JP6120079B2 - Vapor deposition source - Google Patents

Description

  The present invention relates to a vapor deposition source, and in particular, relates to a vapor deposition source including a plurality of crucibles for storing an evaporation material for forming a thin film.

  Various types have been proposed as vapor deposition sources used in vacuum vapor deposition in which substances evaporated by heating in vacuum are attached to a substrate or the like. For example, a crucible type evaporation source includes a crucible for containing an evaporation material to be heated and evaporated, and the crucible is cooled (see, for example, Patent Document 1).

JP-A-7-70741

  It is efficient to use a vapor deposition source having a plurality of crucibles and perform vapor deposition while switching the crucible used for vapor deposition in a vacuum state. In this case, it is desirable to reduce the size of the vapor deposition source so that it can be accommodated in the vacuum container even if the number of crucibles increases.

  In view of such circumstances, the present invention is intended to provide an evaporation source including a plurality of crucibles that can be reduced in size.

  In order to solve the above problems, the present invention provides a vapor deposition source configured as follows.

  The vapor deposition source includes (a) a plurality of hearths having a recess and a flow path formed therein, and (b) a hearth support member that supports the hearth so that the recess is exposed. The flow paths of the hearth are connected in series.

  In the above configuration, the evaporating material is put in the hearth recess, and a cooling fluid (for example, cooling water) is allowed to flow through the hearth flow path.

  According to the said structure, the hearth used for vapor deposition is cooled by the cooling fluid which flows through the flow path of the hearth. On the other hand, the other hearth that is not used for vapor deposition has a temperature substantially equal to the temperature of the cooling water, and cools the cooling fluid flowing through the flow path of the other hearth. Therefore, it is possible to efficiently cool with a small amount of cooling fluid compared to the case of connecting the hearth flow paths in parallel or cooling the entire part in which a plurality of recesses into which the evaporation material is put is integrally formed. As a whole, the configuration can be reduced in size. Further, the plurality of hearts can be configured simply.

In the above-described configuration, the hearth has (a) a crucible inner surface that forms the recess and a crucible outer surface facing the crucible inner surface, and the crucible inner surface and the crucible outer surface are concentric hemispherical bodies; A crucible having a flange connected to the periphery of the main body; and (b) an opposing surface facing the outer surface of the crucible, and supporting the crucible with a gap between the outer surface of the crucible and the opposing surface. And a supporting portion. The hemispherical flow path is formed between the outer surface of the crucible and the facing surface. An inlet and an outlet communicating with the flow path are formed adjacent to the flange of the crucible at positions facing each other.

In this case, if the evaporation material placed in the recess of the crucible is heated by the electron beam or the like so that the position of the hemispherical center of the crucible inner surface and the outer surface of the crucible is at or near the center, the evaporation material is heated and becomes liquid. The distance between the heating section and the flow path through which the cooling fluid flows becomes substantially uniform, and the evaporation material is cooled substantially uniformly. As a result, it is possible to prevent undulation of the liquid surface of the heating portion of the evaporation material, and it is possible to increase the evaporation efficiency. Moreover, it can comprise so that a maintenance can be performed easily for every hearth.
Preferably, a center unit in which an outflow port communicating with the first flow path and an inflow port communicating with the second flow path are formed in the center of the hearth support member is fixed. The hearth is disposed on the hearth support member around the center unit so that one of the inlets of the hearths adjacent to each other and the other outlet of the hearths are adjacent to each other. The flow path of the hearth is connected in series by a pipe connecting the inlet and the outlet. One inflow port of the hearths at both ends of the hearths connected in series and the outflow port of the center unit are connected by a first pipe. The other outlet of the hearts at both ends of the hearth connected in series and the inlet of the center unit are connected by a second pipe.

  Since the vapor deposition source of the present invention can be efficiently cooled, the configuration can be reduced in size.

It is a principal part perspective view of a vapor deposition source. (Example 1) It is principal part sectional drawing of a vapor deposition source. (Example 1) It is sectional drawing of Hearth. (Example 1) It is a principal part block diagram of a vapor deposition source. (Example 1)

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

  <Example 1> The vapor deposition source 10 of Example 1 is demonstrated, referring FIGS. 1-4.

  FIG. 1 is a perspective view of a main part of the vapor deposition source 10. FIG. 2 is a cross-sectional view of the main part of the vapor deposition source 10. As shown in FIGS. 1 and 2, the vapor deposition source 10 includes a base plate 12 as a hearth support member, a center unit 20 fixed on the base plate 12, and first to fourth hearths 22, 24, 26. , 28. The center unit 20 is fixed to the center of the base plate 12, and the first to fourth hearths 22, 24, 26, and 28 are arranged around the center unit 20. The number of hearths is not limited to four, and an appropriate number can be selected.

