JP6372884B2 - Measuring device - Google Patents

Description

  The present invention relates to a measuring device. More specifically, the present invention relates to a measurement apparatus suitable for use in various inspections and measurements / measurements performed on a measurement object by entering a narrow space.

  A method in which spent nuclear fuel is stored in a cylindrical metal sealed container (canister) and sealed, and then stored in a concrete container to store spent nuclear fuel safely is called a concrete cask.

  The concrete container used in this storage system has a plurality of ventilation holes for heat removal, so it has the function of natural cooling without having an external power supply, but sea salt particles etc. contained in the outside air May adhere to. For this reason, when long-term storage is continued for several decades, there is a concern that pitting corrosion on the canister surface and stress corrosion cracking associated therewith may occur. Stress corrosion cracking causes cracks to grow from the surface of the canister. If a crack penetrates the canister, helium gas or radioactive gas filled in the canister leaks. In order to eliminate this possibility as much as possible, it is important to periodically check the health of the canister.

  A conventional method for inspecting a canister is, for example, a method of measuring the concentration of a substance (adherent trace component) adhering to a metal surface, and a pulsed laser on the surface of the canister to be inspected (metal surface). By irradiating light to ablate adhering substances, and then measuring and spectroscopically measuring the light emitted from substances ablated by ablation, the substance adhering to the metal surface (adhering trace components) is identified and its concentration There is a method for measuring the concentration of a component adhering to a metal surface (Patent Document 1).

JP 2013-190411 A

  However, although the measurement method in Patent Document 1 reveals the measurement method at a fixed point (in other words, a certain place), the actual machine needs to measure in many places. It is hard to say that a sufficient test can be performed only with the contents disclosed in the above, and an assured test can be performed.

  In addition, in order to improve the measurement sensitivity, it is necessary to integrate a large number of received light signals to improve the S / N ratio. However, the substance adhering to the metal surface disappears by one laser irradiation. In order to integrate a large number of received light signals, it is necessary to perform measurement while moving on the metal surface (in other words, changing the measurement point).

  Therefore, an object of the present invention is to provide a measuring apparatus capable of performing spatially continuous measurement / measurement while proceeding and moving in a narrow space.

In order to achieve such an object, the measuring device of the present invention includes a main body, a measuring unit fixedly attached to the main body, and a distance between the measuring object and the main body provided on the measuring object side of the main body. An object-side moving mechanism that can move the main body relative to the measurement object while keeping it constant, and a measurement that is provided on the opposite side of the main body from the measurement object and urges the main body toward the measurement object. a plurality of fixed length shaft and the fixed-length shaft possess an urging side moving mechanism, the object-side moving mechanism length not stretch constant that can move the body relative to the opposite side of the structure and the object The urging-side moving mechanism is composed of a plurality of telescopic shafts that are elastically expanded and contracted, and a wheel that is supported by the telescopic shafts .

  Therefore, according to this measuring device, the biasing side moving mechanism abuts on the structure opposite to the measurement object, and the biasing force by the biasing side moving mechanism acts on the object side moving mechanism via the main body, As a result, the object side moving mechanism is pressed against the surface of the measurement object.

  Further, the measuring device of the present invention supplies the measurement unit with laser light used for measurement transmitted by an optical fiber or a mechanism for transmitting a space while changing an optical path by one or a plurality of optical elements. You may be made to do.

  In addition, the measuring apparatus of the present invention is an optical system for transmitting laser light to a measurement unit so that laser light emitted from the laser is irradiated to the measurement object for measurement by laser-induced breakdown spectroscopy. In addition, an optical system that transmits light emitted from a substance that has been converted into plasma by ablation by laser light irradiation may be incorporated.

  The measuring device of the present invention is a canister that is a metal sealed container in which a measurement object is stored in a concrete container, and a structure opposite to the measurement object is a peripheral wall of the concrete container. May be.

  According to the measurement apparatus of the present invention, the object-side moving mechanism is pressed against the surface of the measurement object, so that the measurement apparatus sequentially moves to the opposite side of the measurement object for each place where inspection or measurement / measurement is performed. Even if the distance between the structure and the measurement object changes, the distance between the measurement object and the main body is kept constant. Therefore, the measurement unit fixed to the main body (fixed or accommodated in the measurement unit). The distance and relative distance between the object to be measured and the object to be measured can be kept constant, and the measurement and measurement conditions can be kept constant to improve measurement and measurement accuracy. In addition, it is possible to prevent, for example, damage to the probe and various measuring / measuring instruments caused by being pressed more strongly than necessary to the measurement object.

  In addition, in the measurement apparatus of the present invention, when an optical system for performing measurement by laser-induced breakdown spectroscopy is built in the measurement unit, the measurement apparatus sequentially moves to each place where measurement is performed. Laser-induced breakdown spectroscopy measurement can be performed with the distance and relative distance between the optical system and the measurement object kept constant, so the positional relationship between the focus of the laser beam and the measurement object changes. Therefore, it is possible to perform the measurement with the laser induced breakdown spectroscopy with good laser light irradiation, that is, the measurement with good accuracy.

