JP6308860B2 - Transport system - Google Patents

Description

  The present invention relates to a conveyance system using a linear motor.

  Conventionally, a conveyance system using a linear motor has been used as a conveyance system in a machine tool, an inspection apparatus, a semiconductor manufacturing apparatus, or the like. As the linear motor used in the transport system, a moving magnet type (moving element) is provided with a magnet, and a coil for generating a moving magnetic field with respect to the moving part magnet is provided in the fixing part (stator). MM type) linear motors are known. On the contrary, a moving coil type (MC type) linear motor in which a magnet is provided in a fixed part and a coil is provided in a movable part is also known.

  The moving magnet type linear motor has a fixed scale provided with a scale in which position information is recorded, a movable part to which the magnet is attached, a position detection part for reading the scale, and a coil for generating a moving magnetic field with respect to the magnet. Part.

  Patent Document 1 describes a conveyance system in which the fixed portion of the linear motor configured as described above is made a unit module that is independent per unit length, and a plurality of the unit modules are connected to make the length longer. ing. Further, Patent Document 1 describes that at least one of the unit modules of the fixed portion can be operated such as horizontal turning and horizontal translation.

JP 2004-15894 A

  However, in the case of the transport system described in Patent Document 1, the drive motor for linear turning and the linear motor for turning the fixed part that enables horizontal turning are driven and controlled using the same drive control unit. Here, the drive motor for horizontal turning is a motor that can be driven with low torque by attaching a speed reduction mechanism to the rotary shaft for rotational drive. On the other hand, a linear motor is a motor that requires high torque to drive a movable part directly by passing a drive current through a coil attached to a fixed part.

  In order to drive and control motors having greatly different characteristics with the same drive control unit, it is necessary to limit the driving of either motor such as acceleration or speed.

  In addition, since the servo parameter for performing drive control differs depending on the motor to be driven, the control mechanism becomes complicated. For example, there is a problem that it is necessary to provide a function for switching servo parameters in accordance with the motor to be driven.

  In order to solve the problem by using the same drive control unit for driving control of motors having different characteristics, it is easy to provide a drive control unit for each motor, but the cost increases. On the other hand, in a transfer system using a linear motor, a motor having different characteristics from that of the linear motor is required to change the moving direction of the movable part. In such a transport system using motors with different characteristics, if the number of drive control units used for drive control can be reduced regardless of the type of motor, the cost required for constructing the transport system can be reduced. Connected.

  Accordingly, the present invention provides a transport system that uses a moving magnet type linear motor and can change the moving direction of the movable part without increasing the cost due to an increase in the number of installed drive control units. The purpose is to provide.

  In order to achieve the above object, a transport system according to an aspect of the present invention is a transport system using a moving magnet type linear motor, and includes a plurality of first fixed portions having coils that drive a movable portion including a magnet. A movable second fixed portion having a coil for driving the movable portion; a first electrode portion provided in the first fixed portion; and a second fixed portion provided in the second fixed portion, A second electrode portion connected to the coil of the second fixing portion and connectable to the first electrode portion when the second fixing portion stops at a position facing the first fixing portion; A drive control unit capable of supplying a drive current to the coil of the first fixed unit, wherein the drive control unit is connected to the first electrode unit and the second electrode unit connected to each other. Driving current to the coil of the second fixed portion Characterized in that it is a possible feed.

  According to the present invention, in a transfer system using a moving magnet type linear motor, the transfer system capable of changing the moving direction of the movable part without increasing the cost due to an increase in the number of drive control units installed. Can be realized.

It is the schematic which shows the moving magnet type linear motor in the conveyance system by 1st Embodiment of this invention. It is the schematic which shows the structure of the conveyance system by 1st Embodiment of this invention. It is a block diagram which shows the control structure of the conveyance system by 1st Embodiment of this invention. It is the schematic (the 1) which shows the connection of the coil in the conveyance system by 1st Embodiment of this invention. It is the schematic (the 2) which shows the connection of the coil in the conveyance system by 1st Embodiment of this invention. It is a schematic diagram which shows the structure of the electrode part in the conveyance system by 1st Embodiment of this invention. It is the schematic which shows the structure of the conveyance system by 2nd Embodiment of this invention. It is a block diagram which shows the control structure of the conveyance system by 2nd Embodiment of this invention. It is the schematic which shows the connection of the coil in the conveyance system by 2nd Embodiment of this invention. It is a top view which shows the conveyance system which has the fixing | fixed part horizontally swiveled by a rotation mechanism. It is a schematic diagram which shows an example of the braking mechanism which brakes the movable part on the movable fixed part.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings.

  The transport system according to the present embodiment uses a moving magnet type linear motor. First, a basic configuration of a moving magnet type linear motor in the transport system according to the present embodiment will be described with reference to FIG. FIG. 1 is a schematic view showing a linear motor in the transport system according to the present embodiment, FIG. 1 (a) is a side view of the linear motor, FIG. 1 (b) is a top view of the linear motor, and FIG. It is a front view of a motor.

  As shown in FIG. 1, a moving magnet type linear motor includes a movable part (mover) 1 having a magnet 6 and a fixed part (fixed) having a coil 5 that generates a moving magnetic field with respect to the magnet 6 of the movable part 1. Child) 2. A scale 3 on which position information is recorded along the moving direction is provided at the lower end of the side portion of the movable portion 1. Further, the fixed unit 2 is provided with a position detection unit 4 that reads the scale 3 of the movable unit 1 and acquires position information of the movable unit 1 on the lower side of the movable unit 1 so as to face the scale 3. In FIG. 1, the moving direction of the movable part 1 is the x direction, the width direction of the movable part 1 is the y direction, and the vertical direction perpendicular to the x direction and the y direction is the z direction.

  The fixed part 2 has two guide parts 2a provided in parallel. In each of the insides of the two guide portions 2a, coils of U phase, V phase, and W phase are repeatedly provided as coils 5 along the moving direction of the movable portion 1. On the fixed part 2, the movable part 1 is movable along the guide part 2a.

  A magnet 6 is provided below the movable portion 1 so as to be sandwiched between coils 5 provided inside the guide portion 2a of the fixed portion 2. The magnet 6 is composed of a plurality of permanent magnets arranged along the moving direction of the movable part 1. The plurality of permanent magnets in the magnet 6 are arranged so that different polarities appear alternately on both sides of the fixed portion 2 facing the coil 5.

  In the linear motor, U-phase, V-phase, and W-phase alternating currents are respectively supplied as drive currents to the U-phase, V-phase, and W-phase coils in the coil 5 of the fixed portion 2. Thereby, a moving magnetic field with respect to the magnet 6 of the movable part 1 is generated in the coil 5. Thus, the movable part 1 on the fixed part 2 is driven by the moving magnetic field generated by the coil 5 and moves linearly along the guide part 2 a of the fixed part 2.

  FIG. 2 is a schematic diagram showing a configuration of a transport system according to the present embodiment using a moving magnet type linear motor having the structure shown in FIG. In FIG. 2, 101 is a movable part and has the same configuration as the movable part 1 shown in FIG. Reference numerals 201 to 203 denote fixing portions, which have the same configuration as the fixing portion 2 shown in FIG. The fixing unit 203 is further configured to be horizontally movable on a shift unit 1001 described later.

  The movable part 101 has a scale 3 and a magnet 6 as in the movable part 1 shown in FIG.

  The fixing parts 201 to 203 respectively have coils 501 to 503 corresponding to the coils 5 corresponding to the configuration of the fixing part 2 shown in FIG. Moreover, the fixing | fixed part 201-203 has the position detection part 4 similarly to the fixing | fixed part 2 shown in FIG.

