JP6110231B2 - Vacuum pump system, method of reporting abnormal signs of vacuum pump - Google Patents

Description

  The present invention relates to an abnormality prediction technique for a vacuum pump.

  In a manufacturing process of a semiconductor device or a liquid crystal device, a vacuum pump is connected to a vacuum chamber, and a process gas introduced into the vacuum chamber is exhausted by the vacuum pump. The process gas may contain a solidified material or a material that is easily solidified, and the solidified material often accumulates inside the pump. When the solidified material accumulates inside the pump, the clearance between the rotor and the rotor or between the rotor and the casing is narrowed inside the pump. Ultimately, the solidified material clogs the clearance, and the rotation of the rotor is reduced. It is obstructed and the pump stops.

  If the pump is stopped during the manufacturing process, not only the process is stopped, but also the product (for example, a wafer or a liquid crystal substrate) may be damaged and cannot be reused. A wafer or a liquid crystal substrate damaged by such a reason is extremely difficult to recover, and a great economic loss is caused by the damage. In particular, in a batch type apparatus that processes a plurality of wafers, when a pump stop suddenly occurs during the process, the economic loss is very large.

  For this reason, conventionally, a technique has been developed in which state quantities such as temperature and pressure at the intake and exhaust ports are monitored to predict in advance the occurrence of abnormalities in the pump due to the accumulation of solidified substances. According to such a technique, it is possible to prevent an unexpected pump stop by taking measures such as cleaning based on the prediction result.

Special table 2008-534831 gazette JP 2005-9337 A

  However, with the conventional method, the amount of change in the state quantity to be monitored is small, and it has been difficult to accurately predict abnormality. For this reason, it is required to accurately predict the abnormality of the vacuum pump due to the accumulation of the solidified material.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as, for example, the following forms.

  The 1st form of this invention is provided as a vacuum pump system provided with a vacuum pump. The vacuum pump of this vacuum pump system is formed to extend in the axial direction, and is configured to rotate around the axis, a rotor having a plurality of compression stages provided on the spindle, and pressure between the plurality of compression stages. And a temperature detecting unit for detecting at least one of the temperatures between the plurality of compression stages. A vacuum pump system is provided with the alerting | reporting part which alert | reports when the detection result of a detection part is away from the predetermined value by the predetermined degree or more.

In a vacuum pump, solidified material accumulates inside the pump, and when the clearance between the rotor and the rotor or between the rotor and the casing decreases, the compression ratio before and after the compression stage where the accumulation has occurred changes. In the vicinity thereof, the influence of pressure and temperature is noticeable. According to the above-described vacuum pump system, it is possible to detect at least one of pressure and temperature in the immediate vicinity of the compression stage where the influence of solidified deposits appears. Based on the detection result, abnormal prediction of the vacuum pump due to solidified deposits is predicted. Can be performed with high accuracy. In addition, the system administrator can appropriately grasp an abnormality sign caused by the accumulation of the solidified material by notification. Therefore, by stopping the operation of the vacuum pump system at an appropriate timing and taking necessary measures such as cleaning and replacement of the pump, the vacuum pump will be stopped at an unexpected timing, resulting in a great loss. Can be suppressed.

  As a second aspect of the present invention, in the first aspect, the rotor may be a roots type rotor. The detection unit may detect at least one of a pressure and a temperature of the gas passage between the plurality of compression stages. According to this form, in the Roots type vacuum pump, it is possible to accurately predict the abnormality of the vacuum pump due to the accumulation of the solidified material.

  As a third aspect of the present invention, in the second aspect, the rotor may have three or more compression stages. The detection unit may detect at least one of pressure and temperature in each of two adjacent compression stages among the three or more compression stages. According to this mode, since at least one of pressure and temperature can be detected in the vicinity of each compression stage where solidified substances may be deposited, the accuracy of abnormality prediction is further improved.

  As a fourth aspect of the present invention, in the first aspect, the rotor may be a screw rotor having a plurality of screw stages as compression stages. The detection unit may detect at least one of pressure and temperature between the plurality of screw stages. According to this form, in the screw type vacuum pump, it is possible to accurately predict the abnormality of the vacuum pump due to the accumulation of the solidified material.