It is a schematic block diagram which shows an example of embodiment of the measuring device of this invention (a concrete container is represented as a longitudinal cross-section). It is a side view which shows schematic structure of the measuring device of embodiment (The surrounding wall of a canister, the surrounding wall of the main body of a concrete container, and the storage case of a measurement part are represented as a longitudinal cross-section.). 1 is a plan view (in other words, a surface on the canister side) showing a schematic structure of a measuring apparatus according to an embodiment. It is a back view (in other words, the surface by the side of a concrete container) which shows schematic structure of the measuring device of embodiment. It is a figure which shows schematic structure of the canister and concrete container in embodiment. (A) is a perspective view. (B) is an elevational view showing a concrete container as a longitudinal section.

  Hereinafter, the configuration of the present invention will be described in detail based on an example of an embodiment shown in the drawings.

  1 to 5 show an example of an embodiment of a measuring apparatus according to the present invention.

  1 to 5 are only schematic structural views for explaining the configuration of the present invention, and the structure of each part is simplified and does not strictly show the detailed structure, and the dimensions of each part. The relative relationship is also not strict. Specifically, for example, the detailed structure of the canister 30 and the detailed structure such as a vent hole for heat removal provided in the concrete container 31 are omitted.

(1) Measurement object In this embodiment, as an inspection of a canister 30 (FIG. 5), which is a cylindrical metal sealed container in which spent nuclear fuel is put and usually stored and stored in a concrete container 31. A case where measurement is performed on the surface of the canister 30 will be described as an example.

  The concrete container 31 of the present embodiment includes a main body 31a having a cylindrical peripheral wall and a bottom portion that closes the lower end of the peripheral wall, and an upper lid 31b that is detachably attached to the upper end opening of the main body 31a.

  The measurement object to which the present invention can be applied is not limited to a canister stored and stored in a concrete container, and may be a canister stored in another storage container. Other items stored in the container may be used. Generally speaking, the measuring device of the present invention has a surface as a measurement target and a structure opposite to the surface, and a narrow space between the surface and the structure (in other words, It can be applied when a gap) exists.

(2) Overall Configuration of Measuring Device The measuring device of the present invention enters a narrow space where at least one is defined by the surface of the measurement object, and performs various inspections and measurements / measurements on the measurement object. Is what you do.

  The measuring apparatus 1 according to the present embodiment enters the space between the inner peripheral surface 31c of the peripheral wall of the main body 31a of the concrete container 31 and the side peripheral surface 30a (in other words, the outer peripheral surface) of the canister 30 and enters the canister 30 side. Measurement is performed on the peripheral surface 30a.

  The measuring apparatus 1 according to the present embodiment includes a main body 2, a measuring unit 10 that is fixedly attached to the main body 2, and a canister 30 side of the main body 2 so that the distance between the canister 30 and the main body 2 is constant. The fixed long shaft 3 and the object side wheel 4 supported by the fixed long shaft 3 as the object side moving mechanism capable of moving the main body 2 with respect to the canister 30 while maintaining the canister 30 of the main body 2 are opposite to each other. Structure (this embodiment is the peripheral wall side of the main body 31a of the concrete container 31) on the side opposite to the canister 30 while urging the main body 2 in a direction to press the main body 2 against the canister 30 side (this embodiment) Then, as an urging-side moving mechanism capable of moving the main body 2 with respect to the peripheral wall of the main body 31a of the concrete container 31, it is supported by the expansion and contraction shaft 5 that is elastically expanded and contracted by extension and the expansion and contraction shaft 5. And a biasing side wheels 6.

  The main body 2 is provided with a moving mechanism on the measurement object side (that is, an object side moving mechanism) and a moving mechanism on the opposite side (that is, an urging side moving mechanism), and holds the measuring unit 10. is there.

  In the present embodiment, the main body 2 is formed in a rectangular parallelepiped shape, and the measurement unit 10 is fixed and attached to the upper end of the main body 2 in a posture arranged between the canister 30 and the concrete container 31.

  Four fixed long shafts 3 are attached to the main body 2 on the side of the canister 30 that is an object to be measured. These fixed long axes 3 have a constant length and do not expand and contract. The number of fixed long shafts 3 is not limited to four as long as the posture of the main body 2 can be stabilized, and may be three or less, or five or more. Also good.

  An object-side wheel 4 is attached to the tip of each fixed long shaft 3 so that it can rotate in all directions. Specifically, for example, a caster that rotates so as to be able to travel in all directions can be used as the object-side wheel 4. Note that a plurality of object-side wheels 4 may be attached to a single fixed major axis by using, for example, a plurality of branch legs extending radially in the axial direction.

  The object side moving mechanism includes the fixed long shaft 3 and the wheels 4 as long as the main body 2 can be moved with respect to the canister 30 while keeping the distance between the canister 30 and the main body 2 constant. The configuration is not limited. Specifically, for example, the object-side moving mechanism may be configured such that an axle having wheels at both ends is directly supported by the main body 2 and does not have the fixed long axis 3, is slidable and You may make it comprise the hemisphere formed with the raw material which does not deform | transform and attached to the main body 2.

