JP6011286B2 - Temperature sensor - Google Patents

Description

  The present invention relates to a temperature sensor suitable for measuring the temperature of a heating roller such as a copying machine or a printer.

  Generally, a heating sensor used in a copying machine or a printer is provided with a temperature sensor in contact with the heating roller in order to measure its temperature. As such a temperature sensor, for example, in Patent Documents 1 and 2, a pair of lead frames, a thermal element disposed and connected between the lead frames, and an end portion of the pair of lead frames are formed. There has been proposed a temperature sensor having a holding portion and a thin film sheet that is provided on one surface of a lead frame and a thermal element and is brought into contact with a heating roller.

Such a temperature sensor is brought into contact with the surface of the heating roller using the elastic force of the lead frame to detect the temperature.
In Patent Document 1, a bead thermistor or a chip thermistor is employed as the thermal element, and in Patent Document 2, a thin film thermistor in which a thermal film is formed on one surface of an insulating substrate such as alumina as the thermal element. Is adopted. This thin film thermistor includes a heat sensitive film formed on one surface of an insulating substrate, a pair of lead portions connecting the heat sensitive film and a pair of lead frames, and a protective film covering the heat sensitive film.

Japanese Examined Patent Publication No. 6-29793 JP 2000-74752 A JP 2004-319737 A

The following problems remain in the conventional technology.
That is, in the technique described in Patent Document 1, a bead thermistor or the like is used as a thermal element. In this case, since it is a spherical or elliptical shape of about 1 mm, it is accurate to make point contact with the heating roller. Temperature detection is difficult. Further, since the heat sensitive element has a relatively large volume, there is a disadvantage that the responsiveness is poor. Furthermore, because of the point contact, the rotating roller surface may be damaged.
Further, in the technique described in Patent Document 2, since a thin film thermistor is used as a thermal element, the heating roller can be brought into surface contact, but if an insulating substrate and a lead portion constituting the thin film thermistor are included, it is still Due to the volume, there was a problem of poor responsiveness.

  The present invention has been made in view of the above-described problems, and provides a temperature sensor that is highly accurate and has excellent responsiveness and high rigidity when detecting temperature by being pressed against a heating roller or the like. With the goal.

  The present invention employs the following configuration in order to solve the above problems. That is, the temperature sensor according to the first aspect of the present invention includes a pair of lead frames, a sensor unit connected to the pair of lead frames, and an insulating retainer that is fixed to the pair of lead frames and retains the lead frame. And a pair of supporting frames whose base ends are fixed to the holding portion, the sensor portion being an insulating film, and a thin film thermistor portion patterned with a thermistor material on the surface of the insulating film; A pair of comb electrodes having a plurality of comb portions on at least one of the upper and lower sides of the thin film thermistor portion and patterned to face each other, and one end connected to the pair of comb electrodes and the other A pair of pattern electrodes having ends connected to the pair of lead frames and patterned on the surface of the insulating film; End side, the thin film thermistor portion extending arranged between the, characterized in that it is fixed to the insulating film or insulating protective sheet for supporting the insulating film.

In this temperature sensor, the tip sides of the pair of supporting frames extend with the thin film thermistor portion interposed therebetween, and are fixed to the insulating film or the insulating protective sheet that supports the insulating film. The insulating film is supported by the supporting frame, and high rigidity can be ensured. Further, since the support frame is not connected to the pattern electrode, heat transfer is suppressed, and accurate temperature detection and high responsiveness can be obtained.
Moreover, the thin film thermistor part formed directly on the insulating film reduces the overall thickness, and an excellent response can be obtained with a small volume. In addition, since the pair of lead frames are connected to the pair of pattern electrodes, the thin film thermistor portion and the lead frame are connected by the pattern electrodes directly formed on the insulating film, so that the patterned thin wiring is formed. As a result, the influence of the thermal conductivity with the lead frame side is suppressed as compared with the case where the lead wires are connected. In addition, since the flatness of the contact part with respect to a measuring object is high, and it contacts a surface, exact temperature detection is possible and it is hard to damage the surface of measuring objects, such as a heating roller to rotate.

In the temperature sensor according to a second aspect of the present invention, in the first aspect, the distal ends of the pair of support frames are connected by a connecting frame portion extending between the pair of support frames. It is characterized by.
That is, in this temperature sensor, since the tip portions of the pair of support frames are connected by the connecting frame portion extending between the pair of supporting frames, the pair of supporting frames are connected by the connecting frame portion. Becomes difficult to twist, and the rigidity in the direction perpendicular to the extending direction of the insulating film is further improved.

The temperature sensor according to a third aspect of the present invention is the temperature sensor according to the first or second aspect, wherein the insulating film has a substantially rectangular shape, and the pair of supporting frames are disposed along the insulating film. It extends over substantially the entire length in the extending direction of the film.
That is, in this temperature sensor, since the pair of support frames extend along the insulating film over substantially the entire length in the extending direction of the insulating film, the entire insulating film is supported by the supporting frame. can do.

A temperature sensor according to a fourth invention includes a pair of insulating protective sheets bonded to the front and back surfaces of the insulating film in a state of covering the lead frame in any one of the first to third inventions. The pair of protective sheets are bonded to each other with the pair of support frames interposed therebetween.
That is, in this temperature sensor, since the pair of protective sheets are bonded with the pair of supporting frames interposed therebetween, the lead frame and the supporting frame can be stably held by the protective sheets and the insulating film Stiffness can be improved.

A temperature sensor according to a fifth invention is the temperature sensor according to the third invention, wherein the thin film thermistor portion is arranged in the vicinity of one end of the insulating film, and the pattern electrode extends to the vicinity of the other end of the insulating film. The tip portions of the pair of lead frames are connected to the pattern electrode in the vicinity of the other end of the insulating film.
That is, in this temperature sensor, since the tip portions of the pair of lead frames are connected to the pattern electrode in the vicinity of the other end of the insulating film, the thin film thermistor near the one end is brought into contact with a measurement object such as a heating roller. However, the lead frame connected to the pattern electrode in the vicinity of the other end can be set so as not to contact the measurement object, and heat conduction to the lead frame can be suppressed.

