JP6147587B2 - Grinding apparatus and grinding method - Google Patents

Description

  The present invention relates to a grinding apparatus and a grinding method for grinding a plate-like workpiece.

  In a grinding apparatus, a plate-shaped workpiece is ground by pressing a rotating grinding wheel mounted on a grinding means against a plate-shaped workpiece held by a rotating holding table. For example, in the grinding apparatus described in Patent Document 1, a plate-like workpiece can be ground into a desired shape (for example, a uniform thickness) by adjusting the inclination of the holding table with a movable support portion. The tilt adjustment of the holding table by the movable support portion is performed before the start of grinding.

JP 2008-238341 A

  However, when the grinding wheel is pressed against the plate-like workpiece, a force is applied to the holding table, and the tilt of the holding table adjusted by the movable support portion may change. In particular, when the grinding feed rate is changed, the pressing pressure applied to the holding table changes, so that the inclination of the holding table changes. Thereby, there is a possibility that the plate workpiece is damaged or the plate workpiece cannot be ground into a desired shape.

  The present invention has been considered in view of such problems. By preventing the tilt of the holding table adjusted by the movable support portion from changing, the plate-like workpiece is prevented from being damaged, and the plate-like workpiece is removed. The object is to accurately grind to a desired shape.

A grinding apparatus according to the present invention includes at least a holding table that holds and rotates a plate-like workpiece, a grinding unit that grinds the plate-like workpiece held by the holding table, and an inclination adjusting unit that adjusts the inclination of the holding table. A grinding apparatus equipped with at least three measuring units for measuring the distance between the holding table and the base, and the plate-like workpiece is uniformly ground by grinding the plate-like workpiece held on the holding table by a grinding means. A storage unit that stores the distance measured by the measurement unit when formed to have a thickness, and a control unit that controls the tilt adjusting unit. The tilt adjusting unit is disposed between the holding table and the base. Provided with three support parts arranged at the apex of an equilateral triangle with the center of the holding table as the center of gravity, and at least one support part can change the distance between the holding table and the base In , The control unit while the holding table is grinding grinding means a plate-like work held, so that the distance measuring unit is measured, and the distance that the storage unit has stored match, controlling the inclination adjustment means.

In the grinding apparatus, it is desirable that the three measurement units and the three support units are alternately and evenly arranged.
Moreover, as for a grinding device, it is desirable for this measurement part and this support part to be arrange | positioned on the straight line in the radial direction of this holding table.

  The grinding method according to the present invention is a grinding method using the grinding apparatus, wherein the first plate-like workpiece held by the holding table is ground by a grinding means, and the first plate-like workpiece has a predetermined shape. And the second plate-like work held by the holding table is ground by the grinding means, and the distance between the holding table and the base is measured by the measuring unit. However, the controller adjusts the inclination adjusting means so that the measuring step for measuring the distance between the holding table and the base by the measuring unit matches the distance measured in the measuring step and the distance stored in the storing step. An inclination adjustment step to be controlled.

  According to the grinding apparatus and the grinding method of the present invention, while the grinding means is grinding the plate-like workpiece held by the holding table, the measuring unit measures the distance between the holding table and the base and measures the distance. Since the control unit controls the tilt adjusting means so that the distance stored in the storage unit matches the distance stored in the storage unit, it is possible to prevent the plate-shaped workpiece from being damaged by the change in the tilt of the holding table. Can be accurately ground to a desired shape.

Side surface sectional drawing which shows a grinding device. The top view which shows a grinding device. The flowchart which shows the grinding method. The top view which shows another grinding device.

  A grinding apparatus 10 shown in FIGS. 1 and 2 includes a base 11, a holding table 12 that holds and rotates a plate-like workpiece 20, three support portions 13 a to 13 c that support the holding table 12, and a holding table 12. Three measuring parts 14a to 14c for measuring the distance between the base 11 and the base 11, a grinding means 15 for grinding the plate-like workpiece 20 held by the holding table 12, and a control part 16 for controlling the support parts 13a to 13c. And a storage unit 17 that stores the distances measured by the measurement units 14a to 14c.

  The base 11 is formed in a planar shape whose upper surface is perpendicular to the Z axis. The base 11 may be stationary, may be a moving table that moves linearly, or may be a turntable that rotates.

