JP6083858B2 - Film peeling device - Google Patents

Film peeling device Download PDF

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JP6083858B2
JP6083858B2 JP2012265297A JP2012265297A JP6083858B2 JP 6083858 B2 JP6083858 B2 JP 6083858B2 JP 2012265297 A JP2012265297 A JP 2012265297A JP 2012265297 A JP2012265297 A JP 2012265297A JP 6083858 B2 JP6083858 B2 JP 6083858B2
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flat plate
film
plate member
surface side
belt
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JP2013155043A (en
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篤 ▲高▼田
篤 ▲高▼田
雅一 ▲高▼津
雅一 ▲高▼津
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Nano TEM Co Ltd
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Nano TEM Co Ltd
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Priority to KR20130000205A priority patent/KR101494954B1/en
Priority to CN201310000524.6A priority patent/CN103193010B/en
Priority to TW102100235A priority patent/TWI483886B/en
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本発明は，平板状の被保護材の表面に貼着された保護フィルムを剥離するフィルム剥離装置に関する。   The present invention relates to a film peeling apparatus that peels off a protective film attached to the surface of a flat plate-shaped protected material.

液晶パネルなどの薄型ディスプレイパネル，半導体ウエハなどの電子デバイスの表面には，製造工程及び組み立て工程において，傷やゴミ・埃の付着などからを防止するために，その表面を保護するための保護フィルムが貼着される。このように，表面に保護フィルムが貼着された板状の電子デバイス（被保護材）の使用段階では，このフィルムを剥離する必要があり，さまざまなフィルム剥離手法が提案されている。   Protective film for protecting the surface of electronic devices such as thin display panels such as liquid crystal panels and semiconductor wafers in order to prevent scratches, dust, and dust from adhering during the manufacturing and assembly processes. Is pasted. Thus, at the stage of use of a plate-like electronic device (protected material) having a protective film attached to the surface, it is necessary to peel off this film, and various film peeling methods have been proposed.

特許文献１及び２は，液晶パネルの偏光板に貼着された保護フィルムの端部に粘着テープなどの粘着材を貼り付けて，その粘着テープを上方に引っ張り上げるようにして剥離する方法について開示している。特許文献３は，ガラス基板とその表面に貼着されたフィルムとの間に刃部を差し込み，フィルムの角部を剥離させる手法について開示している。特許文献４は，回転ゴムローラとフィルムの摩擦力により，保護フィルムを被保護材から剥離させる手法について開示している。特許文献５は，フィルムの被着面の法線に対して傾斜した方向から液体を噴射して，表示パネルに貼付されたフィルムを剥離する手法について開示している。   Patent Documents 1 and 2 disclose a method in which an adhesive material such as an adhesive tape is attached to an end of a protective film attached to a polarizing plate of a liquid crystal panel, and the adhesive tape is peeled off by pulling upward. doing. Patent document 3 is disclosing about the method of inserting a blade part between a glass substrate and the film stuck on the surface, and peeling the corner | angular part of a film. Patent Document 4 discloses a technique for peeling a protective film from a material to be protected by a frictional force between a rotating rubber roller and the film. Patent Document 5 discloses a technique for peeling a film affixed to a display panel by ejecting liquid from a direction inclined with respect to a normal line of a film deposition surface.

特開２０１０−１４９９６５号公報JP 2010-149965 A 特開２０００−９５４２９号公報JP 2000-95429 A 特開２０１０−２４７９８５号公報JP 2010-247985 A 特開２００３−２５２５２６号公報JP 2003-252526 A 特開２００４−１５７１４６号公報JP 2004-157146 A

