JP6036715B2 - Manufacturing method of liquid cooling jacket - Google Patents

Description

  The present invention relates to a method for manufacturing a liquid cooling jacket.

  Friction stir welding (FSW = Friction Stir Welding) is known as a method for joining metal members. Friction stir welding is a method in which the metal members are fixed together by rotating the rotary tool along the abutting portion between the metal members and plastically flowing the metal at the abutting portion by frictional heat between the rotating tool and the metal member. Phase joining is performed.

  In recent years, as the performance of electronic devices typified by personal computers has improved, the amount of heat generated by a mounted CPU (heat generating body) has increased, and cooling of the CPU has become important. Conventionally, air-cooled fan type heat sinks have been used to cool CPUs, but problems such as fan noise and cooling limit in air-cooled systems have come to be highlighted. The jacket is drawing attention.

  As a method for manufacturing such a liquid cooling jacket, Patent Document 1 discloses a technique for joining metal components by friction stir welding. 15A and 15B are diagrams showing a conventional method for manufacturing a liquid cooling jacket, wherein FIG. 15A is an exploded perspective view, and FIG. 15B is a cross-sectional view of a main part showing a joined state. As shown in FIG. 15A, the conventional liquid cooling jacket includes a box-shaped jacket body 100 that is open at the top and a plate-shaped sealing body 110 that seals the opening of the jacket body 100. It is configured.

  The jacket main body 100 includes a bottom portion 101 and a side wall portion 102 having a rectangular frame shape in a plan view and standing on the bottom portion 101. A recess 103 is formed inside the jacket body 100. As shown in FIGS. 15A and 15B, the liquid cooling jacket is manufactured by placing the back surface 110b of the sealing body 110 on the end surface 102a of the jacket body 100, and then the end surface 102a and the back surface 110b. Friction stir welding is performed by moving the rotating tool 120 rotated along the overlapped portion H1 formed by overlapping.

  The rotary tool 120 includes a columnar shoulder portion 121 and a stirring pin 122 protruding from the lower end surface of the shoulder portion 121. Forming a liquid cooling jacket having a hollow portion inside by rotating the rotary tool 120 around the concave portion 103 along the overlapping portion H1 while pushing the lower end surface of the shoulder portion 121 into the sealing body 110 by several millimeters. Can do. A plasticized region W is formed in the movement locus of the rotary tool 120.

JP 2010-137268 A

  However, since a large pressing force acts on the jacket main body 100 and the sealing body 110 by the shoulder portion 121 during the friction stir welding, as shown in FIG. 15B, the plastic fluidized metal material is separated from the side wall portion 102. There is a problem that the inner corner portion formed of the sealing body 110 flows out into the jacket main body 100. In order to prevent the metal material from flowing out from the inner corner portion, the width of the side wall portion 102 must be set large, and there is a problem that the degree of freedom in design is limited.

  Then, this invention makes it a subject to provide the manufacturing method of the liquid cooling jacket with a high design freedom.

In order to solve the above problems, the present invention is composed of a jacket body having a bottom portion and a frame-like side wall portion standing on the bottom portion, and a sealing body that seals a concave portion of the jacket body, In the method of manufacturing a liquid cooling jacket in which a heat transport fluid flows in a hollow portion formed by the jacket body and the sealing body, the jacket body rises from the bottom portion and a support portion that contacts the back surface of the sealing body The end surface of the support portion and the end surface of the side wall portion are flush with each other, the sealing body is placed on the end surface of the side wall portion, and the end surface of the side wall portion and the sealing body A preparatory step of overlapping the back surface and the end surface of the support portion and the back surface of the sealing body , along the first overlapping portion where the end surface of the side wall portion and the back surface of the sealing body are overlapped Around the recess while moving the rotating tool A first polymerization portion bonding step of performing friction stir welding by round, the second overlapping portions bonded to perform friction stir welding with respect to the second overlapping portions, wherein the end face of the support portion and the back surface of the sealing body are superposed A spiral groove is engraved on the outer peripheral surface of the stirring pin of the rotary tool, and when the rotary tool is rotated clockwise, the spiral groove is formed counterclockwise as it goes from top to bottom. When rotating the rotating tool counterclockwise, the spiral groove is formed clockwise as it goes from top to bottom . In the first overlapping portion bonding step and the second overlapping portion bonding step , While using the rotary tool connected to a friction stirrer , provided with a stirring pin having a length dimension larger than the thickness dimension, the surface side of the jacket body and the surface side of the sealing body are in a convex shape The jacket body and the front Sealing body of advance by measuring at least one of the deformation amount was only the stirring pin to generate frictional heat in contact with the jacket body and the sealing body of the friction stir apparatus and the rotating tool In this state, friction stirring is performed while adjusting the insertion depth of the stirring pin in accordance with the amount of deformation .

  According to such a manufacturing method, since the shoulder portion does not enter the sealing body as in the prior art, the width of the plasticized region can be made smaller than in the past, and the pressing force acting on the jacket body and the sealing body can be reduced. Can be reduced. Thereby, even if the width of the side wall portion is reduced, the outflow of the metal material from the inner corner portion constituted by the side wall portion and the sealing body can be prevented, so that the degree of freedom in design can be improved. .

Moreover, according to this manufacturing method, since only a stirring pin is inserted in a jacket main body and a sealing body, the load concerning a friction stirring apparatus can be reduced compared with the case where the shoulder part of a rotary tool is pushed. Moreover, since the load concerning a friction stirrer can be reduced, the superposition | polymerization part in a deep position can be joined in the state which does not apply a big load to a friction stirrer.
In addition, according to the manufacturing method, since the friction stir welding is performed on the second polymerization portion in addition to the first polymerization portion, it is possible to manufacture a liquid cooling jacket having improved bonding strength and high deformation resistance. it can.
In addition, heat shrinkage may occur in the plasticized region due to heat input of friction stir welding, and the liquid cooling jacket may be deformed so as to have a concave shape on the sealing body side. The liquid cooling jacket can be flattened by making the stationary body convex in advance and utilizing heat shrinkage.
Further, according to such a manufacturing method, even when the liquid cooling jacket and the sealing body are convex and friction stir welding is performed, the length and width of the plasticized region formed in the liquid cooling jacket are made constant. Can do.

