JP6044297B2 - Test equipment - Google Patents

Description

  This case relates to a test apparatus.

  Test devices for testing a plurality of devices under test have been developed. Since the device under test is multi-powered, when testing one device under test, a plurality of power supplies (DPS: Device Power Supply) are connected to the device under test. When an abnormality occurs in any of the power supplies during the test, it is preferable that the power supply in which the abnormality occurs is shut off and other power supplies connected to the same device under test are also shut off.

  Patent Document 1 discloses a power output unit that can output a plurality of power supplies individually. Patent Document 2 discloses a technique for outputting identification information to a predetermined terminal of a connector based on a valid signal. Patent Document 3 discloses a mask OR circuit.

International Publication No. 2009/011027 JP 2007-200362 A JP 2002-196848 A

  In the techniques of Patent Documents 2 and 3, when an abnormality occurs in any of the power supplies, the power supplies connected to the same device under test are not cut off. In the technique of Patent Document 1, the configuration may be complicated.

  The present invention has been made in view of the above problems, and an object thereof is to provide a test apparatus capable of shutting off a power source connected to the same device under test with a simple configuration.

The test apparatus disclosed in the specification includes a plurality of power supply units that supply power to the same device under test, an output circuit that outputs an error signal when an abnormality occurs in the power supply unit, and the output circuit and wiring A plurality of power supply units, and a power supply unit that cuts off the power supply of the power supply unit when the error signal is received, and the output circuit and the power supply circuit between the power supply units. The wiring that connects the wirings that connect the output circuit and the cutoff circuit to each other is a wiring that is provided in a detachable module .

  According to the test apparatus disclosed in the specification, the power supply connected to the same device under test can be cut off with a simple configuration.

1 is an external view of a test apparatus according to an embodiment. It is a block diagram of a test device. It is a block diagram for demonstrating connection between each power supply unit of a power supply expansion module, and a to-be-tested apparatus. It is a figure for demonstrating the comparative example which added the resident program to the test machine. It is a block diagram for demonstrating the circuit structure in a power supply expansion module. It is a figure for demonstrating a combination module. It is an example of the table stored in the control part. It is detail drawing for demonstrating the hard wire connection at the time of connecting a combination module to a module connection part. It is a figure for demonstrating operation | movement when abnormality arises in a power supply unit. It is an example of the operation | movement flow of a test apparatus.

  FIG. 1 is an external view of a test apparatus 100 according to an embodiment. FIG. 2 is a block diagram of the test apparatus 100. The outline of the test apparatus 100 will be described with reference to FIGS. 1 and 2. The test apparatus 100 includes a test machine 10, an adapter 20, a prober 30, a power supply expansion unit 40, and the like.

  The testing machine 10 is a device for testing a device under test (DUT: Device Under Test), and includes an input / output device 11, a power source 12, a digital input / output device 13, a control unit 14, and the like. The adapter 20 is a device that functions as an interface among the tester 10, the prober 30, and the power supply expansion unit 40, and includes an interface 21, a switch 22, and the like. The prober 30 is a device that stores a plurality of devices under test including at least one device under test to be tested using a plurality of power supplies. The device under test is not particularly limited, but is a plurality of semiconductor devices provided on a semiconductor wafer as an example. The power expansion unit 40 is a device that expands the number of power channels, and includes a power expansion module 41, a system power source 42, a control unit 43, a module connection unit 44, and the like.

  The input / output device 11 is a device for performing a simultaneous measurement test by inputting / outputting signals to / from a plurality of devices under test according to instructions from the control unit 14. The simultaneous measurement test is not to sequentially test a plurality of devices under test but to perform tests on a plurality of devices under test in parallel. The signal transmitted from the device under test to the input / output device 11 includes an output signal of the device under test.

  The power source 12 is a power supply device for supplying power to the device under test according to an instruction from the control unit 14. The power supply 12 includes, for example, power supply ports of about 8 to 32 channels. Each power supply port of the power supply 12 is electrically connected to the power supply expansion module 41 individually via the interface 21 of the adapter 20.

  The digital input / output device 13 is a device for inputting / outputting a signal to / from the control unit 43 of the power supply expansion unit 40 in accordance with an instruction from the control unit 14. The control unit 14 includes a central processing unit (CPU), a random access memory (RAM), a read only memory (ROM), and the like. The control unit 14 controls operations of the input / output device 11, the power supply 12, and the digital input / output device 13.

