JP6139197B2 - RIP device, image recording device, RIP method and program - Google Patents

Description

  The present invention relates to a technique for converting CAD data used for circuit formation into raster data input to an image recording apparatus.

  Conventionally, when a circuit pattern is drawn on a substrate such as a glass substrate, a resin substrate, or a semiconductor substrate, an image recording apparatus that directly records an image by irradiating spatially modulated light is used. For example, in Patent Documents 1 and 2, an image is recorded on a substrate using a reflective and diffraction grating spatial light modulator in which movable ribbons and fixed ribbons are alternately arranged.

JP 2009-237415 A JP 2010-66415 A

  Incidentally, when images are recorded in Patent Documents 1 and 2, raster data for recording is generated from CAD data that is vector data. In recent years, CAD data has become more complicated as circuit patterns become finer and more complex, but in reality, when converting CAD data to raster data, the photosensitive characteristics and etching characteristics of the photosensitive material on the substrate are affected. In addition, sizing, which is a correction for thinning or thickening the linear pattern, is performed. At this time, there arises a problem that pattern elements such as lines and dots that are originally required become finer than the recordable line width and are not recorded.

  The present invention has been made in view of the above problems, and an object of the present invention is to prevent a pattern element originally necessary from being recorded due to the effect of sizing and to generate appropriate raster data from CAD data.

  The invention according to claim 1 is an RIP device that converts CAD data used for circuit formation into raster data input to an image recording device, an initial data generation unit that generates initial raster data from CAD data; In a sizing unit that performs correction processing including a change in line width in the initial raster data, and in the raster data that has been corrected by the sizing unit, a pixel having a pixel value of 0 or 1 is in the recording direction of the image recording apparatus. Among consecutive runs, a run that is not less than a recovery lower limit length that is predetermined based on a shortest run length that is controllable by the image recording apparatus and that is less than the shortest run length is greater than or equal to the shortest run length. A run length recovery unit that corrects the run to be run, and a run deletion unit that deletes a run shorter than the shortest run length.

  A second aspect of the present invention is the RIP device according to the first aspect, wherein the pixel value selection unit receives a selection of a pixel value of a run whose length is corrected by the run length recovery unit from an operator. Further prepare.

  A third aspect of the present invention is the RIP device according to the first aspect, wherein a length of a pixel value corresponding to a line thinned by the sizing unit is corrected by the run length recovery unit. A pixel value selection unit that selects the pixel value of the run is further provided.

  According to a fourth aspect of the present invention, there is provided an image recording apparatus comprising: the RIP device according to any one of the first to third aspects; a substrate holding unit that holds a substrate; and a substrate held by the substrate holding unit. In accordance with raster data from the RIP device, a light irradiation unit that emits light that is spatially modulated toward the light, an irradiation position moving mechanism that moves the irradiation position of the spatially modulated light on the substrate in the recording direction, The light irradiation unit and a control unit that controls the irradiation position moving mechanism, and the light irradiation unit includes a spatial modulator in which a plurality of modulation elements are aligned in a direction intersecting the recording direction.

Invention of claim 5, an image recording apparatus according to claim 4, wherein the shortest run length in said substrate, not less than 2 times the pixel pitch in the recording direction, in the substrate The pitch of the images of the plurality of modulation elements in the direction perpendicular to the recording direction is equal to the pixel pitch in the recording direction .

  A sixth aspect of the present invention is the image recording apparatus according to the fourth or fifth aspect, wherein each of the plurality of modulation elements includes a plurality of movable reflection surfaces that reflect light and a plurality of fixed reflection surfaces. It is a diffraction grating type modulation element arranged alternately.

  The invention according to claim 7 is an RIP method for converting CAD data used for circuit formation into raster data input to an image recording apparatus, and an initial data generation step of generating initial raster data from CAD data; In the sizing process for performing the correction process including the change of the line width in the initial raster data, and the raster data after the correction in the sizing process, the pixel having one pixel value of 0 or 1 is in the recording direction of the image recording apparatus. Among consecutive runs, a run that is not less than a recovery lower limit length that is predetermined based on a shortest run length that is controllable by the image recording apparatus and that is less than the shortest run length is greater than or equal to the shortest run length. A run length recovery step that corrects the run to be run, and a run deletion step that deletes a run shorter than the shortest run length.

