JP6271198B2 - Isolator device - Google Patents

Description

  The present invention relates to an isolator for processing an object to be processed in an internal space isolated from the outside, and more particularly, to an isolator apparatus having a cleaning liquid supply means for washing away internal powder and dust after processing. Is.

  For example, in the case of an isolator that contains a harmful substance inside and performs processing, it is necessary to clean the inside after the processing is finished, so that cleaning liquid (washing water) can be supplied (patent) Reference 1 to Patent Document 3). After cleaning with such cleaning water, the water adhering to the inner surface of the isolator is wiped off with a cloth to complete the cleaning (see Patent Document 1).

JP 2001-149726 A Japanese Patent No. 4761497 JP 2012-7768 A

  Even when the moisture is wiped off after the inside of the isolator is washed with washing water as in the invention described in Patent Document 1, moisture remains in the watering nozzle and the pipe, which may become a hotbed of various bacteria. Moreover, when decontaminating the interior of the isolator, even if the decontamination gas is filled inside the isolator, the decontamination gas does not flow from the nozzle into the pipe, so the inside of the nozzle or the pipe cannot be decontaminated. It was. Furthermore, since the isolator is provided with a pipe for supplying the decontamination gas, there is a problem that it is necessary to attach a pipe for supplying the cleaning liquid and two pipes.

The present invention relates to an isolator capable of maintaining the inside airtight and supplying / exhausting air through a filter to control internal pressure , a decontamination gas supply means for generating vaporized decontamination gas, and a decontamination gas. In the isolator device for processing the object to be processed in the isolator, cleaning liquid supply means for supplying the cleaning liquid to the supply pipe, and drying to the supply pipe A switching means for switching the supply of decontamination gas, cleaning liquid and gas to the supply pipe, and a control means for controlling the operation of the switching means. the provided, after the processing of the object to be treated within the isolator is performed, the control means is allowed to flow into the cleaning liquid to the supply conduit supplying the washing liquid into an isolator isolator After internal washed, and allowed to flow into the gas to dry the conduit to the supply conduit, then the interior of the isolator by flowing decontamination gas supply pipe supplying decontamination gas into the isolator The decontamination is performed , and then the gas is again flowed into the supply pipe and the gas is supplied into the isolator to remove the decontamination gas .

  In addition, in a second invention according to the first invention, the decontamination gas supply unit heats the decontamination liquid to vaporize, and an air supply unit sends the decontamination gas generated by vaporization. The drying gas introduced into the supply pipe is heated by the decontamination gas generating means.

  Since the cleaning liquid supply means for supplying the cleaning liquid is connected to the supply pipe for supplying the decontamination gas to the inside of the isolator, the cleaning liquid can be supplied through the supply line for the decontamination gas. And decontamination inside the pipes. Furthermore, since the gas supply means for supplying the gas for drying is connected to the supply pipe so that the gas for drying can be supplied, the inside of the pipe is dried and the pipe is heated up. It became possible.

FIG. 1 is a circuit diagram showing a schematic configuration of an isolator device according to an embodiment of the present invention. Example 1

  A decontamination gas supply means for supplying a decontamination gas for decontaminating the interior is connected to an isolator that is shut off from the outside and sealed in an airtight state. The decontamination gas supply means includes, for example, a tank that stores a decontamination liquid such as a hydrogen peroxide solution, and a pump that sends the liquid in the storage tank to an evaporator (heating means). The decontamination liquid is vaporized by an evaporator to become a decontamination gas, and is circulated through the supply pipe line by a blower as an air supply means.

  A plurality of nozzles are connected to the supply pipelines via open / close valves, respectively, and face the inside of the isolator. Further, the supply line communicates with the inside of the isolator through an air supply side HEPA filter and an exhaust side HEPA filter. Each HEPA filter can be cut off from communication with the supply line via an on-off valve. Further, a cleaning liquid supply means and a gas supply means for drying are connected to the supply pipe line. The cleaning liquid supply means, the gas supply means, and the decontamination gas supply means can be switched and connected to the supply pipe line by opening / closing on-off valves provided at various points in the supply pipe line. The operation of the on-off valve as the switching means for switching the flow paths of these supply means is controlled by the control means.

