JP6136902B2 - Washing and drying apparatus and washing and drying method - Google Patents

Description

  The present invention relates to a method for cleaning and drying an object to be cleaned on which processing oil or the like adheres to the surface, and a cleaning and drying apparatus used in the method.

For example, an injector or a pump of an automobile requires a complicatedly shaped part having fine irregularities on the surface. These parts are manufactured by, for example, performing grinding or cutting on a metal material.
Grinding and cutting are often performed in a state in which processing oil is applied to the metal material in advance for the purpose of reducing friction between the metal material and the processing tool. Therefore, in many cases, the processing oil adheres to the surface of the part immediately after grinding. Moreover, the metal waste produced at the time of a process may adhere to this process oil. For this reason, when manufacturing the above parts, it is necessary to perform a process of removing the processing oil adhering to the surface after performing a grinding process and the like.

  When cleaning a part to which processing oil is adhered (hereinafter also referred to as an object to be cleaned), for example, an organic solvent such as hydrofluorocarbon is used as a cleaning liquid (see Patent Document 1 below). Since organic solvents are non-polar substances, they have a high affinity for organic substances such as processing oil. Therefore, if an organic solvent is used, the processing oil can be dissolved quickly, and the cleaning process can be completed in a short time. In addition, since the organic solvent has a low boiling point, there is an advantage that the organic solvent remaining on the surface of the object to be cleaned can be quickly evaporated and the surface can be dried in a short time.

JP 2011-16079 A

  However, since organic solvents are relatively expensive, using organic solvents tends to increase the cost required for the cleaning process. Moreover, the organic solvent has a problem that the environmental load is high and a problem that it is not good for the health of the person who performs the work. For this reason, there is a demand to use water as a cleaning liquid as much as possible.

  However, since water is a polar substance, water hardly dissolves processing oil unless alcohol or the like is added. Therefore, when a cleaning agent having a high water content is used, it becomes difficult to clean the object to be cleaned in a short time. Further, since water has a high boiling point, using a cleaning agent mainly composed of water makes it difficult to evaporate water droplets remaining on the surface of the object to be cleaned in a short time. Therefore, there also exists a problem that a to-be-cleaned object cannot be dried quickly.

  The present invention has been made in view of such a background, and provides a cleaning / drying method capable of cleaning an object to be cleaned with water in a short time and drying it in a short time, and a cleaning / drying apparatus enabling this. It is something to try.

A first aspect of the present invention is a method of cleaning and drying an object to be cleaned with an organic substance attached to the surface,
The case with a drain outlet, the drain port and held in a state of facing upward in the gravity direction, and water above the object to be cleaned from the waste water outlet placed in the case, the said object to be cleaned within the casing immersed in water, and immersed sealing stroke closed the drain outlet,
An inversion step of inverting the case so that the drain outlet faces downward in the direction of gravity;
The subcritical water heated pressure to the water, the organic substances adhering to the surface of the object to be cleaned by dissolving the sub-critical water, and heating washing step of washing the object to be cleaned,
By opening the drain port facing downward in the direction of gravity, a discharge process for discharging the subcritical water downward from the drain port while causing the subcritical water to bump,
A drying step of evaporating the subcritical water adhering to the surface of the object to be cleaned and drying the surface;
The in washing and drying wherein the row Ukoto.

The second aspect of the present invention is a cleaning / drying apparatus for cleaning and drying an object to be cleaned with an organic substance attached to the surface,
Said the yield capacity space, and a drain outlet which communicates with the said housing space houses from exhaust directed upward in the gravity direction Mizuguchi water and the object to be cleaned, the object to be cleaned in the accommodation space A case configured to seal the drain outlet in a state immersed in water ;
Reversing means for reversing the case so that the sealed drain outlet faces downward in the direction of gravity;
Heating means for the sub-critical water by heating the water that has been sealed in the case,
Discharging means for discharging the subcritical water in the case downward in the gravitational direction while opening the drain port facing downward in the gravitational direction ,
Lying in cleaning and drying apparatus according to claim comprising a.

