JP6266315B2 - Wavelength multiplexer / demultiplexer and optical integrated circuit device - Google Patents

Description

  The present invention relates to a wavelength multiplexer / demultiplexer and an optical integrated circuit device. For example, the present invention relates to a wavelength multiplexer / demultiplexer and an optical integrated circuit device used in optical communication and an optical interconnect.

  In recent years, Si photonics has attracted attention as a promising technology for large-capacity interconnects. The main advantage of the Si photonics technology is that high-density integration is possible because the cross-sectional area of the optical wiring is several hundred nm square. In addition, the transmission capacity per optical wiring is expected to be improved by wavelength division multiplexing (WDM) within the Si chip.

  In order to transmit and receive a WDM optical signal within the Si chip, an Si thin-line waveguide type wavelength multiplexer / demultiplexer that multiplexes (MUX) / demultiplexes (DeMUX) the WDM optical signal as necessary is required. Conditions required for the Si waveguide type wavelength multiplexer / demultiplexer include spectral flatness, low loss, low channel-to-channel deviation, and low crosstalk (XT).

  A wavelength multiplexer / demultiplexer in which a delayed Mach-Zehnder interferometer (DMZI: Delayed Mach-Zehnder Interferometer) is cascade-connected in multiple stages has been reported as a promising candidate that satisfies these conditions. US Intel Corporation has reported a DMZI type multiplexer / demultiplexer (see, for example, Non-Patent Document 1).

Here, a 1 × 4 Ch DMZI type wavelength multiplexer / demultiplexer formed by using the conventional technique will be described with reference to FIG. FIG. 13 is a conceptual plan view of a 1 × 4 Ch DMZI wavelength multiplexer / demultiplexer according to the conventional example 1. Two arm waveguides 81 ₁ and 82 ₁ having different optical path lengths are opposed to each other on the input end side and the output side. Optical couplers 83 ₁ and 84 ₁ are formed on the end side to form DMZI 80 ₁ . The arm waveguide 82 ₁ having a long optical path length is a delay waveguide with respect to the arm waveguide 81 _{1 having} a short optical path length.

A wavelength multiplexer / demultiplexer is constituted by a two-stage DMZI in which two DMZIs 80 ₂ and 80 ₃ are cascade-connected to the first stage DMZI 801 ₁ . At this time, the optical path length difference between the two DMZIs 80 ₂ and 80 ₃ is set to ½ of the optical path length difference of the first DMZI 80 ₁ , and the phase shifter 85 ₃ for controlling the phase is provided in one DMZI 80 ₃ . forming a phase difference between two of DMZI80 ₂ relative π / 2 (= λ / 4 ).

  FIG. 14 is a multiplexing / demultiplexing spectrum of the 1 × 4 Ch DMZI wavelength multiplexing / demultiplexing device of Conventional Example 1, and the channel interval is assumed to be 800 GHz. As shown in the figure, the spectrum shape becomes a parabolic function, and when the wavelength shift of the WDM optical signal or the temperature change of the multiplexer / demultiplexer occurs, the insertion loss in the multiplexer / demultiplexer increases, and between the WDM optical signals. There is a problem that the crosstalk XT also deteriorates.

In order to solve such a problem, IBM Corporation has a different DMZI optical path length difference redundantly connected to optimize the optical coupling ratio k _i of each DMZI, it proposes to obtain spectral flatness (For example, refer nonpatent literature 2). Here, the proposed improved wavelength multiplexer / demultiplexer will be described with reference to FIG.

Figure 15 is a schematic plan view of an improved conventional example 2 of a wavelength division multiplexer according to the proposed against DMZI80 ₁ of the first stage, the optical path length difference greater than DMZI80 ₁ of the first stage and to each other Two DMZIs 80 ₄ and 80 ₅ having a phase difference are connected in series. Also, two DMZI80 _2, 80 respectively optical path length difference to ₃ of the second stage connects the two DMZI80 _6, 80 ₇ with DMZI80 _2, 80 greater than ₃ and the phase difference from each other in the second stage in series. The phase shifter ₈₅ 5, 85 ₇ are formed in the DMZI80 ₅ and DMZI80 _7. Here, the optical coupling coefficient k of each of the optical couplers 83 _{1 to} 83 ₃ and 84 _{1 to} 84 ₇ is set to a predetermined value.

  FIG. 16 is a multiplexing / demultiplexing spectrum of the improved wavelength multiplexing / demultiplexing device of the conventional example 2, and the channel interval is assumed to be 800 GHz here. As shown in the figure, the spectrum shape can be flattened without sacrificing insertion loss, and XT can be reduced.

  FIG. 17 is a conceptual plan view of the wavelength multiplexer / demultiplexer of Conventional Example 3 of a further improved type, and although description of the figure is omitted, the DMZI of the third stage is connected to the DMZI of the second stage. In addition, a redundant configuration is adopted.

  FIG. 18 is a multiplexing / demultiplexing spectrum of the wavelength multiplexing / demultiplexing device according to the conventional example 3 of a further improved type, and the channel interval is also assumed to be 800 GHz here. As shown in the figure, also in this case, the spectrum shape can be flattened without sacrificing the insertion loss, and XT can be reduced.

Table 1 summarizes the spectral flatness and crosstalk characteristics of the wavelength multiplexers / demultiplexers according to the first to third embodiments. As a performance index of spectral flatness, a ratio of transmission bandwidth (SF) to -1 dB and -10 dB and a ratio SF of transmission bandwidth to -1 dB and -20 dB are used.

  As shown in Table 1, in the case of Conventional Example 2, although the number of optical interferometers is increased as compared with Conventional Example 1, SF is greatly improved and XT is also reduced. In the case of Conventional Example 3, XT can be further improved. However, deterioration of spectral flatness is inevitable, and SF and XT are in a trade-off relationship.

