JP6362415B2 - Autofocus device and microscope system - Google Patents

Description

  The present invention relates to an autofocus device and a microscope system.

  An autofocus device installed in a measuring device such as an optical microscope that realizes an autofocus function based on the contrast of the observed image, or analyzes the sky frequency of the observed image, and an autofocus function based on the spectral intensity of the spatial frequency What realizes is known.

  As an example of such an autofocus device, Japanese Patent Application Laid-Open No. H10-228707 calculates the sum of differences from adjacent pixels as a contrast for all or some of the pixels in the observation image, and realizes an autofocus function based on this contrast. Techniques to do this are disclosed. Patent Document 2 proposes a technique for realizing an autofocus function based on a spatial frequency spectrum intensity calculated using fast Fourier transform for an observation image.

JP 2002-162558 A JP 2006-301270 A

However, in the autofocus device disclosed in Patent Document 1, when the contrast of the obtained observation image of the sample is low, it is difficult to focus accurately based on the contrast. Further, the higher the magnification of the optical system when acquiring the observation image, the lower the accuracy of focus adjustment, that is, autofocus.
In the autofocus device disclosed in Patent Document 2, the amount of calculation for analyzing the spatial frequency of the observation image of the sample is enormous, and it is difficult to realize high-speed autofocus.

  The present invention has been made in view of the above-described circumstances, and an object thereof is to provide an autofocus device and a microscope system that perform high-speed and accurate focus adjustment.

In order to achieve the above object, the present invention provides the following means.
According to one aspect of the present invention, an optical image of the specimen imaged by the optical system is captured while changing a distance in the optical axis direction between the optical system and the specimen, and a plurality of images related to the observation image of the specimen A contrast calculating means for calculating a contrast value indicating a level of contrast for each of the plurality of images, a spatial frequency analyzing means for analyzing a spatial frequency of each of the plurality of images, and the contrast A focus position determination unit that determines a focus position between the optical system and the sample based on at least one of a contrast value calculated by the calculation unit and an analysis result by the spatial frequency analysis unit, and calculated by the contrast calculation unit A mode switch for determining whether to perform analysis by the spatial frequency analysis means based on a contrast value. And a judging means, wherein the focus position determination means, the determination result of the mode changeover judging part, when performing analysis by the spatial frequency analysis means determines the focus position based on the analysis result by the spatial frequency analysis means the case without analysis by the spatial frequency analysis means provides an autofocus device you determine the focus position based on the contrast value calculated by the contrast calculating means.

  According to this aspect, for a plurality of images related to the optical image of the specimen acquired while changing the distance in the optical axis direction between the optical system and the specimen, the contrast value indicating the level of contrast is calculated by the contrast calculating means, and the space Each spatial frequency is analyzed by frequency analysis means. Then, the focus position determination means determines the focus position between the optical system and the sample based on at least one of the contrast value and the spatial frequency analysis result. Thus, since the focus position is determined, it is possible to perform focus adjustment with high accuracy and high speed.

Further , since the mode switching determination means determines whether or not the analysis by the spatial frequency analysis means is performed based on the contrast value calculated by the contrast calculation means, the analysis by the spatial frequency analysis means is performed except when necessary. Therefore, the focus can be adjusted with high accuracy and high speed.

In the above-described invention, the apparatus further comprises search range determining means for determining a range in which a distance between the optical system and the specimen is changed in the optical axis direction, and the contrast calculating means is configured to include the optical system in the first range in the optical axis direction. The contrast range is calculated for each of a plurality of images related to the observed image of the sample acquired while changing the distance between the sample and the sample, and the search range determination unit searches the focus position in the first range in detail. When the second range in the optical axis direction is to be determined based on the contrast value calculated by the contrast calculation unit and the analysis by the spatial frequency analysis unit is performed, the spatial frequency analysis unit includes the first range A plurality of images related to the observation image of the specimen acquired while changing the distance between the optical system and the specimen in the range of 2 respectively. The number was respectively analyzed, the case of not performing analysis by spatial frequency analysis means, the contrast calculating means, the observation image of the specimen acquired while changing the distance between the optical system and the sample in the second range A contrast value may be calculated for each of the plurality of images .

  As described above, the contrast calculation unit calculates the contrast values of the plurality of images acquired while changing the distance between the optical system and the sample in the first range, and based on the contrast values, the search range determination unit calculates the first range. A second range in the optical axis direction is determined as a range in which the focus position is to be searched in detail within the range of one. That is, the second range is determined as a range in which the focus position should be searched in more detail by calculating the contrast value and roughly ascertaining which position the focus position is. Then, the spatial frequency analysis means analyzes the plurality of images related to the sample acquired within the second range, and the focus position determination means determines the focus position between the optical system and the sample based on the analysis result. To do.

