JP6380622B2 - Control device and control method - Google Patents

Description

  The present disclosure relates to a laser scanning microscope apparatus and a control method thereof.

  As a technique for observing an object with high resolution, there is a laser scanning microscope apparatus. In a laser scanning microscope apparatus, an object is irradiated with laser light, and the laser light is scanned on the object, while transmitting light, backscattered light, fluorescence, Raman scattered light, and various types of light generated by nonlinear optical effects. Detect the intensity of etc. Thereby, various kinds of information about the object can be acquired as two-dimensional or three-dimensional image data.

  FIG. 12 shows a configuration example of a conventional laser scanning microscope 1. As shown in FIG. 12, the laser light emitted from the laser 10 passes through a pair of galvano scanners 21 and relay lens optical systems 22, 23 equipped with a pair of reflecting mirrors and enters the objective lens 26. . The laser beam condensed from the objective lens 26 creates a small focused spot on the observation target 5. By changing the direction of the laser beam by the galvano scanner 21, the incident angle to the objective lens 26 is changed, and the focused spot on the observation target 5 can be scanned. Reflected light or fluorescence from the observation object 5 is detected by the photodetector 27 via the objective lens 26, the half mirror or the wavelength separation mirror 24. The laser scanning microscope 1 generates a two-dimensional image based on the photodetector signal corresponding to the focused spot position detected by the photodetector 27.

  In such a laser scanning microscope 1, a high-resolution lens that generates a smaller focused spot generally has a narrow field of view and a narrow image acquisition range. The objective lens 26 of the conventional laser scanning microscope 1 has a so-called trade-off relationship between resolution and field of view (that is, image acquisition range). In addition, when the galvano scanner 21 is used as an optical system as in the laser scanning microscope 1 described above, the size of the galvano scanner 21 is relatively large, which is an adverse effect of downsizing the microscope apparatus.

  Thus, for example, Patent Document 1 discloses a small confocal microscope that uses a low-mass objective lens. In such a confocal microscope, the drive system for driving the objective lens is constituted by an electromagnetic voice coil that is supported by a flexible material and interlocks with a permanent magnet on a fixed portion of the optical assembly.

Japanese Patent Laid-Open No. 10-90606

  However, in the confocal microscope described in Patent Document 1, it is possible to reduce the size of the apparatus, but it is difficult to acquire an image with a wide field of view.

Therefore, a new and improved control device and control method thereof that can downsize the device and acquire a wide-field image are proposed.

According to the present disclosure, an objective lens is mounted, a first movable part that is movable in a first direction, and a first movable part are mounted and movable in a second direction different from the first direction. A second movable part, and a control part that adjusts the position of the objective lens by moving the first movable part and the second movable part, and controls the irradiation direction of the laser light irradiated to the observation target. A control device is provided.

Further, according to the present disclosure, moving the first movable portion mounted with the objective lens in the first direction, different from the first second said movable portion in the first direction equipped with movable parts Moving in the second direction, adjusting the position of the objective lens by moving the first movable portion and the second movable portion, and controlling the irradiation direction of the laser light irradiated to the observation target. A control method is provided.

  As described above, according to the present disclosure, it is possible to reduce the size of the apparatus and acquire a wide-field image. Note that the above effects are not necessarily limited, and any of the effects shown in the present specification, or other effects that can be grasped from the present specification, together with or in place of the above effects. May be played.

It is a schematic block diagram which shows the structure of the laser scanning microscope apparatus which concerns on 1st Embodiment of this indication, Comprising: The state seen from the plane is shown. It is a schematic front view which shows the state which looked at the laser scanning microscope apparatus of FIG. 1 from the arrow A side. It is a schematic side view which shows the state which looked at the laser scanning microscope apparatus of FIG. 1 from the arrow B side. It is explanatory drawing which shows one structural example of a spherical aberration correction part, Comprising: The example comprised by a convex lens and a concave lens is shown. It is explanatory drawing which shows one structural example of a spherical aberration correction | amendment part, Comprising: The example comprised by a concentric multi division | segmentation liquid crystal phase element is shown. FIG. 6 is a schematic side view of FIG. 5. It is explanatory drawing which shows one structural example of a focus position control part, Comprising: The example comprised by two convex lenses is shown. It is explanatory drawing which shows one structural example of an objective lens provided with a reflective mirror. It is explanatory drawing which shows a reflection type objective lens. It is a schematic block diagram which shows the structure of the laser scanning microscope apparatus which concerns on 2nd Embodiment of this indication, Comprising: The state seen from the plane is shown. It is a schematic front view which shows the state which looked at the laser scanning microscope apparatus of FIG. 10 from the x-axis positive direction side. It is explanatory drawing which shows the example of 1 structure of the laser scanning microscope which concerns on the related technique of this indication.

  Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In addition, in this specification and drawing, about the component which has the substantially same function structure, duplication description is abbreviate | omitted by attaching | subjecting the same code | symbol.

The description will be made in the following order.
1. First embodiment (first movable part: linear movement, second movable part: linear movement)
1.1. Configuration of laser scanning microscope apparatus 1.2. Scanning the focused spot 1.3. Summary 2. Second embodiment (first movable part: rotational movement, second movable part: linear movement)
2.1. Configuration of laser scanning microscope apparatus 2.2. Scanning the focused spot 2.3. Summary

<1. First Embodiment>
[1.1. Configuration of laser scanning microscope apparatus]
First, the configuration of the laser scanning microscope apparatus 100 according to the first embodiment of the present disclosure will be described with reference to FIGS. FIG. 1 is a schematic configuration diagram showing a configuration of the laser scanning microscope apparatus 100 according to the present embodiment, and shows a state seen from a plane. FIG. 2 is a schematic front view showing the laser scanning microscope apparatus 100 of FIG. 1 as viewed from the arrow A side. FIG. 3 is a schematic side view showing the laser scanning microscope apparatus 100 of FIG. 1 as viewed from the arrow B side.

  A laser scanning microscope apparatus 100 according to the present embodiment scans an observation target with a laser 102 that emits light and light emitted from the laser 102, detects reflected light or fluorescence of the observation target, and detects a two-dimensional image. And an image acquisition unit 104 for acquiring.

  The laser 102 emits laser light that irradiates the observation target. The laser 102 may be a solid laser or a semiconductor laser, for example. The medium (material) of the solid-state laser and the semiconductor laser may be appropriately selected so as to emit laser light having a desired wavelength band according to the application of the laser scanning microscope apparatus 100.

  The image acquisition unit 104 includes a spherical aberration correction unit 110, a focal position control unit 120, a beam splitter 130, a reflection mirror 140, and an objective lens 150.

  The spherical aberration correction unit 110 is an optical system that corrects spherical aberration. The spherical aberration correction unit 110 may be configured by a convex lens 112 and a concave lens 114 as shown in FIG. 4, for example. The parallel laser light emitted from the laser 102 passes through the convex lens 112 and the concave lens 114 which are the spherical aberration correction unit 110. At this time, the spherical aberration amount to be generated can be changed by moving either the convex lens 112 or the concave lens 114 in the optical axis direction to change the position on the optical axis. In general, the spherical aberration correction unit 110 can be realized by changing the position of at least one lens in the optical axis direction in two or more lens groups.

  Alternatively, the spherical aberration correction unit 110 may be configured using a concentric multi-partition liquid crystal phase element 116 as shown in FIGS. In the concentric multi-part liquid crystal phase element 116, the electrodes of the liquid crystal panel are formed in an annular shape, and these annular electrodes are arranged so as to be concentric. By individually applying an electric field to each region partitioned by the concentric circular electrodes of the concentric multi-divided liquid crystal phase element 116, a phase distribution is given to the laser light transmitted through the concentric multi-divided liquid crystal phase element 116. For example, an arbitrary amount of spherical aberration can be given by giving a phase of a quartic function in the radial direction.

  The focal position control unit 120 is an optical system that adjusts the focal position of the objective lens 150. The focal position control unit 120 may be configured by two convex lenses 122 and 124, for example, as shown in FIG. The parallel laser light emitted from the spherical aberration correction unit 110 passes through the convex lenses 122 and 124 that are the focal position control unit 120. At this time, by moving one of the convex lenses 122 and 124 in the direction of the optical axis and changing the position on the optical axis, the amount of defocus that occurs can be changed, and the focal position of the objective lens 150 can be changed. be able to. In general, the focal position control unit 120 can be realized by changing the position in the optical axis direction of at least one lens among two or more lens groups.

  Alternatively, as shown in FIGS. 5 and 6, the focal position control unit 120 may use a concentric multi-division liquid crystal phase element 116 as in the spherical aberration correction unit 110. By individually applying an electric field to each region partitioned by the concentric circular electrodes of the concentric multi-divided liquid crystal phase element 116, a phase distribution is given to the laser light transmitted through the concentric multi-divided liquid crystal phase element 116. For example, an arbitrary defocus amount can be given by giving a quadratic function phase in the radial direction.

