JP6091291B2 - Spectrometer for pulsed light source - Google Patents

Description

  The invention of the present application relates to a technique for measuring spectral characteristics using a pulsed light source.

  Spectral measurements are often performed when analyzing the light characteristics of an object for each wavelength or measuring the spectral radiation characteristics (spectral irradiance, spectral radiance, spectral radiant flux, etc.) of a light source. Since the spectroscopic measurement is to measure the light intensity for each wavelength, a spectroscopic element such as a grating (diffraction grating) is used. Photosensors such as photodiodes and CCDs are used as sensors for detecting the light intensity at each wavelength (hereinafter referred to as measurement sensors). Many sensor elements are arranged in a line, and the light intensity at each wavelength is once measured. In many cases, an array sensor for detecting the sensor is used.

  One of the objects of such spectroscopic measurement is a solar simulator for solar cell evaluation. Solar simulators for solar cell evaluation are used in solar cell research and development, solar cell shipment inspection, etc., and irradiate solar cells with artificial light with a spectrum similar to that of sunlight to obtain spectral power generation characteristics. taking measurement. Since the power consumption is lower than in the case of continuous light irradiation, a pulsed light source such as a xenon flash lamp is used as the light source. In order to sufficiently evaluate the solar cell, the emission spectrum of the light source needs to be sufficiently approximated to sunlight, and therefore, the emission spectrum of the light source is checked in advance using a spectroscopic measurement device. In addition, for example, the spectral characteristics of the light source are measured when developing a flash lamp for a camera, shipping inspection, or the like.

  In the measurement of spectral characteristics using such a pulse light source, it is necessary to acquire the output from the measurement sensor with high accuracy at the timing of pulse emission. As a technique for this purpose, as disclosed in Patent Document 1, pulse light emission is detected by an optical sensor different from the measurement sensor (hereinafter, this sensor is referred to as a light emission detection sensor), and the light emission detection sensor is detected. It is common to take the timing with the output from. Specifically, a certain threshold value is set for the output from the light emission detection sensor, it is determined that pulse light emission has occurred when the threshold value is exceeded, and the measurement sensor is operated to start measurement.

  In addition to the case of using the light emission detection sensor, it is also conceivable that a control signal is output from the lighting circuit of the pulse light source and the operation of the measurement sensor is started accordingly. However, since a pulse light source and its lighting circuit are usually provided by a light source manufacturer as a light source device, and a spectroscopic measurement device including a spectroscope and a measurement sensor is provided by another manufacturer, the output from the pulse light source lighting circuit is It is generally difficult to control the operation of the measuring sensor.

JP 2010-189492 A

As described above, in Patent Document 1, it is proposed that the timing of pulse emission is detected by a light emission detection sensor, and it is determined that pulse emission has occurred when the output exceeds a certain threshold value, and the measurement sensor is operated. Has been.
However, in the case of the technique of Patent Document 1, the time from when pulse emission occurs until the intensity exceeds a certain threshold, and the time from when the threshold is exceeded until the measurement sensor starts to operate are measured. You cannot get a value. Since these time periods are the time periods until the intensity of pulse light emission reaches a sufficient value, it may be considered that there is no problem even if measurement is not possible. However, depending on the measurement, it may be desired to obtain spectral characteristic data from a very weak light state in which light emission has just started. The technique of Patent Document 1 cannot meet such a request.

  In addition, in one cycle of a pulse in which light emission starts and ends, a spectroscopic measurement is not performed at one point in a time zone in which the light emission reaches a peak, but a certain time zone is set in one pulse cycle, and the time zone In some cases, it may be desirable to perform spectroscopic measurement at a light intensity that varies with the That is, there is a case where it is desired to measure not only the spectral characteristic at a certain point in time but also the spectral characteristic in a certain time zone including the spectral measurement at the time before and after that point. In the technique of Patent Document 1, the measurement sensor is operated by setting a certain delay time after it is determined that the threshold value has been exceeded. I can't.

