal substrate will be described.

  In the manufacturing process of semiconductor substrates, liquid crystal substrates, etc., multiple substrates are stored in multiple stages in a substrate transport container called a cassette, and the substrate transport container is transported to a process device or inspection device to process the substrates in the substrate transport container. And inspection processing is performed. In the process apparatus and the inspection apparatus, a substrate transfer robot is used as an industrial robot for storing a substrate in a transferred cassette or taking out a substrate from the cassette.

  The present invention relates to movement control of a work tool for an industrial robot, and more particularly to control of inward movement. In the following description, a hand (a member that holds a substrate), which is a work tool of the substrate transport robot, moves inwardly when the substrate such as a semiconductor substrate or a liquid crystal substrate is stored in or removed from the cassette. The control will be described.

  FIG. 1 is a perspective view showing an example of a substrate transfer robot.

  The substrate transport robot 100 takes out the substrates W stored in multiple stages in the cassette 200 from the cassette 200 and transports them to a processing device such as a process device or an inspection device (not shown) disposed on the opposite side of the cassette 200, for example. On the contrary, an operation of discharging the processed substrate W from the processing apparatus and returning it to the cassette 200 is performed.

  With the substrate transfer robot 100 facing the cassette 200, the local coordinates with the X direction as the direction from the substrate transfer robot 100 toward the cassette 200, the Y direction as the direction orthogonal to the X direction in the horizontal plane, and the Z direction as the vertical direction When the system is set, the substrate transport robot 100 includes an X-direction drive mechanism 102, a Y-direction drive mechanism 103, and a Z-direction drive mechanism 104 for independently moving the hand 101 holding the substrate W in each of the XYZ directions. I have.

  The Y-direction drive mechanism 103 mounts the entire substrate transfer robot 100 and has a base board 103a configured to be movable along a guide rail 105 laid on the bottom surface, and a drive source for the base board 103a such as a motor. And a Y-direction drive unit 103b accommodated therein.

  The Z-direction drive mechanism 104 is fixed at an appropriate position on the base board 103a. The Z-direction drive mechanism 104 is configured to move up and down a prismatic support 104a, a Z-axis 104b supported in the support 104a so as to be lifted and lowered, and a Z-axis 104b composed of a motor, a hydraulic cylinder, and the like. A Z-direction drive unit. In addition, since the Z direction drive part is provided in the bottom part in the support body 104a, it is not visible in the figure.

  The X direction drive mechanism 102 is provided on the upper surface of the Z axis 104b. The X-direction drive mechanism 102 includes a link in which a pair of arms 102a and 102b are rotatably connected, and a hand 101 is attached to the tip of the arm 102b. The hand 101 is a U-shaped plate member in which a pair of elongated holding portions 101b and 101c are extended on a front side portion of a horizontally long rectangular support portion 101a. The upper surface of the hand 101 is a substrate placement surface on which the substrate W is placed. The substrate transfer robot 100 places the substrate W on the substrate placement surface while holding the hand 101 horizontally, and moves the hand 101 up and down in this state to rotate and move the XY plane. 200 is placed in the slot 201 in the substrate 200 (storage of the substrate W in the cassette 200), and the substrate W placed in the slot 201 is received by the hand 101 and taken out of the cassette 200 (from the cassette 200 of the substrate W). Take-out).

  The cassette 200 forms a rectangular parallelepiped box, and at least a side surface facing the substrate transfer robot 100 is opened as a surface for taking in and out the substrate W. A plurality of slots 201 for storing the substrates W in multiple stages are provided on both side surfaces of the cassette 200 so as to protrude inward. Slots 201 are attached to both side surfaces in the cassette 200 at height positions corresponding to the respective steps, and both end portions in the width direction of the substrate W are placed on the upper surfaces of the pair of slots 201 at the same height position. The substrate W is accommodated in a step at the height position. The gap between the pair of slots 201 facing each other in the cassette 200 is arranged so that the hand 101 can move up and down without interfering with the slots 201 in the cassette 200. It is set longer than the length in the direction (the width of the hand 101).

  Next, a method for controlling the movement of the hand 101 for storing the substrate W in the cassette 200 and taking out the substrate W stored in the cassette 200 from the cassette 200 using the hand 101 will be described.

  FIG. 2 is a diagram showing an example of the movement trajectory of the hand 101 taught to the substrate transport robot 100 in order to store the substrate W in the cassette 200 and take it out from the cassette 200. (A) is a perspective view, (b) is a view seen from the side. In order to simplify the description, the cassette 200 is of a type in which a pair of slots 201 are provided at the center in the height direction, and the substrate W is stored in only one stage.

The movement trajectory L includes three linear movement trajectories L _a , L _b , and L _c that are connected to each other. The movement locus La is _a locus for moving the hand 101 straight and horizontally (horizontal movement) between the take-out start position RB and the bottom position EB. The take-out start position RB is a position of the hand 101 that faces the opening surface of the cassette 200 when the hand 101 causes the cassette 200 to take out the substrate W.

The space in the cassette 200 is divided into an upper space S _A (hereinafter referred to as “upper space S _A ”) and a lower space by a pair of slots 201 provided so as to protrude substantially in the center in the height direction on both sides. S _B (hereinafter referred to as “lower space S _B ”). Accordingly, the opening surface of the cassette 200 is also divided into an opening surface 200A and an opening surface 200B corresponding to the two spaces S _A and S _B. As shown in FIG. 3, the opening surfaces 200 </ b> A and 200 </ b> B have a horizontally long rectangular shape whose height dimension is less than half of the width dimension. Extraction start position RB is a position a predetermined distance away D _x1 by a horizontal distance of the front side from the position O _B of the approximate center of the lower opening surface 200B.

