JP6161926B2 - Reaction method and reaction apparatus - Google Patents

Description

  The present invention relates to a reaction method and a reaction apparatus in which a plurality of kinds of gases are brought into contact with each other for reaction.

Hydrogen selenide is a useful compound used, for example, as a raw material for CIGS (Copper Indium Gallium Selenide) type solar cells.
Several methods for producing hydrogen selenide are known. For example, Patent Document 1 discloses a method of synthesizing hydrogen selenide by contacting metal selenium and hydrogen gas at a temperature of 400 to 700 ° C. .

  Patent Document 2 discloses a hydrogen selenide production apparatus for producing hydrogen selenide by reacting metal selenium and hydrogen gas at a temperature of 400 to 700 ° C. The hydrogen selenide production apparatus disclosed in Patent Document 2 collects and vaporizes unreacted metal selenium contained in the reaction gas extracted from the reaction furnace, and entrains it with hydrogen gas so that it can be reintroduced into the reaction furnace. It has become. Therefore, metal selenium can be effectively used as a raw material.

In addition, the hydrogen selenide production apparatus disclosed in Patent Document 2 collects hydrogen selenide from the reaction gas containing the generated hydrogen selenide, and uses the reaction gas after collecting the hydrogen selenide as a hydrogen input path. It can be returned and reintroduced into the reactor. Therefore, hydrogen gas in the reaction gas can be effectively used as a raw material.
Thus, since the hydrogen selenide manufacturing apparatus disclosed in Patent Document 2 can effectively use metal selenium and hydrogen gas, the yield of hydrogen selenide can be improved.

JP 2007-246342 A JP 2012-153583 A

However, since metal selenium has only a small equilibrium vapor pressure at the above temperature, the amount of selenium vapor supplied to the gas phase (reaction system) is small. Therefore, in the technologies disclosed in Patent Documents 1 and 2, the amount of hydrogen selenide produced per unit time is low, and it is not easy to perform industrial production on a large scale.
Further, the method for producing hydrogen selenide disclosed in Patent Document 1 has a problem that a large amount of hydrogen gas is required because most of the hydrogen gas charged into the reactor is discharged from the reactor without being reacted. It was. Furthermore, there is a problem that the yield of hydrogen selenide based on the amount of hydrogen gas used is low.

  Furthermore, since the hydrogen selenide production apparatus disclosed in Patent Document 2 circulates unreacted metal selenium and hydrogen gas, it is possible to improve the yield of hydrogen selenide based on the amount of hydrogen gas used. However, there is a problem that the concentration of hydrogen selenide in the reaction gas is low because it does not improve the contact efficiency between metal selenium and hydrogen gas in the reaction furnace. In particular, when the apparatus was large, there was a strong tendency for the concentration of hydrogen selenide to be low. Furthermore, since a large amount of hydrogen gas is accompanied when unreacted metal selenium is collected and reintroduced into the reaction furnace, a large amount of hydrogen gas needs to be recovered.

  Therefore, the present invention solves the problems of the prior art as described above, and it is not necessary to use a large amount of the gas as a raw material when producing a target compound by reacting plural kinds of gases. It is an object of the present invention to provide a reaction method and a reaction apparatus in which the amount of compound produced per unit time is high.

  In order to solve the above-described problems, an aspect of the present invention has the following configuration. That is, the reaction method according to one embodiment of the present invention is a reaction method in which a plurality of types of gases are supplied to a reaction vessel and these gases react with each other, and some types of gases among the plurality of types of gases are reacted. While supplying from the gas supply unit into the reaction vessel, the remaining types of gases among the plurality of types of gas are injected into the reaction vessel from the injection port, and the partial types of gases and the types of the remaining units are injected. When reacting with a gas, the gas supply unit heats the liquid or solid source material that is a generation source of the some types of gas to vaporize the source material and supply it to the reaction vessel. In addition, the injection port is arranged inside a tubular member installed in the reaction vessel and having openings at both ends, and the remaining type of gas is directed from the injection port toward one end side of the tubular member. To this jet The gas in the reaction vessel, characterized in that to form a gas flow channel flowing from one side of the opening and into the interior of the tubular member from the opening of the other end of the tubular member Ri.

