JP6049322B2 - Liquid discharge head and manufacturing method thereof - Google Patents

Description

  The present invention relates to a liquid discharge head provided in an ink jet recording apparatus that performs a recording operation by discharging ink and a method for manufacturing the same.

  A configuration and a manufacturing method of a liquid discharge head including a pressure chamber that is configured by a cylindrical ink discharge portion (piezoelectric element) made of a piezoelectric material and whose volume can be contracted by deformation of the ink discharge portion by application of a drive voltage. It is disclosed in Patent Document 1.

  The liquid discharge head is composed of a unit laminate (piezoelectric element substrate), has a square cylindrical shape with a cavity penetrating inside, and has a plurality of ink discharge portions arranged at high density. When an electric signal is supplied to the ink ejection part, the four wall parts constituting the pressure chamber penetrating in the plate thickness direction expand into a barrel shape, thereby reducing the volume of the pressure chamber, and the ink accumulated in the pressure chamber Is discharged. High-resolution recording is realized by arranging the ink discharge portions at high density.

  Around each pressure chamber, a pressure chamber separation groove is provided so as to surround each pressure chamber, thereby forming a plurality of cylindrical ink discharge portions including substantially separate pressure chambers. ing. Even if the four wall portions of the pressure chamber expand into a barrel shape, since the pressure chamber separation groove is provided, the expansion of the wall portion is not transmitted to the adjacent pressure chamber, and crosstalk is reduced.

  Patent application title: STRUCTURE AND MANUFACTURING METHOD OF A LIQUID DISCHARGE HEAD HAVING A GROOVE-TYPE PRESSURE CHAMBER (INK CHANNEL) COMPRISING A PIEZOELECTRIC MATERIAL (PIEZOELECTRIC) AND CONTAINING A STRUCTURE OF DISCHARGING INK BY PRESSURE CONDUCT It is disclosed in Document 2.

  The pressure chamber is formed by a groove formed on the surface of a piezoelectric material plate (piezoelectric material substrate), and is configured by closing the groove with a top plate and a nozzle plate. Alternating with the pressure chamber, a pressure chamber separation groove (dummy channel) is provided in the piezoelectric material plate, and a portion between the pressure chamber and the pressure chamber separation groove is a side wall. When an electric signal is supplied to the piezoelectric material plate, the side wall is deformed, the volume of the pressure chamber is contracted, and ink is ejected from the ejection port (nozzle) of the nozzle plate. Since the pressure chamber separation groove is provided, even if the side wall between the pressure chamber and the pressure chamber separation groove is deformed, the deformation of the side wall is not transmitted to the adjacent pressure chamber, so that crosstalk is reduced.

JP 2007-168319 A Japanese Patent No. 32117006

  However, in the invention disclosed in Patent Document 1, since each ink discharge portion is formed in a substantially independent rectangular tube shape, from the outer peripheral surface to the inner peripheral surface (pressure chamber inner surface) of the ink discharge portion. The wall portion is thin and the durability of the ink ejection portion is low. In order to eject high viscosity ink for high-quality recording, it is necessary to increase the ink ejection force of the pressure chamber, and the length of the pressure chamber must be increased. However, in order to increase the length of the pressure chamber, it is necessary to increase the length of the ink discharge portion, and by increasing the length of the thin wall portion of the rectangular cylindrical ink discharge portion having a cavity. In addition, the durability of the ink discharge portion is further reduced. For this reason, the wall portion of the ink discharge portion is damaged by the vibration generated when characters or images are recorded on the recording medium or the ink discharge portion is repeatedly contracted to discharge high viscosity ink, thereby discharging the ink. You may not be able to do it. Therefore, there is a need for an ink discharge section having durability that can discharge high-viscosity ink.

  In the invention disclosed in Patent Document 2, since the pressure chamber is formed in a groove shape in the piezoelectric material plate and the nozzle plate is joined in a direction orthogonal to the groove of the piezoelectric material plate, There is only one row of ink ejection openings that can be formed on the material plate. In order to perform recording with high resolution on a recording medium, it is necessary that the ink ejection ports be arranged at a high density, and a single row is not sufficient. Therefore, a plurality of piezoelectric material plates must be stacked. However, since a member (ink pool) constituting a common liquid chamber for storing ink is provided on the upper surface of the piezoelectric material plate, it is not flat and a plurality of piezoelectric material plates cannot be easily stacked.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve the above-described problems, and has a unit laminate body that is provided with an ink discharge portion that is arranged at a high density and has a durability capable of discharging high-viscosity ink and that reduces crosstalk. The object is to provide a liquid discharge head.