  As a fifth aspect of the present invention, in the fourth aspect, at least one of the plurality of screw stages has a protruding portion that protrudes in the radial direction so as to go around two or more times around the axis. You may have a shape. The detection unit may detect at least one of pressure and temperature between the protrusions formed so as to circulate two or more times. According to this embodiment, since at least one of pressure and temperature is detected at the intermediate position of the compression stage in addition to the interval between the plurality of compression stages, the solidified material is accumulated at the intermediate position of the compression stage. Even if it exists, the said deposition can be detected accurately. As a result, the accuracy of abnormality prediction is further improved.

  The 6th form of this invention is provided as a vacuum pump system provided with a vacuum pump. The vacuum pump of this vacuum pump system is formed to extend in the axial direction, and is a main shaft that rotates about the axis, and a rotor that is provided on the main shaft, and is arranged in the radial direction so as to go around two or more times around the axis. A rotor having a projecting portion that protrudes in a screw shape and a detecting unit that detects at least one of pressure and temperature between the projecting portions formed to circulate two or more times. A vacuum pump system is provided with the alerting | reporting part which alert | reports when the detection result of a detection part is away from the predetermined value more than the predetermined degree. According to such a vacuum pump system, at least one of the pressure and the temperature is detected in the immediate vicinity of the protruding portion where the influence of the solidified product appears. Based on the detection result, the abnormality of the vacuum pump due to the solidified product is predicted. It can be performed with high accuracy. Further, even in a screw type vacuum pump having only one compression stage, abnormality prediction can be performed with high accuracy. Furthermore, the system administrator can appropriately grasp a sign of abnormality caused by the accumulation of the solidified material by notification.

As a seventh aspect of the present invention, in the sixth aspect, the detection unit may detect at least one of pressure and temperature for every predetermined number of turns of the protrusion. According to this form, the detection locations in the direction in which the gas is compressed are uniformly distributed, so that the accuracy of abnormality prediction can be improved efficiently.

  The 8th form of this invention is provided as an alerting | reporting method of the abnormal sign of a vacuum pump provided with a some compression stage. This method detects at least one of a pressure between a plurality of compression stages and a temperature between a plurality of compression stages, and notifies when the detection result is away from a predetermined value by a predetermined degree or more. I do. According to this method, the same effect as that of the first embodiment is obtained.

  The ninth aspect of the present invention is provided as a method for notifying an abnormality sign of a vacuum pump including a rotor in which a projecting portion projecting in a radial direction so as to circulate two or more times around the axis of the main shaft is formed in a screw shape. The This method detects at least one of pressure and temperature between protrusions formed so as to circulate two or more times, and notifies when the detection result is away from a predetermined value by a predetermined degree or more. . According to this method, the same effects as in the sixth embodiment are obtained.

  Any of the second to fifth embodiments can be applied to the eighth embodiment. The seventh embodiment can be applied to the ninth embodiment. Further, the present invention is not limited to the above-described form, and can be realized in various forms such as a vacuum pump and a vacuum pump abnormality prediction method.

It is sectional drawing which shows schematic structure of the vacuum pump system as 1st Example of this invention. It is a schematic sectional drawing in alignment with the AA sectional line shown in FIG. It is explanatory drawing which shows typically the influence on the pressure and temperature by adhesion of a solidified material. It is sectional drawing which shows schematic structure of the vacuum pump system as 2nd Example.

A. First embodiment:
FIG. 1 shows a schematic cross section of a vacuum pump system 10 as a first embodiment of the present invention. The vacuum pump system 10 includes a booster pump 20, a main pump 50, and a control unit 90. The booster pump 20 and the main pump 50 are roots-type dry vacuum pumps, and are used for sucking process gas in a semiconductor device manufacturing process.

  The booster pump 20 includes a pair of main shafts 21, a pair of bearings 22 and 23, a pair of motors 24, a pair of rotors 30, and a casing 40. In FIG. 1, only one of the pair of constituent elements is shown. The main shaft 21 is formed so as to extend in the direction of the axis AL1, and is supported by bearings 22 and 23 so as to be rotatable about the axis AL1. The motor 24 provides rotational power to the main shaft 21. The motor 24 may be shared by the pair of main shafts 21. Further, the booster pump 20 is not limited to a biaxial type, and may be a single axis type. The rotor 30 includes a first compression stage (first stage rotor) 31 and a second compression stage (second stage rotor) 32, which are provided on the main shaft 21 along the axis AL1.