D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. Liu, “Silicon-on-insulator educa eda sas er eda s e n a s e n a s e n e s e n e s e n e n e s e n e s e n e s e n e s e n e n e s e n e e n e n e s e n e s e n e e n e e n e e n e n e e n e e n e e n e n e e n e e n e e n e e n e e n e e n e e n e e n e ... Optics Letters 33 (5), 530-532, 2008 F. Horst, “Silicon integrated waveguides for filtering and wavelength demultiplexing,” in Proceedings of 2011 Optical Fiber Communications S. Assefa et al., “A 90 nm CMOS integrated nano-photonics technology for 25 Gbps WDM optical communications applications (Late News),” in Proceeding.

  However, in the case of the conventional example 2, although the flatness (SF) of the combined / demultiplexed spectrum can be greatly improved as compared with the conventional example 1, there is a problem that the improvement of the crosstalk XT is only about -6 dB.

  On the other hand, in the case of the conventional example 3, although the crosstalk XT can be significantly reduced as compared with the conventional example 1, there is a problem that a trade-off relationship in which the spectral flatness (SF) deteriorates cannot be avoided. Furthermore, an increase in the number of control points and an increase in the element size due to an increase in the number of optical interferometers become a problem.

  Accordingly, it is an object of the wavelength multiplexer / demultiplexer and the optical integrated circuit device to achieve both a small size, improved spectral flatness, and low crosstalk characteristics.

From one aspect to be disclosed, first to third 1 × 2 optical couplers for branching an optical signal to the same amplitude are provided and connected to a first port on the branch side of the first 1 × 2 optical coupler. A second 1 × 2 optical coupler, and a third 1 × 2 optical coupler connected to the second port on the branch side of the first 1 × 2 optical coupler, and an optical branching unit that branches equally into four The first delay waveguide connected to the first port on the branch side of the second 1 × 2 optical coupler and the second delay waveguide connected to the second port on the branch side of the second 1 × 2 optical coupler. 2 delay waveguides, a third delay waveguide connected to the first port on the branch side of the third 1 × 2 optical coupler, and a second delay waveguide on the branch side of the third 1 × 2 optical coupler The fourth delay waveguides connected to the ports of the first delay waveguide to the fourth delay waveguide are arranged in this order, and the delay amount of the first delay waveguide to the fourth delay waveguide is set to a delay level. Are coupled to the first delay waveguide to the third delay waveguide in order of 2ΔL, 0, ΔL, and 3ΔL in the order determined by the center wavelength of the part, the diffraction order, and the effective refractive index of the waveguide. comprises a ring resonator structure, the phase shift amount of the third delay waveguide is 0.5π radian, and optical delay phase shift amount of the fourth delay waveguide is -0.5π radians A first 2 × 2 optical coupler connected to the first delay waveguide and the second delay waveguide to branch and combine optical signals with the same amplitude, the third delay waveguide, A second 2 × 2 optical coupler connected to the fourth delay waveguide for branching and coupling an optical signal with the same amplitude; and a first port on the other end of the first 2 × 2 optical coupler. Connect to the first optical waveguide to be connected and the first port on the other end side of the second 2 × 2 optical coupler. A second 2 × 2 optical coupler for branching and coupling optical signals connecting the three optical waveguides to the same amplitude, and a second port connected to the second port on the other end of the first 2 × 2 optical coupler. A second 2 × optical signal for branching and coupling optical signals connecting the second optical waveguide and the fourth optical waveguide connected to the second port on the other end of the second 2 × 2 optical coupler to the same amplitude. The first optical waveguide of the second optical waveguide and the third optical waveguide, wherein the second optical waveguide and the third optical waveguide have a crossing portion intersecting each other. And a wavelength multiplexer / demultiplexer comprising: an optical coupling portion having a phase shift amount of 0.25π radians with respect to the fourth optical waveguide.

  From another viewpoint to be disclosed, the wavelength multiplexer / demultiplexer described above, the third 2 × 2 optical coupler of the wavelength multiplexer / demultiplexer, and the other 4 of the fourth 2 × 2 optical coupler are provided. A light source array having first to fourth laser elements that are connected to two ports and oscillate at different wavelengths, and an optical modulator array that modulates signal light of each wavelength from the light source array. An optical integrated circuit device is provided.

  From another point of view, the wavelength multiplexer / demultiplexer is connected to the four ports on the other end side of the third 2 × 2 optical coupler and the fourth 2 × 2 optical coupler. There is provided an optical integrated circuit device comprising a light receiver array having four light receiving elements.

  According to the disclosed wavelength multiplexer / demultiplexer and optical integrated circuit device, it is possible to achieve both a small size, improved spectral flatness, and low crosstalk characteristics.

1 is a conceptual plan view of a wavelength multiplexer / demultiplexer according to an embodiment of the present invention. It is a multiplexing / demultiplexing spectrum of the wavelength multiplexing / demultiplexing device of the embodiment of the present invention. It is a conceptual top view of the wavelength multiplexer / demultiplexer of Example 1 of this invention. It is explanatory drawing of the optical waveguide structure which comprises the wavelength multiplexer / demultiplexer of Example 1 of this invention. It is a conceptual top view of the 1 * 2 optical coupler which comprises an optical branch part. It is a conceptual top view of an optical delay part. It is explanatory drawing of the multiplexing / demultiplexing spectrum of the wavelength multiplexer / demultiplexer of Example 1 of this invention. It is explanatory drawing of the transmission spectrum and crosstalk in the single channel of a wavelength multiplexer / demultiplexer. It is a conceptual top view of the wavelength multiplexer / demultiplexer of Example 2 of this invention. It is a notional top view of the optical integrated circuit device of Example 3 of the present invention. It is a notional top view of the optical integrated circuit device of Example 4 of this invention. It is a notional top view of the optical integrated circuit device of Example 5 of this invention. 6 is a conceptual plan view of a 1 × 4 Ch DMZI type wavelength multiplexer / demultiplexer of Conventional Example 1. FIG. 6 is a multiplexing / demultiplexing spectrum of a 1 × 4 Ch DMZI type wavelength multiplexing / demultiplexing device according to Conventional Example 1. FIG. It is a conceptual top view of the wavelength multiplexer / demultiplexer of the improved conventional example 2 by a proposal. It is a multiplexing / demultiplexing spectrum of the wavelength multiplexing / demultiplexing device of the improved conventional example 2. It is a conceptual top view of the wavelength multiplexer / demultiplexer of the conventional example 3 of the further improvement type. It is a multiplexing / demultiplexing spectrum of the wavelength multiplexing / demultiplexing device of Conventional Example 3 of a further improved type.

