JP6011957B2 - Actuator system - Google Patents

Description

  The present invention relates to an actuator system used for a micromachine or the like that performs in-pipe work.

  For example, when manufacturing a micromachine for running and working in a space such as a pipe having a small diameter (for example, about 10 mm), an actuator system having a small size and high power density (high power per unit volume) is used. preferable. In terms of high power density, it is effective to use a fluid as a power source. In terms of miniaturization, it is effective to use a functional fluid such as an ER (Electro-Rheological) fluid (a fluid exhibiting specific properties and functions by external stimulation) (see Patent Document 1).

  The ER fluid reversibly increases in viscosity when an electric field is applied. Therefore, for example, the flow rate of the ER fluid can be adjusted by applying an electric field to the ER fluid flowing in the pipe with the force of the pump by a so-called ER microvalve. That is, when an electric field is applied to the ER fluid flowing in the pipe, the viscosity of the ER fluid increases and the flow rate of the ER fluid decreases. In such a method, since an operation such as mechanical sliding is unnecessary, the entire apparatus can be reduced in size.

  Here, a conventional actuator system using an ER fluid will be described with reference to FIG. As shown in FIG. 7, in the conventional actuator system, the ER fluid circulates in the piping, the actuator, and the ER fluid housing portion by applying force to the ER fluid with a single pump. In each actuator unit, the actuator is driven by the ER fluid.

  In the actuator unit, an actuator such as a bellows actuator (an actuator that expands and contracts by increasing or decreasing the amount of internal fluid) is operated by the ER fluid. Specifically, an ER microvalve comprising an electric field application unit and an electric field control unit is provided upstream and downstream of the actuator, respectively, and the intensity of the electric field applied to the ER fluid is adjusted by these ER microvalves so that the inside of the actuator The amount of ER fluid can be adjusted to drive the actuator.

JP 2001-343005 A

However, the conventional actuator system shown in FIG. 7 requires two pipes for each actuator unit, and there is a problem that the structure is complicated and size reduction is restricted.
Therefore, the present invention has been made in view of the above-described circumstances, and an object of the present invention is to achieve simplification and downsizing of the structure as well as high power density in an actuator system.

In order to solve the above problems, an actuator system of the present invention contains a functional fluid whose viscosity is increased by an electric field or a magnetic field, and operates when the amount of the functional fluid inside increases or decreases. AC pressure that contains a low-viscosity fluid whose viscosity is lower than that of the functional fluid in the absence of an electric field and a magnetic field, and alternately and repeatedly alternately applies positive pressure and negative pressure to the low-viscosity fluid inside. Part, the actuator and the AC pressure part, the functional fluid is accommodated in one space divided by a partition member, the low-viscosity fluid is accommodated in the other space, and the accommodated A pressure transmission unit that transmits pressure between the functional fluid and the low-viscosity fluid; and provided between the AC pressure unit and the pressure transmission unit, the AC pressure unit and the pressure A first pipe for allowing the low-viscosity fluid to circulate between the other space of the transmission unit; and provided between the actuator and the pressure transmission unit; and between the actuator and one space of the pressure transmission unit. a second pipe for circulating the functional fluid between, provided for the second pipe, and applying section for applying an electric field or magnetic field to the functional fluid of the inside of the second pipe .
Then, the function of the application inside the second pipe is greater when the application unit is applying a negative pressure than when the AC pressure unit is applying a positive pressure to the low-viscosity fluid inside. By increasing the strength of the electric field or magnetic field applied to the functional fluid, the amount of the functional fluid inside the actuator is increased to drive the actuator, and the AC pressure unit is the low-viscosity fluid inside. By reducing the strength of the electric field or magnetic field applied to the functional fluid inside the second pipe when negative pressure is applied rather than when positive pressure is applied to The actuator is driven by reducing the amount of the functional fluid inside the actuator.
Other means will be described later.

  According to the present invention, in the actuator system, simplification and downsizing of the structure can be realized with high power density.

