JP6043061B2 - Surface acoustic wave sensor - Google Patents

Description

The present invention relates to a surface acoustic wave sensor.

  A SAW (Surface Acoustic Wave) filter is known as one of bandpass filters used in electronic circuits. Since SAW filters are small and have good attenuation characteristics, they are used in various electronic devices including mobile phones. The SAW filter has a comb-shaped electrode (InterDigital Transducer; IDT) for generating a surface acoustic wave on the piezoelectric element substrate and detecting the surface acoustic wave.

As a technique related to the SAW filter, for example, Patent Document 1 discloses a detection region in which a liquid as a specimen is introduced between an IDT constituting a transmission electrode portion and an IDT constituting a reception electrode portion on a piezoelectric substrate. A surface acoustic wave sensor having (a region to be a sensor surface) is disclosed. In this surface acoustic wave sensor, by measuring the amount of change in the propagation velocity (or phase) of the surface acoustic wave in the inspection region due to the dropped liquid sample, whether or not the sample is contained in the liquid sample is determined. Etc. are detected.

JP 2008-286606 A

In the surface acoustic wave sensor described in Patent Document 1, when the width between the transmission electrode and the reception electrode and the width of the detection region are long, when a liquid sample having a high concentration of the sample is dropped on the detection region, the sensor surface and the sample The reaction is saturated. When the reaction is saturated, the surface acoustic wave propagation loss increases, so the amplitude of the surface acoustic wave decreases or becomes zero. When the amplitude of the surface acoustic wave becomes 0, the surface acoustic wave sensor has a problem that it is difficult to detect the specimen in the liquid sample.

  The present invention has been made in view of the above points, and an object thereof is to provide a surface acoustic wave sensor that can easily detect a specimen.

(1) The present invention has been made to solve the above problems, and a surface acoustic wave sensor according to an aspect of the present invention is provided with a piezoelectric element that propagates a surface acoustic wave, and the piezoelectric element. By providing at least one pair of electrodes that convert between an electric signal and the surface acoustic wave, and a region between the pair of electrodes into which a liquid that is a specimen is introduced, the liquid infiltrates by capillary action, and a porous substrate for introducing the liquid into the portion contacting to the region, the porous substrate is preferably formed by dispersing each in a direction infiltrating solutions different reactants that react with the target compound It is characterized by.
(2) Further, in the surface acoustic wave sensor according to one aspect of the present invention, the porous base material may be infiltrated by a capillary phenomenon in the propagation direction of the surface acoustic wave.
(3) Moreover, it is a surface acoustic wave sensor which concerns on 1 aspect of this invention, Comprising: The said porous base material has a 1st area | region and a 2nd area | region, The said 1st area | region and the said 2nd area | region May be alternately formed in the propagation direction of the surface acoustic wave, and the infiltration rate of the first region may be faster than the infiltration rate of the second region.
(4) Further, in the surface acoustic wave sensor according to one aspect of the present invention, the porous base material has different lengths in the propagation direction of the surface acoustic waves in the plurality of first regions. Also good.
(5) Further, in the surface acoustic wave sensor according to one aspect of the present invention, the porous base material has different lengths in the propagation direction of the surface acoustic wave in the plurality of second regions. Also good.

  According to the present invention, since the porous substrate having capillary action is provided in the inspection region, the entire inspection region is not wetted at a time. For this reason, even when the concentration of the specimen in the solution is high, the detection signal is not saturated and the specimen can be easily detected.

It is a mimetic diagram showing SAW sensor 1 concerning a 1st embodiment. It is a schematic block diagram which shows the sense circuit 20 used for the solution measurement using the SAW sensor 1 which concerns on 1st Embodiment. It is a figure explaining the infiltration state of the solution on the porous base material 13 which concerns on 1st Embodiment. It is a schematic diagram which shows the structure of the SAW sensor 1a which concerns on 2nd Embodiment. It is a schematic diagram which shows the structure of SAW sensor 1b which concerns on 3rd Embodiment.

