JP6464665B2 - Linear motion table device - Google Patents

Description

  The present invention relates to a linear motion table device used in various manufacturing devices such as machine tools, semiconductor manufacturing devices, and flat panel display manufacturing devices, and more particularly to a linear motion table device capable of moving and positioning a workpiece such as a workpiece.

As this type of conventional linear motion table device, for example, the one shown in Patent Document 1 is known.
The linear motion table device shown in Patent Document 1 includes a main table that mounts an object to be mounted and is movable in a substantially vertical direction, and a weight that is disposed vertically below the main table and is movable in a substantially vertical direction. The main table and the weight are driven by a coaxial drive screw shaft. The main table is coupled to the right screw nut at the upper portion in the vertical direction of the drive screw shaft, and the weight is coupled to the left screw nut at the lower portion in the vertical direction of the drive screw shaft. The right screw nut and the left screw nut are moved in the upside down direction by the rotation of the drive screw shaft transmitted from the motor, whereby the main table and the weight are moved in the upside down direction.
The torque applied to the main table side and the torque applied to the weight side are balanced to equalize both torques, thereby suppressing the vibration of the apparatus.

  However, in the linear motion table device described in Patent Document 1, it is necessary to process two types of screw grooves, a right screw groove and a left screw groove, on one drive screw shaft. There has been a problem that the length of the apparatus becomes longer in the axial direction, and the apparatus length becomes longer in the axial direction of the drive screw shaft.

JP 2012-232354 A

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a linear motion table device capable of shortening the device length in the axial direction of a drive screw shaft.

In order to achieve the above object, an aspect of the present invention includes a base installed so as to extend in one direction, a pair of a main table side first bearing and a main table side second bearing attached to the base, A pair of weight table side first bearing and weight table side second bearing attached to the base, and the pair of main table side first bearing and main table side second bearing so that the axial direction is the one direction. Both ends of the pair of weight table side first bearings and the weight table side second bearing are rotatable so that the main table drive screw shaft rotatably supported at both ends and the axial direction is the one direction. The weight table drive screw shaft that is pivotally supported, and the main table drive screw shaft that is externally attached to the main table drive screw shaft via a rolling element. The main table nut and the weight table driving screw shaft moving along the main table driving screw shaft by rotating the outer surface of the weight table driving screw shaft through rolling elements, and the weight table driving screw shaft rotates. The weight table nut that moves in the opposite direction to the main table nut along the weight table drive screw shaft, the main table on which the object to be mounted fixed to the main table nut can be mounted, and the weight A weight table fixed to a table nut, a drive motor for rotating one of the main table drive screw shaft and the weight table drive screw shaft, and an end of the main table drive screw shaft First gear and end of the weight table drive screw shaft A second gear that is fixed and meshes with the first gear, and the main table drive screw shaft and the weight table drive screw shaft are arranged in parallel in a direction perpendicular to the one direction that is the axial direction. The masses of the main table and the weight table are values obtained by synergizing the number of teeth of the first gear and the lead of the drive screw shaft for the main table, the number of teeth of the second gear, and the weight table, respectively. The gist is that it is proportional to the synergistic value of the lead of the drive screw shaft .

  According to the linear motion table device of the present invention, the main table drive screw shaft for driving the main table and the main table drive screw shaft for driving the weight table are separate from the main table drive screw shaft. Since the main table drive screw shaft and the weight table drive screw shaft are arranged in parallel in a direction orthogonal to the one axial direction, the apparatus length in the axial direction of the drive screw shaft is shortened. Can be provided.

It is a top view of the linear motion table apparatus concerning 1st Embodiment of this invention. It is a front view of the linear motion table apparatus shown in FIG. FIG. 2 is a schematic diagram for explaining the number of gear teeth and leads in the linear motion table device shown in FIG. 1. In the linear motion table device shown in FIG. 1, (A) is a diagram showing a state in which the drive screw shaft for main table is bent and the first gear and the second gear do not mesh well, and (B) is the state of (A). FIG. 5 is a diagram showing a state in which the weight table drive screw shaft is bent and the first gear and the second gear are engaged with each other. It is a front view of the linear motion table apparatus concerning 2nd Embodiment of this invention. It is a figure which shows the mode of a process to the to-be-mounted object by the tool provided in the linear motion table apparatus shown in FIG.

