JP6198701B2 - Shape measuring apparatus and shape measuring method - Google Patents

Description

  The present invention relates to a technique for measuring the surface shape of an object to be measured in which grooves are spirally extended.

  For example, a high-weight and long rod-shaped workpiece having a length of 1 m and a diameter of 30 cm or more is processed by a cutting machine to form a spiral groove in the workpiece, and a workpiece such as a screw, propeller, drill, etc. Is being made. Such workpieces are evaluated for surface shape in order to prevent the production of defective products. For example, if the workpiece has a male-female structure that is fitted to the receiving workpiece, the workpiece is lifted from the cutting machine with a crane and fitted to the receiving workpiece, with a clearance gauge. Dozens of gaps are manually measured to evaluate the shape of the workpiece. Then, if there is a problem as a result of evaluating the shape, the workpiece is lifted again by the crane, installed in the cutting machine, and the problem portion is processed. The above is repeated, and finally a workpiece having a shape that satisfies the standard is manufactured.

  As described above, the conventional evaluation method has a problem that it takes a work day because the work is required to be transferred from the cutting machine using a crane. Therefore, a new evaluation method for solving this problem is desired.

  Patent document 1 discloses the technique which measures the tooth root diameter of the rotor of a screw compressor by a touch sensor system. Specifically, the object to be measured is swung, and the measurement unit including the measuring element and the differential transformer is advanced and brought into contact with the object to be measured. When the output signal of the differential transformer coincides with a value corresponding to the center position of the measurement range, the movement of the measurement unit is stopped, and the position of the measurement unit is read on a high-precision scale and stored as the reading value Si. . And the increase / decrease in the contact amount of the to-be-measured surface of the to-be-measured object is measured by the differential transformer through the measuring element, and the minimum value Ti is stored. Then, the root diameter is obtained using the reading value Si and the minimum value Ti.

  Patent Document 2 discloses a technique for measuring the shape of a measurement object by bringing a spherical contact provided at the tip of the probe into contact with the surface of the measurement object so that the center axis of the probe is vertical.

JP-A-11-108653 JP 2010-32373 A

  Here, if the surface shape of the work piece can be measured with high resolution while attached to the cutting machine, the work piece as described above is mounted using a crane and the gaps at several tens of positions are measured with a gap gauge. This eliminates the need for evaluating the shape of the workpiece in a short time.

  However, in both Patent Documents 1 and 2, since the surface shape of the measurement object is measured by bringing the contactor into contact with the measurement object, the surface shape of the measurement object is measured with high resolution. Takes a lot of time. Therefore, even if the techniques of Patent Documents 1 and 2 are applied to the above-described shape evaluation, the problem that it takes a work day is not solved.

  An object of the present invention is to provide a technique for measuring the shape of a measurement object having a groove extending in a spiral shape with high resolution and in a short time.

  A shape measuring device according to an aspect of the present invention is a shape measuring device that measures the surface shape of a measurement object in which a groove extends in a spiral shape, and the shape of a groove cross section that is a cross section with respect to the extending direction of the groove. A non-contact measuring unit, a moving unit that moves the measuring object in the longitudinal direction while rotating the measuring object about the longitudinal direction, and the groove of the measuring object that is moved while being rotated by the moving unit And a control unit that causes the sensor unit to continuously measure the shape of the cross section to measure the entire shape of the groove.

  In this case, since the shape of the groove cross-section is continuously measured by moving the object to be measured while rotating with respect to the longitudinal direction, the height data indicating the overall shape of the groove can be obtained in high resolution and in a short time. It can be measured.

  In the above aspect, the sensor unit measures the shape of the groove cross section by irradiating the groove with a light cutting line and receiving reflected light from the groove. An irradiation side surface that is a surface including the light cutting line and the light irradiation port may be arranged so as to coincide with the groove cross section.

  In this case, since the optical cutting line is irradiated on the groove cross section, the shape of the groove cross section at an arbitrary position can be measured by continuously measuring the measurement object that is moved while being rotated in the longitudinal direction.

  Further, in the above aspect, there are a plurality of the sensor units, and the plurality of sensor units are arranged so that the irradiation side faces coincide with each other and the center line of the irradiation side faces the center position of the groove cross section. May be.

  In this case, since there are a plurality of sensor units, the shape of a deep groove that is difficult to measure with one sensor unit can be measured. Moreover, since each sensor part is arrange | positioned so that an irradiation side surface may correspond and the centerline of an irradiation side surface passes through the center position of a groove | channel cross section, a groove | channel can be measured as if one sensor part was used.

  Further, in the above aspect, the measurement object is caused to move in the longitudinal direction while rotating the machining object around the longitudinal direction as a central axis by bringing a machining blade into contact with a cylindrical machining object. The moving part may rotate and move the measuring object at the same rotational speed and moving speed as when processing the processing object.

  In this case, in the cutting machine, the shape measuring device can be configured only by replacing the processing blade with the sensor unit. Therefore, the shape of the measurement object can be evaluated without lifting the measurement object with a crane and placing it on the inspection jig and fitting it onto a male-female structure workpiece. As a result, the shape of the measurement object can be evaluated in a short time.

  Further, in the above aspect, the measurement object includes a plurality of grooves, and the control unit extracts the measurement object when the measurement of the entire shape of any one groove is completed by the sensor unit. It may be rotated by an angle, and the measurement of the next groove may be started by the sensor unit.

  In this case, even if the measurement object has a plurality of grooves, the entire shape of each groove can be measured at high speed and with high resolution.

  Further, in the above aspect, the measurement object includes a plurality of grooves, and the control unit extracts the measurement object when the measurement of the entire shape of any one groove is completed by the sensor unit. The sensor unit may start measurement of a convex portion between the groove 1 and the groove adjacent to the groove 1 by rotating the angle by half.

  In this case, a convex portion between the grooves can be measured.

  Moreover, in the said aspect, it is provided so that a movement to the position outside the said installation area from the installation area | region of the said measurement target object is possible, and the attachment part to which a processing blade and the said sensor part are attached so that attachment or detachment is possible, You may further provide the tool changer which attaches the said processing blade or the said sensor part to the moved said attaching part.

  In this case, the machining blade and the sensor unit can be easily exchanged, and the evaluation result of the shape of the measurement object can be easily fed back to the machining conditions.

  In the above aspect, the measurement object has cylindrical shaft portions formed at both ends, and the control unit causes the sensor unit to measure the shapes of the shaft portions at both ends of the measurement object, and Calculate the height data of each position of the central axis of the measurement object using the height data indicating the shape of the shaft part, and the shape of the groove cross section based on the calculated height data of each position of the central axis You may calculate the height data which shows.

  In this case, since the height data indicating the shape of the groove cross section is calculated with reference to the central axis of the measurement object, the overall shape of the groove can be easily evaluated.

  In the above aspect, the sensor unit measures the shape of the groove cross section by irradiating the groove with a light cutting line and receiving reflected light from the groove. The sensor unit is relatively moved at a predetermined pitch in the extending direction of the groove, and the sensor unit is caused to measure the shape of the groove cross section a plurality of times. The shape of the groove cross section may be calculated.

  In this case, when measuring the shape of one groove cross section, the sensor unit is moved by a predetermined pitch in the extending direction of the groove, the shape of the groove cross section is measured a plurality of times, and a plurality of measured values are measured. By using this, the shape of one groove cross section is calculated. Therefore, noise due to the interference pattern of the light source of the light cutting line and minute irregularities on the projection surface of the light cutting line can be removed from the measurement value, and the shape of one groove cross section can be accurately obtained.