  Further, four telescopic shafts 5 are attached to the main body 2 on the side opposite to the canister 30 that is a measurement object, that is, on the peripheral wall side of the main body 31 a of the concrete container 31. The number of telescopic shafts 5 is not limited to four as long as the posture of the main body 2 can be stabilized, and may be three or less, or may be five or more. good.

  The telescopic shaft 5 can extend and contract in the axial direction, and always tries to extend as the entire shaft length in a state where the measuring device 1 is disposed between the canister 30 and the peripheral wall of the main body 31a of the concrete container 31. (In other words, to be energized for extension). That is, the telescopic shaft 5 is configured to be elastically expanded and contracted by being extended and biased, whereby the main body 2 is always biased in the direction in which it is pressed against the canister 30.

  The length of the fixed long shaft 3 and the length of the telescopic shaft 5 are the inner peripheral surface 31c of the peripheral wall of the main body 31a of the concrete container 31 and its length so that the main body 2 can always be biased in the direction in which the main body 2 is pressed against the canister 30. It adjusts suitably according to the space | interval with the side peripheral surface 30a of the canister 30 accommodated in.

  The mechanism for allowing the telescopic shaft 5 to elastically expand and contract is not limited to a specific one. Specifically, for example, an outer rod, an inner rod inserted into the outer rod, and a compression coil spring disposed inside the outer rod so as to be interposed between the outer rod and the inner rod. Can be considered. Alternatively, a gas spring may be used as the telescopic shaft 5.

  An urging wheel 6 is attached to the tip of each of the telescopic shafts 5 so as to be rotatable in all directions. Specifically, for example, a caster that rotates so as to be able to travel in all directions can be used as the urging wheel 6. Note that a plurality of urging wheels 6 may be attached to a single telescopic shaft by using, for example, a plurality of branch legs extending radially in the axial direction.

  The urging-side moving mechanism urges the main body 2 in a direction in which the main body 2 is pressed against the canister 30 while the main body 2 is opposed to the structure opposite to the canister 30 (in this embodiment, the peripheral wall of the main body 31a of the concrete container 31). If it can move 2, it is not limited to the structure which consists of the expansion-contraction shaft 5 and the wheel 6. FIG. Specifically, for example, the urging-side moving mechanism may be configured by a hemispherical body formed of a slidable and elastically deformable material and attached to the main body 2.

  Then, with the above-described configuration of the measuring device 1, the urging wheel 6 contacts the inner peripheral surface 31 c of the peripheral wall of the main body 31 a of the concrete container 31, and the urging force of the telescopic shaft 5 is fixed via the main body 2 to the fixed long shaft 3. As a result, the object side wheel 4 is pressed against the side peripheral surface 30 a of the canister 30.

  Thereby, even if the space | interval of the side peripheral surface 30a of the canister 30 and the internal peripheral surface 31c of the surrounding wall of the main body 31a of the concrete container 31 changes for every place which the measuring apparatus 1 moves sequentially and performs an inspection and a measurement / measurement. By changing the distance between the inner peripheral surface 31c of the concrete container 31 and the main body 2 of the measuring device 1, the distance between the side peripheral surface 30a of the canister 30 and the main body 2 of the measuring device 1 is maintained constant. Therefore, the separation distance and the relative distance between the measurement unit 10 fixed to the main body 2 and the side peripheral surface 30a of the canister 30 are kept constant.

  Therefore, for example, when a non-contact type inspection or measurement / measurement is performed using a probe or various measuring / measuring instruments, an inspection is performed at the beginning or end of an inspection performed by the non-contact type probe / instrument. It is possible to meet the requirement of keeping the separation distance between the surface of the measurement object and the non-contact type probe / instrument constant so that the conditions such as When a contact type inspection / measurement / measurement is used and a contact type probe / instrument is in contact with the surface of the object to be measured, the contact type probe is used. In order to prevent the child / instrument from being damaged, it is possible to meet the requirement of keeping the relative distance of the contact-type probe / instrument to the surface of the measurement object constant.

(3) Lifting Device The lifting device 8 lifts and lowers the measuring device 1 in a narrow space (gap) at least one of which is partitioned by the surface of the measurement object.

  The lifting device 8 is not limited to a specific mechanism as long as the measuring device 1 can be lifted and lowered, and a measuring object or the like that partitions a narrow space (gap) into which the measuring device 1 enters (this book) In the embodiment, an appropriate one is appropriately selected in consideration of the structure of the canister 30 and the concrete container 31).

  Specifically, for example, a winding crane using a wire rope or a driving device using a guide rail can be used as the lifting device 8.

  In the present embodiment, a winding crane using the wire rope 7 is installed on the upper surface of the upper lid 31 b of the concrete container 31 as the lifting device 8. Note that the tip (lower end) of the wire rope 7 is connected to the measuring device 1 at the upper end of the measuring unit 10.