  The interface 21 is an interface between the power supply 12 and the power supply extension module 41, between the digital input / output device 13 and the control unit 43, and between the power supply extension module 41 and the switch 22. The switch 22 is a switch for selecting a combination of electrical connections between each power supply unit in the power supply extension module 41 and the device under test in accordance with an instruction from the control unit 14.

  The power supply expansion module 41 operates using the power output from the system power supply 42, includes a necessary number of expansion circuits, and expands the channels of the power supply 12 to the necessary number. For example, the power supply expansion module 41 extends the channel of the power supply 12 to 100 channels or more, includes a power supply unit corresponding to each channel, and includes a power supply port corresponding to the power supply unit. That is, the power supply extension module 41 increases the apparent number of power supplies to the required number. Each power supply port of the power supply expansion module 41 is electrically connected to the device under test via the interface 21.

  The control unit 43 includes a central processing unit, RAM, ROM, and the like. The control unit 43 monitors the states of the power supply expansion module 41 and the system power supply 42. For example, the control unit 43 monitors whether an alarm is notified from the power supply extension module 41 and the system power supply 42. Further, the control unit 43 controls the operations of the power supply expansion module 41 and the system power supply 42. The module connection unit 44 is a connector to which a combination module 45 described later can be attached and detached.

  Next, an outline of a test using the test apparatus 100 will be described. FIG. 3 is a block diagram for explaining the electrical connection between each power supply unit of the power supply extension module 41 and the device under test. The device under test DUT1 and the device under test DUT2 are multi-power supply devices that operate using a plurality of power supplies. That is, the devices under test DUT1, DUT2 are provided with a plurality of power supply terminals. In the example of FIG. 3, power is supplied from the four power supply units DPS1 to DPS4 to the device under test DUT1, and power is supplied from the four power supply units DPS5 to DPS8 to the device under test DUT2.

  Here, a case where an abnormality occurs in the power supply unit DPS2 electrically connected to the device under test DUT1 will be considered. Note that power supply unit abnormalities include when power supply stops, when the power supply amount falls below the lower limit, when the power supply amount exceeds the upper limit, when an overcurrent flows, when an overvoltage is applied, etc. This is the case when an abnormality occurs in the electrical output. If an abnormality occurs in the power supply unit DPS2, the device under test DUT1 may be damaged unless the power supply unit DPS2 is shut off and the other power supply units DPS1, DPS3, DPS4 that supply power to the device under test DUT1 are not shut off. is there. Therefore, it is preferable that the power supply units DPS1 to DPS4 electrically connected to the device under test DUT1 are shut off. On the other hand, if no abnormality has occurred in the power supply units DPS5 to DPS8, it is not necessary to stop the test of the device under test DUT2. From the above, it is preferable that the power supply units DPS1 to DPS4 are selectively cut off without blocking the power supply units DPS5 to DPS8.

  Therefore, it is preferable that the power supply unit in the combination is selectively cut off when an abnormality occurs in any of the power supply units in each combination after recognizing the combination of the power supplies for the devices under test. Therefore, power control by software processing will be described as Comparative Example 1. FIG. 4 is a diagram for explaining an example in which a resident program is added to the testing machine 10.

  Referring to FIG. 4, it is assumed that the extended power supply module includes n power supply units DPS1 to DPSn. The testing machine monitors the abnormality of each power supply unit by software processing. When an abnormality occurs in the power supply unit DPS1, an alarm indicating that an abnormality has occurred in the power supply unit DPS1 is notified to the testing machine. In this case, the testing machine determines a power supply unit that supplies power to the same device under test as the power supply unit DPS1 in which an abnormality has occurred by software processing, and instructs the extension power supply module to shut off the power supply unit. To do. Thereby, the extended power supply module selectively cuts off the power supply unit that supplies power to the same device under test. Through the above process, the extended power supply module can shut off the power supply unit that is electrically connected to the same device under test as the power supply unit in which an abnormality has occurred. In this way, the power supply unit can be selectively shut off by software processing.

  However, the software processing increases the CPU load on the testing machine. As CPU load increases, test throughput is affected. Also, it is necessary to develop a plurality of types of programs in order to cope with a plurality of types of devices under test having different numbers of power supplies. In addition, in software processing, a delay occurs during execution of the processing, so that it is difficult to quickly shut down the power supply unit.