Further, the support part is formed continuously from the side wall part, and in the first polymerization part joining step and the second polymerization part joining step , friction stirring for the first polymerization part and the second polymerization part is performed. It is preferable to perform joining continuously.

  According to this manufacturing method, the first polymerization part and the second polymerization part can be continuously friction stir welded, so that a liquid cooling jacket having high deformation resistance can be manufactured and the manufacturing cycle is improved. Can be made.

Further, the support portion is continuous from one wall portion constituting the side wall portion, and is formed apart from the other wall portion facing the one wall portion, and is connected to the first overlapping portion. In the step and the second polymerization part joining step , the rotary tool is inserted into a position corresponding to the support part on the surface of the sealing body, and friction stirring is performed on the first polymerization part and the second polymerization part. It is preferable that the joining is continuously performed and the rotary tool is pulled out from the sealing body outside the plasticized region formed in the first overlapping portion.

  According to this manufacturing method, the first polymerization part and the second polymerization part can be continuously friction stir welded, so that a liquid cooling jacket having high deformation resistance can be manufactured and the manufacturing cycle is improved. Can be made. In addition, if the rotary tool is moved inside the plasticizing region, the metal material from the inner corner portion composed of the side wall portion and the sealing body may flow out, but the rotating tool is placed outside the plasticizing region. This problem can be solved by moving the tool and pulling out the rotating tool.

  In addition, it is preferable to perform a repairing process in which a weld metal is buried in the drawing trace of the rotary tool remaining on the surface of the sealing body for repair.

  According to this manufacturing method, there is no trace of drawing and the surface of the liquid cooling jacket can be finished flat.

Further, in the first overlapping portion bonding step and the second overlapping portion bonding step , a cooling plate that is in surface contact with the back surface of the bottom portion of the jacket body is provided, and friction stir welding is performed while cooling the jacket body and the sealing body. It is preferable to carry out.

  According to such a manufacturing method, since the frictional heat can be kept low, the deformation of the liquid cooling jacket due to heat shrinkage can be reduced. Thereby, when making a jacket main body and a sealing body convex before this joining process, the curvature of a jacket main body and a sealing body can be made small.

  Moreover, it is preferable that the cooling flow path through which the cooling medium of the cooling plate flows is formed to have at least a planar shape along the movement locus of the rotating tool.

  According to this manufacturing method, the friction stir part can be intensively cooled, so that the cooling efficiency can be increased.

  Moreover, it is preferable that the cooling flow path through which the cooling medium of the cooling plate flows is constituted by a cooling pipe embedded in the cooling plate.

  According to this manufacturing method, the cooling medium can be easily managed.

Further, in the first overlapping portion bonding step and the second overlapping portion bonding step , it is preferable to perform friction stir welding while cooling the jacket body and the sealing body by flowing a cooling medium inside the jacket body. .

  According to such a manufacturing method, since the frictional heat can be kept low, the deformation of the liquid cooling jacket due to heat shrinkage can be reduced. Further, the jacket body itself can be used for cooling without using a cooling plate or the like.

In the first overlapping portion joining step , when the rotating tool is moved clockwise with respect to the recess, the rotating tool is rotated clockwise and the rotating tool is moved counterclockwise with respect to the recess. In some cases, it is preferable to rotate the rotating tool counterclockwise.

  In friction stir welding, there is a possibility that a joint defect may occur on the left side in the traveling direction when the rotary tool is rotated to the right and on the right side in the traveling direction when the rotary tool is rotated to the left. If it is done, water tightness and air tightness may be lowered. However, according to this manufacturing method, since the joint defect accompanying friction stir welding is formed in the position far from the hollow part of a liquid cooling jacket, the fall of watertightness and airtightness can be suppressed.

Further, in the first overlapping portion joining step , the rotating tool is caused to make a round along the first overlapping portion, and then the rotating tool is shifted to the outside of the plasticized region formed in the first turn, and the rotation is performed. When the tool is further rotated around the first overlapping portion and the outside of the plasticized region is re-stirred, the rotary tool is moved in the clockwise direction with respect to the recess. When rotating clockwise and moving the rotating tool counterclockwise with respect to the recess, it is preferable to rotate the rotating tool counterclockwise.

  According to this manufacturing method, since the joint defect in the first round is stirred again during the friction stir welding in the second round, the joint fault can be repaired.

Moreover, it is preferable to perform the temporary joining process which performs temporary joining with respect to said 1st superposition | polymerization part before said 1st superposition | polymerization part joining process and said 2nd superposition | polymerization part joining process .

According to this manufacturing method, it is possible to prevent the opening between the jacket main body and the sealing body when performing the first polymerization portion bonding step and the second polymerization portion bonding step .

  Moreover, it is preferable that a plurality of fins are formed on at least one of the bottom of the jacket body and the back surface of the sealing body.

  According to this manufacturing method, a liquid cooling jacket with high cooling efficiency can be manufactured.

  According to the manufacturing method of the liquid cooling jacket which concerns on this invention, the freedom degree of design can be improved.

(A) is the side view which showed the rotation tool for this joining of this embodiment, (b) is the schematic cross section which showed the joining form of the rotation tool for this joining. It is a disassembled perspective view which shows the liquid cooling jacket which concerns on 1st embodiment of this invention. It is a figure which shows the liquid cooling jacket which concerns on 1st embodiment, Comprising: (a) is a perspective view, (b) is II sectional drawing of (a). It is sectional drawing which shows the mounting process of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment. It is sectional drawing which shows the temporary joining process of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment. It is a figure which shows the main joining process of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment, Comprising: (a) is a top view, (b) is II-II sectional drawing of (a). It is a figure which shows the main joining process of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment, Comprising: (a) is a top view, (b) is III-III sectional drawing of (a). It is a top view which shows the 1st modification of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment. It is sectional drawing which shows the 1st modification of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment. It is a top view which shows the 2nd modification of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment. It is a perspective view which shows the 3rd modification of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment. It is a figure which shows the 4th modification of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment, Comprising: (a) is a perspective view which shows a table, (b) fixes a jacket main body and a sealing body to a table. It is a perspective view which shows the state which carried out. It is a perspective view which shows the 5th modification of the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment. It is a disassembled perspective view which shows the liquid cooling jacket which concerns on 2nd embodiment of this invention. It is a figure which shows the manufacturing method of the conventional liquid cooling jacket, Comprising: (a) is a disassembled perspective view, (b) is principal part sectional drawing which shows a joining state.

