JP6367002B2 - Optical coordinate measuring device - Google Patents

Description

  The present invention relates to an optical coordinate measuring apparatus using a contact type probe.

  The contact-type coordinate measuring device is provided with a probe having a contact portion. The contact part of the probe is brought into contact with the measurement object, and the coordinates of the contact position between the measurement object and the contact part are calculated. By calculating the coordinates of a plurality of positions on the measurement object, the dimensions of a desired portion of the measurement object are measured.

  Patent Document 1 describes a point-by-point measurement system for spatial coordinates including a data processor, a contact probe, and an angle sensor. The contact probe is provided with a plurality of point light sources in addition to the contact point. The angle sensor is provided so that an essential part of the measurement object can be observed and a plurality of point light sources of the contact probe can be observed.

  The spatial direction from the angle sensor towards each light source is recorded. Based on the recorded spatial direction, the position and direction of the contact probe with respect to the angle sensor is calculated by the data processor. The position of the contact probe is related to the position of the contact point and the position of the measurement object.

Japanese Patent Publication No. 6-511555

  In the point-by-point measurement system of Patent Document 1, a monitor and a keyboard are connected to a data processor as an operator terminal, and a measurement result is presented on the monitor. Thereby, the operator can measure the measurement object while confirming the measurement result presented on the monitor. In this case, the operator needs to perform the measurement result confirmation work and the measurement object measurement work in parallel. It is difficult to perform such confirmation work and measurement work in parallel accurately and quickly.

  An object of the present invention is to provide an optical coordinate measuring apparatus that makes it possible to easily and quickly perform an accurate measurement operation with confirmation of a measurement result or the like.

(1) An optical coordinate measuring apparatus according to the present invention includes a mounting table on which a measurement object is mounted, a probe having a plurality of markers and a contact portion that is in contact with the measurement object, and a plurality of probes. an imaging unit for imaging the marker, and a set portion of the mounting table and connected and the mounting table extending in one direction in the horizontal direction, a stand for holding toward the area above the mounting table and the imaging unit extends upward from the installation section Based on image data indicating images of a plurality of markers obtained by the imaging unit, a holding unit that connects the mounting table and the imaging unit, and coordinates of the contact position between the measurement object and the contact unit A measurement unit that calculates and measures a physical quantity of the measurement object based on the calculation result; and a display unit that displays at least one of the calculation result and the measurement result obtained by the measurement unit, and the display unit is a stand of the holding unit . and part a mounting table Those were mounted et the holding portion to face between a and the region above the screen table in the display unit at a position above the installation section.

  In the optical coordinate measuring apparatus, the contact portion of the probe is brought into contact with the measurement object placed on the placement table. Image data is generated by imaging a plurality of markers of the probe by the imaging unit. Based on the image data, the coordinates of the contact position between the measurement object and the contact portion are calculated. Further, the physical quantity of the measurement object is measured based on the calculation result. Thereby, the dimension of the desired part of a measuring object can be measured.

  When a plurality of markers of the probe are imaged by the imaging unit, the user measures the measurement object at a position facing the imaging unit with the mounting table interposed therebetween. In this case, the user faces the screen of the display unit with the mounting table interposed therebetween. As a result, the user can selectively view the screen of the measurement object and the display unit with minimal movement of the line of sight when measuring the measurement object, or the screen of the measurement object and the display unit can be simultaneously displayed. It can be visually recognized. As a result, it is possible to easily and quickly perform an accurate measurement operation with confirmation of at least one of the coordinate calculation result and the measurement result.

  (2) The optical coordinate measuring device may further include a display unit holding mechanism that holds the display unit and is supported by the holding unit.

  In this case, since the display unit is supported by the holding unit, the imaging unit and the display unit can be handled integrally. Thereby, handling of an imaging part and a display part becomes easy.

  (3) The display unit holding mechanism may hold the display unit so that the screen of the display unit faces obliquely upward.

  Usually, the user measures the physical quantity of the measurement object while looking down at the measurement object. According to said structure, since the screen of a display part faces diagonally upwards, the user can make the movement range of the eyes | visual_axis for visually recognizing the measurement object and the screen of a display part smaller.

  (4) The display unit holding mechanism may include a heat conductive member that transfers heat generated from the display unit to the holding unit.

  In this case, heat generated from the display unit is transmitted to the holding unit and absorbed by the holding unit. Thereby, heating of the atmosphere around the display unit due to heat generation of the display unit is suppressed, so that the heated atmosphere is suppressed from entering the imaging region of the imaging unit.

  Accordingly, since the heated atmosphere is suppressed from flowing non-uniformly in the imaging region of the imaging unit, the light incident on the imaging unit is suppressed from being refracted due to the fluctuation of the atmosphere in the imaging region. As a result, a decrease in measurement accuracy due to heat generation of the display unit is suppressed.

  (5) The display unit may have a supported surface on the opposite side of the screen, and the heat conductive member may have a support surface that supports at least a part of the region of the supported surface.

  In this case, at least a part of the supported surface of the display unit is supported by the support surface of the thermally conductive member. Thereby, the heat transfer area from the supported surface to the thermally conductive member can be increased. Therefore, heat generated from the screen of the display unit is easily transmitted to the holding unit.

  (6) The imaging unit may be held by the holding unit so as to be positioned obliquely above the mounting table.

  In this case, it is possible to image a wide area above the mounting table while suppressing an increase in the size of the optical coordinate measuring apparatus. Further, it is possible to prevent the imaging unit from obstructing the movement of the probe.

  (7) The display unit is disposed at a position below the imaging unit, and the imaging unit is configured to prevent the atmosphere heated by the heat generated by the display unit from entering the imaging region of the imaging unit. May be attached.

  In this case, the atmosphere heated by the heat generated by the display unit does not enter the imaging region of the imaging unit. Accordingly, since the heated atmosphere is prevented from flowing non-uniformly in the imaging region of the imaging unit, the light incident on the imaging unit is prevented from being refracted due to the fluctuation of the atmosphere in the imaging region. As a result, a decrease in measurement accuracy due to heat generation of the display unit is suppressed.

  (8) The hood member has a front end portion in which an opening toward the mounting table is formed, and is disposed at a position higher than the display unit, and the upper end portion of the display unit is further from the mounting table than the front end portion of the hood member. You may arrange | position in a distant position.

  Thereby, when the atmosphere heated by the heat generated at the upper end of the display unit flows upward, the heated atmosphere does not pass through the space between the tip of the hood member and the mounting table. Therefore, the heated atmosphere does not enter the imaging area of the imaging unit.

  (9) The holding unit may integrally hold the imaging unit and the mounting table.

  In this case, since the imaging unit and the mounting table are integrally held, handling of the imaging unit and the mounting table is facilitated.

  (10) The display unit holding mechanism may be configured to change the tilt angle of the screen of the display unit with respect to the vertical axis.

  In this case, it is possible to adjust the screen tilt of the display unit according to the user or the measurement environment. As a result, the convenience of measurement work is improved.

  According to the present invention, it is possible to easily and quickly perform an accurate measurement operation with confirmation of a measurement result or the like.