  The invention according to claim 8 is a program for causing a computer to convert CAD data used for circuit formation into raster data input to an image recording apparatus, and executing the program by the computer In an initial data generation step for generating initial raster data from data, a sizing step for performing correction processing including a change in line width in the initial raster data, and raster data corrected by the sizing step, either 0 or 1 Of the runs in which pixels of one pixel value are continuous in the recording direction of the image recording apparatus, the recovery lower limit length that is predetermined based on the shortest run length that is the length of the shortest run that can be controlled by the image recording apparatus and A run length recovery step of correcting a run shorter than the shortest run length to a run longer than the shortest run length; and To execute the run deletion step for deleting a run of less than a short run length.

  According to the present invention, it is possible to generate appropriate raster data in consideration of the effect of sizing from CAD data.

It is a side view of an image recording device. It is a top view of an image recording device. It is a figure which shows a spatial light modulator. It is a figure which shows the cross section of a light modulation element. It is a figure which shows the cross section of a light modulation element. It is a figure which shows the structure of a RIP apparatus. It is a figure which shows the function structure of a RIP apparatus. It is a figure which shows the flow of operation | movement of a RIP apparatus. It is a figure which illustrates the image which CAD data shows. It is a figure which illustrates the image which initial raster data shows. It is a figure which shows the image after sizing. It is a figure which shows the image after recovery | restoration of run length. It is a figure which shows the image after deletion of a micro run. It is a figure which illustrates the raster image after run length recovery. It is a figure which illustrates the raster image when not recovering run length.

  FIG. 1 is a side view of an image recording apparatus 1 according to an embodiment of the present invention, and FIG. 2 is a plan view of the image recording apparatus 1. FIG. 1 also shows a part of the configuration related to control. The image recording apparatus 1 is an apparatus that records an image by irradiating light onto a photosensitive material on a glass substrate (hereinafter simply referred to as “substrate”) for a liquid crystal display device, and is a so-called direct drawing apparatus. As shown in FIGS. 1 and 2, the image recording apparatus 1 is a substrate that holds a substrate 9 on which a layer of a photosensitive material is formed on a main surface 91 (hereinafter referred to as “upper surface 91”) on the (+ Z) side. The holding unit 3 is provided on the base 11 so as to straddle the holding unit moving mechanism 2 that moves the substrate holding unit 3 in the X direction and the Y direction perpendicular to the Z direction, and the substrate holding unit 3 and the holding unit moving mechanism 2. A frame 12 fixed to the base 11 and a light irradiation unit 4 that irradiates spatially modulated light toward the substrate 9 held by the substrate holding unit 3 are provided.

  The light irradiation unit 4 is attached to the frame 12. Precisely, the light from the light irradiation unit 4 is applied to the photosensitive material on the substrate 9. As shown in FIG. 1, the image recording apparatus 1 includes a control unit 6 that controls each configuration of the holding unit moving mechanism 2, the light irradiation unit 4, and the like, and a RIP (Raster Image Processing) connected to the control unit 6. ) The apparatus 7 is further provided.

  The substrate holding unit 3 has a stage 31 on which the substrate 9 is placed, a support plate 33 that rotatably supports the stage 31, and a rotation axis 321 perpendicular to the upper surface 91 of the substrate 9 on the support plate 33. A stage rotation mechanism 32 that rotates the stage 31 is provided.

  The holding unit moving mechanism 2 includes a sub-scanning mechanism 23 that moves the substrate holding unit 3 in the X direction in FIGS. 1 and 2 (hereinafter referred to as “sub-scanning direction”), and a support plate 33 via the sub-scanning mechanism 23. And a main scanning mechanism 25 that continuously moves the substrate holder 3 together with the base plate 24 in the Y direction perpendicular to the X direction (hereinafter referred to as “main scanning direction”). In the image recording apparatus 1, the holding unit moving mechanism 2 moves the substrate holding unit 3 in the main scanning direction and the sub scanning direction parallel to the upper surface 91 of the substrate 9.

