JP6046532B2 - Analytical battery - Google Patents

Description

  The present invention relates to an analytical battery, and more particularly to an analytical battery suitable for analyzing an electrode reaction with an analytical instrument.

  As is well known, in the positive electrode active material and the negative electrode active material constituting the battery, an electrode reaction occurs during charge and discharge. Recently, attempts have been made to analyze this electrode reaction by an analytical instrument during charging and discharging. For example, Non-Patent Documents 1 and 2 propose analytical batteries that can be observed with a transmission electron microscope (TEM).

The analytical battery described in Non-Patent Document 1 has a first silicon substrate and a second silicon substrate on which rectangular observation windows of about 50 μm × 100 μm are respectively formed. In the first silicon substrate, a positive electrode active material made of LiCoO ₂ and a negative electrode active material made of highly oriented graphite are provided in the vicinity of the observation window. The positive electrode active material and the negative electrode active material are each formed by an ion beam vapor deposition method in which a focused ion beam is irradiated onto a bulk body.

  The first silicon substrate and the second silicon substrate are spaced apart from each other at a predetermined interval, and are arranged to face each other so that the positions of the observation windows coincide with each other. An electrolytic solution is circulated between the first silicon substrate and the second silicon substrate. A battery is constituted by the electrolytic solution and the positive electrode active material and the negative electrode active material provided on the first silicon substrate.

  This battery is accommodated in a tip portion of a TEM holder in which a flow path for circulating the electrolytic solution is formed. The electrolyte is circulated between the first silicon substrate and the second silicon substrate via the flow path of the TEM holder under the action of the pump.

  In this state, the electron beam is transmitted through the observation window, TEM observation is performed, and on the other hand, the battery is charged / discharged to observe how the positive electrode active material and the negative electrode active material change. Is possible.

In-situ Electron Microscopy of Electrical Energy Storage Materials [online], 2011 [searched on November 26, 2012], Internet <URL: http://www1.eere.energy.gov/vehiclesandfuels/pdfs/merit_review_2011/electrochemical_storage/ es095_unocic_2011_p.pdf> In-situ Electron Microscopy of Electrical Energy Storage Materials [online], 2012 [searched February 5, 2013], Internet <URL: http://www1.eere.energy.gov/vehiclesandfuels/pdfs/merit_review_2012/energy_storage/ es095_unocic_2012_p.pdf>

  The ion beam deposition method has a problem that the apparatus is expensive and a long time is required for film formation. Moreover, a bulk body is required for film formation as described above. For this reason, cost will soar.

  Therefore, it is recalled that either the positive electrode active material or the negative electrode active material is a binder in which powder or fiber is bound. In this case, it is considered that a mixture serving as a positive electrode active material or a negative electrode active material may be applied in the vicinity of the observation window of the first silicon substrate.

  However, the observation window in this battery is small as described above. Therefore, when the mixture is not accurately applied to a predetermined position, the positive electrode active material and the negative electrode active material may be close to each other. If such a situation occurs, it will contribute to the occurrence of a short circuit.

  Further, in this battery, when the distance between the first silicon substrate and the second silicon substrate is reduced, the pressure of the electrolyte acting on the first silicon substrate and the second silicon substrate is increased. The distance between the second silicon substrates must be increased to some extent. For this reason, it is difficult to reduce the size of the battery.

  The present invention has been made to solve the above-described problem, and an object of the present invention is to provide an analytical battery that can avoid a short circuit and that can be further miniaturized.

