JP6452348B2 - Microscope system and control method thereof - Google Patents

Description

  The present invention relates to a microscope system that performs automatic focusing control on a sample by controlling a focusing unit that changes a distance between a sample and an objective lens, and a control method thereof.

  In recent years, microscopes have been widely used from biological research to industrial inspection processes. In a sample inspection process using a microscope, there is an increasing demand for improving the efficiency of focusing in order to shorten the inspection time.

  In view of the above background, it has become mainstream to increase the working efficiency by mounting a so-called AF (Auto Focus) device that electrically operates the focusing unit and automatically performs focusing. Many of such AF apparatuses execute AF by irradiating the sample surface with AF reference light, detecting the reflected light, and controlling the electric focusing unit. In these AF devices, after starting AF, the focus position is searched for a predetermined range (hereinafter referred to as “AF search”), and the focus position is detected only once (hereinafter referred to as “one-shot AF”). ), And after tracking is performed and the focus position is detected, the focusing unit is controlled so that the focus is kept on the sample surface as long as a reflected light amount that is more than a predetermined amount can be obtained from the sample surface. AF (hereinafter referred to as “track AF”) is generally performed.

  However, when the user performs observation while moving a steep and large sample in the XY direction (perpendicular to the optical axis of the objective lens), the following problem may occur. In the one-shot AF, as described above, the focus position is searched only within a predetermined range. If the focus position is out of the AF search range, the focusing unit is manually operated to the vicinity of the focus position. It is necessary to perform AF again after being driven by. Therefore, the operation must be performed at a plurality of observation points, and the user needs labor. In addition to the shortcomings of one-shot AF, in track AF, if the amount of reflected light beyond a predetermined amount that can be AF for continuing the tracking operation cannot be obtained during the tracking operation, the focusing unit is Since it stops, it is necessary to perform AF again. In particular, such a problem frequently occurs in a microscope with a long driving stroke of the focusing unit.

On the other hand, the following techniques for improving the usability of AF are known.
For example, as in the technique described in Patent Document 1, after the start of AF, if the user is out of the focus detection range, manual operation of the focusing operation unit by the user is accepted. A technique (hereinafter referred to as “assist AF”) for recovering and restarting AF is known. When this assist AF is combined with, for example, the above-described one-shot AF or track AF, the reflected light amount that exceeds a predetermined amount that can be AF from the sample during the track AF when the AF search fails in the one-shot AF or track AF. However, the control of the focusing unit by the AF device is temporarily stopped, but the irradiation of the reference light to the sample and the detection of the reflected light continue (this state is referred to as “AF standby state”), Then, when a reflected light amount that is greater than or equal to a predetermined amount that can be AF is obtained from the sample, it is possible to perform control such that the control of the focusing unit by the AF device is resumed. According to such control, the AF device can be automatically restarted only by the user manually driving the focusing unit up to the vicinity of the focus position. The trouble of repeating the operation instruction can be saved.

  Further, for example, as in the technique described in Patent Document 2, the proximity speed in the direction in which the specimen and the objective lens are brought close to each other and the far direction speed in the direction in which the specimen and the objective lens are moved away can be set separately. There is also known a technique for preventing adhesion of an objective lens and a specimen due to oil viscosity when a lens is used. Furthermore, as in the technique described in Patent Document 3, for example, a technique for setting a focusing movement speed when moving a sample within the in-focus determination range based on the depth of focus of the objective lens with respect to the observation wavelength is also known. It has been.

JP 2000-352661 A JP 2002-350738 A JP 2008-250238 A

  The long stroke type focusing unit is required to have high speed for driving the focusing unit. However, since the actuator responsible for driving the focusing unit cannot be accelerated or stopped suddenly, a predetermined acceleration / deceleration operation is required. Therefore, in the above-described assist AF, even if the user manually drives the focusing unit after entering the AF standby state to obtain a reflected light amount that is greater than a predetermined amount that can be AF, the driving focusing unit is There is a risk that the range over which a reflected light amount greater than a predetermined amount that can be AF is obtained may be exceeded due to overrun of the focusing portion due to the deceleration operation for stopping. In particular, such a phenomenon occurs frequently because the range in which the amount of reflected light that is greater than or equal to a predetermined amount that can be AF is narrowed with an objective lens having a high magnification. Therefore, it cannot be said that the operability of the assist AF is necessarily high.

  In view of the above circumstances, an object of the present invention is to provide a microscope system that improves the operability of assist AF and a control method thereof.

A first aspect of the present invention includes a focusing unit that changes a distance between a sample and an objective lens, an automatic focusing control unit that controls the focusing unit to perform automatic focusing control on the sample, A control unit that controls the automatic focusing control unit and the focusing unit; and an input unit that inputs an automatic focusing start instruction and a driving instruction by manual operation of the focusing unit. While the drive instruction by the manual operation of the focusing unit is continuously input from the input unit, control is performed so that the driving speed of the focusing unit is gradually increased. When a driving instruction by manual operation of the focusing unit is continuously input by the input unit after the focusing start instruction is input, the driving speed of the focusing unit is limited to a predetermined driving speed or less. It controls the focusing unit, the control However, when the focusing unit is controlled by limiting the driving speed of the focusing unit to the predetermined driving speed or less, automatic focusing can be performed by the automatic focusing control by the automatic focusing control unit. A microscope system is provided in which, when the state is reached, the automatic focusing control unit performs automatic focusing control after controlling the focusing unit so as to stop driving of the focusing unit .