  Next, as Comparative Example 2, power control using a circuit and wiring will be described. In power control using a circuit and wiring, an alarm is determined for each group when an abnormality occurs in each power supply unit, and the power supply in the alarm target group is stopped according to the result of the OR determination. In this case, it is necessary to provide two wires for alarm notification and operation stop control for each power source. For example, when the power supply unit DPS1 and the power supply unit DPS2 are used as the same group that is electrically connected to the same device under test, the power supply unit DPS2 needs to be shut off if an abnormality occurs in the power supply unit DPS1. On the other hand, when an abnormality occurs in the power supply unit DPS2, it is necessary to shut off the power supply unit DPS1. In this case, wiring for transmitting signals from the power supply unit DPS1 to the power supply unit DPS2 and wiring for transmitting signals from the power supply unit DPS2 to the power supply unit DPS1 are separately required. As the number of power supplies in the same group increases, the number of wirings increases.

  On the other hand, in the present embodiment, a configuration capable of shutting off power supplies connected to the same device under test is disclosed with a simple configuration. FIG. 5 is a block diagram for explaining a circuit configuration in the power supply extension module 41. Referring to FIG. 5, the power supply expansion module 41 includes n power supply units DPS1 to DPSn by expanding the number of channels of the power supply 12 in FIG. A self-cut circuit 46 is provided in each of the power supply units DPS1 to DPSn. The self-cutting circuit 46 is a circuit that cuts off the electrical connection between the power supply unit and the device under test when an abnormality occurs in the power supply unit provided therein. The end of the self-cutting circuit 46 is extended to the terminal of the module connecting portion 44. That is, the module connection unit 44 is provided with n terminals DPS1 to DPSn corresponding to the respective self-cutting circuits 46. The respective self-cutting circuits 46 can be hard-wired by combining the terminals DPS1 to DPSn and short-circuiting them.

  The module connection unit 44 is provided with a plurality of terminals for ID identification and a ground terminal GND. In this embodiment, eight terminals ID00 to ID07 are provided as ID identification terminals. By combining these terminals ID00 to ID07 and grounding, a plurality of types of information can be realized. Specifically, non-grounding of each ID terminal is “0” information, grounding is “1” information, ID terminal 00 information is the first digit, ID terminal 01 information is the second digit, and the like. Thus, 8-bit information can be realized.

  Although not shown in FIG. 5, the power supply units DPS1 to DPSn are each electrically connected to the interface 21 via wiring. Further, the wiring is electrically connected to the probe 31 of the prober 30 via the interface 21 and the switch 22 of FIG. Each probe 31 is in contact with a probe card 32. The probe card 32 is electrically connected to each device under test. The probe card 32 is an interface between each probe 31 and a terminal of the device under test.

  FIG. 6 is a diagram for explaining the combination module 45. With reference to FIG. 6, a plurality of types of combination modules 45 can be attached to and detached from the module connection portion 44. In the example of FIG. 6, combination modules 45 a to 45 d for realizing different power supply combinations are illustrated, and the combination module 45 a is connected to the module connection unit 44.

  Each combination module 45a to 45d is provided with a wiring for combining and grounding the ID terminal 00 to ID terminal 07. For example, the combination module 45a includes a wiring for electrically connecting the ID terminal 00 and the ground terminal GND. In this case, information of binary number “00000001” is obtained. The ID number 01 is obtained by converting this information into a decimal number. The combination module 45a includes wiring corresponding to the power supply combination of ID number 01. For example, the combination module 45a includes wiring that electrically connects the terminals DPS1 and DPS2, wiring that electrically connects the terminals DPS3 and DPS4, wiring that electrically connects the terminals DPS5 and DPS6, and the like. Prepare.

  In addition, the combination module 45b includes a wiring for electrically connecting the ID terminal 01 and the ground terminal GND. In this case, information of binary number “00000010” is obtained. By converting this information into a decimal number, the ID number 02 is obtained. The combination module 45b includes wiring corresponding to the power supply combination of ID number 02. For example, the combination module 45b includes a wiring that electrically connects the terminal DPS1, the terminal DPS2, and the terminal DPS3, a wiring that electrically connects the terminal DPS4, the terminal DPS5, and the terminal DPS6.