In this reaction method, the injection port may be arranged on the axially inner side of the tubular member with respect to the opening on one end side of the tubular member. Moreover, you may distribute | arrange the said injection port to the radial direction center part of the said tubular member.
Furthermore, in this reaction method, the raw material may be disposed inside the reaction vessel and vaporized in the reaction vessel, or the raw material may be disposed at the bottom inside the reaction vessel, While vaporizing in the reaction vessel, the remaining kind of gas may be injected from the injection port toward the source material.
Further, this reaction method may be a reaction method in which two kinds of gases are reacted, and the partial kind of gas may be selenium and the remaining kind of gas may be hydrogen gas.

  Moreover, the reaction apparatus according to another aspect of the present invention is a reaction apparatus for reacting a plurality of types of gases, wherein the plurality of types of gases are supplied and reaction between these gases is performed, and the plurality of types A gas supply unit for supplying some types of gases into the reaction vessel, an injection port for injecting the remaining types of gases among the plurality of gases into the reaction vessel, and the reaction vessel A tubular member installed inside and having openings at both ends, and the injection port is disposed inside the tubular member, and the remaining type of gas is directed toward one end of the tubular member. A gas flow path in which the gas in the reaction vessel flows into the tubular member from the opening on the other end side of the tubular member and flows out from the opening on the one end side by this injection. It is characterized by being formed .

In this reaction apparatus, the injection port may be arranged on the axially inner side of the tubular member with respect to the opening on one end side of the tubular member. Moreover, you may distribute | arrange the said injection port to the radial direction center part of the said tubular member.
Further, in this reaction apparatus, the injection port may be provided at the tip of an inner tube that is inserted into the tubular member and supplies the remaining type of gas into the reaction vessel.

Further, in this reaction apparatus, the gas supply unit heats the raw material storage unit that stores a raw material storage unit that stores a liquid or solid source material that is a generation source of the some types of gas. A heating unit that vaporizes the raw material.
Furthermore, in this reaction apparatus, the raw material container may be provided inside the reaction container, or the raw material container may be provided at the bottom inside the reaction container, and the tubular member However, the opening part of the one end side may be installed toward the said raw material accommodating part.
Further, this reaction apparatus may be a reaction apparatus for reacting two kinds of gases, and the partial kind of gas may be selenium and the remaining kind of gas may be hydrogen gas.

  In the reaction method and the reaction apparatus according to the present invention, when a target compound is produced by reacting plural kinds of gases, it is not necessary to use a large amount of the gas as a raw material, and the production amount of the target compound per unit time is reduced. high.

It is a figure explaining one Embodiment of the reaction method and reaction apparatus which concern on this invention. It is a figure explaining the modification of embodiment of FIG. It is a figure explaining the reaction method and reaction apparatus which concern on a comparative example.

  Embodiments of a reaction method and a reaction apparatus according to the present invention will be described in detail with reference to the drawings. In each figure, the flow of gas such as hydrogen gas is indicated by arrows. The present invention relates to a reaction method and a reaction apparatus for producing a target compound by reacting plural kinds of gases. In this embodiment, two kinds of gases, selenium and hydrogen gas, are reacted. The present invention will be described by taking the case of producing hydrogen selenide as an example.

  1 includes a reaction vessel 1 in which a reaction between gaseous selenium and hydrogen gas is performed, an inner tube 2 that supplies hydrogen gas into the reaction vessel 1, an inner tube 2 that surrounds the inner tube 2, An outer tube 3 (corresponding to a tubular member which is a constituent element of the present invention) installed coaxially, a discharge port 4 for discharging the gas in the reaction vessel 1 to the outside, and a heater 5 for heating the reaction vessel 1 (this Corresponding to a heating part which is a constituent element of the invention.

