JP6155777B2 - Actuator device - Google Patents

Description

  The present invention relates to an actuator device that drives a driven part using an actuator. In particular, the present invention relates to an actuator device including a contractible wire made of a shape memory alloy (SMA) or the like.

  As an actuator device used for a vibrator or the like mounted on an electronic device such as a cellular phone, an actuator device made of SMA or the like and using a contractible wire as a power source is known (see, for example, Patent Documents 1 to 3). In general, a wire made of SMA has a property of contracting from a predetermined length by generating heat by energization or the like and returning to a predetermined length by cooling. Such an actuator device using a retractable wire as a power source is smaller than a conventional actuator device using a vibration motor or the like as a power source, and also has high responsiveness.

  Here, a first conventional example of an actuator device with reference to Patent Document 1 will be described. FIG. 13 is a perspective view of an actuator device 1P according to the first conventional example.

  The actuator device 1P includes a wire-shaped shape memory alloy 2P, an elastic member 3P, a movable portion 4P, and a fixed portion 5P. The elastic member 3P is a leaf spring extending in a direction perpendicular to the height direction of the actuator device 1P, and has flexibility in the height direction of the actuator device 1P. The movable part 4P is connected to the fixed part 5P via the elastic member 3P in a state where it can move in the height direction of the actuator device 1P. The shape memory alloy 2P is stretched between the movable portion 4P and the fixed portion 5P so as to form an angle (for example, 60 °) with respect to the elastic member 3P. The shape memory alloy 2P and the elastic member 3P constitute an actuator that moves the movable portion 4P, which is a driven portion, along the height direction of the actuator device 1P.

  In the actuator device 1P, when the shape memory alloy 2P is energized to generate heat and contract from a predetermined length by a predetermined contraction amount, the movable part 4P moves so as to approach the fixed part 5P. Thereafter, when the shape memory alloy 2P is cooled and returned to a predetermined length, the movable portion 4P moves away from the fixed portion 5P and returns to the original position.

  Next, a second conventional example of an actuator device with reference to Patent Document 2 will be described. FIG. 14A is a side view of the actuator device 1Q according to the second conventional example. FIG. 14B is a plan view of the actuator device 1Q according to the second conventional example.

  The actuator device 1Q includes an SMA wire 2Q, a lever member 3Q, a lens unit 4Q, a bias spring 6Q, a base member 5Q, a parallel plate spring 7Q, a support leg 8Q, a support portion 9Q, and an electrode fixing portion 10Q. And. The SMA wire 2Q and the lever member 3Q constitute an actuator that moves the lens unit 4Q, which is a driven portion, along the height direction of the actuator device 1Q.

  Specifically, the base member 5Q is a plate-like member having a main surface perpendicular to the height direction of the actuator device 1Q. Support leg 8Q and electrode fixing portion 10Q are fixed to the main surface of base member 5Q. The lens unit 4Q is attached to the base member 5Q via a parallel leaf spring 7Q, and is movable along the height direction of the actuator device 1Q. The support portion 9Q protrudes from the outer peripheral edge portion at the objective end of the lens unit 4Q. The bias spring 6Q pushes the lens unit 4Q down to the base member 5Q side. The lever member 3Q is L-shaped when viewed from the side, and has a displacement input portion 31Q and a displacement output portion 32Q. The displacement output portion 32Q has an arc shape in plan view, and extends along the outer periphery of the lens unit 4Q in a plane perpendicular to the height direction of the actuator device 1Q. The displacement input portion 31Q is connected to the center of the arc of the displacement output portion 32Q and extends toward the base member 5Q. Both ends of the SMA wire 2Q are fixed to the two electrode fixing portions 10Q in a state where they are stretched over the displacement input portion 31Q.

  The lever member 3Q is swingably attached to the tip of the support leg 8Q with a portion where the displacement input portion 31Q and the displacement output portion 32Q are coupled as a fulcrum when viewed from the side. The lever member 3Q has a pair of support portions 9Q in contact with the side surface of the displacement output portion 32Q, and the SMA wire 2Q is connected to the side surface of the displacement input portion 31Q. Therefore, the lever member 3Q functions as a lever having a connection point with the support leg 8Q as a fulcrum, a connection point with the support portion 9Q as an action point, and a connection point with the SMA wire 2Q as a power point.

  In the actuator device 1Q, the SMA wire 2Q is energized to generate heat and contract from a predetermined length by a predetermined contraction amount. Then, the lever member 3Q swings counterclockwise, and the lens unit 4Q is moved away from the base member 5Q. Thereafter, when the SMA wire 2Q is cooled and returned to a predetermined length, the lever member 3Q swings clockwise and moves the lens unit 4Q so as to approach the base member 5Q.

  Next, a third conventional example of an actuator device with reference to Patent Document 3 will be described. FIG. 15A is a cross-sectional view of an actuator device 1R according to a third conventional example. FIG. 15B is a perspective view of an actuator device 1R according to a third conventional example.

  The actuator device 1R includes a wire-like SMA member 2R, a lever mechanism 3R, a driven member 4R, a pressurizing member 6R, a base 5R, a bearing 7R, a sliding shaft 8R, and a protrusion 9R. ing. The SMA member 2R and the lever mechanism 3R constitute an actuator that moves the driven member 4R, which is a driven portion, along the height direction of the actuator device 1R.

  The driven member 4R is composed of an optical element having a light receiving surface perpendicular to the height direction of the actuator device 1R. The base 5R has a surface substantially parallel to the light receiving surface of the driven member 4R. The sliding shaft 8R extends perpendicularly to the light receiving surface of the driven member 4R and is fixed to the base 5R. The bearing 7R is a cylindrical member fixed to the side surface of the driven member 4R, and a sliding shaft 8R is inserted therein. The bearing 7R and the sliding shaft 8R are slidable. Thereby, the driven member 4R is movable in the height direction of the actuator device 1R. The pressurizing member 6R pushes up the driven member 4R in the direction opposite to the base 5R.

  The lever mechanism 3R is an I-shaped member standing from the base 5R, and faces the side surface of the driven member 4R. The SMA member 2R is stretched between the base 5R and the lever mechanism 3R. The protrusion 9R protrudes from the side surface of the driven member 4R and faces the lever mechanism 3R. The lever mechanism 3R is swingably attached to the base 5R with one end fixed to the base 5R as a fulcrum. The lever mechanism 3R is in contact with the protrusion 9R with the side surface near the tip as the action point, and is connected to the SMA member 2R with the center of the side surface as the power point.