In order to achieve the above-described object, the present invention provides a surface plate having a plurality of ejection openings for ejecting recording liquid, a plurality of groove-shaped openings, and a plurality of groove-shaped openings for supplying recording liquid to the ejection openings. a recording liquid discharging body having a pressure chamber provided in record liquid discharge member extends along a plurality of pressure chambers and a plurality of openings, between the plurality of openings between and between the adjacent plurality of pressure chambers A plurality of pressure chamber separation grooves provided in the recording liquid discharge body, wherein the recording liquid discharger is formed by alternately laminating a first piezoelectric material plate and a second piezoelectric material plate, and the pressure chamber and the opening is provided overlap each other seen in Rutotomoni laminating direction provided alternately as viewed in the stacking direction of the first piezoelectric material plate and a second piezoelectric material plate position, the pressure chamber separation grooves, a plurality of first stacked Piezoelectric material plate and multiple second piezoelectric material plates in the stacking direction And it is provided so as to penetrate me.

  According to the present invention, the ink discharge portion is not configured in a substantially independent cylindrical shape, but the wall portions of the stacked ink discharge portions are connected in the stacking direction. As a result, the durability of the ink discharge portion can be improved. In addition, since the ink discharge unit is configured by stacking the piezoelectric material plates constituting the inner peripheral surface of the ink discharge unit, the ink discharge unit is compared with a state in which the piezoelectric material plate is configured in a groove shape. Can be arranged in an overlapping state. Therefore, the ink discharge portions are arranged with high density. Further, by providing the pressure chamber separation groove between the ink discharge portions adjacent in the horizontal direction, the crosstalk is reduced because the deformation due to the piezoelectric effect of the ink discharge portion is not transmitted to the adjacent ink discharge portions. .

  Therefore, the liquid ejection head has high durability, is arranged with high density, and can achieve high-resolution and high-quality recording by an ink ejection unit that does not generate crosstalk.

1 is a perspective view showing a liquid discharge head according to a first embodiment of the present invention. (A) is A-A 'sectional drawing of the liquid discharge head shown in FIG. 1, (b) is a perspective view of the ink discharge block of 1st embodiment of this invention. (A) to (e) are formed by forming first to third electrodes on the first and second piezoelectric material plates, joining the second piezoelectric material plate and the non-piezoelectric material plate, and It is the side view which showed the process of laminating | stacking these 1st and 2nd piezoelectric material plates. (A) is a side view of the second piezoelectric material plate, (b) is a side view in which the third electrode is disposed, and (c) is a side view showing a state in which the second piezoelectric material plate and the non-piezoelectric material plate are joined. FIG. 4D is a side view in which the first electrode is arranged. It is a side view which shows the state which laminated | stacked the 1st and 2nd piezoelectric material plate and the non-piezoelectric material plate. (A) is a side view which shows the ink discharge block of 2nd embodiment of this invention, (b) is the perspective view. (A) to (e) are formed by forming first to third electrodes on the first and second piezoelectric material plates, joining the second piezoelectric material plate and the non-piezoelectric material plate, and It is the side view which showed the process of laminating | stacking these 1st and 2nd piezoelectric material plates. (A) is a side view of the second piezoelectric material plate, (b) is a side view in which the third electrode is disposed, and (c) is a side view showing a state in which the second piezoelectric material plate and the non-piezoelectric material plate are joined. FIG. 4D is a side view in which the first electrode is arranged. It is a side view which shows the state which laminated | stacked the 1st and 2nd piezoelectric material plate and the non-piezoelectric material plate.

  Embodiments of the present invention will be described below with reference to the drawings.

