JP6008517B2 - Electrolytic processing equipment - Google Patents

Description

  The present invention relates to an electrolytic processing apparatus that melts and processes a workpiece by applying a voltage between an electrode rod and the workpiece via an electrolytic solution and energizing the same.

  The drilling of difficult-to-cut materials that are difficult to machine is generally performed by electrolytic machining or electric discharge machining. In particular, when drilling a difficult-to-cut material having a high aspect ratio, it is preferable to use an electrolytic processing method.

  By the way, for example, in the turbine blades of the gas turbine, cooling holes are formed for circulating a cooling medium to cool the turbine blades. In order to increase the cooling efficiency by the cooling holes, it is preferable that the shape of the cooling holes is curved along the geometric shape of the turbine blade. However, although the conventional electrolytic machining method for turbine blades is suitable for forming a straight hole, it is difficult to form a curved hole, that is, a curved hole. Therefore, when forming the cooling hole in the turbine blade, the two straight holes are formed by the electrode rods, and these are connected to form a pseudo bent hole.

  Here, for example, Patent Document 1 discloses a technique in which a curved conductive member is used for an electrode used for electrolytic processing, and a curved hole is formed along the curved shape of the curved conductive member.

  Further, for example, Patent Document 2 discloses a bent hole machining apparatus in which a machining amount is varied at a circumferential position of a machining electrode tool by covering with an insulating member except for a part of the surface of the machining electrode tool. Has been. According to this bent hole processing apparatus, a bent hole is formed by advancing the electrode tool for processing to the side where the processing amount is large.

JP 2011-62811 A Japanese Patent Laid-Open No. 7-51948

  However, in the description of Patent Document 1, the shape of the bent hole is determined by the shape of the curved conductive member. Therefore, since it is necessary to prepare a curved conductive member corresponding to a curved hole having a different curvature, it is not possible to form a curved hole having a desired curvature with a single electrode.

  Further, in the technique described in Patent Document 2, since the traveling direction is determined by the difference in the amount of processing between the portion covered with the insulating member on the surface of the machining electrode tool and the portion not covered, The formation direction cannot be adjusted arbitrarily. That is, since the area of the surface covered with the insulating member on the surface of the electrode tool for processing and the portion not covered are fixed, the difference in the amount of processing cannot be made variable, and the desired curvature is achieved. It was difficult to form a bent hole.

  On the other hand, as an electrolytic processing tool, it is preferable that when the electrode rod is fed into the machining hole, the electrode rod can be smoothly advanced without being caught by the inner wall surface of the machining hole.

  This invention is made | formed in view of such a subject, Comprising: It aims at providing the electrolytic processing apparatus which can form the bending hole of a desired curvature easily.

In order to solve the above problems, the present invention provides the following means.
That is, the electrolytic processing apparatus according to the present invention causes the electrolytic solution to flow out from the tip of a cylindrical electrode rod extending along the axis, and while feeding the electrode rod to the tip side, the tip of the electrode rod and the workpiece An electrolytic processing apparatus that performs a drilling process on the workpiece by applying a DC voltage between the inner wall surface of the electrode and the electrode bar. An electric field uneven distribution structure that forms an electric field uneven distribution region in which electric field strength is unevenly distributed, and the electrode rod is rotated so that the rotation speed of the electrode rod changes according to the rotation phase angle around the axis of the electrode rod A rotation driving means for causing the electrode rod to rotate, and a phase angle detecting section for detecting a rotation phase angle of the electrode rod , wherein the rotation driving means is driven to rotate the electrode rod around the axis, and The rotation according to the rotation phase angle of the electrode rod. A rotation control unit that drives the drive source so that the speed changes, and the rotation control unit rotates the electrode rod by the drive source according to a rotation phase angle detected by the phase angle detection unit. It is characterized by changing .

According to this electrolytic processing apparatus, when a DC voltage is applied, an electric field unevenly distributed region is formed at a part in the circumferential direction of the electrode rod tip. As a result of current concentration in the electric field unevenly distributed region, the workpiece is processed by the electrode. It becomes dominant on the electric field uneven distribution region side of the rod, that is, the machining amount of the electrode rod on the electric field uneven distribution region side becomes large.
When such an electrode rod is rotated, the electric field uneven distribution region also changes according to the rotation of the electrode rod. Here, when the rotation speed of the electrode rod is reduced, the relative speed of the electrolysis uneven distribution region with respect to the machining hole is also reduced, so that the current density flowing through the machining hole through the electric field uneven distribution region becomes large, and the electrolysis per unit time is increased. The amount gets bigger.
Therefore, by reducing the rotation speed of the electrode rod only when the electrode rod has a predetermined rotation phase angle, the circumferential position of the machining hole corresponding to the predetermined rotation phase angle, that is, an arbitrary position in the machining hole The amount of electrolysis with respect to the circumferential position can be increased. Thereby, the processing hole can be drilled in an arbitrary direction.

Here, for example, when the electrode rod is fed without rotating around its axis, the contact frictional resistance caused by the contact between the electrode rod and the inner wall surface of the machining hole acts in the opposite direction of the force caused by the feeding. At this time, the electrode rod receives contact friction resistance only by its bending rigidity. Therefore, when the contact friction resistance exceeds the bending rigidity, the electrode rod is bent more than necessary, and the risk of being caught on the inner wall surface of the processed hole increases.
On the other hand, in the present invention, since the electrode rod is fed while rotating around its axis, the contact friction resistance can be received by the torsional rigidity in addition to the bending rigidity of the electrode rod. Therefore, it is possible to prevent the electrode rod from being bent more than necessary.

  As the drive source for rotating the electrode rod, the rotation control unit changes the rotation speed in accordance with the rotation phase angle of the electrode rod, so that the amount of electrolysis with respect to an arbitrary circumferential position in the processed hole can be increased. Thereby, the bending hole of a desired curvature can be formed.

  Accordingly, when the electrode rod reaches a predetermined rotation phase angle, the rotation speed of the electrode rod can be changed, so that the amount of electrolysis at an arbitrary circumferential position in the processing hole can be reliably increased.

  Furthermore, the electrolytic processing apparatus according to the present invention further includes a detected portion provided integrally with the electrode rod, and a proximity sensor that detects an approach of the detected portion accompanying rotation of the electrode rod, and the rotation The control unit may change a rotation speed of the electrode rod by the drive source in accordance with the approach of the detected part detected by the proximity sensor.

  As a result, the rotation control unit changes the rotation speed of the electrode rod based on the approach of the detected portion rotating with the rotation of the electrode rod, so that only when the electrode rod has a predetermined rotation phase angle, The rotation speed of the bar can be changed. Therefore, it is possible to reliably increase the amount of electrolysis at an arbitrary circumferential position in the processed hole.