(A) is a block diagram of the actuator system which concerns on 1st Embodiment of this invention, (b) is a figure which shows the mode of each structure when alternating current pressure source pushes the water of the inside in the actuator system. (C) is a figure which shows the mode of each structure when an alternating current pressure source draws internal water in the actuator system. (A) is a block diagram of the actuator system which concerns on 2nd Embodiment of this invention, (b) is a figure which shows the mode of each structure when alternating current pressure source pushes the water of the inside in the actuator system. (C) is a figure which shows the mode of each structure when an alternating current pressure source draws internal water in the actuator system. Regarding the actuator system according to the second embodiment of the present invention, (a) is a graph showing the state during the actuator extension operation, (b) is a graph showing the state during the actuator contraction operation, and (c) is It is a graph which shows the mode at the time of an actuator stop. It is a flowchart which shows the flow of a process in the actuator system which concerns on 2nd Embodiment of this invention. It is a block diagram of the actuator system which concerns on 3rd Embodiment of this invention. It is a block diagram of the actuator system which concerns on 4th Embodiment of this invention. It is a block diagram of the conventional actuator system.

  Hereinafter, an actuator system according to a mode for carrying out the present invention (hereinafter referred to as an embodiment) will be described with reference to the drawings. Specifically, the first to fourth embodiments will be described.

<First Embodiment>
As shown to Fig.1 (a), the actuator system S of 1st Embodiment is equipped with the actuator unit 1, the alternating current pressure source 2 (alternating pressure part), and the piping 3 (1st piping) which connects them. Configured.

The actuator unit 1 includes a pressure transmission unit 11, an actuator 12, a pipe 13 (second pipe), an electric field application unit 14 (application unit), and an electric field control unit 15 (application unit).
The pressure transmission unit 11 is provided between the actuator 12 and the AC pressure source 2 and has a viscosity generated by an electric field in one space (a space on the right side in FIG. 1A) divided by a diaphragm 111 (a partition member). The ER fluid 5 which is a functional fluid in which the flow rate increases is accommodated. Moreover, the pressure transmission part 11 accommodates the water 4 which is a low-viscosity fluid whose viscosity is lower than the ER fluid 5 when there is no electric field in the other space (the space on the left side in FIG. 1A). And the pressure transmission part 11 transmits a pressure mutually between the accommodated ER fluid 5 and the water 4 with the flexibility of the diaphragm 111.

  The AC pressure source 2 and the pressure transmission unit 11 are connected by a pipe 3 so that water 4 can flow. Further, the pressure transmission unit 11 and the actuator 12 are connected by a pipe 13 so that the ER fluid 5 can flow.

Here, the actuator 12 is a bellows actuator that accommodates the ER fluid 5 therein and operates (expands / contracts) when the amount of the internal ER fluid 5 increases or decreases.
The electric field applying unit 14 is provided for the pipe 13 and applies an electric field to the ER fluid 5 inside the pipe 13 by an instruction signal from the electric field control unit 15.

  The electric field control unit 15 transmits an instruction signal instructing application of the electric field to the electric field application unit 14 in accordance with a predetermined program or an instruction input from the user. Hereinafter, in order to simplify the description, “the electric field application unit 14 applies an electric field according to an instruction signal from the electric field control unit 15” is simply referred to as “the electric field application unit 14 applies an electric field”. The description regarding the operation of the electric field control unit 15 is omitted as appropriate.

  The AC pressure source 2 contains water 4 in the space on the side of the pipe 3 in the internal space, and positive and negative pressures are alternately and periodically repeated (for example, every 0.1 second) against the water 4 in the internal space. (Hereinafter, the pressure applied by the AC pressure source 2 is also expressed as “AC pressure”). In the following, the movement of the AC pressure source 2 that applies positive pressure to the internal water 4 is expressed as “push”, and the movement of the AC pressure source 2 that applies negative pressure to the internal water 4 is “pulled”. May be expressed. The AC pressure source 2 can be realized by, for example, a pump in which a voice coil motor and a piston are connected.