  In the area where the conveyance system according to the present embodiment is installed, fixing parts 201 and 202 whose positions are fixed are installed. The fixed parts 201 and 202 are installed side by side so that the moving directions of the movable part 101 on the fixed parts 201 and 202 are parallel to each other. In FIG. 2, the moving direction of the movable part 101 in the fixed parts 201 to 203 is the x direction, and the arrangement direction of the fixed parts 201 and 202 orthogonal to the x direction is the y direction.

  In addition, a shift unit 1001 that horizontally translates the fixing unit 203 in the y direction is installed on one end side of the fixing units 201 and 202 in the x direction. On the shift unit 1001, a fixed unit 203 having the moving direction of the movable unit 101 as the x direction is movably mounted, similar to the fixed units 201 and 202.

  The fixing unit 203 on the shift unit 1001 is configured to be horizontally movable in the y direction between the one end side of the fixing unit 201 and the one end side of the fixing unit 202 by the shift unit 1001. In addition, the fixing unit 203 that translates horizontally on the shift unit 1001 stops at a position facing one end of the fixing unit 201 and can stop at a position facing one end of the fixing unit 202. ing. The distance between the fixed portion 203 and the fixed portion 201 or the fixed portion 203 when stopped at the facing position is, for example, a little narrower than the width of one coil of each phase constituting the coils 501 to 503. ing. Thus, when the fixing portion 203 stops at a position facing the fixing portion 201 or one end of the fixing portion 203, the coils of the respective phases of the fixing portions facing each other are arranged at a substantially constant period. For this reason, the movable part 101 can smoothly transfer between the fixed part 203 and the fixed part 201 or the fixed part 202. The shift unit 1001 is not particularly limited in its configuration, and for example, a linear guide combining a known rotary motor and a ball screw can be used.

  A shift unit drive control unit 1002 for supplying a drive current to the shift unit 1001 and controlling the parallel movement of the fixed unit 203 on the shift unit 1001 is connected to the shift unit 1001. The shift unit drive control unit 1002 is connected to a CPU unit 8 that controls the overall operation of the transport system. The shift unit drive control unit 1002 supplies a drive current to the shift unit 1001 in response to a command from the CPU unit 8.

  The shift unit 1001 incorporates a position detection unit (not shown) that acquires position information of the fixed unit 203 on the shift unit 1001. The CPU unit 8 can control the parallel movement of the fixed unit 203 by the shift unit 1001 based on the position information of the fixed unit 203 acquired by the position detection unit.

  A drive control unit 71 capable of outputting a drive current for generating a moving magnetic field and supplying the coil 501 is connected to the coil 501 of the fixed unit 201. The fixing unit 201 is provided with the electrode unit 30 connected to the drive control unit 71. The electrode unit 30 is provided at an end of the fixed unit 201 that faces the shift unit 1001.

  In addition, a drive control unit 72 that can output a drive current for generating a moving magnetic field and supply the coil 502 to the coil 502 is connected to the coil 502 of the fixed unit 202. In addition, the fixed portion 202 is provided with the electrode portion 31 connected to the drive control portion 72. The electrode unit 31 is provided at the end of the fixed unit 202 on the side facing the shift unit 1001.

  In addition, the fixed portion 203 on the shift portion 1001 is provided with an electrode portion 32 connected to the coil 503. The electrode part 32 is provided at an end of the fixing part 203 on the side facing the fixing parts 201 and 202.

  The electrode part 32 of the fixing part 203 is configured to be connected to the electrode part 30 of the fixing part 201 when the fixing part 203 stops at a position facing one end of the fixing part 201. When the electrode unit 32 is connected to the electrode unit 30, the drive control unit 71 can supply a drive current for generating a moving magnetic field to the coil 503 of the fixed unit 203 on the shift unit 1001.

  Further, the electrode portion 32 of the fixing portion 203 on the shift portion 1001 is configured to be connected to the electrode portion 31 of the fixing portion 202 when the fixing portion 203 stops at a position facing one end of the fixing portion 202. ing. When the electrode unit 32 is connected to the electrode unit 31, the drive control unit 72 can supply a drive current for generating a moving magnetic field to the coil 503 of the fixed unit 203 on the shift unit 1001.

  In the fixing part 203, the electrode part 32 is provided only in one place. For this reason, the fixing portion 203 does not have a complicated structure for the electrode portion 32, and has a simple structure.

  A CPU unit 8 is connected to each of the drive control units 71 and 72. The drive control units 71 and 72 supply drive currents to the coil 501 of the fixed unit 201, the coil 502 of the fixed unit 202, and the coil 503 of the fixed unit 203 in accordance with commands from the CPU unit 8, respectively. Yes.

  The drive control unit 71 is connected to position detection units 4 and 4 arranged for the respective fixed units 201 and 203. The position information of the movable part 101 on the fixed parts 201 and 203 can be read by these position detection parts 4 and 4. The drive control unit 72 is connected to position detection units 4 and 4 arranged for the respective fixed units 202 and 203. The position information of the movable part 101 on the fixed parts 202 and 203 can be read by these position detection parts 4 and 4.

  As for the fixing unit 203, there are a position detecting unit 4 for the fixing unit 203 stopped facing one end of the fixing unit 201 and a position detecting unit 4 for the fixing unit 203 stopped facing one end of the fixing unit 202. Each is arranged. The former position detector 4 is connected to the drive controller 71, and the latter position detector 4 is connected to the drive controller 72.

  A CPU (not shown) that stores various control programs executed by the CPU unit 8 is connected to the CPU unit 8 that functions as a control unit. The CPU unit 8 is connected to a RAM (not shown) that temporarily stores data being processed by the CPU unit 8 and input data. The operation of each unit in the transport system according to the present embodiment is controlled by the CPU unit 8.

  FIG. 3 is a block diagram for explaining the control of the transport system according to the present embodiment. The same components as those in the configuration diagram of FIG.

  As illustrated in FIG. 3, position information of the movable unit 101 on the fixed units 201 to 203 is acquired by the position detection unit 4 provided for each of the fixed units 201 to 203. The acquired position information of the movable unit 101 is sent to the CPU unit 8 via the drive control unit 71 or the drive control unit 72 to which the position detection unit 4 that acquired the position information is connected.

  The CPU unit 8 controls the drive control units 71 and 72 to supply a drive current to the coils 501 and 502 of the fixed units 201 and 202 according to the position information acquired by the position detection unit 4. In this way, the CPU unit 8 controls the generation of the moving magnetic field by the coils 501 and 502 of the fixed units 201 and 202 and controls the driving of the movable unit 101 on the fixed units 201 and 202. The drive control of the movable unit 101 on the fixed unit 203 that can move on the shift unit 1001 will be described later.

  The shift unit 1001 is driven by supplying a drive current from the shift unit drive control unit 1002 to the shift unit 1001 in accordance with a command from the CPU unit 8. Position information of the fixed unit 203 on the shift unit 1001 is acquired by a position detection unit (not shown) built in the shift unit 1001. The acquired position information of the fixing unit 203 is sent to the CPU unit 8 via the shift unit drive control unit 1002. The CPU unit 8 controls the driving of the fixing unit 203 on the shift unit 1001 by controlling the supply of the driving current by the shift unit driving control unit 1002 according to the acquired positional information of the fixing unit 203.

