JP6009178B2 - Method for visualizing inclusions in aluminum material - Google Patents
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Description
本発明は、アルミニウム材の金属材料に含まれる軽元素異物などの介在物を非破壊で可視化し、その有無、位置、大きさなどの把握を可能にする介在物可視化方法に関する。 The present invention relates to an inclusion visualization method for visualizing non-destructive inclusions such as light element foreign substances contained in a metal material of an aluminum material, and making it possible to grasp the presence / absence, position, size, and the like.
金属材料の一つであるアルミニウム材は、軽量且つ高強度であるといった特徴を有する。しかし、アルミニウム材の内部にアルミナ（Ａｌ２Ｏ３）やマグネシア（ＭｇＯ）などの介在物が存在すると、圧延時にクラックが発生したり、切削加工時に突起が生じたりしてアルミニウム材の品質を低下させる原因となる。このため、アルミニウム材を用いた製品を今後さらに高品質なものとするためには、アルミナ（Ａｌ２Ｏ３）やマグネシア（ＭｇＯ）などの介在物が極力少ないアルミニウム材を用いる必要がある。そこで、アルミニウム材内部の介在物をできるだけ高精度に検出しようとする試みが様々に行われている。 An aluminum material, which is one of the metal materials, is characterized by being lightweight and high strength. However, if there are inclusions such as alumina (Al 2 O 3 ) or magnesia (MgO) inside the aluminum material, cracks will occur during rolling, and protrusions will occur during cutting, reducing the quality of the aluminum material. Cause it. For this reason, in order to further improve the quality of products using an aluminum material in the future, it is necessary to use an aluminum material with as few inclusions as possible such as alumina (Al 2 O 3 ) and magnesia (MgO). Therefore, various attempts have been made to detect the inclusions in the aluminum material as accurately as possible.
非特許文献１には、アルミニウム材の内包ガスや介在物等を評価する品質評価方法を開示している。この品質評価方法は、アルミニウム材を溶解し、得られた溶湯をフィルタでろ過し、フィルタに残存した介在物を顕微鏡で観察する手法である。非特許文献１の品質評価方法は、アルミニウム材を溶解し検査する、いわば破壊検査法であるが、非破壊的な検査手法としては、Ｘ線による透過像を取得する手法も存在する。 Non-Patent Document 1 discloses a quality evaluation method for evaluating the inclusion gas, inclusions, and the like of an aluminum material. This quality evaluation method is a technique in which an aluminum material is melted, the resulting molten metal is filtered with a filter, and the inclusions remaining on the filter are observed with a microscope. The quality evaluation method of Non-Patent Document 1 is a so-called destructive inspection method in which an aluminum material is dissolved and inspected, but as a non-destructive inspection method, there is a method of acquiring a transmission image by X-rays.
特許文献１は、アルミニウム板中に存在する非金属介在物の検出方法を開示している。この非金属介在物検出方法は、波長０．３〜２．５オングストロームで焦点の大きさが１００μｍ角または直径１００μｍの円以下の軟Ｘ線をアルミニウム板に照射し、該照射されたＸ線の透過Ｘ線像を撮像し、該撮像された透過Ｘ線像に基づき上記アルミニウム板中の非金属介在物を検出することを特徴とするものである。 Patent document 1 is disclosing the detection method of the nonmetallic inclusion which exists in an aluminum plate. In this non-metallic inclusion detection method, an aluminum plate is irradiated with soft X-rays having a wavelength of 0.3 to 2.5 angstroms and a focal spot size of 100 μm square or a diameter of 100 μm or less on an aluminum plate. A transmission X-ray image is picked up, and non-metallic inclusions in the aluminum plate are detected based on the picked-up transmission X-ray image.
この非金属介在物検出方法によれば、軟Ｘ線の焦点の大きさが小さければ小さいほどアルミニウム板中の非金属介在物の検出が容易になるとされている。 According to this non-metallic inclusion detection method, the smaller the size of the soft X-ray focal point, the easier the detection of non-metallic inclusions in the aluminum plate.
上述したように、アルミニウム材を溶解することで介在物を評価する方法（非特許文献１）やＸ線をアルミニウム材に透過させて透過Ｘ線像を撮像することで非金属介在物を検出する方法（特許文献１）などがすでに提案されている。
しかし、非特許文献１による品質評価方法では、ろ過によって取り出されたサンプルから介在物の評価結果を得るまで１日程度の時間が必要である。また、ろ過フィルタに取り出されたサンプルには外部からの異物の侵入の可能性を排除することができないという問題や、アルミニウム材中で介在物が含有されていた箇所を特定できないという問題などがある。
As described above, a method for evaluating inclusions by dissolving an aluminum material (Non-Patent Document 1) and a method for detecting non-metallic inclusions by transmitting X-rays through an aluminum material and capturing a transmission X-ray image. A method (Patent Document 1) has already been proposed.
However, in the quality evaluation method according to Non-Patent Document 1, it takes about one day until an evaluation result of inclusions is obtained from a sample taken out by filtration. In addition, there is a problem that the sample taken out to the filtration filter cannot eliminate the possibility of entry of foreign matters from the outside, and a problem that the location where inclusions are contained in the aluminum material cannot be specified. .
