JP6014726B2 - Semiconductor device and manufacturing method thereof - Google Patents

Description

The present invention relates to a semiconductor device and a manufacturing method thereof.

Semiconductor integrated circuits, in particular, integrated circuits using MOS transistors, are becoming increasingly highly integrated. Along with this high integration, the MOS transistors used therein have been miniaturized to the nano region. As the miniaturization of MOS transistors progresses, there is a problem that it is difficult to suppress the leakage current, and the area occupied by the circuit cannot be easily reduced due to a request for securing a necessary amount of current. In order to solve such a problem, a Surrounding Gate Transistor (SGT) having a structure in which a source, a gate, and a drain are arranged in a vertical direction with respect to a substrate and the gate surrounds a columnar semiconductor layer has been proposed (for example, Patent Documents). 1, Patent Document 2, Patent Document 3).

JP-A-2-71556 Japanese Patent Laid-Open No. 2-188966 Japanese Patent Laid-Open No. 3-145761

Since the SGT provides a channel region so as to surround the side surface of the columnar semiconductor, a large gate width is realized in a small occupied area. That is, it is required to flow a large on-current in a small occupied area. Since a large on-current flows, it is difficult to apply a desired voltage to the source, drain, and gate when the resistance of the source, drain, and gate is high. Therefore, an SGT manufacturing method including a design for reducing the resistance of the source, drain, and gate is required.
In addition, since a large on-current flows, it is necessary to reduce the contact resistance.

In a conventional MOS transistor, a gate is formed by depositing a gate material, transferring a gate pattern to a resist on a substrate by lithography, and etching the gate material. That is, in the conventional MOS transistor, the gate length is designed by the gate pattern. On the other hand, in SGT, since the side surface of the columnar semiconductor is a channel region, a current flows perpendicularly to the substrate. That is, in the SGT, the gate length is not designed by the gate pattern, but is designed by the manufacturing method, so that the variation in the gate length and the gate length is determined by the manufacturing method.

In SGT, it is required to reduce the diameter of a columnar semiconductor in order to suppress an increase in leakage current that occurs with miniaturization. In addition, there is a need for a manufacturing method that can suppress the short channel effect and suppress the leakage current by optimizing the source and drain.

SGT needs to reduce the manufacturing cost like a conventional MOS transistor. Therefore, it is required to reduce the number of manufacturing processes. Accordingly, an object of the present invention is to provide a method for manufacturing an SGT that can obtain a structure for reducing the resistance of the source, drain, and gate, and a desired gate length, source, drain shape, and columnar semiconductor diameter.

In one aspect of the invention,
A method of manufacturing a semiconductor device, the step of forming a planar semiconductor layer on an oxide film formed on a substrate and forming a columnar first conductivity type semiconductor layer on the planar semiconductor layer;
Forming a second conductivity type semiconductor layer in a planar semiconductor layer below the columnar first conductivity type semiconductor layer;
Forming a gate insulating film and a gate electrode around the columnar first conductive semiconductor layer; and forming an insulating film in a sidewall shape on the upper side wall of the columnar first conductive semiconductor layer above the gate. When,
A step of forming an insulating film on the sidewall of the gate in a sidewall shape; a step of forming a second conductivity type semiconductor layer on top of the columnar first conductivity type semiconductor layer;
Forming a metal-semiconductor compound in a second conductive semiconductor layer formed in a planar semiconductor layer below the columnar first conductive semiconductor layer;
Forming a compound of a metal and a semiconductor in a second conductivity type semiconductor layer formed on the top of the columnar first conductivity type semiconductor layer;
Forming a compound of metal and semiconductor on the gate;
Forming a contact on the second conductive semiconductor layer formed in the planar semiconductor layer below the columnar first conductive semiconductor layer;
Forming a contact on a second conductivity type semiconductor layer formed on a columnar first conductivity type semiconductor layer. A method of manufacturing a semiconductor device, comprising:

In a preferred embodiment of the present invention,
The length from the center of the columnar first conductivity type semiconductor layer to the end of the planar semiconductor layer is:
The length from the center of the columnar first conductivity type semiconductor layer to the side wall;
The thickness of the gate insulating film,
The thickness of the gate electrode,
The thickness of the insulating film formed in a sidewall shape on the side wall of the gate;
This is a method for manufacturing a semiconductor device as described above, which is greater than the sum of.

In a preferred embodiment of the present invention,
The thickness of the gate electrode is the manufacturing method of the semiconductor device described above, wherein the thickness of the gate electrode is larger than the thickness of the insulating film formed in a sidewall shape on the upper side wall of the columnar first conductive semiconductor layer.

In a preferred embodiment of the present invention,
The planar semiconductor layer is a planar silicon layer, the first conductivity type semiconductor layer is a first conductivity type silicon layer, and the second conductivity type semiconductor layer is a second conductivity type silicon layer. It is a manufacturing method.

In a preferred embodiment of the present invention,
The semiconductor described above, wherein the planar semiconductor layer is a planar silicon layer, the first conductivity type semiconductor layer is a p-type silicon layer or a non-doped silicon layer, and the second conductivity type semiconductor layer is an n-type silicon layer. It is a manufacturing method of an apparatus.

In a preferred embodiment of the present invention,
The semiconductor described above, wherein the planar semiconductor layer is a planar silicon layer, the first conductivity type semiconductor layer is an n-type silicon layer or a non-doped silicon layer, and the second conductivity type semiconductor layer is a p-type silicon layer. It is a manufacturing method of an apparatus.

In a preferred embodiment of the present invention,
A silicon layer for forming a columnar first conductive silicon layer and a planar silicon layer is formed on an oxide film formed on the substrate, and a silicon for forming the columnar first conductive silicon layer and the planar silicon layer is formed. Forming a pad oxide film on the layer;
Impurity implantation for threshold adjustment is performed on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer through the pad oxide film, and annealing is performed for impurity activation and diffusion. Homogenizing the impurity distribution of the silicon layer forming the first conductivity type silicon layer and the planar silicon layer;
The method for manufacturing a semiconductor device according to the above, including a step of forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer.

In a preferred embodiment of the present invention,
A silicon layer for forming a columnar first conductive silicon layer and a planar silicon layer is formed on an oxide film formed on the substrate, and a silicon for forming the columnar first conductive silicon layer and the planar silicon layer is formed. Forming a pad oxide film on the layer;
Forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer;
Forming a silicon oxide film on the silicon nitride film;
A step of applying a resist, forming a pattern in which the columnar first conductivity type silicon layer is inverted by lithography using lithography, and forming a hole penetrating the silicon oxide film at a position where the columnar first conductivity type silicon layer is formed When,
Forming amorphous silicon or polysilicon so as to fill holes formed in the silicon oxide film;
Polishing and removing the amorphous silicon or polysilicon of the silicon oxide film by chemical mechanical polishing;
A step of forming an amorphous silicon or polysilicon mask as a second hard mask by removing the silicon oxide film by etching;
Sacrificing the amorphous silicon or polysilicon mask to reduce the size of the amorphous silicon or polysilicon mask;
Removing the silicon oxide film on the amorphous silicon or polysilicon mask surface by etching;
A method for manufacturing a semiconductor device as described above, including:

In a preferred embodiment of the present invention,
A silicon layer for forming a columnar first conductive silicon layer and a planar silicon layer is formed on an oxide film formed on the substrate, and a silicon for forming the columnar first conductive silicon layer and the planar silicon layer is formed. Forming a pad oxide film on the layer;
Forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer;
Forming a silicon oxide film on the silicon nitride film;
A step of applying a resist, forming a pattern in which the columnar first conductivity type silicon layer is inverted by lithography using lithography, and forming a hole penetrating the silicon oxide film at a position where the columnar first conductivity type silicon layer is formed When,
Depositing an oxide film and performing etch back to reduce the diameter of the hole penetrating the silicon oxide film;
A method for manufacturing a semiconductor device as described above, including:

In a preferred embodiment of the present invention,
Using the amorphous silicon or polysilicon mask as the second hard mask as a mask, etching the silicon nitride film and the pad oxide film by dry etching to form a silicon nitride film mask as the first hard mask;
Forming a columnar first conductivity type silicon layer by dry etching using the first hard mask and the second hard mask as a mask;
Including
The amorphous silicon or polysilicon mask that is the second hard mask is all etched, and the plasma emission intensity that can be detected by the dry etching apparatus changes. By detecting this change in plasma emission intensity, The method for manufacturing a semiconductor device according to the above, wherein the end point is detected and the height of the columnar first conductivity type silicon layer is controlled.

In a preferred embodiment of the present invention,
The thickness of the amorphous silicon or polysilicon mask which is the second hard mask is the manufacturing method of the semiconductor device described above, wherein the thickness is smaller than the height of the columnar first conductivity type silicon layer.

In a preferred embodiment of the present invention,
From relief of unevenness on the side wall of the columnar first conductivity type silicon layer that becomes the channel part, removal of the silicon surface in which carbon or the like is implanted during dry etching, and contamination of by-products generated during dry etching in the next process Sacrificial oxidation of the formed columnar first conductivity type silicon layer to protect the columnar first conductivity type silicon layer;
Applying a resist and forming a pattern of a second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer by lithography using lithography;
And a step of dry etching the planar silicon layer to form a planar silicon layer below the columnar first conductivity type silicon layer and removing the resist.