  As shown in FIGS. 1 and 2, the sub-scanning mechanism 23 is arranged on the lower side of the support plate 33 (that is, on the (−Z) side) parallel to the main surface of the stage 31 and perpendicular to the main scanning direction. A linear motor 231 extending in the scanning direction and a pair of linear guides 232 extending in the sub-scanning direction on the (+ Y) side and the (−Y) side of the linear motor 231 are provided. The main scanning mechanism 25 extends below the base plate 24 in the main scanning direction on the linear motor 251 extending in the main scanning direction parallel to the main surface of the stage 31 and on the (+ X) side and (−X) side of the linear motor 251. A pair of air sliders 252 and a linear scale (not shown) are provided.

  As shown in FIG. 2, the light irradiation unit 4 includes a plurality (eight in the present embodiment) of optical heads 41 arranged at an equal pitch along the sub-scanning direction and attached to the frame 12. As shown in FIG. 1, the light irradiation unit 4 includes a light source optical system 42 connected to each optical head 41, a UV light source 43 that emits ultraviolet light, and a light source driving unit 44. The UV light source 43 is a solid-state laser, and when the light source driving unit 44 is driven, ultraviolet light having a wavelength of 355 nm, for example, is emitted from the UV light source 43 and guided to the optical head 41 via the light source optical system 42.

  Each optical head 41 is provided with an emission unit 45 that emits light from the UV light source 43 downward, an optical system 451 that reflects light from the emission unit 45 and guides it to the spatial light modulator 46, and an optical system 451. The spatial light modulator 46 that reflects the light from the emitting unit 45 while modulating it, and the optical system 47 that guides the modulated light from the spatial light modulator 46 onto the photosensitive material provided on the upper surface 91 of the substrate 9. Is provided.

  FIG. 3 is an enlarged view of the spatial light modulator 46. As shown in FIG. 3, the spatial light modulator 46 includes a plurality of diffraction grating type light modulation elements 461 that guide the light from the emitting portion 45 to the upper surface 91 of the substrate 9. The plurality of light modulation elements 461 are arranged in a line, and the arrangement direction thereof corresponds to the sub-scanning direction. The light modulation element 461 is manufactured using a semiconductor device manufacturing technique, and is a diffraction grating capable of changing the depth of the grating. In the light modulation element 461, a plurality of flexible ribbons 461a and fixed ribbons 461b are alternately arranged in parallel, and the plurality of flexible ribbons 461a can be individually moved up and down with respect to the reference plane on the back, and a plurality of fixed ribbons are arranged. The ribbon 461b is fixed with respect to the reference plane. As a diffraction grating type light modulation element, for example, GLV (Grating Light Valve) (registered trademark of Silicon Light Machines (Sunnyvale, Calif.)) Is known.

  FIG. A and FIG. B is a view showing a cross section of the light modulation element 461 in a plane perpendicular to the flexible ribbon 461a and the fixed ribbon 461b. FIG. As shown in A, when the flexible ribbon 461a and the fixed ribbon 461b are located at the same height with respect to the reference surface 461c (that is, the flexible ribbon 461a does not flex), the surface of the light modulation element 461 is a surface. The reflected light of the incident light L1 is derived as zero-order diffracted light (regularly reflected light) L2. On the other hand, FIG. As shown in B, when the flexible ribbon 461a bends to the reference surface 461c side with respect to the fixed ribbon 461b and the height difference between the flexible ribbon 461a and the fixed ribbon 461b becomes a predetermined amount, the flexible ribbon 461a. Becomes the bottom surface of the groove of the diffraction grating, the first-order diffracted light L3 (and higher-order diffracted light) is derived from the light modulation element 461, and the zero-order diffracted light L2 disappears.

  In the light irradiation unit 4 shown in FIG. 1, the light from the UV light source 43 is converted into linear light (light having a light beam cross-section linear) by the light source optical system 42, and the line of the spatial light modulator 46 is passed through the emission unit 45. Irradiation is performed on a plurality of flexible ribbons 461a and fixed ribbons 461b. In the light modulation element 461, when each adjacent one flexible ribbon 461a and fixed ribbon 461b is one ribbon pair, three or more ribbon pairs correspond to one pixel of a pattern to be drawn. Of course, the light modulation element 461 may be one ribbon pair, and one ribbon pair may correspond to one pixel.

  In the light modulation element 461, the flexible ribbon 461a of the ribbon pair corresponding to each pixel of the pattern is controlled based on the signal from the modulator control unit 60 connected to each spatial light modulator 46, and the 0th-order diffracted light is converted. The transition is made individually between the state of emitting and the state of emitting non-zero order diffracted light (mainly (± 1) order diffracted light). The 0th-order diffracted light emitted from the light modulation element 461 is guided to the optical system 47, and the non-zeroth-order diffracted light is guided in a direction different from that of the optical system 47. In order to prevent stray light from being generated, the first-order diffracted light is shielded by a light shielding unit (not shown).