A temperature sensor according to a sixth aspect of the present invention is the temperature sensor according to any one of the first to fifth aspects, wherein the thin film thermistor portion has a general formula: Ti _x Al _y N _z (0.70 ≦ y / (x + y) ≦ 0. 95, 0.4 ≦ z ≦ 0.5, x + y + z = 1), and the crystal structure thereof is a hexagonal wurtzite single phase.

  In general, a thermistor material used for a temperature sensor or the like is required to have a high B constant for high accuracy and high sensitivity. Conventionally, transition metal oxides such as Mn, Co, and Fe are generally used for such thermistor materials. In addition, these thermistor materials require firing at 600 ° C. or higher in order to obtain stable thermistor characteristics.

In addition to the thermistor material composed of the metal oxide as described above, for example, in Patent Document 3, the general formula: M _x A _y N _z (where M is at least one of Ta, Nb, Cr, Ti, and Zr) , A represents at least one of Al, Si, and B. 0.1 ≦ x ≦ 0.8, 0 <y ≦ 0.6, 0.1 ≦ z ≦ 0.8, x + y + z = 1) A thermistor material made of nitride has been proposed. Moreover, in this patent document 3, it is Ta-Al-N type material, 0.5 <= x <= 0.8, 0.1 <= y <= 0.5, 0.2 <= z <= 0.7, x + y + z = 1. Only those described above are described as examples. This Ta—Al—N-based material is produced by performing sputtering in a nitrogen gas-containing atmosphere using a material containing the above elements as a target. Moreover, the obtained thin film is heat-processed at 350-600 degreeC as needed.

In recent years, development of a film type thermistor sensor in which a thermistor material is formed on a resin film has been studied, and development of a thermistor material that can be directly formed on a film is desired. That is, it is expected that a flexible thermistor sensor can be obtained by using a film. Furthermore, although development of a very thin thermistor sensor having a thickness of about 0.1 mm is desired, conventionally, a substrate material using a ceramic material such as alumina is often used. For example, to a thickness of 0.1 mm However, if the film is made thin, there is a problem that it is very brittle and easily broken. However, it is expected that a very thin thermistor sensor can be obtained by using a film.
Conventionally, in a temperature sensor in which a nitride thermistor made of TiAlN is formed, when a thermistor material layer made of TiAlN and an electrode are laminated on a film, an electrode layer such as Au is formed on the thermistor material layer. And patterning into a comb shape having a plurality of comb portions. However, this thermistor material layer has a large radius of curvature and is not easily cracked and there is no change in electrical properties such as resistance, but cracks are generated when the radius of curvature is small and tight. The resistance value and the like are greatly changed, and the reliability of the electrical characteristics is lowered. In particular, when the film is bent with a small radius of curvature in a direction perpendicular to the extending direction of the comb portion, the electrode edge is caused by the difference in stress between the comb-shaped electrode and the thermistor material layer as compared with the case of bending in the extending direction of the comb portion. There is a disadvantage that cracks are likely to occur in the vicinity and the reliability of the electrical characteristics is lowered.

  In addition, a film made of a resin material generally has a heat resistant temperature as low as 150 ° C. or lower, and even a polyimide known as a material having a relatively high heat resistant temperature has only a heat resistance of about 300 ° C. In the case where heat treatment is applied, application is difficult. The conventional oxide thermistor material requires firing at 600 ° C. or higher in order to realize desired thermistor characteristics, and there is a problem that a film type thermistor sensor directly formed on a film cannot be realized. Therefore, it is desired to develop a thermistor material that can be directly film-formed without firing, but even with the thermistor material described in Patent Document 3, the obtained thin film can be obtained as necessary in order to obtain desired thermistor characteristics. It was necessary to perform heat treatment at 350 to 600 ° C. Further, in this example of the thermistor material, a material having a B constant of about 500 to 3000 K is obtained in the example of the Ta-Al-N material, but there is no description regarding heat resistance, and the thermal reliability of the nitride material. Sex was unknown.

The inventors of the present invention focused on the AlN system among the nitride materials and made extensive research. As a result, it is difficult for AlN as an insulator to obtain optimum thermistor characteristics (B constant: about 1000 to 6000 K). For this reason, it was found that by replacing the Al site with a specific metal element that improves electrical conduction and having a specific crystal structure, a good B constant and heat resistance can be obtained without firing.
Therefore, the present invention has been obtained from the above findings, and the thin film thermistor portion has a general formula: Ti _x Al _y N _z (0.70 ≦ y / (x + y) ≦ 0.95, 0.4 ≦ z ≦ 0.5, x + y + z = 1), and its crystal structure is a hexagonal wurtzite single phase, so that a good B constant can be obtained without firing and a high heat resistance. It has sex.

When the above “y / (x + y)” (ie, Al / (Ti + Al)) is less than 0.70, a wurtzite type single phase cannot be obtained, and a coexisting phase with an NaCl type phase or an NaCl type phase Therefore, a sufficiently high resistance and a high B constant cannot be obtained.
Further, if the above-mentioned “y / (x + y)” (that is, Al / (Ti + Al)) exceeds 0.95, the resistivity is very high and the insulating property is extremely high, so that it cannot be applied as a thermistor material.
Further, when the “z” (that is, N / (Ti + Al + N)) is less than 0.4, since the amount of metal nitriding is small, a wurtzite type single phase cannot be obtained, and a sufficiently high resistance and high B A constant cannot be obtained.
Furthermore, when the “z” (that is, N / (Ti + Al + N)) exceeds 0.5, a wurtzite single phase cannot be obtained. This is because in the wurtzite type single phase, the correct stoichiometric ratio when there is no defect at the nitrogen site is N / (Ti + Al + N) = 0.5.

