JP6079995B2 - Thermoelectric power generation device - Google Patents
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- 238000010248 power generation Methods 0.000 title claims description 73
- 230000005422 Nernst effect Effects 0.000 claims description 33
- 230000002159 abnormal effect Effects 0.000 claims description 23
- 230000005415 magnetization Effects 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 19
- 239000003302 ferromagnetic material Substances 0.000 claims description 14
- 230000005291 magnetic effect Effects 0.000 claims description 13
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- 229910045601 alloy Inorganic materials 0.000 claims description 6
- 239000002344 surface layer Substances 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims description 2
- 230000005678 Seebeck effect Effects 0.000 description 16
- 238000006243 chemical reaction Methods 0.000 description 9
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- 230000002547 anomalous effect Effects 0.000 description 2
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- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
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- 230000005676 thermoelectric effect Effects 0.000 description 2
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- 239000010937 tungsten Substances 0.000 description 2
- 239000002918 waste heat Substances 0.000 description 2
- 229910018936 CoPd Inorganic materials 0.000 description 1
- 229910018979 CoPt Inorganic materials 0.000 description 1
- 229910002555 FeNi Inorganic materials 0.000 description 1
- 229910015187 FePd Inorganic materials 0.000 description 1
- 229910016583 MnAl Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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Description
本発明は、異常ネルンスト効果を利用した熱電発電デバイスに関する。 The present invention relates to a thermoelectric power generation device using an abnormal Nernst effect.
熱電発電（Ｔｈｅｒｍｏ−ｅｌｅｃｔｒｉｃ ｐｏｗｅｒ ｇｅｎｅｒａｔｉｏｎ）は、自然界における様々な熱に加え、家庭や車、工場から生じる膨大な廃熱を利用して発電できるため、クリーンエネルギーとして注目されている。このような熱電発電を行うものとして、熱電効果のひとつのゼーベック効果（Ｓｅｅｂｅｃｋ ｅｆｆｅｃｔ）を利用して発電するものが一般的にはよく知られている。ここで、ゼーベック効果とは、金属または半導体の両端に温度差があると、温度差と同方向に電位差が生じる現象であり、キャリアが電子かホールかによってゼーベック係数の符号が異なるという特徴を有している。 Thermo-electric power generation is attracting attention as clean energy because it can generate power using a large amount of waste heat generated from homes, cars, and factories in addition to various kinds of heat in nature. As such a thermoelectric power generation, a power generation using one Seebeck effect of the thermoelectric effect is generally well known. Here, the Seebeck effect is a phenomenon in which a potential difference occurs in the same direction as the temperature difference when there is a temperature difference at both ends of the metal or semiconductor, and the sign of the Seebeck coefficient varies depending on whether the carrier is an electron or a hole. doing.
ゼーベック効果の性能指数（Ｆｉｇｕｒｅ ｏｆ ｍｅｒｉｔ）Ｚは、次の（１）式で表される。
ゼーベック効果を利用して発電を行うものとして、例えば、傾斜積層構造を用いた熱発電チューブ（例えば、非特許文献１参照）や、熱発電ユニットを備えた時計（例えば、特許文献１参照）、高効率の熱電発電モジュール（例えば、非特許文献２参照）などがある。一般的なゼーベック効果を利用した熱電発電デバイス５０は、図７に示すように、電圧を増大させるために、ｐ型熱電変換材料（ｐ型半導体）５１とｎ型熱電変換材料（ｎ型半導体）５２とを、電極５３により上下で交互に直列接続して構成されている。 As what generates electric power using Seebeck effect, for example, a thermoelectric generation tube (for example, refer to non-patent document 1) using an inclined laminated structure, a watch (for example, refer to patent document 1) provided with a thermoelectric generator unit, There is a highly efficient thermoelectric power generation module (see, for example, Non-Patent Document 2). As shown in FIG. 7, a thermoelectric power generation device 50 using a general Seebeck effect has a p-type thermoelectric conversion material (p-type semiconductor) 51 and an n-type thermoelectric conversion material (n-type semiconductor) in order to increase the voltage. 52 are alternately connected in series up and down by electrodes 53.