(First embodiment)
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic diagram showing a SAW sensor 1 used in the present invention.
FIG. 1A is a schematic top view of the SAW sensor 1, and FIG. 1B is a schematic cross-sectional view of the SAW sensor 1 as viewed from the cut surface A.
In the illustrated example, the SAW sensor 1 includes a piezoelectric element substrate 10, a transmission electrode 11-1a, a transmission electrode 11-1b, a reception electrode 11-2a, a reception electrode 11-2b, a reaction region thin film 12, a porous substrate 13, It is configured to include a sealing structure 14-1 and a sealing structure 14-2.
In FIG. 1A, the longitudinal direction (SAW propagation direction) of the SAW sensor 1 is represented by the x-axis direction, and the short direction is represented by the y-axis direction. In FIG. 1B, the longitudinal direction of the SAW sensor 1 is represented by the x-axis direction, and the thickness direction is represented by the z-axis direction.

The piezoelectric element substrate 10 is a substrate that propagates SAW (Surface Acoustic Wave). The piezoelectric element substrate 10 is, for example, a quartz substrate.
The transmission electrode 11-1a and the transmission electrode 11-1b are metal electrodes formed by a comb-like pattern constituting the transmission-side electrode unit. Hereinafter, the transmission electrode 11-1a and the transmission electrode 11-1b are collectively referred to as IDT 11-1.
In addition, the reception electrode 11-2a and the reception electrode 11-2b are metal electrodes formed by a comb-like pattern constituting the reception-side electrode unit. Hereinafter, the reception electrode 11-2a and the reception electrode 11-2b are collectively referred to as IDT 11-2.
IDT 11-1 and IDT 11-2 (collectively referred to as IDT 11) are electrodes configured on the piezoelectric element substrate 10. The IDT 11 is a pair of electrodes facing each other. The IDT 11 is made of, for example, an aluminum thin film.

  A burst signal that is a transmission signal is input to the IDT 11-1 from a burst circuit of a sense circuit described later. The IDT 11-1 excites SAW corresponding to the input burst signal on the surface of the piezoelectric element substrate 10. The IDT 11-2 receives the SAW that has propagated through the surface of the piezoelectric element substrate 10 and converts the SAW into a received electrical signal. The IDT 11-2 outputs the converted electrical signal (referred to as a detection signal) to the phase / amplitude detection circuit of the sense circuit.

The reaction region thin film 12 is a thin film formed by vapor deposition of gold. The reaction region thin film 12 is a thin film having an antibody supported on the surface. The antibody is loaded using a well-known technique (for example, non-patent document “SH-SAW biosensor for POCT”, Yatsuda, Kogai et al., 40th EM Symposium, pp. 29-32, 2011. See 5.19). The reaction region thin film 12 is formed on the piezoelectric element substrate 10 and in a region between the pair of IDTs 11 provided to face the piezoelectric element substrate 10.
A portion where the piezoelectric element substrate 10 and the reaction region thin film 12 overlap becomes a detection region (region serving as a sensor surface) into which a liquid as a specimen is introduced.

The porous substrate 13 is a substrate provided in contact with the reaction region thin film 12. The porous substrate 13 is made of a material such as nitrocellulose. The porous substrate 13 is fixed so as to cover the reaction region thin film 12. For example, the porous base material 13 is bonded and fixed to the outer four corners of the reaction region thin film 12. The porous substrate 13 holds the dropped solution, and infiltrates the solution into the inside and the surface thereof.
The porous substrate 13 transfers and holds the dropped solution to the inside of the porous substrate 13 and the surface of the reaction region thin film 12 by capillary action. That is, the SAW sensor 1 holds the dropped solution inside the porous substrate 13 and the surface of the reaction region thin film 12.
Further, as shown in FIG. 1A, the porous base material 13 is disposed between the positions x1 to x2 in the x-axis direction.