Bottom position EB is substantially corresponding to the center position of the lower space S _B on the straight line extended horizontally under the space S in _B of the cassette 200 from the take-out start position RB. If the depth dimension of the lower space S _B and D _x2, the distance between the position O _B and the bottom position EB is about D _x2 / 2. The take-out start position RB and the bottom position EB are taught to the substrate transfer robot 100 as one of teaching points.

The movement locus L _c is a locus for moving the hand 101 linearly (horizontal movement) horizontally between the storage start position RT and the top position ET. The storage start position RT is a position of the hand 101 that faces the opening surface of the cassette when the hand 101 performs the storage operation of the substrate W on the cassette 200. Storage start position RT is a position a predetermined distance away D _x1 by a horizontal distance of the front side from the position O _A of the approximate center of the upper opening surface 200A. Position O _A is because there on the vertical line that passes through the position O _B, housed start position RT also on the vertical line that passes through the take-out start position RB. And the height dimension of the opening surface of the cassette and D _z1, the distance position O _B and the position O _A, the distance of the storage start position RT and the retrieval starting position RB is about D _z1 / 2.

The movement trajectory L _b is a trajectory for moving the hand 101 linearly (vertically moving) vertically between the top position ET and the bottom position EB. Top position ET is a position corresponding to substantially the center of the space S _A on on a straight line extended horizontally from the storage start position RT over the space S _A of the cassette 200. The top position ET is on a vertical line passing through the bottom position EB. Accordingly, the distance between the position O _A and the top position ET is the same as the distance between the position O _B and bottom position EB (about D _x2 / 2). The storage start position RT and the top position ET are also taught to the substrate transfer robot 100 as one of the teaching points.

A plane (vertical plane) including the storage start position RT, the top position ET, the bottom position EB, and the take-out start position RB forms a vertical plane that bisects the space in the cassette 200 to the left and right. Accordingly, the movement locus L connecting the movement locus L _a , the movement locus L _b, and the movement locus L _c is a movement locus that forms a U-shape on the vertical plane.

When the substrate transport robot 100 stores the substrate W in the cassette 200, the hand 101 on which the substrate W is placed is temporarily moved from an arbitrary position RA in the space outside the cassette 200 (however, the storage start position RT is not included). , Moved from the storage start position RT to the take-out start position RB via the top position ET and the bottom position EB (movement locus L _c , movement locus L _b , movement locus L _a in this order). Move along the route to be moved. When the substrate transfer robot 100 takes out the substrate W from the cassette 200, the substrate transfer robot 100 temporarily moves the empty hand 101 from the position RA to the extraction start position RB, and passes from the extraction start position RB to the bottom position EB and the top position ET. To the storage start position RT (the movement locus L _a , the movement locus L _b , and the movement locus L _c in this order).

When the hand 101 is moved along the taught movement loci L _a , L _b , and L _c , the hand 101 moves so as to draw a U-shape as shown in FIG. In the present embodiment, control is performed so that the hand 101 moves along the optimal inner trajectory in the bent portion of the movement trajectory L. The optimal inward trajectory is a trajectory that can reliably prevent the hand 101 from colliding with the cassette 200 and can shorten the tact time as much as possible.

  Next, a control method for moving the hand 101 along an inward trajectory will be described.

First, when the cassette 200 is taken out of the substrate W, the inner loop trajectories of moving the hand 101 from moving locus L _a in the moving locus L _b in the cassette 200 as an example will be described with reference to FIG.

If the cassette 200 is taken out of the substrate W, the substrate transfer robot 100, and teaching information Ja for moving along the hand 101 in the movement track L _a, teaching information for moving the hand 101 in the movement track L _b Jb is used to move the hand 101 from the take-out start position RB to the top position ET via the bottom position EB. The teaching information Ja includes position information on the extraction start position RB and bottom position EB, and speed control information for controlling the speed of the hand 101 when the hand 101 moves horizontally between the extraction start position RB and the bottom position EB. The teaching information Jb includes position information on the bottom position EB and the top position ET, and a speed for controlling the speed of the hand 101 when the hand 101 moves vertically between the bottom position EB and the top position ET. Control information. The position information such as the extraction start position RB is information taught as information on the movement position of the hand 101, for example.

In order to reliably prevent the hand 101 from colliding with the cassette 200 when the hand 101 is moved inwardly at the bent portion of the L-shaped movement locus connecting the movement locus L _a and the movement locus L _b , set L _a inward turning start position P _s that portion to initiate inward turning movement of the cassette 200, necessary to set the internal rotation end position P _e to terminate the inward turning movement in the lower part of the space S in _B moving path L _b There is. Distance below the space S portion of the _B movement trajectory L _b (about D _z1 / 4) is so short compared to the length of the portion of the cassette 200 of the movement track L _a (about D _x2 / 2), in the conventional method of setting the inward turning start position P _s and the inward turning end position P _e based on the acceleration characteristics of the speed control information included in the deceleration characteristic and teaching information Jb of the speed control information included in the instruction information Ja, appropriate it is difficult to set the inner loop start position P _s and inward turning end position P _e in position.

In the present embodiment, set as indicated by a dotted line in FIG. 4, inner loop locus L _sc settable range AR ₁ containing bottom position EB under the space S _B (hereinafter, referred to as. "Inward turning range AR _1") and Then, the inward rotation start position P _s and the inward rotation end position _Pe are set using the inward rotation range AR ₁ and the speed control information of the movement trajectory L _a and the movement trajectory L _b .