  Here, a wavelength multiplexer / demultiplexer according to an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a conceptual plan view of a wavelength multiplexer / demultiplexer according to an embodiment of the present invention. The wavelength multiplexer / demultiplexer according to the present invention includes an optical branching unit 1, an optical delay unit 3, and an optical coupling unit 6.

The optical branching unit 1 is formed by cascading _first to _third 1 × 2 optical couplers 2 ₁ to 2 ₃ that branch an optical signal to the same amplitude. That is, the second 1 × 2 optical coupler _{2 2} port _{2 21} and connected to the first port _{2 12} of the first 1 × 2 optical coupler _{2 1} branch side, the first 1 × 2 optical coupler 2 the second port _{2 13} of _first branch side by connecting the third 1 × 2-port _{2 31} of the optical coupler _{2 3,} 4, etc. branches.

The optical delay unit 3 includes a first delay waveguide 4 ₁ connected to the port 2 ₂₂ , a second delay waveguide 4 ₂ connected to the port 2 ₂₃ , and a third delay waveguide 4 connected to the port 2 _{32. 3,} and a fourth delay waveguide _{4 4} connecting to port _{2 33.} Delay amount of first delay waveguide 4 ₁ to the fourth delay waveguide 4 _4, 2.DELTA.L in order for a given amount of delay [Delta] L, 0, [Delta] L, and the first delay conductive so that 3ΔL waveguide _4, and third delay waveguide _{4 3} ring resonator _{(MRR: microring resonator) 5 1} ~5 3 couples. Each of the ring resonators 5 _{1 to} 5 ₃ has the same structure with the same ring circumference, and changes the coupling efficiency with respect to each of the delay waveguides 4 ₁ to 4 ₃ .

At this time, each of the ring resonators ₅ 1 to 5 ₃ to the anti-resonance condition is satisfied. That is, the center wavelength of each ring resonator 5 ₁ to 5 _3, to satisfy the condition of π radian phase shift from the center wavelength of the delay interferometer without the ring resonator 5 ₁ to 5 _3. Further, the ring resonators 5 _{1 to} 5 ₃ are set so that the proportion of coupling between the delay waveguides 4 ₁ to 4 ₃ and the ring resonators 5 _{1 to} 5 ₃ decreases as the delay length increases. To do. That is, each of the ring resonators 5 _{1 to} 5 ₃ acts as a phase adjuster for each of the delay waveguides 4 ₁ to 4 ₃ . The phase shift amount of the delay waveguide _{4 3} ([Delta] [theta]) is 0.5π radian, phase shift amount of the delay waveguide _{4 4 (-Δθ)} is -0.5π radians.

In addition, the optical coupling unit 6 cross-connects 2 × 2 optical couplers 7 _{1 to} 7 ₄ that branch and couple two pairs of optical signals with the same amplitude to form an optical coupling unit 6 having a Banyan configuration. Connecting the first optical waveguide ₈₁ connected to the first port _{7 12} of the first 2 × 2 optical coupler ₇₁ on the other end to the third 2 × 2 port _{7 31} of the optical coupler _{7 3.} Connecting the third optical waveguide _{8 3} connected to the second of the 2 × 2 optical coupler ₈ of the _second end side first port _{7 23} to the third 2 × 2 optical coupler _{7 3} ports _{8 32.} Further, connecting the second optical waveguide ₈₂ connected to the second port _{7 14} of the first of the 2 × 2 optical coupler ₇₁ on the other end to port _{7 41} of the fourth of the 2 × 2 optical coupler _{7 4} To do. Connecting the fourth optical waveguide _{8 4} connected to the second port _{7 24} second 2 × 2 optical coupler _{7 2} at the other end to the port _{7 42} of the fourth of the 2 × 2 optical coupler _{7 4.} In this case, the first optical waveguide ₈₁ through the fourth optical waveguide _{8 4,} except for areas that are phase-shifted (Δφ = -0.25π radian), the same optical length.

To form a wavelength demultiplexer using a silicon substrate through an insulating film of the SOI substrate provided with a monocrystalline silicon core layer, the second optical waveguide ₈₂ and the third optical waveguide 8 ₃ intersect with each other intersection _{9 1} is formed. Such cross-section 9 ₁ results in phase shift with respect to the first optical waveguide ₈₁ and the fourth optical waveguide 8 ₄ without intersection. Therefore, in order to adjust such a phase shift, to the first optical waveguide ₈₁ and the fourth optical waveguide 8 _4, it is desirable to provide a cross-section for the phase adjustment of the same structure and cross-section 9 ₁ .

  FIG. 2 is a multiplexing / demultiplexing spectrum of the wavelength multiplexer / demultiplexer according to the embodiment of the present invention, and the channel interval is assumed to be 800 GHz. As is clear from the figure, the spectral flatness is superior to those of Conventional Examples 1 to 3, and the crosstalk XT is less.