In the SAW sensor 1, the solution transferred in the porous substrate 13 wets a specific region of the reaction region thin film 12. Here, the specific region is a region whose area is determined by the overlapping portion of the porous substrate 13 and the reaction region thin film 12. For example, when the entire surface of the reaction region thin film 12 is covered with the porous substrate 13, the entire region of the reaction region thin film 12 is obtained.
The antigen in the solution reacts with the antibody carried on the reaction region thin film 12 to generate an antigen-antibody conjugate in a specific region on the reaction region thin film 12.
That is, in the reaction region thin film 12, an antigen-antibody reaction occurs between the antibody carried on the reaction region thin film 12 and the antigen in the liquid sample by dropping a liquid sample containing the antigen on the surface thereof. As a result, on the reaction region thin film 12, an antigen-antibody combined product in which the antibody carried on the reaction region thin film 12 and the antigen are combined is generated. The reaction region thin film 12 may be any material other than gold as long as it can support the antibody.
In the example shown in FIGS. 1A and 1B, the porous substrate 13 may be overlapped with the reaction region thin film 12 so as to have the same area in plan view, or the reaction region thin film in plan view. You may arrange | position a small area so that it may become the inner side of 12. The porous base material 13 should just be arrange | positioned so that the specific area | region of the reaction area | region thin film 12 may be covered.

The transmission electrode unit side sealing structure 14-1 includes a sealing wall 15-1 and a sealing ceiling 16-1.
The sealing wall 15-1 is a wall that covers the IDT 11-1 and is formed in a rectangular shape on the piezoelectric element substrate 10. The sealing wall 15-1 is made of, for example, a photosensitive resin.
Moreover, the sealing ceiling 16-1 is a ceiling for closing the upper side of the sealing wall 15-1 and sealing the IDT 11-1 from the outside. The sealing ceiling 16-1 is disposed on the upper side of the sealing wall 15-1 so that the sealing wall 15-1 is accommodated in the planar area of the sealing ceiling 16-1. The sealed ceiling 16-1 is made of, for example, a glass substrate. An adhesive layer (not shown) is provided between the sealing wall 15-1 and the sealing ceiling 16-1, and the space between the sealing wall 15-1 and the sealing ceiling 16-1 is sealed. Glue.
The sealing structure 14-1 is a sealing structure that covers the IDT 11-1 from the outside so as to form a space on the IDT 11-1 and prevents the IDT 11-1 from coming into contact with the liquid.

Similarly to the sealing structure 14-1, the sealing structure 14-2 on the reception electrode unit side includes a sealing wall 15-2 and a sealing ceiling 16-2, and seals the IDT 11-2 from the outside. The sealing structure covers the IDT 11-2 so as to form a space and prevents the IDT 11-2 from coming into contact with the liquid.
Even if there is a change in the atmosphere (for example, humidity) in the detection region, the IDT 11-1 and the IDT 11-2 are less affected by the sealing structure 14-1 and the sealing structure 14-2.
Moreover, in Fig.1 (a) and FIG.1 (b), the example which arrange | positions the porous base material 13 so that it may overlap with the sealing ceiling of the sealing structure 14-1 and the sealing structure 14-2 is shown. However, as long as the porous substrate 13 is disposed so as to cover the detection region of the sensor where the reaction region thin film 12 is disposed, it is not necessary to dispose the porous substrate 13 so as to overlap the sealing ceiling. Of course, even if the porous base material 13 is arranged so as not to overlap the sealing ceiling, even if the porous base material 13 is greatly displaced (displaced) in the direction in which the surface acoustic wave travels, the sealing structure 14-1 and sealing structure 14-2 protect IDT 11-1 and IDT 11-2, respectively, so that the IDT does not get wet with the solution and affects the elastic wave transmission operation or elastic wave reception operation of IDT. Never give.

FIG. 2 is a schematic block diagram showing a sense circuit 20 used for solution measurement using the SAW sensor 1. In the illustrated example, the sense circuit 20 includes a SAW sensor 1, an AC signal source 21, a burst circuit 22, a phase / amplitude detection circuit 23, and a PC 24 (Personal Computer).
The AC signal source 21 generates, for example, a 250 MHz sine wave AC signal. The AC signal source 21 outputs the generated AC signal to the burst circuit 22.
The burst circuit 22 converts the AC signal input from the AC signal source 21 into a periodic burst signal. Here, the period of the burst signal is set to be longer than the time required for the SAW to travel from IDT 11-1 to IDT 11-2 on the surface of the piezoelectric element substrate 10. The burst circuit 22 outputs the generated burst signal to the IDT 11-1 and the phase / amplitude detection circuit 23 of the SAW sensor 1.
Note that the burst circuit 22 is not necessary when interference signals such as noise including direct waves other than the main signal included in the signal output from the SAW sensor 1 and other bulk waves are sufficiently small. May be used.

