JP6063787B2 - Sliding member and manufacturing method thereof - Google Patents
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- JP6063787B2 JP6063787B2 JP2013056991A JP2013056991A JP6063787B2 JP 6063787 B2 JP6063787 B2 JP 6063787B2 JP 2013056991 A JP2013056991 A JP 2013056991A JP 2013056991 A JP2013056991 A JP 2013056991A JP 6063787 B2 JP6063787 B2 JP 6063787B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 36
- 238000010884 ion-beam technique Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 16
- 239000000314 lubricant Substances 0.000 description 30
- 239000010687 lubricating oil Substances 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 12
- 238000012545 processing Methods 0.000 description 10
- 230000001133 acceleration Effects 0.000 description 7
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 7
- 239000004810 polytetrafluoroethylene Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 238000005461 lubrication Methods 0.000 description 4
- 239000012153 distilled water Substances 0.000 description 3
- 230000002209 hydrophobic effect Effects 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000013011 mating Effects 0.000 description 3
- -1 polytetrafluoroethylene Polymers 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000000635 electron micrograph Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229930182556 Polyacetal Natural products 0.000 description 1
- 229920005603 alternating copolymer Polymers 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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Description
本発明は、フッ素樹脂からなる摺動部材と、その製造方法に関するものである。 The present invention relates to a sliding member made of a fluororesin and a manufacturing method thereof.
環境への負荷を低減するため、例えば被摺動部材と摺動される摺動部材について、潤滑油の使用量を減らしたり、前記潤滑油から水系潤滑剤へ転換したりすることが求められるようになってきている。
ところが、特に摺動面がポリテトラフルオロエチレン（ＰＴＦＥ）等のフッ素樹脂からなる摺動部材は、前記のように潤滑油の使用量を減らしたり、水系潤滑剤に転換したりした環境下において摩擦トルクが高くなったり、焼き付きを生じやすくなったりするという問題がある。
In order to reduce the load on the environment, for example, it is required to reduce the amount of lubricating oil used or to switch from the lubricating oil to a water-based lubricant for a sliding member that slides with a sliding member. It is becoming.
However, a sliding member whose sliding surface is made of a fluororesin such as polytetrafluoroethylene (PTFE) is particularly susceptible to friction in an environment where the amount of lubricating oil used is reduced or converted to a water-based lubricant as described above. There is a problem that the torque becomes high or seizure tends to occur.
この原因としては、例えば少量の潤滑油の場合、当該潤滑油が、摺動部材と被摺動部材との摺動によって摺動面から除外されて、前記両部材間が無潤滑で直接に接触する状態となりやすいことが考えられる。
また水系潤滑剤の場合は、そもそもフッ素樹脂が疎水性であって水をはじきやすいことから、やはり摺動部材と被摺動部材との摺動によって摺動面から除外されて、前記両部材間が無潤滑で直接に接触する状態となりやすく、結果的に摩擦トルクが高くなったり、焼き付きを生じやすくなったりするものと考えられる。
For example, in the case of a small amount of lubricating oil, the lubricating oil is excluded from the sliding surface by sliding between the sliding member and the sliding member, and the two members are in direct contact with each other without lubrication. It is thought that it is easy to become a state to do.
In the case of water-based lubricants, the fluororesin is hydrophobic in the first place and easily repels water, so it is also excluded from the sliding surface by sliding between the sliding member and the sliding member, and between the two members. Is likely to be in a direct contact state without lubrication, and as a result, it is considered that the friction torque is increased and seizure is likely to occur.
特許文献１には、フッ素樹脂の表面を、イオンビームを照射することによって、多数の針状突起を有する形状（剣山状）に形成することが記載されている。
フッ素樹脂の表面に、前記のように多数の針状突起を形成すると、その比表面積が増加するため、前記表面の、潤滑油や水系潤滑剤に対する親和性を向上できる。
しかし特許文献１では、前記フッ素樹脂の表面の全面を、前記イオンビームの照射によって多数の針状突起を有する形状に形成しており、かかる表面は、摺動面としては十分に機能し得ない。
Patent Document 1 describes that the surface of a fluororesin is formed into a shape having a number of needle-like protrusions (sword mountain shape) by irradiating an ion beam.
When a large number of needle-like protrusions are formed on the surface of the fluororesin as described above, the specific surface area increases, so that the affinity of the surface with the lubricating oil or aqueous lubricant can be improved.
However, in Patent Document 1, the entire surface of the fluororesin is formed into a shape having a large number of needle-like protrusions by irradiation with the ion beam, and such a surface cannot sufficiently function as a sliding surface. .
すなわち多数の針状突起を有する表面は、前記針状突起を有しない平坦な摺動面よりも摩擦係数が高い上、前記針状突起が、被摺動部材との摺動によって短期間で摩耗しやすく、摩耗すると比表面積が減少し、前記親和性に基づいて潤滑油や水系潤滑剤を保持する機能が失われる。そして前記機能が失われると、被摺動部材との摺動によって、前記潤滑油や水系潤滑剤が摺動面から除外されて、前記両部材間が無潤滑で直接に接触する状態となり、摩擦トルクが高くなったり、焼き付きを生じやすくなったりする。 That is, the surface having a large number of needle-like protrusions has a higher coefficient of friction than a flat sliding surface that does not have the needle-like protrusions, and the needle-like protrusions wear in a short period of time due to sliding with the sliding member. When worn, the specific surface area decreases, and the function of retaining the lubricating oil and water-based lubricant is lost based on the affinity. When the function is lost, the lubricating oil and the water-based lubricant are excluded from the sliding surface by sliding with the sliding member, and the two members are brought into a state of direct contact without lubrication and friction. Torque increases and seizure is likely to occur.
しかも特許文献１には、前記表面を摺動面として利用することについては一切検討されていない。 Moreover, Patent Document 1 does not discuss the use of the surface as a sliding surface.
本発明の目的は、摺動面がフッ素樹脂からなり、しかも潤滑油の使用量を減らしたり、水系潤滑剤に転換したりしても摩擦トルクが高くなりにくく、また焼き付きを生じにくい摺動部材と、その製造方法とを提供することにある。 An object of the present invention is a sliding member in which the sliding surface is made of a fluororesin, and the friction torque hardly increases and seizure hardly occurs even if the amount of lubricating oil used is reduced or converted to a water-based lubricant. And a manufacturing method thereof.