  In other words, the spatial frequency analysis is performed by limiting the range where the spatial frequency analysis should be performed to a narrower range than the range where the contrast value is calculated by limiting the spatial frequency analysis range by calculating the contrast value. Therefore, the focus adjustment can be performed with high accuracy and high speed.

In the above-described invention, the apparatus further comprises search range determining means for determining a range in which a distance between the optical system and the specimen is changed in the optical axis direction, and the contrast calculating means is configured to include the optical system in the first range in the optical axis direction. The contrast range is calculated for each of a plurality of images related to the observed image of the sample acquired while changing the distance between the sample and the sample, and the search range determination unit searches the focus position in the first range in detail. When the second range in the optical axis direction is to be determined based on the contrast value calculated by the contrast calculation unit, and the second range is equal to or greater than a predetermined range, the spatial frequency analysis unit is Spatial frequencies for a plurality of images related to the observation image of the specimen acquired while changing the distance between the optical system and the specimen in the second range. Each analyzed, the focus position determination unit, based on the analysis result by the spatial frequency analyzing means determines the focus position of the specimen and the optical system, if the second range is less than the predetermined range, The contrast calculation unit calculates a contrast value for each of a plurality of images related to the observation image of the sample acquired while changing the distance between the optical system and the sample in the second range, and the focus position determination unit The focus position between the optical system and the sample may be determined based on the contrast value calculated by the contrast calculation means.

  As described above, the contrast calculation unit calculates the contrast values of the plurality of images acquired while changing the distance between the optical system and the sample in the first range, and based on the contrast values, the search range determination unit calculates the first range. A second range in the optical axis direction is determined as a range in which the focus position is to be searched in detail within the range of one. That is, the range including the focus position is roughly grasped based on the contrast value of the image acquired in the first range, and the second range is determined as a range where the focus position should be searched in more detail. When the second range is equal to or smaller than the predetermined range, a contrast value is calculated for a plurality of images related to the sample acquired in the second range, and the focus position determination unit is connected to the optical system based on the contrast value. Determine the focus position with the sample.

  That is, when the second range is equal to or smaller than the predetermined range, the focus position can be accurately determined only by calculating the contrast. Therefore, the contrast of a plurality of images related to the sample acquired in the second range is also included. A value is calculated, and based on this value, the focus position between the optical system and the sample is determined. Accordingly, since the calculation cost required for the analysis of the spatial frequency is suppressed, the focus adjustment can be performed with high accuracy while being high speed.

  In another aspect of the present invention, the autofocus device according to the above-described invention, a stage on which the specimen is placed, an optical system that forms an image of the specimen, and at least one of the optical system and the stage are driven. Thus, an optical image of the specimen imaged by the optical system while changing a distance in the optical axis direction between the optical system and the specimen, and a driving unit that relatively moves the specimen and the optical system. And a microscope having imaging means for acquiring a plurality of images related to the observation image of the specimen.

  According to this aspect, it is possible to perform focus adjustment with high accuracy and high speed even when observing a specimen with a microscope.

  According to the present invention, it is possible to perform focus adjustment at high speed and accurately.

1 is a block diagram illustrating an overall configuration of a microscope system according to a first embodiment of the present invention. It is an example of the evaluation value curve produced | generated in the microscope system which concerns on the 1st Embodiment of this invention. It is a flowchart about the autofocus by the microscope system which concerns on the 1st Embodiment of this invention. It is a reference figure showing an example in the case of determining a fine search range from an evaluation value curve in a microscope system concerning a 1st embodiment of the present invention. It is a graph which shows the example of the analysis result of a spatial frequency in the microscope system which concerns on the 1st Embodiment of this invention. It is a block diagram which shows the whole structure which shows the microscope system which concerns on the 2nd Embodiment of this invention. It is a flowchart about the autofocus by the microscope system which concerns on the 2nd Embodiment of this invention. It is a reference figure which shows the fine search range determined from the evaluation value curve produced | generated by the microscope system which concerns on the 2nd Embodiment of this invention. It is a flowchart about the autofocus by the microscope system which concerns on the modification of each embodiment of this invention. It is a graph which shows the example in the case of ending acquisition of the image in a fine search range by the microscope system concerning the modification of each embodiment of the present invention.

