JP6233075B2 - Touch panel sensor and input / output device including touch panel sensor - Google Patents

Description

  The present invention relates to a touch panel sensor with improved reliability related to electrical insulation. The present invention also relates to an input / output device including a touch panel sensor.

  Today, touch panel devices are widely used as input means. The touch panel device includes a touch panel sensor, a control circuit that detects a contact position on the touch panel sensor, wiring, and an FPC (flexible printed circuit board). In many cases, the touch panel device is used as an input means for various devices in which a display device such as a liquid crystal display or an organic EL (Electro-Luminescence) display is incorporated (for example, a ticket vending machine, an ATM device, a mobile phone, a game machine). And used together with a display device. In such a device, the touch panel sensor is disposed on the display surface of the display device, thereby enabling extremely direct input to the display device. The area | region which faces the display area of a display apparatus among touch panel sensors is transparent, and this area | region of a touch panel sensor comprises the active area which can detect a contact position (approach position).

  Touch panel devices are classified into various types based on the principle of detecting a contact position (approach position) on a touch panel sensor. In recent years, capacitive touch panel devices have attracted attention because they are optically bright, have good design properties, have a simple structure, and are superior in function. In a capacitively coupled touch panel device, when an external conductor (typically a finger) whose position is to be detected contacts (approaches) the touch panel sensor via a dielectric, a new strange capacitance is generated. The position of the object on the touch panel sensor is detected based on the change in capacitance caused by this strange capacity. The capacitive coupling method includes a surface type and a projection type, but the projection type is attracting attention because it is suitable for multi-touch recognition (multi-point recognition).

  A projected capacitively coupled touch panel sensor is formed in a dielectric, an electrode pattern formed in the above active area of the dielectric, and an inactive area (so-called frame region) outside the active area of the dielectric. Frame frame wiring. The electrode pattern is formed from a material having translucency and conductivity, such as a metal oxide. On the other hand, the frame wiring is used to transmit a signal from the electrode pattern to a control circuit provided outside the touch panel sensor or to transmit a drive signal from the control circuit to the electrode pattern. A metal layer formed of a conductive metal material is included.

  As a method for manufacturing a touch panel sensor, first, a laminate including a transparent conductive layer made of a metal oxide for constituting an electrode pattern, a metal layer made of a metal for constituting a frame wiring, and the like is prepared, and then A method of patterning an arbitrary layer of the laminate by a photolithography method or the like is known (for example, Patent Document 1).

JP 2010-257442 A

  Generally, the metal layer of the frame wiring of the touch panel sensor is formed using aluminum, copper, silver, or an alloy thereof. In particular, since copper, silver, or an alloy thereof has a low electrical resistivity, it is possible to prevent a signal flowing through the frame wiring from being damaged, and it is possible to detect a touch position with high accuracy. However, when silver, copper, or an alloy thereof is used for the metal layer, the metal ions in the metal layer gradually move due to an ion migration phenomenon or the like, and as a result, two adjacent frame wirings are short-circuited. It is possible that a problem will occur.

  An object of this invention is to provide the touch panel sensor which can solve such a subject effectively. Another object of the present invention is to provide an input / output device including a touch panel sensor.

  The present invention is a touch panel sensor, and includes a base material including an active area corresponding to a region where a touch position can be detected, a non-active area positioned around the active area, and the active area of the base material. A plurality of arranged electrode patterns, and a plurality of frame wirings electrically connected to the corresponding electrode patterns and arranged in the inactive area of the base material, A signal for driving the electrode pattern or a signal transmitted by the electrode pattern flows, and the frame wiring includes a metal layer, and the metal layer is formed of silver, copper, or an alloy thereof. And at least a portion of the plurality of frame wirings between at least a pair of adjacent frame wirings. A dummy wiring that is not electrically connected to any of the screens is disposed, the dummy wiring contains a conductive oxide, and the dummy wiring is a maximum of a signal that flows through the plurality of frame wirings. This is a touch panel sensor that is maintained at a dummy potential higher than the potential.

  In the touch panel sensor according to the present invention, the plurality of frame wires include a plurality of drive wires and a plurality of detection wires, and the touch panel sensor is disposed in a region between the plurality of drive wires and the plurality of detection wires. A shield wiring, the shield wiring is not electrically connected to any of the plurality of electrode patterns, the shield wiring is maintained at a shield potential lower than the dummy potential, The dummy wiring may be arranged in at least a part of the region between the shield wiring and the drive wiring and in at least a part of the region between the shield wiring and the detection wiring.

