JP6431159B2 - Substrate cleaning device - Google Patents

Description

  The present invention relates to a substrate cleaning apparatus that cleans a substrate with a roll cleaning tool while supplying a cleaning liquid to a substrate such as a wafer. The substrate cleaning apparatus and the substrate cleaning method of the present invention can be applied not only to a wafer having a diameter of 300 mm but also to a wafer having a diameter of 450 mm, and further to a flat panel manufacturing process, an image sensor manufacturing process such as CMOS and CCD, and an MRAM. The present invention can also be applied to a magnetic film manufacturing process.

  In the manufacturing process of a semiconductor device, various films having different physical properties are formed on a silicon substrate, and fine metal wiring is formed by applying various processes to these films. For example, in a damascene wiring formation process, a wiring groove is formed in a film, a metal such as Cu is embedded in the wiring groove, and then a metal wiring is formed by removing excess metal by chemical mechanical polishing (CMP). The After polishing the substrate, the substrate is usually cleaned by a substrate cleaning apparatus. The substrate is cleaned by rotating the substrate horizontally and bringing a roll cleaning tool such as a roll sponge into sliding contact with the substrate while supplying a cleaning solution such as a chemical solution from the supply nozzle to the substrate.

JP 2010-278103 A

  When the substrate is rubbed with a roll cleaning tool in the presence of the cleaning liquid, cleaning waste such as particles is generated, and as a result, the cleaning liquid containing the cleaning waste exists on the substrate. It is desirable to discharge such cleaning liquid from the substrate as soon as possible. However, since the substrate rotates horizontally, it takes some time for the cleaning liquid to be removed from the substrate by centrifugal force. The cleaning liquid on the substrate comes into contact with the roll cleaning tool again as the substrate rotates, and is then pushed back toward the center of the substrate by the new cleaning liquid supplied from the supply nozzle. For this reason, the cleaning liquid containing the cleaning waste remains on the substrate for a long time, diluting the cleaning liquid newly supplied to the substrate, resulting in a decrease in cleaning efficiency.

  The present invention has been made to solve the above-described conventional problems, and provides a substrate cleaning apparatus capable of quickly removing a cleaning liquid used for cleaning by a roll cleaning tool from a substrate such as a wafer. With the goal.

In order to achieve the above-described object, one embodiment of the present invention includes a substrate holding unit that holds a substrate, a cleaning liquid supply nozzle that supplies a cleaning liquid to a first region on the upper surface of the substrate, and the presence of the cleaning liquid. A roll cleaning tool that cleans the substrate by sliding contact with the upper surface of the substrate, and a second cleaning liquid supply nozzle on the upper surface of the substrate when the cleaning liquid supply nozzle supplies the cleaning liquid to the first region . A pure water supply nozzle that supplies pure water to the region and forms a flow along a longitudinal direction of the roll cleaning tool in the second region, and the pure water supply nozzle is adjacent to the roll cleaning tool. The second region is located on the opposite side of the first region with respect to the roll cleaning tool, and the supply direction of the pure water is from the center side of the substrate toward the outer peripheral side. Substrate cleaning apparatus characterized by A.
In a preferred aspect of the present invention, the apparatus further comprises an elevating drive mechanism that brings the roll cleaning tool close to the substrate, and a guide rail that guides the vertical movement of the elevating drive mechanism.

One embodiment of the present invention includes a substrate holding unit that holds a substrate, a first cleaning liquid supply nozzle that supplies a cleaning liquid to the upper surface of the substrate, and a sliding contact with the upper surface of the substrate in the presence of the cleaning liquid. When the first roll cleaning tool for cleaning the upper surface and the first cleaning liquid supply nozzle supply the cleaning liquid to the upper surface of the substrate, the upper surface of the substrate is aligned along the longitudinal direction of the first roll cleaning tool. A pure water supply nozzle that supplies pure water to form a flow of pure water; a second cleaning liquid supply nozzle that supplies a cleaning liquid to the lower surface of the substrate; and a sliding contact with the lower surface of the substrate in the presence of the cleaning liquid. And a second roll cleaning tool for cleaning the lower surface of the substrate , wherein the pure water supply nozzle is located on the opposite side of the first cleaning liquid supply nozzle with respect to the first roll cleaning tool. It is a substrate cleaning device .