  Furthermore, if the method for operating the measurement sensor after judging that there is pulsed light emission based on the output of the light emission detection sensor, the sensitivity of the light emission detection sensor, the size of the threshold, the response time of the measurement sensor, etc. A certain time lag is inevitably generated before the measurement. Even if the delay time to be set is zero, the time lag cannot be made zero because of the response time of the elements and circuits, and it must be measured after a certain time has passed. In this case, in the case of a pulse light source with a very short pulse width (for example, a pulse width on the order of microseconds) that may be used in a flash lamp for a camera, the light emission detection sensor detects light emission and then operates the measurement sensor. In this case, the peak of the pulse may pass before the measurement sensor operates. In other words, the method of Patent Document 1 is not suitable for spectroscopic measurement for a pulse light source having a short pulse width.

  The invention of the present application has been made to solve such a problem, and enables spectroscopic measurement in an optimal time zone for one pulse emission in spectroscopic measurement using a pulsed light source. Thus, the present invention has the significance of providing a spectroscopic measurement technique capable of performing spectroscopic measurement in an optimal time zone even for a light source having a short pulse width.

In order to solve the above problems, the invention according to claim 1 of the present application is a spectroscopic measurement apparatus for a pulsed light source that measures spectral characteristics using a pulsed light source,
A spectroscopic element for splitting light from a pulsed light source;
A measuring sensor on which pulsed light of each wavelength split by the spectroscopic element is incident;
Storage means for storing an output value from the measurement sensor;
A light emission detection sensor for detecting the light emission of the pulse light source;
A measurement result acquisition means for acquiring a measurement result;
Setting means for setting the operation of the storage means and the measurement result acquisition means,
The storage means includes a storage unit composed of n storage areas from the first to the nth, and an output value from the measurement sensor at a repetition period T equal to or longer than the shortest readout time of the measurement sensor. Is to repeatedly memorize,
In the repeated storage, after the output value is stored in the first storage area, the output value is stored in the second storage area after the repetition period T, and this is repeated, and the output value is stored in the last nth storage area. Then, after the next T seconds, the output value is stored in the first first storage area, and the output value is similarly recorded from the second storage area to the nth storage area. Thus, recording of output values in the first to nth storage areas is repeated,
The setting means is capable of setting the measurement end timing and the measurement result acquisition span,
The measurement end timing is set according to the output from the sensor for detecting light emission, the elapsed time since it was determined that there was pulse light emission, or the number of storage areas that store the output value after it was determined that there was pulse light emission. To set,
Measurement result acquisition span setting is to set the measurement result acquisition span in the form of the time zone or the number of storage areas based on the time when it was determined that there was pulsed light emission,
When it is determined that there has been pulsed light emission according to the output from the sensor for detecting light emission, the measurement result acquisition means ends the storage repeatedly according to the measurement end timing setting set by the setting means, and the measurement result set by the setting means According to the acquisition span, the output value is read from each storage area and used as a measurement result.
In order to solve the above-mentioned problem, the invention according to claim 2 is the configuration according to claim 1, wherein the setting means sets the measurement result acquisition span to be greater than the time at which it was determined that the pulsed light emission occurred. It has a configuration in which it can be set in a form including a storage area where output values are stored in the previous time or the previous time.
In order to solve the above problem, the invention according to claim 3 is provided with a light receiving unit that receives light from the pulse light source in the configuration according to claim 1 or 2,
The light receiving unit has a light receiving optical element,
The light emission detection sensor is configured to be provided on a frame body that holds a light receiving optical element.

As described below, according to the invention of claim 1 of the present application, since the measurement result acquisition span is set in the form of the time zone or the number of storage areas based on the time when it was determined that there was pulsed light emission, Measurement results can be obtained for an optimal time period including the time when light is emitted. Moreover, the measurement result of the spectral characteristics can be obtained in an optimum time zone even for a light source with a short pulse width.
According to the second aspect of the present invention, in addition to the above effect, the output value at the stage before the time when the pulse light emission is assumed can be included in the measurement result, so that the intensity of the pulse light emission is extremely high. Therefore, it is possible to measure the spectral characteristics at the initial stage that is weak.
According to the invention described in claim 3, in addition to the above effects, since the light-receiving detection sensor is provided in the light receiving unit, setting of the apparatus is easy.