  The beam splitter 130 is an optical system that guides light incident from one direction and light incident from the other direction in different directions. As the beam splitter 130, for example, a half mirror in which the intensity of reflected light and transmitted light are substantially the same may be used. Instead of the beam splitter 130, a wavelength separation mirror such as a dichroic mirror that reflects light of a specific wavelength and transmits light of other wavelengths may be used. The laser light incident on the beam splitter 130 from the focal position control unit 120 passes through the beam splitter 130 and is guided to the reflection mirror 140. In addition, the return light of the laser beam irradiated on the observation target 5 is incident on the beam splitter 130 from the reflection mirror 140. This return light is reflected by the beam splitter 130 and guided to the photodetector 180.

  The reflection mirror 140 is an optical system that reflects light and guides it in a predetermined direction. In the present embodiment, the reflection mirror 140 is placed on the second base 176 of the second movable part 170 described later. The reflection mirror 140 reflects the laser light incident from the beam splitter 130 and guides it to the objective lens 150. Further, the reflection mirror 140 reflects the return light of the laser light irradiated on the observation target 5 and guides it to the beam splitter 130.

  The objective lens 150 is a lens that first creates an image of the observation target 5. The objective lens 150 condenses the laser light incident from the reflection mirror 140 and forms a condensing spot on the observation target 5. The objective lens 150 is provided so as to be movable on a plane by a first movable part 160 and a second movable part 170 described later. The position of the focused spot by the objective lens 150 can be moved by changing the position of the objective lens 150 by the first movable portion 160 and the second movable portion 170. Details of the operation of the objective lens 150 when scanning the observation object 5 will be described later. The objective lens 150 guides the reflection mirror 140 when the return light of the laser beam irradiated on the observation target 5 is incident.

  The first movable unit 160 is a linear drive mechanism that moves the objective lens 150 in a predetermined direction (first direction, x direction in the present embodiment). The first movable part 160 includes a first motor 162, a first drive shaft 164, and a first base 166. The first motor 162 is a drive source (first drive unit) that moves the objective lens 150 fixed to the first base 166 in the x direction. For example, a voice coil type motor or a stepping motor can be used. . Here, since the first movable portion 160 on which the objective lens 150 is mounted is required to have extremely high speed as compared with the second movable portion 170, use of a voice coil type motor is suitable.

  The first base 166 holds the objective lens 150. For example, as shown in FIG. 8, the objective lens 150 is provided so as to face the observation object 5. At this time, the first base 166 is provided with the reflection mirror 151 on the side opposite to the side on which the observation target 5 is disposed with respect to the objective lens 150. The reflection mirror 151 guides light between the reflection mirror 140 and the objective lens 150.

  For example, as shown in FIG. 9, the objective lens may be a reflective objective lens 152 in which the objective lens 150 and the reflective mirror 151 shown in FIG. 8 are integrated. The reflection type objective lens 152 has a curved surface on which the laser light from the reflection mirror 140 and the return light from the observation target 5 are incident. Laser light from the reflection mirror 140 is irradiated toward the observation target 5 by the curved surface, and return light from the observation target 5 is guided toward the reflection mirror 140 by the curved surface.

  The first motor 162 is connected to the first base 166 via the first drive shaft 164, and the first base 166 is periodically reciprocated linearly by the first motor 162. Thereby, the objective lens 150 is periodically reciprocated linearly in the x direction. The first movable portion 160 is placed on a second base 176 that constitutes the second movable portion 170. Therefore, the first movable part 160 is provided so as to be movable in a predetermined direction (y direction) by the second movable part 170.

  The second movable portion 170 holds the reflection mirror 140, the objective lens 150, and the first movable portion 160 that moves the x-direction while holding the objective lens 150 in a predetermined direction (second direction, y in this embodiment). Direction actuator). The second movable unit 170 includes a second motor 172, a second drive shaft 174, and a second base 176. The second motor 172 is a drive source (second drive unit) that moves the reflection mirror 140, the objective lens 150, and the first movable unit 160 placed on the second base 176 in the y direction. A voice coil type motor or a stepping motor can be used.

  The second motor 172 is connected to the second base 176 via the second drive shaft 174, and the second base 176 is periodically reciprocated linearly by the second motor 172. Thereby, the reflection mirror 140 and the objective lens 150 are periodically reciprocated linearly in the y direction.

  The photodetector 180 receives the return light of the laser beam irradiated on the observation object 5 and generates a two-dimensional image. The photodetector 180 may include a light receiving element such as a photodiode or a photomultiplier tube (PMT). Further, for example, the photodetector 180 may include various imaging elements such as a charge coupled device (CCD) and a complementary metal oxide semiconductor (CMOS). The light detector 180 converts the return light generated by the scanning of the laser light onto the observation target 5 continuously (in the case where the laser light is a CW laser) or intermittently (when the laser light is a pulse laser). Can be detected).