  The casing 40 is formed with an intake port 41, an exhaust port 42, gas passages 43, 44, 46, and an intermediate intake port 45. When the pair of rotors 30 rotate in the reverse direction synchronously, the process gas in the vacuum chamber (not shown) flows into the booster pump 20 through the intake port 41. The gas flows into the first compression stage 31 through the gas passage 43, is compressed, and flows into the gas passage 44 through the gas passage having a cross section (not shown). The gas that has flowed into the gas passage 44 flows from the gas passage having a cross section (not shown) into the second compression stage 32 through the intermediate intake port 45, is compressed, and is discharged to the exhaust port 42. The gas exhausted to the exhaust port 42 flows into the main pump 50 through a gas passage 46 that connects the booster pump 20 and the main pump 50 so that the gas can flow.

  The main pump 50 includes a pair of main shafts 51, a pair of bearings 52 and 53, a pair of motors 54, a pair of rotors 60, and a casing 70. In FIG. 1, only one of the pair of constituent elements is shown. The main shaft 51 extends in the direction of the axis AL2 and is supported by bearings 52 and 53 so as to be rotatable about the axis AL2. The motor 54 provides rotational power to the main shaft 51. The motor 54 may be shared by the pair of main shafts 51. Further, the main pump 50 is not limited to a two-shaft type, and may be a single-shaft type. The rotor 60 includes first to fifth compression stages (first to fifth stage rotors) 61 to 65, which are provided on the main shaft 51 along the axis AL2.

  The casing 70 is formed with an intake port 71, an exhaust port 81, gas passages 72, 74, 76, 78, and intermediate intake ports 73, 75, 77, 79. When the pair of rotors 60 rotate in the reverse direction synchronously, the gas flows from the booster pump 20 into the first compression stage 61 of the main pump 50 through the intake port 71. This gas is compressed by the first compression stage 61 and flows into the gas passage 72. The gas that has flowed into the gas passage 72 flows into the second compression stage 62 via the intermediate intake port 73, is compressed there, and flows into the gas passage 74. The gas that has flowed into the gas passage 74 flows into the third compression stage 63 via the gas passage 74 and the intermediate intake port 75, is compressed there, and flows into the gas passage 76. The gas that has flowed into the gas passage 76 flows into the fourth compression stage 64 through the gas passage 76 and the intermediate intake port 77, is compressed there, and flows into the gas passage 78. The gas that has flowed into the gas passage 78 flows into the fifth compression stage 65 through the gas passage 78 and the intermediate intake port 79, is compressed there, and is discharged from the exhaust port 81. The gas discharged from the exhaust port 81 is discharged to the outside through the exhaust pipe 82.

  FIG. 2 is a schematic cross-sectional view along the line AA shown in FIG. Here, the pair of first compression stages 61 is shown as rotors 61a and 61b. The gas flowing in from the intake port 71 is compressed by the rotor 61 a that rotates clockwise and the rotor 61 b that rotates counterclockwise, and flows into the gas passage 72. The gas passage 72 is branched into gas passages 72a and 72b that are formed outside the rotors 61a and 61b with a casing 70 therebetween. The gas flowing through the gas passages 72a and 72b flows into the intermediate intake port 73 through a gas passage formed in a cross section (not shown). Although illustration is omitted, the gas passages 74, 76, and 78 communicate with the intermediate intake ports 75, 77, and 79 by the same flow path shape as the gas passage 72.

  Here, the description returns to FIG. The booster pump 20 and the main pump 50 are provided with pressure sensors P1 to P7 and temperature sensors T1 to T6 as detection units for detecting pressure and temperature. Specifically, the pressure sensor P1 detects the pressure at the intake port 41 of the booster pump 20. The pressure sensor P <b> 2 detects the pressure at the intermediate intake port 45 of the booster pump 20. Since the intermediate intake port 45 communicates with the gas passage 44 without any compression stage, the pressure sensor P2 means that the pressure of the gas passage 44 is detected. That is, the pressure sensor P <b> 2 detects the pressure between the first compression stage 31 and the second compression stage 32 in the gas flow path of the booster pump 20.