According to a second aspect of the present invention, in the first aspect, the control unit performs an automatic focusing control by the automatic focusing control unit when the automatic focusing start instruction is input by the input unit. The automatic focusing control unit is controlled so that after the result of the automatic focusing control is an automatic focusing failure, a driving instruction for the focusing unit is continuously input by the input unit, Provided is a microscope system that controls the focusing unit by limiting the driving speed of the focusing unit to be equal to or lower than the predetermined driving speed .

According to a third aspect of the present invention, in the first or second aspect, the third aspect further includes a storage unit that stores a driving speed of the focusing unit, and the control unit stores the focusing unit stored in the storage unit. A microscope system is provided that controls the focusing unit by limiting the driving speed of the focusing unit to the predetermined driving speed or less based on the driving speed of the focusing unit.

According to a fourth aspect of the present invention, in the first or second aspect, the control unit changes a driving amount of the focusing unit in response to a driving instruction of the focusing unit input by the input unit. Provided is a microscope system that controls the focusing unit by limiting the driving speed of the focusing unit to be equal to or lower than the predetermined driving speed.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the driving instruction of the focusing unit is a driving instruction of the focusing unit in a direction to shorten or lengthen the distance. Provide a microscope system.

According to a sixth aspect of the present invention, there is provided a control method for a microscope system that performs an automatic focusing control on the sample by controlling a focusing unit that changes a distance between the sample and the objective lens. While the drive instruction by manual operation of the focusing unit continues to be input, the driving speed of the focusing unit is controlled to gradually increase, and after the automatic focusing start instruction is input to the microscope system, When a driving instruction by manual operation of the focusing unit continues to be input to the microscope system, the focusing unit is controlled to a predetermined driving speed or less to control the focusing unit, and the focusing unit is controlled. When the focusing unit is controlled by limiting the driving speed of the quasi-part to the predetermined driving speed or less, when the auto-focusing control enables the automatic focusing, the focusing is performed. Stop driving Performing automatic focus control after controlling the focusing unit so as to provide a control method.

  ADVANTAGE OF THE INVENTION According to this invention, the microscope system which improves the operativity of assist AF, and its control method can be provided.

It is a figure which shows the structural example of the microscope system which concerns on 1st Embodiment. It is a figure which shows the example of an external appearance structure of the microscope operation part which concerns on 1st Embodiment. It is a figure which shows the internal structural example of the microscope control part which concerns on 1st Embodiment. It is a figure which shows an example of the drive speed parameter of the focusing part memorize | stored as LUT in an internal memory part. It is a flowchart which shows an example of operation | movement of the microscope system which concerns on 1st Embodiment after CPU recognizes that AF unit changed to AF standby state. It is a figure which shows the example of an external appearance structure of the microscope operation part which concerns on 2nd this embodiment. It is a figure which shows the internal structural example of the microscope control part which concerns on 2nd Embodiment. An example of the operation of the microscope system according to the second embodiment after the CPU recognizes that the AF unit has shifted to the AF standby state and the sensitivity of the set focusing unit driving amount becomes FINE. It is a flowchart to show.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>
FIG. 1 is a diagram illustrating a configuration example of a microscope system according to the first embodiment of the present invention.

  As shown in FIG. 1, the microscope system according to the present embodiment is a system for observing an optically magnified image of a sample 102 placed on a manual XY stage 101, and includes a microscope body 100, a microscope operation unit 200, and A microscope control unit 300 is included.

  The microscope main body 100 includes a manual XY stage 101, a light source unit 103, a light projection tube unit 104, an objective lens 105, a focusing unit 106, an AF unit 107, a lens barrel unit 108, and an eyepiece lens 109.

The manual XY stage 101 has the sample 102 mounted thereon, and moves in the XY direction (perpendicular to the optical axis of the objective lens 105) by a user's manual operation.
The light source unit 103 emits observation light that irradiates the sample 102.

  The light projecting tube unit 104 guides the observation light emitted from the light source unit 103 to the sample 102 and guides the reflected light from the sample 102 at that time to the lens barrel unit 108. The light projecting tube unit 104 guides the AF light emitted from the AF unit 107 to the sample 102 and guides the reflected light from the sample 102 to the AF unit 107 at that time.

  The focusing unit 106 is an electric focusing unit that changes the distance between the sample 102 and the objective lens 105. More specifically, the focusing unit 106 includes a focusing motor 106a, a focusing shaft 106b, and a focusing support unit 106c. The focusing support unit 106c is moved up and down by the rotation of the focusing shaft 106b driven by the focusing motor 106a. It moves in the direction (optical axis direction of the objective lens 105). As a result, the objective lens 105 supported by the focusing support portion 106c also moves in the vertical direction, and the distance between the sample 102 and the objective lens 105 changes. The focusing motor 106a is a stepping motor, for example. In addition, the focusing support unit 106c also supports the light projection tube unit 104, the light source unit 103, the AF unit 107, the lens barrel unit 108, and the eyepiece lens 109.

  The AF unit 107 emits AF light that irradiates the sample 102, detects the amount of reflected light from the sample 102 at that time, and based on the detection result, the focusing unit 106 (focusing motor 106a). To control AF for the sample 102.