  After the workpiece is processed in the isolator, the control means switches the on-off valve, the cleaning liquid supply means is connected to the supply line, the cleaning liquid flows in, and the cleaning liquid is supplied from the nozzle into the isolator. And clean the inside. After cleaning with the cleaning liquid, wipe the inside with a cloth. Thereafter, the cleaning liquid supply means is shut off, the gas supply means is connected, the gas is supplied to the supply pipe to dry the inside of the pipe, and is introduced into the isolator through the nozzle. dry. At the same time, the air supply blower and the exhaust blower are operated to ventilate the entire isolator to dry the inside of the isolator. Since the gas for drying supplied from the gas supply means flows into the supply pipe through the heating means, the drying in the pipe can be accelerated and the decontamination gas in the pipe can be made into droplets. Heating up the pipeline can be performed to prevent this. After drying the inside of the pipeline, shut off the gas supply means, connect the decontamination gas supply means to the supply pipeline and distribute the decontamination gas, and supply the decontamination gas into the isolator for decontamination. Do. For routine decontamination, the decontamination gas is supplied into the isolator through the nozzle and the decontamination is performed including the nozzle. In addition, when periodic decontamination is performed every predetermined period, the decontamination gas is further supplied through the HEPA filter to decontaminate the HEPA filter. Thereafter, the gas for drying is supplied again from the gas supply means to the supply pipeline, and aeration is performed. When decontamination is performed through the HEPA filter, gas is supplied and discharged through the HEPA filter, and aeration including the HEPA filter is performed.

  Hereinafter, the present invention will be described with reference to embodiments shown in the drawings. The isolator 2 is not shown in the figure, but is the same as that generally used in the past. The isolator 2 has an internal space that is shut off from the outside and sealed, and is processed in a space that maintains this airtightness. There are provided an opening / closing door for carrying in / out an article to be carried and other working members, a glove for an operator to insert a hand into the isolator 2 from the outside and perform work.

  In an isolator device including the isolator 2 (indicated by reference numeral 1 as a whole), a decontamination gas supply means 4 for generating a decontamination gas and a decontamination gas supply means 4 in order to decontaminate the inside of the isolator 2. A supply line 6 is provided for supplying the decontamination gas generated in step 1 into the isolator 2. The decontamination gas supply means 4 heats a decontamination liquid (for example, a hydrogen peroxide solution) containing a tank 8, a pump 10 that sends out the decontamination liquid from the tank 8, and the decontamination liquid sent by the pump 10. And an evaporator (heating means 12) that is vaporized.

  The supply line 6 forms a closed circuit that can be circulated, and the evaporator 12 is connected to the circulation circuit 6 and a blower 14 is provided as an air supply means. As a result, the decontamination gas vaporized by the evaporator 12 is sent to the supply pipe 6. In addition, a plurality of nozzles 16 are connected to the supply pipe 6 so as to face the isolator 2 so that the decontamination gas can be supplied throughout the interior of the isolator 2. In this embodiment, four nozzles 16 (16A, 16B, 16C, 16D) from the first nozzle to the fourth nozzle are attached toward the inner side of the isolator 2. Each nozzle 16A, 16B, 16C, 16D is provided with an on-off valve 18 (first on-off valve to fourth on-off valve 18A, 18B, 18C, 18D) so that the supply of decontamination gas can be stopped.

  Further, an air supply side HEPA filter 20A and an exhaust side HEPA filter 20B are disposed on the top surface of the isolator 2, and an on-off valve 18 (a fifth on-off valve 18E and a sixth on-off valve) is provided in the supply pipe line 6, respectively. It is connected via an on-off valve 18F). Further, an air supply blower 22 is connected to the air supply side HEPA filter 20 </ b> A so that outside air can be introduced into the internal space of the isolator 2. Further, an exhaust blower 24 is connected to the exhaust-side HEPA filter 20 </ b> B so that gas in the space inside the isolator 2 can be discharged to the outside through the catalyst 26.