  The 0th-order diffracted light from the light modulation element 461 is guided to the upper surface 91 of the substrate 9 through the optical system 47, and thereby a plurality of lines aligned in the X direction (that is, the sub-scanning direction) on the upper surface 91 of the substrate 9. The modulated light is irradiated to each irradiation position.

  In the image recording apparatus 1 shown in FIGS. 1 and 2, the light modulated from the light modulation element 461 of the light irradiation unit 4 is applied to the substrate 9 moved in the main scanning direction by the main scanning mechanism 25 of the holding unit moving mechanism 2. Is irradiated. In other words, the main scanning mechanism 25 sets the position of the irradiation region on the substrate 9 (that is, the irradiation position) of the light guided from the light modulation element 461 to the substrate 9 relative to the substrate 9 continuously. In particular, the irradiation position moving mechanism moves in the main scanning direction. In the image recording apparatus 1, the irradiation position on the substrate 9 may be moved in the main scanning direction by moving the optical head 41 in the main scanning direction without moving the substrate 9. In the image recording apparatus 1, an image showing a circuit pattern is recorded on the substrate 9 by controlling the modulation of light from the light modulation element 461 by the modulator control unit 60 of the control unit 6.

  FIG. 5 is a block diagram showing a configuration of the RIP device 7. CAD data used for circuit formation is prepared in advance in the RIP device 7. CAD data is vector data. The RIP device 7 generates binary raster data that is input to the control unit 6 of the image recording device 1 from the CAD data. The control unit 6 controls the light irradiation unit 4, the main scanning mechanism 25, the sub scanning mechanism 23, and the like according to the raster data.

  The RIP device 7 has a general computer system configuration in which a CPU 71 that performs various arithmetic processes, a ROM 72 that stores basic programs, and a RAM 73 that stores various information are connected to a bus line. The bus line further includes a fixed disk 74 for storing information, a display 75 for displaying various information such as images, a keyboard 76a and a mouse 76b (hereinafter referred to as “input unit 76”) for receiving input from the operator. ), A reading device 77 that reads information from a computer-readable recording medium 8 such as an optical disk, a magnetic disk, a magneto-optical disk, and a communication unit 78 that transmits and receives signals to and from the control unit 6 and other devices. As appropriate, they are connected via an interface (I / F).

  The RIP device 7 reads the program 80 from the recording medium 8 via the reader 77 in advance and stores it in the fixed disk 74. The CPU 71 executes arithmetic processing according to the program 80 while using the RAM 73 and the fixed disk 74.

  FIG. 6 is a block diagram showing a functional configuration realized by the RIP device 7 executing the program 80. The initial data generation unit 701, the sizing unit 702, the run length recovery unit 703, and the minute run deletion unit 704 are functions realized by arithmetic processing of the CPU 71. The pixel value selection unit 705 is a function realized by the arithmetic processing of the CPU 71 and the input unit 76. The storage unit 706 is realized by the RAM 73 and the fixed disk 74. The storage unit 706 stores CAD data 801 generated by a CAD device in advance.

  FIG. 7 is a diagram showing a flow of operation of the RIP device 7. In the RIP device 7, first, the initial data generation unit 701 generates initial raster data from the CAD data 801 (step S11). 8 and 9. A is a diagram illustrating a state in which initial raster data is generated. The pixels 810 are two-dimensionally arranged at equal intervals in the row direction and the column direction. A thick solid line 811 in FIG. 8 is a line indicated by the CAD data 801. FIG. A region 821 with parallel diagonal lines in A indicates a pixel region with a pixel value “1” in the image indicated by the initial raster data, and a region 822 without parallel diagonal lines indicates a region with a pixel value “0”. Show. 8 corresponding to the inclined portion 812 of the solid line 811 in FIG. The boundary 823 of A is zigzag, and the inclined portion 812 and the boundary 823 do not coincide.