  According to such an actuator system S, as shown in FIG. 1 (b), when the AC pressure source 2 pushes the internal water 4, the positive pressure is transferred to the pressure transmission unit 11 via the pipe 3. In the pressure transmission unit 11, the positive pressure is transmitted from the water 4 to the ER fluid 5 via the diaphragm 111, and the ER fluid 5 passes from the inside of the pressure transmission unit 11 to the inside of the actuator 12 via the pipe 13. The actuator 12 operates by flowing in. At this time, if an electric field is applied by the electric field applying unit 14, the flow amount of the ER fluid 5 in the pipe 13 can be reduced, and the amount of the ER fluid 5 flowing into the actuator 12 can be reduced.

  Further, as shown in FIG. 1C, when the AC pressure source 2 draws the internal water 4, the negative pressure is transmitted to the pressure transmission unit 11 via the pipe 3, and the pressure transmission unit 11 Then, the negative pressure is transmitted from the water 4 to the ER fluid 5 through the diaphragm 111, and the ER fluid 5 flows from the inside of the actuator 12 into the pressure transmitting portion 11 through the pipe 13, so that the actuator 12 operates. To do. At this time, if an electric field is applied by the electric field applying unit 14, the flow amount of the ER fluid 5 in the pipe 13 can be reduced, and the amount of the ER fluid 5 flowing out from the actuator 12 can be reduced.

  Further, the following can be said from the long-term viewpoint that the AC pressure source 2 repeats pushing and pulling operations many times. That is, when the AC pressure source 2 is applying a negative pressure to the internal water 4, the electric field applied by the electric field applying unit 14 is increased to increase the strength of the actuator. The amount of ER fluid 5 inside 12 can be cumulatively increased to drive the actuator 12.

  In addition, when the AC pressure source 2 applies a positive pressure to the internal water 4, the electric field applied by the electric field applying unit 14 is made smaller than when the negative pressure is applied. The amount of ER fluid 5 inside 12 can be cumulatively reduced to drive the actuator 12.

  As described above, according to the actuator system S of the first embodiment, the magnitude of the electric field applied to the ER fluid 5 in accordance with the switching between the AC pressure source 2 that generates the AC pressure and the positive pressure and the negative pressure of the AC pressure. With the cooperation of the electric field application unit 14 to be changed, it is possible to realize a simplification of the structure that only one pipe is required for each actuator unit 1 and a reduction in size due to the high power density.

  The ER fluid has a viscosity about 20 times higher than that of water even in the absence of an electric field. Therefore, in the actuator system S, in order to reduce the pressure loss due to the flow of the liquid in the pipe, in the flow path from the AC pressure source 2 to the pressure transmission unit 11, water 4 having a low viscosity is used as the pressure transmission liquid. It was. However, all liquids may be used as the ER fluid 5 without using the water 4.

  That is, as compared with the actuator system S of FIG. 1, the pressure transmission unit 11 may be eliminated, and the actuator system may be configured using all the liquid as the ER fluid 5. Even in that case, substantially the same operation and effect as the actuator system S can be realized.

Second Embodiment
Next, an actuator system Sa according to the second embodiment will be described with reference to FIG. In the following, similar or identical components, such as “actuator system S” and “actuator system Sa”, are denoted by lowercase alphabets such as “a” and “b”, and overlapping descriptions are appropriately provided. Omitted.

  The actuator system Sa shown in FIG. 2 is different from the actuator system S shown in FIG. 1 in the actuator unit 1a in the electric field application unit 14b, the electric field control unit 15b, the pipe 16 (third pipe), and the ER fluid storage part 17 ( This is different in that a functional fluid storage part) is added.

The pipe 16 branches from the pressure transmission unit 11 side than the electric field application unit 14a (first application unit) (a pair with the electric field control unit 15a (first application unit)) in the pipe 13, and the pipe 13 and the ER fluid. It plays a role of circulating the ER fluid 5 between the housing part 17.
The electric field applying unit 14 b (second applying unit) is provided for the pipe 16 and applies an electric field to the ER fluid 5 inside the pipe 16.