(First embodiment)
An autofocus device and a microscope system according to a first embodiment of the present invention will be described below with reference to the drawings.
As shown in FIG. 1, the microscope system captures an optical image of the specimen A to acquire an image, a control unit 2 that controls the microscope 1, and an image acquired by the microscope 1 connected to the control unit 2. A computer (PC) 3 that functions as an image processing unit that performs predetermined processing on the image and that also functions as an autofocus device that determines a focus position between the optical system of the microscope 1 and the specimen A from an image acquired by the microscope 1 is provided. ing.

  In the microscope 1, the illumination light emitted from the light source 6 illuminates the specimen A placed on the stage 8 via the condenser unit 7, and an objective lens 9 mounted on the revolver and an imaging lens (optical system) not shown. An optical image of the specimen A is formed on the imaging surface of the imaging unit 10 via the imaging unit 10, and the optical unit 10 acquires the optical image as an image.

  The stage 8 of the microscope 1 is provided with a stepping motor (not shown). By driving the motor 11 by the drive mechanism control unit 20, the specimen A placed on the stage 8 is removed from the objective lens 9 and the imaging lens. The optical system is moved relatively in the optical axis direction (Z direction) of the objective lens 9. The stage 8 is also movable in two directions (X direction and Y direction) perpendicular to the optical axis of the objective lens 9.

  The imaging unit 10 is a digital camera provided with an imaging element such as a CCD or a CMOS, captures the formed optical image, and outputs it as a digital image to the imaging control unit 21 of the control unit 2. The imaging unit 10 is controlled by the imaging control unit 21. Further, the imaging control unit 21 sets imaging conditions such as exposure time and ISO sensitivity in the imaging unit 10 according to an instruction from the computer 3 to be described later, or performs development processing of the captured image to display an image after development processing. Or output to the computer 3.

  The control unit 2 includes an imaging control unit 21 that controls the imaging unit 10 and a driving mechanism control unit 20 that controls the stage 8. The imaging unit 10 is controlled by the imaging control unit 21, and the stage 8 is controlled by the driving mechanism control unit 20. A predetermined position and a predetermined number of images are taken by control. More specifically, the control unit 2 controls the imaging unit 10 and the stage 8 to relatively change the distance in the optical axis direction (Z direction) between the optical system and the specimen A, and connect the optical system with the optical system. An optical image of the imaged specimen is captured to obtain a plurality of images related to the observation image of the specimen, and these acquired images are output to the image processing unit 4.

  The computer 3 includes a CPU (central processing unit) as a calculation unit, performs predetermined image processing on the image input from the imaging control unit 21, and controls the control unit 2, the monitor 23, and the like connected to the computer 3. The keyboard 24 and the mouse 25 are controlled in an integrated manner. As the computer 3, a general-purpose or dedicated computer can be applied, and the CPU performs predetermined image processing on the image of the specimen A acquired by the imaging unit 10, and also focuses the optical system and the specimen A. Various control programs are executed, such as determining the position.

The computer 3 includes an image processing unit 4 as a processing unit realized by a CPU developing and executing a predetermined program, an evaluation value curve generating unit 12 connected to the image processing unit 4, a fine search range determining unit 13 and a focus position determination unit 14.
The image processing unit 4 includes a region extraction unit 15, a contrast calculation unit 16, and a spatial frequency analysis unit 17.

The area extraction unit 15 extracts an area to be focused input from the keyboard 24, the mouse 25, or the like from the images acquired by the microscope 1 as a target area for subsequent processing.
The contrast calculation unit 16 calculates the contrasts of the regions extracted by the region extraction unit 15 for a plurality of images related to the sample acquired while changing the distance in the optical axis direction between the optical system and the sample.
The spatial frequency analysis unit 17 analyzes the spatial frequencies of the regions extracted by the region extraction unit 15 for a plurality of images related to the sample acquired while changing the distance in the optical axis direction between the optical system and the sample.

  The evaluation value curve generation unit 12 calculates an evaluation value indicating the degree of focus from the contrast calculated by the contrast calculation unit 16, and based on the evaluation value and the position in the optical axis direction corresponding to the evaluation value. For example, the evaluation value curve shown in FIG. 2 is generated. As the evaluation value, for example, the square of the contrast value can be applied.

  Based on the evaluation value curve generated by the evaluation value curve generation unit 12, the fine search range determination unit 13 determines a range in the optical axis direction where the focus position should be searched in detail. In other words, the contrast-calculated images are a plurality of images related to the observation image of the specimen acquired while changing the distance between the optical system and the specimen in the first range in the optical axis direction, and roughly from the contrast of these images. I have an idea of which position the focus position is. Therefore, the fine search range determination unit 13 determines the second range as the range in which the focus position should be searched in more detail in the first range.