  FIG. The vertical direction of A is the column direction of the raster image indicated by the initial raster data, and corresponds to the recording direction. The recording direction is a moving direction of the irradiation position on the substrate 9 of the light from the light irradiation unit 4 by the main scanning mechanism 26. The initial raster data is in a run-length format, and is a run in which the pixel values continuously arranged in the column direction are “0” pixel rows and a pixel row in which the pixel values successively arranged in the column direction are “1”. A set with orchids. FIG. In A, one of the runs with a pixel value of “0” is illustrated by a region 832 with a fine parallel diagonal line, and one of the runs with a pixel value of “1” is shown in a region 831 with a fine parallel diagonal line. Illustrate.

  The initial raster data is sized by the sizing unit 702 (step S12). Sizing is a correction process for compensating for a difference between a circuit pattern to be recorded and a circuit pattern actually formed. Therefore, the sizing depends on the photosensitive characteristics and etching characteristics of the photosensitive material on the substrate 9. The sizing includes at least a change of the line width in the initial raster data, and correction such as adding a figure to a corner or deleting a part of the corner is performed as necessary.

  FIG. B is shown in FIG. It is a figure which shows the example which performed sizing to the image shown to A. FIG. FIG. In B, a thinning process is performed on a region 821 having a strip-like pixel value “1” extending in the horizontal direction, and the upper portion and the lower portion of the region 821 are deleted by two pixels in the vertical direction. Thereby, the vertical width of the region 821 is narrowed. In practice, the length of each run is corrected. In addition, when the fattening process is performed on the region 822, the length of the region 821 in the vertical direction is shortened almost similarly.

  In the raster data after sizing, it is confirmed whether or not the gradation inversion which is the replacement of the pixel values “0” and “1” is necessary (step S13). If the inversion is necessary, the gradation inversion is performed. (Step S14). The gradation inversion may be performed on the initial raster data by the initial data generation unit 701. Furthermore, a function for gradation inversion may be provided independently of other functions. At this stage, a pixel having a pixel value “0” indicates a pixel position on the substrate 9 that is not irradiated with light, and a pixel having a pixel value “1” indicates a pixel position that is irradiated with light.

  The raster data after sizing is further corrected by the run length recovery unit 703. The run length recovery unit 703 recovers the run length that has become shorter than the shortest run length that can be recorded by the image recording apparatus 1 by sizing, even though the run should originally exist. The recovery of the run length is performed on a pixel having a pixel value “0” or a pixel “1”. The selection of the pixel value of the run whose length is to be restored (step S15) may be performed manually, or may be performed semiautomatically partially automated. When manually performed, the input unit 76 that receives an input of pixel value selection from the operator functions as the pixel value selection unit 705. When performed semi-automatically, a part of the function of the pixel value selection unit 705 is realized by the CPU 71 or the like.

  Specifically, the run length of the pixel value “0” in the raster data input to the run length recovery unit 703 is shortened by the sizing unit 702 or the run length of the pixel value “1”. However, when the length is increased by the sizing unit 702, the pixel value selection unit 705 automatically selects the pixel value “0”. Conversely, when the run length of the pixel value “1” in the raster data input to the run length recovery unit 703 is shortened by the sizing unit 702 or the run length of the pixel value “0” is When the length is increased by the sizing unit 702, the pixel value selection unit 705 automatically selects the pixel value “1”.

  Generally speaking, the pixel value selection unit 705 uses the pixel value corresponding to the line that is thinned during sizing by the sizing unit 702 as the pixel value of the run whose length is corrected by the run length recovery unit 703. select. The selection of the pixel value may be performed before the gradation inversion in step S14. In this case, the selected pixel value is a value obtained by inverting the pixel value to be selected after gradation inversion.

  In the run length recovery process (step S16), for example, the image recording apparatus 1 cannot record a run with a length of less than 5 pixels, and a run of 5 pixels or more becomes less than 5 pixels by sizing. In this case, the length of this run is restored to 5 pixels or more. Here, the length of one pixel in the recording direction is equal to one pixel pitch. The length of the shortest run that can be controlled by the image recording apparatus 1 (hereinafter referred to as “shortest run length”) depends on the image recording apparatus 1. Further, the shortest run length to be recovered (hereinafter referred to as “recovery lower limit length”) depends on the capability of the apparatus and the sizing method, and thus is set variously. The run length recovery unit 703 corrects a run that is greater than or equal to a predetermined recovery lower limit length and less than the shortest run length based on the shortest run length to a run that is greater than or equal to the shortest run length. Preferably, a run having a length equal to or greater than the recovery lower limit length is recovered to the shortest run length or a length close to the shortest run length exceeding the shortest run length. For example, the run length after recovery is equal to or shorter than the shortest run length plus 4 pixels.