  In the present embodiment, in order to penetrate the wire rope 7, the through-hole 32 is provided in the vicinity of the lifting device 8 installed on the upper surface of the upper lid 31 b of the concrete container 31.

  Note that the measuring device 1 may be configured such that the upper lid 31b of the concrete container 31 is removed and placed in the main body 31a, or may be placed in the main body 31a from the through-hole 32 of the upper lid 31b. When the measuring device 1 is inserted from the through-hole 32, the through-hole 32 is formed in a size that allows the measuring device 1 to pass through.

  The measuring device 1 moves up and down (that is, moves in the vertical direction) along the side peripheral surface 30a of the canister 30 by a take-up crane as the lifting device 8 installed on the upper surface of the upper lid 31b of the concrete container 31.

  The measuring device 1 can be removed from the main body 31a of the concrete container 31 and rotated around the side peripheral surface 30a of the canister 30 together with the lifting device 8 by rotating the upper lid 31b that is rotatable relative to the main body 31a. Are rotated (ie, moved in the horizontal direction).

  The wire rope 7 for hanging the measuring device 1 in the vertical direction and the vertical movement by the lifting / lowering device 8 of the measuring device 1 and the horizontal movement by the rotation of the upper lid 31b of the concrete container 31 are measured. By moving in the horizontal direction, the measuring apparatus 1 can be moved over the entire side peripheral surface 30a of the canister 30 via the object side moving mechanism and the biasing side moving mechanism, and can be stopped at a desired position. become.

  However, the method / mechanism for moving the measuring device 1 is not limited to pulling in the vertical and horizontal directions by the wire rope 7 for using the lifting device 8 such as a take-up crane as described above. Absent. For example, a motor that rotationally drives the object-side wheel 4 and the energizing wheel 6 and a motor that changes the direction of the object-side wheel 4 and the energizing wheel 6 are provided in the main body 2, and wireless communication or wired communication is used. The rotational drive and direction of the object side wheel 4 and the urging side wheel 6 may be controlled by remote operation so that the measuring device 1 is moved to a desired position and may be stopped at the position.

(4) Measuring unit of measuring device and related configuration The measuring unit 10 of the measuring device 1 needs to be brought close to the measuring object in order to perform various inspections and measurements / measurements on the measuring object. Is to be housed or fixed.

  In this embodiment, the measuring device 1 including the measuring unit 10 is in a space between the inner peripheral surface 31c of the peripheral wall of the main body 31a of the concrete container 31 and the side peripheral surface 30a of the canister 30 accommodated in the main body 31a. The concentration of the substance (adherent trace component; for example, salinity, etc.) that enters and adheres to the side peripheral surface 30a of the canister 30 as an inspection of the canister 30 through the measuring unit 10 is measured by laser-induced breakdown spectroscopy. .

  For this reason, in the present embodiment, the measurement unit 10 contains a part of the mechanism for performing measurement by laser-induced breakdown spectroscopy, which needs to be brought close to the canister 30 of the measurement object. The

  The measurement unit 10 according to the present embodiment includes an accommodation case 11 as a housing that encloses and accommodates a device or the like that needs to be brought close to the measurement object. The measurement unit 10 of the measurement apparatus 1 according to the present invention is not necessarily provided with a casing. If it is not necessary to enclose a device that is close to the measurement object, the device or the like is used instead of the casing. A stage / plate body or a frame body may be provided.

  In the present embodiment, the housing case 11 has a sealed structure in order to reduce damage to the optical device due to high radiation and high temperature as much as possible. Moreover, a high atomic number material such as iron and a low atomic number material such as acrylic are used. It is conceivable that the structure is a combination of

  The accommodation case 11 is provided with a through-hole at a position facing the object to be measured for laser light irradiation and light emission measurement, and a quartz window plate 11a is attached to the through-hole.

  In this embodiment, in order to measure the concentration of the substance (adhering trace component) adhering to the side peripheral surface 30a of the canister 30, in this embodiment, the side peripheral surface 30a of the canister 30 is irradiated with a pulsed laser beam to remove the adhering substance. Ablation is performed, and then light emitted from the material that has been converted to plasma by ablation is received and dispersed to identify the material (adherent trace component) adhering to the side peripheral surface 30a of the canister 30 and determine its concentration.

  For this reason, the mechanism for measuring a trace component according to the present embodiment is that a laser 12 having a peak power sufficient to ablate the adhering substance by irradiating the side peripheral surface 30a of the canister 30 with a pulsed laser beam and to turn it into plasma. A spectroscope 21 that takes in light emitted from a plasma substance and decomposes the light for each wavelength; and a gate function that receives light emitted from the plasma substance dispersed through the spectroscope 21 to obtain an emission spectrum. The light receiving element 22 having the above, the timing controller 23 for controlling the time difference between the irradiation of the laser beam by the laser 12 and the gate opening start of the light receiving element 22, and the electric signal (light receiving signal) from the light receiving element 22 are captured and stored. In addition, various types of analysis of the spectral intensity distribution by analyzing a predetermined value included in the electrical signal (light reception signal) An analysis device 24 such as analysis program is implemented, and a measuring unit 10 comprising an optical system for emitting the transmission optical system for laser beam transmission.

