JP6101535B2 - Plasma processing equipment - Google Patents

Description

  The present invention relates to a plasma processing apparatus that generates plasma and performs a predetermined process.

  The plasma process plays a major role in, for example, a silicon solar cell manufacturing process (see, for example, Patent Documents 1 to 5). For example, Patent Documents 1 and 2 describe an apparatus for forming a thin film on a substrate by plasma CVD (plasma-enhanced chemical vapor deposition).

Japanese Patent No. 4087233 Japanese Patent No. 3243125 Japanese Patent No. 4573913 JP-A-10-287975 JP-A-8-165573 JP 61-39234 A

  By the way, for example, in an apparatus for forming a thin film on an object (for example, a substrate) by plasma CVD, if a region where the plasma intensity is locally high (or low) is generated in a space near the substrate, The film thickness to be formed becomes non-uniform. In order to avoid such a situation, it is required to improve the uniformity of the plasma intensity in the space near the substrate.

  This invention is made | formed in view of the said subject, and it aims at providing the technique which can improve the uniformity of the plasma intensity in the near space of a target object.

A 1st aspect is a plasma processing apparatus, Comprising: The process chamber which forms process space inside, The holding part holding the target object which is a process target in the said process space, The number of winding is less than one round An inductively coupled antenna, a high frequency power source connected to the plurality of inductively coupled antennas, and a partition member formed of a dielectric, wherein the plurality of inductively coupled antennas are provided in the processing space, The plurality of inductively coupled antennas are arranged in a line along the virtual axis by being arranged on a virtual axis where a center point of a line segment connecting both ends of the plurality of inductively coupled antennas is defined. The partition member is disposed on a common arrangement surface with the plurality of inductively coupled antennas and between adjacent inductively coupled antennas.

A 2nd aspect is a plasma processing apparatus, Comprising: The process chamber which forms process space inside, The holding part holding the target object which is a process target in the said process space, The number of winding is less than one round A line connecting each end of each of the plurality of inductively coupled antennas, a high frequency power source connected to the plurality of inductively coupled antennas, and a partition member formed of a dielectric. The center points of the minute are arranged on a predetermined virtual axis so that the plurality of inductively coupled antennas are arranged in a line along the virtual axis, and the partition members are adjacent to the inductively coupled antennas. disposed between said inductive coupling antenna and said partition member is disposed in a common layout surface, including the ends of the side projecting from the installation surface of the inductive coupling antenna The horizontal plane is called the first horizontal plane, the horizontal plane including the upper surface of the object held by the holding unit is called the second horizontal plane, and the horizontal plane between the first horizontal plane and the second horizontal plane is the third level. As the horizontal plane, an end of the partition member that protrudes from the arrangement surface is present on the arrangement surface side of the third horizontal plane.

A 3rd aspect is a plasma processing apparatus, Comprising: The process chamber which forms process space inside, The holding part holding the target object which is a process target in the said process space, The number of winding is less than one round A line connecting each end of each of the plurality of inductively coupled antennas, a high frequency power source connected to the plurality of inductively coupled antennas, and a partition member formed of a dielectric. The center points of the minute are arranged on a predetermined virtual axis so that the plurality of inductively coupled antennas are arranged in a line along the virtual axis, and the partition members are adjacent to the inductively coupled antennas. disposed between said and inductive coupling antenna and said partition member is disposed in a common layout surface, the edge of the side projecting from the installation surface in the inductively coupled antenna, An arcuate portion that bends along an arc of a virtual circle is included, a horizontal plane that passes through the center of the virtual circle is referred to as a fourth horizontal plane, and an end of the partition member that protrudes from the arrangement surface is the first plane. It exists in the said object side rather than 4 horizontal surfaces.

A 4th aspect is a plasma processing apparatus, Comprising: The process chamber which forms process space inside, The holding part which hold | maintains the target object which is a process target in the said process space, The number of winding is less than one round A line connecting each end of each of the plurality of inductively coupled antennas, a high frequency power source connected to the plurality of inductively coupled antennas, and a partition member formed of a dielectric. The center points of the minute are arranged on a predetermined virtual axis so that the plurality of inductively coupled antennas are arranged in a line along the virtual axis, and the partition members are adjacent to the inductively coupled antennas. disposed between said inductive coupling antenna and said partition member is disposed in a common layout surface, including the ends of the side projecting from the installation surface of the inductive coupling antenna The horizontal plane, and a first horizontal surface, the edge of the side projecting from the installation surface of the partition member is present in the object side of the first horizontal surface.

A 5th aspect is a plasma processing apparatus, Comprising: The process chamber which forms process space inside, The holding part holding the target object which is a process target in the said process space, The number of winding is less than one round A line connecting each end of each of the plurality of inductively coupled antennas, a high frequency power source connected to the plurality of inductively coupled antennas, and a partition member formed of a dielectric. The center points of the minute are arranged on a predetermined virtual axis so that the plurality of inductively coupled antennas are arranged in a line along the virtual axis, and the partition members are adjacent to the inductively coupled antennas. disposed between the partition member, the internal gas flow channel formed therein, the gas supply and discharge port for communicating the processing space and the internal gas passage, the gas in the inner gas flow passage It comprises a sheet portion.

A 6th aspect is a plasma processing apparatus, Comprising: The processing chamber which forms processing space inside, The holding part which hold | maintains the target object which is a process target in the said processing space, The number of winding is less than one round A line connecting each end of each of the plurality of inductively coupled antennas, a high frequency power source connected to the plurality of inductively coupled antennas, and a partition member formed of a dielectric. The center points of the minute are arranged on a predetermined virtual axis so that the plurality of inductively coupled antennas are arranged in a line along the virtual axis, and the partition members are adjacent to the inductively coupled antennas. disposed between the plasma processing apparatus, a plurality of the partition member, at least one partition member of said plurality of partition members, different other partition member and magnitude

  A seventh aspect is the plasma processing apparatus according to the sixth aspect, wherein among the plurality of inductively coupled antennas arranged in a line, the inductively coupled antenna disposed at an end, and the inductive coupling The partition member disposed between the inductively coupled antenna adjacent to the mold antenna is larger than the other partition members.

  According to the first aspect, the plurality of inductively coupled antennas are arranged in a line. When a plurality of inductively coupled antennas are arranged in a line, the local inductive coupling is likely to occur at a position corresponding to the gap between adjacent inductively coupled antennas in a region near the object. By disposing a partition member formed of a dielectric between the mold antennas, it is possible to suppress such a local increase in plasma intensity. That is, the uniformity of the plasma intensity in the space near the object can be improved.

  According to the 2nd aspect, since sufficient space is ensured between a partition member and a target object, a partition member does not have a bad influence on the process with respect to a target object.

  According to the 3rd aspect, it can suppress effectively that the local raise of the plasma intensity arises in the near field of a subject.

  According to the 4th aspect, the uniformity of the plasma intensity in the vicinity area | region of a target object can fully be improved.