  The holding table 12 holds the plate-like workpiece 20 by placing the plate-like workpiece 20 on the upper surface 121 and sucking it with a suction source (not shown). The holding table 12 is rotated about the rotation shaft 123 by a motor (not shown). The rotation shaft 123 of the holding table 12 is not necessarily parallel to the ± Z direction and can be changed in direction. The upper surface 121 of the holding table 12 is a conical curved surface with the rotation shaft 123 as an axis. The lower surface 122 of the holding table 12 is a circular plane perpendicular to the rotation shaft 123.

  The support portions 13 a to 13 c are disposed between the holding table 12 and the base 11. At least one (two in this embodiment) of the support portions 13a to 13c can change the distance between the holding table 12 and the base 11. Of the three support portions 13a to 13c, the support portion 13a includes a lower portion 131 fixed to the base 11, a shaft portion 132 having a uniform length, and an upper portion 133 fixed to the lower surface 122 of the holding table 12. It is a fixed support part provided. One end of the shaft portion 132 is fixed to the lower portion 131, and the other end is fixed to the upper portion 133. Thereby, the holding table 12 is supported, and the distance between the holding table 12 and the base 11 is kept uniform.

  On the other hand, the support part 13b and the support part 13c rotate the shaft part 135, the lower part 134 fixed to the base 11, the shaft part 135 having a male screw cut at the tip, the upper part 136 fixed to the holding table 12. It is a movable support part provided with the motor 137 to be made. The upper portion 136 has a female screw that is screwed with the male screw of the shaft portion 135. When the motor 137 rotates the shaft portion 135, the distance between the holding table 12 and the base 11 can be changed.

  The three measuring units 14 a to 14 c are, for example, optical sensors having a light emitting unit and a light receiving unit disposed on the base 11, and light emitted from the light emitting unit in the + Z direction hits the lower surface 122 of the holding table 12 and is reflected. When the light receiving unit receives the reflected light, the distance between the holding table 12 and the base 11 can be measured. In the example of FIG. 2, three measurement units 14 a to 14 c and three support units 13 a to 13 c are alternately and evenly arranged.

  The grinding means 15 is movable in the ± Z direction, and is moved by the grinding wheel 155 mounted at the tip thereof in the −Z direction while rotating around the rotation shaft 153, thereby holding the plate held by the holding table 12. The plate-like workpiece 20 is ground by pressing a grinding wheel 155 against the workpiece 20.

  The storage unit 17 stores the distances measured by the measurement units 14a to 14c. The control unit 16 controls the motor 137 based on the distance measured by the measurement units 14 a to 14 c and the distance stored by the storage unit 17, so that the holding table 12 and the base 11 are supported in the support units 13 b and 13 c. Adjust the distance.

  As shown in FIG. 2, the support portions 13 a to 13 c are arranged at equidistant positions from the center (the rotation shaft 123) of the holding table 12 and form an equilateral triangle. Therefore, the center of gravity of the equilateral triangle formed by the support portions 13 a to 13 c coincides with the center of the holding table 12. In this way, the three support portions 13a to 13c are arranged at positions that form a triangle, and two of the support portions 13b and 13c can change the distance between the holding table 12 and the base 11, so that the holding table The inclination of 12 can be changed freely. That is, the three support portions 13 a to 13 c constitute an inclination adjusting unit that adjusts the inclination of the holding table 12.

Similarly, the measurement units 14a to 14c are arranged at equidistant positions from the center of the holding table 12 (the rotation shaft 123) and form an equilateral triangle. Therefore, the center of gravity of the equilateral triangle formed by the measurement units 14 a to 14 c coincides with the center of the holding table 12. Thus, since the three measurement units 14a to 14c are arranged at positions that form a triangle, the inclination of the holding table 12 is represented by the distance measured by the three measurement units 14a to 14c. In addition, the distance from the center of the holding table 12 to the measurement units 14a to 14c may be the same as or different from the distance from the center of the holding table 12 to the support units 13a to 13c.
Further, a straight line 143a passing through the support part 13a and the measurement part 14a, a straight line 143b passing through the support part 13b and the measurement part 14b, and a straight line 143c passing through the support part 13c and the measurement part 14c are all of the holding table 12. It passes through the center and intersects with the rotation axis 123.