In the cleaning and drying method, the object to be cleaned and water are placed in the case, and the object to be cleaned is immersed in water. Then, the case is sealed, and the water in the case is heated to make the water subcritical water.
If it does in this way, organic substances, such as processing oil adhering to the surface of a thing to be washed, can be washed in a short time using water. That is, when water is heated to subcritical water, the relative dielectric constant is reduced to about room temperature and normal pressure methanol or acetone. That is, if the water is subcritical water, the lipophilicity can be made comparable to that of the organic solvent. Therefore, if this subcritical water is used, organic substances such as processing oil can be dissolved in a short time. Subcritical water has a higher hydrogen ion concentration and hydroxide ion concentration than water at normal temperature and pressure. Therefore, if subcritical water is used, the organic matter adhering to the surface of the object to be cleaned can be hydrolyzed by hydrogen ions or the like.
Thus, since subcritical water is highly lipophilic and easily hydrolyzes organic matter, using subcritical water can wash organic matter adhering to the surface of the object to be cleaned in a short time.

Moreover, in the said washing | cleaning drying method, after completion | finish of washing | cleaning, the drainage port formed in the bottom part of the said case is open | released, From this drainage port, the said subcritical water is discharged | emitted below a gravity direction, bumping.
Therefore, the surface of the object to be cleaned can be quickly dried. That is, when subcritical water is discharged out of the case, the subcritical water is exposed to the atmosphere and bumps. At this time, the subcritical water is deprived of the heat of vaporization and the temperature rapidly decreases. Therefore, if the subcritical water is slowly discharged, the temperature becomes 100 ° C. or lower during the discharge, and when the discharge is completed, water droplets of 100 ° C. or lower adhere to the surface of the object to be cleaned. There is a possibility. Since water droplets having a temperature of 100 ° C. or less take time to evaporate, the object to be cleaned cannot be dried in a short time.
However, if the subcritical water is discharged from the drain port formed at the bottom of the case as in the above washing and drying method, it can be discharged downward at a stretch using gravity before the subcritical water cools. become. Therefore, the temperature of the water droplets adhering to the surface of the object to be cleaned when the discharge is completed can be made higher than 100 ° C. Since water (subcritical water) having a temperature higher than 100 ° C. bumps in the atmosphere, it evaporates in a short time. Therefore, the surface of the object to be cleaned can be dried in a short time.

  The washing and drying apparatus includes the case and the heating means, and the drain port that can be opened and closed is formed at the bottom of the case. Therefore, if this washing / drying apparatus is used, the washing / drying method can be performed.

  As described above, according to the present invention, it is possible to provide a cleaning / drying method capable of quickly cleaning an object to be cleaned using water and drying it quickly, and a cleaning / drying apparatus enabling this.

  The “subcritical water” means water having a temperature of 100 to 374 ° C. and maintaining a liquid state.

  The “water” includes not only pure water but also water containing unavoidable impurities such as calcium and chlorine.

Explanatory drawing of the immersion process in a reference example . Explanatory drawing of the immersion process following FIG. Explanatory drawing of the immersion process following FIG. Explanatory drawing of the sealing process in a reference example . Explanatory drawing of the heat washing process in a reference example . Explanatory drawing of the discharge process in a reference example . Explanatory drawing of the drying process in a reference example . The perspective view of the washing-drying apparatus except a heating means in a reference example . FIG. 3 is an explanatory diagram of an immersion process in the first embodiment. Explanatory drawing of the sealing process in Example 1. FIG. FIG. 3 is an explanatory diagram of a heat cleaning process in the first embodiment. Explanatory drawing of the discharge process in Example 1. FIG.

  The object to be cleaned can be a precision part manufactured by applying grinding or cutting to a metal material while applying processing oil.

