JP6344789B2 - Hydrogen sensor and detection device using the same - Google Patents

Description

The present invention relates to a technique for detecting hydrogen.
The present invention particularly relates to a technique capable of rapidly detecting even a trace amount of hydrogen using surface plasmon resonance (SPR).
The present invention also relates to a technique capable of quickly detecting hydrogen safely using SPR.
The present invention further relates to a technique capable of detecting hydrogen in a large number of detection regions quickly and efficiently using a plurality of sensors using SPR.

Sensors for detecting hydrogen are used in various industrial fields.
As an example of an application for detecting hydrogen, fuel supply systems such as rockets and space transporters that use liquid hydrogen fuel are illustrated.
In such a fuel supply system, it is desired to detect a minute amount of hydrogen leakage accurately, quickly and safely.

Various sensors have been proposed as sensors for detecting such hydrogen.
For example, Patent Document 1 (Japanese Patent Laid-Open No. 2011-197008) discloses an optical fiber hydrogen purity sensor and system as outlined below.
The structure is that a hydrogen purity multilayer detection chip is laminated with hydrogenable materials, such as palladium, palladium alloy, or palladium oxide, and gold, silver, copper, nickel, which are noble metals as non-hydrogenable materials, alternately. This constitutes a multilayer sensing material. The hydrogenatable material has a higher refractive index than the optical fiber cladding layer, and the non-hydrogenatable material has a lower refractive index than the optical fiber cladding layer.
The detection principle is that hydrogenation using a hydrogenatable material changes the refractive index profile and dielectric function of the hydrogenatable material. Hydrogen is detected by taking advantage of fluctuations.

  As another detection method, the multilayer detection chip is formed around an FBG (fiber Bragg grating) sensor, and the refractive index variation, optical absorption change, and the like associated with hydrogenation of the multilayer detection chip as a detection layer, There is known a method for detecting hydrogen by utilizing the fact that the transmission wavelength and power of optical fiber propagation light are modulated by a change in the detection material stress or a combination thereof.

Patent Document 2 (Japanese Patent Application Laid-Open No. 2005-351651) discloses an optical fiber hydrogen sensor capable of measuring hydrogen distribution and a measurement method using the same, as outlined below.
In this configuration, a tungsten oxide thin film carrying a platinum catalyst is used as a hydrogen sensitive substance, and the hydrogen sensitive portion is widely arranged in the longitudinal direction of the optical fiber.
In the evanescent wave absorption method, a tungsten oxide thin film carrying a platinum catalyst on the core of an optical fiber is formed to a thickness of 500 nm or less.
On the other hand, in the FBG type sensor, a platinum catalyst-supported tungsten oxide powder is fixed with a thickness of 1 μm or more around the cladding of the FBG portion.

  A fiber-type hydrogen sensor in which tungsten oxide with platinum as a catalyst is used as a clad and formed around the core does not absorb evanescent waves without hydrogen, and light propagates in the same way as a normal optical fiber. On the other hand, in the presence of hydrogen, the platinum catalyst-supported tungsten oxide reacts with hydrogen to form tungsten bronzes, the evanescent wave is absorbed, and the amount of propagating light is greatly attenuated. The transmission optical power of the optical fiber varies according to the hydrogen gas concentration. Using this variation, the hydrogen concentration is detected from the light intensity.

  In addition, optical fiber test equipment (OTDR: Optical TimeDomain Reflectmetry), distributed measurement equipment (OFDR: Optical Frequency Domain Reflectometry), etc., which are optical fiber multi-point measuring devices, can also be used for distributed optical fiber measurement capable of measuring multiple points. To.

JP 2011-197008 A JP 2005-351651 A

  For example, what is particularly required of a hydrogen sensor that detects leakage of hydrogen gas in a fuel supply system such as a rocket using a liquid hydrogen fuel and a space transport aircraft is a response speed during hydrogen storage.

In the above-described method, in order to obtain a change in the refractive index and reflectivity of the hydrogen storage material, when the hydrogen storage material is generated as a multilayer film chip or film, a relatively large thickness is provided (the film thickness is increased). There is a need. Then, the volume of the hydrogen storage material increases, and there is a problem that it takes time to store and release hydrogen in the storage material.
On the other hand, when the film thickness of the hydrogen storage material is made thin, it is difficult to detect hydrogen because the refractive index change, reflectivity change, and expansion of the hydrogen storage material are small.
As described above, there is a trade-off problem regarding the film thickness of the hydrogen storage material.

  A hydrogen sensor using an optical fiber has been proposed in which the cladding layer of the optical fiber is cut as a structure that leaks light to the outside in order to capture changes during hydrogen storage by the hydrogen storage material. However, this method reduces mechanical strength and is difficult to use practically for a long time.

  In addition, when FBG is used, the hydrogen storage material is expanded, and the FBG on which the storage material is formed is expanded to change the refractive index lattice spacing, and hydrogen is detected from the change in Bragg reflection wavelength. Since the Bragg reflection wavelength changes depending on the temperature, a sensor for compensating the temperature is further required, and the device configuration becomes complicated.

  Furthermore, in order to safely detect leakage of hydrogen, there is a demand for an explosion-proof sensor that does not have an electrical contact in a sensor unit that detects hydrogen.

  The above problems and demands are not limited to detecting a small amount of hydrogen leakage in a fuel supply system such as a rocket and a space transport using liquid hydrogen fuel, but detecting a gas such as hydrogen quickly and accurately. The same applies to various other fields and applications where there is a demand.

In view of the above, it is desired to provide a hydrogen sensor capable of rapidly detecting hydrogen.
It is also desirable to provide a hydrogen sensor that has high mechanical strength.
Furthermore, it is desired to provide a hydrogen sensor that can be used safely.

In addition, it is desired to provide an apparatus (system) for detecting hydrogen with a simple configuration using the requested hydrogen sensor.
In particular, there is a demand for an apparatus that can quickly and efficiently detect hydrogen at a large number of detection points (multiple points) over a wide range.

According to the present invention , a single-mode first optical fiber having a predetermined length and having a first core and a first cladding formed on the outer periphery of the first core and a diameter larger than the diameter of the first core. A multimode second optical fiber having a second core having a diameter and a second cladding formed on an outer periphery of the second core; and a third core having the same structure and dimensions as the second optical fiber And having a third cladding formed on the outer periphery of the third core, and a multimode third optical fiber,
Both end faces of the first optical fiber are opposed to the second optical fiber and the third optical fiber, respectively, and respective tips of the first core are in the second core and the third core. Is inserted and fused, and constitutes a hetero-core portion in which propagating light from the second optical fiber leaks to the outside of the first optical fiber,
The evanescent wave and the surface plasmon resonance or the localized surface plasmon resonance are coupled to the outer periphery of the first cladding of the first optical fiber including the hetero core portion to cause a change in the resonance wavelength condition. A metal film, a dielectric film formed on the outer periphery of the metal film , and a hydrogen storage metal formed on the outer periphery of the dielectric film , the dielectric function and refractive index profile of which changes when it contains hydrogen With a film of
The dielectric film is to play a said you adjust the dielectric function of the hydrogen-absorbing metal film role,
A hydrogen sensor is provided.

According to the present invention, having a first cladding formed on the outer periphery of the first core and the first core, having a predetermined length, a first single-mode optical fiber, than the diameter of the first core A multimode second optical fiber having a second core having a large diameter and a second cladding formed on an outer periphery of the second core;
Wherein one end face of the first optical fiber is opposed to the second optical fiber, the tip of one end face of the first core is fused is inserted into the second core, from the second optical fiber Is configured to form a hetero-core portion that leaks to the outside of the first optical fiber,
A reflecting portion is provided on the other end face of the first optical fiber;
Metal that includes the hetero-core portion and has an effect of causing a change in resonance wavelength condition by coupling an evanescent wave and surface plasmon resonance or localized surface plasmon resonance on the outer periphery of the first cladding of the first optical fiber And a dielectric film formed on the outer periphery of the metal film, and formed on the outer periphery of the dielectric film. When hydrogen is included, its dielectric function and refractive index profile change . A membrane,
The dielectric film is to play a said you adjust the dielectric function of the hydrogen-absorbing metal film role,
A hydrogen sensor is provided.
Preferably, the reflecting portion is formed by laminating a second metal film, a second dielectric film, and a second hydrogen storage metal film on the other end face of the first optical fiber. It is .