One embodiment of the present invention includes a substrate holding unit that holds the substrate in a state where the substrate is inclined, a chemical solution supply nozzle that supplies a chemical solution on the upper surface of the substrate, and an upper surface of the substrate in the presence of the chemical solution. A roll cleaning tool that cleans the substrate by sliding contact, and a pure water supply nozzle that supplies pure water onto the upper surface of the substrate when the chemical solution supply nozzle supplies the chemical solution to the substrate. The pure water supply nozzle is arranged to supply pure water along the longitudinal direction of the roll cleaning tool that is in sliding contact with the substrate, and the pure water supply nozzle supplies the chemical liquid with respect to the roll cleaning tool. The chemical solution supply nozzle is a slit nozzle having a slit-like liquid discharge port or a porous nozzle having a plurality of liquid discharge ports arranged in a straight line. Group A cleaning apparatus.

  A reference example of the present invention includes a substrate holding unit that holds and rotates a substrate, a cleaning liquid supply nozzle that supplies a cleaning liquid to the first region of the substrate, and a sliding contact with the substrate in the presence of the cleaning liquid. A roll cleaning tool for cleaning the substrate; and a pure water supply nozzle for supplying pure water to the second region of the substrate, wherein the second region is opposite to the first region with respect to the roll cleaning tool. The substrate cleaning apparatus is characterized in that the pure water supply direction is a direction from the center side to the outer peripheral side of the substrate.

In a preferred aspect of the above reference example, the second region is a region on the downstream side of the roll cleaning tool with respect to the rotation direction of the substrate.
In a preferred aspect of the above reference example, the supply direction of the pure water is a direction from the center side of the substrate toward the outer peripheral side along the roll cleaning tool.
In a preferred aspect of the above reference example, the supply angle of the pure water with respect to the surface of the substrate is in the range of 5 degrees to 60 degrees.

In a preferred aspect of the reference example, the first region of the substrate is a region that is located on the upstream side of the roll cleaning tool with respect to the rotation direction of the substrate and that extends linearly along the roll cleaning tool. It is characterized by.
In a preferred aspect of the above reference example, the pure water supply nozzle forms a flow of pure water on the surface of the substrate so as to cross a center line of the substrate perpendicular to the longitudinal direction of the roll cleaning tool. And
In a preferred aspect of the above reference example, the substrate holding unit holds and rotates the substrate with its surface inclined.

  In another embodiment of the present invention, the substrate is held and rotated, a cleaning liquid is supplied to the first region of the substrate, and a roll cleaning tool is slidably contacted with the substrate in the presence of the cleaning liquid. During the cleaning of the substrate, pure water is supplied to the second region of the substrate, and the second region is located on the opposite side of the first region with respect to the roll cleaning tool. The pure water supply direction is a direction from the center side to the outer periphery side of the substrate.

In a preferred aspect of the above reference example, the second region is a region on the downstream side of the roll cleaning tool with respect to the rotation direction of the substrate.
In a preferred aspect of the above reference example, the supply direction of the pure water is a direction from the center side of the substrate toward the outer peripheral side along the roll cleaning tool.
In a preferred aspect of the above reference example, the supply angle of the pure water with respect to the surface of the substrate is in the range of 5 degrees to 60 degrees.