  In addition, a raw material container 6 for containing selenium 10 as a raw material is provided at the bottom inside the reaction vessel 1. Selenium to be introduced into the reaction vessel 1 may be liquid (molten state) or solid (powder or lump), but the selenium 10 contained in the raw material container 6 is the heater 5. It is maintained in a liquid state by being heated at. And since the liquid selenium 10 accommodated in the raw material container 6 is vaporized (evaporated) to generate selenium vapor and rises from the bottom of the reaction vessel 1, the selenium vapor is vaporized in the reaction vessel 1 (reaction). System). That is, the raw material accommodating part 6 and the heater 5 constitute a part or all of the gas supply part which is a constituent requirement of the present invention.

  As shown in FIG. 1, the heater 5 can heat the lower part of the reaction vessel 1 from a substantially middle part in the vertical direction. Therefore, the heater 5 heats the raw material container 6 provided at the bottom of the reaction vessel 1. In addition to being able to vaporize the selenium 10, the selenium vapor rising from the bottom of the reaction vessel 1 can be heated to maintain the selenium vapor in the reaction vessel 1 in a gaseous state. However, if the selenium 10 can be vaporized and the selenium vapor can be maintained in a gaseous state, the portion heated by the heater 5 is not limited to a portion below the substantially middle portion in the vertical direction of the reaction vessel 1, for example, The bottom of reaction container 1 and its peripheral part may be sufficient, and the whole reaction container 1 may be sufficient.

  The outer tube 3 is a tubular member that is open at both ends, and is entirely accommodated in the reaction vessel 1 in a posture in which the axial direction is vertical. And the opening 3a on the lower end side of the outer tube 3 is opposed to the liquid surface of the liquid selenium 10 accommodated in the raw material accommodating portion 6 with an interval, and the opening 3b on the upper end side is It faces the ceiling surface of the reaction vessel 1 with a gap.

  The inner tube 2 is a tubular member having a smaller diameter than the outer tube 3, and is inserted inside the outer tube 3 in parallel. Since the inner tube 2 and the outer tube 3 are coaxial, the inner tube 2 is arranged at the center in the radial direction of the outer tube 3. However, the inner tube 2 may be disposed in a portion other than the central portion in the radial direction of the outer tube 3. For example, the inner tube 2 may be disposed in a radially outer side portion of the outer tube 3. The inner tube 2 penetrates the wall of the reaction vessel 1 and communicates the inside and the outside of the reaction vessel 1, and the base end thereof is, for example, a hydrogen gas supply source (see FIG. The tip, which is an injection port 2 a for injecting hydrogen gas, is arranged inside the outer tube 3.

  The injection port 2a is arranged on the inner side (that is, the upper side) in the axial direction than the opening 3a on the lower end side of the outer tube 3, and the hydrogen gas is directed toward the opening 3a on the lower end side of the outer tube 3 (that is, in a liquid state). (Toward the selenium 10). The shape and the diameter (inner diameter) of the ejection port 2a are not particularly limited, but the linear velocity of the ejected gas can be improved by reducing the diameter to a nozzle shape.

  Next, a method for producing hydrogen selenide using such a reactor will be described. First, solid metal selenium, which is a generation source of selenium vapor, is charged into the reaction vessel 1 and stored in the raw material storage unit 6. And by heating to 400 degreeC or more and 700 degrees C or less (more preferably 450 degreeC or more and 650 degrees C or less) with the heater 5, selenium is fuse | melted and made into a liquid state. Metal selenium may be charged into the reaction vessel 1 heated to the above temperature, or the reaction vessel 1 may be heated to the above temperature after the metal selenium is charged.

The lower end portion of the outer tube 3 may be in contact with the liquid selenium 10, but in order to effectively generate the negative pressure described later, the liquid selenium 10 is not in contact with the liquid selenium 10. It is preferable that the liquid surface of selenium 10 is separated. Therefore, it is preferable to adjust the amount of metal selenium input so that the lower end portion of the outer tube 3 and the liquid selenium 10 do not contact each other.
Further, when the reaction between selenium and hydrogen gas proceeds and selenium is consumed, the liquid level of liquid selenium 10 is lowered, so that the distance between the injection port 2a and the liquid level of liquid selenium 10 changes. . Therefore, in consideration of the linear velocity of the hydrogen gas injected from the injection port 2a, the distance between the injection port 2a and the liquid level of the liquid selenium 10 is a value suitable for the production of hydrogen selenide. It is preferable to adjust the input amount of metal selenium.