しかしながら，被保護材が非常に薄くて軽く且つ柔軟性及び可撓性を有する部材（例えば厚さ数十〜百ミクロン程度のフィルムディスプレイなど）である場合，例えば粘着テープにより保護フィルムを剥離しようとすると，被保護材を下方側から吸着固定しておいても，保護フィルムと一緒に被保護材もめくれてしまい，保護フィルムを被保護材から剥離させることができない。他のフィルム剥離手法においても，被保護材が薄く可撓性を有する部材に貼着された保護フィルムの剥離に適さない。また，いずれのフィルム剥離手法も，装置が複雑，大がかりであり，手動での簡易な剥離操作にも適さない。   However, when the material to be protected is a very thin, light, flexible and flexible member (for example, a film display having a thickness of several tens to hundreds of microns), for example, an attempt is made to peel the protective film with an adhesive tape. Then, even if the material to be protected is adsorbed and fixed from the lower side, the material to be protected is turned up together with the protective film, and the protective film cannot be peeled off from the material to be protected. In other film peeling methods, the material to be protected is not suitable for peeling a protective film attached to a thin and flexible member. In addition, any film peeling method is complicated and large-scale, and is not suitable for a simple manual peeling operation.

そこで，本発明の目的は，簡易な構成，動作により，被保護材に貼着された保護フィルムを容易に且つ確実に剥離させることができるフィルム剥離装置を提供することにある。   Then, the objective of this invention is providing the film peeling apparatus which can peel off the protective film stuck to the to-be-protected material easily and reliably by simple structure and operation | movement.

上記目的を達成するための本発明のフィルム剥離装置は，被保護材に貼着されたフィルムを剥離するフィルム剥離装置において，フレーム本体と，前記フレーム本体に対して前後方向移動可能に設けられる平板部材と，前記平板部材の底面側から先端部で折り返されて上面側に延び，さらに後端部から折り返されて底面側に延びて，前記平板部材に巻かれるベルト部材とを備え，前記ベルト部材は，前記平板部材の底面側の所定位置で前記フレーム本体に対して固定されて取り付けられ，前記平板部材の底面側の前記ベルト部材を前記フィルムに接着させた状態で，前記平板部材を前後方向移動させると，当該前後方向移動に伴って，前記フィルムが接着している前記平板部材の底面側の前記ベルト部材が，前記フィルムが接着したまま前記平板部材の上面側へ折り返されることにより，前記フィルムが前記被保護材から剥離され，前記ベルト部材は，粘着材又は真空吸着により前記フィルムと接着することを特徴とする。
In order to achieve the above object, a film peeling apparatus according to the present invention is a film peeling apparatus for peeling a film attached to a material to be protected. A belt member that is folded from the bottom surface side of the flat plate member to the top surface side and extends to the upper surface side, and is further folded from the rear end portion to the bottom surface side and wound around the flat plate member. Is fixedly attached to the frame body at a predetermined position on the bottom surface side of the flat plate member, and the belt member on the bottom surface side of the flat plate member is adhered to the film, and the flat plate member is moved in the front-rear direction. When moved, the belt member on the bottom surface side of the flat plate member to which the film is bonded adheres to the front and rear direction movement while the film is bonded. By being folded back into the upper surface of the plate member, the film is peeled off from the protected material, the belt member is characterized by adhering said film by adhesive or vacuum suction.

本発明のフィルム剥離装置によれば，保護フィルムをベルト部材の底面側に接着させ，ベルト部材が巻かれた板状部材を前後方向移動させることで，保護フィルムをベルト部材の上面側に折り返すように剥離する構成・動作とすることにより，被保護材に貼着された保護フィルムを確実且つ容易に剥離することができる。特に，被保護材が薄く可撓性のある材質であっても，被保護材がめくれることなく，保護フィルムのみを確実に剥離することができる。   According to the film peeling apparatus of the present invention, the protective film is bonded to the bottom surface side of the belt member, and the plate member around which the belt member is wound is moved in the front-rear direction so that the protective film is folded back to the upper surface side of the belt member. Therefore, the protective film adhered to the material to be protected can be reliably and easily peeled off. In particular, even if the material to be protected is a thin and flexible material, only the protective film can be reliably peeled off without the material to be protected turned up.