  When the fixing unit 203 on the shift unit 1001 is stopped at a position facing the fixing unit 201, the electrode unit 32 of the fixing unit 203 is connected to the electrode unit 30 of the fixing unit 201. The coil 503 of the fixed unit 203 is connected to the drive control unit 71 together with the coil 501 of the fixed unit 201 by connecting the electrode unit 32 and the electrode unit 30. Thus, the drive current is supplied from the drive control unit 71 to the coil 503 of the fixed unit 203. Thereby, the movable part 101 on the fixed part 203 can be driven.

  Further, when the fixing portion 203 on the shift portion 1001 is stopped at a position facing the fixing portion 202, the electrode portion 32 of the fixing portion 203 is connected to the electrode portion 31 of the fixing portion 202. The coil 503 of the fixed unit 203 is connected to the drive control unit 72 together with the coil 502 of the fixed unit 202 by connecting the electrode unit 32 and the electrode unit 31. In this way, the drive current is supplied from the drive control unit 72 to the coil 503 of the fixed unit 203. Thereby, the movable part 101 on the fixed part 203 can be driven.

  The fixed portion 203 on the shift portion 1001 is driven by the shift portion 1001 in a state where the movable portion 101 is stopped on the fixed portion 203, and a stop position facing the fixed portion 201 and a stop position facing the fixed portion 202 are set. Translate horizontally between them. When the fixed part 203 is in a position that does not oppose any of the fixed parts 201 and 202, that is, when the fixed part 203 is horizontally translated on the shift part 1001, the movable part 101 is stopped. For this reason, it is not necessary to supply a drive current to the coil 503 of the fixed unit 203, and a drive control unit is not necessary for the fixed unit 203 being moved.

  4 and 5 are schematic views showing connection of coils in the transport system according to the present embodiment, respectively. The same components as those in the configuration diagram of FIG. FIG. 4 shows the case where the coils are connected in series, while FIG. 5 shows the case where the coils are connected in parallel.

  FIG. 4 shows a state in which the coil 501 of the fixed part 201 and the coil 503 of the fixed part 203 are connected in series by connecting the electrode part 30 and the electrode part 32.

  As illustrated in FIG. 4, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 501 of the fixed unit 201 is connected to the drive control unit 71 by wiring. In addition, the other terminal of each of the U-phase, V-phase, and W-phase coils in the coil 501 is Y-connected by wiring. The electrode unit 30 is provided on the wiring on the Y connection side.

  In a state where the electrode unit 32 is not connected to the electrode unit 30, the U phase, V phase, and W phase coils in the Y-connected coil 501 are respectively supplied to the U phase as drive current by the drive control unit 71. V-phase and W-phase alternating currents are supplied.

  On the other hand, the coil portion 503 of the fixed portion 203 is provided with an electrode portion 32 on one terminal side of the U-phase, V-phase, and W-phase coils. In addition, the other terminal of each of the U-phase, V-phase, and W-phase coils in the coil 503 is Y-connected by wiring.

  In a state where the electrode unit 32 is connected to the electrode unit 30, the other terminals of the U-phase, V-phase, and W-phase coils of the coil 501 are connected to the U-phase, V-phase, and W-phase of the coil 503. Is connected to one terminal of each coil. Thus, the coil 501 and the coil 503 are connected in series, and the coils of the respective phases are connected to the drive control unit 71 in series. The U-phase, V-phase, and W-phase coils in the coils 501 and 503 connected in series have U-phase, V-phase, and W-phase AC currents in phase as drive currents by the drive control unit 71, respectively. Supplied.

  In addition, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 502 of the fixed unit 202 is connected to the drive control unit 72 by wiring. In addition, the other terminal of each of the U-phase, V-phase, and W-phase coils in the coil 502 is Y-connected by wiring. The electrode part 31 is provided on the wiring on the Y connection side.

  In a state where the electrode unit 32 is not connected to the electrode unit 31, the U-phase, V-phase, and W-phase coils in the Y-connected coil 502 are respectively supplied as drive currents by the drive control unit 72 to the U-phase, V-phase and W-phase alternating currents are supplied.

  In a state where the electrode unit 32 is connected to the electrode unit 31, the other terminals of the U-phase, V-phase, and W-phase coils of the coil 502 are connected to the U-phase, V-phase, and W-phase of the coil 503. Is connected to one terminal of each coil. Thus, the coil 502 and the coil 503 are connected in series, and the coils of the respective phases are connected to the drive control unit 72 in series. The U-phase, V-phase, and W-phase coils of the coils 502, 503 connected in series have U-phase, V-phase, and W-phase AC currents in the same phase as drive currents by the drive control unit 72, respectively. Supplied.

  As described above, when the electrode part 32 is connected to the electrode part 30 or the electrode part 31, the coil 503 and the coil 501 or the coil 502 are connected in series. When the coil 503 is not connected, the coils of the U phase, V phase, and W phase are Y-connected at the electrode portions 30 and 31.

  On the other hand, FIG. 5 shows a state in which the coil 501 of the fixed part 201 and the coil 503 of the fixed part 203 are connected in parallel by connecting the electrode part 36 and the electrode part 32. In FIG. 5, the fixed portion 201 is provided with an electrode portion 36 instead of the electrode portion 30, and the fixed portion 203 is provided with an electrode portion 37 instead of the electrode portion 31.

  As shown in FIG. 5, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 501 of the fixed unit 201 is connected to the drive control unit 71 by wiring. In addition, the other terminal of each of the U-phase, V-phase, and W-phase coils in the coil 501 is Y-connected by wiring. The electrode unit 36 is provided on a wiring that connects one terminal of the coils of each phase of the U phase, the V phase, and the W phase and the drive control unit 71.

  In a state where the electrode unit 32 is not connected to the electrode unit 36, the drive control unit 71 applies U phase, U phase, V phase, and W phase coils in the Y-connected coil 501 as drive currents, respectively. V-phase and W-phase alternating currents are supplied.

  On the other hand, the coil portion 503 of the fixed portion 203 is provided with an electrode portion 32 on one terminal side of the U-phase, V-phase, and W-phase coils. In addition, the other terminal of each of the U-phase, V-phase, and W-phase coils in the coil 503 is Y-connected by wiring.

  In a state where the electrode part 32 is connected to the electrode part 36, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 503 is connected to each of the U-phase, V-phase, and W-phase in the coil 501. Are respectively branched and connected to the wiring for connecting the coil and the drive control unit 71. In this way, the coil 501 and the coil 503 are connected in parallel, and the coils of the respective phases are connected in parallel to the drive control unit 71. The U-phase, V-phase, and W-phase coils in the coils 501 and 503 connected in parallel have U-phase, V-phase, and W-phase AC currents in the same phase as drive currents by the drive control unit 71, respectively. Supplied.

  In addition, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 502 of the fixed unit 202 is connected to the drive control unit 72 by wiring. In addition, the other terminal of each of the U-phase, V-phase, and W-phase coils in the coil 502 is Y-connected by wiring. The electrode unit 37 is provided on a wiring that connects one terminal of the coils of each phase of the U phase, the V phase, and the W phase and the drive control unit 72.

  In a state in which the electrode unit 32 is not connected to the electrode unit 37, the U-phase, V-phase, and W-phase coils in the Y-connected coil 502 are respectively supplied as drive currents by the drive control unit 72 to the U-phase, V-phase and W-phase alternating currents are supplied.