  According to the 5th aspect, gas can be discharged to processing space from the discharge outlet with which a partition member is provided. According to this configuration, for example, the gas can be discharged to a region where the plasma intensity is relatively low in the processing space as compared with the case where the gas is discharged from the surface where the inductively coupled antenna is disposed. . Thus, for example, avoiding a situation where a gas that is preferably exposed to a relatively weak plasma is excessively decomposed by being exposed to a plasma that is too strong, and the desired reactive species cannot be obtained. it can.

  According to the sixth and seventh aspects, it is possible to particularly improve the uniformity of the plasma intensity in the vicinity of the object.

It is a figure which shows typically schematic structure of a plasma processing apparatus. It is a perspective view which shows a part of plasma processing apparatus typically. It is a figure for demonstrating the positional relationship of an inductive coupling type antenna and a partition member. It is a perspective view which shows a partition member typically. It is a figure which shows typically an example of the intensity distribution of the plasma along the sequence direction of an inductively coupled antenna. It is a figure for demonstrating the magnitude | size of the partition member which concerns on a modification. It is a perspective view which shows typically the partition member which concerns on a modification. It is a perspective view which shows typically a part of plasma processing apparatus at the time of providing the inductive coupling type antenna of another shape. It is a figure which shows typically an example of the intensity distribution of the plasma along the arrangement direction of an inductive coupling type antenna when not providing a partition member.

  Hereinafter, embodiments will be described with reference to the drawings. The following embodiment is an example embodying the present invention, and is not an example of limiting the technical scope of the present invention. In the drawings, the size and number of each part may be exaggerated or simplified for easy understanding.

<1. Overall Configuration of Plasma Processing Apparatus 100>
The overall configuration of the plasma processing apparatus 100 according to the embodiment will be described with reference to FIGS. FIG. 1 is a diagram schematically showing a schematic configuration of the plasma processing apparatus 100. FIG. 2 is a diagram schematically showing an enlarged part of the plasma processing apparatus 100 (in the vicinity of the inductively coupled antenna 41). FIG. 3 is a diagram for explaining the positional relationship between the inductively coupled antenna 41 and the partition member 5. In the drawings to be referred to below, XYZ orthogonal coordinate axes are appropriately attached in order to describe directions. The direction of the Z axis in this coordinate axis indicates the direction of the vertical line, and the XY plane is a horizontal plane. Each of the X axis and the Y axis is an axis parallel to the side wall of the processing chamber 1.

  The plasma processing apparatus 100 according to the embodiment is an apparatus that forms a thin film on an object to be filmed (here, for example, the substrate 9) by, for example, plasma CVD (plasma-enhanced chemical vapor deposition).

  The plasma processing apparatus 100 includes a processing chamber 1 that forms a processing space V therein, a holding transport unit 2 that holds and transports a substrate 9 (specifically, a substrate 9 disposed on a carrier 90), a substrate, 9 includes a heating unit 3 for heating 9, a plasma generating unit 4 for generating plasma in the processing space V, and a plurality of partition members 5. Further, the plasma processing apparatus 100 includes a gas supply unit 6 that supplies gas to the processing space V and an exhaust unit 7 that exhausts gas from the processing space V. In addition, the plasma processing apparatus 100 includes a control unit 8 that controls each of the above components.

<Processing chamber 1>
The processing chamber 1 is a hollow member having a rectangular parallelepiped outer shape, and forms a processing space V therein. The top plate 11 of the processing chamber 1 is disposed such that the lower surface 111 thereof is in a horizontal posture, and the inductively coupled antenna 41 and the partition member 5 (both will be described later) from the lower surface 111 toward the processing space V. Are projected alternately. A heating unit 3 is disposed near the bottom plate of the processing chamber 1. Further, on the upper side of the heating unit 3, a conveyance path of the substrate 9 by the holding conveyance unit 2 is defined. In addition, each of the pair of opposing side walls of the processing chamber 1 is provided with a carry-in / out port (not shown) that is opened and closed by, for example, a gate valve, at a position intersecting the transfer path.

<Holding and conveying unit 2>
Here, the substrate 9, which is an object to be filmed, is disposed on the upper surface of the plate-like carrier 90. The holding and conveying unit 2 holds the carrier 90 (that is, the carrier 90 on which the substrate 9 is disposed) introduced into the processing space V through the carry-in / out port formed in the processing chamber 1 in a horizontal posture. Then, it is transported along a horizontal transport path defined in the processing space V (that is, parallel to the lower surface 111 of the top plate 11).

  Specifically, the holding conveyance unit 2 includes, for example, a pair of conveyance rollers 21 arranged to face each other across the conveyance path, and a drive unit (not shown) that rotates and synchronizes these rollers. . For example, a plurality of pairs of the transport rollers 21 are provided along the extending direction of the transport path (Y direction in the illustrated example). In this configuration, each carrier roller 21 rotates while contacting the lower surface of the carrier 90, so that the carrier 90 is conveyed along a conveyance path in the processing space V. That is, the substrate 9 held by the carrier 90 is moved relative to the inductively coupled antenna 41.

<Heating unit 3>
The heating unit 3 is a member that heats the substrate 9 that is held and conveyed by the holding and conveying unit 2, and is disposed below the holding and conveying unit 2 (that is, below the conveyance path of the substrate 9). The heating part 3 can be comprised with a ceramic heater, for example. The plasma processing apparatus 100 may further be provided with a mechanism for cooling the substrate 9 and the like held by the holding and conveying unit 2.

<Plasma generator 4>
The plasma generator 4 generates plasma in the processing space V. The plasma generator 4 includes a plurality of inductively coupled antennas 41 which are inductively coupled high frequency antennas. Specifically, each inductively coupled antenna 41 is formed by bending a metal pipe-shaped conductor into a U shape with a dielectric such as quartz.

  The plurality of inductively coupled antennas 41 are arranged at intervals (preferably at equal intervals) along a predetermined direction, and are fixed to the top plate 11. Specifically, as shown in FIG. 3, the plurality of inductively coupled antennas 41 are arranged on a virtual axis K in which a center point C of a line segment L that connects both ends is defined, They are arranged in a line along the virtual axis K. However, the imaginary axis K extends in a direction (particularly preferably, a direction (X direction) orthogonal to the transport direction of the substrate 9 as shown) intersecting the transport direction (Y direction) of the substrate 9. An axis is preferable, and an axis extending parallel to the ± Y side wall of the processing chamber 1 is preferable.

  In the illustrated example, the line segment L connecting both ends of the inductive coupling antenna 41 and the virtual axis K are parallel (that is, each of the plurality of inductive coupling antennas 41 is in a posture parallel to the arrangement direction thereof. However, the line segment L and the virtual axis K are not necessarily parallel to each other. That is, the angle formed by the line segment L and the virtual axis K may be zero or more.