本発明の実施の形態におけるフィルム剥離装置の構成例を示す斜視図である。It is a perspective view which shows the structural example of the film peeling apparatus in embodiment of this invention. 本発明の実施の形態におけるフィルム剥離装置の構成例を示す平面図である。It is a top view which shows the structural example of the film peeling apparatus in embodiment of this invention. 本発明の実施の形態におけるフィルム剥離装置の構成例を示す側断面図（後退位置）である。It is a sectional side view (backward position) which shows the structural example of the film peeling apparatus in embodiment of this invention. 本発明の実施の形態におけるフィルム剥離装置の構成例を示す側断面図（前進位置）である。It is a sectional side view (advance position) which shows the structural example of the film peeling apparatus in embodiment of this invention. ベルト１５が止め板１４にビス留めされた状態を示す図である。FIG. 4 is a view showing a state in which a belt 15 is screwed to a stop plate 14. 本発明の実施の形態のフィルム剥離装置のフィルム剥離動作を説明する図である。It is a figure explaining the film peeling operation | movement of the film peeling apparatus of embodiment of this invention. ベルト１５の先端部分の角度を示す図である。FIG. 4 is a diagram illustrating an angle of a tip portion of a belt 15. 本発明のフィルム装置の別の構成例を示す図である。It is a figure which shows another structural example of the film apparatus of this invention.

以下，図面を参照して実施の形態について説明する。しかしながら，かかる実施の形態が，本発明の技術的範囲を限定するものではない。   Hereinafter, embodiments will be described with reference to the drawings. However, such an embodiment does not limit the technical scope of the present invention.

図１乃至図４は，本発明の実施の形態におけるフィルム剥離装置の構成例を示す図であり，図１は斜視図，図２は平面図，図３及び図４は，図２のＡ−Ａ線における断面図である。また，図３には，丸囲み部分の部分拡大図も示される。   1 to 4 are diagrams showing a configuration example of a film peeling apparatus according to an embodiment of the present invention. FIG. 1 is a perspective view, FIG. 2 is a plan view, and FIGS. 3 and 4 are A- It is sectional drawing in A line. FIG. 3 also shows a partially enlarged view of the circled portion.

フィルム剥離装置は，平板部材１１，ブラケット１２，フレーム本体１３，止め板１４，ベルト１５及びロッド１６を有して構成される。   The film peeling apparatus includes a flat plate member 11, a bracket 12, a frame body 13, a stop plate 14, a belt 15, and a rod 16.

平板部材１１は，厚さ１〜２ｍｍ程度の四角形状の平板１１ａ（例えば鉄板，ステンレス板）と，その後端部の縁に沿って取り付けられる円柱状の棒ステー１１ｂとを有して構成される。棒ステー１１ｂは例えば直径１０ｍｍ程度の円柱部材であって，平板部材１１の後端部は，棒ステー１１ｂの周面により円弧を形成し，また，平板１１ａの先端部も，図示されるように，平板１１ａの先端部位を折り畳むことで円弧を形成している。   The flat plate member 11 includes a rectangular flat plate 11a (for example, an iron plate or a stainless plate) having a thickness of about 1 to 2 mm, and a columnar bar stay 11b attached along the edge of the rear end. . The rod stay 11b is a cylindrical member having a diameter of about 10 mm, for example. The rear end portion of the flat plate member 11 forms an arc by the peripheral surface of the rod stay 11b, and the front end portion of the flat plate 11a is also shown in the figure. The arc is formed by folding the tip portion of the flat plate 11a.

平板部材１１の平板１１ａは，棒ステー１１ｂを介して，ビスなどを用いて，コの字状のブラケット１２に固定される。平板１１ａと棒ステー１１ｂは，このように，別々の部材を連結して平板部材１１を構成するように形成されてもよいが，一体的に形成されてもよい。また，平板部材１１は，先端部が後端部よりもその円弧径が小さくなるような先細形状にて形成されてもよい。   The flat plate 11a of the flat plate member 11 is fixed to the U-shaped bracket 12 using a screw or the like via the bar stay 11b. As described above, the flat plate 11a and the bar stay 11b may be formed so as to form the flat plate member 11 by connecting different members, but may be integrally formed. Further, the flat plate member 11 may be formed in a tapered shape such that the tip end portion has a smaller arc diameter than the rear end portion.