The lens barrel unit 108 guides the reflected light from the sample 102 irradiated with the observation light from the light source unit 103 to the eyepiece lens 109.
The microscope operation unit 200 includes various buttons and the like, and inputs an AF start instruction, a drive instruction for the focusing unit 106, and the like to the microscope control unit 300 in accordance with a user button operation or the like. Details of the microscope operation unit 200 will be described later with reference to FIG.

  The microscope control unit 300 controls the overall operation of the microscope system. For example, the microscope control unit 300 controls the light source unit 103, the AF start instruction input by the microscope operation unit 200, and the driving instruction of the focusing unit 106, and the focusing unit 106 (focusing motor 106a). ) To control.

FIG. 2 is a diagram illustrating an external configuration example of the microscope operation unit 200.
As shown in FIG. 2, the microscope operation unit 200 includes an AF start button 201, a focusing UP button 202, and a focusing DOWN button 203.

  The AF start button 201 is a button for instructing start of AF (assist AF). By pressing the AF start button 201, an AF start instruction is input from the microscope operation unit 200 to the microscope control unit 300.

  The focusing UP button 202 is a button for instructing driving of the focusing unit 106 so as to move the focusing support unit 106c upward. While the focusing UP button 202 is being pressed, a driving instruction for the focusing unit 106 to move the focusing support unit 106c upward is input to the microscope control unit 300 from the microscope operation unit 200. Is done. The focusing UP button 202 is also a button for instructing driving of the focusing unit 106 in a direction in which the distance between the sample 102 and the objective lens 105 is increased.

  The focusing DOWN button 203 is a button for instructing driving of the focusing unit 106 so as to move the focusing support unit 106c downward. While the focusing DOWN button 203 is pressed, a driving instruction for the focusing unit 106 to move the focusing support unit 106c downward is continued and input from the microscope operation unit 200 to the microscope control unit 300. Is done. The focusing DOWN button 203 is also a button for instructing to drive the focusing unit 106 in a direction to shorten the distance between the sample 102 and the objective lens 105.

FIG. 3 is a diagram illustrating an internal configuration example of the microscope control unit 300.
As shown in FIG. 3, the microscope control unit 300 includes a CPU (Central Processing Unit) 301, a RAM (Random Access Memory) 302, a ROM (Read Only Memory) 303, a command I / O (Input / Output) 304, and A focusing control unit 305 is included.

  The CPU 301 controls the entire operation of the microscope system according to the control program. For example, the CPU 301 controls the AF unit 107 and the focusing unit 106 (focusing motor 106a) according to the control of the light source unit 103, the AF start instruction input by the microscope operation unit 200, and the driving instruction of the focusing unit 106. To do. The CPU 301 and the microscope operation unit 200 are connected by a button control line.

The RAM 302 temporarily stores data necessary for control by the CPU 301.
The ROM 303 stores the control program and the like.
A command I / O 304 inputs and outputs commands and the like with the CPU 301, the focusing control unit 305, the light source unit 103, and the AF unit 107. Note that each of the focusing control unit 305, the light source unit 103, and the AF unit 107 and the command I / O 304 are connected by a command communication line.

  The focusing control unit 305 is based on the command from the command I / O 304 and the driving speed parameter of the focusing unit 106 stored as an LUT (Look-Up Table) in the internal storage unit 305a. The drive of the (focusing motor 106a) is controlled. The focusing control unit 305 and the focusing unit 106 (focusing motor 106a) are connected by a motor control line.

FIG. 4 is a diagram illustrating an example of the driving speed parameter of the focusing unit 106 stored as an LUT in the internal storage unit 305a.
As shown in FIG. 4, the LUT includes an initial speed [μm / s], an arrival speed [μm / s], and an acceleration / deceleration time [ms] as the driving speed parameters of the focusing unit 106. ] Are shown as 4 types and indexes 1 to 4. Thus, by specifying the index, the focusing unit 106 can be trapezoidally driven according to the corresponding combination of driving speed parameters.

  In the LUT, the initial speed [μm / s] is the same in indexes 1 to 4, but the arrival speed [μm / s] and acceleration / deceleration time [ms] increase in the order of indexes 1 to 4. It is supposed to be. As a result, while the user continues to press the focusing UP button 202 or the focusing DOWN button 203, the moving speed of the focusing support unit 106c is gradually increased by gradually increasing the designated index. Can do. In addition, since the acceleration / deceleration time is increased as the moving speed of the focusing support section 106c increases, the acceleration / deceleration speed by the trapezoidal drive is constant in any index.

  Note that the amount of overrun of the focusing support portion 106c (the amount of movement from when the moving focusing support portion 106c starts to stop (deceleration operation) until it actually stops) is proportional to the deceleration time. . Therefore, the amount of overrun movement decreases as the deceleration time is shorter.

  In the microscope system according to this embodiment having such a configuration, the focusing unit 106 is an example of a focusing unit that changes the distance between the sample and the objective lens. The AF unit 107 is an example of an automatic focusing control unit that controls a focusing unit to perform automatic focusing control on a sample. The microscope control unit 300 is an example of a control unit that controls the automatic focusing control unit and the focusing unit. The microscope operation unit 200 is an example of an input unit that inputs an automatic focusing start instruction and a focusing unit driving instruction. The internal storage unit 305a is an example of a storage unit that stores the driving speed of the focusing unit.