  The liquid selenium 10 stored in the raw material storage unit 6 is vaporized (evaporated) by being held at the above temperature, and the generated selenium vapor rises from the bottom of the reaction vessel 1. To the gas phase (reaction system). Here, when hydrogen gas is injected from the injection port 2a of the inner pipe 2 toward the liquid selenium 10, the hydrogen gas and selenium vapor come into contact with each other to cause a gas phase reaction, thereby generating gaseous hydrogen selenide. Since the hydrogen gas injected toward the selenium 10 collides with the liquid surface of the selenium 10 and becomes an ascending current, the generated hydrogen selenide is accompanied by the ascending gas and rises inside the reaction vessel 1.

The injection of hydrogen gas from the injection port 2a may be performed before the temperature of the reaction vessel 1 is increased or before the selenium is melted, or when the temperature of the reaction vessel 1 reaches a predetermined temperature and selenium. Alternatively, the reaction may be performed after reaching a temperature at which the hydrogen gas can react.
Moreover, although the linear velocity of the injected hydrogen gas varies greatly depending on the temperature, it is preferably 20 m / s or more, for example, in the range of 400 ° C. or more and 700 ° C. or less.

At this time, the hydrogen gas injected from the injection port 2 a flows downward in the outer tube 3, whereby an ejector effect is developed and a negative pressure is generated in the outer tube 3. The magnitude of the negative pressure depends on the linear velocity of the injected hydrogen gas and the ratio between the inner diameter of the reaction vessel 1 and the inner diameter of the outer tube 3.
The ratio of the inner diameter of the reaction vessel 1 to the inner diameter of the outer tube 3 ([the inner diameter of the outer tube 3] / [the inner diameter of the reaction vessel 1]) is preferably 0.6 or less.
Moreover, the position of the injection port 2a should just be between the upper end of the outer tube | pipe 3, and a lower end, and is not specifically limited.

  Due to this negative pressure, the gas in the reaction vessel 1 (the gas outside the outer tube 3) passes through the opening 3 b on the upper end side of the outer tube 3 (the opening on the upstream side of the airflow flowing inside the outer tube 3) from the outer tube 3. A gas flow path is formed which flows into the inside and flows out from the opening 3a on the lower end side (opening on the downstream side of the airflow flowing inside the outer tube 3). This gas flow path is a downward air flow in the same direction as the flow of hydrogen gas injected from the injection port 2a. Then, the gas descending in the outer tube 3 along the gas flow path merges with the hydrogen gas ejected from the ejection port 2 a and is ejected toward the liquid surface of the liquid selenium 10.

  The gas injected downward (the hydrogen gas injected from the injection port 2a and the gas descending the outer tube 3 merged, hereinafter referred to as “combined gas”) is a liquid of selenium 10. Since it collides with the surface and becomes an updraft, the generated hydrogen selenide is accompanied by the combined gas and rises inside the reaction vessel 1. Since the heater 5 is not adapted to heat the upper part of the reaction vessel 1 above the substantially middle part in the vertical direction, the rising combined gas is cooled at the upper part of the reaction vessel 1.

  Then, a part of the cooled combined gas is discharged to the outside of the reaction vessel 1 from the discharge port 4 provided at the upper portion of the reaction vessel 1, and the other portion is on the upper end side of the outer tube 3 along the gas flow path. Flows into the outer tube 3 from the opening 3b. The merged gas that has flowed into the outer tube 3 descends in the outer tube 3 and merges again with the hydrogen gas injected from the injection port 2a, so that the combined gas circulates in the reaction vessel 1. .