The present invention has the following effects.
That is, according to the temperature sensor according to the present invention, the insulating film or the insulating protective sheet that supports the insulating film is fixed to the holding portion and extends with the thin film thermistor portion interposed therebetween. Since it has a pair of fixed support frames, the insulating film is supported by the support frames and high rigidity can be ensured. In addition, by connecting the thin film thermistor part and the lead frame with the pattern electrode directly formed on the insulating film, the thin film thermistor part directly formed on the thin insulating film and the thin pattern electrode provide excellent responsiveness. And accurate temperature measurement becomes possible.
Furthermore, the thin film thermistor portion is formed by metal nitriding represented by the general formula: Ti _x Al _y N _z (0.70 ≦ y / (x + y) ≦ 0.95, 0.4 ≦ z ≦ 0.5, x + y + z = 1). By using a material that has a hexagonal wurtzite type single phase and has a crystal structure, a good B constant can be obtained without firing, and high heat resistance can be obtained.
Therefore, according to the temperature sensor of the present invention, stable surface contact by a sensor unit with high rigidity is possible, and the temperature can be accurately measured with high responsiveness. It is suitable for the temperature of the heating roller.

It is the top view and front view which show 1st Embodiment of the temperature sensor which concerns on this invention. In 1st Embodiment, it is a Ti-Al-N type | system | group ternary phase diagram which shows the composition range of the metal nitride material for thermistors. In 1st Embodiment, it is the top view and AA sectional view taken on the line which show a sensor part. In 1st Embodiment, it is a top view which shows a pair of lead frame and supporting frame which were supported by the holding | maintenance part. In 1st Embodiment, it is a top view and a BB line sectional view showing a thin film thermistor part formation process. In 1st Embodiment, it is a top view and CC line sectional view showing an electrode formation process. In 1st Embodiment, it is the top view and front view which show a lead frame attachment process. It is the top view and front view which show 2nd Embodiment of the temperature sensor which concerns on this invention. In 2nd Embodiment, it is a top view which shows a pair of lead frame and supporting frame which were supported by the holding | maintenance part. In 2nd Embodiment, it is the top view and front view which show a lead frame attachment process. In the Example of the temperature sensor which concerns on this invention, it is the front view and top view which show the element for film | membrane evaluation of the metal nitride material for thermistors. In the Example and comparative example which concern on this invention, it is a graph which shows the relationship between 25 degreeC resistivity and B constant. In the Example and comparative example which concern on this invention, it is a graph which shows the relationship between Al / (Ti + Al) ratio and B constant. In the Example which concerns on this invention, it is a graph which shows the result of X-ray diffraction (XRD) in case c / axis orientation with Al / (Ti + Al) = 0.84 is strong. In the Example which concerns on this invention, it is a graph which shows the result of X-ray diffraction (XRD) in case a-axis orientation is strong made into Al / (Ti + Al) = 0.83. In the comparative example which concerns on this invention, it is a graph which shows the result of X-ray diffraction (XRD) in the case of Al / (Ti + Al) = 0.60. In the Example which concerns on this invention, it is a graph which shows the relationship between Al / (Ti + Al) ratio and B constant which compared the Example with strong a-axis orientation, and the Example with strong c-axis orientation. In the Example which concerns on this invention, it is a cross-sectional SEM photograph which shows an Example with strong c-axis orientation. In the Example which concerns on this invention, it is a cross-sectional SEM photograph which shows an Example with a strong a-axis orientation.

  Hereinafter, a first embodiment of a temperature sensor according to the present invention will be described with reference to FIGS. Note that in some of the drawings used for the following description, the scale is appropriately changed as necessary to make each part recognizable or easily recognizable.

As shown in FIG. 1, the temperature sensor 1 of the present embodiment includes a pair of lead frames 2, a sensor unit 3 connected to the pair of lead frames 2, and a lead frame 2 fixed to the pair of lead frames 2. The insulating holding part 4 to hold | maintain and the pair of support frame 12 by which the base end side was fixed to the holding part 4 are provided.
The pair of lead frames 2 and the support frame 12 are formed of an alloy such as a copper alloy, an iron alloy, or stainless steel, and are supported by a resin holding portion 4 in a state where they are held at a predetermined interval. . The pair of lead frames 2 are connected to the pair of lead wires 5 in the holding portion 4.

  As shown in FIG. 3, the sensor unit 3 includes an insulating film 6, a thin film thermistor portion 7 patterned on the surface of the insulating film 6 with a thermistor material, and a plurality of comb portions on the thin film thermistor portion 7. A pair of comb-shaped electrodes 8 having a pattern formed opposite to each other with 8a, and one end connected to the pair of comb-shaped electrodes 8 and the other end connected to the pair of lead frames 2 and the insulating film 6 And a pair of pattern electrodes 9 patterned on the surface.

In addition, the temperature sensor 1 of the present embodiment includes a pair of insulating protective sheets 11 adhered to the front and back surfaces of the insulating film 6 in a state of covering the lead frame 2.
The pair of protective sheets 11 cover the thin film thermistor portion 7, the pattern electrode 9, and the leading end side of the lead frame 2, and are also bonded with the pair of support frames 12 interposed therebetween.
That is, the distal ends of the pair of support frames 12 extend with the thin film thermistor portion 7 interposed therebetween, and are fixed to an insulating protective sheet 11 that supports the insulating film. Thus, the support frame 12 is a dummy lead frame that is not connected to the pattern electrode 9 and the lead wire 5.