また、特許文献１に開示されるＸ線透過画像を用いた品質評価方法では、粒径が１００μｍ程度又はそれ未満の小さな介在物を検知して評価することが要求される。しかし、アルミニウム板中の介在物の組成はアルミナ（Ａｌ２Ｏ３）やマグネシア（ＭｇＯ）などであって、アルミニウム（Ａｌ）とＸ線吸収係数がほとんど変わらない。そのため、アルミニウム板中の介在物を、Ｘ線透過法によって検出し評価することは困難である。 Moreover, in the quality evaluation method using the X-ray transmission image disclosed in Patent Document 1, it is required to detect and evaluate small inclusions having a particle size of about 100 μm or less. However, the composition of inclusions in the aluminum plate is alumina (Al 2 O 3 ), magnesia (MgO), etc., and the X-ray absorption coefficient is almost the same as that of aluminum (Al). Therefore, it is difficult to detect and evaluate the inclusions in the aluminum plate by the X-ray transmission method.
さらに、鋼板内部の傷を超音波を用いて検査する超音波探傷法も広く用いられているが、粒径が１００μｍ程度又はそれ未満となる介在物のサイズは超音波によって確認可能な限界のサイズであるため、超音波探傷法によっては介在物の正確な位置やサイズが把握できないといった問題がある。
そこで、本発明は、上述の問題及び課題に鑑み、アルミニウム材等の金属材料に含まれる軽元素異物などの介在物を非破壊で可視化し、その有無、位置、大きさなどの把握を可能にする介在物可視化方法を提供することを目的とする。
Furthermore, an ultrasonic flaw detection method that inspects scratches in the steel sheet using ultrasonic waves is also widely used, but the size of inclusions having a particle size of about 100 μm or less is the limit size that can be confirmed by ultrasonic waves. Therefore, there is a problem that the exact position and size of the inclusion cannot be grasped by the ultrasonic flaw detection method.
Therefore, in view of the above-described problems and problems, the present invention visualizes non-destructive inclusions such as light element foreign substances contained in a metal material such as an aluminum material and makes it possible to grasp the presence, position, size, and the like. It is an object to provide a method for visualizing inclusions.
上述の目的を達成するため、本発明においては以下の技術的手段を講じた。
本発明に係るアルミニウム材内の介在物可視化方法は、Ｘ線を照射するＸ線発生装置と、前記Ｘ線の照射方向に配置された第１回折格子と、前記第１回折格子を通過したＸ線の通過方向に配置された第２回折格子と、前記第２回折格子を通過したＸ線を受光して画像化するＸ線画像化装置と、を含んで構成されるタルボ干渉計を用いたアルミニウム材内の介在物可視化方法であって、前記Ｘ線の照射方向において、前記Ｘ線発生装置と前記第２回折格子の間にアルミニウム材を配置し、前記アルミニウム材を透過した後に前記第２回折格子を通過したＸ線を前記Ｘ線画像化装置によって受光することで、前記アルミニウム材の内部に存在する介在物を画像化することを特徴とする。
In order to achieve the above-described object, the present invention takes the following technical means.
The method of visualizing inclusions in an aluminum material according to the present invention includes an X-ray generator for irradiating X-rays, a first diffraction grating arranged in the X-ray irradiation direction, and X passing through the first diffraction grating. A Talbot interferometer including a second diffraction grating arranged in a line passing direction and an X-ray imaging device that receives and images X-rays that have passed through the second diffraction grating is used. A method for visualizing inclusions in an aluminum material, wherein an aluminum material is disposed between the X-ray generator and the second diffraction grating in the X-ray irradiation direction, and the second material is transmitted through the aluminum material. The X-rays that have passed through the diffraction grating are received by the X-ray imaging device, thereby imaging the inclusions present inside the aluminum material.
また、前記Ｘ線発生装置の管電圧が、１０ｋＶ以上９０ｋＶ以下であると好ましい。
さらに、前記Ｘ線の透過方向に沿った前記アルミニウム材の厚みが、０．１ｍｍ以上１０ｍｍ以下であると好ましい。
ここで、好ましくは、前記アルミニウム材を前記Ｘ線発生装置と前記第１回折格子との間で前記第１回折格子寄りに配置するとよい。
The tube voltage of the X-ray generator is preferably 10 kV or more and 90 kV or less.
Furthermore, it is preferable that the thickness of the aluminum material along the X-ray transmission direction is 0.1 mm or more and 10 mm or less.
Here, it is preferable that the aluminum material is disposed closer to the first diffraction grating between the X-ray generator and the first diffraction grating.