In order to achieve the above object, the present invention is an analytical battery for performing analysis by transmitting an electron beam, wherein the positive electrode holder and the negative electrode holder are overlapped.
The positive electrode holder has a first substrate provided with a first electron beam permeable film on one end surface;
The negative electrode holder has a second substrate provided with a second electron beam permeable film on one end surface;
In the positive electrode holder, a first observation window for transmitting an electron beam is formed by depression from the first substrate side and leaving only the first electron beam transparent film,
The negative electrode holder is depressed from the second substrate side, and only the second electron beam permeable film remains, thereby forming a second observation window for transmitting the electron beam,
A positive electrode active material is disposed at a portion corresponding to the back surface of the first observation window in the first electron beam permeable film, and on the back surface of the second observation window in the second electron beam transmissive film. A negative electrode active material is disposed at a corresponding site,
Including an electrolytic solution in which the positive electrode active material and the negative electrode active material are individually contacted,
The first electron beam permeable film is provided with a positive terminal portion electrically connected to the positive electrode active material, and the second electron beam permeable film is electrically connected to the negative electrode active material. The negative electrode side terminal part connected electrically is provided.

  In the present invention, the positive electrode active material is provided in the positive electrode holder, while the negative electrode active material is provided in the negative electrode holder. That is, the positive electrode active material and the negative electrode active material are disposed on separate members. For this reason, even if the space for providing the positive electrode active material and the space for providing the negative electrode active material are narrow, it is possible to effectively prevent a short circuit from occurring due to excessive proximity of the positive electrode active material and the negative electrode active material. .

  Moreover, since a very small amount of electrolytic solution is contained (accommodated), it is not necessary to distribute the electrolytic solution. For this reason, the pressure of the electrolytic solution acting on the positive electrode holder and the negative electrode holder, in other words, the internal pressure of the analytical battery can be reduced. For this reason, since it is not necessary to increase the separation distance between the first substrate and the second substrate, the analytical battery can be miniaturized.

  Moreover, this analytical battery can be easily manufactured by a conventionally known semiconductor process. Therefore, it can be obtained at low cost.

  At least one of the positive electrode active material and the negative electrode active material may be a binder in which powders or fibers are bound. In the present invention, as described above, since the member for providing the positive electrode active material or the negative electrode active material is separate, it is not easy to apply the mixture at a predetermined position because the space for forming the active material is narrow. Even in this case, a short circuit can be prevented.

  Moreover, the application of the mixture is simpler and less expensive than film formation. That is, in this case, the cost can be further reduced.

  It is preferable to provide a seal at the overlapping portion of the positive electrode holder and the negative electrode holder. In this case, it is possible to effectively prevent the electrolytic solution from leaking from the overlapping portion.

  Moreover, it is preferable to provide a spacer film on at least one of the first electron beam permeable film and the second electron beam permeable film. This is because the distance between the first substrate and the second substrate can be adjusted appropriately. In the case of providing a spacer film, it is preferable that the spacer film be an insulating film in order to avoid a short circuit.

  In the above, examples of suitable materials for the first substrate or the second substrate include silicon, quartz, borosilicate glass, and the like. A substrate made of such a material has an advantage that the above-described electron beam permeable film, terminal portion, spacer film and the like can be easily formed.

  In the first substrate, a film may be formed on the back surface of the one end surface provided with the first electron beam permeable film. Similarly, in the second substrate, a film may be formed on the back surface of the one end surface provided with the second electron beam permeable film. This film is, for example, a mask film provided when forming the first window or the second window.

  In this case, since the operation of removing the mask film is not performed, there is an advantage that the number of steps is reduced accordingly.

  In addition, this kind of film | membrane can be provided from the same material as the said 1st electron beam permeable film or the said 2nd electron beam permeable film.

  According to the present invention, since the positive electrode active material and the negative electrode active material are provided in separate members, the space where the positive electrode active material is provided and the space where the negative electrode active material is provided are narrow, or the positive electrode active material Or even if it is a case where at least any one of a negative electrode active material is formed by apply | coating a mixture, it is avoided that a positive electrode active material and a negative electrode active material adjoin too much. For this reason, it is possible to effectively prevent a short circuit from occurring.

  Moreover, since the electrolytic solution is included (accommodated), it is possible to avoid an increase in internal pressure as in the case where the electrolytic solution is circulated. For this reason, since the separation distance between the first substrate and the second substrate can be reduced, the analytical battery can be miniaturized.