The electric field control unit 15b (second application unit) instructs the electric field application unit 14b to apply an electric field in accordance with a predetermined program or an instruction signal from the user.
The ER fluid storage unit 17 stores the ER fluid 5.

  According to such an actuator system Sa, compared with the case of the actuator system S shown in FIG. 1, the ER fluid 5 can be transferred between the ER fluid accommodating portion 17 and the actuator 12. Can be expanded and contracted. Details will be described below.

(Actuator extension operation)
The extension operation of the actuator 12 will be described with reference to FIGS. 2B, 2C, and 3A as appropriate. When the actuator 12 is extended, the electric field by the electric field application unit 14a (actuator side electric field) is set to “0” during the time period in which the AC pressure source 2 pushes the internal water 4 and the electric field by the electric field application unit 14b (ER fluid) By turning the “accommodating portion side electric field” “ON”, the ER fluid 5 can flow into the actuator 12 and the actuator 12 can be extended (see FIG. 2B). At that time, the ER fluid 5 hardly flows through the pipe 16 because of the electric field applied by the electric field applying unit 14b.

  Further, during the time period in which the AC pressure source 2 draws the internal water 4, the electric field applied by the electric field application unit 14 a (actuator side electric field) is turned “ON”, and the electric field applied by the electric field application unit 14 b (ER fluid accommodation unit side electric field) By setting “0” to “0”, the ER fluid 5 can be caused to flow from the ER fluid accommodating portion 17 to the pressure transmitting portion 11 (see FIG. 2C). At that time, because of the electric field applied by the electric field applying unit 14 a, the ER fluid 5 hardly flows in the corresponding part of the pipe 13.

By repeating such an operation, the length of the actuator 12 can be cumulatively extended (see “actuator length” in FIG. 3A).
Even if one of the electric field on the actuator side and the electric field on the ER fluid housing part side is not set to “0”, the time zone during which the AC pressure source 2 pushes the internal water 4 is larger than the strength of the electric field on the actuator side. In the time zone in which the strength of the side electric field is increased and the AC pressure source 2 pulls the internal water 4, the strength of the electric field on the ER fluid accommodating portion side is made smaller than the strength of the actuator side electric field, thereby increasing the length of the actuator 12. Can be extended cumulatively.

(Actuator contraction operation)
Further, as shown in FIG. 3B, the length of the actuator 12 can be reduced by reversing the “ON” and “0” of the actuator-side electric field and the ER fluid housing portion-side electric field as compared with the actuator extension operation. Can be shortened cumulatively.

  Even if one of the electric field on the actuator side and the electric field on the ER fluid housing part side is not set to “0”, the time zone during which the AC pressure source 2 pushes the internal water 4 is larger than the strength of the electric field on the actuator side. In the time zone in which the strength of the side electric field is reduced and the AC pressure source 2 pulls the internal water 4, the strength of the electric field on the ER fluid housing unit side is made larger than the strength of the actuator side electric field, thereby Can be shortened cumulatively.

(Actuator stop)
Further, as shown in FIG. 3C, the actuator-side electric field and the ER fluid housing part-side electric field are always “ON”, whereby the ER fluid 5 inside the actuator 12 and the ER fluid container 17 is inside. The actuator 12 can be almost stopped without changing the amount of the actuator.

(Processing flow in actuator system Sa)
Therefore, in the actuator system Sa, the actuator 12 can be freely controlled by combining the processes in the “actuator extension operation”, “actuator contraction operation”, and “actuator stop”. Hereinafter, a processing flow in the actuator system Sa will be described with reference to FIG. 4 (see FIGS. 2 and 3 as appropriate).

  In the actuator system Sa, when the actuator 12 is extended (Yes in step S1), when the operation by the AC pressure source 2 is “push” (“push” in step S2), the actuator side electric field is set to “0” and ER The electric field on the fluid container side is set to “ON” (step S3), and the process returns to step S1.