  The control unit 43 in FIG. 2 reads the ID number 01 from the combination module 45a when the combination module 45a is connected to the module connection unit 44. The control unit 43 transmits the ID number to the control unit 14 in FIG. The control unit 14 stores a power supply combination corresponding to the ID number in a table or the like, and controls the switch 22 so that the power supply combination corresponding to the received ID number is realized. FIG. 7 is an example of a table stored in the control unit 14. In the example of FIG. 6, the switch 22 electrically connects the power supply units DPS1 and DPS2 to the device under test DUT1, electrically connects the power supply units DPS3 and DPS4 to the device under test DUT2, and connects the power supply units DPS5 and DPS6. Electrically connected to the device under test DUT3.

  In this way, by selecting a desired combination module from a plurality of types of combination modules 45 and connecting it to the module connection unit 44, a desired combination of power sources can be realized. Further, the self-cutting circuits 46 of the power supply units DPS1 to DPSn can be connected by a common wiring corresponding to a desired power supply combination. If the combination module 45 is not connected to the module connection unit 44, all the digits may be “1” by pull-up.

  FIG. 8 is a detailed diagram for explaining the wiring connection when the combination module 45a is connected to the module connection unit 44. FIG. In FIG. 8, the power supply unit DPS1 and the power supply unit DPS2 will be described. Referring to FIG. 8, each self-cutting circuit 46 includes an alarm transmission unit 47, an open collector 48, an output buffer 49, a power supply control unit 50, and the like.

  The alarm transmitter 47 is a device that transmits an alarm signal when an abnormality occurs in the power supply unit, and is connected to the base of the open collector 48. The collector of the open collector 48 is connected to the output buffer 49 through wiring, and is connected to the output buffer 49 of another power supply unit through the combination module 45a. A pull-up power source is connected between the open collector 48 and the output buffer 49 via a pull-up resistor.

  If the power supply unit is normal, the alarm transmitter 47 does not transmit an alarm signal. In this case, no current flows between the base and emitter of the open collector 48. When an abnormality occurs in the power supply unit, the alarm transmission unit 47 transmits an alarm signal. In this case, a current flows between the base and emitter of the open collector 48. Thereby, the open collector 48 drives a Low (for example, ground) signal as an error signal. That is, the alarm transmitter 47 and the open collector 48 function as an output circuit that outputs an error signal when an abnormality occurs in its own power supply unit.

  The output buffer 49 is connected to the power control unit 50, and transmits a power off signal to the power control unit 50 when an error signal is received. The power supply control unit 50 is a device that controls the power supply of the power supply unit, and cuts off the electrical connection between the power supply unit and the device under test when a power-off signal is received. That is, the output buffer 49 and the power supply control unit 50 function as a cutoff circuit that cuts off the power supply of its own power supply unit when an error signal is received.

  By connecting the combination module 45a to the module connecting portion 44, the collector of the open collector 48 of the power supply unit DPS1 and the collector of the open collector 48 of the power supply unit DPS2 are connected. That is, the wiring that connects the output circuits and the cutoff circuits of the plurality of power supply units is connected by a common wiring that passes through the combination module 45a.

  Thus, when an error signal is output from any of the open collectors 48, the error signal is input to all the output buffers 49 connected by the common wiring. As a result, the electrical connection between all the power supply units connected by the common wiring and the device under test is cut off. Thus, each self-cut circuit 46 is electrically connected via the combination module 45a, whereby a wired OR circuit is configured.

  FIG. 9 is a diagram for describing an operation when an abnormality occurs in power supply unit DPS1. In the example of FIG. 9, the combination module 45 a is connected to the module connection unit 44. Referring to FIG. 9, when an abnormality occurs in power supply unit DPS1, an error signal is output from open collector 48 of power supply unit DPS1. As a result, an error signal is input to the output buffers 49 of the power supply unit DPS1 and the power supply unit DPS2. As a result, the electrical connection between the power supply units DPS1 and DPS2 and the device under test DUT1 is interrupted. Since no abnormality has occurred except for the power supply unit DPS1, no error signal is input / output in the power supply units DPS3 to DPSn. Thereby, the test is continued for the devices under test other than the device under test DUT1.

  FIG. 10 is an example of an operation flow of the test apparatus 100. Referring to FIG. 10, when the combination module 45 is connected to the module connection unit 44, the control unit 43 reads the ID number from the combination module 45 (step S1). Next, the control unit 43 transmits the ID number read in step S1 to the control unit 14 (step S2).