1 is a schematic overall perspective view of an analytical battery according to an embodiment of the present invention. It is a schematic perspective view of the positive electrode holder which comprises the said battery for analysis. It is a principal part disassembled perspective view of the said battery for analysis. It is a longitudinal cross-sectional view which shows the state which each formed the 1st electron beam transparent film | membrane and the 1st mask film | membrane in the whole region of the both end surfaces of a 1st board | substrate. 5A is a plan view showing a state in which a spacer precursor film is formed over the entire area of the first electron beam permeable film, and FIG. 5B is a cross-sectional view taken along the line VB-VB in FIG. 5A. 6A is a plan view showing a state in which two substantially square-shaped photoresist films are formed on the spacer precursor film, and FIG. 6B is a cross-sectional view taken along line VIB-VIB in FIG. 6A. FIG. 7A is a plan view showing a state in which the first electron beam transmissive film is exposed again by removing the photoresist film and two first spacer films are obtained from the spacer precursor film. FIG. 7B is a cross-sectional view taken along line VIIB-VIIB in FIG. 7A. FIG. 3 is a plan view showing a state in which a photoresist film is formed on the first electron beam permeable film and a portion for forming a first conduction part for providing a positive electrode side terminal part is exposed from the photoresist film. . FIG. 3 is a plan view showing a state in which the first electron beam permeable film is exposed and a first spacer film and a first conduction part are formed at predetermined positions on the first electron beam permeable film. FIG. 10A is a plan view showing a state in which a photoresist film is formed on the first mask film and a part of the photoresist film is removed in a substantially square shape. FIG. 10B is an XB- It is XB arrow directional cross-sectional view. FIG. 11A is a plan view showing a state in which the first mask film is exposed again by removing the photoresist film and a part of the first substrate is exposed from the first mask film in a substantially square shape. 11B is a cross-sectional view taken along line XIB-XIB in FIG. 11A. FIG. 12A is a plan view showing a state in which a first observation window with a bottom wall of the first electron beam permeable film is formed by sinking from the first mask film toward the first electron beam transmissive film; 12B is a cross-sectional view taken along line XIIB-XIIB in FIG. 12A. FIG. 13A shows a state in which a photoresist film is formed on the first electron beam permeable film, and a part of the first conduction part and a part of the first electron beam transmissive film are exposed from the photoresist film. FIG. 13B is a cross-sectional view taken along line XIIIB-XIIIB in FIG. 13A. 14A to 14C are a plan view of a positive electrode holder in which a positive electrode active material is provided on the back surface (first back surface portion) of the first observation window, a cross-sectional view taken along line XIVB-XIVB in FIG. 14A, and FIG. 14A. It is a XIVC-XIVC sectional view taken on the line.

  Hereinafter, preferred embodiments of an analytical battery according to the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a schematic overall perspective view of an analytical battery 10 according to the present embodiment. The analytical battery 10 includes a substantially square positive electrode holder 12 and a negative electrode holder 14, and is configured by superimposing both holders 12 and 14. Further, the side surfaces of the holders 12 and 14, that is, the overlapping portions are surrounded by a seal 16 made of an epoxy resin adhesive or the like.

FIG. 2 is a schematic perspective view of the positive electrode holder 12. The positive electrode holder 12 has a first substrate 18a, a first electron beam transmissive film 20 is formed on the upper end surface of the first substrate 18a, and a first mask film 22 is formed on the lower end surface which is the back surface thereof. ing. The first substrate 18a is made of, for example, silicon (Si), quartz, borosilicate glass or the like, while the first electron beam transmissive film 20 and the first mask film 22 are made of, for example, silicon nitride (Si ₃ N ₄ ). Consists of.