Such wavelength demultiplexer using to form the optical integrated circuit of the transmitter side, a third of the 2 × 2 optical coupler 7, _third and fourth of the 2 × 2 optical coupler having a wavelength division multiplexer A light source array having laser elements that oscillate at different wavelengths is connected to the four ports 7 ₃₃ , 7 ₃₄ , 7 ₄₃ , and 7 ₄₄ of 7 ₄ . At the same time, an optical modulator array for modulating the signal light of each wavelength from the light source array is provided.

Optical modulator array in this case, the optical modulator array with four Mach-Zehnder type modulator between the light source array and the third of the 2 × 2 optical coupler 7, _third and fourth optical couplers 7 ₄ It may be inserted. Alternatively, the light modulator array is connected to the optical waveguide in the first 1 × 2 optical coupler 2 of _the binding side of the port 2 _11, four ring resonators having different ring lengths from each other in the extending direction of the optical waveguide A vertical type optical modulator array in which are arranged may be used.

  Next, the wavelength multiplexer / demultiplexer according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 3 is a conceptual plan view of the wavelength multiplexer / demultiplexer according to the first embodiment of the present invention. The wavelength multiplexer / demultiplexer of the present invention includes an optical branching unit 10, an optical delay unit 20, and an optical coupling unit 30.

FIG. 4 is an explanatory diagram of an optical waveguide structure constituting the wavelength multiplexer / demultiplexer according to the first embodiment of the present invention. Here, the optical waveguide structure is formed on the SOI substrate using the Si photonics technology. The cross-sectional structure of the waveguide portion will be described. First, as shown in FIG. 4A, an SOI substrate is prepared in which a single crystal silicon layer 53 having a thickness of 0.22 μm is provided on a silicon substrate 51 with a SiO ₂ film 52 interposed therebetween.

Next, as shown in FIG. 4B, a resist pattern 54 having a waveguide stripe structure having a width of 0.48 μm is formed by an exposure process, and dry etching is performed to form a core layer 55 to obtain a channel waveguide structure. To do. Next, as shown in FIG. 4C, after removing the resist pattern 54, a SiO ₂ film 56 is deposited on the entire surface to form a cladding layer.

  As shown in FIG. 4D, when the core layer 55 is formed, a rib waveguide structure may be formed by leaving a slab portion 57 having a height of 0.05 μm. Thus, if the slab part 57 is formed on both sides of the core layer 55, the refractive index of the waveguide can be changed by current injection.

Returning to FIG. 3 again, the optical branching unit 10 supplies the 1 × 2 light having the same structure to the ports 12 ₁₂ and 12 ₁₃ on the branch side of the 1 × 2 optical coupler 11 ₁ that branches the optical signal with the same phase and the same amplitude. Couplers 11 ₂ and 11 ₃ are connected in cascade to form a fourth branch.

FIG. 5 is a conceptual plan view of a 1 × 2 optical coupler constituting an optical branching unit, and FIG. 5A is a conceptual plan view of a 1 × 2 optical coupler of an MMI (multimode interference) type. With a width providing a port _{12 11} WMMI / 4 in the central portion of the multimode interference region 13 of the _binding side in the width length in the _{L MMI} is _{W MMI,} width branch side WMMI / 4 ports _{12 12,} 12 ₁₃ are arranged at intervals of W _MMI / 4.

FIG. 5B is a conceptual plan view of a Y-branch type 1 × 2 optical coupler, in which two ports 12 ₁₂ and 12 ₁₃ are directly branched from a port 12 ₁₁ into a Y-shape. Such a Y-branch 1 × 2 optical coupler may be used instead of the 1 × 2 MMI optical coupler.

Returning to FIG. 3 again, the optical delay unit 20 includes four delay waveguides 21 _{1 to} 21 ₄ connected to the ports 12 _{22 to} 12 ₃₃ of the 1 × 2 optical couplers 11 ₂ and 11 ₃ and three lines. Ring resonators 22 _{1 to} 22 ₃ optically coupled to the delay waveguides 21 _{1 to} 21 ₃ . Here, each of the ring resonators 22 _{1 to} 22 ₃ is set so that the delay amounts of the _four delay waveguides 21 _{1 to} 21 ₄ are 2ΔL, 0, ΔL, and 3ΔL in order with respect to the predetermined value ΔL. The ring circulation length is made the same, and the delay amount is set by changing the coupling efficiency according to the gap (Gap).

FIG. 6 is a conceptual plan view of the optical delay unit, which includes a delay waveguide 21 ₁ (˜21 ₃ ) and a ring resonator 22 ₁ (˜22 ₃ ) optically coupled to the delay waveguide 21 ₁ (˜21 ₃ ). Note that only one combination is shown here. Ring resonator ₂₂ 1 (to 22 ₃₎ are straight waveguide and a radius of _{L ST} length consists semicircular waveguides of R, the same structure in all of the ring resonator ₂₂ 1 to 22 _3.

At this time, each of the ring resonators ₂₂ 1-22 _3, anti-resonance condition, i.e., the center wavelength of the ring resonator ₂₂ 1-22 _3, the central wavelength of the delay interferometer without the ring resonator ₂₂ 1-22 ₃ To satisfy the condition of π radian phase shift from. The channel interval of the propagated signal light is controlled by the delay length of the optical delay unit 20 and the circulation length of the ring resonators 22 _{1 to} 22 ₃ .