The linear motion table device according to the first and second embodiments of the present invention will be described below.
(First embodiment)
The linear motion table device of the first embodiment is shown in FIGS. 1 and 2, and this linear motion table device is used in various manufacturing apparatuses such as machine tools, semiconductor manufacturing apparatuses, and flat panel display manufacturing apparatuses. In particular, it is a device that moves an object to be mounted such as a workpiece in the horizontal direction and performs accurate positioning.

In the linear motion table device 1 shown in FIGS. 1 and 2, a base 2 formed in a rectangular plate shape is installed so as to extend in the horizontal direction (up and down and left and right directions in FIG. 1, one direction in claim 1). Yes.
A pair of main table side first bearings 13 and main table side second bearings 14 are attached to the upper surface of the base 2 at positions spaced apart by a predetermined distance in the horizontal direction (left and right in FIG. 1). The main table side first bearing 13 is attached in the vicinity of the horizontal left end portion of the base 2, and the main table side second bearing 14 is attached at a position slightly to the right of the horizontal center portion of the base 2.

Then, both ends of the main table drive screw shaft 11 having the right thread groove 11a formed on the outer periphery rotate to the pair of main table side first bearing 13 and main table side second bearing 14 so that the axial direction is horizontal. It is pivotally supported.
A main table nut 12 is externally mounted on the main table drive screw shaft 11. Between the right screw groove 11a formed on the outer periphery of the main table drive screw shaft 11 and the screw groove formed on the inner periphery of the main table nut 12, there are a plurality of rolling elements (balls or rollers) (not shown). The main table nut 12 is moved in the horizontal direction along the main table drive screw shaft 11 as the main table drive screw shaft 11 rotates.

  The main table 10 is fixed to the main table nut 12. The main table 10 includes a main body portion 12a fixed to the main table nut 12 and a flat mounting plate portion 10b provided at the upper end of the main body portion 12a. The mounting plate portion 10b is formed in a rectangular shape when viewed from the upper surface side, and a mounted object 60 (see FIG. 6) such as a workpiece can be mounted on the upper surface. The main body portion 10a of the main table 10 is provided with a through hole 10c extending in the horizontal direction through which a weight table drive screw shaft 31 described later can be inserted.

And the main-body part 10a of the main table 10 is formed in the substantially rectangular parallelepiped shape extended long in a longitudinal direction (up-down direction in FIG. 1). Further, as shown in FIGS. 1 and 2, the bottom surface of the main table 10a in the longitudinal direction of the main table 10 is attached on the slider 16a of the first linear motion guide device 17a. The end lower surface is mounted on the slider 16b of the second linear motion guide device 17b. The first linear motion guide device 17a is attached to one end (lower end in FIG. 1) of the base 2 in the horizontal width direction (vertical direction in FIG. 1) and extends in the axial direction of the main table drive screw shaft 11. And a slider 16a that moves on the rail 15a along the rail 15a. The second linear motion guide device 17b is attached to the other end (upper end in FIG. 1) of the base 2 in the horizontal width direction (vertical direction in FIG. 1) and extends in the axial direction of the main table drive screw shaft 11. A rail 15b that extends and a slider 16b that moves on the rail 15b along the rail 15b are provided.
A pair of weight table side first bearings 33 and weight table side second bearings 34 are attached to the upper surface of the base 2 at positions spaced apart by a predetermined distance on the left and right in the horizontal direction (left and right in FIG. 1). The weight table side first bearing 33 is located at the same position as the main table side first bearing 13 in the horizontal direction of the base 2 and below the vertical direction perpendicular to the horizontal direction with respect to the main table side first bearing 13. doing. The weight table side first bearing 33 is integrated with a housing fixed to the outer ring (not shown) in common with the housing of the main table side first bearing 13. On the other hand, the weight table side second bearing 34 is located at the same position as the main table side second bearing 14 in the horizontal direction of the base 2 and is below the vertical direction perpendicular to the horizontal direction with respect to the main table side second bearing 14. Is located. The weight table side second bearing 34 is integrated with a housing fixed to the outer ring (not shown) in common with the housing of the main table side second bearing 14.

