JP6186206B2 - Ultrasonic cleaning method and ultrasonic cleaning apparatus - Google Patents

Ultrasonic cleaning method and ultrasonic cleaning apparatus Download PDF

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JP6186206B2
JP6186206B2 JP2013169187A JP2013169187A JP6186206B2 JP 6186206 B2 JP6186206 B2 JP 6186206B2 JP 2013169187 A JP2013169187 A JP 2013169187A JP 2013169187 A JP2013169187 A JP 2013169187A JP 6186206 B2 JP6186206 B2 JP 6186206B2
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倫久 池田
倫久 池田
希 服部
希 服部
昭広 後藤
昭広 後藤
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本発明は、被洗浄物を洗浄液に浸漬し、伝搬液を介して超音波を洗浄液に伝搬し、被洗浄物を洗浄する超音波洗浄方法及び超音波洗浄装置に関する。   The present invention relates to an ultrasonic cleaning method and an ultrasonic cleaning apparatus for immersing an object to be cleaned in a cleaning liquid, propagating ultrasonic waves to the cleaning liquid via the propagation liquid, and cleaning the object to be cleaned.

超音波洗浄装置における被洗浄物への超音波の照射手段は大きく分けて、直接照射型と間接照射型がある。直接照射型とは洗浄槽に対して超音波振動子を組み付ける方法と超音波振動子が組みつけられた密閉型の箱(投げ込み型振動子)を洗浄槽に投げ込む方法のことをいう。直接照射型では、洗浄液に直接超音波振動を伝搬させて洗浄液中にキャビテーションを発生させる。このキャビテーションによって被洗浄物を洗浄する。   The means for irradiating the object to be cleaned in the ultrasonic cleaning apparatus is roughly divided into a direct irradiation type and an indirect irradiation type. The direct irradiation type refers to a method of assembling an ultrasonic vibrator to the cleaning tank and a method of throwing a sealed box (throw-type vibrator) in which the ultrasonic vibrator is assembled into the cleaning tank. In the direct irradiation type, ultrasonic vibration is propagated directly to the cleaning liquid to generate cavitation in the cleaning liquid. The object to be cleaned is cleaned by this cavitation.

一方、間接照射型とは超音波振動子が取り付けられた伝搬槽中に満たされた伝搬液を介して、間接的に洗浄液に超音波を伝搬させる方法のことをいう。洗浄対象の種類により直接照射型と間接照射型の超音波洗浄装置を選択して使用する。   On the other hand, the indirect irradiation type refers to a method in which ultrasonic waves are propagated indirectly to the cleaning liquid via the propagation liquid filled in the propagation tank to which the ultrasonic vibrator is attached. A direct irradiation type or an indirect irradiation type ultrasonic cleaning apparatus is selected and used depending on the type of cleaning object.

特開2003−24886号公報Japanese Patent Laid-Open No. 2003-24886

直接照射型の超音波洗浄装置を用いて洗浄を行う場合、洗浄槽に超音波振動子を直接接合するか、超音波振動子が接合された振動板を洗浄槽にボルト等で組み付ける。洗浄槽に直接超音波振動子を接合すると超音波振動子が破損した場合、洗浄槽ごと交換しなければならないという問題がある。振動板を洗浄槽にボルト等で組み付ける場合、超音波振動子の破損時には振動板を交換することができるので、洗浄槽ごと交換する必要はない。   When cleaning is performed using a direct irradiation type ultrasonic cleaning apparatus, an ultrasonic vibrator is directly bonded to the cleaning tank, or a vibration plate to which the ultrasonic vibrator is bonded is assembled to the cleaning tank with a bolt or the like. When the ultrasonic vibrator is directly bonded to the cleaning tank, there is a problem that when the ultrasonic vibrator is damaged, the cleaning tank must be replaced. When the diaphragm is assembled to the cleaning tank with a bolt or the like, the diaphragm can be replaced when the ultrasonic vibrator is broken, so that it is not necessary to replace the entire cleaning tank.

しかし、この場合には洗浄槽の洗浄液を交換する際に、振動板と洗浄槽の接合部(締結用のボルト周辺、洗浄槽と振動板の液接シール材周辺)の洗浄液を完全に取り除くことが困難であり、衛生的にも好ましくない。特に超音波洗浄を医療分野や食品分野で使用する際には、雑菌等に特段の配慮を必要とするため大きな問題となる。投げ込み型振動子を洗浄槽に投げ込む方法では、接合部が無いので上記衛生面での問題は解決されるが、洗浄槽内に投げ込まれた振動子の体積の分、洗浄槽容積が犠牲になる。   However, in this case, when replacing the cleaning liquid in the cleaning tank, the cleaning liquid at the joints between the vibration plate and the cleaning tank (around the fastening bolts and around the liquid sealant between the cleaning tank and the vibration plate) must be completely removed. Is difficult and hygienic. In particular, when ultrasonic cleaning is used in the medical field or the food field, it is a big problem because it requires special consideration for various germs. The method of throwing the throwing type vibrator into the washing tank solves the above-mentioned hygiene problem because there is no joint, but the washing tank volume is sacrificed by the volume of the vibrator thrown into the washing tank. .

間接照射型の超音波洗浄装置を用いて洗浄を行う場合、図5に示すように、超音波洗浄装置101は洗浄槽102と振動板106の接合部が無いため、洗浄槽の洗浄が容易かつ清浄にできるとともに、接合部に洗浄液104が残留するといった問題は起こらない。尚且つ、洗浄槽102内の十分な容積も確保することができる。しかし、伝搬槽103が開放端107を有しており、伝搬液105が空気と接触し、伝搬液105中の溶存ガスの量が増減してしまう。伝搬液中の溶存ガスが増減すると、伝搬する超音波が変動してしまうため、被洗浄物を均一に洗浄することができず洗浄ムラが発生し、洗浄効果が低下してしまう。また、伝搬液105が空気中へ蒸発し液量が減少していくので、定期的に伝搬液105を補給する作業や装置が必要となる。   When cleaning is performed using an indirect irradiation type ultrasonic cleaning apparatus, the ultrasonic cleaning apparatus 101 does not have a joint between the cleaning tank 102 and the diaphragm 106 as shown in FIG. In addition to being able to be cleaned, there is no problem that the cleaning liquid 104 remains in the joint. In addition, a sufficient volume in the cleaning tank 102 can be secured. However, since the propagation tank 103 has the open end 107, the propagation liquid 105 comes into contact with air, and the amount of dissolved gas in the propagation liquid 105 increases or decreases. When the dissolved gas in the propagating liquid increases or decreases, the propagating ultrasonic wave fluctuates, so that the object to be cleaned cannot be cleaned uniformly, causing cleaning unevenness and reducing the cleaning effect. In addition, since the propagation liquid 105 evaporates into the air and the amount of the liquid decreases, an operation and an apparatus for periodically replenishing the propagation liquid 105 are required.