  As shown in FIG. 2, the base plate 12 is rotatably supported via a support member 14. The base plate 12 can switch the hearth disposed at a position used for vapor deposition by an indexing mechanism (not shown).

  As shown in FIG. 2, the center unit 20 is connected to one end of the double pipe 13, the first flow path 20 s communicating between the inner flow path 13 a of the double pipe and the outlet 20 a, and the inlet A second flow path 20t that communicates 20b and the outer flow path 13b of the double pipe 13 is formed. Cooling water is supplied from the inner flow path 13a of the double pipe 13 to the first hearth 22 through the center unit 20 as indicated by a one-dot chain line 13a. The cooling water is recovered from the fourth hearth 28 through the center unit 20 to the outer flow path 13b of the double pipe 13 as indicated by a two-dot chain line 13b. The cooling water may be supplied from the outer flow path 13b of the double pipe 13 and recovered from the inner flow path 13a of the double pipe 13.

  4, the other end of the double pipe 13 is connected to a tank 15 for storing cooling water, and the double pipe 13 is connected by a pump (not shown) as indicated by an arrow 15a. Cooling water is supplied to the inner flow path 13a, and the cooling water is recovered from the outer flow path 13b of the double pipe 13 as indicated by an arrow 15b. The cooling water may be cooled by attaching a heat radiating plate to the piping through which the cooling water circulates.

  Instead of circulating the cooling water, the cooling water may be supplied from the factory utility equipment and returned to the factory utility equipment. In this case, a heat load is applied to utility equipment in the factory. On the other hand, it is preferable to circulate the cooling water as shown in FIG. 4 without using the factory utility equipment, because it is possible to prevent the factory utility equipment from being subjected to heat load.

  FIG. 3 is a cross-sectional view of the first to fourth hearths 22, 24, 26 and 28. The first to fourth hearths 22, 24, 26, 28 include a crucible support member 40 fixed to the base plate 12, a crucible 42, and a crucible facing member 44.

  The crucible 42 has a main body 42p formed with a recess 42x for containing the evaporation material, and a flange 42q connected to the periphery of the main body 42p. The flange 42q is fixed to the crucible support member 40 with bolts. The main body 42p has a hemispherical shape, and a crucible inner surface 42a that forms the recess 42x and a crucible outer surface 42b that faces the crucible inner surface 42a have a concentric hemispherical shape. The crucible 42 is made of, for example, copper, and the main body 42p has a hemispherical shape with a diameter of about 60 mm.

The crucible facing member 44 is disposed inside the crucible support member 40 and is fixed to the crucible support member 40. The crucible facing member 44 and the crucible support member 40 are support portions. The crucible facing member 44 has a facing surface 44a facing the crucible outer surface 42b of the crucible 42 with a certain distance, and a flow path 43 with a certain spacing is formed between the crucible outer surface 42b and the facing surface 44a. ing. The flow path 43 is adjacent to the flange 42q of the crucible 42 and communicates with an inlet 46 and an outlet 48 formed at opposite positions of the crucible support member 40, respectively, and as shown by an arrow 46x, the inlet 46 After passing through the flow path 43, the cooling water supplied to is discharged from the outlet 48 as indicated by an arrow 48x.

  As shown in FIG. 1, the center unit 20 and the first to fourth hearths 22, 24, 26, and 28 are connected in series by first to fifth pipes 30, 32, 34, 36, and 38, and the center. The cooling water supplied from the unit 20 passes through the first to fourth hearths 22, 24, 26, and 28 in order, and is then collected by the center unit 20.

  Specifically, one end of the first pipe 30 is connected to the outlet 20 a (see FIG. 2) of the center unit 20, and the other end of the first pipe 30 is connected to the inlet of the first hearth 22. One end of the second pipe 32 is connected to the outlet of the first hearth 22, and the other end of the second pipe 32 is connected to the inlet of the second hearth 24. One end of the third pipe 34 is connected to the outlet of the second hearth 24, and the other end of the third pipe 34 is connected to the inlet of the third hearth 26. One end of the fourth pipe 36 is connected to the outlet of the third hearth 26, and the other end of the fourth pipe 36 is connected to the inlet of the fourth hearth 28. One end of the fifth pipe 38 is connected to the outlet of the fourth hearth 28, and the other end of the fifth pipe 38 is connected to the inlet 20 b (see FIG. 2) of the center unit 20.