The phase / amplitude detection circuit 23 is a time required for the SAW to propagate through the piezoelectric element substrate 10 based on the detection signal input from the IDT 11-2 of the SAW sensor 1 and the burst signal input from the burst circuit 22. The phase change and amplitude change due to the propagation time are calculated. Specifically, the phase / amplitude detection circuit 23 detects the phase change and the attenuation amount of the amplitude due to the propagation time required from the input of the burst signal to the input of the detection signal. The phase / amplitude detection circuit 23 outputs the detected phase change and amplitude attenuation amount to the PC 24.
The PC 24 determines the amount and type of the antigen in the solution that specifically reacts with the surface antibody based on the phase change and amplitude attenuation input from the phase / amplitude detection circuit 23 and displays the determination result. .

Next, the infiltration state of the solution on the porous substrate 13 when measuring the antibody contained in the solution will be described.
FIG. 3 is a view for explaining the infiltration state of the solution on the porous substrate 13 according to the present embodiment. FIG. 3A is a diagram showing the infiltration state of the solution on the porous substrate 13 at time t1. FIG. 3B is a diagram showing the infiltration state of the solution on the porous substrate 13 at time t2 (t2 is larger than t1). FIG. 3C is a diagram showing the infiltration state of the solution on the porous substrate 13 at time t3 (t3 is larger than t2).
In Fig.3 (a)-FIG.3 (c), the longitudinal direction of the porous base material 13 is represented by the x-axis direction, and a transversal direction is represented by the y-axis direction. 3A to 3C, the positions x1 and x2 of the porous substrate 13 are the same positions as those in FIG.

As shown in FIGS. 3A to 3C, the measurer of the SAW sensor 1 drops the solution a at the position (x3, y3) using, for example, a micropipette (not shown).
The porous substrate 13 transfers and holds the dropped solution a in the positive direction of the x-axis by capillary action in the porous substrate 13 and the surface of the reaction region thin film 12. The solution a dropped on the porous substrate 13 gradually infiltrates the inside of the porous substrate 13 and the surface of the porous substrate 13 in the positive direction of the x axis. Therefore, at time t1, as shown in FIG. 3A, the tip of the region b1 infiltrated with the added solution a (hereinafter referred to as the infiltration region) b1 infiltrates to the position x4 in the x-axis direction. Further, at time t2, as shown in FIG. 3B, the tip of the infiltration region b2 infiltrates to a position x5 in the x-axis direction (x5 is larger than x4). Furthermore, at time t3, as shown in FIG. 3C, the tip of the infiltration region b3 infiltrates to a position x6 in the x-axis direction (x6 is greater than x5).
Then, the antigen in the solution gradually reacts with the antibody supported on the reaction region thin film 12 in accordance with the infiltration of the solution to generate an antigen-antibody conjugate on the reaction region thin film 12.

Next, a case where the solution is directly dropped on the reaction region thin film 12 of the SAW sensor 1 will be described. If the solution is dropped directly on the reaction region thin film 12 of the SAW sensor 1 as shown in FIG. 1, the solution infiltrates the entire reaction region thin film 12.
SAW is an acoustic wave that propagates in the vicinity of the surface of the piezoelectric element substrate 10 in a concentrated manner. When a substance is adsorbed on the surface of the piezoelectric element substrate 10, the mass and viscosity per unit volume of the surface change. In accordance with changes in mass and viscosity, the propagation time of SAW changes, and the amount of attenuation of SAW amplitude changes. The phase / amplitude detection circuit 23 of the sense circuit 20 measures the antigen contained in the solution using the change amount of the phase and the change amount of the attenuation amount of the amplitude.