Then, both ends of the weight table drive screw shaft 31 having the right thread groove 31a formed on the outer periphery rotate to the pair of weight table side first bearings 33 and weight table side second bearings 34 so that the axial direction is horizontal. It is pivotally supported.
Here, the weight table side first bearing 33 is positioned vertically below the main table side first bearing 13, and the weight table side second bearing 34 is relative to the main table side second bearing 14. Since the weight table drive screw shaft 31 is located on the lower side in the vertical direction, the weight table drive screw shaft 31 is located on the lower side in the vertical direction with respect to the main table drive screw shaft 11. For this reason, the main table drive screw shaft 11 and the weight table drive screw shaft 31 are arranged in parallel in the vertical direction perpendicular to the horizontal direction as the axial direction.

  A weight table nut 32 is externally mounted on the weight table drive screw shaft 31. Between the right screw groove 31a formed on the outer periphery of the weight table drive screw shaft 31 and the screw groove formed on the inner periphery of the weight table nut 32, a plurality of rolling elements (balls or rollers) (not shown) are provided. The weight table nut 32 is reverse to the main table nut 12 along the weight table drive screw shaft 31 when the weight table drive screw shaft 31 rotates in the direction opposite to the main table drive screw shaft 11. It is designed to move in the direction.

  The weight table 30 is fixed to the weight table nut 32. The weight table 30 is formed in a substantially rectangular parallelepiped shape extending long in the longitudinal direction (vertical direction in FIG. 1). Further, as shown in FIGS. 1 and 2, the lower end of the weight table 30 in the longitudinal direction is attached on the slider 36a of the third linear motion guide device 37a, and the lower end of the other end of the weight table 30 in the longitudinal direction is It is mounted on the slider 36b of the fourth linear motion guide device 37b. The third linear motion guide device 37a is attached to one end (lower end in FIG. 1) of the base 2 in the horizontal width direction (vertical direction in FIG. 1) and extends in the axial direction of the weight table drive screw shaft 31. And a slider 36a that moves on the rail 35a along the rail 35a. The fourth linear motion guide device 37b is attached to the other end (upper end in FIG. 1) of the base 2 in the horizontal width direction (vertical direction in FIG. 1), and extends in the axial direction of the weight table drive screw shaft 31. A rail 35b that extends and a slider 36b that moves on the rail 35b along the rail 35b are provided.

Of the main table drive screw shaft 11 and the weight table drive screw shaft 31, the main table drive screw shaft 11 is rotationally driven by the drive motor 18. The drive motor 18 is attached to a drive motor support member 19 provided on the upper surface of the base 2. The output shaft of the drive motor 18 is connected to the end of the main table drive screw shaft 11 on the main table side second bearing 14 side via the coupling 20. An encoder 21 attached to a support member (not shown) is provided in the vicinity of the shaft of the drive motor 18, and the rotation speed of the drive motor 18 is detected by the encoder 21.
A first gear 41 is fixed to the end of the main table drive screw shaft 11 on the main table side first bearing 13 side. Furthermore, a second gear 42 that meshes with the first gear 41 is fixed to the end of the weight table drive screw shaft 31 on the weight table side first bearing 33 side.

Next, the operation of the linear motion table device 1 will be described.
When the output shaft of the drive motor 18 rotates in one direction, the main table drive screw shaft 11 rotates in one direction, so that the main table nut 12 moves in the horizontal direction along the main table drive screw shaft 11. Move in one direction. The main table nut 12 moves in one horizontal direction along the main table drive screw shaft 11 so that the main table 10 fixed to the main table nut 12 moves along the main table drive screw shaft 11. Move in one horizontal direction.

  On the other hand, when the main table drive screw shaft 11 rotates in one direction, the weight table drive screw shaft 31 rotates in the opposite direction to the one direction via the first gear 41 and the second gear 42, and thereby the weight. The table nut 32 moves in the direction opposite to the horizontal direction along the weight table drive screw shaft 31. When the weight table nut 32 moves along the weight table drive screw shaft 31 in one direction opposite to the horizontal direction, the weight table 30 fixed to the weight table nut 32 becomes the weight table drive screw shaft. It moves in the direction opposite to one direction in the horizontal direction along 31.