平板部材１１の後端部には，後述するように，棒ステー１１ｂから後方に延びる細長状のロッド１６が取り付けられている。ロッド１６は，平板部材１１を手動で前後方向移動させるために把持可能な長さ，形状を有する。   As will be described later, an elongated rod 16 extending rearward from the bar stay 11b is attached to the rear end portion of the flat plate member 11. The rod 16 has a length and shape that can be gripped to manually move the flat plate member 11 in the front-rear direction.

フレーム本体１３は，四角形状の底板と，開放された一端側を除いて底板の周囲を囲う側板と有し，ブラケット１２に取り付けられた平板部材１１は，その開放された一端側から前後方向移動可能にフレーム本体１３に載せられる。ロッド１６は，フレーム本体１３の側板に設けられる孔部を貫通して後方に延びる。ロッド１６を前進移動及び後退移動させることで，平板部材１１を前進位置及び後退位置に移動させることができる。図３は，平板部材１１が後退位置にある状態を示し，図４は，平板部材１１が前進位置にある状態を示す。また，フレーム本体１３を構成する両側の側板の先端付近には，止め板１４が架設される。止め板１４は，帯状の細長板部材である。   The frame main body 13 has a rectangular bottom plate and side plates surrounding the bottom plate except for one open end, and the flat plate member 11 attached to the bracket 12 moves in the front-rear direction from the open one end. It is mounted on the frame body 13 as possible. The rod 16 extends rearward through a hole provided in the side plate of the frame body 13. By moving the rod 16 forward and backward, the flat plate member 11 can be moved to the forward and backward positions. FIG. 3 shows a state in which the flat plate member 11 is in the retracted position, and FIG. 4 shows a state in which the flat plate member 11 is in the advanced position. Further, a stop plate 14 is installed near the front ends of the side plates on both sides constituting the frame body 13. The stop plate 14 is a strip-shaped elongated plate member.

平板部材１１には，薄いシート状のベルト１５が巻かれている。具体的には，ベルト１５は，平板部材１１の底面側から先端部で上面側に折り返されて上面を後端方向に延び，さらに後端部から底面側に折り返されて底面を先端方向に延びて，平板部材１１を取り巻くように配置される。平板部材１１の底面側において，ベルト１５の一端と他端とは重ね合わせられ，止め板１４とともにビス留めされる。   A thin sheet-like belt 15 is wound around the flat plate member 11. Specifically, the belt 15 is folded back from the bottom surface side of the flat plate member 11 to the upper surface side at the front end portion, extending the upper surface in the rear end direction, and further folded from the rear end portion toward the bottom surface side to extend the bottom surface in the front end direction. The flat plate member 11 is disposed so as to surround it. On the bottom surface side of the flat plate member 11, one end and the other end of the belt 15 are overlapped and screwed together with the stop plate 14.

図５は，ベルト１５が止め板１４にビス留めされた状態を示す図である。これにより，止め板１４ともに両端がビス留めされて固定されたベルト１５の当該固定部位は，フレーム本体１３に対して固定される位置となり，平板部材１１の前後方向移動に対しても，当該固定部位は移動しない。   FIG. 5 is a view showing a state in which the belt 15 is screwed to the stop plate 14. As a result, the fixing portion of the belt 15 that is fixed by screwing both ends together with the stopper plate 14 becomes a position to be fixed to the frame main body 13, and the fixing is performed even when the flat plate member 11 is moved in the front-rear direction. The part does not move.