[First embodiment]
A liquid cooling jacket and a manufacturing method of the liquid cooling jacket according to the first embodiment of the present invention will be described in detail with reference to the drawings. First, the main welding rotary tool used in the present embodiment will be described.

  As shown to (a) of FIG. 1, this rotation tool F for joining is comprised by the connection part F1 and the stirring pin F2. The main joining rotary tool F corresponds to a “rotary tool” in the claims. The main rotating tool F for joining is formed of, for example, tool steel. The connection part F1 is a part connected to the rotating shaft D of the friction stirrer shown in FIG. The connecting portion F1 has a cylindrical shape, and is formed with screw holes B and B to which bolts are fastened.

  The stirring pin F2 hangs down from the connecting portion F1 and is coaxial with the connecting portion F1. The stirring pin F2 is tapered as it is separated from the connecting portion F1. The length of the stirring pin F2 is larger than the plate thickness of the sealing body 3 to be described later. A spiral groove F3 is formed on the outer peripheral surface of the stirring pin F2. In the present embodiment, the spiral groove F3 is formed in a counterclockwise direction from the proximal end toward the distal end in order to rotate the main joining rotary tool F to the right.

  In addition, when rotating this welding rotation tool F counterclockwise, it is preferable to form the spiral groove F3 in the clockwise direction from the proximal end toward the distal end. By setting the spiral groove F3 in this way, the plastic fluidized metal at the time of frictional stirring is guided to the tip side of the stirring pin F2 by the spiral groove F3. Thereby, the quantity of the metal which overflows to the exterior of the sealing body 3 can be decreased.

  As shown in FIG. 1B, when performing friction stir welding using the rotating tool F for main joining, only the rotated stirring pin F <b> 2 is inserted into the sealing body 3 and connected to the sealing body 3. It is moved away from the part F1. In other words, the friction stir welding is performed with the base end portion of the stirring pin F2 exposed. A plasticized region W is formed in the movement locus of the main rotating tool F for bonding by hardening the friction-stirred metal.

  Next, the liquid cooling jacket of this embodiment will be described. As shown in FIG. 2, the liquid cooling jacket 1 according to this embodiment includes a jacket main body 2 and a sealing body 3. The jacket body 2 is a box-like body that opens upward.

  The jacket main body 2 includes a bottom portion 10, a side wall portion 11, and a support portion 12. The jacket body 2 is formed of a metal capable of friction stirring. The bottom 10 has a plate shape that is rectangular in plan view. The side wall 11 is erected on the bottom 10 and has a rectangular frame shape in plan view. The side wall part 11 is comprised by wall part 11A, 11B, 11C, 11D which consists of the same board thickness. The walls 11A and 11B are short sides and are opposed to each other. The wall portions 11C and 11D are long side portions and face each other. A recess 13 is formed in the bottom 10 and the side wall 11.

  The support portion 12 is erected on the bottom portion 10 and has a rectangular parallelepiped shape. The support portion 12 is continuous from the wall portion 11A and extends toward the wall portion 11B. The wall part 11B and the front-end | tip part of the support part 12 are spaced apart by predetermined spacing. The end surface 12a of the support portion 12 and the end surface 11a of the side wall portion 11 are flush with each other.

  The sealing body 3 is a plate-like member having a rectangular shape in plan view. The material of the sealing body 3 is not particularly limited, but is formed of the same material as that of the jacket body 2 in the present embodiment. The sealing body side surface 3c of the sealing body 3 and the side surface of the side wall part 11 are flush with each other.

  As shown in FIGS. 3A and 3B, the liquid cooling jacket 1 is integrated by joining the jacket body 2 and the sealing body 3 by friction stirring. In the liquid cooling jacket 1, the first overlapping portion H1 in which the back surface 3b of the sealing body 3 and the end surface 11a of the side wall portion 11 are overlapped, and the back surface 3b of the sealing body 3 and the end surface 12a of the support portion 12 are overlapped. The second polymerization portion H2 is continuously joined by friction stirring. A plasticized region W is formed at a site where frictional stirring is performed. Inside the liquid cooling jacket 1 is formed a hollow portion through which a heat transport fluid for transporting heat to the outside flows.

  Next, the manufacturing method of the liquid cooling jacket which concerns on 1st embodiment is demonstrated. In the manufacturing method of the liquid cooling jacket, a preparation process, a main joining process, and a burr cutting process are performed.

  In the preparation process, a placing process, a fixing process, and a temporary bonding process are performed. As shown in FIG. 4, in the placing step, the sealing body 3 is placed on the jacket body 2. Thereby, the back surface 3b of the sealing body 3 and the end surface 11a of the side wall portion 11 are overlapped to form the first overlapping portion H1. The first overlapping portion H1 has a rectangular frame shape in plan view. Further, the back surface 3b of the sealing body 3 and the end surface 12a of the support portion 12 are overlapped to form the second overlapping portion H2. The second overlapping portion H2 is linear.

  In the fixing step, the jacket body 2 and the sealing body 3 are fixed to a table (not shown). The jacket body 2 and the sealing body 3 are restrained so as not to move on the table by a fixing jig such as a clamp.

  In the temporary joining step, the jacket body 2 and the sealing body 3 are temporarily joined. As shown in FIG. 5, in the temporary joining step, the sealing body side surface 3c of the sealing body 3 and the side surface of the side wall portion 11 are temporarily joined by welding. Temporary joining is intermittently performed in the present embodiment, but may be continuously performed along the outer periphery of the jacket body 2 and the sealing body 3.

  As shown to (a) and (b) of FIG. 6, this joining process is a process of performing friction stir welding using the rotation tool F for this joining. In the present embodiment, the main bonding step includes a second polymerization portion bonding step in which friction stir welding is performed on the second polymerization portion H2, and a first polymerization portion bonding step in which friction stir welding is performed on the first polymerization portion H1. , Including.

  As shown in FIG. 6A, the second overlapping portion joining step is set at a position corresponding to the tip portion of the support portion 12 (tip on the wall portion 11 </ b> B side) on the surface 3 a of the sealing body 3. At the starting position s1, the stirring pin F2 of the rotating tool F for main welding rotated right is inserted. As shown in FIG. 6B, the insertion depth of the stirring pin F2 is set so that the tip of the stirring pin F2 reaches the end surface 12a of the support portion 12, and only the stirring pin F2 is attached to the sealing body 3. Set to touch. Then, the main rotating tool F for welding is moved along the second overlapping portion H2 while maintaining a constant height. That is, the main joining rotary tool F is moved along the support portion 12.