  In the actuator device 1R, when the SMA member 2R is energized, it generates heat and shrinks from a predetermined length by a predetermined contraction amount. Then, the lever mechanism 3R swings clockwise to move the driven member 4R so as to approach the base 5R. On the other hand, when the SMA member 2R is cooled and returned to a predetermined length, the lever mechanism 3R swings counterclockwise to move the driven member 4R away from the base 5R.

JP 2002-130114 A JP 2012-227998 A JP 2009-041545 A

  In an actuator device that uses a contractible wire made of SMA or the like as a power source, the driven portion can be vibrated by periodically driving the wire. Usually, in order to increase the vibration amplitude of the driven part when the driven part is vibrated, is the increase rate of the vibration amplitude of the driven part with respect to the contraction amount of the wire (hereinafter referred to as vibration expansion rate) increased? It is necessary to increase the contraction amount of the wire itself. However, in the conventional actuator device, in order to increase the vibration expansion rate or increase the contraction amount of the wire itself, it is inevitable to increase the size of the actuator device.

  For example, in the case of an actuator device in which a wire is directly connected to a driven part as shown in the first conventional example, in order to increase the vibration amplitude of the driven part, the total length of the wire is increased. It is necessary to increase the amount of shrinkage. In addition, in order to vibrate the driven part in a stable posture, it is necessary to arrange two wires so as to face each other with the driven part interposed therebetween. These are factors that increase the size of the actuator device when the vibration amplitude of the driven part is increased.

  Further, in the actuator device using the L-shaped lever as shown in the second conventional example, in order to increase the vibration amplitude of the driven portion, the distance from the fulcrum to the power point and the distance to the action point in the lever It is necessary to increase the vibration magnification ratio by increasing the ratio. In addition, in an actuator device using an L-shaped lever, friction is generated at the lever fulcrum (rotating shaft), and a part of vibration energy generated in the wire is consumed, so that the amount of contraction of the wire is reduced. For this reason, in order to increase the vibration amplitude of the driven part, it is necessary to lengthen the entire length of the wire and increase the contraction amount of the wire. Furthermore, in an actuator device using an L-shaped lever, a space for arranging a spring member for returning the lever position and a support member for swingably supporting the lever is required. These are factors that increase the size of the actuator device when the vibration amplitude of the driven part is increased.

  Further, in the actuator device using the I-shaped lever as shown in the third conventional example, in order to increase the vibration amplitude of the driven portion, the distance from the fulcrum to the force point and the distance to the action point in the lever Therefore, it is necessary to increase the vibration expansion ratio by increasing the ratio. In addition, in the actuator device using the I-shaped lever, friction is generated at the action point between the lever and the driven portion, so that a part of the vibration energy generated in the wire is consumed and the contraction amount of the wire is reduced. End up. For this reason, in order to increase the vibration amplitude of the driven part, it is necessary to lengthen the entire length of the wire and increase the contraction amount of the wire. These are factors that increase the size of the actuator device when the vibration amplitude of the driven part is increased.

  In the case of an actuator device using an I-shaped lever, it is possible to prevent the actuator device from increasing in size in the height direction if the tip of the lever is greatly inclined from the height direction of the actuator device. However, in that case, the angle formed between the lever and the wire becomes small, so that wear of the wire due to friction between the lever and the wire is more likely to occur, and the life of the wire is shortened. Further, when the wire is soldered to the lever or when the wire is passed over the lever, the position where the wire is connected to the lever is likely to be shifted when the angle between the lever and the wire is reduced. Then, since vibration energy generated in the wire is difficult to be transmitted to the driven part via the lever, the amount of contraction of the wire does not increase so much and the vibration amplitude of the driven part varies from product to product. In addition, if the wire is stretched in an oblique direction with respect to the long side of the lever, the bonding strength for bonding the wire to the lever may be weakened. If the wire is stretched in the vertical direction with respect to the long side of the lever, the bonding strength is unlikely to weaken, but in that case, the tip of the I-shaped lever cannot be greatly tilted from the height direction, The actuator device becomes large in the height direction.

  Accordingly, an object of the present invention is to provide an actuator device that can be reduced in size and can increase the vibration amplitude of a driven portion.

  The actuator device according to the present invention includes an elastic plate, a driven portion, and a wire. The elastic plate has a short side portion extending from the fixed end to the bending point, and a long side portion bending from the short side portion at the bending point and extending to the free end. The driven part is connected to a position on the free end side in the long side part. The wire can contract in the length direction, is passed to the elastic plate, and is stretched along the direction connecting the bending point and the free end.

  In this configuration, the short side portion and the long side portion can be flexibly vibrated by periodically contracting the wire. In the primary mode bending vibration, a vibration amplitude proportional to the reciprocal of the thickness of the elastic plate and proportional to the square of the length is obtained. Therefore, when the bending vibration generated in the short side portion is converted into the bending vibration in the long side portion, the bending vibration is larger than the ratio of the length of the short side portion to the long side portion. Thereby, the driven part can be vibrated at a large vibration magnification. In addition, since the wire extends along the direction connecting the bending point of the elastic plate and the free end, it is not necessary to shorten the entire length of the wire even if the elastic plate is configured to have a low profile. Further, friction with members other than wires does not occur on the elastic plate, and vibration energy is less deteriorated. For this reason, a large contraction amount can be realized in the wire. Therefore, the vibration amplitude of the driven part can be increased while downsizing the actuator device.

  In the elastic plate of the actuator device, the position where the wire is passed is a position closer to the bending point among the fixed end, the bending point, and the free end at the short side or the long side, that is, near the bending point. It is preferable.

  If the wire is passed in the vicinity of the bending point in this manner, it is possible to suppress excitation of higher-order mode bending vibration in the short side portion. Therefore, even if the thickness of the elastic plate is reduced, it is possible to efficiently excite the bending vibration of the first mode, and it is possible to realize a larger vibration expansion ratio by reducing the thickness of the elastic plate.

  In addition, if variation occurs at the position where the wire is passed to the elastic plate, or fluctuations in the amount of contraction of the wire occur due to temperature rise due to driving, the variation and fluctuations are expanded, and the vibration amplitude of the driven part is also increased. Variations and fluctuations increase, and the risk of the driven part colliding with the substrate or the like increases. However, if a wire is passed in the vicinity of the bending point, variations and fluctuation expansion can be suppressed, and the vibration amplitude of the driven part can be further stabilized. As a result, even if the space around the driven part is reduced, the driven part can be prevented from colliding, and the actuator device can be further downsized.

