JP5936017B2 - Light emitting device and projector - Google Patents

Description

  The present invention relates to a light emitting device and a projector.

  A super luminescent diode (hereinafter also referred to as “SLD”) is incoherent like a normal light emitting diode and has a broad spectrum shape, but has a single optical output characteristic similar to that of a semiconductor laser. This is a semiconductor light emitting device capable of obtaining an output up to about several hundreds mW.

  The SLD is used as a light source for a projector, for example. In order to realize a light source with high output and small etendue, it is desirable that light emitted from a plurality of gain regions travel in the same direction. In Patent Document 1, a gain region having a linear shape and a gain region having a shape bent by passing through a reflecting surface are combined to emit light from light emitting portions (light emitting points) of two gain regions. The light to be transmitted is traveling in the same direction.

JP 2010-3833 A

  In order to reduce the loss of the optical system and reduce the number of parts, there has been proposed a projector of a type in which an SLD is disposed directly under a light valve and condensing and uniform illumination are simultaneously performed using a lens array. In such a type of projector, it is necessary to arrange a light emitting portion in accordance with the lens array.

  In the technique described in Patent Document 1, it is difficult to arrange the intervals between a plurality of light emitting portions in accordance with various lens arrays having different pitches, and the technique cannot be applied to the projector of the above-described method.

  One of the objects according to some aspects of the present invention is to provide a light emitting device that can increase the interval between a plurality of light emitting portions and can be applied to a projector of a type in which the light emitting device is arranged directly under a light valve. There is to do. Another object of some embodiments of the present invention is to provide a projector having the light-emitting device.

The light emitting device according to the present invention is
A first layer that generates light by injecting current and forms a waveguide of the light;
A second layer and a third layer sandwiching the first layer and suppressing leakage of the light;
An electrode for injecting the current into the first layer;
Including
The optical waveguide obtained by the electrode has a first region having a strip-like and linear shape, a strip-like second region, and a strip-like third region,
The first region and the second region are connected by a first reflecting portion provided on a side surface of the first layer,
The first region and the third region are different from the side surface on which the first reflecting portion is provided.
Connected by a second reflector provided on the side of the layer,
The second region and the third region are side surfaces different from the side surface on which the first reflecting unit and the second reflecting unit are provided, and are connected to the side surface of the first layer serving as an emission surface,
The first region is provided such that a longitudinal direction of the first region is parallel to the emission surface,
The first light emitted from the second region on the emission surface and the second light emitted from the third region on the emission surface are emitted in the same direction.

  According to such a light emitting device, for example, as compared with a case where the first region is not parallel to the emission surface, the increase in the total length of the gain region is suppressed, and the interval between the light emitting portions is increased. Can do. That is, the interval between the plurality of light emitting portions can be increased while reducing the size. Thereby, it is not necessary to flow a great amount of current, and power consumption can be suppressed. Furthermore, the production cost can be suppressed without wasting resources.

In the light emitting device according to the present invention,
The emission surface may have a reflectance lower than that of the first reflecting portion and the second reflecting portion in a wavelength band of light generated in the first layer.

  According to such a light emitting device, the interval between the plurality of light emitting portions can be increased.

In the light emitting device according to the present invention,
The first region and the second region are the first region, the second layer, and the third layer, as viewed from the stacking direction of the first layer, the first region, and the second region. Tilted at an angle and connected to the first reflector,
The first region and the third region are the first region, the second layer, and the third layer, as viewed from the stacking direction of the first layer, the first region, and the third region, Tilted at two angles and connected to the second reflecting part,
The first angle and the second angle may be greater than a critical angle.

  According to such a light emitting device, the first reflection unit and the second reflection unit can totally reflect light generated in the first region, the second region, and the third region. Therefore, it is possible to suppress light loss in the first reflecting portion and the second reflecting portion, and it is possible to reflect light efficiently.

In the light emitting device according to the present invention,
The second region and the third region may be connected to the emission surface in the same direction as viewed from the stacking direction of the first layer, the second layer, and the third layer.

  According to such a light emitting device, the interval between the plurality of light emitting portions can be increased.

In the light emitting device according to the present invention,
The second region and the third region are inclined with respect to a normal to the emission surface and are connected to the emission surface when viewed from the stacking direction of the first layer, the second layer, and the third layer. be able to.

  According to such a light emitting device, light generated in the first region, the second region, and the third region can be prevented from being subjected to multiple reflection. As a result, since a direct resonator cannot be configured, laser oscillation of light generated in the first region, the second region, and the third region can be suppressed.

In the light emitting device according to the present invention,
The second region and the third region are connected to the emission surface in parallel to a perpendicular to the emission surface as seen from the stacking direction of the first layer, the second layer, and the third layer. be able to.

  According to such a light emitting device, it is possible to easily design the optical system in the subsequent stage.

In the light emitting device according to the present invention,
The second region is
A linear first portion and a linear second portion;
The third region is
A linear third portion and a linear fourth portion;
The first portion and the second portion are provided on a side surface of the first layer different from the side surface on which the first reflecting portion is provided, the side surface on which the second reflecting portion is provided, and the emission surface. Connected at the third reflecting portion,
The third portion and the fourth portion include the side surface on which the first reflecting portion is provided, the side surface on which the second reflecting portion is provided, the side surface on which the third reflecting portion is provided, and the emission surface. May be differently connected by a fourth reflecting portion provided on the side surface of the first layer.

  According to such a light emitting device, the light generated in the first region, the second region, and the third region is totally transmitted in the first reflecting unit, the second reflecting unit, the third reflecting unit, and the fourth reflecting unit. It can be easily reflected.

In the light emitting device according to the present invention,
The exit surface may have a reflectance lower than that of the third reflecting portion and the fourth reflecting portion in a wavelength band of light generated in the first layer.

  According to such a light emitting device, the interval between the plurality of light emitting portions can be increased.

In the light emitting device according to the present invention,
The first part and the second part are as viewed from the stacking direction of the first layer, the second layer, and the third layer. Connected at a third angle,
The third part and the fourth part are as viewed from the stacking direction of the first layer, the second layer, and the third layer, with respect to the perpendicular to the side surface on which the fourth reflecting portion is provided. Connected at an angle of 4th,
The third angle and the fourth angle may be greater than or equal to a critical angle.

  According to such a light emitting device, the third reflection unit and the fourth reflection unit can totally reflect light generated in the first region, the second region, and the third region. Therefore, it is possible to suppress light loss in the third reflecting portion and the fourth reflecting portion, and it is possible to reflect light efficiently.

In the light emitting device according to the present invention,
The length of the first region may be larger than the length of the second region and the length of the third region.

  According to such a light emitting device, the interval between the plurality of light emitting portions can be reliably increased.