It is a block diagram which shows the structure of the optical coordinate measuring device which concerns on the 1st Embodiment of this invention. It is a perspective view which shows the structure of the measuring head of the optical coordinate measuring device of FIG. It is a perspective view which shows the structure of the probe of the measuring head of FIG. It is the side view and top view which show the positional relationship of a main imaging part, a display part, and a mounting base. It is a figure for demonstrating the structure of a main imaging part. It is a schematic diagram for demonstrating the relationship between a main imaging part and a some light emission part. It is a figure which shows an example of the image displayed on the display part of FIG. It is a figure which shows an example of a measuring object. It is a figure for demonstrating the example of a measurement. It is a figure for demonstrating the example of a measurement. It is a figure for demonstrating the example of a measurement. It is a figure for demonstrating the example of a measurement. It is a figure for demonstrating the example of a measurement. It is a figure which shows the example by which measurement information was superimposed and displayed on the captured image. It is a schematic diagram which shows a part of structure of the measuring head based on the 2nd Embodiment of this invention. FIG. 16 is a side view of the measurement head for explaining the effect of the hood member of FIG. 15. It is an external appearance perspective view which shows the structure of the measurement head which concerns on the 3rd Embodiment of this invention. (A) is a side view showing a part of the measurement head of FIG. 17, and (b) is a longitudinal sectional view of the display unit and the display unit holding mechanism in a vertical plane passing through the QQ line of FIG. It is a thermography image showing the measurement result of the surface temperature of a liquid crystal display panel. It is a side view which shows the example in which the cover member was provided in the display part of Fig.18 (a). It is a side view showing the composition of the measuring head concerning a 4th embodiment of the present invention.

[1] First Embodiment (1) Configuration of Optical Coordinate Measuring Device FIG. 1 is a block diagram showing a configuration of an optical coordinate measuring device according to a first embodiment of the present invention. FIG. 2 is a perspective view showing the configuration of the measuring head of the optical coordinate measuring apparatus 300 of FIG. FIG. 3 is a perspective view showing the configuration of the probe of the measurement head 100 of FIG. Hereinafter, the optical coordinate measuring apparatus 300 according to the present embodiment will be described with reference to FIGS. As shown in FIG. 1, the optical coordinate measuring device 300 includes a measuring head 100 and a processing device 200. The measurement head 100 includes a holding unit 110, a mounting table 120, a main imaging unit 130, a probe 140, a sub imaging unit 150, a display unit 160, an operation unit 170, and a control board 180.

  As shown in FIG. 2, the holding unit 110 of the measurement head 100 includes an installation unit 111 and a stand unit 112. The installation part 111 has a long flat plate shape extending in one direction, and is installed, for example, on a horizontal installation surface. The stand part 112 is provided so as to extend upward from one end of the installation part 111.

  A mounting table 120 is provided at the other end of the installation unit 111. The mounting table 120 is, for example, an optical surface plate. On the mounting table 120, the measuring object S is mounted. In this example, the mounting table 120 has a substantially square shape. A plurality of screw holes are formed in the mounting table 120 so as to be arranged at equal intervals in two directions orthogonal to each other. Thereby, the measuring object S can be fixed to the mounting table 120 by the clamp member and the fixing screw. The mounting table 120 may have magnetism. In this case, the measuring object S can be fixed to the mounting table 120 by a fixing member using a magnet such as a magnet base. Moreover, the upper surface of the mounting table 120 may have adhesiveness. Also in this case, the measuring object S can be easily fixed to the mounting table 120. Further, a member for placing the measuring object S may be fixed on the upper surface of the placing table 120 with screws. As a member for placing the measuring object S, for example, a plate-like member whose upper surface is adhesive can be used. In this case, the measuring object S can be easily fixed on the upper surface of the plate-like member. The mounting table 120 may be configured to be detachable from the installation unit 111.

  A main imaging unit 130 is provided above the stand unit 112. The main imaging unit 130 may be detachably provided on the top of the stand unit 112 or may be provided integrally with the stand unit 112. The main imaging unit 130 includes an imaging element 131 (FIG. 5 described later) and a plurality of lenses 132 (FIG. 5 described later). In the present embodiment, the image sensor 131 is a CMOS (complementary metal oxide semiconductor) image sensor capable of detecting infrared rays. The main imaging unit 130 is arranged to face obliquely downward so that infrared rays emitted from a predetermined imaging region V (FIGS. 4 and 6 described later) can be detected.

  The imaging region V (FIGS. 4 and 6) is a certain region including the mounting table 120 of the installation unit 111 and its periphery. In the present embodiment, the imaging table V is defined as the mounting table 120 in FIG. 1 and a region protruding from the mounting table 120 by the length of the entire length of the probe 140 in FIG. The total length of the probe 140 is about 150 mm, for example. From each pixel of the main imaging unit 130, an analog electrical signal (hereinafter referred to as a light reception signal) corresponding to the detection amount is output to the control board 180.

  As shown in FIG. 3, the probe 140 includes a housing part 141, a grip part 142, a plurality of light emitting parts 143, a stylus 144, a power supply board 145, and a connection terminal 146. The grip portion 142 extends in the first direction D1, and the housing portion 141 extends in a second direction D2 that intersects the first direction D1. The user operates the probe 140 while holding the grip portion 142.

  In the following, unless otherwise specified, the probe 140 is vertically and longitudinally and vertically and vertically when the user holds the grip 142 vertically (the first direction D1 faces the vertical direction). Point to.

  The housing part 141 is provided at the upper end part of the grip part 142. The grip 142 is below the center of the lower surface of the housing 141 so that the front portion of the housing 141 protrudes forward of the grip 142 and the rear portion of the housing 141 protrudes rear of the grip 142. Extend to. Here, an angle formed by the first direction D1 and the second direction D2 is defined as an angle φ formed by the grip portion 142 and the front portion of the housing portion 141. In the present embodiment, the angle φ is an acute angle and is larger than 0 ° and smaller than 90 °.

  In a state in which the grip portion 142 is held vertically, the front end of the housing portion 141 is positioned below the rear end of the housing portion 141, and the upper surface of the housing portion 141 is inclined obliquely downward from the rear end to the front end. . In this case, the user can easily turn the upper surface of the housing part 141 obliquely upward.

  In the present embodiment, the upper surface of the housing 141 is composed of a front upper surface 141a, a central upper surface 141b, and a rear upper surface 141c. The front upper surface 141a, the central upper surface 141b, and the rear upper surface 141c are each parallel to the second direction D2. The front upper surface 141a, the central upper surface 141b, and the rear upper surface 141c are perpendicular to the plane including the first and second directions D1 and D2. The front upper surface 141a and the rear upper surface 141c are on the same plane, and the central upper surface 141b is on a higher plane than the front upper surface 141a and the rear upper surface 141c.

  A glass holding member that holds the plurality of light emitting units 143 is housed inside the housing unit 141. The housing 141 is formed with a plurality of openings 141h for exposing the plurality of light emitting units 143 therein.

  In the example of FIG. 3, seven light emitting units 143 are provided in the housing unit 141. Three light emitting units 143 are arranged at the front end of the casing 141, two light emitting units 143 are arranged at the center, and two light emitting units 143 are arranged at the rear end. On the front upper surface 141a, the central upper surface 141b, and the rear upper surface 141c of the casing 141, an opening 141h for exposing the three light emitting units 143 at the front end and the two light emitting units 143 at the center are exposed. An opening 141h for exposing the opening 141h and the two light emitting portions 143 at the rear end is formed.

  In this example, the three light emitting units 143 at the front end and the two light emitting units 143 at the rear end of the housing unit 141 are arranged on the same plane. The two light emitting units 143 at the center are arranged so as to be located on a plane higher than the plane on which the other light emitting units 143 are located.

