JP6469717B2 - 可変フォトサーマルレンズ - Google Patents
可変フォトサーマルレンズ Download PDFInfo
- Publication number
- JP6469717B2 JP6469717B2 JP2016558350A JP2016558350A JP6469717B2 JP 6469717 B2 JP6469717 B2 JP 6469717B2 JP 2016558350 A JP2016558350 A JP 2016558350A JP 2016558350 A JP2016558350 A JP 2016558350A JP 6469717 B2 JP6469717 B2 JP 6469717B2
- Authority
- JP
- Japan
- Prior art keywords
- variable
- light
- light source
- photothermal
- lens according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002245 particle Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 31
- 239000002073 nanorod Substances 0.000 claims description 24
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 19
- 230000003287 optical effect Effects 0.000 claims description 19
- 229910052737 gold Inorganic materials 0.000 claims description 14
- 239000010931 gold Substances 0.000 claims description 14
- 230000008859 change Effects 0.000 claims description 13
- 230000003993 interaction Effects 0.000 claims description 10
- 230000010287 polarization Effects 0.000 claims description 10
- 239000002105 nanoparticle Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims description 6
- 230000003595 spectral effect Effects 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 description 24
- 239000006096 absorbing agent Substances 0.000 description 11
- 239000011358 absorbing material Substances 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 7
- 238000002198 surface plasmon resonance spectroscopy Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000000609 electron-beam lithography Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 5
- 230000031700 light absorption Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 230000004044 response Effects 0.000 description 4
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- -1 nanoantennas Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
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- 239000007787 solid Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
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- 238000003379 elimination reaction Methods 0.000 description 1
- 238000002875 fluorescence polarization Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/293—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection by another light beam, i.e. opto-optical deflection
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/12—Fluid-filled or evacuated lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/008—Surface plasmon devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0147—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on thermo-optic effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
- G02F2201/08—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00 light absorbing layer
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/10—Function characteristic plasmon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/773—Nanoparticle, i.e. structure having three dimensions of 100 nm or less
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/81—Of specified metal or metal alloy composition
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/222,349 | 2014-03-21 | ||
| US14/222,349 US9606419B2 (en) | 2014-03-21 | 2014-03-21 | Adaptive photothermal lens |
| PCT/EP2015/056069 WO2015140342A1 (en) | 2014-03-21 | 2015-03-23 | Adaptive photothermal lens |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017510846A JP2017510846A (ja) | 2017-04-13 |
| JP2017510846A5 JP2017510846A5 (https=) | 2018-03-22 |
| JP6469717B2 true JP6469717B2 (ja) | 2019-02-13 |
Family
ID=52727132
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016558350A Expired - Fee Related JP6469717B2 (ja) | 2014-03-21 | 2015-03-23 | 可変フォトサーマルレンズ |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9606419B2 (https=) |
| EP (1) | EP3120186A1 (https=) |
| JP (1) | JP6469717B2 (https=) |
| WO (1) | WO2015140342A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10274648B2 (en) | 2014-05-28 | 2019-04-30 | Fundació Institut De Ciències Fotòniques | Adaptive thermal micro lens |
| EP3454006A1 (en) | 2017-09-12 | 2019-03-13 | Fundació Institut de Ciències Fotòniques | A method, a system and a computer program for measuring a distance to a target |
| EP3722843A1 (en) | 2019-04-11 | 2020-10-14 | Fundació Institut de Ciències Fotòniques | A computer-implemented method of generating an optimized design of a thermally modulated optical device, and thermally modulated optical devices |
| CZ2019637A3 (cs) * | 2019-10-11 | 2020-12-09 | Ăšstav fotoniky a elektroniky AV ÄŚR, v.v.i. | Termooptický prostorový modulátor světla |
| US11563305B2 (en) | 2021-04-15 | 2023-01-24 | Coherent Lasersystems Gmbh & Co. Kg | Resonantly enhanced frequency conversion with adaptive thermal-lensing compensation |
| DE102021210243A1 (de) * | 2021-09-16 | 2023-03-16 | Carl Zeiss Smt Gmbh | Optische Anordnung für die DUV-Lithographie |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3586417A (en) * | 1968-08-21 | 1971-06-22 | Calbiochem | Variable color filter |
| US4872743A (en) | 1983-04-18 | 1989-10-10 | Canon Kabushiki Kaisha | Varifocal optical element |
| US4585301A (en) * | 1985-04-23 | 1986-04-29 | Utah State Universtiy Foundation | Optically actuated optical switch apparatus and methods |
| US6545816B1 (en) | 2001-10-19 | 2003-04-08 | Lucent Technologies Inc. | Photo-tunable liquid microlens |
| JP3809908B2 (ja) * | 2002-09-20 | 2006-08-16 | 独立行政法人産業技術総合研究所 | 光路切替装置および光路切替方法 |
| US6999238B2 (en) | 2003-12-01 | 2006-02-14 | Fujitsu Limited | Tunable micro-lens array |
| DE102006045075A1 (de) | 2006-09-21 | 2008-04-03 | Carl Zeiss Smt Ag | Steuerbares optisches Element |
| DE102007051291B4 (de) | 2007-10-24 | 2010-02-11 | Jenoptik Laser, Optik, Systeme Gmbh | Adaptierbares optisches System |
| EP2307796A4 (en) * | 2008-06-24 | 2012-08-08 | Kilolambda Tech Ltd | WINDOW OF LIMITATION OF LIGHT |
| US7828435B1 (en) | 2010-02-03 | 2010-11-09 | Denis Rehse | Method for designing an anterior curve of a contact lens |
| US9193816B2 (en) * | 2011-11-30 | 2015-11-24 | Wisconsin Alumni Research Foundation | Infrared light- and thermal-responsive graphene oxide hydrogel polymer composites |
| KR101911439B1 (ko) | 2012-01-30 | 2019-01-07 | 삼성전자주식회사 | 초점길이 가변형 마이크로 렌즈와 이를 포함하는 마이크로 렌즈 어레이 및 이를 포함하는 3ｄ 디스플레이와 그 동작 방법 |
| EP3028033B1 (en) * | 2013-08-04 | 2020-10-07 | Photonicsys Ltd. | Optical sensor based on multilayered plasmonic structure comprising a nanoporous metallic layer |
| US10274648B2 (en) | 2014-05-28 | 2019-04-30 | Fundació Institut De Ciències Fotòniques | Adaptive thermal micro lens |
-
2014
- 2014-03-21 US US14/222,349 patent/US9606419B2/en not_active Expired - Fee Related
-
2015
- 2015-03-23 WO PCT/EP2015/056069 patent/WO2015140342A1/en not_active Ceased
- 2015-03-23 EP EP15711744.1A patent/EP3120186A1/en not_active Withdrawn
- 2015-03-23 JP JP2016558350A patent/JP6469717B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| WO2015140342A1 (en) | 2015-09-24 |
| EP3120186A1 (en) | 2017-01-25 |
| US20150268532A1 (en) | 2015-09-24 |
| US9606419B2 (en) | 2017-03-28 |
| JP2017510846A (ja) | 2017-04-13 |
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