  In the touch panel sensor according to the present invention, the dummy wiring may be arranged for each frame wiring.

  In the touch panel sensor according to the present invention, the frame wiring includes a coating layer formed so as to cover the metal layer when viewed in a direction from the frame wiring side toward the base material side, and the coating layer includes: It may be formed of a conductive oxide.

  In the touch panel sensor according to the present invention, the dummy wiring and the covering layer of the frame wiring may be formed of the same material.

  The present invention includes a display device and a touch panel sensor disposed on a display surface of the display device, and the touch panel sensor includes an active area corresponding to an area in which a touch position can be detected, and a periphery of the active area. A non-active area positioned; a plurality of electrode patterns disposed in the active area of the base material; and the non-active area of the base material electrically connected to the corresponding electrode pattern A plurality of frame wirings arranged in an active area, the frame wiring including a metal layer, wherein the frame wiring receives a signal for driving the electrode pattern or a signal transmitted by the electrode pattern. The frame wiring includes a metal layer, and the metal layer is formed of silver, copper, or an alloy thereof, A dummy wiring that is not electrically connected to any of the plurality of electrode patterns is disposed in at least a part of a region between at least one pair of adjacent frame wirings among the plurality of frame wirings. The wiring includes a conductive oxide, and the dummy wiring is an input / output device maintained at a dummy potential equal to or higher than a maximum potential of a signal flowing through the plurality of frame wirings.

  According to the present invention, dummy wirings that are not electrically connected to any of the plurality of electrode patterns are disposed in at least a part of the region between at least one pair of adjacent frame wirings among the plurality of frame wirings. The dummy wiring is maintained at a dummy potential that is equal to or higher than the maximum potential of the signal flowing through the plurality of frame wirings. For this reason, it can be suppressed that the metal ions move from one metal layer of the pair of adjacent frame wirings to the other metal layer and the pair of adjacent frame wirings are short-circuited. In addition, since the dummy wiring is formed of a conductive oxide that is a material that hardly causes an ion migration phenomenon, movement of metal ions from the dummy wiring to the frame wiring adjacent to the dummy wiring is also prevented. As a result, a pair of adjacent frame wirings can be prevented from being short-circuited via the dummy wiring.

FIG. 1 is a development view showing an input / output device including a touch panel sensor according to an embodiment of the present invention. FIG. 2 is a plan view showing a touch panel sensor in the input / output device of FIG. 1. FIG. 3 is a partially enlarged view of the touch panel sensor of FIG. 4 is a cross-sectional view of the touch panel sensor of FIG. 2 taken along line IV. 5 is a cross-sectional view of the touch panel sensor of FIG. 2 along the V line. FIG. 6A is a diagram illustrating a waveform of a potential of a signal flowing through a drive wiring and a detection wiring of the touch panel sensor. FIG. 6B is a diagram illustrating a waveform of a potential of a dummy wiring of the touch panel sensor. FIG. 7A is a diagram for explaining a manufacturing method of the touch panel sensor. FIG. 7B is a diagram for explaining a manufacturing method of the touch panel sensor. FIG. 7C is a diagram for explaining a manufacturing method of the touch panel sensor. FIG. 7D is a diagram for explaining a manufacturing method of the touch panel sensor. FIG. 7E is a diagram for explaining a manufacturing method of the touch panel sensor. FIG. 8 is a diagram illustrating a circuit configuration of a touch panel sensor in the input / output device of FIG. 1.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS. In the drawings attached to the present specification, for the sake of illustration and ease of understanding, the scale, the vertical / horizontal dimension ratio, and the like are appropriately changed and exaggerated from those of the actual ones. Further, in the present specification, the terms “sheet”, “film”, and “plate” are not distinguished from each other only based on the difference in names. Thus, for example, “plate” is a concept that includes members and parts that can also be called sheets, films, and the like.

Touch Panel Device and Input / Output Device First, an input / output device 10 including a touch panel sensor 30 will be described with reference to FIG. As shown in FIG. 1, the input / output device 10 is configured by combining a touch panel sensor 30 and a display device (for example, a liquid crystal display device) 15. The illustrated display device 15 is configured as a flat panel display. The display device 15 includes a display panel 16 having a display surface 16 a and a display control unit (not shown) connected to the display panel 16. The display panel 16 includes an active area A1 that can display an image, and an inactive area (also referred to as a frame area) A2 that is disposed outside the active area A1 so as to surround the active area A1. . The display control unit processes information regarding the video to be displayed, and drives the display panel 16 based on the video information. That is, the display device 15 plays a role as an output device that outputs information such as characters and drawings as video.