ベルト１５は，その表面に接触する保護フィルムを当該表面に接着させる接着機能を有する。例えば，シート状のベルト１５の表面に粘着材（粘着テープを含む）を付着させることで，ベルト１５の表面に保護フィルムを粘着させる。また，ベルト１５を２枚のシートを貼り合わせて形成し，保護フィルムと接触する表面側のシートに複数の微細孔を設け，貼り合わせた２枚のシートの中空内部を真空吸着装置（図示せず）により減圧することで，ベルト１５の表面に保護フィルムを吸着させてもよい。この場合，真空吸着装置と接続するチューブは，ベルト１５の上記固定部位から貼り合わせたシート内に挿入することで，チューブの挿入位置を固定することができる。図５に，当該チューブを挿入するためにベルト１５に設けられたチューブ接続口１５ａの例を示す。   The belt 15 has an adhesion function for adhering a protective film in contact with the surface to the surface. For example, the protective film is adhered to the surface of the belt 15 by attaching an adhesive (including an adhesive tape) to the surface of the sheet-like belt 15. Further, the belt 15 is formed by bonding two sheets, a plurality of fine holes are provided in the sheet on the surface side in contact with the protective film, and a vacuum suction device (not shown) is formed in the hollow interior of the two sheets bonded together. The protective film may be adsorbed on the surface of the belt 15 by reducing the pressure. In this case, the insertion position of the tube can be fixed by inserting the tube connected to the vacuum suction device into the sheet bonded from the fixing portion of the belt 15. FIG. 5 shows an example of a tube connection port 15a provided in the belt 15 for inserting the tube.

図６は，本発明の実施の形態のフィルム剥離装置のフィルム剥離動作を説明する図である。図６（ａ）において，まず，平板部材１１を前進位置に配置し，その状態において，上方側から，ベルト１５の底面側を被保護材２０上の保護フィルム３０に接触させ，載せる。このとき，ベルト１５は，保護フィルム３０の先端部３０ａがベルト１５の底面側に接着するように載せられる。なお，被保護材２０は，下面側において，真空吸着などによる吸着盤４０に吸着固定されている。   FIG. 6 is a diagram for explaining the film peeling operation of the film peeling apparatus according to the embodiment of the present invention. 6A, first, the flat plate member 11 is disposed at the forward position, and in this state, the bottom surface side of the belt 15 is brought into contact with the protective film 30 on the material to be protected 20 from the upper side and placed. At this time, the belt 15 is placed so that the front end portion 30 a of the protective film 30 adheres to the bottom surface side of the belt 15. The protected material 20 is adsorbed and fixed to the adsorbing plate 40 by vacuum adsorption or the like on the lower surface side.

続いて，図６（ｂ）において，ロッド１６を後方に引くと，平板部材１１の底面側のベルト１５を保護フィルム３０に接着させた状態で，平板部材１１も後方に引かれる。当該後方移動に伴って，保護フィルム３０が接着している平板部材１１の底面側のベルト１５は，保護フィルム３０が接着したまま平板部材１１の上面側へ折り返されていき，保護フィルム３０が被保護材２０から順次剥離されていく（図６（ｃ））。そして，図６（ｄ）に示されるように，平板部材１１が後退位置まで引かれると，保護フィルム３０は，被保護材２０のほぼ全面から剥離される。   Subsequently, in FIG. 6B, when the rod 16 is pulled backward, the flat plate member 11 is also pulled backward while the belt 15 on the bottom surface side of the flat plate member 11 is adhered to the protective film 30. With the backward movement, the belt 15 on the bottom surface side of the flat plate member 11 to which the protective film 30 is bonded is folded back to the upper surface side of the flat plate member 11 while the protective film 30 is bonded, and the protective film 30 is covered. It peels one by one from the protective material 20 (FIG.6 (c)). Then, as shown in FIG. 6D, when the flat plate member 11 is pulled to the retracted position, the protective film 30 is peeled off from almost the entire surface of the protected material 20.