It is the schematic of the spectrometer for pulse light sources which concerns on embodiment of this invention. 2 is a schematic perspective view of a light receiving unit 51 shown in FIG. FIG. 2 is a diagram conceptually illustrating a configuration of a storage unit and measurement result acquisition of the apparatus illustrated in FIG. 1, and a diagram schematically illustrating a timing chart and a structure of a storage unit 71.

Hereinafter, modes (embodiments) for carrying out the present invention will be described.
FIG. 1 is a schematic view of a pulse light source spectroscopic measurement apparatus according to an embodiment of the present invention. The apparatus shown in FIG. 1 is an apparatus that performs spectroscopic measurement using a pulse light source, and is an apparatus that measures spectral irradiance as an example. The apparatus shown in FIG. 1 includes a spectroscopic element 2 that splits light from a pulsed light source 1, a measurement sensor 3 on which pulse light of each wavelength split by the spectroscopic element 2 is incident, and an output value from the measurement sensor 3. According to the output from the storage means, the light emission detection sensor 4 for detecting that the pulsed light source 1 has emitted light, and the output from the light emission detection sensor 4, the measurement result is obtained from the output value stored in the storage means Measurement result acquisition means, and setting means for setting the operation of the storage means and the measurement result means.

The pulse light source 1 is an object whose spectral radiation characteristics are measured by this apparatus. In this embodiment, it is an apparatus for checking the spectral characteristics of the solar simulator 10 described above, and the pulse light source 1 is built in the solar simulator 10.
The solar simulator 10 includes a pulse light source 1 having an emission spectrum similar to sunlight such as a xenon flash lamp, a condensing mirror 101, a filter 102 such as an air mass filter, and the like.

The spectroscopic measurement apparatus shown in FIG. 1 includes an incident optical system 5 for optimally making the light from the pulsed light source 1 incident on the spectroscopic element 2. The incident optical system 5 includes a light receiving unit 51 disposed at a position for receiving light from the pulsed light source 1, an optical fiber 52 that guides light received by the light receiving unit 51 to the spectroscopic element 2, and the like.
FIG. 2 is a schematic perspective view of the light receiving unit 51 shown in FIG. As shown in FIGS. 1 and 2, the light receiving unit 51 includes a frame body 511, a diffusion plate 512 held by the frame body 511, and the like. The frame body 511 has an incident end holding portion 513 that holds the incident end of the optical fiber 52.

  The diffusing plate 512 is for measuring with high accuracy without being affected by the illuminance distribution of the light from the pulse light source 1. In this embodiment, a reflection type is used for the diffusion plate 512, but a transmission type may be used. The diffusing plate 512 is desirably a standard reflecting plate, that is, a plate having a uniform reflectance (or transmittance) regardless of the wavelength. For example, a Spectralon reflector manufactured by Labsphere can be used.

The optical fiber 52 is preferably formed of a core material having sufficient transparency over the entire measurement wavelength range. In addition, it is desirable to use a material whose transmittance has little wavelength dependency. Such an optical fiber 52 is commercially available from various companies for spectroscopic measurement, and can be selected and used as appropriate. As shown in FIG. 2, the incident end of the optical fiber 52 is held by a frame body 511 so that pulsed light reflected and diffused by the diffusion plate 512 is incident thereon.
In this embodiment, the light emission detection sensor 4 is provided in the light receiving unit 51. As shown in FIG. 2, the light receiving surface of the frame body 511 is provided with a small opening, and the light emission detection sensor 4 is built in the frame body 511 so as to receive light through this opening.

  On the other hand, as shown in FIG. 1, the apparatus has a housing 6 in which the spectroscopic element 2 and the measurement sensor 3 are accommodated. The housing 6 is provided with an emission end holding portion 61 that holds the emission end of the optical fiber 52. The emission end holding unit 61 holds the emission end of the optical fiber 52 so that it is in an optimal position and posture with respect to the spectroscopic element 2.