また、好ましくは、前記アルミニウム材を前記第１回折格子と前記第２回折格子との間であって略中心位置に配置するとよい。
なお、本発明にかかる鋼材の冷却制御方法の最も好ましい形態は、Ｘ線を照射するＸ線発生装置と、前記Ｘ線の照射方向に配置された第１回折格子と、前記第１回折格子を通過したＸ線の通過方向に配置された第２回折格子と、前記第２回折格子を通過したＸ線を受光して画像化するＸ線画像化装置と、を含んで構成されるタルボ干渉計を用いたアルミニウム材内の介在物可視化方法であって、前記Ｘ線の照射方向において、前記Ｘ線発生装置と前記第２回折格子の間にアルミニウム材を配置し、前記アルミニウム材を透過した後に前記第２回折格子を通過したＸ線を前記Ｘ線画像化装置によって受光することで、前記アルミニウム材の内部に存在する介在物を画像化するものであって、前記アルミニウム材を前記Ｘ線発生装置と前記第１回折格子との間で前記第１回折格子寄りに配置することとしていて、前記前記第１回折格子を、前記アルミニウム材と略同幅としていることを特徴とする。
また、本発明にかかる鋼材の冷却制御方法の他の最も好ましい形態は、Ｘ線を照射するＸ線発生装置と、前記Ｘ線の照射方向に配置された第１回折格子と、前記第１回折格子を通過したＸ線の通過方向に配置された第２回折格子と、前記第２回折格子を通過したＸ線を受光して画像化するＸ線画像化装置と、を含んで構成されるタルボ干渉計を用いたアルミニウム材内の介在物可視化方法であって、前記Ｘ線の照射方向において、前記Ｘ線発生装置と前記第２回折格子の間にアルミニウム材を配置し、前記アルミニウム材を透過した後に前記第２回折格子を通過したＸ線を前記Ｘ線画像化装置によって受光することで、前記アルミニウム材の内部に存在する介在物を画像化するものであって、前記アルミニウム材を前記第１回折格子と前記第２回折格子との間であって略中心位置に配置することとしていて、前記第２回折格子を、前記アルミニウム材と略同幅としていることを特徴とする。
Preferably, the aluminum material is disposed between the first diffraction grating and the second diffraction grating at a substantially central position.
The most preferable mode of the steel material cooling control method according to the present invention includes an X-ray generator for irradiating X-rays, a first diffraction grating arranged in the X-ray irradiation direction, and the first diffraction grating. A Talbot interferometer configured to include a second diffraction grating arranged in the passing direction of the X-rays that have passed, and an X-ray imaging device that receives and images the X-rays that have passed through the second diffraction grating. A method for visualizing inclusions in an aluminum material using an aluminum material, wherein an aluminum material is disposed between the X-ray generator and the second diffraction grating in the X-ray irradiation direction, and passes through the aluminum material X-rays that have passed through the second diffraction grating are received by the X-ray imaging device to image inclusions present in the aluminum material, and the aluminum material is generated as the X-ray. Device and the first Have a placing in the first diffraction grating closer with the grating, the first diffraction grating, characterized in that as the said aluminum material substantially the same width.
In addition, another most preferable embodiment of the steel material cooling control method according to the present invention is an X-ray generator for irradiating X-rays, a first diffraction grating disposed in the X-ray irradiation direction, and the first diffraction. A Talbot including a second diffraction grating arranged in the direction of passage of X-rays that have passed through the grating, and an X-ray imaging device that receives and images the X-rays that have passed through the second diffraction grating. A method for visualizing inclusions in an aluminum material using an interferometer, wherein an aluminum material is disposed between the X-ray generator and the second diffraction grating in the X-ray irradiation direction, and passes through the aluminum material Then, X-rays that have passed through the second diffraction grating are received by the X-ray imaging device, thereby imaging the inclusions present in the aluminum material. 1 diffraction grating and the first Have a placing in a substantially central position a between the diffraction grating, the second diffraction grating, characterized in that in said aluminum material substantially the same width.
本発明の介在物可視化方法によれば、アルミニウム材等の金属材料に含まれる軽元素異物などの介在物を非破壊で可視化し、その有無、位置、大きさなどの把握が可能となる。 According to the inclusion visualization method of the present invention, inclusions such as light element foreign substances contained in a metal material such as an aluminum material can be visualized in a non-destructive manner, and its presence, position, size, and the like can be grasped.
以下、図面を参照しながら、本発明の実施形態を説明する。
本実施形態では、金属材料であるアルミニウム材の内部に含まれるアルミナ（Ａｌ２Ｏ３）やマグネシア（ＭｇＯ）などの軽元素異物（介在物）を、Ｘ線を照射するタルボ干渉計１を用いて非破壊で可視化し、その介在物のアルミニウム材内での有無、位置、大きさなどの把握を可能にする可視化方法を説明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
In this embodiment, a Talbot interferometer 1 that irradiates light element foreign matter (inclusions) such as alumina (Al 2 O 3 ) and magnesia (MgO) contained in an aluminum material that is a metal material with X-rays is used. A visualization method that makes it possible to visualize the presence, position, size, etc. of the inclusions in the aluminum material will be described.
図１を参照しながら、タルボ干渉計１の構成について説明する。
図１はタルボ干渉計１の構成を示す概略構成図であり、図１（ａ）は、測定対象であるアルミニウム材２をＸ線発生装置３と位相回折格子４との間に配置した場合を示し、図１（ｂ）は、アルミニウム材２を位相回折格子４と吸収格子５との間に配置した場合を示す図である。図１（ａ）及び図１（ｂ）は、同じタルボ干渉計１の構成を示している。
The configuration of the Talbot interferometer 1 will be described with reference to FIG.
FIG. 1 is a schematic configuration diagram showing the configuration of the Talbot interferometer 1. FIG. 1A shows a case where an aluminum material 2 to be measured is arranged between an X-ray generator 3 and a phase diffraction grating 4. FIG. 1B shows a case where the aluminum material 2 is disposed between the phase diffraction grating 4 and the absorption grating 5. FIG. 1A and FIG. 1B show the configuration of the same Talbot interferometer 1.