The insulating film 6 has a substantially rectangular shape, and a pair of support frames 12 extend along the insulating film 6 over substantially the entire length in the extending direction of the insulating film 6.
The thin film thermistor portion 7 is disposed in the vicinity of one end of the insulating film 6, and the pattern electrode 9 extends to the vicinity of the other end of the insulating film 6. The pattern electrode 9 has an adhesive pad portion 9 a formed in the vicinity of the other end of the insulating film 6.
Further, the tip portions of the pair of lead frames 2 are connected to the pattern electrode 9 in the vicinity of the other end of the insulating film 6. That is, the lead frame 2 has its tip end bonded to the bonding pad portion 9a of the pattern electrode 9 on the insulating film 6 with an adhesive (not shown) such as a conductive resin adhesive.

  The insulating film 6 is formed in a band shape with, for example, a polyimide resin sheet having a thickness of 7.5 to 125 μm. The insulating film 6 can also be made of PET: polyethylene terephthalate, PEN: polyethylene naphthalate, or the like, but for measuring the temperature of the heating roller, a polyimide film is desirable because the maximum use temperature is as high as 230 ° C.

The thin film thermistor portion 7 is disposed on one end side of the insulating film 6 and is formed of a TiAlN thermistor material. In particular, the thin film thermistor portion 7 is a metal represented by the general formula: Ti _x Al _y N _z (0.70 ≦ y / (x + y) ≦ 0.95, 0.4 ≦ z ≦ 0.5, x + y + z = 1). It consists of nitride and its crystal structure is a hexagonal wurtzite single phase.

The pattern electrode 9 and the comb-shaped electrode 8 are formed on the thin film thermistor portion 7 with a thickness of 5 to 100 nm of a Cr or NiCr bonding layer and a noble metal such as Au on the bonding layer with a thickness of 50 to 1000 nm. And an electrode layer formed.
The pair of comb-shaped electrodes 8 has a comb-shaped pattern in which the comb portions 8a are alternately arranged so as to face each other.

  The comb portion 8a extends along the extending direction of the insulating film 6 (the extending direction of the lead frame 2 and the support frame 12). That is, the back surface of the insulating film 6 is pressed against a rotating heating roller to measure the temperature. At this time, the thin film thermistor section is curved with a curvature in the extending direction of the insulating film 6. 7 is also subjected to bending stress in the same direction. At this time, since the comb portion 8a extends in the same direction, the thin film thermistor portion 7 is reinforced, and generation of cracks can be suppressed.

  The pair of protective films 10 is an insulating resin film or the like, for example, a polyimide film having a thickness of 20 μm is employed. The protective films 10 are bonded to each other with an adhesive in a state where the sensor unit 3 and the support frame 12 are sandwiched.

As described above, the thin film thermistor portion 7 is a metal nitride material, and has a general formula: Ti _x Al _y N _z (0.70 ≦ y / (x + y) ≦ 0.95, 0.4 ≦ z ≦ 0.5, x + y + z = 1), the crystal structure of which is a hexagonal crystal system with a single phase of wurtzite type (space group P6 ₃ mc (No. 186)) is there. That is, this metal nitride material has a composition in a region surrounded by points A, B, C, and D in the Ti—Al—N ternary phase diagram as shown in FIG. It is a metal nitride that is a wurtzite type.
In addition, each composition ratio (x, y, z) (atomic%) of the points A, B, C, and D is A (15, 35, 50), B (2.5, 47.5, 50), C (3, 57, 40), D (18, 42, 40).

The thin film thermistor portion 7 is a columnar crystal that is formed in a film shape of, for example, a thickness of 100 to 1000 nm and extends in a direction perpendicular to the surface of the film. Further, it is preferable that the c-axis is oriented more strongly than the a-axis in the direction perpendicular to the film surface.
Whether the a-axis orientation (100) is strong or the c-axis orientation (002) is strong in the direction perpendicular to the film surface (film thickness direction) is determined using X-ray diffraction (XRD). By examining the orientation, from the peak intensity ratio of (100) (Miller index indicating a-axis orientation) and (002) (Miller index indicating c-axis alignment), “(100) peak intensity” / “(( 002) peak intensity ”is less than 1.

A method for manufacturing the temperature sensor 1 will be described below with reference to FIGS. 1 and 3 to 9.
The manufacturing method of the temperature sensor 1 of the present embodiment includes a thin film thermistor section forming step of patterning the thin film thermistor section 7 on the insulating film 6 and a pair of comb-shaped electrodes 8 facing each other disposed on the thin film thermistor section 7. Then, an electrode forming step of patterning a pair of pattern electrodes 9 on the insulating film 6, a protective film forming step of forming a protective film 10 on the surface of the insulating film 6, and attaching the lead frame 2 to the sensor unit 3 A lead frame attaching step, and a sheet adhering step of adhering a pair of protective sheets 11 covering the sensor portion 3 and the leading end sides of the lead frame 2 and the support frame 12.

As a more specific example of the manufacturing method, Ti _x Al _y is used by reactive sputtering in a nitrogen-containing atmosphere using a Ti—Al alloy sputtering target on an insulating film 6 of polyimide film having a thickness of 50 μm. A thermistor film of N _z (x = 9, y = 43, z = 48) is formed with a film thickness of 200 nm. The sputtering conditions at that time were an ultimate vacuum of 5 × 10 ⁻⁶ Pa, a sputtering gas pressure of 0.4 Pa, a target input power (output) of 200 W, and a nitrogen gas fraction of 20 in a mixed gas atmosphere of Ar gas + nitrogen gas. %.

A resist solution is applied onto the deposited thermistor film with a bar coater, pre-baked at 110 ° C. for 1 minute and 30 seconds, exposed to light with an exposure device, and unnecessary portions are removed with a developer, and further at 150 ° C. for 5 minutes. Patterning is performed by post-baking. Thereafter, the thermistor film unnecessary Ti _x Al _y N _z by wet etching in a commercial Ti etchant, as shown in FIG. 5, to a thin film thermistor portion 7 of a desired shape on the resist stripping.