特許文献1には、間接照射型の超音波洗浄装置において、伝搬液を封入した伝搬槽を介して超音波を伝搬し、洗浄を行う超音波洗浄装置が記載されている。この超音波洗浄装置のように伝搬液を伝搬槽に封入すれば、伝搬液が空気と接触する面積を極小化できる。しかし、この超音波洗浄装置は、伝搬槽が洗浄槽の底部に固定されている。この構造では洗浄槽を洗浄することは容易ではなく、振動子等にも液滴が付着して不衛生である上に、振動子等の破損が生じやすい。更に、伝搬槽が洗浄槽に固定されているので封入された伝搬液の入れ替えが困難で、腐敗した場合には、洗浄槽周辺の衛生状態が著しく悪化してしまう。   Patent Document 1 describes an ultrasonic cleaning apparatus that performs cleaning by propagating ultrasonic waves through a propagation tank enclosing a propagation liquid in an indirect irradiation type ultrasonic cleaning apparatus. If the propagation liquid is sealed in the propagation tank as in this ultrasonic cleaning apparatus, the area where the propagation liquid comes into contact with air can be minimized. However, in this ultrasonic cleaning apparatus, the propagation tank is fixed to the bottom of the cleaning tank. In this structure, it is not easy to clean the cleaning tank, and the liquid droplets adhere to the vibrator and the like and are unsanitary, and the vibrator and the like are easily damaged. Further, since the propagation tank is fixed to the washing tank, it is difficult to replace the enclosed propagation liquid. When the propagation tank is rotted, the sanitary condition around the washing tank is significantly deteriorated.

本発明は前述のような問題に鑑みてなされたもので、超音波洗浄装置内を常に清潔な状態に保ちながら、高い洗浄効果が得られる超音波洗浄方法及び超音波洗浄装置を提供することを目的とする。   The present invention has been made in view of the above-described problems, and provides an ultrasonic cleaning method and an ultrasonic cleaning device that can obtain a high cleaning effect while keeping the ultrasonic cleaning device always clean. Objective.

上記目的を達成するために、本発明によれば、洗浄槽中の洗浄液に被洗浄物を浸漬し、伝搬槽に取り付けた超音波振動子から発振する超音波を前記伝搬槽中の伝搬液を介して前記洗浄液に伝搬させて前記被洗浄物を洗浄する超音波洗浄方法であって、前記伝搬槽に前記伝搬液を封入し、前記伝搬槽を前記洗浄槽に脱着自在にして取り付けて洗浄を行うことを特徴とする超音波洗浄方法を提供する。
このように、伝搬槽内に封入された伝搬液は空気と接触しないので伝搬液中の溶存ガスが増減することはほとんど無く、伝搬液中の溶存ガス濃度が変動することを抑制できる。従って、洗浄ムラの発生を抑制することができる。さらに、伝搬槽を洗浄槽に脱着自在に取り付けているので、容易に伝搬槽を洗浄槽から取り外して洗浄槽及び伝搬槽内を洗浄したり伝搬液の入れ替えを行ったりできる。その結果、常に清潔に保ちながら、被洗浄物を高清浄度で洗浄することができる。
In order to achieve the above object, according to the present invention, an object to be cleaned is immersed in a cleaning liquid in a cleaning tank, and an ultrasonic wave oscillated from an ultrasonic vibrator attached to the propagation tank is transferred to the propagation liquid in the propagation tank. An ultrasonic cleaning method for propagating to the cleaning liquid and cleaning the object to be cleaned, wherein the propagation liquid is enclosed in the propagation tank, and the propagation tank is detachably attached to the cleaning tank for cleaning. An ultrasonic cleaning method is provided.
Thus, since the propagation liquid sealed in the propagation tank does not come into contact with air, the dissolved gas in the propagation liquid hardly increases and decreases, and the fluctuation of the dissolved gas concentration in the propagation liquid can be suppressed. Therefore, occurrence of cleaning unevenness can be suppressed. Furthermore, since the propagation tank is detachably attached to the cleaning tank, the propagation tank can be easily detached from the cleaning tank, and the washing tank and the propagation tank can be cleaned or the propagation liquid can be replaced. As a result, the object to be cleaned can be cleaned with a high degree of cleanness while being always kept clean.

このとき、前記伝搬液に酸化剤を添加することが好ましい。
このようにすれば、封入された伝搬液の腐敗を抑制でき、より確実に衛生的な超音波洗浄を行うことができる。
At this time, it is preferable to add an oxidizing agent to the propagation liquid.
In this way, it is possible to suppress the decay of the enclosed propagation liquid, and it is possible to perform hygienic ultrasonic cleaning more reliably.

またこのとき、前記伝搬液中の前記超音波の波長をλ、自然数をnとしたとき、前記洗浄槽の前記伝搬槽と接する面から前記振動子の前記伝搬槽と接する面までの距離を、(λ×n)/2とすることが好ましい。
このようにすれば、洗浄槽の伝搬槽と接する面に、定在波の波形の腹の部分が存在するので、効率よく超音波を洗浄液に伝搬することができ、より洗浄効果を高めることができる。
Further, at this time, when the wavelength of the ultrasonic wave in the propagation liquid is λ and the natural number is n, the distance from the surface of the cleaning tank in contact with the propagation tank to the surface of the vibrator in contact with the propagation tank is Preferably, (λ × n) / 2.
In this way, since the antinode portion of the standing wave waveform is present on the surface of the cleaning tank in contact with the propagation tank, the ultrasonic wave can be efficiently propagated to the cleaning liquid, and the cleaning effect can be further enhanced. it can.

このとき、前記伝搬液を脱気水とすることが好ましい。
伝搬液を脱気水とすれば、伝搬液中にキャビテーション起因の気泡が発生することがない。その結果、超音波の伝搬が阻害されることがないので、伝搬効率を良くすることができ、より洗浄効果を高めることができる。
At this time, the propagation liquid is preferably deaerated water.
If the propagation liquid is degassed water, bubbles due to cavitation are not generated in the propagation liquid. As a result, since the propagation of the ultrasonic wave is not hindered, the propagation efficiency can be improved and the cleaning effect can be further enhanced.

またこのとき、前記洗浄槽及び前記伝搬槽の材質として、ステンレス又は石英を用いることが好ましい。
これらの材質を使用すれば、超音波洗浄装置の汚染を抑制できるので、超音波洗浄装置を清潔に保つことができる。
At this time, it is preferable to use stainless steel or quartz as the material of the cleaning tank and the propagation tank.
If these materials are used, contamination of the ultrasonic cleaning apparatus can be suppressed, so that the ultrasonic cleaning apparatus can be kept clean.

また、前記超音波の発振周波数を20kHz〜2MHzとすることが好ましい。
このようにすれば、洗浄液中に効率よくキャビテーションを発生させることができ、より洗浄効果を高めることができる。
The ultrasonic oscillation frequency is preferably 20 kHz to 2 MHz.
In this way, cavitation can be efficiently generated in the cleaning liquid, and the cleaning effect can be further enhanced.