  As shown in FIG. 1, the touch panel sensor 30 is disposed on the display surface 16 a of the display device 15. The touch panel sensor 30 is bonded to the display surface 16a of the display device 15 via an adhesive layer (not shown), for example.

  In the present embodiment, the touch panel sensor 30 is configured not only to provide a touch position detection function but also to protect the display device. Specifically, the base material 32 of the touch panel sensor 30 is configured to function as a protective plate for a display device. In this case, the surface 32 b on the viewer side of the base material 32 constitutes the surface of the input / output device 10 that is positioned closest to the viewer. In addition, each component of the touch panel sensor 30, for example, electrode patterns 41 and 42, which will be described later, the frame wiring 43, the shield wiring 45, and the dummy wiring 48 are all provided on the surface 32 a on the display device side of the substrate 32. The base material 32 is made of a material having sufficient strength for protecting the display device 15.

Touch Panel Sensor Next, the touch panel sensor 30 will be described with reference to FIGS. 2 is a plan view showing the touch panel sensor 30, and FIG. 3 is a partially enlarged view of the touch panel sensor 30 of FIG. 4 is a cross-sectional view of the touch panel sensor 30 of FIG. 2 along the IV line, and FIG. 5 is a cross-sectional view of the touch panel sensor 30 of FIG. 2 along the V line.

  The touch panel sensor 30 shown in FIG. 2 is configured as a projection-type capacitive coupling method, and can detect a contact position (also referred to as a touch position) of an external conductor (for example, a human finger) of the touch panel sensor 30. Has been. In addition, when the detection sensitivity of the capacitive coupling type touch panel sensor 30 is excellent, it is detected which area of the touch panel device the external conductor is approaching just by approaching the external conductor to the touch panel sensor 30. be able to. Accordingly, the “contact position” used here is a concept including an approach position that is not actually in contact but can be detected. The “capacitive coupling” method is also referred to as “capacitance” method or “capacitance coupling” method in the technical field of touch panels. It is treated as a term synonymous with the “capacitive coupling” method. Further, in the present embodiment, the touch panel sensor 30 shown in FIG. 2 is particularly configured as a mutual capacitance method, but is not limited thereto.

  As illustrated in FIG. 2, the touch panel sensor 30 includes a base material 32 including an active area Aa1 corresponding to a region where a touch position can be detected, and an inactive area Aa2 positioned around the active area Aa1, and a base material A plurality of frame patterns arranged in the non-active area Aa2 of the substrate 32 while being electrically connected to the corresponding electrode patterns 41 and 42 and the plurality of electrode patterns 41 and 42 arranged in the 32 active areas Aa1 43. The active area Aa1 and the inactive area Aa2 of the base material 32 are respectively partitioned corresponding to the active area A1 and the inactive area A2 of the display panel 16.

  Hereinafter, each element constituting the touch panel sensor 30 will be described in detail.

  The base material 32 functions as a dielectric in the touch panel sensor 30. As described above, the base material 32 also functions as a protective plate for the display device. For example, the base material 32 is made of glass or the like so as to have sufficient strength.

  As shown in FIGS. 2 and 3, the electrode patterns 41 and 42 include a plurality of first electrode patterns 41 extending along the first direction, for example, along the x direction of FIG. 2, and first electrodes orthogonal to the first direction. A plurality of second electrode patterns 42 extending along the two directions, for example, along the y direction of FIG. 2 are provided. In the present embodiment, the first electrode pattern 41 includes an x-direction connection portion 41a extending linearly along the x-direction, an x-direction electrode unit 41b connected in the x-direction via the x-direction connection portion 41a, have. The second electrode pattern 42 is located between the y-direction connection portion 42a that extends linearly along the y-direction and the x-direction electrode unit 41b, and is connected to the y-direction via the y-direction connection portion 42a. Direction electrode unit 42b. As shown in FIGS. 2 and 3, each of the x-direction electrode unit 41b and the y-direction electrode unit 42b has a substantially square shape.