Next, a 20-nm thick Cr film bonding layer is formed on the thin film thermistor portion 7 and the insulating film 6 by sputtering. Further, an Au film electrode layer is formed to a thickness of 100 nm on the bonding layer by sputtering.
Next, after applying a resist solution on the electrode layer formed with a bar coater, pre-baking is performed at 110 ° C. for 1 minute 30 seconds, and after exposure with an exposure apparatus, unnecessary portions are removed with a developing solution, Patterning is performed by post-baking for 5 minutes. Thereafter, unnecessary electrode portions are wet-etched in the order of commercially available Au etchant and Cr etchant, and as shown in FIG. 6, desired comb electrodes 8 and pattern electrodes 9 are formed by resist stripping.

Further, a polyimide varnish is applied thereon by a printing method and cured at 250 ° C. for 30 minutes to form a polyimide protective film 10 having a thickness of 20 μm as shown in FIG.
Next, the tip end sides of the pair of lead frames 2 are arranged on the bonding pad portion 9a of the pattern electrode 9, and the tip end side of the lead frame 2 and the bonding pad portion 9a are made conductive as shown in FIG. Bond with resin adhesive.
Next, a pair of polyimide films with an adhesive as the protective sheet 11 are attached to the front and back surfaces of the insulating film 6 with the sensor portion 3 and the leading end sides of the lead frame 2 and the supporting frame 12 sandwiched therebetween. As shown in FIG. 1, the temperature sensor 1 is manufactured.

  In the case where a plurality of sensor portions 3 are manufactured at the same time, after forming a plurality of thin film thermistor portions 7, comb electrodes 8, pattern electrodes 9, and protective film 10 on a large sheet of insulating film 6, as described above, The sensor unit 3 is cut from the sheet.

As described above, in the temperature sensor 1 of the present embodiment, the distal ends of the pair of support frames 12 extend with the thin film thermistor portion 7 interposed therebetween, and the insulating protective sheet 11 that supports the insulating film 6 is provided on the insulating protective sheet 11. Since it is fixed, the insulating film 6 is supported by the support frame 12, and high rigidity can be ensured.
In particular, since the pair of supporting frames 12 extend along the insulating film 6 over substantially the entire length in the extending direction of the insulating film 6, the entire insulating film 6 is supported by the supporting frame 12. can do.

Further, since the support frame 12 is not connected to the pattern electrode 9, heat transfer is suppressed, and accurate temperature detection and high responsiveness can be obtained.
Furthermore, the thin film thermistor portion 7 formed directly on the insulating film 6 reduces the overall thickness, and an excellent response can be obtained with a small volume.

  Further, since the pair of lead frames 2 are connected to the pair of pattern electrodes 9, the thin film thermistor portion 7 and the lead frame 2 are connected by the pattern electrodes 9 directly formed on the insulating film 6, The effect of thermal conductivity with the lead frame 2 side is suppressed by the thin wiring with the pattern formed as compared with the case where the lead wires are connected. In addition, since the flatness of the contact part with respect to a measuring object is high, and it contacts a surface, exact temperature detection is possible and it is hard to damage the surface of measuring objects, such as a heating roller to rotate.

Furthermore, since the tip portions of the pair of lead frames 2 are connected to the pattern electrode 9 near the other end of the insulating film 6, the thin film thermistor portion 7 near one end is brought into contact with a measurement object such as a heating roller. However, the lead frame 2 connected to the pattern electrode 9 in the vicinity of the other end can be set so as not to come into contact with the measurement object, and heat conduction to the lead frame 2 can be suppressed.
Further, since the pair of protective sheets 11 are bonded to each other with the pair of support frames 12 interposed therebetween, the lead frame 2 and the support frame 12 can be stably held by the protective sheet 11 and the insulating film 6 can be held. The rigidity of can be improved.

Further, the thin film thermistor portion 7 is a metal represented by the general formula: Ti _x Al _y N _z (0.70 ≦ y / (x + y) ≦ 0.95, 0.4 ≦ z ≦ 0.5, x + y + z = 1). Since it is made of nitride and its crystal structure is a hexagonal crystal system and is a wurtzite single phase, it has a good B constant without firing and has high heat resistance.
In addition, since this metal nitride material is a columnar crystal extending in a direction perpendicular to the surface of the film, the film has high crystallinity and high heat resistance can be obtained.
Further, in this metal nitride material, by aligning the c-axis more strongly than the a-axis in the direction perpendicular to the film surface, a higher B constant can be obtained than when the a-axis alignment is strong.

In the method of manufacturing the thermistor material layer (thin film thermistor portion 7) of the present embodiment, since the film is formed by reactive sputtering in a nitrogen-containing atmosphere using a Ti—Al alloy sputtering target, the above-mentioned TiAlN is used. The metal nitride material can be formed without firing.
Further, by setting the sputtering gas pressure in reactive sputtering to less than 0.67 Pa, a metal nitride material film in which the c-axis is oriented more strongly than the a-axis in the direction perpendicular to the film surface is formed. be able to.

Therefore, in the temperature sensor 1 of the present embodiment, since the thin film thermistor portion 7 is formed of the thermistor material layer on the insulating film 6, the thin film thermistor portion 7 is formed by non-firing and has a high B constant and high heat resistance. Thus, an insulating film 6 having low heat resistance such as a resin film can be used, and a thin and flexible thermistor sensor having good thermistor characteristics can be obtained.
In addition, substrate materials using ceramics such as alumina are often used in the past. For example, when the thickness is reduced to 0.1 mm, the substrate material is very brittle and easily broken. Therefore, as described above, for example, a very thin film type thermistor sensor (sensor unit 3) having a thickness of 0.1 mm can be obtained.

  Next, a second embodiment of the temperature sensor according to the present invention will be described below with reference to FIGS. Note that, in the following description of the embodiment, the same components described in the above embodiment are denoted by the same reference numerals, and the description thereof is omitted.