The moving locus L _a and the moving locus L _b is on a vertical plane, inward turning range AR ₁ is set to vertical plane of the vertical plane cuts the lower space S _B vertically. Position of the inward turning range AR ₁ is substantially position the bottom position EB is positioned at the center of the inward turning range AR _1. The shape of inward turning range AR _1, as shown in FIG. 4 is a horizontally long rectangular shape in the depth direction of the lower space S _B. Since the inner circle locus L _sc is set in the inner circle range AR ₁ , the inner circle start position P _s is the bottom position EB and the intersection P _a where the movement locus L _a intersects the vertical side of the inner circle range AR _{1 on} the opening surface 200B side. is set between the, inward turning end position P _e, the movement locus L _b is set between the intersection point P _b and the bottom position EB intersecting the upper horizontal side of the inward turning range AR _1.

When the size of the inward turning range AR ₁ oblong rectangular and D _dx (length in the X-direction) × D _dz (length in the Z direction), a length D _dx in the X direction, the X direction of the lower space S _B Length are possible set up D _x2, length D _dz in the Z direction, the Z direction of the lower space S _B in consideration of contact with the substrate W hand 101 length D _z1 / 2 of about 1/2 Set to degree. Maximum value of the distance (inner loop start distance D _s) between the inward turning start position P _s and the bottom position EB, the distance (inner loop termination distance between the D _dx / 2, and the bottom position EB and inward turning end position P _e The maximum value of D _e ) is D _dz / 2.

Between the substrate transfer robot 100, a speed control characteristic K _a for moving the hand 101 between the take-out start position RB and bottom position EB along the movement track L _a, a bottom position EB and the top position ET The speed control characteristic _Kb for moving the hand 101 along the movement locus Lb is set as shown in FIG.

The hand 101 passes through the intersection point P _a at the time t _s of the deceleration period T _dec movement trajectory L _a movement to start the speed control characteristic from K _a of, until time t _a3 to stop movement from the time t _s When the travel time of the "T _a", the distance the hand 101 in the moving time T _a is moved, since a D _dx / 2, moving time T _{a is, D dx / 2 = (V} s × T a) / 2: than (V _s speed of the time t _s),
T _a = D _dx / V _s (1)
It is represented by

The hand 101 passes through the moving track L _b time t _e the intersection P _e of the acceleration period T _acc speed control characteristic K _b move from the start of, from the time t _b0 to start moving to the time t _e When the moving time is "T _b", the distance the hand 101 moves in the movement time T _b, since a D _dz / 2, moving time T _{a is, D dz / 2 = (V} e × T b) / 2 (V _e : speed at time t _e )
T _b = D _dz / V _e (2)
It is represented by

_Assuming that the inner time during which the hand 101 moves along the inner trajectory L _sc is “T _sc ”, if T _a = T _b , the movement time _Ta or the movement time T _b is set to the inner time T _sc , then inward turning start position P _s and inward turning end position P _e of, since each is the intersection P _a and the intersection P _b, you are possible to set the inward turning locus L _sc in inward turning range AR _1.

On the other hand, if T _a <T _b, by setting the movement time T _b to inward turning time T _sc, inward turning end position P _e is the intersection point P _b, inward turning start time t _s in the velocity control characteristic K _a is faster than if the inner loop start position P _s and the intersection P _a, inward turning start position P _s will be set outside the intersection P _a. Conversely, setting the movement time T _a to the inner loop time T _sc, as shown in FIG. 6 (a), the inward turning start position P _s is the intersection P _a, and the inner loop end position P _e, the speed control characteristic K _b since inner loop end time t _e is faster than when the intersection P _b the inward turning end position P _e in, will be set at a position shifted to the bottom position EB side than the intersection point P _b.

Similarly, if the T _b <T _a, by setting the movement time T _a to the inner loop time T _sc, inward turning start position P _s is the intersection P _a and becomes, inward turning end time in the velocity control characteristic K _b t _e There slower than when the intersection P _b the inward turning end position P _e, inward turning end position P _e will be set outside the intersection P _b. Conversely, setting the movement time T _b to inward turning time T _sc, as shown in FIG. 6 (b), inward turning end position P _e is an intersection P _b, and the inner loop start position P _s, the speed control characteristic K _a since inner loop start time t _s is slower than when the intersection P _a a inward turning start position P _s in, will be set at a position shifted to the bottom position EB side than the intersection point P _a. Therefore, in the case of T _a <T _b, the movement time T _a set inward turning time T _sc, in the case of T _b <T _a, by setting the movement time T _b to inward turning time T _sc, inward turning locus L _sc can be set within the inner range AR ₁ .

In the present embodiment, when the hand 101 is moved inward within the cassette 200, the inner turn start distance D _s and the inner turn end distance _De are calculated using the inner turn range AR ₁ , the movement locus L _a, and the movement locus L _b. and further calculated by using the inner loop start distance D _s and the inward turning ends distance D _e and the speed control characteristic K _a and the speed control characteristic K _b, and calculates a movement time T _a and the moving time T _b, T _a ≦ T _In the case of _b , the movement time T _a is set to the inward rotation time T _sc , and in the case of T _b ≦ T _a , the movement time T _b is set to the inner rotation time T _sc , so that the hand 101 is in the inner rotation range AR ₁ . _Is controlled so as to move the inward trajectory L _sc passing through.