  As described above, since the upper surface 121 of the holding table 12 is formed in a conical shape, the plate-like workpiece 20 held by the holding table 12 is held in a shape along the upper surface 121. When this is ground by the grinding means 15, grinding is performed in a region 157 indicated by hatching.

For example, when the distance Cb between the holding table 12 and the base 11 in the support portion 13b is increased and the distance Cc between the holding table 12 and the base 11 in the support portion 13c is increased in the same manner as the distance Cb, The holding table 12 is tilted, and the + X direction side approaches the grinding means 15. Thereby, the part near the center of the plate-like workpiece 20 is ground thinner than the part near the outer periphery. Conversely, when the distance Cb and the distance Cc are similarly reduced, the holding table 12 is tilted and the + X direction side is moved away from the grinding means 15. Thereby, the part near the outer periphery of the plate-like workpiece 20 is ground thinner than the part near the center.
When the distance Cb is increased and the distance Cc is decreased, the holding table 12 is tilted, the −Y direction side approaches the grinding unit 15, and the + Y direction side moves away from the grinding unit 15. Thereby, a portion near the center of the region 157 is ground thinner than portions near both ends of the region 157. Conversely, when the distance Cb is decreased and the distance Cc is increased, the holding table 12 is tilted, the −Y direction side is moved away from the grinding unit 15, and the + Y direction side is moved closer to the grinding unit 15. Thereby, the part near the both ends of the region 157 is ground thinner than the part near the center of the region 157.
Thus, by changing the inclination of the holding table 12, the position where the plate workpiece 20 is ground more thinly in the radial direction can be changed. Thereby, the shape by which the plate-shaped workpiece 20 is ground can be changed.

  The grinding method 30 shown in FIG. 3 is a method of grinding the plate-like workpiece 20 using the grinding apparatus 10 shown in FIGS. 1 and 2, and the first plate-like workpiece 20 is ground, While grinding the second plate-like workpiece 20, a storage step 31 for storing the distance measured by the measuring units 14 a to 14 c when the distance between the holding table 12 and the base 11 is ground to a predetermined shape. The measurement unit 32 that measures the distance between the holding table 12 and the base 11 by the measurement units 14a to 14c, and the support unit 13a so that the distance measured in the measurement step 33 matches the distance stored in the storage step 31. To 13c (tilt adjusting means).

  In the memory 31, the plate-like workpiece 20 is placed on the upper surface 121 of the holding table 12 as shown in FIG. 1, and the holding table 12 holds the plate-like workpiece 20. When the control part 16 adjusts the distance between the holding table 12 and the base 11 in the support part 13b and the support part 13c, the inclination of the holding table 12 is ground to the plate-like workpiece 20 to a uniform thickness. Make the expected slope. That is, in the region 157 shown in FIG. 2, adjustment is made so that the upper surface 121 of the holding table 12 and the lower surface of the grinding wheel 155 are parallel. While rotating the holding table 12 and lowering the grinding means 15 while rotating the grinding wheel 155, the grinding means 15 grinds the plate-like workpiece 20, and the three measuring units 14 a to 14 c are provided with the holding table 12 and the base 11. Distances Ma, Mb, and Mc (see FIG. 2) are measured. The storage unit 17 temporarily stores the three distances Ma, Mb, and Mc measured by the three measuring units 14a to 14c, respectively.

When the grinding of the plate-like workpiece 20 is finished, the thickness distribution in the radial direction of the ground plate-like workpiece 20 is measured to determine whether or not it has been ground to a uniform thickness. When the plate-like workpiece 20 is not ground to a uniform thickness, the control unit 16 supports the holding table 12 and the base 11 in the support portion 13b and the support portion 13c so that the plate-like workpiece 20 has a uniform thickness. Change the distance between and start grinding again. This is repeated until the plate-like workpiece 20 is ground to a uniform thickness.
The plate-like workpiece 20 to be ground in the first measuring step 31 may be a test dummy workpiece. Further, when the grinding is performed again, the same plate-like workpiece 20 may be used repeatedly, or a new plate-like workpiece 20 may be used each time.

  When the plate-like workpiece 20 is ground to a uniform thickness, the storage unit 17 converts the temporarily stored three measurement distances Ma, Mb, Mc to the target distances Ta, Store as Tb, Tc.