  The difference between the second embodiment and the first embodiment is that, in the first embodiment, the pair of support frames 12 extend only in the extending direction of the insulating film 6, whereas the second embodiment is different from the first embodiment. In the temperature sensor 21, as shown in FIGS. 8 and 9, the distal ends of the pair of support frames 22 are connected by a connecting frame portion 22 a extending between the pair of support frames 22. Is a point. That is, in the second embodiment, the pair of support frames 22 and the connecting frame portion 22 a are formed in a U shape as a whole along the outer edge of the insulating film 6 and are installed so as to surround the sensor portion 3. ing. In the second embodiment, the pair of support frames 22 and the connecting frame portion 22a are integrally formed.

  When the temperature sensor 21 of the second embodiment is manufactured, as shown in FIG. 9, a pair of supporting frames connected to a pair of lead frames 2 whose base ends are fixed to the holding portion 4 by a connecting frame portion 22a. A frame 22 is prepared, and as shown in FIG. 10, the bonding pad portion 9 a of the sensor unit 3 and the leading end side of the lead frame 2 are bonded with a conductive adhesive for fixing. Further, similarly to the first embodiment, the temperature sensor 21 shown in FIG. 8 is manufactured by sandwiching and bonding the sensor unit 3, the support frame 22, and the connecting frame unit 22 a with the pair of protective sheets 11. .

  As described above, in the temperature sensor 21 according to the second embodiment, the distal end portions of the pair of support frames 22 are connected by the connection frame portion 22 a extending between the pair of support frames 22. The pair of support frames 22 are hardly twisted by the frame portion 22a, and the rigidity in the direction orthogonal to the extending direction of the insulating film 6 is further improved.

  Next, the results of evaluating the temperature sensor according to the present invention by the example produced based on the above embodiment will be described in detail with reference to FIGS.

<Production of film evaluation element>
As examples and comparative examples for evaluating the thermistor material layer (thin film thermistor portion 7) of the present invention, a film evaluation element 121 shown in FIG. 11 was produced as follows.
First, by reactive sputtering, Ti—Al alloy targets having various composition ratios are used to form Si substrates S on a Si wafer with a thermal oxide film at various composition ratios shown in Table 1 having a thickness of 500 nm. A thin film thermistor portion 7 of the formed metal nitride material was formed. The sputtering conditions at that time were: ultimate vacuum: 5 × 10 ⁻⁶ Pa, sputtering gas pressure: 0.1 to 1 Pa, target input power (output): 100 to 500 W, in a mixed gas atmosphere of Ar gas + nitrogen gas The nitrogen gas fraction was changed to 10 to 100%.

Next, a 20 nm Cr film was formed on the thin film thermistor portion 7 by sputtering, and a 100 nm Au film was further formed. Furthermore, after applying a resist solution thereon with a spin coater, pre-baking is performed at 110 ° C. for 1 minute 30 seconds, and after exposure with an exposure apparatus, unnecessary portions are removed with a developing solution, and post baking is performed at 150 ° C. for 5 minutes. Patterning. Thereafter, unnecessary electrode portions were wet-etched with a commercially available Au etchant and Cr etchant, and a patterned electrode 124 having a desired comb-shaped electrode portion 124a was formed by resist stripping. Then, this was diced into chips to obtain a film evaluation element 121 for B constant evaluation and heat resistance test.
For comparison, comparative examples in which the composition ratio of Ti _x Al _y N _z is out of the scope of the present invention and the crystal system is different were similarly prepared and evaluated.

<Evaluation of membrane>
(1) Composition analysis About the thin film thermistor part 7 obtained by the reactive sputtering method, the elemental analysis was conducted by X-ray photoelectron spectroscopy (XPS). In this XPS, quantitative analysis was performed on the sputtered surface having a depth of 20 nm from the outermost surface by Ar sputtering. The results are shown in Table 1. In addition, the composition ratio in the following table | surface is shown by "atomic%".

  In the X-ray photoelectron spectroscopy (XPS), the X-ray source is MgKα (350 W), the path energy is 58.5 eV, the measurement interval is 0.125 eV, the photoelectron extraction angle with respect to the sample surface is 45 deg, and the analysis area is about Quantitative analysis was performed under the condition of 800 μmφ. As for the quantitative accuracy, the quantitative accuracy of N / (Ti + Al + N) is ± 2%, and the quantitative accuracy of Al / (Ti + Al) is ± 1%.

(2) Specific resistance measurement About the thin film thermistor part 7 obtained by the reactive sputtering method, the specific resistance in 25 degreeC was measured by the 4 terminal method. The results are shown in Table 1.
(3) B constant measurement The resistance value of 25 degreeC and 50 degreeC of the element 121 for film | membrane evaluation was measured within the thermostat, and B constant was computed from the resistance value of 25 degreeC and 50 degreeC. The results are shown in Table 1.

In addition, the B constant calculation method in this invention is calculated | required by the following formula | equation from each resistance value of 25 degreeC and 50 degreeC as mentioned above.
B constant (K) = ln (R25 / R50) / (1 / T25-1 / T50)
R25 (Ω): resistance value at 25 ° C. R50 (Ω): resistance value at 50 ° C. T25 (K): 298.15K 25 ° C. is displayed as an absolute temperature T50 (K): 323.15K 50 ° C. is displayed as an absolute temperature

As can be seen from these _results, the Ti x _Al y _N 3 ternary triangular diagram of the composition ratio shown in FIG. 2 of _z, the points A, B, C, in a region surrounded by D, ie, "0.70 ≦ y / (x + y) ≦ 0.95, 0.4 ≦ z ≦ 0.5, x + y + z = 1 ”, thermistor characteristics of resistivity: 100 Ωcm or more, B constant: 1500 K or more Has been achieved.