  In the second overlapping portion joining step, the back surface 3b of the sealing body 3 and the end surface 12a of the support portion 12 are friction-stirred and joined. A plasticized region W is formed on the movement trajectory of the main rotating tool for welding F.

  When the main welding rotary tool F is moved to the first intermediate point s2 set in the first overlapping portion H1, the main welding rotating tool F is moved to the first overlapping portion bonding step as it is without being detached. As shown to (a) of FIG. 7, in the 1st superposition | polymerization part joining process, the rotation tool F for this joining is moved along the 1st superposition | polymerization part H1. That is, the main welding rotary tool F is rotated clockwise along the side wall portion 11.

  As shown in FIG. 7B, the insertion depth of the stirring pin F2 is set so that the tip of the stirring pin F2 reaches the end surface 11a, and only the stirring pin F2 contacts the sealing body 3. Set to. Then, the main welding rotary tool F is moved along the first overlapping portion H1 while maintaining a constant height.

  It should be noted that the insertion depth of the main joining rotary tool F is not necessarily constant. For example, the insertion depth may be changed between the first overlapping portion bonding step and the second overlapping portion bonding step. Since this joining rotary tool F does not include a shoulder portion, the insertion depth can be easily changed. Further, the insertion depth may be set so that at least the plasticized region W reaches the end surface 11a and the end surface 12a without bringing the tip of the main rotating tool F into contact with the end surface 11a and the end surface 12a.

  When the main welding rotary tool F is moved clockwise around the recess 13 as in this embodiment, it is preferable to rotate the main welding rotary tool clockwise. On the other hand, when the main welding rotary tool F is moved counterclockwise around the recess 13, it is preferable to rotate the main welding rotary tool F counterclockwise.

  If the rotating tool is rotated to the right, a bonding defect may occur on the left side of the traveling direction, and if it is rotated to the left, the bonding defect may occur on the right side of the traveling direction. May decrease. However, by setting the movement direction and the rotation direction of the main rotating tool F for welding as described above, a bonding defect associated with the friction stir welding is formed at a position away from the recess 13, so that watertightness and airtightness are deteriorated. Can be suppressed.

  As shown in FIG. 7 (a), after rotating the welding rotary tool F once along the first overlapping portion H1, it passes through the first intermediate point s2 and is moved as it is to the second intermediate point s3. . Then, on the surface 3a of the sealing body 3, when the main welding rotary tool F is moved to the end position e1 set outside the second intermediate point s3, the main welding rotating tool F is moved upward to make the main joining from the sealing body 3 The rotary tool F is removed.

  When the extraction trace remains on the surface 3a after the main rotating tool F is detached from the sealing body 3, a repairing process for repairing the extraction trace may be performed. In the repairing process, for example, overlay welding can be performed and the extracted trace can be repaired by filling the weld metal. Thereby, the surface 3a can be flattened.

  Note that when the rotary tool F for main welding is detached from the sealing body 3, for example, the main welding rotary tool F is moved on the surface 3 a of the sealing body 3 corresponding to the side wall portion 11. The rotary tool F may be gradually moved upward so that the insertion depth of the main welding rotary tool F gradually decreases. By doing in this way, the drawing trace after this joining process does not remain on the surface 3a, or a drawing trace can be made small.

  In the burr cutting step, burrs exposed on the surfaces of the jacket main body 2 and the sealing body 3 are cut off by the main bonding step. Thereby, the surface of the jacket main body 2 and the sealing body 3 can be finished finely. Through the above steps, the liquid cooling jacket 1 shown in FIG. 3 is formed.

  According to the manufacturing method of the liquid cooling jacket described above, in the main joining step, since the shoulder portion is not allowed to enter the sealing body 3 as in the past, the width of the plasticized region can be made smaller than before. The pressing force acting on the jacket body 2 and the sealing body 3 can be reduced. In the conventional manufacturing method, it is necessary to set the width of the side wall portion 11 to be larger than the diameter of the shoulder portion of the rotary tool. However, according to the present embodiment, the metal material can be prevented from flowing out from the inner corner portion constituted by the sealing body 3 and the side wall portion 11 even when the width of the side wall portion 11 is reduced. The degree of freedom can be improved.

  Moreover, when providing the support part 12 in the jacket main body 2 like this embodiment, if it was the conventional rotary tool, it was necessary to set the width | variety of the support part 12 larger than the diameter of a shoulder part. However, according to the present embodiment, the metal material can be prevented from flowing out from the inner corner portion constituted by the sealing body 3 and the support portion 12 even if the width of the support portion 12 is reduced. The degree of freedom can be improved.

  Moreover, according to the manufacturing method of the liquid cooling jacket which concerns on this embodiment, since only the stirring pin F2 is inserted in the jacket main body 2 and the sealing body 3, compared with the case where the shoulder part of a rotary tool is pushed in, it is a friction stirrer. This load can be reduced, and the operability of the main welding rotary tool F is improved. Moreover, since the load concerning a friction stirrer can be reduced, the 1st superposition | polymerization part H1 and the 2nd superposition | polymerization part H2 in a deep position can be joined in the state which does not apply a big load to a friction stirrer.

  In addition, the liquid cooling jacket 1 according to the present embodiment is not easily deformed because the support portion 12 that is erected on the bottom portion 10 of the jacket body 2 and joined to the back surface 3b of the sealing body 3 is formed. That is, according to the manufacturing method of the liquid cooling jacket according to the present embodiment, the liquid cooling jacket 1 having high deformation resistance can be manufactured.

  Further, in the liquid cooling jacket 1 according to the present embodiment, in addition to the first polymerization part H1, the second polymerization part H2 is also joined by friction stirring. That is, according to the manufacturing method of the liquid cooling jacket according to the present embodiment, the liquid cooling jacket 1 having high bonding strength and high deformation resistance can be manufactured.

  Moreover, according to the manufacturing method of the liquid cooling jacket which concerns on this embodiment, since a friction stir welding is continuously performed with respect to the 1st superposition | polymerization part H1 and the 2nd superposition | polymerization part H2, a production cycle can be improved.