(First embodiment)
An ink jet recording apparatus that records characters and images by ejecting ink, which is a recording liquid, onto a recording medium, an ink tank that stores ink, a liquid ejecting head that includes a nozzle that ejects ink, and a liquid A carriage holding the discharge head is provided. When an ink jet recording apparatus records characters or images on a recording medium, the liquid ejection head ejects an appropriate amount of each color ink to an appropriate position on the recording medium while the carriage reciprocates on the recording medium. To go. As the recording medium is sequentially fed at a predetermined pitch in accordance with the reciprocation of the carriage, the ink ejection position on the recording medium is shifted. As the carriage and the recording medium move in this manner, image data is recorded on the recording medium.

  FIG. 1 is a perspective view of a liquid discharge head used in an embodiment of the present invention.

  As shown in FIG. 1, the liquid discharge head according to the embodiment of the present invention includes an ink discharge block (recording liquid discharge body) 5, a rear diaphragm plate 6, and a nozzle plate (surface plate) 8. The rear diaphragm plate 6 is joined to the back surface of the ink ejection block 5 and has a plurality of diaphragm holes (not shown) for sending ink from a common liquid chamber (not shown) to the ink ejection block 5. The nozzle plate 8 is bonded to the front surface of the ink ejection block 5 and has a plurality of ejection ports 7 for ejecting ink arranged at high density.

  As shown in FIGS. 2A and 2B, the ink ejection block 5 is configured by laminating a plurality of first piezoelectric material plates 1 and a plurality of second piezoelectric material plates 2. A non-piezoelectric material plate 11 is provided on the uppermost surface and the lowermost surface, and a pressure chamber separation groove 15 is formed from the upper surface to the lower surface along the stacking direction. On the front surface of the ink discharge block 5, a plurality of groove-shaped pressure chambers 3 which are discharge portions for discharging ink and a plurality of groove-shaped openings 4 are arranged between the pressure chamber separation grooves 15. . A first electrode 12 is provided on the inner peripheral surface of the pressure chamber 3, and a third electrode 14 is provided on at least a part of the inner peripheral surface of the opening 4. The pressure chambers 3 and the openings 4 are provided so as to alternately overlap with each other in a plan view along a direction parallel to the pressure chamber separation grooves 15. On the exposed surface where the first piezoelectric material plate 1 on the side wall forming the pressure chamber separation groove 15 is exposed, a recess 9 having a second electrode 13 provided on the inner peripheral surface is formed. The recesses 9 are arranged on both sides of the pressure chamber 3 in a direction orthogonal to the pressure chamber separation groove 15.

  As shown in FIGS. 3A and 3B, on the surface of the first piezoelectric material plate 1, a groove (first groove) constituting the inner peripheral surface of the pressure chamber 3 for sending out ink and a recess 9 are formed. Grooves (third grooves) constituting the inner peripheral surface of the first piezoelectric material plate 1 are alternately provided in parallel on the surface. The first electrode 12 a is disposed in the groove constituting the inner peripheral surface of the pressure chamber 3, and the second electrode 13 is disposed in the groove constituting the inner peripheral surface of the recess 9. Further, as shown in FIG. 3D, the third electrode 14 b is disposed on the back surface of the first piezoelectric material plate 1. As shown in FIGS. 4A and 4B, grooves (second grooves) constituting the inner peripheral surface of the opening 4 are arranged in parallel on the surface of the second piezoelectric material plate 2. Yes. A third electrode 14 a is disposed at the bottom of the groove that forms the inner peripheral surface of the opening 4. Further, as shown in FIG. 4D, the first electrode 12b is disposed on the back surface of the second piezoelectric material plate 2 at a position facing the third electrode 14a. The first piezoelectric material plate 1 and the second piezoelectric material plate 2 use a piezoelectric material such as lead zirconate titanate (PZT), and the non-piezoelectric material plate 11 uses a material other than a piezoelectric material such as a ceramic material. Is desirable.

  The operation of ejecting ink by the liquid ejection head that ejects ink having the configuration described above will be described.