( Reference example)
A reference example relating to the cleaning / drying method and the cleaning / drying apparatus will be described with reference to FIGS. As shown in FIG. 5, the cleaning / drying apparatus 1 of this example includes a case 3 and a heating means 5. A housing space S is formed in the case 3. The water 4 is stored in the storage space S, and the object to be cleaned 2 is stored in a state of being immersed in the water 4. The case 3 is configured so that the accommodation space S can be sealed.

  In this example, the water 4 sealed in the case 3 is heated using the heating means 5 to form subcritical water 4 ′. Thereby, the organic matter adhering to the surface of the article to be cleaned 2 is dissolved in the subcritical water 4 ′, and the article to be cleaned 2 is washed.

  As shown in FIGS. 5 and 6, a drain port 31 that can be opened and closed is formed in the bottom 38 of the case 3. By opening the drain port 31, the subcritical water 4 ′ after the cleaning of the article to be cleaned 2 can be discharged from the drain port 31 downward in the gravity direction while bumping.

  The to-be-cleaned object 2 of this example is a precision part manufactured by applying grinding or cutting to a metal material while applying processing oil. This precision part is used for, for example, an injector and a pump of an automobile. The organic matter is processing oil remaining on the surface of the article to be cleaned 2 after grinding or the like.

  As shown in FIG. 8, the case 3 of this example includes a case main body 30, a drainage cover 32, and a water injection cover 34. The case main body 30 has a cylindrical shape. A housing space S is formed in the case main body 30. Below the housing space S, the drain port 31 is formed. A drainage cover 32 is fitted into the drainage port 31. The drain outlet 31 is opened and closed by fitting or removing the drain cover 32. A water injection hole 33 for injecting water 4 into the accommodation space S is formed above the accommodation space S. The opening 330 of the water injection hole 33 is closed using the water injection cover 34.

  In this way, the drainage cover 32 is fitted to the drainage port 31 and the opening 330 of the water injection hole 33 is closed by the water injection cover 34, thereby sealing the housing space S of the case main body 30.

  As shown in FIG. 1, the drainage cover 32 also serves as a mounting table for mounting the object to be cleaned 2. The water injection hole 33, the accommodation space S, and the drain port 31 are each formed in a cylindrical shape (see FIG. 8). In addition, as shown in FIG. 2, the size of the accommodation space S is determined so that the article to be cleaned 2 does not come into contact with the inner peripheral surface 39 of the accommodation space S.

  A heating wire 50 is wound around the case body 30. This heating wire 50 is the heating means 5 of this example. The case body 30 is made of metal. The case body 30 is provided with a temperature sensor and a pressure sensor (not shown). Using these sensors, the temperature and pressure of the heated water 4 are detected, and it can be confirmed whether or not the water 4 is subcritical water 4 '.

  Next, the cleaning and drying method of this example will be described. In this example, an immersion process (see FIGS. 1 to 3), a sealing process (see FIG. 4), a heat cleaning process (see FIG. 5), a discharge process (see FIG. 6), and a drying process (see FIG. 7). ) And do.

As shown in FIG. 1, in the immersion process, first, the object to be cleaned 2 is placed on the drainage cover 32. Then, as shown in FIG. 2, the drainage cover 32 is fitted to the drainage port 31 while the article to be cleaned 2 is accommodated in the accommodation space S. Thereafter, as shown in FIG. 3, water 4 is injected from the water injection hole 33 so that the article to be cleaned 2 is completely immersed in the water 4. As the water 4, tap water or distilled water can be used.
The immersion process is performed as described above. In addition, it is preferable that the mass of the water 4 injected into the case 3 is 100 to 1000 times the mass of the organic matter (processing oil) adhering to the surface of the article 2 to be cleaned.

  After performing the said immersion process, as shown in FIG. 4, the opening part 330 of the water injection hole 33 is plugged up using the water injection cover 34. Thereby, the accommodation space S is sealed (sealing process). When the water 4 is heated in a heating and washing process (see FIG. 5) described later, the pressure in the accommodation space S increases, and therefore, in the sealing process, the water injection cover 34 and the drainage cover 32 are moved to the case main body 30 with a strong force. Press.