また、本発明によれば、超音波を発振する超音波振動子と、被洗浄物を浸漬させる洗浄液を保持する洗浄槽と、前記超音波振動子から発振される超音波を前記洗浄液に伝搬させるための伝搬液を保持する伝搬槽とを具備し、前記超音波振動子は前記伝搬槽に取り付けられたものである超音波洗浄装置であって、前記伝搬槽は前記伝搬液が封入されたものであり、前記伝搬槽は前記洗浄槽に脱着自在に取り付けられたものであることを特徴とする超音波洗浄装置を提供する。   In addition, according to the present invention, an ultrasonic vibrator that oscillates an ultrasonic wave, a cleaning tank that holds a cleaning liquid that immerses an object to be cleaned, and an ultrasonic wave that is oscillated from the ultrasonic vibrator is propagated to the cleaning liquid. And an ultrasonic cleaning device in which the ultrasonic transducer is attached to the propagation tank, wherein the propagation tank is filled with the propagation liquid. The ultrasonic cleaning apparatus is characterized in that the propagation tank is detachably attached to the cleaning tank.

このような超音波洗浄装置であれば、伝搬槽内に封入された伝搬液は空気と接触しないので伝搬液中の溶存ガスが増減することはほとんど無い。従って、伝搬液中の溶存ガスの濃度は一定となり洗浄ムラの発生を防ぐことができる。さらに、伝搬槽は洗浄槽から脱着自在であるので、適宜取り外すことができ、容易に洗浄槽や伝搬槽の洗浄や伝搬液の入れ替えを行える。その結果、超音波洗浄装置を常に清潔な状態に保ちながら、高い洗浄効果を得られる超音波洗浄を行うことができる上に、洗浄に伴い装置を破損させてしまうこともない超音波洗浄装置となる。   In such an ultrasonic cleaning apparatus, the propagation liquid sealed in the propagation tank does not come into contact with air, so the dissolved gas in the propagation liquid hardly increases or decreases. Therefore, the concentration of the dissolved gas in the propagation liquid is constant, and the occurrence of uneven cleaning can be prevented. Further, since the propagation tank is detachable from the washing tank, it can be removed as appropriate, and the washing tank and the propagation tank can be easily cleaned and the propagation liquid can be replaced. As a result, it is possible to perform ultrasonic cleaning with high cleaning effect while keeping the ultrasonic cleaning device always clean, and the ultrasonic cleaning device does not damage the device due to cleaning. Become.

このとき、前記伝搬液は、酸化剤を添加されたものであることが好ましい。
このようなものであれば、伝搬液の腐敗を抑制でき、より確実に衛生的な超音波洗浄を行うことができるものとなる。
At this time, it is preferable that the propagation liquid is added with an oxidizing agent.
If it is such, it will be possible to suppress the decay of the propagation liquid, and more reliably perform hygienic ultrasonic cleaning.

またこのとき、前記伝搬液中の前記超音波の波長をλ、自然数をnとしたとき、前記洗浄槽の前記伝搬槽と接する面から前記振動子の前記伝搬槽と接する面までの距離が、(λ×n)/2となるものであることが好ましい。
このようにすれば、洗浄槽の伝搬槽と接する面に、定在波の波形の腹の部分が存在するので、効率よく超音波を洗浄液に伝搬することができ、より洗浄効果が高いものとなる。
At this time, when the wavelength of the ultrasonic wave in the propagation liquid is λ and the natural number is n, the distance from the surface of the cleaning tank in contact with the propagation tank to the surface of the vibrator in contact with the propagation tank is It is preferable that (λ × n) / 2.
In this way, since the antinode portion of the waveform of the standing wave exists on the surface of the cleaning tank in contact with the propagation tank, the ultrasonic wave can be efficiently propagated to the cleaning liquid, and the cleaning effect is higher. Become.

さらに、前記伝搬液が脱気水であることが好ましい。
伝搬液が脱気水であれば、伝搬液中にキャビテーション起因の気泡が発生することがない。その結果、超音波の伝搬が阻害されることがないので、伝搬効率を良くすることができ、より洗浄効果を高めることができるものとなる。
Further, the propagation liquid is preferably deaerated water.
If the propagation liquid is deaerated water, bubbles due to cavitation are not generated in the propagation liquid. As a result, since the propagation of the ultrasonic wave is not hindered, the propagation efficiency can be improved and the cleaning effect can be further enhanced.

このとき、前記洗浄槽及び前記伝搬槽の材質は、ステンレス又は石英から成るものであることが好ましい。
これらの材質のものであれば、超音波を被洗浄物に効率よく伝搬して洗浄できるとともに、超音波洗浄装置の汚染を抑制できるので、超音波洗浄装置を清潔に保つことができる。
At this time, the material of the cleaning tank and the propagation tank is preferably made of stainless steel or quartz.
If it is made of these materials, the ultrasonic wave can be efficiently propagated to the object to be cleaned and the contamination of the ultrasonic cleaning device can be suppressed, so that the ultrasonic cleaning device can be kept clean.

またこのとき、前記超音波の発振周波数が20kHz〜2MHzとなるものであることが好ましい。
このようにすれば、洗浄液中に効率よくキャビテーションを発生させることができ、より洗浄効果を高めることができるものとなる。
At this time, it is preferable that the oscillation frequency of the ultrasonic wave is 20 kHz to 2 MHz.
In this way, cavitation can be efficiently generated in the cleaning liquid, and the cleaning effect can be further enhanced.

本発明の超音波洗浄方法及び超音波洗浄装置であれば、超音波洗浄装置内を常に清潔な状態に保ちながら、高い洗浄効果が得られる超音波洗浄を行うことができる。   With the ultrasonic cleaning method and the ultrasonic cleaning apparatus of the present invention, it is possible to perform ultrasonic cleaning that provides a high cleaning effect while keeping the inside of the ultrasonic cleaning apparatus always clean.

本発明の洗浄槽の下部に伝搬槽を有する超音波洗浄装置の一例を示した概略図である。It is the schematic which showed an example of the ultrasonic cleaning apparatus which has a propagation tank in the lower part of the washing tank of this invention. 本発明の洗浄槽の側面に伝搬槽を有する超音波洗浄装置の一例を示した概略図である。It is the schematic which showed an example of the ultrasonic cleaning apparatus which has a propagation tank in the side surface of the cleaning tank of this invention. 本発明の超音波洗浄装置の別の一例を示した概略図である。It is the schematic which showed another example of the ultrasonic cleaning apparatus of this invention. 封入された伝搬水中の溶存酸素量の時間変化を示した図である。It is the figure which showed the time change of the dissolved oxygen amount in enclosed propagation water. 従来の伝搬槽に開放端を有する超音波洗浄装置の一例を示した概略図である。It is the schematic which showed an example of the ultrasonic cleaning apparatus which has the open end in the conventional propagation tank.

以下、本発明について実施の形態を説明するが、本発明はこれに限定されるものではない。
間接照射型の超音波洗浄方法及び超音波洗浄装置において、伝搬槽が開放端を有している場合には、伝搬液中に空気中のガスが溶け込んでしまう。こうして伝搬液中の溶存ガスが増加すると伝搬液中の溶存ガス濃度が変動し洗浄ムラが発生してしまう。その結果、洗浄効果が低下してしまうというという問題があった。
Hereinafter, although an embodiment is described about the present invention, the present invention is not limited to this.
In the indirect irradiation type ultrasonic cleaning method and ultrasonic cleaning apparatus, when the propagation tank has an open end, gas in the air is dissolved in the propagation liquid. When the dissolved gas in the propagation liquid increases in this way, the concentration of the dissolved gas in the propagation liquid varies and cleaning unevenness occurs. As a result, there is a problem that the cleaning effect is lowered.