  Although it is possible to shorten the shortest run length to one pixel by using a circuit that switches ON / OFF of light irradiation to the substrate 9 at high speed, the recording speed is increased and the manufacturing cost of the image recording apparatus 1 is increased. In the image recording apparatus 1 according to the present embodiment, the shortest run length is 2 pixels or more.

  FIG. C is a diagram illustrating a raster image whose run length has been recovered. FIG. In the example of C, FIG. Among the runs with the pixel value “1” in B, the lengths of the run lengths of less than 5 pixels and 3 pixels or more are restored by 1 pixel in the vertical direction. FIG. B and FIG. In C, reference numeral 833 is assigned to one of the recovery target runs. As a result, the run length of the run 833 becomes 5 pixels. In addition, although the thing with a run length of 4 pixels becomes 6 pixels, it may be recovered to 5 pixels. With the recovery of the run length, the run length of 3 or 4 pixels becomes 5 pixels or more which is the shortest run length.

  Next, the micro-run deletion unit 704 deletes micro-runs having a length less than the shortest run length that cannot be used for image recording from the raster data after the run length is recovered (step S17). Actually, the gradation of the run is inverted. Further, after gradation reversal, it may be combined with runs adjacent in the (± Y) direction to form one run. In the case of this operation example, a run having a length of less than 5 pixels is deleted. As a result, FIG. A region 834 where the pixel value of C is “1” and the run length is 1 pixel is shown in FIG. Deleted as shown in D. By deleting short runs that cannot be recorded by the image recording apparatus 1, an unintended malfunction of the image recording apparatus 1 can be prevented.

  Thereafter, the raster data is sent to the control unit 6, and the control unit 6 controls the light irradiation unit 4, the main scanning mechanism 26, the sub-scanning mechanism 23, etc., so that the raster data on the substrate 9 corresponding to the pixel value “1”. The position is irradiated with light, and a circuit pattern is recorded on the substrate 9 (step S18).

  As described above, by providing the run length recovery unit 703 in the RIP device 7, it is possible to prevent the originally required pattern from being recorded due to the influence of sizing.

  FIG. FIG. 10A is a diagram illustrating a raster image when run length recovery is performed by the run length recovery unit 703. FIG. B is a diagram illustrating a raster image when run length recovery is not performed. FIG. A and FIG. In B, the pattern indicated by the vector data is indicated by a white line. A gray area indicates an area having a pixel value “1”, and a black area indicates an area having a pixel value “0”. At the time of sizing, the area of the pixel value “1” is reduced, and at the time of recovery of the run length, the run whose length is to be recovered among the runs of the pixel value “1” extends in the recording direction.

  As can be seen by comparing these figures, if the run length is not recovered, pattern elements such as fine lines, sharp corners, and dots may be lost due to the effect of sizing, but the image recording apparatus including the RIP device 7 may be lost. In 1, the unintentional deletion of these originally required pattern elements is prevented. As a result, appropriate raster data can be generated from CAD data. In addition, prevention of unintentional deletion of pattern elements only needs to be realized in a necessary part as a circuit pattern, and the concept of “prevention of deletion” which is not intended here includes “suppression of deletion”. And That is, in the image recording apparatus 1, it is possible to prevent the originally required pattern elements from being recorded.

  The reduction of the region having the pixel value “1” during sizing is similar to the enlargement of the region having the pixel value “0”. By the process of thickening the line having the pixel value “0”, the linear region having the pixel value “1” sandwiched between the two lines having the pixel value “0” is thinned. As described above, the pixel value of the run that requires the recovery of the run length is a pixel value corresponding to a line that becomes thinner during sizing.

  Even if sizing is not performed, the run length may be recovered. As a result, for example, a line that was conscious of its existence at the time of CAD data generation is prevented from being deleted unintentionally due to the generation of initial raster data and the deletion of a minute run. In this case, the pixel value of the run whose run length is restored is set by the operation of the operator.

  The image recording device 1 and the RIP device 7 can be variously modified.