  As shown in FIG. 3, the positive electrode holder 12 is formed with a bottomed first observation window 24a that is depressed from the first mask film 22 (on the first substrate 18a side) toward the first electron beam permeable film 20. The

  Here, the bottom wall of the first observation window 24 a is the first electron beam transmissive film 20. In other words, the first observation window 24a has a shape in which the first mask film 22 and the first substrate 18a are removed and only the first electron beam transmissive film 20 remains. 2 represents a portion corresponding to the back surface of the bottom wall of the first observation window 24a (hereinafter referred to as “first back surface portion”). In FIG. 2 and other drawings, the first back surface portion 26a is indicated by a solid line in order to facilitate understanding of the position of the first back surface portion 26a. It is one part of the film 20 and there is no clear boundary line with other parts. In addition, there is no particular difference in the component composition and the tissue structure.

  On the first electron beam permeable film 20, the leading end is close to the first back surface portion 26 a, and the rear end that is wider than the leading end reaches the outer edge of one end of the positive electrode holder 12. 28a is provided (see FIG. 2). The first conductive portion 28a is made of a material exhibiting conductivity, preferably a metal. Specific examples thereof include tungsten, copper, aluminum, platinum, and gold. Or carbon may be sufficient.

Furthermore, the positive electrode active material 30 is superimposed so as to straddle a part of the first back surface portion 26a and the tip of the first conductive portion 28a. When a lithium ion battery is configured as the battery part of the analytical battery 10, suitable examples of the positive electrode active material 30 include LiCoO ₂ , LiMn ₂ O ₂ , LiNiO ₂ , LiFePO ₄ , Li ₂ FePO ₄ F, LiCo _{1 / 3 Ni 1/3 Mn 1/3 O 2,} Li (Li a Ni x Mn y Co z) O 2 and the like.

  Here, the positive electrode active material 30 is made of a powder of a material as described above or a binder of fibers. The binding is performed through an appropriate binder such as an organic binder. In some cases, a conductive aid may be added.

  On the first electron beam permeable film 20, two first spacer films 32 a and 32 a are separated from each other at two corners of the end portion opposite to the end portion where the first conducting portion 28 a is provided. It is formed like this. The first spacer films 32a and 32a are preferably insulating films. This is because the concern that a short circuit may occur can be eliminated. In this case, a preferred example of the material of the first spacer films 32a and 32a is silicon oxide.

  One negative electrode holder 14 is configured in substantially the same manner as the positive electrode holder 12 except for the negative electrode active material 34 (see FIG. 3), and the material thereof is also substantially the same. For this reason, constituent elements corresponding to the constituent elements of the positive electrode holder 12 are denoted by “second” instead of “first” of the above name, and the subscript “a” is replaced by “b”. Detailed description thereof will be omitted. However, the second electron beam transparent film and the second mask film formed on one end surface and the back surface of the second substrate 18b of the negative electrode holder 14 are denoted by 36 and 38, respectively.

The negative electrode active material 34 is superimposed so as to straddle a part of the second back surface portion 26b and the tip of the second conductive portion 28b. When a lithium ion battery is configured as the battery part, suitable examples of the negative electrode active material 34 include LiC ₆ , Li ₄ Ti ₅ O ₁₂ , Si, Ge, and the like. The negative electrode active material 34 is also formed of a binder in which powders or fibers of the above-described substances are bound through an appropriate binder such as an organic binder.

  In the above, the first wire 40a and the second wire 40b (both see FIG. 1) are joined to the first conduction portion 28a and the second conduction portion 28b by solder or the like, respectively. Of course, the first wire 40a and the second wire 40b are conductors, and the first conductive portion 28a and the first wire 40a, and the second conductive portion 28b and the second wire 40b are electrically connected to each other via solder or the like. The The first conduction part 28a and the first wire 40a constitute a positive terminal, and the second conduction part 28b and the second wire 40b constitute a negative terminal.