  The focus position determination unit 14 determines the focus position from a plurality of images acquired while changing the distance in the optical axis direction between the optical system and the sample within the second range determined by the fine search range determination unit 13. That is, the focus position is determined based on the spatial frequency analysis results for a plurality of images acquired while changing the distance in the optical axis direction between the optical system and the sample within the second range acquired by the spatial frequency analysis unit 17. To do.

  Hereinafter, the flow of autofocus by the microscope system configured as described above will be described with reference to the flowchart of FIG.

  First, in order to perform a rough search by changing the distance between the optical system and the sample in the first range in the optical axis direction, the relative position in the optical axis direction between the objective lens 9 and the sample A is set as a predetermined initial position. . That is, for example, the stage 8 is moved to a position that approaches the specimen A so as not to contact the objective lens 9. In step S101, the imaging control unit 21 instructs the imaging unit 10 to capture an optical image of the specimen A according to the instruction of the computer 3, and the imaging unit 10 captures an image of the specimen A in response to this instruction. To do. The captured image and the position in the optical axis direction (hereinafter referred to as “Z position”) at the time of capturing are output to a data recording unit (not shown) provided in the PC 3.

  Next, in step S102, during the rough search, the pitch for changing the distance between the objective lens 9 and the specimen A within the first range which is the rough search range, that is, the optical axis direction between the objective lens 9 and the specimen A. The distance between the objective lens 9 and the specimen A is changed by a rough interval that is the amount of movement of the relative position of the two, that is, the relative position of the two is moved. The rough interval is stored in advance in a storage unit (not shown) of the PC 3, and the distance between the objective lens 9 and the specimen A is changed by moving the relative position of the objective lens 9 and the sample A in accordance with the rough interval. As the predetermined rough interval, for example, a movement amount that is five times the focal depth of the objective lens can be set, and the rough interval can be set as appropriate. In the present embodiment, the distance between the objective lens 9 and the specimen A is changed by moving the stage 8 at 5 times the focal depth of the objective lens 9.

  In the next step S103, it is determined whether or not the imaging of the image in the rough search range has been completed. For example, it is determined whether or not the current position of the stage 8 exceeds the rough search range, whether the lower limit is within the range of the initial position of the rough search and the upper limit is within the range where the sample A is farthest from the objective lens 9; If it is out of the range, it is determined that the imaging of the image in the rough search range is finished, and the process proceeds to the next step S104. If imaging in the first range has not been completed, the process returns to step S101 and imaging in the first range is continued.

  In step S104, the image of the region to be focused is extracted by the region extraction unit 15 for all the images in the rough search range captured by the rough search in the previous step, and the contrast calculation unit 16 sets the contrast value for each of the extracted regions. calculate. For example, in the extracted area, the contrast calculation unit 16 calculates the absolute value of the difference sum between adjacent pixels as the contrast value. The calculated contrast value is output to the evaluation value curve generator 12.

  In the next step S105, based on the input contrast value, the evaluation value curve generator 12 calculates, for example, the square of the contrast value as an evaluation value indicating the degree of focus. Based on this evaluation value and the Z position when the image stored at the time of image capturing in step S101 is captured, an evaluation value curve is generated using an interpolation method such as Lagrangian interpolation (FIG. 2). In FIG. 2, points 501 to 509 schematically indicate points where the calculated evaluation values are plotted, and a curve 510 schematically represents a curve obtained by applying an interpolation method to points 501 to 509. This is an evaluation value curve generated in this step. Note that a method other than Lagrange interpolation may be used as the interpolation method.

  In step S106, the evaluation value curve generated in the previous step and a predetermined threshold, for example, 70% of the evaluation value of the peak position where the peak of the curve in the evaluation value curve is the highest, are used for focusing in more detail. A fine search range as a second range that is a range in which a position is to be searched is determined. A curve 601 in FIG. 4 is an evaluation value curve, a straight line 602 is a threshold value, a straight line 603 is a minimum value of the Z position of an image whose evaluation value exceeds the threshold value, and a straight line 604 is a maximum value of the Z position of an image whose evaluation value exceeds the threshold value. The arrow 605 schematically shows the fine search range determined from the straight line 603 and the straight line 604. The threshold value can be set as appropriate, and can be determined in advance, for example, stored in a storage unit (not shown) of the PC. After determining the fine search range, the relative position of the objective lens 9 and the specimen A in the optical axis direction is set as the initial position of the fine search range, that is, the stage 8 is moved to the lower limit position of the fine search range.

  In step S107, as in step S101, the imaging control unit 21 instructs the imaging unit 10 to capture an optical image of the specimen A according to the instruction of the computer 3, and the imaging unit 10 receives the instruction and the imaging unit 10 receives the instruction. The image of is taken. The captured image and the Z position at the time of capturing are output to a data recording unit (not shown) provided in the PC 3.