  In the above aspect, each time the sensor unit moves relative to the extending direction of the groove by the predetermined pitch, the sensor unit captures a plurality of pieces of image data of the light cutting line by imaging the light cutting line. Then, the control unit generates averaged image data by averaging the luminance of each pixel of the acquired plurality of image data, and calculates the shape of the one groove cross section using the averaged image data. May be.

  In this case, the luminance of each pixel of the plurality of image data is averaged, and averaged image data is generated. Therefore, the light section line included in the averaged image data is a light section line from which luminance unevenness has been removed. As a result, the shape of one groove cross section can be obtained accurately.

  Further, in the above aspect, the apparatus further includes a sensor moving unit that moves the sensor unit in the extending direction of the groove, and the control unit controls the moving unit when measuring the one groove cross section. The measurement object may be stopped and the sensor moving unit may be controlled to move the sensor unit.

  In this case, when measuring the shape of the cross section of one groove, the measuring object is stopped and the sensor unit is moved in the extending direction of the groove, so that the optical cutting line does not deviate from the groove. Irradiated, the shape of one groove cross section can be accurately obtained.

  According to the present invention, it is possible to measure height data indicating the entire shape of the groove in a short time with high resolution.

It is a whole lineblock diagram showing an example of a shape measuring device in an embodiment of the invention. It is a schematic diagram which shows an example of a detailed structure of a sensor unit. It is the figure which showed an example of the measuring object. The external view of the measuring object in which two grooves were formed is shown. It is explanatory drawing of a mode that the measuring object in which the two groove | channels were formed is measured. It is the figure which showed a mode that the shape of a convex part was measured. It is a block diagram which shows an example of the electrical structure of the shape measuring device in embodiment of this invention. It is a flowchart which shows an example of the flow of a process of the shape measuring device by embodiment of this invention. It is the figure which showed the height data which shows the whole shape of the groove | channel of a measuring object visually, the upper figure shows a measuring object and the lower figure shows the height data of a groove | channel. It is a figure which shows the image data of a light section line, the left figure shows the image data before noise is removed, and the right figure shows the image data after noise was removed. It is the figure which showed the principal part of the shape measuring apparatus in Embodiment 2. FIG. It is the figure which showed the optical cutting line which the sensor unit moved by predetermined pitch when measuring the shape of 1 groove | channel cross section. It is a flowchart which shows operation | movement of the shape measuring apparatus in Embodiment 2, and is a flowchart which shows the subroutine of S808. 9 is a flowchart illustrating processing for a plurality of image data obtained by measuring a certain section in the second embodiment.

(Embodiment 1)
FIG. 1 is an overall configuration diagram illustrating an example of a shape measuring apparatus according to an embodiment of the present invention. This shape measuring device is a device that measures the surface shape of the measuring object 300 in which the groove 302 is formed in a spiral shape. The shape measuring apparatus includes a pedestal unit 100, a stage 110 (an example of a moving unit), a support unit 120 (an example of a moving unit), a sensor unit 130, a mounting unit 140, a ceiling unit 150, and a tool changer 160. In FIG. 1, the X direction indicates the longitudinal direction of the measurement object 300, the + X direction indicates the right side of the longitudinal direction, and the -X direction indicates the left side of the longitudinal direction. Further, the Y direction indicates the vertical direction, the + Y direction indicates the upward direction, and the −Y direction indicates the downward direction. The Z direction indicates a direction orthogonal to each of the X direction and the Y direction.

  As the measurement object 300, for example, a screw, a propeller, a drill, or the like is employed.

  The pedestal portion 100 is, for example, a flat plate shape and is fixed with respect to the ground. The stage 110 is attached to the pedestal 100 so as to be movable in the + X direction and the −X direction, that is, movable in the longitudinal direction of the measurement object 300.

  For example, a guide groove (not shown) is provided in the pedestal portion 100 along the X direction, and a roller (not shown) that fits into the guide groove is provided on the bottom surface of the stage 110. Thereby, the stage 110 can move along the X direction on the pedestal portion 100 by the roller being guided along the guide groove.

  A pair of support portions 120 and 120 are erected on both ends of the stage 110 in the X direction. The support part 120 on the −X direction side supports the shaft part 304 on the −X direction side of the measurement object 300, and the support part 120 on the + X direction side supports the shaft part 304 on the + X direction side of the measurement object 300. Here, the support parts 120 and 120 support the measurement object 300 such that the longitudinal direction of the measurement object 300 is parallel to the X direction.

  The measurement object 300 is supported by a pair of support portions 120 and 120 so as to be rotatable about a central axis Z1 in the longitudinal direction as a rotation axis. Specifically, each of the support portions 120 and 120 includes a disk-like connection portion (not shown) to which the measurement object 300 is connected. The connecting portion is attached to the main body portion of the support portion 120 so as to be rotatable about the central axis Z1 as a rotation axis. Therefore, the measurement object 300 rotates about the central axis Z1 as the rotation axis when the connecting portion rotates.

  The ceiling part 150 has a flat plate shape, for example, and is provided on the upper side of the pedestal part 100. An attachment part 140 is attached to the ceiling part 150 so as to be movable in the X direction. For example, a guide groove (not shown) is provided in the ceiling portion 150 along the X direction, and a roller (not shown) that fits in the guide groove is provided on the upper surface of the attachment portion 140. Accordingly, the mounting portion 140 can move in the X direction with respect to the ceiling portion 150 while the roller is guided in the guide groove.

  A sensor unit 130 is detachably attached to the lower surface of the attachment portion 140. The sensor unit 130 is positioned at a predetermined measurement position X1 on the upper side of the measurement object 300 by the attachment portion 140, and measures the shape of the measurement object 300. Moreover, the attachment part 140 is attached to the ceiling part 150 so that the movement to the Y direction is also possible.

  Specifically, the measurement object 300 is moved in the + X direction by the stage 110 while being rotated clockwise or counterclockwise about the central axis Z1 by the support unit 120, and measured by the sensor unit 130 in a stationary state. Is done.

  The tool changer 160 is provided on the −X direction side with respect to the stage 110, for example. On the upper surface of the tool changer 160, one or more machining blades 161 are arranged along the X direction.

  When the measurement of the measurement object 300 is completed, the attachment portion 140 is returned to the home position X2, which is a predetermined position on the −X direction side with respect to the measurement position X1. A tool changer 160 is provided at the home position X2.

  After the attachment unit 140 moves in the −Y direction and the sensor unit 130 is detached from the tool changer 160, a desired one processing blade 161 is attached by the tool changer 160. As a result, the sensor unit 130 is replaced with the machining blade 161.

  This shape measuring device is configured by exchanging the machining blade 161 of the cutting machine with a sensor unit 130. When cutting, a cylindrical processing object is attached on the stage 110 instead of the measurement object 300. Then, the attachment part 140 to which the machining blade 161 is attached is positioned at the measurement position X1, and then moves in the −Y direction to bring the machining blade 161 into contact with the workpiece. Then, the processing object is rotated in the + X direction by the stage 110 while being rotated about the central axis Z1 by the support unit 120, whereby the spiral groove 302 is formed, and the measurement object 300 is manufactured. The

  FIG. 2 is a schematic diagram illustrating an example of a detailed configuration of the sensor unit 130. The sensor unit 130 includes two sensor units 131 and 131. The sensor unit 131 is provided with a camera 1311 and a light source 1312.