Next, the operation of the microscope system according to this embodiment will be described.
In the microscope system according to the present embodiment, when the power of the microscope control unit 300 is turned on, the CPU 301 transmits a light source lighting instruction command to the light source unit 103 via the command I / O 304. Upon receiving this command, the light source unit 103 turns on the light source and emits observation light. The light emitted from the light source unit 103 is introduced into the light projecting tube unit 104 and is condensed on the sample 102 by the objective lens 105 through an illumination optical system (not shown). Then, the reflected light from the sample 102 at this time is guided again to the eyepiece lens 109 through the AF unit 107 and the lens barrel unit 108 after passing through the objective lens 105 and the light projection tube unit 104 again. As a result, the user can visually observe an optically magnified image of the sample 102 through the eyepiece lens 109.

  When the user determines to focus on the sample 102 during visual observation of the optically magnified image of the sample 102, the user instructs the start of AF (assist AF) by pressing the AF start button 201 of the microscope operation unit 200. can do.

  When the user presses the AF start button 201, an AF start instruction is input to the CPU 301 by the microscope operation unit 200. The CPU 301 to which the AF start instruction is input transmits an AF start instruction command to the AF unit 107 via the command I / O 304. Upon receiving this command, the AF unit 107 performs an AF search. As a result, if the amount of reflected light from the sample 102 is less than the AF start threshold (amount of reflected light that can be AF), the AF unit 107 shifts to an AF standby state. Then, the control of the focusing unit 106 is temporarily stopped, and a command response indicating AF failure is transmitted to the CPU 301 via the command I / O 304. The CPU 301 receiving this command response recognizes that the AF unit 107 has shifted to the AF standby state.

  The AF unit 107 that has shifted to the AF standby state temporarily stops the control of the focusing unit 106, but continues to irradiate the sample 102 with the AF light and detect the reflected light. When becomes greater than or equal to the AF start threshold, a command response notifying that is transmitted to the CPU 301 via the command I / O 304, as will be described later.

When the CPU 301 recognizes that the AF unit 107 has shifted to the AF standby state, the microscope system according to the present embodiment performs the following operation.
FIG. 5 is a flowchart showing an example of the operation.

  As shown in FIG. 5, first, the CPU 301 determines whether or not the focusing button (focusing UP button 202 or focusing DOWN button 203) is pressed (S101). Here, when the determination result of S101 is No, this determination is repeated.

  On the other hand, when the determination result in S101 is Yes, the CPU 301 sets the index of the driving speed parameter of the focusing unit 106 to 1 (TBL = 1) (S102). Then, the driving speed parameter index of the focusing unit 106 is set to 1, and the driving of the focusing unit 106 is instructed as an argument with the driving direction of the focusing unit 106 as a direction corresponding to the focusing button pressed in S101. A command to be executed (for example, “MOVE 1, drive direction”) is transmitted to the AF unit 107 via the command I / O 304. The AF unit 107 that has received this command is in the AF standby state, and transmits the command to the focusing control unit 305 via the command I / O 304. The focusing control unit 305 that has received this command starts driving the focusing unit 106 in accordance with the command (S103).

The CPU 301 starts a dynamic speed changing timer for dynamically changing the driving speed of the focusing unit 106 simultaneously with the start of driving of the focusing unit 106 (S104).
Subsequently, the CPU 301 determines whether or not a command response is received from the AF unit 107 via the command I / O 304 to notify that the amount of reflected light from the sample 102 is equal to or greater than the AF start threshold value. (S105).

If the determination result in S105 is No, the CPU 301 determines whether or not the focusing button that was pressed in S101 is continuously pressed (S106).
If the determination result in S106 is Yes, the CPU 301 determines whether or not the dynamic speed change timer has expired (S107). If the determination result is No, the process returns to S105.

On the other hand, when the determination result in S107 is Yes, the CPU 301 determines whether or not the set index is less than 2 (TBL <2) (S108).
If the determination result in S108 is Yes, the CPU 301 adds 1 to the set index (TBL = TBL + 1) (S109).

  After S109, the CPU 301 uses a set index (that is, the index added with 1 in S109) as an argument to issue a command (for example, “SPEED index”) that instructs dynamic change of the driving speed of the focusing unit 106. , And sent to the AF unit 107 via the command I / O 304. The AF unit 107 that has received this command is in the AF standby state, and transmits the command to the focusing control unit 305 via the command I / O 304. Upon receiving this command, the focusing control unit 305 starts dynamic change of the driving speed of the focusing unit 106 according to the command (S110).

  After S110, the CPU 301 determines whether or not a command response is received from the AF unit 107 via the command I / O 304 to notify that the amount of reflected light from the sample 102 has reached the AF start threshold value or more. (S111).

If the determination result in S111 is No, the CPU 301 determines whether or not the focusing button that was pressed in S106 is continuously pressed (S112).
Here, when the determination result in S112 is Yes, the CPU 301 moves the focusing speed of the focusing unit 106 from the focusing control unit 305 through the command I / O 304, the AF unit 107, and the command I / O 304 in order. It is determined whether or not a command response notifying that the target has been changed has been received (S113).

If the determination result in S113 is No, the process returns to S111.
On the other hand, if the determination result in S113 is Yes, the CPU 301 restarts (resets and starts) the dynamic speed change timer (S114), and then the process returns to S105.

  On the other hand, if the determination result in S108 is No, the CPU 301 sends a command response from the AF unit 107 to notify that the amount of reflected light from the sample 102 is equal to or greater than the AF start threshold via the command I / O 304. It is determined whether or not it has been received (S115).