  The laser scanning microscope apparatus 100 according to the present embodiment includes a control unit (not shown) that controls the apparatus in an integrated manner. For example, the control unit performs various types of image signal processing on the image signal obtained as a result of laser scanning control and laser scanning on the observation target 5. Further, the control unit controls the moving speed of the first movable part 160 and the moving speed of the second movable part 170.

  In such a laser scanning microscope apparatus 100, the laser light emitted in the y direction from the laser 102 passes through the spherical aberration correction unit 110 and the focal position control unit 120, and the second base of the second movable unit 170. Guided to the reflection mirror 140 on the table 176. The laser beam reflected in the x direction by the reflection mirror 140 is reflected in the z direction by the reflection mirror 151 on the first base 166 of the first movable unit 160 and enters the objective lens 150.

  The laser light irradiated from the objective lens 150 to the observation target 5 is reflected by the observation target 5. The return light is guided from the objective lens 150 to the reflection mirror 151 in the z direction, then reflected by the reflection mirror 151 in the x direction and incident on the reflection mirror 140. The reflection mirror 140 reflects the incident return light in the y direction and guides it to the beam splitter 130. The beam splitter 130 reflects the incident return light and guides it to the photodetector 180. The photodetector 180 detects the return light, and generates a two-dimensional image based on the photodetector signal corresponding to the position of the objective lens 150, that is, the focused spot position.

[1.2. Scanning the focused spot]
The laser beam condensed by the objective lens 150 creates a small focused spot on the observation target 5. Here, in the laser scanning microscope apparatus 100 according to the present embodiment, the first movable unit 160 and the second movable unit 170 are linearly reciprocated in directions orthogonal to each other using the independent motors 162 and 172 as drive sources. To change the position of the objective lens 150 in the two-dimensional plane. Since the focused spot is generated at the center of the objective lens 150, the observation target 5 can be scanned by the movement of the objective lens 150.

  More specifically, first, the first movable part 160 is parallel to the optical axis of the laser light incident on the reflection mirror 151 disposed on the first base 166 of the first movable part 160 from the reflection mirror 140. Configured to be movable in any direction (ie, x direction). Further, the second movable part 170 moves in a direction parallel to the optical axis (that is, the y direction) incident on the reflection mirror 140 disposed on the second base 176 of the second movable part 170 from the beam splitter 130. Configured to be possible. Accordingly, the objective lens 150 can be moved in the x direction by the first movable portion 160 and can be moved in the y direction orthogonal to the x direction by the second movable portion 170.

  Therefore, the first movable portion 160 and the second movable portion 170 can always guide the laser light to the center of the objective lens 150. As a result, the simple and lightweight objective lens 150 can be used, and the load on the first motor 162 that is the drive source of the first movable part 160 is greatly reduced.

  In the present embodiment, the objective lens 150 is mounted on the first movable portion 160, and only the first movable portion 160 and the reflection mirror 140 are mounted on the second movable portion 170. That is, in the laser scanning microscope apparatus 100 according to the present embodiment, for example, the spherical aberration correction unit 110, the focal position control unit 120, the beam splitter 130, and the photodetector 180 are not mounted on the movable unit but are fixed to the fixed unit. Yes. Therefore, the number of members moved by the first movable portion 160 and the second movable portion 170 can be reduced, and the mounting member can be reduced in weight. This weight reduction can reduce the motor load on each of the movable parts 160 and 170, so that the focused spot can be scanned at a high speed, and an image can be acquired in a shorter time.

  At this time, the control unit controls the moving speed of the first movable part 160 to be faster than the moving speed of the second movable part 170. Thereby, the movement of the objective lens 150 can be further accelerated, the focused spot can be scanned at high speed, and an image can be acquired in a shorter time. Furthermore, since the first movable unit 160 and the second movable unit 170 can be driven independently, the field of view can be widened by the stroke of the motor, and the resolution can be increased.

[1.3. Summary]
Heretofore, the configuration of the laser scanning microscope apparatus 100 according to the first embodiment and the operation during the focused spot scanning using the laser scanning microscope apparatus 100 have been described. In the laser scanning microscope apparatus 100 according to the present embodiment, the first movable unit 160 on which the objective lens 150 and the reflection mirror 151 are mounted and the first movable unit 160 can be moved in a direction orthogonal to the first movable unit 160. 1 movable portion 160 and a second movable portion 170 on which the reflection mirror 140 is mounted. As a result, since it is configured with small optical components without using a galvano scanner as in the prior art, the apparatus can be made smaller and thinner. Further, by reducing the weight by reducing the elements mounted on the movable parts 160 and 170, it is possible to acquire a high-resolution and wide-field image at high speed.