上記目的を達成するため、本発明は、全体がフッ素樹脂によって一体に形成され、被摺動部材との摺動面（２）を備えた摺動部材（１）であって、前記摺動面（２）には凹部（３）が設けられているとともに、前記凹部（３）内には多数の針状突起（４）が設けられていることを特徴とするものである（請求項１）。なお、カッコ内の英数字は、後述の実施の形態における対向構成要素等を示す。以下、この項において同じ。 In order to achieve the above object, the present invention is a sliding member (1) which is integrally formed of a fluororesin and has a sliding surface (2) with a sliding member, the sliding surface (2) is provided with a recess (3), and a plurality of needle-like protrusions (4) are provided in the recess (3). . In addition, the alphanumeric characters in parentheses indicate opposing components in the embodiments described later. The same applies hereinafter.
本発明によれば、摺動面から凹入させた凹部内に多数の針状突起を設けることによってその比表面積を増加させて、潤滑油や水系潤滑剤に対する親和性を高めることができる。そのため、前記凹部内が前記摺動面から凹入していて、摺動時に被摺動部材と直接に接触しないことと相まって、前記少量の潤滑油や水系潤滑剤を、前記摺動によって摺動面から除外されないように、前記凹部内に良好に保持できるとともに、かかる機能を長期間に亘って維持しつづけることができる。そして、例えば潤滑油の使用量を減らしたり、水系潤滑剤に転換したりしても、前記凹部内に保持した潤滑油や水系潤滑剤によって良好な潤滑を確保して、摩擦トルクを高くなりにくくし、また焼き付きを生じにくくすることができる。 According to the present invention, the specific surface area can be increased by providing a large number of needle-like protrusions in the recesses recessed from the sliding surface, and the affinity for lubricating oil and aqueous lubricant can be increased. Therefore, coupled with the fact that the inside of the recess is recessed from the sliding surface and does not directly contact the sliding member during sliding, the small amount of lubricating oil or water-based lubricant is slid by sliding. In order not to be excluded from the surface, the concave portion can be held well, and such a function can be maintained for a long period of time. For example, even if the amount of lubricating oil used is reduced or converted to a water-based lubricant, good lubrication is ensured by the lubricating oil or water-based lubricant held in the recess, and the friction torque is not easily increased. In addition, seizure can be made difficult to occur.
前記摺動面（２）の単位面積中に占める、前記凹部（３）の開口面積の割合で表される開口率は、１０％以上、９０％以下であるのが好ましい（請求項２）。
開口率が前記範囲未満では、凹部の数、および／または大きさが不足して、前記凹部内に保持できる潤滑油や水系潤滑剤の量が少なくなるため、当該凹部を設けることによる前述した効果が十分に得られなくなって、特に潤滑油の使用量を減らしたり、水系潤滑剤に転換したりした環境下において摩擦トルクが高くなったり、焼き付きを生じやすくなったりするおそれがある。
The opening ratio represented by the ratio of the opening area of the recess (3) in the unit area of the sliding surface (2) is preferably 10% or more and 90% or less (Claim 2).
If the opening ratio is less than the above range, the number and / or size of the recesses is insufficient, and the amount of lubricant or water-based lubricant that can be held in the recesses is reduced. May not be sufficiently obtained, and particularly in an environment where the amount of lubricating oil used is reduced or converted to a water-based lubricant, the friction torque may be increased or seizure may be easily caused.
逆に前記範囲を超える場合には、摺動時に被摺動部材の荷重を受ける摺動面の面積率が少なくなり、前記荷重が面積の小さい摺動面に集中することになるため、前記摺動面が、比較的短期間の摺動で大きく摩耗したり、場合によっては圧潰したりするおそれがある。
これに対し、開口率を前記範囲とすることで、摺動面への荷重の過剰な集中等を抑制しながら、凹部内に適度の量の潤滑油や水系潤滑剤を良好に保持して、摩擦トルクを高くなりにくくしたり、焼き付きを生じにくくしたりすることができる。
On the other hand, if the range is exceeded, the area ratio of the sliding surface that receives the load of the sliding member during sliding decreases, and the load concentrates on the sliding surface with a small area. There is a risk that the moving surface may be greatly worn by sliding for a relatively short period of time or may be crushed in some cases.
On the other hand, by setting the aperture ratio in the above range, while suppressing excessive concentration of the load on the sliding surface, etc., an appropriate amount of lubricating oil or water-based lubricant is satisfactorily held in the recess, It is possible to make the friction torque difficult to increase or to prevent seizure.
特に水系潤滑剤を使用する場合、前記摺動面（２）、および前記針状突起（４）の表面を含む前記凹部（３）の内面は、親水化処理されているのが好ましい（請求項３）。
先に説明したように凹部内は、多数の針状突起が設けられることで比表面積が増加して、潤滑油や水系潤滑剤に対する親和性が向上する。しかしフッ素樹脂は、前述したように本来的に疎水性であって、前記多数の針状突起が設けられた領域は、前記疎水性に基づいて超撥水性を示すため、特に水系潤滑剤に対する親和性の向上効果が不十分になる場合がある。
In particular, when an aqueous lubricant is used, it is preferable that the inner surface of the concave portion (3) including the surface of the sliding surface (2) and the needle-like protrusion (4) is subjected to a hydrophilic treatment (Claims). 3).
As described above, the inside of the recess is provided with a large number of needle-like protrusions, thereby increasing the specific surface area and improving the affinity for the lubricating oil and the water-based lubricant. However, the fluororesin is inherently hydrophobic as described above, and the region provided with the many needle-like protrusions exhibits super water repellency based on the hydrophobicity. The effect of improving the property may be insufficient.
これに対し、前記のように摺動面、および針状突起の表面を含む凹部の内面を親水化処理すると、これらの面における、水系潤滑剤に対する親和性を向上できる。特に前記多数の針状突起を設けて比表面積を増加させた領域の、水系潤滑剤に対する親和性を大幅に向上できる。
しかも、摺動面の親水化処理は、被摺動部材との摺動を繰り返すことによって、比較的短期間で摩滅して失われるおそれがあるが、前記のように摺動時に被摺動部材と直接に接触しない、針状突起の表面を含む凹部の内面の親水化処理は、短期間で摩滅することがないため、水系潤滑剤を、前記凹部内に良好に保持する機能を、より長期間に亘って維持しつづけることが可能となる。
On the other hand, if the sliding surface and the inner surface of the recess including the surface of the needle-like protrusion are hydrophilized as described above, the affinity for the aqueous lubricant on these surfaces can be improved. In particular, the affinity for the water-based lubricant in the region where the specific surface area is increased by providing the many needle-like protrusions can be greatly improved.
In addition, the hydrophilization treatment of the sliding surface may be worn and lost in a relatively short period of time by repeatedly sliding with the sliding member. Since the hydrophilization treatment of the inner surface of the recess including the surface of the needle-like protrusion that does not directly contact with the surface does not wear out in a short period of time, the function of favorably holding the aqueous lubricant in the recess is longer. It can be maintained over a period of time.