The light emitting device according to the present invention is
Including a laminate having a first layer and a second layer and a third layer sandwiching the first layer;
The first layer is
Having a first gain region, a second gain region, and a third gain region for generating and guiding light;
The second layer and the third layer are:
A layer that suppresses leakage of light generated in the first gain region, the second gain region, and the third gain region;
The first layer is
Having a first surface, a second surface, and a third surface forming an outer shape of the laminate;
In the wavelength body of light generated in the first gain region, the second gain region, and the third gain region, the reflectance of the first surface is the reflectance of the second surface and the reflection of the third surface. Lower than rate,
The first gain region is provided in parallel to the first surface from the second surface to the third surface when viewed from the stacking direction of the stacked body,
The second gain region overlaps with the first gain region on the second surface, and is provided from the second surface to the first surface;
The third gain region overlaps the first gain region on the third surface, and is provided from the third surface to the first surface,
The second gain region and the third gain region are separated from each other, and are inclined with the same inclination and connected to the first surface when viewed from the stacking direction of the stacked body.

  According to such a light emitting device, it is possible to increase the interval between the plurality of light emitting portions while reducing the size.

The projector according to the present invention is
A light emitting device according to the present invention;
A microlens that collects the light emitted from the light emitting device;
A light modulation device that modulates light collected by the microlens according to image information;
A projection device for projecting an image formed by the light modulation device;
including.

  According to such a projector, the alignment of the lens array is easy, and the light modulation device can be irradiated with good uniformity.

The top view which shows typically the light-emitting device which concerns on this embodiment. FIG. 3 is a cross-sectional view schematically showing the light emitting device according to the embodiment. Sectional drawing which shows typically the manufacturing process of the light-emitting device which concerns on this embodiment. The top view which shows typically the manufacturing process of the light-emitting device which concerns on this embodiment. Sectional drawing which shows typically the manufacturing process of the light-emitting device which concerns on this embodiment. The top view which shows typically the light-emitting device which concerns on the 1st modification of this embodiment. Sectional drawing which shows typically the light-emitting device which concerns on the 2nd modification of this embodiment. The top view which shows typically the light-emitting device which concerns on the 3rd modification of this embodiment. 1 is a diagram schematically showing a projector according to an embodiment. 1 is a diagram schematically showing a projector according to an embodiment. FIG. 2 is a diagram schematically showing a light source of a projector according to the present embodiment. FIG. 2 is a cross-sectional view schematically showing a light source of the projector according to the embodiment. FIG. 2 is a cross-sectional view schematically showing a light source of the projector according to the embodiment. FIG. 2 is a cross-sectional view schematically showing a light source of the projector according to the embodiment.

  Preferred embodiments of the present invention will be described below with reference to the drawings.

1. First, the light emitting device according to the present embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing the light emitting device 100 according to the present embodiment. 2 is a cross-sectional view taken along the line II-II of FIG. 1 schematically showing the light emitting device 100 according to the present embodiment. In FIG. 1, the second electrode 114 is not shown for convenience.

  Hereinafter, a case where the light emitting device 100 is an InGaAlP-based (red) SLD will be described. Unlike a semiconductor laser, an SLD can prevent laser oscillation by suppressing the formation of a resonator due to end face reflection. Therefore, speckle noise can be reduced.

  As shown in FIGS. 1 and 2, the light emitting device 100 can include a stacked body 120, a first electrode 112, and a second electrode 114.

  The stacked body 120 includes a substrate 102, a second layer 104 (hereinafter also referred to as “first cladding layer 104”), a first layer 106 (hereinafter also referred to as “active layer 106”), and a third layer 108 (hereinafter referred to as “first cladding layer 104”). A second cladding layer 108 ”), a fourth layer 110 (hereinafter also referred to as“ contact layer 110 ”), and an insulating layer 116.

  As the substrate 102, for example, a first conductivity type (for example, n-type) GaAs substrate or the like can be used.

  The first cladding layer 104 is formed on the substrate 102. As the first cladding layer 104, for example, an n-type InGaAlP layer can be used. Although not shown, a buffer layer may be formed between the substrate 102 and the first cladding layer 104. As the buffer layer, for example, an n-type GaAs layer, an AlGaAs layer, an InGaP layer, or the like can be used. The buffer layer can improve the crystallinity of the layer formed thereabove.

  The active layer 106 is formed on the first cladding layer 104. The active layer 106 is sandwiched between the first cladding layer 104 and the second cladding layer 108. The active layer 106 has, for example, a multiple quantum well (MQW) structure in which three quantum well structures each composed of an InGaP well layer and an InGaAlP barrier layer are stacked.

  The planar shape of the active layer 106 is the same as the planar shape of the stacked body 120, for example. In the example shown in FIG. 1, the planar shape of the active layer 106 is a hexagon, and the first surface 131, the second surface 132, the third surface 133, the fourth surface 134, the fifth surface 135, and the sixth surface 136. have. The surfaces 131 to 136 are surfaces that are not in contact with the first cladding layer 104 or the second cladding layer 108 in a planar shape among the surfaces of the active layer 106, and are surfaces that form the outer shape of the stacked body 120. The surfaces 131 to 136 are flat surfaces, which may be provided on the side surface (side wall) of the active layer 106 as viewed from the stacking direction of the stacked body 120, in other words, the side surface portion of the stacked body 120.

  In the example shown in FIG. 1, the surfaces 134 and 135 are orthogonal to the surface 131. The surface 136 faces the surface 131. The surface 132 is connected to the surfaces 134 and 136 and is inclined with respect to the surface 131. The surface 133 is connected to the surfaces 135 and 136 and is inclined with respect to the surface 131. For example, the surfaces 131, 134, 135, and 136 are formed by cleavage, and the surfaces 132 and 133 are formed by an etching technique.

  A part of the active layer 106 constitutes a first gain region 150, a second gain region 160, and a third gain region 170. The gain regions 150, 160, and 170 can generate light, and the light can be guided through the gain regions 150, 160, and 170 while receiving gain. That is, it can be said that the gain regions 150, 160, and 170 are waveguides for light generated in the active layer 106.

  As shown in FIG. 1, the first gain region 150 has a strip-like and linear longitudinal shape (a shape having a longitudinal direction and a lateral direction) having a predetermined width in a plan view from the lamination direction of the laminate 120. It has. Further, when viewed from the stacking direction of the stacked body 120 (in plan view), the longitudinal direction of the first gain region 150 from the second surface 132 toward the third surface 133 is parallel to the first surface 131. Is provided. The first gain region 150 has a first end surface 181 provided at a connection portion with the second surface 132 and a second end surface 182 provided at a connection portion with the third surface 133. Note that the longitudinal direction of the first gain region 150 is, for example, a straight line extending direction passing through the center of the first end surface 181 and the center of the second end surface 182 in plan view from the stacking direction of the stacked body 120. is there. Moreover, the extending direction of the boundary line of the first gain region 150 (and the portion excluding the first gain region 150) may be used.

  Note that “the first gain region 150 is parallel to the first surface 131” means that the inclination angle of the first gain region 150 with respect to the first surface 131 is ± 1 ° in plan view in consideration of manufacturing variations and the like. It means that it is within.