  FIG. 12 shows a graph showing the relationship between the resistivity at 25 ° C. and the B constant based on the above results. A graph showing the relationship between the Al / (Ti + Al) ratio and the B constant is shown in FIG. From these graphs, in the region of Al / (Ti + Al) = 0.7 to 0.95 and N / (Ti + Al + N) = 0.4 to 0.5, the wurtzite single crystal system is hexagonal. As a phase, a high resistance and high B constant region having a specific resistance value at 25 ° C. of 100 Ωcm or more and a B constant of 1500 K or more can be realized. In the data of FIG. 13, the B constant varies for the same Al / (Ti + Al) ratio because the amount of nitrogen in the crystal is different.

  Comparative Examples 3 to 12 shown in Table 1 are regions of Al / (Ti + Al) <0.7, and the crystal system is a cubic NaCl type. In Comparative Example 12 (Al / (Ti + Al) = 0.67), the NaCl type and the wurtzite type coexist. Thus, in the region of Al / (Ti + Al) <0.7, the specific resistance value at 25 ° C. was less than 100 Ωcm, the B constant was less than 1500 K, and the region was low resistance and low B constant.

  Comparative Examples 1 and 2 shown in Table 1 are regions where N / (Ti + Al + N) is less than 40%, and the metal is in a crystalline state with insufficient nitriding. In Comparative Examples 1 and 2, neither the NaCl type nor the wurtzite type was in a state of very poor crystallinity. Further, in these comparative examples, it was found that both the B constant and the resistance value were very small and close to the metallic behavior.

(4) Thin film X-ray diffraction (identification of crystal phase)
The crystal phase of the thin film thermistor portion 7 obtained by the reactive sputtering method was identified by grazing incidence X-ray diffraction (Grazing Incidence X-ray Diffraction). This thin film X-ray diffraction was a small angle X-ray diffraction experiment, and the measurement was performed in the range of 2θ = 20 to 130 degrees with Cu as the tube, the incident angle of 1 degree.

  As a result, in the region of Al / (Ti + Al) ≧ 0.7, it is a wurtzite type phase (hexagonal crystal, the same phase as AlN), and in the region of Al / (Ti + Al) <0.65, the NaCl type phase. (Cubic, same phase as TiN). Further, in the case of 0.65 <Al / (Ti + Al) <0.7, it was a crystal phase in which the wurtzite type phase and the NaCl type phase coexist.

Thus, in the TiAlN system, a region having a high resistance and a high B constant exists in the wurtzite phase of Al / (Ti + Al) ≧ 0.7. In the examples of the present invention, the impurity phase is not confirmed, and is a wurtzite type single phase.
In Comparative Examples 1 and 2 shown in Table 1, the crystal phase was neither the wurtzite type phase nor the NaCl type phase as described above, and could not be identified in this test. Further, these comparative examples were materials with very poor crystallinity because the peak width of XRD was very wide. This is considered to be a metal phase with insufficient nitriding because it is close to a metallic behavior due to electrical characteristics.

  Next, all the examples of the present invention are films of wurtzite type phase, and since the orientation is strong, is the a-axis orientation strong in the crystal axis in the direction perpendicular to the Si substrate S (film thickness direction)? Whether the c-axis orientation is strong was investigated using XRD. At this time, in order to investigate the orientation of the crystal axis, the peak intensity ratio between (100) (Miller index indicating a-axis orientation) and (002) (Miller index indicating c-axis orientation) was measured.

As a result, the example in which the film was formed at a sputtering gas pressure of less than 0.67 Pa was a film having a (002) strength much stronger than (100) and a stronger c-axis orientation than a-axis orientation. . On the other hand, the example in which the film was formed at a sputtering gas pressure of 0.67 Pa or higher was a material having a (100) strength much stronger than (002) and a a-axis orientation stronger than the c-axis orientation.
In addition, even if it formed into a film on the polyimide film on the same film-forming conditions, it confirmed that the single phase of the wurtzite type phase was formed similarly. Moreover, even if it forms into a film on a polyimide film on the same film-forming conditions, it has confirmed that orientation does not change.

An example of the XRD profile of an example with strong c-axis orientation is shown in FIG. In this example, Al / (Ti + Al) = 0.84 (wurtzite type, hexagonal crystal), and the incident angle was 1 degree. As can be seen from this result, in this example, the intensity of (002) is much stronger than (100).
Moreover, an example of the XRD profile of an Example with a strong a-axis orientation is shown in FIG. In this example, Al / (Ti + Al) = 0.83 (wurtzite type, hexagonal crystal), and the incident angle was measured as 1 degree. As can be seen from this result, in this example, the intensity of (100) is much stronger than (002).

  Further, for this example, the symmetric reflection measurement was performed with the incident angle set to 0 degree. In the graph, (*) is a peak derived from the device, and it is confirmed that it is not the peak of the sample body or the peak of the impurity phase (in addition, the peak disappears in the symmetric reflection measurement). It can be seen that the peak is derived from the apparatus.)

An example of the XRD profile of the comparative example is shown in FIG. In this comparative example, Al / (Ti + Al) = 0.6 (NaCl type, cubic crystal), and the incident angle was 1 degree. A peak that could be indexed as a wurtzite type (space group P6 ₃ mc (No. 186)) was not detected, and it was confirmed to be a NaCl type single phase.

Next, the correlation between the crystal structure and the electrical characteristics was further compared in detail for the example of the present invention which is a wurtzite type material.
As shown in Table 2 and FIG. 17, a material in which the crystal axis having a high degree of orientation in the direction perpendicular to the substrate surface is the c-axis with respect to the Al / (Ti + Al) ratio being substantially the same (Examples 5, 7, 8, 9) and a material which is a-axis (Examples 19, 20, 21).