  The light source 1312 includes a light emitting element such as a laser diode or an LED, and an optical system that guides light output from the light emitting element to the irradiation port 131a. An irradiation port 131a is provided in front of the light source 1312. The light output from the light source 1312 spreads in a fan shape from the irradiation port 131a and irradiates the groove 302. Thereby, the light section line 201 is irradiated to the light source 1312. A surface including the light cutting line 201 and the irradiation port 131a is referred to as an irradiation side surface 202. Further, the cross section of the groove 302 taken along the optical cutting line 201, and the cross section of the groove 302 with respect to the extending direction 310 shown in FIG.

  In the examples of FIGS. 2 and 3, the shape of the groove cross section 301 is a circular shape. However, the shape is not limited to this, and an elliptical shape may be adopted, or an arbitrary curved shape may be adopted.

  In the example of FIG. 2, the light source 1312 is disposed in front of the camera 1311. Here, when viewed in the Z direction, the camera 1311 and the light source 1312 are arranged such that the optical axes have a certain angle. Thereby, the camera 1311 can image the light cutting line 201 from an oblique direction. Therefore, the shape of the groove cross section 301 appears in the light cutting line 201 imaged by the camera 1311. For example, assuming that the vertical direction of the camera 1311 is set in a direction perpendicular to the paper surface, the vertical coordinates of the light cutting line 201 change according to the height of each position of the groove cross section 301. Therefore, by applying this change in coordinates and the angles of the optical axes of the camera 1311 and the light source 1312 to the principle of triangulation, the height of each position of the groove section 301 can be calculated.

  If the central angle of the irradiation side surface 202 is small, the sensor unit 131 cannot form the light cutting line 201 over the entire area of the groove cross section 301. In the example of FIG. 2, one sensor unit 131 can irradiate the light cutting line 201 only to a half region of the groove cross section 301. Thus, in the example of FIG. 2, two sensor units 131 are provided. Specifically, the left sensor unit 131 is arranged so that the center line 202a (optical axis) of the irradiation side surface 202 intersects the center position of the right half region of the groove cross section 301. Further, the right sensor unit 131 is arranged so that the center line 202a (optical axis) of the irradiation side surface 202 intersects the center of the left half region of the groove cross section 301. The left sensor unit 131 and the right sensor unit 131 are arranged such that the irradiation side surfaces 202 and 202 coincide with each other, and the center lines 202a and 202a pass through the center position 203 of the groove section 301. .

  Accordingly, the left and right sensor units 131 and 131 can irradiate the light cutting line 201 at the same angle with respect to the groove cross section 301. In the left and right sensor units 131 and 131, the angles of the optical axes of the camera 1311 and the light source 1312 are the same. Therefore, the light cutting line 201 is incident on the cameras 1311 of the left and right sensor units 131 at the same angle. As described above, even when two sensor units 131 are used, the shape of the entire region of the groove cross section 301 can be measured as if one sensor unit 131 was used.

  FIG. 3 is a diagram illustrating an example of the measurement object 300. A groove 302 is spirally extended in the measurement object 300. Cylindrical shaft portions 304 are provided at both ends of the measurement object 300. The diameter of the shaft portion 304 is slightly smaller than the region where the groove 302 is formed, and the support portion 120 shown in FIG. 1 has a shape that can easily support the measurement object 300. When viewed from the extending direction 310, convex portions 303 are formed on both sides of the groove 302.

  The extending direction 310 is a longitudinal direction of the groove 302 and has a spiral shape. The groove cross section 301 shown in FIG. 3 shows the groove cross section 301 at the position P1 in the extending direction 310. The groove cross section 301 is orthogonal to the tangential direction of the extending direction 310 at the position P1.

  The groove 302 abuts the machining blade 161 against a cylindrical workpiece, places the machining blade 161 in a stationary state, and rotates the workpiece with the longitudinal direction (X direction in FIG. 1) as the rotation axis. It is formed by moving an object in the longitudinal direction (X direction). Therefore, when the processing blade 161 is viewed from the processing target during processing, the processing blade 161 advances in a spiral manner on the side surface of the processing target. The traveling direction of the machining blade 161 is the extending direction 310. The groove cross section 301 coincides with the main surface of the processing blade 161 that is in contact with the processing object during processing.

  When the measurement object 300 is rotated around the X direction without moving in the X direction, the groove cross section 301 appears to move in the X direction. In the example of FIG. 3, since the measuring object 300 has the extending direction 310 at the position P1 facing diagonally downward to the right, the groove cross section 301 appears to move in the −X direction when rotated clockwise. Further, when the measurement object 300 is rotated counterclockwise, the groove section 301 appears to move in the + X direction.

  Therefore, when the measuring object 300 is moved in the X direction so as to cancel the movement of the groove cross section 301, the groove cross section 301 appears to be stationary. For example, when the measuring object 300 is rotated clockwise, the groove cross section 301 moves at a moving speed V in the −X direction. Therefore, when the measuring object 300 is moved at the moving speed V in the + X direction, the groove cross section is moved. 301 appears stationary. On the other hand, when the measuring object 300 is rotated counterclockwise, the groove cross section 301 moves at a moving speed V in the + X direction. Therefore, when the measuring object 300 is moved at the moving speed V in the −X direction, the groove Cross section 301 appears to be stationary.

  Therefore, the measurement object 300 is moved in the X direction so that the movement of the groove cross section 301 is canceled while rotating the measurement object 300 about the X direction as the rotation axis. Thereby, the sensor unit 131 in a stationary state can always irradiate the optical cutting line 201 to the groove 302, and can continuously measure the shape of the groove cross section 301 at an arbitrary position by imaging the optical cutting line 201 continuously.

  In the present embodiment, the same values as the angular velocity and the moving speed when the measuring object 300 is processed are adopted as the angular velocity and the moving speed of the measuring object 300 in the X direction.

  FIG. 4 shows an external view of the measuring object 300 in which two grooves 302a and 302b are formed. In FIG. 4, the first pitch groove 302a from the left is continuous with the second pitch groove 302a across the first pitch groove 302b located on the right side. Further, the first pitch groove 302b is continuous with the second pitch groove 302b across the second pitch groove 302a. As described above, the shape measuring apparatus uses not only the measurement object 300 in which one groove 302 is formed but also the measurement object 300 in which a plurality of grooves 302 are formed.

  FIG. 5 is an explanatory view showing a state in which the measuring object 300 in which two grooves 302a and 302b are formed is measured, and shows a cross-sectional view when the measuring object 300 is cut in the Z direction.

  In the left diagram of FIG. 5, the groove 302a is measured. When the measurement of the groove 302a is started, first, the measurement object 300 has a groove cross section 301a at one end of the groove 302a positioned at the measurement position X1, and a line connecting the bottom point 501a and the center 500 of the groove cross section 301a is Y. Positioned parallel to the direction. Thereby, the groove cross section 301 a at one end faces the sensor portion 131.

  Then, the measuring object 300 is moved in the X direction while being rotated about the X direction as a rotation axis. Thereby, the two sensor parts 131 irradiate the optical cross section 301a of each position on the extending direction 310 of the groove | channel 302a with an optical cutting line, and measure the shape of the groove | channel cross section 301a of each position. When the measurement object 300 is moved to the other end, measurement of the entire shape of the groove 302a is finished.

  When the measurement of the groove 302a is finished, the measurement object 300 is returned to the measurement position X1 at one end and returned to the position where the groove 302a faces the sensor unit 131. Then, as shown in the right diagram of FIG. 5, the measuring object 300 is rotated by the tooth indexing angle θ clockwise with respect to the X direction. Thereby, the measuring object 300 is positioned so that the line connecting the bottom point 501b of the groove cross section 301b at one end and the center 500 is parallel to the Y direction. Accordingly, the groove cross section 301b at one end faces the sensor portion 131. Then, similarly to the groove 302a, the measuring object 300 is moved while being rotated in the X direction, and the entire shape of the groove 302b is measured.