When the operation by the AC pressure source 2 is “pull” (“pull” in step S2), the actuator-side electric field is set to “ON”, and the ER fluid housing portion-side electric field is set to “0” (step S4), and the process returns to step S1. .
As described above, the actuator 12 can be cumulatively extended as described above by switching the steps S3 and S4 in accordance with the switching between the positive pressure and the negative pressure of the AC pressure generated by the AC pressure source 2.
If No in step S1, the process proceeds to step S5.

  When the actuator 12 is contracted (Yes in step S5), when the operation by the AC pressure source 2 is “push” (“push” in step S6), the actuator-side electric field is set to “ON” and the ER fluid container side electric field Is set to “0” (step S7), and the process returns to step S1.

When the operation by the AC pressure source 2 is “pull” (“pull” in step S6), the actuator-side electric field is set to “0”, and the ER fluid container side electric field is set to “ON” (step S8), and the process returns to step S5. .
As described above, the actuator 12 can be shortened cumulatively by switching the steps S7 and S8 in accordance with the switching between the positive pressure and the negative pressure of the AC pressure generated by the AC pressure source 2.
If No in step S5, the process proceeds to step S9.

When the actuator 12 is stopped (Yes in step S9), the actuator-side electric field and the ER fluid accommodating portion-side electric field are set to “ON” regardless of the switching between the positive pressure and the negative pressure of the AC pressure by the AC pressure source 2 (step S10). ), The process returns to step S9. Thereby, the actuator 12 can be stopped.
If No in step S9, the process returns to step S1.

  Thus, in the actuator system Sa, the extension, contraction, and stop of the actuator 12 can be freely controlled.

<Third Embodiment>
Next, the actuator system Sb of the third embodiment will be described with reference to FIG. The actuator system Sb shown in FIG. 5 differs from the actuator system Sa shown in FIG. 2 in that a plurality of actuator units 1a are provided in parallel with the AC pressure source 2. The actuator 12 can be controlled by independently adjusting the electric field applied by the electric field applying unit 14a and the electric field applying unit 14b for each of the plurality of actuator units 1a.

  Thus, according to the actuator system Sb of the third embodiment, a plurality of actuator units 1a (multiple degrees of freedom) can be obtained by simplifying the structure that only one pipe from the AC pressure source 2 is required for each actuator unit 1a. ), The entire system can be downsized with high power density.

<Fourth embodiment>
Next, an actuator system Sc of the fourth embodiment will be described with reference to FIG. In the actuator system Sc shown in FIG. 6, the flexible tube 18 is used as an actuator that bends on the same principle as a so-called bimorph. Here, the bimorph refers to a structure in which two piezoelectric elements are bonded together. In a bimorph, by applying a voltage in the opposite direction to each of the two piezoelectric elements, one piezoelectric element is stretched and the other piezoelectric element is contracted, thereby efficiently bending.

  The flexible tube 18 in the actuator unit 1b is formed by adhering two flexible rods that extend and contract in the longitudinal direction. For convenience, of the two rod-shaped flexible tubes, the flexible tube 18 in FIG. The upper one is called the upper flexible tube 181 (first flexible member), and the lower one is called the lower flexible tube 182 (second flexible member).

The upper flexible tube 181 and the lower flexible tube 182 accommodate the ER fluid 5 therein.
The flexible tube 18 bends (operates) when the difference in the amount of the ER fluid 5 inside each of the upper flexible tube 181 and the lower flexible tube 182 changes.

  When the flexible tube 18 is bent downward in FIG. 6 (hereinafter, simply referred to as “downward”), the time period during which the AC pressure source 2 pushes the internal water 4 is limited to the electric field application unit 14c (first The electric field by the application unit (a pair with the electric field control unit 15c (first application unit)) is set to “0”, and the electric field application unit 14d (second application unit) (electric field control unit 15d (second application unit) By turning on the electric field by the pair), the ER fluid 5 inside the pressure transmission part 11a is caused to flow into the upper flexible tube 181 via the pipe 13a (second pipe), and the flexible tube 18 is moved downward. (See FIG. 6B). At that time, the amount of the ER fluid 5 inside the lower flexible tube 182 is hardly changed.