  Since laser-induced breakdown spectroscopy itself is a well-known technique, a configuration that is not unique to the present invention among configurations for using the method (in other words, a configuration to which a known mechanism related to the method can be applied). The details are omitted here.

  And when the density | concentration of the substance (attached trace component) adhering to the side peripheral surface 30a of the canister 30 accommodated in the concrete container 31 is measured, laser 12 is applied by applying this invention. , The spectroscope 21, the light receiving element 22, the timing controller 23, and the analysis device 24 are arranged outside the concrete container 31, and the laser light emitted from the laser 12 outside the concrete container 31 is supplied to the supply optical fiber 19 and the concrete container. 31 irradiates the side peripheral surface 30a of the canister 30 via the measuring unit 10 of the measuring device 1 that has entered the inside 31 to ablate the adhering substance and turn it into plasma, and light emission at this time causes the measuring unit 10 and the optical fiber 20 for light reception to pass through. Through the spectroscope 21 outside the concrete container 31 to be split and receive the light Emission spectrum by two is obtained and its density can be determined with material attached to the side peripheral surface 30a of the canister 30 by the analyzer 24 on the basis of the emission spectrum (attached minor components) is specified.

The laser 12 has a peak power sufficient to irradiate the surface of the object to be measured, that is, the side peripheral surface 30a of the metal canister 30 in this embodiment with the laser beam 13 to ablate the adhering substance and turn it into plasma. For example, pulse lasers such as Nd: YAG laser, fiber laser, titanium sapphire laser, glass laser, CO ₂ laser, and excimer laser are used. As long as it is a pulse laser, a nanosecond laser or an ultrashort pulse laser (specifically, a pulse width of 1 psec or less) may be used.

  In addition, the specification of the laser 12 in the present invention (and the conditions of the laser beam 13 emitted from the laser 12) can be appropriately selected according to the measurement object.

  The spectroscope 21 decomposes the captured light into a spectrum, and the light receiving element 22 captures the light decomposed by the spectroscope 21 and measures the spectral intensity distribution (that is, the emission intensity distribution having wavelength dependence). Is.

  As the spectroscope 21, for example, a spectroscope that converts wavelength information into spatial information using a diffraction grating, or a band-pass filter may be used.

  When a band-pass filter is used as the spectroscope 21, when the number of attached substances (adhered trace components) to be measured is limited to one or a small number, the wavelength of the emission line and the wavelength of the background in the vicinity of Bandpass filters are prepared for each wavelength, and the light intensity after passing through each bandpass filter is measured to measure the intensity of light emission relative to the background, that is, the emission line intensity of the substance to be measured. . In this case, by using a bandpass filter having two or more wavelengths as the background measurement bandpass filter, measurement reliability can be improved. By using a band-pass filter to perform spectroscopy, the device configuration is greatly simplified and the manufacturing cost is greatly reduced.

  As the light receiving element 22 having a gate function, for example, an ICCD (abbreviation of Intensified Charge Coupled Device) camera or a photomultiplier tube can be used.

  The ICCD camera can acquire the intensity distribution (spectrum) for each wavelength converted into spatial information by a spectroscope having a diffraction grating at a time, and therefore can simultaneously acquire the emission spectra of many substances. It is preferable as the light receiving element 22 in the present invention in that many substances can be measured at one time.

  However, the light receiving element 22 is not limited to an ICCD camera. For example, a linear light receiving element such as a CCD (abbreviation of Charge Coupled Device) camera or a linear photodiode may be used as the light receiving element 22. Also in this case, a large number of substances can be measured at a time by being used simultaneously with a spectroscope having a diffraction grating.

  As the light receiving element 22, a single light receiving element such as a photomultiplier tube or a photodiode may be used. In this case, the intensity distribution (spectrum) for each wavelength cannot be obtained at the same time, so it is not possible to measure a large number of substances at the same time. Even when measuring substances, it can be used when it is not necessary to measure each substance simultaneously.

  For example, when only a single substance or a small number of substances need to be measured, a single light receiving element is used together with a bandpass filter, and the emission wavelength of the substance to be measured and the background wavelength in the vicinity thereof are measured at one or more points simultaneously. The This greatly simplifies the device configuration and reduces manufacturing costs.

  In the case where it is not necessary to measure each substance at the same time even when measuring a large number of substances, a single light receiving element is used together with a spectroscope having a diffraction grating, for example, for each wavelength while rotating the diffraction grating. The intensity distribution (spectrum) is measured. This mechanism is effective when measuring a phenomenon with little fluctuation with respect to time.

  Connected to the light receiving element 22 is an analysis device 24 on which various analysis programs for performing a process of analyzing the spectral intensity distribution based on the light reception signal output from the light receiving element 22 are mounted.