Here, when the determination result in S115 is No, the CPU 301 determines whether or not the focusing button pressed in S106 is continuously pressed (S116).
If the determination result in S116 is Yes, the process returns to S115.

On the other hand, if the determination result in S106 is No or the determination result in S112 is No, the CPU 301 stops the dynamic speed change timer (S117).
On the other hand, if the determination result in S116 is No, or after S117, the CPU 301 transmits a command to stop driving the focusing unit 106 to the AF unit 107 via the command I / O 304. The AF unit 107 that has received this command is in the AF standby state, and transmits the command to the focusing control unit 305 via the command I / O 304. Upon receiving this command, the focusing control unit 305 starts a drive stop operation (deceleration operation) of the focusing unit 106 in accordance with the command (S118).

  After S118, has the CPU 301 received from the focusing control unit 305 a command response notifying that the focusing unit 106 has stopped via the command I / O 304, the AF unit 107, and the command I / O 304 in order? It is determined whether or not (S119).

Here, when the determination result of S119 is No, this determination is repeated.
On the other hand, if the determination result in S119 is Yes, this flow ends.
On the other hand, if S105 is Yes or if S111 is Yes, the CPU 301 stops the dynamic speed change timer (S120).

  After S120 or when S115 is Yes, the control authority of the focusing unit 106 is switched from the CPU 301 to the AF unit 107, and the AF unit 107 sends a command to stop driving the focusing unit 106 to the command I / The data is transmitted to the focusing control unit 305 via O304. Upon receiving this command, the focusing control unit 305 starts a drive stop operation (deceleration operation) of the focusing unit 106 according to the command (S121).

  After S121, the AF unit 107 determines whether or not a command response notifying that the focusing unit 106 has stopped is received from the focusing control unit 305 via the command I / O 304 (S122).

Here, when the determination result of S122 is No, this determination is repeated.
On the other hand, if the determination result in S122 is Yes, the AF unit 107 performs AF control (S123), and this flow ends.

  With such an operation, since the driving speed parameter of the focusing unit 106 is limited to the driving speed parameter up to index 2 in the AF standby state, the focusing support unit by the driving stop operation of the focusing unit 106 started in S121. The amount of overrun 106c (the amount of overrun of the focusing support portion 106c due to the deceleration time) does not exceed the range in which the amount of reflected light that can be AF is obtained, and the AF control result in S123 results in an AF failure. Never become.

  As described above, according to the microscope system of the present embodiment, the driving focusing unit 106 is limited by limiting the driving speed of the focusing unit 106 when the user manually drives the focusing unit 106 in the AF standby state. Since the movement amount of the overrun of the focusing support portion 106c when the 106 is stopped can be suppressed, the AF failure again occurs when the AF is restarted (at the time of AF after the driving of the focusing portion 106 is stopped). In addition, the operability of the assist AF can be improved.

<Second Embodiment>
The microscope system according to the second embodiment of the present invention differs from the microscope system according to the first embodiment in part of the configuration and operation. Therefore, here, the microscope system according to the present embodiment will be described focusing on the different points. In the description, the same components as those in the microscope system according to the first embodiment will be described with the same reference numerals.

FIG. 6 is a diagram illustrating an external configuration example of the microscope operation unit according to the present embodiment.
As shown in FIG. 6, the microscope operation unit 400 according to the present embodiment includes an AF start button 401, a JOG handle 402, a JOG sensitivity switching button 403, and a JOG sensitivity indicator 404 (404a, 404b).

  The AF start button 401 is a button for instructing start of AF (assist AF). By pressing the AF start button 401, an AF start instruction is input from the microscope operation unit 400 to the microscope control unit 500 according to the present embodiment described later.

  The JOG handle 402 is a rotary handle for instructing driving of the focusing unit 106 in a direction of increasing or decreasing the distance between the sample 102 and the objective lens 105. When the JOG handle 402 is rotated, a rotary encoder (not shown) is rotated, and a pulse signal corresponding to the rotation is input from the microscope operation unit 400 to the microscope control unit 500.

  The JOG sensitivity switching button 403 is a button for switching the sensitivity (FINE / COARSE) of the driving amount of the focusing unit 106 with respect to the rotation operation of the JOG handle 402. Each time the JOG sensitivity switching button 403 is pressed, a sensitivity switching instruction for the driving amount of the focusing unit 106 is input from the microscope operation unit 400 to the microscope control unit 500.

  The JOG sensitivity indicator 404 is an indicator for indicating the sensitivity of the set driving amount of the focusing unit 106, and is, for example, an LED (Light Emitting Diode). More specifically, the JOG sensitivity indicator 404a is an LED that is turned on when the sensitivity of the set focusing unit 106 is COARSE and is turned off when it is FINE. The JOG sensitivity indicator 404b is an LED that is turned on when the sensitivity of the set driving amount of the focusing unit 106 is FINE and is turned off when the focus is COARSE.

FIG. 7 is a diagram illustrating an internal configuration example of the microscope control unit 500 according to the present embodiment.
As shown in FIG. 7, the microscope control unit 500 according to the present embodiment includes a CPU 501, a RAM 502, a ROM 503, a command I / O 504, a focusing control unit 505, and a pulse I / O 506.