In a preferred embodiment of the present invention,
Using the sacrificial oxide film formed during the sacrificial oxidation of the first conductivity type silicon layer as a through oxide film, impurities of the second conductivity type are introduced into the surface of the planar silicon layer by impurity implantation or the like, and the lower portion of the columnar first conductivity type silicon layer is introduced. The method for manufacturing a semiconductor device according to the above, wherein the second conductivity type silicon layer formed on the planar silicon layer is formed.

In a preferred embodiment of the present invention,
The columnar first conductive silicon layer has a column diameter smaller than that of a silicon nitride film mask that is the first hard mask.

In a preferred embodiment of the present invention,
The method for manufacturing a semiconductor device according to the above, wherein an implantation angle of impurity implantation used for forming the second conductive silicon layer formed in the planar silicon layer below the columnar first conductive silicon layer is 0 to 6 degrees. It is.

In a preferred embodiment of the present invention,
The semiconductor device according to the above, wherein the second conductive silicon layer is formed on the planar silicon layer below the columnar first conductive silicon layer without implanting impurities into the upper portion of the columnar first conductive semiconductor layer. It is a manufacturing method.

In a preferred embodiment of the present invention,
A step of removing the sacrificial oxide film by etching, forming a gate insulating film such as a silicon oxide film or a silicon nitride film, and forming amorphous silicon or polysilicon as a gate electrode so as to embed a columnar first conductivity type silicon layer. When,
Polishing amorphous silicon or polysilicon by chemical mechanical polishing and flattening the upper surface of the gate electrode;
Including
In the chemical mechanical polishing, the semiconductor device manufacturing method according to the above, wherein the amount of chemical mechanical polishing is suppressed with good reproducibility by using a silicon nitride film as a first hard mask as a stopper for chemical mechanical polishing.

In a preferred embodiment of the present invention,
Etching back amorphous silicon or polysilicon which is a gate electrode to form a gate electrode having a desired gate length;
Oxidizing the surface of amorphous silicon or polysilicon, which is a gate electrode, and forming a silicon oxide film on the amorphous silicon or polysilicon surface;
Including
This silicon oxide film protects the upper surface of the gate from wet processing or dry processing performed in a later process, thereby suppressing variations in gate length, that is, variations in gate length and damage to the gate insulating film from the upper surface of the gate. This is a method for manufacturing the semiconductor device described above.

In a preferred embodiment of the present invention,
Forming a silicon nitride film having a thickness greater than that of a desired gate electrode;
Etching back the silicon nitride film and etching the silicon oxide film to form a silicon nitride film sidewall,
Since the film thickness of the silicon nitride film side wall becomes the film thickness of the gate electrode, the gate electrode having a desired film thickness can be formed by adjusting the film thickness of the silicon nitride film and the etch-back conditions. Features
An antireflection film layer (BARC layer) and a resist are applied, and a gate wiring pattern is formed from the resist using lithography.
Etching the antireflection film layer (BARC layer) and the amorphous silicon or polysilicon that is the gate electrode using the resist as a mask to form a gate electrode and a gate wiring pattern;
Removing the silicon nitride film and the silicon nitride film side wall on the columnar first conductivity type silicon layer by dry etching or wet etching;
A silicon nitride film is formed, and the silicon nitride film is etched back to form a second conductivity type silicon layer and a columnar first conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer. A silicon nitride film sidewall is formed on the upper side wall of the columnar first conductivity type silicon layer via a gate insulating film, and a silicon nitride film side wall is formed on the side wall of the gate electrode. That is, a step of forming an insulating film sidewall,
Introducing a second conductivity type impurity into the upper portion of the columnar first conductivity type silicon layer by impurity implantation or the like, and forming a second conductivity type silicon layer above the columnar first conductivity type silicon layer;
A second conductive type silicon layer formed on a planar silicon layer under the first conductive type silicon layer by sputtering a metal film such as nickel (Ni) or cobalt (Co) and applying heat treatment; The surface of the second conductivity type silicon layer formed on the upper portion of the first conductivity type silicon layer is compounded with a metal and a semiconductor, and the unreacted metal film is removed to thereby form a lower portion of the columnar first conductivity type silicon layer. Forming a metal and semiconductor compound on the second conductive silicon layer formed on the planar silicon layer and the second conductive silicon layer formed on the columnar first conductive silicon layer;
Including
The second conductive silicon layer formed on the planar silicon layer below the gate electrode and the columnar first conductivity type silicon layer and the second conductivity formed on the columnar first conductivity type silicon layer by the silicon nitride film sidewall. Since the type silicon layer is separated, the second conductive type silicon layer and the columnar first conductive type silicon formed on the planar silicon layer below the gate electrode made of a compound of metal and semiconductor and the columnar first conductive type silicon layer. A short circuit of the second conductivity type silicon layer formed on the top of the layer can be prevented,
The method for manufacturing a semiconductor device according to the above, wherein the compounding of the metal and the semiconductor from the side wall of the columnar first conductivity type silicon layer is controlled by covering the side wall of the columnar first conductivity type silicon layer with a silicon nitride film. It is.

In a preferred embodiment of the present invention,
Forming a silicon nitride film or the like as a contact stopper;
A step of planarizing by chemical mechanical polishing after forming a silicon oxide film as an interlayer film;
On the second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer, on the gate electrode, and on the second conductivity type silicon layer formed on the top of the columnar first conductivity type silicon layer And a step of forming a contact hole by etching,
After forming a barrier metal such as tantalum (Ta), tantalum nitride (TaN), titanium (Ti), or titanium nitride (TiN) in the contact hole, a metal such as tungsten (W), copper (Cu), or an alloy containing copper Forming a contact plug by chemical mechanical polishing, forming a film by sputtering or plating, and
Forming a first layer wiring etching stopper such as silicon carbide (SiC), and subsequently forming a low dielectric constant film that is an interlayer film of the first wiring layer;
After patterning the first layer wiring to form a groove pattern of the first wiring layer, after depositing a barrier metal such as tantalum (Ta), tantalum nitride (TaN), titanium (Ti) or titanium nitride (TiN), Manufacturing a semiconductor device as described above, comprising: forming a first layer wiring by chemical mechanical polishing by forming a metal such as tungsten (W), copper (Cu), and an alloy containing copper by sputtering or plating. Is the method.

In a preferred embodiment of the present invention,
After the interlayer film etching process of the contact hole on the columnar silicon layer and the contact hole on the gate wiring,
Perform the interlayer film etching process of the contact hole on the planar silicon layer under the columnar silicon layer,
Thereafter, the contact stopper on the contact hole on the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer are etched. is there.

In a preferred embodiment of the present invention,
After the interlayer etching process of the contact hole on the planar silicon layer below the columnar silicon layer,
Perform an interlayer etching process between the contact hole on the top of the columnar silicon layer and the contact hole on the gate wiring,
Thereafter, the contact stopper on the contact hole on the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer are etched. is there.

In a preferred embodiment of the present invention,
After the interlayer film etching process of the contact hole in the upper part of the columnar silicon layer,
Perform an interlayer film etching process of the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer,
Thereafter, the contact stopper on the contact hole on the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer are etched. is there.

In a preferred embodiment of the present invention,
After the interlayer etching process of the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer,
Perform the interlayer film etching process of the contact hole at the top of the columnar silicon layer,
Thereafter, the contact stopper on the contact hole on the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer are etched. is there.

In a preferred embodiment of the present invention,
A semiconductor device,
A planar semiconductor layer formed on a substrate and having a second conductivity type semiconductor layer formed thereon, wherein the second conductivity type semiconductor layer is a planar semiconductor layer in which a compound of a metal and a semiconductor is formed;
A columnar first conductive type semiconductor layer formed on the planar semiconductor layer and having a second conductive type semiconductor layer formed thereon, wherein a compound of a metal and a semiconductor is formed on the second conductive type semiconductor layer. A formed columnar first conductivity type semiconductor layer;
A gate insulating film formed around the columnar first conductivity type semiconductor layer;
A gate electrode surrounding the gate insulating film, in which a compound of a metal and a semiconductor is formed;
An insulating film formed in a sidewall shape on the upper side wall of the columnar first conductive semiconductor layer on the gate electrode, and formed in a sidewall shape on the side wall of the gate electrode;
It is a semiconductor device characterized by comprising.

In a preferred embodiment of the present invention,
The length from the center of the columnar first conductivity type semiconductor layer to the end of the planar semiconductor layer is:
A length from the center to the side wall of the columnar first conductive semiconductor layer;
A thickness of the gate insulating film;
The thickness of the gate electrode;
The insulating film formed in a sidewall shape on the side wall of the gate electrode;
The semiconductor device as described above, which is larger than the sum of

In a preferred embodiment of the present invention,
The thickness of the said gate electrode is larger than the thickness of the said insulating film formed in the side wall shape on the upper side wall of the said column-shaped 1st conductivity type semiconductor layer above the gate electrode. is there.