When the concentration of the antigen contained in the solution is low, the antigen-antibody reaction occurs in a part of the reaction region thin film 12, so that the detection signal is not saturated. Therefore, the phase / amplitude detection circuit 23 of the sense circuit 20 can detect the phase change and the amplitude change due to the propagation time, which is the time required for the SAW to propagate through the piezoelectric element substrate 10.
On the other hand, when the concentration of the antigen contained in the solution is high, the antigen-antibody reaction occurs in the entire reaction region thin film 12, so that the detection signal is saturated. Therefore, the phase / amplitude detection circuit 23 of the sense circuit 20 cannot detect the phase change and the amplitude change due to the propagation time.

For this reason, in this embodiment, the porous base material 13 which does not drop the solution directly onto the reaction region thin film 12 but infiltrates over a longer time than when the solution drops directly onto the reaction region thin film 12. Add the solution dropwise. As shown in FIGS. 3A to 3B, the solution dropped on the porous substrate 13 infiltrates in the positive direction of the x-axis direction at each time.
For this reason, since the solution does not infiltrate on the reaction region thin film 12 at a time, even when the concentration of the antigen in the solution is high, the phase / amplitude detection circuit 23 detects the phase change and the amplitude change due to the propagation time for each time. can do.

Next, measurement by the sense circuit 20 will be described.
First, the measurer drops a solvent that does not contain an antigen onto the position (x3, y3) shown in FIG. 3, infiltrates the reaction region thin film 12 with the solvent, and measures the phase change due to the propagation time of the SAW (blank test). ). Next, the measurer replaces the SAW sensor 1 with another sample (SAW sensor 1), drops the solution containing the antigen at the position (x3, y3) of the sample shown in FIG. Measure the phase change due to. The difference between the phase change corresponding to the solvent and the phase change corresponding to the solution is the amount of phase change caused by the antigen-antibody conjugate produced in the reaction region thin film 12 by the antigen-antibody reaction. The PC 24 stores the phase change at the time of the blank test in the memory, and calculates the difference in phase by calculating the difference between this phase change and the phase change obtained by dropping the solution. . The PC 24 identifies the antigen contained in the solution based on the phase change amount. The same applies to the attenuation amount of the amplitude, and the antigen contained in the solution is specified based on the change amount of the attenuation amount of the amplitude.
In addition, even when the propagation time of SAW in the solvent to be used is not known in advance, the difference in the subsequent change can be obtained by taking the difference in the subsequent change on the basis of the phase and amplitude immediately after the dropping of the solution containing the antigen. It is also possible to determine the amount and type of antigen and display the determination result.

  As described above, in the present embodiment, the SAW sensor 1 uses the reaction region thin film for the porous base material 13 that requires a longer infiltration time than the time for converting the surface acoustic wave to the electrical signal or the electrical signal to the surface acoustic wave. 12 was prepared. Therefore, the SAW sensor 1 can output the detection signal for a long time. In addition, the SAW sensor 1 has a lower detection signal intensity than when the solution contacts the reaction region thin film 12 at a time. As a result, even when measuring a highly concentrated solution, the SAW sensor 1 outputs a detection signal without being saturated, so that accurate measurement can be performed.

  In the present embodiment, an example in which the reaction region thin film 12 holds an antibody has been described, but the reaction region thin film 12 may not hold an antibody. Even in this case, it is possible to compare the properties of the solution, such as whether the concentration of the solution is high or low, whether the solution contains an antigen, or the like.

(Second Embodiment)
The second embodiment of the present invention will be described below with reference to the drawings. In the present embodiment, the case where different antibodies are dispersed in the porous substrate will be described.
The sense circuit 20 has a configuration in which the SAW sensor 1 in FIG. 2 shown in the first embodiment is replaced with the SAW sensor 1a of the present embodiment.