Preferably, the dielectric film is formed in accordance with a thickness exerted by the evanescent wave on the metal film on the hydrogen storage metal film.
Preferably, the first optical fiber is a single mode optical fiber, and the second optical fiber is a multimode optical fiber.

The operation principle of the hydrogen sensor of the present invention described above will be described.
The hydrogen sensor of the present invention is a so-called optical fiber hydrogen sensor using an optical fiber.
As a basic structure, light is leaked to the outer periphery of the first optical fiber. As a form thereof, there is a case where the hetero core structure is not used.

a. No hetero-core structure The hydrogen-absorbing metal film disposed on the outer periphery of the first optical fiber occludes and releases hydrogen, causing a change in volume. As a result, the refractive index profile and dielectric function of the hydrogen-absorbing metal film change. The dielectric film in contact with the hydrogen storage metal film serves to adjust the dielectric function of the film containing the hydrogen storage metal.
The metal film disposed on the outer periphery of the first optical fiber utilizes surface plasmon resonance (SPR) that responds sharply to changes in the refractive index of the external environment of the first optical fiber.
If the hydrogen occlusion metal does not occlude hydrogen, there is no absorption of evanescent waves in the metal film, and light propagates in the first optical fiber in the same manner as a normal optical fiber. On the other hand, when the hydrogen storage metal stores hydrogen, the evanescent wave is absorbed, and the amount of light transmitted through the optical fiber is greatly attenuated. Hydrogen can be detected by detecting this attenuation in the detection means connected to the hydrogen sensor.

b. Hetero core structure Preferably, the first optical fiber and the second optical fiber have a hetero core structure. That is, a first optical fiber having a small core diameter and a second optical fiber having a large core diameter are fused to form a heterocore structure, and light propagating from the second optical fiber is transmitted to the first optical fiber. The surface plasmon resonance (SPR) in the metal film formed on the outer periphery of the first optical fiber is utilized.
The operation of the hydrogen storage metal and the dielectric film is as described above.

As described above, it is desirable for the hydrogen sensor to have a hetero-core structure, but basically it is sufficient that the propagation light can leak from the first optical fiber to the outer periphery.
When the optical fiber hydrogen sensor is arranged in a hydrogen atmosphere, the hydrogen storage metal film contains hydrogen, its dielectric function and refractive index profile change, and volume expansion occurs.
Since the resonance wavelength of surface plasmon resonance (SPR) changes in the metal deposited around the optical fiber due to the change of the dielectric function, hydrogen can be measured from the amount of change of the resonance wavelength.
Further, as a result of the reflection spectrum itself shifting with the change of the resonance wavelength in the SPR, when focusing on the propagation wavelength in a certain optical fiber, the light intensity changes. A configuration in which measurement is performed by a light source and a light receiving unit is also possible.
More preferably, the reflection spectrum can be shifted to the visible light region.

The preferred materials of metals, dielectrics, and hydrogen storage metals that can excite the SPR phenomenon are selected according to these interrelationships.
The metal capable of exciting the SPR phenomenon is preferably gold, the dielectric is tantalum, more preferably tantalum pentoxide (Ta ₂ O ₅ ), and the hydrogen storage metal is palladium.
The thicknesses of these films are preferably 10-50 nm of gold film, 50-70 nm of tantalum pentoxide film, and 2-2 mm of palladium film. 10 nm.

  The film thickness of the hydrogen storage metal is defined according to the hydrogen detection sensitivity (responsiveness). The thinner the film thickness, the shorter the time for detecting hydrogen.

  Further, according to the present invention, there is provided a hydrogen detection apparatus using the above-described penetrating hydrogen sensor or a reflective hydrogen sensor in which light penetrates (passes) the sensor.

By utilizing surface plasmon resonance (surface plasmon resonance or localized surface plasmon resonance), the hydrogen sensor of the present invention can capture changes during hydrogen storage even when a thin film of hydrogen storage metal is formed. As a result, the film thickness of the hydrogen storage metal could be reduced, and the response speed (detection time) of the hydrogen sensor was improved.
Furthermore, by using surface plasmon resonance, the hydrogen detection sensitivity can be improved.

The hydrogen sensor of the present invention preferably uses a multimode fiber, so that the wavelength spectrum of reflection due to surface plasmon resonance becomes a wide band, and therefore, changes during hydrogen storage can be captured more sensitively.
More preferably, the reflection spectrum can be shifted to the visible light region.

  In the hydrogen sensor of the present invention, the structure for leaking the propagation light in the optical fiber is a hetero-core structure, so that the strength of the sensor structure is ensured while leaking light, and it is stable for a long time in various environments. Can be used for high practicality.

  The hydrogen sensor of the present invention is an explosion-proof hydrogen sensor that does not have an electrical contact in the sensor portion, and is excellent in safety.

  The hydrogen sensor of the present invention is small and robust, and can be applied to various atmospheres.

  It is also possible to provide a multi-point hydrogen detection device that uses a plurality of the hydrogen sensors of the present invention and detects the detection results of the plurality of hydrogen sensors with a measuring device.

FIG. 1 is a diagram showing a first configuration example of a hydrogen detection apparatus according to the present invention. FIG. 2 is a diagram showing a second configuration example of the hydrogen detection apparatus of the present invention. FIG. 3 is a diagram illustrating a hydrogen sensor according to an embodiment of the present invention that can be applied to the hydrogen detection device of FIGS. 1 and 2, and FIG. 3A is a longitudinal sectional view of the hydrogen sensor, 3B is a cross-sectional view taken along line BB in FIG. 3A, and FIG. 3C is a cross-section of the first optical fiber viewed from the direction A in FIG. FIG. 3D is a diagram illustrating an outline of the behavior of the evanescent wave. FIG. 4 is a diagram illustrating a process of manufacturing the hydrogen sensor illustrated in FIG. FIG. 5 is a diagram showing the reflection spectrum of the hydrogen sensor described with reference to FIG. FIG. 6 is a diagram showing a real-time response when palladium is used as the hydrogen storage metal of the optical fiber hydrogen sensor described with reference to FIG. 3 and its thin film is 5 nm. FIG. 7 is a diagram showing a real-time response when palladium is used as the hydrogen storage metal of the optical fiber hydrogen sensor described with reference to FIG. 3 and its thin film is 3 nm. FIG. 8 is a diagram showing optical loss characteristics at a transmission wavelength of 850 nm with respect to the hydrogen gas concentration of the hydrogen sensor described with reference to FIG. FIG. 9 is a diagram showing a third configuration example of the hydrogen detector of the present invention. FIG. 10 is a cross-sectional view showing one configuration of a hydrogen sensor applied to the hydrogen detector of FIG. FIG. 11 is a configuration example of the hydrogen detection apparatus described with reference to FIG. 9 and is a diagram showing a real-time response of what is connected to the first point (previous stage) when the hydrogen sensor shown in FIG. 10 is used. FIG. 12 shows a configuration example of the hydrogen detection apparatus described with reference to FIG. 9. When the hydrogen sensor shown in FIG. 10 is used, there is a first hydrogen sensor at the front stage and a connection at the second (back stage). It is a figure which shows the real-time response of what was done. FIG. 13 is a configuration example of the hydrogen detection apparatus described with reference to FIG. 9 and shows optical loss characteristics at a propagation wavelength of 850 nm with respect to the hydrogen gas concentration when the hydrogen sensor shown in FIG. 10 is used. FIG. 14 is a block diagram of an experimental apparatus corresponding to FIG. FIG. 15 is a diagram showing optical loss response characteristics when the hydrogen sensor is heated in air. FIG. 16 is a diagram showing the optical loss response characteristics when palladium (Pd) is used as the hydrogen storage metal and the film thickness is 3 nm as an unheated hydrogen sensor. FIG. 17 is a diagram showing optical loss response characteristics when a hydrogen sensor is heated with argon.