  The first gain region 150 is connected to the second surface 132 at a first angle α <b> 1 with respect to the perpendicular P <b> 2 of the second surface 132 in a plan view from the stacking direction of the stacked body 120. In other words, it can be said that the longitudinal direction of the band-like shape of the first gain region 150 has an angle α1 with respect to the perpendicular P2. Further, the first gain region 150 is connected to the third surface 133 by being inclined at the second angle α2 with respect to the perpendicular P3 of the third surface 133. In other words, it can be said that the longitudinal direction of the band-like shape of the first gain region 150 has an angle α2 with respect to the perpendicular P3.

  The length of the first gain region 150 is larger than the length of the second gain region 160 and the length of the third gain region 170. The length of the first gain region 150 may be equal to or greater than the sum of the length of the second gain region 160 and the length of the third gain region 170. The “length of the first gain region 150” can be said to be the distance between the center of the first end surface 181 and the center of the second end surface 182. Similarly, for other gain regions, the length can also be said to be the distance between the centers of the two end faces.

  The second gain region 160 has, for example, a belt-like and linear longitudinal shape having a predetermined width from the second surface 132 to the first surface 131 in a plan view from the stacking direction of the stacked body 120. The second gain region 160 has a third end surface 183 provided at a connection portion with the second surface 132 and a fourth end surface 184 provided at a connection portion with the first surface 131. The longitudinal direction of the second gain region 160 is, for example, a straight line extending direction passing through the center of the third end surface 183 and the center of the fourth end surface 184 in the plan view of the stacked body 120. Moreover, the extending direction of the boundary line of the second gain region 160 (and the portion excluding the second gain region 160) may be used. The third end surface 183 of the second gain region 160 overlaps the first end surface 181 of the first gain region 150 on the second surface 132. In the illustrated example, the first end surface 181 and the third end surface 183 completely overlap.

For example, the second gain region 160 is connected to the second surface 132 at a first angle α1 with respect to the perpendicular P2 in a plan view from the stacking direction of the stacked body 120. In other words, it can be said that the longitudinal direction of the second gain region 160 has an angle α1 with respect to the perpendicular P2. That is, the angle of the first gain region 150 with respect to the perpendicular P2 and the angle of the second gain region 160 with respect to the perpendicular P2 are the same within the range of manufacturing variations. The first angle α1 is an acute angle and is not less than the critical angle. Thereby, the second surface 132 can totally reflect the light generated in the gain regions 150, 160, and 170. Note that “the angle of the first gain region 150 with respect to the perpendicular P2 is the same as the angle of the second gain region 160 with respect to the perpendicular P2” is, for example, within about ± 2 ° in consideration of manufacturing variations such as etching. It means that.

  The second gain region 160 is connected to the first surface 131 at an angle β with respect to the perpendicular P1 of the first surface 131 in a plan view from the stacking direction of the stacked body 120. In other words, it can be said that the longitudinal direction of the second gain region 160 has an angle β with respect to the perpendicular P1. The angle β is an acute angle that is smaller than the critical angle. The second gain region 160 may be parallel (β = 0 °) to the perpendicular line P1 of the first surface 131.

  The third gain region 170 has, for example, a strip-like and linear longitudinal shape having a predetermined width from the third surface 133 to the first surface 131 in a plan view from the stacking direction of the stacked body 120. That is, the third gain region 170 has a fifth end surface 185 provided at a connection portion with the third surface 133 and a sixth end surface 186 provided at a connection portion with the first surface 131. Note that the longitudinal direction of the third gain region 170 is, for example, a straight line extending direction passing through the center of the fifth end surface 185 and the center of the sixth end surface 186 in the plan view of the stacked body 120. Moreover, the extending direction of the boundary line of the third gain region 170 (and the portion excluding the third gain region 170) may be used. The fifth end surface 185 of the third gain region 170 overlaps the second end surface 182 of the first gain region 150 on the third surface 133. In the illustrated example, the second end face 182 and the fifth end face 185 are completely overlapped.

  The second gain region 160 and the third gain region 170 are separated from each other. In the example shown in FIG. 1, the fourth end surface 184 of the second gain region 160 and the sixth end surface 186 of the third gain region 170 are separated by a distance D.

  For example, the third gain region 170 is connected to the third surface 133 at a second angle α2 with respect to the perpendicular P3 in a plan view from the stacking direction of the stacked body 120. In other words, it can be said that the longitudinal direction of the third gain region 170 has an angle α2 with respect to the perpendicular P3. That is, the angle of the first gain region 150 with respect to the perpendicular P3 and the angle of the third gain region 170 with respect to the perpendicular P3 are the same within the range of manufacturing variations. The second angle α2 is an acute angle and is not less than the critical angle. Thereby, the third surface 133 can totally reflect the light generated in the gain regions 150, 160, and 170. Note that “the angle of the first gain region 150 with respect to the perpendicular P3 is the same as the angle of the third gain region 170 with respect to the perpendicular P3” is, for example, within about ± 2 ° in consideration of manufacturing variations such as etching. It means that.

  The third gain region 170 is connected to the first surface 131 at an angle β with respect to the perpendicular P1 in a plan view from the stacking direction of the stacked body 120. In other words, it can be said that the longitudinal direction of the third gain region 170 has an angle β with respect to the perpendicular P1. That is, the second gain region 160 and the third gain region 170 are connected to the first surface 131 in the same direction in plan view, and are parallel to each other. More specifically, the longitudinal direction of the second gain region 160 and the longitudinal direction of the third gain region 170 are parallel to each other. Thereby, the light 20 emitted from the fourth end surface 184 and the light 22 emitted from the sixth end surface 186 can travel in the same direction. It can be said that the end faces 184 and 186 are light emitting portions. Note that the third gain region 170 may be parallel to the perpendicular P1 of the first surface 131 (β = 0 °).

As described above, by setting the angles α1 and α2 to be equal to or greater than the critical angle and the angle β to be smaller than the critical angle, the reflectance of the first surface 131 is made to be higher than the reflectance of the second surface 132 and the reflectance of the third surface 133 Can be lowered. That is, the first surface 131 can be a light emitting surface, and the fourth end surface 184 and the sixth end surface 186 provided on the emitting surface emit light generated in the gain regions 150, 160, and 170. Can be a part. The second surface 132 and the third surface 133 can be reflective surfaces, and the first end surface 181 and the third end surface 183 provided on the reflective surface reflect light generated in the gain regions 150, 160, and 170. It can become a 1st reflection part. Similarly, the second end surface 182 and the fifth end surface 185 provided on the reflecting surface can serve as a second reflecting portion that reflects light generated in the gain regions 150, 160, and 170.

Although not shown, for example, the first surface 131 may be covered with an antireflection film, and the second surface 132 and the third surface 133 may be covered with a reflection film. As a result, the light generated in the gain regions 150, 160, and 170 is not totally reflected on the second surface 132 and the third surface 133, even under conditions such as an incident angle and a refractive index. The reflectance of the first surface 131 in the wavelength band of the light generated at 170 can be made lower than the reflectance of the second surface 132 and the reflectance of the third surface 133. Further, since the first surface 131 is covered with the antireflection film, it is possible to reduce the direct multiple reflection of the light generated in the gain regions 150, 160, and 170 between the fourth end surface 184 and the sixth end surface 186. . As a result, since a direct resonator cannot be formed, laser oscillation of light generated in the gain regions 150, 160, and 170 can be suppressed. As the reflection film and the antireflection film, a SiO ₂ layer, a Ta ₂ O ₅ layer, an Al ₂ O ₃ layer, a TiN layer, a TiO ₂ layer, a SiON layer, a SiN layer, or a multilayer film thereof can be used. Further, high reflectivity may be obtained by using the surfaces 132 and 133 as DBR (Distributed Bragg Reflector) formed by etching.