  The material constituting the electrode patterns 41 and 42 is not particularly limited as long as it has conductivity, but in this embodiment, the material constituting the x-direction electrode unit 41b and the y-direction electrode unit 42b is a conductive material. A transparent conductive material having translucency is used. As the transparent conductive material constituting the x-direction electrode unit 41b and the y-direction electrode unit 42b, indium tin oxide (ITO), zinc oxide, indium oxide, antimony-added tin oxide, fluorine-added tin oxide, aluminum-added zinc oxide, potassium Conductive oxides such as added zinc oxide, silicon-added zinc oxide, zinc oxide-tin oxide, indium oxide-tin oxide, and zinc oxide-indium oxide-magnesium oxide are used. Two or more of these conductive oxides may be combined.

  The material constituting the x-direction connection portion 41a and the y-direction connection portion 42a is not particularly limited as long as it has conductivity. For example, in the present embodiment, the same material as that of the x-direction electrode unit 41b and the y-direction electrode unit 42b is used as the material constituting the x-direction connection portion 41a. As described above, the x-direction connection portion 41a is formed of the same material as the material of the x-direction electrode unit 41b and the y-direction electrode unit 42b. The directional electrode unit 41b and the y-direction electrode unit 42b can be formed in the same process.

Moreover, as a material which comprises the y direction connection part 42a, the material same as the material of metal layers 43xm, 43ym, and 45m of the frame wiring 43 and the shield wiring 45 mentioned later can be used. Since the y-direction connection portion 42a is formed of the same material as the metal layers 43xm, 43ym, and 45m as described above, the y-direction connection portion 42a is formed in the metal layers 43xm and 43ym in the touch panel sensor manufacturing process described later. , 45 m can be formed by the same process.
Or as a material which comprises the y direction connection part 42a, you may use the transparent conductive material similar to the x direction electrode unit 41b and the y direction electrode unit 42b. When the y-direction connection portion 42a is made of a metal material, an ion migration phenomenon described later may occur between the intersecting x-direction connection portions 41a, but the y-direction connection portion is made of a transparent conductive material. By configuring 42a, the possibility of such an ion migration phenomenon occurring can be eliminated or reduced.

  As shown in FIGS. 4 and 5, the y-direction connection portion 42 a is formed on the substrate 32 side with respect to the x-direction connection portion 41 a. An insulating layer 47 is interposed between the y-direction connection portion 42a and the x-direction connection portion 41a, thereby preventing the y-direction connection portion 42a and the x-direction connection portion 41a from being electrically short-circuited. It is. The material for forming the insulating layer 47 is not particularly limited as long as it is an electrically insulating material, but in this embodiment, an acrylic resin having transparency is used.

  The frame wiring 43 is a channel through which a signal for driving the electrode patterns 41 and 42 or a signal transmitted by the electrode patterns 41 and 42 flows, and has a metal layer. A plurality of the frame wirings 43 are arranged in the inactive area Aa2, and are electrically connected to the corresponding electrode patterns 41 and 42 at one end and the corresponding terminal portion 44 at the other end.

  In the present embodiment, the plurality of frame wires 43 include a plurality of drive wires 43x connected to the corresponding first electrode patterns 41, and detection wires 43y electrically connected to the corresponding second electrode patterns 42. , Including. That is, in the present embodiment, the first electrode pattern 41 functions as a drive electrode, and the second electrode pattern 42 functions as a detection electrode. However, the present invention is not limited to this, and a plurality of frame wirings 43 are connected to the electrode patterns 41 and 42 so that the first electrode pattern 41 functions as a detection electrode and the second electrode pattern 42 functions as a drive electrode. May be.

  The metal layer 43xm of the drive wiring 43x is electrically connected to the first electrode pattern 41 at one end, and is electrically connected to the corresponding terminal portion 44 at the other end. In addition, the metal layer 43ym of the detection wiring 43y is electrically connected to the second electrode pattern 42 at one end and is electrically connected to the corresponding terminal portion 44 at the other end. As a material constituting the metal layers 43xm and 43ym, silver, copper, or an alloy thereof, which is a highly conductive metal material, is used.

In the present embodiment, the drive wiring 43x is such that the potential of a signal flowing through the drive wiring 43x changes between the maximum voltage Va and the minimum voltage Vg as shown in FIG. 6A during the touch position detection operation. Further, the detection wiring 43y also changes the potential of the signal flowing through the detection wiring 43y between the maximum voltage Va and the minimum voltage Vg as shown in FIG. 6A during the touch position detection operation. Here, the voltage Va is higher than the GND voltage Vg of the input / output device 10 but is not more than the voltage Vs of the power supply 22 of the input / output device 10.
There is no particular limitation on the way of changing the signal flowing through the drive wiring 43x, that is, the shape of the signal. As an example, the shape of the signal flowing through the drive wiring 43x can be a signal that changes in a pulse shape.