タルボ干渉計１は、Ｘ線を照射するＸ線発生装置３、Ｘ線発生装置３からのＸ線照射方向に設けられた位相回折格子（第１回折格子）４、位相回折格子４を通過したＸ線が通過するように設けられた吸収格子（第２回折格子）５、及び吸収格子５を通過したＸ線を受光するＸ線画像検出器（Ｘ線画像化装置）６を含んで構成されている。
Ｘ線発生装置３は、Ｘ線を発生するＸ線管を有しており、Ｘ線管に付加された管電圧に応じたエネルギーのＸ線を特定方向に照射するものである。Ｘ線発生装置３のＸ線照射方
向には、Ｘ線発生装置３から所定距離だけ離れて位相回折格子４が配置される。
The Talbot interferometer 1 passed through an X-ray generator 3 that irradiates X-rays, a phase diffraction grating (first diffraction grating) 4 provided in the X-ray irradiation direction from the X-ray generator 3, and the phase diffraction grating 4. An absorption grating (second diffraction grating) 5 provided to allow X-rays to pass therethrough and an X-ray image detector (X-ray imaging device) 6 that receives the X-rays that have passed through the absorption grating 5 are configured. ing.
The X-ray generator 3 has an X-ray tube that generates X-rays, and irradiates X-rays having energy corresponding to a tube voltage applied to the X-ray tube in a specific direction. In the X-ray irradiation direction of the X-ray generator 3, the phase diffraction grating 4 is arranged at a predetermined distance from the X-ray generator 3.
位相回折格子４は、Ｘ線の通過方向に沿った厚みが異なる二つの領域が交互に並べられた、例えば２次元の回折格子である。厚みの異なる二つの領域を透過したＸ線のそれぞれは、位相回折格子４を構成する物質内の通過距離が異なるために、例えばπまたはπ／２だけ互いに位相がずれた状態となる。位相回折格子４を通過したＸ線は、格子のピッチとＸ線波長で決まる位相回折格子４からの特定距離において位相回折格子４の形状を反映した干渉縞を形成する。この干渉縞はタルボ自己像と呼ばれる。位相回折格子４からタルボ自己像が出現する位置までの距離をタルボ距離という。後に説明するＸ線画像検出器６によって十分なコントラストでタルボ自己像を検出するためには、吸収格子５が用いられる。 The phase diffraction grating 4 is, for example, a two-dimensional diffraction grating in which two regions having different thicknesses along the X-ray passing direction are alternately arranged. Since the X-rays transmitted through the two regions having different thicknesses have different passing distances in the material constituting the phase diffraction grating 4, the phases are shifted from each other by, for example, π or π / 2. The X-rays that have passed through the phase diffraction grating 4 form interference fringes that reflect the shape of the phase diffraction grating 4 at a specific distance from the phase diffraction grating 4 determined by the pitch of the grating and the X-ray wavelength. This interference fringe is called a Talbot self-image. The distance from the phase diffraction grating 4 to the position where the Talbot self-image appears is called the Talbot distance. In order to detect the Talbot self-image with sufficient contrast by the X-ray image detector 6 described later, the absorption grating 5 is used.
吸収格子５は、Ｘ線を十分に吸収する吸収部とＸ線を透過させる透過部とが相互に周期的に並べられた、例えば２次元の回折格子である。吸収格子５の透過部と吸収部のピッチは、タルボ自己像の干渉縞の周期とほぼ等しくなるように構成されている。吸収格子５をＸ線画像検出器６の直前に配置することで、位相回折格子４を透過したＸ線が形成するタルボ自己像はモアレ縞として検出される。Ｘ線発生装置３から照射されたＸ線の位相変化の情報はモアレ縞の変形として検出することができる。 The absorption grating 5 is, for example, a two-dimensional diffraction grating in which an absorption part that sufficiently absorbs X-rays and a transmission part that transmits X-rays are periodically arranged. The pitch between the transmission part and the absorption part of the absorption grating 5 is configured to be substantially equal to the period of the interference fringes of the Talbot self-image. By arranging the absorption grating 5 immediately before the X-ray image detector 6, the Talbot self-image formed by the X-rays transmitted through the phase diffraction grating 4 is detected as moire fringes. Information on the phase change of the X-rays emitted from the X-ray generator 3 can be detected as the deformation of moire fringes.
Ｘ線画像検出器６は、吸収格子５を通過したＸ線を受光することでモアレ縞の変形を検出してＸ線透過画像を形成するものであって、例えば、位相回折格子４とＸ線画像検出器６との距離がタルボ距離と等しくなるように配置される。言い換えれば、このようにＸ線画像検出器６を配置することで、タルボ自己像を検出し、Ｘ線の照射経路に置かれたアルミニウム材２の位相像を得ることができるとも言える。 The X-ray image detector 6 receives X-rays that have passed through the absorption grating 5 to detect the deformation of moire fringes and form an X-ray transmission image. It arrange | positions so that the distance with the image detector 6 may become equal to the Talbot distance. In other words, by arranging the X-ray image detector 6 in this way, it can be said that a Talbot self-image can be detected and a phase image of the aluminum material 2 placed on the X-ray irradiation path can be obtained.