  The three light emitting portions 143 at the front end are arranged so as to be exposed upward from the front upper surface 141a. The central two light emitting portions 143 are arranged so as to be exposed upward from the central portion upper surface 141b. The two light emitting portions 143 at the rear end are arranged so as to be exposed upward from the rear upper surface 141c.

  Each light emitting unit 143 includes a plurality of LEDs (light emitting diodes). In this example, each LED is an infrared LED, and each light emitting unit 143 periodically emits infrared light having a wavelength of 860 nm. Infrared rays emitted from the plurality of light emitting units 143 are imaged by the main imaging unit 130 of FIG. 2 through the plurality of openings 141 h of the housing unit 141.

  The main imaging unit 130 in FIG. 2 is located obliquely above the mounting table 120. As described above, the user can easily turn the upper surface of the housing unit 141 obliquely upward. Therefore, the main imaging unit 130 can efficiently image infrared rays emitted from the plurality of light emitting units 143 of the probe 140 when measuring the shape of the measurement object S on the mounting table 120.

  As shown in FIG. 3, the stylus 144 is a rod-shaped member having a contact portion 144 a that can contact the measurement object S. In the present embodiment, a spherical contact portion 144 a is provided at the tip of the stylus 144. An attachment portion (not shown) for attaching the stylus 144 is formed on the front end surface and the lower surface of the housing portion 141. The user can arbitrarily change the attachment position of the stylus 144 between the front end surface of the housing unit 141 and the lower surface of the front end according to the shape of the measurement object S. In the example of FIG. 3, the stylus 144 is attached to the front end surface of the housing unit 141.

  The power supply substrate 145 supplies power to the plurality of light emitting units 143. The power supply substrate 145 is housed inside the grip portion 142. The connection terminal 146 is disposed below the grip part 142. The operation of the plurality of light emitting units 143 is controlled by the control board 180 in FIG. 1 through a cable connected to the connection terminal 146. Note that the probe 140 and the control board 180 may be provided so as to be able to communicate wirelessly.

  The sub imaging unit 150 is, for example, a CCD (charge coupled device) camera. The resolution of the sub imaging unit 150 may be lower than the resolution of the main imaging unit 130. The sub imaging unit 150 is disposed at a position where the positional relationship between the probe 140 and the contact portion 144a of the stylus 144 is known. In the present embodiment, the sub-imaging unit 150 is disposed on the end surface of the front end of the housing unit 141 of the probe 140. A light reception signal is output from each pixel of the sub imaging unit 150 to the control board 180.

  As shown in FIG. 2, the lower end portion of the display unit 160 is held by the display unit holding mechanism 500. The display unit holding mechanism 500 is integrally attached to the installation unit 111 of the holding unit 110. The display unit holding mechanism 500 may be integrally attached to the stand unit 112 of the holding unit 110, or may be integrally attached to both the installation unit 111 and the stand unit 112.

  The display unit 160 is configured by, for example, a liquid crystal display panel or an organic EL (electroluminescence) panel. On the screen SC of the display unit 160, based on the control by the control board 180, the measurement result of the physical quantity of the measurement object S and the coordinates of the measurement position described later are displayed. In addition, on the screen SC of the display unit 160, an operation procedure of the optical coordinate measuring apparatus 300, an image generated by the processing apparatus 200, and the like are also displayed.

  The operation unit 170 has, for example, a plurality of operation buttons. The operation unit 170 is operated by the user when designating a part of the measuring object S to be measured. The operation unit 170 may be provided integrally with the probe 140. For example, one or a plurality of operation buttons may be provided as the operation unit 170 on the grip unit 142 of FIG. In this case, the user can operate the operation unit 170 while holding the grip unit 142 with one hand.

  The control board 180 is provided in the installation unit 111 of the holding unit 110. The control board 180 is connected to the main imaging unit 130, the probe 140, the sub imaging unit 150, the display unit 160, and the operation unit 170. The processing apparatus 200 controls operations of the main imaging unit 130, the probe 140, the sub imaging unit 150, the display unit 160, and the operation unit 170 via the control board 180.

  On the control board 180, an A / D converter (analog / digital converter) and a FIFO (First In First Out) memory (not shown) are mounted. The received light signals output from the main imaging unit 130 and the sub imaging unit 150 are sampled at a constant sampling period by the A / D converter of the control board 180 and converted into a digital signal. Digital signals output from the A / D converter are sequentially stored in the FIFO memory. The digital signal stored in the FIFO memory is sequentially transferred to the processing device 200 as pixel data.

  In the present embodiment, the light emission timings of the plurality of light emitting units 143 in FIG. 3 and the imaging timings of the main imaging unit 130 in FIG. 2 are synchronized. Pixel data accumulated during the light emission period of the plurality of light emitting units 143 is transferred from the control substrate 180 to the processing apparatus 200 during the next light extinction period of the light emitting unit 143.

  As illustrated in FIG. 1, the processing device 200 includes a storage unit 210, a control unit 220, and an operation unit 230. The storage unit 210 includes a ROM (read only memory), a RAM (random access memory), and a hard disk. The storage unit 210 stores a system program. The storage unit 210 is used for processing various data and storing various data such as pixel data given from the measurement head 100.

  Control unit 220 includes a CPU (Central Processing Unit). In the present embodiment, storage unit 210 and control unit 220 are realized by a personal computer. The control unit 220 generates image data based on the pixel data given from the measurement head 100. Image data is a set of a plurality of pixel data. The controller 220 calculates the position of the contact portion 144a of the stylus 144 of the probe 140 based on the generated image data.

  The operation unit 230 includes a keyboard and a pointing device. The pointing device includes a mouse or a joystick. The operation unit 230 is operated by a user.

(2) Positional relationship between mounting table, main imaging unit, and display unit FIGS. 4A and 4B are a side view and a plan view showing a positional relationship between the main imaging unit 130, the display unit 160, and the mounting table 120, respectively. . In the example of FIGS. 4A and 4B, a state in which the user measures the measuring object S with the measuring head 100 is shown.

  As shown in FIGS. 4A and 4B, the display unit 160 is held by the display unit holding mechanism 500 between the stand unit 112 of the holding unit 110 and the mounting table 120. The display unit 160 is inclined so that the screen SC faces the area above the mounting table 120. The screen SC of the display unit 160 is perpendicular to a vertical plane parallel to the longitudinal direction LD of the installation unit 111. In the present embodiment, a range that can be imaged by the main imaging unit 130 is referred to as an imaging region V.

  As described above, the main imaging unit 130 images the plurality of light emitting units 143 of the probe 140 located in the imaging region V. The user measures the measuring object S at a position facing the main imaging unit 130 with the mounting table 120 interposed therebetween. In this case, the user faces the screen SC of the display unit 160 with the mounting table 120 interposed therebetween.

  Accordingly, the user can selectively visually recognize the measurement object S and the screen SC of the display unit 160 with a minimum movement of the line of sight when measuring the measurement object S, or the measurement object S and the display. The screen SC of the unit 160 can be viewed at the same time. 4 (a) and 4 (b), the direction of the line of sight when the user visually recognizes the measurement object S is indicated by a thick dashed line arrow, and when the user visually recognizes the screen SC of the display unit 160. The direction of the line of sight is indicated by a thick dotted arrow.

  Usually, the user performs measurement while looking down at the measurement object S. Therefore, as shown in FIG. 4A, the display unit 160 is preferably held so as to be inclined with respect to the vertical axis in a state where the screen SC faces obliquely upward. Thereby, the user can make the moving range of the line of sight for visually recognizing the measuring object S and the screen SC of the display unit 160 smaller.