<2. Second Embodiment>
Next, the configuration of the laser scanning microscope apparatus 200 according to the second embodiment of the present disclosure will be described with reference to FIGS. 10 and 11. FIG. 10 is a schematic configuration diagram showing the configuration of the laser scanning microscope apparatus 200 according to the present embodiment, and shows a state viewed from a plane. FIG. 11 is a schematic front view showing a state in which the laser scanning microscope apparatus 200 of FIG. 10 is viewed from the x-axis positive direction side. The laser scanning microscope apparatus 200 according to the present embodiment is different from the laser scanning microscope apparatus 100 according to the first embodiment in the operation of the first movable unit 260 on which the objective lens 150 is mounted.

  Hereinafter, the configuration of the laser scanning microscope apparatus 200 according to the present embodiment and the operation during the focused spot scanning will be described. In the laser scanning microscope apparatus 200 shown in FIGS. 10 and 11, the same reference numerals are given to components having the same configuration and the same functions as those of the first embodiment, and detailed description thereof is omitted.

[2.1. Configuration of laser scanning microscope apparatus]
The laser scanning microscope apparatus 200 according to the present embodiment scans an observation target with a laser 102 that emits light and light emitted from the laser 102, detects reflected light or fluorescence of the observation target, and detects a two-dimensional image. And an image acquisition unit 204 for acquiring.

  The laser 102 emits laser light that irradiates the observation target. The laser 102 may be configured similarly to the first embodiment. Laser light emitted from the laser 102 enters the image acquisition unit 204.

  The image acquisition unit 204 includes a spherical aberration correction unit 110, a focal position control unit 120, a beam splitter 130, a first reflection mirror 240, a second reflection mirror 242, a third reflection mirror 244, and an objective lens 150. Consists of.

  The spherical aberration correction unit 110 is an optical system that corrects spherical aberration. The spherical aberration correction unit 110 is equivalent to that of the first embodiment, and may be constituted by a convex lens 112 and a concave lens 114 as shown in FIG. 4, for example. As shown in FIGS. You may comprise using the element 116. FIG. The spherical aberration correction unit 110 corrects the aberration of the laser light incident from the laser 102 and then guides it to the focal position control unit 120.

  The focal position control unit 120 is an optical system that adjusts the focal position. For example, as shown in FIG. 7, the focal position control unit 120 may be configured by two convex lenses 122 and 124, and as shown in FIGS. 5 and 6, as with the spherical aberration correction unit 110, concentric multi-segmentation. A liquid crystal phase element 116 may be used. The focal position control unit 120 defocuses the laser light and then guides it to the beam splitter 130.

  The beam splitter 130 is an optical system that guides light incident from one direction and light incident from the other direction in different directions. As in the first embodiment, for example, a half mirror may be used as the beam splitter 130. Further, a wavelength separation mirror such as a dichroic mirror may be used instead of the beam splitter 130. The laser light incident on the beam splitter 130 from the focal position control unit 120 passes through the beam splitter 130 and is guided to the reflection mirror 140. In addition, the return light of the laser beam irradiated on the observation target 5 is incident on the beam splitter 130 from the reflection mirror 140. This return light is reflected by the beam splitter 130 and guided to the photodetector 180.

  The first reflection mirror 240, the second reflection mirror 242, and the third reflection mirror 244 are optical systems that reflect laser light and guide it in a predetermined direction between the beam splitter 130 and the objective lens 150.

  The first reflecting mirror 240 is placed on the second base 176 of the second movable part 170. The first reflection mirror 240 reflects the laser light incident from the beam splitter 130 and guides it to the second reflection mirror 242. The second reflection mirror 242 is disposed above the first reflection mirror (on the z-axis positive direction side). The second reflection mirror 242 guides the laser light incident from the first reflection mirror 240 to the third reflection mirror 244. The third reflecting mirror 244 is fixed to a first base 266 described later together with the objective lens 150. The third reflection mirror 244 guides the laser light incident from the second reflection mirror 242 to the objective lens 150.

  Further, the first reflection mirror 240, the second reflection mirror 242, and the third reflection mirror 244 sequentially reflect the return light of the laser light applied to the observation target 5 incident from the objective lens 150 and to the beam splitter 130. invite.