  The shield wiring 45 is a wiring that is not electrically connected to any of the plurality of electrode patterns 41 and 42, and is maintained at a stable shield potential. For example, in FIG. 2, the shield wiring 45 is a frame adjacent to a region between the plurality of drive wirings 43 x and the plurality of detection wirings 43 y and a region outside the frame wiring 43 in the inactive area Aa <b> 2. One each is provided along the wiring 43. The “outside” means a side close to the outer edge of the base material 32. But the area | region in which the shield wiring 45 is provided, and the number of the shield wiring 45 in the said area | region are not restricted to this. The shield wiring 45 of the present embodiment is maintained at the same potential as the GND potential Vg of the input / output device 10. That is, in this embodiment, the shield potential is the potential Vg. However, the shield potential is not limited to the potential Vg.

  In the present embodiment, the shield wiring 45 includes a metal layer 45m. The material constituting the metal layer 45m is not particularly limited as long as it has conductivity, but in the present embodiment, the same material as the metal layers 43xm and 43ym of the frame wiring 43, that is, silver, copper, or these Alloys are used.

  By the way, a potential difference is generated between the frame wirings 43 adjacent to each other or between the frame wirings 43 and the shield wirings 45 adjacent to each other due to the potential difference between the wirings. For example, in the present embodiment, the potentials of the drive wiring 43x and the detection wiring 43y of the frame wiring 43 change between the maximum potential Va and the minimum potential Vg. Therefore, a potential difference is generated between the drive wirings 43x adjacent to each other and between the detection wirings 43y adjacent to each other. Further, the potential of the shield wiring 45 is constant at the potential Vg. Therefore, a potential difference also occurs between the drive wiring 43x and the shield wiring 45 adjacent to each other and between the detection wiring 43y and the shield wiring 45 adjacent to each other.

  As described above, when a potential difference is generated between the frame wirings 43 adjacent to each other or between the frame wirings 43 adjacent to each other and the shield wirings 45, the metal ions in the metal layer of the high potential side wiring are reduced due to the ion migration phenomenon. The wire may gradually move toward the potential side wiring and short-circuit with the low potential side wiring. In particular, when silver, copper, or an alloy thereof is used as a material constituting the metal layers 43xm, 43ym, and 45m, there is a high possibility that an ion migration phenomenon occurs, and the required insulation reliability of the frame wiring 43 and the shield wiring 45 is required. Is difficult to realize.

  As a result of repeated trial and error in order to solve such problems, the present inventor has found the following knowledge. That is, in any of the plurality of electrode patterns 41 and 42 in at least part of the region between the frame wirings 43 adjacent to each other and at least part of the region between the frame wirings 43 and the shield wiring 45 adjacent to each other. By disposing dummy wirings 48 that are not electrically connected, and maintaining the potential of the dummy wirings 48 higher than the potentials of the adjacent frame wirings 43 and shield wirings 45, the frame wirings 43 adjacent to each other or between each other. It has been found that the occurrence of the ion migration phenomenon between the adjacent frame wiring 43 and shield wiring 45 is suppressed. Further, by using a material that does not easily cause an ion migration phenomenon such as a conductive oxide as a material constituting the dummy wiring 48, ions between the dummy wiring 48 and the frame wiring 43 or the shield wiring 45 adjacent to each other are used. The occurrence of the migration phenomenon is also suppressed, and it has been found that a pair of frame wirings 43 adjacent to each other and a short circuit between the frame wiring 43 and the shield wiring 45 adjacent to each other via the dummy wiring 48 are suppressed. It was.

  In order to maintain the potential of the dummy wiring 48 higher than the potential of the adjacent frame wiring 43 and the shield wiring 45 during the touch position detection operation, the dummy wiring 48 is equal to or higher than the maximum potential Va of the signal flowing through the plurality of frame wirings 43. It is maintained at a dummy potential. In the present embodiment, the dummy wiring 48 is electrically connected to a corresponding terminal portion 44 at one end thereof, and is connected to an arbitrary functional portion via the terminal portion 44. This is maintained at the same potential as the potential Vs of the power source 22.