  The pressure sensor P3 detects the pressure in the gas passage 46. Since the gas passage 46 communicates with the exhaust port 42 and the intake port 71 without any compression stage, the pressure sensor P3 detects the exhaust pressure of the booster pump 20 and the intake pressure of the main pump 50. means. The pressure sensors P4 to P7 detect the pressure of the intermediate intake ports 73, 75, 77, 79 of the main pump 50, that is, the pressures of the gas passages 72, 74, 76, 78, respectively. That is, the pressure sensors P <b> 4 to P <b> 7 detect the pressure between the compression stages 61 to 65 in the gas flow path of the main pump 50. In other words, the pressure sensors P4 to P7 detect the pressure in each of the compression stages 61 to 65 between two adjacent compression stages.

  The temperature sensor T <b> 1 detects the temperature of the gas passage 44 of the booster pump 20. The temperature sensor T <b> 2 detects the temperature of the exhaust port 42 of the booster pump 20. The temperature sensors T3 to T6 detect the temperatures of the gas passages 72, 74, 76, 78 of the main pump 50, respectively. That is, the temperature sensors T <b> 3 to T <b> 6 detect the temperature between the compression stages 61 to 65 in the gas flow path of the main pump 50.

  In the present embodiment, the temperature sensors T <b> 1 to T <b> 6 are installed on the outer surface of the casing 40 or the casing 70. With this configuration, it is easy to install the temperature sensors T1 to T6. However, the temperature sensors T1 to T6 may be installed on the inner surfaces of the casings 40 and 70. In this way, the temperature detection accuracy can be improved.

  The control unit 90 controls the overall operation of the vacuum pump system 10, and also functions as a measurement unit 91, a data storage unit 92, a data analysis unit 93, and a notification unit 94. In this embodiment, the control unit 90 is configured as an information processing apparatus having a CPU and a memory, and the CPU executes a program stored in the memory to realize a required function. However, at least a part of the functions of the control unit 90 may be realized by a dedicated hardware circuit. Each function of the control unit 90 may be distributed in two or more devices.

  The measurement unit 91 receives detection signals from the pressure sensors P1 to P7 and the temperature sensors T1 to T6, and measures pressure and temperature. The data storage unit 92 stores the data measured by the measurement unit 91 for a certain period. The data storage unit 92 stores initial values for the pressure sensors P1 to P7 and the temperature sensors T1 to T6. In the present embodiment, the initial value includes the rated operation of the vacuum pump system 10 in the state where there is no solidified substance inside the booster pump 20 and the main pump 50, that is, other than when the operation is started and when the operation is started. The values actually measured by the pressure sensors P1 to P7 and the temperature sensors T1 to T6 during the operation are used. The initial value may be measured and stored before the vacuum pump system 10 is shipped, or after the vacuum pump system 10 is installed at the place of use (before use in the manufacturing process, for example, during a test run). Good. The initial value may be a value set by design. In this case, the initial values of the temperature sensors T <b> 1 to T <b> 6 may be set to different values depending on the characteristics of the vacuum pump system 10. That is, since the gas temperature becomes higher toward the subsequent stage of the plurality of compression stages, the initial value may be set so as to show the same tendency as this.

  The data analysis unit 93 predicts an abnormality of the booster pump 20 and the main pump 50 based on the data measured by the measurement unit 91. That is, the data analysis unit 93 determines whether there is an abnormal sign due to the accumulation of the solidified product. In this embodiment, the data analysis unit 93 stores, in the data storage unit 92, the average value of the measurement values for each detection position of pressure and temperature for a certain period (for example, 1 hour) stored in the data storage unit 92. It is determined whether or not the determined initial value is away from the predetermined degree. If at least one of the measured values of pressure and temperature is at a predetermined distance from the initial value at at least one detection position, the data storage unit 92 determines that the measured value represents an abnormal sign. To do. That is, the data storage unit 92 determines that the accumulation of the solidified material is proceeding inside the booster pump 20 or the main pump 50 and that the vacuum pump system 10 is in the caution operating range (the range in which the progress of the deposition should be noted) To do. If abnormality prediction is performed using an average value as in the present embodiment, it is possible to suppress erroneous determination due to instantaneous fluctuations in measured values due to factors other than deposits. However, the abnormality prediction may be performed using the instantaneous value instead of the average value. In this case, the data storage unit 92 can be omitted and a safe determination can be made.