In the present invention,
A method of manufacturing a semiconductor device, the step of forming a planar semiconductor layer on an oxide film formed on a substrate and forming a columnar first conductivity type semiconductor layer on the planar semiconductor layer;
Forming a second conductivity type semiconductor layer in a planar semiconductor layer below the columnar first conductivity type semiconductor layer;
Forming a gate insulating film and a gate electrode around the columnar first conductive semiconductor layer;
Forming an insulating film in a sidewall shape on the upper side wall of the first conductive type semiconductor layer in a columnar shape above the gate;
A step of forming an insulating film on the side wall of the gate in a sidewall shape, a step of forming a second conductivity type semiconductor layer on top of the columnar first conductivity type semiconductor layer,
Forming a metal-semiconductor compound in a second conductive semiconductor layer formed in a planar semiconductor layer below the columnar first conductive semiconductor layer;
Forming a compound of a metal and a semiconductor in a second conductivity type semiconductor layer formed on the top of the columnar first conductivity type semiconductor layer;
Forming a compound of metal and semiconductor on the gate;
Forming a contact on the second conductive semiconductor layer formed in the planar semiconductor layer below the columnar first conductive semiconductor layer;
Forming a contact on the second conductive type semiconductor layer formed on the upper part of the columnar first conductive type semiconductor layer, and reducing the resistance of the source, drain, and gate by the method of manufacturing a semiconductor device And a method for manufacturing an SGT in which a desired gate length, source and drain shapes, and a diameter of a columnar semiconductor are obtained.

In the present invention,
The length from the center of the columnar first conductivity type semiconductor layer to the end of the planar semiconductor layer is:
The length from the center of the columnar first conductivity type semiconductor layer to the side wall;
The thickness of the gate insulating film,
The thickness of the gate electrode,
The thickness of the insulating film formed in a sidewall shape on the side wall of the gate;
By being greater than the sum of
A compound of a metal and a semiconductor can be formed on the second conductive semiconductor layer formed on the planar semiconductor layer below the columnar first conductive semiconductor layer,
The resistance of the second conductive semiconductor layer formed in the planar semiconductor layer below the columnar first conductive semiconductor layer can be reduced.

In the present invention,
The thickness of the gate electrode is
By being larger than the thickness of the insulating film formed in a sidewall shape on the upper side wall of the first conductive type semiconductor layer in the upper part of the gate and the columnar shape,
Metal and semiconductor compounds can be formed on the gate electrode,
The resistance of the gate electrode can be reduced.

In the present invention,
A silicon layer for forming a columnar first conductivity type silicon layer and a planar silicon layer is formed on the oxide film formed on the substrate,
Forming a pad oxide film on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer;
Impurity implantation for threshold adjustment is performed on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer through the pad oxide film, and annealing is performed for impurity activation and diffusion. Homogenizing the impurity distribution of the silicon layer forming the first conductivity type silicon layer and the planar silicon layer;
Including a step of forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer,
By using the pad oxide film formed to relieve stress between the silicon nitride film and silicon formed in the next process as a through oxide film during impurity implantation, the number of manufacturing processes can be reduced, Cost can be reduced.

In the present invention,
A silicon layer for forming a columnar first conductivity type silicon layer and a planar silicon layer is formed on the oxide film formed on the substrate,
Forming a pad oxide film on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer, and forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer And a process of
Forming a silicon oxide film on the silicon nitride film;
A step of applying a resist, forming a pattern in which the columnar first conductivity type silicon layer is inverted by lithography using lithography, and forming a hole penetrating the silicon oxide film at a position where the columnar first conductivity type silicon layer is formed When,
Forming amorphous silicon or polysilicon so as to fill holes formed in the silicon oxide film;
Polishing and removing the amorphous silicon or polysilicon of the silicon oxide film by chemical mechanical polishing;
By removing the silicon oxide film by etching,
Forming an amorphous silicon or polysilicon mask as a second hard mask;
By sacrificing the amorphous silicon or polysilicon mask to reduce the dimensions of the amorphous silicon or polysilicon mask and removing the silicon oxide film on the surface of the amorphous silicon or polysilicon mask by etching;
By reducing the column diameter of the columnar first conductivity type silicon layer formed later, the short channel effect of the transistor can be suppressed and the leakage current can be reduced.

In the present invention,
A silicon layer for forming a columnar first conductivity type silicon layer and a planar silicon layer is formed on the oxide film formed on the substrate,
Forming a pad oxide film on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer, and forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer And a process of
Forming a silicon oxide film on the silicon nitride film;
A step of applying a resist, forming a pattern in which the columnar first conductivity type silicon layer is inverted by lithography using lithography, and forming a hole penetrating the silicon oxide film at a position where the columnar first conductivity type silicon layer is formed When,
By depositing an oxide film and performing etch back to reduce the diameter of the hole penetrating the silicon oxide film,
By reducing the column diameter of the columnar first conductivity type silicon layer formed later, the short channel effect of the transistor can be suppressed and the leakage current can be reduced.

In the present invention,
Using the amorphous silicon or polysilicon mask as the second hard mask as a mask, etching the silicon nitride film and the pad oxide film by dry etching to form a silicon nitride film mask as the first hard mask;
By using the first hard mask and the second hard mask as a mask, a step of forming a columnar first conductivity type silicon layer by dry etching,
The amorphous silicon or polysilicon mask that is the second hard mask is all etched, and the plasma emission intensity that can be detected by the dry etching apparatus changes. By detecting this change in plasma emission intensity, The end point can be detected, and the height of the columnar first conductivity type silicon layer can be controlled.

In the present invention,
Since the thickness of the amorphous silicon or polysilicon mask as the second hard mask is smaller than the height of the columnar first conductivity type silicon layer, the end point of dry etching can be detected.

In the present invention,
From relief of unevenness on the side wall of the columnar first conductivity type silicon layer that becomes the channel part, removal of the silicon surface in which carbon or the like is implanted during dry etching, and contamination of by-products generated during dry etching in the next process Sacrificial oxidation of the formed columnar first conductivity type silicon layer to protect the columnar first conductivity type silicon layer;
Applying a resist and forming a pattern of a second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer by lithography using lithography;
Including a step of dry etching the planar silicon layer to form a planar silicon layer below the columnar first conductivity type silicon layer and removing the resist;
Since the oxide film formed by sacrificial oxidation is used as the first conductive type silicon layer protective film, the number of manufacturing steps can be reduced and the manufacturing cost can be reduced.

In the present invention,
Using the sacrificial oxide film formed during the sacrificial oxidation of the first conductivity type silicon layer as a through oxide film, impurities of the second conductivity type are introduced into the surface of the planar silicon layer by impurity implantation or the like, and the lower portion of the columnar first conductivity type silicon layer is introduced. By forming a second conductivity type silicon layer to be formed on the planar silicon layer of
Since the oxide film formed by sacrificial oxidation is used as the first conductive type silicon layer protective film and further as a through oxide film at the time of impurity implantation, the number of manufacturing steps can be reduced and the manufacturing cost can be reduced. it can.

In the present invention,
The column diameter of the columnar first conductivity type silicon layer is
By being smaller than the column diameter of the silicon nitride film mask which is the first hard mask,
Impurities can be prevented from being implanted from the side walls of the first conductivity type silicon layer during implantation.

In the present invention,
The implantation angle of the impurity implantation used for forming the second conductivity type silicon layer formed in the planar silicon layer below the columnar first conductivity type silicon layer is 0 to 6 degrees,
Impurities can be prevented from being implanted from the side wall of the columnar first conductivity type silicon layer during implantation.

In the present invention,
By forming a second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer without implanting impurities into the upper portion of the columnar first conductivity type semiconductor layer,
Since the implantation conditions of the upper part of the columnar first conductivity type silicon layer and the planar silicon layer below the columnar first conductivity type silicon layer can be easily optimized, the short channel effect can be suppressed and the leakage current can be suppressed. it can.

In the present invention,
A step of removing the sacrificial oxide film by etching, forming a gate insulating film such as a silicon oxide film or a silicon nitride film, and forming amorphous silicon or polysilicon as a gate electrode so as to embed a columnar first conductivity type silicon layer. When,
By polishing amorphous silicon or polysilicon by chemical mechanical polishing and flattening the upper surface of the gate electrode,
In chemical mechanical polishing, by using a silicon nitride film as a first hard mask as a stopper for chemical mechanical polishing,
The chemical mechanical polishing amount can be suppressed with good reproducibility.

In the present invention,
Etching back amorphous silicon or polysilicon which is a gate electrode to form a gate electrode having a desired gate length;
By oxidizing the surface of amorphous silicon or polysilicon, which is the gate electrode, and forming a silicon oxide film on the amorphous silicon or polysilicon surface,
This silicon oxide film protects the upper surface of the gate from wet or dry processing performed in a later process, thereby suppressing variations in gate length, that is, variations in gate length and damage to the gate insulating film from the upper surface of the gate. Can do.