  In the actuator device described above, it is preferable that the wire is made of a shape memory alloy and is stretched between the two ends of the elastic plate, and the elastic plate is provided with a protrusion over which the wire is stretched.

  By placing the wire on the protrusions rather than the entire width of the elastic plate, the friction between the wire and the elastic plate can be reduced, and the amount of contraction of the wire can be reduced and the breakage of the wire can be suppressed. In addition, the angle at which the wire bends by the protrusion can be increased without increasing the size of the actuator device. If the angle at which the wire bends is large, the vibration expansion ratio of the elastic plate becomes larger, so that the actuator device can be further downsized.

  The above actuator device preferably includes an energization control unit that controls energization to the wire, and the energization control unit preferably adjusts the energization period of the wire to an integral multiple of the natural period of the bending vibration of the primary mode in the elastic plate. It is.

  Thereby, the elastic plate can be resonated, and the elastic vibration can be efficiently excited in the elastic plate. In addition, if the energization period is set to more than twice the natural period, the driven part can be vibrated several times during the energization period, and the wire is sufficiently cooled to increase the temperature of the wire and the temperature Thus, fluctuations in the amount of contraction of the wire can be prevented. Thereby, the vibration amplitude of the driven part can be further stabilized, and the actuator device can be further downsized by reducing the space around the driven part.

  In the above actuator device, it is preferable that the protrusion is made of a metal material integral with the elastic plate.

  According to this invention, the wire stretched in the direction connecting the bending point and the free end across the elastic plate is contracted to flexurally vibrate the short side portion and the long side portion of the elastic plate, thereby increasing the vibration magnification ratio. In addition, the amount of contraction of the wire itself can be increased. Thereby, the vibration amplitude of the driven part can be increased while downsizing the actuator device.

It is the top view and side view of an actuator device concerning a 1st embodiment of the present invention. It is the schematic which shows the vibration aspect of the actuator apparatus which concerns on the 1st Embodiment of this invention, and the graph which shows the time series data of the voltage applied to a wire, and a vibration. It is the side view of the actuator apparatus which concerns on the 2nd Embodiment of this invention, a top view, and the schematic diagram which shows the vibration aspect. It is the top view and side view of an actuator device concerning a 3rd embodiment of the present invention. It is the top view and side view of an actuator device concerning a 4th embodiment of the present invention. It is the top view and side view of an actuator device concerning a 5th embodiment of the present invention. It is a side view of an actuator device concerning a 6th embodiment of the present invention. It is a side view of an actuator device concerning a 7th embodiment of the present invention. It is the top view and side view of an actuator device concerning an 8th embodiment of the present invention. It is the top view and side view of an actuator device concerning a 9th embodiment of the present invention. It is the top view and side view of an actuator device concerning a 10th embodiment of the present invention. It is a graph which shows the time series data of the voltage applied to a wire, and a vibration in the actuator apparatus which concerns on the 11th Embodiment of this invention. It is a perspective view of an actuator device concerning the 1st conventional example. It is the side view and top view of an actuator device concerning the 2nd conventional example. It is sectional drawing and a perspective view of an actuator device concerning the 3rd conventional example.

  Hereinafter, the actuator device of the present invention will be described with reference to FIGS. In the following, the normal direction of the main surface of the substrate shown in each figure is defined as the height direction of the actuator device, and the left-right direction of the drawing in each figure is defined as the width direction of the actuator device. The direction orthogonal to the direction is defined as the front-rear direction of the actuator device.

  First, a first embodiment of the present invention will be described. FIG. 1A is a plan view of the actuator device 11 according to the first embodiment of the present invention viewed from the height direction. FIG. 1B is a side view of the actuator device 11 according to the first embodiment of the present invention viewed from the front-rear direction.

  The actuator device 11 includes a wire 12, an elastic plate 13, a driven unit 14, a substrate 15, two electrode terminals 16, and an energization control unit 18.

  The board | substrate 15 is plate shape which is a rectangle which makes the width direction of the actuator apparatus 11 a longitudinal direction in planar view. The substrate 15 includes a first main surface 15A and a second main surface 15B perpendicular to the height direction of the actuator device 11. The first main surface 15A and the second main surface 15B face each other. The substrate 15 includes two external terminals 15C provided on the second main surface 15B. The substrate 15 may be a part of a housing of an electronic device on which the actuator device 11 is mounted.

  The elastic plate 13 has a rectangular shape with the width direction of the actuator device 11 as a longitudinal direction when viewed in plan, and is substantially L-shaped when viewed from the side. One end of the elastic plate 13 as viewed from the side is fixed to the first main surface 15A as a fixed end A. The other end of the elastic plate 13 as viewed from the side is located as the free end B away from the first main surface 15A. Between the both ends of the elastic plate 13, that is, between the fixed end A and the free end B, it is bent at a bending point C.

  The elastic plate 13 includes a short side portion 13A, a long side portion 13B, and a protrusion 13C. The short side portion 13A is a portion from the bending point C to the fixed end A in a side view of the elastic plate 13, and extends in the height direction of the actuator device 11 perpendicular to the first main surface 15A of the substrate 15. ing. The long side portion 13B is a portion from the bending point C to the free end B when the elastic plate 13 is viewed from the side, and extends in the width direction of the actuator device 11 in parallel with the first main surface 15A. The length in the width direction of the actuator device 11 at the long side portion 13B is longer than the length in the height direction of the actuator device 11 at the short side portion 13A. The short side portion 13A and the long side portion 13B are made of a highly springy material such as phosphor bronze and are provided integrally. The protrusion 13C has a height of the actuator device 11 from the long side portion 13B at a position between the free end B and the bending point C and closer to the bending point C than the free end B as viewed from the side in the long side portion 13B. It is provided so as to protrude in the direction opposite to the substrate 15 side. The protrusion 13C is made of a material different from that of the short side portion 13A and the long side portion 13B, and is made of, for example, resin or metal. Further, the protrusion 13C has a side surface that is a curved surface. The protrusion 13C is firmly bonded by a bonding method such as fusion or welding after a part of the protrusion 13C is disposed in the opening provided in the elastic plate 13 in order to support the force acting from the wire 12. Has been.

  The driven portion 14 is located between the free end B and the bending point C and closer to the free end B than the bending point C on the surface of the long side portion 13B facing the first main surface 15A. It is attached. The driven portion 14 is opposed to the first main surface 15A with an interval. The driven portion 14 is preferably made of a material having a high specific gravity such as tungsten in order to increase the vibration amplitude at the free end B of the elastic plate 13. Further, it is desirable that the driven portion 14 and the elastic plate 13 be joined by a joining method in which protrusions such as laser welding are difficult to occur in order to reduce the thickness.