  Then, information on the emission intensity for each frequency acquired by the light receiving element 22 is input to the analysis device 24, and the data on the emission intensity is stored and analyzed and displayed on the display as an emission spectrum, or for each frequency. The presence / absence of an adhering substance on the surface of the measurement object is determined from the information on the emission intensity, and the concentration of a trace component related to the adhering substance is measured.

  The analysis device 24 includes a storage unit 24a and has a known concentration of trace components (including at least a substance to be measured) on the surface of the measurement object (the surface of the object formed of the same material as the measurement object). The spectral intensity distribution of the plasma emission generated when the laser beam is applied and the calibration curve prepared beforehand (in other words, set) is stored in advance, and the calibration curve and the reference data It is preferable that a change in the concentration of the target substance / atom is detected by comparing with the emission intensity or referring to a calibration curve.

  If the emission spectrum does not need to be stored or analyzed, the analysis device 24 is not required, and the emission spectrum is displayed on a monitor display attached to the ICCD camera as the light receiving element 22, for example. You may do it.

  The timing controller 23 controls the time difference between the irradiation of the laser beam by the laser 12 and the start of the gate opening of the light receiving element 22.

  The time difference from the irradiation of the laser beam by the laser 12 to the start of the gate opening of the light receiving element 22 is not limited to a specific value, and an appropriate time is also taken into account the peak power of the laser beam irradiated by the laser 12 and the like. Is set as appropriate.

  For example, since the peak power of the laser light irradiated by the laser 12 in the present invention is not so high, white light noise is weak, but when the light receiving element 22 starts to open the gate early, the white light noise is higher than the bright line intensity. Since it is strong, it cannot be measured. On the other hand, if the start of opening the gate of the light receiving element 22 is slow, the intensity of the bright line is attenuated, so that there is a problem that the sensitivity is not sufficiently obtained. Therefore, the time difference between the irradiation of the laser beam by the laser 12 and the start of the gate opening of the light receiving element 22 is preferably adjusted to a range of about 0.5 to 10 μs, for example.

  The housing case 11 of the measurement unit 10 includes an optical system for laser light transmission and an optical system for light emission transmission.

  In this embodiment, the optical system for laser light transmission includes a condensing lens 14 and a wavelength selective mirror 15 that reflects only the wavelength of the laser light 13 and irradiates the side circumferential surface 30 a of the canister 30 with the laser light 13. Are included.

  In this embodiment, the optical system for light transmission is ablated by the substance attached to the side peripheral surface 30a of the canister 30 that is disposed behind the wavelength selective mirror 15 and transmitted through the wavelength selective mirror 15. A total reflection mirror 17 that reflects the light emission 16 of the generated plasma and does not depend on the wavelength, and a light emission condensing lens 18 for condensing the plasma light emission on the end face of the light receiving optical fiber 20 (end face of the ferrule 20a). Configured to be included.

  The optical system for laser light transmission and the optical system for light transmission are provided in the housing case 11 so that the laser light 13 and the plasma light emission 16 propagate through the measuring unit 10 (the housing case 11). Is done.

  Here, the laser beam 13 is transmitted and supplied to the measuring unit 10 from the laser 12 disposed outside the concrete container 31 through the supply optical fiber 19. Note that the end (outgoing end) of the supply optical fiber 19 on the side inserted into the housing case 11 is condensed in the housing case 11 via a ferrule 19 a fixed to the housing case 11. It is directed to the lens 14 and fixed at a predetermined position.

  Further, the light emission 16 from the plasma substance is transmitted from the measurement unit 10 to the spectroscope 21 disposed outside the concrete container 31 through the light receiving optical fiber 20. Note that the end (light receiving end) of the light receiving optical fiber 20 on the side inserted into the housing case 11 is arranged in the housing case 11 via a ferrule 20a fixed and attached to the housing case 11. It is directed to the light lens 18 and fixed at a predetermined position.

  The supply optical fiber 19 and the light receiving optical fiber 20 may be configured as an integral unit using a bundle fiber. Further, the laser beam 13 and the plasma emission 16 may be set coaxially. In other words, the laser beam 13 and the plasma emission 16 may have the same optical path. In these cases, a bundle fiber in which a plurality of light receiving optical fibers 20 for receiving plasma light emission 16 is disposed around one supply optical fiber 19 for transmitting the laser light 13 may be used. . Further, the laser beam 13 and the plasma emission 16 may be transmitted using a single optical fiber.

(5) Operation of Measuring Device The operation related to the measurement of the concentration of the substance (attached trace component) adhering to the side peripheral surface 30a of the canister 30 which is the measurement object in the present embodiment by the measuring device 1 described above is as follows. Explained.

  The measuring device 1 is moved to a predetermined position on the side peripheral surface 30a of the canister 30 by the raising / lowering (vertical movement) by the lifting / lowering device 8 and the horizontal movement by the rotation of the upper lid 31b of the concrete container 31 to be stationary. .

  Subsequently, the laser beam 13 is emitted from the laser 12, and the laser beam 13 is guided to the measuring unit 10 (accommodating case 11) through the supply optical fiber 19 and emitted from the ferrule 19 a.