この問題に対し、洗浄ムラの発生は伝搬槽に伝搬液を封入することで抑制できる。しかし、特許文献1のように伝搬液を封入した伝搬槽を洗浄槽に固定してしまい、更に伝搬液の入れ替えもすることができない超音波洗浄装置では、洗浄槽の洗浄がきわめて困難であり、振動板等が破損すると、洗浄槽のみならず、伝搬槽もすべて交換する必要がある。その上、衛生上も問題で、特に封入した伝搬液が腐敗した場合等に超音波洗浄装置の衛生状態が悪くなり、特に雑菌等に特段の配慮が必要な医療分野や食品分野での使用ができなくなってしまう。このように、従来では、低コストで洗浄効果と衛生面の両方を高い水準に維持しながら洗浄を行うことができないという問題があった。   For this problem, the occurrence of cleaning unevenness can be suppressed by enclosing the propagation liquid in the propagation tank. However, in the ultrasonic cleaning apparatus in which the propagation tank in which the propagation liquid is sealed as in Patent Document 1 is fixed to the cleaning tank and the propagation liquid cannot be replaced, cleaning of the cleaning tank is extremely difficult. If the diaphragm is damaged, it is necessary to replace not only the cleaning tank but also the propagation tank. In addition, there is also a problem with hygiene, especially when the encapsulated propagation liquid is spoiled, etc., the hygienic condition of the ultrasonic cleaning device deteriorates, and it is especially used in the medical field and food field where special consideration is required for germs. It becomes impossible. Thus, conventionally, there has been a problem that it is not possible to perform cleaning while maintaining both the cleaning effect and hygiene at a high level at a low cost.

そこで、本発明者はこのような問題を解決すべく鋭意検討を重ねた。その結果、伝搬液を封入した伝搬槽を、洗浄槽に脱着自在に取り付けることで、常に清潔で洗浄ムラが発生しない洗浄効果の高い洗浄が低コストで行えることに想到し、本発明を完成させた。   Therefore, the present inventor has intensively studied to solve such problems. As a result, the propagation tank filled with the propagation liquid is detachably attached to the washing tank so that it can be cleaned at a low cost and is always clean and highly effective in cleaning. It was.

以下、本発明について図1、図2、図3を参照して詳細に説明するが、本発明はこれらに限定されるものではない。
まず、以下に本発明の超音波洗浄装置を、図1を参照して説明する。
図1に示すように、本発明の超音波洗浄装置1は、超音波振動子6と、洗浄液4を保持する洗浄槽2と、超音波振動子6から発生する超音波を洗浄槽2に伝搬させるための伝搬液5を保持する伝搬槽3とを具備するものである。
洗浄槽2と伝搬槽3について、これらの材質はステンレス又は石英から成るものであることが好ましい。
これらの材質であれば、超音波を伝搬させるのに都合がよく、また超音波洗浄装置の汚染を抑制できるので、超音波洗浄装置を清潔に保つことができるものとなる。
Hereinafter, the present invention will be described in detail with reference to FIGS. 1, 2, and 3. However, the present invention is not limited to these.
First, the ultrasonic cleaning apparatus of the present invention will be described below with reference to FIG.
As shown in FIG. 1, the ultrasonic cleaning apparatus 1 of the present invention propagates an ultrasonic vibrator 6, a cleaning tank 2 that holds a cleaning liquid 4, and ultrasonic waves generated from the ultrasonic vibrator 6 to the cleaning tank 2. And a propagation tank 3 for holding the propagation liquid 5 for the purpose.
For the washing tank 2 and the propagation tank 3, these materials are preferably made of stainless steel or quartz.
These materials are convenient for propagating ultrasonic waves and can suppress contamination of the ultrasonic cleaning apparatus, so that the ultrasonic cleaning apparatus can be kept clean.

洗浄槽2の下部には、伝搬槽3が洗浄槽2に脱着自在に取り付けられている。この伝搬槽3は、封止バルブ7が設けられており、内部に伝搬液5を満たした後、封止バルブ7を閉じることで伝搬液5を封入することができる。伝搬槽3に封入する伝搬液5は、例えば純水等とすることができるが、脱気水とすることが好ましい。
伝搬液5が脱気水であれば、伝搬液5中でキャビテーション起因の気泡が発生することがないため、キャビテーションによる超音波の伝搬の障害が起こらない。その結果、より洗浄効果を高めることができるものとなる。更に、キャビテーションにより伝搬槽3を傷めることが無く、伝搬槽3の劣化を防止できる。
更に、伝搬液5に酸化剤を添加することが好ましい。添加する酸化剤としては、例えば塩素系であれば次亜塩素酸ナトリウム、酸素系であれば過酸化水素水とすることができる。
酸化剤を添加した伝搬液5を封入すれば、雑菌が繁殖するなどして封入された伝搬液5が腐敗することを抑制でき、伝搬液5をより長時間清潔に保つことができるものとなる。
A propagation tank 3 is detachably attached to the cleaning tank 2 below the cleaning tank 2. The propagation tank 3 is provided with a sealing valve 7, and the propagation liquid 5 can be sealed by closing the sealing valve 7 after filling the propagation liquid 5 inside. The propagation liquid 5 sealed in the propagation tank 3 can be pure water, for example, but is preferably deaerated water.
If the propagation liquid 5 is degassed water, bubbles due to cavitation are not generated in the propagation liquid 5, so that the propagation of ultrasonic waves due to cavitation does not occur. As a result, the cleaning effect can be further enhanced. Furthermore, the propagation tank 3 is not damaged by cavitation, and the deterioration of the propagation tank 3 can be prevented.
Furthermore, it is preferable to add an oxidizing agent to the propagation liquid 5. As an oxidizing agent to be added, for example, sodium hypochlorite can be used in the case of chlorine, and hydrogen peroxide water can be used in the case of oxygen.
If the propagation liquid 5 to which the oxidant is added is enclosed, it is possible to suppress the decay of the enclosed propagation liquid 5 due to propagation of various bacteria, and the propagation liquid 5 can be kept clean for a longer time. .

被洗浄物8は、保持具(不図示)によって保持され、洗浄槽2の洗浄液4中に浸漬される。伝搬槽3の下部には超音波振動子6が取り付けられており、この超音波振動子6から発振された超音波が、伝搬液5を介して洗浄液4に伝搬して被洗浄物8を洗浄する。   The object to be cleaned 8 is held by a holder (not shown) and is immersed in the cleaning liquid 4 in the cleaning tank 2. An ultrasonic vibrator 6 is attached to the lower part of the propagation tank 3, and ultrasonic waves oscillated from the ultrasonic vibrator 6 propagate to the cleaning liquid 4 through the propagation liquid 5 to clean the object 8 to be cleaned. To do.