本発明は、前記本発明の摺動部材を製造するための製造方法であって、前記摺動面のうち、前記凹部（３）を形成する領域に選択的にイオンビーム（１１）を照射することにより、前記領域のフッ素樹脂を選択的に除去して、内部に前記多数の針状突起（４）を備えた前記凹部（３）を形成する工程を含むことを特徴とするものである（請求項４）。
本発明によれば、例えば摺動面のうち、凹部を形成する領域を露出させ、それ以外の領域をマスク等で覆った状態で、前記摺動面にイオンビームを照射して、前記照射領域のフッ素樹脂を選択的に除去するだけで、前記摺動面に、前記凹部とその内部の多数の針状突起とを同時に形成することができる。そのため本発明の摺動部材の、製造の効率を向上できる。
This invention is a manufacturing method for manufacturing the said sliding member of this invention, Comprising: The ion beam (11) is selectively irradiated to the area | region which forms the said recessed part (3) among the said sliding surfaces. In this way, the method includes a step of selectively removing the fluororesin in the region and forming the recess (3) having the plurality of needle-like protrusions (4) inside ( Claim 4).
According to the present invention, for example, the irradiation region is irradiated with an ion beam in a state in which a region where the concave portion is formed is exposed in the sliding surface and the other region is covered with a mask or the like. By simply removing the fluororesin, the concave portion and a large number of needle-like protrusions inside the concave portion can be simultaneously formed on the sliding surface. Therefore, the manufacturing efficiency of the sliding member of the present invention can be improved.
前記本発明の製造方法は、さらに前記摺動面（２）、および前記針状突起（４）の表面を含む前記凹部（３）の内面を、水のプラズマ（１７）に暴露して親水化処理する工程を含んでいるのが好ましい（請求項５）。
前記工程を経ることにより、前記摺動面、および針状突起の表面を含む凹部の内面を、効率よく親水化できる。
In the manufacturing method of the present invention, the sliding surface (2) and the inner surface of the concave portion (3) including the surfaces of the needle-like projections (4) are exposed to water plasma (17) to be hydrophilized. It is preferable to include the process of processing (Claim 5).
By passing through the said process, the said sliding surface and the inner surface of the recessed part containing the surface of a needle-like protrusion can be hydrophilized efficiently.
本発明によれば、摺動面がフッ素樹脂からなり、しかも潤滑油の使用量を減らしたり、水系潤滑剤に転換したりしても摩擦トルクが高くなりにくく、また焼き付きを生じにくい摺動部材と、その製造方法とを提供することができる。 According to the present invention, the sliding surface is made of a fluororesin, and even if the amount of lubricating oil used is reduced or converted to a water-based lubricant, the friction torque is hardly increased and seizure hardly occurs. And its manufacturing method can be provided.
図１は、本発明の摺動部材の、実施の形態の一例の、摺動面に形成した凹部を拡大して示す断面図である。また図２は、前記例の摺動部材の摺動面における、凹部の配置の一例を示す平面図である。
図１、図２を参照して、この例の摺動部材１は、全体がフッ素樹脂からなり、平坦な摺動面２を備えている。摺動面２には、当該摺動面２の面方向の平面形状が円形となるように前記摺動面２において開口された複数個の凹部３が設けられており、それぞれの凹部３内には多数の針状突起４が設けられている。
FIG. 1 is an enlarged cross-sectional view showing a recess formed on a sliding surface of an example of an embodiment of the sliding member of the present invention. FIG. 2 is a plan view showing an example of the arrangement of the recesses on the sliding surface of the sliding member of the above example.
Referring to FIGS. 1 and 2, the sliding member 1 of this example is entirely made of a fluororesin and includes a flat sliding surface 2. The sliding surface 2 is provided with a plurality of recesses 3 opened in the sliding surface 2 so that the planar shape in the surface direction of the sliding surface 2 is circular. Are provided with a large number of needle-like protrusions 4.
前記摺動部材１を形成するフッ素樹脂としては、例えばポリテトラフルオロエチレン（ＰＴＦＥ）、テトラフルオロエチレン−パーフルオロアルキルビニルエーテル共重合体（ＰＦＡ）、テトラフルオロエチレン−ヘキサフルオロプロピレン共重合体（ＦＥＰ）、エチレン−フルオロエチレン交互共重合体（ＥＴＦＥ）等が挙げられる。
図２を参照して、この例では複数の凹部３を、図中のｘ方向に所定の形成間隔ａでもって複数個、等間隔に配列した列Ｌ１と、前記列Ｌ１に対して前記形成間隔ａの半分だけｘ方向にずらして配列した列Ｌ２とを、前記ｘ方向と直交するｙ方向に複数列、交互に配列させている。
また、例えば列Ｌ１の隣り合う２つの凹部３と、隣の列Ｌ２の、前記２つの凹部３の間に位置する１つの凹部３との形成間隔が前記ａとなり、前記３つの凹部３の中心が、それぞれ図中に一点鎖線で示す正三角形の３つの頂点に位置するように、前記列Ｌ１、Ｌ２間の形成間隔が設定されている。
Examples of the fluororesin forming the sliding member 1 include polytetrafluoroethylene (PTFE), tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (PFA), and tetrafluoroethylene-hexafluoropropylene copolymer (FEP). , Ethylene-fluoroethylene alternating copolymer (ETFE) and the like.
Referring to FIG. 2, in this example, a plurality of recesses 3 are arranged at equal intervals with a predetermined formation interval a in the x direction in the figure, and the formation interval with respect to the row L1. A plurality of rows L2 are arranged alternately in the y direction perpendicular to the x direction, with the row L2 being shifted in the x direction by half of a.
In addition, for example, the formation interval between two adjacent concave portions 3 in the row L1 and one concave portion 3 located between the two concave portions 3 in the adjacent row L2 is the a, and the center of the three concave portions 3 However, the formation intervals between the rows L1 and L2 are set so as to be positioned at three vertices of an equilateral triangle indicated by an alternate long and short dash line in the drawing.
前記摺動面２の単位面積中に占める、前記凹部３の開口面積の割合で表される開口率は、１０％以上、９０％以下であるのが好ましい。その理由は先に説明したとおりである。
すなわち、前記開口率を前記範囲とすることにより、摺動面２への荷重の過剰な集中等を抑制しながら、凹部３内に適度の量の潤滑油や水系潤滑剤を良好に保持して、摩擦トルクを高くなりにくくしたり、焼き付きを生じにくくしたりすることができる。
The opening ratio represented by the ratio of the opening area of the recess 3 in the unit area of the sliding surface 2 is preferably 10% or more and 90% or less. The reason is as described above.