In the linear motion table device 1 according to the present embodiment, the weight table 30 is moved in the opposite direction to the main table 10, and further the inertia force F1 on the main table 10 side acting on the base 2 and the weight table acting on the base 2. By balancing the inertial force F2 on the 30 side as equal, both inertial forces are canceled out and vibrations of the apparatus are suppressed.
Here, the inertial force F1 on the main table 10 acting on the base 2 can be expressed by the following equation (1).
F1 = M1 × α1 (1)
Here, M1 is the total mass including the mass of the mounted object on the main table 10 side, and α1 is the acceleration on the main table 10 side.

Further, the inertia force F2 on the weight table 30 side acting on the base 2 can be expressed by the following equation (2).
F2 = M2 × α2 (2)
Here, M2 is the total mass on the weight table 30 side, and α2 is the acceleration on the weight table 30 side.
And in order to balance both inertial force F1 and F2 as equal, following (3) Formula must be materialized.
F1 = M1 × α1≈M2 × α2 = F2 (3)

  Therefore, when the total mass M1 on the main table 10 side changes, the inertial forces F1 and F2 are made equal by adjusting the total mass M2 on the weight table 30 side and / or the acceleration α2 on the weight table 30 side. can do. When the total mass M1 on the main table 10 side changes, and the total weight M2 on the weight table 30 side does not change, only the acceleration α2 on the weight table 30 side is adjusted so that both inertia forces F1 and F2 are Can be equivalent.

  In the linear motion table device 1 of the first embodiment, the main table drive screw shaft 11 for driving the main table 10 and the main table drive screw shaft 11 for driving the weight table 30 are separately provided. Therefore, it is not necessary to form the right screw and the left screw as one drive screw shaft. Since the main table drive screw shaft 11 and the weight table drive screw shaft 31 are arranged in parallel in the vertical direction perpendicular to the horizontal direction which is the axial direction, the main table drive screw shaft 11 and the weight The apparatus length in the axial direction of the table drive screw shaft 31 can be shortened.

In addition, since the main table drive screw shaft 11 and the weight table drive screw shaft 31 are independent of each other, they can be configured with only right-hand screws that are easily available.
Further, the lower surface of one end of the main table 10 in the longitudinal direction is attached on the slider 16a of the first linear motion guide device 17a, and the lower surface of the other end of the main table 10 in the longitudinal direction is the slider 16b of the second linear motion guide device 17b. Mounted on top. For this reason, when the main table 10 moves in one horizontal direction along the main table drive screw shaft 11, the movement can be performed smoothly and stably.

The lower end of the weight table 30 in the longitudinal direction is mounted on the slider 36a of the third linear motion guide device 37a, and the lower end of the other end of the weight table 30 in the longitudinal direction is the slider 36b of the fourth linear motion guide device 37b. Mounted on top. For this reason, when the weight table 30 moves in the direction opposite to the main table 10 along the weight table drive screw shaft 31, the movement can be performed smoothly and stably.
The masses of the main table 10 and the weight table 30 are values obtained by synergizing the number of teeth Z1 of the first gear 41 and the lead L1 of the drive screw shaft 11 for the main table, respectively, the number of teeth Z2 of the second gear 42 and the weight table. This is proportional to the value obtained by synergizing the lead L2 of the drive screw shaft 31 for use.

That is, in FIG. 3, when the lead of the drive screw shaft 11 (31) is L, the effective diameter of the drive screw shaft 11 (31) is d, and the lead angle of the drive screw shaft 11 (31) is β, generally the lead L can be expressed by the following equation (4).
L = πdtan β (4)
Accordingly, the lead of the main table drive screw shaft 11 is L1, the lead of the weight table drive screw shaft 31 is L2, the effective diameter of the main table drive screw shaft 11 is d1, and the effective diameter of the weight table drive screw shaft 31 is d2, when the lead angle of the main table drive screw shaft 11 is β1 and the lead angle of the weight table drive screw shaft 31 is β2, the leads L1 and L2 can be expressed by the following equations (5) and (6), respectively. .
L1 = πd1 tan β1 (5)
L2 = πd2tan β2 (6)