For the spectroscopic element 2, a diffraction grating (grating) is used. For example, a diffraction grating having 300 grooves / mm and a blaze wavelength of about 400 nm is used. In order to share the wavelength range, a plurality of spectroscopic elements 2 may be used.
The spectroscopic element 2 is provided as a part of the spectroscopic optical system 20. In this embodiment, a Zernie Turner type optical system is employed, and a first concave mirror 201 that irradiates the spectroscopic element (diffraction grating) 1 with the light from the entrance slit 53 as parallel light, and the spectroscopic element (diffraction grating). And a second concave mirror 202 for condensing and entering the light of each wavelength dispersed in 1 on each sensor element of the measurement sensor 3. In addition, it is also possible to employ other types of spectroscopic optical systems such as a Fasty-Evert type.

  As the measurement sensor 3, a linear array sensor is used in the present embodiment. The linear array sensor is a sensor in which photoelectric conversion elements such as photodiodes or CCDs are arranged in a line. Each sensor element photoelectrically converts each wavelength of the dispersed light and outputs an intensity, and the width of the light receiving surface of each element and the number of elements according to the resolution of the spectral element 2 and the wavelength range to be measured. Is decided. For example, a linear array sensor in which about 2048 silicon photodiodes are arranged is used as the measurement sensor 3.

Note that the measurement sensor 3 is arranged in an optimum position and posture in relation to the spectroscopic element 2. In other words, each sensor element is disposed at a position where light of each wavelength separated by the spectroscopic element 2 reaches.
In addition, the measurement sensor 3 which is a linear array sensor can accumulate (integrate) and read out the output value (photoelectrically converted value) of each sensor element over a certain length of time. This time is the shortest time during which a signal can be read from the measurement sensor 3, and is hereinafter referred to as the shortest read time.

In this embodiment, the storage unit, the measurement result acquisition unit, and the setting unit are realized by a programmable logic device (PLD) 7. The PLD 7 includes a storage unit, an arithmetic processing unit, and various control circuits, and each circuit is defined and configured so as to exhibit the following functions.
More specifically, a control board on which the PLD 7 is mounted is provided in the housing 6. The PLD 7 includes a storage unit 71, a storage control circuit 72 that controls the storage operation of the output value from the measurement sensor 3 in the storage unit 71, and a measurement result that acquires a measurement result from the output value stored in the storage unit 71. An acquisition circuit 73, a span setting circuit 74 for setting a span for acquisition of measurement results, an event generation circuit 75 for generating an event signal in accordance with an output from the light emission detection sensor 4, and the like are provided. The measurement sensor 3 and the light emission detection sensor 4 are connected to the PLD 7 via AD converters 771 and 772, respectively.

As shown in FIG. 1, the storage unit 71 has a large number of storage areas 711 for storing output values.
FIG. 3 is a diagram conceptually showing the configuration of the storage means and the measurement result acquisition means of the apparatus shown in FIG. 1, and is a diagram schematically showing the timing chart and the structure of the storage unit 71. The apparatus of this embodiment is configured to always operate the measurement sensor 3, and sequentially stores the output from the measurement sensor 3 in each storage area 711 while reading out the output from the measurement sensor 3 at a predetermined cycle. Hereinafter, this period is referred to as a repetition period T. The repetition period T is equal to or longer than the shortest readout time of the measurement sensor 3.

  The measurement sensor 3 accumulates signals within the shortest readout time and enables readout as an output value. The storage control circuit 72 reads the output value from the measurement sensor 3 every time the repetition period T is reached. The read output value is sent to the PLD 7 via the AD converter 771, and the storage control circuit 72 is defined to sequentially store the sent output value in each storage area 711. That is, when the storage area 711 is changed from the first storage area to the nth storage area, the storage control circuit 72 first stores the output value in the first storage area 711 and the second after the repetition period T seconds. The output value is stored in the storage area 711. This process is repeated until output values are sequentially stored up to the nth storage area, and after the next T seconds, the output values are overwritten and stored in the first storage area. Similarly, output values are sequentially overwritten from the second storage area. A storage control circuit 72 is defined to perform such repeated storage.