  In the present embodiment, the dummy wiring 48 is arranged for each frame wiring 43 and for each shield wiring 45, but is not limited thereto. For example, the dummy wiring 48 may be disposed only in a region between the shield wiring 45 and the plurality of frame wirings 43. Further, for example, the dummy wiring 48 may be disposed only in a region between a pair of adjacent frame wirings 43 among the plurality of frame wirings 43.

  Further, in the present embodiment, the dummy wirings 48 are arranged so as to cover the entire area between the frame wirings 43 adjacent to each other or the area between the frame wirings 43 adjacent to each other and the shield wiring 45. However, it may be provided only in a part of the region.

  Furthermore, the present inventor coats the metal layers 43xm and 43ym of the frame wiring 43 and the metal layer 45m of the shield wiring 45 with a conductive oxide having higher corrosion resistance than a metal material, thereby causing an ion migration phenomenon. It has been found that the occurrence of is suppressed more remarkably.

  Each frame wiring 43 of the present embodiment has coating layers 43xc and 43yc formed so as to cover the metal layers 43xm and 43ym when viewed from the frame wiring 43 side toward the base material 32 side. . The shield wiring 45 has a coating layer 45c formed so as to cover the metal layer 45m when viewed in the direction from the shield wiring 45 side toward the base material 32 side. Furthermore, in the present embodiment, the covering layers 43xc, 43yc, and 45c are made of the same material as that constituting the x-direction connecting portion 41a, the x-direction electrode unit 41b, and the y-direction electrode unit 42b, that is, a conductive oxide. It is configured. As described above, the coating layers 43xc, 43yc, and 45c are formed of the same material as the material of the x-direction connection portion 41a, the x-direction electrode unit 41b, and the y-direction electrode unit 42b, so that the touch panel sensor manufacturing process described later is performed. The covering layers 43xc, 43yc, and 45c can be formed in the same process as the process of forming the x-direction connecting portion 42a, the x-direction electrode unit 41b, and the y-direction electrode unit 42b. Furthermore, in this case, when performing the formation process of the x-direction connection portion 42a, the x-direction electrode unit 41b, and the y-direction electrode unit 42b, the metal layers 43xm, 43ym, and 45m of the frame wiring 43 and the shield wiring 45 are described later. The conductive oxide layer 51 and the resist layer are covered. For this reason, the metal layers 43xm, 43ym, and 45m of the frame wiring 43 and the shield wiring 45 are damaged by the etching solution for etching the x-direction connecting portion 41a, the x-direction electrode unit 41b, and the y-direction electrode unit 42b. Is prevented. When the dummy wiring 48 is made of a conductive oxide, the dummy wiring 48 is further formed in the same process as the process of forming the x-direction connecting portion 42a, the x-direction electrode unit 41b, and the y-direction electrode unit 42b. You can also.

  Next, with reference to FIG. 3, the width of each wiring, the width of the metal layer of each wiring, and the interval between adjacent wirings will be described.

  In FIG. 3, the symbol w <b> 1 represents the width of the metal layers 43 xm and 43 ym of the frame wiring 43. In determining the width w1 of the metal layers 43xm and 43ym of the frame wiring 43, the electric resistance value required for the frame wiring 43 is taken into consideration. For example, the width w1 is in the range of 15 to 200 μm.

  A symbol w2 represents the width of the metal layer 45m of the shield wiring 45. In determining the width w2 of the metal layer 45m of the shield wiring 45, the stability of the potential of the shield wiring 45, the width of the inactive area Aa2, and the like are considered. The width w2 is in the range of 15 to 200 μm, for example.

  The symbol w3 represents the width of the dummy wiring 48. In determining the width w <b> 3 of the dummy wiring 48, the limit of patterning accuracy when the dummy wiring 48 is formed by patterning a conductive oxide layer 51 described later is considered. For example, the width w3 is 15 μm or more.

  Reference sign d1 represents the distance between the metal layers 43xm, 43ym, and 45m and the dummy wirings 48 adjacent to the metal layers 43xm, 43ym, and 45m. In determining the distance d1 between the metal layers 43xm, 43ym, and 45m and the dummy wirings 48 adjacent to the metal layers 43xm, 43ym, and 45m, patterning of the conductive oxide layer 51 and the metal layer 52 described later is performed. The limit of accuracy is taken into account. For example, the distance d1 is 20 μm or more.