  Here, the tooth index angle θ refers to an angle formed by the adjacent grooves 302a and 302b with the center 500 as a reference. Specifically, the tooth indexing angle θ is defined by an angle formed by a line connecting the bottom point 501a and the center 500 of the groove 302a and a line connecting the bottom point 501b and the center 500 of the groove 302b.

  This shape measuring apparatus can measure not only the shape of the groove 302 but also the shape of the convex portion 303 indicating the edge of the groove 302. FIG. 6 is a diagram showing how the shape of the convex portion 303 is measured.

  The left figure of FIG. 6 is the same as the left figure of FIG. Here, since measurement of the entire shape of the grooves 302a and 302b has been completed, one end of the measuring object 300 is returned to the measurement position X1, and the groove 302a is returned to a position facing the sensor unit 131.

  Then, as shown in the right diagram of FIG. 6, the measurement object 300 is rotated by ½ of the tooth index angle θ in the clockwise direction. As a result, the line connecting the vertex 601 of the convex section 602 at one end of the measurement object 300 and the center 500 is parallel to the Y direction, and the convex section 602 is positioned at the uppermost position. Here, the convex section 602 is a section of the convex section 303 with respect to the extending direction 310. At this time, the two sensor units 131 are moved in the + Y direction so that the two center lines 202a intersect at the vertex 601.

  The sensor unit 131 irradiates the convex section 602 with an optical cutting line. And with respect to the measuring object 300 moved while rotating in the X direction, the sensor unit 131 irradiates the optical cutting line and continuously images the optical cutting line, thereby projecting each position in the extending direction 310. The shape of the partial cross section 602 is measured.

  When the measurement of the entire shape of one convex portion 303 is completed, as shown in the right diagram of FIG. 6, one end of the measurement object 300 is returned to the measurement position X1, and the convex portion at the one end Cross section 602 is positioned at the top position. Then, the measurement object 300 is rotated clockwise by the tooth index angle θ, and measurement of the entire shape of the next convex portion 303 adjacent to the first convex portion 303 is started.

  FIG. 7 is a block diagram showing an example of an electrical configuration of the shape measuring apparatus according to the embodiment of the present invention. The shape measuring apparatus includes an attachment part 140, a sensor unit 130, an operation part 701, a stage 110, a tool changer 160, a display part 703, a support part 120, and a control part 710.

  The attachment part 140 includes a motor, for example, and is moved in the X direction by the driving force of the motor.

  The sensor unit 130 measures the shape of the groove section 301 or the convex section 602 and outputs the measured value to the calculation unit 712. Here, as the measurement value, for example, image data of a light section line continuously captured by the sensor unit 130 is employed.

  The operation unit 701 includes, for example, a keyboard and a mouse, and receives input from the operator.

  The stage 110 includes a motor, for example, and is moved in the X direction by the driving force of the motor. The support unit 120 includes a motor that rotates the measurement object 300 about the X direction as a rotation axis.

  The display unit 703 is configured by, for example, a liquid crystal panel, and displays the height data of the entire shape of the measurement object 300 calculated by the calculation unit 712.

  The control unit 710 is configured by a microcontroller including a CPU, a ROM, a RAM, and the like, for example, and controls the entire shape measuring apparatus. In the present embodiment, the control unit 710 includes a movement control unit 711 and a calculation unit 712.

  The movement control unit 711 outputs a drive command to the motor of the attachment unit 140 to move the attachment unit 140 in the X direction. In addition, the movement control unit 711 outputs a drive command to the motor of the support unit 120 and rotates the measurement object 300 about the X direction as the rotation axis. Further, the movement control unit 711 outputs a drive command to the motor of the stage 110 and moves the stage 110 in the X direction. Further, the movement control unit 711 sends a control command to the tool changer 160 and attaches the machining blade 161 and the sensor unit 130 to the attachment unit 140.

  The calculation unit 712 calculates the shape data indicating the surface shape of the measurement object 300 by applying the measurement value output from the sensor unit 130 to the principle of triangulation. For example, when the image data obtained by imaging one light cutting line from the sensor unit 130 is input as the measurement value, the calculation unit 712 extracts the coordinates of the light cutting line from the image data, Based on the principle of triangulation using the angles of the camera 1311 and the light source 1312, the height data of each position of the groove section 301 irradiated with the light cutting line is obtained. For example, in the image data output from the sensor unit 130, it is assumed that a light cutting line appears with the horizontal direction as the longitudinal direction. In this case, the calculation unit 712 may obtain the coordinates of the light section line by searching for a luminance peak in each line in the vertical direction of the image data. Thus, for example, if the index representing each line in the vertical direction is i (where i = 1, 2,..., M) and the coordinate in the vertical direction is v, the light section line is v (1), It is represented by M data groups of v (2),..., v (M). The calculation unit 712 applies the principle of triangulation to each of v (1), v (2),..., V (M), and height data h corresponding to each position of the light section line. (1), h (2),..., H (M) are obtained. Then, the calculation unit 712 performs the above processing on each image data output from the sensor unit 130 to obtain the overall shape of the groove 302. For example, if the sensor unit 130 images the groove 302 N times and N pieces of image data are input to the calculation unit 712, the overall shape of the groove 302 is a height arranged in a matrix of M rows × N columns. It is represented by data h.

  FIG. 8 is a flowchart showing an example of the processing flow of the shape measuring apparatus according to the embodiment of the present invention. Hereinafter, the flowchart of FIG. 8 will be described with reference to FIG. 1 as appropriate. In the following flowchart, it is assumed that there are two grooves 302. First, the cutting process on the workpiece by the shape measuring apparatus is completed (S801). Thereby, the measuring object 300 is manufactured. Next, the attachment part 140 to which the machining blade 161 is attached is returned from the measurement position X1 to the home position X2, and the sensor unit 130 is attached by the tool changer 160 (S802), and is again positioned at the measurement position X1.

  Next, the stage 110 positions the measuring object 300 so that the shaft 304a at one end faces the measurement position X1, and the sensor unit 130 measures the surface shape of the shaft 304a (S803). Here, the sensor unit 130 irradiates the shaft 304 a with a light cutting line, acquires image data of the light cutting line, and outputs the acquired image data to the calculation unit 712 as a measurement value. The computing unit 712 extracts a light section line from the image data, and obtains height data at each position of the light section line. Then, the calculation unit 712 obtains the circumference of the shaft portion 304a by interpolating the calculated height data, and obtains the center coordinate Za of the shaft portion 304a. Here, the center coordinate Za is represented by data having a value only in the Y direction, for example.

  Next, the stage 110 positions the measurement object 300 so that the other end shaft portion 304b faces the measurement position X1, and the sensor unit 130 measures the surface shape of the shaft portion 304b (S804). Then, the calculation unit 712 obtains the center coordinate Zb of the shaft part 304b from the image data of the light section line irradiated to the shaft part 304b, as in the case of the shaft part 304a.

  Next, the calculation unit 712 linearly interpolates the center coordinate Za of the shaft part 304a and the center coordinate Zb of the shaft part 304b to obtain the center axis Z1 of the measurement object 300 (S805). Here, the central axis Z1 is data indicating the value in the Y direction of the central axis Z1 at each position in the X direction, for example.