  Further, the angle β can be an angle larger than 0 °. As a result, light generated in the gain regions 150, 160, and 170 between the fourth end surface 184 and the sixth end surface 186 can be prevented from being directly subjected to multiple reflection. As a result, since a direct resonator cannot be configured, laser oscillation of light generated in the gain regions 150, 160, and 170 can be suppressed or prevented.

  As shown in FIG. 2, the second cladding layer 108 is formed on the active layer 106. As the second cladding layer 108, for example, a second conductivity type (for example, p-type) InGaAlP layer or the like can be used.

  For example, the p-type second cladding layer 108, the active layer 106 not doped with impurities, and the n-type first cladding layer 104 constitute a pin diode. Each of the first cladding layer 104 and the second cladding layer 108 is a layer having a larger forbidden band width and a smaller refractive index than the active layer 106. The active layer 106 has a function of generating light and guiding it while amplifying the light. The first cladding layer 104 and the second cladding layer 108 have a function of confining injected carriers (electrons and holes) and light (a function of suppressing light leakage) with the active layer 106 interposed therebetween.

  In the light emitting device 100, when a forward bias voltage of a pin diode is applied between the first electrode 112 and the second electrode 114 (current is injected), gain regions 150, 160, and 170 are generated in the active layer 106. In the gain regions 150, 160, and 170, recombination of electrons and holes occurs. This recombination causes light emission. With this generated light as a starting point, stimulated emission occurs in a chain, and the light intensity is amplified in the gain regions 150, 160, and 170.

For example, as shown in FIG. 1, light that is generated in the second gain region 160 and travels toward the second surface 132 is amplified in the second gain region 160, and then is amplified on the second surface 132 (end surfaces 181 and 183). Reflected and travels through the first gain region 150 toward the third surface 133. Further, the light is further reflected by the third surface 133 (end surfaces 182 and 185), travels through the third gain region 170, and is emitted from the sixth end surface 186 as the emitted light 22. At this time, the light intensity is also amplified in the gain regions 150 and 170. Similarly, light that occurs in the third gain region 170 and travels toward the third end surface 133 side is amplified in the third gain region 170, reflected on the third surface 133, and directed toward the second surface 132. Proceed through the 1 gain region 150. Then, the light is further reflected at the second surface 132, travels through the second gain region 160, and is emitted from the fourth end surface 184 as emitted light 20. At this time, the light intensity is also amplified in the gain regions 150 and 160.

  Some of the light generated in the second gain region 160 is directly emitted from the fourth end face 184 as the emitted light 20. Similarly, some of the light generated in the third gain region 170 is directly emitted from the sixth end face 186 as the emitted light 22. These lights are similarly amplified in the gain regions 160 and 170.

  The contact layer 110 is formed on the second cladding layer 108 as shown in FIG. That is, it can be said that the contact layer 110 is formed on the side opposite to the active layer 106 side of the second cladding layer 108. The contact layer 110 can be in ohmic contact with the second electrode 114. It can be said that the upper surface 113 of the contact layer 110 is a contact surface between the contact layer 110 and the second electrode 114. As the contact layer 110, for example, a p-type GaAs layer can be used.

  The contact layer 110 and a part of the second cladding layer 108 can form a columnar portion 111. The planar shape viewed from the stacking direction of the stacked body 120 of the columnar part 111 is the same as the planar shape viewed from the stacking direction of the stacked body 120 of the gain regions 150, 160, and 170. That is, it can be said that the planar shape of the upper surface 113 of the contact layer 110 is the same as the planar shape of the gain regions 150, 160, and 170. For example, the current path between the electrodes 112 and 114 is determined by the planar shape of the columnar section 111, and as a result, the planar shape of the gain regions 150, 160, and 170 is determined. Although not shown, the side surface of the columnar portion 111 can be inclined.

The insulating layer 116 is formed on the second cladding layer 108 and on the side of the columnar portion 111. The insulating layer 116 can be in contact with the side surface of the columnar portion 111. The upper surface of the insulating layer 116 is continuous with the upper surface 113 of the contact layer 110, for example. As the insulating layer 116, for example, a SiN layer, a SiO ₂ layer, a SiON layer, an Al ₂ O ₃ layer, a polyimide layer, or the like can be used.

  When the above material is used for the insulating layer 116, the current between the electrodes 112 and 114 can flow through the columnar portion 111 sandwiched between the insulating layers 116, avoiding the insulating layer 116. The insulating layer 116 can have a refractive index smaller than that of the active layer 106. In this case, the effective refractive index of the vertical cross section of the portion where the insulating layer 116 is formed is smaller than the effective refractive index of the vertical cross section of the portion where the insulating layer 116 is not formed, that is, the portion where the columnar portion 111 is formed. Thereby, light can be efficiently confined in the gain regions 150, 160, and 170 in the planar direction. Although not illustrated, the insulating layer 116 may be an air layer without using the above material. In this case, the air layer can function as the insulating layer 116.

  The first electrode 112 is formed on the entire lower surface of the substrate 102. The first electrode 112 can be in contact with a layer that is in ohmic contact with the first electrode 112 (the substrate 102 in the illustrated example). The first electrode 112 is electrically connected to the first cladding layer 104 via the substrate 102. The first electrode 112 is one electrode for driving the light emitting device 100. As the first electrode 112, for example, a layer in which a Cr layer, an AuGe layer, a Ni layer, and an Au layer are stacked in this order from the substrate 102 side can be used.

A second contact layer (not shown) is provided between the first cladding layer 104 and the substrate 102, and the second contact layer is placed on the opposite side of the substrate 102 by dry etching or the like from the opposite side of the substrate 102. It is also possible to expose the first electrode 112 on the second contact layer. Thereby, a single-sided electrode structure can be obtained. This form is particularly effective when the substrate 102 is insulative.

  The second electrode 114 is formed in contact with the upper surface 113 of the contact layer 110. Further, the second electrode 114 may be formed on the insulating layer 116 as shown in FIG. The second electrode 114 is electrically connected to the second cladding layer 108 via the contact layer 110. The second electrode 114 is the other electrode for driving the light emitting device 100. As the second electrode 114, for example, a layer in which a Cr layer, an AuZn layer, and an Au layer are stacked in this order from the contact layer 110 side can be used.

  As described above, the case of the InGaAlP system has been described as an example of the light emitting device 100 according to the present embodiment. However, the light emitting device 100 can use any material system capable of forming a light emission gain region. As the semiconductor material, for example, a semiconductor material such as AlGaN, GaN, InGaN, GaAs, AlGaAs, InGaAs, InGaAsP, or ZnCdSe can be used.