  The isolator device 1 according to this embodiment includes a cleaning liquid supply means 28 for supplying a cleaning liquid (for example, cleaning water) to the supply pipe 6 and a gas for drying as a gas supply means in the same supply pipe 6. The dry gas supply means 30 for supplying is connected. The cleaning liquid supply means 28 is connected to the supply line 6 via the on-off valve 18 (seventh on-off valve 18G), and can supply or shut off the cleaning liquid to the supply line 6. A drain port 32 is provided at the bottom of the isolator 2 to discharge the liquid supplied into the isolator 2 and cleaning the inside. The drain pipe 34 connected to the drain port 32 is provided with an open / close valve 36.

  A dry gas supply means 30 is connected to the side of the supply line 6 to which the decontamination gas supply means 4 is connected via an open / close valve 18 (eighth open / close valve 18H). The gas dehumidified by the dry gas supply means 30 and introduced into the supply pipe 6 is sent to the evaporator (heating means 12) by the blower 14 and heated, and then supplied to the supply pipe 6. Between the side of the closed supply line 6 to which the decontamination gas supply means 4 and the dry gas supply means 30 are connected, and the portion to which the nozzle 16 disposed in the isolator 2 is connected, An on-off valve 18 (a ninth on-off valve 18I and a tenth on-off valve 18J) is provided so that the supply means 4 and 30 and the inside of the isolator 2 can be disconnected from each other. Further, between the side of the supply pipe 6 where the cleaning liquid supply means 28 is connected and the portion where the nozzles 16 (first nozzle 16A to fourth nozzle 16D) provided in the isolator 2 are connected. In addition, an on-off valve 18 (an eleventh on-off valve 18K and a twelfth on-off valve 18L) is provided so that the inside of the isolator 2 and the cleaning liquid supply means 28 can be disconnected from each other.

  A decontamination gas supply means 4, a cleaning liquid supply means 28, and a dry gas supply means 30 are connected to the supply pipeline 6, and an on-off valve 18 (first on-off valve 18A to twelfth on-off valve 18L as switching means). ) Can be switched to supply decontamination gas, cleaning liquid and dehumidified dry gas. The operation of these on-off valves 18 is controlled by the control means 38.

  The operation of the isolator device 1 according to the above configuration will be described. After the work in the isolator 2 is completed, the inside of the isolator 2 is cleaned by supplying a cleaning liquid (cleaning water). At this time, an eighth on-off valve 18H for connecting the dry gas supply means 30 to the supply pipe 6 and a ninth on-off valve 18I provided on the decontamination gas supply means 4 and the dry gas supply means 30 side of the supply pipe 6 are provided. The tenth on-off valve 18J is closed, and the fifth on-off valve 18E and the sixth on-off valve 18F connecting the supply line 6 to the HEPA filters 20A and 20B are closed. The on-off valves (first on-off valve 18A to fourth on-off valve 18D) connected to the four nozzles (first nozzle 16A to fourth nozzle 16D) in the isolator 2 and the cleaning liquid supply means 28 are connected to the supply line 6. The seventh opening / closing valve 18G connected to the cleaning liquid supply means 28 side of the supply line 6 is opened, and the eleventh opening / closing valve 18K and the twelfth opening / closing valve 18L are opened, and the cleaning liquid is supplied from the cleaning liquid supply means 28. Supply to the supply line 6.