  Next, the sensor unit 130 measures the entire shape of the groove 302a that is one groove 302 of the measurement object 300 (S806). Specifically, first, the stage 110 and the support part 120 position the measuring object 300 so that the end part of the groove 302a on the + X direction side faces the measurement position X1. Next, the stage 110 and the support unit 120 move the measurement object 300 in the + X direction while rotating with respect to the X direction, and the sensor unit 130 continuously images the measurement object 300 that moves while rotating, and the grooves The overall shape of 302a is measured. Then, when the end of the groove 302a on the −X direction side is positioned at a position facing the measurement position X1, the sensor unit 130 ends the measurement of the entire shape of the groove 302a.

  When the measurement of the grooves 302a is completed, if the measurement of all the grooves 302 is not completed (NO in S807), the stage 110 and the support unit 120 have the + X direction end of the groove 302b that is the next groove 302. After positioning the measurement object 300 so as to face the measurement position X1, the support unit 120 rotates the measurement object 300 by the tooth indexing angle θ (S808). Next, the sensor unit 130 measures the overall shape of the groove 302b in the same manner as the groove 302a (S806). When the measurement of all the grooves 302a and 302b is completed (YES in S807), the stage 110 and the support unit 120 hold the measuring object 300 so that the + X direction end of the groove 302a faces the measurement position X1. After positioning, the support unit 120 rotates the measurement object 300 by 1/2 of the tooth index angle θ (S809). At this time, the mounting part 140 moves the two sensor parts 131 constituting the sensor unit 130 in the + Y direction so that the two center lines 202a intersect at the vertex 601 as described in the right figure of FIG. Let Thereby, the end on the + X direction side of the convex portion 303 faces the sensor unit 130.

  Next, the sensor unit 130 measures the overall shape of one convex portion 303 (S810). Specifically, first, the stage 110 and the support unit 120 move the measurement object 300 in the + X direction while rotating the measurement object 300 with respect to the X direction, and the sensor unit 130 continuously moves the measurement object 300 that moves while rotating. An image is taken and the entire shape of one convex portion 303 is measured. And the sensor unit 130 will complete | finish measurement of the whole shape of the 1 convex part 303, if the edge part of the -X direction side of the 1 convex part 303 is positioned in the position facing the measurement position X1.

  When the measurement of the entire shape of one protrusion 303 is completed, the measurement of the entire shape of the stage 110 and the support unit 120 is completed if the measurement of the entire shape of all the protrusions 303 is not completed (NO in S811). The measurement object 300 is positioned so that the + X direction side end of the one convex part 303 facing the measurement position X1, and the support part 120 rotates the measurement object 300 with the tooth index angle θ ( S812). Accordingly, the next one convex portion 303 faces the sensor unit 130. Next, the sensor unit 130 measures the overall shape of the next one convex portion 303 (S810). In the example of this flowchart, since there are two grooves 302, for example, three convex portions 303 are measured.

  When the measurement of the entire shape of all the convex portions 303 is completed (YES in S811), the attachment portion 140 returns the sensor unit 130 to the home position X2 (S813).

  Next, the calculation unit 712 uses the measured values of the overall shape of each groove 302 and each convex portion 303 measured by the sensor unit 130 to use the groove 302 and the convex portion 303 based on the central axis Z1 obtained in S805. Height data indicating the overall shape of the image is obtained (S814).

  For example, as shown in FIG. 4, it is assumed that the height data obtained by using the optical cutting line at a position Pk of one groove section 301 is h (k). Here, it is assumed that the obtained height data h (k) is calculated based on a certain height reference H0, for example. Further, it is assumed that the height data of the central axis Z1 is also calculated based on the height reference H0.

  In this case, the calculation unit 712 obtains a position Xk in the X direction of the position Pk. Here, for example, the calculation unit 712 calculates the X direction of the bottom point Pb of the groove cross section 301 from the rotation angle and the movement distance of the measurement object 300 with respect to the X direction when the groove cross section 301 to which the position Pk belongs is measured. Find the position. Then, the calculation unit 712 may obtain the position Xk by adding the distance in the X direction from the bottom point Pb to the position Pk to the position in the X direction of the bottom point Pb. Then, the calculation unit 712 subtracts the height data h1 (Xk) of the central axis Z1 from the height data h (k), thereby obtaining the height data H (k) (= h (k) −h1 ( Xk)) may be obtained.

  The calculation unit 712 may perform this process on all the height data h (k) and obtain height data indicating the entire shape of all the grooves 302 when the central axis Z1 is used as a reference. Further, the arithmetic unit 712 may obtain height data indicating the entire shape of all the convex portions 303 in the same manner as the grooves 302 for the convex portions 303.

  Next, the control unit 710 evaluates the shape of the measurement object 300 using the height data obtained in S814 (S815). FIG. 9 is a diagram visually showing the height data showing the overall shape of the groove 302 of the measurement object 300, the upper figure showing the measurement object 300, and the lower figure showing the height data of the groove 302. Yes.

  9, the vertical axis α indicates the width direction of the groove cross section 301, and the horizontal axis β indicates the position on the extending direction 310 of the groove cross section 301. For example, in the lower diagram of FIG. 9, one line L9 at β = βk indicates the height data of a certain groove section 301k shown in the upper diagram of FIG. In the lower diagram of FIG. 9, the height data value increases as the thickness decreases, and the height data value decreases as the thickness increases.

  For example, in the groove cross section 301k indicated by the line L9, it becomes darker toward the center and becomes thinner toward the outside, and it can be seen that the shape of the groove is measured.

  Thus, the shape measuring apparatus in this Embodiment is measuring the shape of the measuring object 300 by replacing the processing blade 161 of a cutting machine with the sensor unit 130. FIG. Therefore, the shape of the measuring object 300 can be evaluated without lifting the measuring object 300 with a crane and placing it on an inspection jig and fitting it onto a male-female structure workpiece. As a result, the shape of the measurement object 300 can be evaluated in a short time. Moreover, in this shape measuring apparatus, since the shape of each measurement object 300 can be evaluated, the processing accuracy can be managed for each measurement object 300.

  Further, in this shape measuring apparatus, the shape of the groove cross section 301 and the convex portion 303 is continuously measured by moving the measuring object 300 while rotating it in the X direction. Height data indicating the surface shape can be measured with high resolution. As a result, the shape of an arbitrary position of the measurement object 300 can be known.

  Further, in this shape measuring apparatus, the work of replacing the long and heavy measuring object 300 with the inspection jig is not required, and the work load of the shape evaluation of the measuring object 300 can be greatly reduced.

  Moreover, in this shape measuring apparatus, the operation | work which replaces the measuring object 300 on an inspection jig becomes unnecessary, and the process and shape measurement of the measuring object 300 are performed with the measuring object 300 mounted on the cutting machine. Can do. As a result, it becomes easy to feed back the evaluation result of the shape of the measuring object 300 to the processing conditions, and the processing conditions with higher accuracy can be detected by repeating the shape evaluation and the processing.

  In the above disclosure, the sensor unit 130 performs shape measurement by the light cutting method. However, this is only an example, and a three-dimensional shape measurement method using a stereo camera and a shape measurement method using TOF (Times Of Flight) are used. It may be adopted.