洗浄槽2の伝搬槽3と接する面から超音波振動子6の伝搬槽3と接する面までの距離(図1中のd)は、伝搬液5中の超音波の波長をλ、自然数をnとしたとき、(λ×n)/2となるものであることが好ましい。
このようにすれば、洗浄槽2の伝搬槽3と接している面に、超音波振動子6から発振された超音波の定在波の波形の腹の部分が存在するものとなる。その結果、効率よく超音波を洗浄液に伝搬することができ、より洗浄効果を高めることができるものとなる。
The distance (d in FIG. 1) from the surface of the cleaning tank 2 in contact with the propagation tank 3 to the surface of the ultrasonic transducer 6 in contact with the propagation tank 3 is λ for the wavelength of the ultrasonic wave in the propagation liquid 5 and n for the natural number. It is preferable that (λ × n) / 2.
In this way, the antinode portion of the waveform of the ultrasonic standing wave oscillated from the ultrasonic transducer 6 is present on the surface of the cleaning tank 2 in contact with the propagation tank 3. As a result, the ultrasonic wave can be efficiently propagated to the cleaning liquid, and the cleaning effect can be further enhanced.

このとき、超音波振動子6から発振される超音波の発振周波数が20kHz〜2MHzとなるものであることが好ましい。
このようなものであれば、洗浄液中に効率よくキャビテーションを発生させることができ、より洗浄効果を高めることができるものとなる。
At this time, it is preferable that the oscillation frequency of the ultrasonic wave oscillated from the ultrasonic vibrator 6 is 20 kHz to 2 MHz.
With such a configuration, cavitation can be efficiently generated in the cleaning liquid, and the cleaning effect can be further enhanced.

本発明の超音波洗浄装置1のように、伝搬槽3が洗浄槽2に脱着自在に取り付けられていることで、超音波洗浄装置1の洗浄槽2の洗浄を行う際に伝搬槽3を洗浄槽2から取り外し洗浄できるので洗浄槽2を容易に清潔に保つことができる。更に、伝搬槽5を取り外して新しいものと交換することもできる。従って、伝搬槽3も容易に洗浄でき、清潔に保つことができる。
また、伝搬槽3に封入されている伝搬液5は、空気との接触面積が極小化されているので溶存ガスの増減を抑制することができる。従って、伝搬液5中の溶存ガスの濃度が一定となり被洗浄物を均一にムラなく洗浄することができる。その結果、本発明の超音波洗浄装置1は、常に衛生面に問題が無く清潔に維持でき、且つ高い洗浄効果を有するものとなる。更に、伝搬液5が蒸発せず、液量の変動がないため、伝搬液5を追加する必要がなく、伝搬液5の供給装置も必ずしも必要ないのでコストを抑えることができるものとなる。
Since the propagation tank 3 is detachably attached to the cleaning tank 2 as in the ultrasonic cleaning apparatus 1 of the present invention, the propagation tank 3 is cleaned when the cleaning tank 2 of the ultrasonic cleaning apparatus 1 is cleaned. Since it can remove and wash | clean from the tank 2, the washing tank 2 can be kept clean easily. Furthermore, the propagation tank 5 can be removed and replaced with a new one. Therefore, the propagation tank 3 can also be easily cleaned and kept clean.
Moreover, since the contact area with the propagation liquid 5 sealed in the propagation tank 3 is minimized, the increase / decrease in dissolved gas can be suppressed. Therefore, the concentration of the dissolved gas in the propagation liquid 5 becomes constant, and the object to be cleaned can be cleaned uniformly and non-uniformly. As a result, the ultrasonic cleaning apparatus 1 of the present invention can always be kept clean with no sanitary problems and has a high cleaning effect. Furthermore, since the propagation liquid 5 does not evaporate and there is no fluctuation in the amount of liquid, it is not necessary to add the propagation liquid 5 and a supply device for the propagation liquid 5 is not necessarily required, so that the cost can be reduced.

上記で説明した本発明の超音波洗浄装置1として、伝搬槽3及び超音波振動子6が洗浄槽2の下部に設置されている態様を説明したが、これに限定されることは無い。例えば図2に示すように、伝搬液5を封入した伝搬槽3及び超音波振動子6が洗浄槽2の側面に脱着自在に取り付けられていても良い。   Although the propagation tank 3 and the ultrasonic transducer | vibrator 6 were demonstrated in the lower part of the washing tank 2 as the ultrasonic cleaning apparatus 1 of this invention demonstrated above, it is not limited to this. For example, as shown in FIG. 2, the propagation tank 3 and the ultrasonic transducer 6 enclosing the propagation liquid 5 may be detachably attached to the side surface of the cleaning tank 2.

また、図3に示すように洗浄槽2の側壁で、フランジで構成される伝搬槽3の開口部を塞ぐことで、伝搬液5を封入しても良い。この場合も、留め具9によって伝搬槽3は洗浄槽2に脱着自在に取り付けられている。図3に示す伝搬槽3は洗浄槽2と接触する側にフランジ部を有しているが、このような開口部を有した伝搬槽3であれば、脱着が容易であるとともに伝搬槽3を洗浄槽2から取り外して洗浄する際に伝搬槽3の内部を洗浄しやすいので、更に清潔を保つことができるものとなる。また、洗浄槽2と伝搬槽3の間に空間ができないので汚れが溜まり難い。   Further, as shown in FIG. 3, the propagation liquid 5 may be sealed by closing the opening of the propagation tank 3 formed of a flange with the side wall of the cleaning tank 2. Also in this case, the propagation tank 3 is detachably attached to the cleaning tank 2 by the fasteners 9. The propagation tank 3 shown in FIG. 3 has a flange portion on the side in contact with the cleaning tank 2, but if the propagation tank 3 has such an opening, it is easy to detach and attach the propagation tank 3. Since it is easy to clean the inside of the propagation tank 3 when it is removed from the cleaning tank 2 and cleaned, the cleanliness can be further maintained. Further, since there is no space between the cleaning tank 2 and the propagation tank 3, dirt is difficult to accumulate.

図3には洗浄槽2の側面にフランジ部を有する伝搬槽3を取り付ける構成を示したが、当然これに限定されず、例えば洗浄槽2の下部に、洗浄槽2と接触する側にフランジ部を有している伝搬槽3を取り付けて伝搬液5を封入する構成とすることもできる。
図2及び図3に示した、いずれの態様であっても、上記と同様に本発明の超音波洗浄装置1は、洗浄槽2に伝搬槽3が脱着自在に取り付けられており、常に衛生面に問題が無く清潔であり、且つ高い洗浄効果を有するものとなる。
Although FIG. 3 shows a configuration in which the propagation tank 3 having a flange portion is attached to the side surface of the cleaning tank 2, the structure is naturally not limited to this. It is also possible to adopt a configuration in which the propagation liquid 3 is attached and the propagation liquid 5 is enclosed.
2 and 3, the ultrasonic cleaning apparatus 1 of the present invention has the propagation tank 3 detachably attached to the cleaning tank 2 in the same manner as described above, and is always hygienic. Therefore, it is clean and has a high cleaning effect.