なお、ゼーベック効果以外の熱電効果として、ネルンスト効果（Ｎｅｒｎｓｔ ｅｆｆｅｃｔ）がある。ネルンスト効果とは、温度勾配があって熱が流れている導体（または半導体）に，熱流の方向（ｘ）に垂直な方向（ｚ）に磁場を作用させると，両者に垂直な方向（ｙ）に電位差を生ずる現象である。 As a thermoelectric effect other than the Seebeck effect, there is a Nernst effect. The Nernst effect means that when a magnetic field is applied to a conductor (or semiconductor) having a temperature gradient and flowing heat in a direction (z) perpendicular to the direction of heat flow (x) (z), the direction perpendicular to both (y) This is a phenomenon that causes a potential difference.
ネルンスト効果の性能指数Ｚは、次の（２）式で表される。
一般的には、ネルンスト効果は、性能指数に対する発電効率がゼーベック効果よりも良いことが知られている（例えば、非特許文献３参照）。
The performance index Z of the Nernst effect is expressed by the following equation (2).
In general, it is known that the Nernst effect has better power generation efficiency with respect to the figure of merit than the Seebeck effect (see, for example, Non-Patent Document 3).
図７に示すような従来のゼーベック効果を利用した熱電発電デバイスは、構造が複雑であるため、作製プロセスが煩雑であるという課題があった。このため、例えば、数平方ｍ以上に及ぶ大面積発電デバイスを作製することは不可能である。また、電位差が温度差と同方向に発生するため、高電圧を得るためには温度差を大きくしなければならず、またモジュール化する際に電極と熱電変換材料との間に大きな熱応力が発生してしまう。このため、微細化が困難であるという課題があった。また、本格的な実用化のためには、さらに熱電変換効率を高める必要があるという課題もあった。ゼーベック効果を利用した熱電技術は、これらの課題のために、３０〜４０年の歴史があるにもかかわらず、社会経済の中ではいまだほとんど貢献できていない。 A conventional thermoelectric power generation device using the Seebeck effect as shown in FIG. 7 has a problem that the manufacturing process is complicated because the structure is complicated. For this reason, for example, it is impossible to produce a large-area power generation device extending over several square meters. In addition, since the potential difference occurs in the same direction as the temperature difference, the temperature difference must be increased in order to obtain a high voltage, and a large thermal stress is generated between the electrode and the thermoelectric conversion material when modularized. Will occur. For this reason, there existed a subject that refinement | miniaturization was difficult. In addition, there has been a problem that it is necessary to further increase the thermoelectric conversion efficiency for full-scale practical use. Thermoelectric technology using the Seebeck effect has not yet been able to contribute to the socio-economics despite these 30 to 40 year history for these issues.
本発明は、このような課題に着目してなされたもので、比較的容易に作製することができ、微細化も容易で、優れた熱電変換効率を有する熱電発電デバイスを提供することを目的としている。 The present invention has been made by paying attention to such problems, and it is an object of the present invention to provide a thermoelectric power generation device that can be manufactured relatively easily, is easily miniaturized, and has excellent thermoelectric conversion efficiency. Yes.
上記目的を達成するために、本発明者等は、異常ネルンスト効果（Ａｎｏｍａｌｏｕｓ Ｎｅｒｎｓｔ ｅｆｆｅｃｔ）を利用した新規な熱電発電デバイスを発明した。異常ネルンスト効果とは、自発磁化を持つ金属または半導体に、自発磁化と垂直方向に温度差があると、それらの外積方向に電位差が生じる現象である。このため、異常ネルンスト効果を利用すると、例えば、ｘ方向に磁化を持つ強磁性体に、ｚ方向に面直熱勾配を加えるだけでｙ面内方向で電圧が得られ、ｙ方向の距離を稼ぐだけで簡便に大電圧を得ることができる。また、異常ネルンスト効果は、自発磁化の向きによって電流が流れる方向が異なる、性能指数に対する発電効率はゼーベック効果よりも高い、出力電圧は温度差と直交する方向の長さに比例するため、温度差を自由に設計できる、通常のネルンスト効果と比較して、残留磁化を利用すれば磁場を印加する必要がない、という特徴を有している。 In order to achieve the above-mentioned object, the present inventors have invented a novel thermoelectric power generation device utilizing an abnormal Nernst effect. The anomalous Nernst effect is a phenomenon in which when a metal or semiconductor having spontaneous magnetization has a temperature difference in a direction perpendicular to the spontaneous magnetization, a potential difference occurs in the direction of the outer product thereof. For this reason, when the anomalous Nernst effect is used, for example, a voltage is obtained in the y-plane direction and a distance in the y-direction is obtained by simply applying a surface thermal gradient in the z-direction to a ferromagnetic material having magnetization in the x-direction. A large voltage can be obtained simply and simply. The abnormal Nernst effect is different in the direction of current flow depending on the direction of spontaneous magnetization, the power generation efficiency with respect to the figure of merit is higher than the Seebeck effect, and the output voltage is proportional to the length in the direction orthogonal to the temperature difference. Compared with the normal Nernst effect, it is not necessary to apply a magnetic field if residual magnetization is used.