  The CPU 501 controls the overall operation of the microscope system according to the present embodiment according to the control program. For example, the CPU 501 controls the light source unit 103. Further, for example, the CPU 501 switches the sensitivity of the set driving amount of the focusing unit 106 in accordance with the sensitivity switching instruction input by the microscope operation unit 200. More specifically, when the set sensitivity is COARSE, it is switched to FINE, and when the set sensitivity is FINE, it is switched to COARSE. Further, for example, the CPU 501 controls the JOG sensitivity indicator 404 so that one of the JOG sensitivity indicators 404a and 404b is turned on and the other is turned off according to the set sensitivity. Further, for example, the CPU 501 determines the AF unit 107 or the focusing unit 106 (focusing motor) according to the AF start instruction input from the microscope operation unit 400 or the number of pulses temporarily stored in the pulse I / O 506. 106a) is controlled. The CPU 501 and the microscope operation unit 400 are connected by an indicator control line and a button control line.

The RAM 502 temporarily stores data necessary for control by the CPU 501.
The ROM 503 stores the control program and the like.
The command I / O 504 inputs and outputs commands and the like with the CPU 501, the focusing control unit 505, the light source unit 103, and the AF unit 107. Note that each of the focusing control unit 505, the AF unit 107, and the light source unit 103 and the command I / O 504 are connected by a command communication line.

  The focusing control unit 505 controls the driving of the focusing unit 106 (focusing motor 106a) in accordance with a command from the command I / O 504. The focusing control unit 505 and the focusing unit 106 (focusing motor 106a) are connected by a motor control line.

  The pulse I / O 506 temporarily accumulates the number of pulses of the pulse signal (pulse signal corresponding to the rotation of the rotary encoder) input by the microscope operation unit 400. The pulse I / O 506 and the microscope operation unit 400 are connected by a pulse signal line.

  In the microscope system according to the present embodiment, the focusing unit 106 includes a focusing motor 106a and a gear mechanism (not shown), and supports focusing per pulse of a pulse signal input from the microscope operation unit 400 to the microscope control unit 500. The unit 106c is configured to move by 0.02 [μm].

  When the CPU 501 controls the focusing unit 106 and the sensitivity of the set driving amount of the focusing unit 106 is FINE, the CPU 501 uses the number of pulses acquired from the pulse I / O 506 as it is. However, when the sensitivity of the set driving amount of the focusing unit 106 is COARSE, the number of pulses acquired from the pulse I / O 506 is doubled, for example. More specifically, when controlling the focusing unit 106, the CPU 501 acquires the number of pulses temporarily accumulated in the pulse I / O 506 at intervals of 30 [ms], and uses the following formula (1): The moving speed of the focusing support section 106c is calculated as the driving speed of the focusing section 106 so that the moving time of the focusing support section 106c is 20 [ms], and the focusing section 106 is driven by rectangular driving. Control.

Movement speed [μm / ms] = 0.02 [μm / pls] * Number of acquired pulses [pls] / 20 [ms] (1)
As described above, the “number of acquired pulses” in the expression (1) is the same as the number of pulses acquired from the pulse I / O 506 when the sensitivity of the set driving amount of the focusing unit 106 is FINE. However, if it is COARSE, it is twice the number of pulses acquired from the pulse I / O 506.

  In the microscope system according to this embodiment having such a configuration, the focusing unit 106 is an example of a focusing unit that changes the distance between the sample and the objective lens. The AF unit 107 is an example of an automatic focusing control unit that controls a focusing unit to perform automatic focusing control on a sample. The microscope control unit 500 is an example of a control unit that controls the automatic focusing control unit and the focusing unit. The microscope operation unit 400 is an example of an input unit that inputs an automatic focusing start instruction and a focusing unit driving instruction.

Next, the operation of the microscope system according to this embodiment will be described.
In the microscope system according to the present embodiment, when the power of the microscope control unit 500 is turned on, the CPU 501 transmits a light source lighting instruction command to the light source unit 103 via the command I / O 504. Upon receiving this command, the light source unit 103 turns on the light source and emits observation light. The light emitted from the light source unit 103 is introduced into the light projecting tube unit 104 and is condensed on the sample 102 by the objective lens 105 through an illumination optical system (not shown). Then, the reflected light from the sample 102 at this time is guided again to the eyepiece lens 109 via the AF unit 107 and the lens barrel unit 108 after passing through the objective lens 105 and the light projection tube unit 104 again. As a result, the user can visually observe an optically magnified image of the sample 102 through the eyepiece lens 109.

  Further, the CPU 501 sets the sensitivity of the driving amount of the focusing unit 106 to the initial value FINE, turns off the JOG sensitivity indicator 404a, and turns on the JOG sensitivity indicator 404b. As a result, the user is notified that the sensitivity of the set driving amount of the focusing unit 106 is FINE.

  If the user feels it is difficult to focus on the sample 102 during the rotation operation of the JOG handle 402, the user can freely switch the sensitivity of the driving amount of the focusing unit 106 by pressing the JOG sensitivity switching button 403. . When the user presses the JOG sensitivity switching button 403, the microscope operation unit 400 inputs a sensitivity switching instruction for the driving amount of the focusing unit 106 to the CPU 501. The CPU 501 to which this sensitivity switching instruction has been input switches the sensitivity of the set driving amount of the focusing unit 106, and accordingly, one of the JOG sensitivity indicators 404a and 404b is turned on and the other is turned off. Thereby, the user is notified that the sensitivity of the set driving amount of the focusing unit 106 has been switched.