図７に示されるベルト１５の先端部分の角度θは，４５度を超えない角度であり，できるだけ小さい角度（例えば１０度未満）が好ましい。ベルト１５の先端部分の角度が小さい程，保護フィルム３０を被保護材２０から剥離する際に，被保護材２０にかかる上向きの引張力（被保護材２０を持ち上げようとする力）を小さくすることができる。さらに，ベルト１５が巻かれる平板部材１１を薄くすること（厚さを小さくすること）で，保護フィルム３０がめくれて折り返される際の上方向（厚さ方向）への移動長さを小さくすることができ，保護フィルム３０を被保護材から剥離する際に，被保護材２０にかかる上向きの引張力を小さくすることができる。   7 is an angle not exceeding 45 degrees, and is preferably as small as possible (for example, less than 10 degrees). The smaller the angle of the front end portion of the belt 15, the smaller the upward tensile force (force to lift the protected material 20) applied to the protected material 20 when the protective film 30 is peeled from the protected material 20. be able to. Further, by reducing the thickness of the flat plate member 11 around which the belt 15 is wound (decreasing the thickness), the moving length in the upward direction (thickness direction) when the protective film 30 is turned over and folded is reduced. When the protective film 30 is peeled from the protected material, the upward tensile force applied to the protected material 20 can be reduced.

例えば，被保護材２０がガラスなどのある程度の重量があり，硬質で可撓性のない材質である場合は，保護フィルムを剥離する際に，被保護材に上向きの引張力がかかっても，被保護材２０が保護フィルム３０とともにめくれることはない。しかしながら，被保護材２０が例えば厚さ数十〜百ミクロン程度のフィルムディスプレイ（有機ＥＬフィルムディスプレイなど）のような非常に薄くて軽く且つ柔軟性及び可撓性を有する材質である場合，下方側からの吸着により被保護材２０を固定していても，例えば粘着テープにより保護フィルムを剥離しようとすると，被保護材に上向きの引張力がかかることにより，保護フィルムと一緒に被保護材もめくれてしまい，保護フィルムを被保護材から剥離させることができない場合がある。   For example, when the material to be protected 20 has a certain weight such as glass and is a hard and non-flexible material, even when an upward tensile force is applied to the material to be protected, The protected material 20 does not turn up together with the protective film 30. However, when the protected material 20 is a very thin, light, flexible and flexible material such as a film display (such as an organic EL film display) having a thickness of about several tens to one hundred microns, for example, Even if the protected material 20 is fixed by adsorption from the surface, if the protective film is peeled off with an adhesive tape, for example, an upward tensile force is applied to the protected material, so that the protected material is turned together with the protective film. As a result, the protective film may not be peeled off from the protected material.

本実施の形態におけるフィルム剥離装置は，薄い平板部材にベルト部材を巻き，保護フィルムを非常に小さい角度で折り返して剥離させるために，上向きの引張力をほとんど発生させず，極めて薄く可撓性を有するフィルム状の被保護材に貼着された保護フィルムであっても，その被保護材から確実に剥離することができる。また，ベルト１５が巻き付けられた平板部材１１を保護フィルムに面同士で接触させ，水平方向に直線移動させるだけの単純動作により，手動においても，保護フィルムを迅速に剥離することができ，剥離時間の短縮化，効率化も実現される。すなわち，簡易な構成及び動作により，保護フィルムを剥離させにくいフィルム状の被保護材からも保護フィルムを容易に剥離させることができる。もちろん，本発明の実施の形態におけるフィルム剥離装置は，ガラス，液晶パネルなどの硬質で可撓性を有しない被保護材に貼着された保護フィルムの剥離にも適用可能である。   The film peeling apparatus in the present embodiment winds a belt member around a thin flat plate member and folds and peels off the protective film at a very small angle, so that almost no upward tensile force is generated, and it is extremely thin and flexible. Even if it is a protective film stuck to the film-form to-be-protected material which it has, it can peel reliably from the to-be-protected material. Further, the protective film can be quickly peeled off manually by a simple operation of bringing the flat plate member 11 around which the belt 15 is wound into contact with the protective film and moving them linearly in the horizontal direction. Can be shortened and made more efficient. That is, with a simple configuration and operation, the protective film can be easily peeled from a film-like protected material that is difficult to peel off. Of course, the film peeling apparatus according to the embodiment of the present invention can also be applied to peeling of a protective film attached to a hard and non-flexible protected material such as glass or a liquid crystal panel.