  In the present embodiment, display unit 160 may be held such that screen SC of display unit 160 is parallel to the vertical axis.

(3) Configuration of Main Imaging Unit FIG. 5 is a diagram for describing the configuration of the main imaging unit 130. FIG. 5A is a schematic cross-sectional view of the main imaging unit 130, and FIG. 5B is an external perspective view of the main imaging unit 130.

  As shown in FIG. 5A, the main imaging unit 130 includes an element holding unit 130a, a lens holding unit 130b, an imaging element 131, and a plurality of lenses 132. The element holding part 130a and the lens holding part 130b are made of, for example, a metal material. The element holding part 130a and the lens holding part 130b may be provided as a common member by integral molding, or may be provided as separate members.

  A concave portion 133 having a rectangular cross section is formed on one surface of the element holding portion 130a. The image sensor 131 is fitted in the recess 133. In order to prevent displacement of the image sensor 131, the image sensor 131 may be fixed in the recess 133. A through hole 134 is formed from the bottom surface of the recess 133 to the other surface parallel to the one surface of the element holding portion 130a.

  The lens holding part 130b has a cylindrical shape. One end portion of the lens holding portion 130b is fixed to the other surface of the element holding portion 130a. The lens holding unit 130b holds a plurality of lenses 132 having various sizes. The plurality of lenses 132 are arranged so as to overlap the through holes 134 of the element holding portion 130a and have optical axes that coincide with each other. Light enters the image sensor 131 through the plurality of lenses 132 from the other end of the lens holding portion 130b.

(4) Detection by Main Imaging Unit As described above, the main imaging unit 130 detects infrared rays emitted from the plurality of light emitting units 143 of the probe 140. FIG. 6 is a schematic diagram for explaining the relationship between the main imaging unit 130 and the plurality of light emitting units 143. In FIG. 6, a description will be given using a so-called pinhole camera model for easy understanding. FIG. 6 shows only one lens 132 among the plurality of lenses 132 of the main imaging unit 130, and light is guided to the imaging element 131 so as to pass through the main point 132 a of the lens 132.

  As shown in FIG. 6, the main imaging unit 130 has a certain angle of view (viewing angle) θ. The imaging region V is included in the range of the angle of view θ of the main imaging unit 130. When a plurality of light emitting units 143 are located in the imaging region V, infrared rays emitted from the light emitting units 143 are incident on the imaging element 131 through the principal point 132a of the lens 132.

  In this case, the direction from the principal point 132a of the lens 132 toward each light emitting unit 143 is specified based on the light receiving position P of the imaging element 131. In the example of FIG. 6, each light emitting unit 143 is positioned on each straight line passing through each light receiving position P and the main point 132 a of the lens 132, as indicated by a dashed line. Moreover, the relative positional relationship of the several light emission part 143 is beforehand memorize | stored in the memory | storage part 210 of FIG. 1, for example.

  Based on the direction from the principal point 132a of the lens 132 to each light emitting unit 143 and the positional relationship of the plurality of light emitting units 143, the position of the center of each light emitting unit 143 is uniquely determined. In the present embodiment, the x axis, the y axis, and the z axis that are orthogonal to each other are defined, and the absolute position in the imaging region V is represented by three-dimensional coordinates. The control unit 220 in FIG. 1 calculates the coordinates of the center of each light emitting unit 143 based on the light receiving position P of the image sensor 131 and the positional relationship between the plurality of light emitting units 143 stored in advance.

  Based on the calculated coordinates of the center of each light emitting section 143, the coordinates of the contact position between the contact section 144a (FIG. 3) of the probe 140 and the measuring object S are calculated by the control section 220 of FIG.

  For example, the positional relationship between the center of each light emitting unit 143 and the center of the contact unit 144a (FIG. 3) is stored in advance in the storage unit 210 of FIG. Based on the calculated coordinates of the center of each light emitting part 143 and the positional relationship between the center of each light emitting part 143 and the center of the contact part 144a stored in advance, the coordinates of the center of the contact part 144a are specified.

  Further, the posture of the probe 140 is specified based on the coordinates of the center of each light emitting unit 143. Thereby, the direction of the stylus 144 is specified. Further, the moving direction of the contact portion 144a is specified based on the change in the coordinates of the center of each light emitting portion 143. Usually, the contact portion 144a is brought close to the surface of the measuring object S to be contacted. Therefore, the relative positional relationship between the center of the contact portion 144a and the contact position is estimated based on the specified direction of the stylus 144 and the moving direction of the contact portion 144a. Based on the estimated positional relationship, the coordinates of the contact position between the contact portion 144a and the measuring object S are calculated from the coordinates of the center of the contact portion 144a.

  A sensor that detects the direction of the force applied from the measurement object S to the contact portion 144a may be provided in the probe 140. In that case, the coordinates of the contact position between the contact portion 144a and the measurement object S can be calculated based on the detection result of the sensor.

  If there are individual differences in the positional relationship between the imaging element 131 and the plurality of lenses 132, the positional relationship between the plurality of light emitting units 143, the positional relationship between the plurality of light emitting units 143 and the contact unit 144a, the calculated coordinates vary. Occurs. Therefore, it is preferable to perform calibration before the measurement by the optical coordinate measuring apparatus 300 to prevent variation due to individual differences. The calibration result may be stored as unique data, and the unique data may be referred to when measuring the measurement object. Alternatively, based on the calibration result, before performing actual measurement, Individual differences may be adjusted.

(5) Measurement Example A measurement example of the dimension of the measuring object S by the optical coordinate measuring apparatus 300 will be described. FIG. 7 is a diagram illustrating an example of an image displayed on the display unit 160 of FIG. FIG. 8 is a diagram illustrating an example of the measurement object S. As illustrated in FIG.

  FIG. 7 shows an image VI (hereinafter referred to as an imaging region virtual image) VI that virtually represents the imaging region V. As described above, the x-axis, the y-axis, and the z-axis are set in the imaging region V, respectively. In this example, the x axis and the y axis are set so as to be parallel to and orthogonal to the upper surface of the mounting table 120, and the z axis is set perpendicular to the upper surface of the mounting table 120. The center of the mounting table 120 is set to the origin O. The imaging region virtual image VI in FIG. 7 includes the origin O, the x-axis, the y-axis, and the z-axis, and also includes a line representing the outer periphery of the mounting table 120 (dotted line in FIG. 7).

  The measuring object S in FIG. 8 has a rectangular parallelepiped shape. In this example, the distance between one side surface Sa of the measuring object S and the opposite side surface Sb is measured. The side surfaces Sa and Sb of the measuring object S are each perpendicular to the x axis.

  9 to 13 are diagrams for explaining a specific measurement example of the measuring object S in FIG. FIG. 9A and FIG. 11A are front views showing the positional relationship between the mounting table 120, the main imaging unit 130, the probe 140, and the measurement object S. FIG. 9B and FIG. These are external appearance perspective views of the probe 140 and the measuring object S. FIG. 10, 12, and 13 show examples of the imaging region virtual image VI displayed on the display unit 160.

  9 (a) and 9 (b), the contact portion 144a of the stylus 144 is placed on the side surface Sa of the measurement object S so that the plurality of light emitting portions 143 of the probe 140 are positioned in the imaging region V. Touched. In this state, when the operation unit 170 in FIG. 1 is operated, as shown in FIG. 9B, the contact position between the measurement object S and the contact part 144a is set as the measurement position M1a. In this case, the coordinates of the measurement position M1a are specified.