That is, by setting the opening ratio within the above range, an appropriate amount of lubricating oil or water-based lubricant can be satisfactorily held in the recess 3 while suppressing excessive concentration of the load on the sliding surface 2. , It is possible to make the friction torque less likely to increase or to prevent seizure.
また、前記開口率の範囲で凹部３を設けることにより、前記摺動面２の、被摺動部材への接触面積を小さくすることもできる。そのため、後述する実施例、比較例の結果からも明らかなように、従来の平坦な摺動面に比べて摩擦トルクを小さくすることもできる。
なお、かかる効果をより一層向上することを考慮すると、凹部３の開口率は、前記範囲でも１５％以上、特に２０％以上であるのが好ましく、６０％以下、特に５０％以下であるのが好ましい。
Further, by providing the recess 3 within the range of the aperture ratio, the contact area of the sliding surface 2 with the sliding member can be reduced. Therefore, as is clear from the results of Examples and Comparative Examples which will be described later, the friction torque can be reduced as compared with the conventional flat sliding surface.
In consideration of further improving this effect, the opening ratio of the recess 3 is preferably 15% or more, particularly 20% or more, even within the above range, and preferably 60% or less, particularly 50% or less. preferable.
開口率を前記範囲に調整するには、例えば凹部３の開口径φと形成間隔ａを違えたり、凹部３の配列そのものを違えたりすればよい。また凹部３の開口の平面形状は円形には限定されず、任意に設定することができる。
ただし被摺動部材との摺動時に、当該被摺動部材が凹部３に落ち込むなどしてその摺動が妨げられないように、前記凹部３の開口径φや形成間隔ａ、開口の平面形状等を設定するのが好ましい。
In order to adjust the aperture ratio to the above range, for example, the opening diameter φ and the formation interval a of the recesses 3 may be changed, or the arrangement of the recesses 3 may be changed. Moreover, the planar shape of the opening of the recessed part 3 is not limited to a circle, and can be set arbitrarily.
However, when sliding with the sliding member, the opening diameter φ of the concave portion 3, the formation interval a, and the planar shape of the opening so that the sliding member does not interfere with the sliding by dropping into the concave portion 3. Etc. are preferably set.
前記開口径φや形成間隔ａの具体的な範囲については特に限定されないが、例えば開口径φは０．５ｍｍ以上であるのが好ましく、３．５ｍｍ以下であるのが好ましい。
また形成間隔ａは、凹部３の配列、開口率、および開口径φにもよって任意に設定できるが、図１の配列で、かつ開口径φが前記範囲である場合、開口率を前記範囲とするためには、形成間隔ａは１．５ｍｍ以上であるのが好ましく、４．５ｍｍ以下であるのが好ましい。
Specific ranges of the opening diameter φ and the formation interval a are not particularly limited. For example, the opening diameter φ is preferably 0.5 mm or more, and preferably 3.5 mm or less.
The formation interval a can be arbitrarily set according to the arrangement of the recesses 3, the aperture ratio, and the aperture diameter φ. However, when the aperture diameter φ is in the above range in the arrangement of FIG. In order to do so, the formation interval a is preferably 1.5 mm or more, and more preferably 4.5 mm or less.
図５は、前記凹部３内に形成した針状突起４の電子顕微鏡写真である。
図１、図５を参照して、各凹部３内に形成される針状突起４は、図の例の場合、それぞれ軸線を摺動面２と略直交方向に向けるとともに、先端を凹部３の開口から外方へ向けて設けられている。
針状突起４の寸法は、前記凹部３の深さや開口径φ等に応じて任意に設定できる。
FIG. 5 is an electron micrograph of the needle-like protrusion 4 formed in the recess 3.
With reference to FIGS. 1 and 5, the needle-like protrusions 4 formed in the respective recesses 3 have their axes directed in a direction substantially orthogonal to the sliding surface 2 and the tips of the recesses 3 in the example shown in the figure. It is provided outward from the opening.
The dimensions of the needle-like protrusions 4 can be arbitrarily set according to the depth of the concave portion 3 and the opening diameter φ.
ただし、前記凹部３内に多数の針状突起４を設けて比表面積を増加させて、潤滑油や水系潤滑剤に対する親和性を高める効果をできるだけ有効に発現させることを考慮すると、前記針状突起４の、軸方向の長さ（高さ）は５μｍ以上、特に１５μｍ以上であるのが好ましく、５０μｍ以下、特に３５μｍ以下であるのが好ましい。また最大径は２μｍ以上であるのが好ましく、５μｍ以下であるのが好ましい。 However, considering that the needle-like protrusions 4 are provided in the recesses 3 to increase the specific surface area and the effect of increasing the affinity for the lubricating oil or the water-based lubricant is expressed as effectively as possible, the needle-like protrusions 4 has an axial length (height) of 5 μm or more, particularly preferably 15 μm or more, and is preferably 50 μm or less, and particularly preferably 35 μm or less. The maximum diameter is preferably 2 μm or more, and preferably 5 μm or less.
針状突起４の大きさや、あるいは凹部３の深さを前記範囲に調整するには、例えば後述するようにイオンビームの照射によって前記凹部３、および針状突起４を形成する際の条件、具体的にはイオン化ガスの種類や流量、イオンビームの照射密度や加速電圧、あるいは処理時間等を適宜変更すればよい。
水系潤滑剤を使用する場合、前記摺動面２、および前記針状突起４の表面を含む前記凹部３の内面は、親水化処理されているのが好ましい。
In order to adjust the size of the needle-like projection 4 or the depth of the concave portion 3 to the above range, for example, as described later, conditions for forming the concave portion 3 and the needle-like projection 4 by ion beam irradiation, Specifically, the type and flow rate of the ionized gas, the ion beam irradiation density and acceleration voltage, or the processing time may be changed as appropriate.
When an aqueous lubricant is used, it is preferable that the sliding surface 2 and the inner surface of the concave portion 3 including the surfaces of the needle-like protrusions 4 are subjected to a hydrophilic treatment.
先に説明したように凹部３内は、多数の針状突起４が設けられることで比表面積が増加して、潤滑油や水系潤滑剤に対する親和性が向上する。しかしフッ素樹脂は、前述したように本来的に疎水性であって、前記多数の針状突起４が設けられた領域は、前記疎水性に基づいて超撥水性を示すため、特に水系潤滑剤に対する親和性の向上効果が不十分になる場合がある。 As described above, the inside of the recess 3 is provided with a large number of needle-like protrusions 4, thereby increasing the specific surface area and improving the affinity for the lubricating oil and the aqueous lubricant. However, the fluororesin is inherently hydrophobic as described above, and the region provided with the many needle-like protrusions 4 exhibits super-water repellency based on the hydrophobicity, so that it is particularly suitable for an aqueous lubricant. The effect of improving affinity may be insufficient.