  In addition, the electrolytic processing apparatus according to the present invention further includes a misalignment detection unit that detects a misalignment amount of a machining hole formed in the workpiece, and the rotation control unit detects the misalignment detection unit. The rotational speed of the electrode rod by the drive source may be changed according to the amount of displacement.

  Thereby, since the drilling direction of the machining hole can be changed according to the deviation of the machining hole, the machining hole having the originally intended curvature can be easily formed. Therefore, the processing accuracy of the processing hole can be improved.

  Further, in the electrolytic processing apparatus according to the present invention, the rotation drive means is provided integrally with the electrode rod, the drive source, the first elliptic eccentric cam rotated by the drive source at a constant rotation speed, and the electrode rod. A second elliptic eccentric cam that is rotatable about the axis along with the electrode rod, and the first elliptic eccentric cam and the second elliptic eccentric cam are wound around the second elliptical cam. It may have a belt transmitted to the eccentric cam.

  When the first elliptical eccentric cam is rotated at a constant rotational speed, the rotation is transmitted to the second elliptical eccentric cam via the belt. At this time, since the first elliptical eccentric cam and the second elliptical eccentric cam are respectively in an elliptical shape and in an eccentric state, the rotational speed of the second elliptical eccentric cam varies depending on the rotational phase angle of the second elliptical eccentric cam. Thus, the rotation speed of the electrode rod integrated with the second elliptical eccentric cam can be changed according to the rotation phase angle. Therefore, similarly to the above, since the amount of electrolysis with respect to an arbitrary circumferential position in the processed hole can be increased, a processed hole having a desired curvature can be formed.

  Further, the electrolytic processing apparatus according to the present invention causes the electrolytic solution to flow out from the tip of a cylindrical electrode rod extending along the axis, and the tip of the electrode rod and the workpiece to be processed while feeding the electrode rod to the tip side. An electrolytic processing apparatus for drilling the workpiece by applying a DC voltage to an inner wall surface of the object, wherein the electrode rod has a circumferential direction at the tip when the DC voltage is applied. In addition to having an electric field uneven distribution structure that forms an electric field uneven distribution region in which electric field strength is unevenly distributed, a hole portion that communicates the inside and the outside of the electrode rod is formed on the opposite side of the electric field uneven distribution structure across the axis. An electrolytic solution supply unit that supplies the electrolytic solution to the electrode rod, a liquid amount control unit that changes a supply amount of the electrolytic solution in the electrolytic solution supply unit, and a machining hole formed in the workpiece A position shift detector for detecting the amount of position shift For example, the liquid amount control unit may be one that changes the supply quantity of the electrolyte by the electrolytic solution supply unit in accordance with the positional deviation amount detected by said positional deviation detecting section.

As a result, the electrolyte flowing through the electrode rod flows out from the tip of the electrode, and part of the electrolyte flows out from the hole portion toward the outside in the radial direction of the electrode rod. At this time, the electrolyte flowing out from the hole gives a fluid acting force to the machining hole, so that the reaction force is given to the electrode rod, and the drilling direction of the machining hole by the electrode rod can be changed. it can.
Therefore, by changing the supply amount of the electrolytic solution by the electrolytic solution supply unit by the liquid amount control unit, the magnitude of the fluid acting force to the processing hole is changed, and as a result, the drilling direction of the processing hole is adjusted. Can do. As a result, it is possible to easily form a processing hole having the originally intended curvature and improve the processing accuracy of the processing hole.

  According to the electrolytic processing apparatus of the present invention, the processing hole can be drilled in an arbitrary direction by changing the rotation angle of the electrode rod in accordance with the rotation phase angle of the electrode rod. Further, the contact frictional resistance acting from the inner wall surface of the processed hole can be received by the torsional rigidity in addition to the bending rigidity of the electrode rod. This makes it possible to easily form a bent hole having a desired curvature.

It is a schematic block diagram of the electrolytic processing apparatus which concerns on 1st embodiment of this invention. It is a block diagram of the electrolytic processing apparatus which concerns on 1st embodiment of this invention. It is an enlarged view of the front-end | tip of the electrode rod in FIG. It is a graph which shows the relationship between the rotation phase angle and rotation speed of an electrode rod. It is sectional drawing orthogonal to the axis line in an electrode bar, Comprising: It is a figure which shows the positional relationship of the rotation phase angle of an electrode bar, and an electric field uneven distribution area | region. (A) is a perspective view of the electrode rod when the electrode rod is rotated at a low speed, and (b) is a perspective view of the electrode rod when the electrode rod is rotated at a high speed. It is sectional drawing which shows the shape of the processing hole processed with the electrode rod. (A) is a diagram for explaining the contact friction resistance acting on the electrode rod when the electrode rod is not rotated, and (b) is for explaining the contact friction resistance acting on the electrode rod when the electrode rod is rotated. It is a figure to do. It is an enlarged view of the tip of an electrode bar concerning a modification of a first embodiment of the present invention. It is a schematic block diagram of the electrolytic processing apparatus which concerns on 2nd embodiment of this invention. It is a block diagram of the electrolytic processing apparatus which concerns on 2nd embodiment of this invention. (A) is a figure which shows the relationship between the rotation phase angle of an electrode rod, and the output of a proximity sensor, (b) is a figure which shows the relationship between the rotation phase angle of an electrode rod, and a rotational speed. It is a schematic block diagram of the electrolytic processing apparatus which concerns on 3rd embodiment of this invention. It is a block diagram of the electrolytic processing apparatus which concerns on 3rd embodiment of this invention. It is a top view of the 1st elliptical eccentric cam, the 2nd elliptical eccentric cam, and a belt in the electrolytic processing apparatus concerning a third embodiment of the present invention, and is a figure showing the state at each rotation phase angle. (A) is a figure which shows the relationship between the rotation phase angle of a 1st elliptical eccentric cam, and a 1st drive radius, (b) is a figure which shows the relationship between the rotation phase angle of a 2nd elliptical eccentric cam, and a 2nd drive radius. is there. (A) is a figure which shows the relationship between the rotational phase angle and rotational speed of a 1st elliptical eccentric cam, (b) is a figure which shows the relationship between the rotational phase angle and rotational speed of a 2nd elliptical eccentric cam. It is a schematic block diagram of the electrolytic processing apparatus which concerns on 4th embodiment of this invention. It is a block diagram of the electrolytic processing apparatus which concerns on 4th embodiment of this invention. It is the elements on larger scale of the front-end | tip of the electrode bar in the electrolytic processing apparatus which concerns on 5th embodiment of this invention. It is a block diagram of the electrolytic processing apparatus which concerns on 5th embodiment of this invention.