FIG. 3 schematically shows the influence on the pressure and temperature due to the adhesion of the solidified material. As shown in the figure, when the amount of solidified matter gradually increases as the operating time of the vacuum pump system 10 elapses, a pair of the solidified matter is attached between the rotor 30 and the casing 40 at the location where the solidified matter is attached. The clearance between the rotors 30, between the rotor 60 and the casing 70, or between the pair of rotors 60 is reduced. Thereby, the compression capability of the said location increases and the pressure P11 becomes low (vacuum degree becomes high) compared with the pressure P0 when there is no adhesion of solidified material. Such a change in pressure appears prominently in the vicinity of the compression stage to which the solidified material adheres, particularly in the intake side of the compression stage. Further, when the clearance is reduced, the temperature increases as the temperature T11 or decreases as the temperature T12 depending on the region, as compared with the temperature T0 when the solidified material does not adhere, due to the change in the compression ratio. . Such a change in temperature appears remarkably in the vicinity of the compression stage to which the solidified material adheres, that is, either before or after the compression stage.

  The adhesion of such solidified substances and the influence on the pressure and temperature due to the adhesion proceed at a very moderate rate. For example, as an example, the temperature T0 is 140 to 220 ° C. When the solidified material is accumulated by the operation of the vacuum pump system 10 for half a year and reaches a careful operation range, the temperatures T11 and T12 are It will be about ± 15 ° C. Such a sufficiently large temperature change contributes to good abnormality prediction accuracy. The determination criterion of the data analysis unit 93, that is, the degree of deviation from the initial value is set in advance by grasping the above-described pressure and temperature change characteristics experimentally or empirically. The determination by the data analysis unit 93 may be performed for a dangerous driving range (a range in which driving should be stopped quickly at a timing that does not affect the process) instead of or in addition to the caution driving range. The dangerous driving range is set to a value with a large degree of deviation from the initial value compared to the caution driving range.

  Here, the description returns to FIG. When the data analysis unit 93 determines that the measurement value represents an abnormality sign, the notification unit 94 notifies that effect. The notification can be performed by an arbitrary method. For example, the control unit 90 itself may give a warning by sound or screen display, or may send a warning signal to the central control room. Further, the notification by the notification unit 94 may include information on the position where the measurement value indicating the abnormality sign is detected. With such a configuration, it is easy to deal with when an abnormality is predicted. Further, the notification may be performed in a plurality of stages, for example, at the time when the above-mentioned careful driving range is reached and when the dangerous driving range is reached.

  According to the vacuum pump system 10, the pressure and temperature are detected in the immediate vicinity of the compression stages 31, 32, 61 to 65 where the influence of the solidified product deposits appears, and the booster pump 20 due to the solidified product deposits based on the detection result. And the abnormality prediction of the main pump 50 can be performed with high accuracy. In addition, when an abnormal sign is recognized, the fact is notified, so that the administrator of the vacuum pump system 10 can appropriately grasp that the solidified material has accumulated to a predetermined degree or more. Therefore, by stopping the operation of the vacuum pump system 10 at an appropriate timing and taking necessary measures such as cleaning and replacement of the pump, the vacuum pump is stopped at an unexpected timing, resulting in a great loss. Can be suppressed.

  Further, according to the vacuum pump system 10, since the pressure and temperature are detected in the vicinity of each of the compression stages 31, 32, 61 to 65 in which solidified substances may be deposited, the accuracy of abnormality prediction is improved. . It should be noted that the above-described abnormality prediction can be performed with high accuracy even when only pressure or only temperature is detected instead of the pressure and temperature detection configuration. When the compression stage to which the solidified material adheres can be specified, changes in pressure and temperature can be detected by providing sensors in the vicinity of the adhesion site and the vicinity of the compression stage before and after the adhesion site. However, if there is no use record of the vacuum pump system 10, it is difficult to accurately identify the location where the solidified material is attached, so a sensor is provided between all the compression stages 31, 32, 61 to 65. Is desirable.

B. Second embodiment:
FIG. 4 shows a schematic cross section of a vacuum pump system 110 as a second embodiment of the present invention. In FIG. 4, the same components as those of the vacuum pump system 10 (FIG. 1) as the first embodiment are denoted by the same reference numerals as those in FIG. The vacuum pump system 110 is largely different from the first embodiment in that a screw type main pump 150 is provided instead of the roots type main pump 50 of the first embodiment. Hereinafter, the second embodiment will be described only with respect to differences from the first embodiment.