  In addition, when the rotary tool F for main joining is moved to the inside of the plasticizing region W, the metal material may flow out into the hollow portion of the liquid cooling jacket 1, but the method for manufacturing the liquid cooling jacket according to the present embodiment is also included. According to this, such a problem can be solved by pulling out the main welding rotary tool F outside the plasticized region.

  Moreover, according to the manufacturing method of the liquid cooling jacket which concerns on this embodiment, the opening of the 1st superposition | polymerization part H1 can be prevented in the case of a main joining process by performing a temporary joining process before a main joining process. .

  The manufacturing method of the liquid cooling jacket according to the first embodiment of the present invention has been described above, but the design can be changed as appropriate without departing from the spirit of the present invention. For example, in the main joining step, the friction stir welding may be performed while cooling the jacket main body 2 and the sealing body 3 by flowing a cooling medium into the jacket main body 2. Thereby, since friction heat can be suppressed low, the deformation | transformation of the liquid cooling jacket 1 resulting from heat shrink can be made small. Further, the jacket main body 2 and the sealing body 3 itself can be cooled without using a separate cooling plate, cooling means, or the like.

  Moreover, in this embodiment, although the 1st superposition | polymerization part joining process and the 2nd superposition | polymerization part joining process were performed continuously, you may carry out intermittently. Moreover, you may perform a 2nd superposition | polymerization part joining process, after performing a 1st superposition | polymerization part joining process. Moreover, although the support part 12 was formed continuously from the side wall part 11 in 1st embodiment, it is not limited to this. For example, the support part 12 may be provided separately from the side wall part 11. In this case, a 1st superposition | polymerization part joining process and a 2nd superposition | polymerization part joining process will be performed intermittently. Moreover, the shape of the support part 12 may be another shape, or a plurality of shapes may be provided. Furthermore, in the first embodiment, the support portion 12 is provided on the jacket body 2, but may be provided on the sealing body 3. Further, the support portion 12 may be omitted.

  Moreover, although temporary joining was performed by welding in 1st embodiment, you may perform temporary joining using the rotation tool F for temporary joining or the rotation tool F for main joining. When the temporary joining process is performed using the rotating tool F for main joining, the trouble of replacing the rotating tool can be omitted.

[First modification]
Next, the manufacturing method of the liquid cooling jacket which concerns on a 1st modification is demonstrated. As shown in FIG. 8, the first modification is different from the first embodiment in that the main rotating tool F is rotated around the recess 13 in the first overlapping portion joining step. In the first modified example, a description will be given focusing on portions that are different from the first embodiment.

  As shown in FIG. 8, in the main joining step of the first modified example, a second overlapping portion joining step and a first overlapping portion joining step are performed. The second overlapping portion joining step is equivalent to the first embodiment. If the main welding rotary tool F is moved to the first intermediate point s2 in the second overlapping portion joining step, the main joining rotating tool F is moved to the first overlapping portion joining step as it is.

  In the first overlapping portion joining step, the main rotating tool F is rotated clockwise, and the periphery of the concave portion 13 is rotated clockwise around the first overlapping portion H1. The plasticized region Wa is formed by the friction stir welding in the first round.

  After passing through the first joining point s2 after making a full turn of the main welding rotary tool F, the main welding rotary tool F is shifted to the outside (side away from the recess 13) to stir the outside of the plasticizing region Wa. The main rotating tool F is rotated around the recess 13 so that the pin F2 overlaps. As shown in FIG. 9, the plasticized region Wb is formed by the friction stir welding in the second round. In the present embodiment, the route of the main welding rotary tool F is set so that the rotation axis of the second main welding rotary tool F passes through the outer end of the plasticized region Wa.

  After rotating the main welding rotary tool F twice, if the main welding rotary tool F is moved to a line connecting the second intermediate point s3 (see FIG. 8) and the end position e1, the main welding rotary tool F is used at the end position e1. The rotary tool F is detached from the sealing body 3.

  According to the first modified example described above, the water-tightness and air-tightness of the liquid cooling jacket 1 can be improved by rotating the main-joining rotary tool F twice in the main-joining step. As described above, when the main welding rotary tool F is rotated clockwise with respect to the concave portion 13, there is a possibility that a bonding defect is formed outside the plasticized region Wa (the main welding rotary tool). The same applies when moving F counterclockwise while rotating F counterclockwise). However, the joint defect can be repaired by frictionally stirring the outside of the plasticized region Wa again as in the first modification. Thereby, the water-tightness and airtightness of the liquid cooling jacket 1 can be improved.

[Second modification]
Next, the manufacturing method of the liquid cooling jacket which concerns on a 2nd modification is demonstrated. As shown in FIG. 10, the second modified example is different from the first embodiment in that a tab material TB is used in the first overlapping portion joining step. In the second modified example, description will be made centering on parts different from the first embodiment.

  As shown in FIG. 10, in the main joining step of the second modification, a tab material arranging step, a second overlapping portion joining step, a first overlapping portion joining step, and a drawing step are performed. The tab material arranging step is a step of arranging the tab material TB on the wall portion 11A side of the jacket body 2. The material of the tab material TB is not particularly limited, but a material equivalent to that of the jacket body 2 is used in the second modification. The jacket body 2 and the tab material TB are joined by welding or friction stir welding. The size of the tab member TB is not particularly limited, but in the second modification, the width dimension of the tab member TB is equal to the width dimension of the jacket body 2 and the sealing body 3. The surface of the tab material TB and the surface 3a of the sealing body 3 are flush with each other.

  The 2nd superposition | polymerization part joining process and the 1st superposition | polymerization part joining process are equivalent to 1st embodiment. After rotating the main welding rotary tool F once, after moving the main welding rotary tool F to the second intermediate point s3, the main welding rotary tool F is moved directly to the drawing step without being detached. The drawing process is a process of detaching the main rotating tool F from the tab material TB.

  In the drawing step, the main welding rotary tool F is moved spirally on the tab material TB while the main welding rotary tool F is moved from the second intermediate point s3 into the tab material TB. At this time, it is preferable that the insertion depth of the main rotating tool F is gradually reduced toward the end position e2 of the drawing process. When the main rotating tool F is detached from the tab material TB at the end position e2, the tab material TB is cut out from the jacket body 2.