  The vapor deposition source 10 is disposed in a vacuum container, and in a vacuum state, the evaporation material 16 placed in the recess 42x of the hearth crucible 42 in the use position among the hearths 22, 24, 26, 28 is supplied with electrons from the electron gun. The line 18 is accelerated, converged and irradiated, and the evaporation material 16 is heated and evaporated. The electron beam 18 is deflected by a magnetic field, and control is performed so that the electron beam 18 is irradiated in the vicinity of the hemispherical center 41 of the crucible inner surface 42a and the crucible outer surface 42b.

  Since the position where the electron beam 18 is irradiated and heated is in the vicinity of the hemispherical center 41 of the crucible inner surface 42a and the crucible outer surface 42b, the heated heating portion and the flow path through which the cooling water to be cooled flows. The distance to 43 becomes substantially uniform, and the evaporation material 16 is cooled substantially uniformly. As a result, it is possible to prevent the liquid surface of the evaporating material 16 from wavy and to increase the deposition efficiency. When the vapor deposition source 10 is used, it is possible to efficiently form electrodes such as lead electrodes and pads for electronic components.

  Note that the evaporation material may be heated and evaporated by a method other than the electron beam, for example, laser irradiation. In that case, by irradiating a laser to the vicinity of the hemispherical center of the inner surface of the crucible and the outer surface of the crucible, the evaporation material is heated to be in a liquid state to the flow path through which the cooling water for cooling the evaporation material flows. Since the distance becomes substantially uniform and the evaporation material is cooled substantially uniformly, the liquid surface of the evaporation material can be prevented from undulating and the deposition efficiency can be increased.

  In the case of evaporating the material with an electron gun or the like only for some of the hearths among the plurality of hearths in which the flow paths for cooling water are connected in series, Is always cooled, and the temperature is substantially equal to the temperature of the cooling water. Since the hearth other than the hearth that evaporates the evaporating material has a function of cooling the cooling water, the cooling efficiency of the hearth evaporating the evaporating material is increased. Therefore, the cooling water can be circulated as shown in FIG.

  The evaporation source 10 can be efficiently cooled with a small amount of cooling water, compared to the case where the hearth flow paths are connected in parallel or the entire part in which a plurality of recesses into which the evaporation material is put is integrally cooled. As a whole, the configuration can be reduced in size. Further, the plurality of hearths has a simple configuration, and the crucible member can be easily and individually replaced for each hearth, and maintenance is easy.

  <Summary> As described above, when a plurality of hearth flow paths are connected in series, an evaporation source including a plurality of crucibles can be reduced in size.

  The present invention is not limited to the above embodiment, and can be implemented with various modifications.

  For example, the hearth support member that supports the hearth is not limited to a plate shape, and can be formed in an appropriate shape.

10 Deposition source 12 Base plate (Heath support member)
13 Double pipe 13a Inner flow path 13b Outer flow path 14 Support member 15 Tank 16 Evaporating material 18 Electron beam 20 Center unit 22, 24, 26, 28 Hearth 30, 32, 34, 36, 38 Piping 40 Crucible support member (support Part)
41 the center 42 crucible 42a crucible inner surface 42b Ruth crucible outer surface 42p body 42q flange 42x recess 43 channel 44 crucible facing member (support part)
44a Opposite surface 46 Inlet 48 Outlet

Claims (2)

A plurality of hearths having recesses and formed with flow paths;
A hearth support member for supporting the hearth such that the concave portion is exposed;
With
The Hearth is
A crucible inner surface forming the recess and a crucible outer surface facing the crucible inner surface, the crucible inner surface and the crucible outer surface being concentric hemispherical, and a flange connected to the periphery of the main body Having a crucible,
A support portion having a facing surface facing the crucible outer surface, and supporting the crucible with a space between the crucible outer surface and the facing surface;
Have
Between the crucible outer surface and the facing surface, the hemispherical flow path is formed,
An inlet and an outlet communicating with the flow path are formed at positions facing each other adjacent to the flange of the crucible,
The vapor deposition source, wherein the flow paths of the hearth are connected in series.   A center unit in which an outflow port communicating with the first flow path and an inflow port communicating with the second flow path are formed in the center of the hearth support member is fixed,
  The hearth is disposed on the hearth support member around the center unit so that one of the inlets of the hearths adjacent to each other and the other outlet of the hearths are adjacent to each other. By the pipe connecting the inlet and the outlet, the flow path of the hearth is connected in series,
  The inflow port of one of the hearths at both ends of the hearth connected in series and the outflow port of the center unit are connected by a first pipe,
  The other outflow port of the hearths at both ends of the hearths connected in series and the inflow port of the center unit are connected by a second pipe. Deposition source described.

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