Hereinafter, a first embodiment of the present invention will be described in detail with reference to FIGS.
As shown in FIGS. 1 and 2, an electrolytic processing apparatus 101 according to the first embodiment is an apparatus that drills a processing hole 201 that functions as a cooling hole, for example, on a workpiece 200 such as a turbine blade of a gas turbine. It is. The electrolytic processing apparatus 101 according to the present embodiment is particularly suitable for forming a curved processing hole 201, that is, a bending hole.

  As shown in FIGS. 1 and 2, the electrolytic processing apparatus 101 includes an electrode bar 10 that performs electrolytic processing while being inserted into the processing hole 201, and a rotation drive unit 20 that rotates the electrode bar 10. ing. Further, as shown in FIG. 2, the electrolytic processing apparatus 101 includes a phase angle detection unit 31, a moving mechanism 34, a voltage application unit 35, an electrolytic solution supply unit 36, and a liquid amount control unit 37.

The electrode rod 10 has a cylindrical shape (cylindrical shape in the present embodiment) extending along the axis O as a whole, and includes an electrode body 12 and an insulating layer 13 as shown in FIG.
The electrode body 12 has a cylindrical shape extending along the axis O, and is made of a conductive material having flexibility, such as stainless steel, copper, and titanium. The material of the electrode body 12 may be other materials as long as it has conductivity and flexibility.
In the hollow portion on the inner peripheral side of the electrode rod 10 (inside the electrode rod 10), the electrolytic solution L supplied from the electrolytic solution supply unit 36 is directed toward the tip side (the lower side of FIGS. 1 and 3). It comes to circulate.

  The insulating layer 13 is coated on the outer peripheral surface of the electrode body 12 and is made of, for example, a polyester-based resin having electrical insulation. This insulating layer 13 is covered over substantially the entire region in the circumferential direction and the axis O direction of the outer peripheral surface of the electrode rod 10 body.

  The electrode rod 10 composed of the electrode body 12 and the insulating layer 13 is applied with a voltage applied between the electrode body 12 of the electrode rod 10 and the workpiece 200 by the voltage application unit 35 via the electrolytic solution L. Furthermore, the electric field uneven distribution structure which forms the electric field uneven distribution area | region E where electric field strength is unevenly distributed in the circumferential direction part of the front-end | tip of the electrode rod 10 is provided.

  As such an electric field uneven distribution structure, in this embodiment, a notch shape is formed at the tip of the electrode rod 10. That is, the tip of the electrode rod 10 has a bamboo-cut shape that is notched obliquely toward the tip side from the one side in the diameter direction toward the other side. Thereby, the front end surface 11 of the electrode rod 10, that is, the front end surface 11 of the electrode main body 12 and the insulating layer 13 is directed in a direction inclined with respect to the direction of the axis O. Therefore, the electric field at the time of voltage application is unevenly distributed in the direction in which the tip surface 11 of the electrode rod 10 faces, that is, the electric field strength is unevenly distributed in a part of the circumferential direction of the tip of the electrode rod 10.

As shown in FIGS. 1 and 2, the rotation driving means 20 includes a drive source 21 and a rotation control unit 30.
The drive source 21 rotates the electrode rod 10 around the axis O by being driven, and includes a drive source body 22 such as a servo motor that can be driven to rotate around the output shaft 23. Thereby, the drive source main body 22 can arbitrarily change the rotation speed of the output shaft 23 by the input control signal.

In the present embodiment, the drive source 21 further includes a transmission mechanism 24. The transmission mechanism 24 has a role of transmitting the rotation of the output shaft 23 of the drive source body 22 to the electrode rod 10, and includes a first gear 25 that rotates integrally with the output shaft 23, And a second gear 26 which is engaged with and fixed to the electrode rod 10 so as to be rotatable around an axis O of the electrode rod 10. As a result, the rotation of the output shaft 23 of the drive source body 22 is transmitted to the electrode rod 10 via the first gear 25 and the second gear 26, and the electrode rod 10 rotates about the axis O.
Note that the transmission mechanism 24 is not limited to a gear mechanism including the first gear 25 and the second gear 26, and may include a belt, a pulley, a chain, and a sprocket, or a combination thereof.

As shown in FIG. 2, the rotation control unit 30 is a control device that drives the drive source 21 so that the rotation speed changes according to the rotation phase angle of the electrode rod 10.
That is, the rotation control unit 30 can rotate the output shaft 23 of the drive source 21 and arbitrarily change the rotation speed of the output shaft 23 of the drive source 21 by outputting a control signal to the drive source 21. It is configured to be able to. The rotation speed can be easily controlled by the rotation control unit 30 controlling the amount of current supplied to the drive source 21, for example.

  Such a rotation control part 30 changes the rotational speed of the electrode rod 10 according to the rotation phase angle of the electrode rod 10, for example like the graph shown in FIG. In the example of FIG. 4, the rotation speed of the electrode rod 10 is decreased only when the rotation phase angle of the electrode rod 10 is π / 2, and the rotation speed is constant at other rotation phase angles. The rotation speed is controlled.

As shown in FIG. 2, the phase angle detection unit 31 has a role of detecting the rotation phase angle of the electrode rod 10, and a rotary encoder is used, for example. This rotary encoder detects the rotational speed of the electrode rod 10 by, for example, outputting a pulse for every fixed amount of rotation of the electrode rod 10 and accumulating the number of pulses per unit time to obtain the rotation number per unit time. Be able to. In addition, as the phase angle detection part 31, you may employ | adopt other structures, such as a pulse encoder and a speed generator.
The rotation phase angle detected by the phase angle detection unit 31 is input to the rotation control unit 30. The rotation control unit 30 changes the rotation speed of the electrode rod 10 by the drive source 21 according to the rotation phase angle.

  As shown in FIG. 2, the moving mechanism 34 has a role of moving the electrolytic processing apparatus 101 forward and backward with respect to the workpiece 200. The moving mechanism 34 of the present embodiment is arranged on the upper side of the workpiece 200 and is configured to be able to move the electrode rod 10 up and down with respect to the workpiece 200.

  Such forward / backward movement by the moving mechanism 34 is performed by, for example, an output of an electric motor (not shown). Further, the acceleration of the forward / backward movement of the moving mechanism 34, that is, the output of the electric motor is controlled by a pushing force control device (not shown). Thereby, when the moving mechanism 34 moves the electrode rod 10 forward and backward, that is, when pushing toward the machining hole 201, the pushing force can be arbitrarily adjusted.

  As shown in FIG. 2, the voltage application unit 35 is configured to apply a DC voltage to the electrode rod 10 and the workpiece 200 so that a current flows between the electrode rod 10 and the workpiece 200 via the electrolytic solution L. Is a voltage source device that applies That is, the voltage application unit 35 is configured so that the electrode body 12 of the electrode rod 10 is a cathode, the object to be coated, while the space between the electrode rod 10 and the inner wall surface 202 of the machining hole 201 of the workpiece 200 is filled with the electrolyte L. A voltage is applied between the workpiece 200 as an anode. As a result, an electric field is generated around the electrode rod 10, and a current flows through the electrolyte L so as to extend between the electrode body 12 and the workpiece 200.