  Also, during the time period in which the AC pressure source 2 draws the internal water 4, the electric field applied by the electric field application unit 14 c is set to “ON”, and the electric field applied by the electric field application unit 14 d (second application unit) is set to “0”. Thus, the ER fluid 5 inside the lower flexible tube 182 can be caused to flow into the pressure transmitting portion 11a via the pipe 16a (third pipe), and the flexible tube 18 can be further bent downward (see FIG. 6 (c)). At that time, the amount of the ER fluid 5 inside the upper flexible tube 181 is hardly changed.

By repeating such an operation, the flexible tube 18 can be cumulatively bent downward.
Note that the switching of the electric field strength does not have to be “0” and “ON”.
That is, when the flexible tube 18 is bent downward by increasing the difference obtained by subtracting the amount of the ER fluid 5 inside the lower flexible tube 182 from the amount of the ER fluid 5 inside the upper flexible tube 181, It only has to satisfy the conditions.

In the time zone in which the AC pressure source 2 pushes the water 4 inside, it is sufficient that the strength of the electric field applied by the electric field applying unit 14d is larger than the strength of the electric field applied by the electric field applying unit 14c.
In the time zone in which the AC pressure source 2 draws the internal water 4, the electric field applied by the electric field applying unit 14d should be smaller than the electric field applied by the electric field applying unit 14c.

  Similarly, the flexible tube 18 can be cumulatively bent upward in FIG.

  In the actuator system Sa shown in FIG. 2, the inflow or outflow of the ER fluid 5 with respect to the ER fluid housing portion 17 does not contribute to the driving of the actuator 12 in the actuator unit 1 a. On the other hand, according to the actuator system Sc of the fourth embodiment shown in FIG. 6, all the movements of the ER fluid 5 can be efficiently contributed to the bending operation of the flexible tube 18.

Although description of this embodiment is finished above, the aspect of the present invention is not limited to these.
For example, in this embodiment, the switching timing of the positive pressure and the negative pressure of the AC pressure by the AC pressure source 2 and the switching timing of the electric field applied to the ER fluid 5 are completely matched. In consideration of time, response time of the electric field application unit 14, and the like, the timings may be slightly shifted.

Further, in order to prevent the water 4 and the ER fluid 5 from being vaporized, a certain pressure or more may be constantly applied to them.
In addition to the ER fluid, another fluid such as an MR (Magneto-Rheological) fluid may be used as the functional fluid. When MR fluid is used, a magnetic field may be applied instead of an electric field.

Further, as the low-viscosity fluid, in addition to the water 4, another low-viscosity fluid such as air may be used. When air is used, it is necessary to consider compression and expansion, and for example, it is conceivable to use it together with an elastic body such as a spring.
Further, the frequency of the AC pressure of the AC pressure source 2 may be about 5 to 20 Hz, for example, but may be another frequency.

  Moreover, in the pressure transmission part 11, you may make it transmit a pressure mutually between the ER fluid 5 and the water 4 which were accommodated inside using other means, such as a piston mechanism, instead of the diaphragm 111. FIG.

  In addition to the bellows actuator and the flexible tube actuator, the actuator may be other types such as a cylinder actuator and a rotary actuator. In the case of using a cylinder type actuator, an elastic element that temporarily allows a small volume change may be used together. This is because in the cylinder type actuator, the sum of the volumes before and after the piston is constant, but in the actuator system of this embodiment, the increase and decrease in volume are shifted by a half cycle, and a member (element) that absorbs the shift is required. is there.

Further, by providing a plurality of actuator units 1a in the actuator system Sa of the second embodiment in parallel to the AC pressure source 2, the actuator system Sb of the third embodiment is obtained. Similarly, in the actuator system S of the first embodiment and the actuator system Sc of the fourth embodiment, a plurality of actuator units 1, 1 b may be provided in parallel to the AC pressure source 2.
In addition, specific configurations such as hardware and flowcharts can be appropriately changed without departing from the spirit of the present invention.