  The light emitting device 100 according to the present embodiment can be applied to a light source such as a projector, a display, a lighting device, and a measuring device.

  The light emitting device 100 according to the present embodiment has, for example, the following characteristics.

  According to the light emitting device 100, the first gain region 150 is provided in parallel to the first surface 131 where the light emitting portions 184 and 186 are formed from the second surface 132 to the third surface 133. Therefore, for example, compared with the case where the first gain region is not parallel to the first surface, it is possible to increase the interval between the light emitting portions while suppressing an increase in the total length of the gain region. That is, the interval between the plurality of light emitting portions can be increased while reducing the element length in the direction perpendicular to the light emitting surface. Thereby, in the light-emitting device 100, it is not necessary to flow an enormous current, and power consumption can be suppressed. Furthermore, the production cost can be suppressed without wasting resources. More specifically, in the light emitting device 100, the distance D between the light emitting portions 184 and 186 is set to 0.262 mm or more and less than 3 mm, the angle β is set to 5 ° or less (including 0 °), and the gain regions 150, 160, and 170 are set. The total length can be 1.5 mm or more and 3 mm or less.

  For example, when the total length of the gain region is increased, in general, the output can be increased, but a large amount of current must be passed in order to obtain an inversion distribution, and as a result, the optical output exceeds a predetermined light output. If not used, high efficiency cannot be achieved. That is, if the light output is less than the predetermined value, the efficiency is deteriorated. Furthermore, as the total length of the gain region increases, the area of the entire element increases, causing problems such as waste of resources and improvement of manufacturing costs. Such a problem can be avoided in the light emitting device 100 according to the present embodiment.

  According to the light emitting device 100, the first gain region 150 and the second gain region 160 are connected to the second surface 132 while being inclined at the first angle α <b> 1 with respect to the normal line P <b> 2 of the second surface 132. The third gain region 170 can be connected to the third surface 133 by being inclined at the second angle α2 with respect to the perpendicular P3 of the third surface 133. The angles α1 and α2 are greater than the critical angle. Therefore, the surfaces 132 and 133 can totally reflect light generated in the gain regions 150, 160, and 170. Therefore, in the light emitting device 100, light loss at the surfaces 132 and 133 (the end surfaces 181 and 183 and the end surfaces 182 and 185) can be suppressed, and light can be efficiently reflected. Furthermore, since the process of forming the reflective film on the surfaces 132 and 133 is not necessary, the manufacturing cost and the materials and resources necessary for manufacturing can be reduced.

  According to the light emitting device 100, the length of the first gain region 150 can be made larger than the length of the second gain region 160 and the length of the third gain region 170. Thereby, the space | interval D of the light emission parts 184 and 186 can be enlarged reliably.

2. Method for Manufacturing Light-Emitting Device Next, a method for manufacturing a light-emitting device according to this embodiment will be described with reference to the drawings. FIG. 3 is a cross-sectional view schematically showing the manufacturing process of the light emitting device 100 according to this embodiment, and corresponds to FIG. FIG. 4 is a plan view schematically showing the manufacturing process of the light emitting device 100 according to this embodiment, and corresponds to FIG. FIG. 5 is a cross-sectional view schematically showing the manufacturing process of the light emitting device 100 according to this embodiment, and corresponds to FIG.

As shown in FIG. 3, the first cladding layer 104, the active layer 106, the second cladding layer 108, and the contact layer 110 are epitaxially grown on the substrate 102 in this order. As a method for epitaxial growth, for example, MOCVD (Metal Organic Chemical Vapor Deposition) method, MBE (Molecular Beam Epitaxy) method or the like can be used.
The planar shapes of the substrate 102, the first cladding layer 104, the active layer 106, the second cladding layer 108, and the contact layer 110 are, for example, rectangular.

  As shown in FIG. 4, the contact layer 110, the second cladding layer 108, the active layer 106, the first cladding layer 104, and the substrate 102 are patterned to form the second surface 132 and the third surface 133. The patterning is performed using, for example, a photolithography technique and an etching technique. Although not shown, if the second surface 132 and the third surface 133 of the active layer 106 are exposed, a part of the cladding layer 104 and the substrate 102 may not be patterned. The surfaces 134, 135, and 136 may be formed at the same time as the surfaces 132 and 133 by patterning using a photolithography technique and an etching technique. May be formed.

  As shown in FIG. 5, the contact layer 110 and the second cladding layer 108 are patterned. By this step, the columnar portion 111 can be formed.

  As shown in FIG. 2, an insulating layer 116 is formed so as to cover the side surface of the columnar part 111. Specifically, first, an insulating member (not shown) is formed above the second cladding layer 108 (including the contact layer 110) by, for example, a CVD (Chemical Vapor Deposition) method, a coating method, or the like. Next, the upper surface 113 of the contact layer 110 is exposed using, for example, an etching technique. Through the above steps, the insulating layer 116 can be formed.

  Next, the second electrode 114 is formed on the contact layer 110 and the insulating layer 116. Next, the first electrode 112 is formed under the lower surface of the substrate 102. The first electrode 112 and the second electrode 114 are formed by, for example, a vacuum evaporation method. Note that the order of forming the first electrode 112 and the second electrode 114 is not particularly limited.

  The light emitting device 100 according to this embodiment can be manufactured through the above steps.

  According to the method for manufacturing the light emitting device 100, it is possible to obtain the light emitting device 100 capable of increasing the interval between the plurality of light emitting portions while reducing the size.

3. Next, a light emitting device according to a modification of the present embodiment will be described with reference to the drawings. Hereinafter, in the light emitting device according to the modified example of the present embodiment, members having the same functions as those of the constituent members of the light emitting device 100 according to the present embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

3.1. First, a light-emitting device according to a first modification of the present embodiment will be described with reference to the drawings. FIG. 6 is a plan view schematically showing a light emitting device 200 according to a first modification of the present embodiment. In FIG. 6, the second electrode 114 is not shown for convenience.

  In the example of the light emitting device 100, as shown in FIG. 1, the second gain region 160 is provided from the second surface 132 to the first surface 131 having a belt-like and linear longitudinal shape. Similarly, the third gain region 170 has a belt-like and linear longitudinal shape from the third surface 133 to the first surface 131. On the other hand, in the light emitting device 200, as shown in FIG. 6, the second gain region 160 is provided from the second surface 132 to the first surface 131 via the fourth surface 134, and the third gain region 170 is The third surface 133 to the first surface 131 are provided via the fifth surface 135. In the light emitting device 200, the fourth surface 134 and the fifth surface 135 are inclined with respect to the first surface 131 in plan view from the stacking direction of the stacked body 120. The surfaces 134 and 135 are formed by, for example, an etching technique.

  More specifically, the second gain region 160 includes a first gain portion 162 having a belt-like and straight longitudinal shape having a predetermined width from the second surface 132 to the fourth surface 134, and the fourth gain from the fourth surface 134. And a second gain portion 164 having a strip-like and linear longitudinal shape having a predetermined width up to one surface 131.