The example of FIG. 4 is an example in the case where the substrate W is taken out from the cassette 200. However, in the case where the substrate W is stored in the cassette 200, the inner circle locus L through which the hand 101 passes through the inner circle range AR ₁ ′ is similarly processed. Controlled to move _sc . Inward turning range AR ₁ 'in this case is provided in the upper space S _A, the upper space S _A and the lower space S _B are substantially the same shape, the moving locus L _a and movement track L _c for the slot 201 from being set at symmetrical positions in the vertical, inward turning range AR ₁ 'is up and down relative to the slot 201 in the upper space S _a provided at symmetrical positions, the shape is the same as the inward turning range AR ₁ .

Therefore, when the substrate W is stored in the cassette 200, the inner circuit start distance D _s and the inner circuit end distance _De are calculated using the inner circuit range AR ₁ ′, the movement track L _c, and the movement track L _b , and the calculated inner circuit The travel time T _c and the travel time T _b are calculated using the start distance D _{s, the} inner end distance D _e , the speed control characteristic K _c, and the speed control characteristic K _b, and if T _c ≦ T _b , T _{When sc} = T _c and T _c ≧ T _b are set, T _sc = T _b is set so that the hand 101 is moved so as to move the inner circle locus L _sc passing through the inner circle range AR ₁ ′. The

The speed control characteristic K _c is a speed control characteristic for moving the hand 101 between the storage start position RT and the top position ET along the movement locus L _c , and the movement time T _c is a speed control characteristic. K _c deceleration period T _dec time t _s time from t _a3 of (mobile stop time) until the distance from the intersection P _c of the movement track L _c and inward turning range AR ₁ 'to the top position ET (D _dx / 2) It is the travel time when moving. Movement track L _a and movement track L _c, since a locus of movement of parallel identical distance from each other, the waveform of the speed control characteristic K _c, is identical to the waveform of the speed control characteristic K _a.

Therefore, the inner trajectory L _{sc (} set at the top position ET when the substrate W is stored in the cassette 200 is the inner trajectory L _sc (set at the bottom position EB when the substrate W is taken out from the cassette 200). 4 has the same shape as a trajectory obtained by inverting the vertical trajectory _{Lsc in} FIG.

4, after is an example of a case of the inward turning move the hand 101 in the interior of the cassette 200, which outside of the cassette 200 to move the hand 101 from an arbitrary position RA in extraction start position RB, movement trajectory L _a In the same way, it is also possible to enter the cassette 200 along the movement path L _c and then move the hand 101 inward along the movement locus L _c after moving the hand 101 from the arbitrary position RA to the storage start position RT. Can be controlled.

7, after moving the hand 101 from an arbitrary position RA that is external to the cassette 200 on the vertical plane extraction start position RB, the inner loop range when caused to enter into the cassette 200 along the movement track L _a It is a figure which shows the example of a setting.

The position RA is located on a straight line inclined to the left side by an angle φ with respect to the vertical line passing through the extraction start position RB. Position RA is taught in the substrate transfer robot 100, when moving along the moving path L _d connecting the position information of the position RA and the retrieval starting position RB, the position RA and the retrieval starting position RB hand 101 A speed control characteristic K _d for controlling the speed of the hand 101 is also set in the substrate transport robot 100.

In the example of FIG. 7, as indicated by a dotted line, an inner circle range AR _{2 in} which an inner circle locus L _sc including the extraction start position RB can be set is set outside the cassette 200. When the inward range AR ₂ is set outside the cassette 200, there is no need to consider that the hand 101 contacts the substrate W as in the case where the inner range AR ₁ is set inside the cassette 200. The length in the direction can be set up to the height dimension D _z1 / 2 of the lower opening surface 200B. Therefore, in the example of FIG. 7, if the distance between the position RA in the X direction and the take-out start position RB is D _x3 , the inward rotation range AR ₂ is (D _x1 + D _x3 ) (length in the X direction) × D _This is a horizontally long rectangular area having a size of _z1 / 2 (length in the Z direction). The position of the vertical side on the cassette 200 side of the inner rotation range AR ₂ is made to coincide with the opening surface 200B of the cassette 200.

In the example of FIG. 7, the size although the X-directional length of the inward turning range AR ₂ in (D _x1 + D _x3), the movement track L _d intersects the lower horizontal side of the inner loop range AR ₂ If there is, the length in the X direction of the inner range AR ₂ may be shorter than (D _x1 + D _x3 ). Further, in the example of FIG. 7, the position of the vertical side on the cassette 200 side of the inward range AR ₂ is made to coincide with the opening surface 200B of the cassette 200, but the position of the vertical side is an appropriate distance from the opening surface 200B of the cassette 200. May be separated.

Since the inner circle locus L _sc is set within the inner circle range AR ₂ , the inner circle start position P _s is defined by the intersection P _d where the movement locus L _d intersects the lower side of the inner circle range AR ₂ and the extraction start position RB. is set between, inner loop end position P _e, the movement locus L _a is set between the intersection O _B and the retrieval starting position RB intersecting the vertical side of the cassette 200 side of the inner loop range AR _2.

In the example of FIG. 7, the calculated inner loop start distance D _s and inner loop terminates distance D _e by using a movement trajectory L _d and the moving locus L _a and inward turning range AR _2, inner loop start distance D _s and the inward turning ends distance was further calculated by using the D _e and the speed control characteristic K _d and the speed control characteristic K _a, the movement time T _a is computed as the movement time T _d.