  In order to discharge ink to the recording medium, the ink supplied from the common liquid chamber body (not shown) flows into the pressure chamber 3 of the ink discharge block 5 through the throttle hole (not shown) of the rear diaphragm plate 6, It flows into the discharge port 7 of the nozzle plate 8 and the filling is completed. In this state, the liquid ejection head receives an electrical signal in order to eject ink onto the recording medium according to the received recording data. When the liquid ejection head receives an electrical signal, a driving voltage is applied, and the first piezoelectric material plate constituting the pressure chamber 3 via the first electrode 12, the second electrode 13, and the third electrode 14. An electric field is generated in the first and second piezoelectric material plates 2 to produce a piezoelectric effect. When the piezoelectric effect occurs, the surrounding piezoelectric material constituting the pressure chamber 3 expands, and as a result, the pressure chamber 3 contracts. Since the inside of the pressure chamber 3 is filled with ink, the ink corresponding to the volume reduced by the contraction of the pressure chamber 3 is ejected from the ejection port 7. Such a Gould type liquid discharge head, in which the pressure chamber itself is formed of a piezoelectric material and the pressure chamber is contracted by deformation of the piezoelectric material due to the piezoelectric effect, is excellent in ink discharge force. It can be discharged.

  When the ink is ejected from the ejection port 7, the application of the driving voltage is stopped and the electric field of the piezoelectric material is discharged. When the electric field of the piezoelectric material is discharged, the piezoelectric effect is lost, the expansion of the piezoelectric material is eliminated, and the pressure chamber 3 returns to the initial shape. Since the ink filled in the pressure chamber 3 is ejected by contraction of the pressure chamber 3, a space corresponding to the volume of the ejected ink is formed inside the pressure chamber 3. In this space, ink stored in a common liquid chamber (not shown) flows into the pressure chamber 3 of the ink discharge block 5 through the throttle hole (not shown) of the rear throttle plate 6 and is filled. The ink level reaches the ejection port 7 of the nozzle plate 8 by the meniscus restoring force. When the ink level reaches the ejection port 7, refilling of the ink into the pressure chamber 3 is completed.

  As described above, the ink is ejected to the recording medium by repeating the ejection of the ink due to the contraction of the pressure chamber 3 and the supply of the ink from the common liquid chamber (not shown) of the pressure chamber 3, and the received recording data A character or image based on the image is formed on a recording medium.

  In the present embodiment, the pressure chamber 3 and the opening 4 are arranged between the adjacent pressure chamber separation grooves 15, and the pressure chamber 3 and the opening 4 are alternately arranged along a direction parallel to the pressure chamber separation groove 15. A plurality are formed so as to overlap. Accordingly, the overlapping pressure chambers 3 and the walls constituting the opening 4 are connected in the stacking direction of the piezoelectric material plates. For this reason, the rigidity of the ink discharge part of this embodiment is improved compared with the ink discharge part of patent document 1 comprised by the substantially separated square cylinder shape. For this reason, durability against fatigue destruction due to vibration generated during recording of characters and images on a recording medium and contraction of an ink discharge portion repeated for discharging high viscosity ink is increased. This eliminates the possibility that the wall portion of the ink discharge portion is damaged and ink cannot be discharged.

  In addition, since the ink ejection block 5 is configured by laminating the first piezoelectric material plate 1 having the grooves constituting the inner peripheral surface of the pressure chamber 3, the ink ejection block 5 is at least the same as that disclosed in Patent Document 1. The outlets 7 can be arranged with high density.

  On the other hand, since the pressure chamber separation groove 15 is provided between the adjacent pressure chambers 3, the deformation of each pressure chamber 3 is not transmitted to the adjacent pressure chamber 3. Further, since the pressure chambers 3 stacked in the direction parallel to the pressure chamber separation groove 15 are stacked via the adhesive, the deformation of each pressure chamber 3 is not transmitted. Therefore, it has a structure in which occurrence of crosstalk is reduced.

(Manufacturing method of the first embodiment)
Here, the manufacturing method of the liquid discharge head described above will be described.

  As shown in FIGS. 3A and 3B, a plurality of grooves constituting the inner peripheral surface of the pressure chamber 3 and a plurality of grooves constituting the inner peripheral surface of the recess 9 are formed on the surface of the first piezoelectric material plate 1. Are provided by grinding. Thereafter, the first electrode 12a and the second electrode 13 are formed in each groove by selective plating. The plurality of grooves constituting the inner peripheral surface of the pressure chamber 3 and the plurality of grooves constituting the inner peripheral surface of the recess 9 are alternately arranged on the surface of the first piezoelectric material plate 1.