  Next, in the measurement process 32, another plate-like workpiece 20 is placed on the upper surface 121 of the holding table 12, and the holding table 12 holds the plate-like workpiece 20. The measuring units 14 a to 14 c measure the distances Ma, Mb, Mc between the holding table 12 and the base 11, and the distances Ma, Mb, Mc measured by the measuring units 14 a to 14 c and the target stored in the storage unit 17. The control unit 16 adjusts the distance between the support table 13b and the holding table 12 and the base 11 in the support unit 13c so that the distances Ta, Tb, and Tc coincide with each other. For example, when the distance Ma measured by the measurement unit 14a is smaller than the target distance Ta, the control unit 16 increases the distance Cb and the distance Cc. Conversely, when the measurement distance Ma is larger than the target distance Ta, the control unit 16 decreases the distance Cb and the distance Cc. When the distance Mb measured by the measurement unit 14b is larger than the target distance Tb and the distance Mc measured by the measurement unit 14c is smaller than the target distance Tc, the control unit 16 increases the distance Cb and decreases the distance Cc. Conversely, when the measurement distance Mb is smaller than the target distance Tb and the measurement distance Mc is larger than the target distance Tc, the control unit 16 decreases the distance Cb and increases the distance Cc. In this way, the control unit 16 matches the three measurement distances Ma, Mb, and Mc with the three target distances Ta, Tb, and Tc, respectively.

  In this state, the grinding means 15 descends while the grinding wheel 155 rotates, and the grinding of the plate workpiece 20 is started by the grinding means 15. During grinding, the tilt of the holding table 12 may change due to the pressure with which the grinding wheel 155 is pressed against the plate-like workpiece 20, so the second measuring step 33 is performed in parallel with the grinding by the grinding means 15. The three measuring units 14a to 14c measure the distances Ma, Mb, and Mc.

  In the inclination adjustment step 33, the control unit 16 monitors the measurement distances Ma, Mb, Mc so as not to deviate from the target distances Ta, Tb, Tc, and the measurement distances Ma, Mb, Mc and the target distances Ta, Tb, Tc are determined. If they do not match, the support portions 13b and 13c are adjusted so that the measurement distances Ma, Mb, Mc and the target distances Ta, Tb, Tc match. By continuing such control until the grinding of the plate-like workpiece 20 is completed, the measurement distances Ma, Mb, Mc and the target distances Ta, Tb, Tc are always kept consistent during grinding.

Thus, the distance measured by the measurement units 14a to 14c when the plate-like workpiece 20 is ground to a uniform thickness is stored as a target distance, and the measurement units 14a to 14d are ground during the grinding of the plate-like workpiece 20. By controlling the tilt adjusting means so that the distance measured by 14c matches the target distance, the tilt of the holding table 12 is prevented from changing and the plate workpiece 20 is prevented from being damaged, and the plate workpiece 20 is desired. It can be accurately ground to the shape of.
Further, instead of measuring the inclination of the holding table 12 from the + Z direction, the measuring units 14a to 14c measure the distance between the holding table 12 and the base 11 from the -Z direction, whereby the inclination of the holding table 12 is measured. Therefore, the inclination of the holding table 12 can be measured without being affected by the grinding water sprayed toward the plate-like workpiece 20 during grinding.
Moreover, since the support parts 13a-13c and the measurement parts 14a-14c are arrange | positioned on the opposite side on both sides of the center of the holding table 12, it displaces to the measurement distance which the measurement parts 14a-14c measure with the inclination of the holding table 12. Is likely to appear.