  As shown in FIG. 2, the electrolytic solution supply unit 36 is a device that supplies the electrolytic solution L to the inside of the electrode rod 10. The electrolytic solution supply unit 36 has a tank in which the electrolytic solution L is stored, and supplies the electrolytic solution L from the rear end of the electrode rod 10 to the inside of the main body of the electrode rod 10 from the tank. As a result, the electrolytic solution L flows out of the electrode rod 10 from the tip opening of the electrode rod 10, that is, the tip opening of the electrode body 12.

  As shown in FIG. 2, the liquid amount control unit 37 is a device that changes the supply amount of the electrolytic solution L to the electrode rod 10 by the electrolytic solution supply unit 36. For example, the liquid amount control unit 37 controls the flow rate adjusting valve provided in the electrolyte solution supply unit 36 or a pump for pumping the electrolyte solution L to the electrode rod 10, thereby controlling the electrolyte solution supply unit 36. The supply amount of the electrolyte L supplied to the electrode rod 10 can be arbitrarily adjusted.

  When forming the machining hole 201 in the workpiece 200 by the electrolytic processing apparatus 101 having such a configuration, the moving mechanism 34 sequentially supplies the electrolytic solution L from the electrolytic solution supply unit 36 to the inside of the electrode rod 10. The electrode rod 10 is advanced toward the workpiece 200. As a result, as shown in FIG. 1, the electrolyte L flowing through the electrode rod 10 flows out from the tip of the electrode rod 10, and the space between the electrode rod 10 and the inner wall surface 202 of the processing hole 201 is formed. Filled with electrolyte L.

  At this time, the electrode rod 10 is rotated around the axis O by the rotation driving means 20. When a voltage is applied between the electrode rod 10 and the workpiece by the voltage application unit 35 using the electrode body 12 of the electrode rod 10 as a cathode and the workpiece 200 as an anode, the tip end surface of the electrode via the electrolyte L 11 and the inner wall surface 202 of the processing hole 201 of the workpiece 200 are energized, so that the workpiece 200 is melted. As a result, the material to be processed is dissolved, so that the processing hole 201 is processed deeper as the electrode rod 10 advances.

  Here, in the present embodiment, as shown in FIG. 3, the electric field uneven distribution region E is formed in a part in the circumferential direction of the tip of the electrode rod 10 when the voltage application unit 35 applies a DC voltage. Then, at the time of the electrolytic processing, as a result of current concentration in the electric field uneven distribution region E, the processing of the workpiece 200 becomes dominant on the electric field uneven distribution region E side of the electrode rod 10. That is, since the amount of electrolysis of the workpiece 200 increases in accordance with the current density, the amount of processing of the inner wall surface 202 of the workpiece 200 on the electric field uneven distribution region E side of the electrode having a large current density increases.

  When such an electrode rod 10 is rotated, the electric field uneven distribution region E also changes according to the rotation of the electrode rod 10, as shown in FIG. 5A shows a state in which the rotation phase angle of the electrode rod 10 is π / 2 rad, and the electric field uneven distribution region E is one side in the radial direction of the electrode rod 10 from the electrode rod 10 (right side in FIG. 5). Extends towards. 5B shows a state in which the rotation phase angle of the electrode rod 10 is 3π / 2 rad, and the electric field uneven distribution region E extends from the electrode rod 10 to the other side in the radial direction of the electrode rod 10 (in FIG. 5). (To the left). Such an electric field uneven distribution region E passes through a specific portion of the inner wall surface 202 of the processing hole 201 only once for each rotation of the electrode rod 10.

Here, if the rotation speed of the electrode rod 10 is reduced, the relative speed of the electrolytically unevenly distributed region with respect to the inner wall surface 202 of the processed hole 201 is also reduced. Therefore, a specific portion of the inner wall surface 202 of the processed hole 201 is interposed via the electric field unevenly distributed region E. The current density per unit time that circulates in the system becomes large. Therefore, the amount of electrolysis per unit time with respect to the specific location of the inner wall surface 202 increases.
On the other hand, when the rotation speed of the electrode rod 10 is increased, the relative speed of the electrolytically unevenly distributed region with respect to the inner wall surface 202 of the processed hole 201 also increases, so that a specific location on the inner wall surface 202 of the processed hole 201 passes through the electric field unevenly distributed region E. The current density that circulates is small. Therefore, the amount of electrolysis per unit time with respect to the specific location of the inner wall surface 202 is reduced.

  Therefore, as shown in FIG. 4, when the rotation control unit 30 of the rotation driving means 20 reduces the rotation phase angle of the electrode rod 10 only when the rotation phase angle of the electrode rod 10 is π / 2 rad (FIG. 5 ( a) and FIG. 6A), the processing amount of the inner wall surface 202 of the processing hole 201 through which the electrolytically uneven region passes at the rotational phase angle becomes large. At this time, when the rotational phase angle is other than π / 2 rad, for example, 3π / 2 rad, the rotational angle becomes larger than when the rotational phase angle is π / 2 rad (FIGS. 5B and 6). (See (b)), the processing amount of the inner wall surface 202 of the processing hole 201 through which the electrolytically distributed region passes is small.

  As a result, as shown in FIG. 7, the amount of electrolysis on the inner wall surface 202 (right portion in FIG. 7) of the machining hole 201 through which the electric field uneven distribution region E passes at the rotation phase angle of the electrode rod 10 at low speed rotation, that is, bending As the amount of directional electrolysis increases, the amount of electrolysis on the inner wall surface 202 (the left portion in FIG. 7) of the machining hole 201 through which the electric field uneven distribution region E passes at the rotation phase angle of the electrode rod 10 at high speed, that is, reverse electrolysis The amount becomes smaller. When such electrolytic processing is continuously performed, the processed hole 201 is processed deeper in the direction in which the amount of electrolysis is larger, and as a result, a bent hole can be formed.

  Thus, according to the electrolytic processing apparatus 101 of the present embodiment, by reducing the rotation speed of the electrode rod 10 only when the electrode rod 10 has a predetermined rotation phase angle, the predetermined rotation phase angle is obtained. The amount of electrolysis with respect to the circumferential position of the corresponding machining hole 201, that is, the arbitrary circumferential position in the machining hole 201 can be increased.

Conversely, if the rotational speed of the electrode rod 10 is increased only when the electrode rod 10 has a predetermined rotational phase angle, the circumferential position of the machining hole 201 corresponding to the predetermined rotational phase angle, that is, machining The amount of electrolysis with respect to an arbitrary circumferential position in the hole 201 can be reduced.
As a result, the processed hole 201 is formed deeper toward the side where the amount of electrolysis is larger, whereby a bent hole can be easily formed.