  In the analytical battery 10, the positive electrode holder 12 and the negative electrode holder 14, as shown in FIGS. 1 and 3, have one end surface on which the second electron beam permeable film 36 and the negative electrode active material 34 are provided, and the first electron beam. It arrange | positions so that the one end surface in which the permeable film 20 and the positive electrode active material 30 were provided opposes. In order to avoid a short circuit, it is preferable that the first wire 40a and the second wire 40b do not protrude from the same side, but, for example, protrude from opposite sides (see FIG. 1).

1 and 3 show a state in which the negative electrode holder 14 is disposed below and the positive electrode holder 12 is disposed above. In this case, the electrolytic solution (see FIG. 3) is dropped so as to cover the negative electrode active material 34. In the case of a lithium ion battery, as the electrolytic solution 42, propylene carbonate, ethylene carbonate, dimethyl carbonate, diethyl carbonate, or the like is selected. Note that the electrolytic solution _{42, LiBF 4, LiClO 4,} LiPF 6 or the like is dissolved about 0.5~1mol / l.

  As the positive electrode holder 12 is superposed on the negative electrode holder 14, the electrolytic solution 42 is included (contained) in the analytical battery 10, and the positive electrode active material 30 comes into contact with the electrolytic solution 42. Thereby, both the negative electrode active material 34 and the positive electrode active material 30 contact the electrolyte solution 42, and a battery part is comprised. Thereafter, the seal 16 is provided at the overlapping portion of the negative electrode holder 14 and the positive electrode holder 12, thereby preventing leakage of the electrolytic solution 42. Further, the first back surface portion 26a and the second back surface portion 26b face each other due to the superposition, and eventually, the second observation window 24b is arranged at a position corresponding to the first observation window 24a.

  The analytical battery 10 is set in an analytical instrument that performs analysis (including evaluation and observation) using an electron beam, for example, a TEM. At this time, the first observation window 24a provided on the first mask film 22 side (or the second observation window 24b provided on the second mask film 38 side) faces the electron beam irradiation part of the TEM.

  For example, a charge / discharge tester is electrically connected to the first wire 40a and the second wire 40b, and as a result, the battery unit starts charging or discharging. That is, an electrode reaction occurs in each of the positive electrode active material 30 and the negative electrode active material 34. On the other hand, the analysis battery 10 is irradiated with an electron beam.

  Hereinafter, a case where an electron beam is incident on the first observation window 24a will be described as an example. Since the bottom wall of the first observation window 24a is the first electron beam transmissive film 20, the electron beam is the first electron beam. It penetrates the wire permeable membrane 20 and reaches the battery part.

  When the electron beam is incident on the positive electrode active material 30 or the negative electrode active material 34, the electron beam is transmitted from the bottom wall (second observation window 24b) of the second electron beam transmissive film 36. An electron diffraction image is obtained based on the transmitted electron beam. When a physical or chemical change occurs in the positive electrode active material 30 or the negative electrode active material 34 in accordance with the progress of the electrode reaction, the electron beam diffraction images become different. As a result, it is possible to obtain information on what kind of change is occurring in the active material during the electrode reaction.

  Thus, according to the present embodiment, so-called in-situ observation can be performed while charging / discharging the battery unit.

  The analysis battery 10 can be manufactured by a conventionally known semiconductor process (for example, see International Publication No. 2008/141147 pamphlet). Hereinafter, a method for producing the analytical battery 10 will be described.

  First, the positive electrode holder 12 is produced. That is, first, as shown in FIG. 4 which is a longitudinal sectional view, a first electron beam transmissive film 20 and a first mask film are formed on both end faces of a first substrate 18a made of silicon, quartz, borosilicate glass, or the like. 22 is formed over the entire area. When the first electron beam permeable film 20 and the first mask film 22 are formed of silicon nitride, a chemical vapor deposition (CVD) method may be employed.

  Next, as shown in FIG. 5A which is a plan view and FIG. 5B which is a cross-sectional view taken along the line VB-VB, a spacer precursor film 50 is formed over the entire region of the first electron beam transmissive film 20 by a CVD method or the like. Form a film. The spacer precursor film 50 is for obtaining the first spacer films 32a and 32a (see FIG. 2), and is made of, for example, silicon oxide.