  The objective lens 150 is a lens that first creates an image of the observation target 5. The objective lens 150 condenses the laser light incident from the third reflecting mirror 244 and forms a condensing spot on the observation target 5. The objective lens 150 is provided so as to be movable on a plane by a first movable part 260 and a second movable part 170 described later. The position of the focused spot by the objective lens 150 can be moved by changing the position of the objective lens 150 by the first movable portion 260 and the second movable portion 170. Details of the operation of the objective lens 150 when scanning the observation object 5 will be described later. The objective lens 150 guides to the third reflection mirror 244 when the return light of the laser light irradiated on the observation target 5 is incident.

  The first movable portion 260 is a drive mechanism that moves the objective lens 150 in a predetermined direction (first direction, x direction in the present embodiment). The first movable part 260 includes a first motor 262, a first rotating shaft 264, and a first base 266. The first motor 262 is a drive source that rotates the objective lens 150 fixed to the first base 266 around the rotation axis C, and for example, a voice coil motor can be used. Note that a voice coil type motor is suitable for the first movable portion 260 on which the objective lens 150 is mounted because it requires extremely high speed as compared with the second movable portion 170.

  The first base 266 holds the objective lens 150. The objective lens 150 is provided so as to face the observation object 5 as shown in FIG. At this time, the third base 266 is provided with the third reflection mirror 244 on the side opposite to the side on which the observation target 5 is disposed with respect to the objective lens 150. In addition to the configuration shown in FIG. 11, the objective lens may be a reflective objective lens 152 in which an objective lens 150 and a third reflecting mirror 244 are integrated as shown in FIG. 9, for example.

  The first motor 262 is connected to the first base 266 via the first rotating shaft 264, and the first base 266 is periodically reciprocated by the first motor 262. Thereby, the objective lens 150 is periodically reciprocated on the xy plane. The first movable portion 260 is placed on a second base 176 that constitutes the second movable portion 170. Accordingly, the first movable portion 260 is provided so as to be movable in a predetermined direction (y direction) by the second movable portion 170.

  The second movable part 170 holds the first reflecting mirror 240, the objective lens 150, and the first movable part 260 that rotates and moves the objective lens 250 in a predetermined direction (second direction, y in this embodiment). Direction actuator). The second movable part 170 can be configured in the same manner as in the first embodiment, and includes a second motor 172, a second drive shaft 174, and a second base 176.

  The second motor 172 moves the first reflection mirror 240, the second reflection mirror 242, the third reflection mirror 244, the objective lens 150, and the first movable portion 260 mounted on the second base 176 in the y direction. It is a drive source to be caused. As the second motor 172, for example, a voice coil motor or a stepping motor can be used. The second motor 172 is connected to the second base 176 via the second drive shaft 174, and the second base 176 is periodically reciprocated linearly by the second motor 172. Thereby, the 1st reflective mirror 240 and the objective lens 150 are periodically reciprocated linearly in the y direction.

  The photodetector 180 receives the return light of the laser beam irradiated on the observation object 5 and generates a two-dimensional image. The photodetector 180 may be configured similarly to the first embodiment. The laser scanning microscope apparatus 200 according to this embodiment includes a control unit (not shown) that controls the apparatus in an integrated manner. For example, the control unit performs various types of image signal processing on the image signal obtained as a result of laser scanning control and laser scanning on the observation target 5. Further, the control unit controls the moving speed of the first movable part 260 and the moving speed of the second movable part 170.

  In such a laser scanning microscope apparatus 200, the laser light emitted from the laser 102 in the y direction passes through the spherical aberration correction unit 110 and the focal position control unit 120, and then the second group of the second movable unit 170. Guided to the first reflecting mirror 240 on the table 176. The laser light reflected in the z direction by the first reflecting mirror 240 is guided to the second reflecting mirror 242 and is guided in the y direction by the second reflecting mirror 242. The laser light reflected in the y direction by the second reflecting mirror 242 is guided to the third reflecting mirror 244, reflected in the z direction by the third reflecting mirror 244, and then incident on the objective lens 150.

  The laser light irradiated from the objective lens 150 to the observation target 5 is reflected by the observation target 5. The return light is guided in the z direction from the objective lens 150 to the third reflection mirror 244, then reflected in the y direction by the third reflection mirror 244 and incident on the second reflection mirror 242. The second reflection mirror 242 reflects the incident return light in the z direction and enters the first reflection mirror 240. The first reflection mirror 240 reflects the incident return light in the y direction and guides it to the beam splitter 130. The beam splitter 130 reflects the incident return light and guides it to the photodetector 180. The photodetector 180 detects the return light, and generates a two-dimensional image based on the photodetector signal corresponding to the position of the objective lens 150, that is, the focused spot position.