  The first gain portion 162 includes a third end surface 183 provided at a connection portion with the second surface 132 and a seventh end surface 187 provided at a connection portion with the fourth surface 134. The second gain portion 164 includes an eighth end surface 188 provided at a connection portion with the fourth surface 134 and a fourth end surface 184 provided at a connection portion with the first surface 131. For example, the seventh end surface 187 and the eighth end surface 188 completely overlap with each other on the fourth surface 134. In other words, the first gain portion 162 and the second gain portion 164 are connected by the fourth surface 134 (end surfaces 187 and 188). The fourth surface 134 (end surfaces 187 and 188) functions as a reflective surface (third reflective portion). Note that the longitudinal direction of the first gain portion 162 is, for example, a linear extending direction passing through the center of the third end surface 183 and the center of the seventh end surface 187 in the plan view of the stacked body 120. Moreover, the extending direction of the boundary line of the first gain portion 162 (and the portion excluding the first gain portion 162) may be used. Similarly, the longitudinal direction of the second gain portion 164 is, for example, the extending direction of a straight line passing through the center of the fourth end surface 184 and the center of the eighth end surface 188 in the plan view of the stacked body 120. Moreover, the extending direction of the boundary line of the second gain portion 164 (and the portion excluding the second gain portion 164) may be used.

  Each of the first gain portion 162 and the second gain portion 164 is connected to the fourth surface 134 at a third angle α3 with respect to the perpendicular P4 of the fourth surface 134 in plan view from the stacking direction of the stacked body 120. doing. In other words, it can be said that each of the longitudinal direction of the first gain portion 162 and the longitudinal direction of the second gain portion 164 has an angle α3 with respect to the perpendicular P4. The third angle α3 is an acute angle and is not less than the critical angle. Thereby, the fourth surface 134 can totally reflect the light generated in the gain regions 150, 160, and 170.

  The third gain region 170 includes a third gain portion 172 having a strip-like and straight longitudinal shape having a predetermined width from the third surface 133 to the fifth surface 135, and a predetermined gain from the fifth surface 135 to the first surface 131. And a fourth gain portion 174 having a strip-like and straight longitudinal shape having a width.

The third gain portion 172 includes a fifth end surface 185 provided at a connection portion with the third surface 133 and a ninth end surface 189 provided at a connection portion with the fifth surface 135. The fourth gain portion 174 has a tenth end surface 190 provided at a connection portion with the fifth surface 135 and a sixth end surface 186 provided at a connection portion with the first surface 131. For example, the ninth end surface 189 and the tenth end surface 190 completely overlap with each other on the fifth surface 135. In other words, the third gain portion 172 and the fourth gain portion 174 are connected by the fifth surface 135 (end surfaces 189 and 190). The fifth surface 135 (end surfaces 189 and 190) functions as a reflective surface (fourth reflective portion). The longitudinal direction of the third gain portion 172 is, for example, the extending direction of a straight line passing through the center of the fifth end surface 185 and the center of the ninth end surface 189 in the plan view of the stacked body 120. Moreover, the extending direction of the boundary line of the third gain portion 172 (and the portion excluding the third gain portion 172) may be used. Similarly, the longitudinal direction of the fourth gain portion 174 is, for example, an extending direction of a straight line passing through the center of the sixth end surface 186 and the center of the tenth end surface 190 in the plan view of the stacked body 120. Moreover, the extending direction of the boundary line of the fourth gain portion 174 (and the portion excluding the fourth gain portion 174) may be used.

  Each of the third gain portion 172 and the fourth gain portion 174 is connected to the fifth surface 135 by being inclined at a fourth angle α4 with respect to the perpendicular P5 of the fifth surface 135 in plan view from the stacking direction of the stacked body 120. doing. In other words, it can be said that each of the longitudinal direction of the third gain portion 172 and the longitudinal direction of the fourth gain portion 174 has an angle α4 with respect to the perpendicular P4. The fourth angle α4 is an acute angle and is not less than the critical angle. Thereby, the fifth surface 135 can totally reflect the light generated in the gain regions 150, 160, and 170.

  Each of the second gain portion 164 and the fourth gain portion 174 is inclined at an angle β with respect to the perpendicular P1 of the first surface 131 in a plan view from the stacking direction of the stacked body 120, and is parallel to each other. In other words, it can be said that each of the longitudinal direction of the second gain portion 164 and the longitudinal direction of the fourth gain portion has an angle β with respect to the perpendicular P1. The angle β may be 0 °.

  According to the light emitting device 200, the first angle α1 and the second angle α2 can be increased as compared with the example of the light emitting device 100. Therefore, in the light emitting device 200, the light generated in the gain regions 150, 160, and 170 can be easily totally reflected on the second surface 132 and the third surface 133.

3.2. Next, a light-emitting device according to a second modification of the present embodiment will be described with reference to the drawings. FIG. 7 is a cross-sectional view schematically showing a light emitting device 300 according to a second modification of the present embodiment, and corresponds to FIG.

  In the example of the light emitting device 100, as shown in FIG. 2, the light is refracted between a region where the insulating layer 116 is formed and a region where the insulating layer 116 is not formed, that is, a region where the columnar portion 111 is formed. A refractive index waveguide type that confines light by providing a rate difference has been described. On the other hand, in the light emitting device 300, the refractive index difference is not provided by forming the columnar portion 111, and the gain regions 150, 160, and 170 become the waveguide regions as they are as shown in FIG. It can be a waveguide type.

  That is, in the light emitting device 300, the contact layer 110 and the second cladding layer 108 do not form a columnar portion, and the insulating layer 116 is not formed on the side thereof. The insulating layer 116 is formed on the contact layer 110 other than above the gain regions 150, 160, and 170. That is, the insulating layer 116 has an opening above the gain regions 150, 160, and 170, and the upper surface 113 of the contact layer 110 is exposed in the opening. The second electrode 114 is formed on the exposed contact layer 110 and the insulating layer 116.

  The upper surface 113 of the contact layer 110 serving as a contact surface with the second electrode 114 has the same planar shape as the gain regions 150, 160, and 170. In the illustrated example, the current path between the electrodes 112 and 114 is determined by the planar shape of the contact surface between the second electrode 114 and the contact layer 110, and as a result, the planar shape of the gain regions 150, 160, and 170 is determined. ing. Although not shown, the second electrode 114 may not be formed on the insulating layer 116 but may be formed only on the contact layer 110 above the gain regions 150, 160, and 170.

  According to the light emitting device 300, as in the light emitting device 100, it is possible to increase the interval between the plurality of light emitting portions while achieving downsizing.

3.3. Next, a light-emitting device according to a third modification of the present embodiment will be described with reference to the drawings. FIG. 8 is a plan view schematically showing a light emitting device 400 according to a third modification of the present embodiment. In FIG. 8, the second electrode 114 is not shown for convenience.

  In the example of the light emitting device 100, as shown in FIG. 1, the first gain region 150, the second gain region 160, and the third gain region 170 are provided one by one. On the other hand, in the light emitting device 400, as shown in FIG. 8, a plurality of first gain regions 150, second gain regions 160, and third gain regions 170 are provided.