  Furthermore, since the amount of electrolysis in the bending direction can be easily changed by adjusting the rotation speed of the electrode rod 10, a bent hole having a desired curvature can be easily formed by adjusting the rotation speed. It becomes possible to do.

  Here, as shown in FIG. 8A, for example, when the electrode rod 10 is fed by the moving mechanism 34 without rotating around the axis O, the contact between the electrode rod 10 and the inner wall surface 202 of the processing hole 201 is caused. The contact frictional resistance acts only on the electrode rod 10 in the direction opposite to the force caused by feeding. At this time, the electrode rod 10 receives contact frictional resistance only by its bending rigidity. Therefore, when the contact friction resistance exceeds the bending rigidity, the electrode rod 10 is bent more than necessary, and the risk of being caught on the inner wall surface 202 of the processing hole 201 is increased. As a result, smooth processing becomes difficult.

  On the other hand, in this embodiment, as shown in FIG. 8B, the electrode rod 10 is fed while rotating around its axis O, so the contact friction resistance is added to the bending stiffness of the electrode rod 10 and the torsional rigidity. Can receive. That is, it is possible to receive the rotational direction component of the contact friction resistance with torsional rigidity while receiving the axial direction O component of the contact friction resistance with bending rigidity. Therefore, the contact frictional resistance acting on the electrode rod 10 can be received in the axial direction and the torsional direction in a distributed manner, so that the burden of bending rigidity is reduced compared to the case of FIG. As a result, the electrode rod 10 can be prevented from being bent more than necessary, and the risk of the electrode rod 10 being caught on the inner wall surface 202 of the machining hole 201 can be reduced. Processing can be performed.

In the first embodiment, an example in which the tip of the electrode rod 10 has a bamboo shape is described as the electric field uneven distribution structure, but an electric field uneven structure as shown in FIG. 9 may be used as a modification.
That is, in the electric field uneven distribution structure of FIG. 9, a non-insulating portion 14 that is not covered with the insulating layer 13 is formed in a part of the tip of the electrode body 12 in the circumferential direction. Such a non-insulating portion 14 can be formed, for example, by cutting out the insulating layer 13 in the electrode rod 10 from the front end to the rear end side of the electrode rod 10.

  By forming such a non-insulating portion 14, the electrode body 12 in the portion of the electrode body 12 on the non-insulating portion 14 side is exposed to the outside. Therefore, when a DC voltage is applied between the electrode body 12 and the workpiece 200, the electric field between the electrode body 12 and the workpiece 200 is unevenly distributed on the non-insulating portion 14 side. Therefore, similarly to the embodiment, an electric field uneven distribution region E in which electric field strength is unevenly distributed can be formed in a part of the tip of the electrode rod 10 in the circumferential direction.

The electric field uneven distribution structure of the electrode rod 10 may be, for example, a structure in which the thickness of only a part of the electrode body 12 in the circumferential direction is increased. In this case, the electric field uneven distribution region E is formed on the portion side where the thickness of the electrode body 12 at the circumferential position is large.
In addition, other structures may be adopted as the electric field uneven distribution structure as long as the electric field uneven distribution region E in which electric field strength is uneven is formed in a part of the tip of the electrode rod 10 in the circumferential direction.

Furthermore, in the present embodiment, the rotation control unit 30 changes the rotation speed of the electrode rod 10 by the drive source 21 according to the output of the phase angle detection unit 31, but the configuration does not include the phase angle detection unit 31. May be.
In this case, the rotation control unit 30 reduces or increases the rotation speed only when the rotation phase angle is predetermined based on the rotation speed of the electrode rod 10, that is, the rotation speed of the output shaft 23 of the drive source 21. The rotational speed is controlled. Thereby, by controlling the integral amount of the electric field uneven distribution region E, the bent hole can be easily formed.
Moreover, the structure which changes a rotational speed as mentioned above, for example by using a motor and a gear train may be sufficient.

Next, a second embodiment of the present invention will be described with reference to FIGS. In the second embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
The electrolytic processing apparatus 102 according to the second embodiment is different from the first embodiment in that it includes a detected part 32 and a proximity sensor 33 as shown in FIGS. 10 and 11 instead of the phase angle detecting part 31. Different from one embodiment.

  The detected portion 32 is made of a metal or the like that can be detected by the proximity sensor 33, and is provided so as to be rotatable around the axis O together with the electrode rod 10. The detected part 32 of the present embodiment is provided on the lower surface of the second gear 26 provided integrally with the electrode rod 10. As a result, with the rotation of the electrode rod 10, the detected portion 32 moves so as to revolve on a circular trajectory centered on the axis O.

  The proximity sensor 33 is fixed at a fixed position spaced from the axis O of the electrode rod 10 in the radial direction. The proximity sensor 33 of the present embodiment is provided at the same position in the direction of the axis O as the detected portion 32, and the distance between the detected portion 32 that revolves around the axis O and the proximity sensor 33 is smaller than a predetermined distance. When it becomes, it determines with the to-be-detected part 32 approaching, and detects the proximity | contact of the to-be-detected part 32 by this.

  Here, when the proximity sensor 33 detects the approach of the detected part 32, the detected part 32 is approaching the proximity sensor 33 within a predetermined distance, and this is because the detected part 32 rotates integrally. This means that the rotational phase angle of the electrode rod 10 has a predetermined value. Therefore, when the detected part 32 is detected by the proximity sensor 33, the electrode rod 10 is in a state of a rotation phase angle within a predetermined range.

  As shown in FIG. 12A, the proximity sensor 33 outputs an off signal to the rotation control unit 30 when the proximity of the detected unit 32 is not detected, and detects the proximity of the detected unit 32. At that time, an ON signal is output to the rotation control unit 30. In the present embodiment, when the proximity sensor 33 detects the approach of the detected part 32, the rotational phase angle of the electrode rod 10 is in the vicinity of π / 2, and an ON signal is generated only at this rotational phase angle. Is output.

The rotation control unit 30 of the present embodiment controls the drive source 21 so that the electrode rod 10 rotates at a constant high speed when the OFF signal is input from the proximity sensor 33, while the proximity sensor When the ON signal is input from 33, the drive source 21 is controlled so that the electrode rod 10 rotates at a low speed.
As a result, as shown in FIG. 12B, the electrode rod 10 is detected only when the proximity sensor 33 detects the approach of the detected portion 32, that is, when the electrode rod 10 reaches a predetermined rotational phase angle. The rotational speed of the electrode rod 10 is reduced.