FIG. 4 is a schematic diagram showing the configuration of the SAW sensor 1a according to this embodiment. 4A is a schematic top view of the SAW sensor 1a, and FIG. 4B is a schematic cross-sectional view of the SAW sensor 1a as viewed from the cut surface B. FIG. In FIG. 4A, the longitudinal direction of the SAW sensor 1a is represented by the x-axis direction, and the short direction is represented by the y-axis direction. In FIG. 4B, the longitudinal direction of the SAW sensor 1a is represented by the x-axis direction, and the thickness direction is represented by the z-axis direction.
In the illustrated example, the SAW sensor 1a includes a piezoelectric element substrate 10, a transmission electrode 11-1a, a transmission electrode 11-1b, a reception electrode 11-2a, a reception electrode 11-2b, a reaction region thin film 12, a porous substrate 41, It is configured to include a sealing structure 14-1 and a sealing structure 14-2.

The porous base material 41 includes a porous base material 41-1 in which a first antibody AA having a reference AA is dispersed, a porous base material 41-2 in which a first antibody AB having a reference AB is dispersed, and It comprises a porous substrate 41-3 in which the first antibody AC with the sign AC is dispersed. Antibody AA, antibody AB, and antibody AC are different first antibodies.
When the solution is dropped at the position (x3, y3) on the surface of the porous substrate 41, the dropped solution infiltrates the inside of the porous substrate 41 and causes the porous substrate 41 to move in the positive direction. Infiltrates in the x-axis direction.

Here, for example, a case where the solution is dropped at a position (x3, y3) on the porous substrate 41 at time t0 will be described.
At time t1, the solution infiltrates to the x-axis position x4. Since the solution infiltrates into the region of the porous substrate 41-1, the solution reacts with the first antibody AA in the porous substrate 41-1. The antigen-antibody complex generated by the reaction reacts with the second antibody supported on the reaction region thin film 12.
Next, at time t2, the solution infiltrates to the position x5 on the x-axis. Since the solution infiltrates into the region of the porous substrate 41-2, the solution reacts with the first antibody AB in the porous substrate 41-2. The antigen-antibody complex generated by the reaction reacts with the second antibody supported on the reaction region thin film 12.
Next, at time t3, the solution infiltrates to the position x2 on the x-axis. Since the solution infiltrates into the region of the porous substrate 41-3, it reacts with the first antibody AC in the porous substrate 41-3. The antigen-antibody complex generated by the reaction reacts with the second antibody supported on the reaction region thin film 12.
The phase / amplitude detection circuit 23 detects a detection signal detected by a reaction occurring in the porous substrate 41-1, a detection signal detected by a reaction occurring in the porous substrate 41-2, and a porous substrate 41- The detection signals detected by the reaction occurring in 3 are sequentially observed with a delay corresponding to the speed at which the solution infiltrates.

Accordingly, in this embodiment, the piezoelectric element substrate 10 that propagates the surface acoustic wave, the IDT 11 that converts the electric signal and the surface acoustic wave, and the reaction that contacts the piezoelectric element substrate 10 and reacts with different objects. And a porous substrate 41 infiltrated with liquids each of which is dispersed in the direction in which the solution infiltrates. Thereby, it is possible to detect reactions by different antibodies at different times, and it is possible to detect a plurality of samples using one SAW sensor 1a and one porous substrate 41.

Note that the porous substrates 41-1, 41-2, and 41-3 may be part of the common porous substrate 41 or newly provided on the common porous substrate 41. Substrates may also be used. In the porous substrates 41-1, 41-2, and 41-3, when there are a plurality of types of antigens contained in the dropped solution, antigen-antibody binding is performed at a portion where antibodies corresponding to the respective antigens are dispersed. A body is generated.
In the present embodiment, an example of the porous substrate 41 in which three different types of antibodies are dispersed is shown, but any number of types of antibodies may be used.

(Third embodiment)
Hereinafter, a third embodiment of the present invention will be described with reference to the drawings. In the present embodiment, the case where the porous substrate has regions having different solution infiltration rates will be described.