In the present invention,
Forming a silicon nitride film having a thickness greater than that of a desired gate electrode;
Etching back the silicon nitride film and etching the silicon oxide film to form a silicon nitride film sidewall,
Since the film thickness of the silicon nitride film sidewall becomes the film thickness of the gate electrode, it is possible to form a gate electrode having a desired film thickness by adjusting the film thickness of the silicon nitride film and the etch back conditions. ,
An antireflection film layer (BARC layer) and a resist are applied, and a gate wiring pattern is formed from the resist using lithography.
Etching the antireflection film layer (BARC layer) and the amorphous silicon or polysilicon that is the gate electrode using the resist as a mask to form a gate electrode and a gate wiring pattern;
Removing the silicon nitride film and the silicon nitride film side wall on the columnar first conductivity type silicon layer by dry etching or wet etching;
A silicon nitride film is formed,
The silicon nitride film is etched back to expose the second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer and the upper portion of the columnar first conductivity type silicon layer, and the gate electrode A silicon nitride film side wall is formed on the upper side wall of the first conductive type silicon layer of the columnar shape via a gate insulating film, and a silicon nitride film side wall, that is, an insulating film side wall is formed on the side wall of the gate electrode. Process,
Introducing a second conductivity type impurity into the upper portion of the columnar first conductivity type silicon layer by impurity implantation or the like, and forming a second conductivity type silicon layer above the columnar first conductivity type silicon layer;
Sputtering a metal film such as nickel (Ni) or cobalt (Co) and applying heat treatment,
A second conductivity type silicon layer formed on a planar silicon layer below the columnar first conductivity type silicon layer;
The surface of the second conductivity type silicon layer formed on the top of the columnar first conductivity type silicon layer is compounded with metal and semiconductor, and the unreacted metal film is removed to remove the surface of the lower portion of the columnar first conductivity type silicon layer. A step of forming a compound of a metal and a semiconductor on the second conductivity type silicon layer formed on the planar silicon layer and the second conductivity type silicon layer formed on the top of the columnar first conductivity type silicon layer;
The second conductive silicon layer formed on the planar silicon layer below the gate electrode and the columnar first conductivity type silicon layer and the second conductivity formed on the columnar first conductivity type silicon layer by the silicon nitride film sidewall. Because the mold silicon layer is separated
A second conductive silicon layer formed on the planar silicon layer under the gate electrode and the columnar first conductivity type silicon layer made of a metal-semiconductor compound and a second conductivity formed on the columnar first conductivity type silicon layer. Type silicon layer can be prevented from short circuit,
By covering the side wall of the upper part of the columnar first conductivity type silicon layer with a silicon nitride film, the compounding of metal and semiconductor from the side wall of the columnar first conductivity type silicon layer can be controlled.

In the present invention,
Forming a silicon nitride film or the like as a contact stopper;
A step of planarizing by chemical mechanical polishing after forming a silicon oxide film as an interlayer film;
On the second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer, on the gate electrode, and on the second conductivity type silicon layer formed on the top of the columnar first conductivity type silicon layer And a step of forming a contact hole by etching,
After forming a barrier metal such as tantalum (Ta), tantalum nitride (TaN), titanium (Ti), or titanium nitride (TiN) in the contact hole, a metal such as tungsten (W), copper (Cu), or an alloy containing copper Forming a contact plug by chemical mechanical polishing, forming a film by sputtering or plating, and
Forming a first layer wiring etching stopper such as silicon carbide (SiC), and subsequently forming a low dielectric constant film that is an interlayer film of the first wiring layer;
Patterning the first layer wiring to form a groove pattern of the first wiring layer;
After depositing a barrier metal such as tantalum (Ta), tantalum nitride (TaN), titanium (Ti), or titanium nitride (TiN), a metal such as tungsten (W), copper (Cu), or an alloy containing copper is sputtered. The resistance of the contact can be reduced by the process of forming the film by plating and forming the first layer wiring by chemical mechanical polishing.

In the present invention,
After the interlayer film etching process of the contact hole on the columnar silicon layer and the contact hole on the gate wiring,
Perform the interlayer film etching process of the contact hole on the planar silicon layer under the columnar silicon layer,
After that, by etching the contact holes on the upper part of the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer,
Optimization of etching conditions for contact holes on the pillar-shaped silicon layer and contact holes on the gate wiring,
It is also possible to optimize the etching conditions for the contact holes on the planar silicon layer below the columnar silicon layer.

In the present invention,
After the interlayer etching process of the contact hole on the planar silicon layer below the columnar silicon layer,
Perform an interlayer etching process between the contact hole on the top of the columnar silicon layer and the contact hole on the gate wiring,
After that, by etching the contact holes on the upper part of the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer,
Optimization of etching conditions for contact holes on the pillar-shaped silicon layer and contact holes on the gate wiring,
It is also possible to optimize the etching conditions for the contact holes on the planar silicon layer below the columnar silicon layer.

In the present invention,
After the interlayer film etching process of the contact hole in the upper part of the columnar silicon layer,
Perform an interlayer film etching process of the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer,
After that, by etching the contact holes on the upper part of the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer,
Optimization of contact hole etching conditions above the columnar silicon layer,
It is also possible to optimize the etching conditions for the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer.

In the present invention,
After the interlayer etching process of the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer,
Perform the interlayer film etching process of the contact hole at the top of the columnar silicon layer,
After that, by etching the contact holes on the upper part of the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer,
It is also possible to optimize the etching conditions for the contact hole on the upper part of the columnar silicon layer and the etching conditions for the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer.

In the present invention,
A semiconductor device,
A planar semiconductor layer formed on a substrate and having a second conductivity type semiconductor layer formed thereon, wherein the second conductivity type semiconductor layer is a planar semiconductor layer in which a compound of a metal and a semiconductor is formed;
A columnar first conductive type semiconductor layer formed on the planar semiconductor layer and having a second conductive type semiconductor layer formed thereon, wherein a compound of a metal and a semiconductor is formed on the second conductive type semiconductor layer. A formed columnar first conductivity type semiconductor layer;
A gate insulating film formed around the columnar first conductivity type semiconductor layer;
A gate electrode surrounding the gate insulating film, in which a compound of a metal and a semiconductor is formed;
An insulating film formed in a sidewall shape on the upper side wall of the columnar first conductive semiconductor layer on the gate electrode, and formed in a sidewall shape on the side wall of the gate electrode;
By having
The second conductivity type semiconductor layer formed on the planar semiconductor layer below the columnar first conductivity type semiconductor layer, the gate electrode, and the second conductivity type semiconductor layer formed above the columnar first conductivity type semiconductor layer are different. A voltage can be applied, the second conductivity type semiconductor layer formed on the planar semiconductor layer below the columnar first conductivity type semiconductor layer, the gate electrode, the second conductivity type formed on the columnar first conductivity type semiconductor layer. The resistance of the semiconductor layer can be reduced.

In the present invention,
The length from the center of the columnar first conductivity type semiconductor layer to the end of the planar semiconductor layer is:
A length from the center to the side wall of the columnar first conductive semiconductor layer;
A thickness of the gate insulating film;
The thickness of the gate electrode;
The insulating film formed in a sidewall shape on the side wall of the gate electrode;
Is greater than the sum of
A compound of a metal and a semiconductor can be formed on the second conductive semiconductor layer formed on the planar semiconductor layer below the columnar first conductive semiconductor layer,
The resistance of the second conductive semiconductor layer formed in the planar semiconductor layer below the columnar first conductive semiconductor layer can be reduced.

In the present invention,
A thickness of the gate electrode is larger than a thickness of the insulating film formed in a sidewall shape on the upper side wall of the columnar first conductive semiconductor layer on the gate electrode;
A compound of a metal and a semiconductor can be formed on the gate electrode, and the resistance of the gate electrode can be reduced.

Manufacturing method of semiconductor device of the present invention The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. FIG. 36 is a cross-sectional view of FIG. FIG. 36 is a cross-sectional view of FIG. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention. The top view which shows the manufacture example of the semiconductor device which concerns on this invention. A-A 'sectional process drawing showing a manufacturing example of a semiconductor device according to the present invention.

FIG. 35A is a plan view of an NMOS SGT formed using the present invention, and FIG. 35B is a cross-sectional view taken along the cut line AA ′ of FIG. It is. The NMOS SGT formed using the present invention will be described below with reference to FIG.
A planar silicon layer 112 is formed on the BOX layer 120 formed on the Si substrate 111, a columnar silicon layer 113 is formed on the planar silicon layer 112, and the gate insulating film 124 and the periphery of the columnar silicon layer 113 are formed. A gate electrode 141 is formed. An N + source diffusion layer 200 is formed on the planar silicon layer 112 below the columnar silicon layer 113, and an N + drain diffusion layer 201 is formed on the columnar silicon layer 113. A contact 174 is formed on the N + source diffusion layer 200, a contact 173 is formed on the N + drain diffusion layer 201, and a contact 172 is formed on the gate wiring 141b extending from the gate electrode 141a.
FIG. 36 is a cross-sectional view taken along the cut line BB ′ of FIG. In order to reduce the resistance of the source region, it is necessary to form a silicide 153 in the source region. Therefore, in order to form silicide in the planar silicon layer 112, the following conditions are necessary.
Wa> Wp + Wox + Wg + Ws Formula (1)
Here, Wa is the length from the center of the silicon pillar 113 to the end of the planar silicon layer 112, Wp is the length from the center of the silicon pillar 113 to the side wall, Wox is the thickness of the gate oxide film 124, and Wg is the gate electrode 141. Ws is the width of the nitride film side wall 133, that is, the width of the insulating film.
FIG. 37 is a cross-sectional view along the cut line BB ′ of FIG. In order to reduce the resistance of the gate electrode 141, it is necessary to form a silicide 151 on the gate electrode 141. Therefore, in order to form the silicide 151 on the gate electrode 141, the following conditions are necessary.
Wg> Ws Formula (2)
Here, Wg is the width of the gate electrode 141, and Ws is the width of the nitride sidewall 134, that is, the width of the insulating film. By using a structure that satisfies the above conditions, parasitic resistance of the source, drain, and gate can be reduced and on-current can be increased.
The SGT performs transistor operation by connecting the N + source diffusion layer to the GND potential, connecting the N + drain diffusion layer to the Vcc potential, and applying a potential of 0 to Vcc to the gate electrode.
Further, the N + diffusion layer formed on the columnar silicon layer may be an N + source diffusion layer, and the N + diffusion layer formed on the planar silicon layer below the columnar silicon layer may be an N + drain diffusion layer.