  Next, in step S108, the pitch for changing the distance between the objective lens 9 and the sample A in the fine search range, that is, the amount of movement of the relative position between the objective lens 9 and the sample A in the optical axis direction in the fine search range in step S108. The distance between the objective lens 9 and the specimen A is changed at a fine interval, that is, the relative position of both is moved. The fine interval is stored in advance in a storage unit (not shown) of the PC 3, and the distance between the objective lens 9 and the specimen A is changed by moving the relative position between the objective lens 9 and the specimen A within the fine search range. As the predetermined fine interval, for example, an amount of movement that is one time the focal depth of the objective lens can be set, and the fine interval can be appropriately set at a distance smaller than the rough interval. In the present embodiment, the distance between the objective lens 9 and the specimen A is changed by moving the stage 8 at one time the focal depth of the objective lens 9.

  In the next step S109, it is determined whether or not the imaging of the image in the fine search range is finished. For example, it is determined whether or not the current position of the stage 8 has exceeded the fine search range. If the position of the stage 8 is outside the fine search range, it is determined that imaging of the image in the fine search range has ended. Then, the process proceeds to the next step S110. If imaging in the fine search range has not been completed, the process returns to step S107 and imaging in the fine search range is continued.

  In step S110, the region extraction unit 15 extracts an image of a region to be focused on all the images in the fine search range captured by the fine search in the previous step, and the spatial frequency analysis unit 17 extracts the extracted region. Analyze the spatial frequency. For the analysis of the spatial frequency, for example, the spectrum of each spatial frequency is analyzed by analysis by fast Fourier transform. The spatial frequency analysis method is not limited to the fast Fourier transform and can be selected as appropriate. The analysis result of the analyzed spatial frequency is output to the focus position determination unit 14.

  In step S111, in response to the input of the analysis result of the analyzed spatial frequency, the focus position determination unit 14 obtains the sum of the intensity of the spectrum of the spatial frequency excluding the DC component from the entire analysis result of the spatial frequency. Calculated as an evaluation value. A bar graph 701 in FIG. 5 schematically shows a DC component, and 702 schematically shows a spectrum obtained by removing the DC component from the whole. Note that the spectrum of the spatial frequency used for the evaluation value is not limited to that described above, and can be appropriately selected.

The focus position determination unit 14 compares the calculated evaluation values, and determines that the position where the image having the largest evaluation value is taken is the focus position.
In the present embodiment, since the autofocus device is applied to a microscope system, the focus position determination unit 14 outputs the determined focus position to the drive mechanism control unit 20, and the focus position determined by the drive mechanism control unit 20. When the stage 8 is moved, the objective lens 9 and the specimen A are relatively moved so as to be in focus.

  As described above, according to the microscope system according to the present embodiment, the range for performing the fine search at high speed is determined by calculating the contrast for the range in which the rough search has been performed, so that the range where the spatial frequency analysis should be performed is determined. Since it is limited, the focus position can be determined at high speed without performing enormous calculations. In addition, since the focus position is determined based on the spatial frequency analysis result for the fine search range, the focus position can be determined with high accuracy.

(Second Embodiment)
Hereinafter, a second embodiment of the present invention will be described.
As shown in FIG. 6, the microscope system according to the present embodiment includes the mode switching determination unit 18 that determines how to determine the focus position for an image in the fine search range. This is different from the microscope system according to the first embodiment.

  That is, in the microscope system according to the present embodiment, the PC 3 further includes a mode switching determination unit 18 as a processing unit realized by the CPU developing and executing a predetermined program. Since the microscope system according to the present embodiment has substantially the same configuration as that of the first embodiment described above, the description of each configuration is omitted, and the flow of autofocus is according to the flowchart of FIG. explain.

  First, in order to perform a rough search by changing the distance between the optical system and the sample in the first range in the optical axis direction, the relative position in the optical axis direction between the objective lens 9 and the sample A is set as a predetermined initial position. . That is, for example, the stage 8 is moved to a position that approaches the specimen A so as not to contact the objective lens 9. In step S <b> 201, the imaging control unit 21 instructs the imaging unit 10 to capture an optical image of the specimen A according to the instruction of the computer 3, and the imaging unit 10 captures an image of the specimen A in response to this instruction. To do. The captured image and the Z position at the time of capturing are output to a data recording unit (not shown) provided in the PC 3.