  This combined gas contains unreacted selenium, but a part of the unreacted selenium is again taken into the outer tube 3 while being kept at a high temperature, and the hydrogen gas injected from the injection port 2a and Combined and used for reaction with hydrogen gas. In addition, since the merging gas circulation as described above may be repeated a plurality of times, the opportunity for selenium to contact and react with the hydrogen gas increases. As a result, the amount of hydrogen selenide produced per unit time is increased. Also, the yield of hydrogen selenide is increased. Furthermore, since hydrogen gas is circulated and repeatedly used for the reaction, the amount of hydrogen gas used can be reduced, and a large amount of hydrogen gas is used as in the techniques disclosed in Patent Documents 1 and 2. There is no need. Therefore, the recovery of hydrogen gas is easy. Therefore, the reaction method and reaction apparatus of this embodiment are suitable for industrial production of hydrogen selenide on a large scale.

  When a reaction apparatus not equipped with an outer tube as shown in FIG. 3 is used, the hydrogen gas injected from the injection port 102a of the inner tube 102 rises inside the reaction vessel 101 with hydrogen selenide. Since the gas flow path is not formed, the circulation does not occur, and most of the hydrogen gas is discharged from the discharge port 104 to the outside of the reaction vessel 101. Therefore, since there is little opportunity for selenium to come into contact with hydrogen gas, the amount of hydrogen selenide produced per unit time is low, the yield of hydrogen selenide is low, and the amount of hydrogen gas used is also large. In FIG. 3, reference numeral 105 denotes a heater, reference numeral 106 denotes a raw material container, and reference numeral 110 denotes liquid selenium.

  The combined gas discharged from the discharge port 4 is sent to a separation device (not shown) through a discharge pipe 7 connected to the discharge port 4 of the reaction vessel 1. The discharged gas is mainly composed of unreacted hydrogen gas and hydrogen selenide, which is a reaction product. However, when it is cooled with liquid nitrogen at −196 ° C., for example, the hydrogen selenide is solidified in the separation device. can do. If the solidified hydrogen selenide is heated again, highly pure hydrogen selenide can be obtained. The gas discharged from the outlet 4 may be accompanied by unreacted selenium. The unreacted selenium may be separated using, for example, a difference in solidification temperature from hydrogen selenide. Can do.

Such a reaction method and reaction apparatus of this embodiment are suitable for the production of hydrogen selenide used as a raw material for CIGS type solar cells, for example. Moreover, it is suitable also for manufacture of hydrogen selenide as a raw material when manufacturing zinc selenide (ZnSe) which is a semiconductor material.
In addition, this embodiment shows an example of this invention and this invention is not limited to this embodiment. For example, in this embodiment, selenium vapor is obtained by vaporizing selenium inside the reaction vessel 1 and the selenium vapor is supplied to the reaction system, but selenium is vaporized outside the reaction vessel 1 or the like. Selenium vapor may be produced, and the selenium vapor may be supplied to the inside of the reaction vessel 1 by piping or the like.

  Moreover, it is preferable to install the inner tube 2 and the outer tube 3 in a posture in which the axial direction is vertical, and the injection port 2a of the inner tube 2 is directed downward. The inner tube 2 and the outer tube 3 may be installed so that the mouth 2a faces (that is, the inner tube 2 and the outer tube 3 are installed in a posture in which the axial direction is horizontal), and in the direction of 180 °. The inner tube 2 and the outer tube 3 may be installed so that the injection port 2a faces (that is, the inner tube 2 and the outer tube 3 are installed in a posture in which the axial direction is vertical, and the inner tube 2 The inner tube 2 and the outer tube 3 may be installed so that the injection port 2a faces in an arbitrary angle direction.