In FIG. 3, when the number of teeth of the gear 41 (42) is Z, the pitch circle diameter is D, and the module is m, the number of teeth Z can be generally expressed by the following equation (7).
Z = D / m (7)
Therefore, the number of teeth of the first gear 41 is Z1, the number of teeth of the second gear 42 is Z2, the pitch circle diameter of the first gear 41 is D1, the pitch circle diameter of the second gear 42 is D2, and the modules that mesh with each other are m. In this case, the number of teeth Z1 and Z2 can be expressed by the following equations (8) and (9).
Z1 = D1 / m (8)
Z2 = D2 / m (9)

  Here, when the mass of the main table 10 is increased, the effective diameter of the drive screw shaft 11 for the main table 11 is increased, so that the lead L1 is inevitably increased from the formula (5), and the pitch circle D1 must be increased. Therefore, the number of teeth Z1 also increases from the equation (8). Therefore, the mass of the main table 10 is proportional to a value obtained by synergizing the lead L1 of the main table drive screw shaft 11 and the number of teeth Z1 of the first gear 41.

  Similarly, when the mass of the weight table 30 increases, the effective diameter d2 of the weight table drive screw shaft 31 increases, so the lead L2 inevitably increases from equation (6), and the pitch circle D2 also increases. Therefore, the number of teeth Z2 is also increased from the equation (9). Therefore, the mass of the weight table 30 is proportional to a value obtained by synergizing the lead L2 of the weight table drive screw shaft 31 and the number of teeth Z2 of the second gear 42.

Further, the main table on which the drive motor 18 rotates and drives the mass of the weight table nut 32 mounted on the other weight table drive screw shaft 31 other than the main table drive screw shaft 11 on which the drive motor 18 rotates. It can be adjusted in accordance with the mass of the main table nut 12 sheathed on the drive screw shaft 11. Thereby, both inertial forces F1 and F2 can be easily balanced.
In the first embodiment, as the specifications of the linear motion table device 1, the rotational speed of the drive motor 18 is 450 to 3000 (rpm), and the feed speed of the main table 10 is 36 to 60 (m / min). The lead of the main table drive screw shaft 11 is 20 to 40 (mm).

And when the linear motion table apparatus 1 is used for a machine tool, when the mounted object 60, which is a workpiece, is cut and polished, the total mass M1 on the main table 10 side becomes lighter. Increases, and the acceleration α1 of the main table 10 increases. As a result, the balance between the inertial force F1 on the main table 10 side and the inertial force F2 on the weight table 30 side becomes unbalanced, the rotational speed of the drive motor 18 changes, and vibration occurs in the entire linear motion table device 1. .
Therefore, in this case, a weight (not shown) is added to the upper part of the main table 10 or the main table nut 12 to increase the total mass M1 on the main table 10 side, and the inertia force F1 and weight table on the main table 10 side are increased. The inertial force F2 on the 30th side is balanced and the rotational speed of the drive motor 18 is restored.

Further, when the linear motion table device 1 is used for a machine tool, after the workpiece 60 that is a workpiece mounted on the main table 10 is processed, another workpiece is combined with the processed workpiece 60. May be processed.
In this case, the mass of the object mounted on the main table 10 becomes heavy, and the total mass M1 on the main table 10 side becomes heavy, so that the feed speed of the main table 10 becomes slow and the acceleration α1 on the main table 10 side decreases. In addition, the balance between the inertial force F1 on the main table 10 side and the inertial force F2 on the weight table 30 side becomes unbalanced, the rotational speed of the drive motor 18 changes, and vibration occurs in the entire linear motion table device 1.
Therefore, in this case, a weight is added to the weight table 30 or the weight table nut 32 to increase the total mass M2 on the weight table 30 side, and the inertia force F1 on the main table 10 side and the inertia force on the weight table 30 side are increased. F2 is balanced and the rotational speed of the drive motor 18 is restored.