  For convenience of explanation, FIG. 3 conceptually shows storage areas for output values every T seconds from the first to the nth. The storage unit 71 can be thought of as a series of storage areas 711 connected like a clock. In this embodiment, the number of storage areas 711 is 1024, and the repetition period T is about 1 millisecond. Therefore, the time for recording n data in the first to nth storage areas is about 1 second.

As shown in FIG. 3, one output value stored in each storage area 711 is an output value from all sensor elements of the measurement sensor 3, and measured values (spectrums) of all wavelengths (λ _{1 to} λ _k ). It is. That is, the storage unit 71 records a total of 1024 spectra from the first storage area 711 to the 1024th storage area 711. Each spectrum has an output value at each time every T seconds. If attention is paid to one storage area from 1 to n, the spectrum is repeatedly overwritten in a cycle of one cycle.

  If the spectrum is stored in the m-th (1 <m <1024) storage area 711 at a specific time, the spectra stored in each storage area 711 at that time are arranged in chronological order (old order). , The order of the (m + 1) th to 1024th storage areas 711, followed by the order of the 1st to mth storage areas 711. The operation of sequentially storing the output value (spectrum) in the storage area 711 is repeated every cycle T seconds.

The storage control circuit 72 continuously performs the repeated storage after the operation of the apparatus is started. Then, the measurement result acquisition unit is configured to stop the storage repeatedly according to the setting of the measurement end timing in the setting unit. Hereinafter, this point will be described.
First, the output of the light emission detection sensor 4 is always input to the PLD 7 via the AD converter 712. The PLD 7 includes an event generation circuit 75. The event generation circuit 75 is a circuit that sets a certain threshold for the output of the light emission detection sensor 4 and generates an event signal when the threshold is exceeded. The event means that it is determined that pulse light emission has occurred, and the time when the event signal is generated (event time) is the time when the pulse light emission has occurred.

  The PLD 7 includes an end timing setting circuit 76 as a setting unit. The end timing setting circuit 76 is a circuit that sets the end timing of repeated storage according to the event time. The end timing is set by the elapsed time from the event time or the number of storage areas (number of repetition periods T) for storing the output value after the event time. The end timing setting circuit 76 includes a circuit that holds information on the end timing set by an external input, and this information is always input to the storage control circuit 72.

  On the other hand, the event signal generated by the event generation circuit 75 is input to the storage control circuit 72. When an event signal is input, the storage control circuit 72 refers to the information input from the end timing setting circuit 76, and when the set elapsed time has elapsed or for the number of storage areas set. It is defined that when the output value storage is completed, the repeated storage operation is ended. That is, the storage control circuit 72 does not read the output value from the measurement sensor 3 after the set elapsed time or the output of the set number to the storage area is completed, and therefore the next storage area 711 is not read. The update storage of the output value is not performed.

  The PLD 7 is defined so as to acquire the measurement result by operating the measurement result acquisition circuit 73 after the end of the repeated storage operation in this way. As shown in FIG. 1, the PLD 7 includes a span setting circuit 74 as a component of setting means. The span setting circuit 74 is a span setting circuit that acquires a measurement result (an output value that becomes a measurement value). A span is a certain length of time zone or a certain number of continuous storage areas. The span setting circuit includes a circuit for holding span setting information input from the outside as the length of the time zone or the number of storage areas.

  Such span setting is performed based on the event time. For example, when the span setting is set by the length of the time zone, it is set as a continuous time zone including the event time. The time zone before the event time is XX milliseconds, and the time zone after the event time is XX milliseconds. When the number of storage areas is set, XX storage areas are set retroactively from the event time, and XX storage areas are set as output values stored from the event time. When span setting information is input as time zone information, the span setting circuit automatically converts it into the number of storage areas and holds it as span setting information for the number of storage areas.

  As shown in FIG. 1, the span setting information held by the span setting circuit 74 is input to the measurement result acquisition circuit 73. On the other hand, the event signal generated by the event generation circuit 75 is also input to the measurement result acquisition circuit 73. When the event signal is input, the measurement result acquisition circuit 73 accesses the storage unit 71 and acquires the measurement result. At this time, the storage area from which the measurement value is acquired is specified according to the input span setting information, and the output value is read from the specified storage area to be used as the measurement result.