  In FIG. 2, the sensor unit 130 includes the two sensor units 131. However, when the shape of the groove cross section 301 of the measurement target 300 is relatively shallow, the sensor unit 130 may include the single sensor unit 131. Here, the case where the shape of the groove cross section 301 is relatively shallow corresponds to, for example, the case where the central angle of the groove cross section 301 is approximately 25 degrees or less, depending on the gloss level of the surface. In FIG. 2, the number of sensor units 131 included in the sensor unit 130 may be three or more. In this case as well, as in the case described with reference to FIG. 2, each sensor unit 131 is installed so that the irradiation side surfaces 202 of each sensor unit 131 coincide with each other and the center line 202 a of each sensor unit 131 passes through the center position 203. It only has to be done.

(Embodiment 2)
In measuring the shape of one groove section 301, the shape measuring apparatus in the second embodiment moves the sensor unit 130 at a predetermined pitch in the extending direction 310 to measure the shapes of the plurality of groove sections 301. The shape of one groove cross section is calculated using the measurement result. In the second embodiment, differences from the first embodiment will be described, and the description of the same parts will be omitted.

  Since the measuring object 300 composed of a screw or the like requires a very fine processing accuracy (for example, processing accuracy on the order of micrometers) with respect to the processing size, the evaluation of the shape of the measuring object 300 is also on the order of micrometers. It is necessary to do in.

  As shown in the first embodiment, since the shape measuring apparatus has a basic principle of measuring a cross-sectional shape by the light cutting method, the line width of the projected image of the light cutting line is the limit of the measurement resolution. The line width of the projected image of the light section line is usually several hundred microns or more. This is because the projected image of the light section line is not an ideal straight line, and noise is generated in the luminance distribution of the light section line included in the image. Therefore, in the second embodiment, the noise component of the light section line included in the image is removed. Details will be described below.

  FIG. 10 is a diagram showing image data obtained by imaging a light section line, the left diagram shows image data before noise is removed, and the right diagram shows image data after noise is removed. Specifically, in each of the left figure and the right figure, the figure shown in the upper section is the image data 1102 including the optical section line 1301, and the figure shown in the lower stage is the optical section calculated using the optical section line 1301. It is a graph 1111 in which the height data of the measuring object 300 in a partial region of the line 1301 is enlarged. In the graph 1111, the vertical axis indicates the height, and the horizontal axis indicates the horizontal position of the image data 1102.

  As shown in the image data 1102 on the left, it can be seen that a plurality of discontinuous portions of the light section line 1301 are observed, and the luminance distribution is not uniform and uneven. For this reason, the graph 1111 in the left figure has a shape in which a high-frequency component that fluctuates in small increments is superimposed on a curve indicating a low-frequency component. It should be noted that the curve indicating the low frequency component represents the actual height data of the measurement object 300. Therefore, the high frequency component that fluctuates little by little becomes noise.

  Such unevenness in the luminance distribution occurs because of an uneven pattern in image formation on the light receiving element due to an interference pattern of laser light called speckles and minute irregularities on the projection surface of the light cutting line. On the other hand, when extracting the position of the light section line 1301 from the image data 1102, the barycentric coordinates of the luminance in each vertical line L110 are calculated at the subpixel level. In this case, the light section line 1301 has a normal distribution in which the luminance distribution in the longitudinal direction (horizontal direction) is uniform, and the luminance in the center is high in the line width direction (vertical direction) and the luminance decreases toward the periphery. It is desirable to have.

  Therefore, in the second embodiment, when measuring the shape of one groove cross section 301, image data of a plurality of light cutting lines is continuously acquired, and noise is removed by averaging the luminance of these image data. To do. However, since such a noise pattern does not fluctuate in a short time, the averaging effect cannot be obtained simply by using a plurality of pieces of continuously acquired image data. On the other hand, if the state of the projection plane of the light cutting line slightly changes, the state of unevenness changes. Therefore, in the second embodiment, the following method is adopted using these facts.

  In the second embodiment, when acquiring a plurality of pieces of image data, the relative position between the measurement object 300 and the sensor unit 130 is moved by a predetermined pitch to slightly move the sensor unit 130. Thereby, since the uneven pattern of the luminance distribution is different for each acquired image data, by averaging these image data, the uneven pattern of the luminance distribution is canceled and an averaging effect is obtained.

  FIG. 11 is a diagram illustrating a main part of the shape measuring apparatus according to the second embodiment. In the first embodiment, the attachment portion 140 is attached to the ceiling portion 150 so as to be movable in the X direction and the Y direction. In the second embodiment, the attachment portion 140 is attached to the ceiling portion 150 so as to be movable also in the Z ′ direction. That is, in the second embodiment, the attachment portion 140 is configured by a three-axis stage that can move in each of the X, Y, and Z ′ directions. Accordingly, the sensor unit 130 can move in the Z ′ direction by moving the attachment portion 140 in the Z ′ direction.

  Here, the Z ′ direction is a direction along the extending direction 310 of the groove 302. Specifically, the Z ′ direction is a direction in which the extending direction 310 is projected onto the XZ plane, and is a direction inclined by an angle γ with respect to the Z direction. In FIG. 11, the Z direction is defined as the + Z ′ direction on the near side and the −Z ′ direction on the far side. As a result, the sensor unit 130 is moved along the groove 302 in a top view (-Y direction view).

  When measuring the shape of one groove section 301, the movement control unit 711 controls the stage 110 (see FIG. 1) to rotate the measurement object 300 about the X direction as a rotation axis and move in the X direction. The measurement object 300 is stopped in a stopped state. Then, the movement control unit 711 controls the attachment unit 140 to move the sensor unit 130 by a predetermined pitch in the + Z ′ direction. The sensor unit 130 first captures an image of the light cutting line projected on the groove 302 at the initial position immediately before the movement in the + Z ′ direction is started, and thereafter, the sensor unit 130 is projected onto the groove 302 every time it moves by a predetermined pitch. The light cutting line is imaged. Thereby, a plurality of pieces of image data of the light section line are obtained.

  FIG. 12 is a diagram showing a light cutting line 1301 irradiated by the sensor unit 130 moved by a predetermined pitch when measuring the shape of one groove cross section 301.

  First, at the initial position 1302_S, the sensor unit 130 images the light cutting line 1301_1 projected on the groove 302. Next, the sensor unit 130 moves by a predetermined pitch in the + Z ′ direction, and images the light section line 1301_2. Thereafter, the sensor unit 130 repeats imaging of the light section line 1301 every time the sensor unit 130 moves by a predetermined pitch. Then, the sensor unit 130 moves for a certain interval 1302 and returns to the initial position 1302_S when imaging of the light section line 1301_5 is completed. Then, the measurement object 300 is rotated by a predetermined angle about the X direction as a rotation axis, and is moved by a predetermined distance in the X direction, and the next groove section 301 is positioned at the initial position 1302_S. As described above, five pieces of image data of the light section line are obtained. Here, for convenience of explanation, the number of light cutting lines in the fixed section 1302 is described as five, but in practice, the fixed section 1302 includes a number much larger than five.

  As the predetermined pitch in the fixed section 1302, a value equal to or smaller than the normal pitch that is the pitch of the light cutting line when measuring the shape of the measurement object 300 without finely moving the sensor unit 130 can be adopted. When the predetermined pitch is set to the same value as the normal pitch, the light cutting lines 1301 in the fixed section 1302 are arranged at the normal pitch. However, since each groove section 301 has the same shape in principle, averaging is performed. By doing so, noise can be removed.

  Further, as the fixed section 1302, for example, the sensor unit 130 can accurately irradiate the groove 302 with the optical cutting line 1301 by increasing the distance between the sensor unit 130 moving in the + Z ′ direction and the groove 302. The distance until it can no longer be used. The sensor unit 130 has been described as moving in the + Z ′ direction. However, the sensor unit 130 may move in the −Z ′ direction. Alternatively, the sensor unit 130 may be set in the + Z ′ direction and the −Z ′ direction by setting a certain interval 1302 around the initial position 1302_S. You may move in the direction.