In a preferred aspect of the reference example, the first region of the substrate is a region that is located on the upstream side of the roll cleaning tool with respect to the rotation direction of the substrate and that extends linearly along the roll cleaning tool. It is characterized by.
In a preferred aspect of the above reference example, the flow of pure water is formed on the surface of the substrate so as to cross the center line of the substrate perpendicular to the longitudinal direction of the roll cleaning tool.
A preferred embodiment of the above reference example is characterized in that the substrate is rotated with its surface tilted.

  According to the present invention, after the cleaning liquid comes into contact with the roll cleaning tool, it is quickly pushed away from the substrate by the flow of pure water. Therefore, the newly supplied cleaning liquid is not diluted with the used cleaning liquid, and as a result, the cleaning efficiency can be increased.

It is a top view which shows the whole structure of the substrate processing apparatus provided with the substrate cleaning apparatus which concerns on embodiment of this invention. 1 is a perspective view showing a substrate cleaning apparatus according to an embodiment of the present invention. FIG. 3 is a top view of the substrate cleaning apparatus shown in FIG. 2. It is a side view of a pure water supply nozzle. It is a figure which shows the example which inclined the wafer. It is a figure which shows the other example which inclined the wafer. It is a top view which shows other embodiment of a board | substrate cleaning apparatus. It is a top view which shows other embodiment of a board | substrate cleaning apparatus.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a plan view showing an overall configuration of a substrate processing apparatus including a substrate cleaning apparatus according to an embodiment of the present invention. As shown in FIG. 1, the substrate processing apparatus includes a substantially rectangular housing 10 and a load port 12 on which a substrate cassette for stocking substrates such as a large number of wafers is placed. The load port 12 is disposed adjacent to the housing 10. The load port 12 can be mounted with an open cassette, a SMIF (Standard Manufacturing Interface) pod, or a FOUP (Front Opening Unified Pod). SMIF and FOUP are sealed containers that can maintain an environment independent of the external space by accommodating a substrate cassette inside and covering with a partition wall.

  Inside the housing 10, a plurality of (four in this embodiment) polishing units 14a to 14d, a first cleaning unit 16 and a second cleaning unit 18 for cleaning the substrate after polishing, and a substrate after cleaning are dried. A drying unit 20 is accommodated. The polishing units 14a to 14d are arranged along the longitudinal direction of the substrate processing apparatus, and the cleaning units 16, 18 and the drying unit 20 are also arranged along the longitudinal direction of the substrate processing apparatus.

  In a region surrounded by the load port 12, the polishing unit 14a, and the drying unit 20, a first substrate transfer robot 22 is disposed, and a substrate transfer unit 24 is disposed in parallel with the polishing units 14a to 14d. The first substrate transfer robot 22 receives the substrate before polishing from the load port 12 and passes it to the substrate transfer unit 24, and receives the dried substrate from the drying unit 20 and returns it to the load port 12. The substrate transport unit 24 transports the substrate received from the first substrate transport robot 22 and delivers the substrate to and from each of the polishing units 14a to 14d. Each polishing unit polishes the surface of a substrate by bringing a substrate such as a wafer into sliding contact with the polishing surface while supplying a polishing liquid (slurry) to the polishing surface.

  A second substrate transport robot 26 is disposed between the first cleaning unit 16 and the second cleaning unit 18 to transport the substrate between the cleaning units 16 and 18 and the substrate transport unit 24, and the second cleaning is performed. A third substrate transport robot 28 is disposed between the unit 18 and the drying unit 20 to transport the substrate between the units 18 and 20. Further, an operation control unit 30 that controls the movement of each unit of the substrate processing apparatus is disposed inside the housing 10.

  In this example, the substrate cleaning apparatus according to the embodiment of the present invention is used as the first cleaning unit 16 to clean the substrate by rubbing a roll cleaning tool such as a roll sponge on both the front and back surfaces of the substrate in the presence of the cleaning liquid. Yes. A pen sponge type substrate cleaning apparatus is used as the second cleaning unit 18. As the drying unit 20, a spin drying apparatus is used that holds a substrate, blows IPA vapor from a moving nozzle to dry the substrate, and further rotates the substrate at high speed to dry the substrate by centrifugal force.