  Thereafter, as shown in FIG. 5, a current is passed through the heating means 5 to generate heat, and the water 4 is heated (heating and washing process). Thereby, the water 4 sealed in the case 3 is changed to subcritical water 4 '.

  It is known that the relative permittivity of water 4 decreases as it approaches the critical temperature (374 ° C.). A low dielectric constant means a high lipophilicity. Therefore, when subcritical water 4 'is used, organic substances such as processing oil are easily dissolved. Subcritical water 4 'has a larger ion product than water at normal temperature and pressure. That is, the hydrogen ion concentration and the hydroxide ion concentration are high. Therefore, the subcritical water 4 'tends to act as an acid or a base on the organic matter. That is, the organic substance can be decomposed by the subcritical water 4 'and dissolved in water. As described above, the subcritical water 4 ′ is highly lipophilic and has a high rate of decomposing organic matter. Therefore, when the subcritical water 4 ′ is used, the organic matter adhering to the surface of the article to be cleaned 2 is rapidly dissolved. be able to.

  In the heating and washing process, the temperature of the subcritical water 4 ′ is preferably 150 to 350 ° C. If the temperature of the subcritical water 4 ′ is 150 ° C. or higher, the water droplets 40 remaining on the surface of the article to be cleaned 2 can be quickly evaporated in the discharge step (see FIG. 6) described later. Therefore, the article to be cleaned 2 can be dried in a shorter time. Moreover, when the temperature of subcritical water 4 'exceeds 350 degreeC, the ionic product of water will become small and the hydrolysis ability of organic substance will fall. Therefore, the temperature of the subcritical water 4 'is preferably 350 ° C or lower.

  Further, the temperature of the subcritical water 4 'is more preferably 200 to 350 ° C. When the temperature is within this range, the relative dielectric constant of the subcritical water 4 'is significantly reduced, and the ion product is particularly high. Therefore, if the temperature of the subcritical water 4 ′ is 200 to 350 ° C., the cleaning efficiency of the article to be cleaned 2 can be further increased.

  In this example, in the heating and washing process, the water 4 is heated to subcritical water 4 ′, and after the temperature reaches 200 ° C., the heating of the heating means 5 is stopped within a few seconds. The organic substance can be sufficiently washed in a few seconds.

  After finishing the heating and washing process, the discharging process is performed promptly. In the discharging process, the drainage cover 32 is removed from the case body 30 as shown in FIG. Thereby, the drain port 31 is opened. When the drain port 31 is opened, the subcritical water 4 is discharged downward at a stretch by the pressure in the case 3 (about 1.5 MPa at 200 ° C.) and gravity. At this time, the organic matter cleaned in the heating cleaning step (see FIG. 5) is also discharged together.

  Immediately after the discharge process, water droplets 40 of subcritical water 4 ′ are attached to the surface of the object to be cleaned 2. In the heating and cleaning process of this example, the subcritical water 4 ′ in the storage space S is discharged in a short time, so the temperature of the water droplet 40 immediately after the discharge is high and is 100 ° C. or higher. Therefore, the water droplet 40 bumps and the surface of the article to be cleaned 2 dries in a short time (drying process: see FIG. 7). When the drying process is performed, the temperature of the object to be cleaned 2 decreases due to the heat of vaporization when the water droplet 40 bumps. Therefore, it is not necessary to perform the process of cooling the article to be cleaned 2 after the drying process.

  In this example, the cleaning object 2 is placed on the drainage cover 32. Then, as shown in FIG. 6, in the discharge process, the drain cover 32 is removed to discharge the subcritical water 4 ′, and at the same time, the object to be cleaned 2 is taken out of the case body 30. As a result, as shown in FIG. 7, the object to be cleaned 2 is quickly moved out of the case main body 30, and the object to be cleaned 2 is dried here.