本発明に係る熱電発電デバイスは、基板の上に設けられ、所定の方向に磁化した強磁性体から成る発電体を有し、前記発電体は、前記基板の表面に沿って互いに平行に配置された複数の細線から成り、各細線は同じ方向に磁化しており、電気的に直列に接続されており、異常ネルンスト効果により、前記磁化の方向に対して垂直の方向の温度差で発電するよう構成されていることを特徴とする。
A thermoelectric power generation device according to the present invention includes a power generation body made of a ferromagnetic material provided on a substrate and magnetized in a predetermined direction, and the power generation bodies are arranged in parallel to each other along the surface of the substrate. The thin wires are magnetized in the same direction and are electrically connected in series so that power is generated with a temperature difference in a direction perpendicular to the magnetization direction due to the abnormal Nernst effect. It is configured.
本発明に係る熱電発電デバイスは、異常ネルンスト効果を利用することにより、電位差が温度差と垂直の方向に発生するため、温度差を自由に設計することができるとともに、モジュール化する際に界面や熱応力の影響を小さくすることができる。このため、モジュール化や微細化が容易である。また、ゼーベック効果を利用したものと比べて、単純な構造で構成することができるため、比較的容易に作製することができ、大面積を利用した発電デバイスを実現することもできる。 Since the thermoelectric power generation device according to the present invention uses the abnormal Nernst effect, a potential difference is generated in a direction perpendicular to the temperature difference, so that the temperature difference can be freely designed and the interface or The influence of thermal stress can be reduced. For this reason, modularization and miniaturization are easy. Moreover, since it can be comprised with a simple structure compared with what utilized Seebeck effect, it can produce comparatively easily and can also implement | achieve the electric power generating device using a large area.
ここで、（１）式および（２）式を利用して、ゼーベック素子（Ｓｅｅｂｅｃｋ ｅｌｅｍｅｎｔ）の最大効率ζ＊の性能指数Ｚ依存性、および、ネルンスト素子（Ｎｅｒｎｓｔ ｅｌｅｍｅｎｔ）の最大効率ζＮの性能指数ＺＮ依存性を求め、図１に示す。このとき、高温側の温度を８００Ｋ、低温側の温度を３００Ｋとした。また、最大効率は、カルノーサイクルの効率ζＣで規格化している。図１に示すように、ネルンスト素子は、性能指数に対する発電効率がゼーベック素子よりも良いことが分かる。本発明に係る熱電発電デバイスは、異常ネルンスト効果を利用しており、図１に示す通常のネルンスト効果と同様に、ゼーベック効果を利用するものと比べて性能指数に対する発電効率が高くなり、熱電変換効率を高めることができる。 Here, using the formulas (1) and (2), the performance index Z dependence of the maximum efficiency ζ * of the Seebeck element and the performance of the maximum efficiency ζ N of the Nernst element (Nernst element) seeking index Z N dependency, it is shown in Figure 1. At this time, the temperature on the high temperature side was set to 800K, and the temperature on the low temperature side was set to 300K. The maximum efficiency is normalized by the Carnot cycle efficiency ζ C. As shown in FIG. 1, it can be seen that the Nernst element has better power generation efficiency with respect to the figure of merit than the Seebeck element. The thermoelectric power generation device according to the present invention uses the abnormal Nernst effect and, like the normal Nernst effect shown in FIG. 1, the power generation efficiency with respect to the figure of merit is higher than that using the Seebeck effect, and the thermoelectric conversion Efficiency can be increased.
また、本発明に係る熱電発電デバイスは、異常ネルンスト効果を利用するため、通常のネルンスト効果とは異なり、保磁力や交換バイアスを利用することにより、外部磁場を印加しなくとも発電することができる。 Further, since the thermoelectric power generation device according to the present invention uses the abnormal Nernst effect, unlike the normal Nernst effect, it can generate power without applying an external magnetic field by using a coercive force or an exchange bias. .