  The substrate is polished by at least one of the polishing units 14a to 14d. The polished substrate is cleaned by the first cleaning unit 16 and the second cleaning unit 18, and the cleaned substrate is dried by the drying unit 20.

  FIG. 2 is a perspective view showing the first cleaning unit (substrate cleaning apparatus) 16. As shown in FIG. 2, the first cleaning unit 16 includes four holding rollers 71, 72, 73, and 74 that hold and rotate the wafer W horizontally, and a cylindrical roll sponge that contacts the upper and lower surfaces of the wafer W. (Roll cleaning tools) 77, 78, cleaning tool rotating mechanisms 80, 81 for rotating these roll sponges 77, 78 about their axes, and an upper side for supplying a rinsing liquid (for example, pure water) to the upper surface of the wafer W A rinse liquid supply nozzle 85 and an upper chemical liquid supply nozzle 87 for supplying a chemical liquid to the upper surface of the wafer W are provided. Although not shown, a lower rinsing liquid supply nozzle that supplies a rinsing liquid (for example, pure water) to the lower surface of the wafer W and a lower chemical liquid supply nozzle that supplies a chemical liquid to the lower surface of the wafer W are provided. In the present specification, the chemical liquid and the rinse liquid are collectively referred to as a cleaning liquid, and the upper chemical liquid supply nozzle 87 and the rinse liquid supply nozzle 85 are sometimes collectively referred to as a cleaning liquid supply nozzle.

  The holding rollers 71, 72, 73, 74 can be moved in the direction of approaching and separating from the wafer W by a driving mechanism (for example, an air cylinder) (not shown). Of the four holding rollers, two holding rollers 71 and 74 are connected to a substrate rotating mechanism 75, and these holding rollers 71 and 74 are rotated in the same direction by the substrate rotating mechanism 75. With the four holding rollers 71, 72, 73 and 74 holding the wafer W, the two holding rollers 71 and 74 rotate to rotate the wafer W around its axis. In the present embodiment, the substrate holding unit that holds and rotates the wafer W includes the holding rollers 71, 72, 73, and 74 and the substrate rotating mechanism 75.

  A cleaning tool rotating mechanism 80 that rotates the upper roll sponge 77 is attached to a guide rail 89 that guides the vertical movement thereof. The cleaning tool rotating mechanism 80 is supported by an elevating drive mechanism 82, and the cleaning tool rotating mechanism 80 and the upper roll sponge 77 are moved up and down by the elevating drive mechanism 82. Although not shown, the cleaning tool rotating mechanism 81 for rotating the lower roll sponge 78 is also supported by the guide rail so that the cleaning tool rotating mechanism 81 and the lower roll sponge 78 are moved up and down by the lift drive mechanism. It has become. As the lifting drive mechanism, for example, a motor drive mechanism using a ball screw or an air cylinder is used. At the time of cleaning the wafer W, the roll sponges 77 and 78 move in directions close to each other and come into contact with the upper and lower surfaces of the wafer W. As a roll cleaning tool, a roll brush may be used instead of the roll sponge.

  FIG. 3 is a top view of the substrate cleaning apparatus shown in FIG. A pure water supply nozzle 88 for supplying pure water to the upper surface of the wafer W is disposed above the wafer W held by the holding rollers 71, 72, 73, 74. The pure water supply nozzle 88 is disposed adjacent to the roll sponge 77 and is disposed so as to supply pure water from the center side of the wafer W toward the outer peripheral side. That is, the pure water supplied from the pure water supply nozzle 88 flows on the wafer W along the roll sponge 77 from the center side toward the outer peripheral side.