  Next, as shown in FIG. 6A which is a plan view and FIG. 6B which is a cross-sectional view taken along the line VIB-VIB, the exposed portion of the spacer precursor film 50 is substantially T-shaped on the spacer precursor film 50. Thus, two substantially square-shaped photoresist films 52 and 52 are formed.

  Next, patterning is performed by performing reactive ion etching using the photoresist films 52 and 52 as a mask, and the photoresist films 52 and 52 are further removed. Thereby, as shown in FIG. 7A which is a plan view and FIG. 7B which is a cross-sectional view taken along the line VIIB-VIIB, the first electron beam permeable film 20 is exposed again, and the spacer precursor film 50 is formed in a substantially square shape. It remains as two first spacer films 32a and 32a forming

  Next, a photoresist film 54 (see FIG. 8) is formed on the first spacer films 32a and 32a and the first electron beam transmissive film 20. Furthermore, by performing reactive ion etching using the photoresist film 54 as a mask, as shown in FIG. 8 which is a plan view, a part of the first electron beam transmissive film 20, that is, the first A portion where the conductive portion 28 a is formed is exposed from the photoresist film 54.

  Next, in the first electron beam transmissive film 20, the first conductive portion 28 a is formed on the portion exposed from the photoresist film 54. In this case, for example, vacuum deposition may be performed.

  Thereafter, by removing the photoresist film 54, as shown in FIG. 9, the first electron beam permeable film 20 is exposed on one end surface of the first substrate 18a, and the first electron beam transmissive film 20 is exposed. A laminate in which the first spacer films 32a and 32a and the first conductive portion 28a are formed is provided at a predetermined position above.

  Next, the back surface is processed to form the first observation window 24a. That is, first, a photoresist film 56 is formed over the entire area of the first mask film 22, and further, as shown in FIG. 10A, which is a plan view of the back surface, and FIG. 10B, which is a cross-sectional view taken along line XB-XB, A part of one mask film 22, that is, a part where the first observation window 24a is formed is exposed from the photoresist film 56 in a substantially square shape.

  Next, patterning is performed by performing reactive ion etching using the photoresist film 56 as a mask, thereby removing a portion of the substantially square shape exposed from the photoresist film 56 in the first mask film 22. Further, the photoresist film 56 is removed. Thereby, as shown in FIG. 11A which is a plan view and FIG. 11B which is a cross-sectional view taken along line XIB-XIB, the first mask film 22 is exposed again. Since a part of the first mask film 22 has already been removed in a substantially square shape, the back surface of the first substrate 18a is exposed in a substantially square shape.

  Next, etching is performed from the back surface. When the first substrate 18a is made of silicon, a silicon etching solution may be used. As a result, as shown in FIG. 12A which is a plan view and FIG. 12B which is a cross-sectional view taken along line XIIB-XIIB, the first mask film 22 is depressed, and the first electron beam permeable film 20 is formed on the bottom wall. A first observation window 24a having one substrate 18a as a side wall is formed. Thereby, the positive electrode holder 12 is obtained.

  The positive electrode holder 12 is further provided with a positive electrode active material 30. That is, FIG. 13A is a sectional view taken along line XIIIB-XIIIB, in which a photoresist film 58 (see FIG. 13A) is formed on one end surface side where the first electron beam permeable film 20 is formed. As shown in FIG. 13B, a part of the tip of the first conduction part 28a and a part of the first electron beam permeable film 20 (a part of the first back surface part 26a) are exposed.

Then, for _{example, LiCoO 2, LiMn 2 O 2} , LiNiO 2, LiFePO 4, Li 2 FePO 4 F, LiCo 1/3 Ni 1/3 Mn 1/3 O 2, Li (Li a Ni x Mn y Co z ) Apply a mixture prepared by adding a carbon powder (carbon black, etc.) conductive aid or organic binder to O ₂ powder or fiber to the exposed part of the photoresist film 58 with a needle or the like. To do.