  The control unit 14 receives the ID number from the control unit 43 (step S11). Next, the control unit 14 checks the ID number received in step S11 (step S12). In step S <b> 12, the control unit 14 determines “OK” if the ID number received from the control unit 43 is one of the set ID numbers. On the other hand, if the ID number received from the control unit 43 is not one of the set ID numbers, the control unit 14 determines “NG”. If “OK” is determined in step S12, the control unit 14 uses the switch 22 to realize a power supply combination corresponding to the ID number, and starts a test of the device under test (step S13).

  When it is determined as “NG” in step S12, the control unit 14 determines whether or not all ID terminals are ungrounded (step S14). For example, the control unit 14 determines whether or not all digits of the ID number are “1”. When it determines with "Yes" at step S14, the control part 14 judges that the combination module 45 is not connected (step S15), and does not perform a test. When it is determined as “No” in Step S14, the testing machine 10 determines that the wiring of the combination module 45 is defective (Step S16) and does not perform the test.

  After execution of step S2, in the power supply expansion unit 40, in each power supply unit, the alarm transmitter 47 determines whether or not an abnormality has occurred in the power supply unit (step S3). If “No” is determined in step S3, step S3 is executed again. If “Yes” is determined in step S3, an alarm signal is transmitted from the alarm transmission unit 47, whereby an error signal is output from the open collector 48 (step S4). Next, the self-cutting circuit 46 of the other power supply unit determines whether or not an error signal has been input (step S5). If “No” is determined in step S5, the process is executed again from step S3. If “Yes” is determined in step S5, the self-cutting circuit 46 to which the error signal has been input cuts off the electrical connection between the power supply unit provided therein and the device under test.

  According to the present embodiment, when an abnormality occurs in any of the power supply units when testing a plurality of devices under test, the power supply of the power supply units connected to the same device under test is cut off. Thereby, damage to the device under test can be suppressed. In addition, since it is only necessary to connect the power supply unit self-cutting circuit by wired OR connection, it is not necessary to recognize the power supply combination by software processing. Therefore, an increase in the processing load of the testing machine 10 is suppressed, a delay at the time of power-off is suppressed, and program development is not required. Further, it is not necessary to separately provide an error signal notification wiring and a signal notification wiring for instructing to stop operation between the power supply units. Thereby, wiring is simplified. Thus, according to the present embodiment, it is possible to shut off the power supplies connected to the same device under test with a simple configuration. In addition, although the said embodiment demonstrated the circuit using an open collector etc., it is not restricted to it. The wiring that connects the output circuit capable of high-impedance output + pull-up (= High) and Low output and the shut-off circuit that shuts off the power supply unit by receiving an error signal is common to the multiple power supply units via the wiring It only has to be connected to.

  Also, various combinations can be realized by simply replacing the combination module 45. Further, by providing the combination module 45 with information related to the ID number, the combination of the switches 22 and the power supply combination can be matched. A combination switch or the like may be used as a substitute for the combination module. In this case, the trouble of attaching / detaching the combination module can be saved.

  The embodiment of the present invention has been described in detail above. However, the present invention is not limited to the specific embodiment, and various modifications and changes can be made within the scope of the gist described in the claims. .

DESCRIPTION OF SYMBOLS 10 Test machine 14 Control part 20 Adapter 21 Interface 22 Switch 30 Prober 40 Power supply expansion unit 41 Power supply expansion module 42 System power supply 43 Control part 44 Module connection part 45 Combination module 46 Self disconnect circuit 47 Alarm transmission part 48 Open collector 49 Output buffer 50 Power supply control unit 100 Test device

Claims (3)

A plurality of power supply units that supply power to the same device under test, an output circuit that outputs an error signal when an abnormality occurs in its own power supply unit, and is connected to the output circuit by wiring to receive the error signal A plurality of power supply units comprising a cutoff circuit that cuts off the power supply of the power supply unit of itself when
Between the plurality of power supply units, the wiring for connecting the output circuit and the cutoff circuit to each other, and wiring ,
The test apparatus according to claim 1, wherein the wiring for connecting the output circuit and the cutoff circuit to each other is a wiring provided in a detachable module . The module has information related to an ID number that identifies a combination of connections between a plurality of power supply units and a plurality of devices under test, and is connected to the same device under test corresponding to the ID numbers. Connect each shutoff circuit of the power supply unit to the output circuit of another power supply unit connected to the same device under test,
The test apparatus according to claim 1 , further comprising a switch that combines connections corresponding to the ID numbers. The test apparatus according to claim 1 , wherein the device under test is a semiconductor device.

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