これに対し、前記のように摺動面２、および針状突起４の表面を含む凹部３の内面を親水化処理すると、これらの面における、水系潤滑剤に対する親和性を向上できる。特に前記多数の針状突起４を設けて比表面積を増加させた領域の、水系潤滑剤に対する親和性を大幅に向上できる。
しかも、摺動面２の親水化処理は、被摺動部材との摺動を繰り返すことによって、比較的短期間で摩滅して失われるおそれがあるが、前記のように摺動時に被摺動部材と直接に接触しない、前記針状突起４の表面を含む凹部３の内面の親水化処理は短期間で摩滅することがないため、水系潤滑剤を、前記凹部３内に良好に保持する機能を、より長期間に亘って維持しつづけることが可能となる。
On the other hand, if the inner surface of the concave portion 3 including the sliding surface 2 and the surface of the needle-like protrusion 4 is hydrophilized as described above, the affinity for the aqueous lubricant on these surfaces can be improved. In particular, the affinity for the water-based lubricant in the region where the specific surface area is increased by providing the numerous needle-like protrusions 4 can be greatly improved.
In addition, the hydrophilization treatment of the sliding surface 2 may be worn away and lost in a relatively short period of time by repeatedly sliding with the sliding member. Since the hydrophilic treatment of the inner surface of the recess 3 including the surface of the needle-like protrusion 4 that does not directly contact the member does not wear out in a short period of time, the water-based lubricant can be retained well in the recess 3. Can be maintained for a longer period of time.
前記凹部３、および針状突起４は、前記のように本発明の製造方法により、摺動面２に選択的にイオンビームを照射して、前記摺動面２を構成するフッ素樹脂を選択的に除去することにより、同時に形成することができる。
図３は、本発明の摺動部材の製造方法のうち、イオンビームの照射によって、内部に多数の針状突起を備えた凹部を形成する工程を説明する説明図である。
As described above, the concave portion 3 and the needle-like protrusion 4 selectively irradiate the sliding surface 2 with an ion beam by the manufacturing method of the present invention to selectively select the fluororesin constituting the sliding surface 2. It is possible to form them simultaneously by removing them.
FIG. 3 is an explanatory view for explaining a step of forming a recess having a large number of needle-like projections inside by irradiation of an ion beam in the method for manufacturing a sliding member of the present invention.
図１〜図３を参照して、かかる工程では、真空チャンバ５内に、摺動部材１のもとになるフッ素樹脂板６を保持するためのホルダ７と、図の場合は３組の加速電極８とを互いに対向させて配設したイオンビーム処理装置９を用いる。
前記加速電極８は、図示しない電源から直流電圧が投入されることで、前記真空チャンバ５内にプラズマ１０を発生させるとともに、発生させたプラズマ１０をホルダ７の方向に加速してイオンビーム１１を生成させて、前記ホルダ７に保持したフッ素樹脂板６の表面に照射するためのものである。
Referring to FIGS. 1 to 3, in such a process, a holder 7 for holding a fluororesin plate 6 that is the basis of the sliding member 1 in the vacuum chamber 5 and three sets of accelerations in the case of the figure. An ion beam processing apparatus 9 is used in which the electrodes 8 are arranged to face each other.
The acceleration electrode 8 generates a plasma 10 in the vacuum chamber 5 by applying a DC voltage from a power source (not shown), and accelerates the generated plasma 10 in the direction of the holder 7 to generate an ion beam 11. It is for generating and irradiating the surface of the fluororesin plate 6 held by the holder 7.
前記工程では、まず前記フッ素樹脂板６の、前記凹部３を形成する側の表面を、前記凹部３の平面形状、および配列に対応した通孔（図示せず）を設けた、例えば金属製のマスク１２によって被覆する。
次いで前記フッ素樹脂板６を、真空チャンバ５内に設けたホルダ７に、マスク１２によって被覆した側の表面が加速電極８に対向するように保持させた状態で、前記真空チャンバ５内を、図示しない真空系によって真空引きしながら、イオン化ガスとして、例えばＮ２ガスを所定の流量となるように導入する。
In the step, first, the surface of the fluororesin plate 6 on the side where the recess 3 is formed is provided with through holes (not shown) corresponding to the planar shape and arrangement of the recess 3, for example, made of metal Cover with mask 12.
Next, the inside of the vacuum chamber 5 is illustrated in a state where the fluororesin plate 6 is held in a holder 7 provided in the vacuum chamber 5 so that the surface on the side covered with the mask 12 faces the acceleration electrode 8. For example, N 2 gas is introduced as an ionized gas at a predetermined flow rate while evacuating with a vacuum system that does not.
次いでこの状態で、加速電極８に直流電圧を投入して、真空チャンバ５内にプラズマ１０を発生させるとともに、加速させてイオンビーム１１を生成させ、生成させたイオンビーム１１を、前記ホルダ７に保持したフッ素樹脂板６の表面に、前記マスク１２を通して選択的に照射する。
そうするとフッ素樹脂板６の表面の、選択的にイオンビーム１１が照射された領域のフッ素樹脂が除去されて、内部に多数の針状突起４を備えた凹部３が形成される。
Next, in this state, a DC voltage is applied to the accelerating electrode 8 to generate a plasma 10 in the vacuum chamber 5 and to generate an ion beam 11 by accelerating the generated ion beam 11 to the holder 7. The surface of the held fluororesin plate 6 is selectively irradiated through the mask 12.
Then, the fluororesin in the region of the surface of the fluororesin plate 6 that has been selectively irradiated with the ion beam 11 is removed, and a recess 3 having a large number of needle-like protrusions 4 is formed inside.
この際、イオンビーム１１の照射方向を、フッ素樹脂板６の表面（摺動面２となる）と直交させるようにすることで、図１に示すように、軸線を摺動面２と略直交方向に向けるとともに、先端を凹部３の開口から外方へ向けた針状突起４が形成される。
このあと、処理したフッ素樹脂板６を真空チャンバ５内から取り出してマスク１２を除去すると、図１、図２に示すように摺動面２に凹部３が設けられているとともに、前記凹部３内に多数の針状突起４が設けられた本発明の摺動部材１が製造される。
At this time, by making the irradiation direction of the ion beam 11 orthogonal to the surface of the fluororesin plate 6 (becomes the sliding surface 2), the axis is substantially orthogonal to the sliding surface 2 as shown in FIG. A needle-like protrusion 4 is formed with its tip directed outward from the opening of the recess 3.
Thereafter, when the treated fluororesin plate 6 is taken out from the vacuum chamber 5 and the mask 12 is removed, the sliding surface 2 is provided with a recess 3 as shown in FIGS. The sliding member 1 of the present invention in which a large number of needle-like protrusions 4 are provided is manufactured.