[2.2. Scanning the focused spot]
The laser beam condensed by the objective lens 150 creates a small focused spot on the observation target 5. Here, in the laser scanning microscope apparatus 200 according to the present embodiment, the second movable unit 170 performs a periodic reciprocating linear motion on a straight line, as in the first embodiment. On the other hand, the first movable portion 260 periodically reciprocates on a circular orbit whose tangent line is orthogonal to the moving direction of the second movable portion 170. That is, the first movable part 260 and the second movable part 170 are driven by independent motors 262 and 172 as drive sources, and the moving direction of the first movable part 260 and the moving direction of the second movable part 170. Reciprocate in directions substantially perpendicular to each other.

  As a result, the position of the objective lens 150 can be changed in the two-dimensional plane, and the focused spot is generated at the center of the objective lens 150. Therefore, the observation target 5 can be scanned by the movement of the objective lens 150. it can. In the present embodiment, the locus of the condensed spot in the x direction of the two-dimensional image generated based on the detection signal by the photodetector 180 is an arc as shown in the acquired image of FIG.

  More specifically, first, an actuator having a voice coil type rotating shaft 264 is used as the first motor 262 for the first movable portion 260. The first motor 262 rotates the rotation shaft 264 around the rotation center C, thereby rotating the first base 266 so as to draw an arc on the xy plane. At this time, the second reflection mirror 242 is provided at the rotation center C of the rotation shaft 264 so as to face the reflection surface of the first reflection mirror 240 on the second base 176. The reflection surface of the second reflection mirror 242 is disposed in parallel with the reflection surface of the third reflection mirror 244 fixed to the first base 266.

  On the other hand, as in the first embodiment, the second movable portion 170 has the first movable portion 260 mounted thereon and is parallel to the optical axis incident on the first reflection mirror 240 (ie, the y direction). It is configured to be movable. Accordingly, the objective lens 150 can be moved in the y direction orthogonal to the x direction by the second movable portion 170 while the tangent in the moving direction thereof is substantially parallel to the x direction by the first movable portion 260.

  Therefore, the first movable portion 260 and the second movable portion 170 can always guide the laser light to the center of the objective lens 150. As a result, the simple and lightweight objective lens 150 can be used, and the load on the first motor 262 that is the drive source of the first movable portion 260 is greatly reduced.

  In the present embodiment, the objective lens 150 is mounted on the first movable portion 260, and only the first movable portion 260 and the first reflection mirror 240 are mounted on the second movable portion 170. That is, in the laser scanning microscope apparatus 200 according to the present embodiment, for example, the spherical aberration correction unit 110, the focal position control unit 120, the beam splitter 130, and the photodetector 180 are not mounted on the movable unit but are fixed to the fixed unit. Yes. Therefore, the number of members moved by the first movable portion 260 and the second movable portion 170 can be reduced, and the mounting member can be reduced in weight. This weight reduction can reduce the motor load on each of the movable parts 260 and 170, so that the focused spot can be scanned at a high speed, and an image can be acquired in a shorter time.

  At this time, the control unit controls the moving speed of the first movable part 260 to be faster than the moving speed of the second movable part 170. Thereby, the movement of the objective lens 150 can be further accelerated, the focused spot can be scanned at high speed, and an image can be acquired in a shorter time. Furthermore, since the first movable part 260 and the second movable part 170 can be driven independently, the field of view can be widened by the stroke of the motor, and the resolution can be increased.

[2.3. Summary]
Heretofore, the configuration of the laser scanning microscope apparatus 200 according to the second embodiment and the operation during the focused spot scanning using the laser scanning microscope apparatus 200 have been described. The laser scanning microscope apparatus 200 according to the present embodiment includes a first movable part 260 on which an objective lens 150, a second reflection mirror 242, and a third reflection mirror 244 are mounted. Further, the laser scanning microscope apparatus 200 is movable in a direction orthogonal to the first movable part 260, and the second movable part 170 on which the first movable part 260 and the first reflection mirror 240 are mounted is provided. Prepare. As a result, since it is configured with small optical components without using a galvano scanner as in the prior art, the apparatus can be made smaller and thinner. In addition, by reducing the weight by reducing the elements mounted on the movable parts 260 and 170, a high-resolution and wide-field image can be acquired at high speed.

  The preferred embodiments of the present disclosure have been described in detail above with reference to the accompanying drawings, but the technical scope of the present disclosure is not limited to such examples. It is obvious that a person having ordinary knowledge in the technical field of the present disclosure can come up with various changes or modifications within the scope of the technical idea described in the claims. Of course, it is understood that it belongs to the technical scope of the present disclosure.