本発明に係る熱電発電デバイスは、細線の太さや長さが同じであれば、細線の数を増やすに従って、得られる電圧を大きくすることができ、細線の数によって発電能力を調整することができる。また、細線の密度を大きくすることにより、単位面積あたりの発電能力を高めることができ、発電効率を高めることができる。
Thermoelectric power generation device according to the present invention, if it the same thickness and length of fine wire, in accordance with increasing the number of fine lines, it is possible to increase the voltage obtained, it is possible to adjust the power generation capacity by the number of fine lines . Further, by increasing the density of the thin wires, the power generation capacity per unit area can be increased, and the power generation efficiency can be increased.
本発明に係る熱電発電デバイスは、各細線の一端部と、各細線の一方の側で隣り合う細線の他端部とを電気的に接続するよう設けられ、非磁性体、各細線の磁化の方向とは反対方向に磁化した強磁性体、または、各細線とは逆符号のネルンスト係数を有する強磁性体から成る接続体を有することが好ましい。この場合、接続体として非磁性体を使用すると、各細線で発生する電圧をそのまま加算して、デバイス全体の電圧を得ることができる。接続体として各細線の磁化の方向とは反対方向に磁化した強磁性体、または、各細線とは逆符号のネルンスト係数を有する強磁性体を使用すると、異常ネルンスト効果により発生する電圧が、隣り合う発電体の細線と接続体とで反対になるため、各細線で発生した電圧を打ち消すことなく接続することができる。この場合、非磁性体を使用するときと比べて、同じ面積上で得られる電圧を約２倍にまで増大させることができる。なお、各細線の磁化の方向とは反対方向に磁化した強磁性体は、発電体と同じ強磁性体から成っていても、異なる強磁性体から成っていてもよい。 The thermoelectric power generation device according to the present invention is provided so as to electrically connect one end of each thin wire and the other end of the adjacent thin wire on one side of each thin wire. It is preferable to have a connection body made of a ferromagnetic material magnetized in a direction opposite to the direction, or a ferromagnetic material having a Nernst coefficient opposite in sign to each thin wire. In this case, when a non-magnetic material is used as the connection body, the voltages generated in the thin wires can be added as they are to obtain the voltage of the entire device. When a ferromagnetic material magnetized in a direction opposite to the direction of magnetization of each thin wire or a ferromagnetic material having a Nernst coefficient opposite to that of each thin wire is used as the connection body, the voltage generated by the abnormal Nernst effect is Since the matching thin wires of the power generation body and the connection body are opposite, it is possible to connect without canceling the voltage generated in each thin wire. In this case, the voltage obtained on the same area can be increased to about twice as compared with the case of using a nonmagnetic material. The ferromagnetic material magnetized in the direction opposite to the magnetization direction of each thin wire may be made of the same ferromagnetic material as that of the power generator or may be made of a different ferromagnetic material.
本発明に係る熱電発電デバイスで、各細線は幅方向または高さ方向に磁化していることが好ましい。この場合、各細線が幅方向に磁化しているときには、温度差が高さ方向に、各細線が高さ方向に磁化しているときには、温度差が幅方向になるよう配置することにより、各細線の長さ方向に電圧を発生させることができ、発電効率を高めることができる。 In the thermoelectric power generation device according to the present invention, each thin wire is preferably magnetized in the width direction or the height direction. In this case, when each thin wire is magnetized in the width direction, the temperature difference is arranged in the height direction, and when each thin wire is magnetized in the height direction, the temperature difference is arranged in the width direction. A voltage can be generated in the length direction of the thin wire, and the power generation efficiency can be increased.