  In addition, when the user determines to focus on the sample 102 during visual observation of the optically magnified image of the sample 102, the user starts the AF (assist AF) by pressing the AF start button 401 of the microscope operation unit 400. Can be instructed.

  When the user presses the AF start button 401, an AF start instruction is input to the CPU 501 by the microscope operation unit 400. The CPU 501 to which the AF start instruction is input transmits an AF start instruction command to the AF unit 107 via the command I / O 504. Upon receiving this command, the AF unit 107 performs an AF search. As a result, if the amount of reflected light from the sample 102 is less than the AF start threshold (amount of reflected light that can be AF), the AF unit 107 shifts to an AF standby state. Then, the control of the focusing unit 106 is temporarily stopped, and a command response indicating AF failure is transmitted to the CPU 501 via the command I / O 504. The CPU 501 that has received this command response recognizes that the AF unit 107 has shifted to the AF standby state. In addition, when the sensitivity of the driving amount of the focusing unit 106 that is set is COARSE, the CPU 501 switches it to FINE, turns off the JOG sensitivity indicator 404a, and turns on the JOG sensitivity indicator 404b. As a result, the user is notified that the sensitivity of the set driving amount of the focusing unit 106 has been switched to FINE. Thereafter, the operation of the JOG sensitivity switching button 403 is disabled until this flow is completed.

  The AF unit 107 that has shifted to the AF standby state temporarily stops the control of the focusing unit 106, but continues to irradiate the sample 102 with the AF light and detect the reflected light. When the value becomes equal to or greater than the AF start threshold value, a command response to that effect is transmitted to the CPU 501 via the command I / O 504 as described later.

  When the CPU 501 recognizes that the AF unit 107 has shifted to the AF standby state and the sensitivity of the set driving amount of the focusing unit 106 becomes FINE, the microscope system according to the present embodiment operates as follows. I do.

FIG. 8 is a flowchart showing an example of the operation.
As shown in FIG. 8, first, the CPU 501 starts a pulse acquisition timer for acquiring the number of pulses temporarily stored in the pulse I / O 506 at a cycle of 30 [ms] (S201).

Subsequently, the CPU 501 determines whether or not the pulse acquisition timer has expired (S202). Here, when the determination result is No, this determination is repeated.
On the other hand, if the determination result in S201 is Yes, the CPU 501 acquires the number of pulses temporarily accumulated in the pulse I / O 506 (S203).

  Subsequently, the CPU 501 determines whether or not the number of pulses acquired in S203 is 0 (S204). If the determination result is Yes, that is, if the JOG handle 402 has not been rotated, the process returns to S201.

  On the other hand, when the determination result in S204 is No, that is, when the JOG handle 402 is rotated, the CPU 501 uses the number of pulses acquired in S203 according to the above-described equation (1). A driving speed is calculated (S205).

  Subsequently, the CPU 501 uses the driving speed of the focusing unit 106 calculated in S205 and the driving amount (number of pulses acquired in S203) of the focusing unit 106 as arguments, and commands (instructed to drive the focusing unit 106). For example, “JOG_MOVE drive speed, drive amount”) is transmitted to the AF unit 107 via the command I / O 504. In this case, the driving direction of the focusing unit 106 can be indicated by, for example, the sign of the driving amount of the focusing unit 106. In this case, the positive / negative sign is given according to the pulse signal that is the source of the corresponding number of pulses. The AF unit 107 that has received this command is in the AF standby state, and transmits the command to the focusing control unit 505 via the command I / O 504. Upon receiving this command, the focusing control unit 505 starts driving the focusing unit 106 according to the command (S206).

  Subsequently, the CPU 501 determines whether or not a command response is received from the AF unit 107 via the command I / O 504 to notify that the amount of reflected light from the sample 102 has reached the AF start threshold value or more. (S207).

  Here, when the determination result in S207 is No, the CPU 501 has finished driving the focusing unit 106 from the focusing control unit 505 through the command I / O 504, the AF unit 107, and the command I / O 504 in order. It is determined whether or not a command response for notifying is received (S208).

If the determination result is No, the process returns to S207. If Yes, the process returns to S201.
On the other hand, if the determination result in S207 is Yes, the control authority of the focusing unit 106 is switched from the CPU 501 to the AF unit 107, and the AF unit 107 issues a command to stop driving the focusing unit 106 as a command I / O 504. To the focusing control unit 505. Upon receiving this command, the focusing control unit 505 starts driving stop operation of the focusing unit 106 according to the command (S209). When the control authority of the focusing unit 106 is switched from the CPU 501 to the AF unit 107, the rotation operation of the JOG handle 402 is invalidated thereafter until this flow is finished.

  Subsequently, the AF unit 107 determines whether or not a command response notifying that the focusing unit 106 has stopped is received from the focusing control unit 505 via the command I / O 504 (S210).

Here, when the determination result of S210 is No, this determination is repeated.
On the other hand, when the determination result in S210 is Yes, the AF unit 107 performs AF control (S211), and this flow ends.

  By such an operation, the sensitivity of the driving amount of the focusing unit 106 is limited to FINE in the AF standby state. Therefore, the overrun of the focusing support unit 106c due to the driving stop operation of the focusing unit 106 started in S209. The amount of movement does not exceed the range in which the amount of reflected light that can be AF is obtained, and the result of AF control in S211 does not result in AF failure.