  The wire 12 is contractable in the length direction and serves as a power source for driving the driven portion 14 and is a member constituting an actuator together with the elastic plate 13. The center of the wire 12 is stretched over the protrusion 13C, and both ends are connected to the electrode terminals 16, respectively. For this reason, the wire 12 is stretched in parallel with the long side portion 13B along the direction in which the long side portion 13B extends in a side view when viewed from the side. The wire 12 is made of an insulating-coated shape memory alloy wire, and has a property of contracting from a predetermined length by generating heat when energized or the like and returning to a predetermined length by cooling.

  The two electrode terminals 16 have a columnar shape whose longitudinal direction is the height direction of the actuator device 11 when viewed from the side, and are provided perpendicular to the first main surface 15A. The two electrode terminals 16 are arranged on both sides of the elastic plate 13 in the vicinity of the free end B in plan view. Here, one end of each electrode terminal 16 in the height direction of the actuator device 11 is fitted into a through hole provided in the substrate 15 and provided on the second main surface 15B of the substrate 15. It is electrically connected to the external terminal 15C. The other end portion of each electrode terminal 16 in the height direction of the actuator device 11 is positioned at substantially the same height as the end portion of the protrusion 13C in the height direction of the actuator device 11, and the wire 12 is formed on the top surface portion. The end of each is firmly joined by a joining method such as caulking or welding. For this reason, the two electrode terminals 16 are electrically connected to the wire 12.

  The energization control unit 18 is electrically connected between both ends of the wire 12 via the external terminal 15 </ b> C and the electrode terminal 16. The energization control unit 18 energizes the wire 12 to cause the wire 12 to generate heat, control the temperature and length of the wire 12, and bend the elastic plate 13.

  Specifically, when the energization control unit 18 energizes the wire 12 and the wire 12 generates heat, the wire 12 contracts in the length direction. As a result, a force in the direction toward the free end B acts on the bending point C via the protrusion 13C over which the wire 12 is stretched, and the short side portion 13A bends so that the bending point C faces the free end B. . Then, along with the bending of the short side portion 13A, the long side portion 13B swings and bends so as to approach the substrate 15 side.

  Further, when the energization control unit 18 stops energizing the wire 12 and the wire 12 is cooled, the wire 12 returns to a predetermined length. Thereby, the force in the direction toward the free end B acting on the bending point C via the protrusion 13C over which the wire 12 is stretched is reduced, and the short side portion 13A is freed by the elasticity of the short side portion 13A. Bends in the direction toward the opposite side of B. Then, along with the bending of the short side portion 13 </ b> A, the long side portion 13 </ b> B swings and bends away from the side opposite to the substrate 15.

  Therefore, when the energization control unit 18 repeats energization and non-energization of the wire 12 at a specific period, the short side portion 13A and the long side portion 13B of the elastic plate 13 are flexibly vibrated.

  FIG. 2A is a graph showing the relationship between the time series data of the output voltage from the energization control unit 18 and the time series data of the displacement at the free end B of the elastic plate 13. FIG. 2B is a diagram illustrating a vibration mode of primary mode bending vibration generated in the elastic plate 13.

  The energization control unit 18 outputs a pulse wave having a sufficiently short pulse width that is equal to or less than a half period of the natural period of the elastic plate 13. The time interval (energization period) at which the pulse wave is output is set to an integral multiple of one or more times the natural period of the elastic plate 13. As a result, the elastic plate 13 resonates and the bending vibration of the primary mode is excited in the short side portion 13A and the long side portion 13B. These bending vibrations have a vibration amplitude that is proportional to the reciprocal of the thickness of the elastic plate 13 and proportional to the square of the length of each region. For this reason, when the bending vibration of the primary mode generated in the short side portion 13A due to the contraction of the wire 12 is converted into the bending vibration of the primary mode in the long side portion 13B, the short side portion 13A and the long side portion 13B Enlarged more than the length ratio. Thereby, a large vibration magnification ratio can be realized in the elastic plate 13.

  Further, since the wire 12 extends along the direction connecting the bending point C and the free end B of the elastic plate 13, it is not necessary to shorten the entire length of the wire 12 even if the elastic plate 13 is configured to have a low profile. In addition, the friction between the wire 12 and the elastic plate 13 is reduced by hooking the wire 12 on the protrusion 13 </ b> C instead of the entire width of the elastic plate 13, and the elastic plate 13 is subjected to friction with members other than the wire 12. There is no. Accordingly, the vibration energy at the elastic plate 13 is hardly deteriorated, and a large contraction amount can be realized in the wire 12. As a result, the actuator device 11 can be downsized without impairing the vibration amplitude of the driven portion 14.

  In FIG. 2A, the energization control unit 18 outputs a pulse waveform at an energization period (time interval) that is three times the natural period of the elastic plate 13. Thus, when the energization control unit 18 outputs a pulse waveform with an energization cycle (time interval) that is an integer multiple of twice or more the natural cycle of the elastic plate 13, the elastic plate 13 resonates and bends and vibrates. The elastic plate 13 vibrates a plurality of times during one cycle. Then, it is possible to sufficiently cool the wire 12 during the energization cycle, thereby preventing the temperature of the wire 12 from rising and preventing the wire 12 from changing in contraction amount. If the contraction amount of the wire 12 varies due to the temperature rise, the variation is enlarged by the elastic plate 13 and the variation in the vibration amplitude of the driven unit 14 also increases, and the driven unit 14 collides with the substrate 15. Increased risk. However, in this actuator device 11, the energization period can be lengthened to prevent the temperature of the wire 12 from rising, so that it is possible to suppress fluctuations in the amount of reduction in the wire 12 and fluctuations in vibration amplitude in the driven portion 14. As a result, even if the space around the driven portion 14 is reduced, it is possible to prevent the driven portion 14 from colliding with the substrate 15 and further reduce the size of the actuator device 11.

  Next, an actuator device according to a second embodiment of the present invention will be described.

  FIG. 3A is a plan view of the actuator device 21 according to the second embodiment viewed from the height direction. FIG. 3B is a side view of the actuator device 11 according to the second embodiment viewed from the front-rear direction. In the actuator device 21, the same reference numerals are given to the same components as those of the actuator device 11 according to the first embodiment, and the description thereof is omitted.