Here, the relationship of the optical delay unit 20 with respect to the channel interval will be described. As described above, the delay length is a discrete value defined by ΔL, and is set so as to satisfy the relative relationships of 2ΔL, 0, ΔL, and 3ΔL from the top to the bottom. In this case, if λ _DMZI , m, and N _Eq are the center wavelength, the diffraction order, and the effective refractive index of the Si wire waveguide, respectively, ΔL is determined by the following equation (1).
ΔL = (λ _DMZI × m) / N _Eq (1)

The channel spacing Δν, when the N _Gr and the group index of the Si wire waveguide, determined by the following equation (2).
Δν = λ _DMZI ² / (4N _Gr × ΔL) (2)
Further, the relationship of the ring resonator MRR in the optical delay unit is as follows: λ _MRR-1 , λ _MRR-2 and λ _MRR-3 are the center wavelengths of the ring resonators 22 _{1 to} 22 ₃ , respectively, It is represented by Formula (4).
λ _MRR-1 = λ _MRR-2 = λ _MRR-3 = λ _DMZI −0.5Δν (3)
˜2k _MRR-1 = k _MRR-2 = ˜1.2k _MRR-3 = 0.95 (4)
The relationship shown in this equation (3) is the anti-resonance condition. On the other hand, _kMRR-1 , _kMRR-2, and _kMRR-3 in Equation (4) are optical coupling rates in the ring resonators 22 _{1 to} 22 ₃ , respectively.

Here, in order to satisfy the relations of the expressions (3) and (4), Gap ₁ to Gap ₃ between the delay waveguides 21 _{1 to} 21 ₃ and the ring resonators 22 _{1 to} 22 ₃ are adjusted. For example, in the ring resonator ₂₂ 1-22 ₃ may satisfy the relationship shown in equation (3) if bond waveguide length _{L ST} and ring radius of curvature R to 15.57μm and 9.08μm, respectively. Moreover, the _Gap 1 _{~Gap 3} ring resonator ₂₂ 1 through 22 ₃ 250 nm, respectively, by setting to 188nm and 200 nm, it is possible to satisfy the relationship shown in Equation (4).

The optical coupling unit 30 cross-connects _four 2 × 2 optical couplers 31 _{1 to} 314 that branch and couple optical signals with the same amplitude to form an optical coupling unit 30 having a Banyan configuration. That is, the optical waveguide 33 ₁ connected to the port 32 ₁₃ on the other end side of the 2 × 2 optical coupler 31 ₁ connected to the delay waveguides 21 ₁ and 21 ₂ is connected to the port 32 ₃₁ of the 2 × 2 optical coupler 31 _3. . Connected to the 2 × 2 optical coupler 31 ₁ a 2 × 2 port _{32 41} of the optical coupler 31 ₄ the optical waveguide 33 ₂ and cross arranged to be connected to the port _{32 14} at the other end. On the other hand, the delay waveguide ₂₁ 3, 21 ₄ connected to the 2 × 2 optical coupler 31 ₂ 2 × the optical waveguide 33 ₃ connected to the other end of the port _{32 23} crossed arrangement 2 optical coupler 31 ₃ Port _{32 32} Connect to. Connecting the optical waveguide 33 ₄ connected to the 2 × 2 optical coupler 31 ₂ at the other end of the port _{32 24} to the port _{32 42} of the 2 × 2 optical coupler 31 _4. Note that as the 2 × 2 optical couplers 31 _{1 to} 31 _4, it is sufficient to use a port on the coupling side of the 1 × 2 optical coupler shown in FIG. 5 replaced with two ports having the same configuration as the branch side. .

In this case, the optical waveguide 33 ₂ and the optical waveguide 33 ₃ intersections 34 ₁ Since intersecting on the same plane is formed. The optical waveguide ₃₃ to 333 ₄ are set to the same optical path length except for the phase shift ([Delta] [phi) region. At this time, the phase shift amount (Δθ) and the phase shift amount (Δφ) are set so as to satisfy the relationship of the following formulas (5) and (6).
Δθ = 0.5π (radian) (5)
Δφ = 0.25π (radian) (6)
Assuming the characteristics of channel spacing Δν = 800 GHz, ΔL to 11 μm is obtained using the channel-type Si thin wire waveguide structure shown in FIG. Further, since the guide Namijicho to effect a phase change corresponding to 0.25π [radian] becomes ～85Nm, from the optical waveguide 33 ₂ and the optical waveguide 33 ₃ of the optical waveguide length 33 ₁ and the optical waveguide 33 ₄ The length may be increased by 85 nm. Note that these for phase relationship which may be relatively satisfied, for example, optical waveguides 33 ₁ and the optical waveguide 33 ₄ only 85nm from the optical waveguide 33 ₂ and the optical waveguide 33 ₃ lengths shorter even desired relationship Can be met.

FIG. 7 is an explanatory diagram of the multiplexing / demultiplexing spectrum of the wavelength multiplexer / demultiplexer according to the first embodiment of the present invention. FIG. 7 (a) is a diagram illustrating the multiplexing / demultiplexing of the wavelength multiplexer / demultiplexer according to the first embodiment of the present invention. It is a spectrum. FIGS. 7B and 7C are spectra when the delay amount of each delay interferometer is set differently from that in the first embodiment. Here, 2.DELTA.L in Example 1 of the present invention, 0, [Delta] L and so as to maintain a relationship 3DerutaL, three ring resonators ₂₂ 1-22 ₃ optical coupling factor _{k MRR-1 ~k MRR-3} 0. 48, 0.95, and 0.80 are set. On the other hand, in the cases of FIGS. 7B and 7C, the order is changed to 0.48, 0.80, 0.95 and 0.95, 0.80, 0.48, respectively. It is set.

  As shown in FIG. 7A, in the case of Example 1 of the present invention, excellent multiplexing / demultiplexing spectrum characteristics with excellent flatness and low crosstalk can be obtained. On the other hand, in the case of FIG. 7B or FIG. 7C, it is understood that the spectral flatness and the crosstalk are remarkably deteriorated as the amount of deviation from the condition of Expression (4) increases.

The characteristics in Example 1 are as follows:
SF (-1 dB / -10 dB): 0.87
SF (-1 dB / -20 dB): 0.76
XT: <−33 dB
It can be seen that the SF is remarkably improved and a low XT of −30 dB or less can be secured.