  Next, in step S202, the pitch for changing the distance between the objective lens 9 and the sample A within the first range, which is the rough search range, in the rough search, that is, the optical axis direction between the objective lens 9 and the sample A is determined. The distance between the objective lens 9 and the specimen A is changed by a rough interval that is the amount of movement of the relative position of the two, that is, the relative position of the two is moved. The rough interval is stored in advance in a storage unit (not shown) of the PC 3, and the distance between the objective lens 9 and the specimen A is changed by moving the relative position of the objective lens 9 and the sample A in accordance with the rough interval. As the predetermined rough interval, for example, a movement amount that is five times the focal depth of the objective lens can be set, and the rough interval can be set as appropriate. In the present embodiment, the distance between the objective lens 9 and the specimen A is changed by moving the stage 8 at 5 times the focal depth of the objective lens 9.

  In the next step S203, it is determined whether or not the imaging of the image in the rough search range is finished. For example, it is determined whether or not the current position of the stage 8 exceeds the rough search range, whether the lower limit is within the range of the initial position of the rough search and the upper limit is within the range where the sample A is farthest from the objective lens 9; When it is out of the range, it is determined that the image capturing in the rough search range is finished, and the process proceeds to the next step S204. If the imaging in the first range has not been completed, the process returns to step S201 to continue imaging in the first range.

  In step S204, the image of the region to be focused is extracted by the region extraction unit 15 for all images in the rough search range photographed by the rough search in the previous step, and the contrast calculation unit 16 sets the contrast value for each of the extracted regions. calculate. For example, in the extracted area, the contrast calculation unit 16 calculates the absolute value of the difference sum between adjacent pixels as the contrast value. The calculated contrast value is output to the evaluation value curve generator 12.

  In the next step S205, based on the input contrast value, the evaluation value curve generation unit 12 calculates, for example, the square of the contrast value as an evaluation value indicating the degree of focus. Then, an evaluation value curve is generated based on this evaluation value and the Z position when the image stored at the time of image capturing in step S201 is captured (see FIG. 2 in the first embodiment).

  In step S206, the evaluation value curve generated in the previous step and a predetermined threshold, for example, 70% of the evaluation value of the peak position where the peak of the curve in the evaluation value curve is the highest, are used for focusing in more detail. A fine search range as a second range that is a range in which a position is to be searched is determined (see FIG. 4 in the first embodiment). After determining the fine search range, the relative position of the objective lens 9 and the specimen A in the optical axis direction is set as the initial position of the fine search range, that is, the stage 8 is moved to the lower limit position of the fine search range.

  In step S207, as in step S201, the imaging control unit 21 instructs the imaging unit 10 to capture an optical image of the specimen A according to the instruction of the computer 3, and the imaging unit 10 receives the instruction and the imaging unit 10 receives the instruction. The image of is taken. The captured image and the Z position at the time of capturing are output to a data recording unit (not shown) provided in the PC 3.

  Next, in step S208, in the fine search, the pitch for changing the distance between the objective lens 9 and the specimen A in the fine search range, that is, the movement amount of the relative position between the objective lens 9 and the specimen A in the optical axis direction. The distance between the objective lens 9 and the specimen A is changed at a fine interval, that is, the relative position of both is moved. The fine interval is stored in advance in a storage unit (not shown) of the PC 3, and the distance between the objective lens 9 and the specimen A is changed by moving the relative position between the objective lens 9 and the specimen A within the fine search range. As the predetermined fine interval, for example, an amount of movement that is one time the focal depth of the objective lens can be set, and the fine interval can be appropriately set at a distance smaller than the rough interval. In the present embodiment, the distance between the objective lens 9 and the specimen A is changed by moving the stage 8 at one time the focal depth of the objective lens 9.

  In the next step S209, it is determined whether or not imaging of an image in the fine search range is finished. For example, it is determined whether or not the current position of the stage 8 has exceeded the fine search range. If the position of the stage 8 is outside the fine search range, it is determined that imaging of the image in the fine search range has ended. Then, the process proceeds to the next step S210. If imaging in the fine search range has not been completed, the process returns to step S207 to continue imaging in the fine search range.

  In step S210, it is determined whether an image captured in the fine search range needs to be analyzed by a spatial frequency, that is, whether mode switching is necessary. That is, the evaluation value generated by the rough search in the previous step as to whether the mode switching determination unit 18 determines the focus position by calculating the contrast, or determines the focus position by analyzing the spatial frequency. Judge based on the curve.