  In a state where the electrode unit 32 is connected to the electrode unit 37, one terminal of each of the U-phase, V-phase, and W-phase coils of the coil 503 is connected to each of the U-phase, V-phase, and W-phase of the coil 502. Are respectively branched and connected to wirings connecting the coils and the drive control unit 72. In this way, the coil 502 and the coil 503 are connected in parallel, and the coils of the respective phases are connected in parallel to the drive control unit 72. The U-phase, V-phase, and W-phase coils in the coils 502, 503 connected in parallel have U-phase, V-phase, and W-phase AC currents in the same phase as drive currents by the drive control unit 72, respectively. Supplied.

  As described above, the electrode part 32 is connected to the electrode part 36 or the electrode part 37, whereby the coil 503 and the coil 501 or the coil 502 are connected in parallel. When the coil 503 is not connected, the U-phase, V-phase, and W-phase coils Y-connected are connected to the drive control units 71 and 72 through the electrode units 30 and 31.

  The coil 503 may be connected in series to the coil 501 or the coil 502 as shown in FIG. 4, or may be connected in parallel as shown in FIG. However, from the viewpoint of supplying a driving current to each coil in the same manner and ensuring more stable driving of the movable portion 101, it is preferable that the coils are connected in series in consideration of the impedance of the coil.

  FIG. 6 is a schematic diagram showing the structure of the electrode part 30 of the fixing part 201 and the electrode part 32 of the fixing part 203. 6 (a) and 6 (c) are side views, and FIG. 6 (b) and FIG. 6 (d) are top views, respectively. FIGS. 6A and 6B are diagrams illustrating a state in which the fixing portion 203 is moving from the fixing portion 202 side to the fixing portion 201 side. FIGS. 6C and 6D are views showing a state where the fixing portion 203 is stopped at a position facing the fixing portion 201. 6, similarly to FIG. 2, the moving direction of the movable portion 101 in the fixed portions 201 to 203 is the x direction, and the arrangement direction of the fixed portions 201 and 202 orthogonal to the x direction is the y direction. . Moreover, in each figure of FIG. 6, let the up-down direction orthogonal to x direction and y direction be z direction. 6 shows the structure of the electrode part 30 and the electrode part 32, the electrode part 31, 36, 37 can also adopt the same structure as the electrode part 30.

  The electrode parts 30 and 32 are attached at positions where they are in contact with each other at the lower part of the fixing parts 201 and 203.

  As shown in FIG. 6, the electrode unit 30 is provided with a plurality of electrode terminals 30 a, 30 b, and 30 c that protrude toward the electrode unit 32 along the x direction that intersects the y direction that is the moving direction of the fixed unit 203. ing. The plurality of electrode terminals 30a, 30b, and 30c are provided side by side with a space in the vertical direction along the z direction, which is the protruding direction of the electrode terminal of the electrode portion 32 described below.

  The electrode terminals 30a, 30b, and 30c have different lengths. The order of length of the three electrode terminals 30a, 30b, 30c is such that the upper electrode terminal 30a is the shortest, the central electrode terminal 30b is the next shortest, and the lower electrode terminal 30c is the longest.

  Each of the electrode terminals 30a, 30b, and 30c is made of an elastic body such as a leaf spring, for example, and is elastically deformed by a load acting on the tip portion.

  The electrode terminals 30a, 30b, and 30c are respectively connected to wirings connected to the coils of each phase in the coil 501. For example, the electrode terminal 30a is connected to a wiring connected to a U-phase coil and supplies a U-phase alternating current. The electrode terminal 30b is connected to a wiring connected to a V-phase coil and supplies a V-phase AC current. The electrode terminal 30c is connected to a wiring connected to a W-phase coil, and supplies a W-phase AC current.

  On the other hand, the electrode part 32 is provided on the fixed part 203 so as to be positioned above the electrode terminals 30a, 30b, 30c of the electrode part 30. The electrode part 32 is on the electrode terminal side of the electrode part 30 along the z direction intersecting both the y direction which is the moving direction of the fixed part 203 and the x direction which is the protruding direction of the electrode terminal of the electrode part 30. A plurality of electrode terminals 32a, 32b, and 32c are provided so as to protrude downward. The electrode terminals 32 a, 32 b, and 32 c are provided side by side along the x direction that is the protruding direction of the electrode terminal of the electrode unit 30.

  The electrode terminals 32a, 32b, and 32c have different lengths. The order of length of the three electrode terminals 32a, 32b, and 32c is as follows: the electrode terminal 32a closest to the electrode part 30 is the shortest, the center electrode terminal 32b is the next shortest, and the electrode terminal 32c farthest from the electrode part 30 is the longest. It has become.

  The electrode terminals 32a, 32b, and 32c are formed of rigid bodies that can bend and bend the electrode terminals 30a, 30b, and 30c, as will be described later. In addition, the lower ends of the electrode terminals 32a, 32b, and 32c have a tapered shape that becomes thinner toward the tip side.

  The electrode terminals 32 a, 32 b, and 32 c are connected to wirings that are connected to the coils of each phase in the coil 503. For example, the electrode terminal 32a is connected to a wiring connected to a U-phase coil and supplies a U-phase alternating current. The electrode terminal 32b is connected to a wiring connected to the V-phase coil and supplies a V-phase alternating current. The electrode terminal 32c is connected to a wiring connected to a W-phase coil and supplies a W-phase AC current.

  In addition, the position of the electrode terminal 32a in the x direction coincides with the position of the tip portion of the electrode terminal 30a in the x direction. The position of the electrode terminal 32b in the x direction coincides with the position in the x direction of the tip of the electrode terminal 30b that is not hidden by the electrode terminal 30a. The position of the electrode terminal 32c in the x direction coincides with the position in the x direction of the tip of the electrode terminal 30c that is not hidden by the electrode terminal 30b.

  The length of the electrode terminal 32a is such that the tip of the electrode terminal 30a can be bent downward by contacting the tip of the electrode terminal 30a. The length of the electrode terminal 32b is such that the tip of the electrode terminal 30b can be pushed and bent downward by contacting the tip of the electrode terminal 30b. The length of the electrode terminal 32c is such that the tip of the electrode terminal 30c can be bent downward by contacting the tip of the electrode terminal 30c.

  The electrode terminals 30a, 30b, and 30c and the electrode terminals 32a, 32b, and 32c correspond to each other according to the rank order, and the corresponding electrode terminals are connected to each other. That is, the electrode terminal 30a and the electrode terminal 32a are correspondingly connected to each other, the electrode terminal 30b and the electrode terminal 32b are correspondingly connected to each other, and the electrode terminal 30c and the electrode terminal 32c are correspondingly connected to each other. It is like that.

  The electrode part 30 and the electrode part 32 which have the said structure are connected as follows.

  When the fixed unit 203 moves on the shift unit 1001 along the y direction toward the fixed unit 201, the electrode unit 32 approaches the electrode unit 30 as shown in FIGS. 6 (a) and 6 (b). I will do it. When the fixing unit 203 stops at a position facing the fixing unit 201, the electrode unit 32 is connected to the electrode terminals 30a, 30b, and 30c of the electrode unit 30 as shown in FIGS. 6C and 6D. Stop at the top.

  At this time, the electrode terminal 32a rides on the electrode terminal 30a while being in contact with the side portion of the electrode terminal 30a slightly before the fixing portion 203 stops, and stops by bending the electrode terminal 30a downward. Further, the electrode terminal 32b rides on the electrode terminal 30b while abutting the side of the electrode terminal 30b slightly before the fixing portion 203 stops, and stops by bending the electrode terminal 30b downward. Also, the electrode terminal 32c rides on the electrode terminal 30c while abutting the side of the electrode terminal 30c slightly before the fixing portion 203 stops, and stops by pressing the electrode terminal 30c downward. At this time, since the lower ends of the electrode terminals 32a, 32b, and 32c have a tapered shape, they can smoothly run on the electrode terminals 30a, 30b, and 30c, respectively.