The reaction to which the reaction method and the reaction apparatus of the present embodiment can be applied is not limited to the reaction for obtaining hydrogen selenide from selenium and hydrogen gas, but can be applied to various reactions in which gases are reacted with each other. . For example, it is applicable to a reaction for obtaining hydrogen sulfide from sulfur and hydrogen gas.
Furthermore, in this embodiment, although the example which makes 2 types of gas react was demonstrated, of course, this invention is applicable also when making 3 or more types of gas react. In that case, two or more types of gas may be injected from the injection port 2a and one type of gas may be supplied by vaporization in the raw material container 6, or conversely, one type of gas may be injected from the injection port 2a. However, two or more gases may be supplied by vaporization in the raw material container 6. Further, two or more kinds of gases may be injected from the injection port 2 a and two or more kinds of gases may be supplied by vaporization in the raw material storage unit 6.

When two or more kinds of gases are injected from the injection port 2a, the same number of inner tubes 2 and outer tubes 3 as the types of the gases may be provided, and each gas may be injected from another injection port 2a. When two or more kinds of gases are supplied by vaporization in the raw material storage unit 6, the same number of raw material storage units 6 as the types of the gases may be provided, and each vaporization may be performed in another raw material storage unit 6.
Further, in the present embodiment, the liquid raw material is heated and evaporated in the raw material storage unit 6 to obtain vapor, but if the material has sublimation properties, the solid raw material in the raw material storage unit 6 Steam may be obtained by heating and sublimation.

  Furthermore, in this embodiment, the upper end of the outer tube 3 is open, and the gas in the reaction vessel 1 flows into the outer tube 3 from the opening 3b due to the generation of negative pressure. 2, the upper end of the outer tube 3 is closed, and an opening 3 b that communicates the inside and the outside of the outer tube 3 may be provided on the side surface portion of the upper end. When negative pressure is generated, the gas in the reaction vessel 1 flows into the outer tube 3 from the opening 3b in the side surface portion.

As shown in FIG. 2, the opening 3 b in the side surface portion may be formed by connecting a cylindrical portion 31 protruding radially outward to the side surface portion, or communicates the inside and the outside of the outer tube 3. You may form by providing a through-hole in a side part. The number of the cylindrical portions 31 and the through holes may be one or plural.
Thus, the opening 3b for the gas in the reaction vessel 1 to flow into the outer tube 3 when negative pressure is generated is not particularly limited in shape, position, etc. As long as it does not adversely affect the generated negative pressure, the total area of the openings 3b is preferably equal to or larger than the inner area in the radial direction of the outer tube 3.

Furthermore, the cross-sectional shape (cross-sectional shape when cut along a plane orthogonal to the axial direction) of the inner tube 2 and the outer tube 3 is not particularly limited, and for example, a circle, an ellipse, a polygon (triangle, square, etc.) Can give. However, the inner tube 2 and the outer tube 3 preferably have the same cross-sectional shape.
Furthermore, the pressure in the reaction container 1 at the time of reaction is not specifically limited, For example, it can also be set to atmospheric pressure and can also be set as a slight pressurization.
Furthermore, the material of the reaction vessel 1, the inner tube 2, and the outer tube 3 is preferably one that is resistant to corrosion by selenium and has heat resistance. For example, stainless steel, titanium, tantalum, ceramic, and glass are suitable.

Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples.
Example 1
Hydrogen selenide was manufactured by the reaction method similar to the said embodiment using the reaction apparatus which has the structure similar to the reaction apparatus (reaction apparatus of FIG. 1) of the said embodiment. The internal volume of this reactor is 1.4L.

  After storing 250 g of solid selenium in the raw material container in the reaction vessel and injecting hydrogen gas at a flow rate of 986 SCCM (standard cc / min) from the injection port, the selenium was heated to 550 ° C. to be vaporized, and hydrogen Reacted with gas. And the gas discharged | emitted from a discharge port was analyzed by FT-IR (Fourier Transform Infrared Spectroscopy), and the generation amount of hydrogen selenide was measured. As a result, the amount of hydrogen selenide generated was 15.6 mmol / min.