本発明に係る熱電発電デバイスで、前記基板は少なくとも表層がＭｇＯから成り、前記発電体は高磁気異方性を有するＬ１０型規則合金から成ることが好ましい。この場合、高磁気異方性を有するＬ１０型規則合金として、例えば、ＦｅＰｔ、ＣｏＰｔ、ＦｅＰｄ、ＣｏＰｄ、ＦｅＮｉ、ＭｎＡｌ、ＭｎＧａなどを使用することができる。発電体として高磁気異方性を有するＬ１０型規則合金を使用し、磁化容易軸を細線の幅方向に向けることにより、例えば細線の幅を数十ナノメートルサイズまで狭小化しても自発磁化を得ることができるため、小面積であってもｍＶを超える大きな電圧を実現することができ、微細化に有効である。実際に取り出すことが可能な電力は、デバイス全体の抵抗値（内部抵抗）で制約されるが、強磁性の細線の膜厚を厚くすることにより内部抵抗を低下させ、電力を高めることが可能である。また、ゼーベック効果を利用したものは、熱電性能を高めるために、主たる材料としてＢｉＴｅ系などの稀少元素や有毒元素を含む材料を使用しているのに対し、本発明に係る熱電発電デバイスでは、主たる材料としてＦｅ、Ｃｏ、Ｎｉ、Ｍｎ等の比較的入手しやすく安全な元素を使用することができる。 In the thermoelectric power generation device according to the present invention, it is preferable that at least the surface layer of the substrate is made of MgO, and the power generation body is made of an L10 type ordered alloy having high magnetic anisotropy. In this case, for example, FePt, CoPt, FePd, CoPd, FeNi, MnAl, MnGa, etc. can be used as the L10 type ordered alloy having high magnetic anisotropy. Using an L10 type ordered alloy having high magnetic anisotropy as a power generator and directing the easy magnetization axis in the width direction of the thin wire, for example, spontaneous magnetization can be obtained even if the width of the thin wire is reduced to several tens of nanometers Therefore, a large voltage exceeding mV can be realized even in a small area, which is effective for miniaturization. The power that can actually be extracted is limited by the resistance value (internal resistance) of the entire device, but by increasing the film thickness of the ferromagnetic thin wire, it is possible to increase the power by reducing the internal resistance. is there. In addition, the one using the Seebeck effect uses a material containing a rare element or a toxic element such as BiTe as a main material in order to improve the thermoelectric performance, whereas in the thermoelectric power generation device according to the present invention, As a main material, relatively easily available and safe elements such as Fe, Co, Ni, and Mn can be used.
本発明によれば、比較的容易に作製することができ、微細化も容易で、優れた熱電変換効率を有する熱電発電デバイスを提供することができる。 According to the present invention, it is possible to provide a thermoelectric power generation device that can be manufactured relatively easily, is easily miniaturized, and has excellent thermoelectric conversion efficiency.
以下、図面に基づき、本発明の実施の形態について説明する。
図２乃至図６は、本発明の実施の形態の熱電発電デバイスを示している。
図２に示すように、熱電発電デバイス１０は、基板１１と発電体１２と接続体１３とを有している。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
2 to 6 show a thermoelectric power generation device according to an embodiment of the present invention.
As shown in FIG. 2, the thermoelectric power generation device 10 includes a substrate 11, a power generation body 12, and a connection body 13.
基板１１は、少なくとも表層がＭｇＯから成っている。基板１１は、例えば、ＭｇＯ単層から成るものや、Ａｕ層の上にＭｇＯ層が載っているものから成っている。
発電体１２は、基板１１の表面に沿って互いに平行に配置された複数の細線１２ａから成っている。各細線１２ａは、高磁気異方性を有するＬ１０型規則合金の強磁性体から成り、同じ方向に磁化している。図２（ａ）および（ｂ）に示す具体的な一例では、各細線１２ａは、基板１１上に成膜したＦｅＰｔ薄膜を細線化して形成され、幅方向に磁化している。発電体１２は、異常ネルンスト効果により、磁化の方向に対して垂直の方向の温度差で発電するよう構成されている。
The substrate 11 has at least a surface layer made of MgO. The substrate 11 is made of, for example, an MgO single layer or an Au layer on which an MgO layer is placed.
The power generation body 12 is composed of a plurality of fine wires 12 a arranged parallel to each other along the surface of the substrate 11. Each thin wire 12a is made of a ferromagnetic material of an L10 type ordered alloy having high magnetic anisotropy, and is magnetized in the same direction. In a specific example shown in FIGS. 2A and 2B, each thin wire 12a is formed by thinning a FePt thin film formed on the substrate 11, and is magnetized in the width direction. The power generation body 12 is configured to generate power with a temperature difference in a direction perpendicular to the magnetization direction by an abnormal Nernst effect.