  The laser light 13 emitted from the ferrule 19a is condensed by the condensing lens 14 so as to be condensed on the side peripheral surface 30a of the canister 30, and then reflected by the wavelength selective mirror 15 to be reflected by the canister 30. Irradiated perpendicularly to the side peripheral surface 30a.

  By this irradiation, the substance adhering to the side peripheral surface 30a is ablated, and at the same time, plasma is generated by ablation to emit light.

  Then, the light emission 16 resulting from the deposition of the adhering substance into plasma is reflected by the total reflection mirror 17 after passing through the wavelength selective mirror 15, and then the end face of the light receiving optical fiber 20 (of the ferrule 20a) by the light emission condensing lens 18. After being condensed on the end face, it is incident on the light receiving optical fiber 20 held by the ferrule 20a, transmitted by the light receiving optical fiber 20, dispersed by the spectroscope 21, and then received by the light receiving element 22. .

  Subsequently, the information on the emission intensity for each frequency acquired by the light receiving element 22 is input to the analysis device 24, the presence / absence of an adhering substance on the surface of the measurement object is determined from the information on the emission intensity for each frequency, The concentration of the trace component with respect to the adhered substance is measured.

  Here, for example, the 837.59 nm chlorine emission line, the 517.26 nm magnesium emission line, the 518.36 nm magnesium emission line, and the 833.31 nm chlorine emission line indicate the presence of salt. It is suggested that the presence or absence of salinity is determined by using any of the emission lines, and the concentration of the salinity is required because the emission intensity of these emission lines and the salinity concentration are in a proportional relationship. .

  For other substances (components), the concentration of the substance is obtained from the relationship between the emission intensity of the emission line and the concentration of the substance, focusing on the emission lines of the frequencies corresponding to each substance.

  Subsequently, if necessary, the measuring device 1 is moved to another position on the side peripheral surface 30a of the canister 30 by raising / lowering (vertical movement) by the lifting device 8 and horizontal movement by rotation of the upper lid 31b of the concrete container 31. Then, the laser beam 13 is irradiated, and the light emission 16 is received by plasmatization, and the presence / absence of an adhering substance and the concentration are measured.

  Further, the same operation is repeated over a predetermined range of the side peripheral surface 30a of the canister 30 as necessary.

  At this time, the side peripheral surface 30a of the canister 30 and the main body 31a of the concrete container 31 for each place where the measuring device 1 sequentially moves and performs inspection and measurement / measurement by the action of the object side moving mechanism and the biasing side moving mechanism. Even if the distance between the peripheral wall of the peripheral wall 31c and the inner peripheral surface 31c changes, the distance between the inner peripheral surface 31c of the concrete container 31 and the main body 2 of the measuring device 1 is changed to measure the side peripheral surface 30a of the canister 30. Since the distance between the main body 2 of the apparatus 1 is kept constant, the separation distance and the relative distance between the measuring unit 10 fixed to the main body 2 and the side peripheral surface 30a of the canister 30 are kept constant. Irradiation of the laser beam 13 is appropriately performed without changing the positional relationship between the focal point of the laser beam 13 and the side peripheral surface 30a of the canister 30, and measurement by laser-induced breakdown spectroscopy is favorable. Divide.

  According to the measuring apparatus 1 configured as described above, the inner peripheral surface 31c of the main body 31a of the concrete container 31 which is a structure on the opposite side to the canister 30 which is a measurement object is attached as an urging side moving mechanism. The urging side wheel 6 abuts, and the urging force by the urging side wheel 6 acts on the object side wheel 4 as the object side moving mechanism via the main body 2, and as a result, the object side wheel 4 is measured. Since it is pressed against the side peripheral surface 30a of the canister 30, which is a thing, the measuring device 1 moves sequentially to perform the inspection or measurement / measurement, and the inner peripheral surface 31c of the main body 31a of the concrete container 31 and the side periphery of the canister 30 Even if the distance from the surface 30a changes, the distance between the side peripheral surface 30a of the canister 30 and the main body 2 is kept constant. Therefore, the measuring unit 10 fixed to the main body 2 and the side peripheral surface of the canister 30 are maintained. Distance from 30a Relative distance can be kept constant, comprising a measurement and measurement conditions can be improved measurement and measurement precision in the constant.

  In addition, in the case where the measurement apparatus 1 configured as described above performs measurement by laser-induced breakdown spectroscopy as in the above-described embodiment, the main body is provided for each place where the measurement apparatus 1 sequentially moves and performs measurement. 2 can be measured by laser-induced breakdown spectroscopy in a state where the separation distance and the relative distance between the measurement unit 10 fixed to 2 and the side peripheral surface 30a of the canister 30 are kept constant. The laser beam 13 is appropriately irradiated without changing the positional relationship between the focal point and the side peripheral surface 30a of the canister 30 and the measurement by the laser induced breakdown spectroscopy is satisfactorily performed, that is, good accuracy is ensured. Measurement can be performed. In addition, it is possible to perform spatially continuous measurement while moving while keeping the measurement condition constant, and it is possible to improve measurement sensitivity by integrating the received light signals for each place moved sequentially Become.