  That is, for example, it is assumed that the span setting information is set to have 100 storage areas before the event time and 500 storage areas after the event time. It is assumed that an event has occurred at time Ti, and the storage area storing the output value at that time is the xth. In this case, the measurement result acquisition circuit 73 sequentially reads output values from the respective storage areas 711 from the x-50th to the x + 100th, and outputs these as measurement results (measurement values). A measurement result acquisition circuit 73 is defined to selectively read data from the storage unit 71.

  The measurement result output by the measurement result acquisition circuit 73 in this way is output to the outside via an output circuit (not shown). The output circuit is a circuit that outputs and displays on the display unit when the device includes a display unit, and an appropriate output unit such as a USB when outputting to an external device such as a connected personal computer. The output circuit is an interface.

An operation and usage example of the spectrometer according to the embodiment having such a configuration will be described below.
As described above, when checking the spectral characteristics of the solar simulator 10, the light receiving unit 51 shown in FIG. That is, the light receiving unit 51 is arranged instead of the solar cell panel at a place where the solar cell panel to be evaluated is usually arranged.

The light receiving unit 51 is arranged as described above, the apparatus is turned on, and measurement is started. When the power supply of the apparatus is turned on, the measurement sensor 3 and the light emission detection sensor 4 start operation, and send output values to the PLD 7 via the AD converters 771 and 772, respectively.
The storage control circuit 72 in the PLD 7 sequentially stores the output values read from the measurement sensor 3 at each repetition period T in each storage area 711. However, since the pulsed light has not been irradiated yet, the output from each sensor element of the measurement sensor 3 is substantially zero, and an output value of substantially zero is stored in each storage area 711. The output of the light emission detection sensor 4 is input to the event generation circuit 75, but since it is substantially zero, no event signal is generated.

  In this state, the solar simulator 10 is operated to irradiate the light receiving unit 51 with pulsed light. The pulsed light is incident on the optical fiber 52 while being reflected and diffused by the diffusion plate 512, guided by the optical fiber 52, and introduced into the housing 6. Then, the pulsed light is split by the spectroscopic element 2 to become light of each wavelength, enters the measurement sensor 3 and is photoelectrically converted. As a result, the output value that was zero is changed to a certain finite value, and this value is recorded in each storage area 711.

  On the other hand, when there is pulse light emission, the output of the light emission detection sensor 4 appears, and when the output exceeds a certain threshold value, the event generation circuit 75 generates an event signal. As a result, the measurement result acquisition circuit 73 operates and reads out each output value from the corresponding storage area 711 according to the span setting information set by the span setting circuit 74. Then, an output circuit (not shown) outputs a measurement result composed of each output value (measurement value).

  According to the pulse spectrometer of the embodiment related to the configuration and operation as described above, the measurement sensor 3 is always operated regardless of the presence or absence of pulsed light emission, and the measurement result is acquired in the span including the time of pulsed light emission. The measurement result can be obtained as information of an arbitrary time zone before and after the pulse emission. For this reason, it is possible to freely examine what spectral characteristics are at the rise of pulsed light emission, and what spectral characteristics are in a state after pulsed light emission has reached its peak. Even with a light source having a short pulse width such as a flash lamp for a camera, the spectral characteristics can be examined optimally without missing the peak of light emission.

In addition, since measurement results can be obtained in continuous spans, it is possible to obtain measurement results such as how the spectral characteristics change during the pulse emission process. For example, it is possible to examine whether the spectral characteristics change in the process of changing the intensity of pulsed light emission.
In the apparatus of this embodiment, since the span setting circuit converts the span setting information input as time zone information into the number of storage areas and holds it, it is not necessary for the user to calculate the number of storage areas. For this reason, it is a highly convenient apparatus.