  The pure water supply nozzle 88 is disposed on the opposite side of the chemical sponge supply nozzle 87 and the rinse liquid supply nozzle 85 (that is, the cleaning liquid supply nozzle) with respect to the roll sponge 77. As shown in FIG. 3, the chemical solution and the rinse solution (that is, the cleaning solution) are supplied to the first region R1 on the upper surface of the rotating wafer W, and the pure water is supplied to the second region R2. The first region R1 and the second region R2 are defined as two regions located on both sides of the roll sponge 77. That is, the second region R2 is located on the opposite side of the first region R1 with respect to the roll sponge 77.

  The chemical liquid and the rinsing liquid supplied to the first region R1 of the wafer W come into contact with the roll sponge 77 as the wafer W rotates, and then transferred to the second region R2. The chemical liquid and the rinsing liquid transferred to the second region R2 include cleaning waste such as particles generated by scrub cleaning of the wafer W. The pure water supplied from the pure water supply nozzle 88 forms a flow toward the outside of the wafer W in the second region R2, and this flow pushes the chemical solution and the rinsing solution from the wafer W. Therefore, the chemical liquid and the rinse liquid (that is, the cleaning liquid) used for scrub cleaning of the wafer W are quickly removed from the wafer W by pure water, and the cleaning effect by the chemical liquid and the rinse liquid can be improved. Furthermore, since the amount of cleaning waste accumulated in the roll sponge 77 is reduced, the life of the roll sponge 77 can be greatly extended.

  FIG. 4 is a side view of the pure water supply nozzle 88. As shown in FIG. 4, the pure water supply nozzle 88 is inclined with respect to the surface of the wafer W. The pure water supply angle (indicated by symbol α in FIG. 4) is preferably small to some extent. This is to prevent the pure water from scattering when it collides with the wafer W and to form a strong flow of pure water toward the outside of the wafer W. Specifically, the pure water supply angle with respect to the surface of the wafer W is preferably 5 degrees or more and 60 degrees or less. A more preferable supply angle is 5 degrees or more and 30 degrees or less.

  In order to ensure the effect of removing the cleaning solution (chemical solution and rinse solution), the flow rate of pure water is preferably 500 mL / min to 2 L / min. If the flow rate of pure water is high, the supply direction of pure water when viewed from above the wafer W may not be parallel to the roll sponge 77. That is, the pure water supply direction when viewed from above the wafer W may be inclined with respect to the roll sponge 77.

  In order to ensure the effect of removing the cleaning liquid (chemical liquid and rinse liquid), the second region R2 to which pure water is supplied is located downstream of the roll sponge 77 in the rotation direction of the wafer W as shown in FIG. It is preferable that By supplying pure water to the second region R2 defined at this position, it is possible to secure a sufficient time for the flow of pure water to push the cleaning liquid off the wafer W.

  As shown in FIG. 3, the pure water supply nozzle 88 preferably forms a flow of pure water on the surface of the wafer W so as to cross the center line CL of the wafer W perpendicular to the longitudinal direction of the roll sponge 77. The pure water flowing in this way can push away the cleaning liquid present in the central region of the wafer W.

  Next, a process for cleaning the wafer W will be described. First, the wafer W is rotated around its axis by the holding rollers 71, 72, 73, 74. Next, the chemical solution is supplied to the upper and lower surfaces of the wafer W from the upper chemical solution supply nozzle 87 and the lower chemical solution supply nozzle (not shown). In this state, the upper and lower surfaces of the wafer W are scrubbed by the roll sponges 77 and 78 slidably contacting the upper and lower surfaces of the wafer W while rotating around the horizontally extending axis. The roll sponges 77 and 78 are longer than the diameter (width) of the wafer W and are in contact with the entire upper and lower surfaces of the wafer W. While the chemical solution is being supplied to the wafer W, pure water is supplied from the pure water supply nozzle 88 to the wafer W. The chemical used for scrub cleaning is quickly discharged from the wafer W by the flow of pure water formed on the second region R2 of the wafer W.