  Thereafter, by removing the photoresist film 58, as shown in FIG. 14A, which is a plan view, FIG. 14B, which is a cross-sectional view taken along the line XIVB-XIVB, and FIG. 14C, which is a cross-sectional view taken along the line XIVC-XIVC, The positive electrode holder 12 provided with the positive electrode active material 30 straddling the first back surface portion 26a and the first conductive portion 28a is obtained. Needless to say, the positive electrode active material 30 is located on the back surface of the first observation window 24a.

  As described above, according to the present embodiment, the first mask film 22 is formed of the same material as that of the first electron beam transmissive film 20, so that both can be formed by the same process. it can. In addition, the operation of removing the first mask film 22 is not particularly required. Therefore, the positive electrode holder 12 can be produced efficiently.

By performing an operation in accordance with the above, the second mask film 38 (the second substrate 18b side) is depressed toward the second electron beam permeable film 36, and the second electron beam transmissive film 36 is formed on the bottom wall, A second observation window 24b having the second substrate 18b as a side wall is formed, and the negative electrode holder 14 holding the negative electrode active material 34 straddling the second back surface portion 26b and the second conduction portion 28b can be obtained. Of course, the negative electrode active material 34 is located on the back surface of the second observation window 24b. As the negative electrode active material 34, LiC ₆ , Li ₄ Ti ₅ O ₁₂ , Si, Ge, or the like may be selected.

  Furthermore, the first wire 40a and the second wire 40b are respectively joined to the first conduction portion 28a and the second conduction portion 28b by solder or the like.

  Thereafter, for example, the electrolytic solution 42 is dropped so as to cover the negative electrode active material 34, and the positive electrode holder 12 is superimposed on the negative electrode holder 14. At this time, the positive electrode active material 30 comes into contact with the electrolytic solution 42 to form a battery part, and the electrolytic solution 42 is included (accommodated) in the analytical battery 10. Further, the first back surface portion 26a and the second back surface portion 26b face each other due to the superposition, and eventually the second observation window 24b is arranged at a position corresponding to the first observation window 24a (see FIG. 3).

  In the present embodiment, the positive electrode active material 30 is provided on the positive electrode holder 12 side, and the negative electrode active material 34 is provided on the negative electrode holder 14 side. Since each of the positive electrode active material 30 and the negative electrode active material 34 is formed individually, even when the mixture is applied to the narrow space of the positive electrode holder 12 or the negative electrode holder 14, both active materials are in contact with each other. It can be easily avoided. Therefore, it is easy to avoid a short circuit.

  In addition, since the electrolytic solution 42 is only included in the analytical battery 10, even when the distance between the first substrate 18a and the second substrate 18b is reduced, the pressure (internal pressure) received from the electrolytic solution 42 may increase. Avoided. For this reason, the analysis battery 10 can be reduced in size.

  Further, first spacer films 32 a and 32 a are formed on the first electron beam transparent film 20, and second spacer films 32 b and 32 b are formed on the second electron beam transparent film 36. The distance between the first electron beam permeable film 20 and the second electron beam permeable film 36 is appropriately set by adjusting the film thicknesses of the first spacer films 32a and 32a and the second spacer films 32b and 32b. It becomes possible to do.

  Thereafter, a seal 16 made of an epoxy resin adhesive or the like is provided on the overlapping portion of the negative electrode holder 14 and the positive electrode holder 12, thereby preventing the electrolyte solution 42 from leaking. Thus, the analytical battery 10 shown in FIG. 1 is obtained.

  The present invention is not particularly limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention.

  For example, the positive electrode active material 30 or the negative electrode active material 34 is not limited to those provided as a binder from a mixture, and may be a film. As a film forming method in this case, for example, sputtering may be employed.