前記工程における処理の条件は任意に設定できるが、例えばＰＴＦＥからなるフッ素樹脂板６の表面に、先に説明した高さ、および最大径を有する針状突起４を形成するためには、イオン化ガスがＮ２ガスの場合、その流量は０．５ｓｃｃｍ以上であるの好ましく、２．０ｓｃｃｍ以下であるのが好ましい。また加速電圧は２ｋＶ以上であるのが好ましく、４ｋＶ以下であるのが好ましい。また照射密度は５×１０１５ｉｏｎｓ／ｃｍ２以上であるのが好ましく、５×１０１６ｉｏｎｓ／ｃｍ２以下であるのが好ましい。さらに照射時間は２０分間以上であるのが好ましく、４０分間以下であるのが好ましい。 The processing conditions in the above process can be arbitrarily set. For example, in order to form the needle-like protrusions 4 having the above-described height and maximum diameter on the surface of the fluororesin plate 6 made of PTFE, an ionized gas is used. In the case of N 2 gas, the flow rate is preferably 0.5 sccm or more, and preferably 2.0 sccm or less. Further, the acceleration voltage is preferably 2 kV or more, and preferably 4 kV or less. The irradiation density is preferably 5 × 10 15 ions / cm 2 or more, and preferably 5 × 10 16 ions / cm 2 or less. Further, the irradiation time is preferably 20 minutes or more, and preferably 40 minutes or less.
なおイオン化ガスとしては、Ｎ２ガス、Ａｒガス、Ｎｅガス、Ｈｅガス、Ｆ２ガス等の１種または２種以上が挙げられる。
また本発明では、前記工程後、さらに摺動面２、および針状突起４の表面を含む凹部３の内面を、水のプラズマに暴露して親水化処理して摺動部材１を完成させてもよい。これにより、先に説明したように前記各面の、特に水系潤滑剤に対する親和性を向上することができる。
Note The ionized gas, N 2 gas, Ar gas, Ne gas, He gas, include one or more of such F 2 gas.
In the present invention, after the step, the sliding surface 2 and the inner surface of the recess 3 including the surface of the needle-like protrusion 4 are exposed to water plasma to be hydrophilized to complete the sliding member 1. Also good. Thereby, as explained above, the affinity of each of the surfaces, particularly with respect to the water-based lubricant, can be improved.
図４は、前記親水化処理の工程を説明する説明図である。
図４を参照して、かかる工程では、真空チャンバ１３内に、先の工程で凹部３を形成したフッ素樹脂板６を保持するためのホルダ１４を配設するとともに、前記ホルダ１４を高周波電源１５に接続したプラズマ処理装置１６を用いる。
そして、まず前記フッ素樹脂板６を、前記凹部３を形成した表面（摺動面２）を上側にして、真空チャンバ１３内に設けたホルダ１４上に載置した状態で、前記真空チャンバ１３内を、図示しない真空系によって真空引きしながら、Ａｒガスと、気化させた水とを、それぞれ所定の流量となるように導入する。
FIG. 4 is an explanatory diagram for explaining the hydrophilic treatment process.
Referring to FIG. 4, in this process, a holder 14 for holding the fluororesin plate 6 having the recess 3 formed in the previous process is disposed in the vacuum chamber 13, and the holder 14 is connected to the high frequency power supply 15. A plasma processing apparatus 16 connected to is used.
First, the fluororesin plate 6 is placed on the holder 14 provided in the vacuum chamber 13 with the surface (sliding surface 2) on which the concave portion 3 is formed facing upward. Are evacuated by a vacuum system (not shown), and Ar gas and vaporized water are introduced at a predetermined flow rate.
次いでこの状態で、高周波電源１５を駆動させて、真空チャンバ１３内に水のプラズマ１７を発生させる。
そうすると摺動部材１のうち摺動面２、および針状突起４の表面を含む凹部３の内面が、前記水のプラズマ１７に暴露されて親水化処理される。
前記親水化処理の工程における処理の条件は任意に設定できるが、例えばＰＴＦＥからなる摺動部材の摺動面２、および針状突起４の表面を含む凹部３の内面を親水化処理するためには、Ａｒの流量が１０ｓｃｃｍ、真空チャンバ１３内の真空度が１０〜１００Ｐａ、好ましくは２０〜５０Ｐａの条件で、高周波出力が１５Ｗ以上であるのが好ましく、２５Ｗ以下であるのが好ましい。また処理時間は１０分間以上であるのが好ましく、２０分間以下であるのが好ましい。
Next, in this state, the high-frequency power source 15 is driven to generate water plasma 17 in the vacuum chamber 13.
Then, the sliding surface 2 of the sliding member 1 and the inner surface of the recess 3 including the surface of the needle-like protrusion 4 are exposed to the water plasma 17 and subjected to a hydrophilic treatment.
The treatment conditions in the hydrophilic treatment step can be arbitrarily set. For example, in order to hydrophilize the sliding surface 2 of the sliding member made of PTFE and the inner surface of the recess 3 including the surface of the needle-like protrusion 4. The high-frequency output is preferably 15 W or more, and preferably 25 W or less under the conditions that the flow rate of Ar is 10 sccm and the degree of vacuum in the vacuum chamber 13 is 10 to 100 Pa, preferably 20 to 50 Pa. The treatment time is preferably 10 minutes or more, and preferably 20 minutes or less.
なお本発明は、以上で説明した各図の例には限定されない。
例えば本発明の摺動部材１において、凹部３の平面形状は、円形以外の任意の形状としてもよいし、その配列も図２の例には限定されない。凹部３の平面形状、および配列を違えるには、前記本発明の製造方法において用いるマスク１２の通孔の形状、および配列を違えればよい。
In addition, this invention is not limited to the example of each figure demonstrated above.
For example, in the sliding member 1 of the present invention, the planar shape of the recess 3 may be any shape other than a circle, and the arrangement thereof is not limited to the example of FIG. In order to change the planar shape and arrangement of the recesses 3, the shape and arrangement of the through holes of the mask 12 used in the manufacturing method of the present invention may be changed.
また針状突起４は、軸線を摺動面２と略直交方向から任意の角度分傾斜させた状態で設けられていてもよい。かかる針状突起４は、照射方向をフッ素樹脂板６の表面（摺動面２となる）に対して直交方向から前記角度分傾斜させた状態でイオンビーム１１を照射して形成することができる。
ただし針状突起４は、凹部３内の全面で同じ特性を付与することを考慮すると、前記凹部３内の全面で、図１の例のように、軸線を摺動面２と略直交方向に向けるとともに、先端を凹部３の開口から外方へ向けて設けられているのが好ましい。
The needle-like protrusions 4 may be provided in a state where the axis is inclined by an arbitrary angle from a direction substantially orthogonal to the sliding surface 2. The needle-like protrusions 4 can be formed by irradiating the ion beam 11 with the irradiation direction inclined at the angle from the orthogonal direction with respect to the surface of the fluororesin plate 6 (which becomes the sliding surface 2). .