  The actuator device 21 includes a wire 22, an elastic plate 23, and an electrode terminal 26. The elastic plate 23 includes a short side portion 13A and a long side portion 13B, but has no protrusion. The wire 22 is stretched over the entire length in the front-rear direction of the elastic plate 23 in the vicinity of the fixed end A of the short side portion 13A of the elastic plate 23, and is stretched in parallel with the long side portion 13B. The electrode terminal 26 extends from the substrate 15 to the same height as the position where the wire 22 is stretched over the elastic plate 23, and fixes both ends of the wire 22.

  Even in the actuator device 21 having such a configuration, when the energization control unit 18 repeats energization to the wire 22 and the energization stop at a specific cycle, the elastic plate 23 resonates and the short side portion 13A and the long side portion 13B are resonated. First-order mode flexural vibrations are generated. Therefore, the primary mode bending vibration generated in the short side portion 13A due to the contraction of the wire 22 can be expanded when converted into the primary mode bending vibration in the long side portion 13B. Thereby, a large vibration expansion ratio can be realized in the elastic plate 23.

  Further, since the wire 22 extends along the direction connecting the bending point C and the free end B of the elastic plate 23, it is not necessary to shorten the entire length of the wire 22 even if the elastic plate 23 is configured to have a low profile. In addition, the elastic plate 23 is not subject to friction with members other than the wires 22 and the vibration energy is less deteriorated. Therefore, a large contraction amount can be realized in the wire 22. As a result, the actuator device 21 can be reduced in size without impairing the vibration amplitude of the driven portion 14.

  In the actuator device 21 according to the second embodiment, when the elastic plate 23 is thin and the rigidity is low, the higher-order mode bending vibration is superimposed on the first-order bending vibration in the elastic plate 23. There is.

  FIG. 3C is a schematic diagram illustrating a vibration mode of a second-order bending vibration excited on the elastic plate 23.

  In the bending vibration of the secondary mode excited by the actuator device 21, a force in the direction toward the free end B acts between the bending point C and the fixed end A as the wire 22 contracts, and the bending point C and the fixed end A Is bent in the direction toward the free end B, and the direction in which the bending point C is directed rotates counterclockwise. Along with this, the long side portion 13B swings and bends away from the substrate 15 opposite to the bending vibration in the primary mode shown in FIG.

  Further, as the wire 22 recovers from the contracted state, the force in the direction toward the free end B acting between the bending point C and the fixed end A is reduced, and the bending point C and the fixed end A are reduced. The space is deflected in the direction toward the opposite side to the free end B, and the direction in which the bending point C faces is rotated clockwise. Accordingly, the long side portion 13B swings and bends so as to approach the substrate 15 side, contrary to the bending vibration in the primary mode.

  Therefore, when the higher-order mode bending vibration is superimposed on the first-order mode bending vibration, the vibration amplitude of the driven portion 14 may be lowered or unstable. On the other hand, in the actuator device 11 according to the first embodiment, the wire 12 is stretched over the protrusion 13C provided in the vicinity of the bending point C. Therefore, the bending vibration of the primary mode is applied to the short side portion 13A. Can be efficiently excited, and excitation of bending vibrations of higher-order modes can be suppressed. For this reason, in the first embodiment, even when the elastic plate 13 is thinned and the rigidity is lowered, the bending vibration of the primary mode can be excited efficiently, compared with the second embodiment. It is possible to realize a larger vibration expansion ratio.

  Further, when the wire 22 is bridged over a position close to the fixed end A of the elastic plate 13 as in the actuator device 21 according to the second embodiment, the position where the wire 12 is transferred to the elastic plate 13 varies. Or when the contraction amount of the wire 12 fluctuates due to a temperature rise caused by driving or the like, the variation or fluctuation is enlarged and transmitted to the driven unit 14, and the vibration amplitude of the driven unit 14 becomes unstable. There are things to do. On the other hand, in the actuator device 11 according to the first embodiment, since the wire 22 is bridged at a position near the bending point C of the elastic plate 13, the vibration amplitude of the driven portion 14 is more stable. become. For this reason, in the first embodiment, even if the space around the driven portion 14 is reduced, the driven portion 14 can be prevented from colliding with the substrate 15, and the actuator is compared with the second embodiment. Further downsizing of the device 11 is possible.

  Moreover, like the actuator device 21 according to the second embodiment, when the wire 22 is stretched over the elastic plate 23 over the entire length in the front-rear direction, the actuator device 21 must be enlarged in the front-rear direction. The angle at which the wire 22 bends in a plan view cannot be increased. On the other hand, in the actuator device 11 according to the first embodiment, since the wire 12 is stretched over the protrusion 13C, the wire in a plan view can be obtained without enlarging the actuator device 11 in the front-rear direction. The angle at which 12 bends can be increased. For example, as described in paragraph 0044 of Japanese Patent Application Laid-Open No. 2009-122605, the greater the angle at which the wire is bent in a plan view, the greater the displacement of the bending point when the wire is shortened. It has been known. Therefore, in the first embodiment, the vibration magnification ratio in the elastic plate 13 can be increased as compared with the second embodiment, and the actuator device 11 can be further downsized.

  Next, an actuator device according to a third embodiment of the present invention will be described.

  FIG. 4A is a plan view of the actuator device 31 according to the third embodiment viewed from the height direction. FIG. 4B is a side view of the actuator device 31 according to the third embodiment viewed from the front-rear direction. In the actuator device 31, the same reference numerals are given to the same components as those of the actuator device 11 according to the first embodiment, and the description is omitted.

  The actuator device 31 includes a wire 32 and an elastic plate 33. The elastic plate 33 includes a short side portion 13A, a long side portion 13B, and a protrusion 33C. Here, the protrusion 33 </ b> C is formed integrally with the metal material of the elastic plate 33, and after forming an opening in the elastic plate 33 to form a tongue-shaped portion surrounded by the opening, the portion is bent by the elastic plate 33. It extends from the point C in the opposite direction to the direction in which the short side portion 13A extends, and the tip is curled in the direction opposite to the direction in which the long side portion 13B extends to form a hook shape. The center of the wire 32 is stretched over the protrusion 33C. The wire 32 is V-shaped in a plan view and is stretched along a direction connecting the bending point C and the free end B in a side view.

  Even in the actuator device 31 configured as described above, the energization control unit 18 repeats the energization of the wire 32 and the energization stop at a specific period, so that the elastic plate 33 resonates and the short side portion 13A and the long side portion 13B. First-order mode flexural vibrations are generated. For this reason, the bending vibration of the primary mode generated in the short side portion 13A due to the contraction of the wire 32 is expanded when converted into the bending vibration of the primary mode in the long side portion 13B. Can be realized.