  That is, the first gain region 150, the second gain region 160, and the third gain region 170 can constitute a gain region group 450. In the light emitting device 400, a plurality of gain region groups 450 are provided. In the illustrated example, three gain region groups 450 are provided, but the number is not particularly limited.

  The plurality of gain region groups 450 are arranged along a direction orthogonal to the direction in which the perpendicular P1 of the first surface 131 extends. More specifically, in adjacent gain region groups 450, the distance between the sixth end surface 186 of one gain region group 450 and the fourth end surface 184 of the other gain region group 450 is D (optical They are arranged so that they are spaced apart from each other. Thereby, the light 20 and 22 can be easily incident on a lens array described later.

  According to the light emitting device 400, higher output can be achieved compared to the example of the light emitting device 100.

4). Next, the projector according to the present embodiment will be described with reference to the drawings. FIG. 9 is a diagram schematically illustrating a projector 700 according to the present embodiment. FIG. 10 is a diagram schematically showing a part of the projector 700 according to the present embodiment. In FIG. 9, for convenience, the casing that configures the projector 700 is omitted, and the light source 600 is simplified. In FIG. 10, for convenience, the light source 600, the lens array 702, and the liquid crystal light valve 704 are illustrated, and the light source 600 is illustrated in a simplified manner.

  As shown in FIG. 9, the projector 700 includes a red light source 600R that emits red light, green light, and blue light, a green light source 600G, and a blue light source 600B. The light sources 600R, 600G, and 600B include the light emitting device according to the present invention. In the following example, light sources 600R, 600G, and 600B having the light emitting device 400 as the light emitting device according to the present invention will be described.

  FIG. 11 is a diagram schematically showing a light source 600 of the projector 700 according to the present embodiment. 12 is a cross-sectional view taken along line XII-XII in FIG. 11 schematically showing the light source 600 of the projector 700 according to the present embodiment.

  As shown in FIGS. 11 and 12, the light source 600 can include a light emitting device 400, a base 610, and a submount 620.

  The two light emitting devices 400 and the submount 620 can form the structure 630. A plurality of structures 630 are provided, and are arranged in a direction (Y-axis direction) orthogonal to the arrangement direction (X-axis direction) of the end faces 184 and 186 serving as the light emitting portions of the light-emitting device 400, as shown in FIG. Yes. The structures 630 can be arranged so that the interval between the light emitting portions in the X-axis direction is the same as the interval between the light emitting portions in the Y-axis direction. Thereby, the light emitted from the light emitting device 400 can be easily incident on the lens array 702.

  The two light emitting devices 400 constituting the structure 630 are arranged with the submount 620 interposed therebetween. In the example illustrated in FIGS. 11 and 12, the two light emitting devices 400 are disposed so that the second electrodes 114 face each other with the submount 620 interposed therebetween. For example, wiring is formed on the surface of the submount 620 that contacts the second electrode 114. Thereby, a voltage can be individually supplied to each of the plurality of second electrodes 114. Examples of the material of the submount 620 include aluminum nitride and aluminum oxide.

  The base 610 supports the structure 630. In the example illustrated in FIG. 12, the base 610 is connected to the first electrodes 112 of the plurality of light emitting devices 400. Accordingly, the base 610 can function as a common electrode for the plurality of first electrodes 112. Examples of the material of the base 610 include copper and aluminum. Although not shown, the base 610 may be connected to a heat sink via a Peltier element.

  Note that the structure 630 is not limited to the example illustrated in FIGS. 11 and 12. For example, as illustrated in FIG. 13, the two light emitting devices 400 constituting the structural body 630 include a first electrode 112 of one light emitting device 400 and a second electrode of the other light emitting device 400 via a submount 620. 114 may be arranged so as to be opposed to each other. Moreover, as shown in FIG. 14, the 1st electrode 112 of the two light-emitting devices 400 may be arrange | positioned so that it may become a common electrode.

  As shown in FIG. 9, the projector 700 further includes lens arrays 702R, 702G, and 702B, transmissive liquid crystal light valves (light modulation devices) 704R, 704G, and 704B, and a projection lens (projection device) 708. Including.

  Light emitted from the light sources 600R, 600G, and 600B is incident on the lens arrays 702R, 702G, and 702B. As shown in FIG. 10, the lens array 702 can have a flat surface 701 on the light source 600 side on which the light 20 and 22 emitted from the light emitting portions 184 and 186 are incident. A plurality of flat surfaces 701 are provided corresponding to the plurality of light emitting portions 184 and 186, and are arranged at equal intervals. Further, the normal line of the flat surface 701 is inclined with respect to the optical axes of the lights 20 and 22. Therefore, the optical axis of the light 20 and 22 can be made orthogonal to the irradiation surface 705 of the liquid crystal light valve 704 by the flat surface 701. In particular, when the angle β formed by the first surface 131, the second gain region 160, and the third gain region 170 is not 0 °, the light 20 and 22 is transmitted from the light emitting portions 184 and 186 to the perpendicular P1 of the first surface 131. It is desirable that a flat surface 701 be provided since the light is emitted with an inclination.

  The lens array 702 can have a convex curved surface 703 on the liquid crystal light valve 704 side. A plurality of convex curved surfaces 703 are provided corresponding to the plurality of flat surfaces 701 and are arranged at equal intervals. The lights 20 and 22 whose optical axes are converted on the flat surface 701 can be superposed (partially superposed) by being condensed by the convex curved surface 703 or by reducing the diffusion angle. Thereby, the liquid crystal light valve 704 can be irradiated with good uniformity.

  As described above, the lens array 702 can focus the lights 20 and 22 by controlling the optical axes of the lights 20 and 22 emitted from the light source 600.

  As shown in FIG. 9, the light condensed by the lens arrays 702R, 702G, and 702B is incident on the liquid crystal light valves 704R, 704G, and 704B. Each of the liquid crystal light valves 704R, 704G, and 704B modulates incident light according to image information. The projection lens 708 enlarges and projects the image formed by the liquid crystal light valves 704R, 704G, and 704B onto the screen (display surface) 710.

  In addition, the projector 700 can include a cross dichroic prism (color light combining unit) 706 that combines light emitted from the liquid crystal light valves 704R, 704G, and 704B and guides the light to the projection lens 708.

  The three color lights modulated by the liquid crystal light valves 704R, 704G, and 704B are incident on the cross dichroic prism 706. This prism is formed by bonding four right-angle prisms, and a dielectric multilayer film that reflects red light and a dielectric multilayer film that reflects blue light are arranged in a cross shape on the inner surface thereof. These dielectric multilayer films combine the three color lights to form light representing a color image. The synthesized light is projected onto the screen 710 by the projection lens 708 which is a projection optical system, and an enlarged image is displayed.

  The projector 700 includes the light emitting device 400 that can increase the interval between the plurality of light emitting units while reducing the size. Therefore, in the projector 700, the alignment of the lens array 702 is easy, and the liquid crystal light valve 704 can be irradiated with good uniformity.