  As described above, when the on-off valve 18 serving as the switching means is opened and closed and the cleaning liquid is supplied from the cleaning liquid supply means 28 to the supply pipe 6, the cleaning liquid is supplied from the supply pipe 6 to each nozzle 16 (first nozzle 16 </ b> A). To the fourth nozzle 16D) and sprayed onto the inner surface of the isolator 2 to perform cleaning. After washing with the cleaning liquid, the operator inserts both hands into the isolator 2 from a glove (not shown), and wipes the inside with a cloth or the like previously set in the isolator 2. When cleaning the inside of the isolator 2 by spraying the cleaning liquid, the on-off valve 36 of the drain port 32 provided on the bottom surface of the isolator 2 is opened to discharge the cleaned liquid.

  After carrying out materials such as cloth used when wiping the inside of the isolator 2, dry gas is supplied from the dry gas supply means 30 to the supply pipe 6. At this time, the seventh on-off valve 18G connecting the cleaning liquid supply means 28 to the supply pipeline 6 is closed, the eighth on-off valve 18H connecting the dry gas supply means 30, the ninth on-off valve 18I and the tenth on-off valve 18J. Is released. As a result, the supply pipe line 6 communicates with the entire circumference, and the fluid can be circulated. Further, the fifth on-off valve 18E and the sixth on-off valve 18F connected to the HEPA filters 20A, 20B are opened. The gas supplied from the dry gas supply means 30 to the supply pipe 6 is sent to the heating means 12 by the blower 14, heated and circulated through the supply pipe 6. The heated dry gas is circulated through all paths including the HEPA filters 20A and 20B, and dries the inside. Moreover, the heated dry gas heats up the supply line 6. By heating up the supply pipe 6 in this way, it is possible to prevent the decontamination gas from forming droplets in the supply pipe 6 when decontamination is performed. At this time, the air supply blower 22 and the exhaust blower 24 may be operated without opening the fifth open / close valve 18E and the sixth open / close valve 18F, and the interior of the isolator 2 may be ventilated to dry.

  After the drying gas is circulated and the drying of all the circuits is completed, the eighth on-off valve 18H connecting the drying gas supply means 30 to the supply pipeline 6 is closed, the pump 10 of the decontamination gas supply means 4 is operated, The decontamination liquid in the tank 8 is sent to the heating means 12 to evaporate, and the decontamination gas is circulated through the supply pipe 6 to supply decontamination gas into the isolator 2 from each nozzle 16. The internal passage and the nozzle 16 are decontaminated. At this time, the fifth on-off valve 18E and the sixth on-off valve 18F connected to the HEPA filters 20A, 20B are closed.

  For routine decontamination, the on-off valves (the fifth on-off valve 18E and the sixth on-off valve 18F) connecting the HEPA filters 20A, 20B to the supply pipe 6 are closed, and the nozzles 16 enter the isolator 2. You may complete | finish by only supplying decontamination gas. However, in the case of periodic decontamination every predetermined period, the fifth on-off valve 18E is simultaneously opened, decontamination gas is supplied through the HEPA filter 20A on the supply side, and exhaust is performed by driving the exhaust blower 24. By discharging through the HEPA filter 20B on the side, decontamination including the HEPA filters 20A and 20B is performed. The decontamination gas discharged through the exhaust-side HEPA filter 20B is purified by the catalyst 26. As described above, the decontamination through the HEPA filters 20A and 20B may be performed on a daily basis. However, in this case, since it takes time to remove the decontamination gas from the HEPA filters 20A and 20B, the HEPA filter 20A, Regarding 20B, decontamination may be performed periodically instead of every time.

  When the supply of the predetermined amount of decontamination gas is completed, the heated dry gas is again supplied from the dry gas supply means 30 to the isolator 2 through the supply pipe 6 to perform aeration. At this time, the seventh open / close valve 18G connecting the cleaning liquid supply means 28 to the supply pipe 6 is closed, and the open / close valves connecting the HEPA filters 20A, 20B to the supply pipe 6 (the fifth open / close valve 18E and the sixth open / close valve). 18F) is closed. Further, the pump 10 for sending the decontamination liquid of the decontamination gas supply means 4 is stopped, and the exhaust blower 24 connected to the outside of the exhaust-side HEPA filter 20B is operated. The dry gas supplied from the dry gas supply means 30 to the supply pipe 6 is heated by the heating means 12 and circulates in the supply pipe 6 and is sent into the isolator 2 from each nozzle 16 to be discharged to the exhaust side HEPA filter. It passes through 20B and is purified by the catalyst 26 and discharged. When decontamination is performed without passing through the HEPA filter 20A as described above, aeration of the portion excluding the HEPA filter 20A may be performed.