  Further, since the wire 32 extends along the direction connecting the bending point C and the free end B of the elastic plate 33, it is not necessary to shorten the entire length of the wire 32 even if the elastic plate 33 is configured to have a low profile. In addition, since the elastic plate 33 does not cause friction with members other than the wires 32, the vibration energy is less deteriorated. For this reason, a large contraction amount can be realized in the wire 32. As a result, the actuator device 31 can be reduced in size without impairing the vibration amplitude of the driven portion 14.

  The actuator device 11 according to the first embodiment is in smooth contact with the wire 12 because the side surface of the protrusion 13C is configured as a curved surface, but the actuator device 31 according to the third embodiment is Since the side surface of the protrusion 33C is a flat surface, the contact resistance with the wire 32 is large. Therefore, the actuator device 11 according to the first embodiment is less susceptible to vibration energy degradation due to friction between the elastic plate and the wire than the actuator device 31 according to the third embodiment, and has a larger contraction amount in the wire. Can be realized.

  However, in the actuator device 31 according to the third embodiment, the protrusion 33C is integrally formed with a member constituting the elastic plate 33. However, in the actuator device 11 according to the first embodiment, the protrusion 13C is an elastic plate. It is comprised separately from the member which comprises 13. Therefore, the actuator device 31 according to the third embodiment has a stronger bonding strength of protrusions and a smaller number of parts than the actuator device 11 according to the first embodiment. In this respect, the actuator device 31 according to the third embodiment is superior to the actuator device 11 according to the first embodiment.

  Next, an actuator device according to a fourth embodiment of the present invention will be described.

  FIG. 5A is a plan view of the actuator device 41 according to the fourth embodiment viewed from the height direction. FIG. 5B is a side view of the actuator device 41 according to the fourth embodiment viewed from the front-rear direction. In the actuator device 41, the same reference numerals are given to the same components as those of the actuator device 11 according to the first embodiment, and the description thereof is omitted.

  The actuator device 41 includes a wire 42 and an elastic plate 43. The elastic plate 43 includes a short side portion 13A, a long side portion 13B, and a protrusion 43C. The protrusion 43C is formed integrally with the metal material of the elastic plate 43, and is formed from the vicinity of the bending point C in the width direction of the long side portion 13B and from one edge portion in the front-rear direction of the long side portion 13B. It extends in the direction opposite to the side, and the tip is curled in the direction opposite to the direction in which the long side portion 13B extends to form a hook shape. The wire 42 is stretched over the protrusion 43C, and is stretched along a direction connecting the bending point C and the free end B in a side view when viewed in a V shape. Further, one end of the wire 42 is stretched along the edge portion of the long side portion 13B, and the other end of the wire 42 is stretched so as to obliquely intersect the long side portion 13B. .

  Even in the actuator device 41 having such a configuration, when the energization control unit 18 repeats energization to the wire 42 and interruption of energization at a specific cycle, the elastic plate 43 resonates and the short side portion 13A and the long side portion 13B First-order mode flexural vibrations are generated. Therefore, the primary mode bending vibration generated in the short side portion 13A due to the contraction of the wire 42 is expanded when converted into the primary mode bending vibration in the long side portion 13B, and the elastic plate 43 has a large vibration expansion rate. Can be realized.

  Further, since the wire 42 extends along the direction connecting the bending point C and the free end B of the elastic plate 43, it is not necessary to shorten the entire length of the wire 42 even if the elastic plate 43 is configured to have a low profile. In addition, since the elastic plate 43 does not generate friction with members other than the wire 42, the vibration energy is hardly deteriorated and a large contraction amount can be realized in the wire 42. As a result, the actuator device 41 can be reduced in size without impairing the vibration amplitude of the driven portion 14.

  In addition, since the protrusion 43C is shifted from the center in the front-rear direction of the elastic plate 43, the spring strength of the elastic plate 43 is greater than when the protrusion 43C is disposed in the front-rear center of the elastic plate 43. Will increase.

  Next, an actuator device according to a fifth embodiment of the present invention will be described.

  FIG. 6A is a plan view of the actuator device 51 according to the fifth embodiment viewed from the height direction. FIG. 6B is a side view of the actuator device 51 according to the fifth embodiment viewed from the front-rear direction. In the actuator device 51, the same reference numerals are given to the same components as those of the actuator device 11 according to the first embodiment, and the description thereof is omitted.

  The actuator device 51 includes a wire 52 and an elastic plate 53. The elastic plate 53 includes a short side portion 13A, a long side portion 13B, and a protrusion 53C. The protrusion 53C is formed integrally with the metal material of the elastic plate 53, and is formed by forming an opening in the elastic plate 53 to form a tongue-shaped portion surrounded by the opening, and then bending the elastic plate 53 from the bending point C. doing. The protrusion 53C extends from the vicinity of the bending point C in the long side portion 13B to the side opposite to the direction in which the long side portion 13B extends. The wire 52 is stretched over the side of the substrate 15 of the protrusion 53C, pulled out to the opposite side of the substrate 53 of the protrusion 53C, and slightly along the direction connecting the bending point C and the free end B in a side view. It is stretched diagonally.

  Even in the actuator device 51 having such a configuration, when the energization control unit 18 repeats energization to the wire 52 and interruption of energization at a specific cycle, the elastic plate 53 resonates and the short side portion 13A and the long side portion 13B First-order mode flexural vibrations are generated. Therefore, the primary mode bending vibration generated in the short side portion 13 </ b> A due to the contraction of the wire 52 is expanded when converted into the primary mode bending vibration in the long side portion 13 </ b> B. Can be realized.

  Further, since the wire 52 extends along the direction connecting the bending point C and the free end B of the elastic plate 53, it is not necessary to shorten the entire length of the wire 52 even if the elastic plate 53 is configured to have a low profile. In addition, since the elastic plate 53 does not generate friction with members other than the wire 52, the vibration energy is hardly deteriorated and a large contraction amount can be realized in the wire 52. As a result, the actuator device 51 can be reduced in size without impairing the vibration amplitude of the driven portion 14.

  Next, an actuator device according to a sixth embodiment of the present invention will be described.

  FIG. 7A is a plan view of the actuator device 61 according to the sixth embodiment viewed from the height direction. FIG. 7B is a side view of the actuator device 61 according to the sixth embodiment viewed from the front-rear direction. In the actuator device 61, the same reference numerals are given to the same components as those of the actuator device 11 according to the first embodiment, and the description thereof is omitted.