  In the illustrated example, four inductively coupled antennas 41 are provided along the virtual axis K. However, the number of inductively coupled antennas 41 arranged along the virtual axis K is not necessarily limited to four. The number can be appropriately selected according to the dimensions of the processing chamber 1 and the like. The inductively coupled antennas 41 may be arranged in a matrix or a staggered pattern. That is, a plurality of virtual axes K arranged at intervals along the Y direction may be defined, and a plurality of inductively coupled antennas 41 may be arranged along each of the plurality of virtual axes K.

  One end of each inductively coupled antenna 41 is connected to a high frequency power supply 44 through a power feeder 42 and a matching box 43. The other end of each inductively coupled antenna 41 is grounded. In this configuration, when a high frequency current (specifically, for example, a high frequency current of 13.56 MHz) is supplied from the high frequency power supply 44 to each inductive coupling antenna 41, the electric field around the inductive coupling antenna 41 (high frequency induction electric field). ) Are accelerated, and plasma (Inductively Coupled Plasma (ICP)) is generated.

  As described above, the inductively coupled antenna 41 has a U shape. Such a U-shaped inductively coupled antenna 41 corresponds to an inductively coupled antenna having less than one turn and has a lower inductance than an inductively coupled antenna having one or more turns. The high frequency voltage generated in the plasma is reduced, and the high frequency fluctuation of the plasma potential accompanying the electrostatic coupling to the generated plasma is suppressed. For this reason, excessive electron loss accompanying the plasma potential fluctuation to the ground potential is reduced, and the plasma potential can be suppressed particularly low. Such inductive coupling type high frequency antennas are disclosed in Japanese Patent No. 3836636, Japanese Patent No. 3836866, Japanese Patent No. 44451392, and Japanese Patent No. 4852140.

<Partition member 5>
The partition member 5 is made of a dielectric and is disposed between adjacent inductively coupled antennas 41. The partition member 5 will be described later.

<Gas supply unit 6>
The gas supply unit 6 includes, for example, a first gas supply unit 61 that supplies a source gas (specifically, for example, silane (SiH ₄ ) gas) as a processing gas to the processing space V, and an additive gas (specifically, for example). , For example, an argon (Ar) gas, an oxygen (O ₂ ) gas, or a mixed gas thereof) is provided with a second gas supply unit 62 that supplies the processing space V.

  Specifically, the first gas supply unit 61 includes, for example, a first gas supply source 611 and a first introduction pipe 612 having one end connected to the first gas supply source 611. The other end of the first introduction pipe 612 is connected to an internal flow path 51 (described later) formed inside each of the plurality of partition members 5. A first supply valve 613 is inserted in the middle of the path of the first introduction pipe 612. The first supply valve 613 is preferably a valve that can automatically adjust the flow rate of the gas flowing through the first introduction pipe 612, and specifically includes, for example, a mass flow controller. In this configuration, when the first supply valve 613 is opened, the gas supplied from the first gas supply source 611 is supplied to the internal flow path 51 of each partition member 5. The gas supplied to the internal flow path 51 is discharged into the processing space V through a first discharge port 54 (described later).

  Specifically, the second gas supply unit 62 includes, for example, a second gas supply source 621 and a second introduction pipe 622 having one end connected to the second gas supply source 621. The other end of the second introduction pipe 622 is connected to each of a plurality of through passages 63 provided so as to vertically penetrate the top plate 11 of the processing chamber 1. Further, a second supply valve 623 is inserted in the middle of the path of the second introduction pipe 622. The second supply valve 623 is preferably a valve that can automatically adjust the flow rate of the gas flowing through the second introduction pipe 622, and specifically includes, for example, a mass flow controller. In this configuration, when the second supply valve 623 is opened, the gas supplied from the second gas supply source 621 is formed in each of the plurality of discharge members 60 (described later) via the through flow path 63. The cavity 64 is supplied. The gas supplied to the cavity 64 is discharged into the processing space V through the second discharge port 65.

  What kind of gas is discharged from each of the first discharge port 54 and the second discharge port 65 at what flow rate depends on, for example, the type of thin film to be formed on the substrate 9 and the processing conditions. It is selected appropriately. In other words, each of the first supply valve 613 and the second supply valve 623 is electrically connected to the control unit 8, and the control unit 8 selects each of these units 613, based on values specified by the operator. By controlling 623, the type of gas desired by the operator is introduced into the processing space V from the discharge ports 54 and 65 desired by the operator at a flow rate desired by the operator. However, it is not always necessary to discharge gas from both the first discharge port 54 and the second discharge port 65, and depending on the processing, gas may be discharged from only one discharge port.

  Here, the discharge member 60 will be specifically described with reference to FIGS. 2 and 3. The plurality of ejection members 60 are arranged in a line at intervals and are fixed to the lower surface 111 of the top plate 11 of the processing chamber 1. Specifically, for example, the plurality of ejection members 60 are located at positions corresponding to the inductively coupled antenna 41 (for example, positions at the center of both ends of the U-shaped inductively coupled antenna 41 on the virtual axis K). (I.e., center point C)) and attached to the top plate 11 in an airtight manner. However, the projecting dimension of each ejection member 60 from the lower surface 111 is sufficiently smaller than the projecting dimension of the inductively coupled antenna 41 from the lower surface 111. The discharge member 60 is made of alumina, for example.

  The discharge member 60 has a cylindrical outer shape, and, for example, an elliptical columnar cavity 64 is formed therein. The cavity 64 communicates with the through channel 63 at the upper end, and communicates with one or more (two in the illustrated example) discharge ports (second discharge ports) 65 at the lower end. The second discharge port 65 is a through-hole formed in the bottom plate of the discharge member 60 and communicates the cavity 64 and the processing space V.

  As described above, the through flow path 63 in which the upper end of the cavity 64 is connected to the communication path is a flow path provided through the top plate 11 of the processing chamber 1 vertically. In the middle of the flow path of the through flow path 63, a porous body 631 is disposed. The outer diameter of the porous body 631 is preferably formed to be substantially the same as the inner diameter of the through channel 63. That is, the outer periphery of the porous body 631 is provided in contact with (or close to) the inner periphery of the through flow path 63. By providing the porous body 631 in the middle of the flow path of the through flow path 63, the flow of gas flowing through the through flow path 63 is decelerated. That is, the porous body 631 functions as a resistor that prevents the flow of gas flowing through the through flow path 63.

  In this configuration, the gas supplied to the through flow path 63 is decelerated by the porous body 631 and then flows into the cavity 64. The gas flowing into the cavity 64 diffuses in the cavity 64 and is further decelerated, and the flow is made uniform and stabilized. Then, the liquid is discharged from the lower end surface of the cavity 64 toward the processing space V through the second discharge port 65. Since the flow is sufficiently decelerated in the cavity 64 and is uniformized and stabilized, the gas discharged from the second discharge port 65 is uniformly distributed in the processing space V at an intended speed. It spreads.