以上の説明から、位相回折格子４と吸収格子５との距離をタルボ距離と同じにして吸収格子５をＸ線画像検出器６に近接させ、モアレ縞の変化をＸ線画像検出器６で検出すれば、測定対象であるアルミニウム材２の内部の位相コントラストイメージを撮像することができる。また、縞走査法などのデジタル位相計測技術を用い、屈折によってＸ線が曲げられる角度分布(すなわち位相シフトの微分像)を取得することができる。位相物体を回転させてこの計測を繰り返すことで得るデータから、位相物体の屈折率分布を示す三次元画像を再構成することも可能である。 From the above description, the distance between the phase diffraction grating 4 and the absorption grating 5 is made the same as the Talbot distance, the absorption grating 5 is brought close to the X-ray image detector 6, and the change of the moire fringes is detected by the X-ray image detector 6. Then, the phase contrast image inside the aluminum material 2 to be measured can be taken. In addition, using a digital phase measurement technique such as a fringe scanning method, an angle distribution (that is, a differential image of phase shift) in which X-rays are bent by refraction can be acquired. It is also possible to reconstruct a three-dimensional image showing the refractive index distribution of the phase object from data obtained by rotating the phase object and repeating this measurement.
このような構成のタルボ干渉計１を用いてアルミニウム材２の内部の介在物を可視化し、その介在物の有無、位置、大きさなどを把握する。
まず、図１（ａ）に示すように、Ｘ線の透過方向に沿った厚みが０．１ｍｍ以上１０ｍｍ以下程度となるように所定の厚みに加工したアルミニウム材２を、Ｘ線発生装置３と位相回折格子（第１回折格子）４との間で位相回折格子４寄りに配置する。このように、位相回折格子４の前、即ちＸ線源側にアルミニウム材２が配置されると、照射されたＸ線はアルミニウム材２の内部に存在する介在物の界面で散乱するとともに屈折する。これによって、Ｘ線発生装置３から出射されたＸ線が形成するタルボ自己像には、アルミニウム材２によるＸ線の位相変化情報が含まれることとなる。
Using the Talbot interferometer 1 having such a configuration, the inclusions inside the aluminum material 2 are visualized, and the presence, position, size, etc. of the inclusions are grasped.
First, as shown in FIG. 1A, an aluminum material 2 processed into a predetermined thickness so that the thickness along the X-ray transmission direction is about 0.1 mm or more and 10 mm or less, and an X-ray generator 3 The phase diffraction grating (first diffraction grating) 4 is disposed close to the phase diffraction grating 4. As described above, when the aluminum material 2 is arranged in front of the phase diffraction grating 4, that is, on the X-ray source side, the irradiated X-rays are scattered and refracted at the interface of inclusions existing inside the aluminum material 2. . As a result, the Talbot self-image formed by the X-rays emitted from the X-ray generator 3 includes the X-ray phase change information of the aluminum material 2.
また、図１（ｂ）に示すように、アルミニウム材２を、位相回折格子（第１回折格子）４と吸収格子（第２回折格子）５との間であって、Ｘ線透過方向に沿った位相回折格子４と吸収格子５の略中心位置に配置することもできる。ここでいう略中心位置とは、幾何学的に厳密な位相回折格子４と吸収格子５の中間位置を指すわけではない。つまり、アルミニウム材２は、位相回折格子４と吸収格子５の間に配置されればよく、好ましくは位相回折格子４と吸収格子５の中間位置近傍にあればよい。図１（ｂ）に示すアルミニウム材２の配置によっても、図１（ａ）の場合と同様に、Ｘ線発生装置３から出射されたＸ線が形成するタルボ自己像には、アルミニウム材２によるＸ線１２の位相変化情報が含まれる。 Further, as shown in FIG. 1B, the aluminum material 2 is placed between the phase diffraction grating (first diffraction grating) 4 and the absorption grating (second diffraction grating) 5 along the X-ray transmission direction. The phase diffraction grating 4 and the absorption grating 5 may be arranged at substantially the center position. The approximate center position here does not mean an intermediate position between the phase diffraction grating 4 and the absorption grating 5 which are geometrically strict. That is, the aluminum material 2 may be disposed between the phase diffraction grating 4 and the absorption grating 5, and preferably just in the vicinity of an intermediate position between the phase diffraction grating 4 and the absorption grating 5. Also by the arrangement of the aluminum material 2 shown in FIG. 1B, the Talbot self-image formed by the X-rays emitted from the X-ray generator 3 is caused by the aluminum material 2 as in the case of FIG. The phase change information of the X-ray 12 is included.
ここで説明を補足すると、アルミニウム材２内部の主な介在物はアルミナ（Ａｌ２Ｏ３）やマグネシア（ＭｇＯ）などであるが、それら介在物の主成分はアルミニウムそのものであったり、アルミニウムより原子番号が１だけ小さいマグネシウムであること、また、酸素はＸ線の吸収がそれら金属よりさらに低いことなどからＸ線の吸収係数差によっては、画像のコントラスト差がつきにくい。しかしながら、アルミニウム材２内の介在物は粗
い表面形状をしており、ごくわずかなＸ線の散乱が発生する。
To supplement the explanation here, the main inclusions in the aluminum material 2 are alumina (Al 2 O 3 ), magnesia (MgO), etc., but the main component of these inclusions is aluminum itself, or more atoms than aluminum. Since the number is magnesium which is smaller by one, and oxygen absorbs X-rays even lower than those metals, the difference in image contrast is difficult to occur depending on the difference in X-ray absorption coefficient. However, the inclusions in the aluminum material 2 have a rough surface shape, and very little X-ray scattering occurs.