  The actuator device 61 includes a wire 62, an elastic plate 63, and an electrode terminal 66. The elastic plate 63 includes a short side portion 13A, a long side portion 13B, and a protrusion 63C. The protrusion 63C is formed integrally with the metal material of the elastic plate 63, and after forming a tongue-shaped portion surrounded by the opening by providing an opening in the elastic plate 63, the tip is extended from the long side portion 13B to the substrate 15 side. The tip is curled in a direction opposite to the direction in which the long side portion 13B extends to form a hook shape. The wire 62 is stretched over the protrusion 63C, and is slanted from the vicinity of the bending point C along the direction connecting the bending point C and the free end B in a side view. The electrode terminal 66 slightly protrudes from the substrate 15 and fixes both ends of the wire 62.

  Even in the actuator device 61 having such a configuration, when the energization control unit 18 repeats energization to the wire 62 and interruption of energization at a specific cycle, the elastic plate 63 resonates and the short side portion 13A and the long side portion 13B First-order mode flexural vibrations are generated. For this reason, the bending vibration of the primary mode generated in the short side portion 13A due to the contraction of the wire 62 is expanded when converted into the bending vibration of the primary mode in the long side portion 13B. Can be realized.

  Further, since the wire 62 extends along the direction connecting the bending point C and the free end B of the elastic plate 63, it is not necessary to shorten the entire length of the wire 62 even if the elastic plate 63 is configured to have a low profile. In addition, since the elastic plate 63 does not cause friction with members other than the wire 62, the vibration energy is hardly deteriorated and a large contraction amount can be realized in the wire 62. As a result, the actuator device 61 can be downsized without impairing the vibration amplitude of the driven portion 14.

  Next, an actuator device according to a seventh embodiment of the present invention will be described.

  FIG. 8 is a side view of the actuator device 71 according to the seventh embodiment when viewed from the front-rear direction. In the actuator device 71, the same reference numerals are given to the same components as those of the actuator device 11 according to the first embodiment, and the description thereof is omitted.

  The actuator device 71 includes a wire 72, an elastic plate 73, and an electrode terminal 76. The elastic plate 73 includes a short side portion 13A, a long side portion 13B, and a protrusion 73C. The protrusion 73C is integrally formed with the metal material of the elastic plate 73, and after forming a tongue-shaped portion surrounded by the opening by providing an opening in the elastic plate 73, the short side portion 13A is moved to the long side portion 13B side. The tip is extended and the tip is curled toward the substrate 15 to form a hook. The wire 72 is stretched over the protrusion 73C, and is slanted from the vicinity of the bending point C along the direction connecting the bending point C and the free end B in a side view. The electrode terminal 76 slightly protrudes from the substrate 15 and fixes both ends of the wire 72.

  Even in the actuator device 71 having such a configuration, when the energization control unit 18 repeats energization to the wire 72 and the energization stop at a specific cycle, the elastic plate 73 resonates and the short side portion 13A and the long side portion 13B are resonated. First-order mode flexural vibrations are generated. Therefore, the primary mode bending vibration generated in the short side portion 13 </ b> A due to the contraction of the wire 72 is expanded when converted into the primary mode bending vibration in the long side portion 13 </ b> B. Can be realized.

  Further, since the wire 72 extends along the direction connecting the bending point C and the free end B of the elastic plate 73, it is not necessary to shorten the entire length of the wire 72 even if the elastic plate 73 is configured to have a low profile. In addition, since the elastic plate 73 does not cause friction with members other than the wire 72, vibration energy is hardly deteriorated and a large contraction amount can be realized in the wire 72. As a result, the actuator device 71 can be downsized without impairing the vibration amplitude of the driven portion 14.

  Next, an actuator device according to an eighth embodiment of the present invention will be described.

  FIG. 9A is a plan view of the actuator device 81 according to the eighth embodiment viewed from the height direction. FIG. 9B is a side view of the actuator device 81 according to the eighth embodiment viewed from the front-rear direction. In the actuator device 81, the same reference numerals are given to the same components as those of the actuator device 31 according to the third embodiment, and the description thereof is omitted.

  The actuator device 81 includes an elastic plate 83. The elastic plate 83 includes a short side portion 13A, a long side portion 13B, a protrusion 13C, and a reinforcing portion 83D. The reinforcing portion 83D is provided in the vicinity of the fixed end A of the short side portion 13A, and is formed by folding back both ends in the front-rear direction of the short side portion 13A in the width direction. By providing such a reinforcing portion 83D, the short side portion 13A has increased rigidity in the vicinity of the fixed end A. The short side portion 13A has a risk of causing plastic deformation because stress concentrates in the vicinity of the fixed end A. However, if the rigidity is enhanced by the reinforcing portion 83D, the plastic deformation can be suppressed.

  Even in the actuator device 81 having such a configuration, when the energization control unit 18 repeats energization to the wire 32 and interruption of energization at a specific period, the elastic plate 83 resonates and the short side portion 13A and the long side portion 13B are resonated. First-order mode flexural vibrations are generated. For this reason, the bending vibration of the primary mode generated in the short side portion 13A due to the contraction of the wire 32 is expanded when converted into the bending vibration of the primary mode in the long side portion 13B. Can be realized.

  Further, since the wire 32 extends along the direction connecting the bending point C and the free end B of the elastic plate 83, it is not necessary to shorten the entire length of the wire 32 even if the elastic plate 83 is configured to have a low profile. In addition, since the elastic plate 83 does not generate friction with members other than the wire 32, vibration energy is hardly deteriorated and a large contraction amount can be realized in the wire 32. As a result, the actuator device 81 can be reduced in size without impairing the vibration amplitude of the driven portion 14.

  Next, an actuator device according to a ninth embodiment of the present invention will be described.

  FIG. 10 is a side view of the actuator device 91 according to the ninth embodiment viewed from the front-rear direction. In the actuator device 91, the same reference numerals are given to the same components as those of the actuator device 11 according to the first embodiment, and the description is omitted.

  The actuator device 91 includes a substrate 95 and a heat radiating plate 97. The substrate 95 includes a side wall portion 95D that rises along the outer periphery of the first main surface 15A. The heat radiating plate 97 is made of a material having a high heat radiating property, and is joined in the height direction of the side wall portion 95 </ b> D to form a cavity together with the substrate 95. The heat radiating plate 97 includes a convex portion 97A protruding into the cavity internal space. The convex portion 97 </ b> A is in contact with the wire 12 in the vicinity of the bending point C of the elastic plate 13, and promotes heat dissipation from the wire 12.