An example of a manufacturing method for forming the SGT of the present invention will be described below with reference to FIGS. In these drawings, the same components are denoted by the same reference numerals. FIG. 1 shows a manufacturing process for forming the SGT of the present invention, and FIGS. 2 to 35 show an example of manufacturing the SGT according to the present invention. (A) is a plan view, and (b) shows a cross-sectional view of A-A ′.

Referring to FIG. 2, pad oxide film 121 is formed on SOI layer 110 using an SOI substrate in which BOX layer 120 is formed on Si substrate 111 and silicon layer 110 is formed on BOX layer 120. . Before forming the pad oxide film, lot formation may be performed, laser mark formation may be performed, and pad oxide film cleaning may be performed. Further, the pad oxide film thickness may be measured after the pad oxidation (steps 1, 2, 3, 4, 5 in FIG. 1).

Referring to FIG. 2, an impurity for adjusting a threshold value is implanted into the SOI layer through pad oxide film 121. Subsequently, annealing is performed to activate and diffuse the impurities, and the impurity distribution in the SOI layer is made uniform. By using the pad oxide film formed to relieve stress between the silicon nitride film and silicon formed in the next process as a through oxide film during impurity implantation, the number of manufacturing processes can be reduced, Cost can be reduced. (Fig. 1, Steps 6 and 7)

Referring to FIG. 3, a silicon nitride film 130 as a first hard mask is formed, and then a silicon oxide film 122 is formed. After the silicon nitride film is formed, the nitride film thickness may be measured. In addition, after the silicon oxide film is formed, the silicon oxide film thickness may be measured (steps 8, 9, 10, and 11 in FIG. 1).

Referring to FIG. 4, a resist is applied, a pattern is formed by inverting the columnar silicon layer with lithography using lithography, and a hole penetrating the silicon oxide film 122 is formed at a position where the columnar silicon layer is formed by dry etching. . After lithography, dimension measurement and inspection may be performed. Further, cleaning may be performed after etching (steps 12, 13, 14, 15, 16, 17, 18, 19 in FIG. 1).
Thereafter, referring to FIG. 38, an oxide film 129 is deposited,
Referring to FIG. 39, the diameter of the hole penetrating through silicon oxide film 122 can be reduced by performing etch back of oxide film 129.

Referring to FIG. 5, amorphous silicon or polysilicon 140 is formed so as to fill holes formed in silicon oxide film 122. Cleaning may be performed before depositing amorphous silicon or polysilicon. In addition, the film thickness may be measured after deposition (steps 20, 21, and 22 in FIG. 1).

Referring to FIG. 6, amorphous silicon or polysilicon 140 on silicon oxide film 122 is polished and removed by CMP (chemical mechanical polishing). The film thickness may be measured after polishing (steps 23 and 24 in FIG. 1).

Referring to FIG. 7, the silicon oxide film 122 is removed by wet etching using hydrofluoric acid or the like, or by dry etching, so that amorphous silicon or poly silicon serving as a second hard mask at the time of dry etching of the columnar silicon layer in a later process is obtained. Silicon 140 is formed (step 25 in FIG. 1).

Referring to FIG. 8, amorphous silicon or polysilicon 140 is sacrificial oxidized to form silicon oxide film 128, and the dimensions of amorphous silicon or polysilicon are reduced. Before sacrificial oxidation, cleaning before sacrificial oxidation may be performed. Further, the film thickness may be measured after oxidation (steps 26, 27, and 28 in FIG. 1). By this sacrificial oxidation, the dimensions of the columnar silicon layer 113 formed in FIG. 11 can be reduced. By reducing the diameter of the columnar silicon layer, the short channel effect can be suppressed and the leakage current can be reduced.

Referring to FIG. 9, silicon oxide film 128 on the surface of amorphous silicon or polysilicon 140 is removed by wet etching using hydrofluoric acid or dry etching (step 29 in FIG. 1).

Referring to FIG. 10, with the amorphous silicon or polysilicon 140 as the second hard mask as a mask, the silicon nitride film 130 and the pad oxide film 121 as the first hard mask are etched by dry etching (step in FIG. 1). 30, 31).

Referring to FIG. 11, columnar silicon layer 113 is formed by dry etching using silicon nitride film 130 as the first hard mask and amorphous silicon or polysilicon 140 as the second hard mask as a mask. After etching, organic matter removal, inspection using SEM, and step confirmation may be performed (steps 32, 33, 34, and 35 in FIG. 1). During dry etching, the amorphous silicon or polysilicon 140, which is the second hard mask, is also etched. When all of the amorphous silicon or polysilicon 140 is etched, the plasma emission intensity that can be detected by the dry etching apparatus changes. Therefore, by detecting the change in the plasma emission intensity, the end point of etching can be detected, and the height of the columnar silicon layer 113 can be stably controlled regardless of the etching rate.
In order to use the above end point detection method, the film thickness Tn (FIG. 10) of the amorphous silicon or polysilicon 140 before the columnar silicon layer dry etching needs to be formed smaller than the height Tp of the columnar silicon layer. .
At this time, the planar silicon layer 112 is formed on the buried oxide film layer 120.

Referring to FIG. 12, columnar silicon layer 113 and planar silicon layer 112 are used to alleviate unevenness on the side wall of columnar silicon layer 113 serving as a channel portion and to remove a silicon surface into which carbon or the like is implanted during dry etching. A sacrificial oxide film 123 is formed by sacrificing the surface.
Before sacrificial oxidation, cleaning before sacrificial oxidation may be performed. Further, the sacrificial oxide film thickness may be measured after the sacrificial oxidation (steps 36, 37, and 38 in FIG. 1).

Referring to FIG. 13, a resist 150 is applied, and a pattern of the source diffusion layer is formed from the resist using lithography. After lithography, overlay error measurement, dimension measurement, and inspection may be performed (steps 39, 40, 41, 42, and 43 in FIG. 1). At this time, the sacrificial oxide film 123 formed by the above-described sacrificial oxidation on the columnar silicon layer 113 and the planar silicon layer 112 protects the silicon surface from contamination such as by-products generated during the next dry etching. The

Referring to FIG. 14, planar silicon layer 112 is processed by dry etching, and planar silicon layer 112 is separated. (FIG. 1, steps 44 and 45)

Referring to FIG. 15, the resist is removed. Thereafter, inspection by SEM and step confirmation may be performed (steps 46, 47, and 48 in FIG. 1).

Referring to FIG. 16, impurities such as P and As are introduced into the surface of planar silicon layer 112 by impurity implantation or the like to form N + source diffusion layer 200 (steps 49 and 50 in FIG. 1). At this time, the number of manufacturing steps can be reduced by using the sacrificial oxide film 123 formed during the sacrificial oxidation of the columnar silicon layer 113 and the planar silicon layer 112 as a through oxide film.
In addition, when impurities are implanted from the side wall of the columnar silicon layer 113 during implantation, the transistor characteristics may fluctuate. Therefore, it is essential that the columnar silicon pillar widths Wp1 and Wp2 are smaller than the width Wn of the nitride film 130. However, Wp ₁ is the width of the lower part of the columnar silicon layer, and Wp ₂ is the width of the upper part of the columnar silicon layer.
Further, since impurities are not implanted from the side wall of the columnar silicon layer 113 at the time of implantation, it is preferable to implant the impurities at a small angle, that is, 0 degrees to 6 degrees.
In this step, the silicon nitride film 130 formed on the columnar silicon layer 113 is not implanted into the upper portion of the columnar silicon layer 113. The implantation into the N + source diffusion layer 200 is preferably 0 °, but the implantation into the drain diffusion layer, which will be formed later on the columnar silicon layer 113, is formed in a self-aligned manner with the gate electrode. It is preferable to inject it. By separately implanting the source diffusion layer formed on the planar silicon layer and the drain diffusion layer formed on the columnar silicon layer as described above, the respective implantation conditions can be easily optimized. The channel effect can be suppressed and the leakage current can be suppressed.

Referring to FIG. 17, sacrificial oxide film 123 is removed by wet etching using hydrofluoric acid or the like, and a silicon oxide film or a silicon oxynitride film is formed as gate insulating film 124. Before forming the gate insulating film, cleaning before forming the gate may be performed. Further, after the insulating film is formed, the film thickness may be measured (steps 51, 52, 53, and 54 in FIG. 1).

Referring to FIG. 18, amorphous silicon or polysilicon 141 is formed as a gate conductive film so as to bury columnar silicon layer 113. After film formation, the film thickness may be measured (steps 55 and 56 in FIG. 1).

Referring to FIG. 19, amorphous silicon or polysilicon 141 is polished by CMP (Chemical Mechanical Polishing) to planarize the upper surface of the gate conductive film. In CMP, by using the silicon nitride film 130 which is the first hard mask as a CMP stopper, the CMP polishing amount can be controlled with good reproducibility (step 57 in FIG. 1).

Referring to FIG. 20, the gate length is determined by etching back amorphous silicon or polysilicon 141 which is a gate conductive film (step 58 in FIG. 1).

Referring to FIG. 21, the surface of amorphous silicon or polysilicon 141 which is a gate conductive film is oxidized to form a silicon oxide film 125 on the surface of amorphous silicon or polysilicon 141. Cleaning may be performed before oxidation (steps 59 and 60 in FIG. 1). The silicon oxide film 125 protects the upper surface of the gate from wet processing or dry processing performed in a later process, so that variation in gate length, that is, variation in gate length and damage to the gate insulating film 124 from the upper surface of the gate are suppressed. can do.