接続体１３は、基板１１の表面に沿って、発電体１２の各細線１２ａに平行に、各細線１２ａの間に配置された複数の細線１３ａから成っている。接続体１３の各細線１３ａは、発電体１２の各細線１２ａの一端部と、各細線１２ａの一方の側で隣り合う細線１２ａの他端部とを電気的に接続している。これにより、接続体１３は、発電体１２の各細線１２ａを電気的に直列に接続している。図２（ａ）に示す具体的な一例では、接続体１３は、各細線１２ａの磁化の方向とは反対方向に磁化した強磁性体から成り、図２（ｂ）に示す具体的な一例では、接続体１３は、非磁性体のＣｒから成っている。なお、接続体１３は、各細線１２ａとは逆符号のネルンスト係数を有する強磁性体から成っていてもよい。 The connection body 13 is composed of a plurality of thin wires 13 a arranged between the thin wires 12 a along the surface of the substrate 11 in parallel with the thin wires 12 a of the power generation body 12. Each thin wire 13a of the connection body 13 electrically connects one end of each thin wire 12a of the power generation body 12 to the other end of the adjacent thin wire 12a on one side of each thin wire 12a. Thereby, the connection body 13 has electrically connected each thin wire | line 12a of the electric power generation body 12 in series. In the specific example shown in FIG. 2A, the connection body 13 is made of a ferromagnetic material magnetized in a direction opposite to the magnetization direction of each thin wire 12a. In the specific example shown in FIG. The connection body 13 is made of nonmagnetic Cr. The connection body 13 may be made of a ferromagnetic material having a Nernst coefficient with a sign opposite to that of each thin wire 12a.
図２（ｂ）に示す具体的な一例では、基板の大きさは、１０ｍｍ×１０ｍｍで、発電体１２の細線１２ａの数は、６０本である。 In a specific example shown in FIG. 2B, the size of the substrate is 10 mm × 10 mm, and the number of thin wires 12 a of the power generation body 12 is 60.
次に、作用について説明する。
熱電発電デバイス１０は、異常ネルンスト効果を利用することにより、電位差が温度差と垂直の方向に発生するため、温度差を自由に設計することができるとともに、モジュール化する際に界面や熱応力の影響を小さくすることができる。このため、モジュール化や微細化が容易である。また、ゼーベック効果を利用したものと比べて、単純な構造で構成することができるため、比較的容易に作製することができ、大面積を利用した発電デバイスを実現することもできる。
Next, the operation will be described.
Since the thermoelectric power generation device 10 uses the abnormal Nernst effect, a potential difference is generated in a direction perpendicular to the temperature difference. Therefore, the temperature difference can be freely designed, and the interface and thermal stress can be reduced when modularized. The influence can be reduced. For this reason, modularization and miniaturization are easy. Moreover, since it can be comprised with a simple structure compared with what utilized Seebeck effect, it can produce comparatively easily and can also implement | achieve the electric power generating device using a large area.
また、熱電発電デバイス１０は、異常ネルンスト効果を利用するため、ゼーベック効果を利用するものと比べて性能指数に対する発電効率が高く、熱電変換効率を高めることができる。また、通常のネルンスト効果とは異なり、保磁力や交換バイアスを利用することにより、外部磁場を印加しなくとも発電することができる。 Moreover, since the thermoelectric power generation device 10 uses the abnormal Nernst effect, the power generation efficiency with respect to the figure of merit is higher than that using the Seebeck effect, and the thermoelectric conversion efficiency can be increased. Further, unlike the normal Nernst effect, it is possible to generate power without applying an external magnetic field by using a coercive force or an exchange bias.
熱電発電デバイス１０は、発電体１２として高磁気異方性を有するＬ１０型規則合金を使用し、各細線１２ａの幅方向に磁化しているため、例えば細線１２ａの幅を数十ナノメートルサイズまで狭小化しても自発磁化を得ることができる。このため、小面積であってもｍＶを超える大きな電圧を実現することができ、微細化に有効である。また、熱電発電デバイス１０では、主たる材料としてＦｅ、Ｃｏ、Ｎｉ、Ｍｎ等の比較的入手しやすく安全な元素を使用することができる。 Since the thermoelectric power generation device 10 uses an L10 type ordered alloy having high magnetic anisotropy as the power generation body 12 and is magnetized in the width direction of each thin wire 12a, for example, the width of the thin wire 12a is reduced to several tens of nanometers. Spontaneous magnetization can be obtained even when narrowed. For this reason, a large voltage exceeding mV can be realized even in a small area, which is effective for miniaturization. Further, in the thermoelectric power generation device 10, it is possible to use a relatively easily available and safe element such as Fe, Co, Ni, and Mn as a main material.