  A hydrogen sensor and a detection apparatus using the hydrogen sensor according to an embodiment of the present invention will be described with reference to the accompanying drawings.

First, a configuration example of the hydrogen detection apparatus will be described with reference to FIGS. 1 and 2.
Hydrogen detector (1)
FIG. 1 is a diagram showing a configuration example of a hydrogen detection device (hydrogen detection system) 100 according to a first embodiment of the present invention.
The hydrogen detection device 100 causes light of a predetermined wavelength to enter the hydrogen sensor 1, the two optical fibers 20 </ b> A and 20 </ b> B connected to both ends of the hydrogen sensor 1, and one optical fiber 20 </ b> A on the incident side of the hydrogen sensor 1. A light emitting element 102, a light receiving element 104 that receives light emitted from the other optical fiber 20B on the emission side of the hydrogen sensor 1 and outputs an electrical signal corresponding to the amount of light received, and a hydrogen sensor based on a signal from the light receiving element 104 1 and a measuring device 106 for measuring the hydrogen detected in 1.
As the light emitting element 102, for example, an LED, an LD, or the like can be used.
As the light receiving element 104, for example, a photodiode can be used.
The light receiving element 104 and the measuring device 106 can be replaced with an optical spectrum analyzer.

Hydrogen detector (2)
FIG. 2 is a diagram illustrating a configuration example of a hydrogen detection device (hydrogen detection system) 200 according to the second embodiment of the present invention.
The hydrogen detection apparatus 200 includes a main optical fiber 2, a plurality of hydrogen sensors 1-1 to 1-n corresponding to the hydrogen sensor 1 illustrated in FIG. 1, and a plurality of hydrogen sensors 1-1 to 1-n. A plurality of individual optical fibers 20-1 to 20-n connecting the main optical fiber 2, and reflected / backscattered light intensity connected to the plurality of optical fibers 20-1 to 20-n via the main optical fiber 2 It has a distribution measuring device 202, for example, an OTDR.
The plurality of hydrogen sensors 1-1 to 1-n are respectively disposed at locations where hydrogen is to be detected.
The measuring device 202, for example, the OTDR, enters the plurality of optical fibers 20-1 to 20-n via the main optical fiber 2, and changes according to hydrogen in each hydrogen sensor. The position and intensity of the backscattered light are measured to detect hydrogen detected by each hydrogen sensor.

  Although the operation of the hydrogen detection devices 100 and 200 will be described later, the hydrogen sensor 1 according to the embodiment of the present invention can be suitably applied to such a hydrogen detection device.

Hydrogen sensor (structure)
FIG. 3 is a diagram illustrating the hydrogen sensor 1 according to the embodiment of the present invention.
3A is a cross-sectional view in the longitudinal direction of the hydrogen sensor of this embodiment, FIG. 3B is a cross-sectional view taken along line BB in FIG. 3A, and FIG. 3A is a cross-sectional view of the first optical fiber 10 viewed from the direction A in FIG. 3A, and FIG. 3D is a diagram illustrating an outline of an evanescent wave.

The hydrogen sensor 1 is an optical fiber hydrogen sensor using an optical fiber, and includes a first optical fiber 10 and second optical fibers 20A and 20B connected to both ends thereof.
For example, when the hydrogen sensor 1 is applied to the hydrogen detection apparatus 100 illustrated in FIG. 1, the light emitting element 102 and the light receiving element are provided via the second optical fibers 20A and 20B (corresponding to the optical fibers 20A and 20B in FIG. 1). Used in connection with 104.
The first optical fiber 10 is made of, for example, quartz glass, and is preferably formed using a single mode fiber. The basic configuration of the first optical fiber 10 is a first core 11 and a first cladding formed on the outer periphery thereof. 13.
The second optical fiber 20 is made of, for example, quartz glass, and is preferably formed using a multimode optical fiber. The basic configuration of the second optical fiber 20 is a second core 21 and a second cladding formed on the outer periphery thereof. 23.

Basically, the first optical fiber 10 is configured to have a structure for leaking propagating light therein.
Hereinafter, the case where a hetero core structure is taken as a suitable example is illustrated.

Hetero-core structure As illustrated in FIG. 3A, the end surface of the first core 11 is cut so that the second optical fiber 20 is cut halfway and the first optical fiber 10 is inserted into the cut portion. The first core 11 of the first optical fiber 10 is incorporated into the second core 21 of the second optical fiber 20 to form a hetero-core structure.
Here, the diameter φ11 of the first core of the first optical fiber 10 is smaller than the diameter φ21 of the second core of the second optical fiber 20. That is, φ11 <φ21. For example, φ11 = 3 μm and φ21 = 50 μm.
By configuring in this way, in the hetero-core portion where the diameter 11 of the core 11 of the first optical fiber 10 is thin, most of the propagation light from the second optical fiber 20 is outside the first optical fiber 10 (on the outer periphery). In the present embodiment, the portion that is positioned has a structure that leaks to the noble metal 31) described later.

  As described above, the structure for leaking the propagation light in the optical fiber is a hetero-core structure, so that the hydrogen sensor is highly practical because the structural strength is ensured while the light is leaked.

Hydrogen Detection Part The following part for detecting hydrogen is formed on the outer periphery of the first cladding 13 of the first optical fiber 10. That is, the portion for detecting hydrogen is formed by laminating a film of a metal 31, a film of a dielectric 33, and a film of a metal (hydrogen storage metal) 35 that stores hydrogen on the outer periphery of the first cladding 13.

Hydrogen storage metal The film of the hydrogen storage metal 35 absorbs hydrogen and changes its volume. Hydrogen can be detected from this volume change.
When the hydrogen storage metal 35 film absorbs and releases hydrogen, its optical characteristics change, and the refractive index profile and dielectric function of the hydrogen storage metal 35 film change. In principle, hydrogen can be detected using this change.
Various hydrogen storage metals are known and exemplified below.

  Examples of the hydrogen storage metal include AB2 type, rare earth element, niobium based on alloys of transition elements such as palladium (Pd), vanadium (V), Ti-Fe, titanium, manganese, zirconium, nickel, etc. Further, based on alloys containing transition elements having a catalytic effect on zirconium, AB5 type, Ca-based alloys centering on alloys and transition elements such as calcium and nickel, which have a strong affinity for hydrogen, are known.

  These hydrogen storage metals 35 can be used as the hydrogen storage metal 35 of the hydrogen sensor 1 of the present embodiment. In the present embodiment, palladium (Pd) is preferably used as the hydrogen storage metal 35. used. The reason is that palladium (Pd) can absorb 935 times as much hydrogen as its own volume, has high detection responsiveness, can be formed thin, and the hydrogen sensor 1 of the present embodiment. This is because it is preferably used as a hydrogen storage metal.

  Furthermore, in order to improve the response speed of hydrogen detection (decrease the detection time), palladium (Pd) nanoparticles, palladium (Pd) thin films, and palladium alloy thin films are used as the hydrogen storage metal 35. Alternatively, platinum (Pt) nanoparticles are preferably formed by platinum plating formed sparsely.

  The film thickness of the hydrogen storage metal 35 is defined according to the response speed or detection sensitivity for detecting hydrogen.

  In the present specification, for convenience, the above-described nanoparticles, platinum plating, and sparsely formed nanoparticles are collectively referred to as a film.