  The exhaust port 42 of the booster pump 120 is formed as a connection path with the main pump 150. The main pump 150 includes a pair of main shafts 151, a pair of bearings 152 and 153, a pair of motors 154, a pair of rotors 160, and a casing 170. In FIG. 4, only one of the pair of constituent elements is shown. The main shaft 151 is formed so as to extend in the direction of the axis AL2, and is supported by bearings 152 and 153 so as to be rotatable about the axis AL2. The motor 154 provides rotational power to the main shaft 151. The motor 154 may be shared by the pair of main shafts 151. Further, the main pump 150 is not limited to a two-shaft type but may be a single-shaft type. The rotor 160 includes a first compression stage (first screw stage) 161 and a second compression stage (second screw stage) 162, which are provided on the main shaft 151.

  In the present embodiment, the first compression stage 161 has a shape in which a protruding portion that protrudes in the radial direction so as to circulate around the axis AL2 is formed in a screw shape (spiral shape). In FIG. 4, the protrusions for two rounds are illustrated as protrusions 161 a and 161 b in order to distinguish the protrusions for each round. The second compression stage 162 has a shape in which a projecting portion projecting in the radial direction is formed in a screw shape so as to circulate only 10 times around the axis AL2. In FIG. 4, the protrusions for the 10 rounds are illustrated as the protrusions 162 a to 162 j in order to distinguish them by the round unit. The 1st compression stage 161 and the 2nd compression stage 162 are formed independently, and the pitch of both protrusion parts differs mutually. In the present specification, in the screw-type rotor, when a plurality of protrusions are formed independently, that is, discontinuously, each of the independent protrusions is regarded as one compression stage.

  When the pair of rotors 160 rotate in the reverse direction synchronously, the gas flowing into the main pump 150 from the exhaust port 42 is compressed by the projecting portions 161a and 161b of the first compression stage 161, and further, the second compression stage 162. Are respectively compressed by the protrusions 162a to 162j and discharged to the exhaust pipe 182.

  The vacuum pump system 110 is provided with pressure sensors P1 to P8 and temperature sensors T1 to T8. The installation positions of the pressure sensors P1, P2 are the same as in the first embodiment. The pressure sensor P3 detects the pressure at the exhaust port 42. The pressure sensor P4 detects the pressure between the protrusions 161a and 162b in the gas flow path of the main pump 150. The pressure sensor P5 detects the pressure between the first compression stage 161 and the second compression stage 162. The pressure sensors P6 to P8 detect pressures between the protrusions 162c and 162d, between the protrusions 162f and 162g, and between the protrusions 162i and 162j, respectively. That is, the pressure sensors P6 to P8 detect the pressure every three turns between the protrusions 162a to 162j. If the pressure sensors are arranged at a predetermined pitch in this way, detection points of pressure in the direction in which the gas is compressed are uniformly distributed, so that the accuracy of abnormality prediction can be improved efficiently. In addition, the pitch which detects a pressure between protrusion part 162a-162j can be set arbitrarily, For example, if importance is attached to the accuracy improvement of abnormality prediction, you may be for every round.

  The installation positions of the temperature sensors T1, T2 are the same as in the first embodiment. The temperature sensor T3 detects the temperature of the exhaust port. The temperature sensor T4 detects the temperature between the protrusions 161a and 161b. The temperature sensor T5 detects the temperature between the first compression stage 161 and the second compression stage 162. The temperature sensor T6T8 detects temperatures between the protrusions 162c and 162d, between the protrusions 162f and 162g, and between the protrusions 162i and 162j, respectively.

  According to the vacuum pump system 110, since the pressure is detected in the immediate vicinity of the compression stages 161 and 162 where the influence of the solidified product appears, the abnormality prediction can be performed with high accuracy as in the first embodiment. Furthermore, since the pressure and temperature are detected at the intermediate positions of the compression stages 161 and 162, the accuracy of abnormality prediction can be further improved. In the vacuum pump system 110 described above, the pressure and / or temperature may be detected only between the first compression stage 161 and the second compression stage 162, or at least one of the compression stages 161 and 162. It may be performed only at the intermediate position.

C. Variations:
C-1. Modification 1:
The form of the booster pump and the main pump constituting the vacuum pump system is not limited to the above-described example, and can be any combination of a root type or a screw type.