1, 1a, 1b Actuator unit 2 AC pressure source (AC pressure part)
3 Piping (first piping)
4 Water (low viscosity fluid)
5 ER fluid (functional fluid)
11, 11a Pressure transmission part 12 Actuator 13, 13a Piping (second piping)
14 Electric field application part (application part)
14a Electric field application part (first application part)
14b Electric field application section (second application section)
14c Electric field application section (first application section)
14d Electric field application part (second application part)
15 Electric field control unit (applying unit)
15a Electric field control unit (first application unit)
15b Electric field control unit (second application unit)
15c Electric field control unit (first application unit)
15d Electric field control unit (second application unit)
16, 16a piping (third piping)
17 ER fluid container (functional fluid container)
18 Flexible tube (actuator)
111 Diaphragm (partition member)
181 Upper flexible tube 182 Lower flexible tube S, Sa, Sb, Sc Actuator system

Claims (6)

An actuator that contains a functional fluid whose viscosity is increased by an electric field or a magnetic field, and that operates when the amount of the functional fluid inside increases or decreases;
AC pressure part that contains a low-viscosity fluid whose viscosity is lower than that of the functional fluid in the absence of an electric field and a magnetic field, and alternately and repeatedly alternately applies positive pressure and negative pressure to the low-viscosity fluid inside When,
The functional fluid is provided between the actuator and the AC pressure part, and the functional fluid is accommodated in one space divided by a partition member, the low-viscosity fluid is accommodated in the other space, and the functional fluid is accommodated. And a pressure transmission part for mutually transmitting pressure between the low-viscosity fluid,
A first pipe that is provided between the AC pressure part and the pressure transmission part, and circulates the low-viscosity fluid between the AC pressure part and the other space of the pressure transmission part;
A second pipe that is provided between the actuator and the pressure transmission unit, and distributes the functional fluid between the actuator and one space of the pressure transmission unit;
An application unit that is provided for the second pipe and applies an electric field or a magnetic field to the functional fluid inside the second pipe;
The application unit includes:
When the AC pressure part applies a negative pressure to the low-viscosity fluid inside, a negative pressure is applied to the functional fluid inside the second pipe. By increasing the strength of the electric or magnetic field, the amount of the functional fluid inside the actuator is increased to drive the actuator,
When the AC pressure part applies a negative pressure to the low-viscosity fluid inside, a negative pressure is applied to the functional fluid inside the second pipe. An actuator system, wherein the actuator is driven by reducing the amount of the functional fluid inside the actuator by reducing the strength of the electric field or magnetic field. An actuator that contains a functional fluid whose viscosity is increased by an electric field or a magnetic field, and that operates when the amount of the functional fluid inside increases or decreases;
AC pressure part that contains a low-viscosity fluid whose viscosity is lower than that of the functional fluid in the absence of an electric field and a magnetic field, and alternately and repeatedly alternately applies positive pressure and negative pressure to the low-viscosity fluid inside When,
The functional fluid is provided between the actuator and the AC pressure part, and the functional fluid is accommodated in one space divided by a partition member, the low-viscosity fluid is accommodated in the other space, and the functional fluid is accommodated. And a pressure transmission part for mutually transmitting pressure between the low-viscosity fluid,
A first pipe that is provided between the AC pressure part and the pressure transmission part, and circulates the low-viscosity fluid between the AC pressure part and the other space of the pressure transmission part;
A second pipe that is provided between the actuator and the pressure transmission unit, and distributes the functional fluid between the actuator and one space of the pressure transmission unit;
A first application unit that is provided to the second pipe and applies an electric field or a magnetic field to the functional fluid inside the second pipe;
A functional fluid containing portion for containing the functional fluid;
A third branch that branches from the pressure transmission unit side than the first application unit in the second pipe and causes the functional fluid to flow between the second pipe and the functional fluid storage unit. Piping,
A second application unit that is provided for the third pipe and applies an electric field or a magnetic field to the functional fluid inside the third pipe;
When driving the actuator by increasing the amount of the functional fluid inside the actuator,
When the AC pressure unit applies a positive pressure to the low-viscosity fluid inside, the electric field applied by the second application unit or the strength of the magnetic field applied by the first application unit or Increase the strength of the magnetic field,