  Further, as described above, the electrode terminals 30a, 30b, and 30c have a length that increases in this order, and the electrode terminals 32a, 32b, and 32c have a length that increases in this order. Thus, since each electrode terminal has different length, the electrode terminal 32a does not contact | abut other electrode terminals other than the electrode terminal 30a. Further, the electrode terminal 32b does not come into contact with other electrode terminals other than the electrode terminal 30b. Further, the electrode terminal 32c does not come into contact with other electrode terminals other than the electrode terminal 30c.

  Thus, the electrode terminal 30a and the electrode terminal 32a are connected, the electrode terminal 30b and the electrode terminal 32b are connected, and the electrode terminal 30c and the electrode terminal 32c are connected according to the order of length. Thereby, the coil 501 and the coil 503 are connected. For example, by connecting the electrode terminal 30a and the electrode terminal 32a, the U-phase coil in the coil 501 and the U-phase coil in the coil 503 are connected in series or in parallel as described above. Further, by connecting the electrode terminal 30b and the electrode terminal 32b, the V-phase coil in the coil 501 and the V-phase coil in the coil 503 are connected in series or in parallel as described above. Further, by connecting electrode terminal 30c and electrode terminal 32c, the W-phase coil in coil 501 and the W-phase coil in coil 503 are connected in series or in parallel as described above.

  As described above, the electrode terminals 30a, 30b, and 30c that are pushed and bent by the electrode terminals 32a, 32b, and 32c, respectively, are made of an elastic body. Therefore, the electrode terminals 30a, 30b, and 30c are pressed against the electrode terminals 32a, 32b, and 32c by elastic force, respectively. Thereby, in this embodiment, the reliable contact between each electrode terminal can be ensured, without requiring a complicated structure.

  As described above, in the present embodiment, the electrode terminals 30a, 30b, and 30c of the electrode part 30 configured by an elastic body such as a spring come into contact with the electrode terminals 32a, 32b, and 32c of the electrode part 32, respectively. A drive current is supplied to the coil 503 of 203.

  In addition, by arranging the electrode terminals for supplying alternating current of each phase of the U phase, V phase and W phase as shown in the figure, the fixed portion 203 is in contact with the electrode terminals of other phases while moving. Without being done, it is configured to contact only at a position facing the fixing portions 201 and 202.

  Note that the structures of the electrode portions 30, 31, 36, and 37 and the electrode portion 32 are not limited to the structures described above, and various structures can be employed.

  In the transport system according to the present embodiment, the moving direction of the movable unit 101 can be changed by moving the fixed unit 203 on which the movable unit 101 is stopped moving on the shift unit 1001. Hereinafter, an example in which the movable unit 101 that has moved on the fixed unit 202 moves on the fixed unit 201 after passing through the fixed unit 203 that moves on the shift unit 1001 will be described.

  First, it is assumed that the fixing portion 203 stops at a position facing the fixing portion 202 and the electrode portion 32 is connected to the electrode portion 31. In this state, the drive control unit 72 supplies drive current to the coils 502 and 503 of the fixed units 202 and 203.

  In the above state, the movable unit 101 on the fixed unit 202 is driven by the drive control unit 72, moves on the fixed unit 202 toward the fixed unit 203 side, and then leaves the fixed unit 203 on the fixed unit 202. After moving in the direction, it is stopped at a predetermined position on the fixed portion 203. The position information of the moving movable unit 101 is acquired by the position detection units 4 and 4 provided for the fixed units 202 and 203, respectively, and sent to the CPU unit 8. The CPU unit 8 controls the supply of drive current by the drive control unit 72 based on the positional information of the movable unit 101 that is sent.

  Next, the shift unit drive control unit 1002 drives the shift unit 1001. As a result, the fixed portion 203 where the movable portion 101 is stopped moves horizontally from the position facing the fixed portion 202 toward the fixed portion 201, and stops at the position facing the fixed portion 201.

  When the fixing unit 203 stops at a position facing the fixing unit 201, the electrode unit 32 is connected to the electrode unit 30. In this state, the drive control unit 71 supplies drive current to the coils 501 and 503 of the fixed units 201 and 203.

  In the above state, the movable unit 101 on the fixed unit 203 is driven by the drive control unit 71, moves on the fixed unit 203 toward the fixed unit 201, and then moves on the fixed unit 201 away from the fixed unit 203. Move in the direction. The movable unit 101 on the fixed unit 201 moves on the fixed unit 201 in the direction opposite to the moving direction on the fixed unit 202. During this time, the position information of the moving movable unit 101 is acquired by the position detection units 4 and 4 provided for the fixed units 203 and 201, respectively, and sent to the CPU unit 8. The CPU unit 8 controls the supply of drive current by the drive control unit 71 based on the position information of the movable unit 101 that is sent.

  As described above, in the transport system according to the present embodiment, it is not necessary to provide a drive control unit independently from the drive control units 71 and 72 for the fixed unit 203 that moves on the shift unit 1001. Therefore, according to the present embodiment, the movable unit 101 can be driven by a drive control unit with a smaller number of installed units, and the movement of the movable unit 101 can be performed without an increase in cost due to an increase in the number of installed drive control units. A conveyance system capable of changing the direction can be realized.

  The coil 503 of the fixed unit 203 that moves on the shift unit 1001 is connected to the drive control unit 71 or the drive control unit 72 via the electrode unit 32 and the electrode unit 30 or the electrode unit 31 that are connected to each other. As described above, in the transport system according to the present embodiment, the drive control units 71 and 72 are switched via the electrode unit, so that the coil 503 of the fixed unit 203 provided with the moving mechanism is connected to the drive control units 71 and 72. An external cable is no longer required. For this reason, when installing the conveyance system by this embodiment, it is not necessary to perform the operation | work which lays the external cable connected to the fixing | fixed part 203 which moves on the shift part 1001. FIG. Further, naturally, a cable bear (registered trademark) for the external cable is also unnecessary.

  Thus, in the present embodiment, the number of drive control units that supply a drive current to the coil of the fixed unit can be reduced, and no external cable laying or cable track is required. Therefore, according to the present embodiment, in the transport system using the linear motor, it is possible to improve the degree of freedom of layout of each part such as the fixed part and the shift part, and to improve maintainability and reliability.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to the drawings. The same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted or simplified.

  FIG. 7 is a schematic diagram showing the configuration of the transport system according to the present embodiment. The same components as those in the configuration diagram of FIG. The transport system according to the present embodiment includes switching units 701 and 702. The switching unit 701 can switch to which of the coil 501 and the coil 503 the drive current of the drive control unit 71 is supplied. Similarly, the switching unit 702 can switch to which of the coil 502 and the coil 503 the drive current of the drive control unit 72 is supplied. When supplying a drive current to the coil 503, the electrode part 33 and the electrode part 35 are connected, or the electrode part 34 and the electrode part 35 are connected.

  As shown in FIG. 7, the drive control unit 71 can be connected to the coil 501 of the fixed unit 201 via the switching unit 701. In addition, the fixing unit 201 is provided with an electrode unit 33 that can be connected to the drive control unit 71 via the switching unit 701 instead of the electrode unit 30. The electrode portion 33 is provided at an end portion of the fixed portion 201 that faces the shift portion 1001.

  The switching unit 701 is configured to be able to switch the connection between the coil 501 and the drive control unit 71 and the connection between the electrode unit 33 and the drive control unit 71. The switching unit 701 is connected to the CPU unit 8 via the drive control unit 71. The CPU unit 8 can control switching of connection by the switching unit 701.