  Similarly, three positions on the side surface Sa of the measurement object S are set as measurement positions M2a, M3a, and M4a, and the coordinates of the measurement positions M2a, M3a, and M4a are specified. Subsequently, when the operation unit 170 or the operation unit 230 of FIG. 1 is operated, a plane passing through the measurement positions M1a to M4a is set as a measurement plane ML1 corresponding to the side surface Sa of the measurement object S. In this case, as shown in FIG. 10, the set measurement plane ML1 is superimposed on the imaging region virtual image VI. In addition to the measurement plane ML1, the calculated coordinates of the measurement positions M1a to M4a are superimposed and displayed on the imaging region virtual image VI in FIG.

  Subsequently, as shown in FIGS. 11A and 11B, the contact portion 144a of the stylus 144 is placed on the measurement object S so that the plurality of light emitting portions 143 of the probe 140 are positioned in the imaging region V. It contacts the side surface Sb. In this state, when the operation unit 170 of FIG. 1 is operated, as shown in FIG. 11B, the contact position between the measurement object S and the contact unit 144a is set as the measurement position M1b. In this case, the coordinates of the measurement position M1b are specified.

  Similarly, three positions on the side surface Sb of the measurement object S are set as measurement positions M2b, M3b, and M4b, and the coordinates of the measurement positions M2b, M3b, and M4b are specified. Subsequently, the plane passing through the measurement positions M1b to M4b is set as the measurement plane ML2 corresponding to the side surface Sb of the measurement object S by operating the operation unit 170 or the operation unit 230 of FIG. In this case, as shown in FIG. 12, the set measurement plane ML2 is superimposed on the imaging region virtual image VI in addition to the measurement plane ML1. In addition to the measurement planes ML1 and ML2, the calculated coordinates of the measurement positions M1a to M4a and M1b to M4b are superimposed and displayed on the imaging region virtual image VI of FIG.

  Subsequently, when the operation unit 170 or the operation unit 230 in FIG. 1 is operated, the control unit 220 in FIG. 1 calculates the determined distance between the measurement planes ML1 and ML2, and the calculation is performed as shown in FIG. The result is displayed on the imaging region virtual image VI as a measurement result. At this time, in addition to the measurement results, the coordinates of the measurement positions M1a to M4a and M1b to M4b may be superimposed and displayed on the imaging region virtual image VI in the same manner as in the examples of FIGS.

  The measurement result may be displayed on the screen SC of the display unit 160 separately from the imaging region virtual image VI. In addition, the calculation condition of the distance between the two measurement planes may be appropriately set by the user.

  In this example, one measurement plane is determined based on four measurement positions, but one measurement plane can be set based on a minimum of three measurement positions. On the other hand, by setting four or more measurement positions, the measurement plane corresponding to the measurement object S can be set more accurately. Further, the flatness of the surface of the measuring object S can be obtained based on four or more measurement positions.

  In this example, a plane (measurement plane) passing through a plurality of designated positions (measurement positions) is set as a measurement target, but other geometric shapes are set as measurement targets according to the shape of the measurement target. It may be set. For example, a cylinder or a sphere passing through a plurality of designated positions may be set as a measurement target. In this case, the diameter of the set cross section of the cylinder or the radius of the sphere can be obtained. Further, an angle or an area related to the set geometric shape may be obtained.

  As described above, according to the optical coordinate measuring apparatus 300, as the physical quantity of the measurement object S, for example, the size, area, volume, flatness, angle, and the like of the measurement object S or a part thereof can be measured. .

  When the optical coordinate measuring apparatus 300 according to the present embodiment is used for quality inspection of manufactured parts, the geometric features to be measured are optical before actual measurement of the measurement object (manufactured part). It is preset in the coordinate measuring apparatus 300. The physical quantity of the measuring object S is measured with respect to the geometric feature, and whether or not the measuring object has a shape as designed is inspected based on the measurement result. In this case, a pass / fail criterion for each of the plurality of geometric features to be measured is preset in the optical coordinate measuring device 300, and the optical coordinate measuring device 300 measures the measurement object related to the plurality of geometric features. The result may be compared with a pass / fail criterion relating to a plurality of preset geometric features, and pass / fail judgment may be performed for each geometric feature. Also, a plurality of geometric feature measurement procedures and pass / fail criteria relating to the plurality of geometric features are preset in the optical coordinate measuring device 300, and the optical coordinate measuring device 300 determines pass / fail for each geometric feature. In addition to performing the determination, the pass / fail determination of the measurement object may be performed comprehensively based on the comparison result between the measurement results regarding the plurality of geometric features and the pass / fail criteria.

(6) Usage Example of Imaging Unit By imaging the measurement object S by the sub imaging unit 150 in FIG. 3, an image of the measurement object S can be displayed on the display unit 160. Hereinafter, an image obtained by the sub imaging unit 150 is referred to as a captured image.

  The positional relationship between the plurality of light emitting units 143 and the sub imaging unit 150 and the characteristics (such as the angle of view and distortion) of the sub imaging unit 150 are stored in advance as imaging information in the storage unit 210 of FIG. Therefore, when the plurality of light emitting units 143 are in the imaging region V, the region captured by the sub imaging unit 150 is recognized by the control unit 220 in FIG. That is, the three-dimensional space corresponding to the captured image is recognized by the control unit 220.

  As described above, information relating to measurement (hereinafter referred to as measurement information) such as a measurement position and a measurement plane is set in a three-dimensional space. In the present embodiment, these pieces of measurement information can be associated with the captured image, and the measurement information can be superimposed on the captured image.

  FIG. 14 is a diagram illustrating an example in which measurement information is superimposed and displayed on a captured image. In the example of FIG. 14, the side surface Sa of the measurement object S is imaged by the sub imaging unit 150. A plurality of spherical images P1a to P4a representing the measurement positions M1a to M4a are superimposed on the captured image SI, and an image PL1 representing the measurement plane ML1 is superimposed.

  As described above, the measurement information is superimposed on the captured image obtained by actually imaging the measurement object S, so that the user can easily grasp the measurement information visually. Further, when the same measurement is performed on the other measurement object S after the measurement on the one measurement object S, the other measurement object is obtained by referring to the captured image on which the measurement information is superimposed. Measurement with respect to S can be easily performed.

(7) Effect At the time of measuring the measuring object S by the optical coordinate measuring apparatus 300, the user performs the measuring operation of the measuring object S at a position facing the main imaging unit 130 with the mounting table 120 interposed therebetween. In this case, the user faces the screen SC of the display unit 160 with the mounting table 120 interposed therebetween. Therefore, when measuring the measurement object S, the user can selectively visually recognize the measurement object S and the screen SC of the display unit 160 with minimal movement of the line of sight, or the measurement object S and the display unit. 160 screens SC can be visually recognized simultaneously. As a result, it is possible to easily and quickly perform an accurate measurement operation with confirmation of the measurement result and the coordinates of the measurement position.

  Note that the display unit 160 of this example is held so as to be out of the imaging region V of the main imaging unit 130, as shown in FIGS. 4 (a) and 4 (b). This prevents the display unit 160 from limiting the measurable range of the measuring object S.

  In the first embodiment, the display unit 160 is provided integrally with the main imaging unit 130 and the mounting table 120 by the display unit holding mechanism 500. Thereby, handling of the measuring head 100 becomes easy.

[2] Second Embodiment FIG. 15 is a schematic diagram showing a part of the configuration of a measurement head according to a second embodiment of the present invention. The configuration and operation of the optical coordinate measurement device according to the second embodiment are the same as the configuration and operation of the optical coordinate measurement device 300 according to the first embodiment except for the following points.