FIG. 5 is a schematic diagram showing the configuration of the SAW sensor 1b according to the present embodiment. 5A is a schematic top view of the SAW sensor 1b, and FIG. 5B is a schematic cross-sectional view of the SAW sensor 1b as viewed from the cut surface C. FIG. In FIG. 5A, the longitudinal direction of the SAW sensor 1b is represented by the x-axis direction, and the short side direction is represented by the y-axis direction. In FIG. 5B, the longitudinal direction of the SAW sensor 1b is represented by the x-axis direction, and the thickness direction is represented by the z-axis direction.
In the illustrated example, the SAW sensor 1 b includes a piezoelectric element substrate 10, an IDT 11, a reaction region thin film 12, and a porous base material 51.
The porous base material 51 includes a porous base material (first region) 51-1, 51-2, 51-3 having a first infiltration rate, and a porous base material (second region) having a second infiltration rate. 51-4 and 51-5 included. For example, the infiltration rate at which the solutions of the porous substrates 51-4 and 51-5 infiltrate a certain distance is 1/10 of the infiltration rate of the porous substrates 51-1, 51-2, 51-3.

As shown in FIG. 5A, the length of the porous substrate 51-1 in the x-axis direction is x4-x1, and the length of the porous substrate 51-2 in the x-axis direction is x6-x5. Yes, the length of the porous substrate 51-3 in the x-axis direction is x2-x7. The length of the porous substrate 51-4 in the x-axis direction is x5-x4, and the length of the porous substrate 51-5 in the x-axis direction is x7-x6. The length of the porous base materials 51-4 and 51-5 in the x-axis direction may be shorter than the length of the porous base materials 51-1, 51-2, 51-3 in the x-axis direction.

Next, the case where the solution is dropped onto the x-axis position (x3, y3) of the porous substrate 51-1 at time t1 will be described.
Infiltration of the solution quickly occurs in the porous substrate 51-1, and the reaction region thin film 12 corresponding to the area of the porous substrate 51-1 infiltrates.
At time t1, the solution exceeds the x-axis position x4 of the porous base material 51-1, and also infiltrates into the porous base material 51-4. Much slower than 1. Therefore, the SAW sensor 1b is an antigen-antibody conjugate or porous substrate produced exclusively within the porous substrate 51-1, from the time t1 to the time t2 until the solution reaches the porous substrate 51-2. Only the reaction with the antibody supported on the reaction region thin film 12 in contact with 51-1 is detected.
At time t2, when the solution reaches the x-axis position x5 of the porous substrate 51-2, the solution quickly infiltrates the porous substrate 51-2. Therefore, the SAW sensor 1b simultaneously detects reactions that have occurred in the porous substrate 51-1 and the porous substrate 51-2.
The sense circuit 20 is caused by the reaction occurring in the porous substrate 51-2 by calculating the difference between the detection signal of the porous substrate 51-1 and the detection signal of the porous substrate 51-2. Detect the signal.
Hereinafter, at time t2, the solution infiltrates the porous substrate 51-5 beyond the position x6 of the x-axis of the porous substrate 51-2. At time t3, when the solution reaches the x-axis position x7 of the porous substrate 51-3, the solution quickly infiltrates the porous substrate 51-3. At time t3, the SAW sensor 1b simultaneously detects reactions that have occurred in the porous substrate 51-1, the porous substrate 51-2, and the porous substrate 51-2. The sense circuit 20 calculates the difference between the detection signal of the porous substrate 51-1, the detection signal of the porous substrate 51-2, and the detection signal of the porous substrate 51-3. Detect the signal due to the reaction that occurred in.

The sense circuit 20 needs to detect the degree of progress of the dropped solution in the x-axis direction. For example, two SAW sensors 1b shown in FIGS. 5A and 5B are used to detect the degree of progress. In this case, the first antibody is held on the porous substrates 51-1, 51-2, and 51-3 of one SAW sensor 1b-1. The first antibody is not held on the porous substrates 51-1, 51-2, and 51-3 of the other SAW sensor 1b-2. With this configuration, the SAW sensor 1b-1 detects the antigen in the dropped solution, and the SAW sensor 1b-2 does not detect the antigen in the dropped solution. For this reason, the SAW sensor 1b-2 can detect the viscosity (viscoelasticity) of the solution.
The measurer simultaneously drops the same amount of solution onto each position (x3, y3) of the two SAW sensors 1b-1 and 1b-2. The sense circuit 20 may detect the degree of progress of the solution by measuring the two SAW sensors 1b-1 and 1b-2.