  After scrub cleaning, the wafer W is rinsed by supplying pure water as a rinsing liquid to the upper and lower surfaces of the rotating wafer W while the roll sponges 77 and 78 are in sliding contact with the upper and lower surfaces of the wafer W. . Similarly, pure water is supplied from the pure water supply nozzle 88 to the wafer W while the rinse liquid is supplied to the wafer W. The rinse liquid used for rinsing the wafer W is quickly discharged from the wafer W by the flow of pure water formed on the second region R2 of the wafer W.

  In order to dilute the chemical liquid with the rinse liquid, the chemical liquid and the rinse liquid may be simultaneously supplied to the first region R1 of the wafer W. Also in this case, while the chemical liquid and the rinse liquid are being supplied to the wafer W, pure water is supplied from the pure water supply nozzle 88 to the second region R2 of the wafer W.

  As shown in FIG. 5, the holding rollers 71, 72, 73, 74 hold and rotate the wafer W in a state where the surface of the wafer W is inclined downward from the first region R1 toward the second region R2. May be. Alternatively, as shown in FIG. 6, the holding rollers 71, 72, 73 and 74 hold the wafer W in a state where the wafer surface is inclined downward along the flow direction of the pure water discharged from the pure water supply nozzle 88. And may be rotated. According to these examples shown in FIGS. 5 and 6, the cleaning liquid is more quickly removed from the surface of the wafer W due to its own weight and centrifugal force.

  As shown in FIG. 7, a pure water supply nozzle 90 that supplies pure water to the third region R3 of the wafer W may be further provided. The third region R3 is located on the same side as the first region R1 with respect to the roll sponge 77, and is located on the downstream side of the roll sponge 77 with respect to the rotation direction of the wafer W. Furthermore, the third region R3 is located upstream of the first region R1 with respect to the rotation direction of the wafer W. The two pure water supply nozzles 88 and 90 are arranged symmetrically with respect to the center of the wafer W. Similar to the first pure water supply nozzle 88, the second pure water supply nozzle 90 is disposed so as to supply pure water from the center side of the wafer W toward the outer peripheral side. In the embodiment shown in FIG. 7, the rinsing liquid supply nozzle can be omitted.

  FIG. 8 is a diagram showing still another embodiment. The embodiment shown in FIG. 8 differs from the embodiment shown in FIG. 7 in that a flat nozzle that forms a flat fan-shaped jet is used for the chemical supply nozzle 87, and the chemical is supplied to the fourth region R4. The chemical solution supply nozzle 92 is provided. The fourth region R4 is located on the same side as the second region R2 with respect to the roll sponge 77, and is located on the upstream side of the roll sponge 77 with respect to the rotation direction of the wafer W. In the embodiment shown in FIG. 8, no rinsing liquid supply nozzle is provided.

  The flat nozzle is suitable for supplying liquid to a linear narrow area. A flat nozzle is also used for the chemical solution supply nozzle 92 that supplies the chemical solution to the fourth region R4. In this embodiment, as shown in FIG. 8, the first region R 1 to which the chemical liquid is supplied from the chemical liquid supply nozzle 87 is located on the upstream side of the roll sponge 77 with respect to the rotation direction of the wafer W, and It is a narrow region extending linearly along. The fourth region R4 to which the chemical solution is supplied from the chemical solution supply nozzle 92 is also a narrow region that is located on the upstream side of the roll sponge 77 with respect to the rotation direction of the wafer W and extends linearly along the roll sponge 77.

  By using the flat nozzle as the chemical solution supply nozzles 87 and 92, the chemical solution can be supplied to a linear region along the longitudinal direction of the roll sponge 77. Since the chemical solution supplied to such a region uniformly contacts the roll sponge 77 as the wafer W rotates, uniform wafer cleaning can be realized. The chemical supply nozzles 87 and 92 are not limited to flat nozzles as long as the chemical can be supplied to a linear region along the longitudinal direction of the roll sponge 77. For example, slit nozzles having slit-like liquid discharge ports or perforated nozzles having a plurality of liquid discharge ports arranged in a straight line may be used as the chemical solution supply nozzles 87 and 92.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and may be implemented in various forms within the scope of the technical idea.