  The computing unit 712 averages the luminances of the five image data and generates one averaged image data. Specifically, the calculation unit 712 generates one averaged image data by obtaining an average value of luminance for each pixel for the five image data. Here, it is assumed that a light cutting line appears in the averaged image data with the horizontal direction as the longitudinal direction. The computing unit 712 extracts the light section line by obtaining the barycentric coordinates of the luminance at the sub-pixel level for each of the vertical lines L110 in the averaged image data. And the calculating part 712 calculates | requires the height data of the one groove | channel cross section 301 using the principle of triangulation similarly to Embodiment 1 with respect to the extracted light cutting line. Here, the sub-pixel refers to a pixel on the assumption that pixels are arranged at a pixel pitch shorter than the actual pixel pitch in the averaged image data.

  As described above, when measuring the shape of one groove cross section 301, the averaged image data is generated by averaging the image data of a plurality of light cutting lines. An optical cutting line 1301 as shown in the upper part of the right figure appears. The light cutting line 1301 shown in the upper part of the right diagram of FIG. 10 has a significantly reduced number of discontinuous portions compared to the light cutting line 1301 shown in the upper part of the left diagram of FIG. You can see that it is improving. It can also be seen that the light section line 1301 shown in the upper part of the right diagram of FIG. 10 is made uniform compared to the left diagram.

  As a result, in the graph 1111 shown in the lower part of the right diagram of FIG. 10, the amplitude of the high frequency component is greatly reduced compared to the graph 111 shown in the lower part of the left diagram, and the curve has no jaggedness. .

  Note that, as shown in FIG. 12, when measuring one groove cross section 301, a plurality of light cutting lines 1301_1 to 1301_5 imaged in a certain section 1302 are different in position, and therefore other than the light cutting line 1301_1. Represents the shape of the groove cross section 301 at a position different from that of one groove cross section 301.

  However, the measurement object 300 is assumed to be a screw, and the groove 302 is processed so that groove sections 301 having the same shape are connected. Therefore, in principle, the shape of each groove cross section 301 should be the same, and the light section line should be the same shape. Therefore, this shape measuring apparatus averages a plurality of image data obtained by imaging the light cutting lines 1301 at different positions, so that the optical cutting lines from which noise is removed without impairing information on the shape inherent to the groove cross section 301 are obtained. 1301 can be obtained.

  Next, the operation of the shape measuring apparatus in the second embodiment will be described. The overall operation in the second embodiment is the same as that in the flowchart of FIG. 8, but the process of measuring one groove (S806) is different from the process of calculating height data (S814). Therefore, the following description will focus on the differences.

  FIG. 13 is a flowchart showing the operation of the shape measuring apparatus according to the second embodiment, and is a flowchart showing a subroutine of S806. This flowchart shows a process in which the sensor unit 130 measures the shapes of the plurality of groove cross sections 301 in the fixed section 1302 shown in FIG.

  Before starting this flowchart, it is assumed that the measuring object 300 is positioned and stopped so that the initial position 1302_S is irradiated with the light cutting line 1301_1.

  First, the sensor unit 130 images the light cutting line 1301 (S1501). Next, the sensor unit 130 is moved by a predetermined pitch in the + Z ′ direction by the mounting portion 140 (S1502). Next, if the measurement in the certain section 1302 has not been completed (NO in S1503), the process returns to S1501, and the sensor unit 130 images the next light section line 1301. That is, by repeating the processes of S1501 to S1503, the optical cutting lines 1301_1 to 1301_5 are imaged while the sensor unit 130 is moved by a predetermined pitch in the + Z ′ direction.

  Then, the sensor unit 130 captures the optical cutting line 1301_5, and when the measurement of the shape of the groove cross section 301 in the fixed section 1302 is completed (YES in S1503), the sensor unit 130 is returned to the initial position 1302_S by the mounting portion 140 (S1504).

  In order to measure the shape of the next groove section 301, the movement control unit 711 controls the stage 110 to rotate the measurement object 300 by a predetermined angle about the X direction as the central axis, and in the X direction. The measurement object 300 is positioned by moving it by a predetermined distance (S1505).

  Next, if the measurement of one groove 302 is completed (YES in S1506), the process returns to FIG. On the other hand, if the measurement of the first groove 302 has not been completed (NO in S1506), the process returns to S1501, and the shape of the next groove section 301 is measured.

  FIG. 14 is a flowchart showing a process for a plurality of image data obtained by measuring a fixed section 1302 in the second embodiment. The process of FIG. 14 is performed every time YES is determined in S1503 in FIG. 13, that is, whenever the image data of the light section line 1301 in the certain section 1302 is acquired, and in parallel with the process of FIG. Implemented. However, this is an example, and the process of FIG. 14 may be performed between S1503 and S1504 in FIG.

  First, when the calculation unit 712 acquires a plurality of pieces of image data in which the light section line 1301 is captured in the fixed section 1302, the arithmetic unit 712 averages the luminance of these image data to generate one averaged image data (S1601). .

  Next, the arithmetic unit 712 obtains the barycentric coordinates of luminance at the sub-pixel level for each vertical line in the averaged image data, and extracts the light section line (S1602). In this case, as shown in the upper part of the right diagram of FIG. 10, processing for detecting the luminance peak at the sub-pixel level is performed on the vertical line L110, and the barycentric coordinates of the luminance are calculated. Then, this process is executed for other vertical lines, and the barycentric coordinates of the luminance at each position in the horizontal direction are calculated. As a result, one light section line is extracted from the averaged image data.

  In the second embodiment, in S814 shown in FIG. 8, the calculation unit 712 obtains the height data of each groove section 301 from each light section line extracted from the averaged image data, thereby obtaining each groove 302. Find the overall shape. At this time, as in the first embodiment, the calculation unit 712 may obtain the height data when the center axis Z1 is used as a reference. In the second embodiment, the process for obtaining the height data of the convex portion 303 is the same as in the first embodiment.

  As described above, in the second embodiment, when measuring the shape of one groove cross section 301, a plurality of image data of optical cutting lines are captured while moving the sensor unit 130 by a predetermined pitch. By averaging the image data, the height data of one groove section 301 is calculated. Therefore, the unevenness of the luminance distribution due to the interference pattern of the laser light and the minute unevenness on the projection surface of the optical cutting line is offset, and the noise of the optical cutting line included in the image data can be removed. As a result, the shape of the measuring object 300 can be accurately obtained.

  In the second embodiment, the example in which the sensor unit 130 is moved at a predetermined pitch with respect to the measurement object 300 has been described. The shape of one groove section 301 may be measured by moving 300 by a predetermined pitch. In this case, the movement control unit 711 controls the stage 110 so that the optical cutting line does not deviate from the groove 302, and rotates the measurement object 300 about the X direction as the rotation axis, and moves the measurement object 300 in the X direction. Move to.

  Moreover, when the aspect which moves the measuring object 300 with respect to the sensor unit 130 in a stop state is employ | adopted, the measuring object 300 does not need to be stopped whenever it moves by predetermined pitch. In this case, as described with reference to FIG. 3, the measurement object 300 is moved at the same angular velocity and moving speed as at the time of processing, and the optical cutting lines are continuously imaged at a predetermined pitch by the sensor unit 130. Then, the calculation unit 712 may extract the obtained image data for each fixed section 1302 and calculate averaged image data for each fixed section 1302.