  On the other hand, as shown in FIGS. 4A to 4D, a plurality of grooves constituting the inner peripheral surface of the opening 4 are provided by grinding on the surface of the second piezoelectric material plate 2. The third electrode 14a is formed by selective plating at the bottom of the groove constituting the inner peripheral surface. After the non-piezoelectric material plate 11 is joined to the surface of the second piezoelectric material plate 2, selective plating is performed on the back surface of the second piezoelectric material plate 2 at a position facing the third electrode 14a. Electrode 12b is formed.

  Thereafter, as shown in FIGS. 3C to 3E, the inner peripheral surface of the pressure chamber 3 is formed on the back surface of the second piezoelectric material plate 2 joined to the non-piezoelectric material plate 11 shown in FIG. The first piezoelectric material plate 1 is joined so that the grooves constituting the first electrode 12b coincide with the first electrode 12b. After the first piezoelectric material plate 1 is joined, the entire back surface of the first piezoelectric material plate 1 is plated to form the third electrode 14b. Then, the other second piezoelectric material plate 2 in a state where the non-piezoelectric material plate 11 shown in FIG. 4D is not joined is the pressure chamber 3 on the back surface of the first piezoelectric material plate 1 joined to the unit. Are joined so that the grooves constituting the inner peripheral surface of the opening 4 are aligned.

  Furthermore, another first piezoelectric material plate 1 and another second piezoelectric material plate 2 to which the non-piezoelectric material plate 11 is not bonded are stacked and bonded, and after a predetermined number of layers are stacked, another sheet is added. The non-piezoelectric material plate 11 is bonded to the back surface of the second piezoelectric material plate 2 on the bottom surface. In this way, the unit laminated body 10 is formed as shown in FIG.

  When the unit laminated body 10 is formed, a polarization process for generating a piezoelectric effect is performed. The polarization process is a process in which the ink discharge block 5 is immersed in an insulating liquid such as silicon oil, heated (for example, 200 ° C.), and an electric field of about 1 to 2 kV / mm is applied between the formed electrodes.

  As shown in FIGS. 2A and 2B, the pressure chamber separation grooves 15 for separating the adjacent pressure chambers 3 are formed between the pressure chambers from the upper surface of the unit laminate 10 toward the lower surface. The space between the openings is formed by grinding so as to be parallel to the stacking direction of the pressure chambers 3. That is, it is formed between adjacent first grooves and adjacent second grooves of the first piezoelectric material plate. The pressure chamber separation groove 15 must be formed so as to divide the groove constituting the inner peripheral surface of the recess 9 and not reach the side wall constituting the recess 9 and the inner peripheral surface of the opening 4. Further, the pressure chamber separation groove 15 penetrates from the upper surface to the lower surface of the unit laminate 10, but the pressure chamber separation groove 15 does not penetrate from the front to the back of the unit laminate 10 and It is formed so as not to be formed.

  When the pressure chamber separation groove 15 is formed in the unit laminate 10, the ink discharge block 5 is completed.

  After the ink discharge block 5 is completed as described above, the nozzle plate 8 is joined to the front surface of the ink discharge block 5 so that the pressure chamber 3 and the discharge port 7 are aligned. On the other hand, the rear throttle plate 6 is joined to the back surface of the ink discharge block 5 so that the pressure chamber 3 and a throttle hole (not shown) are aligned.

  The liquid discharge head is manufactured through the above steps.

(Second Embodiment)
FIG. 6B is a perspective view of the ink ejection block 25 showing the second embodiment of the present invention. Note that the nozzle plate and the rear diaphragm plate are joined to the front surface and the back surface of the ink discharge block 25 as in the first embodiment.

  As shown in FIGS. 6A and 6B, the ink discharge block 25 is configured by laminating a first piezoelectric material plate 21 and a second piezoelectric material plate 22, and a non-piezoelectric material plate on the upper surface and the lower surface. 31 is provided, and a pressure chamber separation groove 35 is formed from the upper surface to the lower surface. Further, a plurality of pressure chambers 23 and a plurality of openings 24 are disposed between the pressure chamber separation grooves 35 on the front surface of the ink ejection block 25. A first electrode 32 is provided on the inner peripheral surface of the pressure chamber 23, and a third electrode 34 is provided on at least a part of the inner peripheral surface of the opening 24. The pressure chambers 23 and the openings 24 are alternately stacked in a row so as to be in parallel with the pressure chamber separation grooves 35. A second electrode 33 is formed in each pressure chamber separation groove 35.