次に、本発明の超音波洗浄方法について図1に示す本発明の超音波洗浄装置1を用いる場合を例に以下に説明するが、もちろんこれに限定されるものではない。
まず、図1に示す超音波洗浄装置1の洗浄槽2に洗浄液4を、洗浄槽2に脱着自在に取り付けられている伝搬槽3に伝搬液5を注入する。洗浄槽2及び伝搬槽3の材質は、ステンレス又は石英とすることが好ましい。
Next, the ultrasonic cleaning method of the present invention will be described below with reference to the case where the ultrasonic cleaning apparatus 1 of the present invention shown in FIG. 1 is used as an example, but the present invention is not limited to this.
First, the cleaning liquid 4 is injected into the cleaning tank 2 of the ultrasonic cleaning apparatus 1 shown in FIG. 1, and the propagation liquid 5 is injected into the propagation tank 3 detachably attached to the cleaning tank 2. The material of the cleaning tank 2 and the propagation tank 3 is preferably stainless steel or quartz.

伝搬液5の注入後、封止バルブ7を閉じて伝搬槽3に伝搬液5を封入する。ここで、図3に示すような、フランジを有する伝搬槽3を用いる場合には、フランジからなる伝搬槽3を洗浄槽2の側壁に取り付けた後、伝搬液5を注入すればよい。このとき、留め具9を介して、洗浄槽2と伝搬槽3が脱着自在になるように取り付ける。図3のような、伝搬槽3の取り付け方であれば、脱着が容易で、より超音波洗浄装置1を洗浄し易くなる。   After injection of the propagation liquid 5, the sealing valve 7 is closed and the propagation liquid 5 is sealed in the propagation tank 3. Here, when the propagation tank 3 having a flange as shown in FIG. 3 is used, the propagation liquid 5 may be injected after the propagation tank 3 having the flange is attached to the side wall of the cleaning tank 2. At this time, the cleaning tank 2 and the propagation tank 3 are attached via the fastener 9 so as to be freely detachable. If the propagation tank 3 is attached as shown in FIG. 3, the attachment and detachment is easy and the ultrasonic cleaning apparatus 1 can be more easily cleaned.

このとき、伝搬槽3に封入する伝搬液5としては、純水等を用いることができる。更に、超音波の洗浄槽3への伝搬効率を考慮すると、伝搬液5として脱気水を用いることが好ましい。
伝搬槽3に封入する伝搬液5を脱気水とすれば、キャビテーション起因の気泡が発生することがないため、キャビテーションによる超音波の伝搬の障害が起こらないので超音波の伝搬効率が向上する。その結果、より洗浄効果を高めることができる。更に、伝搬液5中でキャビテーションが発生しないので、伝搬槽3を傷めることが無く、伝搬槽3の劣化を防止できる。
At this time, pure water or the like can be used as the propagation liquid 5 sealed in the propagation tank 3. Furthermore, considering the propagation efficiency of the ultrasonic wave to the cleaning tank 3, it is preferable to use deaerated water as the propagation liquid 5.
If the propagation liquid 5 sealed in the propagation tank 3 is degassed water, bubbles due to cavitation are not generated, so that the propagation of ultrasonic waves due to cavitation does not occur, so that the propagation efficiency of ultrasonic waves is improved. As a result, the cleaning effect can be further enhanced. Furthermore, since cavitation does not occur in the propagation liquid 5, the propagation tank 3 is not damaged, and the propagation tank 3 can be prevented from deteriorating.

このとき、伝搬液5に酸化剤を添加することが好ましい。酸化剤としては、例えば塩素系であれば次亜塩素酸ナトリウム、酸素系であれば過酸化水素水を用いることができる。
伝搬液5に酸化剤を添加すれば、雑菌が繁殖するなどして封入された伝搬液5が腐敗することを抑制でき、封入された伝搬液5をより長時間清潔に保つことができる。
At this time, it is preferable to add an oxidizing agent to the propagation liquid 5. As the oxidizing agent, for example, sodium hypochlorite can be used in the case of chlorine, and hydrogen peroxide water can be used in the case of oxygen.
If an oxidizing agent is added to the propagation liquid 5, it can suppress that the propagation liquid 5 enclosed, such as various bacteria propagated, decays, and can maintain the enclosed propagation liquid 5 more cleanly for a long time.

次に、保持具(不図示)によって被洗浄物8を保持し、洗浄液4に被洗浄物8を浸漬させる。その後、高周波電圧を印加して駆動した超音波振動子6が発振する超音波を、伝搬槽3中の伝搬液5を介して被洗浄物8を洗浄するための洗浄液4に伝搬させて、被洗浄物8を超音波洗浄する。洗浄槽2の伝搬槽3と接する面から超音波振動子6の伝搬槽3と接する面までの距離(図1中のd)は、伝搬液5中の超音波の波長をλ、自然数をnとしたとき、(λ×n)/2とすることが好ましい。
このようにすれば、洗浄槽2の伝搬槽3と接している面に、超音波振動子6から発振された超音波の定在波の波形の腹の部分が存在するものとなる。その結果、効率よく超音波を洗浄液に伝搬することができ、より洗浄効果を高めることができる。
Next, the object 8 to be cleaned is held by a holder (not shown), and the object 8 to be cleaned is immersed in the cleaning liquid 4. Thereafter, the ultrasonic wave oscillated by the ultrasonic vibrator 6 driven by applying a high-frequency voltage is propagated to the cleaning liquid 4 for cleaning the object to be cleaned 8 through the propagation liquid 5 in the propagation tank 3, The cleaning object 8 is ultrasonically cleaned. The distance (d in FIG. 1) from the surface of the cleaning tank 2 in contact with the propagation tank 3 to the surface of the ultrasonic transducer 6 in contact with the propagation tank 3 is λ for the wavelength of the ultrasonic wave in the propagation liquid 5 and n for the natural number. It is preferable that (λ × n) / 2.
In this way, the antinode portion of the waveform of the ultrasonic standing wave oscillated from the ultrasonic transducer 6 is present on the surface of the cleaning tank 2 in contact with the propagation tank 3. As a result, the ultrasonic wave can be efficiently propagated to the cleaning liquid, and the cleaning effect can be further enhanced.

このとき、超音波振動子6から発振される超音波の発振周波数が20kHz〜2MHzとすることが好ましい。
このようにすれば、洗浄液中に効率よくキャビテーションを発生させることができ、より洗浄効果を高めることができる。
At this time, it is preferable that the oscillation frequency of the ultrasonic wave oscillated from the ultrasonic vibrator 6 is 20 kHz to 2 MHz.
In this way, cavitation can be efficiently generated in the cleaning liquid, and the cleaning effect can be further enhanced.