Referring to FIG. 22, a silicon nitride film 131 having a thickness larger than that of a desired gate electrode is formed. After film formation, the film thickness may be measured (steps 61 and 62 in FIG. 1).

Referring to FIG. 23, silicon nitride film 131 is etched back to form silicon nitride film 131 sidewalls. At this time, the silicon oxide film 125 is also etched. Organic substances may be removed after the etch back. In addition, shape measurement may be performed (steps 63, 64, and 65 in FIG. 1). Since the film thickness of the silicon nitride film sidewall 131 becomes the film thickness of the gate electrode, the gate electrode having a desired film thickness can be formed by adjusting the film thickness of the silicon nitride film 131 and the etch back conditions. it can.

Referring to FIG. 24, BARC layer 161 and resist 160 are applied, and a gate wiring pattern is formed from resist 160 using lithography. After pattern formation, overlay error measurement, dimension measurement, and inspection may be performed (steps 66, 67, 68, 69, and 70 in FIG. 1).

Referring to FIG. 25, using resist 160 as a mask, BARC layer 161 and amorphous silicon or polysilicon 141 as a gate conductive film are etched to form gate electrode 141a and gate wiring 141b, and the resist and the BARC layer are removed. To do. After etching, dimension measurement may be performed (steps 71, 72, 73, 74, and 75 in FIG. 1).

Referring to FIG. 26, silicon nitride film 130 and silicon nitride film sidewall 131 and silicon oxide films 121 and 125 on columnar silicon 113 and oxide film 124 on the planar silicon layer are removed by dry etching or wet etching (see FIG. 26). FIG. 1, step 76). After removing the silicon nitride film by dry etching and then removing the silicon oxide film by wet etching, damage to the gate insulating film can be suppressed.
When the nitride film is removed by wet etching, it is desirable to oxidize before etching to form an oxide film on the surface of the gate electrode, and then to perform wet etching of the nitride film.

Referring to FIG. 27, a silicon nitride film 132 is formed. Cleaning may be performed before film formation.
Further, after the film formation, the film thickness may be measured (steps 77, 78, and 79 in FIG. 1).

Referring to FIG. 28, silicon nitride film 132 is etched back to expose the upper surface of N + source diffusion layer 200 and the upper surface of columnar silicon 113, and the side wall of columnar silicon layer 113 and the side wall of gate 141 are exposed to silicon nitride film 133. , 134, ie, insulating film sidewalls. Organic substances may be removed after the etching. Further, the shape may be measured (steps 80, 81, and 82 in FIG. 1). Since the nitride film 133, 134 separates the gate electrode 141, the source diffusion layer 200, and the N + drain diffusion layer that will be formed later on the columnar silicon, the gate electrode 141, the source diffusion layer 200, and the drain diffusion layer are short-circuited by silicide. Can be prevented. Further, by covering the side wall of the upper part of the columnar silicon 113 with the nitride film 134, silicidation from the side wall of the columnar silicon layer 113 can be controlled.
When the silicon nitride films 133 and 134 are silicon oxide films, they are etched by hydrofluoric acid used for cleaning / peeling process and silicide pretreatment, so that the silicon nitride films 133 and 134 are films not soluble in hydrofluoric acid such as silicon nitride films. Preferably there is.

Referring to FIG. 29, impurities such as P and As are introduced into the upper portion of columnar silicon layer 113 by impurity implantation or the like to form N + drain diffusion layer 201 (steps 83 and 84 in FIG. 1).

Referring to FIG. 30, a metal film such as Ni or Co is sputtered, and heat treatment is performed to form the surface of source 200 and drain 201 with a compound of a metal and a semiconductor, that is, silicidation, and unreacted metal. The silicide layer 152 on the drain diffusion layer 201 and the silicide layer 153 on the source diffusion layer 200 are formed by removing the film. Before forming the silicide layer, the oxide film may be removed (steps 85, 86, 87, 88 in FIG. 1).
By forming the silicide layer 151 on the gate electrode 141 surrounding the columnar silicon layer, the parasitic resistance of the gate electrode 141 is reduced. In order to form the silicide layer 151 on the gate electrode 141, Wg> Ws in the film thickness Wg of the gate electrode 141 and the film thickness Ws of the silicon nitride film 134, and the surface of the gate electrode 141 Should be exposed.

Referring to FIG. 31, a silicon nitride film or the like is formed as contact stopper 135 (step 89 in FIG. 1).

Referring to FIG. 32, after a silicon oxide film is formed as interlayer film 126, it is planarized by CMP. After the film formation, the silicon oxide film thickness may be measured. Further, after the CMP, the silicon oxide film thickness and the silicon nitride film thickness may be measured (steps 90, 91, 92, 93, 94 in FIG. 1).

Referring to FIG. 33, contact holes are formed by etching on drain diffusion layer 201 above columnar silicon layer 113, on gate wiring 141b, and on source diffusion layer 200. Before etching the contact hole, contact mask exposure is performed. Further, dimension measurement, overlay error measurement, and inspection may be performed. Further, after the contact hole is formed, the plasma resist is peeled off. Thereafter, cleaning may be performed, and dimension measurement, oxide film thickness measurement, inspection, and wafer container replacement may be performed (steps 95, 96, 97, 98, 99, 100, 101, 102, 103, 104, 105 in FIG. 1). 106, 107).
Further, referring to FIG. 40, the etching depth of the contact hole on the columnar silicon layer and the contact hole on the gate wiring is different from the etching depth of the contact hole on the planar silicon layer below the columnar silicon layer. The interlayer film between the contact hole on the silicon layer and the contact hole on the gate wiring is etched. With reference to FIG. 41, the interlayer between the contact holes on the planar silicon layer below the columnar silicon layer is masked using the resist 162 as a mask. The contact stopper may be etched after the film is etched and the interlayer film is etched. Further, referring to FIG. 42, etching of the interlayer film of the contact hole above the columnar silicon layer is performed,
Referring to FIG. 43, the interlayer film of the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer is etched,
The contact stopper may be etched after the interlayer film is etched.
Etching the interlayer film in the contact hole above the columnar silicon layer;
By separately etching the interlayer film of the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer,
Optimization of contact hole etching conditions above the columnar silicon layer,
It is also possible to optimize the etching conditions for the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer.

Referring to FIG. 34, a film of tantalum (Ta) or tantalum nitride (TaN) as barrier metal 171 is formed in the contact hole, and then copper (Cu) 170 is formed by sputtering or plating, and contact 172 is formed by CMP. , 173, 174. Titanium (Ti) or titanium nitride (TiN) may be used as the barrier metal. Alternatively, tungsten (W) may be used. Further, an alloy containing copper may be used. After film formation, backside treatment, inspection, and heat treatment may be performed. Further, inspection may be performed after CMP (steps 108, 109, 110, 111, 112, 113, 114 in FIG. 1).

Referring to FIG. 35, SiC (silicon carbide) 180 is formed as an etching stopper for the first layer wiring, and subsequently, a Low-k film 190 which is an interlayer film of the first wiring layer is formed. At this time, the film thickness may be measured and inspected (steps 115, 116, 117, and 118 in FIG. 1).
Subsequently, the first layer wiring is patterned to form a groove pattern of the first wiring layer. After patterning, dimension measurement, overlay error measurement, and inspection may be performed. After forming the groove pattern, the plasma resist may be stripped and inspected (steps 119, 120, 121, 122, 123, 124, 125, 126 in FIG. 1). Subsequently, after forming Ta or TaN as the barrier metal 175, Cu 176 is formed by sputtering or plating, and first layer wirings 177, 178, and 179 are formed by CMP. Titanium (Ti) or titanium nitride (TiN) may be used as the barrier metal. Alternatively, tungsten (W) may be used. After film formation, backside treatment, inspection, and heat treatment may be performed. Further, inspection may be performed after CMP (steps 127, 128, 129, 130, 131, 132, 133 in FIG. 1).
Thereafter, nitride film deposition, interlayer insulating film deposition, and interlayer insulating film thickness measurement may be performed (steps 134, 135, and 136 in FIG. 1).
Also, pad via mask exposure, dimension measurement, overlay error measurement, inspection, pad via etching, plasma resist peeling, post-etch cleaning, dimension measurement, oxide film thickness measurement, inspection, metal pre-cleaning, wafer container replacement, aluminum deposition, backside Processing, pad aluminum exposure, overlay error measurement, dimension measurement, inspection, pad aluminum etching, plasma resist stripping, cleaning after metal etching, optical inspection, SEM inspection, oxide film thickness measurement, insulation film deposition, insulation film thickness measurement, insulation film Exposure, optical inspection, insulating film etching, plasma resist peeling, insulating film cleaning, inspection, and heat treatment may be performed (FIG. 1 steps 137, 138, 139, 140, 141, 142, 143, 144, 145, 146, 147). 148, 149, 150, 151, 152, 153, 154, 155 156,157,158,159,160,161,162,163,164,165,166,167,168,169,170,171,172,173,174,175,176).
Multi-layer wiring may be performed before the pad via.