  In addition, a drive control unit 72 can be connected to the coil 502 of the fixed unit 202 via a switching unit 702. In addition, the fixing unit 202 is provided with an electrode unit 34 that can be connected to the drive control unit 72 via the switching unit 702 instead of the electrode unit 31. The electrode part 34 is provided at the end of the fixed part 202 on the side facing the shift part 1001.

  The switching unit 702 is configured to be able to switch the connection between the coil 502 and the drive control unit 72 and the connection between the electrode unit 34 and the drive control unit 72. The switching unit 702 is connected to the CPU unit 8 via the drive control unit 72. The CPU unit 8 can control switching of connection by the switching unit 702.

  In addition, the fixed portion 203 on the shift portion 1001 is provided with an electrode portion 35 connected to the coil 503 instead of the electrode portion 32. The electrode part 35 is provided at an end of the fixing part 203 on the side facing the fixing parts 201 and 202.

  The electrode part 35 of the fixing part 203 on the shift part 1001 is configured to be connected to the electrode part 33 of the fixing part 201 when the fixing part 203 stops at a position facing one end of the fixing part 201. . When the electrode unit 35 is connected to the electrode unit 33, the drive control unit 71 can supply a drive current to the coil 503 of the fixed unit 203 on the shift unit 1001 via the switching unit 701.

  Further, the electrode part 35 of the fixing part 203 on the shift part 1001 is configured to be connected to the electrode part 34 of the fixing part 202 when the fixing part 203 stops at a position facing one end of the fixing part 202. ing. When the electrode unit 35 is connected to the electrode unit 34, the drive control unit 72 can supply a drive current to the coil 503 of the fixed unit 203 on the shift unit 1001 via the switching unit 702.

  The switching units 701 and 702 switch the connection according to a switching signal from the CPU unit 8. Accordingly, the switching units 701 and 702 are configured to switch the supply destination of the drive current by the drive control units 71 and 72 to the coils 501 and 502 or the electrode units 33 and 34, respectively.

  FIG. 8 is a block diagram for explaining the control of the transport system according to the present embodiment. The same components as those in the block diagram of FIG. 7 and the block diagram of FIG.

  When the fixing unit 203 on the shift unit 1001 is stopped at a position facing the fixing unit 201, the electrode unit 35 of the fixing unit 203 and the electrode unit 33 of the fixing unit 201 are connected. The switching unit 701 switches the connection so that the electrode unit 33 and the drive control unit 71 are connected in response to the switching signal S <b> 1 from the CPU unit 8. In this way, the drive current is supplied from the drive control unit 71 to the coil 503 of the fixed unit 203 via the switching unit 701. Thereby, the movable part 101 on the fixed part 203 can be driven.

  When the CPU 8 acquires the position information of the fixed unit 203 by the position detector built in the shift unit 1001 and detects that the fixed unit 203 has stopped at a position facing the fixed unit 201, the CPU 8 outputs the switching signal S1. Output.

  Similarly, when the fixing portion 203 on the shift portion 1001 is stopped at a position facing the fixing portion 202, the electrode portion 35 of the fixing portion 203 and the electrode portion 34 of the fixing portion 202 are connected. The switching unit 702 switches the connection so that the electrode unit 34 and the drive control unit 72 are connected in response to the switching signal S <b> 2 from the CPU unit 8. Thus, the drive current is supplied from the drive control unit 72 to the coil 503 of the fixed unit 203 via the switching unit 702. Thereby, the movable part 101 on the fixed part 203 can be driven.

  When the CPU 8 acquires position information of the fixing unit 203 by the position detection unit built in the shift unit 1001 and detects that the fixing unit 203 stops at a position facing the fixing unit 202, the CPU 8 outputs the switching signal S2. Output.

  When the fixing unit 203 on the shift unit 1001 is moving, the switching unit 701 supplies the drive current from the drive control unit 71 to the coil 501 of the fixing unit 201 by controlling the switching signal S1. Similarly, the switching unit 702 supplies the drive current from the drive control unit 72 to the coil 502 of the fixed unit 202 by controlling the switching signal S2.

  FIG. 9 is a schematic view showing connection of coils in the transport system according to the present embodiment. The same components as those in the configuration diagram of FIG.

  As shown in FIG. 9, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 501 of the fixed unit 201 can be connected to the drive control unit 71 via a switching unit 701 by wiring. It has become. The other terminal of each of the U-phase, V-phase, and W-phase coils in the coil 501 of the fixed portion 201 is Y-connected by wiring. The electrode unit 33 can be connected to the drive control unit 71 via the switching unit 701.

  In a state where the electrode unit 35 is not connected to the electrode unit 33, the switching unit 701 connects the coils of the U phase, V phase, and W phase of the coil 501 to the drive control unit 71. As a result, the drive control unit 71 supplies the U-phase, V-phase, and W-phase AC currents to the U-phase, V-phase, and W-phase coils of the coil 501 as drive currents. .

  On the other hand, the coil portion 503 of the fixed portion 203 is provided with an electrode portion 35 on one terminal side of the U-phase, V-phase, and W-phase coils. Further, the other terminal of each of the U-phase, V-phase, and W-phase coils in the coil 503 is Y-connected by wiring.

  In a state where the electrode unit 35 is connected to the electrode unit 33, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 503 is connected to the drive control unit 71 by the switching unit 701. As a result, the drive control unit 71 supplies the AC currents of the U phase, V phase, and W phase to the U phase, V phase, and W phase coils of the coil 503, respectively. .

  In addition, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 502 of the fixed unit 202 can be connected to the drive control unit 72 via a switching unit 702 by wiring. The other terminals of the U-phase, V-phase, and W-phase coils are Y-connected by wiring. The electrode unit 34 can be connected to the drive control unit 72 via the switching unit 702.

  In a state where the electrode unit 35 is not connected to the electrode unit 34, the switching unit 702 connects the U phase, V phase, and W phase of the coil 502 to the drive control unit 72. As a result, the drive control unit 72 supplies the AC current of each phase of the U phase, V phase, and W phase to the U phase, V phase, and W phase coils of the coil 502 as the drive current. .

  In a state where the electrode unit 35 is connected to the electrode unit 34, one terminal of each of the U-phase, V-phase, and W-phase coils in the coil 503 is connected to the drive control unit 72 by the switching unit 702. As a result, the drive control unit 72 supplies the AC currents of the U phase, V phase, and W phase to the U phase, V phase, and W phase coils of the coil 503, respectively. .

  In addition, as a structure of the electrode parts 33 and 34 and the electrode part 35, the structure similar to the electrode parts 30 and 31 and the electrode part 32 which are respectively shown in FIG. 6 is employable.

  As described above, in this embodiment, the output of the drive control unit 71 is connected to the coil 501 or the coil 503 by controlling the switching unit 701. Similarly, the output of the drive control unit 72 is connected to the coil 502 or the coil 503 by controlling the switching unit 702. Which coil is connected is controlled by switching signals S1 and S2 output from the CPU unit 8 to the switching units 701 and 702, respectively. In addition, the electrode unit 35 is connected to the coil 503, and the electrode unit 35 is connected to each of the electrode units 33 and 34 so as to be connected to the switching units 701 and 702.

  Also in the transport system according to the present embodiment, the moving direction of the movable unit 101 is changed by moving the fixed unit 203 on which the movable unit 101 is stopped moving on the shift unit 1001 as in the transport system according to the first embodiment. can do. Hereinafter, an example in which the movable unit 101 that has moved on the fixed unit 202 moves on the fixed unit 201 after passing through the fixed unit 203 that moves on the shift unit 1001 will be described.