  As described above, according to the microscope system according to the present embodiment, the same effect as that of the microscope system according to the first embodiment can be obtained, and before the user rotates the JOG handle 402 in the AF standby state. Therefore, it is possible to save the trouble of switching the sensitivity of the driving amount of the focusing unit 106 to FINE so that the AF failure does not occur again when the AF is resumed.

Although the microscope systems according to the first and second embodiments have been described above, various modifications can be made in the microscope system according to each embodiment.
For example, in the microscope system according to the first embodiment, in the AF standby state, the driving speed parameter of the focusing unit 106 is limited to the driving speed parameter up to index 2, but is not limited thereto. The amount of overrun movement of the focusing support unit 106c due to the drive stop operation of the focusing unit 106 after the control of the focusing unit 106 is switched from the CPU 301 to the AF unit 107 is the amount of reflected light that can be AF (AF can be resumed). May be limited to the driving speed parameter up to another index as long as it does not exceed the range in which can be obtained.

  In addition, the microscope system according to each embodiment is configured to perform AF using the active AF method, but may be configured to perform AF using the passive AF method, for example. In this case, instead of the AF unit 107, for example, a configuration for performing contrast AF using an imaging element such as a CCD (Charge Coupled Device) may be provided.

  As mentioned above, each embodiment mentioned above shows the example of this invention, in order to make an understanding of invention easy, and this invention is not limited to the above-mentioned embodiment. The present invention can be variously modified and changed without departing from the concept of the present invention defined in the claims.

DESCRIPTION OF SYMBOLS 100 Microscope main body 101 Manual XY stage 102 Sample 103 Light source unit 104 Projection tube unit 105 Objective lens 106 Focusing part 106a Focusing motor 106b Focusing shaft 106c Focusing support part 107 AF unit 108 Lens barrel unit 109 Eyepiece 200 Microscope operation Section 201 AF start button 202 Focus UP button 203 Focus DOWN button 300 Microscope control section 301 CPU
302 RAM
303 ROM
304 Command I / O
305 Focus control unit 305a Internal storage unit 400 Microscope operation unit 401 AF start button 402 JOG handle 403 JOG sensitivity switching button 404 (404a, 404b) JOG sensitivity indicator 500 Microscope control unit 501 CPU
502 RAM
503 ROM
504 Command I / O
505 Focusing control unit 506 Pulse I / O

Claims (6)

A focusing section that changes the distance between the sample and the objective lens;
An automatic focusing control unit for controlling the focusing unit to perform automatic focusing control on the sample;
A control unit for controlling the automatic focusing control unit and the focusing unit;
An input unit for inputting an automatic focusing start instruction and a driving instruction by manual operation of the focusing unit;
With
The control unit controls to gradually increase the driving speed of the focusing unit while a driving instruction by manual operation of the focusing unit is continuously input by the input unit,
The control unit drives the focusing unit when the input unit continues to input a driving instruction by manual operation of the focusing unit after the automatic focusing start instruction is input by the input unit. Controlling the focusing unit by limiting the speed to a predetermined driving speed or less ,
When the control unit controls the focusing unit while limiting the driving speed of the focusing unit to be equal to or lower than the predetermined driving speed, automatic focusing is performed by automatic focusing control by the automatic focusing control unit. When the automatic focusing control unit controls the focusing unit to stop driving the focusing unit, the automatic focusing control unit performs automatic focusing control .
A microscope system characterized by that. The control unit controls the automatic focusing control unit to perform automatic focusing control by the automatic focusing control unit when the automatic focusing start instruction is input by the input unit; After the result of focusing control is an automatic focusing failure, when the driving instruction for the focusing unit is continuously input from the input unit, the driving speed of the focusing unit is limited to the predetermined driving speed or less. And controlling the focusing unit,
The microscope system according to claim 1. A storage unit for storing the driving speed of the focusing unit;
The control unit controls the focusing unit by limiting the driving speed of the focusing unit to the predetermined driving speed or less based on the driving speed of the focusing unit stored in the storage unit.
The microscope system according to claim 1 or 2, wherein The control unit limits the driving speed of the focusing unit to the predetermined driving speed or less by changing a driving amount of the focusing unit in response to a driving instruction of the focusing unit input by the input unit. To control the focusing unit,
The microscope system according to claim 1 or 2, wherein The driving instruction of the focusing unit is a driving instruction of the focusing unit in a direction to shorten or lengthen the distance.
The microscope system according to any one of claims 1 to 4 , wherein the microscope system is characterized in that A control method of a microscope system that performs automatic focusing control on the sample by controlling a focusing unit that changes a distance between the sample and the objective lens,
While the drive instruction by manual operation of the focusing unit continues to be input to the microscope system, control to gradually increase the driving speed of the focusing unit,
After the automatic focusing start instruction is input to the microscope system, when the driving instruction by manual operation of the focusing unit is continuously input to the microscope system, the driving speed of the focusing unit is set to a predetermined driving speed. Control the focusing unit with the following restrictions :
When the focusing unit is controlled by limiting the driving speed of the focusing unit to be equal to or lower than the predetermined driving speed, when automatic focusing is enabled by the automatic focusing control, Performing automatic focusing control after controlling the focusing unit to stop the driving of the focusing unit ,
A control method characterized by that.