  The film thickness of the hydrogen storage metal encounters a trade-off. That is, when the thickness of the hydrogen storage material is increased in order to obtain sufficient changes in the refractive index profile (reflectance profile) and the dielectric function of the hydrogen storage material (when the thickness is increased), hydrogen increases as the volume of the hydrogen storage metal increases. It takes time to occlude / release the occlusion material, and the responsiveness is low. On the other hand, when the film of the hydrogen storage material is made thin, it is difficult to capture (detect) hydrogen because the refractive index change, reflectivity change, and expansion of the material are small.

  In the present invention, in order to overcome such a contradictory problem, a metal 31 film, preferably a noble metal film, that can excite surface plasmon resonance (SPR) is formed to cover the periphery of the heterocore portion. (Formation).

The hetero-core portion so that the propagating light from the second optical fiber 20 is incident on the metal film and the cladding layer of the surface plasmon resonance first optical fiber 10 and the evanescent wave spreads on the metal layer 31 on the surface of the cladding layer. A metal 31 film (thin film), preferably a noble metal film (thin film) that can excite surface plasmon resonance (SPR) is formed (formed).
In general, light incident from the air does not couple with electronic sparse waves (plasmons) in the metal, but from the inside of the glass to the surface of a metal such as gold, silver, copper, or aluminum, preferably a noble metal such as gold. In the case of incident light, for example, light is coupled to plasmons on the surface of the order of nm. This is called surface plasmon resonance (SPR).

  As illustrated in FIG. 3D, the evanescent wave couples with the SPR of the metal 31 thin film. By this coupling, the energy of light incident from the glass is partially transferred to the surface plasmon wave, and resonance excitation is performed at a wavelength (inside the glass) that satisfies the resonance condition at that time. This resonance wavelength (wave number) varies depending on the refractive index outside the metal 31. Therefore, the change in the refractive index of the hydrogen storage metal 35 can be captured from the change in the resonance wavelength of SPR.

  In the present invention, even if the film of the hydrogen storage metal 35 is formed thin by using surface plasmon resonance, which can detect the change in the refractive index around the thin film of the metal 31 sensitively. Changes during hydrogen storage can be captured. As a result, the response speed of the hydrogen sensor 1 is improved. Further, by using surface plasmon resonance due to a thin film of metal 31, an improvement in hydrogen detection sensitivity can be achieved.

In the hydrogen sensor 1 of the present embodiment, the volume (volume) change of the hydrogen storage metal 35 caused by hydrogen storage / release is not directly detected, but the metal 31 that excites surface plasmon resonance (SPR) is not detected. The above hydrogen storage metal related to the film thickness of the hydrogen storage metal is detected by detecting the change of the dielectric function of the hydrogen storage metal 35 using the change in the resonance wavelength (wave number) condition in the first optical fiber by the thin film. Overcoming the above-mentioned contradictory issues regarding film thickness.
Therefore, in the embodiment of the present invention, the thickness of the hydrogen storage metal 35 can be reduced to increase the sensitivity of hydrogen detection. That is, since the detection speed is increased by using the metal 31, rapid hydrogen detection performance can be exhibited even if the thickness of the hydrogen storage metal 35 is reduced.

The dielectric hydrogen storage metal 35 changes its refractive index profile and dielectric function due to hydrogen absorption / release. On the other hand, the noble metal 31 acts to cause a change in the resonance wavelength condition due to surface plasmon resonance.
Even if they are directly combined, the function of hydrogen detection cannot be achieved in a desired wavelength region. In order to solve this problem, in the present invention, a dielectric 33 is interposed between the metal 31 and the hydrogen storage metal 35 in order to bond the hydrogen storage metal 35 and the metal 31.
That is, the dielectric 33 serves to adjust the dielectric function of the film containing the hydrogen storage metal 35. The film thickness of the dielectric 33 is in a range in which the influence of the evanescent wave due to surface plasmon resonance extends to the hydrogen storage metal 35.
If the thickness of the dielectric 33 is too large and the influence of the evanescent wave does not reach the hydrogen storage metal 35, the role of adjusting the film including the dielectric function of the hydrogen storage metal 35 is not exhibited.

For example, tantalum, preferably tantalum pentoxide (Ta ₂ O ₅ ), silicon dioxide (SiO ₂ ), or the like can be used as the dielectric 33 that adjusts the dielectric function of the film containing the hydrogen storage metal 35.
When tantalum or tantalum pentoxide is used, the film thickness of the dielectric 33 can be reduced as compared with silicon dioxide. Therefore, it is desirable to use tantalum pentoxide as the dielectric 33.
Further, tantalum or tantalum pentoxide is excellent in suitability when palladium (Pd) is used for the hydrogen storage metal 35.

Basic operation of the hydrogen sensor The hydrogen storage metal 35 changes its dielectric function and reflectivity (refractive index) profile or expands / contracts depending on the hydrogen stored and released.
The dielectric 33 changes the dielectric function of the film containing the hydrogen-absorbing metal 35, changes the resonance wavelength of surface plasmon resonance in the metal 31 formed in the first optical fiber 10, and changes the resonance wavelength.
As a result, the spectrum of the light that is propagated from the second optical fiber 20 to the first optical fiber 10 and enters is changed.
For example, the hydrogen concentration can be measured from the amount of change in the measuring device 106 of the hydrogen detecting device 100 illustrated in FIG.

  In the detection apparatus 100 of FIG. 1, when measuring hydrogen by a change in resonance wavelength, the light emitting element 102 can be measured by using a white light source, and the light receiving element 104 and the measuring apparatus 106 can be replaced with an optical spectrum analyzer.

  Further, as a result of the reflection spectrum itself being shifted in accordance with the change of the resonance wavelength in surface plasmon resonance, the light intensity changes when attention is paid to the propagation wavelength in a certain optical fiber. As a result, a configuration in which measurement is performed by a single light source, for example, the light emitting element 102 of FIG. 1 and a light receiving unit, for example, the light receiving element 104 of FIG.

Manufacturing Method A method for manufacturing the hydrogen sensor 1 will be described with reference to FIG.
Step 1, creation of a heterocore structure A heterocore structure is created. For example, the optical propagation path section has a core diameter of 50 μm of the second optical fiber 20 of the multimode fiber, cuts the middle, and the first optical fiber 10 of the single mode fiber with the core diameter of 3 μm has the length L, For example, it is incorporated by fusing so as to insert 10 to 50 mm. As a result, most of the propagation light leaks to the outside of the first optical fiber 10 in the hetero-core portion having a small core diameter.

Step 2, Formation of Metal 31 Form a metal thin film such as a metal 31 that can excite surface plasmon resonance, preferably a noble metal by sputtering or vacuum deposition so as to cover the periphery of the hetero-core portion of the first optical fiber 10. The film is formed using a means that can be used.

Step 3, Formation of Dielectric 33 A dielectric 33 serving to adjust the dielectric function of the film containing the hydrogen storage metal 35 is formed on the outer periphery of the metal 31.

Step 4: Formation of the hydrogen storage metal 35 The hydrogen storage metal 35 is formed on the outer periphery of the dielectric 33.

Gold is preferably used as the metal 31, and the film thickness is 10 to 50 nm, for example, 25 nm.
For example, palladium (Pd) is used as the hydrogen storage metal 35, and tantalum pentoxide is preferably used as the dielectric 33 that adjusts the dielectric function of a film containing a metal that stores hydrogen. The film thickness of tantalum pentoxide is 50 to 70 nm, for example, 60 nm.
The thickness of the palladium film is defined according to the hydrogen detection performance (detection time), and is, for example, in the range of 2 to 20 nm, and preferably, for example, 3 to 10 nm.