  Moreover, it is also possible to comprise battery parts other than a lithium ion battery. That is, for example, a nickel metal hydride battery can be configured by selecting nickel hydroxide, a hydrogen storage alloy, and a potassium hydroxide aqueous solution as the positive electrode active material 30, the negative electrode active material 34, and the electrolytic solution 42, respectively. Further, when manganese dioxide is selected as the positive electrode active material 30, zinc is selected as the negative electrode active material 34, and an aqueous potassium hydroxide solution is selected as the electrolytic solution 42, an alkaline manganese battery can be configured.

  Furthermore, the analysis battery 10 can be analyzed not only by TEM but also by general analysis equipment using electron beams.

  Of course, the electron beam may be irradiated from the second observation window 24b toward the first observation window 24a.

  Furthermore, the first mask film 22 and the second mask film 38 may be removed.

DESCRIPTION OF SYMBOLS 10 ... Analytical battery 12 ... Positive electrode holder 14 ... Negative electrode holder 16 ... Seal 18a ... 1st board | substrate 20 ... 1st electron beam permeable film 22 ... 1st mask film | membrane 24a ... 1st observation window 24b ... 2nd observation window 26a ... 1st back surface part 26b ... 2nd back surface part 28a ... 1st conduction | electrical_connection part 28b ... 2nd conduction | electrical_connection part 30 ... Positive electrode active material 32a ... 1st spacer film 32b ... 2nd spacer film 34 ... Negative electrode active material 36 ... 2nd electron beam Transparent film 38 ... second mask film 40a ... first wire 40b ... second wire 42 ... electrolyte solution 50 ... spacer precursor film 52, 54, 56, 58 ... photoresist film

Claims (8)

A battery for analysis that is configured by superimposing a positive electrode holder and a negative electrode holder, and transmits an electron beam to perform analysis,
The positive electrode holder has a first substrate provided with a first electron beam permeable film on one end surface;
The negative electrode holder has a second substrate provided with a second electron beam permeable film on one end surface;
In the positive electrode holder, a first observation window for transmitting an electron beam is formed by depression from the first substrate side and leaving only the first electron beam transparent film,
The negative electrode holder is depressed from the second substrate side, and only the second electron beam permeable film remains, thereby forming a second observation window for transmitting the electron beam,
A positive electrode active material is disposed at a portion corresponding to the back surface of the first observation window in the first electron beam permeable film, and on the back surface of the second observation window in the second electron beam transmissive film. A negative electrode active material is disposed at a corresponding site,
Including an electrolytic solution in which the positive electrode active material and the negative electrode active material are individually contacted,
The first electron beam permeable film is provided with a positive terminal portion electrically connected to the positive electrode active material, and the second electron beam permeable film is electrically connected to the negative electrode active material. A battery for analysis, characterized in that a negative electrode side terminal portion connected thereto is provided.   The battery according to claim 1, wherein at least one of the positive electrode active material and the negative electrode active material is a binder obtained by binding powder or fiber.   3. The battery according to claim 1 or 2, wherein a seal is provided at an overlapping portion between the positive electrode holder and the negative electrode holder.   4. The battery according to claim 1, wherein a spacer film is provided on at least one of the first electron beam permeable film and the second electron beam permeable film. 5. An analytical battery characterized by that. In claim 4 Symbol mounting of the battery, analytical cell, wherein the spacer layer is an insulating film.   6. The analytical battery according to claim 1, wherein the first substrate or the second substrate is made of any one of silicon, quartz, and borosilicate glass.   7. The battery according to claim 1, wherein a back surface of one end surface of the first substrate on which the first electron beam permeable film is provided, or the second electron beam of the second substrate. An analytical battery characterized in that at least one of the back surfaces of one end surface provided with a permeable membrane is covered with a membrane.   8. The battery according to claim 7, wherein the film is made of the same material as the first electron beam permeable film or the second electron beam permeable film.

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