そこで、本願の発明者は、散乱Ｘ線を回折効果で強調して画像化可能なタルボ干渉計１がアルミニウム材内の介在物観察に有効であることを研究及び実験を経て見出した。すなわち、管電圧が１０ｋV〜１００ｋV程度（好ましくは１０ｋＶ以上９０ｋＶ以下）で数μｍの焦点径をもつＸ線発生装置３から得られるＸ線を、厚み０．１ｍｍ以上１０ｍｍ以下程度のアルミニウム材２に照射し、その直下流に設置した位相回折格子４により散乱Ｘ線を含むモアレ縞を生成し、適切な距離に配置した吸収格子５とその下流に設置したＸ線画像検出器（Ｘ線画像化装置）６でモアレ縞の位相情報を取得し、演算処理することで介在物の存在を可視化することができる。 Therefore, the inventors of the present application have found through research and experiments that the Talbot interferometer 1 capable of enhancing the scattered X-rays with a diffraction effect and forming an image is effective for observing inclusions in the aluminum material. That is, the X-ray obtained from the X-ray generator 3 having a tube voltage of about 10 kV to 100 kV (preferably 10 kV to 90 kV) and a focal diameter of several μm is applied to the aluminum material 2 having a thickness of about 0.1 mm to 10 mm. Irradiation, a moire fringe including scattered X-rays is generated by the phase diffraction grating 4 disposed immediately downstream thereof, an absorption grating 5 disposed at an appropriate distance, and an X-ray image detector (X-ray imaging) disposed downstream thereof The presence of inclusions can be visualized by obtaining phase information of moire fringes with the apparatus 6 and performing arithmetic processing.
以下、図２及び図３を参照しながら、タルボ干渉計１を用いてアルミニウム材２の内部の介在物を可視化するときの実施例を説明する。
まず、図２を参照しつつ、比較例として、タルボ干渉計１を用いない従来のＸ線撮像による結果を説明する。図２では、溶湯アルミ中にアルミナの微粉（粒径１００μｍ程度）を混ぜ、圧延したアルミニウム材２を従来のマイクロフォーカスＸ線源で透過・撮像した写真を単色の諧調によって示す。
Hereinafter, with reference to FIG. 2 and FIG. 3, an embodiment when visualizing inclusions inside the aluminum material 2 using the Talbot interferometer 1 will be described.
First, referring to FIG. 2, as a comparative example, a result of conventional X-ray imaging without using the Talbot interferometer 1 will be described. In FIG. 2, a photograph in which fine aluminum powder (particle size of about 100 μm) is mixed in molten aluminum, and the rolled aluminum material 2 is transmitted and imaged with a conventional microfocus X-ray source is shown by a single color tone.
図２（ａ）に示す板厚０．３ｍｍ程度の薄い板では、内部のアルミナが薄い黒点として画像化され確認できるが、図２（ｂ）に示す板厚２．５ｍｍ程度になると全くアルミナが画像化されず検出できないことがわかる。また図２（ａ）は、コントラストを強調した写真であるため視認できるが、厚み０．３ｍｍのアルミニウム材２の場合でも、アルミとアルミナの間には数％程度のコントラスト差しかないため、コントラストを強調することでかろうじて見えている。従って、これ以上厚いアルミニウム材２では介在物の検知は困難である。したがって、従来の透過法では、薄く圧延したアルミニウム材２中の介在物の可視化がかろうじて可能なだけであり、また一度に確認可能な範囲も１０ｍｍ四方程度と狭く実用性が低い。 In the thin plate having a thickness of about 0.3 mm shown in FIG. 2A, the inner alumina is imaged and confirmed as a thin black spot. However, when the thickness is about 2.5 mm shown in FIG. It turns out that it cannot be detected without being imaged. Further, FIG. 2A can be visually recognized because the photograph emphasizes the contrast. However, even in the case of the aluminum material 2 having a thickness of 0.3 mm, there is no difference of about several percent between aluminum and alumina, so the contrast is reduced. It is barely visible by emphasis. Therefore, it is difficult to detect inclusions in the aluminum material 2 that is thicker than this. Therefore, in the conventional transmission method, the inclusions in the thinly rolled aluminum material 2 can only be visualized, and the range that can be confirmed at one time is as narrow as about 10 mm square and its practicality is low.