  First, it is assumed that the fixing portion 203 stops at a position facing the fixing portion 202 and the electrode portion 35 is connected to the electrode portion 34. In this state, the switching unit 702 switches the drive current supply destination by the drive control unit 72 to the coil 502 of the fixed unit 202. As a result, the drive current from the drive control unit 72 is supplied to the coil 502 of the fixed unit 202.

  In the above state, the movable unit 101 on the fixed unit 202 is driven by the drive control unit 72 and moves on the fixed unit 202 toward the fixed unit 203 side. The position information of the moving movable unit 101 is acquired by the position detection units 4 and 4 provided for the fixed units 202 and 203, respectively, and sent to the CPU unit 8. The CPU unit 8 controls the supply of the drive current by the drive control unit 72 and the switching of the drive current supply destination by the switching unit 702 based on the position information of the movable unit 101 that is sent.

  Subsequently, when the movable unit 101 moving on the fixed unit 202 starts to move from the fixed unit 202 to the fixed unit 203, the CPU 8 outputs a switching signal S2 to the switching unit 702 at an appropriate timing. The switching unit 702 switches the drive current supply destination by the drive control unit 72 from the coil 502 of the fixed unit 202 to the electrode unit 34 based on the switching signal S2. Thereby, the drive current by the drive control unit 72 is supplied to the coil 503 of the fixed unit 203 via the electrode units 34 and 35 connected to each other. Thus, the movable unit 101 that has started to move onto the fixed unit 203 is driven by the drive control unit 72 and moves on the fixed unit 203 from the fixed unit 202 in the direction from the fixed unit 202 to the fixed unit 203. It stops at a predetermined position on 203.

  Next, the shift unit drive control unit 1002 drives the shift unit 1001. As a result, the fixed portion 203 where the movable portion 101 is stopped moves horizontally from the position facing the fixed portion 202 toward the fixed portion 201, and stops at the position facing the fixed portion 201. At this time, when the fixing unit 203 starts to move, the CPU unit 8 outputs a switching signal S2 to the switching unit 702. The switching unit 702 switches the drive current supply destination of the drive control unit 72 from the electrode unit 34 to the coil 502 of the fixed unit 202 based on the switching signal S2.

  When the fixing unit 203 stops at a position facing the fixing unit 201, the electrode unit 35 is connected to the electrode unit 33. Then, the CPU unit 8 outputs a switching signal S1 to the switching unit 701. The switching unit 701 switches the drive current supply destination by the drive control unit 71 from the coil 501 of the fixed unit 201 to the electrode unit 33 based on the switching signal S1. Thereby, the drive current by the drive control unit 71 is supplied to the coil 503 of the fixed unit 203 via the electrode units 33 and 35 connected to each other. Thus, the movable part 101 on the fixed part 203 is driven by the drive control part 71 and moves on the fixed part 203 toward the fixed part 201 side. The position information of the moving movable unit 101 is acquired by the position detection units 4 and 4 provided for the fixed units 203 and 201, respectively, and sent to the CPU unit 8. The CPU unit 8 controls the drive current supply by the drive control unit 71 based on the position information of the movable unit 101 that is sent, and also controls the switching of the drive current supply destination by the switching unit 701.

  Subsequently, when the movable unit 101 moving on the fixed unit 203 starts to move from the fixed unit 203 to the fixed unit 201, the CPU unit 8 outputs a switching signal S1 to the switching unit 701 at an appropriate timing. The switching unit 701 switches the drive current supply destination by the drive control unit 71 from the electrode unit 33 to the coil 501 of the fixed unit 201 based on the switching signal S1. As a result, the drive current from the drive control unit 71 is supplied to the coil 501 of the fixed unit 201. Thus, the movable unit 101 that has started to move onto the fixed unit 201 is driven by the drive control unit 71, and moves on the fixed unit 201 from the fixed unit 203 in the direction from the fixed unit 203 to the fixed unit 201. The movable unit 101 on the fixed unit 201 moves on the fixed unit 201 in the direction opposite to the moving direction on the fixed unit 202.

  The present invention is not limited to the above embodiment, and various modifications can be made.

For example, in the above embodiment, the case where the fixed unit 203 is translated horizontally by the shift unit 1001 has been described, but the movement mode of the fixed unit 203 is not limited to this.
For example, instead of the shift unit 1001, a vertical movement mechanism that moves the fixed unit 203 in the vertical direction may be provided. In this case, the fixing portions 201 and 202 are installed vertically so as to face the fixing portion 203 at a stop position of the fixing portion 203 that moves vertically by the vertical movement mechanism.

  Further, instead of the shift unit 1001, a moving mechanism that moves the fixing unit 203 linearly or in a curve is used, and the fixing unit 203 moves between positions facing the fixing units 201 and 202 arranged in an arbitrary direction. You may make it do.

  Moreover, although the said embodiment demonstrated the case where fixed part 201,202 assumed that the position was fixed among fixed parts 201-203, and fixed part 203 was movable, the number of fixed parts is It is not limited to this. Depending on the transport path in the transport system and the like, the transport system can be configured such that some of the fixed sections can be moved in the same manner as described above.

  The present invention can also be applied to a transport system having a fixed portion that is horizontally swiveled by a rotating mechanism.

  FIG. 10 is a plan view showing a transport system having a fixing portion that is horizontally swiveled by a rotation mechanism. In FIG. 10, 111 is a movable part and 212 is a fixed part. Note that the fixing unit 212 includes fixing units 212T, 212A, 212B, and 212C. FIG. 10 shows a state in which the movable part 111 is rotating.

  In FIG. 10, among the plurality of fixed portions 212 that are cascaded, a specific fixed portion 212 </ b> T has a structure that can be turned horizontally in a plane. The mechanism for rotating the fixing portion 212T and turning it horizontally is not particularly limited, and a known rotating device is used. For example, a rotation shaft is attached to the lower center of the fixed portion 212T, and the rotation shaft is rotated by a drive motor.

  The other fixing portions 212A, 212B, and 212C are radially arranged around the fixing portion 212T that can be swiveled horizontally, and their positions are fixed.

  In the transport system shown in FIG. 10, first, the movable unit 111 moves on the fixed unit 212 from right to left in the drawing. Subsequently, when the movable part 111 that has moved completely gets on the fixed part 212T that can be turned horizontally, the movable part 111 is stopped.

  Next, in this state, the drive motor of the fixed unit 212T is driven by the drive control unit, and the fixed unit 212T is rotated. FIG. 10 shows a state during the rotation of the fixing portion 212T. After the fixing portion 212T is thus rotated by a predetermined angle, the fixing portion 212T is stopped at a position facing the fixing portion 212C, for example.

  Next, the movable unit 111 starts moving to the fixed unit 212C by driving the drive control unit, and moves from the horizontal turning fixed unit 212T to the fixed unit 212C.

  As described above, the present invention can also be applied to a conveyance system in which the fixed portion 212T rotates horizontally. In this case, similarly to the above-described embodiment, electrode portions that can be connected to each other can be provided on the fixing portions 212A, 212B, and 212C and the fixing portion 212T that are fixed in position. Accordingly, the drive current can be supplied also to the coil of the fixed portion 212T that rotates horizontally by the drive control unit that supplies the drive current to the coils of the fixed portions 212A, 212B, and 212C whose positions are fixed. Therefore, it is not necessary to separately provide a drive control unit that supplies a drive current to the coil of the fixed unit 212T.