  As described above, also in the electrolytic processing apparatus 102 of the second embodiment, the rotation speed of the electrode rod 10 can be changed when the electrode rod 10 reaches a predetermined rotation phase angle, as in the first embodiment. In addition, the amount of electrolysis at an arbitrary circumferential position in the processed hole 201 can be reliably increased. Therefore, it is possible to form the processed hole 201 as a curved hole having a desired curvature.

Next, a third embodiment of the present invention will be described with reference to FIGS. In the third embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
As shown in FIGS. 13 and 14, the electrolytic processing apparatus 103 of the third embodiment is different from the first embodiment in the configuration of the rotation driving means 20.

That is, the rotational drive means 20 of the third embodiment includes a drive source 21 and an eccentric transmission mechanism 40 including a first elliptic eccentric cam 27, a second elliptic eccentric cam 28, and a belt 29.
The drive source 21 includes a drive source body 22 such as a motor that can rotate around the output shaft 23, and a rotation control unit 30 that outputs a control signal for rotating the drive source body 22. In the present embodiment, the drive source body 22 is rotated around the output shaft 23 at a constant rotational speed by a control signal from the rotation control unit 30.

  As shown in FIG. 15, the first elliptic eccentric cam 27 is a plate-like member having an elliptical shape in plan view, and a position shifted in a direction along the major axis from the geometrical center of the elliptical shape. It can be rotated as a center of rotation. The first elliptical eccentric cam 27 is integrally fixed to the output shaft 23 so that the axis of the output shaft 23 coincides with the rotation center, and is driven to rotate in an eccentric state as the drive source 21 rotates. It has come to be.

  As shown in FIG. 15, the second elliptic eccentric cam 28 is a plate-like member having an elliptical shape in plan view, like the first elliptical eccentric cam 27, and has a longer diameter than the geometric center of the elliptical shape. It is possible to rotate around a position shifted in the direction along the center of rotation. The second elliptical eccentric cam 28 is integrally fixed to the electrode rod 10 so that the axis O of the electrode rod 10 coincides with the rotation center. As a result, the electrode rod 10 rotates about the axis O as the second elliptic eccentric cam 28 rotates.

  The belt 29 is wound around the outer peripheral surfaces of the first elliptic eccentric cam 27 and the second elliptic eccentric cam 28, and has a role of transmitting the rotation of the first elliptic eccentric cam 27 to the second elliptic eccentric cam 28. doing. In the present embodiment, the first elliptical eccentric cam 27 and the second elliptical eccentric cam 28 have their rotational axes arranged in parallel and their plate surfaces arranged in the same plane. The belt 29 has an annular shape along the same plane, and the belt 29 is wound around the first elliptical eccentric cam 27 and the second elliptical eccentric cam 28 so that the rotational force is transmitted. It has become.

  In the present embodiment, as shown in FIG. 15, the first elliptical eccentric cam 27 and the second elliptical eccentric cam 28 have the direction in which the distance from the center of rotation to the outer peripheral surface is the largest, and the distance is the largest. It arrange | positions in the state which aligned the direction so that the direction which becomes small may mutually correspond.

Here, when the maximum dimension of the distance between the rotation center and the region where the belt 29 is wound on the outer peripheral surface of the first elliptical eccentric cam 27 is the first driving radius r _A of the first elliptical eccentric cam 27, The change in the driving radius when the one elliptical eccentric cam 27 makes one rotation is as shown in FIG.
On the other hand, if the maximum dimension of the distance between the rotation center and the region around which the belt 29 is wound on the outer peripheral surface of the second elliptical eccentric cam 28 is the second driving radius r _B of the second elliptical eccentric cam 28, FIG. 16B shows the change in the drive radius when the elliptical eccentric cam 28 follows the first elliptical eccentric cam 27 and rotates once.

If the first drive radius r _A and the second drive radius r _B change as described above when the first elliptic eccentric cam 27 and the second elliptic eccentric cam 28 make one rotation, If the rotation speed is constant (see FIG. 17A), the rotation speed of the second elliptic eccentric cam 28 changes as shown in FIG. 17B. That is, as shown in FIGS. 15A to 15C, when the first elliptical eccentric cam 27 rotates at a constant rotational speed, the rotational speed of the second elliptical eccentric cam 28 changes according to the rotational phase angle. To do. In the present embodiment, when the rotational phase angle of the second elliptic eccentric cam 28 is 0 rad (2π rad), the rotational speed is the slowest, whereas when the rotational phase angle is π rad, the rotational speed is the fastest.

Here, as described in the first embodiment, when the rotation speed of the electrode rod 10 is reduced, the relative speed of the electrolytically uneven region with respect to the inner wall surface 202 of the processed hole 201 is also reduced. The current density per unit time flowing to a specific location on the inner wall surface 202 of the processing hole 201 is large. Therefore, the amount of electrolysis at a specific location on the inner wall surface 202 is increased.
On the other hand, when the rotation speed of the electrode rod 10 is increased, the relative speed of the electrolytically unevenly distributed region with respect to the inner wall surface 202 of the processed hole 201 also increases, so that a specific location on the inner wall surface 202 of the processed hole 201 passes through the electric field unevenly distributed region E. The current density that circulates is small. Therefore, the amount of electrolysis at a specific location on the inner wall surface 202 is reduced.

  Therefore, when the first elliptical eccentric cam 27 is rotated at a constant rotational speed, the rotational speed of the second elliptical eccentric cam 28 changes depending on the rotational phase angle, so that the predetermined rotational phase angle is the same as in the first embodiment. It is possible to increase the amount of electrolysis per unit time with respect to the circumferential position of the machining hole 201 corresponding to the above, that is, the arbitrary circumferential position of the machining hole 201. As a result, as in the first embodiment, the processed hole 201 can be easily formed as a bent hole by being formed deeper toward the side with a larger amount of electrolysis.

  Further, in this embodiment, detection of the rotation speed of the electrode rod 10 is not required, and the control signal from the rotation control unit 30 does not change in a complicated manner, so that the bent hole is formed on the paper with a simple configuration. It becomes possible to form.

Next, a fourth embodiment of the present invention will be described with reference to FIGS. In the fourth embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
As shown in FIGS. 18 and 19, the electrolytic processing apparatus 104 according to the fourth embodiment is different from the first embodiment in that it includes a misalignment detection unit 38.

  The positional deviation detection unit 38 detects the positional deviation amount of the machining hole 201 formed in the workpiece 200. Here, the amount of misalignment means the difference between the initial target shape of the processing hole 201 and the shape of the processing hole 201 formed by the electrode rod 10. As the misalignment detection unit 38 that detects such misalignment amount, for example, an X-ray apparatus that detects the shape of the machining hole 201 by irradiating X-rays from the side of the workpiece 200, or the workpiece 200. An ultrasonic flaw detector or the like that detects the shape of the processing hole 201 by emitting ultrasonic waves from the side to the inside.