  As the film formation of the metal 31, the dielectric 33, and the hydrogen storage metal 35, the first optical fiber 10 is inserted into the second optical fiber 20 with a length L of about 10 to 50 mm, and the first total length is about 100 mm. The optical fiber 10 and the second optical fiber 20 connected to each other are placed in, for example, a nitrogen atmosphere chamber, and sequentially formed into a thin film of metal 31 and dielectric using a high frequency sputtering apparatus or a vacuum deposition apparatus. A thin film of the body 33 and a thin film of the hydrogen storage metal 35 are formed.

  As the film forming method, the thin films of the metal 31, the dielectric 33, and the hydrogen storage metal 35 are formed on the outer periphery of the first optical fiber 10 having a circular cross section. Is performed while smoothly rotating around the center of the material source for ejecting the metal particles, dielectric particles, and hydrogen storage metal particles, and while rotating the optical fibers 10 and 20 in the longitudinal direction. That is, it is performed while simultaneously rotating in two directions.

Specific Configuration Example of Hydrogen Sensor 1 A specific configuration example of the hydrogen sensor 1 formed as described above will be described.
a. First optical fiber 10 (single mode fiber)
Diameter of first core φ11 = 3μm
Diameter of the first cladding φ13 = 125 μm
Length L of second optical fiber 20 = 15-20 mm
b. Second optical fiber 20 (multimode optical fiber)
Second core diameter φ21 = 50 μm
Diameter of the second cladding φ23 = 125 μm
c. Metal (noble metal) 31
Material, gold thickness t31 = 25nm
d. Dielectric 33
Material, tantalum pentoxide (Ta ₂ O ₅ )
Thickness t33 of dielectric 33 = 60 nm
e. Hydrogen storage metal 35
Material, palladium (Pd)
Thickness t35 = 3-10nm

Step 5, Assembly to Hydrogen Detection Device The hydrogen sensor 1 is applied to the hydrogen detection device 100 illustrated in FIG. 1 or the hydrogen detection device 200 illustrated in FIG.

When the optical fiber hydrogen sensor having the structure illustrated in FIG. 3 and formed by the above process is arranged in a hydrogen atmosphere, the hydrogen storage metal 35 contains hydrogen, and its dielectric function and refractive index profile change, or volume expansion occurs. do.
Here, the resonance wavelength of the surface plasmon resonance in the thin film of the metal 31 formed on the outer periphery of the first optical fiber 10 is changed by the change of the dielectric function, and the hydrogen concentration can be measured from the change amount of the resonance wavelength. .

  Also, as a result of the reflection spectrum itself shifting due to the change in the resonance wavelength in surface plasmon resonance, when focusing on the propagation wavelength in a certain optical fiber, the light intensity changes, and a measurement configuration with a single light source and light receiving unit Is also possible.

Experimental Example and Evaluation FIG. 5 is a diagram showing a transmission spectrum of the hydrogen sensor 1 described with reference to FIG.
In a nitrogen atmosphere and a hydrogen atmosphere, the film thickness d2 of palladium (Pd) as the hydrogen storage metal 35 was changed to 5 nm and 7 nm.
From this result, it is understood that the spectrum is shifted to the long wavelength side when hydrogen is occluded by the hydrogen occlusion metal 35, and the change can be detected.
It can also be seen that the thinner the palladium (Pd) thin film, the longer the spectral dip is on the longer wavelength side.

6 shows the real-time response of the optical fiber hydrogen sensor illustrated in FIG. 3 when the palladium thin film d2 as the hydrogen storage metal 35 is 5 nm, and FIG. 7 shows the real time response when the palladium thin film d2 is 3 nm. FIG.
6 and 7, when this hydrogen sensor is applied to the hydrogen detection apparatus 100 illustrated in FIG. 1, the light-emitting element 102 having a wavelength of 850 nm and the light-receiving element 104 (or the measurement apparatus 106 or the optical spectrum analyzer) are used. The transmitted light intensity is measured.
From the illustrations of FIGS. 6 and 7, it is understood that the hydrogen storage process can be detected in real time according to the hydrogen sensor 1 of the present embodiment.
In particular, in FIG. 7, the palladium thin film d2 as the hydrogen storage metal 35 is made 3 nm thinner than the film thickness d2 = 5 nm and 7 nm in the conditions of FIG. I can see that

FIG. 8 is a diagram showing light loss characteristics at a propagation wavelength of 850 nm (wavelength of light emitted from the light emitting element 102) with respect to the hydrogen gas concentration of the hydrogen sensor 1 described with reference to FIG.
Regarding the thickness d2 of the thin film of palladium (Pd) as the hydrogen storage metal 35, as illustrated by the curves CV1 and CV2, both 5 nm and 3 nm have a monotonous light loss change with respect to hydrogen gas. I understand.
It can also be seen that the thicker the palladium film, the higher the sensitivity.

Thus, the hydrogen sensor 1 of this Embodiment and the detection apparatus using the same have the following effects.
(1) By interposing the dielectric 33 between the metal 31 and the hydrogen storage metal 35, the action of the hydrogen storage metal 35 and the surface plasmon resonance by the metal 31 are combined to efficiently detect hydrogen. It became possible to do.

(2) Even if the hydrogen storage metal film is formed thin by using surface plasmon resonance, which can detect a change in the refractive index of the surroundings of the metal 31 film, for example, a gold film sensitively. The change at the time of occlusion could be caught, and as a result, the response speed of the sensor was improved.
In addition, sensitivity can be improved by using surface plasmon resonance.

(3) Since a multi-mode fiber is used as the second optical fiber 20, it is possible to cause a change in light intensity in the entire visible light region by widening the reflection spectrum band, and a single light source (light emission) It is possible to construct a stable and fast response system with a simple measurement configuration of the element 102) and the single light receiving section (light receiving element 104).
That is, by using a multimode fiber for the second optical fiber 20, the wavelength spectrum of reflection due to surface plasmon resonance becomes a wide band, and therefore, changes during hydrogen occlusion can be captured more sensitively.

  (4) In order to change the dielectric function of the hydrogen storage metal in hydrogen storage, it is necessary to leak the propagating light in the optical fiber to the outside. However, since the hetero core structure is formed by fusion, its mechanical strength Is secured and stable measurement can be realized.

  (5) Since the hydrogen storage metal 35 necessary for the hydrogen sensor can function as a hydrogen sensor with a thin film thickness, the response speed of hydrogen detection can be improved. As a result, safety in hydrogen leak detection can be further improved.

  (6) Since no electrical contact is used for the hydrogen sensor 1 and the hydrogen detection devices 100 and 200, safety against fire, electric shock, etc. is high.

  (7) In all of the hydrogen sensor 1 and the hydrogen detection devices 100 and 200, oxygen and hydrogen are not mixed and safety is high.

  (8) As a hydrogen detector, for example, as illustrated in FIG. 2, a reflected / backscattered light intensity distribution measuring device, for example, an OTDR, and an optical fiber multipoint measurement using a plurality of hydrogen sensors 1 at multiple points. Multipoint measurement is also possible by using the system.

Hydrogen Detection Device When the hydrogen sensor 1 of the present embodiment is applied to the hydrogen detection device 100 illustrated in FIG. 1, a change in the transmitted light intensity of the light in the second optical fiber 20 incident from the light emitting element 102 is received. Detection is performed by the element 104, and the concentration of hydrogen gas is detected by the measuring device 106.
The light emitting element 102 of the light source is a single wavelength light source, and has a simple configuration using a photodiode in the light receiving portion of the light receiving element 104.
Further, since the transmitted light intensity is used, the light intensity is high and high S / N can be secured.

A plurality of hydrogen sensors 1 according to the present embodiment are applied to the hydrogen detection apparatus 200 illustrated in FIG. 2 to perform multipoint measurement and detect the hydrogen concentration in a reflection / backscattered light intensity distribution measurement apparatus, for example, OTDR. be able to.
The hydrogen sensor 1 can be easily and arbitrarily disposed at various detection (measurement) locations without supplying power.