  The effects described in this specification are merely illustrative or exemplary and are not limiting. That is, the technology according to the present disclosure can exhibit other effects that are apparent to those skilled in the art from the description of the present specification in addition to or instead of the above effects.

The following configurations also belong to the technical scope of the present disclosure.
(1) a first movable part that is equipped with an objective lens and is movable in a first direction;
A second movable part mounted with the first movable part and movable in a second direction different from the first direction ;
A control unit that adjusts the position of the objective lens by moving the first movable unit and the second movable unit, and controls the irradiation direction of the laser light irradiated to the observation target;
A control device comprising:
(2) The control device according to (1), wherein the first movable unit is movable at a higher speed than the second movable unit.
(3) The first drive unit that moves the first movable unit in the first direction and the second drive unit that moves the second movable unit in the second direction are controlled independently. The control device according to (1) or (2).
(4) The control device according to (3), wherein the first driving unit is a boil coil motor.
(5) The control device according to any one of (1) to (4), wherein the first movable portion and the second movable portion periodically move on orthogonal lines.
(6) said first movable part, before Symbol movable in a direction parallel to the optical axis of the laser beam incident to the objective lens, the control apparatus according to (5).
(7) The second movable portion periodically linearly moves along the second direction,
The control device according to any one of (1) to (4), wherein the first movable portion periodically rotates and moves on an arc having a tangent line in the first direction.
( 8 ) The control device according to any one of (1) to ( 7 ), further including a focal position control unit that adjusts a focal position of the objective lens.
( 9 ) The control device according to any one of (1) to ( 8 ), further including a spherical aberration correction unit that corrects spherical aberration.
( 10 ) The control device according to any one of (1) to ( 9 ), further including a control unit that controls a moving speed of the first movable unit and the second movable unit.
(11) moving the first movable portion mounted with the objective lens in the first direction, the first second direction the second movable portion equipped with a movable portion different from the first direction And adjusting the position of the objective lens by moving the first movable part and the second movable part, and controlling the irradiation direction of the laser light irradiated to the observation target. .

5 Observation object 100, 200 Laser scanning microscope apparatus 102 Laser 104, 204 Image acquisition unit 110 Spherical aberration correction unit 120 Focus position control unit 130 Beam splitter 140 Reflecting mirror 150 Objective lens 160, 260 First movable unit 162, 262 First 1 motor 164 1st drive shaft 166, 266 1st base 170 2nd movable part 172 2nd motor 174 2nd drive shaft 176 2nd base 180 photo detector 240 1st reflection mirror 242 2nd reflection mirror 244 1st 3 reflection mirror 264 1st rotation axis

Claims (10)

A first movable part equipped with an objective lens and movable in a first direction;
A second movable part mounted with the first movable part and movable in a second direction different from the first direction;
A control unit that adjusts the position of the objective lens by moving the first movable unit and the second movable unit, and controls the irradiation direction of the laser light irradiated to the observation target;
Equipped with a,
The first movable part is movable at a higher speed than the second movable part,
Wherein the control unit that controls a moving speed of the first movable section and the second movable section, the control device. Before SL in the second movable portion, a first driving unit for moving the first movable portion in the first direction are mounted, the control apparatus according to claim 1.   The first drive unit that moves the first movable unit in the first direction and the second drive unit that moves the second movable unit in the second direction are controlled independently. The control device according to claim 1 or 2.   The control device according to claim 3, wherein the first drive unit is a boil coil type motor.   The control device according to any one of claims 1 to 4, wherein the first movable portion and the second movable portion each periodically move on orthogonal straight lines.   The control device according to claim 5, wherein the first movable portion is configured to be movable in a direction parallel to an optical axis of laser light incident on the objective lens. The second movable portion periodically linearly moves along the second direction,
The control device according to any one of claims 1 to 4, wherein the first movable portion periodically rotates and moves on an arc having a tangent line in the first direction.   The control device according to claim 1, further comprising a focal position control unit that adjusts a focal position of the objective lens.   The control device according to claim 1, further comprising a spherical aberration correction unit that corrects the spherical aberration. Moving the first movable part carrying the objective lens in the first direction;
Moving the second movable part mounted with the first movable part in a second direction different from the first direction;
Adjusting the position of the objective lens by moving the first movable part and the second movable part, and controlling the irradiation direction of the laser light irradiated to the observation object;
Only including,
The control method in which the first movable part is moved at a higher speed than the second movable part .

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