The grinding apparatus 10A illustrated in FIG. 4 is an example in which the arrangement of the measurement units 14a to 14c is different. The description of the same configuration as that of the grinding apparatus 10 shown in FIGS. 1 and 2 is omitted.
In the example of FIG. 4, the three support portions 13 a to 13 c are arranged at the vertices of an equilateral triangle with the center of the holding table 12 as the center of gravity, and the three measuring portions 14 a to 14 c are similarly the center of the holding table 12. The measuring units 14a to 14c are arranged on the points arranged at the vertices of an equilateral triangle with the center of gravity and the straight lines 143a to 143c passing through the center of the holding table 12 and the supporting units 13a to 13c. The point is the same as the grinding device 10 described above. However, in the grinding device 10 described above, the support parts 13a to 13c and the measurement parts 14a to 14c arranged on one straight line are arranged on the opposite side when viewed from the center of the holding table 12, whereas In the grinding apparatus 10 </ b> A in this example, the support parts 13 a to 13 c and the measurement parts 14 a to 14 c arranged on one straight line are arranged on the same side when viewed from the center of the holding table 12. That is, the support part 13a and the measurement part 14a are located on the same radius, the support part 13b and the measurement part 14b are located on the same radius, and the support part 13c and the measurement part 14c are located on the same radius. The support part and the measurement part are arranged on a straight line in the radial direction.

  Thus, by arranging the measurement units 14a to 14c on the same radius as the support units 13a to 14c, the control unit 16 can simplify the conditions for adjusting the distance Cb and the distance Cc. Thereby, it can prevent that the inclination of the holding table 12 changes and the plate-shaped workpiece 20 receives damage, and can plate the plate-shaped workpiece 20 to a desired shape accurately. The grinding apparatus 10A measures the distances Mb and Mc with only the measurement units 14b and 14c without providing the measurement unit 14a, controls the support unit, and matches the distances Mb and Mc with the target distances Tb and Tc.

In addition, the structure of the support part 13b and the support part 13c which are variable support parts is not restricted to a screw type, and may be other structures such as a hydraulic type and a lever type.
Moreover, in 10 A of grinding apparatuses, although measurement part 14a-14c is arrange | positioned at the outer peripheral side of support part 13a-13c, you may arrange | position support part 13a-13c in the outer peripheral side of measurement part 14a-14c.
The measurement units 14a, 14b, and 14c are desirably arranged at equal intervals around the center of the holding table, but the intervals are not necessarily equal. The arrangement of the measurement units 14a, 14b, and 14c changes how the control unit 16 should control the inclination adjusting units 13b and 13c in order to make the measurement distance and the target distance coincide.

10 grinding device, 11 base, 12 holding table, 121 upper surface, 122 lower surface,
123, 153 rotation axis,
13a-13c support part (tilt adjustment means),
131,134 Lower part, 132,135 Shaft part, 133,136 Upper part,
137 motor,
14a-14c measuring part, 143a-143c straight line,
15 grinding means, 155 grinding wheel, 157 region,
16 control unit, 17 storage unit,
20 plate-like workpiece,
30 grinding method,
31 First measurement step, 32 storage step, 33 second measurement step, 34 tilt adjustment step

Claims (4)

A holding table that rotates by holding a plate-like workpiece;
Grinding means for grinding the plate-like workpiece held by the holding table;
An inclination adjusting means for adjusting the inclination of the holding table;
At least three measuring units for measuring the distance between the holding table and the base;
A storage unit for storing a distance measured by the measurement unit when the plate-like workpiece is formed to have a uniform thickness by grinding the plate-like workpiece held on the holding table by the grinding means ;
A control unit for controlling the inclination adjusting means;
With
The inclination adjusting means is provided between the holding table and the base, and includes three support portions arranged at the apex of an equilateral triangle with the center of the holding table as the center of gravity,
At least one support is capable of changing a distance between the holding table and the base;
The control unit adjusts the inclination so that the distance measured by the measurement unit and the distance stored by the storage unit coincide with each other while the grinding unit grinds the plate-like workpiece held by the holding table. Control means,
Grinding equipment.   The grinding apparatus according to claim 1, wherein the three measurement units and the three support units are alternately and evenly arranged.   The grinding device according to claim 1, wherein the measurement unit and the support unit are arranged on a straight line in a radial direction of the holding table. A grinding method using the grinding apparatus according to any one of claims 1 to 3,
The distance between the holding table and the base when the first plate-like workpiece held by the holding table is ground by the grinding means and the first plate-like workpiece is ground into a predetermined shape. Storing the distance measured by the measurement unit in the storage unit,
A measuring step of measuring the distance between the holding table and the base by the measuring unit while grinding the second plate-like work held by the holding table by the grinding means;
An inclination adjusting step in which the control unit controls the inclination adjusting means so that the distance measured in the measuring step and the distance stored in the storing step coincide with each other;
A grinding method comprising:

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