If the time T _e corresponding to the inward turning end position P _e at the time T _s and a speed control characteristic K _a corresponding to the inward turning start position P _s in the velocity control characteristic K _d is the relationship shown in FIG. 8, the intersection P _d and the lead If the distance from the start position RB is “D _L ” and the movement time of the hand 101 from the time t _s of the speed control characteristic K _d to the time t _f3 (movement stop time) is “T _L ”, the movement time T _{L is, T L = 2 · D L} / V s: is calculated by (V _s velocity of the time t _s). Further, since the distance between the intersection P _e and the retrieval starting position RB is "D _x1", the travel time of the hand 101 at time t _a0 speed control characteristic K _a from (movement start time) to time t _e Assuming that “T _a ”, the movement time T _a is calculated as T _a = D _x1 / V _a + t _a1 / 2.

Then, by the case of T _a ≦ T _d, the movement time T _a set inward turning time T _sc, in the case of T _d ≦ T _a, which sets the movement time T _d to inner loop time T _sc, the hand 101 Is controlled so as to move an inward trajectory L _sc passing through the inward range AR ₂ .

4 and 7 are examples in which the hand 101 is moved inward and outward of the cassette 200 along the movement locus in the vertical plane, but the cassette 101 is moved along the movement locus in the horizontal plane. In the case where the hand 101 is moved inwardly and _outwardly , it is possible to control the hand 101 so as to move the innerward locus L _sc passing through the innerward range AR ₂ ′ by the same method.

FIG. 9 is a diagram showing an example of an inner radius range AR ₂ ′ set for moving the hand 101 inward and outward of the cassette 200 along the movement trajectory in the horizontal plane. FIG. 9 is a view of the substrate transfer robot 100 and the cassette 200 as viewed from above.

The inward rotation range AR ₂ ′ set outside the cassette 200 is obtained by moving the substrate transfer robot 100 along the movement locus L _d from an arbitrary position RA in the horizontal plane including the storage start position RT (or the extraction start position RB). after the 101 is moved horizontally to the storage start position RT, the case of along a movement track L _a is moved to the top position ET (or bottom position EB), the bent portion of the housing start position RT or removal starting position RB Uchimawari This is an inward range for setting the locus L _sc .

If the distance from the fulcrum of the hand 101 to the tip is “D _hx ”, the tip of the hand 101 does not have to contact the cassette 200 when the fulcrum of the hand 101 is moved to the storage start position RT or the extraction start position RB. Therefore, the distance D _dx1 from the storage start position RT or the extraction start position RB to the side facing the cassette 200 in the _{inward rotation} range AR ₂ ′ is set to D _hx .

The distances D _dx2 , D _dy1 , D _dy2 from the storage start position RT or the extraction start position RB to the other side of the _{inward rotation} range AR ₂ ′ are not particularly limited with respect to the movement of the hand 101, and thus can be set to the maximum values. Is set. In FIG. 9, D _dy2 is set to the distance to the position where the side facing the substrate transfer robot 100 in the inward range AR ₂ ′ does not interfere with the substrate transfer robot 100, and D _dy1 has the same dimensions as D _dy2 Is set to Further, D _dx2 is set to a distance such that the side facing the cassette 200 in the inward range AR ₂ ′ is substantially the same position as the position of the substrate transport robot 100 in the X direction.

The substrate transfer robot 100 is set with a movement locus L _d for horizontally moving the hand 101 from the position RA taught outside the inner range AR ₂ ′ to the storage start position RT or the extraction start position RB. The locus L _d always intersects with the side facing the hand 101 side of the inward range AR ₂ ′, and the intersection can be set as the inward start position D _s .

The inward rotation range AR ₂ ′ set in the cassette 200 sets an inward trajectory L _sc when the substrate transfer robot 100 moves the hand 101 horizontally in a horizontal plane including the top position ET (or the bottom position EB). It is an inward range for. In this case, the inward rotation range AR ₂ ′ can be set within a range in which the hand 101 can move horizontally without interfering with the cassette 200 in the cassette 200. In FIG. 9, in consideration of the contact with the slot 201 in the cassette 200, the inner rotation range AR ₂ ′ is set to be approximately the same size as the space sandwiched between the pair of slots 201.

  FIG. 10 is a block configuration diagram showing the configuration of the substrate transfer robot 100. The same members as those in FIG. 1 are denoted by the same reference numerals.

  The substrate transfer robot 100 includes a movement control device 106 that controls the movement of the hand 101, a servo controller 107, and a manipulator 108. The manipulator 108 corresponds to the multi-joint mechanism including the hand 101, the X-direction drive mechanism 102, the Y-direction drive mechanism 103, and the Z-direction drive mechanism 104 shown in FIG. The servo controller 107 is a controller that controls driving of a servo motor provided in each of the Y direction driving unit 103b and the Z direction driving unit.

The movement control device 106 controls the drive of the servo controller 107 based on the teaching information taught in advance by the teaching / playback method and moves the hand 101 of the manipulator 108 along the taught movement locus L. Do. This movement control includes control for moving the hand 101 along the above-described inner trajectory L _sc .

  The movement control device 106 includes a microcomputer as a main component. The movement control device 106 includes a CPU, a ROM, a RAM, an input / output interface, and the like that are connected to each other. The movement control device 106 controls the inward movement of the hand 101 according to the present invention by executing a control program stored in advance in the ROM.

The movement control device 106 includes, as functional blocks for controlling the inward movement of the hand 101, a teaching information storage unit 106a, an inward range information storage unit 106b, an inward start / end position calculation unit 106c, and a trajectory control unit 106d. Is provided. The teaching information storage unit 106a stores teaching information such as the teaching information Ja and Jb described above. The inner circle range information storage unit 106b stores information of preset inner circle ranges AR such as the inner circle ranges AR ₁ , AR ₁ ′, AR ₂ , AR ₂ ′ described above. The teaching information storage unit 106a and the inner circumference range information storage unit 106b are set in a predetermined storage area of the RAM.