<Exhaust part 7>
Refer to FIG. 1 again. The exhaust unit 7 is a high vacuum exhaust system, and specifically includes, for example, a vacuum pump 71, an exhaust pipe 72, and an exhaust valve 73. One end of the exhaust pipe 72 is connected to the vacuum pump 71, and the other end is connected to the processing space V in communication. Further, the exhaust valve 73 is provided in the course of the exhaust pipe 72. Specifically, the exhaust valve 73 includes a mass flow controller or the like, for example, and is a valve that can automatically adjust the flow rate of the gas flowing through the exhaust pipe 72. In this configuration, when the exhaust valve 73 is opened while the vacuum pump 71 is operated, the processing space V is exhausted.

<Control unit 8>
The control unit 8 is electrically connected to each component included in the plasma processing apparatus 100 and controls each component. Specifically, the control unit 8 includes, for example, a CPU that performs various arithmetic processes, a ROM that stores programs, a RAM that serves as a work area for arithmetic processes, a hard disk that stores programs and various data files, a LAN, and the like. A data communication unit having a data communication function is connected to each other by a bus line or the like, and is configured by a general computer. The control unit 8 is connected to an input unit composed of a display for performing various displays, a keyboard, a mouse, and the like. In the plasma processing apparatus 100, a predetermined process is performed on the substrate 9 under the control of the control unit 8.

<2. Partition member 5>
<I. Configuration>
Next, the partition member 5 will be described with reference to FIG. 4 in addition to FIGS. FIG. 4 is a perspective view schematically showing the partition member 5.

  The plasma processing apparatus 100 includes a plurality of (in the illustrated example, five) partition members 5. Of the five partition members 5, each of the three partition members 5 is disposed between the adjacent inductively coupled antennas 41. Each of the remaining two partition members 5 is disposed between the end inductively coupled antenna 41 and the side wall of the processing chamber 1. Specifically, one of the two partition members 5 is disposed between the inductively coupled antenna 41 at the + X side end and the + X side sidewall of the processing chamber 1, and the other is the −X side end. Between the inductively coupled antenna 41 and the side wall on the −X side of the processing chamber 1. All of the partition members 5 are preferably arranged on the virtual axis K.

The partition member 5 is formed of a dielectric material. As a material for forming the partition member 5, a dielectric material that can withstand high temperatures is particularly preferable. For example, alumina (Al ₂ O ₃ ), ceramics, and the like are preferable.

  Specifically, the partition member 5 includes, for example, a main body portion 501 that has a rectangular parallelepiped outer shape, and a protruding portion 502 that has a cylindrical outer shape and protrudes from the upper end surface of the main body portion 501. This protrusion 502 is embedded in the top plate 11 of the processing chamber 1 in an airtight manner, whereby the partition member 5 is fixed to the top plate 11. In addition, in the state fixed to the top plate 11, the upper surface of the main-body part 501 and the lower surface 111 of the top plate 11 do not necessarily need to contact | abut, and there is no problem even if a clearance gap exists between both surfaces. However, it is preferable that the upper surface of the main body 501 is adjusted so as to be at least higher than a later-described fourth horizontal plane H4 (that is, a position on the top plate 11 side). Further, the main body 501 has a rectangular horizontal cross section, and its long side intersects with the virtual axis K (particularly preferably, a direction orthogonal to the virtual axis K (Y direction as shown in the figure)). )).

  As shown in FIG. 2, the plurality of inductively coupled antennas 41 and the plurality of partition members 5 are all fixed to the top plate 11 and are directed downward from the lower surface 111 of the top plate 11. It has a prominent appearance. That is, the plurality of inductively coupled antennas 41 and the partition member 5 are arranged on a common arrangement surface (here, the lower surface 111 of the top plate 11).

  Now, the horizontal plane including the end (protruding end) 410 on the side protruding from the lower surface 111 in the inductively coupled antenna 41 is referred to as a first horizontal plane H1. Further, a horizontal plane including the upper surface of the substrate 9 held by the holding conveyance unit 2 is referred to as a second horizontal plane H2. An intermediate horizontal plane between the first horizontal plane H1 and the second horizontal plane is referred to as a third horizontal plane H3. In addition, as described above, the inductively coupled antenna 41 has a U-shaped bent shape, and the bent portion is rounded. In other words, the inductively coupled antenna 41 has an arcuate portion that bends along the arc of the virtual circle q near the protruding end 410. A horizontal plane passing through the center Q of the virtual circle q is referred to as a fourth horizontal plane H4.

  Further, in a state where the partition member 5 is disposed on the top plate 11, the lower surface 111 of the top plate 11 and the lower end of the partition member 5 (that is, the end of the partition member 5 on the side protruding from the lower surface 111). Here, the separation distance from the lower end surface 50 of the main body 501 is referred to as a protruding dimension h of the partition member 5.

  It is preferable that the protruding dimension h of the partition member 5 is adjusted so that the lower end 50 thereof is positioned higher than the third horizontal plane H3 (that is, the position on the top plate 11 side). According to this configuration, since a sufficient space is ensured between the partition member 5 and the substrate 9, the partition member 5 does not adversely affect the processing (here, film forming processing) for the substrate 9.

  On the other hand, the protruding dimension h is preferably adjusted so that the lower end 50 of the partition member 5 is located at a position lower than the fourth horizontal plane H4 (that is, the position on the substrate 9 side). Further, it is particularly preferable that the protruding dimension h of the partition member 5 is adjusted so that the lower end 50 thereof is at a position lower than the first horizontal plane H1 (that is, a position on the substrate 9 side). As will be described later, by adjusting the protrusion dimension h so that the lower end 50 is positioned lower than the fourth horizontal plane H4, a local increase in plasma intensity occurs in the vicinity of the substrate 9. In particular, by adjusting the protrusion dimension h so that the lower end 50 is located at a position lower than the first horizontal plane H1, the uniformity of the plasma intensity in the region near the substrate 9 can be sufficiently enhanced. .

<Ii. Relationship between partition member 5 and plasma intensity>
By arranging the partition member 5 in the gap between the adjacent inductively coupled antennas 41, it is possible to suppress a local increase in plasma intensity in the vicinity of the substrate 9. The reason will be described with reference to FIG. In FIG. 5, when the partition member 5 is provided, the intensity distribution along the virtual axis K of the plasma generated in the vicinity region of the substrate 9 by the plasma generation unit 4 including the plurality of inductively coupled antennas 41 ( That is, the intensity distribution T) along the arrangement direction (X direction) of the inductively coupled antenna 41 is schematically illustrated. Specifically, the intensity distribution T has the X position on the horizontal axis of the two-dimensional graph, and the plasma intensity at each X position on the vertical axis (specifically, for example, the plasma potential in the vicinity region of the substrate 9). Value). In FIG. 9, as a comparative example, in the case where the partition member 5 is not provided, the plasma generation unit including a plurality of inductively coupled antennas generates plasma generated in the vicinity of the substrate in the inductively coupled antenna arrangement direction ( An intensity distribution T0 along the (X direction) is schematically illustrated.

  As shown in FIG. 9, when the partition member 5 is not provided, a local increase in plasma intensity occurs at a position corresponding to the gap between adjacent inductively coupled antennas in the vicinity of the substrate 9. The clear reason has not been elucidated.