  By providing the heat radiating plate 97 in this way, the wire 12 can be quickly cooled, and the wire 12 can be prevented from changing in the amount of contraction. If the amount of contraction of the wire 12 varies due to a temperature rise, the variation is magnified by the elastic plate 13 and the variation in the vibration amplitude of the driven unit 14 also increases, and the driven unit 14 collides with the substrate 95. Increased risk. However, in this actuator device 91, since the temperature of the wire 12 can be prevented by the heat radiating plate 97, fluctuations in the amount of reduction in the wire 12 and fluctuations in the vibration amplitude in the driven part 14 can be suppressed. As a result, even if the space around the driven portion 14 is reduced, the driven portion 14 can be prevented from colliding with the substrate 95, and the actuator device 91 can be further reduced in size.

  Next, an actuator device according to a tenth embodiment of the present invention will be described.

  FIG. 11 is a side view of the actuator device 101 according to the tenth embodiment as viewed from the front-rear direction. In the actuator device 101, the same reference numerals are given to the same components as those of the actuator device 11 according to the first embodiment, and the description thereof is omitted.

  The actuator device 101 includes a substrate 105, electrode terminals 106, a heat radiating plate 107, and a top surface electrode 107C. The substrate 105 includes a side wall portion 105D that rises along the outer periphery of the first main surface 15A. The heat radiating plate 107 is made of a material having a high heat radiating property, and is joined in the height direction of the side wall portion 105 </ b> D to form a cavity together with the substrate 105. The electrode terminal 106 protrudes from the heat radiating plate 107 into the cavity internal space, and fixes both ends of the wire 12. The top surface electrode 107 </ b> C is provided on the top surface of the heat radiating plate 107, and the energization control unit 18 is electrically connected and the electrode terminal 106 is electrically connected. The heat dissipation plate 107 promotes heat dissipation from the wire 12 via the electrode terminal 106.

  By providing the heat radiating plate 107 in this way, it is possible to prevent the temperature of the wire 12 from increasing due to driving, and to prevent the wire 12 from changing in shrinkage. If the amount of contraction of the wire 12 varies due to a rise in temperature, the variation is magnified by the elastic plate 13 and the variation in the vibration amplitude of the driven unit 14 also increases, and the driven unit 14 collides with the substrate 105. Increased risk. However, in this actuator device 101, since the temperature of the wire 12 can be prevented by the heat radiating plate 107, fluctuations in the amount of reduction in the wires 12 and fluctuations in the vibration amplitude in the driven part 14 can be suppressed. As a result, even if the space around the driven portion 14 is reduced, it is possible to prevent the driven portion 14 from colliding with the substrate 105, and the actuator device 101 can be further downsized.

  Next, an actuator device according to an eleventh embodiment of the present invention will be described.

  FIG. 12A is a graph showing the relationship between the time series data of the output voltage from the energization controller in the actuator device according to the eleventh embodiment and the time series data of the displacement at the free end B of the elastic plate. . FIG. 12B is a schematic diagram illustrating the output timing of the pulse waveform in the actuator device according to the eleventh embodiment.

  In this embodiment, the waveform of the output voltage from the energization control unit is different from that of the first embodiment. Specifically, the energization control unit outputs a pulse waveform having a sufficiently short pulse width equal to or less than a half period of the natural period of the elastic plate at an energization period (time interval) deviated from an integral multiple of the natural period of the elastic plate. . In such a case, the elastic plate is less likely to resonate, and the vibration amplitude of the elastic plate is lower than the maximum amplitude. However, the elastic plate can be vibrated when a pulse waveform is output at least at a timing corresponding to a half period of the natural period in which the elastic plate approaches the substrate. That is, if the time interval T2 between the two pulse waveforms output continuously by the energization control unit is within the range represented by the following expression corresponding to the half period of the natural period T1, the elastic plate continues to resonate and is driven to the driven part. Vibration will occur. In the following formula, n is an arbitrary integer larger than 1.

(N-1 / 4) T1 ≦ T2 ≦ (n + 1/4)
In this way, the energization control unit outputs a pulse waveform having a sufficiently short pulse width that is equal to or less than a half period of the natural period of the elastic plate at an energization period (time interval) that deviates from an integral multiple of the natural period of the elastic plate. Also good.

  As the output voltage waveform of the energization control unit, a rectangular wave, a triangular wave, a trapezoidal wave, a SIN wave, or the like can be employed in addition to a pulse wave.

A ... Fixed end B ... Free end C ... Bending points 11, 21, 31, 41, 51, 61, 71, 81, 91, 101 ... Actuator devices 12, 22, 32, 42, 52, 62, 72 ... Wire 13 , 23, 33, 43, 53, 63, 73, 83 ... elastic plate 13A ... short side portion 13B ... long side portion 13C, 33C, 43C, 53C, 63C, 73C ... projection 14 ... driven portions 15, 95, 105 ... substrate 15A ... first main surface 15B ... second main surface 15C ... external terminals 16, 26, 66, 76, 106 ... electrode terminals 18 ... energization control part 83D ... reinforcing part 95D ... side wall parts 97, 107 ... heat dissipation Plate 97A ... Projection 105D ... Side wall 107C ... Top electrode

Claims (7)

An elastic plate having a short side extending from a fixed end to a bending point, and a long side extending from the short side to the free end at the bending point;
A driven part connected to a position on the free end side of the long side part;
A retractable wire that is passed to the elastic plate and stretched along a direction connecting the bending point and the free end;
An actuator device comprising: The position where the wire is passed in the elastic plate is a position closer to the bending point among the fixed end, the bending point, and the free end in the short side portion or the long side portion.
The actuator device according to claim 1. The wire is made of a shape memory alloy, and is stretched across the elastic plate between both ends,
The elastic plate includes a protrusion around which the wire is stretched,
The actuator device according to claim 1 or 2. An energization control unit for controlling energization to the wire;
The energization control unit adjusts the energization cycle to the wire to an integral multiple of 1 or more times the natural cycle of the bending vibration of the primary mode in the elastic plate.
The actuator device according to claim 3. An energization control unit for controlling energization to the wire;
The energization control unit adjusts the energization cycle to the wire to an integral multiple of twice or more the natural cycle of the bending vibration of the primary mode in the elastic plate.
The actuator device according to claim 3. An energization control unit for controlling energization to the wire;
The energization control unit adjusts the energization cycle to the wire within the range of the following formula:
4. The actuator device according to claim 3, wherein the energization period is T2, the natural period of the bending vibration of the primary mode in the elastic plate is T1, and an integer equal to or greater than 1 is n.
(N-1 / 4) T1 ≦ T2 ≦ (n + 1/4) The actuator device according to any one of claims 3 to 6, wherein the protrusion is made of a metal material integral with the elastic plate.