本発明の超音波洗浄方法では、超音波洗浄を繰り返し行い超音波洗浄装置1に汚れが出始めた時点で、超音波洗浄を一旦中断し、洗浄槽2から伝搬槽3を取り外して洗浄槽2及び伝搬槽3を洗浄できる。従って超音波洗浄装置1を常に清潔に保つことができる。更に、伝搬槽5を取り外して新しいものと交換することもできる。
また、伝搬槽3に封入されている伝搬液5は、空気との接触面積が極小化されているので伝搬液5中の溶存ガスの増加を抑制することができる。従って、伝搬液5中の溶存ガスの濃度が一定であれば被洗浄物を均一にムラなく洗浄することができる。その結果、医療分野や食品分野において衛生面に問題なく使用でき、清潔で、洗浄効果の高い超音波洗浄を行うことができる。更に、伝搬液5が蒸発せず、液量の変動がないため、長期にわたり均一な洗浄が行われ、また伝搬液5を追加する必要がなく、伝搬液5の供給装置も必要ないのでコストを抑えることができる。
In the ultrasonic cleaning method of the present invention, when ultrasonic cleaning is repeated and dirt starts to appear in the ultrasonic cleaning apparatus 1, the ultrasonic cleaning is temporarily stopped, the propagation tank 3 is removed from the cleaning tank 2, and the cleaning tank 2 is removed. And the propagation tank 3 can be cleaned. Therefore, the ultrasonic cleaning apparatus 1 can always be kept clean. Furthermore, the propagation tank 5 can be removed and replaced with a new one.
In addition, since the propagation liquid 5 sealed in the propagation tank 3 has a minimal contact area with air, an increase in dissolved gas in the propagation liquid 5 can be suppressed. Therefore, if the concentration of the dissolved gas in the propagation liquid 5 is constant, the object to be cleaned can be cleaned evenly and uniformly. As a result, it can be used without problems in terms of hygiene in the medical field and food field, and can be cleaned and subjected to ultrasonic cleaning with a high cleaning effect. Further, since the propagation liquid 5 does not evaporate and there is no fluctuation in the liquid amount, uniform cleaning is performed over a long period of time, and it is not necessary to add the propagation liquid 5 and a supply device for the propagation liquid 5 is not required. Can be suppressed.

以下、本発明の実施例及び比較例を示して本発明をより具体的に説明するが、本発明はこれらに限定されるものではない。   EXAMPLES Hereinafter, the present invention will be described more specifically with reference to examples and comparative examples of the present invention, but the present invention is not limited to these.

(実施例1)
図3に示すような、本発明の超音波洗浄装置を用いて、本発明の超音波洗浄方法に従って超音波洗浄を繰り返し行った。また、伝搬液としては、脱気水を用いた。この脱気水は、溶存酸素量が7.5mg/Lの純水を脱気し、脱気直後の溶存酸素量が0.9mg/Lであるものを使用した。このとき、洗浄槽内や伝搬液を封入した伝搬槽内に汚れが確認された時点で、伝搬槽を取り外して超音波洗浄装置を洗浄した。伝搬槽はフランジ部を有しているため、伝搬槽内部が洗浄し易く非常に清潔に保つことができた。
その結果、従来の伝搬槽が洗浄槽に固定されている超音波洗浄装置に比べ、衛生面を大幅に改善でき、超音波洗浄装置内を常に清潔に保つことができた。
ここでは、伝搬液中の溶存ガス量の時間変化を調べるために、伝搬液中の溶存酸素量の変化を測定した。
伝搬液中での溶存酸素量の変化を図4に示す。図4のグラフの横軸は、脱気水を伝搬槽に供給してからの経過時間(Hr)を表している。通常、脱気水の液温の変化に伴って溶存酸素量が変動していくが、ほとんどの時間で溶存酸素量が2.0mg/L前後で安定していることがわかった。このように、溶存ガスの量が安定しているので均一な洗浄を行うことができ、洗浄ムラを抑制することができた。
以上の結果から、超音波洗浄装置内を常に清潔な状態に保ちながら、洗浄効果が高い超音波洗浄が実施できることが分かった。
Example 1
Using the ultrasonic cleaning apparatus of the present invention as shown in FIG. 3, ultrasonic cleaning was repeatedly performed according to the ultrasonic cleaning method of the present invention. Moreover, deaerated water was used as the propagation liquid. As this degassed water, pure water having a dissolved oxygen amount of 7.5 mg / L was degassed, and a dissolved oxygen amount immediately after degassing was 0.9 mg / L. At this time, when the contamination was confirmed in the cleaning tank or the propagation tank filled with the propagation liquid, the propagation tank was removed and the ultrasonic cleaning apparatus was cleaned. Since the propagation tank has a flange portion, the inside of the propagation tank can be easily cleaned and kept very clean.
As a result, compared with the ultrasonic cleaning apparatus in which the conventional propagation tank is fixed to the cleaning tank, the hygiene aspect can be greatly improved, and the inside of the ultrasonic cleaning apparatus can always be kept clean.
Here, in order to investigate the time change of the dissolved gas amount in the propagation liquid, the change in the dissolved oxygen amount in the propagation liquid was measured.
FIG. 4 shows the change in the amount of dissolved oxygen in the propagation liquid. The horizontal axis of the graph of FIG. 4 represents the elapsed time (Hr) after supplying deaerated water to the propagation tank. Usually, the amount of dissolved oxygen fluctuates with changes in the temperature of the degassed water, but it was found that the amount of dissolved oxygen was stable at around 2.0 mg / L for most of the time. Thus, since the amount of dissolved gas is stable, uniform cleaning can be performed and uneven cleaning can be suppressed.
From the above results, it was found that ultrasonic cleaning with a high cleaning effect can be performed while keeping the inside of the ultrasonic cleaning device clean.

(実施例2)
伝搬液として、純水に酸化剤として過酸化水素水を添加し、伝搬液中の過酸化水素濃度が1%となるように調整したものを使用したこと以外、実施例1と同様な条件で超音波洗浄を繰り返し行った。
伝搬液が伝搬槽に封入されてから45日(1080時間)経過した時点で伝搬液を取り出し腐敗調査を行ったが、菌の発生による伝搬液の汚染は無かった。これにより、更に長時間伝搬液を清潔に保ったまま、洗浄ムラの無い超音波洗浄が行えることが分かった。
また、上記酸化剤を次亜塩素酸ナトリウムに変え、伝搬液中の次亜塩素酸ナトリウムの濃度がそれぞれ1%、0.5%として超音波洗浄を繰り返し行った。その結果、どちらの場合も伝搬液が伝搬槽に封入されてから45日(1080時間)経過した時点で菌の発生による伝搬液の汚染は無かった。
(Example 2)
Under the same conditions as in Example 1 except that a propagating liquid was added to a pure water with hydrogen peroxide water as an oxidant and adjusted so that the hydrogen peroxide concentration in the propagating liquid was 1%. Ultrasonic cleaning was repeated.
When 45 days (1080 hours) have passed since the propagation liquid was sealed in the propagation tank, the propagation liquid was taken out and the rot was investigated, but there was no contamination of the propagation liquid due to the generation of bacteria. As a result, it was found that ultrasonic cleaning without cleaning unevenness can be performed while the propagation liquid is kept clean for a longer time.
In addition, ultrasonic cleaning was repeated by changing the oxidizing agent to sodium hypochlorite and setting the sodium hypochlorite concentration in the propagation liquid to 1% and 0.5%, respectively. As a result, in both cases, there was no contamination of the propagation liquid due to the generation of bacteria when 45 days (1080 hours) had elapsed since the propagation liquid was sealed in the propagation tank.