  FIG. 8 is an explanatory diagram of the transmission spectrum and the crosstalk XT in a single channel of the wavelength multiplexer / demultiplexer. Here, the characteristics of the above-described conventional examples 2 and 3 are also displayed. Here, the crosstalk is a result of considering the influence on the remaining three channel components in the 1 × 4 Ch wavelength multiplexer / demultiplexer. The channel interval is assumed to be 800 GHz. FIG. 8A is an explanatory diagram of the transmission spectrum, and it can be seen that the spectral flatness in the transmission band of the wavelength multiplexer / demultiplexer of the first embodiment of the present invention is the best.

  On the other hand, from the viewpoint of power penalty in the optical link, it is important to keep the crosstalk XT low. FIG. 8B is a crosstalk characteristic diagram. In the wavelength multiplexer / demultiplexer according to the first embodiment of the present invention, a low XT is obtained over a wide wavelength band. For example, assuming that XT is suppressed to -15 dB or less, in the case of the wavelength multiplexer / demultiplexer according to the first embodiment of the present invention, as shown in the figure, a wavelength band corresponding to approximately 5.3 nm may be utilized. it can. This corresponds to 80% or more of the channel interval. In FIG. 8A, the wavelength position corresponding to the case where XT = −15 dB shown in FIG. 8B is set is indicated by a vertical broken line.

  On the other hand, in the case of Conventional Example 2, the effective wavelength band is rate-controlled by XT and is approximately 4 nm. In the case of Conventional Example 3, XT can be kept low as in Example 1 of the present invention, but the spectral flatness is inferior, so the effective wavelength band is limited by the increase in excess loss, As in Conventional Example 2, the thickness is approximately 4 nm. This corresponds to about 60% of the channel interval. That is, the wavelength multiplexer / demultiplexer according to the first embodiment of the present invention can improve the effective operating wavelength band by 20% or more regardless of the channel interval setting.

  Next, the wavelength multiplexer / demultiplexer according to the second embodiment of the present invention will be described with reference to FIG. 9, but is the same as the wavelength multiplexer / demultiplexer according to the first embodiment except that the configuration of the optical coupling unit is different. is there. FIG. 9 is a conceptual plan view of the wavelength multiplexer / demultiplexer according to the second embodiment of the present invention. The optical branching unit 10 and the optical delay unit 20 are exactly the same as those of the first embodiment.

In the optical coupling section 30, the optical waveguides 33 ₁ and cross-section ₃₄ 2 for phase adjustment of the same structure as the cross-section 34 ₁ in the optical waveguide 33 _4, 34 ₃ provided. That is, when the intersection ₃₄₁ which is inevitably formed there, the phase shift occurs for intersection is no optical waveguide 33 ₁ and the optical waveguide 33 _4. Therefore, by providing the intersection ₃₄ 2, 34 ₃ of the same structure as the cross-section 34 ₁ in the optical waveguides 33 ₁ and the optical waveguide 33 ₄ it is obtained by eliminating the phase shift. In this case, it is not necessary to adjust the phase shift, so that the production yield can be improved.

  Next, an optical integrated circuit device according to Embodiment 3 of the present invention will be described with reference to FIG. FIG. 10 is a conceptual plan view of an optical integrated circuit device according to Embodiment 3 of the present invention. An optical modulator array and a light source array are provided on the branch side of the 1 × 4 Ch wavelength multiplexer / demultiplexer shown in FIG. Connected.

As shown in the drawing, an optical modulator array 40 in which Mach-Zehnder modulators 41 _{1 to} 41 ₄ are provided in _four ports 32 ₃₃ , 32 ₃₄ , 32 ₄₃ , and 32 ₄₄ of 2 × 2 optical couplers 31 ₃ and 31 _4. Connect. Moreover, to connect the light source array 42 having the semiconductor laser element 43 _{1-43 4} oscillating at different wavelengths in front of the light modulator array 40.

In the optical integrated circuit device according to the third embodiment, laser beams having different wavelengths from the light source array 42 are modulated by the Mach-Zehnder modulators 41 _{1 to} 41 ₄ and then multiplexed by the wavelength multiplexer / demultiplexer. 12 ₁₁ to output. At this time, the wavelength multiplexer / demultiplexer is excellent in the flatness of the transmission spectrum and the crosstalk characteristics, so that the wavelength shift of the optical signal and the operating wavelength shift of the wavelength multiplexer due to temperature fluctuations occur. However, low loss can be maintained and optical transmission of wavelength multiplexed signals can be performed.

  Next, an optical integrated circuit device according to Embodiment 4 of the present invention will be described with reference to FIG. FIG. 11 is a conceptual plan view of an optical integrated circuit device according to Embodiment 4 of the present invention. A light source array is connected to the branch side of the 1 × 4 Ch wavelength multiplexer / demultiplexer shown in FIG. A ring modulator is connected to the wave side.

As shown in the figure, a light source array having semiconductor laser elements 43 ₁ to 43 ₄ that oscillate at different wavelengths in four ports 32 ₃₃ , 32 ₃₄ , 32 ₄₃ , and 32 ₄₄ of 2 × 2 optical couplers 31 ₃ and 31 _4. 42 is connected. On the other hand, four-stage ring modulators 44 _{1 to} 44 ₄ are connected to the port 12 ₁₁ on the multiplexing side of the 1 × 2 optical coupler 11 ₁ . The ring modulators 44 _{1 to} 44 ₄ are obtained by coupling _four ring resonators having different circulation lengths along one output waveguide connected to the port 12 ₁₁ . Also in this case, since the wavelength multiplexing / demultiplexing unit having excellent flatness of the transmission spectrum and crosstalk characteristics is combined, the wavelength shift of the optical multiplexing / demultiplexing unit is slightly shifted due to the wavelength shift of the optical signal and the temperature fluctuation. However, it is possible to perform optical transmission of wavelength multiplexed signals while maintaining low loss.