  The teaching information includes information that teaches the movement position of the hand 101 as position information such as the extraction start position RB, but information on each axis of the manipulator at each teaching position may be used instead of the movement position of the hand 101. Good. In addition, the teaching information includes information such as a flag indicating inward movement with respect to the teaching position for inward movement such as the bottom position EB in the example of FIG. 4 and the extraction start position RB in the example of FIG. ing.

The teaching point information is acquired in advance by actually moving the hand 101 of the substrate transport robot 100 in advance, and information on the movement trajectories such as the movement trajectories L _a and L _b and the speed of the hand 101 when moving each movement trajectory are obtained. Information on the speed control characteristics to be controlled and the flag indicating whether or not to move inwardly are set by the operator using information on the teaching points. Further, as shown in FIG. 4 and FIG. 7, an inward range AR including each teaching point is set by the operator for each teaching point to be moved inward.

In the above description, the inner loop ranges AR, is set in a plane including two movement trajectories which are connected to each other (e.g., moving locus and the like connecting the moving locus L _d and movement track L _a shown in FIG. 7) For example, in the example of FIG. 7, a plurality of movement loci L that move the hand 101 from the plurality of positions RA set at different positions to the bottom position EB via the extraction start position RB Since a plurality of movement loci L for moving the hand 101 to the storage start position RT are set via the storage start position RT, in this case, as shown in FIG. A rectangular parallelepiped inner-circumference range AR ₃ may be set. In this case, the inner radius AR ₃ is, for example, a rectangular parallelepiped having a size in plan view of D _x × D _y shown in FIG. 9 and a height of D _z1 / 2 shown in FIG. Set before Then, the movement trajectory L _d and movement track L _a inward turning range AR ₂ becomes the shape of the cross section of the two-dimensional when the plane obtained by cutting the internal rotation range AR ₃ of rectangular parallelepiped shape including, inward turning locus L in its inward turning range AR in _{2 sc} will be set.

The inner circle start / end position calculation unit 106c uses the information of the inner circle range AR and the information of the movement locus L passing through the inner circle range AR, and the inner circle start position P _s and inner circle end position P _e of the inner circle locus L _sc. Is calculated. The movement locus L passing through the inward turning range AR, the movement track L _a and 7 leading to the take-out start position RB in FIG. 4 described above bottom position in the inward turning range AR ₁ from (teaching position) EB (teaching position) position RA movement trajectory for entering the hand 101 such as movement track L _d leading to the take-out start position RB in inward turning range AR ₂ from (teaching position) (teaching positions) in inward turning range AR (hereinafter, the hand 101 in the inward turning range AR The movement locus to be entered is referred to as “movement locus L _in ”), and the movement locus L _b from the bottom position EB in FIG. 4 to the top position ET (teaching position) outside the inward rotation range AR ₁ and the extraction in FIG. moving track Eject the hand 101 such as movement track L _a reaching from the start position RB to inward turning range AR ₂ out of bottom position EB from inward turning range AR (hereinafter, the hand 101 inward turning range AR The movement locus to al exit referred to as "the movement locus L _out." A), which is a moving locus obtained by connecting.

Inward turning start / end position calculating unit 106c is, for example, in the example of FIG. 4, it calculates a linear equation representing the movement trajectory L _a from extraction start position RB and bottom position EB, expressions and inward turning range AR ₁ of the straight line The inward rotation start position P _s is calculated using the expression shown. Similarly, to calculate the equation of the straight line representing the movement trajectory L _b and bottom position EB from the retracted start position RT, it calculates the inner-end position P _e by using the expression for the expression and inward turning range AR ₁ of the straight line. The same applies to the example of FIG.

Orbit control unit 106d includes a inward turning start position P _s and the inward turning end position P _e of the inner loop locus L _sc, the speed control characteristic K _in controlling the speed for moving along the hand 101 in the movement track L _in, hand Control is performed so that the hand 101 moves along the inward trajectory L _sc using a speed control characteristic K _out that controls the speed when moving 101 along the movement trajectory L _out . Speed control characteristic K _in is the speed control characteristic K _a and the speed control characteristic K speed control characteristic the hand 101 is set to the moving locus L _in which enters the inner loop range AR including _d of FIG. 8 in Fig. 5 described above . The speed control characteristic K _out is above the speed control characteristic K _b and speed control characteristic K _a speed control characteristic the hand 101 is set to the moving locus L _out to leave the inward turning range AR including 8 of Figure 5 It is. The processing of the inward rotation start / end position calculation unit 106c and the trajectory control unit 106d is performed by the CPU.

Next, the control of the inward movement of the hand 101 performed by the movement control device 106 will be described using the flowchart shown in FIG. In the following description, an example will be described in which the hand 101 is moved inward along the inward trajectory L _sc when moving from the take-out start position RB shown in FIG. 4 to the top position ET via the bottom position EB. Therefore, it is assumed that the position of the hand 101 at the start of control is at the extraction start position RB.

Movement controller 106 calculates an expression vector directed to the bottom position EB from the take-out start position RB position information of the take-out start position RB and bottom position EB (S1), this expression is a formula representing the movement trajectory L _a is there. Subsequently, the movement control unit 106 calculates the movement track L _a and the intersection P _a and inward turning range AR ₁ by using the information indicating the moving locus L _a and inward turning range AR ₁ (S2). Since the inward range AR ₁ is defined by the position coordinates of the four vertices that specify the rectangular shape, the movement control device 106 uses the position coordinates of the four vertices to express each side of the rectangle. the calculated, calculates the position of the moving locus L _a by the expression for the expression and movement track L _a of each side intersects the rectangular contour of the inward turning range AR ₁ as the intersection P _a.