図８は，本発明のフィルム装置の別の構成例を示す図であり，図８（ａ）は平面図，図８（ｂ）は側断面図である。別の構成例では，平板部材１１の温度調整を行い，ベルト１５の粘着性を制御する機能が付加される。図８に示すように，熱電素子４０（例えばペルチェ素子）のような温度変化手段を平板部材１１の平板１１ａに取り付け，熱電素子４０による発熱及び吸熱作用により，平板１１ａの温度を変化させる。熱電素子４０は，図示されない電源及び制御装置と配線接続し，温度変化を自在に制御できる。平板１１ａの温度変化により，ベルト１５は，平板１１ａの先端部分などの接触箇所による熱伝導及び輻射熱により，その温度が変化し，温度変化によりベルト１５の粘着力が変化する。例えば，ベルト１５の温度を高くすることで，ベルト１５の粘着力が上がり，剥離対象の保護フィルムの末端をつかむグリップ力が向上する。例えば，保護フィルムが２枚重ねて被保護材に貼着され，重なった２枚のうちの１枚を剥離させる場合に，保護フィルム同士の貼着力が強いと，剥離のためにより強い粘着力となる。温度変化手段により平板１１ａの温度を変化させることで，ベルト１５を加熱し，その粘着力を高めることで，貼着力の強い保護フィルムも剥離できるようになる。また，ベルト１５の温度を低くすることで，強すぎる粘着力を調整することも可能である。温度変化手段は，熱電素子に限らず，例えば電熱線のような他の形態であってもよい。   8A and 8B are diagrams showing another configuration example of the film apparatus of the present invention. FIG. 8A is a plan view and FIG. 8B is a side sectional view. In another configuration example, a function of adjusting the temperature of the flat plate member 11 and controlling the adhesiveness of the belt 15 is added. As shown in FIG. 8, temperature changing means such as a thermoelectric element 40 (for example, a Peltier element) is attached to the flat plate 11a of the flat plate member 11, and the temperature of the flat plate 11a is changed by heat generation and heat absorption by the thermoelectric element 40. The thermoelectric element 40 can be connected to a power source and a control device (not shown) by wiring to freely control the temperature change. Due to the temperature change of the flat plate 11a, the temperature of the belt 15 changes due to heat conduction and radiant heat due to contact points such as the tip of the flat plate 11a, and the adhesive force of the belt 15 changes due to the temperature change. For example, by increasing the temperature of the belt 15, the adhesive force of the belt 15 is increased, and the gripping force for grasping the end of the protective film to be peeled is improved. For example, when two protective films are stacked and adhered to a material to be protected, and one of the two overlapping films is peeled off, if the adhesive force between the protective films is strong, Become. By changing the temperature of the flat plate 11a by the temperature changing means, the belt 15 is heated and its adhesive strength is increased, so that a protective film having a strong adhesive force can be peeled off. Further, by reducing the temperature of the belt 15, it is possible to adjust the adhesive strength that is too strong. The temperature changing means is not limited to the thermoelectric element, but may be another form such as a heating wire.

本発明のフィルム剥離装置は，上述の実施の形態に限られるものではなく，例えば，平板部材１１の前後方向移動は，手動による操作に限らず，例えば，モータ駆動などにより自動操作されてもよい。また，設計事項の範囲内で適宜各構成要素の寸法，形状などの変更も本発明の技術的範囲に含まれるものである。   The film peeling apparatus of the present invention is not limited to the above-described embodiment. For example, the longitudinal movement of the flat plate member 11 is not limited to manual operation, and may be automatically operated by, for example, motor driving. . In addition, changes in the dimensions, shapes, and the like of the respective components within the scope of the design items are also included in the technical scope of the present invention.