  When the peaks of the evaluation value curve are gentle, it becomes difficult to determine the peak (maximum value) due to the influence of noise. Therefore, a threshold value for the evaluation value curve is set in advance, and whether or not mode switching is necessary is determined based on this threshold value. judge. In this embodiment, when the threshold value is 6 times the depth of focus of the objective lens 9 and this threshold value is applied to the evaluation value curve as shown in FIG. 8, the fine search range (the range indicated by the arrow F in FIG. 8). ) Is less than the threshold value, it is determined that focus determination is performed by calculating contrast, and it is determined that spatial frequency analysis is necessary when the fine search range is equal to or greater than the threshold value. Therefore, if the fine search range is equal to or greater than the threshold, the process proceeds to step S211. If the fine search range is less than the threshold, the process proceeds to step S213.

  In step S211, the image of the area to be focused is extracted by the area extraction unit 15 for all the images in the fine search range photographed by the fine search in the previous step, and the spatial frequency analysis unit 17 extracts the extracted area. Analyze the spatial frequency. For the analysis of the spatial frequency, for example, the spectrum of each spatial frequency is analyzed by analysis by fast Fourier transform. The spatial frequency analysis method is not limited to the fast Fourier transform and can be selected as appropriate. The analysis result of the analyzed spatial frequency is output to the focus position determination unit 14.

In step S212, upon receiving the analysis result of the analyzed spatial frequency, the focus position determination unit 14 obtains the sum of the intensity of the spectrum of the spatial frequency obtained by removing the DC component from the entire analysis result of the spatial frequency. Calculated as an evaluation value. A bar graph 701 in FIG. 5 schematically shows a DC component, and 702 schematically shows a spectrum obtained by removing the DC component from the whole. Note that the spectrum of the spatial frequency used for the evaluation value is not limited to that described above, and can be appropriately selected.
The focus position determination unit 14 compares the calculated evaluation values, and determines that the position where the image having the largest evaluation value is taken is the focus position.

  In step S213, an image of a region to be focused is extracted by the region extraction unit 15 for all images in the fine search range photographed by the fine search, and the contrast calculation unit 16 calculates a contrast value for each of the extracted regions. . For example, in the extracted area, the contrast calculation unit 16 calculates the absolute value of the difference sum between adjacent pixels as the contrast value.

In step S214, the focus position determination unit 14 calculates, for example, the square of the contrast value as an evaluation value indicating the degree of focusing based on the input contrast value, and compares the calculated evaluation values. The position where the image having the largest evaluation value is taken is determined as the focus position.
In the present embodiment, since the autofocus device is applied to a microscope system, the focus position determination unit 14 outputs the determined focus position to the drive mechanism control unit 20, and the focus position determined by the drive mechanism control unit 20. When the stage 8 is moved, the objective lens 9 and the specimen A are relatively moved so as to be in focus.

  According to the microscope system according to the present embodiment, when the focus position can be determined only by calculating the contrast, the focus position is determined without performing spatial frequency analysis processing that requires a large amount of calculation. Cost can be reduced and the focus position can be determined at high speed.

(Modification)
Hereinafter, modifications of the first embodiment and the second embodiment described above will be described.
In this modification, after the fine search range is determined, while an image is captured in the fine search range, an evaluation value is calculated for each image capture, and the calculated evaluation value satisfies a predetermined condition Even if the acquisition of the image of the entire range in the fine search range is not completed, the acquisition of the image is terminated and the focus position is determined.

More specifically, it is determined whether or not the fine search is forcibly terminated according to the flowchart of FIG.
FIG. 9 shows the processing after the fine search range is determined. The relative position of the objective lens 9 and the specimen A in the optical axis direction is the initial position of the fine search range, that is, the lower limit position of the fine search range. In this state, the stage 8 is moved.

In step S <b> 301, the imaging control unit 21 instructs the imaging unit 10 to capture an optical image of the specimen A according to the instruction of the computer 3, and the imaging unit 10 captures an image of the specimen A in response to this instruction. The captured image and the Z position at the time of capturing are output to a data recording unit (not shown) provided in the PC 3.
In step S302, the focus position determination unit 14 calculates an evaluation value for the captured image based on contrast calculation or spatial frequency analysis.

  Next, in step S303, the pitch for changing the distance between the objective lens 9 and the specimen A in the fine search range in the fine search range, that is, the amount of movement of the relative position between the objective lens 9 and the specimen A in the optical axis direction. The distance between the objective lens 9 and the specimen A is changed at a fine interval, that is, the relative position of both is moved.

  In step S304, it is determined that the fine search is forcibly terminated when the evaluation value calculated in the previous step satisfies a predetermined end condition of the fine search. As an end condition, for example, a value of 20% of the maximum value of the evaluation value is set as a threshold value, and the fine search is ended when the evaluation value does not exceed the threshold value even if the evaluation value calculation exceeds a predetermined number of times. be able to. If it is determined that the fine search is to be ended, the focus position is determined in the next step S305. If it is determined that the fine search is not to be ended, the process returns to step S301 to repeat the image acquisition in the fine search.