Subsequently, the movement control unit 106 calculates the distance between the intersection P _a and the bottom position EB using the position coordinates of the position coordinates and the bottom position EB intersection P _a (S3). Furthermore, the movement control unit 106 uses the distance calculated in the speed control characteristic K _a and step S3 that is set to the moving locus L _a, and calculates the movement time T _a (S4). As distance traveled deceleration period T _dec is longer than the distance calculated in step S3, if the deceleration characteristic of the speed control characteristic K _a is set, the movement time T _a, the above-described (1) Calculated by the formula.

Subsequently, the movement control unit 106 calculates the expression vector from bottom position EB in the top position ET from the position information of the bottom position EB and the top position ET (S5), this formula has the formula representing the movement trajectory L _b It is. Subsequently, the movement control unit 106 calculates an intersection point P _b of the movement track L _b and inward turning range AR ₁ by using the information indicating the moving locus L _b and inward turning range AR ₁ (S6). Movement controller 106 calculates the position of the moving locus L _b intersects the rectangular contour of the inward turning range AR ₁ by the expression for equations moving locus L _b of each side of the inward turning range AR ₁ as the intersection P _b .

Subsequently, the movement control unit 106 calculates the distance between the intersection P _b and the top position ET using the position coordinates of the position coordinates and the top position ET of intersection P _b (S7). Further, the movement control device 106 calculates the movement time T _b using the speed control characteristic K _b set in the movement locus L _b and the distance calculated in step S7 (S8). When the deceleration characteristic of the speed control characteristic K _b is set so that the distance moved in the acceleration period T _acc is longer than the distance calculated in step S7, the movement time T _b is (2) described above. Calculated by the formula.

Subsequently, the movement control device 106 compares the calculated movement time T _a with the movement time T _b (S9). If T _a ≦ T _b (S9: YES), the movement control device 106 compares the movement time T _a with the inner time T _sc. and then, by using the travel time T _a and the speed control characteristic K _a, hand 101 passes through the moving track L _a inward turning start time starts to inward turning movement from the start of the movement of t _s (inward turning start position P _s time. inward turning start timing t _s) to calculate the (S10). On the other hand, if T _b <T _a (S9: NO), the movement control device 106 uses the movement time T _b as the inner rotation time T _sc and uses the movement time T _b and the speed control characteristic K _a. There is calculated the inward turning start time t _s to start the inward turning movement from the start of the movement of the moving locus L _a (S11).

Subsequently, the movement control unit 106, the speed control characteristic K _a and generates a driving control signal for moving the hand 101 in the movement track L _a on the basis of the movement locus L _a, the servo controller 107 and the drive control signal To start the movement of the hand 101 (S12). Thereafter, the hand 101 starts moving from the take-out start position RB, moves toward the bottom position EB in movement track L _a.

Movement controller 106 is clocking the time elapsed from the hand 101 starts to move, (when the hand 101 reaches the inward turning start position P _s) when the elapsed time reaches the inward turning start time t _s (S13 : YES), generates a drive control signal for moving the hand 101 to the inward turning locus L _sc on the basis of the speed control characteristic K _a and the moving locus L _a and the speed control characteristic K _b and movement track L _b, the driving A control signal is output to the servo controller 107 to start the inward movement of the hand 101 (S14).

After the hand 101 starts to inward turning movement, the inner loop time T _sc has passed, since deceleration period T _dec speed control characteristic K _a is complete, the inward turning movement of the hand 101 is terminated, the hand 101 on the moving locus L _b reach of the inward turning end position P _e. Thereafter, the movement control device 106 generates a drive control signal for moving the hand 101 along the movement locus L _b based on the speed control characteristic K _b and the movement locus L _b, and the drive control signal is transmitted to the servo controller. since outputs 107, hand 101 moves to the top position ET along the movement track L _b from the inward turning end position P _e.

As described above, according to the present embodiment, when the connection point portion between the two connected movement trajectories L _in and L _out is moved inwardly, the inward rotation range AR is set around the connection point. And calculating the distance of the portion of the movement trajectory L _in that is within the inward range AR, calculating the distance of the portion of the movement trajectory L _{out that is in} the inner range AR, and calculating the distance between the calculated two distances and the movement trajectory L _in Is set using the speed control characteristic K _in set to 1 and the speed control characteristic K _out set to the movement locus L _out , so that the inner turn time T _sc when moving the hand 101 inward is set. An inward trajectory L _sc that passes through the inward range AR can be set.

Therefore, in consideration of obstacles with respect to the hand 101, by setting the inner size range AR of an appropriate size and shape, it is possible to reliably prevent the hand 101 from interfering with the obstacle and with an optimum tact time. An inward trajectory L _sc that can be moved _inwardly can be set.

  In the above embodiment, the shape of the inner circumference range AR has been described as an example of the shape of a rectangle or a rectangular parallelepiped. However, the shape of the inner circumference range AR may be any appropriate in consideration of an obstacle present in the region where the hand 101 is moved. Various shapes can be set. For example, a polygon such as a triangle or a pentagon can be used in the case of a two-dimensional inner diameter range, and a shape such as a cone, a quadrangular pyramid, a cylinder, or a triangular prism can be used in the case of a three-dimensional inner diameter range.

  Moreover, although the said embodiment demonstrated the board | substrate conveyance robot 100 which conveys the board | substrate W, it cannot be overemphasized that this invention is applicable also to other industrial robots, such as a welding robot.