  Thus, using an in-line optical fiber sensor, for example, in a device that detects hydrogen leakage, even when a hydrogen occluding metal film is formed thin by using surface plasmon resonance as a hydrogen sensor, As a result, the response speed of the sensor was improved. In addition, sensitivity can be improved by using surface plasmon resonance.

  In addition, by using a multimode fiber as the optical fiber 20B, the wavelength spectrum of reflection due to surface plasmon resonance becomes a wide band, so that changes during hydrogen storage can be captured more sensitively.

  The structure for once leaking the propagation light in the optical fiber is preferably a hetero-core structure, so that the structure strength is ensured while light is leaked and the sensor is highly practical.

  In carrying out the hydrogen sensor of the present invention, not only the above-described materials and film thicknesses, but also, for example, various metals capable of exciting surface plasmon resonance or local surface plasmon resonance, preferably various noble metals, and various hydrogen The occluded metal and various dielectrics that change the dielectric function thereof can be manufactured by forming a film with a desired film thickness so as to achieve the purpose of hydrogen detection.

Third Embodiment A third embodiment of the hydrogen detector of the present invention will be described with reference to FIGS.
FIG. 9 is a diagram showing a configuration example of the third embodiment of the hydrogen detector of the present invention.
The hydrogen detector 300 illustrated in FIG. 9 includes main optical fibers 40-1 to 40n, a plurality of branch couplers 50-1 to 50-n, individual optical fibers 60-1 to 60-n, and a plurality of hydrogen sensors. 3-1 to 3-n and an optical signal measuring device 302.
The plurality of hydrogen sensors 3-1 to 3-n are disposed at locations where hydrogen is to be detected.
As the optical signal measuring device 302, for example, a reflected / backscattered light intensity distribution measuring device, preferably an optical pulse tester (OTDR) or OFDR is used.

The operating principle of the hydrogen detector 300 illustrated in FIG. 9 will be described.
The emitted light pulse Le from the measuring device 302 is propagated through the main optical fiber 40-1 and is incident on the first branch coupler 50-1.
In the branch coupler 50-1, the emitted light pulse Le is branched at a predetermined branch ratio, and emitted to the individual optical fiber 60-1 and the main optical fiber 40-2.
A corresponding hydrogen sensor 3-1 is connected to the individual optical fiber 60-1.
In the hydrogen sensor 3-1, which will be described later with reference to FIG. 10, hydrogen is detected on the same principle as the hydrogen sensor described above with reference to FIG.
When hydrogen is detected in the hydrogen sensor 3-1, an optical pulse modulated in response to the detection is generated in the hydrogen sensor 3-1, specifically, on the right side of the first optical fiber 80 in FIG. Reflected at the end face. The reflected light propagates through the individual optical fiber 60-1 and enters the branch coupler 50-1, and propagates through the main optical fiber 40-1 and enters the measuring device 302.
For example, the measurement apparatus 302 can detect that hydrogen is detected in the hydrogen sensor 3-1 by the reflected / backscattered light intensity distribution measurement method.

Further, the optical pulse incident on the main optical fiber 40-2 from the branch coupler 50-1 is branched at a predetermined ratio in the branch coupler 50-2, and is divided into the individual optical fiber 60-2 and the next main optical fiber 40-3. It is injected. A hydrogen sensor 3-2 is connected to the individual optical fiber 60-2. When hydrogen is detected by the hydrogen sensor 3-2, an optical pulse corresponding to the detection is propagated through the individual optical fiber 60-2 and incident on the branch coupler 50-2, and the main optical fiber 40-2, The light enters the measuring device 302 via the branch coupler 50-1 and the main optical fiber 40-1.
The measuring device 302 detects that hydrogen has been detected in the hydrogen sensor 3-2 by, for example, a reflected / backscattered light intensity distribution measuring method.
The same applies to the subsequent main optical fiber, branch coupler, and hydrogen sensor.
Thereby, in the measuring apparatus 302, it is possible to detect hydrogen detection in the hydrogen sensors 3-1 to 3-n disposed at predetermined positions.
As the hydrogen sensors 3-1 to 3-n, reflective hydrogen sensors described later are used.

The main optical fibers 40-1 to 40n, the branch couplers 50-1 to 50-n, and the individual optical fibers 60-1 to 60-n constitute an “outward path” for propagating an optical pulse from the measuring device 302. Yes.
The individual optical fibers 60-1 to 60-n, the branch couplers 50-1 to 50-n, and the main optical fibers 40-1 to 40n correspond to the detection of hydrogen from the hydrogen sensors 3-1 to 3-n. A “return path” that propagates the reflected light pulse and returns it to the measuring device 302 is formed.

The main optical fibers 40-1 to 40n are preferably multimode optical fibers. The reason is that the multimode optical fiber has a wide band compared to the single mode optical fiber, and can easily connect the optical fibers and connect to the branch couplers 50-1 to 50-n. There are advantages such as price.

Branch couplers Branch couplers 50-1 to 50-n branch optical pulses having wavelengths emitted from the measuring apparatus 302 with low loss, and main optical fibers 40-1 to 40n and individual optical fibers 60-1 to 60-60. Output to -n.
When the branch couplers 50-1 to 50-n are used, incident light can be provided to a large number of subsequent hydrogen sensors 3 with low attenuation of light pulses from the measuring device 302.
For example, the loss when the branching ratio is 50:50 is 3 dB, and the loss when the branching ratio is 75:25 is 6 dB.
The branching ratio of each branching coupler 50-1 to 50-n is defined by the number of hydrogen sensors 3-1 to 3-n, etc., but in the present embodiment, it is the same branching ratio. , The incident light is branched at 1: 8.
The branch coupler is relatively easy to control the temperature, has high productivity, and is inexpensive.

The individual optical fibers 60-1 to 60-n are preferably multimode optical fibers. The reason is that the multimode is used for the hydrogen sensors 3-1 to 3 -n to be connected, which will be described later. Furthermore, as described for the optical fibers 40-1 to 40n, the multimode optical fiber has advantages such as a wide band and low cost.

Hydrogen Sensor FIG. 10 is a cross-sectional view showing one configuration of a plurality of hydrogen sensors 3-1 to 3-n applied to the hydrogen detection device of FIG. Hereinafter, one of the plurality of hydrogen sensors 3-1 to 3-n will be described as a hydrogen sensor 3.
The hydrogen sensor 3 illustrated in FIG. 10 includes a first optical fiber 80 and a second optical fiber 90. Further, the hydrogen sensor 3 has a hydrogen detection and reflection unit 70.
The hydrogen sensor 3 illustrated in FIG. 10 is an optical fiber hydrogen sensor having a hetero-core structure and operating on the same principle as the hydrogen sensor 1 described with reference to FIG. 3 using surface plasmon resonance (SPR) and evanescent waves.
However, the detected light pulse is different in that it does not pass (penetrate) through the hydrogen sensor as illustrated in FIG. That is, the hydrogen sensor 1 illustrated in FIG. 3 is a penetrating (or passing) hydrogen sensor that allows incident light from the light emitting element 102 to pass to the light receiving element 104 side. The sensor is a light reflection type hydrogen sensor.
Therefore, it has a “reflecting part” to be described later, and reflects an optical pulse modulated according to hydrogen detection at the end face of the first optical fiber 80. The reflected light is incident on the measuring device 302 via the corresponding individual optical fiber 60 and branching coupler 50.