  FIG. 10 shows an example in which the fine search is performed partway through the fine search range according to the fine search end condition, and the calculated evaluation values are plotted. In other words, the dotted line 801 is a result of performing a fine search to the middle of the fine search range and plots the calculated evaluation value, the arrow 802 indicates the range in which the fine search has been performed halfway, and the arrow 803 indicates the entire fine search range. This is shown schematically. The focus position is determined by selecting the maximum value from the calculated evaluation values.

  Thus, according to the microscope system according to the present modification, the focus position can be determined at a higher speed by reducing the number of unnecessary fine searches. This is particularly effective when performing a fine search based on the analysis result of the spatial frequency.

1 Microscope 2 Control unit 3 Computer (PC)
DESCRIPTION OF SYMBOLS 4 Image processing part 8 Stage 9 Objective lens 10 Imaging part 12 Evaluation value curve generation part 13 Fine search range determination part 14 Focus position determination part 15 Area extraction part 16 Contrast calculation part 17 Spatial frequency analysis part 18 Mode switching determination part 20 Drive mechanism Control unit 21 Imaging control unit

Claims (4)

Applied to an imaging apparatus that captures an optical image of the specimen imaged by the optical system and obtains a plurality of images related to the observation image of the specimen while changing the distance in the optical axis direction between the optical system and the specimen. And
Contrast calculation means for calculating a contrast value indicating the level of contrast for each of the plurality of images,
A spatial frequency analyzing means for analyzing a spatial frequency of each of the plurality of images;
A focus position determination unit that determines a focus position between the optical system and the sample based on at least one of a contrast value calculated by the contrast calculation unit and an analysis result by the spatial frequency analysis unit;
Mode switching determination means for determining whether to perform analysis by the spatial frequency analysis means based on the contrast value calculated by the contrast calculation means ,
When the focus position determination means performs analysis by the determination result of the mode switching determination means and the spatial frequency analysis means, the focus position is determined based on the analysis result by the spatial frequency analysis means, and the spatial frequency analysis means If due not performed analysis, autofocus device you determine the focus position based on the contrast value calculated by the contrast calculating means. Search range determining means for determining a range for changing the distance between the optical system and the sample in the optical axis direction;
The contrast calculation means calculates a contrast value for each of a plurality of images related to the observation image of the sample acquired while changing the distance between the optical system and the sample in the first range in the optical axis direction,
The search range determination unit determines a second range in the optical axis direction as a range in which the focus position should be searched in detail among the first ranges based on the contrast value calculated by the contrast calculation unit. ,
When performing the analysis by the spatial frequency analysis means,
The spatial frequency analysis means analyzes the spatial frequency for each of the plurality of images related to the observation image of the specimen acquired while changing the distance between the optical system and the specimen in the second range,
When the analysis by the spatial frequency analysis means is not performed,
2. The autofocus according to claim 1 , wherein the contrast calculation unit calculates a contrast value for each of a plurality of images related to an observation image of the sample acquired while changing a distance between the optical system and the sample in the second range. apparatus. Search range determining means for determining a range for changing the distance between the optical system and the sample in the optical axis direction;
The contrast calculation means calculates a contrast value for each of a plurality of images related to the observation image of the sample acquired while changing the distance between the optical system and the sample in the first range in the optical axis direction,
The search range determination unit determines a second range in the optical axis direction as a range in which the focus position should be searched in detail among the first ranges based on the contrast value calculated by the contrast calculation unit. ,
When the second range is not less than a predetermined range,
The spatial frequency analysis means analyzes the spatial frequency for each of the plurality of images related to the observation image of the specimen acquired while changing the distance between the optical system and the specimen in the second range,
The focus position determination means determines a focus position between the optical system and the sample based on an analysis result by the spatial frequency analysis means;
If the second range is less than the predetermined range,
The contrast calculation means calculates a contrast value for each of a plurality of images related to the observation image of the sample acquired while changing the distance between the optical system and the sample in the second range,
2. The autofocus device according to claim 1, wherein the focus position determination unit determines a focus position between the optical system and the sample based on a contrast value calculated by the contrast calculation unit. The autofocus device according to any one of claims 1 to 3 ,
A stage on which the specimen is placed; an optical system that forms an image of the specimen; and a driving unit that relatively moves the specimen and the optical system by driving at least one of the optical system and the stage; Imaging means for capturing an optical image of the specimen imaged by the optical system and acquiring a plurality of images related to the observation image of the specimen while changing a distance in the optical axis direction between the optical system and the specimen And a microscope having
Microscope system equipped with.

Images