  The positional deviation detection unit 38 compares the actual shape of the machining hole 201 detected in this way with the shape of the machining hole 201 that is set in advance, thereby calculating the difference between them, that is, the positional deviation amount. Calculate and output to the rotation control unit 30.

Further, the rotation control unit 30 of the present embodiment changes the rotation speed of the electrode rod 10 by the drive source 21 in accordance with the amount of displacement detected by the displacement detection unit 38.
That is, when the bending of the machining hole 201 as a bending hole is small, the passing speed of the electric field uneven distribution region E at the rotational phase angle corresponding to the bending direction of the machining hole 201 is reduced. In other words, the rotation speed of the electrode rod 10 is decreased so as to further promote the processing of the processing hole 201 in the bending direction.
On the other hand, when the bending of the machining hole 201 as a bending hole is too large, the passing speed of the electric field uneven distribution region E at the rotational phase angle corresponding to the bending direction of the machining hole 201 is increased. In other words, the rotational speed of the electrode rod 10 is reduced so as to reduce the amount of processing in the bending direction of the processing hole 201.

  As a result, the shape of the processed hole 201 approaches the initial target shape of the processed hole 201. That is, in the present embodiment, an arbitrarily curved machining hole 201 is obtained by feeding back the difference between the actual machining hole 201 shape and the target machining hole 201 shape to the rotational speed of the electrode rod 10. be able to. As a result, the processing accuracy of the processing hole 201 can be improved.

Next, a fifth embodiment of the present invention will be described with reference to FIGS. In the fifth embodiment, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.
As shown in FIGS. 20 and 21, in the electrolytic processing apparatus 105 of the fifth embodiment, the hole 10a is formed in the electrode rod 10, the rotation drive means 20 and the phase angle detection unit 31 are not provided, and The second embodiment is different from the first embodiment in that the same misalignment detection unit 38 as that of the fourth embodiment is provided.

In the electrolytic processing apparatus 105 according to the fifth embodiment, since the electrode rod 10 is not rotated, the machining by the electrode rod 10 is biased toward a part of the electric field uneven distribution region E side in the circumferential direction.
Furthermore, in this embodiment, the hole 10a penetrated to the electrode rod 10 in radial direction is formed. The hole 10a communicates the inside and outside of the electrode rod 10 on the opposite side across the axis O of the electric field uneven distribution region E, and the electrolyte L flowing inside the electrode rod 10 passes through the hole 10a. 10 flows out.

  At this time, the electrolytic solution L that has flowed out of the hole 10 a applies a fluid action force to the inner wall surface 202 of the processing hole 201, so that the reaction force is applied to the electrode rod 10. As a result, the electrode rod 10 is displaced so as to bend in the direction of the reaction force, and the current density distribution between the tip surface 11 of the electrode and the inner wall surface 202 of the processing hole 201 is locally increased according to the amount of displacement. As a result, the machining amount on the side where the electrode rod 10 is displaced by the reaction force at the circumferential position of the electrode rod 10 becomes large, that is, the machining amount on the electric field unevenly distributed region E side becomes larger.

  The magnitude of the reaction force exerted on the electrode rod 10 is a value corresponding to the flow rate of the electrolytic solution L flowing inside the electrode. Therefore, the amount of displacement of the electrode rod 10 can be adjusted by adjusting the flow rate of the electrolytic solution L. Can be determined. Therefore, the amount of reaction force exerted on the electrode rod 10 can be adjusted by controlling the supply amount of the electrolytic solution L from the electrolytic solution supply unit 36 by the liquid amount control unit 37, and thereby, as a bent hole. It becomes possible to adjust the curvature of the processing hole 201.

  As described above, when the machining amount on the side where the electrode rod 10 is displaced by the reaction force of the electrolytic solution L derived from the hole 10a increases, the machining hole 201 is processed deeper toward the side with the larger machining amount. Therefore, the curvature of the bending hole can be adjusted.

Such a liquid amount control unit 37 changes the supply amount of the electrolytic solution L by the electrolytic solution supply unit 36 in accordance with the positional shift amount detected by the positional shift detection unit 38.
That is, when the curvature of the processed hole 201 as the bent hole is small, the supply amount of the electrolytic solution L is increased. Thereby, the electrode rod 10 is displaced so as to bend toward the electric field uneven distribution region E side by the reaction force. As a result, the machining amount on the electric field uneven distribution region E side becomes larger, and the curvature of the machining hole 201 becomes larger.
On the other hand, when the curvature of the processing hole 201 as a bending hole is too large, the supply amount of the electrolytic solution L is decreased. As a result, the electric field unevenly distributed region E moves away from the inner wall surface 202 of the processing hole 201. As a result, the amount of processing on the electric field unevenly distributed region E side becomes small, and the curvature of the processing hole 201 decreases.

  As a result, the shape of the processed hole 201 approaches the initial target shape of the processed hole 201. In other words, in the present embodiment, an arbitrarily curved machining hole 201 is obtained by feeding back the difference between the actual machining hole 201 shape and the target machining hole 201 shape to the supply amount of the electrolyte L. be able to. As a result, the processing accuracy of the processing hole 201 can be improved.

  As mentioned above, although embodiment of this invention was described in detail, unless it deviates from the technical idea of this invention, it is not limited to these, A some design change etc. are possible.

  In the embodiment, the case where the electrode rod 10 is rotated only in one direction has been described. However, the electrode rod 10 may be configured to rotate in a predetermined rotation angle range. In this case, the rotation driving means 20 reverses the rotation direction of the electrode rod 10 when the electric field uneven distribution region E in the electrode rod 10 reaches both ends of a predetermined rotation angle, that is, the swing end. Further, the rotation driving means 20 reverses the rotation direction of the electrode rod 10 and then accelerates the rotation speed of the electrode rod 10, so that when the electric field uneven distribution region E reaches the middle of a predetermined rotation angle range, The rotational speed of the rod 10 is reduced.

  Therefore, in the middle of the predetermined rotation angle range, the electric field uneven distribution region E of the electrode rod 10 passes at a high speed. As a result, the amount of electrolysis on the inner wall surface 202 of the processing hole 201 corresponding to the middle of the predetermined rotation angle range is increased. When such electrolytic processing is continuously performed, the processed hole 201 is processed deeper in the direction in which the amount of electrolysis is larger, and as a result, a bent hole can be formed.

  Such peristaltic rotation of the electrolytic rod 10 can be easily realized by rotating the electrolytic rod 10 according to a predetermined program by the rotation driving means 20. Further, for example, the rotational phase angle of the electrolytic rod 10 may be detected by, for example, a proximity sensor, and the electrolytic rod 10 may be rotated by rotating the rotational acceleration of the electrolytic rod 10 based on this. That is, the electrolytic rod 10 can be easily rotated in a peristaltic manner by switching between two types of angular velocities, the angular velocity of rotation (ω +) and the opposite angular velocity (ω−) depending on the phase.