  As shown in FIG. 15, in the present embodiment, a hood member FD having a funnel shape is attached to the main imaging unit 130. Specifically, the hood member FD of this example has a substantially rectangular opening. The hood member FD has a small diameter part FDa and a large diameter part FDb. The cross section of the large diameter portion FDb gradually expands from the cross section of the small diameter portion FDa.

  The small-diameter portion FDa is attached to the main imaging unit 130 so as to surround the outer periphery of the lens holding unit 130b. The inner surface of the hood member FD is formed so as not to overlap the imaging area V of the main imaging unit 130.

  FIG. 16 is a side view of the measurement head 100 for explaining the effect of the hood member FD of FIG. When the measurement result or the like is displayed on the screen SC of the display unit 160 in FIG. 1, the display unit 160 generates heat. When the heat generation amount of the display unit 160 becomes excessively large, the atmosphere around the display unit 160 is easily heated by the display unit 160. The heated atmosphere flows upward of the display unit 160 as indicated by the thick wavy arrow in FIG.

  At this time, since the hood member FD is attached to the main imaging unit 130 of this example, the heated atmosphere flows upward along the outer peripheral surface of the hood member FD. Accordingly, the atmosphere heated by the display unit 160 is prevented from entering the imaging region V surrounded by the hood member FD.

  As a result, the heated atmosphere is prevented from flowing non-uniformly within the imaging region V of the main imaging unit 130, so that the light incident on the main imaging unit 130 is refracted by fluctuations in the atmosphere within the imaging region V. Is prevented. As a result, a decrease in measurement accuracy due to heat generation of the display unit 160 is suppressed.

  In the present embodiment, display unit 160 is tilted so that screen SC faces the area above mounting table 120. In this case, at least a part of the atmosphere heated by the display unit 160 flows obliquely upward along the screen SC from the lower end to the upper end of the display unit 160. Therefore, it is preferable that the upper end portion of the display unit 160 is disposed at a position farther from the mounting table 120 than the tip end portion of the hood member FD (a position close to the stand unit 112). Thereby, the atmosphere heated by the display unit 160 is prevented from passing through the space between the front end portion of the hood member FD and the mounting table 120.

  It is preferable that the display unit 160 is disposed at a position farther from the mounting table 120 than the tip of the hood member FD as much as possible (position close to the stand unit 112). This sufficiently suppresses the atmosphere heated by the display unit 160 from entering the hood member FD.

[3] Third Embodiment FIG. 17 is an external perspective view showing a configuration of a measurement head 100 according to a third embodiment of the present invention. The configuration and operation of the optical coordinate measurement device according to the third embodiment are the same as the configuration and operation of the optical coordinate measurement device 300 according to the first embodiment except for the following points.

  As shown in FIG. 17, a hood member FD <b> 2 having a substantially rectangular tube shape is attached to the main imaging unit 130. The inner surface of the hood member FD2 is formed so as not to overlap the imaging region V of the main imaging unit 130. The hood member FD2 is used to prevent the atmosphere heated by the display unit 160 from entering the imaging region V of the main imaging unit 130, similarly to the hood member FD of FIG. In the present embodiment, the hood member FD2 is not necessarily provided.

  In the present embodiment, a display unit holding mechanism 600 described below is provided instead of the display unit holding mechanism 500 in FIG. 2 that holds the lower end of the display unit 160. 18A is a side view showing a part of the measurement head 100 of FIG. 17, and FIG. 18B is a view of the display unit 160 and the display unit holding mechanism 600 in the vertical plane passing through the line QQ of FIG. It is a longitudinal cross-sectional view.

  As shown in FIGS. 18A and 18B, the display unit holding mechanism 600 includes an aluminum bottom plate 601, a front plate 602, an inclined plate 603, a top plate 604, a back plate 605, one side plate 606, and the other side plate. 607 is included. The bottom plate 601, the front plate 602, the inclined plate 603, the top plate 604, and the back plate 605 have a rectangular shape, and the one side plate 606 and the other side plate 607 have a trapezoidal shape.

  The bottom plate 601 has a front edge portion 601a and a rear edge portion 601b that face each other. A front plate 602 is provided so as to extend upward from the front edge 601 a of the bottom plate 601. An inclined plate 603 is provided so as to extend obliquely upward from the upper end portion of the front plate 602. Furthermore, an upper surface plate 604 is provided so as to extend horizontally from the upper end of the inclined plate 603 to a position above the rear edge 601b of the bottom surface plate 601. A back plate 605 is provided so as to extend downward from the portion of the upper surface plate 604 located above the rear edge portion 601b toward the rear edge portion 601b.

  One side plate 606 and the other side plate 607 are provided so as to cover the space surrounded by the bottom plate 601, the front plate 602, the inclined plate 603, the top plate 604, and the back plate 605 from both sides.

  The bottom plate 601 is attached on the upper surface of the installation part 111 so that the front edge part 601a and the rear edge part 601b are arranged in this order in the direction from the mounting table 120 toward the stand part 112. In a state where the bottom plate 601 is attached to the installation part 111, the front edge part 601 a and the rear edge part 601 b extend in a direction orthogonal to the longitudinal direction LD of the installation part 111.

  In the present embodiment, the surface (back surface) opposite to the screen SC in the display unit 160 functions as a supported surface. In addition, the upper surface of the inclined plate 603 of the display unit holding mechanism 600 functions as a support surface for supporting the display unit 160.

  As shown in FIG. 18B, an aluminum metal plate G <b> 1 is attached on the upper surface of the inclined plate 603. The metal plate G1 has a rectangular shape that is slightly larger than the display unit 160. On the upper surface of the metal plate G1, a sheet-like heat radiation rubber G2 is attached. As the heat radiation rubber G2, rubber having high thermal conductivity such as silicon rubber is used. The back surface of the display unit 160 is attached on the top surface of the heat radiating rubber G2. Thereby, the back surface of the display unit 160 is supported by the upper surface of the inclined plate 603.

  As described above, the display unit holding mechanism 600 and the metal plate G1 are formed of aluminum having high thermal conductivity, and the heat radiation rubber G2 is formed of rubber having high thermal conductivity. In this case, a large heat transfer area between the display unit 160 and the inclined plate 603 can be secured by bringing the entire upper surface of the inclined plate 603 into contact with or close to the metal plate G1.

  Therefore, when the display unit 160 generates heat, heat generated from the display unit 160 is efficiently applied to the upper surface of the inclined plate 603 through the heat radiation rubber G2 and the metal plate G1, as indicated by a thick solid arrow in FIG. 8B. Communicated. The heat transmitted to the inclined plate 603 is transmitted to the installation unit 111 through the front plate 602 and the bottom plate 601 and is absorbed by the installation unit 111. Thereby, heating of the atmosphere around the display unit 160 due to heat generation of the display unit 160 is suppressed, so that the heated atmosphere is suppressed from entering the imaging region V of the main imaging unit 130. As a result, a decrease in measurement accuracy due to heat generation of the display unit 160 is suppressed.

  The display unit holding mechanism 600 and the metal plate G1 in this example are formed of aluminum, but the materials of the display unit holding mechanism 600 and the metal plate G1 are not limited to aluminum. The material of the display unit holding mechanism 600 and the metal plate G1 only needs to have high thermal conductivity, and iron, copper, or an alloy thereof may be used.