(Comparative Example 1)
Hydrogen selenide was produced using the same reaction apparatus as that used in Example 1 (reaction apparatus in FIG. 3) except that the outer tube was not provided.
After storing 250 g of solid selenium in the raw material container in the reaction vessel and injecting hydrogen gas at a flow rate of 986 SCCM (standard cc / min) from the injection port, the selenium was heated to 550 ° C. to be vaporized, and hydrogen Reacted with gas. And the gas discharged | emitted from a discharge port was analyzed by FT-IR, and the generation amount of hydrogen selenide was measured. As a result, the amount of hydrogen selenide generated was 10.9 mmol / min.
In addition, the FT-IR analyzer used for the measurement in Example 1 and Comparative Example 1 is Nicolet-380 manufactured by Thermo Fisher Scientific, and the cell is a gas cell (length: 10 cm).

DESCRIPTION OF SYMBOLS 1 Reaction container 2 Inner pipe | tube 2a Injection port 3 Outer pipe | tube 3a Opening of lower end side 3b Opening of upper end side 5 Heater 6 Raw material accommodating part 10 Selenium

Claims (12)

A reaction method of supplying a plurality of gases to a reaction vessel and reacting these gases with each other,
While supplying some types of gases among the plurality of types of gases from the gas supply unit into the reaction vessel, the remaining types of gases among the plurality of types of gases are injected into the reaction vessel from the injection port. , When reacting the partial type of gas and the residual type of gas,
The gas supply unit heats the liquid or solid source material serving as a generation source of the some types of gas to vaporize the source material and supply the material into the reaction vessel, and the injection port. Arranged inside the tubular member installed in the reaction vessel and having openings at both ends, the remaining kind of gas is jetted from the jet port toward one end side of the tubular member, and by the jetting, Forming a gas flow path in which the gas in the reaction vessel flows into the tubular member from the opening on the other end side of the tubular member and flows out from the opening on the one end side ;
The reaction method according to claim 1, wherein the partial type of gas is selenium and the remaining type of gas is hydrogen gas .   The reaction method according to claim 1, wherein the injection port is arranged on an inner side in the axial direction of the tubular member than an opening on one end side of the tubular member.   The reaction method according to claim 1, wherein the injection port is disposed at a central portion in a radial direction of the tubular member.   The reaction method according to claim 1, wherein the raw material is disposed inside the reaction vessel and vaporized in the reaction vessel.   The raw material is disposed at the bottom inside the reaction vessel, vaporized in the reaction vessel, and the remaining type of gas is injected from the injection port toward the raw material. 4. The reaction method according to 4. A reaction device for reacting a plurality of gases,
A reaction vessel in which the plurality of types of gases are supplied and a reaction between the gases is performed; a gas supply unit that supplies some of the plurality of types of gases into the reaction vessel; and the plurality of types An injection port for injecting the remaining type of gas into the reaction vessel, and a tubular member installed in the reaction vessel and having openings at both ends,
The injection port is arranged inside the tubular member, and injects the remaining type of gas toward one end side of the tubular member, and the gas in the reaction vessel is injected by this injection. A gas flow path is formed which flows into the tubular member from the opening on the other end side of the tubular member and flows out from the opening on the one end side ;
The reaction apparatus characterized in that the partial type of gas is selenium and the remaining type of gas is hydrogen gas . The reaction apparatus according to claim 6 , wherein the injection port is arranged on an inner side in the axial direction of the tubular member than an opening on one end side of the tubular member. The reaction apparatus according to claim 6 or 7 , wherein the injection port is arranged at a central portion in a radial direction of the tubular member. The said injection port is provided in the front-end | tip of the inner tube which is penetrated by the said tubular member and supplies the said remaining kind of gas in the said reaction container. A reactor according to 1. The gas supply unit includes a raw material storage unit that stores a liquid or solid source material serving as a generation source of the partial types of gas, and a heating unit that heats the raw material storage unit to vaporize the source material. And the reaction apparatus according to any one of claims 6 to 9 . The reaction apparatus according to claim 10 , wherein the raw material container is provided in the reaction vessel. The raw material accommodating portion is provided on the bottom of the interior of the reaction vessel, according to claim 11, wherein the tubular member is disposed toward an opening at one end to said material accommodating portion Reactor.

Images