DESCRIPTION OF SYMBOLS 100 Substrate transfer robot 101 Hand 101a Support part 101b, 101c Holding part 102 X direction drive mechanism 102a, 102b Arm 103 Y direction drive mechanism 103a Base board 103b Y direction drive part 104 Z direction drive mechanism 104a Support body 104b Z axis 105 Guide rail 106 Movement Control Device 106a Teaching Information Storage Unit 106b Inner Circumference Range Information Storage Unit (Inner Circumference Range Information Storage Unit)
106c Inner turn start / end position calculation unit (first and second movement time calculation means, inner turn time setting means, inner turn start / end position calculation means)
106d Trajectory control unit 107 Servo controller 108 Manipulator 200 Cassette 200A, 200B Opening surface 201 Slot AR Inward rotation range RB Extraction start position EB Bottom position ET Top position RT Storage start position L _a , L _b , L _c Movement trajectory L _sc Inward trajectory O _a, O _B center position _{P a, P b, P c} , P d intersection P _s internal rotation start position P _e inward turning end position S _a space S _B space below T _a, T _b moving time T _sc Uchimawari time

Claims (6)

Position information of the first, second, and third positions that are different from each other, and the speed of the work tool when the work tool attached to the tip of the arm of the manipulator is moved from the first position to the second position. Information on the first speed control characteristic for controlling the speed and the second speed for controlling the speed of the work tool when the work tool is linearly moved from the second position to the third position. Control characteristic information is taught in advance,
The work tool is moved by moving a first movement locus connecting the first position and the second position and a second movement locus connecting the second position and the third position. When moving from the first position to the third position, an inward start position is set on the first movement locus, an inward end position is set on the second movement locus, and the work tool is moved A manipulator movement control device for moving inwardly from the inward rotation start position to the inward rotation end position along a curved inward trajectory passing inside from the second position;
The manipulator conveys a substrate placed on the work tool,
Inner circle range information storage means for storing information of an inner circle range including the second position, which is preset as a range in which the work tool and the substrate do not interfere with an obstacle;
First intersection calculation means for calculating a first intersection that is a point at which the inner circle range and the first movement locus intersect and is a provisional inner circle start position;
A first movement time required for the work tool to move from the first intersection to the second position based on the first intersection, the second position, and the first speed control characteristic. First travel time calculating means for calculating
A second intersection calculation means for calculating a second intersection that is a point at which the inner circle range and the second movement locus intersect and is a provisional inner circle end position;
A second moving time required for the work tool to move from the second position to the second intersection based on the second intersection, the second position, and the second speed control characteristic. Second travel time calculating means for calculating
An inner time setting means for setting an inner time when the work tool is moved along the inner track using the first movement time and the second movement time;
An inner loop start / end position setting means for setting the inner loop start position and the inner loop end position using the inner loop time and the first and second speed control characteristics;
With
The inner time setting means compares the first movement time and the second movement time, and sets the shorter movement time as the inner time;
A manipulator movement control device characterized by that.   The manipulator movement control device according to claim 1, wherein the inner circumference range is a range having a predetermined three-dimensional shape.   The movement of the manipulator according to claim 1, wherein the inward rotation range is a range having a predetermined two-dimensional shape set in a plane including the first position, the second position, and the third position. Control device.   The manipulator movement control device according to claim 3, wherein the two-dimensional shape is a rectangle. The first travel time calculation means calculates a first distance from the first intersection to the second position, and based on the first distance and the first speed control characteristic, Calculate the travel time of 1
The second movement time calculation means calculates a second distance from the second position to the second intersection, and based on the second distance and the second speed control characteristic, The movement control device for a manipulator according to claim 1, wherein the movement time of 2 is calculated. Position information of the first, second, and third positions that are different from each other, and the speed of the work tool when the work tool attached to the tip of the arm of the manipulator is moved from the first position to the second position. Information on the first speed control characteristic for controlling the speed and the second speed for controlling the speed of the work tool when the work tool is linearly moved from the second position to the third position. Control characteristic information is taught in advance,
The work tool is moved by moving a first movement locus connecting the first position and the second position and a second movement locus connecting the second position and the third position. When moving from the first position to the third position, an inward start position is set on the first movement locus, an inward end position is set on the second movement locus, and the work tool is moved A manipulator movement control method for moving inwardly from the inward turning start position to the inward turning end position along a curved inward trajectory passing inward from the second position,
The manipulator conveys a substrate placed on the work tool,
This is a point where the inward rotation range including the second position, which is set in advance as a range in which the work tool and the substrate do not interfere with an obstacle, and the first movement trajectory intersect, and is a temporary inward start position. A first intersection calculation step of calculating a certain first intersection;
A first movement time required for the work tool to move from the first intersection to the second position based on the first intersection, the second position, and the first speed control characteristic. A first calculation step of calculating
A second intersection calculation step of calculating a second intersection that is a point where the inner circle range and the second movement locus intersect and is a provisional inner circle end position;
A second moving time required for the work tool to move from the second position to the second intersection based on the second intersection, the second position, and the second speed control characteristic. A second calculation step for calculating
When moving the work tool along the inner trajectory using the first movement time calculated in the first calculation step and the second movement time calculated in the second calculation step. A first setting step for setting the inward time;
A second setting step for setting the inner turn start position and the inner turn end position using the inner turn time set in the first setting step and the first and second speed control characteristics;
With
The first setting step compares the first travel time and the second travel time, and sets the shorter travel time as the inner time .
Movement control method of the manipulator which is characterized a call.