〔Effect of the invention〕
As mentioned above,
In the present invention,
A method of manufacturing a semiconductor device, the step of forming a planar semiconductor layer on an oxide film formed on a substrate and forming a columnar first conductivity type semiconductor layer on the planar semiconductor layer;
Forming a second conductivity type semiconductor layer in a planar semiconductor layer below the columnar first conductivity type semiconductor layer;
Forming a gate insulating film and a gate electrode around the columnar first conductive semiconductor layer;
Forming an insulating film in a sidewall shape on the upper side wall of the first conductive type semiconductor layer in a columnar shape above the gate;
Forming an insulating film on the side wall of the gate in a sidewall shape;
Forming a second conductive semiconductor layer on top of the columnar first conductive semiconductor layer;
Forming a metal-semiconductor compound in a second conductive semiconductor layer formed in a planar semiconductor layer below the columnar first conductive semiconductor layer;
Forming a compound of a metal and a semiconductor in a second conductivity type semiconductor layer formed on the top of the columnar first conductivity type semiconductor layer;
Forming a compound of metal and semiconductor on the gate;
Forming a contact on the second conductive semiconductor layer formed in the planar semiconductor layer below the columnar first conductive semiconductor layer;
Forming a contact on the second conductive type semiconductor layer formed on the upper part of the columnar first conductive type semiconductor layer, and reducing the resistance of the source, drain, and gate by the method of manufacturing a semiconductor device And a method for manufacturing an SGT in which a desired gate length, source and drain shapes, and a diameter of a columnar semiconductor are obtained.

In the present invention,
The length from the center of the columnar first conductivity type semiconductor layer to the end of the planar semiconductor layer is:
The length from the center of the columnar first conductivity type semiconductor layer to the side wall;
The thickness of the gate insulating film,
The thickness of the gate electrode,
The thickness of the insulating film formed in a sidewall shape on the side wall of the gate;
By being greater than the sum of
A compound of a metal and a semiconductor can be formed on the second conductive semiconductor layer formed on the planar semiconductor layer below the columnar first conductive semiconductor layer,
The resistance of the second conductive semiconductor layer formed in the planar semiconductor layer below the columnar first conductive semiconductor layer can be reduced.

In the present invention,
The thickness of the gate electrode is
By being larger than the thickness of the insulating film formed in a sidewall shape on the upper side wall of the first conductive type semiconductor layer in the upper part of the gate and the columnar shape,
Metal and semiconductor compounds can be formed on the gate electrode,
The resistance of the gate electrode can be reduced.

In the present invention,
A silicon layer for forming a columnar first conductivity type silicon layer and a planar silicon layer is formed on the oxide film formed on the substrate,
Forming a pad oxide film on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer;
Impurity implantation for threshold adjustment is performed on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer through the pad oxide film, and annealing is performed for impurity activation and diffusion. Homogenizing the impurity distribution of the silicon layer forming the first conductivity type silicon layer and the planar silicon layer;
Including a step of forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer,
By using the pad oxide film formed to relieve stress between the silicon nitride film and silicon formed in the next process as a through oxide film during impurity implantation, the number of manufacturing processes can be reduced, Cost can be reduced.

In the present invention,
A silicon layer for forming a columnar first conductivity type silicon layer and a planar silicon layer is formed on the oxide film formed on the substrate,
Forming a pad oxide film on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer, and forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer And a process of
Forming a silicon oxide film on the silicon nitride film;
A step of applying a resist, forming a pattern in which the columnar first conductivity type silicon layer is inverted by lithography using lithography, and forming a hole penetrating the silicon oxide film at a position where the columnar first conductivity type silicon layer is formed When,
Forming amorphous silicon or polysilicon so as to fill holes formed in the silicon oxide film;
Polishing and removing the amorphous silicon or polysilicon of the silicon oxide film by chemical mechanical polishing;
By removing the silicon oxide film by etching,
Forming an amorphous silicon or polysilicon mask as a second hard mask;
By sacrificing the amorphous silicon or polysilicon mask to reduce the dimensions of the amorphous silicon or polysilicon mask and removing the silicon oxide film on the surface of the amorphous silicon or polysilicon mask by etching;
By reducing the column diameter of the columnar first conductivity type silicon layer formed later, the short channel effect of the transistor can be suppressed and the leakage current can be reduced.

In the present invention,
A silicon layer for forming a columnar first conductivity type silicon layer and a planar silicon layer is formed on the oxide film formed on the substrate,
Forming a pad oxide film on the silicon layer forming the columnar first conductivity type silicon layer and the planar silicon layer, and forming a silicon nitride film used as a mask when forming the columnar first conductivity type silicon layer And a process of
Forming a silicon oxide film on the silicon nitride film;
A step of applying a resist, forming a pattern in which the columnar first conductivity type silicon layer is inverted by lithography using lithography, and forming a hole penetrating the silicon oxide film at a position where the columnar first conductivity type silicon layer is formed When,
Depositing an oxide film and performing etch back to reduce the diameter of the hole penetrating the silicon oxide film;
By including
By reducing the column diameter of the columnar first conductivity type silicon layer formed later, the short channel effect of the transistor can be suppressed and the leakage current can be reduced.

In the present invention,
Using the amorphous silicon or polysilicon mask as the second hard mask as a mask, etching the silicon nitride film and the pad oxide film by dry etching to form a silicon nitride film mask as the first hard mask;
By using the first hard mask and the second hard mask as a mask, a step of forming a columnar first conductivity type silicon layer by dry etching,
The amorphous silicon or polysilicon mask that is the second hard mask is all etched, and the plasma emission intensity that can be detected by the dry etching apparatus changes. By detecting this change in plasma emission intensity, The end point can be detected, and the height of the columnar first conductivity type silicon layer can be controlled.

In the present invention,
Since the thickness of the amorphous silicon or polysilicon mask as the second hard mask is smaller than the height of the columnar first conductivity type silicon layer, the end point of dry etching can be detected.

In the present invention,
From relief of unevenness on the side wall of the columnar first conductivity type silicon layer that becomes the channel part, removal of the silicon surface in which carbon or the like is implanted during dry etching, and contamination of by-products generated during dry etching in the next process Sacrificial oxidation of the formed columnar first conductivity type silicon layer to protect the columnar first conductivity type silicon layer;
Applying a resist and forming a pattern of a second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer by lithography using lithography;
Including a step of dry etching the planar silicon layer to form a planar silicon layer below the columnar first conductivity type silicon layer and removing the resist;
Since the oxide film formed by sacrificial oxidation is used as the first conductive type silicon layer protective film, the number of manufacturing steps can be reduced and the manufacturing cost can be reduced.

In the present invention,
Using the sacrificial oxide film formed during the sacrificial oxidation of the first conductivity type silicon layer as a through oxide film, impurities of the second conductivity type are introduced into the surface of the planar silicon layer by impurity implantation or the like, and the lower portion of the columnar first conductivity type silicon layer is introduced. By forming a second conductivity type silicon layer to be formed on the planar silicon layer of
Since the oxide film formed by sacrificial oxidation is used as the first conductive type silicon layer protective film and further as a through oxide film at the time of impurity implantation, the number of manufacturing steps can be reduced and the manufacturing cost can be reduced. it can.

In the present invention,
The column diameter of the columnar first conductivity type silicon layer is
By being smaller than the column diameter of the silicon nitride film mask which is the first hard mask,
Impurities can be prevented from being implanted from the side walls of the first conductivity type silicon layer during implantation.

In the present invention,
The implantation angle of the impurity implantation used for forming the second conductivity type silicon layer formed in the planar silicon layer below the columnar first conductivity type silicon layer is 0 to 6 degrees,
Impurities can be prevented from being implanted from the side wall of the columnar first conductivity type silicon layer during implantation.

In the present invention,
By forming a second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer without implanting impurities into the upper portion of the columnar first conductivity type semiconductor layer,
Since the implantation conditions of the upper part of the columnar first conductivity type silicon layer and the planar silicon layer below the columnar first conductivity type silicon layer can be easily optimized, the short channel effect can be suppressed and the leakage current can be suppressed. it can.

In the present invention,
A step of removing the sacrificial oxide film by etching, forming a gate insulating film such as a silicon oxide film or a silicon nitride film, and forming amorphous silicon or polysilicon as a gate electrode so as to embed a columnar first conductivity type silicon layer. When,
By polishing amorphous silicon or polysilicon by chemical mechanical polishing and flattening the upper surface of the gate electrode,
In chemical mechanical polishing, by using a silicon nitride film as a first hard mask as a stopper for chemical mechanical polishing,
The chemical mechanical polishing amount can be suppressed with good reproducibility.

In the present invention,
Etching back amorphous silicon or polysilicon which is a gate electrode to form a gate electrode having a desired gate length;
By oxidizing the surface of amorphous silicon or polysilicon, which is the gate electrode, and forming a silicon oxide film on the amorphous silicon or polysilicon surface,
This silicon oxide film protects the upper surface of the gate from wet or dry processing performed in a later process, thereby suppressing variations in gate length, that is, variations in gate length and damage to the gate insulating film from the upper surface of the gate. Can do.