  According to the second modified example, by using the tab material TB, the drawing trace does not remain in the jacket main body 2, so that the repairing process for repairing the drawing trace can be omitted. The movement trajectory of the main welding rotary tool F on the tab member TB is not limited to a spiral shape, and may be set to a meandering shape or a straight shape. Also, the main welding rotary tool F may be pulled upward on the tab member TB without gradually decreasing the insertion depth of the main welding rotary tool F.

[Third Modification]
Next, the manufacturing method of the liquid cooling jacket which concerns on a 3rd modification is demonstrated. As shown in FIG. 11, the third modification is different from the first embodiment in that the temporary joining step and the main joining step are performed using a cooling plate. In the third modified example, a description will be given centering on portions that are different from the first embodiment.

  As shown in FIG. 11, in the third modification, the jacket main body 2 and the sealing body 3 are fixed to the table K when performing the fixing process. The table K is configured by a substrate K1 having a rectangular parallelepiped shape, clamps K3 formed at four corners of the substrate K1, and a cooling pipe WP disposed inside the substrate K1. The table K is a member that restrains the jacket body 2 from being immovable and functions as a “cooling plate” in the claims.

  The cooling pipe WP is a tubular member embedded in the substrate K1. A cooling medium for cooling the substrate K1 flows in the cooling pipe WP. The arrangement position of the cooling pipe WP, that is, the shape of the cooling flow path through which the cooling medium flows is not particularly limited, but in the third modified example, a planar shape along the movement trajectory of the main joining rotary tool F in the first overlapping portion joining step It has become. That is, the cooling pipe WP is disposed so that the cooling pipe WP and the first overlapping portion H1 substantially overlap when viewed in plan.

  In the temporary joining process and the main joining process of the third modified example, after the jacket body 2 and the sealing body 3 are fixed to the table K, welding and friction stir welding are performed while flowing a cooling medium through the cooling pipe WP. Thereby, since the frictional heat at the time of friction stirring can be restrained low, the deformation | transformation of the liquid cooling jacket 1 resulting from a thermal contraction can be made small. Further, in the third modified example, when viewed in a plan view, the cooling flow path and the first overlapping portion H1 (movement trajectory of the main joining rotary tool F) are overlapped with each other. Can be cooled intensively. Thereby, cooling efficiency can be improved. In addition, since the cooling pipe WP is provided to distribute the cooling medium, the management of the cooling medium becomes easy. Further, since the table K and the jacket body 2 are in surface contact, the cooling efficiency can be increased.

  In addition, while cooling the jacket main body 2 and the sealing body 3 using the table K (cooling plate), the friction stir welding may be performed while flowing the cooling medium inside the jacket main body 2. Further, the cooling pipe WP may be disposed at a position corresponding to the second overlapping portion H2.

[Fourth modification]
Next, the manufacturing method of the liquid cooling jacket which concerns on a 4th modification is demonstrated. As shown in FIG. 12, in the fourth modification, the first embodiment is performed in that the main joining step is performed in a state where the surface side of the jacket body 2 and the surface 3a of the sealing body 3 are curved so as to be convex. And different. In the fourth modified example, description will be made centering on parts different from the first embodiment.

  As shown in FIG. 12A, in the fourth modified example, a table KA is used. The table KA includes a substrate KA1 having a rectangular parallelepiped shape, a spacer KA2 formed at the center of the substrate KA1, and clamps KA3 formed at four corners of the substrate KA1. The spacer KA2 may be integral with or separate from the substrate KA1.

  In the fixing process of the fourth modified example, the jacket main body 2 and the sealing body 3 integrated by performing the temporary joining process are fixed to the table KA by the clamp KA3. As shown in FIG. 12 (b), when the jacket body 2 and the sealing body 3 are fixed to the table KA, the bottom portion 10, the end surface 11a of the jacket body 2 and the surface 3a of the sealing body 3 are convex upward. To bend. More specifically, the first side 21, the second side 22, the third side 23, and the fourth side 24 of the sealing body 3 are curved so as to be curved.

  In the main joining step of the fourth modified example, the second superposition part joining step and the first superposition part joining step are performed using the main joining rotary tool F. In the second overlapping portion bonding step and the first overlapping portion bonding step, the deformation amount of at least one of the jacket body 2 and the sealing body 3 is measured, and the insertion depth of the stirring pin F2 is adjusted to the deformation amount. Friction stir welding is performed while adjusting. That is, it is moved along the curved surface of the surface 3a of the sealing body 3 so that the movement locus of the main welding rotary tool F becomes a curve. By doing so, the depth and width of the plasticized region W can be made constant.

  Although heat shrinkage occurs in the plasticized region W due to heat input of the friction stir welding, the sealing body 3 side of the liquid cooling jacket 1 may be deformed into a concave shape, but according to the main joining process of the fourth modified example, the end face Since the jacket body 2 and the sealing body 3 are fixed in advance so that a tensile stress acts on the surface 11a and the surface 3a, the liquid cooling jacket 1 is flattened by utilizing heat shrinkage after friction stir welding. can do. Moreover, when performing this joining process with the conventional rotary tool, if the jacket main body 2 and the sealing body 3 are warped in a convex shape, the shoulder of the rotary tool comes into contact with the sealing body 3, so that the operability is poor. is there. However, according to the fourth modification, since the shoulder portion does not exist in the main welding rotary tool F, even when the jacket main body 2 and the sealing body 3 are warped in a convex shape, Operability is improved.

  In addition, what is necessary is just to use a well-known height detection apparatus about the measurement of the deformation amount of the jacket main body 2 and the sealing body 3. FIG. Further, for example, by using a friction stirrer equipped with a detection device that detects the height from the table KA to at least one of the jacket body 2 and the sealing body 3, the jacket body 2 or the sealing body 3 is deformed. You may perform this joining process, detecting the quantity.

  Moreover, in the 4th modification, although the jacket main body 2 and the sealing body 3 were curved so that all of the 1st side part 21-the 4th side part 24 might become a curve, it is not limited to this. For example, the first side 21 and the second side 22 may be curved so that the third side 23 and the fourth side 24 are curved. Further, for example, the first side 21 and the second side 22 may be curved, and the third side 23 and the fourth side 24 may be curved.

  In the fourth modification, the height position of the stirring pin F2 is changed according to the amount of deformation of the jacket main body 2 or the sealing body 3, but the height of the stirring pin F2 with respect to the table KA is kept constant. You may go.