However, considering that the needle-like protrusion 4 gives the same characteristics to the entire surface in the recess 3, the axis line is substantially perpendicular to the sliding surface 2 on the entire surface in the recess 3 as in the example of FIG. It is preferable that the front end is provided outward from the opening of the recess 3.
その他、本発明の要旨を逸脱しない範囲で、種々の設計変更を施すことができる。 In addition, various design changes can be made without departing from the scope of the present invention.
〈実施例１〉
（凹部３の形成）
フッ素樹脂板６としては、縦３０ｍｍ×横３０ｍｍ×厚み５ｍｍの平板状のＰＴＦＥ板を用いた。
前記フッ素樹脂板６の片側の表面を摺動面２とし、前記摺動面２に、内部に多数の針状突起４を有し、平面形状が円形で、かつ開口径φ＝３ｍｍの複数の凹部３を、図２に示す配列で、かつ隣り合う凹部３間の形成間隔ａ＝４ｍｍ、開口率が５１％となるように形成することとし、前記凹部３の平面形状および配列に対応する通孔を備えた金属製のマスク１２を用意した。
<Example 1>
(Formation of recess 3)
As the fluororesin plate 6, a flat PTFE plate having a length of 30 mm × width of 30 mm × thickness of 5 mm was used.
The surface of one side of the fluororesin plate 6 is defined as a sliding surface 2, and the sliding surface 2 has a plurality of needle-like projections 4 therein, a planar shape is circular, and a plurality of aperture diameters φ = 3 mm. The recesses 3 are formed in the arrangement shown in FIG. 2 so that the formation interval a between adjacent recesses 3 is 4 mm and the aperture ratio is 51%. A metal mask 12 having holes was prepared.
前記マスク１２を、前記フッ素樹脂板６の片側の表面に重ねた状態で、図３に示すイオンビーム処理装置９のホルダ７にセットし、先に説明した手順で、前記フッ素樹脂板６の表面の、凹部３を形成する領域に、前記マスク１２を通して選択的にイオンビームを照射することで、前記領域のフッ素樹脂を選択的に除去して、内部に多数の針状突起４を備えた、前記平面形状、および配列の凹部３を形成した。 The mask 12 is set on the holder 7 of the ion beam processing apparatus 9 shown in FIG. 3 in a state where the mask 12 is superposed on the surface of one side of the fluororesin plate 6, and the surface of the fluororesin plate 6 is subjected to the procedure described above. By selectively irradiating an ion beam through the mask 12 to a region where the recess 3 is to be formed, the fluororesin in the region was selectively removed, and a plurality of needle-like protrusions 4 were provided inside. The planar shape and the array of concave portions 3 were formed.
処理の条件は、イオン化ガス：Ｎ２、流量：１．０ｓｃｃｍ、加速電圧：３ｋＶ、照射密度：１．０×１０１６ｉｏｎｓ／ｃｍ２、照射時間：３０分間とした。イオンビーム１１の照射方向は、フッ素樹脂板６の表面と直交させた。
前記凹部３内の針状突起４の、走査型顕微鏡写真を図５に示す。図５は、フッ素樹脂板６の摺動面２を、撮影方向と直交方向から２０°傾けた状態で撮影したもので、この図５から、前記針状突起４の寸法を求めたところ、軸方向の長さ（高さ）はおよそ２０μｍ、最大径はおよそ４μｍであった。
The treatment conditions were ionized gas: N 2 , flow rate: 1.0 sccm, acceleration voltage: 3 kV, irradiation density: 1.0 × 10 16 ions / cm 2 , and irradiation time: 30 minutes. The irradiation direction of the ion beam 11 was orthogonal to the surface of the fluororesin plate 6.
A scanning photomicrograph of the needle-like protrusion 4 in the recess 3 is shown in FIG. FIG. 5 is an image of the sliding surface 2 of the fluororesin plate 6 tilted by 20 ° from the direction orthogonal to the imaging direction. From FIG. 5, the dimensions of the needle-like protrusions 4 were obtained. The length (height) in the direction was about 20 μm, and the maximum diameter was about 4 μm.
また図示していないが、前記摺動面２を撮影方向と直交方向に向けた走査型電子顕微鏡写真との比較から、前記針状突起４は、軸線を摺動面２と略直交方向に向けるとともに、先端を凹部３の開口から外方へ向けて設けられていることが確認された。
（親水化処理）
先の工程で凹部３を形成したフッ素樹脂板６を、図４に示すプラズマ処理装置１６のホルダ１４上に、前記凹部３を形成した表面（摺動面２）を上側にして載置したのち、先に説明した手順で、前記摺動面２、および多数の針状突起４を含む凹部３の内面を、水のプラズマに暴露して親水化処理して、摺動部材１を製造した。
Although not shown in the drawings, the needle-like protrusion 4 has an axis line substantially perpendicular to the sliding surface 2 based on a comparison with a scanning electron micrograph in which the sliding surface 2 is oriented in a direction orthogonal to the photographing direction. At the same time, it was confirmed that the tip was provided outward from the opening of the recess 3.
(Hydrophilic treatment)
After placing the fluororesin plate 6 having the recesses 3 formed in the previous step on the holder 14 of the plasma processing apparatus 16 shown in FIG. 4 with the surface (sliding surface 2) having the recesses 3 facing upward, The sliding member 1 was manufactured by exposing the sliding surface 2 and the inner surface of the concave portion 3 including the many needle-like projections 4 to water plasma by the above-described procedure.
処理の条件は、Ａｒの流量：１０ｓｃｃｍ、チャンバ内の真空度：２０Ｐａ、高周波出力：２０Ｗ、処理時間：１５分間とした。
〈水接触角測定〉
前記プラズマ処理前後の摺動面２、および凹部３内の、多数の針状突起４を形成した領域の、前記親水化処理の前後における、水に対する接触角を測定した。すなわち、前記摺動面２、および多数の針状突起４を形成した領域の上に蒸留水の液滴を滴下し、その直後に実体顕微鏡写真を撮影して、かかる実体顕微鏡写真から、前記液滴の接触角を求めた。なお多数の針状突起４を形成した領域は、各針状突起４の先端を結ぶ仮想の面を設定して、当該仮想の面に対する接触角を求めた。結果を表１に示す。
The treatment conditions were Ar flow rate: 10 sccm, degree of vacuum in the chamber: 20 Pa, high frequency output: 20 W, treatment time: 15 minutes.