DESCRIPTION OF SYMBOLS 10 Electrode rod 10a Hole part 11 Front end surface 12 Electrode main body 13 Insulating layer 14 Non-insulating part 20 Rotation drive means 21 Drive source 22 Drive source body 23 Output shaft 24 Transmission mechanism 25 First gear 26 Second gear 27 First elliptic eccentric cam 28 Second Elliptic Eccentric Cam 29 Belt 30 Rotation Control Unit 31 Phase Angle Detection Unit 32 Detected Unit 33 Proximity Sensor 34 Movement Mechanism 35 Voltage Application Unit 36 Electrolyte Supply Unit 37 Liquid Volume Control Unit 38 Misalignment Detection Unit 40 Eccentric Transmission Mechanism DESCRIPTION OF SYMBOLS 101 Electrolytic processing apparatus 102 Electrolytic processing apparatus 103 Electrolytic processing apparatus 104 Electrolytic processing apparatus 105 Electrolytic processing apparatus 200 Workpiece 201 Processed hole 202 Inner wall surface E Electric field uneven distribution area L Electrolytic solution O Axis line r _A First drive radius r _B Second drive radius

Claims (5)

The electrolyte solution flows out from the tip of a cylindrical electrode rod extending along the axis, and a DC voltage is applied between the tip of the electrode rod and the inner wall surface of the workpiece while feeding the electrode rod to the tip side. An electro-chemical machining apparatus for performing a drilling process on the workpiece,
The electrode rod has an electric field uneven distribution structure that forms an electric field uneven distribution region in which electric field strength is unevenly distributed in a part in the circumferential direction of the tip when the DC voltage is applied,
Rotation drive means for rotating the electrode rod so that the rotation speed of the electrode rod changes according to the rotation phase angle around the axis of the electrode rod;
A phase angle detector that detects a rotational phase angle of the electrode rod ,
The rotation driving means is
A drive source that is driven to rotate the electrode rod around the axis; and
A rotation control unit that drives the drive source so that the rotation speed changes according to the rotation phase angle of the electrode rod;
The said rotation control part changes the rotational speed of the said electrode rod by the said drive source according to the rotation phase angle which the said phase angle detection part detects, The electrolytic processing apparatus characterized by the above-mentioned . The electrolyte solution flows out from the tip of a cylindrical electrode rod extending along the axis, and a DC voltage is applied between the tip of the electrode rod and the inner wall surface of the workpiece while feeding the electrode rod to the tip side. An electro-chemical machining apparatus for performing a drilling process on the workpiece,
The electrode rod has an electric field uneven distribution structure that forms an electric field uneven distribution region in which electric field strength is unevenly distributed in a part in the circumferential direction of the tip when the DC voltage is applied,
Rotation drive means for rotating the electrode rod so that the rotation speed of the electrode rod changes according to the rotation phase angle around the axis of the electrode rod ;
A detected portion provided integrally with the electrode rod;
A proximity sensor for detecting the approach of the detected part accompanying the rotation of the electrode rod ,
The rotation driving means includes
A drive source that is driven to rotate the electrode rod around the axis; and
A rotation control unit that drives the drive source so that the rotation speed changes according to the rotation phase angle of the electrode rod;
The said rotation control part changes the rotational speed of the said electrode rod by the said drive source according to the approach of the said to-be-detected part which the said proximity sensor detects, The electrolytic processing apparatus characterized by the above-mentioned . The electrolyte solution flows out from the tip of a cylindrical electrode rod extending along the axis, and a DC voltage is applied between the tip of the electrode rod and the inner wall surface of the workpiece while feeding the electrode rod to the tip side. An electro-chemical machining apparatus for performing a drilling process on the workpiece,
The electrode rod has an electric field uneven distribution structure that forms an electric field uneven distribution region in which electric field strength is unevenly distributed in a part in the circumferential direction of the tip when the DC voltage is applied,
Rotation drive means for rotating the electrode rod so that the rotation speed of the electrode rod changes according to the rotation phase angle around the axis of the electrode rod ;
A displacement detection unit that detects a displacement amount of a machining hole formed in the workpiece ,
The rotation driving means is
A drive source that is driven to rotate the electrode rod around the axis; and
A rotation control unit that drives the drive source so that the rotation speed changes according to the rotation phase angle of the electrode rod;
The said rotation control part changes the rotational speed of the said electrode rod by the said drive source according to the amount of position shifts which the said position shift detection part detects, The electrolytic processing apparatus characterized by the above-mentioned . The electrolyte solution flows out from the tip of a cylindrical electrode rod extending along the axis, and a DC voltage is applied between the tip of the electrode rod and the inner wall surface of the workpiece while feeding the electrode rod to the tip side. An electro-chemical machining apparatus for performing a drilling process on the workpiece,
The electrode rod has an electric field uneven distribution structure that forms an electric field uneven distribution region in which electric field strength is unevenly distributed in a part in the circumferential direction of the tip when the DC voltage is applied,
Rotation drive means for rotating the electrode rod so that the rotation speed of the electrode rod changes according to the rotation phase angle around the axis of the electrode rod ,
The rotation driving means is
A driving source;
A first elliptic eccentric cam rotated by the drive source at a constant rotational speed;
A second elliptic eccentric cam provided integrally with the electrode rod and rotatable about the axis together with the electrode rod;
An electrolytic processing apparatus comprising: a belt wound around the first elliptical eccentric cam and the second elliptical eccentric cam and transmitting the rotation of the first elliptical eccentric cam to the second elliptical eccentric cam . The electrolyte solution flows out from the tip of a cylindrical electrode rod extending along the axis, and a DC voltage is applied between the tip of the electrode rod and the inner wall surface of the workpiece while feeding the electrode rod to the tip side. An electro-chemical machining apparatus for performing a drilling process on the workpiece,
The electrode rod is
While having an electric field uneven distribution structure that forms an electric field uneven distribution region in which electric field strength is unevenly distributed in a part of the circumferential direction of the tip when the DC voltage is applied,
On the opposite side of the electric field uneven distribution structure across the axis, a hole for communicating the inside and outside of the electrode rod is formed,
An electrolyte supply unit for supplying the electrolyte to the electrode rod;
A liquid amount control unit for changing the supply amount of the electrolyte solution of the electrolyte solution supply unit;
A positional deviation detection unit for detecting a positional deviation amount of a machining hole formed in the workpiece;
The electrolytic processing apparatus, wherein the liquid amount control unit changes a supply amount of the electrolytic solution by the electrolytic solution supply unit according to a positional shift amount detected by the positional shift detection unit.

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