  In the present embodiment, it is preferable to increase the area of the upper surface of the inclined plate 603 as much as possible in order to increase the heat transfer area between the display unit 160 and the inclined plate 603. In order to increase the heat transfer area between the bottom plate 601 and the installation part 111, it is preferable to increase the area of the bottom surface of the bottom plate 601 as much as possible.

  Here, it is assumed that a liquid crystal display panel is used as the display unit 160. In general, a sidelight type backlight is used for a liquid crystal display panel. In this case, when the liquid crystal display panel is driven, one side of the rectangular screen tends to generate heat locally.

  FIG. 19 is a thermographic image showing the measurement result of the surface temperature of the liquid crystal display panel. In FIG. 19, the image SCI of the part surrounded by the thick dotted line corresponds to the screen of the liquid crystal display panel. In the image of FIG. 19, the higher the hatching density, the higher the measured temperature, and the lower the hatching density, the lower the measured temperature.

  According to the measurement result of FIG. 19, in the liquid crystal display panel, it can be confirmed that the temperature of the lower edge of the screen is locally higher than other portions. In this way, when the part of the screen that generates heat locally is known, the display unit 160 is displayed so that the part that generates heat locally is arranged closer to the installation unit 111 than the other parts. It is preferable to attach to the part holding mechanism 600.

  In this case, the heat transfer path from the portion of the display unit 160 that generates heat locally to the installation unit 111 is shortened. Thereby, the heat generated locally on the screen of the display unit 160 is efficiently transmitted to the installation unit 111 and absorbed.

  In the present embodiment, a fan for suppressing heat generation of the display unit 160 and guiding the atmosphere heated by the display unit 160 to the outside of the imaging region V may be provided in the vicinity of the display unit 160. In this case, a decrease in measurement accuracy due to heat generation of the display unit 160 can be sufficiently prevented.

  In the present embodiment, a light-transmitting cover member may be provided on the display portion 160. FIG. 20 is a side view showing an example in which a cover member is provided on the display unit 160 of FIG.

  In the example of FIG. 20, a rectangular spacer 160S is attached on the display unit 160 so as to surround the screen SC. A cover member 160G having translucency is provided on the spacer 160S. An adhesive, a screw, or the like is used for attaching the spacer 160S and the cover member 160G. As the material of the spacer 160S, a metal such as aluminum is used. As a material for the cover member 160G, acrylic resin, glass, or the like is used.

  With the spacer 160S and the cover member 160G attached to the display unit 160, the cover member 160G faces the screen SC of the display unit 160 at a certain interval from the screen SC. Thereby, a sealed space HS surrounded by the inner surfaces of the spacer 160S and the cover member 160G is formed on the screen SC.

  The air in the sealed space HS functions as a heat insulating material between the screen SC and the cover member 160G. Therefore, the heat generated from the screen SC is difficult to be transmitted to the cover member 160G by the air in the sealed space HS. In this case, since the surface temperature of the cover member 160G is suppressed from increasing with the heat generation of the screen SC of the display unit 160, the atmosphere around the display unit 160 is suppressed from being heated by the heat generated from the screen SC. .

  Thereby, the heated atmosphere is prevented from flowing non-uniformly within the imaging region V of the main imaging unit 130. Therefore, the light incident on the main imaging unit 130 is prevented from being refracted due to the fluctuation of the atmosphere in the imaging region V. As a result, a decrease in measurement accuracy due to heat generation of the display unit 160 is suppressed.

  In this example, a sealing material such as resin or rubber may be provided so as to close the gap between the display unit 160 and the spacer 160S and the gap between the spacer 160S and the cover member 160G. In this case, the sealing degree of the sealed space HS can be increased. The sealed space HS may be filled with argon gas having a thermal resistance higher than that of air, or the sealed space HS may be maintained in a vacuum state. Thereby, a higher heat insulation effect can be obtained between the screen SC and the cover member 160G.

[4] Fourth Embodiment FIG. 21 is a side view showing a configuration of a measurement head according to a fourth embodiment of the present invention. The configuration and operation of the optical coordinate measurement device according to the fourth embodiment are the same as the configuration and operation of the optical coordinate measurement device 300 according to the first embodiment except for the following points.

  In the present embodiment, instead of the display unit holding mechanism 500 of FIG. 2, a display unit holding mechanism 510 having an L-shaped cross section extending in the horizontal direction and extending in the vertical direction is provided on the installation unit 111.

  A rotation shaft 511 is provided at the upper end of the display unit holding mechanism 510 so as to be parallel to the horizontal direction and orthogonal to the longitudinal direction LD of the installation unit 111. In addition, a connector 161 into which the rotating shaft 511 of the display unit holding mechanism 510 can be inserted is provided on the back surface portion near the upper end of the display unit 160.

  A connector 161 provided on the display unit 160 is attached to the rotation shaft 511 of the display unit holding mechanism 510. Accordingly, as shown in FIGS. 21A and 21B, the screen SC of the display unit 160 is held by the display unit holding mechanism 510 in a state of being rotatable about the rotation shaft 511.

  In this case, the inclination of the screen SC of the display unit 160 can be adjusted according to the user or the measurement environment. As a result, the convenience of measuring the measuring object S by the optical coordinate measuring apparatus 300 is improved.

[5] Other Embodiments (1) In the above embodiment, the display unit holding mechanisms 500, 510, and 600 that hold the display unit 160 are separated from the installation unit 111 and the stand unit 112. Or it is attached to the stand part 112. The present invention is not limited to this, and at least one of the installation unit 111 and the stand unit 112 may be formed in a shape capable of holding the display unit 160.

  In this case, the display unit 160 can be attached to the holding unit 110 without using the display unit holding mechanisms 500, 510, and 600 manufactured separately from the holding unit 110. Thereby, the assembly of the optical coordinate measuring apparatus 300 is facilitated, and the number of parts is reduced.

  (2) In the above embodiment, the stand portion 112 of the holding portion 110 is formed to extend upward from one end portion of the installation portion 111. Not only this but the stand part 112 is formed so that it may be inclined or curvedly extended from one end part of the installation part 111 in the direction of the mounting table 120 or in the direction opposite to the mounting table 120. Also good. Further, the stand part 112 may be formed to extend while being inclined or curved toward the side of the installation part 111.

  (3) In the above embodiment, the display unit 160 is held by the display unit holding mechanisms 500, 510, and 600 so that the screen SC is perpendicular to the vertical plane parallel to the longitudinal direction LD of the installation unit 111. The present invention is not limited to this, and the display unit holding mechanisms 500, 510, and 600 may be configured to change the angle of the screen SC with respect to a vertical plane parallel to the longitudinal direction LD of the installation unit 111.

  (4) In the above embodiment, the display unit 160 is held by the display unit holding mechanisms 500, 510, and 600 so that the display unit 160 is fixed at a predetermined position on the installation unit 111. The present invention is not limited to this, and the display unit holding mechanisms 500, 510, and 600 may be configured so that the display unit 160 can move in the longitudinal direction LD (FIG. 4) on the installation unit 111.

  (5) In the above embodiment, the display unit 160 is held by the display unit holding mechanisms 500, 510, and 600 so that the display unit 160 is fixed at a predetermined position on the installation unit 111. The present invention is not limited to this, and the display unit holding mechanisms 500, 510, and 600 may be configured so that the display unit 160 can move in the vertical direction on the installation unit 111.

  (6) The above embodiment is an example in which the present invention is applied to a single camera type optical coordinate measuring apparatus in which the coordinates of the measurement position are measured by imaging the probe by one imaging unit. The present invention may be applied to a multi-camera optical coordinate measuring apparatus in which the coordinates of the measurement position are measured by imaging the probe by a plurality of imaging units.