これに対して、図３を参照しつつ、本実施形態の実施例として、タルボ干渉計１を用いたＸ線撮像による結果を説明する。図３では、２．５ｍｍおよび０．３ｍｍの厚さで５０ｍｍ四角程度にカットしたアルミニウム材２（サンプル）を、タルボ干渉計１を用いたＸ線撮像によって透過・撮像した写真を単色の諧調によって示す。このアルミニウム材２は、溶湯アルミ中にアルミナの微粉（粒径１００μｍ程度）を混ぜて強攪拌したあと鋳型で直方形状に鋳造し、その後圧延することで２．５ｍｍおよび０．３ｍｍの厚さで１ｍサイズ程度の板を製作し、超音波探傷でアルミナ粉の存在しそうな場所を選択し、その部分を中心に５０ｍｍ四角程度にカットしたものである
まず、タルボ干渉計１を用いたＸ線撮像に先立って、従来のマイクロフォーカスＸ線装置によるＸ線透過による画像化を試みた。このときの空間分解能は約１μｍである。この場合、０．３ｍｍの板厚のサンプルでは、Ｘ線発生装置３の最適な管電圧は２５ｋＶであって、得られた画像のコントラストを調整することでアルミニウム材２内部にアルミナ粉が分布していることを確認できた。しかしながら、板厚が２．５ｍｍのサンプルの場合は、管電圧を２５ｋＶ〜６０ｋＶまで変更しながら様々な画像処理を試みたが、アルミニウム材２内部のアルミナ粉の観察はできなかった。
On the other hand, with reference to FIG. 3, the result by the X-ray imaging using the Talbot interferometer 1 is demonstrated as an Example of this embodiment. In FIG. 3, a photograph obtained by transmitting and capturing an aluminum material 2 (sample) having a thickness of 2.5 mm and 0.3 mm to a square of about 50 mm by X-ray imaging using a Talbot interferometer 1 is obtained by monotone gradation. Show. This aluminum material 2 is prepared by mixing fine powder of alumina (particle size of about 100 μm) in molten aluminum, stirring vigorously, casting into a rectangular shape with a mold, and then rolling to a thickness of 2.5 mm and 0.3 mm. A plate of about 1 m size is manufactured, a place where alumina powder is likely to exist is selected by ultrasonic flaw detection, and is cut into a 50 mm square around that part. First, X-ray imaging using the Talbot interferometer 1 Prior to this, imaging by X-ray transmission with a conventional microfocus X-ray apparatus was attempted. The spatial resolution at this time is about 1 μm. In this case, in the sample having a plate thickness of 0.3 mm, the optimum tube voltage of the X-ray generator 3 is 25 kV, and the alumina powder is distributed inside the aluminum material 2 by adjusting the contrast of the obtained image. I was able to confirm that. However, in the case of a sample with a plate thickness of 2.5 mm, various image processing was attempted while changing the tube voltage from 25 kV to 60 kV, but the alumina powder inside the aluminum material 2 could not be observed.
このような従来手法による結果を踏まえて、本実施形態によるタルボ干渉計１を用いたアルミニウム材２の内部観察を試みた。まず、図１（ａ）に示すように、サンプルであるアルミニウム材２を位相回折格子４の手前に設置した。このときのＸ線発生装置３の管電圧は４０ｋＶ、管電流は１６０μＡ、スポットサイズは５μｍである。この場合、図３（ａ）に示すように、明瞭にアルミニウム材２内のアルミナ粉を画像化し観察することができた。 Based on the result of such a conventional method, an internal observation of the aluminum material 2 using the Talbot interferometer 1 according to the present embodiment was attempted. First, as shown in FIG. 1A, a sample aluminum material 2 was placed in front of the phase diffraction grating 4. At this time, the tube voltage of the X-ray generator 3 is 40 kV, the tube current is 160 μA, and the spot size is 5 μm. In this case, as shown in FIG. 3A, the alumina powder in the aluminum material 2 could be clearly imaged and observed.
さらに、同じ図１（ａ）の配置でＸ線発生装置３の管電圧を５０ｋＶに上げて厚さ２．５ｍｍのサンプルを観察した。その結果も図３（ｂ）に示すようにアルミニウム材２内部のアルミナ粉（アルミナ粒）を明瞭に観察できた。
また、図３（ｃ）に示すように、別の板厚２．５ｍｍのサンプルの表面を研磨して得た板厚２．２ｍｍのアルミニウム板を重ねて板厚４．７ｍｍのアルミニウム材２を用意して
観察した。このときの管電圧は６０ｋＶである。この場合、図３（ａ）及び図３（ｂ）に比べて若干明瞭さに欠けるものの、アルミニウム材２内部のアルミナ粉を観察できた。
Furthermore, the sample of 2.5 mm in thickness was observed by raising the tube voltage of the X-ray generator 3 to 50 kV with the same arrangement of FIG. As a result, the alumina powder (alumina particles) inside the aluminum material 2 could be clearly observed as shown in FIG.
Moreover, as shown in FIG.3 (c), the aluminum material 2 with a plate thickness of 4.7 mm is obtained by laminating the aluminum plate with a plate thickness of 2.2 mm obtained by polishing the surface of another sample with a plate thickness of 2.5 mm. Prepared and observed. The tube voltage at this time is 60 kV. In this case, alumina powder inside the aluminum material 2 could be observed, although it was slightly less clear than in FIGS. 3 (a) and 3 (b).
これらの結果から、図４に示すように板厚１０ｍｍのアルミニウム材２であれば９０ｋＶの管電圧で内部のアルミナ粉を観察できることがわかる。ただし、これ以上板厚が厚くなると、アルミニウムの結晶粒による散乱の影響が著しくなるため、アルミナ粉の可視化及び観察は困難となる。また、アルミニウム材２の位置を、図１（ｂ）に示すように、位相回折格子４と吸収格子５の間に配置しても同様の結果を得ることができる。 From these results, as shown in FIG. 4, it can be seen that the inner alumina powder can be observed with a tube voltage of 90 kV if the aluminum material 2 has a plate thickness of 10 mm. However, if the plate thickness is thicker than this, the influence of scattering by the aluminum crystal grains becomes significant, making visualization and observation of the alumina powder difficult. Further, even if the position of the aluminum material 2 is arranged between the phase diffraction grating 4 and the absorption grating 5 as shown in FIG. 1B, the same result can be obtained.