  Further, the spacer KA2 may have any shape as long as it can be fixed so that the surface sides of the jacket body 2 and the sealing body 3 are convex. Further, the spacer KA2 may be omitted as long as the front surface side of the jacket body 2 and the sealing body 3 can be fixed in a convex shape. Further, in the present embodiment, the flat jacket body 2 and the sealing body 3 are deformed so that the surface side becomes convex during the fixing step, but the jacket body 2 whose surface side becomes convex in advance by die casting or the like. And the sealing body 3 may be shape | molded and the said jacket main body 2 and the sealing body 3 may be fixed to the table KA. Even in such a method, the liquid cooling jacket can be flattened by utilizing the heat shrinkage in the main joining step.

[Fifth Modification]
Next, the manufacturing method of the liquid cooling jacket which concerns on a 5th modification is demonstrated. As shown in FIG. 13, in the fifth modification, the first embodiment is performed in that the main joining step is performed in a state where the jacket body 2 and the sealing body 3 are curved so as to be convex while using the cooling plate. And different. In the fifth modified example, a description will be given focusing on parts different from the first embodiment.

  As shown in FIG. 13, in the fifth modification, the jacket body 2 is fixed to the table KB when performing the fixing step. The table KB is composed of a substrate KB1 having a rectangular parallelepiped shape, a spacer KB2 disposed in the center of the substrate KB1, clamps KB3 formed at four corners of the substrate KB1, and a cooling pipe WP embedded in the substrate KB1. Has been. The table KB is a member that restrains the jacket body 2 so as not to move and functions as a “cooling plate” in the claims.

  The spacer KB2 includes a curved surface KB2a that is curved so as to be convex upward, and rising surfaces KB2b and KB2b that are formed at both ends of the curved surface KB2a and rise from the substrate KB1. The first side Ka and the second side Kb of the spacer KB2 are curved, and the third side Kc and the fourth side Kd are straight lines.

  The cooling pipe WP is a tubular member embedded in the substrate KB1. A cooling medium for cooling the substrate KB1 flows in the cooling pipe WP. The arrangement position of the cooling pipe WP, that is, the shape of the cooling flow path through which the cooling medium flows is not particularly limited, but in the fifth modification, a planar shape along the movement locus of the main joining rotary tool F in the first overlapping portion joining step It has become. That is, the cooling pipe WP is disposed so that the cooling pipe WP and the first overlapping portion H1 substantially overlap when viewed in plan.

  In the fixing process of the fifth modified example, the jacket body 2 and the sealing body 3 integrated by temporary joining are fixed to the table KB by the clamp KB3. More specifically, the jacket body 2 is fixed to the table KB so that the back surface of the bottom portion 10 is in surface contact with the curved surface KB2a. When the jacket body 2 and the sealing body 3 are fixed to the table KB, the surface side of the jacket body 2 and the surface 3a of the sealing body 3 are curved so as to be convex upward. The first side 21 and the second side 22 of the sealing body 3 are curved, and the third side 23 and the fourth side 24 are straight lines.

  In the main joining step of the fifth modified example, the second superposition part joining step and the first superposition part joining step are performed using the main joining rotary tool F. In the second overlapping portion bonding step and the first overlapping portion bonding step, the deformation amount of at least one of the jacket body 2 and the sealing body 3 is measured, and the insertion depth of the stirring pin F2 is adjusted to the deformation amount. Friction stir welding is performed while adjusting. That is, it is moved along the curved surface of the surface 3a of the sealing body 3 so that the movement locus of the main welding rotary tool F becomes a curve. By doing so, the depth and width of the plasticized region W can be made constant.

  Although heat shrinkage occurs in the plasticized region W due to heat input of the friction stir welding, the sealing body 3 side of the liquid cooling jacket 1 may be deformed into a concave shape, but according to the main joining process of the fifth modified example, the end face Since the jacket body 2 and the sealing body 3 are fixed in advance so that a tensile stress acts on the surface 11a and the surface 3a, the liquid cooling jacket is flattened by utilizing the heat shrinkage after the friction stir welding. be able to.

  In the fifth modification, the curved surface KB2a of the spacer KB2 is brought into surface contact with the concave back surface of the bottom portion 10 of the jacket body 2. Thereby, friction stir welding can be performed while cooling the jacket main body 2 and the sealing body 3 more effectively. Since the frictional heat in the friction stir welding can be kept low, the deformation of the liquid cooling jacket due to the heat shrinkage can be reduced. Thereby, when making the jacket main body 2 and the sealing body 3 convex before this joining process, the curvature of the jacket main body 2 and the sealing body 3 can be made small.

  In addition, what is necessary is just to use a well-known height detection apparatus about the measurement of the deformation amount of the jacket main body 2 and the sealing body 3. FIG. Further, for example, by using a friction stirrer equipped with a detection device that detects the height from the table KB to at least one of the jacket body 2 and the sealing body 3, the jacket body 2 or the sealing body 3 is deformed. You may perform this joining process, detecting the quantity.

  Moreover, in the 5th modification, although the jacket main body 2 and the sealing body 3 were curved so that the 1st edge part 21 and the 2nd edge part 22 might become a curve, it is not limited to this. For example, the spacer KB2 having a spherical surface may be formed, and the back surface of the bottom portion 10 of the jacket body 2 may be in surface contact with the spherical surface. In this case, when the jacket body 2 and the sealing body 3 are fixed to the table KB, all of the first side portion 21 to the fourth side portion 24 are curved.

  In the fifth modification, the height position of the stirring pin F2 is changed according to the amount of deformation of the jacket main body 2 or the sealing body 3, but the height of the stirring pin F2 with respect to the table KB is kept constant. You may go.

[Second Embodiment]
Next, the manufacturing method of the liquid cooling jacket which concerns on 2nd embodiment of this invention is demonstrated. As shown in FIG. 14, the second embodiment is different from the first embodiment in that fins 31 are provided on the sealing body 3A. In the second embodiment, the description will focus on the parts that are different from the first embodiment.

  As shown in FIG. 13, the liquid cooling jacket 1A includes a jacket body 2 and a sealing body 3A. The jacket body 2 is the same as that of the first embodiment. 3A of sealing bodies are comprised by the base 30 which is a planar plate-shaped rectangular member, and the several fin 31 provided in the back surface 30b of the base 30. As shown in FIG. The fins 31 are arranged perpendicular to the base 30 with a predetermined interval.