  As shown in FIG. 7B, a groove constituting the inner peripheral surface of the pressure chamber 23 that feeds out ink is formed on the surface of the first piezoelectric material plate 21 in an inner periphery of the pressure chamber 23. A first electrode 32a is disposed in the groove constituting the surface. Further, as shown in FIG. 7D, the third electrode 34 b is disposed on the back surface of the first piezoelectric material plate 21. As shown in FIG. 8B, grooves forming the inner peripheral surface of the opening 24 are arranged in parallel on the surface of the second piezoelectric material plate 22. A third electrode 34 a is disposed at the bottom of the groove that forms the inner peripheral surface of the opening 24. Further, as shown in FIG. 8D, the first electrode 32b is disposed on the back surface of the second piezoelectric material plate 22 at a position facing the third electrode 34a. The first piezoelectric material plate 21 and the second piezoelectric material plate 22 use a piezoelectric material such as lead zirconate titanate (PZT), and the non-piezoelectric material plate 31 uses a material other than a piezoelectric material such as a ceramic material. Is desirable.

  Since the operation of ejecting ink by the liquid ejection head that ejects ink having the configuration described above is the same as that of the first embodiment, the description thereof is omitted.

(Manufacturing method of the second embodiment)
Here, a manufacturing method of the liquid discharge head described above will be described.

  As shown in FIGS. 8A to 8D, grooves constituting the inner peripheral surface of the opening 24 are provided on the surface of the second piezoelectric material plate 22 by grinding, and the inner peripheral surface of the opening 24 is formed. A third electrode 34a is formed on the bottom of the groove to be formed by selective plating. After the non-piezoelectric material plate 31 is joined to the surface of the second piezoelectric material plate 22, selective plating is performed on the back surface of the second piezoelectric material plate 22 at a position facing the third electrode 34a, so that the first electrode 32b is formed.

  Next, as shown in FIGS. 7A to 7D, a groove constituting the inner peripheral surface of the pressure chamber 23 is provided on the surface of the first piezoelectric material plate 21 by grinding, and first plating is performed by selective plating. The electrode 32a is formed. Thereafter, a groove constituting the inner peripheral surface of the pressure chamber 23 and a back surface of the second piezoelectric material plate 22 are formed on the back surface of the second piezoelectric material plate 22 of the unit joined to the non-piezoelectric material plate 31. The first piezoelectric material plate 21 is bonded so that the first electrodes 32b coincide. After the first piezoelectric material plate 21 is bonded, the entire back surface of the first piezoelectric material plate 21 is plated to form the third electrode 34b. When the third electrode 34b is formed, the second piezoelectric material plate 22 formed with the third electrode 34a is opposed to the pressure chamber 23 on the back surface of the first piezoelectric material plate 21 joined to the unit. In such a position, the grooves constituting the inner peripheral surface of the opening 24 are joined so as to be aligned.

  In this way, the first piezoelectric material plate 21 and the second piezoelectric material plate 22 are laminated and bonded, and after a predetermined number of layers are laminated, the non-piezoelectric material plate 31 is attached to the back surface of the second piezoelectric material plate 22. To join. Then, as shown in FIG. 9, the unit laminated body 30 is formed.

  When the unit laminated body 30 is formed, a polarization process for generating a piezoelectric effect is performed. The polarization process is the same as in the first embodiment.

  As shown in FIGS. 6A and 6B, pressure chamber separation grooves 35 for separating adjacent pressure chambers 23 are formed between the pressure chambers 23 from the upper surface of the unit laminate 30 toward the lower surface. Is formed by grinding in parallel to the stacking direction of the pressure chambers 23. The pressure chamber separation groove 35 must be formed so as not to reach the inner peripheral surface of the opening 4. Further, the pressure chamber separation groove 35 penetrates from the upper surface to the lower surface of the unit laminated body 30, but the pressure chamber separation groove 35 does not penetrate from the front surface of the unit laminated body 30 to the back surface. It is formed so as not to be formed.