  Further, when decontamination is performed including the HEPA filters 20A and 20B, it is necessary to remove the decontamination gas adhering to the HEPA filters 20A and 20B. Therefore, aeration including the HEPA filters 20A and 20B is performed. At that time, the on-off valves (first on-off valve 18A to fourth on-off valve 18D) to the four nozzles 6 are closed, and the fifth on-off valve 18E to the HEPA filter 20A on the supply side is opened. The heated dry gas is supplied into the isolator 2 through the supply-side HEPA filter 20A, is sucked into the exhaust blower 24, and is discharged from the exhaust-side HEPA filter 20B through the catalyst 26. In this way, aeration including the HEPA filters 20A and 20B is performed.

  The air supply blower 22 and the exhaust blower 24 directly connected to the HEPA filters 20A and 20B are used for pressure management inside the isolator 2. The internal pressure can be controlled to various pressure states such as positive pressure, negative pressure, fine pressure, and fine pressure with respect to the surrounding environment depending on the work object handled in the isolator 2 and the installation environment of the isolator 2. Is called. In addition, the isolator 2 may be large or small, and may be configured so that an operator can enter the interior in a broad sense, such as a clean room in which various devices are accommodated. Further, a drain pipe 34 between the drain port 32 and the on-off valve 36, and a supply pipe line between the ninth on-off valve 18I and the eleventh on-off valve 18K or between the tenth on-off valve 18J and the twelfth on-off valve 18L. 6 is connected with a pipe, a thirteenth on-off valve is provided in this pipe, and when the decontamination gas is supplied into the isolator 2 from each nozzle 16 by circulating the decontamination gas through the supply pipe 6. It is also possible to decontaminate the drainage port 32 and the drainage pipe 34 by opening the thirteenth on-off valve with the on-off valve 36 of the drainage port 32 closed.

DESCRIPTION OF SYMBOLS 1 Isolator apparatus 2 Isolator 4 Decontamination gas supply means 6 Supply line 12 Heating means (evaporator)
14 Air supply means (blower)
18 switching means (open / close valves 18A-L)
28 Cleaning liquid supply means 30 Gas supply means (dry gas supply means)
38 Control means

Claims (2)

An isolator capable of maintaining the inside airtight and controlling the internal pressure by supplying and exhausting air through a filter, decontamination gas supply means for generating vaporized decontamination gas, and decontamination gas inside the isolator In an isolator device that includes a supply pipeline to supply, and performs processing of an object to be processed in the isolator,
A cleaning liquid supply means for supplying a cleaning liquid to the supply pipe line and a gas supply means for supplying a gas for drying to the supply pipe line are connected, and a decontamination gas and a cleaning to the supply pipe line are connected. Switching means for switching supply of liquid and gas, and control means for controlling the operation of the switching means,
After the processing of the object to be processed in the isolator, the control means causes the cleaning liquid to flow into the supply pipe and supplies the cleaning liquid into the isolator to clean the inside of the isolator , and then the supply pipe Let the gas flow into the channel and dry the inside of the pipeline, then distribute the decontamination gas through the supply pipeline and supply the decontamination gas into the isolator to decontaminate the interior of the isolator , and then supply again An isolator device that removes decontamination gas by flowing gas into a pipeline and supplying the gas into the isolator.   The decontamination gas supply means includes a heating means for heating and vaporizing the decontamination liquid, and an air supply means for sending the decontamination gas generated by vaporization, and for drying that has flowed into the supply line The isolator device according to claim 1, wherein the gas is heated by a decontamination gas generating means.

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