  The manufacturing method of the liquid cooling jacket which concerns on 2nd embodiment performs the preparatory process, 1st superposition | polymerization part joining process, and burr | flash cutting process of 1st embodiment. According to the manufacturing method of the liquid cooling jacket which concerns on 2nd embodiment, 1 A of liquid cooling jackets in which the several fin 31 was formed can be formed. Since the liquid cooling jacket 1 </ b> A has the fins 31, the cooling efficiency can be increased. In addition, you may provide the support part 12 (refer FIG. 2) in the jacket main body 2 side, providing the fin 31. FIG. Moreover, you may make it provide the fin 31 in at least any one of the jacket main body 2 and the sealing body 3A.

DESCRIPTION OF SYMBOLS 1 Liquid cooling jacket 2 Jacket main body 3 Sealing body 3a Surface 3b Back surface 3c Sealing body side surface 10 Bottom part 11 Side wall part 11a End surface 12 Support part 12a End surface 13 Concave part 31 Fin F Rotation tool for main joining
F2 stirring pin K table (cooling plate)
H1 First polymerization part H2 Second polymerization part W Plasticization region WP Cooling pipe

Claims (12)

A jacket body having a bottom portion and a frame-like side wall portion standing on the bottom portion, and a sealing body that seals a concave portion of the jacket body, are formed by the jacket body and the sealing body. In the manufacturing method of the liquid cooling jacket in which the heat transport fluid flows in the hollow portion,
The jacket body has a support portion that rises from the bottom and contacts the back surface of the sealing body, and the end surface of the support portion and the end surface of the side wall portion are flush with each other,
A preparatory step of placing the sealing body on the end surface of the side wall portion to superimpose the end surface of the side wall portion and the back surface of the sealing body and overlapping the end surface of the support portion and the back surface of the sealing body. When,
A first superposition part joining step of performing a friction stir welding by making a round around the recess while moving a rotary tool along a first superposition part in which the end face of the side wall part and the back surface of the sealing body are overlapped ;
A second polymerization part bonding step for performing friction stir welding on the second polymerization part in which the end surface of the support part and the back surface of the sealing body are overlapped ,
A spiral groove is engraved on the outer peripheral surface of the stirring pin of the rotary tool, and when the rotary tool is rotated clockwise, the spiral groove is formed counterclockwise as it goes from top to bottom, and the rotary tool is When rotating left, the spiral groove is formed clockwise as it goes from top to bottom,
In the first superposed part joining step and the second superposed part joining step , the rotary tool provided with a stirring pin having a length larger than the thickness of the sealing body and connected to a friction stirrer is used. The amount of deformation of at least one of the jacket body and the sealing body is measured in a state where the surface side of the jacket body and the surface side of the sealing body are convex, and the friction stirrer and Friction stirring is performed while adjusting the insertion depth of the stirring pin in accordance with the amount of deformation in a state where only the stirring pin of the rotating tool is brought into contact with the jacket body and the sealing body to generate frictional heat. A method for producing a liquid-cooled jacket. The support part is formed continuously from the side wall part,
2. The liquid cooling according to claim 1 , wherein in the first polymerization part bonding step and the second polymerization part bonding step , friction stir welding is continuously performed on the first polymerization part and the second polymerization part. Manufacturing method of the jacket. The support portion is continuous from one wall portion constituting the side wall portion, and is formed apart from the other wall portion facing the one wall portion,
In the first overlapping portion bonding step and the second overlapping portion bonding step , the rotary tool is inserted into a position corresponding to the support portion on the surface of the sealing body, and the first overlapping portion and the second overlapping portion are inserted. performs friction stir welding continuously against part, outside of the first polymerization section plasticized region formed from said sealing body according to claim 1, characterized in that withdrawing the rotary tool Manufacturing method of liquid cooling jacket. The method for manufacturing a liquid cooling jacket according to claim 3 , wherein a repairing step is performed in which a welding metal is buried in a drawing trace of the rotary tool remaining on the surface of the sealing body and repaired. In the first overlapping portion bonding step and the second overlapping portion bonding step , a cooling plate that is in surface contact with the back surface of the bottom portion of the jacket body is provided, and friction stir welding is performed while cooling the jacket body and the sealing body. liquid cooling jacket the method according to claim 1, characterized in that. 6. The method for manufacturing a liquid cooling jacket according to claim 5 , wherein the cooling flow path through which the cooling medium of the cooling plate flows is formed to have a planar shape at least along the movement trajectory of the rotary tool. The method for manufacturing a liquid cooling jacket according to claim 5 or 6 , wherein the cooling flow path through which the cooling medium of the cooling plate flows is constituted by a cooling pipe embedded in the cooling plate. In the first overlapping portion bonding step and the second overlapping portion bonding step , a friction stir welding is performed while cooling the jacket body and the sealing body by flowing a cooling medium inside the jacket body. The manufacturing method of the liquid cooling jacket as described in any one of Claims 1 thru | or 7 . In the first polymerization part joining step ,
When moving the rotary tool clockwise with respect to the recess, rotate the rotary tool clockwise,
The method for manufacturing a liquid cooling jacket according to any one of claims 1 to 8 , wherein when the rotary tool is moved counterclockwise with respect to the concave portion, the rotary tool is rotated counterclockwise. . In the first overlapping portion joining step , after rotating the rotating tool along the first overlapping portion, the rotating tool is shifted to the outside of the plasticized region formed in the first turn, and the rotating tool is moved. When re-stirring the outside of the plasticized region by further making a round with respect to the first polymerization portion,
When moving the rotary tool clockwise with respect to the recess, rotate the rotary tool clockwise,
The method for manufacturing a liquid cooling jacket according to any one of claims 1 to 8 , wherein when the rotary tool is moved counterclockwise with respect to the concave portion, the rotary tool is rotated counterclockwise. . Before the first polymerization section joining step and the second polymerization unit bonding process, any of claims 1 to 10, characterized in that making of a provisional bonding step of performing temporary bonded to the first polymerization section A method for producing a liquid-cooled jacket according to claim 1. The method for manufacturing a liquid cooling jacket according to any one of claims 1 to 11 , wherein a plurality of fins are formed on at least one of a bottom of the jacket body and a back surface of the sealing body. .

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