  In the above example, a transmissive liquid crystal light valve is used as the light modulation device. However, a light valve other than liquid crystal may be used, or a reflective light valve may be used. Examples of such a light valve include a reflective liquid crystal light valve and a digital micromirror device. Further, the configuration of the projection optical system is appropriately changed depending on the type of light valve used.

  The light source 600 and the lens array 702 can be modularized in an aligned state. Furthermore, the light source 600, the lens array 702, and the light valve 704 may be modularized.

  In addition, the light source 600 scans light on the screen with the light from the light source 600 to display a desired size image on the display surface. It can also be applied to a light source device of a projector.

  The above-described embodiments and modifications are merely examples, and the present invention is not limited to these. For example, it is possible to appropriately combine each embodiment and each modification.

  Although the embodiments of the present invention have been described in detail as described above, those skilled in the art will readily understand that many modifications are possible without substantially departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention.

10 light, 20 light, 22 light, 100 light emitting device, 102 substrate, 104 second layer, 1
06 1st layer, 108 3rd layer, 110 4th layer, 111 columnar section,
112 first electrode, 113 upper surface of the fourth layer, 114 second electrode, 116 insulating layer,
120 laminates, 131 first surface, 132 second surface, 133 third surface, 134 fourth surface, 135 fifth surface, 136 sixth surface, 150 first gain region, 160 second gain region,
162 first gain portion, 164 second gain portion, 170 third gain region,
172 3rd gain portion, 174 4th gain portion, 181 1st end face, 182 2nd end face, 183 3rd end face, 184 4th end face, 185 5th end face, 186 6th end face,
187 7th end surface, 188 8th end surface, 189 9th end surface, 190 10th end surface,
200 to 400 light emitting device, 450 gain region group, 600 light source, 610 base,
620 submount, 630 structure, 700 projector, 701 flat surface,
702 Lens array, 703 Convex curved surface, 704 Liquid crystal light valve, 705 Irradiation surface, 706 Cross dichroic prism, 708 Projection lens, 710 Screen

Claims (12)

A first layer that generates light by injecting current and forms a waveguide of the light;
A second layer and a third layer sandwiching the first layer and suppressing leakage of the light;
An electrode for injecting the current into the first layer;
Including
The optical waveguide has a strip-shaped first region, a strip-shaped second region, and a strip-shaped third region;
The first region and the second region are connected by a first reflecting portion provided on a side surface of the first layer,
The first region and the third region are connected by a second reflecting portion provided on a side surface of the first layer different from a side surface on which the first reflecting portion is provided,
The second region and the third region are side surfaces different from the side surface on which the first reflecting unit and the second reflecting unit are provided, and are connected to the side surface of the first layer serving as an emission surface,
Longitudinal direction of the first region is provided so as to be parallel for the exit surface,
The third layer has a columnar portion that is thicker than other portions of the third layer when viewed from the perpendicular direction of the stacking direction of the first layer, the second layer, and the third layer,
A side surface of the columnar portion is inclined with respect to a stacking direction of the first layer, the second layer, and the third layer. In claim 1,
The light emitting device, wherein the emission surface has a reflectance lower than that of the first reflecting portion and the second reflecting portion in a wavelength band of light generated in the first layer. In claim 1 or 2,
The first region and the second region are the first region, the second layer, and the third layer, as viewed from the stacking direction of the first layer, the first region, and the second region. Tilted at an angle and connected to the first reflector,
The first region and the third region are the first region, the second layer, and the third layer, as viewed from the stacking direction of the first layer, the first region, and the third region, Tilted at two angles and connected to the second reflecting part,
The light emitting device, wherein the first angle and the second angle are equal to or greater than a critical angle. In any one of Claims 1 thru | or 3,
The second region and the third region are connected to the emission surface in the same direction as viewed from the stacking direction of the first layer, the second layer, and the third layer. Light-emitting device. In claim 4,
The second region and the third region are inclined with respect to a normal to the emission surface and are connected to the emission surface when viewed from the stacking direction of the first layer, the second layer, and the third layer. A light emitting device characterized by that. In claim 4,
The second region and the third region are connected to the emission surface in parallel to a perpendicular to the emission surface as seen from the stacking direction of the first layer, the second layer, and the third layer. A light emitting device characterized by that. In any one of Claims 1 thru | or 6,
The second region is
A linear first portion and a linear second portion;
The third region is
A linear third portion and a linear fourth portion;
The first portion and the second portion are provided on a side surface of the first layer different from the side surface on which the first reflecting portion is provided, the side surface on which the second reflecting portion is provided, and the emission surface. Connected at the third reflecting portion,
The third portion and the fourth portion include the side surface on which the first reflecting portion is provided, the side surface on which the second reflecting portion is provided, the side surface on which the third reflecting portion is provided, and the emission surface. Are connected by a fourth reflecting portion provided on a side surface of the first layer. In claim 7,
The light emitting device, wherein the emission surface has a reflectance lower than that of the third reflecting portion and the fourth reflecting portion in a wavelength band of light generated in the first layer. In claim 7 or 8,
The first part and the second part are as viewed from the stacking direction of the first layer, the second layer, and the third layer. Connected at a third angle,
The third part and the fourth part are as viewed from the stacking direction of the first layer, the second layer, and the third layer, with respect to the perpendicular to the side surface on which the fourth reflecting portion is provided. Connected at an angle of 4th,
The light emitting device, wherein the third angle and the fourth angle are equal to or greater than a critical angle. In any one of Claims 1 thru | or 9,
The length of the 1st field is larger than the length of the 2nd field, and the length of the 3rd field, The light emitting device characterized by things. Including a laminate having a first layer and a second layer and a third layer sandwiching the first layer;
The first layer is
Having a first gain region, a second gain region, and a third gain region for generating and guiding light;
The second layer and the third layer are:
A layer that suppresses leakage of light generated in the first gain region, the second gain region, and the third gain region;
The first layer is
Having a first surface, a second surface, and a third surface forming an outer shape of the laminate;
In the wavelength body of light generated in the first gain region, the second gain region, and the third gain region, the reflectance of the first surface is the reflectance of the second surface and the reflection of the third surface. Lower than rate,
Wherein the first gain region, when viewed from the laminate direction of the laminate, from the second surface to the third surface, provided parallel against the said first surface,
The second gain region overlaps with the first gain region on the second surface, and is provided from the second surface to the first surface;
The third gain region overlaps the first gain region on the third surface, and is provided from the third surface to the first surface,
The second gain region and the third gain region are connected to the first surface apart from each other,
The third layer has a columnar portion that is thicker than other portions of the third layer when viewed from the perpendicular direction of the stacking direction of the first layer, the second layer, and the third layer,
A side surface of the columnar portion is inclined with respect to a stacking direction of the first layer, the second layer, and the third layer. A light emitting device according to any one of claims 1 to 11,
A microlens that collects the light emitted from the light emitting device;
A light modulation device that modulates light collected by the microlens according to image information;
A projection device for projecting an image formed by the light modulation device;
Including a projector.

Images