C-2. Modification 2:
The detection position of the pressure and temperature may be selected at any position where the solidified material is likely to adhere depending on the use conditions of the vacuum pump system and the characteristics of the apparatus. Further, the pressure and temperature detection positions may be only one of the booster pump and the main pump.

C-3. Modification 3:
The second embodiment described above can also be applied to a screw-type vacuum pump having a single compression stage. For example, in a screw-type vacuum pump having a single compression stage configured such that the pitch of the protrusions is continuously reduced from the intake side toward the exhaust side, the pressure and temperature for each arbitrary rotation of the protrusions May be detected.

C-4. Modification 4:
The vacuum pump systems 10 and 110 may perform abnormality prediction based only on one of the measured values of pressure and temperature. In this way, the device configuration can be simplified.

  The embodiments of the present invention have been described above based on some examples. However, the above-described embodiments of the present invention are for facilitating the understanding of the present invention and limit the present invention. It is not a thing. The present invention can be changed and improved without departing from the gist thereof, and the present invention includes the equivalents thereof. In addition, any combination or omission of each constituent element described in the claims and the specification is possible within a range where at least a part of the above-described problems can be solved or a range where at least a part of the effect is achieved. It is.

DESCRIPTION OF SYMBOLS 10,110 ... Vacuum pump system 20,120 ... Booster pump 21 ... Main shaft 22 ... Bearing 24 ... Motor 30 ... Rotor 31, 32 ... Compression stage 40 ... Casing 41 ... Inlet port 42 ... Exhaust port 43, 44, 46 ... Gas passage 45 ... Intermediate inlet 50, 150 ... Main pump 51, 151 ... Main shaft 52, 152 ... Bearing 54, 154 ... Motor 60, 160 ... Rotor 61, 62, 63, 64, 65, 161, 162 ... Compression stage 61a, 61b ... Rotor 70, 170 ... Casing 71 ... Intake port 72, 72a, 72b, 74, 76, 78 ... Gas passage 73, 75, 77, 79 ... Intermediate intake port 81 ... Exhaust port 82, 182 ... Exhaust pipe 90 ... Control unit 91 ... Measurement unit 92 ... Data storage unit 93 ... Data analysis unit 94 ... Notification unit 161a, 161b, 162a to 162j ... Projection Parts P1 to P8 ... pressure sensor T1 to T7 ... temperature sensor AL1, AL2 ... axis

Claims (4)

A vacuum pump system comprising a vacuum pump,
The vacuum pump is
A main shaft formed extending in the axial direction and rotating about the axis;
A rotor having a plurality of compression stages provided on the main shaft;
A detector that detects at least one of the pressure between the plurality of compression stages and the temperature between the plurality of compression stages, and
The vacuum pump system includes a notification unit that performs notification when the detection result of the detection unit is away from a predetermined value by a predetermined degree or more ,
The rotor is a screw rotor having a plurality of screw stages as the compression stage,
The detection unit detects at least one of the pressure and the temperature between the plurality of screw stages,
At least one of the plurality of screw stages has a shape in which a projecting portion projecting in a radial direction so as to go around two or more times around the axis is formed in a screw shape,
The detection unit detects at least one of a pressure and a temperature between protrusions formed to circulate two or more times.
Vacuum pump system. A vacuum pump system comprising a vacuum pump,
The vacuum pump is
A main shaft formed extending in the axial direction and rotating about the axis;
A rotor provided on the main shaft, wherein a projecting portion projecting in a radial direction so as to go around two or more times around the axis is formed in a screw shape;
A detection unit that detects at least one of pressure and temperature between the protrusions formed to circulate two or more times, and
The said vacuum pump system was equipped with the alerting | reporting part which alert | reports when the detection result of the said detection part is away from the predetermined value more than the predetermined degree. The vacuum pump system according to claim 2 ,
The detection unit detects at least one of the pressure and the temperature every predetermined number of turns of the protrusion. Vacuum pump system. A method for notifying an abnormal sign of a vacuum pump including a rotor in which a projecting portion projecting in a radial direction so as to circulate at least twice around an axis of a main shaft,
Detecting at least one of the pressure and the temperature between the protrusions formed to circulate two or more times,
A notification method for performing notification when the detection result is separated from a predetermined value by a predetermined degree or more.

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