  Finally, when the second chamber 33 is formed by plating the pressure chamber separation groove 35, the ink discharge block 25 is completed.

  After the ink discharge block 25 is completed as described above, the nozzle plate 8 is joined to the front surface and the rear diaphragm plate 6 is joined to the back surface.

  The liquid discharge head is manufactured through the above steps.

1, 21 First piezoelectric material plate 2, 22 Second piezoelectric material plate 3, 23 Pressure chamber 4, 24 Opening portion 5, 25 Ink discharge block 6 Rear throttle plate 7 Discharge port 8 Nozzle plate 9 Recess 10, 30 Unit Laminate 11, 31 Non-piezoelectric material plate 12, 32 First electrode 13, 33 Second electrode 14, 34 Third electrode 15, 35 Pressure chamber separation groove

Claims (7)

A surface plate having a plurality of ejection openings for ejecting recording liquid;
A recording liquid discharging body a groove-like plurality of openings and the recording liquid and a plurality of pressure chambers grooved supplied to the discharge port,
Provided in front type recording solution discharge member, said plurality of extending along the pressure chambers and the plurality of openings, a plurality of pressure provided between the adjacent and the plurality of openings between each other said plurality of pressure chambers A chamber separation groove,
The recording liquid ejection body is formed by alternately laminating a first piezoelectric material plate and a second piezoelectric material plate, and the pressure chamber and the opening are formed by the first piezoelectric material plate and the second piezoelectric material plate. the viewed in the stacking direction of the piezoelectric material plate provided in a position overlapping when viewed in Rutotomoni the stacking direction are provided alternately, the pressure chamber separation grooves, a plurality of said first piezoelectric material plate which are stacked and a plurality of said first A liquid discharge head, characterized in that the liquid discharge head is provided so as to penetrate the two piezoelectric material plates along the stacking direction.   The pressure chamber is composed of a first groove provided on the surface of the first piezoelectric material plate, and the opening is composed of a second groove provided on the surface of the second piezoelectric material plate. The liquid discharge head according to claim 1, wherein the liquid discharge head is a liquid discharge head. A first electrode is provided on the inner peripheral surface of the pressure chamber, a second electrode is provided on at least a part of the inner peripheral surface of the opening, and at least the first of the side walls constituting the pressure chamber separation groove The liquid discharge head according to claim 2 , wherein a third electrode is provided on an exposed surface from which the piezoelectric material plate is exposed.   The first piezoelectric material plate is located between the adjacent first grooves, and has a recessed portion on the exposed surface of the side wall constituting the pressure chamber separating groove, and the third electrode is formed in the recessed portion. The liquid discharge head according to claim 3, wherein the liquid discharge head is provided on a peripheral surface. Forming a plurality of first grooves on the surface of the first piezoelectric material plate made of a piezoelectric material to form a pressure chamber that supplies a discharge port for discharging the recording liquid;
Forming a first electrode in the plurality of first grooves;
Forming a plurality of second grooves for forming an opening on a surface of a second piezoelectric material plate made of a piezoelectric material;
Forming a second electrode in at least a part of the plurality of second grooves;
Forming the first electrode on the back surface of the second piezoelectric material plate;
Forming a unit by bonding the surface of the first piezoelectric material plate to the back surface of the second piezoelectric material plate;
Forming a third electrode on the back surface of the first piezoelectric material plate joined to the unit;
A plurality of the second piezoelectric material plates and the first piezoelectric material plates are alternately joined to the back surface of the first piezoelectric material plate joined to the unit to form a unit laminate;
The plurality of first piezoelectric material plates and the plurality of second piezoelectric material plates stacked between the adjacent first grooves and between the adjacent second grooves of the unit laminate. Forming a plurality of pressure chamber separation grooves so as to penetrate through the stacking direction;
A liquid discharge head manufacturing method comprising:   Forming on the surface of the first piezoelectric material plate a third groove arranged in parallel and alternately with the first groove, and forming the second electrode in the third groove; The method of manufacturing a liquid ejection head according to claim 5, wherein the third groove includes a step of dividing in the step of forming the pressure chamber separation groove. 6. The method of manufacturing a liquid ejection head according to claim 5, wherein the step of forming the plurality of pressure chamber separation grooves includes the step of forming the second electrode in the pressure chamber separation groove.

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