  As described above, in this embodiment, the porous base material 51 includes the porous base materials 51-1, 51-2, and 51-3 having a high infiltration rate, and the porous base material 51-4 having a low infiltration rate. 51-5 and the structure which repeats alternately. This makes it possible to detect the sample contained in the solution by separating it in terms of time.

In each of the above embodiments, an example in which the transmission electrodes 11-1a and 11-1b and the reception electrodes 11-2a and 11-2b are used has been described. However, a SAW is used instead of the reception electrodes 11-2a and 11-2b. May be provided so that the transmission electrodes 11-1a and 11-1b also function as reception electrodes. For example, a grating reflector may be used as the reflector.
In the third embodiment, when a SAW reflector is provided instead of the reception electrodes 11-2a and 11-2b, and the transmission electrodes 11-1a and 11-1b also function as reception electrodes, the infiltration rate is slow. Porous substrates 51-4 and 51-5 also act as reflectors. For this reason, the surface acoustic waves returning to the transmission electrodes 11-1a and 11-1b are reflected by the SAW reflector instead of the reception electrodes 11-2a and 11-2b, and reflected by the porous substrate 51-4. Waves and waves reflected by the porous substrate 51-5 are included. For this reason, since it is necessary to identify these reflected waves, the lengths of the porous base materials 51-1, 51-2, and 51-3 in the x-axis direction are different so that the reflected waves in the respective regions do not overlap. You may do it. Alternatively, the lengths of the porous base materials 51-4 and 51-5 in the x-axis direction may be different.

In each of the above embodiments, the piezoelectric element substrate 10 may be a substrate made of a material exhibiting a piezoelectric effect, for example, lithium tantalate, lithium niobate, lithium tetraborate, or the like.
In each of the above embodiments, the IDT 11 may be anything other than aluminum as long as it is a highly conductive metal.
In each of the above embodiments, the reaction region thin film 12 carries an antibody and measures an antigen. However, if the antigen is not measured, it is not necessary to provide the reaction region thin film 12.

  As described above, the embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to the above, and various design changes and the like can be made without departing from the scope of the present invention. It is possible to

DESCRIPTION OF SYMBOLS 1, 40, 50 ... SAW sensor, 10 ... Piezoelectric element board | substrate, 11, 11-1a, 11-1b, 11-2a, 11-2b ... IDT, 12 ... Reaction region board | substrate, 13 41, 41-1, 41-2, 41-3, 51, 51-1, 51-2, 51-3, 51-4, 51-5 ... porous substrate, 20 ... sense circuit 21 ... AC signal source, 22 ... burst circuit, 23 ... phase / amplitude detection circuit, 24 ... PC

Claims (5)

A piezoelectric element that propagates a surface acoustic wave;
At least a pair of electrodes provided on the piezoelectric element for converting an electric signal and the surface acoustic wave;
Provided in a region between the pair of electrodes of the liquid is the sample is introduced, by which the liquid is infiltrated by capillary action, and the porous substrate for introducing the liquid to the portion in contact with the region,
With
The porous substrate is
A surface acoustic wave sensor characterized by being formed by dispersing different reactants that react with a target in the infiltrating direction of the solution. The porous substrate is
The surface acoustic wave sensor according to claim 1, wherein the liquid infiltrates in a propagation direction of the surface acoustic wave by a capillary phenomenon. The porous substrate is
A first region;
A second region;
Have
The first region and the second region are alternately formed in the propagation direction of the surface acoustic wave,
The surface acoustic wave sensor according to claim 1 or 2, wherein an infiltration rate of the first region is faster than an infiltration rate of the second region. The porous substrate is
The surface acoustic wave sensor according to claim 3, wherein lengths of propagation directions of the surface acoustic waves in the plurality of first regions are different from each other. The porous substrate is
5. The surface acoustic wave sensor according to claim 3, wherein lengths of propagation directions of the surface acoustic waves in the plurality of second regions are different from each other.