  Next, an optical integrated circuit device according to Embodiment 5 of the present invention will be described with reference to FIG. FIG. 12 is a conceptual plan view of an optical integrated circuit device according to Embodiment 5 of the present invention, in which a photodetector array 45 is connected to the branch side of the 1 × 4 Ch wavelength multiplexer / demultiplexer shown in FIG. It is.

As shown in the figure, a light receiver array 45 having _four light receivers 46 _{1 to} 464 is connected to four ports 32 ₃₃ , 32 ₃₄ , 32 ₄₃ , and 32 ₄₄ of 2 × 2 optical couplers 31 ₃ and 31 ₄ . Is. The signal light input from the multiplexing-side port 12 _{11 of the} 1 × 2 optical coupler 11 ₁ is demultiplexed by the wavelength multiplexer / demultiplexer, is input to the _four light receivers 46 _{1 to} 464, and is converted into an electrical signal. The

  In this case as well, the wavelength multiplexer / demultiplexer has excellent transmission flatness and crosstalk characteristics, so the wavelength shift of the optical signal and the operating wavelength shift due to temperature fluctuations. However, low loss and low XT can be maintained. As a result, the power penalty in the optical link can be minimized when detecting by the light receiver.

  Combining such a reception type optical integrated circuit device with the transmission type optical integrated circuit device shown in FIG. 10 or FIG. 11 is excellent in low loss and low XT by a small-sized optical integrated blue circuit device. An optical communication system can be constructed.

Here, the following supplementary notes are attached to the embodiments of the present invention including Examples 1 to 5.
(Additional remark 1) It has the 1st thru | or 3rd 1 * 2 optical coupler which branches an optical signal to the same amplitude, The 2nd connected to the 1st port of the branch side of the said 1st 2 * 2 optical coupler A 1 × 2 optical coupler, and a third 1 × 2 optical coupler connected to the second port on the branch side of the first 1 × 2 optical coupler, and an optical branching unit that branches into four equal parts, A first delay waveguide connected to the first port on the branch side of the 2 × 1 optical coupler, and a second delay connected to the second port on the branch side of the second 1 × 2 optical coupler and the waveguide, the third 1 × 2 and the third delay waveguide connected to a first port of the branch side of the optical coupler, the third 1 × 2 second port of the branch side of the optical coupler The fourth delay waveguides to be connected are arranged in this order, and the delay amount of the first delay waveguide to the fourth delay waveguide is the center wave of the delay interference unit. The first delay waveguide to the third delay waveguide are sequentially set to 2ΔL, 0, ΔL, and 3ΔL with respect to a predetermined delay amount ΔL determined by the diffraction order and the effective refractive index of the waveguide. The third delay waveguide has a phase shift amount of 0.5π radians, and the fourth delay waveguide has a phase shift amount of −0.5π radians. An optical delay unit, a first 2 × 2 optical coupler connected to the first delay waveguide and the second delay waveguide, for branching and coupling optical signals to the same amplitude, and the third A second 2 × 2 optical coupler connected to the delay waveguide and the fourth delay waveguide for branching and coupling optical signals to the same amplitude; and a second 2 × 2 optical coupler on the other end side of the first 2 × 2 optical coupler. A first optical waveguide connected to one port and a first port on the other end of the second 2 × 2 optical coupler A third 2 × 2 optical coupler for branching and coupling an optical signal connected to the third optical waveguide connected to the same amplitude, and a second port on the other end side of the first 2 × 2 optical coupler An optical signal connecting the second optical waveguide connected to the second optical waveguide and the fourth optical waveguide connected to the second port on the other end of the second 2 × 2 optical coupler is branched and coupled to the same amplitude. 4 2 × 2 optical couplers, and the second optical waveguide and the third optical waveguide have crossing portions intersecting each other, and the second optical waveguide and the third optical waveguide And an optical coupling portion having a phase shift amount of 0.25π radians with respect to one optical waveguide and the fourth optical waveguide.
(Appendix 2) Each ring resonator has a loop length having a resonance peak for each channel interval of the wavelength multiplexer / demultiplexer, and the center wavelength of the interferometer based on each delay waveguide and each ring resonator 2. The wavelength multiplexer / demultiplexer according to appendix 1, wherein the center wavelengths are different by π radians.
(Additional remark 3) As for each said ring resonator, the ratio which the said each delay waveguide and each said ring resonator couple | bond decreases, so that delay length increases, Additional remark 1 or Additional remark 2 characterized by the above-mentioned. Wavelength multiplexer / demultiplexer.
(Additional remark 4) Said 1st optical waveguide and said 4th optical waveguide have phase shift adjustment area | region of the same shape as the shape of the said cross | intersection part, Any one of Additional remark 1 thru | or Additional remark 3 characterized by the above-mentioned. Wavelength multiplexer / demultiplexer.
(Supplementary Note 5) The core layer of the optical branching unit, the core layer of the optical delay unit, and the core layer of the optical coupling unit are formed of a single crystal silicon core layer formed on a silicon substrate via an insulating film. 5. The wavelength multiplexer / demultiplexer according to any one of appendix 1 to appendix 4, which is characterized.
(Appendix 6) In addition to the wavelength multiplexer / demultiplexer according to any one of appendices 1 to 5, the third 2 × 2 optical coupler and the fourth 2 × 2 optical coupler of the wavelength multiplexer / demultiplexer A light source array having first to fourth laser elements that are connected to the four ports on the end side and oscillate at different wavelengths, and an optical modulator array that modulates signal light of each wavelength from the light source array. An optical integrated circuit device.
(Supplementary note 7) The light according to supplementary note 6, wherein the optical modulator array is inserted between the light source array and the third 2 × 2 optical coupler and the fourth optical coupler. Integrated circuit device.
(Supplementary note 8) The optical modulator array includes an optical waveguide connected to a port on the coupling side of the first 1 × 2 optical coupler and 4 different ring lengths arranged in the extending direction of the optical waveguide. The optical integrated circuit device according to appendix 6, which comprises two ring resonators.
(Supplementary note 9) In addition to the wavelength multiplexer / demultiplexer according to any one of supplementary notes 1 to 5, the third 2 × 2 optical coupler and the fourth 2 × 2 optical coupler of the wavelength multiplexer / demultiplexer An optical integrated circuit device comprising: a light receiver array having four light receiving elements connected to four ports on the end side.