このように、本実施形態で説明した介在物可視化方法によれば、近接した原子番号の介在物を含みＸ線の吸収係数差によっては画像のコントラスト差がつきにくい金属材料に対してでも、金属材料内の介在物を非破壊で可視化することができるので、金属材料内における介在物の有無、位置、大きさなどの把握が可能となる。
また、図には示していないが、干渉計としてタルボ・ロー干渉計を用いても本発明の効果は得られる。タルボ・ロー干渉計とは、強度の高いＸ線源からのＸ線を周期的なスリットで分割し複数の仮想的な微小光源を得るものである。これにより、単一の光源からのＸ線に比較して強度の高いＸ線が得られるため短時間での分析が可能となる。
As described above, according to the inclusion visualizing method described in the present embodiment, even a metal material including inclusions having adjacent atomic numbers and having a difference in contrast of an image due to a difference in X-ray absorption coefficient can be reduced. Since inclusions in the material can be visualized in a non-destructive manner, it is possible to grasp the presence, position, size, and the like of inclusions in the metal material.
Although not shown in the figure, the effect of the present invention can be obtained even if a Talbot-Lau interferometer is used as the interferometer. A Talbot-Lau interferometer divides X-rays from a high-intensity X-ray source with periodic slits to obtain a plurality of virtual micro light sources. As a result, X-rays with higher intensity than those obtained from a single light source can be obtained, so that analysis can be performed in a short time.
なお、今回開示された実施形態はすべての点で例示であって制限的なものではないと考えられるべきである。特に、今回開示された実施形態において、明示的に開示されていない事項、例えば、運転条件や操業条件、各種パラメータ、構成物の寸法、重量、体積などは、当業者が通常実施する範囲を逸脱するものではなく、通常の当業者であれば、容易に想定することが可能な値を採用している。 The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. In particular, in the embodiment disclosed this time, matters that are not explicitly disclosed, for example, operating conditions and operating conditions, various parameters, dimensions, weights, volumes, and the like of a component deviate from a range that a person skilled in the art normally performs. Instead, values that can be easily assumed by those skilled in the art are employed.
１ タルボ干渉計
２ アルミニウム材（測定対象）
３ Ｘ線発生装置
４ 位相回折格子
５ 吸収格子
６ Ｘ線画像検出器
1 Talbot interferometer 2 Aluminum material (measuring object)
3 X-ray generator 4 Phase diffraction grating 5 Absorption grating 6 X-ray image detector
Claims (4)
前記Ｘ線の照射方向において、前記Ｘ線発生装置と前記第２回折格子の間にアルミニウム材を配置し、
前記アルミニウム材を透過した後に前記第２回折格子を通過したＸ線を前記Ｘ線画像化装置によって受光することで、前記アルミニウム材の内部に存在する介在物を画像化するものであって、
前記アルミニウム材を前記Ｘ線発生装置と前記第１回折格子との間で前記第１回折格子寄りに配置することとしていて、
前記前記第１回折格子を、前記アルミニウム材と略同幅としていることを特徴とするアルミニウム材内の介在物可視化方法。 An X-ray generator for irradiating X-rays, a first diffraction grating arranged in the X-ray emission direction, a second diffraction grating arranged in the X-ray passage direction passing through the first diffraction grating, An X-ray imaging apparatus that receives and images X-rays that have passed through the second diffraction grating, and a method for visualizing inclusions in an aluminum material using a Talbot interferometer, comprising:
In the X-ray irradiation direction, an aluminum material is disposed between the X-ray generator and the second diffraction grating,
The X-ray imaging device receives X-rays that have passed through the second diffraction grating after passing through the aluminum material, thereby imaging the inclusions present in the aluminum material,
The aluminum material is arranged closer to the first diffraction grating between the X-ray generator and the first diffraction grating ,
The method of visualizing inclusions in an aluminum material, wherein the first diffraction grating has substantially the same width as the aluminum material.
前記Ｘ線の照射方向において、前記Ｘ線発生装置と前記第２回折格子の間にアルミニウム材を配置し、
前記アルミニウム材を透過した後に前記第２回折格子を通過したＸ線を前記Ｘ線画像化装置によって受光することで、前記アルミニウム材の内部に存在する介在物を画像化するものであって、前記アルミニウム材を前記第１回折格子と前記第２回折格子との間であって略中心位置に配置することとしていて、
前記第２回折格子を、前記アルミニウム材と略同幅としていることを特徴とするアルミニウム材内の介在物可視化方法。 An X-ray generator for irradiating X-rays, a first diffraction grating arranged in the X-ray emission direction, a second diffraction grating arranged in the X-ray passage direction passing through the first diffraction grating, An X-ray imaging apparatus that receives and images X-rays that have passed through the second diffraction grating, and a method for visualizing inclusions in an aluminum material using a Talbot interferometer, comprising:
In the X-ray irradiation direction, an aluminum material is disposed between the X-ray generator and the second diffraction grating,
The X-ray imaging device that receives the X-rays that have passed through the second diffraction grating after passing through the aluminum material receives the X-ray imaging device, thereby imaging the inclusions present inside the aluminum material, An aluminum material is disposed between the first diffraction grating and the second diffraction grating at a substantially central position ,
The method for visualizing inclusions in an aluminum material, wherein the second diffraction grating has substantially the same width as the aluminum material.
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