DESCRIPTION OF SYMBOLS 10 Housing 12 Load port 14a-14d Polishing unit 16 1st washing | cleaning unit (board | substrate washing | cleaning apparatus)
18 Second cleaning unit 20 Drying unit 22 First substrate transfer robot 24 Substrate transfer unit 26 Second substrate transfer robot 28 Third substrate transfer robot 30 Operation control units 71 to 74 Holding roller 75 Substrate rotating mechanism 77, 78 Roll sponge 80, 81 Cleaning Tool Rotating Mechanism 82 Elevating Drive Mechanism 85 Rinse Solution Supply Nozzle 87 Chemical Solution Supply Nozzle 88 Pure Water Supply Nozzle 89 Guide Rail 90 Pure Water Supply Nozzle 92 Chemical Solution Supply Nozzle

Claims (4)

A substrate holder for holding the substrate;
A cleaning liquid supply nozzle for supplying a cleaning liquid to a first region on the upper surface of the substrate;
A roll cleaning tool for cleaning the substrate by slidingly contacting the upper surface of the substrate in the presence of the cleaning liquid;
When the cleaning liquid supply nozzle supplies the cleaning liquid to the first area, the pure water is supplied to the second area on the upper surface of the substrate and flows along the longitudinal direction of the roll cleaning tool. And a pure water supply nozzle for forming in the second region ,
The pure water supply nozzle is disposed adjacent to the roll cleaning tool,
The second region is located on the opposite side of the first region with respect to the roll cleaner;
The pure water supply direction is a direction from the center side to the outer peripheral side of the substrate. Elevating drive mechanism for bringing the roll cleaning tool close to the substrate;
The substrate cleaning apparatus according to claim 1, further comprising a guide rail that guides the vertical movement of the elevating drive mechanism. A substrate holder for holding the substrate;
A first cleaning liquid supply nozzle for supplying a cleaning liquid to the upper surface of the substrate;
A first roll cleaning tool for cleaning the upper surface of the substrate by slidingly contacting the upper surface of the substrate in the presence of the cleaning liquid;
When the first cleaning liquid supply nozzle supplies the cleaning liquid to the upper surface of the substrate, pure water is supplied to the upper surface of the substrate along the longitudinal direction of the first roll cleaning tool, and the flow of pure water Forming a pure water supply nozzle,
A second cleaning liquid supply nozzle for supplying a cleaning liquid to the lower surface of the substrate;
A second roll cleaning tool for cleaning the lower surface of the substrate by slidingly contacting the lower surface of the substrate in the presence of the cleaning liquid ,
The substrate cleaning apparatus , wherein the pure water supply nozzle is located on the opposite side of the first cleaning liquid supply nozzle with respect to the first roll cleaning tool . A substrate holding unit for holding the substrate in a state where the substrate is inclined;
A chemical supply nozzle for supplying a chemical on the upper surface of the substrate;
A roll cleaning tool for cleaning the substrate by sliding on the upper surface of the substrate in the presence of the chemical solution;
A pure water supply nozzle for supplying pure water onto the upper surface of the substrate when the chemical solution supply nozzle supplies the chemical solution to the substrate ;
The pure water supply nozzle is arranged to supply pure water along the longitudinal direction of the roll cleaning tool that is in sliding contact with the substrate,
The pure water supply nozzle is located on the side opposite to the chemical liquid supply nozzle with respect to the roll cleaning tool,
The substrate cleaning apparatus, wherein the chemical solution supply nozzle is a slit nozzle having a slit-like liquid discharge port or a multi-hole nozzle having a plurality of liquid discharge ports arranged in a straight line.

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