  The symbol d2 represents the distance between the dummy wiring 48 and the frame wiring 43 or the shield wiring 45 adjacent to the dummy wiring 48. In determining the distance d2 between the dummy wiring 48 and the frame wiring 43 or the shield wiring 45 adjacent to the dummy wiring 48, the covering layers 43xc, 43yc, and 45c of the dummy wiring 48 and the frame wiring 43 or the shield wiring 45 are determined. It is necessary to consider the accuracy of patterning. Therefore, the distance d2 is preferably 15 μm or more.

Method for Manufacturing Touch Panel Sensor Next, a method for manufacturing the touch panel sensor 30 having the above configuration will be described with reference to FIGS. 7A to 7E. 7A to 7E are diagrams showing a layer configuration in each step of the manufacturing method of the touch panel sensor 30 at a position along the V line of the touch panel sensor 30 of FIG.

  First, as shown in FIG. 7A, a base material 32 is prepared. As described above, the base material 32 can also function as a protective plate for a display device. Next, as shown in FIG. 7B, a metal layer 52 is provided on the surface 32 a of the base material 32 on the display device side. As a method of providing the metal layer 52, for example, a sputtering method or a plating method can be used. Thereafter, as shown in FIG. 7C, the metal layer 52 is patterned. As a result, the metal layers 43xm, 43ym, and 45m for forming the y-direction connecting portion 42a and the frame wiring 43 and the shield wiring 45 can be obtained at the same time. The step of patterning the metal layer 52 includes, for example, first providing a resist layer on the metal layer 52, then exposing and developing the resist layer to pattern the resist layer, and then forming the metal layer 52 using the resist layer as a mask. Etching and removing the resist layer.

  Next, as shown in FIG. 7D, an insulating layer 47 is provided on a portion of the metal layer 52 that constitutes the above-described y-direction connection portion 42a. The method for providing the insulating layer 47 is not particularly limited, and a screen printing method, a photolithography method, or the like can be used.

  Thereafter, as shown in FIG. 7E, a conductive oxide layer 51 is provided on the metal layer 52 and the insulating layer 47. As a method of providing the conductive oxide layer 51, for example, a sputtering method can be used. Thereafter, the conductive oxide layer 51 is patterned using the same method as that for patterning the metal layer 52 described above. As a result, the aforementioned x-direction connecting portion 42a, x-direction electrode unit 41b, y-direction electrode unit 42b, dummy wiring 48, and covering layers 43xc, 43yc, 45c of the frame wiring 43 and shield wiring 45 can be obtained simultaneously. . In this way, the touch panel sensor 30 shown in FIG. 5 can be manufactured. Then, the input / output device 10 can be obtained by combining the touch panel sensor 30 and the display device 15.

  Specifically, as shown in FIG. 8, a plurality of frame wires 43 are connected to the control circuit 21 of the touch panel sensor 30 via corresponding terminals 44, and a plurality of shield wires 45 are connected via corresponding terminals 44. Connect to the GND of the output device 10. Further, the plurality of dummy wirings 48 are connected to the power supply 22 of the input / output device 10 via the corresponding terminals 44. However, the dummy wiring 48 may be connected to another functional unit as long as it is a functional unit that can stably maintain the potential of the dummy wiring 48 at a dummy potential equal to or higher than the maximum potential Va of the signal flowing through the frame wiring 43. . Further, the shield wiring 45 may be connected to another functional unit as long as it is a functional unit capable of stably maintaining the shield wiring potential at a shield potential lower than the dummy potential.

Effect of the touch panel will be described the operation of the touch panel 30 during the operation of the input-output device 10 with reference to FIGS. 6A and 6B. During the operation of the input / output device 10, the potentials of the drive wiring 43x and the detection wiring 43y change between the minimum potential Vg and the maximum potential Va as shown in FIG. 6A. Further, the potential of the shield wiring 45 connected to GND is constant at the potential Vg. Furthermore, as shown in FIG. 6B, the potential of the dummy wiring 48 connected to the power supply 22 of the input / output device 10 is constant at a potential Vs equal to or higher than the potential Va. Thereby, the dummy wiring 48 is maintained at a potential equal to or higher than the potentials of the drive wiring 43x, the detection wiring 43y, and the shield wiring 45 adjacent to the dummy wiring 45. In general, the movement of metal ions is caused by a potential difference as a driving force. Therefore, metal from the metal layers 43xm, 43ym, 45m of the drive wiring 43x, the detection wiring 43y, and the shield wiring 45 to the wiring adjacent to the metal layers 43xm, 43ym, 45m. Ion movement is suppressed. Further, since the dummy wiring 48 is formed of a material that does not easily cause an ion migration phenomenon, movement of metal ions of the dummy wiring 48 from the dummy wiring 48 to a wiring adjacent to the dummy wiring 48 is also prevented.