The first optical fiber 80 is formed of, for example, quartz glass, and is formed of, for example, a single mode fiber. The basic configuration of the first optical fiber 80 includes a first core 81 and a first cladding 82 formed on the outer periphery thereof. Have.
The second optical fiber 90 is made of, for example, quartz glass, and is formed, for example, as a multimode optical fiber. The basic configuration of the second optical fiber 90 is a second core 91 and a second cladding 92 formed on the outer periphery thereof. Have

The first optical fiber 80 having a hetero-core structure is configured to have a structure for leaking propagating light therein. As a suitable example thereof, a “hetero core structure” is adopted as in the hydrogen sensor 1 described with reference to FIG.
As illustrated in FIG. 10, the end surface of the first core 81 and the end surface of the second core 91 are opposed to each other so that the first optical fiber 80 is inserted into the cut portion on the right side of the second optical fiber 90. The first core 81 of the first optical fiber 80 is incorporated into the second core 91 of the second optical fiber 90 to form a hetero core structure.
The length L80 of the first optical fiber 80 is 2 mm, for example.
The diameter φ81 of the first core 81 of the first optical fiber 80 is smaller than the diameter φ91 of the second core 91 of the second optical fiber 90. That is, φ81 <φ91. For example, φ81 = 3 μm and φ91 = 50 μm.
By configuring the heterostructure in this way, most of the propagation light from the second optical fiber 90 is outside the first optical fiber 80 in the heterocore portion in which the diameter φ11 of the core 81 of the first optical fiber 80 is thin. In this embodiment, the portion located in the metal layer 31 has a structure that leaks into the metal 31, for example, preferably a noble metal, such as gold.
By adopting a hetero core structure as a structure for leaking propagating light in an optical fiber, as in the case of the hydrogen sensor 1 described with reference to FIG. A sensor can be provided.

Hydrogen detection unit A hydrogen detection unit for detecting hydrogen is formed on the outer periphery of the first cladding 82 of the first optical fiber 80.
Similar to the hydrogen sensor 1 described with reference to FIG. 3, the hydrogen detector 3 of the hydrogen sensor 3 has a metal 71 film, a dielectric 72 film, and a metal that stores hydrogen (hydrogen storage) on the outer periphery of the first cladding 82. (Metal) 73 film is laminated, and an optical pulse signal corresponding to detection of hydrogen is generated in this portion.
Regarding the film of the hydrogen storage metal 73, the film of the metal 71, and the film of the dielectric 72, the principle (function), material, film thickness, etc. of the hydrogen storage metal of the hydrogen sensor 1 described with reference to FIG. It is the same as the film, the metal film, and the dielectric film.
That is, in the same manner as the film of the hydrogen storage metal 35 described with reference to FIG. 3, the hydrogen storage metal 73 absorbs hydrogen and changes the volume. Hydrogen can be detected from this volume change. When the hydrogen storage metal 73 film stores and releases hydrogen, its optical characteristics change, and the refractive index profile and dielectric function of the hydrogen storage metal 35 film change. In principle, hydrogen can be detected using this change.

Unlike the hydrogen sensor 1 illustrated in FIG. 3, the hydrogen sensor 3 illustrated in the reflective part FIG. 10 covers the right end surface of the first optical fiber 80 facing the second optical fiber 90, and is described above. The same film as the film of the metal 71, the film of the dielectric 72, and the film of the metal (hydrogen storage metal) 73 that absorbs hydrogen is laminated to form a light reflecting portion. The light reflecting part reflects light modulated according to hydrogen detection.
The reflected light includes the first optical fiber 80 and the second optical fiber 90 that constitute the hydrogen sensor, the corresponding individual optical fibers 60-1 to 60-n, and the corresponding branch couplers 50-1 to 50-. n, and enters the measuring apparatus 302 via the main optical fibers 40-1 to 40n.
The reflection surface of the first optical fiber 80 of the hydrogen sensor 3 is defined according to predetermined optical reflection conditions such as the wavelength of light, the mode, and the like.

In the present embodiment, since the hydrogen detection unit and the light reflection unit are integrated, it is referred to as a hydrogen detection and reflection unit 70.
The hydrogen detection and reflection unit 70 is formed by laminating a metal 71 film, a dielectric 72 film, and a metal (hydrogen storage metal) 73 film that stores hydrogen as illustrated.

  In the present embodiment, the reflecting part has the same structure as the hydrogen detecting part because, for example, it is difficult to form a reflecting part separately on the end face of the first optical fiber 80 having a diameter of about 125 μm. Manufactured in the same manufacturing process as the detector. That is, it is convenient for manufacturing, and in principle, it may be formed as a portion capable of reflecting light modulated by surface plasmon resonance.

  If the hydrogen sensors 3-1 to 3-n are used, in the measuring apparatus 302, for example, OTDR, the detection state of hydrogen is determined based on the loss of reflected light from each of the hydrogen sensors 3-1 to 3-n. Can do.

FIG. 11 is a diagram showing a real-time response of the hydrogen sensor connected to the first point (previous stage) when the hydrogen sensor shown in FIG. 10 is used in the configuration example of the hydrogen detection apparatus described with reference to FIG. It is.
FIG. 12 shows a configuration example of the hydrogen detection apparatus described with reference to FIG. 9. When the hydrogen sensor shown in FIG. 10 is used, there is a first hydrogen sensor at the front stage, and at the second (second stage). It is a figure which shows the real-time response of the connected hydrogen sensor.
FIG. 13 shows light having a propagation wavelength of 850 nm emitted from the measuring device 302 with respect to the hydrogen gas concentration when the hydrogen sensor shown in FIG. 10 is used in the configuration example of the hydrogen detection device described with reference to FIG. It is a figure which shows the optical loss characteristic in.
From the above, it is shown that hydrogen having a concentration of 4% is clearly detected.
The illustration of FIG. 13 shows that the concentration of hydrogen that can be detected varies with time.

  As described above, in the detection apparatus illustrated in FIG. 9 using the reflective hydrogen sensor illustrated in FIG. 10 as the third embodiment of the present invention, the detection of hydrogen in the plurality of hydrogen sensors 3-1 to 3-n is detected. can do.

When the reflective hydrogen sensor described with reference to FIG. 9 is applied to the detection device using the branch coupler described with reference to FIG. 10, the through hydrogen sensor described with reference to FIG. Compared with the case where it is applied to the detection apparatus described above, there are the following advantages.
(1) Propagation loss in the front-stage penetrating hydrogen sensor is not integrated, and light is propagated to the subsequent stage, so that accurate detection can be performed in all hydrogen sensors.
(2) In the detection apparatus of FIG. 1, since the mode state of the light after passing through the preceding hydrogen sensor changes, the sensitivity of the subsequent hydrogen sensor is reduced. Since light is transmitted to the subsequent hydrogen sensor without passing through the hydrogen sensor, the sensitivity does not deteriorate even when a plurality of hydrogen sensors are used.

Reduction of detection time The above-described penetrating hydrogen sensor or reflective hydrogen sensor can be used in a normal atmosphere, for example, in the air or at room temperature. Accordingly, the present inventor has found that the detection time can be further shortened by heating the hydrogen sensor.
FIG. 14 is a block diagram of an experimental apparatus corresponding to FIG.
The experimental apparatus illustrated in FIG. 14 includes an LED 120 that emits light having a wavelength of 850 nm, a gas chamber 108 that houses the penetrating hydrogen sensor 1, and an optical power meter such as an optical spectrum analyzer as the measuring apparatus 106.
Nitrogen gas or hydrogen gas is introduced into the introduction port of the gas chamber 108 from the nitrogen gas cylinder and its flow meter, or from the hydrogen gas cylinder and its flow meter, via a switching valve.
Hydrogen gas is a gas to be detected by the penetrating hydrogen sensor 1.
After the hydrogen gas introduced into the gas chamber 108 is discharged from the discharge port, the nitrogen gas is reduced in the gas chamber 108 for the next hydrogen detection, and is attached to or stored in the hydrogen storage metal 35 of the through hydrogen sensor 1. It is a reducing gas for reducing hydrogen that has been removed. As the reducing gas, other inert gases such as argon can be used in addition to nitrogen.