The weight table side first bearing 13 on the first gear 41 side and the weight table drive screw shaft 11 are fitted so that the screw shaft 11 does not expand in the axial direction even if the screw shaft 11 thermally expands. For this reason, when the weight of the mounted object 60 placed on the main table 10 increases, as shown in FIG. 4A, the main table drive screw shaft 11 bends, and the first gear 41 and the second gear. There is a possibility that the entire linear motion table device 1 may generate vibration without being engaged with 42 well.
In order to prevent this, a weight is added to the vicinity of the weight table drive screw shaft 31 of the weight table 30 or to the weight table nut 32. As a result, the weight table drive screw shaft 31 is bent, and the first gear 41 and the second gear 42 are properly meshed with each other as shown in FIG.

(Second Embodiment)
Next, a linear motion table device according to a second embodiment of the present invention will be described with reference to FIGS. 5 and 6, the same members as those shown in FIGS. 1 to 4 are denoted by the same reference numerals, and the description thereof may be omitted.
The linear motion table device of the second embodiment is shown in FIG. 5 and FIG. 6, and this linear motion table device 1 is similar to the linear motion table device 1 of the first embodiment. It is used in various manufacturing apparatuses such as flat panel display manufacturing apparatuses, and in particular, is an apparatus that moves an object to be mounted such as a workpiece in the horizontal direction to perform accurate positioning.
The linear motion table device 1 according to the second embodiment has the same basic configuration as the linear motion table device 1 according to the first embodiment, but is different in the configuration of the weight table 30.

  That is, the weight table 30 fixed to the weight table nut 32 includes a main body portion 30a fixed to the weight table nut 32, and a flat mounting plate portion 30b provided on the upper end surface of the main body portion 30a. ing. The mounting plate portion 30b is formed in a rectangular shape when viewed from the upper surface side, and a mounted object 60 (see FIG. 6) such as a workpiece can be mounted on the upper surface. The position of the upper surface of the mounting plate portion 30b is set to be substantially the same as the position of the upper surface of the mounting plate portion 10b of the main table 10 in the vertical direction. And the main-body part 30a is formed in the substantially rectangular parallelepiped shape extended long in a longitudinal direction (direction orthogonal to the paper surface in FIG. 5). Further, a through hole 30c through which the main table drive screw shaft 11 can be inserted is formed in the main body 30a so as to extend in the axial direction of the main table drive screw shaft 11.

According to the linear motion table device 1 of the second embodiment, not only the main table 10 but also the weight table 30 can be loaded with a load 60 such as a workpiece, so that the load is mounted on the main table 10 and the weight table 30. The same product can be manufactured on both tables 10 and 30 by mounting the object 60.
Moreover, in the linear motion table apparatus 1, as shown in FIG. 6, it is possible to process both the mounted object 60 on the main table 10 that moves in the horizontal direction and the mounted object 60 on the weight table 30. A tool 50 is installed. The tool 50 is connected to a tool control unit 51 that controls the operation of the tool 50. The horizontal position of the main table 10 and the weight table 30 is input from the encoder 21 (see FIG. 5) to the tool control unit 51, and on the main table 10 and the weight table 30 that are processed from a host computer (not shown). The final shape of the mounted object 60 is input. The tool control unit 51 can move both the mounted object 60 on the main table 10 and the mounted object 60 on the weight table 30 by moving the tool 50 based on these pieces of information. By inputting information that makes the final shape of the mounted object 60 on the main table 10 and the final shape of the mounted object 60 on the weight table 30 the same on the tool control unit 51, Products with the same shape can be produced.

(Modification)
As mentioned above, although embodiment of this invention was described, this invention is not limited to this, A various change and improvement can be performed.
For example, in the linear motion table device 1 of the first embodiment and the second embodiment, each of the main table drive screw shaft 11 and the weight table drive screw shaft 31 has a right screw groove formed on the outer periphery. A left-hand thread groove may be formed.
The drive motor 18 directly drives the main table drive screw shaft 11 to rotate, but does not rotate the main table drive screw shaft 11 but directly drives the weight table drive screw shaft 31. Also good.