  On the other hand, as shown in FIG. 5, when the partition member 5 is provided, a local increase in plasma intensity that occurs when the partition member 5 is not provided is suppressed. The reason is considered as follows.

  When the partition member 5 is formed of a dielectric, the external electric field is reduced inside the dielectric. Therefore, when the partition member 5 is provided in the gap between the adjacent inductively coupled antennas 41, the electric field formed by each inductively coupled antenna 41 attenuates as the partition member 5 is approached. Further, by providing the partition member 5, the influence of mutual interference of electric fields formed by the adjacent inductively coupled antennas 41 is reduced. In other words, the electric field formed by each inductively coupled antenna 41 is less likely to interfere with the electric field formed by the other inductively coupled antenna 41. As a result, it is difficult to form a locally strong electric field space in the gap between adjacent inductively coupled antennas 41, and a local increase in plasma intensity is suppressed. That is, local increase in plasma intensity is suppressed at a position corresponding to the gap between adjacent inductively coupled antennas 41 in the vicinity of the substrate 9.

  In particular, when the projecting dimension h of the partition member 5 is adjusted so that the lower end 50 is positioned lower than the fourth horizontal plane H4, a local increase in plasma intensity occurs in the region near the substrate 9. It can be effectively suppressed. This is because when viewed along the Z axis, the electric field formed by the inductively coupled antenna 41 tends to be strongest in the vicinity of the center Q of the virtual circle, and at least the height of the center Q is defined as a partition member. This is because by partitioning with 5, it is possible to effectively suppress interference between regions where the electric field is locally strong.

  Further, when the protruding dimension h of the partition member 5 is adjusted so that the lower end 50 is positioned lower than the first horizontal plane H1, the electric field formed by each inductively coupled antenna 41 is the position where the partition member 5 is disposed. And the influence of mutual interference of electric fields formed by the adjacent inductively coupled antennas 41 is sufficiently reduced. Therefore, the local increase in plasma intensity is sufficiently suppressed, and the uniformity of the plasma intensity in the region near the substrate 9 can be sufficiently increased.

<Iii. Internal channel 51>
An internal flow path (internal gas flow path) 51 is formed inside each partition member 5. Specifically, the internal flow path 51 includes an upstream flow path 52 and a pair of downstream flow paths 53s and 53t formed at intervals along the X direction. Further, in the vicinity of the lower ends of a pair of opposing side walls (each of the + X side side wall and the −X side side wall) of the main body 501 of each partition member 5, a discharge port that communicates the internal flow path 51 and the processing space V. A plurality of (first discharge ports) 54 are formed. That is, of the pair of downstream flow paths 53 s and 53 t, the −X side downstream flow path 53 s communicates with the plurality of first discharge ports 54 formed on the −X side side wall of the main body 501 at the lower end. ing. Of the pair of downstream flow paths 53s and 53t, the + X-side downstream flow path 53t communicates with a plurality of first discharge ports 54 formed on the + X-side side wall of the main body 501 at the lower end. .

  However, the end partition member 5 (that is, the partition member 5 disposed between the end inductively coupled antenna 41 and the side wall of the processing chamber 1) has one side wall (specifically, inductively coupled type). The first discharge port 54 is formed only on the side wall facing the antenna 41, and the downstream flow path is formed only on the side where the first discharge port 54 is formed.

  The upstream flow path 52 is a flow path that is provided through the protrusion 502 in the vertical direction. A porous body 521 is disposed in the middle of the upstream channel 52. The outer diameter of the porous body 521 is preferably formed substantially the same as the inner diameter of the upstream flow path 52. That is, the outer periphery of the porous body 521 is provided in contact with (or close to) the inner periphery of the upstream flow path 52. By providing the porous body 521 in the middle of the upstream channel 52, the flow of gas flowing through the upstream channel 52 is decelerated. That is, the porous body 521 functions as a resistor that prevents the flow of gas flowing through the upstream flow path 52.

  Each of the pair of downstream flow paths 53s and 53t is formed in the same shape. That is, each downstream flow path 53s, 53t has a shape in which a plurality of cavities 531, 532, 533 are communicated with each other by a flow path extending in the vertical direction. Specifically, each of the downstream flow paths 53s and 53t includes, in order from the top, the first cavity 531, two identical second cavities 532 and 532 arranged in the Y direction, and the same shape arranged in the Y direction. The four third cavities 533, 533, 533, and 533 are provided. Each third cavity 533 communicates with one first discharge port 54 in the vicinity of the lower end thereof. Each of the downstream flow paths 53s and 53t includes a first flow path 534 that connects the upstream flow path 52 and the first cavity 531, and the first cavity 531 and the two second cavities 532 disposed below the first flow path 531. A second flow path 535 that connects each of the second cavities, and a third flow path 536 that connects each of the second cavities 532 and each of the two third cavities 533 disposed therebelow. Each flow path 534, 535, 536 connecting between the cavities 531, 532, 533 also functions as a throttle for restricting the gas flow.

  In this configuration, the gas supplied to the internal channel 51 by the gas supply unit 6 first flows into the upstream channel 52, where it is decelerated by the porous body 521. An approximately equal amount of gas flows into each of the two first flow paths 534 and 534. The gas flowing into each first flow path 534 first flows into the first cavity 531. The gas flowing into the first cavity 531 diffuses in the first cavity 531, is further decelerated, and the flow is made uniform and stabilized. An approximately equal amount of gas flows into each of the two second flow paths 535 and 535. The gas flowing into each second cavity 532 through each second flow path 535 diffuses again in each second cavity 532 and is further decelerated, and the flow is further uniformized and stabilized. An approximately equal amount of gas flows into each of the two third flow paths 536 and 536. The gas that has flowed into each third cavity 533 via each third flow path 536 diffuses again in each third cavity 533 and is further decelerated, and the flow is further uniformed and stabilized. Then, the liquid is discharged toward the processing space V through the first discharge port 54 formed near the lower end of the third cavity 533.

  That is, the gas that has flowed from the upstream flow path 52 into the −X side downstream flow path 53 s is discharged from the plurality of −X side first discharge ports 54 to the processing space V through the downstream flow path 53 s. Further, the gas flowing from the upstream flow path 52 into the + X side downstream flow path 53t is discharged into the processing space V from the plurality of first discharge ports 54 formed on the + X side wall surface through the downstream flow path 53t. Is done. In each of the cavities 531, 532, and 533, the flow is sufficiently decelerated and uniformized and stabilized, so that the gas discharged from the first discharge port 54 is processed at a desired speed. It diffuses uniformly in V.

  However, in the flow channel cross section (horizontal cross section) of the internal flow channel 51, when the one with the smallest separation distance is referred to as the “closest pair of walls”, the internal flow channel 51 is The distance between the closest pair of walls is “5 mm (millimeters)” or less. For example, when the cross section of the flow path is circular, the diameter of the circle is “5 mm” or less. For example, when the cross section of the flow path is rectangular, the length of the short side is “5 mm” or less. That is, the internal flow path 51 is dimensioned such that each position in the internal flow path 51 does not deviate more than “2.5 mm” from at least a part of the tube wall (that is, the inner wall of the partition member 5). If the separation distance from at least a part of the tube wall is within “2.5 mm”, the gas flowing through the internal flow path 51 can be sufficiently prevented from being converted into plasma in the internal flow path 51.