  According to the present embodiment, at least a part of the plurality of frame wirings 43 between at least one pair of adjacent frame wirings 43 is electrically connected to both of the plurality of electrode patterns 41 and 42. No dummy wiring 48 is disposed, and the potential of the dummy wiring 48 is maintained at a dummy potential equal to or higher than the maximum potential Va of the signal flowing through the plurality of frame wirings 43. For this reason, it is suppressed that a metal ion moves from one metal layer 43xm or 43ym of the said pair of frame wiring 43 to the other metal layer 43ym or 43xm, and the said pair of frame wiring 43 short-circuits. Can be done. In addition, since the dummy wiring 48 is formed of a conductive oxide that is a material that hardly causes an ion migration phenomenon, movement of metal ions from the dummy wiring 48 to the frame wiring 43 adjacent to the dummy wiring 48 is also prevented. . As a result, it is possible to prevent the frame wirings adjacent to each other from being short-circuited via the dummy wiring.

  Thus, according to the present embodiment, the insulation reliability of the frame wiring 43 can be increased.

30 Touch Panel Sensor 32 Base Material 41 First Electrode Pattern 42 Second Electrode Pattern 43 Frame Wiring 45 Shield Wiring 48 Dummy Wiring A1 Active Area A2 Inactive Area

Claims (6)

A touch panel sensor,
A substrate including an active area corresponding to an area where a touch position can be detected, and an inactive area located around the active area;
A plurality of electrode patterns arranged in the active area of the substrate;
A plurality of frame wirings that are electrically connected to the corresponding electrode pattern and arranged in the inactive area of the base material,
The frame wiring is a signal through which a signal for driving the electrode pattern or a signal transmitted by the electrode pattern flows,
The frame wiring includes a metal layer,
The metal layer is formed of silver, copper, or an alloy thereof,
A dummy wiring that is not electrically connected to any of the plurality of electrode patterns is disposed in at least a part of a region between at least a pair of adjacent frame wirings among the plurality of frame wirings,
The dummy wiring contains a conductive oxide,
The touch panel sensor, wherein the dummy wiring is maintained at a dummy potential equal to or higher than a maximum potential of a signal flowing in the plurality of frame wirings. The plurality of frame wires include a plurality of drive wires and a plurality of detection wires,
The touch panel sensor further includes a shield wiring disposed in a region between the plurality of drive wirings and the plurality of detection wirings,
The shield wiring is not electrically connected to any of the plurality of electrode patterns,
The shield wiring is maintained at a shield potential lower than the dummy potential,
The dummy wiring is disposed in at least a part of a region between the shield wiring and the drive wiring and at least a part of a region between the shield wiring and the detection wiring. Touch panel sensor according to.   The touch panel sensor according to claim 1, wherein the dummy wiring is arranged for each frame wiring. The frame wiring includes a coating layer formed so as to cover the metal layer when viewed in the direction from the frame wiring side toward the base material side,
The touch panel sensor according to claim 1, wherein the coating layer is made of a conductive oxide.   The touch panel sensor according to claim 4, wherein the dummy wiring and the covering layer of the frame wiring are formed of the same material. A display device;
A touch panel sensor disposed on a display surface of the display device,
The touch panel sensor
A substrate including an active area corresponding to an area where a touch position can be detected, and an inactive area located around the active area;
A plurality of electrode patterns arranged in the active area of the substrate;
A plurality of frame wirings electrically connected to the corresponding electrode patterns and arranged in the inactive area of the base material, the frame wiring including a metal layer, and
The frame wiring is a signal through which a signal for driving the electrode pattern or a signal transmitted by the electrode pattern flows,
The frame wiring includes a metal layer,
The metal layer is formed of silver, copper, or an alloy thereof,
A dummy wiring that is not electrically connected to any of the plurality of electrode patterns is disposed in at least a part of a region between at least a pair of adjacent frame wirings among the plurality of frame wirings,
The dummy wiring contains a conductive oxide,
The input / output device, wherein the dummy wiring is maintained at a dummy potential equal to or higher than a maximum potential of a signal flowing through the plurality of frame wirings.

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