  (7) In the above embodiment, the probe 140 and the control board 180 are connected via a cable. Not limited to this, the probe 140 and the control board 180 may be configured to be able to communicate with each other wirelessly. In this case, the operations of the plurality of light emitting units 143 of the probe 140 are controlled by wireless communication from the control board 180. In addition, a light reception signal output from the sub imaging unit 150 is transmitted to the control board 180 by wireless communication. Thereby, the operability of the probe 140 is improved.

  (8) In the above embodiment, the light emitting unit 143 that emits light from the LED is used as the marker of the probe 140 imaged by the main imaging unit 130, but the marker of the probe 140 is not limited to this. For example, a light emitting part that emits light from another light emitting element such as a filament may be used as a marker, or a non-light emitting part having a specific color such as a fluorescent color may be used as a marker, and has a specific shape. A non-light emitting part may be used as a marker.

[6] Correspondence relationship between each constituent element of claim and each part of the embodiment Hereinafter, an example of correspondence between each constituent element of the claim and each part of the embodiment will be described. It is not limited.

  In the above embodiment, the measurement object S is an example of a measurement object, the mounting table 120 is an example of a mounting table, the light emitting unit 143 is an example of a marker, and the contact unit 144a is an example of a contact unit. Yes, the probe 140 is an example of a probe, and the main imaging unit 130 is an example of an imaging unit.

  Further, the holding unit 110 is an example of a holding unit, the control unit 220 is an example of a measurement unit, the display unit 160 is an example of a display unit, the screen SC of the display unit 160 is an example of a screen, and an optical type The coordinate measuring device 300 is an example of an optical coordinate measuring device, the display unit holding mechanisms 500, 510, and 600 are examples of a display unit holding mechanism, and the hood members FD and FD2 are examples of hood members.

  Further, the bottom plate 601, the front plate 602, the inclined plate 603, the top plate 604, the back plate 605, the one side plate 606, and the other side plate 607 of the display unit holding mechanism 600 are examples of heat conductive members. The surface (back surface) opposite to the SC is an example of a supported surface, and the upper surface of the inclined plate 603 of the display unit holding mechanism 600 is an example of a support surface.

As each constituent element in the claims, various other elements having configurations or functions described in the claims can be used.
[7] Reference form
An optical coordinate measuring apparatus according to a reference form images a mounting table on which a measurement object is mounted, a probe having a plurality of markers and a contact portion that is in contact with the measurement object, and a plurality of markers of the probe. The coordinates of the contact position between the measurement object and the contact portion are calculated based on the image data indicating the image of the plurality of markers obtained by the imaging portion, the holding portion that holds the imaging portion, and the plurality of markers obtained by the imaging portion, and the calculation result And a display unit for displaying at least one of a calculation result obtained by the measurement unit and a measurement result, and the display unit is provided between the holding unit and the mounting table. In this position, the screen of the display unit is arranged so as to face the area above the mounting table.
In the optical coordinate measuring apparatus, the contact portion of the probe is brought into contact with the measurement object placed on the placement table. Image data is generated by imaging a plurality of markers of the probe by the imaging unit. Based on the image data, the coordinates of the contact position between the measurement object and the contact portion are calculated. Further, the physical quantity of the measurement object is measured based on the calculation result. Thereby, the dimension of the desired part of a measuring object can be measured.
When a plurality of markers of the probe are imaged by the imaging unit, the user measures the measurement object at a position facing the imaging unit with the mounting table interposed therebetween. In this case, the user faces the screen of the display unit with the mounting table interposed therebetween. As a result, the user can selectively view the screen of the measurement object and the display unit with minimal movement of the line of sight when measuring the measurement object, or the screen of the measurement object and the display unit can be simultaneously displayed. It can be visually recognized. As a result, it is possible to easily and quickly perform an accurate measurement operation with confirmation of at least one of the coordinate calculation result and the measurement result.

  The present invention can be effectively used for measuring dimensions and the like of various measurement objects.

DESCRIPTION OF SYMBOLS 100 Measuring head 110 Holding | maintenance part 111 Installation part 112 Stand part 120 Mounting stand 130 Main image pick-up part 131 Image pick-up element 132 Lens 140 Probe 141 Case part 141h Opening 142 Grip part 143 Light-emitting part 144 Stylus 144a Contact part 145 Power supply board 146 Connection terminal 150 Sub imaging unit 160 Display unit 160G Cover member 160S Spacer 170, 230 Operation unit 180 Control board 200 Processing device 210 Storage unit 220 Control unit 300 Optical coordinate measuring device 500, 510, 600 Display unit holding mechanism 601 Bottom plate 601a Front edge 601b Rear edge 602 Front plate 603 Inclined plate 604 Top plate 605 Back plate 606 One side plate 607 Other side plate FD, FD2 Hood member FDa Small diameter portion FDb Large diameter portion G1 Metal plate G2 Heat radiation rubber HS Dense Closed space LD Longitudinal direction S Object to be measured SC screen SCI image

Claims (10)

A mounting table on which a measurement object is mounted;
A probe having a plurality of markers and a contact portion that is in contact with the measurement object;
An imaging unit for imaging the plurality of markers of the probe;
An installation unit connected to the mounting table and extending in one horizontal direction from the mounting table; and a stand unit extending upward from the installation unit and holding the imaging unit toward a region above the mounting table. A holding unit that connects the mounting table and the imaging unit ;
Based on the image data indicating the images of the plurality of markers obtained by the imaging unit, the coordinates of the contact position between the measurement object and the contact unit are calculated, and the physical quantity of the measurement object is measured based on the calculation result. A measuring section;
A display unit that displays at least one of a calculation result and a measurement result obtained by the measurement unit;
The display unit is arranged on the holding unit so that the screen of the display unit faces an area above the mounting table between the stand unit of the holding unit and the mounting table and at a position above the installation unit. mounting et a, optical coordinate measuring device. The optical coordinate measuring device according to claim 1, further comprising a display unit holding mechanism that holds the display unit and is supported by the holding unit. The optical coordinate measuring apparatus according to claim 2, wherein the display unit holding mechanism holds the display unit so that the screen of the display unit faces obliquely upward. The optical coordinate measuring device according to claim 2, wherein the display unit holding mechanism includes a heat conductive member that transfers heat generated from the display unit to the holding unit. The display unit has a supported surface on the opposite side of the screen,
The optical coordinate measuring device according to claim 4, wherein the thermally conductive member has a support surface that supports at least a part of the supported surface. The optical coordinate measuring device according to claim 1, wherein the imaging unit is held by the holding unit so as to be positioned obliquely above the mounting table. The display unit is disposed at a position below the imaging unit,
The hood member for preventing the atmosphere heated by the heat generated by the display unit from entering the imaging region of the imaging unit is attached to the imaging unit. The optical coordinate measuring device described. The hood member has a tip portion in which an opening toward the mounting table is formed, and is disposed at a position above the display unit,
The optical coordinate measuring device according to claim 7, wherein an upper end portion of the display unit is disposed at a position farther from the mounting table than the distal end portion of the hood member. The optical coordinate measuring device according to any one of claims 1 to 8, wherein the holding unit integrally holds the imaging unit and the mounting table. The optical coordinate measuring apparatus according to claim 2, wherein the display unit holding mechanism is configured to be able to change an inclination angle of the screen of the display unit with respect to a vertical axis.

Images