  Comparing the two, it can be seen that when the Al / (Ti + Al) ratio is the same, the material having a strong c-axis orientation has a larger B constant by about 100K than the material having a strong a-axis orientation. Further, when focusing attention on the N amount (N / (Ti + Al + N)), it can be seen that the material having a strong c-axis orientation has a slightly larger amount of nitrogen than the material having a strong a-axis orientation. Since the ideal stoichiometric ratio: N / (Ti + Al + N) = 0.5, it can be seen that a material with a strong c-axis orientation is an ideal material with a small amount of nitrogen defects.

<Evaluation of crystal form>
Next, as an example showing the crystal form in the cross section of the thin film thermistor portion 7, an example (Al / (Ti + Al) = 0.84 wurtzite type, hexagonal crystal, formed on the Si substrate S with a thermal oxide film, FIG. 18 shows a cross-sectional SEM photograph of the thin film thermistor portion 7 having a strong c-axis orientation. Moreover, the cross-sectional SEM photograph in the thin film thermistor part 7 of another Example (Al / (Ti + Al) = 0.83, a wurtzite type hexagonal crystal and strong a-axis orientation) is shown in FIG.
The samples of these examples are those obtained by cleaving the Si substrate S. Moreover, it is the photograph which observed the inclination at an angle of 45 degrees.

  As can be seen from these photographs, all the examples are formed of high-density columnar crystals. That is, it has been observed that columnar crystals grow in a direction perpendicular to the substrate surface in both the embodiment with strong c-axis orientation and the embodiment with strong a-axis orientation. Note that the breakage of the columnar crystal occurred when the Si substrate S was cleaved.

<Evaluation of heat resistance test of membrane>
In Examples and Comparative Examples shown in Table 1, resistance values and B constants before and after a heat resistance test at 125 ° C. and 1000 h in the atmosphere were evaluated. The results are shown in Table 3. For comparison, comparative examples using conventional Ta—Al—N materials were also evaluated in the same manner.
As can be seen from these results, although the Al concentration and the nitrogen concentration are different, when compared with the same B constant as that of the comparative example which is a Ta-Al-N system, the heat resistance when viewed in terms of changes in electrical characteristics before and after the heat resistance test is The Ti-Al-N system is superior. Examples 5 and 8 are materials with strong c-axis orientation, and Examples 21 and 24 are materials with strong a-axis orientation. When both are compared, the heat resistance of the example with a strong c-axis orientation is slightly improved as compared with the example with a strong a-axis orientation.

  Note that, in the Ta—Al—N-based material, the ionic radius of Ta is much larger than that of Ti or Al, and thus a wurtzite type phase cannot be produced in a high concentration Al region. Since the TaAlN system is not a wurtzite type phase, the Ti-Al-N system of the wurtzite type phase is considered to have better heat resistance.

The technical scope of the present invention is not limited to the above embodiments and examples, and various modifications can be made without departing from the spirit of the present invention.
For example, in each of the above embodiments, the support frame is bonded to the protective sheet and the sensor unit is supported via the protective sheet. However, the support frame is directly bonded to the insulating film to support the sensor unit. It doesn't matter. In addition, as in each of the above-described embodiments, the heat conduction to the support frame is suppressed by adhering the support frame to the protective sheet adhered to the insulating film as compared with the case of directly adhering to the insulating film. Therefore, temperature measurement with higher accuracy becomes possible.

  DESCRIPTION OF SYMBOLS 1, 21 ... Temperature sensor, 2 ... Lead frame, 3 ... Sensor part, 4 ... Holding part, 6 ... Insulating film, 7 ... Thin film thermistor part, 8 ... Comb-shaped electrode, 8a ... Comb part, 9 ... Pattern electrode, 10 Protective film 11 Protective sheet 12, 22 Support frame 22a Connection frame

Claims (6)

A pair of lead frames;
A sensor unit connected to the pair of lead frames;
An insulating holding part fixed to the pair of lead frames to hold the lead frame;
A pair of supporting frames fixed on the base end side to the holding portion;
The sensor part is an insulating film;
A thin film thermistor portion patterned with a thermistor material on the surface of the insulating film;
A pair of comb-shaped electrodes that have a plurality of comb portions on at least one of the upper and lower sides of the thin film thermistor portion and are patterned to face each other;
A pair of pattern electrodes having one end connected to the pair of comb-shaped electrodes and the other end connected to the pair of lead frames and patterned on the surface of the insulating film;
The distal ends of the pair of support frames extend with the thin film thermistor portion interposed therebetween, and are fixed to the insulating film or an insulating protective sheet that supports the insulating film. Temperature sensor. The temperature sensor according to claim 1,
The temperature sensor characterized in that the pair of supporting frames have their distal ends connected by a connecting frame portion extending between the pair of supporting frames. The temperature sensor according to claim 1 or 2,
The insulating film is substantially rectangular,
The temperature sensor characterized in that the pair of supporting frames extend along the insulating film over substantially the entire length in the extending direction of the insulating film. The temperature sensor according to any one of claims 1 to 3,
A pair of insulating protective sheets adhered to the front and back surfaces of the insulating film in a state of covering the lead frame,
The temperature sensor, wherein the pair of protective sheets are bonded to each other with the pair of support frames interposed therebetween. The temperature sensor according to claim 3,
The thin film thermistor portion is disposed near one end of the insulating film,
The pattern electrode extends to the vicinity of the other end of the insulating film,
The temperature sensor characterized in that the tip portions of the pair of lead frames are connected to the pattern electrode in the vicinity of the other end of the insulating film. The temperature sensor according to any one of claims 1 to 5,
The thin film thermistor portion is a metal nitride represented by the general formula: Ti _x Al _y N _z (0.70 ≦ y / (x + y) ≦ 0.95, 0.4 ≦ z ≦ 0.5, x + y + z = 1) A temperature sensor characterized in that its crystal structure is a hexagonal wurtzite single phase.