<3. Process flow>
Next, the flow of processing executed in the plasma processing apparatus 100 will be described with reference to FIG. The process described below is executed under the control of the control unit 8.

  When the carrier 90 on which the substrate 9 is disposed is loaded into the processing space V via the loading / unloading port of the processing chamber 1, the holding and conveying unit 2 holds the carrier 90 in the processing space V. When the substrate 9 is carried into the processing space V, the exhaust unit 7 exhausts the processing space V and puts the processing space V in a vacuum state. On the other hand, the holding transport unit 2 starts transporting the substrate 9 at a predetermined timing, and the heating unit 3 starts heating the substrate 9.

  When the processing space V is in a vacuum state, the first gas supply unit 61 starts supplying the raw material gas (for example, silane gas here) as the processing gas, and the second gas supply unit 62 adds the additive gas (here, the silane gas). For example, supply of a mixed gas of argon gas and oxygen gas) is started. In this case, silane gas is discharged toward the processing space V from the first discharge port 54 formed near the lower end of each partition member 5 through the internal flow path 51 of each partition member 5, and argon gas and oxygen gas Gas is discharged toward the processing space V through the second discharge port 65 formed on the lower surface of each discharge member 60.

At the same time as the gas supply is started, a high-frequency current (specifically, for example, a high-frequency current of 13.56 MHz) flows from the high-frequency power supply 44 to the inductively coupled antenna 41. Then, electrons are accelerated by the electric field (high frequency induction electric field) around the inductively coupled antenna 41, and plasma (inductively coupled plasma) is generated. When the plasma is generated, the source gas and oxygen in the processing space V are activated and reactive species are generated and deposited on the surface of the substrate 9 to form a film (in this example, a SiO ₂ film) on the substrate 9. The

  As described above, in the plasma processing apparatus 100, the partition member 5 is disposed in the gap between the adjacent inductively coupled antennas 41, thereby suppressing a local increase in plasma intensity in the region near the substrate 9. Has been. Therefore, a film having a uniform film thickness is formed on the surface of the substrate 9.

  On the other hand, when viewed along the Z axis, the intensity of the plasma generated in the processing space V becomes stronger as it is closer to the inductively coupled antenna 41 (specifically, closer to the center Q of the virtual circle q). Here, as described above, in the plasma processing apparatus 100, the first discharge port 54 formed near the lower end of the partition member 5 and the lower surface of the discharge member 60 are formed as discharge ports for discharging gas into the processing space V. There are two types of discharge ports, the second discharge port 65 formed. Among these, the first discharge port 54 is disposed at a position lower than the second discharge port 65. Therefore, the gas discharged from the first discharge port 54 diffuses in the processing space V around a region where the plasma intensity is relatively low, and the gas discharged from the second discharge port 65 has a relatively high plasma intensity. The processing space V is diffused around a region having a high value. For this reason, for example, a gas of a kind in which a desired reactive species can be obtained by being exposed to relatively weak plasma is discharged from the first discharge port 54 and exposed to relatively strong plasma. What is necessary is just to discharge from the 2nd discharge port 65 about the kind of gas from which a reactive seed is obtained. According to this configuration, for example, a kind of gas that is preferably exposed to a relatively weak plasma is excessively decomposed by being exposed to a plasma that is too strong, and a desired reactive species cannot be obtained. The situation can be avoided.

<4. Effect>
According to the above embodiment, the plurality of inductively coupled antennas 41 are arranged in a line. When a plurality of inductively coupled antennas 41 are arranged in a line, a local increase in plasma intensity is likely to occur at a position corresponding to the gap between adjacent inductively coupled antennas 41 in the vicinity of the target substrate 9. However, as described above, by arranging the partition member 5 formed of a dielectric between the adjacent inductively coupled antennas 41, it is possible to suppress the occurrence of such a local increase in plasma intensity. That is, the uniformity of the plasma intensity in the space near the substrate 9 can be improved.

  Further, as described above, the partition member 5 is adjusted by adjusting the protruding dimension h of the partition member 5 so that the lower end 50 of the partition member 5 is higher than the third horizontal plane H3 (that is, the position on the top plate 11 side). A sufficient space can be ensured between 5 and the substrate 9. According to this configuration, the partition member 5 does not adversely affect the process on the substrate 9 (in the above example, the film forming process).

  Further, as described above, the substrate 9 is adjusted by adjusting the protruding dimension h of the partition member 5 so that the lower end 50 of the partition member 5 is lower than the fourth horizontal plane H4 (that is, the position on the substrate 9 side). It is possible to effectively suppress the local increase in plasma intensity in the vicinity region of.

  In particular, as described above, the substrate 9 is adjusted by adjusting the protruding dimension h of the partition member 5 so that the lower end 50 of the partition member 5 is located at a position lower than the first horizontal plane H1 (that is, the position on the substrate 9 side). It is possible to sufficiently improve the uniformity of the plasma intensity in the region in the vicinity of.

  Further, according to the above-described embodiment, when gas is discharged from the first discharge port 54, for example, compared with a case where gas is discharged from the second discharge port 65, a region where the plasma intensity is relatively low in the processing space V In addition, gas can be discharged. Therefore, as described above, for example, a kind of gas that is preferably exposed to relatively weak plasma is excessively decomposed by being exposed to too strong plasma, and the desired reactive species cannot be obtained. Such a situation can be avoided.

  Further, in the above embodiment, the partition member 5 is disposed in all the gaps between the adjacent inductively coupled antennas 41. The partition member 5 is also disposed between the end inductively coupled antenna 41 and the X-side side wall of the processing chamber 1. According to this configuration, when the gas is discharged from the first discharge port 54, the gas can be discharged uniformly over the entire processing space V, and thereby the uniformity of the film thickness formed on the substrate 9. Can be increased.

<5. Modification>
While the embodiments of the present invention have been described above, the present invention can be modified in various ways other than those described above without departing from the spirit of the present invention.

<I. Modification regarding size of partition member 5>
For example, the plurality of partition members 5 do not necessarily have the same size. For example, as shown in FIG. 6, the main body of the partition member 5 (hereinafter also referred to as “specific partition member 5 e”) disposed between the inductively coupled antenna 41 at the end and the adjacent inductively coupled antenna 41. The height dimension of 501 (dimension along the Z axis) may be formed larger than the height dimension of the main body 501 of the other partition member 5f.