  Although the above-described embodiment is an example of a preferred embodiment for carrying out the present invention, the embodiment of the present invention is not limited to the above-described embodiment, and the present invention is not deviated from the gist of the present invention. Various modifications can be made.

  For example, in the above-described embodiment, the description has been made on the premise that the single-pulse method is used when performing laser-induced breakdown spectroscopy. However, the present invention is not limited to this, and a double-pulse method can also be used. For example, the focal position is shifted between two laser beams arranged coaxially, or the size of the irradiation surface is changed by obliquely crossing the second laser beam with the surface of the measurement object. Thus, the same effect can be obtained by adjusting the energy of the laser beam and the area of the irradiated surface so as to be equal to or lower than the peak power upper limit value. Further, the same effect can be obtained by lowering the laser energy of the second laser light irradiation. Specifically, when the adhered substance is ablated for additional heat for the second time, the target is also measured by the same strength in the first time and the second time, or by the distribution of peak power that the second time is weaker than the first time. Plasma can be generated without causing damage to the surface of the object, and measurement sensitivity can be improved.

  Further, in the above-described embodiment, the laser light transmission optical system built in the measurement unit 10 includes the condensing lens 14 and the wavelength selection type mirror 15 and performs light emission transmission in order to perform measurement by laser-induced breakdown spectroscopy. However, the configuration of the optical system for laser light transmission and the optical system for light transmission is not limited to these, for example, When the output end of the supply optical fiber 19 or the light receiving end of the light receiving optical fiber 20 is directed to the surface of the measurement object (in other words, the end surfaces of the optical fibers 19 and 20 face the surface of the measurement object). May not have the wavelength selective mirror 15 or the total reflection mirror 17. In this case, a bundle fiber in which a plurality of light receiving optical fibers 20 are arranged around one supply optical fiber 19 may be used.

  In the above-described embodiment, the laser beam emitted from the laser 12 is supplied to the measuring unit 10 by the supply optical fiber 19. However, the laser for supplying the laser beam from the laser 12 to the measuring unit 10 is used. The mechanism of light transmission is not limited to this, and the laser beam is not passed through the supply optical fiber 19 but the optical path is changed by one or more optical elements such as a mirror, a lens, a prism, or a filter. However, it may be supplied to the measurement unit 10 by transmitting the space. In this case, when the laser beam passes through a narrow space between the canister 30 and the main body 31a of the concrete container 31, the laser beam is passed through an expandable duct or the like, and the laser beam axis depending on the temperature. You may make it suppress the influence of the fluctuation of the.

  In the above-described embodiment, the measurement unit 10 accommodates a device as a part of a mechanism for performing measurement by laser-induced breakdown spectroscopy. The inspection and measurement / measurement to be performed are not limited to the specific mode of laser-induced breakdown spectroscopy in the above-described embodiment, and more specifically, are not limited to measurement by laser-induced breakdown spectroscopy, Therefore, the devices accommodated in the measurement unit 10 are not limited to those in the above-described embodiment. That is, the measurement unit 10 may accommodate a non-contact type probe or measurement / measurement instrument when various non-contact type inspections, measurement / measurements are performed, When a contact type inspection or measurement / measurement is performed, a contact type probe or a measurement / measurement instrument may be accommodated.

DESCRIPTION OF SYMBOLS 1 Measuring apparatus 2 Main body 3 Fixed long shaft 4 Object side wheel 5 Telescopic shaft 6 Energizing side wheel 30 Canister 31 Concrete container

Claims (4)

A main body, a measuring unit fixedly attached to the main body, and a measuring object provided on the measuring object side of the main body, while maintaining a constant distance between the measuring object and the main body with respect to the measuring object An object-side moving mechanism capable of moving the main body, and the measurement object provided on the opposite side of the main body from the measurement object and biasing the main body against the measurement object side wherein possess an urging side moving mechanism capable of moving the body relative to the opposite side of the structure, supported by a plurality of fixed-length shaft and the fixed-length shaft, wherein the object-side moving mechanism length not stretch constant A measuring apparatus comprising: a plurality of telescopic shafts that are elastically expanded and contracted, and wheels that are supported by the telescopic shafts .   An optical system for transmitting the laser light so that the measurement object is irradiated with laser light emitted from a laser for performing measurement by laser-induced breakdown spectroscopy to the measurement unit, and the laser light The measuring apparatus according to claim 1, wherein an optical system that transmits light emitted from a substance that has been converted into plasma by ablation due to irradiation is incorporated.   The laser beam used for measurement is transmitted and supplied to the measurement unit by a mechanism for transmitting a space while changing an optical path by an optical fiber or by one or a plurality of optical elements. Item 1. The measuring device according to Item 1.   2. The measurement object is a canister which is a metal sealed container stored in a concrete container, and the structure opposite to the measurement object is a peripheral wall of the concrete container. Measuring device.

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