<Water contact angle measurement>
The contact angle with water before and after the hydrophilization treatment was measured in the region where the needle-like projections 4 were formed in the sliding surface 2 and the recess 3 before and after the plasma treatment. That is, a droplet of distilled water is dropped on the sliding surface 2 and a region where a large number of needle-like protrusions 4 are formed, and a stereomicrograph is taken immediately thereafter, and the liquid The contact angle of the drop was determined. In the region where a large number of needle-like protrusions 4 were formed, a virtual surface connecting the tips of the needle-like protrusions 4 was set, and the contact angle with respect to the virtual surface was obtained. The results are shown in Table 1.
表１より、摺動面２、および多数の針状突起４を形成した領域のいずれにおいても、親水化処理をすることで接触角が小さくなっており、親水性が向上していることが確認された。また実体顕微鏡写真から、多数の針状突起４を形成した領域では、処理前は、液滴が多数の針状突起４の上に載っている状態であったのが、処理後は前記多数の針状突起４間にしみ込んで保持されているのが確認された。 From Table 1, it is confirmed that the contact angle is reduced and the hydrophilicity is improved by hydrophilization treatment in both the sliding surface 2 and the region where the many needle-like protrusions 4 are formed. It was done. Further, from the stereoscopic micrograph, in the region where a large number of needle-like protrusions 4 were formed, the droplets were placed on the many needle-like protrusions 4 before the processing. It was confirmed that the needle-like protrusions 4 were soaked and held.
〈摩擦係数測定〉
前記実施例１で製造した摺動部材１の、前記凹部３を形成した摺動面２の、蒸留水中での摩擦係数を、鈴木式摩擦係数試験機を用いた面接触による底面圧の摩擦試験によって測定した。
すなわち図６を参照して、前記摺動面２を上にして蒸留水中に水平に配置した摺動部材１の前記摺動面２上に、ポリアセタール製で外径１１．４ｍｍの相手円筒体（被摺動部材）１８を載置し、前記相手円筒体１８を、図中に実線の矢印で示す摺動面２と直交方向に０．２５ＭＰａの荷重をかけて前記摺動面２に接触させながら、前記筒の中心軸を中心として、図中に破線の矢印で示す一方向に回転数５０ｒｐｍ、滑り速度６０ｍｍ／ｓで５分間、回転させて摩擦させた際の摩擦係数を測定した。
<Friction coefficient measurement>
The friction coefficient of the sliding surface 1 of the sliding member 1 manufactured in Example 1 in which the concave portion 3 is formed in distilled water is determined by the surface pressure friction test by surface contact using a Suzuki friction coefficient tester. Measured by.
That is, referring to FIG. 6, on the sliding surface 2 of the sliding member 1 disposed horizontally in distilled water with the sliding surface 2 up, a mating cylindrical body made of polyacetal and having an outer diameter of 11.4 mm ( (Sliding member) 18 is placed, and the mating cylindrical body 18 is brought into contact with the sliding surface 2 by applying a load of 0.25 MPa in a direction orthogonal to the sliding surface 2 indicated by the solid line arrow in the figure. However, the coefficient of friction was measured when the cylinder was rotated and rubbed at a rotational speed of 50 rpm and a sliding speed of 60 mm / s for 5 minutes around the central axis of the cylinder in the direction indicated by the dashed arrow in the figure.
また比較のため、片側の表面（摺動面）に前記凹部を形成せずに親水化処理のみをしたフッ素樹脂板を比較例１、前記フッ素樹脂板６の片側の表面（摺動面）の全面に、照射方向をフッ素樹脂板の表面と直交させてイオンビームを照射して多数の針状突起を形成したのち親水化処理をしたものを、比較例２として、同様に摩擦係数を測定した。結果を表２に示す。 For comparison, a fluororesin plate that has been subjected to only hydrophilic treatment without forming the concave portion on one surface (sliding surface) is shown in Comparative Example 1 and the surface (sliding surface) on one side of the fluororesin plate 6. As a comparative example 2, the friction coefficient was measured in the same manner as Comparative Example 2 in which the entire surface was irradiated with an ion beam with the irradiation direction orthogonal to the surface of the fluororesin plate to form a large number of needle-like protrusions and then subjected to a hydrophilic treatment. . The results are shown in Table 2.
表２の比較例１、２の結果より、摺動面の全面に多数の針状突起を形成した場合には、未処理の摺動面よりも摩擦係数が増加することが判った。また前記針状突起は、相手円筒体１８と直接に接触していることから、さらに摩擦を続けると摩滅して失われてしまうことが推測された。
これに対し表２の実施例１、比較例１、２の結果より、摺動面２に凹部３を形成し、当該凹部３内に多数の針状突起４を形成することで、摩擦係数を大幅に小さくできることが判った。また前記針状突起４は、相手円筒体１８と直接に接触しない凹部３内に形成されていることから、さらに摩擦を続けても摩滅して失われてしまうおそれがないことが判った。
From the results of Comparative Examples 1 and 2 in Table 2, it was found that when a large number of needle-like protrusions were formed on the entire sliding surface, the friction coefficient increased compared to the untreated sliding surface. In addition, since the needle-like protrusions are in direct contact with the mating cylindrical body 18, it is assumed that if the friction is further continued, the needle-like protrusions are worn away.
On the other hand, from the results of Example 1 and Comparative Examples 1 and 2 in Table 2, by forming the recess 3 on the sliding surface 2 and forming a large number of needle-like protrusions 4 in the recess 3, the friction coefficient is reduced. It was found that it can be greatly reduced. Further, since the needle-like protrusions 4 are formed in the recesses 3 that do not directly contact the counterpart cylindrical body 18, it has been found that there is no risk of being lost due to wear even if the friction continues.
１：摺動部材、２：摺動面、３：凹部、４：針状突起、５：真空チャンバ、６：フッ素樹脂板、７：ホルダ、８：加速電極、９：イオンビーム処理装置、１０：プラズマ、１１：イオンビーム、１２：マスク、１３：真空チャンバ、１４：ホルダ、１５：高周波電源、１６：プラズマ処理装置、１７：プラズマ、１８：相手円筒体、ａ：形成間隔、Ｌ１、Ｌ２：列、φ：開口径 1: sliding member, 2: sliding surface, 3: recess, 4: needle-like projection, 5: vacuum chamber, 6: fluororesin plate, 7: holder, 8: acceleration electrode, 9: ion beam processing apparatus, 10 : Plasma, 11: Ion beam, 12: Mask, 13: Vacuum chamber, 14: Holder, 15: High-frequency power supply, 16: Plasma processing apparatus, 17: Plasma, 18: Counter cylinder, a: Formation interval, L1, L2 : Row, φ: Opening diameter
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