  In this case, the protrusion dimension h1 of the specific partition member 5e is larger than the protrusion dimension h2 of the other partition member 5f (h1> h2). However, also in this case, it is preferable that the protrusion dimension h1 of the specific partition member 5e is adjusted so that the lower end 50e is located on the top plate 11 side with respect to the third horizontal plane H3 (see FIG. 2). Moreover, it is preferable that the protrusion dimension h2 is adjusted so that the lower end 50f may come to the position of the board | substrate 9 side rather than the 4th horizontal surface H4 (refer FIG. 2), and the said lower end 50f is the other partition member 5f. It is particularly preferable that the projecting dimension h2 is adjusted so that it is positioned closer to the substrate 9 than the first horizontal plane H1 (see FIG. 2).

  By making the specific partition member 5e larger than the other partition members 5f, the uniformity of the plasma intensity in the region near the substrate 9 can be particularly enhanced. That is, as can be seen from FIG. 9, the gap between the end inductively coupled antenna 41 and the adjacent inductively coupled antenna 41 has a particularly large local plasma intensity increase compared to other gaps. This is considered to be due to the fact that the plasma formed in the processing space V is pushed toward the inside of the processing space V by the side wall on the ± X side of the processing chamber 1. If the specific partition member 5e is made larger than the other partition members 5f, the local plasma intensity increases at a position corresponding to the gap between the inductively coupled antenna 41 at the end and the adjacent inductively coupled antenna 41. Can be suppressed particularly strongly. Thereby, the uniformity of the plasma intensity in the region near the substrate 9 can be particularly enhanced.

  However, here, an example in which the partition member 5 disposed between the inductive coupling antenna 41 at the end and the adjacent inductive coupling antenna 41 is made larger than the other partition members 5 has been described. The partition member 5 can be made relatively large (or small). The position at which the partition member 5 is made relatively large (or small) is determined according to various processing conditions (for example, the layout of the inductively coupled antenna 41, the shape of the processing chamber 1, etc.). That's fine.

  In the above example, the aspect in which the height dimension of the specific partition member 5 is relatively large has been exemplified, but instead of the height dimension (or in addition to the height dimension), the specific partition member By relatively increasing (or decreasing) at least one of the width dimension (dimension in the Y direction) 5 or the depth dimension (dimension in the X direction), the size of the partition member 5 is relatively increased. It may be larger (or smaller). However, as described above, it is the protruding dimension of the partition member 5 that most directly affects the effect of suppressing the local increase in plasma intensity at the position corresponding to the gap between the adjacent inductively coupled antennas 41. Many. That is, changing the height dimension of the partition member 5 is often the simplest and most effective for adjusting the plasma intensity.

<Ii. Modified example of internal flow path>
The internal flow path formed inside the partition member 5 is not necessarily limited to the shape exemplified above. FIG. 7 shows a partition member 5a including an internal flow path 51a according to a modification.

  The internal flow path 51a includes an upstream flow path 52 and a downstream flow path 53a. Further, a slit 54a that communicates the internal flow path 51a and the processing space V is formed in the bottom plate of the main body 501 of the partition member 5a so as to extend in the Y direction. The configuration of the upstream flow path 52 is the same as that in the above embodiment.

  The downstream flow path 53a has a shape in which a plurality of cavities 531a, 532a, and 533a are connected by a flow path extending in the vertical direction. Specifically, the downstream flow path 53a includes a first cavity 531a, a second cavity 532a, and a third cavity 533a in order from the top. In addition, the downstream flow path 53a has two pieces for connecting the first flow path 534a that connects the upstream flow path 52 and the first cavity 531a, and the first cavity 531a and the second cavity 532a that is disposed below the first flow path 531a. Second flow paths 535a and 535a, and four third flow paths 536a, 536a, 536a and 536a connecting the second cavity 532 and the third cavity 533 disposed below the second cavity 532. The third cavity 533a communicates with the slit 54a at the lower end. Specifically, the third cavity 533a and the slit 54a communicate with each other through a conduction path 537a having a shape in which the width along the X direction becomes narrower from the upper end toward the lower end.

  In this configuration, the gas supplied to the internal flow path 51 a by the gas supply unit 6 first flows into the upstream flow path 52, where it is decelerated by the porous body 521. And it flows in into the 1st channel 534a. The gas that has flowed into the first flow path 534a first flows into the first cavity 531a. The gas flowing into the first cavity 531a diffuses in the first cavity 531a and is further decelerated, and the flow is made uniform and stabilized. An approximately equal amount of gas flows into each of the two second flow paths 535a. The gas that has flowed into the second cavity 532a through each second flow path 535a diffuses again in the second cavity 532a, further decelerates, and the flow is made more uniform and stabilized. An approximately equal amount of gas flows into each of the four third flow paths 536a, 536a, 536a, 536a. The gas that has flowed into the third cavity 533a via each third flow path 536a diffuses again in the third cavity 533a, further decelerates, and the flow is made more uniform and stabilized. And it discharges toward the process space V from the slit 54a. In each of the cavities 531a, 532a, and 533a, the flow is sufficiently decelerated and uniformized and stabilized, so that the gas discharged from the slit 54a enters the processing space V at an intended speed. It spreads evenly.

  However, also in this case, in order to sufficiently prevent the gas flowing through the internal flow path 51a from being converted into plasma in the internal flow path 51a, the internal flow path 51 has a distance between the pair of nearest walls, 5 mm "or less. That is, the internal flow path 51a is dimensioned such that each position in the internal flow path 51a does not deviate more than “2.5 mm” from at least a part of the tube wall (that is, the inner wall of the partition member 5a).

<Iii. Other variations>
In the above embodiment, the partition member 5 is arranged between the end inductively coupled antenna 41 and the side wall on the X side of the processing chamber 1. However, the partition member 5 is omitted. Also good. In the above embodiment, the partition members 5 are arranged in all the gaps between the adjacent inductively coupled antennas 41. However, the partition members 5 do not necessarily have to be arranged in all the gaps. For example, the partition member 5 may be disposed only between the end inductive coupling antenna 41 and the adjacent inductive coupling antenna 41, and the other partition members 5 may be omitted.

  In the above embodiment, the internal flow path 51 is formed in the partition member 5, but the internal flow path 51 does not necessarily have to be formed in the partition member 5. That is, the partition member 5 may be a solid member. Further, the internal flow path 51 may be formed only in a part of the plurality of partition members 5.

  In the drawings referred to in the above embodiment, the inductively coupled antenna 41 has a shape in which a pair of vertically extending portions are connected by portions that are bent in an arc shape. The shape is not limited to this. For example, in the inductively coupled antenna 41, as illustrated in FIG. 8, each of a pair of vertically extending portions bends in an arc shape (that is, an arc-shaped portion that bends along the arc of the virtual circle q). The shape which continues to the part extended horizontally may be sufficient. In this case, a horizontal plane passing through the center Q of the virtual circle q is the fourth horizontal plane H4.

  In the above-described embodiment, the substrate 9 may be formed with a film while being transported by the holding transport unit 2 (that is, while being relatively moved with respect to the plasma generating unit 4), or the holding transport unit 2. The film may be formed while being held in a stationary state (that is, in a state of being stationary with respect to the plasma generating unit 4). In the above-described embodiment, a holding unit that holds the substrate 9 in a stationary state may be provided instead of the holding conveyance unit 2 that conveys the substrate 9 while holding it. In this case, the substrate 9 carried into the processing space V is formed with a film while being held in a stationary state by the holding unit.