The effect of this example will be described. As shown in FIGS. 1 to 3, in this example, an object to be cleaned 2 and water 4 are placed in a case 3 and the object to be cleaned 2 is immersed in water 4. Then, as shown in FIGS. 4 and 5, the case 3 is sealed, and the water 4 in the case 3 is heated so that the water 4 becomes subcritical water 4 ′.
If it does in this way, organic substances, such as processing oil adhering to the surface of the to-be-cleaned object 2, can be wash | cleaned in a short time using the water 4. FIG. That is, when the water 4 is heated to become subcritical water 4 ′, the relative dielectric constant is reduced as described above, and becomes about room temperature and normal pressure methanol or acetone. That is, if the water 4 is changed to subcritical water 4 ′, the lipophilicity can be made to be about the same as that of the organic solvent. Therefore, when this subcritical water 4 'is used, organic substances such as processing oil can be dissolved in a short time. Further, the subcritical water 4 ′ has a higher hydrogen ion concentration and hydroxide ion concentration than the water 4 at room temperature and normal pressure. Therefore, if subcritical water 4 'is used, the organic substance adhering to the surface of the to-be-cleaned object 2 can also be hydrolyzed with hydrogen ions or the like.
As described above, the subcritical water 4 ′ is highly lipophilic and easily hydrolyzes the organic matter. Therefore, when the subcritical water 4 ′ is used, the organic matter adhering to the surface of the article to be cleaned 2 is washed in a short time. be able to.

Further, in this example, as shown in FIG. 6, after the cleaning of the article to be cleaned 2 is completed, the subcritical water 4 ′ is discharged downward from the drainage port 31 formed in the bottom portion 38 of the case 3 in the gravity direction while bumping. doing.
Therefore, the surface of the article to be cleaned 2 can be dried quickly. That is, when subcritical water 4 'is discharged out of the case, subcritical water 4' is exposed to the atmosphere and bumps. At this time, the subcritical water 4 'is deprived of the heat of vaporization and the temperature rapidly decreases. Therefore, if the subcritical water 4 ′ is slowly discharged, the temperature becomes 100 ° C. or lower during the discharge, and when the discharge is completed, water droplets of 100 ° C. or lower are formed on the surface of the object 2 to be cleaned. May be attached. Since water droplets having a temperature of 100 ° C. or less take time to evaporate, the object to be cleaned 2 cannot be dried in a short time.
However, if the subcritical water 4 ′ is discharged from the drain port 31 formed in the bottom 38 of the case 3 as in this example, before the subcritical water 4 ′ cools, it is pulled down at a stretch using gravity. It becomes possible to discharge. Therefore, the temperature of the water droplet 40 adhering to the surface of the article to be cleaned 2 when the discharge is completed can be made higher than 100 ° C. Since water (subcritical water) having a temperature higher than 100 ° C. bumps in the atmosphere, it evaporates in a short time. Therefore, the surface of the article to be cleaned 2 can be dried in a short time.

  In this example, as shown in FIG. 6, the object to be cleaned 2 is placed on the drainage cover 32. Therefore, the object to be cleaned 2 can be taken out of the case body 30 at the same time as the drainage cover 32 is removed and the subcritical water 4 ′ is discharged. Therefore, the article to be cleaned 2 can be dried outside the case main body 30, and the drying rate can be further increased.

  In this example, the temperature of the subcritical water 4 ′ is set to 200 to 350 ° C. in the heating and cleaning process (see FIG. 5). When the temperature of the subcritical water 4 ′ is 200 to 350 ° C., the lipophilicity can be particularly increased, and the ionic product of water is also particularly high, so that the organic matter adhering to the surface of the object to be cleaned 2 can be made shorter. It becomes possible to wash in time.