In the present invention,
Forming a silicon nitride film having a thickness greater than that of a desired gate electrode;
Etching back the silicon nitride film and etching the silicon oxide film to form a silicon nitride film sidewall,
Since the film thickness of the silicon nitride film sidewall becomes the film thickness of the gate electrode, it is possible to form a gate electrode having a desired film thickness by adjusting the film thickness of the silicon nitride film and the etch back conditions. ,
An antireflection film layer (BARC layer) and a resist are applied, and a gate wiring pattern is formed from the resist using lithography.
Etching the antireflection film layer (BARC layer) and the amorphous silicon or polysilicon that is the gate electrode using the resist as a mask to form a gate electrode and a gate wiring pattern;
Removing the silicon nitride film and the silicon nitride film side wall on the columnar first conductivity type silicon layer by dry etching or wet etching;
A silicon nitride film is formed,
The silicon nitride film is etched back to expose the second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer and the upper portion of the columnar first conductivity type silicon layer, and the gate electrode A silicon nitride film side wall is formed on the upper side wall of the first conductive type silicon layer of the columnar shape via a gate insulating film, and a silicon nitride film side wall, that is, an insulating film side wall is formed on the side wall of the gate electrode. Process,
Introducing a second conductivity type impurity into the upper portion of the columnar first conductivity type silicon layer by impurity implantation or the like, and forming a second conductivity type silicon layer above the columnar first conductivity type silicon layer;
A second conductive type silicon layer formed on a planar silicon layer under the first conductive type silicon layer by sputtering a metal film such as nickel (Ni) or cobalt (Co) and applying heat treatment; The surface of the second conductivity type silicon layer formed on the first conductivity type silicon layer is compounded with a metal and a semiconductor, and the unreacted metal film is removed to remove the planar surface below the columnar first conductivity type silicon layer. A step of forming a compound of a metal and a semiconductor on the second conductive silicon layer formed on the first silicon layer and the second conductive silicon layer formed on the top of the columnar first conductive silicon layer,
The second conductive silicon layer formed on the planar silicon layer below the gate electrode and the columnar first conductivity type silicon layer and the second conductivity formed on the columnar first conductivity type silicon layer by the silicon nitride film sidewall. Because the mold silicon layer is separated
A second conductive silicon layer formed on the planar silicon layer under the gate electrode and the columnar first conductivity type silicon layer made of a metal-semiconductor compound and a second conductivity formed on the columnar first conductivity type silicon layer. Type silicon layer can be prevented from short circuit,
By covering the side wall of the upper part of the columnar first conductivity type silicon layer with a silicon nitride film, the compounding of metal and semiconductor from the side wall of the columnar first conductivity type silicon layer can be controlled.

In the present invention,
Forming a silicon nitride film or the like as a contact stopper;
A step of planarizing by chemical mechanical polishing after forming a silicon oxide film as an interlayer film;
On the second conductivity type silicon layer formed on the planar silicon layer below the columnar first conductivity type silicon layer, on the gate electrode, and on the second conductivity type silicon layer formed on the top of the columnar first conductivity type silicon layer And a step of forming a contact hole by etching,
After forming a barrier metal such as tantalum (Ta), tantalum nitride (TaN), titanium (Ti), or titanium nitride (TiN) in the contact hole, a metal such as tungsten (W), copper (Cu), or an alloy containing copper Forming a contact plug by chemical mechanical polishing, forming a film by sputtering or plating, and
Forming a first layer wiring etching stopper such as silicon carbide (SiC), and subsequently forming a low dielectric constant film that is an interlayer film of the first wiring layer;
Patterning the first layer wiring to form a groove pattern of the first wiring layer;
After depositing a barrier metal such as tantalum (Ta), tantalum nitride (TaN), titanium (Ti), or titanium nitride (TiN), a metal such as tungsten (W), copper (Cu), or an alloy containing copper is sputtered. The resistance of the contact can be reduced by the process of forming the film by plating and forming the first layer wiring by chemical mechanical polishing.

In the present invention,
After the interlayer film etching process of the contact hole on the columnar silicon layer and the contact hole on the gate wiring,
Perform the interlayer film etching process of the contact hole on the planar silicon layer under the columnar silicon layer,
After that, by etching the contact holes on the upper part of the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer,
Optimization of etching conditions for contact holes on the pillar-shaped silicon layer and contact holes on the gate wiring,
It is also possible to optimize the etching conditions for the contact holes on the planar silicon layer below the columnar silicon layer.

In the present invention,
After the interlayer etching process of the contact hole on the planar silicon layer below the columnar silicon layer,
Perform an interlayer etching process between the contact hole on the top of the columnar silicon layer and the contact hole on the gate wiring,
After that, by etching the contact holes on the upper part of the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer,
Optimization of etching conditions for contact holes on the pillar-shaped silicon layer and contact holes on the gate wiring,
It is also possible to optimize the etching conditions for the contact holes on the planar silicon layer below the columnar silicon layer.

In the present invention,
After the interlayer film etching process of the contact hole in the upper part of the columnar silicon layer,
Perform an interlayer film etching process of the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer,
After that, by etching the contact holes on the upper part of the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer,
Optimization of contact hole etching conditions above the columnar silicon layer,
It is also possible to optimize the etching conditions for the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer.

In the present invention,
After the interlayer etching process of the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer,
Perform the interlayer film etching process of the contact hole at the top of the columnar silicon layer,
After that, by etching the contact holes on the upper part of the columnar silicon layer, the contact hole on the gate wiring, and the contact stopper on the planar silicon layer below the columnar silicon layer,
Optimization of contact hole etching conditions above the columnar silicon layer,
It is also possible to optimize the etching conditions for the contact hole on the gate wiring and the contact hole on the planar silicon layer below the columnar silicon layer.

In the present invention,
A semiconductor device,
A planar semiconductor layer formed on a substrate and having a second conductivity type semiconductor layer formed thereon, wherein the second conductivity type semiconductor layer is a planar semiconductor layer in which a compound of a metal and a semiconductor is formed;
A columnar first conductive type semiconductor layer formed on the planar semiconductor layer and having a second conductive type semiconductor layer formed thereon, wherein a compound of a metal and a semiconductor is formed on the second conductive type semiconductor layer. A formed columnar first conductivity type semiconductor layer;
A gate insulating film formed around the columnar first conductivity type semiconductor layer;
A gate electrode surrounding the gate insulating film, in which a compound of a metal and a semiconductor is formed;
An insulating film formed in a sidewall shape on the upper side wall of the columnar first conductive semiconductor layer on the gate electrode, and formed in a sidewall shape on the side wall of the gate electrode;
By having
The second conductivity type semiconductor layer formed on the planar semiconductor layer below the columnar first conductivity type semiconductor layer, the gate electrode, and the second conductivity type semiconductor layer formed above the columnar first conductivity type semiconductor layer are different. A voltage can be applied, the second conductivity type semiconductor layer formed on the planar semiconductor layer below the columnar first conductivity type semiconductor layer, the gate electrode, the second conductivity type formed on the columnar first conductivity type semiconductor layer. The resistance of the semiconductor layer can be reduced.

In the present invention,
The length from the center of the columnar first conductivity type semiconductor layer to the end of the planar semiconductor layer is:
A length from the center to the side wall of the columnar first conductive semiconductor layer;
A thickness of the gate insulating film;
The thickness of the gate electrode;
The insulating film formed in a sidewall shape on the side wall of the gate electrode;
Is greater than the sum of
A compound of a metal and a semiconductor can be formed on the second conductive semiconductor layer formed on the planar semiconductor layer below the columnar first conductive semiconductor layer,
The resistance of the second conductive semiconductor layer formed in the planar semiconductor layer below the columnar first conductive semiconductor layer can be reduced.

In the present invention,
A thickness of the gate electrode is larger than a thickness of the insulating film formed in a sidewall shape on the upper side wall of the columnar first conductive semiconductor layer on the gate electrode;
A compound of a metal and a semiconductor can be formed on the gate electrode, and the resistance of the gate electrode can be reduced.

110. Silicon layer 111. Si substrate 112. Planar silicon layer 113. Columnar silicon layer 120. BOX layer 121. Pad oxide film 122. Silicon oxide film 123. Sacrificial oxide film 124. Gate insulating film 125. Silicon oxide film 126. Interlayer film 128. Silicon oxide film 129. Silicon oxide film 130. Silicon nitride film 131. Silicon nitride film 132. Silicon nitride film 133. Silicon nitride film 134. Silicon nitride film 135. Contact stopper 140. Amorphous silicon or polysilicon 141. Amorphous silicon or polysilicon (gate electrode)
141a. Gate electrode 141b. Gate wiring 150. Resist 151. Silicide layer 152. Silicide layer 152. Silicide layer 160. Resist 161. BARC layer 162. Resist 170. Cu
171. Barrier metal 172. Contact 173. Contact 174. Contact 175. Barrier metal 176. Cu
177. First layer wiring 178. First layer wiring 179. First layer wiring 180. Etching stopper 190. Interlayer film 200 of the first wiring layer. N + source diffusion layer 201. N + drain diffusion layer

Claims (3)

A semiconductor device,
A planar semiconductor layer formed on a substrate and formed with a compound of a metal and a semiconductor;
A columnar first conductivity type semiconductor layer formed on the planar semiconductor layer and having a compound of metal and semiconductor formed on the entire upper surface ;
A gate insulating film formed around the columnar first conductivity type semiconductor layer;
A gate electrode surrounding the gate insulating film;
An insulating film formed in a sidewall shape on the upper side wall of the columnar first conductive semiconductor layer on the gate electrode, and formed in a sidewall shape on the side wall of the gate electrode;
A semiconductor device comprising: The length from the center of the columnar first conductivity type semiconductor layer to the end of the planar semiconductor layer is:
A length from the center to the side wall of the columnar first conductive semiconductor layer;
A thickness of the gate insulating film;
The thickness of the gate electrode;
A thickness of the insulating film formed in a sidewall shape on the side wall of the gate electrode;
2. The semiconductor device according to claim 1, wherein the semiconductor device is greater than the sum of. The thickness of the gate electrode is larger than the thickness of the insulating film formed in a sidewall shape on the upper side wall of the columnar first conductivity type semiconductor layer above the gate electrode. 2. The semiconductor device according to 2.

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