  In the linear motion table device 1 according to the first and second embodiments, the main table 10 is mounted on the slider 16a of the first linear motion guide device 17a and the slider 16b of the second linear motion guide device 17b. The weight table 30 is mounted on the slider 36a of the third linear motion guide device 37a and the slider 36b of the fourth linear motion guide device 37b, but the main table 10 has one or more linear motion guide devices. The weight table 30 may also be mounted on the sliders of one or more linear motion guide devices.

  In the linear motion table device 1 of the first embodiment and the second embodiment, the base 2, the main table drive screw shaft 11 and the weight table drive screw shaft 31 are provided so as to extend in the horizontal direction. The weight table 30 is moved in the horizontal direction, but the main table, the main table drive screw shaft 11 and the weight table drive screw shaft 31 extend in the vertical direction perpendicular to the horizontal direction. 10 and the weight table 30 may be moved in the vertical direction.

DESCRIPTION OF SYMBOLS 1 Linear motion table apparatus 2 Base 10 Main table 11 Main table drive screw shaft 12 Main table nut 13 Main table side first bearing 14 Main table side second bearing 15a, 15b Rail 16a, 16b Slider 17a First linear motion guide Device 17b Second linear motion guide device 18 Drive motor 30 Weight table 31 Weight table drive screw shaft 32 Weight table nut 33 Weight table side first bearing 34 Weight table side second bearing 35a, 35b Rail 36a, 36b Slider 37a First 3 linear motion guide device 37b 4th linear motion guide device 41 1st gear 42 2nd gear 60 Mounted object

Claims (5)

A base installed to extend in one direction;
A pair of main table side first bearings and main table side second bearings attached to the base;
A pair of weight table side first bearings and weight table side second bearings attached to the base;
The drive screw shaft for the main table and the axial direction of the pair of the main table side first bearing and the main table side second bearing that are rotatably supported by the pair of main table side first bearing and the main table side second bearing so that the axial direction is the one direction are the one direction. A weight table drive screw shaft rotatably supported at both ends thereof by the pair of weight table side first bearing and weight table side second bearing,
A main table nut and a weight table that are externally mounted to the main table drive screw shaft via a rolling element and move along the main table drive screw shaft as the main table drive screw shaft rotates. For a weight table that is mounted on a drive screw shaft via a rolling element and moves in a direction opposite to the main table nut along the weight table drive screw shaft by rotating the weight table drive screw shaft. With nuts,
A main table capable of mounting an object to be mounted fixed to the main table nut, and a weight table fixed to the weight table nut;
A drive motor that rotationally drives one of the drive screw shaft for the main table and the drive screw shaft for the weight table;
A first gear fixed to the end of the main table drive screw shaft; and a second gear fixed to the end of the weight table drive screw shaft and meshing with the first gear;
The main table drive screw shaft and the weight table drive screw shaft are arranged in parallel in a direction orthogonal to the one direction as the axial direction ,
The masses of the main table and the weight table are values obtained by synergizing the number of teeth of the first gear and the lead of the driving screw shaft for the main table, the number of teeth of the second gear, and the driving screw shaft for the weight table, respectively. The linear motion table device is characterized by being proportional to the value obtained by synthesizing the lead . The mass of the main table nut or the weight table nut that is sheathed on the other drive screw shaft other than one of the main table drive screw shaft and the weight table drive screw shaft that the drive motor rotates. The mass of the main table nut or the weight table nut that is externally mounted on one of the drive screw shaft for the main table and the drive screw shaft for the weight table that are driven to rotate by the drive motor. The linear motion table device according to claim 1 , wherein the linear motion table device can be adjusted accordingly. The main table is attached to the slider of a linear motion guide device that is attached to the base and includes a rail that extends in the axial direction of the drive shaft for the main table and a slider that moves on the rail along the rail. The linear motion table device according to claim 1 , wherein the linear motion table device is provided. The weight table is attached to the base and includes a rail extending in the axial direction of the weight table drive shaft and a slider that moves on the rail along the rail. The weight table is attached to the slider. The linear motion table device according to any one of claims 1 to 3 , wherein the linear motion table device is provided. The linear table apparatus according to any one of claims 1 to 4 , wherein the weight table is capable of mounting an object to be mounted.

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