When the AC pressure unit applies a negative pressure to the low-viscosity fluid inside, the electric field applied by the second application unit or the strength of the magnetic field applied by the first application unit or Reduce the strength of the magnetic field,
When driving the actuator by reducing the amount of the functional fluid inside the actuator,
When the AC pressure unit applies a positive pressure to the low-viscosity fluid inside, the electric field applied by the second application unit or the strength of the magnetic field applied by the first application unit or Reduce the strength of the magnetic field,
When the AC pressure unit applies a negative pressure to the low-viscosity fluid inside, the electric field applied by the second application unit or the strength of the magnetic field applied by the first application unit or An actuator system characterized by increasing the strength of the magnetic field. Adhering a functional fluid whose viscosity is increased by an electric field or a magnetic field inside, a first flexible member extending in the longitudinal direction in a rod shape, and a second flexible member extending in the longitudinal direction in a rod shape An actuator that is formed and operates when a difference in amount of the functional fluid inside each of the first flexible member and the second flexible member changes;
AC pressure part that contains a low-viscosity fluid whose viscosity is lower than that of the functional fluid in the absence of an electric field and a magnetic field, and alternately and repeatedly alternately applies positive pressure and negative pressure to the low-viscosity fluid inside When,
The functional fluid is provided between the actuator and the AC pressure part, and the functional fluid is accommodated in one space divided by a partition member, the low-viscosity fluid is accommodated in the other space, and the functional fluid is accommodated. And a pressure transmission part for mutually transmitting pressure between the low-viscosity fluid,
A first pipe that is provided between the AC pressure part and the pressure transmission part, and circulates the low-viscosity fluid between the AC pressure part and the other space of the pressure transmission part;
A second pipe that is provided between the first flexible member and the pressure transmission unit, and distributes the functional fluid between the first flexible member and one space of the pressure transmission unit;
A first application unit that is provided to the second pipe and applies an electric field or a magnetic field to the functional fluid inside the second pipe;
A third pipe that is provided between the second flexible member and the pressure transmission unit and distributes the functional fluid between the second flexible member and one space of the pressure transmission unit;
A second application unit that is provided for the third pipe and applies an electric field or a magnetic field to the functional fluid inside the third pipe;
When driving the actuator by increasing a difference obtained by subtracting the amount of the functional fluid inside the second flexible member from the amount of the functional fluid inside the first flexible member,
When the AC pressure unit applies a positive pressure to the low-viscosity fluid inside, the electric field applied by the second application unit or the strength of the magnetic field applied by the first application unit or Increase the strength of the magnetic field,
When the AC pressure unit applies a negative pressure to the low-viscosity fluid inside, the electric field applied by the second application unit or the strength of the magnetic field applied by the first application unit or Reduce the strength of the magnetic field,
When driving the actuator by reducing a difference obtained by subtracting the amount of the functional fluid inside the second flexible member from the amount of the functional fluid inside the first flexible member,
When the AC pressure unit applies a positive pressure to the low-viscosity fluid inside, the electric field applied by the second application unit or the strength of the magnetic field applied by the first application unit or Reduce the strength of the magnetic field,
When the AC pressure unit applies a negative pressure to the low-viscosity fluid inside, the electric field applied by the second application unit or the strength of the magnetic field applied by the first application unit or An actuator system characterized by increasing the strength of the magnetic field. The actuator, the pressure transmission unit, the second pipe, the first application unit, the functional fluid storage unit, the third pipe, and the second application unit. The actuator system according to claim 2 , wherein a plurality of actuator units are provided in parallel to the AC pressure unit. A plurality of actuator units including the actuator, the pressure transmission unit, the second pipe, the first application unit, the third pipe, and the second application unit, the AC pressure The actuator system according to claim 3 , wherein the actuator system is provided in parallel to the unit. The actuator system according to any one of claims 1 to 5 low viscosity fluid which is a water.

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