１１：平板部材，１２：ブラケット，１３：フレーム本体，１４：止め板，１５：ベルト，１６：ロッド，２０：被保護材，３０：保護フィルム，４０：熱電素子   11: Flat plate member, 12: Bracket, 13: Frame body, 14: Stop plate, 15: Belt, 16: Rod, 20: Protected material, 30: Protective film, 40: Thermoelectric element

Claims (3)

被保護材に貼着されたフィルムを剥離するフィルム剥離装置において，
フレーム本体と，
前記フレーム本体に対して前後方向移動可能に設けられる平板部材と，
前記平板部材の底面側から先端部で折り返されて上面側に延び，さらに後端部から折り返されて底面側に延びて，前記平板部材に巻かれるベルト部材とを備え，
前記ベルト部材は，前記平板部材の底面側の所定位置で前記フレーム本体に対して固定されて取り付けられ，
前記平板部材の底面側の前記ベルト部材を前記フィルムに接着させた状態で，前記平板部材を前後方向移動させると，当該前後方向移動に伴って，前記フィルムが接着している前記平板部材の底面側の前記ベルト部材が，前記フィルムが接着したまま前記平板部材の上面側へ折り返されることにより，前記フィルムが前記被保護材から剥離され，
前記ベルト部材は，粘着材により前記フィルムと接着することを特徴とするフィルム剥離装置。 In a film peeling apparatus that peels off a film attached to a protected material,
A frame body;
A flat plate member provided to be movable in the front-rear direction with respect to the frame body;
A belt member that is folded from the bottom surface side of the flat plate member to the top surface side and extends to the upper surface side, is further folded from the rear end portion to the bottom surface side, and is wound around the flat plate member;
The belt member is fixedly attached to the frame body at a predetermined position on the bottom surface side of the flat plate member,
When the flat plate member is moved in the front-rear direction in a state where the belt member on the bottom side of the flat plate member is bonded to the film, the bottom surface of the flat plate member to which the film is bonded as the front-rear direction moves When the belt member on the side is folded back to the upper surface side of the flat plate member with the film adhered, the film is peeled off from the protected material,
The belt member is adhered to the film by an adhesive material. 被保護材に貼着されたフィルムを剥離するフィルム剥離装置において，
フレーム本体と，
前記フレーム本体に対して前後方向移動可能に設けられる平板部材と，
前記平板部材の底面側から先端部で折り返されて上面側に延び，さらに後端部から折り返されて底面側に延びて，前記平板部材に巻かれるベルト部材とを備え，
前記ベルト部材は，前記平板部材の底面側の所定位置で前記フレーム本体に対して固定されて取り付けられ，
前記平板部材の底面側の前記ベルト部材を前記フィルムに接着させた状態で，前記平板部材を前後方向移動させると，当該前後方向移動に伴って，前記フィルムが接着している前記平板部材の底面側の前記ベルト部材が，前記フィルムが接着したまま前記平板部材の上面側へ折り返されることにより，前記フィルムが前記被保護材から剥離され，
前記ベルト部材は，真空吸着により前記フィルムと接着することを特徴とするフィルム剥離装置。 In a film peeling apparatus that peels off a film attached to a protected material,
A frame body;
A flat plate member provided to be movable in the front-rear direction with respect to the frame body;
A belt member that is folded from the bottom surface side of the flat plate member to the top surface side and extends to the upper surface side, is further folded from the rear end portion to the bottom surface side, and is wound around the flat plate member;
The belt member is fixedly attached to the frame body at a predetermined position on the bottom surface side of the flat plate member,
When the flat plate member is moved in the front-rear direction in a state where the belt member on the bottom side of the flat plate member is bonded to the film, the bottom surface of the flat plate member to which the film is bonded as the front-rear direction moves When the belt member on the side is folded back to the upper surface side of the flat plate member with the film adhered, the film is peeled off from the protected material,
The film peeling apparatus, wherein the belt member is adhered to the film by vacuum suction. 請求項１又は２において，さらに，
前記平板部材の温度を変化させる温度変化手段を備え，該温度変化手段は前記平板部材に取り付けられることを特徴とするフィルム剥離装置。 In claim 1 or 2 , further,
A film peeling apparatus comprising temperature changing means for changing the temperature of the flat plate member, the temperature changing means being attached to the flat plate member .
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