熱電発電デバイス１０は、温度差さえあれば様々な用途に利用することができ、例えば、体温と外界温度との差を利用して発電するスーツや鞄、時計、温泉の配管を利用した発電装置、パソコンの廃熱を利用した自発発電リサイクルシステムなどに利用することができる。
なお、熱電発電デバイス１０は、接続体１３を有さず、発電体１２が基板１１の表面に沿って設けられた薄層から成っていてもよい。
The thermoelectric power generation device 10 can be used for various applications as long as there is a temperature difference. For example, a power generation device using a suit, a bag, a clock, or a hot spring pipe that generates power using the difference between body temperature and external temperature It can be used for a spontaneous power generation recycling system that uses the waste heat of a personal computer.
Note that the thermoelectric power generation device 10 does not have the connection body 13, and the power generation body 12 may be formed of a thin layer provided along the surface of the substrate 11.
［異常ネルンスト効果の測定］
まず、熱電発電デバイス１０の試料２１として、ＭｇＯ基板１１の上に成膜した垂直磁化ＦｅＰｔ薄膜を細線化して発電体１２を形成し、各細線１２ａをＣｒから成る接続体１３の細線１３ａを用いて直列連結したものを用い、異常ネルンスト効果により発生する電圧の測定を行った。試料２１は、発電体１２の細線１２ａが３０本のものと、６０本のものを準備した。また、発電体１２の細線１２ａの伸長方向は、試料２１の幅方向とした。異常ネルンスト効果の測定は、図３に示すように、間隔をあけて配置された１対の銅板２２の上に、熱電発電デバイス１０の試料２１を架け渡し、一方の銅板２２をヒーター２３で温めて、試料２１の両端に２０Ｋ程度の温度差をつけて行った。
[Measurement of abnormal Nernst effect]
First, as a sample 21 of the thermoelectric power generation device 10, a perpendicularly magnetized FePt thin film formed on the MgO substrate 11 is thinned to form a power generating body 12, and each thin wire 12a is a thin wire 13a of a connecting body 13 made of Cr. The voltage generated due to the abnormal Nernst effect was measured using a series connection. Samples 21 were prepared with 30 fine wires 12a and 60 with thin wires 12a. In addition, the extending direction of the thin wire 12 a of the power generation body 12 was the width direction of the sample 21. As shown in FIG. 3, the abnormal Nernst effect is measured by placing a sample 21 of the thermoelectric power generation device 10 on a pair of copper plates 22 arranged at intervals, and warming one copper plate 22 with a heater 23. The sample 21 was subjected to a temperature difference of about 20 K on both ends.
このとき、試料２１の両端で直接温度差を測定すると熱流が乱れるため、各銅板２２に別のＭｇＯ基板２４を架け渡し、その両端の温度差を測定して試料２１の両端の温度差とした。また、異常ネルンスト効果による電圧は、発電体１２の磁化方向（垂直方向）と温度勾配の方向（試料の長さ方向）とに垂直な方向、すなわち試料２１の幅方向で発生する。このため、試料２１の両側縁にタングステン製の電極２５を接続して電圧の測定を行った。 At this time, if the temperature difference is directly measured at both ends of the sample 21, the heat flow is disturbed. Therefore, another MgO substrate 24 is placed on each copper plate 22, and the temperature difference between both ends is measured to obtain the temperature difference between both ends of the sample 21. . Further, a voltage due to the abnormal Nernst effect is generated in a direction perpendicular to the magnetization direction (vertical direction) of the power generator 12 and the temperature gradient direction (sample length direction), that is, the width direction of the sample 21. Therefore, the voltage was measured by connecting the electrodes 25 made of tungsten to both side edges of the sample 21.
電圧の測定結果を、図４に示す。図４に示すように、細線１２ａの数に比例して、電圧が増大することが確認された。このことから、細線１２ａの太さや長さが同じであれば、細線１２ａの数を増やすに従って、得られる電圧を大きくすることができ、細線１２ａの数によって発電能力を調整することができるといえる。また、細線１２ａの密度を大きくすることにより、所定の面積あたりの発電能力を高めることができ、発電効率を高めることができる。 The voltage measurement results are shown in FIG. As shown in FIG. 4, it was confirmed that the voltage increased in proportion to the number of thin wires 12a. From this, if the thickness and length of the thin wires 12a are the same, the voltage obtained can be increased as the number of the thin wires 12a is increased, and the power generation capacity can be adjusted by the number of the thin wires 12a. . Further, by increasing the density of the thin wires 12a, the power generation capacity per predetermined area can be increased, and the power generation efficiency can be increased.