  In the second embodiment, the method of moving the sensor unit 130 by a predetermined pitch is applied to the shape measurement of the groove 302, but is not limited to this, and may be applied to the convex portion 303. .

  In the first and second embodiments, the height data is calculated in S814 shown in FIG. 8, but the height data is calculated every time image data of the optical section line of one groove section 301 is acquired. Alternatively, the height data may be calculated every time measurement of one groove 302 and one convex portion 303 ends.

DESCRIPTION OF SYMBOLS 100 Base part 110 Stage 120 Support part 130 Sensor unit 131 Sensor part 140 Mounting part 150 Ceiling part 160 Tool changer 201 Optical cutting line 202 Irradiation side surface 202a Center line 203 Center position 300 Measuring object 301 Groove cross section 302 Groove 303 Protrusion 304 Axis Unit 710 Control unit

Claims (11)

A shape measuring device for measuring the surface shape of a measurement object in which a groove is spirally extended,
A sensor unit that measures the shape of a groove cross section that is a cross section with respect to the extending direction of the groove in a non-contact manner;
A moving unit that moves the measuring object in the longitudinal direction while rotating the measuring object around the longitudinal direction;
A controller that continuously measures the shape of the groove cross section of the measurement object that is moved while being rotated by the moving unit, and that measures the overall shape of the groove .
The sensor unit measures the shape of the groove cross section by irradiating the groove with a light cutting line and receiving reflected light from the groove.
The shape measurement apparatus in which the sensor unit is arranged so that an irradiation side surface, which is a surface including the light cutting line and the light irradiation port, coincides with the groove cross section . There are a plurality of the sensor units,
Wherein the plurality of sensor section, the irradiation side are matched, and the irradiation side shape measuring apparatus of the center line the trench profile central position disposed in that claim 1, wherein so as to pass in. A shape measuring device for measuring the surface shape of a measurement object in which a groove is spirally extended,
A sensor unit that measures the shape of a groove cross section that is a cross section with respect to the extending direction of the groove in a non-contact manner;
A moving unit that moves the measuring object in the longitudinal direction while rotating the measuring object around the longitudinal direction;
A controller that continuously measures the shape of the groove cross section of the measurement object that is moved while being rotated by the moving unit, and that measures the overall shape of the groove.
The measurement object is processed by bringing a processing blade into contact with a cylindrical processing object and moving the processing object in the longitudinal direction while rotating the processing object around the longitudinal direction as a central axis.
The mobile unit, the workpiece rotation and shape measurement device Before moving time and the measurement object at the same rotational speed and the moving speed processing. A shape measuring device for measuring the surface shape of a measurement object in which a groove is spirally extended,
A sensor unit that measures the shape of a groove cross section that is a cross section with respect to the extending direction of the groove in a non-contact manner;
A moving unit that moves the measuring object in the longitudinal direction while rotating the measuring object around the longitudinal direction;
A controller that continuously measures the shape of the groove cross section of the measurement object that is moved while being rotated by the moving unit, and that measures the overall shape of the groove.
The measurement object includes a plurality of grooves,
When the measurement of the entire shape of any one groove is completed by the sensor unit, the control unit rotates the measurement object by a tooth indexing angle and causes the sensor unit to start measuring the next groove. that shape measurement device. A shape measuring device for measuring the surface shape of a measurement object in which a groove is spirally extended,
A sensor unit that measures the shape of a groove cross section that is a cross section with respect to the extending direction of the groove in a non-contact manner;
A moving unit that moves the measuring object in the longitudinal direction while rotating the measuring object around the longitudinal direction;
A controller that continuously measures the shape of the groove cross section of the measurement object that is moved while being rotated by the moving unit, and that measures the overall shape of the groove.
The measurement object includes a plurality of grooves,
When the measurement of the entire shape of any one groove is completed by the sensor unit, the control unit rotates the measurement object by 1/2 of the tooth indexing angle, and the one groove and the one groove shape measurement apparatus measures the protrusions Ru is initiated to the sensor portion between the adjacent grooves to. An attachment portion that is movably provided from an installation region of the measurement object to a position outside the installation region, and the processing blade and the sensor unit are detachably attached;
Shape measuring apparatus according to any one of claims 1 to 5, further comprising a tool changer for mounting the processing blade or the sensor unit to the mounting portion is moved to a position outside the installation area. A shape measuring device for measuring the surface shape of a measurement object in which a groove is spirally extended,
A sensor unit that measures the shape of a groove cross section that is a cross section with respect to the extending direction of the groove in a non-contact manner;
A moving unit that moves the measuring object in the longitudinal direction while rotating the measuring object around the longitudinal direction;
A controller that continuously measures the shape of the groove cross section of the measurement object that is moved while being rotated by the moving unit, and that measures the overall shape of the groove.
The measurement object has cylindrical shafts at both ends,
The control unit causes the sensor unit to measure the shape of the shaft part at both ends of the measurement object, and uses the height data indicating the shape of the shaft part at both ends to each position of the central axis of the measurement object. the height data is calculated, based on the height data of the respective positions of the calculated central axis, shape measurement device you calculate the height data that indicates the shape of the groove cross-section. A shape measuring device for measuring the surface shape of a measurement object in which a groove is spirally extended,
A sensor unit that measures the shape of a groove cross section that is a cross section with respect to the extending direction of the groove in a non-contact manner;
A moving unit that moves the measuring object in the longitudinal direction while rotating the measuring object around the longitudinal direction;
A control unit that causes the sensor unit to measure the shape of the groove cross-section of the measurement object every time the moving unit is rotated by a predetermined angle and moved a predetermined distance. ,
The sensor unit measures the shape of the groove cross section by irradiating the groove with a light cutting line and receiving reflected light from the groove.
The control unit moves the sensor unit relative to the extending direction of the groove at a predetermined pitch, causes the sensor unit to measure the shape of the groove cross section a plurality of times, and the plurality of measured measurements. shape measuring device that to calculate the first groove section shape using the value. The sensor unit obtains a plurality of image data of the light cutting line by imaging the light cutting line every time the sensor unit moves relative to the predetermined pitch with respect to the extending direction of the groove,
The control unit generates averaged image data by averaging the luminance of each pixel of the acquired plurality of image data, and calculates the shape of the first groove cross section using the averaged image data. Item 9. The shape measuring apparatus according to Item 8 . A sensor moving part that moves the sensor part toward the extending direction of the groove;
Wherein, when measuring the groove cross-section of the 1, and controls the moving unit, wherein the measurement object in a stopped state, the controls of the sensor moving part, claim 8 for moving the sensor unit Or the shape measuring apparatus of 9 . A shape measuring method in a shape measuring device for measuring a surface shape of a measurement object in which a groove is spirally extended,
The shape measuring device is
A sensor unit that measures the shape of a groove cross section that is a cross section with respect to the extending direction of the groove in a non-contact manner;
A moving unit that moves the measurement object in the longitudinal direction while rotating the measurement object around the longitudinal direction,
The sensor unit measures the shape of the groove cross section by irradiating the groove with a light cutting line and receiving reflected light from the groove.
The sensor unit is arranged so that an irradiation side surface that is a surface including the light cutting line and the light irradiation port coincides with the groove cross section,
A first step in which the sensor unit measures the shape of the groove cross section of the measurement object that is moved while being rotated by the moving unit;
A shape measuring method comprising: a second step of causing the sensor section to continuously measure the shape of the groove cross section and measuring the overall shape of the groove.