Further, in this embodiment, since the light emission detection sensor 4 is provided in the diffusion plate 512 unit, setting when starting measurement is easy. When the light emission detecting sensor 4 is provided separately from the light receiving unit 51, the light receiving unit 51 and the light emission detecting sensor 4 need to be arranged at the light receiving positions, respectively, but in the apparatus of the embodiment, the light receiving unit 51 is arranged. By doing so, the arrangement of the light emission detection sensor 4 is completed, so that setting is easy.
The configuration of the light receiving unit 51 is appropriately changed depending on the type of spectroscopic measurement. For example, in the case of spectral radiance measurement, a light receiving unit is used as a light receiving unit, and in the case of spectral radiant flux measurement, an integrating sphere is received. Used as a unit.

  In the above embodiment, the storage means, the measurement result acquisition means, and the like are realized by hardware called PLD 7, but many parts can be realized by software. For example, a general-purpose memory is mounted as a storage area, and a program for storing measurement values as described above is mounted. Then, by executing the program with a general-purpose processor, it is possible to adopt a configuration in which the measurement value is stored in each storage area 711 or the measurement result is acquired and output according to the span setting information.

Further, it is not always necessary to set continuous storage areas in the span setting. It is also possible to specify the storage area as skipping and to examine the spectral characteristics in discrete time transitions.
In addition, the use of a linear array sensor as the measurement sensor 3 is not an essential requirement in the present invention. If a wavelength sweeping mechanism is provided in the diffraction grating, a phototube, a single channel photodiode, or the like can be used as a measurement sensor.

DESCRIPTION OF SYMBOLS 1 Pulse light source 10 Solar simulator 2 Spectroscopic element 20 Spectroscopic optical system 3 Sensor for measurement 4 Sensor for detection 5 Light receiving unit 51 Frame body 52 Diffuser plate 6 Case 7 PLD
71 Storage Unit 711 Storage Area 72 Storage Control Circuit 73 Measurement Result Acquisition Circuit 74 Span Setting Circuit 75 Event Generation Circuit 76 End Timing Setting Circuit 771 AD Converter 772 AD Converter

Claims (3)

A pulse light source spectroscopic measurement device that measures spectral characteristics using a pulse light source,
A spectroscopic element for splitting light from a pulsed light source;
A measuring sensor on which pulsed light of each wavelength split by the spectroscopic element is incident;
Storage means for storing an output value from the measurement sensor;
A light emission detection sensor for detecting the light emission of the pulse light source;
A measurement result acquisition means for acquiring a measurement result;
Setting means for setting the operation of the storage means and the measurement result acquisition means,
The storage means includes a storage unit composed of n storage areas from the first to the nth, and an output value from the measurement sensor at a repetition period T equal to or longer than the shortest readout time of the measurement sensor. Is to repeatedly memorize,
In the repeated storage, after the output value is stored in the first storage area, the output value is stored in the second storage area after the repetition period T, and this is repeated, and the output value is stored in the last nth storage area. Then, after the next T seconds, the output value is stored in the first first storage area, and the output value is similarly recorded from the second storage area to the nth storage area. Thus, recording of output values in the first to nth storage areas is repeated,
The setting means is capable of setting the measurement end timing and the measurement result acquisition span,
The measurement end timing is set according to the output from the sensor for detecting light emission, the elapsed time since it was determined that there was pulse light emission, or the number of storage areas that store the output value after it was determined that there was pulse light emission. To set,
Measurement result acquisition span setting is to set the measurement result acquisition span in the form of the time zone or the number of storage areas based on the time when it was determined that there was pulsed light emission,
When it is determined that there has been pulsed light emission according to the output from the sensor for detecting light emission, the measurement result acquisition means ends the storage repeatedly according to the measurement end timing setting set by the setting means, and the measurement result set by the setting means A pulsed light source spectroscopic measurement apparatus, characterized in that an output value is read out from each storage area according to an acquisition span to obtain a measurement result.   The setting means may set the measurement result acquisition span in a form including a storage area in which an output value is stored at a time before or at a time before the time when the pulse light emission is determined to have occurred. The spectroscopic measurement device for a pulse light source according to claim 1, wherein the spectroscopic measurement device is capable of being used. Comprising a light receiving unit for receiving light from the pulse light source;
The light receiving unit has a light receiving optical element,
The pulse light source spectroscopic measurement apparatus according to claim 1, wherein the light emission detection sensor is provided on a frame body that holds a light receiving optical element.

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