  For example, the arrangement direction of the light modulation elements 461 may be inclined with respect to the sub-scanning direction (more precisely, the direction at the position of the element corresponding to the sub-scanning direction). That is, the arrangement direction is a direction intersecting the recording direction which is the main scanning direction.

  If the shortest run length is 1 pixel, recording is possible even if the line width in the main scanning direction is narrowed after sizing, so that a technique for recovering the run length becomes unnecessary. Therefore, in the image recording apparatus 1 employing the run length recovery, the shortest run length is 2 pixel pitch or more in the recording direction. In general, since the pitches of the pixels in the row direction and the column direction are equal, the pitch in the direction perpendicular to the recording direction of the images of the plurality of light modulation elements 461 is equal to the pixel pitch in the recording direction. Therefore, normally, the shortest run length is at least twice the pitch in the direction perpendicular to the recording direction of the images of the plurality of light modulation elements 461.

  When recovering the run length, only one pixel may be added to one side of the run recording direction. Of course, two or more pixels may be added to one side or both sides of the run. The number of pixels added to the run when recovering the run length is determined in advance based on the sizing mode. Preferably, the run shortened by sizing is the shortest run length or slightly smaller than the shortest run length. It is determined to recover to a long run length. The shortest run length refers to the shortest run length that can be controlled in the device specifications, and does not necessarily match the shortest run length that the device can exhibit beyond the specifications.

  The pixel values “0” and “1” in the above embodiment are merely formally determined, and other values may be used. For example, pixel values “0” and “255” or pixel values “0” and “511” may be used. “0” may correspond to light irradiation, and “1” may correspond to non-irradiation.

  Further, the raster data is not limited to binary data, and the run length recovery processing described above may be performed even in the case of multi-value data. For example, it may be run length data including a value corresponding to light irradiation, a value corresponding to non-irradiation, and an intermediate value between these values. At an intermediate value, half irradiation is performed to irradiate light of intermediate intensity. Even in the case of multi-value raster data, if one of light irradiation and non-irradiation corresponds to the pixel value “0” and the other corresponds to the pixel value “1”, the run length recovery unit sets 0 and Of the runs of any one of the pixel values, a run that is not less than the recovery lower limit length and less than the shortest run length is corrected to a run that is not less than the shortest run length.

  In the pixel value selection unit 705, pixel values may all be automatically selected including the case where sizing is not performed. The raster data is not limited to the run length format.

  In the RIP device 7, the initial data generation unit 701, the sizing unit 702, the run length recovery unit 703, or the minute run deletion unit 704 may be appropriately realized by an individual calculation unit. One RIP device 7 may be connected to a plurality of image recording mechanisms. That is, in the image recording apparatus 1, a plurality of combinations of parts other than the RIP device 7 may be provided. The program 80 may be taken into the RIP device 7 via a communication line.

  In the image recording apparatus 1, the signal light used for recording is not necessarily 0th order diffracted light, and the first order diffracted light may be signal light. Further, the relative positional relationship between the flexible ribbon 461a and the fixed ribbon 461b that is not bent differs from the above embodiment, and the light modulation element that emits the 0th-order diffracted light when the flexible ribbon 461a is bent. 461 may be used.

  The flexible ribbon 461a and the fixed ribbon 461b do not need to have a strict ribbon shape as long as the flexible ribbon 461a and the fixed ribbon 461b can be regarded as a belt-like movable reflective surface and a fixed reflective surface, respectively. For example, the block-shaped upper surface may serve as a reflecting surface of the fixed ribbon.

  The light modulation element 461 is not limited to the diffraction grating type, and may be a liquid crystal shutter, for example. Furthermore, the light modulation element 461 is not limited to one that reflects light. For example, a laser array may serve as the light modulation element 461.

  The substrate 9 may be moved by other methods as long as it can move relative to the optical head 41. The recording medium for holding image information may be coated with a photosensitive material such as a printed wiring board or a semiconductor substrate, or may be other photosensitive material, and reacts to heat caused by light irradiation. It may be a material. Accordingly, the size of one pixel also varies. For example, the pixel pitch may be several μm, and may be several tens μm or several hundreds μm. The image recording apparatus 1 is suitable for an apparatus that records an image at a high speed, and is particularly suitable for a direct drawing process on a semiconductor substrate in a subsequent process when manufacturing a semiconductor device.