1,10 optical branching section _{2 1 ~2 3, 11 1 ~11} 3 1 × 2 optical coupler _{2 11-2} 33, 12 ₁₁ to 12 ₃₃ Port 3,20 optical delay unit _{41 to 4,} 21 1 to 21 ₄ delay waveguides 5 _{1 to} 5 ₃ , 22 _{1 to} 22 ₃ ring resonators 6 and 30 Optical coupling portions 7 _{1 to} 7 ₄ , 31 _{1 to 3 14} 2 × 2 optical couplers 7 _{11 to} 7 ₄₄ , 32 _{11 to} 32 ₄₄ port _{8 1-8 4,} 33 to 333 ₄ optical waveguide _{9 1,} 34 1 to 34 ₃ intersecting portion 13 ₁ multimode interference region 40 the light modulator array ₄₁ 1-41 ₄ Mach-Zehnder modulator 42 light source array
43 ₁ to 43 ₄ Semiconductor laser elements 44 _{1 to} 44 ₄ Ring modulator 45 Light receiver array 46 _{1 to} 46 ₄ Light receiver 51 Silicon substrate 52 SiO ₂ film 53 Single crystal silicon layer 54 Resist pattern 55 Core layer 56 SiO ₂ film 57 Slab part 80 ₁ to 80 ₇ DMZI
81 _{1-81 7, 82} 1-82 ₇ arm waveguides ₈₃ 1 _{to 83 7,} 84 1 to 84 ₇ optical coupler _{85 3,} 85 5, 85 ₇ phase shifters

Claims (5)

Second 1 × 2 light having first to third 1 × 2 optical couplers for branching an optical signal to the same amplitude and connected to a first port on the branch side of the first 1 × 2 optical coupler An optical branching unit that branches into four equal parts by including a coupler and a third 1 × 2 optical coupler connected to the second port on the branching side of the first 1 × 2 optical coupler;
A first delay waveguide connected to the first port on the branch side of the second 1 × 2 optical coupler, and a second delay waveguide connected to the second port on the branch side of the second 1 × 2 optical coupler. delay guide the waveguide, and a third delay waveguide connected to said third 1 × 2 first port of the branch side of the optical coupler, the third 1 × 2 optical coupler branch side of the second of The fourth delay waveguides connected to the ports are arranged in this order, and the delay amount of the first delay waveguide to the fourth delay waveguide is determined by the center wavelength of the delay interference unit, the diffraction It is coupled to the first delay waveguide to the third delay waveguide so that the predetermined delay amount ΔL determined by the order and the effective refractive index of the waveguide becomes 2ΔL, 0, ΔL, and 3ΔL in order. with a ring resonator having the same structure, a phase shift amount of said third delay waveguide is 0.5π radians,且The optical delay phase shift amount of the fourth delay waveguide is -0.5π radians,
A first 2 × 2 optical coupler connected to the first delay waveguide and the second delay waveguide for branching and coupling an optical signal to the same amplitude; the third delay waveguide; and the fourth A second 2 × 2 optical coupler that is connected to the delay waveguide and branches and couples the optical signal to the same amplitude, and a first port that is connected to the first port on the other end of the first 2 × 2 optical coupler. A third 2 × optical signal for branching and coupling optical signals connecting the first optical waveguide and the third optical waveguide connected to the first port on the other end of the second 2 × 2 optical coupler to the same amplitude. Two optical couplers, a second optical waveguide connected to a second port on the other end side of the first 2 × 2 optical coupler, and a second port on the other end side of the second 2 × 2 optical coupler A fourth 2 × 2 optical coupler for branching and coupling an optical signal connected to the fourth optical waveguide connected to the same amplitude, the second optical waveguide and the third optical waveguide The optical waveguides have intersections intersecting each other, and the phase shift amount of the second optical waveguide and the third optical waveguide with respect to the first optical waveguide and the fourth optical waveguide is 0.25π radians. A wavelength multiplexer / demultiplexer having an optical coupling portion. Each ring resonator has a loop length having a resonance peak for each channel interval of the wavelength multiplexer / demultiplexer, and the center wavelength of the interferometer based on each delay waveguide and the center wavelength of each ring resonator are π The wavelength multiplexer / demultiplexer according to claim 1, wherein the wavelength multiplexer / demultiplexer is different in radians.   3. The wavelength multiplexer / demultiplexer according to claim 1, wherein the first optical waveguide and the fourth optical waveguide have a phase shift adjustment region having the same shape as the shape of the intersection. 4. . The wavelength multiplexer / demultiplexer according to any one of claims 1 to 3,
First to fourth laser elements that are connected to four ports on the other end side of the third 2 × 2 optical coupler and the fourth 2 × 2 optical coupler of the wavelength multiplexer / demultiplexer and oscillate at different wavelengths A light source array having
An optical integrated circuit device comprising: an optical modulator array for modulating signal light of each wavelength from the light source array. The wavelength multiplexer / demultiplexer according to any one of claims 1 to 3,
And a light receiver array having four light receiving elements connected to four ports on the other end side of the third 2 × 2 optical coupler and the fourth 2 × 2 optical coupler. Integrated circuit device.

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