In this example, water having a mass of 100 to 1000 times the mass of the organic matter attached to the object to be cleaned 2 is injected into the accommodation space S.
If it does in this way, the cleaning efficiency of to-be-cleaned object 2 can be raised especially. That is, when the mass of water is less than 100 times the mass of the organic matter, the amount of water is too small, and the organic matter may not be completely dissolved. Further, even if the organic substance is dissolved by the subcritical water 4 ′, the organic substance may be reattached to the surface of the object to be cleaned 2.
Moreover, when the mass of water exceeds 1000 times with respect to the mass of organic substance, since the amount of water is too much, it takes a long time to heat the water, and the energy required for the heating increases. . Therefore, it is preferable that the mass of water does not exceed 1000 times the mass of the organic matter from the viewpoint of shortening the work time and saving energy.

In this example, as shown in FIG. 5, the size of the accommodation space S is determined so that the article to be cleaned 2 does not contact the inner peripheral surface 39 of the accommodation space S.
Therefore, the surface of the article to be cleaned 2 can be cleaned evenly. That is, if the article to be cleaned 2 comes into contact with the inner peripheral surface 39, the subcritical water 4 'does not reach the contacted part, and there is a possibility that the organic matter at the part cannot be cleaned. However, if the object to be cleaned 2 is not brought into contact with the inner peripheral surface 39 as in this example, such a problem does not occur, and the surface of the object to be cleaned 2 can be cleaned evenly.

  As described above, according to this example, it is possible to provide a cleaning / drying method capable of cleaning an object to be cleaned in a short time using water and drying it in a short time, and a cleaning / drying apparatus capable of this. .

(Experimental example)
An experiment was conducted to confirm the effect of the present invention. First, metal parts were ground to produce parts for use in automobile injectors. Since the processing oil used at the time of processing remains in this part, this processing oil was once removed using a conventional cleaning method.

  Thereafter, about 50 mg of a water-insoluble oil Yusilon cut arbus KZ216 manufactured by Yushiro Chemical Industry Co., Ltd. was attached to the above parts to prepare a sample of the object to be cleaned 2. Further, a pressure vessel (case 3) made of stainless steel and having an inner diameter of 30 mm, a depth of 80 mm, and an internal volume of about 55 mL was prepared, and the sample of the article to be cleaned 2 was stored in the pressure vessel. Then, about 30 g of water (deionized water) having a specific resistance at 25 ° C. of 0.1 MΩ · cm was injected, and the pressure vessel was sealed.

  The reason why the mass of the injected water is 30 g is that this mass (30 g) is 600 times the mass of the processing oil adhered to the article 2 to be cleaned, which is 600 times as large as the above-mentioned preferable range (100 to 1000 times). ).

  After sealing the pressure vessel, the pressure vessel was heated to raise the temperature of the water to 200 ° C. to make subcritical water. Thereafter, the relief valve formed at the bottom of the pressure vessel was released to discharge subcritical water. About 25 g of water slightly suspended in white was discharged from the relief valve.

Thereafter, the object to be cleaned 2 in the pressure vessel was taken out, and the amount of processing oil adhering to the surface of the object to be cleaned 2 was measured using an ultraviolet absorption method. As a result, it was 0.1 mg / dm ² or less, and it was confirmed that the processing oil was sufficiently washed.

(Example 1 )
In this example, the shape of the case 3 is changed. In this example, as shown in FIG. 9, only the drain port 31 is formed in the case main body 30, and the water injection hole 33 (see FIG. 1) is not formed. The case 3 of this example includes a case main body 30 and a drainage cover 32. In this example, the case body 30 is disposed such that the drain port 31 faces upward in the gravity direction, and the water 4 is stored in the accommodation space S. Further, a chuck jig (not shown) or the like is formed on the drainage cover 32, and the object to be cleaned 2 is attached to the chuck jig. Then, as shown in FIG. 10, the object to be cleaned 2 is put in the accommodation space S, and the drain cover 32 is fitted to the drain port 31 while the object 2 to be cleaned is immersed in the water 4.