  The configurations in the above-described embodiments and modifications may be combined as appropriate as long as they do not contradict each other.

DESCRIPTION OF SYMBOLS 1 Image recording device 3 Board | substrate holding part 4 Light irradiation part 6 Control part 7 RIP apparatus 9 Board | substrate 25 Main scanning transfer mechanism (irradiation position moving mechanism)
46 Spatial modulator 80 Program 461 Modulating element 461a Flexible ribbon (movable reflective surface)
461b Fixed ribbon (fixed reflective surface)
701 Initial data generation unit 702 Sizing unit 703 Run length recovery unit 704 Small run deletion unit 705 Pixel value selection unit 801 CAD data 802 Raster data S11, S12, S16, S17 Steps

Claims (8)

A RIP device that converts CAD data used for circuit formation into raster data input to an image recording device,
An initial data generation unit for generating initial raster data from CAD data;
A sizing unit that performs correction processing including a change in line width in the initial raster data;
In the raster data corrected by the sizing unit, the length of the shortest run that can be controlled by the image recording apparatus among the runs in which the pixels of any one of 0 and 1 are continuous in the recording direction of the image recording apparatus A run length recovery unit that corrects a run that is greater than or equal to a predetermined recovery lower limit length based on the shortest run length and less than the shortest run length to a run that is greater than or equal to the shortest run length;
A run deletion unit for deleting runs shorter than the shortest run length;
A RIP device comprising: The RIP device according to claim 1,
The RIP apparatus further comprising: a pixel value selection unit that accepts selection of a pixel value of a run whose length is corrected by the run length recovery unit from an operator. The RIP device according to claim 1,
A RIP device further comprising: a pixel value selection unit that selects a pixel value corresponding to a line thinned by the sizing unit as a pixel value of a run whose length is corrected by the run length recovery unit. . An image recording device,
RIP device according to any of claims 1 to 3,
A substrate holder for holding the substrate;
A light irradiating unit that irradiates spatially modulated light toward the substrate held by the substrate holding unit;
An irradiation position moving mechanism for moving the irradiation position of the spatially modulated light on the substrate in the recording direction;
A control unit for controlling the light irradiation unit and the irradiation position moving mechanism according to raster data from the RIP device;
With
The image recording apparatus, wherein the light irradiation unit includes a spatial modulator in which a plurality of modulation elements are arranged in a line in a direction crossing the recording direction. The image recording apparatus according to claim 4,
The shortest run length is, in the substrate, not less than 2 times the pixel pitch in the recording direction,
An image recording apparatus , wherein a pitch of images of the plurality of modulation elements on the substrate in a direction perpendicular to the recording direction is equal to the pixel pitch in the recording direction . The image recording apparatus according to claim 4 or 5, wherein
Each of the plurality of modulation elements is a diffraction grating type modulation element in which a plurality of movable reflection surfaces that reflect light and a plurality of fixed reflection surfaces are alternately arranged. A RIP method for converting CAD data used for circuit formation into raster data input to an image recording apparatus,
An initial data generation step of generating initial raster data from CAD data;
A sizing process for performing a correction process including a change in line width in the initial raster data;
In the raster data corrected by the sizing process, the length of the shortest run that can be controlled by the image recording apparatus among the runs in which pixels having a pixel value of either 0 or 1 continue in the recording direction of the image recording apparatus A run length recovery step of correcting a run that is greater than or equal to a predetermined recovery lower limit length based on the shortest run length and less than the shortest run length to a run that is greater than or equal to the shortest run length;
A run deletion step of deleting a run less than the shortest run length;
A RIP method comprising: A program for causing a computer to convert CAD data used for circuit formation into raster data to be input to an image recording apparatus, the computer executing the program,
An initial data generation step of generating initial raster data from CAD data;
A sizing process for performing a correction process including a change in line width in the initial raster data;
In the raster data corrected by the sizing process, the length of the shortest run that can be controlled by the image recording apparatus among the runs in which pixels having a pixel value of either 0 or 1 continue in the recording direction of the image recording apparatus A run length recovery step of correcting a run that is greater than or equal to a predetermined recovery lower limit length based on the shortest run length and less than the shortest run length to a run that is greater than or equal to the shortest run length;
A run deletion step of deleting a run less than the shortest run length;
A program characterized by having executed.