  In the plasma processing apparatus 100 according to the above embodiment, the processing gas used for forming the film is not limited to silane gas, and may be germane gas, carbon-based gas, or the like. Further, the additive gas used for forming the thin film is not necessarily limited to the mixed gas of argon gas and oxygen gas, and argon gas, oxygen gas, ammonia gas, nitrogen gas, or the like may be used alone or in combination. And may be used as an additive gas. In addition, when mixing 2 or more types of gas, you may discharge each of the said 2 or more types of gas from a separate discharge outlet. In this case, each gas is mixed in the processing space V. Further, a gas (doping gas) that is a raw material for doping may be supplied as necessary.

  In the above embodiment, the case where the plasma processing apparatus according to the present invention is applied to a plasma CVD apparatus is described. However, the plasma processing apparatus according to the present invention is applied to various apparatuses that perform plasma processing. can do. For example, the present invention may be applied to a sputtering apparatus that forms a thin film on an object by sputtering a target with ions in a plasma atmosphere.

DESCRIPTION OF SYMBOLS 1 Processing chamber 2 Holding conveyance part 3 Heating part 4 Plasma generation part 5 Partition member 6 Gas supply part 7 Exhaust part 8 Control part 9 Substrate 41 Inductive coupling type antenna 44 High frequency power supply 51, 51a Internal flow path 52 Upstream flow path 53s, 53t , 53a Downstream flow path 54 Discharge port 61 First gas supply unit 62 Second gas supply unit 90 Carrier 100 Plasma processing apparatus

Claims (7)

A plasma processing apparatus,
A processing chamber for forming a processing space therein;
A holding unit for holding an object to be processed in the processing space;
A plurality of inductively coupled antennas having less than one turn, and
A high-frequency power source connected to the plurality of inductively coupled antennas;
A partition member formed of a dielectric;
With
The plurality of inductively coupled antennas are provided in the processing space, and the plurality of inductively coupled antennas are arranged on a virtual axis where a center point of a line segment connecting both ends of each of the plurality of inductively coupled antennas is defined. Are arranged in a line along the virtual axis,
The partition member is disposed on a common arrangement surface with the plurality of inductively coupled antennas and between adjacent inductively coupled antennas.
Plasma processing equipment. A plasma processing apparatus,
A processing chamber for forming a processing space therein;
A holding unit for holding an object to be processed in the processing space;
A plurality of inductively coupled antennas having less than one turn, and
A high-frequency power source connected to the plurality of inductively coupled antennas;
A partition member formed of a dielectric;
With
The plurality of inductively coupled antennas are arranged in a line along the virtual axis by being arranged on a virtual axis where a center point of a line segment connecting both ends of the plurality of inductively coupled antennas is defined. Has been
The partition member is disposed between adjacent inductively coupled antennas;
The inductively coupled antenna and the partition member are arranged on a common arrangement surface;
The horizontal plane including the end of the inductively coupled antenna projecting from the arrangement surface is referred to as a first horizontal plane,
The horizontal plane including the upper surface of the object held by the holding portion is called a second horizontal plane,
An intermediate horizontal plane between the first horizontal plane and the second horizontal plane is referred to as a third horizontal plane.
An end of the partition member on the side protruding from the arrangement surface is present on the arrangement surface side with respect to the third horizontal plane.
Plasma processing equipment. A plasma processing apparatus,
A processing chamber for forming a processing space therein;
A holding unit for holding an object to be processed in the processing space;
A plurality of inductively coupled antennas having less than one turn, and
A high-frequency power source connected to the plurality of inductively coupled antennas;
A partition member formed of a dielectric;
With
The plurality of inductively coupled antennas are arranged in a line along the virtual axis by being arranged on a virtual axis where a center point of a line segment connecting both ends of the plurality of inductively coupled antennas is defined. Has been
The partition member is disposed between adjacent inductively coupled antennas;
The inductively coupled antenna and the partition member are arranged on a common arrangement surface;
The end of the inductively coupled antenna that protrudes from the arrangement surface includes an arc-shaped portion that bends along an arc of a virtual circle,
A horizontal plane passing through the center of the virtual circle is called a fourth horizontal plane,
An end of the partition member on the side protruding from the arrangement surface is present on the object side with respect to the fourth horizontal plane.
Plasma processing equipment. A plasma processing apparatus,
A processing chamber for forming a processing space therein;
A holding unit for holding an object to be processed in the processing space;
A plurality of inductively coupled antennas having less than one turn, and
A high-frequency power source connected to the plurality of inductively coupled antennas;
A partition member formed of a dielectric;
With
The plurality of inductively coupled antennas are arranged in a line along the virtual axis by being arranged on a virtual axis where a center point of a line segment connecting both ends of the plurality of inductively coupled antennas is defined. Has been
The partition member is disposed between adjacent inductively coupled antennas;
The inductively coupled antenna and the partition member are arranged on a common arrangement surface;
The horizontal plane including the end of the inductively coupled antenna projecting from the arrangement surface is referred to as a first horizontal plane,
The end of the partition member on the side protruding from the arrangement surface is present on the object side with respect to the first horizontal plane.
Plasma processing equipment. A plasma processing apparatus,
A processing chamber for forming a processing space therein;
A holding unit for holding an object to be processed in the processing space;
A plurality of inductively coupled antennas having less than one turn, and
A high-frequency power source connected to the plurality of inductively coupled antennas;
A partition member formed of a dielectric;
With
The plurality of inductively coupled antennas are arranged in a line along the virtual axis by being arranged on a virtual axis where a center point of a line segment connecting both ends of the plurality of inductively coupled antennas is defined. Has been
The partition member is disposed between adjacent inductively coupled antennas;
The partition member is
An internal gas flow path formed inside;
A discharge port communicating the internal gas flow path and the processing space;
A gas supply section for supplying gas to the internal gas flow path;
A plasma processing apparatus. A plasma processing apparatus,
A processing chamber for forming a processing space therein;
A holding unit for holding an object to be processed in the processing space;
A plurality of inductively coupled antennas having less than one turn, and
A high-frequency power source connected to the plurality of inductively coupled antennas;
A partition member formed of a dielectric;
With
The plurality of inductively coupled antennas are arranged in a line along the virtual axis by being arranged on a virtual axis where a center point of a line segment connecting both ends of the plurality of inductively coupled antennas is defined. Has been
The partition member is disposed between adjacent inductively coupled antennas;
The plasma processing apparatus includes a plurality of the partition members,
At least one partition member of the plurality of partition members is different in size from other partition members,
Plasma processing equipment. The plasma processing apparatus according to claim 6,
Among the plurality of inductively coupled antennas arranged in a row, a partition member disposed between the inductively coupled antenna disposed at the end and the inductively coupled antenna adjacent to the inductively coupled antenna is provided. , Larger than other partition members,
Plasma processing equipment.

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