  Furthermore, a brake mechanism may be provided that applies a brake so that the movable part on the fixed part does not move due to vibration or the like while the movable fixed part is moving. FIG. 11 is a schematic diagram showing the structure of the electrode part 30 of the fixed part 201 and the electrode part 32 of the fixed part 203 shown in FIG. 2, and shows an example of a braking mechanism that brakes the movable part. The same components as those in the configuration diagram of FIG. FIG. 11A and FIG. 11B are diagrams in which the fixing unit 203 illustrated in FIG. 2 is moving from the fixing unit 202 to 201. FIG. 11C and FIG. 11D are diagrams in which the fixing unit 203 illustrated in FIG. 2 is stopped at a position facing the fixing unit 201.

  The electrode portions 30 and 32 have the same structure as that described with reference to FIG. 6, and power is supplied to the coil of the fixed portion 203 when the electrode portion 30 is connected to the electrode portion 32. However, unlike FIG. 6, in the configuration shown in FIG. Furthermore, in the electrode part 32, the electrode part 38 is curved and arranged on the side of the electrodes 32a, 32b, 32c so as to be in contact with the electrodes 32a, 32b, 32c of each phase. One end of the electrode portion 38 is fixed to the electrode portion 32 with a support column. On the other hand, the other end portion on the electrode portion 30 side of the electrode portion 38 is not fixed and protrudes from the electrode portion 32 toward the electrode portion 30 side. Further, the electrode portion 38 has elasticity like a spring, and a coiled spring is built in a support portion fixed by the electrode portion 32. Thereby, in the state where the electrode part 32 is not connected to the electrode part 30, the electrode part 38 is configured to be always pressed against the electrodes 32a, 32b, 32c of each phase.

  While the fixed portion 203 is moving, the electrode portion 38 is in contact with the electrodes 32a, 32b, and 32c of each phase as described above. As a result, the electrodes 32a, 32b, and 32c of each phase are short-circuited, so that the regenerative brake is applied to the movable portion 101 on the fixed portion 203. With the regenerative brake acting in this way, it is possible to prevent the movable portion 101 from moving greatly even when an external force such as vibration is applied to the movable portion 101 on the fixed portion 203.

  A protruding portion 39 is fixed to the electrode portion 30 so as to face the end portion of the electrode portion 38 on the electrode portion 30 side. When the fixing portion 203 stops at the position opposite to the fixing portion 201, the protruding portion 39 pushes the end portion on the electrode portion 30 side of the electrode portion 38 so that the U, V, W phase electrodes 32a, 32b, 32c The electrode part 38 leaves | separates. As a result, the electrodes 32a, 32b, 32c of each phase are released from the short circuit state. The electrode unit 30 is connected to the electrode unit 32 and electric power is supplied to the coil 503 of the fixed unit 203, while the regenerative brake does not act on the movable unit 101 on the fixed unit 203. Thus, the movable part 101 is driven, and the movable part 101 moves from the fixed part 203 to the fixed part 201.

  The braking mechanism that brakes the movable portion 101 on the movable fixed portion 203 is not limited to the above-described mechanism. For example, in addition to the above, a brake is applied to the movable portion 101 using the static frictional force between the fixed portion 203 and the movable portion 101, or the cogging force generated when the coil core of the fixed portion 203 and the magnet of the movable portion 101 face each other. You may hang it. Moreover, a sliding part may be provided in the fixed part 203 and the movable part 101, and the movable part 101 on the fixed part 203 may be braked during the movement of the fixed part 203.

  In addition, a transport system according to the present invention is a transport system for transporting a workpiece to a work area of each device such as a machine tool that performs each work process on a workpiece that is a component in a manufacturing system for manufacturing a component such as an electronic device. Can be used as The apparatus for performing the work process may be any apparatus such as an apparatus for assembling parts to a workpiece and an apparatus for performing coating. Further, the manufactured parts are not limited to specific ones, and may be any parts.

  As described above, the work can be transported to the work area using the transport system according to the present invention, and the work process can be performed on the work transported to the work area to manufacture a part. As described above, in the transport system according to the present invention, the degree of freedom of layout of the fixed portion and the like is improved. Therefore, in the parts manufacturing system that employs the transport system according to the present invention for transporting workpieces, the layout of the apparatus that performs each work process can be performed with a high degree of freedom.

DESCRIPTION OF SYMBOLS 1,101 Movable part 2,201,202,203 Fixed part 3 Scale 4 Position detection part 5,501,502,503 Coil 6 Magnet 8 CPU part 30,31,32,33,34,35,36,37 Electrode part 71, 72 Drive control unit 701, 702 Switching unit 1001 Shift unit

Claims (9)

In a transfer system using a moving magnet type linear motor,
A plurality of first fixed parts having a coil for driving a movable part including a magnet;
A second fixed part having a coil for driving the movable part and movable;
A first electrode portion provided in the first fixing portion;
The first electrode provided at the second fixing portion, connected to the coil of the second fixing portion, and stopped when the second fixing portion is opposed to the first fixing portion. A second electrode part connectable to the part;
A drive control unit capable of supplying a drive current to the coil of the first fixed unit;
The drive control unit can supply a drive current to the coil of the second fixed unit through the first electrode unit and the second electrode unit connected to each other. system. The first electrode portion is connected to the coil of the first fixed portion;
The drive control unit supplies the drive current to the coil of the first fixed unit, and the second fixed unit via the first electrode unit and the second electrode unit connected to each other. The transport system according to claim 1, wherein the drive current can be supplied to the coil of a part.   The coil of the first fixed portion and the coil of the second fixed portion are connected in series by connecting the first electrode portion and the second electrode portion. The transport system according to claim 2. A switching unit capable of switching a supply destination of the drive current output from the drive control unit to the first electrode unit or the coil of the first fixed unit;
When the second fixed portion stops at a position facing the first fixed portion and the first electrode portion and the second electrode portion are connected, the first and second electrodes are connected to each other. And a controller that controls the switching unit so that the drive current is supplied to the coil of the second fixed unit via the electrode unit and the second electrode unit. Item 2. The transport system according to Item 1.   4. The transport according to claim 2, wherein the drive control unit supplies the drive current having the same phase to the coil of the first fixed unit and the coil of the second fixed unit. 5. system. The first electrode portion has a plurality of first electrode terminals protruding along a direction intersecting a moving direction of the second fixed portion,
The second electrode portion has a plurality of protrusions protruding toward the plurality of first electrode terminals along a direction intersecting both directions of the moving direction of the second fixed portion and the protruding direction of the first electrode terminal. Having a second electrode terminal;
The plurality of first electrode terminals are arranged side by side along the protruding direction of the second electrode terminal, the one closer to the second electrode portion is shorter,
The plurality of second electrode terminals are arranged side by side along the protruding direction of the first electrode terminal, the one closer to the first electrode portion is shorter,
Each of the plurality of second electrode terminals is in contact with the corresponding first electrode terminal when the second fixing portion stops at a position facing the first fixing portion. The conveyance system according to any one of claims 1 to 5.   7. The brake mechanism according to claim 1, further comprising a braking mechanism that is provided in the second fixing portion and brakes the movable portion of the second fixing portion when the second fixing portion moves. The conveyance system of Claim 1.   The transport system according to any one of claims 1 to 7, wherein the second electrode portion provided in the second fixing portion is provided at only one place. Using the conveyance system according to any one of claims 1 to 8, a workpiece as a part is conveyed to a work area,
A method of manufacturing a part, wherein a work process is performed on the workpiece conveyed to the work area.

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