  Thereafter, as shown in FIG. 11, the case 3 is turned upside down, and a current is supplied to the heating means 5 to generate heat. As a result, the water 4 is changed to the subcritical water 4 ′, and the organic matter adhering to the surface of the article to be cleaned 2 is dissolved in the subcritical water 4 ′.

  Next, as shown in FIG. 12, the drainage cover 32 is removed, and the subcritical water 4 ′ is discharged from the accommodation space S at a stretch. And the water droplet 40 adhering to the surface of the to-be-cleaned object 2 is bumped and dried.

  The effect of this example will be described. In this example, since the water injection hole 33 is not formed in the case main body 30, the structure of the case 3 can be simplified. Therefore, the manufacturing cost of case 3 can be reduced.

Others are the same as the reference example . Also, of the symbols used in the drawings relating to the present embodiment, those reference numerals same as those used in Reference Example, unless otherwise indicated, it represents a reference example and similar components, and the like.

  In addition, in this example, the “bottom part 38” means the bottom part of the case 3 when the discharge process is performed as shown in FIG.

DESCRIPTION OF SYMBOLS 1 Washing and drying apparatus 2 Object to be cleaned 3 Case 38 Bottom 31 Drain outlet 4 Water 4 'Subcritical water 5 Heating means S Storage space

Claims (6)

It is a method of cleaning and drying the object to be cleaned (2) with the organic substance attached to the surface,
A case (3) having a drain port (31) is held in a state where the drain port (31) is directed upward in the direction of gravity, and the object to be cleaned (2) and water (4) from the drain port (31 ). preparative placed in the case (3), the object to be cleaned in said inside the case (3) (2) was immersed in the water (4), a dip sealing process you closed the drain outlet (31),
An inversion step of inverting the case so that the drain outlet faces downward in the direction of gravity;
By heating pressurizing the water (4) critical water nitrite (4 ') by dissolving the, the organic substances adhering to the surface of the object to be cleaned (2) the sub-critical water (4' on), the object to be cleaned A heating and washing process for washing the object (2);
A discharge step of discharging the subcritical water (4 ′) downward from the drain port (31) while bouncing the subcritical water (4 ′) by opening the drain port (31) facing downward in the direction of gravity ;
A drying step of evaporating the subcritical water (4 ′) adhering to the surface of the object to be cleaned (2) and drying the surface;
Washing and drying wherein the line Ukoto. In the said immersion sealing process, the said water (4) of the mass of 100-1000 times with respect to the mass of the said organic substance is put into the said case, The washing-drying method of Claim 1 characterized by the above-mentioned.   The cleaning / drying method according to claim 1 or 2, wherein the temperature of the subcritical water (4 ') in the heat cleaning step is 200 to 350 ° C. A cleaning / drying apparatus (1) for cleaning and drying an object to be cleaned (2) having an organic substance attached to its surface,
The yield capacity space (S), said accommodation space (S) communicating with the drain port (31) and a provided from the exhaust water outlet directed upward in the gravity direction (31) Water (4) and the object to be cleaned ( 2) and a case (3 ) configured to seal the drainage port (31) in a state where the object to be cleaned (2) is immersed in the water (4) in the accommodation space (S). )When,
Reversing means for reversing the case (3) so that the sealed drain port (31) faces downward in the direction of gravity;
And heating means (5) to the case (3) the water which is enclosed in (4) heating with subcritical water (4 '),
Discharging means for discharging the subcritical water (4 ′) in the case (3) downward in the direction of gravity while opening the drain port (31) facing downward in the direction of gravity ;
Cleaning and drying apparatus comprising: a (1).   The said accommodation space (S) is formed in the magnitude | size which accommodates the said water (4) of the mass of 100-1000 times with respect to the mass of the said organic substance, The washing | cleaning of Claim 4 characterized by the above-mentioned. Drying device (1).   The water (4) is heated to 200 to 350 ° C. by the heating means (5), so that the water (4) becomes the subcritical water (4 ′). The cleaning / drying device (1) according to claim 4 or 5.

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