次に、熱電発電デバイス１０の試料３１として、Ａｕ層の上にＭｇＯ層を設けた基板１１の上に、面内磁化ＦｅＰｔ薄膜から成る発電体１２を作製したものを用い、面直方向に温度差をつけて、異常ネルンスト効果により発生する電圧の測定を行った。試料３１は、発電体１２のＦｅＰｔ薄膜の厚さが１００ｎｍのものと、３００ｎｍのものを準備した。また、比較試料として、基板１１の上に厚さ３００ｎｍのＣｏ薄膜を作製したものを準備した。異常ネルンスト効果の測定は、図５に示すように、ペルチェ素子３２の上に試料３１を載せ、試料３１を銅板３３およびシリコンシート３４で上から押さえた状態で、ペルチェ素子３２により下から試料３１に熱を与えて面直方向に温度差をつけて行った。 Next, as a sample 31 of the thermoelectric power generation device 10, a power generation body 12 made of an in-plane magnetization FePt thin film is formed on a substrate 11 on which an MgO layer is provided on an Au layer. The voltage generated by the abnormal Nernst effect was measured with a difference. Samples 31 were prepared in which the thickness of the FePt thin film of the power generator 12 was 100 nm and that of 300 nm. In addition, a comparative sample in which a Co thin film having a thickness of 300 nm was prepared on the substrate 11 was prepared. As shown in FIG. 5, the abnormal Nernst effect is measured by placing the sample 31 on the Peltier element 32 and holding the sample 31 from above with the copper plate 33 and the silicon sheet 34. The test was performed by applying a temperature difference in the direction perpendicular to the surface.
このとき、発電体１２の磁化方向を試料３１の幅方向とした。異常ネルンスト効果による電圧は、発電体１２の磁化方向（試料の幅方向）と温度勾配の方向（面直方向）とに垂直な方向、すなわち試料３１の長さ方向で発生する。このため、試料３１の両端にタングステン製の電極３５を接続して電圧の測定を行った。電圧の測定結果を、図６に示す。図６に示すように、面直方向の温度差は１００ｎｍ間で約０．０００１Ｋと非常に微小であったが、ＦｅＰｔ薄層の発電体１２を有する場合には、１０μＶ程度の電圧を生じることが確認された。なお、Ｃｏ薄膜を有する場合には、ネルンスト係数が小さいため、ほとんど電圧を生じないことが確認された。 At this time, the magnetization direction of the power generator 12 was set to the width direction of the sample 31. The voltage due to the abnormal Nernst effect is generated in a direction perpendicular to the magnetization direction of the power generator 12 (the width direction of the sample) and the direction of the temperature gradient (perpendicular direction), that is, the length direction of the sample 31. For this reason, a tungsten electrode 35 was connected to both ends of the sample 31 to measure the voltage. The voltage measurement results are shown in FIG. As shown in FIG. 6, the temperature difference in the direction perpendicular to the plane is very small at about 0.0001 K between 100 nm. However, when the FePt thin-layer power generator 12 is provided, a voltage of about 10 μV is generated. Was confirmed. In addition, when it had Co thin film, since the Nernst coefficient was small, it was confirmed that a voltage is hardly produced.
１０ 熱電発電デバイス
１１ 基板
１２ 発電体
１２ａ 細線
１３ 接続体
１３ａ 細線
DESCRIPTION OF SYMBOLS 10 Thermoelectric power generation device 11 Board | substrate 12 Electric power generation body 12a Fine wire 13 Connection body 13a Fine wire
Claims (4)
前記発電体は、前記基板の表面に沿って互いに平行に配置された複数の細線から成り、各細線は同じ方向に磁化しており、電気的に直列に接続されており、異常ネルンスト効果により、前記磁化の方向に対して垂直の方向の温度差で発電するよう構成されていることを
特徴とする熱電発電デバイス。 Having a power generator made of a ferromagnetic material provided on a substrate and magnetized in a predetermined direction;
The power generator is composed of a plurality of fine wires arranged in parallel to each other along the surface of the substrate, each fine wire is magnetized in the same direction, and is electrically connected in series, and due to the abnormal Nernst effect, A thermoelectric power generation device configured to generate power at a temperature difference in a direction perpendicular to the magnetization direction.
前記発電体は高磁気異方性を有するＬ１０型規則合金から成ることを
特徴とする請求項１乃至３のいずれか１項に記載の熱電発電デバイス。
The substrate has at least a surface layer made of MgO,
The thermoelectric power generation device according to any one of claims 1 to 3 , wherein the power generation body is made of an L10 type ordered alloy having high magnetic anisotropy.
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