Heating conditions The hydrogen sensor was heated under the following conditions.
(1) Hydrogen sensor Metal 31, gold, film thickness 25nm
Dielectric 33, tantalum pentoxide (Ta ₂ O ₅ ), film thickness 60 nm
Hydrogen storage metal 35, palladium (Pd), film thickness 10 nm
(2) Heating conditions 600 ° C is heated for 1 hour in air or argon gas,
After heating, for example, after 15 minutes immersion in hydrogen,
Used as a hydrogen sensor for detection.

Experimental example (1)
FIG. 15 is a characteristic diagram showing the light intensity of the hydrogen sensor with respect to hydrogen when the hydrogen sensor is heated in air.
FIG. 16 is a real-time optical loss response characteristic diagram when the hydrogen storage metal 35, palladium (Pd), and a film thickness of 3 nm are used as an unheated hydrogen sensor.
The response time when heated is 8 seconds, and the response time of the non-heated hydrogen sensor is shorter than 15 seconds even when the palladium film thickness is 3 nm.

Experimental example (2)
FIG. 17 is a real-time optical loss response characteristic diagram when the hydrogen sensor is heated with argon.
FIG. 17 shows that the response time is shortened to 9 seconds even when heated with argon.

As described above, it can be understood that the response time can be further shortened by heating the hydrogen sensor in advance even if the atmosphere is air containing oxygen or an argon gas atmosphere not containing oxygen.
The reason is presumed that, by heating the hydrogen sensor, the surface state of the hydrogen storage metal 35 constituting the hydrogen sensor, for example, palladium (Pd) is changed, and the hydrogen absorption performance is enhanced.

  As described above, in the detection apparatus 100 illustrated in FIG. 1, in order to further improve the response speed, it is preferable that the penetration type hydrogen sensor 1 has the above-described configuration and the hydrogen sensor is heated in advance and used.

  As a hydrogen sensor for improving the response speed by the heat treatment described above, it can be applied to the reflective hydrogen sensor 3 with reference to FIG. 10 and the detection device 300 using the reflective hydrogen sensor 3.

  According to the present invention, it is possible to provide various gas sensors using a surface plasmon resonance and a detection device using the gas sensor, not only in the above-described embodiment, but also having a hetero-core structure.

1, 3 ... Hydrogen sensor,
DESCRIPTION OF SYMBOLS 10 ... 1st optical fiber, 11 ... 1st core, 13 ... 1st clad,
20 ... second optical fiber, 21 ... second core, 23 ... second cladding,
31, 71 ... Metals (noble metals) that excite surface plasmon resonance,
33, 72... Dielectric that adjusts the dielectric function of the film containing the hydrogen storage metal,
35, 73 ... hydrogen storage metal,
100, 200, 300 ... hydrogen detector,
DESCRIPTION OF SYMBOLS 102 ... Light emitting element, 104 ... Light receiving element, 106 ... Measuring apparatus 202, 302 ... Measuring apparatus (OTDR)

Claims (14)

A first optical fiber of a single mode having a first core and a first cladding having a first cladding formed on an outer periphery of the first core;
A multimode second optical fiber having a second core having a diameter larger than that of the first core and a second cladding formed on an outer periphery of the second core;
A multimode third optical fiber having the same structure and dimensions as the second optical fiber, and having a third core and a third cladding formed on the outer periphery of the third core;
Both end faces of the first optical fiber are opposed to the second optical fiber and the third optical fiber, respectively, and respective tips of the first core are in the second core and the third core. Is inserted and fused, and constitutes a hetero-core portion in which propagating light from the second optical fiber leaks to the outside of the first optical fiber,
On the outer periphery of the first cladding of the first optical fiber, including the heterocore portion,
A metal film that couples evanescent waves with surface plasmon resonance or localized surface plasmon resonance to cause a change in resonance wavelength condition;
A dielectric film formed on the outer periphery of the metal film;
A film of hydrogen storage metal formed on the outer periphery of the dielectric film, the dielectric function and the refractive index profile of which changes when it contains hydrogen, and
The dielectric film plays a role of adjusting a dielectric function of the hydrogen storage metal film.
Hydrogen sensor. A first optical fiber of a single mode having a first core and a first cladding having a first cladding formed on an outer periphery of the first core;
A multimode second optical fiber having a second core having a diameter larger than that of the first core and a second cladding formed on an outer periphery of the second core;
Have
One end face of the first optical fiber is opposed to the second optical fiber, and a tip end of one end face of the first core is inserted into the second core and fused, and the second optical fiber is Is configured to form a hetero-core portion that leaks to the outside of the first optical fiber,
A reflecting portion is provided on the other end face of the first optical fiber;
Including the hetero-core portion, on the outer periphery of the first cladding of the first optical fiber,
A metal film that couples evanescent waves with surface plasmon resonance or localized surface plasmon resonance to cause a change in resonance wavelength condition;
A dielectric film formed on the outer periphery of the metal film;
A film of hydrogen storage metal formed on the outer periphery of the dielectric film, the dielectric function and the refractive index profile of which changes when it contains hydrogen, and
The dielectric film plays a role of adjusting a dielectric function of the hydrogen storage metal film.
Hydrogen sensor. The reflecting portion is formed by laminating a second metal film, a second dielectric film, and a second hydrogen storage metal film on the other end face of the first optical fiber.
The hydrogen sensor according to claim 2. The thickness of the dielectric film is formed such that the influence of the evanescent wave in the metal film exerts on the hydrogen storage metal film.
The hydrogen sensor according to claim 1. The thickness of the hydrogen storage metal film is defined according to detection sensitivity or responsiveness.
The hydrogen sensor according to claim 1. The metal is gold;
The dielectric is tantalum pentoxide;
The hydrogen storage metal is palladium.
The hydrogen sensor according to claim 1. The gold film has a thickness of 10 to 50 nm,
The tantalum pentoxide film has a thickness of 50 to 70 nm,
The palladium film has a thickness of 2 to 10 nm.
The hydrogen sensor according to claim 6. The diameter of the first core of the first optical fiber is 3 μm, the outer diameter of the first cladding is 125 μm,
The diameter of the second core of the second optical fiber is 50 μm, and the outer diameter of the second cladding is 125 μm;
The diameter of the third core of the third optical fiber is 50 μm, and the outer diameter of the third cladding is 125 μm.
The hydrogen sensor according to claim 1. The diameter of the first core of the first optical fiber is 3 μm, the outer diameter of the first cladding is 125 μm,
A diameter of the second core of the second optical fiber is 50 μm, and an outer diameter of the second cladding is 125 μm;
The hydrogen sensor according to claim 2, 3, 4 to 7. Including at least one hydrogen sensor according to claim 1,
A light emitting element that makes light of a predetermined wavelength incident from one of the second optical fibers connected to both ends of the first optical fiber;
A light receiving element for detecting light emitted from the other of the third optical fibers;
Detecting means for detecting hydrogen based on a detection signal of the light receiving element;
Hydrogen detector. At least one hydrogen sensor according to any one of claims 2, 3, 4 to 7, 9;
A light intensity distribution measuring device for detecting hydrogen by making light incident on the second optical fiber and measuring the position and intensity of reflected or backscattered light; and
A fourth optical fiber connected to the light intensity distribution measuring device;
A branch coupler connected to a predetermined position of the fourth optical fiber;
A fifth optical fiber, one connected to the branch coupler and the other connected to the second optical fiber of the hydrogen sensor;
Have
The light intensity distribution measuring device makes pulse light incident on the fourth optical fiber, and detects hydrogen detected by the hydrogen sensor based on reflected light from the hydrogen sensor.
Hydrogen detector. The fourth optical fiber is a multimode optical fiber;
The fifth optical fiber is a multimode optical fiber;
The hydrogen detection apparatus according to claim 11. The hydrogen sensor is heated in advance and used.
The detection device according to claim 10. A hydrogen detection method using the detection device according to claim 10 ,
The hydrogen sensor is heated in advance and used.
Hydrogen detection method.

Images