(比較例)
図5に示すような、開放端を持っている伝搬槽を有する超音波洗浄装置を使用すること以外、実施例1と同様な条件で超音波洗浄を繰り返し行った。
その結果、伝搬液中の時間経過とともに溶存ガス量が変動してしまい、洗浄ムラが発生してしまった。
(Comparative example)
Ultrasonic cleaning was repeated under the same conditions as in Example 1 except that an ultrasonic cleaning apparatus having a propagation tank having an open end as shown in FIG. 5 was used.
As a result, the dissolved gas amount fluctuated with the passage of time in the propagation liquid, and cleaning unevenness occurred.

尚、本発明は、上記実施形態に限定されるものではない。上記実施形態は例示であり、本発明の特許請求の範囲に記載された技術的思想と実質的に同一な構成を有し、同様な作用効果を奏するものは、いかなるものであっても本発明の技術的範囲に包含される。   The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the present invention has any configuration that has substantially the same configuration as the technical idea described in the claims of the present invention and that exhibits the same effects. Are included in the technical scope.

1…超音波洗浄装置、 2…洗浄槽、 3…伝搬槽、
4…洗浄液、 5…伝搬液、 6…超音波振動子、
7…封止バルブ、 8…被洗浄物、 9…留め具。
DESCRIPTION OF SYMBOLS 1 ... Ultrasonic cleaning apparatus, 2 ... Cleaning tank, 3 ... Propagation tank,
4 ... Cleaning liquid, 5 ... Propagating liquid, 6 ... Ultrasonic vibrator,
7 ... Sealing valve, 8 ... Object to be cleaned, 9 ... Fastener.

Claims (12)

洗浄槽中の洗浄液に被洗浄物を浸漬し、伝搬槽に取り付けた超音波振動子から発振する超音波を前記伝搬槽中の伝搬液を介して前記洗浄液に伝搬させて前記被洗浄物を洗浄する超音波洗浄方法であって、
前記伝搬槽に前記伝搬液を封入し、前記伝搬槽を前記洗浄槽に脱着自在にして取り付けて洗浄を行うことを特徴とする超音波洗浄方法。
The object to be cleaned is immersed in the cleaning liquid in the cleaning tank, and the ultrasonic wave oscillated from the ultrasonic vibrator attached to the propagation tank is propagated to the cleaning liquid through the propagation liquid in the propagation tank to clean the object to be cleaned. An ultrasonic cleaning method,
An ultrasonic cleaning method, wherein the propagation liquid is sealed in the propagation tank, and the propagation tank is attached to the cleaning tank so as to be detachable and cleaned.
前記伝搬液に酸化剤を添加することを特徴とする請求項1に記載の超音波洗浄方法。   The ultrasonic cleaning method according to claim 1, wherein an oxidizing agent is added to the propagation liquid. 前記伝搬液中の前記超音波の波長をλ、自然数をnとしたとき、前記洗浄槽の前記伝搬槽と接する面から前記超音波振動子の前記伝搬槽と接する面までの距離を、(λ×n)/2とすることを特徴とする請求項1又は請求項2に記載の超音波洗浄方法。   When the wavelength of the ultrasonic wave in the propagation liquid is λ and the natural number is n, the distance from the surface of the cleaning tank in contact with the propagation tank to the surface of the ultrasonic transducer in contact with the propagation tank is (λ The ultrasonic cleaning method according to claim 1 or 2, wherein xn) / 2. 前記伝搬液を脱気水とすることを特徴とする請求項1乃至請求項3のいずれか1項に記載の超音波洗浄方法。   The ultrasonic cleaning method according to any one of claims 1 to 3, wherein the propagation liquid is degassed water. 前記洗浄槽及び前記伝搬槽の材質として、ステンレス又は石英を用いることを特徴とする請求項1乃至請求項4のいずれか1項に記載の超音波洗浄方法。   The ultrasonic cleaning method according to any one of claims 1 to 4, wherein stainless steel or quartz is used as a material of the cleaning tank and the propagation tank. 前記超音波の発振周波数を20kHz〜2MHzとすることを特徴とする請求項1乃至請求項5のいずれか1項に記載の超音波洗浄方法。   The ultrasonic cleaning method according to claim 1, wherein an oscillation frequency of the ultrasonic wave is 20 kHz to 2 MHz. 超音波を発振する超音波振動子と、被洗浄物を浸漬させる洗浄液を保持する洗浄槽と、前記超音波振動子から発振される超音波を前記洗浄液に伝搬させるための伝搬液を保持する伝搬槽とを具備し、前記超音波振動子は前記伝搬槽に取り付けられたものである超音波洗浄装置であって、
前記伝搬槽は前記伝搬液が封入されたものであり、前記伝搬槽は前記洗浄槽に脱着自在に取り付けられたものであることを特徴とする超音波洗浄装置。
An ultrasonic vibrator that oscillates an ultrasonic wave, a cleaning tank that holds a cleaning liquid in which an object to be cleaned is immersed, and a propagation that holds a propagation liquid for propagating ultrasonic waves oscillated from the ultrasonic vibrator to the cleaning liquid A tank, and the ultrasonic transducer is an ultrasonic cleaning device attached to the propagation tank,
The ultrasonic cleaning apparatus, wherein the propagation tank is filled with the propagation liquid, and the propagation tank is detachably attached to the cleaning tank.
前記伝搬液は、酸化剤を添加されたものであることを特徴とする請求項7に記載の超音波洗浄装置。   The ultrasonic cleaning apparatus according to claim 7, wherein the propagation liquid is added with an oxidizing agent. 前記伝搬液中の前記超音波の波長をλ、自然数をnとしたとき、前記洗浄槽の前記伝搬槽と接する面から前記超音波振動子の前記伝搬槽と接する面までの距離が、(λ×n)/2となるものであることを特徴とする請求項7又は請求項8に記載の超音波洗浄装置。   When the wavelength of the ultrasonic wave in the propagation liquid is λ and the natural number is n, the distance from the surface of the cleaning tank in contact with the propagation tank to the surface of the ultrasonic transducer in contact with the propagation tank is (λ The ultrasonic cleaning apparatus according to claim 7 or 8, wherein xn) / 2. 前記伝搬液が脱気水であることを特徴とする請求項7乃至請求項9のいずれか1項に記載の超音波洗浄装置。   The ultrasonic cleaning apparatus according to claim 7, wherein the propagation liquid is deaerated water. 前記洗浄槽及び前記伝搬槽の材質は、ステンレス又は石英から成るものであることを特徴とする請求項7乃至請求項10のいずれか1項に記載の超音波洗浄装置。   The ultrasonic cleaning apparatus according to any one of claims 7 to 10, wherein a material of the cleaning tank and the propagation tank is made of stainless steel or quartz. 前記超音波の発振周波数は20kHz〜2MHzであることを特徴とする請求項7乃至請求項11のいずれか1項に記載の超音波洗浄装置。   The ultrasonic cleaning apparatus according to claim 7, wherein an oscillation frequency of the ultrasonic wave is 20 kHz to 2 MHz.
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